WO2017138479A1 - Dispositif de détection de position - Google Patents

Dispositif de détection de position Download PDF

Info

Publication number
WO2017138479A1
WO2017138479A1 PCT/JP2017/004168 JP2017004168W WO2017138479A1 WO 2017138479 A1 WO2017138479 A1 WO 2017138479A1 JP 2017004168 W JP2017004168 W JP 2017004168W WO 2017138479 A1 WO2017138479 A1 WO 2017138479A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
detection coil
coil
output
target
Prior art date
Application number
PCT/JP2017/004168
Other languages
English (en)
Japanese (ja)
Inventor
健一 古賀
Original Assignee
株式会社東海理化電機製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東海理化電機製作所 filed Critical 株式会社東海理化電機製作所
Publication of WO2017138479A1 publication Critical patent/WO2017138479A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature

Definitions

  • the present invention relates to a position detection device that detects the position of a detection target.
  • a position detection device detects a position of a detection target by disposing a metal part as a detection target to face a detection coil and detecting a change in inductance of the detection coil when the metal part moves. (See Patent Document 1).
  • the objective of this invention is providing the position detection apparatus which can ensure the precision of a position detection.
  • One aspect of the present invention is a position detection device, and includes a plurality of detection coils including a first detection coil and a second detection coil arranged farther from the detection target than the first detection coil.
  • Each of the first detection coil and the second detection coil is supplied with an AC voltage from a power source, and generates an output signal according to a distance from the detection target, and the plurality of detection coils and the first detection coil
  • a position calculator that calculates the position of the detection target based on output signals of the coil and the second detection coil, and the first detection coil and the second detection coil can detect the position of the detection target.
  • the output waveform of the first detection coil and the output waveform of the second detection coil generated over a wide detection range have different shapes.
  • the shapes of these coils were set so that the waveform of the output of the first detection coil and the waveform of the output of the second detection coil were equal. For this reason, it becomes possible to make the dynamic range of the detection circuit which detects the output of a 1st detection coil and a 2nd detection coil low. Therefore, when the outputs of the first detection coil and the second detection coil are detected by the detection circuit, it is possible to suppress an error in the value to be detected, so that the accuracy of position detection can be improved.
  • the position detection accuracy can be ensured in the position detection device.
  • the block diagram of the position detection apparatus of one Embodiment The side view of the board
  • the position detection device 1 is a type of eddy current sensor that detects the position of the detected portion 2 (the distance to the detected portion 2).
  • the eddy current sensor detects the position of the detected portion 2 based on a change in eddy current generated in the metal (in this example, the detection target 3).
  • the position detection device 1 of this example includes a power source 4, a first detection coil 5 and a second detection coil 6 to which an AC voltage Vc is applied from the power source 4, and the first detection coil 5 in accordance with the movement of the detected portion 2. And a detection object 3 that changes the magnetic field generated in the second detection coil 6.
  • the detection object 3 is made of, for example, a plate-like member (conductor plate) made of metal.
  • the detection target 3 in this example is interlocked with the detected portion 2 by being attached and fixed to the detected portion 2.
  • the detection target 3 is moved along the axial direction (coil axis direction: arrow Z direction in FIG. 1) of the coil axis La of the first detection coil 5 (second detection coil 6) along with the movement of the detected portion 2.
  • a linear reciprocation that approaches or separates from the first detection coil 5 is possible.
  • the first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the axial direction of the coil axis La).
  • the first detection coil 5 is disposed closer to the detection target 3 than the second detection coil 6. This is because the output voltage (inductance) of the first detection coil 5 is used as a signal for position detection, and the second detection coil 6 is used as a reference coil of the first detection coil 5.
  • the first detection coil 5 and the second detection coil 6 are connected in series to the power supply 4.
  • the winding directions of the first detection coil 5 and the second detection coil 6 are reversed so that the directions of current flow are opposite to each other. That is, when the winding directions of the first detection coil 5 and the second detection coil 6 are opposite to each other, the first detection coil 5 and the second detection coil 6 generate magnetic fields in opposite directions.
  • the first detection coil 5 and the second detection coil 6 have a maximum value V1max (illustrated in FIG. 2) of the output (output signal V1) of the first detection coil 5 in the position detection range K of the detection target 3 (illustrated in FIG. 2). ) Have different shapes so as to have the same value (including the vicinity) as the maximum value V2max (shown in FIG. 2) of the output (output signal V2) of the second detection coil 6.
  • the second detection coil 6 is formed smaller than the first detection coil 5.
  • the small size means that the winding diameter of the first detection coil 5 is X1 and the winding diameter of the second detection coil 6 is X2, and the winding diameter (coil size) is small (X1> X2). .
  • the number of turns of the first detection coil 5 and the second detection coil 6 may be the same or different.
  • a detection circuit 7 for detecting voltages (output signals V1, V2) generated in the first detection coil 5 and the second detection coil 6 is connected to the first detection coil 5 and the second detection coil 6.
