JP2017142200A - Position detector - Google Patents

Position detector Download PDF

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JP2017142200A
JP2017142200A JP2016024695A JP2016024695A JP2017142200A JP 2017142200 A JP2017142200 A JP 2017142200A JP 2016024695 A JP2016024695 A JP 2016024695A JP 2016024695 A JP2016024695 A JP 2016024695A JP 2017142200 A JP2017142200 A JP 2017142200A
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detection
detection coil
coil
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target
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健一 古賀
Kenichi Koga
健一 古賀
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Tokai Rika Co Ltd
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Tokai Rika Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature

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  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a position detector that can ensure the accuracy of position detection.SOLUTION: A position detector 1 includes a first detection coil 5 near a detection target 3 and a second detection coil 6 (reference coil) distant from the detection target 3. Outputs (detection voltages) of the first and second detection coils 5 and 6 vary according to the distance to the detection target 3. A position calculation part 8 determines the position of the detection target 3 (detection target part 2) based on outputs (detection voltages) of the first and second detection coils 5 and 6. The second detection coil 6 has a smaller coil diameter than the first detection coil 5 has. This makes the maximum values of the outputs of the first and second detection coils 5 and 6 equal to each other.SELECTED DRAWING: Figure 1

Description

本発明は、検出対象の位置を検出する位置検出装置に関する。   The present invention relates to a position detection device that detects the position of a detection target.

従来、検出対象の位置を検出位置検出装置として、検出対象としての金属部を検出コイルに対向配置させ、この金属部が移動したときの検出コイルのインダクタンスの変化を検出することにより、検出対象の位置を検出する技術が周知である(特許文献1等参照)。   Conventionally, the position of the detection target is used as a detection position detection device, and the metal part as the detection target is disposed opposite to the detection coil, and the change in the inductance of the detection coil when the metal part moves is detected. A technique for detecting the position is well known (see, for example, Patent Document 1).

特表2007−505534号公報Special table 2007-505534

この種の位置検出装置においては、検出対象の位置を精度よく行いたいニーズがあった。
本発明の目的は、位置検出の精度を確保することができる位置検出装置を提供することにある。
In this type of position detection device, there has been a need to accurately position the detection target.
The objective of this invention is providing the position detection apparatus which can ensure the precision of a position detection.

前記問題点を解決する位置検出装置は、電源から交流電圧を検出コイルに印加し、検出対象との距離に応じて変化する前記検出コイルの出力信号を基に、位置演算部によって前記検出対象の位置を検出する構成において、前記検出コイルは、前記検出対象に対し近い側に位置する第1検出コイルと、前記検出対象に対し遠い側に位置する第2検出コイルとを備え、当該第1検出コイル及び第2検出コイルは、前記検出対象の位置検出範囲において前記第1検出コイルの出力の波形と前記第2検出コイルの出力の波形とが交差するように、形状が異なって形成され、前記位置演算部は、前記第1検出コイル及び第2検出コイルの各出力信号を基に、前記検出対象の位置を演算する。   A position detection device that solves the above problem applies an AC voltage from a power source to a detection coil, and based on an output signal of the detection coil that changes according to a distance from the detection target, a position calculation unit performs detection of the detection target. In the configuration for detecting a position, the detection coil includes a first detection coil located on a side closer to the detection target, and a second detection coil located on a side far from the detection target, and the first detection coil The coil and the second detection coil are formed in different shapes so that the waveform of the output of the first detection coil and the waveform of the output of the second detection coil intersect in the position detection range of the detection target, The position calculation unit calculates the position of the detection target based on the output signals of the first detection coil and the second detection coil.

本構成によれば、第1検出コイルの出力の波形と第2検出コイルの出力の波形とが等しくなるように、これらコイルの形状を設定した。このため、第1検出コイル及び第2検出コイルの出力を検出する検出回路のダイナミックレンジを低くすることが可能となる。よって、第1検出コイル及び第2検出コイルの出力を検出回路で検出するにあたり、検出する値の誤差を低く抑えることが可能となるので、位置検出の精度を向上することが可能となる。   According to this configuration, the shapes of these coils are set so that the waveform of the output of the first detection coil is equal to the waveform of the output of the second detection coil. For this reason, it becomes possible to make the dynamic range of the detection circuit which detects the output of a 1st detection coil and a 2nd detection coil low. Therefore, when the outputs of the first detection coil and the second detection coil are detected by the detection circuit, it is possible to suppress an error in the value to be detected, so that the accuracy of position detection can be improved.