  • the detection circuit 7 of this example includes a voltage detection unit 7 a that detects the voltage of the first detection coil 5 and a voltage detection unit 7 b that detects the voltage of the second detection coil 6.
  • the voltage detector 7 a is connected between the input and output ends of the first detection coil 5, and the voltage detector 7 b is connected between the input and output ends of the second detection coil 6.
  • the position detection device 1 includes a position calculation unit 8 that calculates the position of the detection target 3 based on the outputs of the first detection coil 5 and the second detection coil 6.
  • the position calculation unit 8 detects the detection target 3 (detected unit) based on the output signal (output voltage) V1 supplied from the voltage detection unit 7a and the output signal (output voltage) V2 supplied from the voltage detection unit 7b.
  • the position of 2) is calculated. Specifically, the position calculation unit 8 obtains a value (V1 / V2) obtained by dividing the output signal V1 of the voltage detection unit 7a by the output signal V2 of the voltage detection unit 7b, and from this value, the first detection coil 5 is obtained. And the position of the detection target 3, that is, the position of the detected portion 2 is calculated.
  • the first detection coil 5 and the second detection coil 6 of this example the first detection coil 5 is provided on the first layer 10 a (for example, the surface) of the substrate 10, and the second detection coil 6 is By being provided on the second layer 10 b (for example, the back surface) of the substrate 10, they are arranged on the same substrate in a plan view.
  • the first detection coil 5 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 6 is formed only on the second layer 10 b of the substrate 10.
  • the detection target 3 is a position detection range of the position detection device 1 from a point P1 where the detection target 3 is closest to the first detection coil 5 to a point P2 which is farthest from the first detection coil 5. It is possible to move at K.
  • the detection target 3 moves linearly from the point P1 to the point P2 as the detection target 3 moves away from the first detection coil 5, the inductance of the first detection coil 5 gradually increases, and the first detection coil 5 Output signal V1 rises in a curved line from V1min to V1max.
  • the inductance of the second detection coil 6 gradually decreases, and the output signal V2 of the second detection coil 6 decreases in a curved manner from V2max to V2min.
  • the maximum value V1max of the output of the first detection coil 5 is the same as the maximum value V2max of the output of the second detection coil 6.
  • FIG. 4 shows a configuration of a conventional position detection device 31.
  • the second detection coil 6 has the same size as the first detection coil 5 as compared with the configuration of the position detection device 1 of this example. That is, the first detection coil 5 and the second detection coil 6 have the same winding diameter and number of coil turns.
  • the output signal V1 rises in a curved line from V1min ′ to V1max ′. That is, the voltage of the first detection coil 5 increases from V1min ′ to V1max ′.
  • the output signal V2 of the second detection coil 6 falls in a curve from a high value V2max 'to V2min'. That is, the output voltage of the second detection coil 6 drops from the maximum value V2max ′ to a voltage V2min ′ that is slightly higher than the maximum value of the first detection coil 5.
  • the detection circuit 7 has a predetermined input voltage range (dynamic range of detection voltage), and is set to the maximum value of the output of the detection coil (the first detection coil 5 or the second detection coil 6).
  • the maximum value V2max ′ of the second detection coil 6 is higher than the maximum value V1max ′ of the first detection coil 5, so that the dynamic range (full scale) of the detection circuit 7 is the second.
  • the maximum value V2max ′ of the detection coil 6 is set.
  • the dynamic range of the detection circuit 7 is set to “V2max ′” which is the maximum value of the second detection coil 6. That is, in the case of the conventional position detection device 1, since the dynamic range is as large as “V2max ′”, the detection error generated in the detection circuit 7 increases accordingly.
  • the waveform of the output of the first detection coil 5 at a predetermined point in the position detection range K (see FIG. 5) by making the second detection coil 6 smaller than the first detection coil 5. 3) and the waveform of the output of the second detection coil 6 (downward curve in FIG. 3) are set to intersect each other. That is, the first detection coil 5 and the second detection coil 6 have different shapes so that the output waveform of the first detection coil 5 and the output waveform of the second detection coil 6 intersect within the position detection range K.
  • the maximum value of the detection voltage in the detection circuit 7 is lowered and the dynamic range of the detection circuit 7 is lowered, an error generated in the detection circuit 7 is reduced accordingly. Therefore, it is advantageous to ensure the position detection accuracy of the position detection device 1.
  • the first detection coil 5 and the second detection coil 6 make the second detection coil 6 smaller than the first detection coil 5, so that the maximum value V1max of the output of the first detection coil 5 2
  • the maximum value V2max of the output of the detection coil 6 is equal. Therefore, the dynamic range of the detection circuit 7 can be reduced as much as possible, which is further advantageous for improving the position accuracy of the position detection device 1.
  • the first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the arrow Z direction in FIG. 1).
  • the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are the same. It can be made easier to match.
  • the winding direction of the first detection coil 5 and the second detection coil 6 is reversed so that the directions of current flow are opposite to each other.