前記位置検出装置において、前記第1検出コイル及び第2検出コイルは、前記検出対象の位置検出範囲において前記第1検出コイルの出力の最大値と前記第2検出コイルの出力の最大値とが同じとなるように、形状が形成されていることが好ましい。この構成によれば、第1検出コイルの出力の最大値と第2検出コイルの出力の最大値とが等しくなるように、これらコイルの形状を設定した。このため、第1検出コイル及び第2検出コイルの出力を検出する検出回路のダイナミックレンジを、極力低くすることが可能となり、位置検出精度の向上に一層有利となる。   In the position detection device, the first detection coil and the second detection coil have the same maximum output value of the first detection coil and the maximum output value of the second detection coil in the position detection range of the detection target. The shape is preferably formed so that According to this configuration, the shapes of these coils are set so that the maximum value of the output of the first detection coil is equal to the maximum value of the output of the second detection coil. For this reason, the dynamic range of the detection circuit that detects the outputs of the first detection coil and the second detection coil can be made as low as possible, which is further advantageous in improving the position detection accuracy.

前記位置検出装置において、前記第1検出コイル及び第2検出コイルは、前記検出対象の移動方向に沿って並んで配置されていることが好ましい。この構成によれば、第1検出コイル及び第2検出コイルをバランスよく配置するので、第1検出コイルの出力の最大値と第2検出コイルの出力の最大値とを、同一に合わせ易くすることが可能となる。   In the position detection device, it is preferable that the first detection coil and the second detection coil are arranged side by side along a moving direction of the detection target. According to this configuration, since the first detection coil and the second detection coil are arranged in a balanced manner, the maximum value of the output of the first detection coil and the maximum value of the output of the second detection coil can be easily matched. Is possible.

前記位置検出装置において、前記第1検出コイル及び第2検出コイルは、流れる電流の方向が互いに逆となるように、巻き方向が逆となっていることが好ましい。この構成によれば、検出対象が第1検出コイルに対して接近又は離隔するとき、第1検出コイル及び第2検出コイルのインダクタンスは、増減が互いに逆方向に変化する。このため、検出対象の位置を演算するにあたって、演算結果の変動幅を大きくとることが可能となる。よって、検出対象の位置を、より正しく検出するのに有利となる。   In the position detection device, it is preferable that the first detection coil and the second detection coil have opposite winding directions so that directions of flowing currents are opposite to each other. According to this configuration, when the detection target approaches or separates from the first detection coil, the inductances of the first detection coil and the second detection coil change in opposite directions. For this reason, when calculating the position of the detection target, it is possible to increase the fluctuation range of the calculation result. Therefore, it is advantageous to more accurately detect the position of the detection target.

前記位置検出装置において、前記第2検出コイルは、前記第1検出コイルよりも巻線径が小さくなるように形成されていることが好ましい。この構成によれば、第1検出コイルに対して第2検出コイルの巻線径を小さくするという簡素な構成により、第1検出コイルの出力の最大値と第2検出コイルの出力の最大値とを同一に設定することが可能となる。   In the position detection device, it is preferable that the second detection coil is formed to have a winding diameter smaller than that of the first detection coil. According to this configuration, the maximum value of the output of the first detection coil and the maximum value of the output of the second detection coil can be obtained by a simple configuration in which the winding diameter of the second detection coil is reduced with respect to the first detection coil. Can be set identically.

前記位置検出装置において、前記第2検出コイルは、前記第1検出コイルよりも巻数が少なく形成されていることが好ましい。この構成によれば、第1検出コイルに対して第2検出コイルの巻数を少なくするという簡素な構成により、第1検出コイルの出力の最大値と第2検出コイルの出力の最大値とを同一に設定することが可能となる。   In the position detection device, it is preferable that the second detection coil is formed with a smaller number of turns than the first detection coil. According to this configuration, the maximum value of the output of the first detection coil is equal to the maximum value of the output of the second detection coil by a simple configuration in which the number of turns of the second detection coil is reduced with respect to the first detection coil. It becomes possible to set to.

本発明によれば、位置検出装置において、位置検出の精度を確保することができる。   According to the present invention, position detection accuracy can be ensured in the position detection device.

一実施形態の位置検出装置の構成図。The block diagram of the position detection apparatus of one Embodiment. 位置検出装置の基板の側面図。The side view of the board | substrate of a position detection apparatus. 検出対象の距離変化に対するコイル出力の特性図。The characteristic view of the coil output with respect to the distance change of a detection target. 従来位置付けの位置検出装置の構成図。The block diagram of the conventional position detection apparatus. 検出対象の距離変化に対するコイル出力の特性図。The characteristic view of the coil output with respect to the distance change of a detection target. 別例の第2検出コイルの形状を示す概略図。Schematic which shows the shape of the 2nd detection coil of another example. 他の別例の第2検出コイルの形状を示す概略図。Schematic which shows the shape of the 2nd detection coil of another example.