  • the increase / decrease in the inductance of the first detection coil 5 and the second detection coil 6 changes in opposite directions. That is, if the inductance of the first detection coil 5 increases, the inductance of the second detection coil 6 decreases. Conversely, if the inductance of the first detection coil 5 decreases, the inductance of the second detection coil 6 increases. .
  • the position of the detection target 3 is calculated, the fluctuation range of the calculation result increases. Therefore, it is advantageous to more accurately detect the position of the detection target 3 (detected portion 2).
  • the second detection coil 6 When the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set equal, the second detection coil 6 has a smaller winding diameter than the first detection coil 5. It is formed as follows. Therefore, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set to be the same with a simple configuration in which the winding diameter of the second detection coil 6 is reduced. Can do. In addition, since the size of the second detection coil 6 can be reduced, it contributes to a reduction in the size of the position detection device 1.
  • the embodiment is not limited to the configuration described so far, and may be modified as follows.
  • the first detection coil 5 and the second detection coil instead of changing the size of 6, for example, the second detection coil 6 may be formed by forming fewer turns than the first detection coil 5.
  • the outputs of the first detection coil 5 and the second detection coil can be made the same with a simple configuration in which the number of turns of the second detection coil 6 is reduced.
  • the second detection coil 6 may have a coil shape in which the coil diameter decreases (stepwise decreases) toward the inner diameter direction of the coil.
  • the arrangement pattern in which the first detection coil 5 and the second detection coil 6 are not arranged on the same axis may be used.
  • the coil shape (winding shape) of the 1st detection coil 5 and the 2nd detection coil 6 is not restricted to square shape, For example, it can change into other shapes, such as circular shape.
  • the first detection coil 5 and the second detection coil 6 may have the same direction of flowing current.
  • the connection between the first detection coil 5 and the second detection coil 6 and the voltage detection unit (the voltage detection units 7a and 7b in this example) is time-division controlled by a switch so that the first detection coil 5 and the second detection coil are detected.
  • a configuration in which the output of the coil 6 is selectively detected by one voltage detector may be employed. In this way, the voltage detection unit required for the position detection device 1 can be reduced, which is advantageous in reducing the size of the device.
  • the detection target 3 is not limited to the conductor plate (metal plate) but can be changed to other members such as a coil. That is, any member that can generate an eddy current may be used.
  • the substrate 10 may be a multilayer substrate, and the first detection coil 5 and the second detection coil 6 may be disposed on a predetermined layer of the multilayer substrate.
  • the first detection coil 5 and the second detection coil 6 may be formed across a plurality of layers of the substrate 10.
  • the first detection coil 5 and the second detection coil 6 are not limited to being connected in series.
  • the first detection coil 5 and the second detection coil 6 can be appropriately changed to other configurations such as a circuit in which a dedicated power source is connected to each of the first detection coil 5 and the second detection coil 6.
  • the voltage of the 2nd detection coil 6 may be detected, and the position of the detection target 3 may be calculated
  • the calculation performed at the time of detecting the position of the detected part 2 is not limited to division, and may be changed to another calculation method.
  • the coil output used for the position detection calculation is not limited to the voltage value, and may be another parameter such as a current value.
  • the small winding diameter of the coil includes a small outer diameter of the winding and a small inner diameter of the winding.
  • the detection target 3 is not limited to a linear reciprocating movement in the vertical direction of the first detection coil 5, but may be moved in a direction orthogonal to the vertical direction (coil axis direction) of the first detection coil 5, for example. Good. That is, the position detection device 1 may detect the position of the detection target 3 that reciprocates in a direction orthogonal to the coil axis La.
  • the position detection device 1 can be applied to various devices and apparatuses. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the technical concept thereof. For example, some of the parts described in the embodiment (or one or more aspects thereof) may be omitted, or some parts may be combined. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne un dispositif de détection de position qui comprend : une pluralité de bobines de détection (5, 6) qui comprennent une première bobine de détection (5) et une seconde bobine de détection (6) disposée plus loin d'un objet (2) à détecter que la première bobine de détection (5), et qui reçoivent respectivement une tension alternative en provenance d'une alimentation électrique (4), et génèrent respectivement un signal de sortie selon la distance à l'objet (2) à détecter ; et une unité de calcul de position (8) qui, sur la base des signaux de sortie des première et seconde bobines de détection (5, 6), calcule la position de l'objet (2) à détecter. Les première et seconde bobines de détection (5, 6) ont des formes différentes de telle sorte que les formes d'onde de sortie des première et seconde bobines de détection (5, 6) se coupent, lesdites formes d'onde de sortie étant générées sur une plage de détection dans laquelle la position de l'objet (2) à détecter peut être détectée.
PCT/JP2017/004168 2016-02-12 2017-02-06 Dispositif de détection de position WO2017138479A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-024695 2016-02-12
JP2016024695A JP2017142200A (ja) 2016-02-12 2016-02-12 位置検出装置