以下、位置検出装置の一実施形態を図1〜図5に従って説明する。
図1に示すように、位置検出装置1は、被検出部2の位置(被検出部2との間の距離)を検出する渦電流センサの一種である。渦電流センサは、金属(本例は検出対象3)に発生する渦電流の変化を基に被検出部2の位置を検出するセンサである。本例の位置検出装置1は、位置検出装置1の電源4と、電源4から交流電圧Vcが印加される第1検出コイル5及び第2検出コイル6と、被検出部2の動きに応じて第1検出コイル5及び第2検出コイル6に発生する磁界を変化させる検出対象3とを備える。
Hereinafter, an embodiment of the position detection device will be described with reference to FIGS.
As shown in FIG. 1, the position detection device 1 is a type of eddy current sensor that detects the position of the detected portion 2 (the distance to the detected portion 2). The eddy current sensor is a sensor that detects the position of the detected portion 2 based on a change in eddy current generated in metal (in this example, the detection target 3). The position detection device 1 according to the present example corresponds to the power source 4 of the position detection device 1, the first detection coil 5 and the second detection coil 6 to which the AC voltage Vc is applied from the power source 4, and the movement of the detected portion 2. And a detection target 3 that changes a magnetic field generated in the first detection coil 5 and the second detection coil 6.

検出対象3は、例えば金属から形成された板状の部材(導体板)からなる。本例の検出対象3は、被検出部2に取り付け固定されることにより、被検出部2と連動する。検出対象3は、被検出部2の動きに伴って、第1検出コイル5(第2検出コイル6)のコイル軸Laの軸方向(コイル軸方向:図1の矢印Z方向)に沿い、第1検出コイル5に接近又は離間する直線往復動が可能である。   The detection target 3 is composed of, for example, a plate-like member (conductor plate) made of metal. The detection target 3 in this example is interlocked with the detected portion 2 by being attached and fixed to the detected portion 2. The detection target 3 moves along the axial direction (coil axis direction: arrow Z direction in FIG. 1) of the coil axis La of the first detection coil 5 (second detection coil 6) in accordance with the movement of the detected portion 2. 1 The linear reciprocation which approaches or separates from the detection coil 5 is possible.

第1検出コイル5及び第2検出コイル6は、検出対象3の移動方向(コイル軸Laの軸方向)に沿って並び配置されている。本例の場合、第1検出コイル5は、検出対象3に対し近い側に配置され、第2検出コイル6は、検出対象3に対し遠い側に配置されている。これは、第1検出コイル5の出力電圧(インダクタンス)を位置検出のための信号として用い、第2検出コイル6を第1検出コイル5のリファレンスコイル(基準コイル)とするためである。   The first detection coil 5 and the second detection coil 6 are arranged side by side along the moving direction of the detection target 3 (the axial direction of the coil axis La). In the case of this example, the first detection coil 5 is arranged on the side closer to the detection target 3, and the second detection coil 6 is arranged on the side far from the detection target 3. This is because the output voltage (inductance) of the first detection coil 5 is used as a signal for position detection, and the second detection coil 6 is used as a reference coil (reference coil) of the first detection coil 5.

第1検出コイル5及び第2検出コイル6は、電源4に対して直列接続されている。第1検出コイル5及び第2検出コイル6は、流れる電流の方向が互いに逆となるように、巻き方向が逆となっている。すなわち、第1検出コイル5及び第2検出コイル6は、巻き方向が互いに逆向きとされることにより、互いに逆方向の磁界が生成されるようになっている。   The first detection coil 5 and the second detection coil 6 are connected in series to the power supply 4. The winding directions of the first detection coil 5 and the second detection coil 6 are reversed so that the directions of the flowing currents are opposite to each other. That is, the first detection coil 5 and the second detection coil 6 are configured to generate magnetic fields in opposite directions when the winding directions are opposite to each other.

第1検出コイル5及び第2検出コイル6は、検出対象3の位置検出範囲K(図2に図示)において、第1検出コイル5の出力(出力信号V1)の最大値V1max(図2に図示)と、第2検出コイル6の出力(出力信号V2)の最大値V2max(図2に図示)とが、ともに同じ値(近傍も含む)となるように、形状が異なるように形成されている。本例の場合、第2検出コイル6は、第1検出コイル5よりも小型に形成されている。なお、小型とは、第1検出コイル5の巻線径をX1とし、第2検出コイル6の巻線径をX2とすると、巻線径(コイルサイズ)が小さいこと(X1>X2)をいう。なお、第1検出コイル5及び第2検出コイル6の巻数は、同一又は異なる巻数のいずれでもよい。   The first detection coil 5 and the second detection coil 6 have a maximum value V1max (illustrated in FIG. 2) of the output (output signal V1) of the first detection coil 5 in the position detection range K (illustrated in FIG. 2) of the detection target 3. ) And the maximum value V2max (shown in FIG. 2) of the output of the second detection coil 6 (output signal V2) (shown in FIG. 2) are both formed to have different shapes. . In the case of this example, the second detection coil 6 is formed smaller than the first detection coil 5. The small size means that the winding diameter of the first detection coil 5 is X1 and the winding diameter of the second detection coil 6 is X2, and the winding diameter (coil size) is small (X1> X2). . The number of turns of the first detection coil 5 and the second detection coil 6 may be the same or different.

第1検出コイル5及び第2検出コイル6には、第1検出コイル5及び第2検出コイル6に発生する電圧(出力信号V1,V2)を検出する検出回路7が接続されている。本例の検出回路7は、第1検出コイル5の電圧を検出する電圧検出部7aと、第2検出コイル6の電圧を検出する電圧検出部7bとを備える。電圧検出部7aは、第1検出コイル5の入出力端の間に接続され、電圧検出部7bは、第2検出コイル6の入出力端の間に接続されている。   The first detection coil 5 and the second detection coil 6 are connected to a detection circuit 7 that detects voltages (output signals V1, V2) generated in the first detection coil 5 and the second detection coil 6. The detection circuit 7 of this example includes a voltage detection unit 7 a that detects the voltage of the first detection coil 5 and a voltage detection unit 7 b that detects the voltage of the second detection coil 6. The voltage detector 7 a is connected between the input and output ends of the first detection coil 5, and the voltage detector 7 b is connected between the input and output ends of the second detection coil 6.

位置検出装置1は、第1検出コイル5及び第2検出コイル6の出力を基に検出対象3の位置を演算する位置演算部8を備える。位置演算部8は、電圧検出部7aから入力する出力信号(出力電圧)V1と、電圧検出部7bから入力する出力信号(出力電圧)V2とを基に、検出対象3(被検出部2)の位置を演算する。具体的にいうと、位置演算部8は、電圧検出部7aの出力信号V1を、電圧検出部7bの出力信号V2で除算した値(V1/V2)を求め、この値から第1検出コイル5と検出対象3の位置、すなわち被検出部2の位置を演算する。   The position detection device 1 includes a position calculation unit 8 that calculates the position of the detection target 3 based on the outputs of the first detection coil 5 and the second detection coil 6. The position calculation unit 8 is based on an output signal (output voltage) V1 input from the voltage detection unit 7a and an output signal (output voltage) V2 input from the voltage detection unit 7b. The position of is calculated. Specifically, the position calculation unit 8 obtains a value (V1 / V2) obtained by dividing the output signal V1 of the voltage detection unit 7a by the output signal V2 of the voltage detection unit 7b, and from this value, the first detection coil 5 is obtained. And the position of the detection target 3, that is, the position of the detected portion 2 is calculated.

図2に示すように、本例の第1検出コイル5及び第2検出コイル6は、第1検出コイル5が基板10の第1層10a(例えば表面)に設けられ、第2検出コイル6が基板10の第2層10b(例えば裏面)に設けられることにより、同一基板上に重ね配置されている。第1検出コイル5は、基板10の第1層10aのみに形成され、第2検出コイル6は、基板10の第2層10bのみに形成されている。   As shown in FIG. 2, in the first detection coil 5 and the second detection coil 6 of this example, the first detection coil 5 is provided on the first layer 10 a (for example, the surface) of the substrate 10, and the second detection coil 6 is By being provided on the second layer 10 b (for example, the back surface) of the substrate 10, they are arranged on the same substrate. The first detection coil 5 is formed only on the first layer 10 a of the substrate 10, and the second detection coil 6 is formed only on the second layer 10 b of the substrate 10.

次に、図3〜図5を用いて、位置検出装置1の作用及び効果を説明する。
図3に示すように、位置検出装置1の位置検出範囲Kにおいて、検出対象3が第1検出コイル5に最も近づいた地点P1から、第1検出コイル5から最も離れた地点P2に直線移動したとする。このとき、検出対象3が離れていくに従い、第1検出コイル5のインダクタンスが徐々に増加していき、第1検出コイル5の出力信号V1は、V1minからV1maxに曲線状に上昇していく変化波形をとる。一方、第2検出コイル6のインダクタンスは徐々に低下していき、第2検出コイル6の出力信号V2は、V2maxからV2minに曲線状に下降していく変化とる。すなわち、第1検出コイル5の出力と第2検出コイル6の出力とは、それぞれの最大値V1max,V2maxが同じ値となった変化波形をとる。
Next, the operation and effect of the position detection device 1 will be described with reference to FIGS.
As shown in FIG. 3, in the position detection range K of the position detection device 1, the detection target 3 moves linearly from a point P 1 closest to the first detection coil 5 to a point P 2 farthest from the first detection coil 5. And At this time, as the detection object 3 moves away, the inductance of the first detection coil 5 gradually increases, and the output signal V1 of the first detection coil 5 changes in a curved manner from V1min to V1max. Take the waveform. On the other hand, the inductance of the second detection coil 6 gradually decreases, and the output signal V2 of the second detection coil 6 changes in a curved manner from V2max to V2min. That is, the output of the first detection coil 5 and the output of the second detection coil 6 take a change waveform in which the maximum values V1max and V2max are the same.