Publications (1)

Publication Number Publication Date
WO2017138479A1 true WO2017138479A1 (fr) 2017-08-17

Family

ID=59563073

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/004168 WO2017138479A1 (fr) 2016-02-12 2017-02-06 Dispositif de détection de position

Country Status (2)

Country Link
JP (1) JP2017142200A (fr)
WO (1) WO2017138479A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110456377B (zh) * 2019-08-15 2021-07-30 中国人民解放军63921部队 一种基于三维激光雷达的卫星来袭异物检测方法和系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151402A (ja) * 1984-12-26 1986-07-10 Nippon Kokan Kk <Nkk> 差動相互誘導型渦流計測用センサ
JPS62225986A (ja) * 1986-03-12 1987-10-03 エルデツク　コ−ポレイシヨン 物体の接近感知方法及び接近センサ
JPH0658705A (ja) * 1992-08-12 1994-03-04 Mishima Kosan Co Ltd 金属物体の距離検出装置
JPH10288535A (ja) * 1997-04-16 1998-10-27 Sakae Tsushin Kogyo Kk 信号発生装置
JP2003130605A (ja) * 2001-10-26 2003-05-08 Sankyo Seiki Mfg Co Ltd 磁気式変位センサ装置
JP2011137748A (ja) * 2009-12-28 2011-07-14 Jtekt Corp 変位センサ装置及び転がり軸受装置
JP2013246051A (ja) * 2012-05-25 2013-12-09 Panasonic Corp 変位検出装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151402A (ja) * 1984-12-26 1986-07-10 Nippon Kokan Kk <Nkk> 差動相互誘導型渦流計測用センサ
JPS62225986A (ja) * 1986-03-12 1987-10-03 エルデツク　コ−ポレイシヨン 物体の接近感知方法及び接近センサ
JPH0658705A (ja) * 1992-08-12 1994-03-04 Mishima Kosan Co Ltd 金属物体の距離検出装置
JPH10288535A (ja) * 1997-04-16 1998-10-27 Sakae Tsushin Kogyo Kk 信号発生装置
JP2003130605A (ja) * 2001-10-26 2003-05-08 Sankyo Seiki Mfg Co Ltd 磁気式変位センサ装置
JP2011137748A (ja) * 2009-12-28 2011-07-14 Jtekt Corp 変位センサ装置及び転がり軸受装置
JP2013246051A (ja) * 2012-05-25 2013-12-09 Panasonic Corp 変位検出装置

Also Published As

Publication number Publication date
JP2017142200A (ja) 2017-08-17

Similar Documents

Publication Publication Date Title
US10036656B2 (en) Position detecting system based on inductive sensing
US11226211B2 (en) Inductive position detection
CN106197238B (zh) 用于使用感应式传感器确定移动部件沿轴的位置的方法
US20180274949A1 (en) Electromagnetic induction type displacement detection apparatus and measuring instrument using the same
CN105190250A (zh) 线性编码器装置以及基准位置检测方法
WO2017138479A1 (fr) Dispositif de détection de position
KR101921700B1 (ko) 누설 자기장 상쇄 방법
JP2018527576A (ja) 測定対象物の非接触式距離及び／又は位置の測定装置及びセンサ
JP6395942B2 (ja) 位置センサー
JP6145467B2 (ja) 位置検出装置
US10684385B2 (en) Sensor having rotationally offset coil pairs and differently formed receiving coils for locating metal or magnetic objects
JP2017142202A (ja) 位置検出装置
KR20200091666A (ko) 인덕턴스 가변 장치 및 이의 제어방법
JP2016125940A (ja) 位置検出装置
JP2015224922A (ja) 位置検出装置
JP2017075919A (ja) 位置検出装置
JP2017142201A (ja) 位置検出装置
JP2015224923A (ja) 位置検出装置
JP2015224925A (ja) 位置検出装置
JP2017020934A (ja) 位置検出装置
CN107211210A (zh) 用于检测扬声器膜片的运动的传感器
JP2016125866A (ja) 位置検出装置
JP2016125941A (ja) 位置検出装置
JP2016090398A (ja) 位置検出装置
JP2014167440A (ja) 変位センサ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17750202

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17750202

Country of ref document: EP

Kind code of ref document: A1