図4に、従来位置付けの位置検出装置31の構成を示す。図4に示す位置検出装置31は、本例の位置検出装置1の構成に対し、第2検出コイル6が第1検出コイル5と同じサイズとなった構成をとる。すなわち、第1検出コイル5及び第2検出コイル6が同じ巻線径及びコイル巻数となっている。   FIG. 4 shows a configuration of a conventional position detection device 31. The position detection device 31 illustrated in FIG. 4 has a configuration in which the second detection coil 6 has the same size as the first detection coil 5 with respect to the configuration of the position detection device 1 of this example. That is, the first detection coil 5 and the second detection coil 6 have the same winding diameter and number of coil turns.

図5に示すように、従来位置付けの位置検出装置31の場合、位置検出範囲Kにおいて被検出部2が地点P1から地点P2に移動したとき、検出対象3が第1検出コイル5から離れていくに従い、出力信号V1は、V1min’からV1max’に曲線状に上昇していく変化波形をとる。すなわち、第1検出コイル5の電圧は、V1min’からV1max’に上昇する変化をとる。一方、第2検出コイル6の出力信号V2は、高い値のV2max’からV2min’に曲線状に下降していく変化波形をとる。すなわち、第2検出コイル6の出力電圧は、高い最大値のV2max’から、第1検出コイル5の最大値より少し高い電圧のV2min’まで下降する。   As shown in FIG. 5, in the case of the conventional position detection device 31, when the detected portion 2 moves from the point P <b> 1 to the point P <b> 2 in the position detection range K, the detection target 3 moves away from the first detection coil 5. Accordingly, the output signal V1 takes a change waveform that rises in a curved shape from V1min ′ to V1max ′. That is, the voltage of the first detection coil 5 changes so as to increase from V1min 'to V1max'. On the other hand, the output signal V2 of the second detection coil 6 takes a change waveform that descends in a curve from a high value V2max 'to V2min'. That is, the output voltage of the second detection coil 6 falls from a high maximum value V2max ′ to a voltage V2min ′ that is slightly higher than the maximum value of the first detection coil 5.

ところで、検出回路7には、入力電圧範囲(検出電圧のダイナミックレンジ)が決まっており、検出コイル(第1検出コイル5又は第2検出コイル6)の出力の最大値に設定される。例えば、従来位置付けの位置検出装置31の場合、第1検出コイル5の最大値V1max’よりも第2検出コイル6の最大値V2max’が高いので、検出回路7のダイナミックレンジ(フルスケール)は第2検出コイル6の最大値V2max’に設定される。   Incidentally, the detection circuit 7 has a predetermined input voltage range (dynamic range of detection voltage), and is set to the maximum value of the output of the detection coil (the first detection coil 5 or the second detection coil 6). For example, in the case of the position sensor 31 of the conventional positioning, since the maximum value V2max ′ of the second detection coil 6 is higher than the maximum value V1max ′ of the first detection coil 5, the dynamic range (full scale) of the detection circuit 7 is the first. 2 The maximum value V2max ′ of the detection coil 6 is set.

一般的に、検出回路7には検出誤差が生じ、誤差は検出回路7のダイナミックレンジに対し、その何%の値で発生する。よって、検出回路7のダイナミックレンジが高いと、その分だけ位置検出の誤差が大きくなってしまうことになる。従来位置付けの位置検出装置31では、検出回路7のダイナミックレンジが、第2検出コイル6の最大値である「V2max’」に設定されている。すなわち、従来位置付けの位置検出装置1の場合、ダイナミックレンジが「V2max’」と大きいので、その分、検出回路7において発生する検出誤差が大きくなる。   In general, a detection error occurs in the detection circuit 7, and the error occurs at what percentage of the dynamic range of the detection circuit 7. Therefore, if the dynamic range of the detection circuit 7 is high, the position detection error increases accordingly. In the conventional position detection device 31, the dynamic range of the detection circuit 7 is set to “V2max ′” which is the maximum value of the second detection coil 6. That is, in the case of the conventional position detection device 1, since the dynamic range is as large as “V2max ′”, the detection error generated in the detection circuit 7 increases accordingly.

一方、本例の位置検出装置1の場合、第2検出コイル6を第1検出コイル5よりも小型にすることにより、位置検出範囲Kの所定地点において第1検出コイル5の出力の波形(図3の右上がり曲線)と第2検出コイル6の出力の波形(図3の右下がり曲線)とが交差するように設定されている。すなわち、第1検出コイル5及び第2検出コイル6は、位置検出範囲Kの範囲内において第1検出コイル5の出力波形と第2検出コイル6の出力波形とが交差するように、形状が異なって形成されている。このため、検出回路7における検出電圧の最大値が低く済み、結果、検出回路7のダイナミックレンジが低く済むので、その分、検出回路7において発生する誤差が少なく済む。よって、位置検出装置1の位置検出精度を確保するのに有利となる。   On the other hand, in the case of the position detection device 1 of this example, the waveform of the output of the first detection coil 5 at a predetermined point in the position detection range K (see FIG. 5) by making the second detection coil 6 smaller than the first detection coil 5. 3) and the waveform of the output of the second detection coil 6 (downward curve in FIG. 3) are set to intersect each other. That is, the first detection coil 5 and the second detection coil 6 have different shapes so that the output waveform of the first detection coil 5 and the output waveform of the second detection coil 6 intersect within the position detection range K. Is formed. For this reason, the maximum value of the detection voltage in the detection circuit 7 can be reduced, and as a result, the dynamic range of the detection circuit 7 can be reduced, so that the error generated in the detection circuit 7 can be reduced accordingly. Therefore, it is advantageous to ensure the position detection accuracy of the position detection device 1.

本例の場合、第1検出コイル5及び第2検出コイル6は、第2検出コイル6を第1検出コイル5よりも小型にすることにより、第1検出コイル5の出力の最大値V1maxと第2検出コイル6の出力の最大値V2maxとが等しくなるようにしている。よって、検出回路7のダイナミックレンジを極力低くすることが可能となるので、位置検出装置1の位置精度の向上に一層有利となる。   In the case of this example, the first detection coil 5 and the second detection coil 6 make the second detection coil 6 smaller than the first detection coil 5, so that the maximum value V1max of the output of the first detection coil 5 2 The maximum value V2max of the output of the detection coil 6 is made equal. Therefore, the dynamic range of the detection circuit 7 can be reduced as much as possible, which is further advantageous for improving the position accuracy of the position detection device 1.

第1検出コイル5及び第2検出コイル6は、検出対象3の移動方向(図1の矢印Z方向)に沿って並んで配置されている。このように、第1検出コイル5及び第2検出コイル6をバランスよく配置するので、第1検出コイル5の出力の最大値V1maxと第2検出コイル6の出力の最大値V2maxとを、同一に合わせ易くすることができる。   The 1st detection coil 5 and the 2nd detection coil 6 are arrange | positioned along with the moving direction (arrow Z direction of FIG. 1) of the detection target 3. As shown in FIG. Thus, since the first detection coil 5 and the second detection coil 6 are arranged in a balanced manner, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are the same. It can be made easier to match.

第1検出コイル5及び第2検出コイル6は、流れる電流の方向が互いに逆となるように、巻き方向が逆となっている。これにより、検出対象3が第1検出コイル5に対して接近又は離隔するとき、第1検出コイル5及び第2検出コイル6のインダクタンスは、増減が互いに逆方向に変化する。すなわち、第1検出コイル5のインダクタンスが増加すれば、第2検出コイル6のインダクタンスが減少し、逆に、第1検出コイル5のインダクタンスが減少すれば、第2検出コイル6のインダクタンスが増加する。このため、検出対象3の位置を演算するにあたって、演算結果の変動幅を大きくとることが可能となる。よって、検出対象3(被検出部2)の位置を、より正しく検出するのに有利となる。   The winding directions of the first detection coil 5 and the second detection coil 6 are reversed so that the directions of the flowing currents are opposite to each other. Thereby, when the detection target 3 approaches or separates from the first detection coil 5, the inductances of the first detection coil 5 and the second detection coil 6 change in opposite directions. That is, if the inductance of the first detection coil 5 increases, the inductance of the second detection coil 6 decreases. Conversely, if the inductance of the first detection coil 5 decreases, the inductance of the second detection coil 6 increases. . For this reason, when calculating the position of the detection target 3, it is possible to increase the fluctuation range of the calculation result. Therefore, it is advantageous to more accurately detect the position of the detection target 3 (detected portion 2).

第1検出コイル5の出力の最大値V1maxと第2検出コイル6の出力の最大値V2maxとを等しく設定するにあたり、第2検出コイル6は、第1検出コイル5よりも巻線径が小さくなるように形成されている。よって、第2検出コイル6の巻線径を小さくするという簡素な構成で、第1検出コイル5の出力の最大値V1maxと第2検出コイル6の出力の最大値V2maxとを同一に設定することができる。また、第2検出コイル6のサイズが小さく済むので、位置検出装置1の装置サイズの小型化にも寄与する。   When the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set equal, the second detection coil 6 has a smaller winding diameter than the first detection coil 5. It is formed as follows. Therefore, the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6 are set to be the same with a simple configuration in which the winding diameter of the second detection coil 6 is reduced. Can do. In addition, since the size of the second detection coil 6 can be reduced, it contributes to a reduction in the size of the position detection device 1.

なお、実施形態はこれまでに述べた構成に限らず、以下の態様に変更してもよい。
・図6に示すように、第1検出コイル5の出力の最大値V1maxと第2検出コイル6の出力の最大値V2maxとを等しく設定するにあたっては、例えば第1検出コイル5及び第2検出コイル6のサイズを変えるのではなく、例えば第2検出コイル6を第1検出コイル5よりも巻数を少なく形成することで実現してもよい。この場合、第2検出コイル6の巻数を少なくするという簡素な構成で、第1検出コイル5及び第2検出コイルの出力を同一にすることができる。
Note that the embodiment is not limited to the configuration described so far, and may be modified as follows.
As shown in FIG. 6, in setting the maximum value V1max of the output of the first detection coil 5 and the maximum value V2max of the output of the second detection coil 6, for example, the first detection coil 5 and the second detection coil Instead of changing the size of 6, for example, the second detection coil 6 may be formed by forming fewer turns than the first detection coil 5. In this case, the outputs of the first detection coil 5 and the second detection coil can be made the same with a simple configuration in which the number of turns of the second detection coil 6 is reduced.

・図7に示すように、第2検出コイル6は、コイルの内径方向に向かうに従ってコイル径が小さく(段階的に小さく)なっていくコイル形状としてもよい。
・第1検出コイル5及び第2検出コイル6は、同一軸心上に配置されない配置パターンでもよい。
As shown in FIG. 7, the second detection coil 6 may have a coil shape in which the coil diameter decreases (stepwise decreases) toward the inner diameter direction of the coil.
The arrangement pattern in which the first detection coil 5 and the second detection coil 6 are not arranged on the same axis may be used.

・第1検出コイル5及び第2検出コイル6のコイル形状(巻線形状)は、四角形状に限らず、例えば円形状などの他の形状に変更可能である。
・第1検出コイル5及び第2検出コイル6は、流れる電流の方向が同じでもよい。
-The coil shape (winding shape) of the 1st detection coil 5 and the 2nd detection coil 6 is not restricted to square shape, For example, it can change into other shapes, such as circular shape.
The first detection coil 5 and the second detection coil 6 may have the same direction of flowing current.

・第1検出コイル5及び第2検出コイル6と電圧検出部(本例でいう電圧検出部7a,7b)との接続を、スイッチにより時分割制御して、第1検出コイル5及び第2検出コイル6の出力を、1つの電圧検出部によって選択的に検出する構成でもよい。こうすれば、位置検出装置1に必要となる電圧検出部が少なく済むので、装置サイズの小型化に有利となる。   The connection between the first detection coil 5 and the second detection coil 6 and the voltage detection unit (the voltage detection units 7a and 7b in this example) is time-division controlled by a switch so that the first detection coil 5 and the second detection coil are detected. A configuration in which the output of the coil 6 is selectively detected by one voltage detector may be employed. In this way, the voltage detection unit required for the position detection device 1 can be reduced, which is advantageous in reducing the size of the device.

・検出対象3は、導体板(金属板)に限らず、例えばコイルなどの他の部材に変更可能である。すなわち、渦電流を発生できる部材であればよい。
・基板10は、多層基板でもよく、多層基板の所定層に第1検出コイル5及び第2検出コイル6が配置されてもよい。
The detection target 3 is not limited to the conductor plate (metal plate) but can be changed to other members such as a coil. That is, any member that can generate an eddy current may be used.
The substrate 10 may be a multilayer substrate, and the first detection coil 5 and the second detection coil 6 may be disposed on a predetermined layer of the multilayer substrate.

・第1検出コイル5及び第2検出コイル6は、基板10の複数層に横断して形成されてもよい。
・第1検出コイル5及び第2検出コイル6は、直列接続されることに限定されない。例えば、第1検出コイル5及び第2検出コイル6の各々に専用の電源を接続した回路とするなど、他の構成に適宜変更することができる。
The first detection coil 5 and the second detection coil 6 may be formed across a plurality of layers of the substrate 10.
The first detection coil 5 and the second detection coil 6 are not limited to being connected in series. For example, the first detection coil 5 and the second detection coil 6 can be appropriately changed to other configurations such as a circuit in which a dedicated power source is connected to each of the first detection coil 5 and the second detection coil 6.

・第1検出コイル5及び第2検出コイル6の間の電圧を検出するとともに、第2検出コイル6の電圧を検出し、これらを除算した結果から検出対象3の位置を求めてもよい。
・被検出部2の位置検出時に行う演算は、除算に限定されず、他の計算方法に変更してもよい。
-While detecting the voltage between the 1st detection coil 5 and the 2nd detection coil 6, the voltage of the 2nd detection coil 6 may be detected, and the position of the detection target 3 may be calculated | required from the result of dividing these.
The calculation performed at the time of detecting the position of the detected part 2 is not limited to division, and may be changed to another calculation method.

・位置検出の演算に用いるコイル出力は、電圧値に限らず、例えば電流値などの他のパラメータとしてもよい。
・コイルの巻線径が小さいとは、巻線の外径が小さいことや、巻線の内径が小さいことなどを含む。
The coil output used for the position detection calculation is not limited to the voltage value, and may be another parameter such as a current value.
The small winding diameter of the coil includes a small outer diameter of the winding and a small inner diameter of the winding.

・検出対象3は、第1検出コイル5の鉛直方向に直線往復動するものに限らず、例えば第1検出コイル5の鉛直方向(コイル軸方向)に対して直交する方向に移動する動きをとってもよい。すなわち、位置検出装置1は、コイル軸Laに対して直交する方向に往復動する検出対象3の位置を検出するものでもよい。   The detection target 3 is not limited to a linear reciprocating movement in the vertical direction of the first detection coil 5, but may be moved in a direction orthogonal to the vertical direction (coil axis direction) of the first detection coil 5, for example. Good. That is, the position detection device 1 may detect the position of the detection target 3 that reciprocates in a direction orthogonal to the coil axis La.

・第1検出コイル5の出力波形と第2検出コイル6の出力波形とを交差させるにあたり、これは各コイルの最大値を等しくすることで実現することに限定されない。要は、最大値が一致していなくても、これらコイル出力が位置検出範囲Kの所定の地点で交差する波形をとっていればよい。   -In making the output waveform of the 1st detection coil 5 and the output waveform of the 2nd detection coil 6 cross, this is not limited to implement | achieving by making the maximum value of each coil equal. In short, even if the maximum values do not match, it is sufficient that the coil outputs have a waveform that intersects at a predetermined point in the position detection range K.

・位置検出装置1は、種々の機器や装置に適用可能である。   The position detection device 1 can be applied to various devices and apparatuses.

1…位置検出装置、2…被検出部、3…検出対象、4…電源、5…第1検出コイル、6…第2検出コイル、8…位置演算部、Vc…交流電圧、K…位置検出範囲、V1,V2…出力信号、V1max,V2max…出力の最大値、X1,X2…巻線径、Z…検出対象の移動方向。   DESCRIPTION OF SYMBOLS 1 ... Position detection apparatus, 2 ... Detected part, 3 ... Detection object, 4 ... Power supply, 5 ... 1st detection coil, 6 ... 2nd detection coil, 8 ... Position calculating part, Vc ... AC voltage, K ... Position detection Range, V1, V2 ... output signal, V1max, V2max ... maximum value of output, X1, X2 ... winding diameter, Z ... direction of movement of detection target.

Claims (6)

電源から交流電圧を検出コイルに印加し、検出対象との距離に応じて変化する前記検出コイルの出力信号を基に、位置演算部によって前記検出対象の位置を検出する位置検出装置において、
前記検出コイルは、前記検出対象に対し近い側に位置する第1検出コイルと、前記検出対象に対し遠い側に位置する第2検出コイルとを備え、
当該第1検出コイル及び第2検出コイルは、前記検出対象の位置検出範囲において前記第1検出コイルの出力の波形と前記第2検出コイルの出力の波形とが交差するように、形状が異なって形成され、
前記位置演算部は、前記第1検出コイル及び第2検出コイルの各出力信号を基に、前記検出対象の位置を演算する
ことを特徴とする位置検出装置。
In a position detection device that applies an AC voltage from a power source to the detection coil and detects the position of the detection target by a position calculation unit based on the output signal of the detection coil that changes according to the distance to the detection target.
The detection coil includes a first detection coil located on a side closer to the detection target, and a second detection coil located on a side far from the detection target,
The first detection coil and the second detection coil have different shapes so that the waveform of the output of the first detection coil and the waveform of the output of the second detection coil intersect in the position detection range of the detection target. Formed,
The position calculating unit calculates a position of the detection target based on output signals of the first detection coil and the second detection coil.
前記第1検出コイル及び第2検出コイルは、前記検出対象の位置検出範囲において前記第1検出コイルの出力の最大値と前記第2検出コイルの出力の最大値とが同じとなるように、形状が形成されている
請求項1に記載の位置検出装置。
The first detection coil and the second detection coil are shaped so that the maximum value of the output of the first detection coil and the maximum value of the output of the second detection coil are the same in the position detection range of the detection target. The position detection device according to claim 1, wherein:
前記第1検出コイル及び第2検出コイルは、前記検出対象の移動方向に沿って並んで配置されている
請求項1又は2に記載の位置検出装置。
The position detection device according to claim 1, wherein the first detection coil and the second detection coil are arranged side by side along a moving direction of the detection target.
前記第1検出コイル及び第2検出コイルは、流れる電流の方向が互いに逆となるように、巻き方向が逆となっている
請求項1〜3のうちいずれか一項に記載の位置検出装置。
The position detection device according to any one of claims 1 to 3, wherein the first detection coil and the second detection coil are wound in opposite directions so that directions of flowing currents are opposite to each other.
前記第2検出コイルは、前記第1検出コイルよりも巻線径が小さくなるように形成されている
請求項1〜4のうちいずれか一項に記載の位置検出装置。
The position detection device according to any one of claims 1 to 4, wherein the second detection coil is formed to have a winding diameter smaller than that of the first detection coil.
前記第2検出コイルは、前記第1検出コイルよりも巻数が少なく形成されている
請求項1〜4のうちいずれか一項に記載の位置検出装置。
The position detection device according to any one of claims 1 to 4, wherein the second detection coil has a smaller number of turns than the first detection coil.
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