WO2016104214A1 - Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method - Google Patents
Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method Download PDFInfo
- Publication number
- WO2016104214A1 WO2016104214A1 PCT/JP2015/084907 JP2015084907W WO2016104214A1 WO 2016104214 A1 WO2016104214 A1 WO 2016104214A1 JP 2015084907 W JP2015084907 W JP 2015084907W WO 2016104214 A1 WO2016104214 A1 WO 2016104214A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- group
- carbon atoms
- formula
- compound
- layer film
- Prior art date
Links
- 0 C1C2=C*1C=C2 Chemical compound C1C2=C*1C=C2 0.000 description 4
- HOSGYETYNRPRSW-UHFFFAOYSA-N c(cc1)ccc1-c1ccc(C2c3c(ccc(Oc4ccccc4)c4)c4ccc3Oc3ccc(cc(cc4)Oc5ccccc5)c4c23)cc1 Chemical compound c(cc1)ccc1-c1ccc(C2c3c(ccc(Oc4ccccc4)c4)c4ccc3Oc3ccc(cc(cc4)Oc5ccccc5)c4c23)cc1 HOSGYETYNRPRSW-UHFFFAOYSA-N 0.000 description 2
- UGEDBOSHKJTLQV-UHFFFAOYSA-N COc(ccc1c2C3c(cc4)ccc4-c4ccccc4)cc1ccc2Oc(cc1)c3c(cc2)c1cc2Oc1ccccc1 Chemical compound COc(ccc1c2C3c(cc4)ccc4-c4ccccc4)cc1ccc2Oc(cc1)c3c(cc2)c1cc2Oc1ccccc1 UGEDBOSHKJTLQV-UHFFFAOYSA-N 0.000 description 1
- OFTFYXUMWWVNRE-UHFFFAOYSA-N Oc(ccc1c2C3c(cc4)ccc4-c4ccccc4)cc1ccc2OC1C3=C(C=CC(OC2CCCCC2)=C2)C2=CC1 Chemical compound Oc(ccc1c2C3c(cc4)ccc4-c4ccccc4)cc1ccc2OC1C3=C(C=CC(OC2CCCCC2)=C2)C2=CC1 OFTFYXUMWWVNRE-UHFFFAOYSA-N 0.000 description 1
- MWPLVEDNUUSJAV-UHFFFAOYSA-N c1cc2cc3ccccc3cc2cc1 Chemical compound c1cc2cc3ccccc3cc2cc1 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/78—Ring systems having three or more relevant rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/30—Low-molecular-weight compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D161/00—Coating compositions based on condensation polymers of aldehydes or ketones; Coating compositions based on derivatives of such polymers
- C09D161/04—Condensation polymers of aldehydes or ketones with phenols only
- C09D161/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
Definitions
- the present invention relates to a compound, a resin, an underlayer film forming material for lithography, an underlayer film for lithography, a pattern forming method, and a purification method.
- the light source for lithography used for resist pattern formation is shortened from KrF excimer laser (248 nm) to ArF excimer laser (193 nm).
- KrF excimer laser 248 nm
- ArF excimer laser (193 nm)
- simply thinning the resist makes it difficult to obtain a resist pattern film thickness sufficient for substrate processing. Therefore, not only the resist pattern but also a process of creating a resist underlayer film between the resist and the semiconductor substrate to be processed and providing the resist underlayer film with a function as a mask during substrate processing is required.
- a resist underlayer film for lithography having a dry etching rate selection ratio close to that of a resist can be used.
- a material for forming such a resist underlayer film for lithography it contains a resin component having at least a substituent that generates a sulfonic acid residue when a predetermined energy is applied and a solvent, and a solvent.
- An underlayer film forming material for a multilayer resist process has been proposed (see, for example, Patent Document 1). Further, a resist underlayer film for lithography having a low dry etching rate selection ratio compared to the resist can be given.
- a resist underlayer film material containing a polymer having a specific repeating unit has been proposed (for example, see Patent Document 2). Furthermore, a resist underlayer film for lithography having a lower dry etching rate selectivity than the semiconductor substrate can be mentioned.
- a resist underlayer film material containing a polymer obtained by copolymerizing a repeating unit of acenaphthylenes and a repeating unit having a substituted or unsubstituted hydroxy group It has been proposed (for example, see Patent Document 3).
- an amorphous carbon underlayer film formed by CVD using methane gas, ethane gas, acetylene gas or the like as a raw material is well known.
- a resist underlayer film material capable of forming a resist underlayer film by a wet process such as spin coating or screen printing is required.
- the inventors of the present invention provide a lithographic lower layer containing a naphthalene formaldehyde polymer containing a specific structural unit and an organic solvent as a material that is excellent in optical characteristics and etching resistance and is soluble in a solvent and applicable to a wet process.
- a film-forming composition has been proposed (see, for example, Patent Documents 4 and 5).
- a silicon nitride film formation method for example, refer to Patent Document 6
- a silicon nitride film CVD formation method for example, Patent Document 7
- an intermediate layer material for a three-layer process a material containing a silsesquioxane-based silicon compound is known (for example, see Patent Documents 8 and 9).
- the present invention has been made in view of the above-mentioned problems, and its purpose is useful for forming a photoresist underlayer film, a wet process is applicable, and excellent heat resistance and etching resistance.
- Another object of the present invention is to provide a compound and resin, a lower layer film forming material, and a pattern forming method, which are further improved in solubility in a safe solvent.
- each X independently represents an oxygen atom or a sulfur atom, or non-bridged
- R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms
- Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms
- each R 2 is independently a straight chain having 1 to 10 carbon atoms, A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group
- at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, m
- the crosslinking reactive compound is at least one selected from the group consisting of aldehydes, ketones, carboxylic acids, carboxylic acid halides, halogen-containing compounds, amino compounds, imino compounds, isocyanates and unsaturated hydrocarbon group-containing compounds.
- Resin. [9] Resin as described in [6] containing the structure represented by following formula (2). (In the formula (2), each X independently represents an oxygen atom, a sulfur atom, or a non-bridged group, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms.
- Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms.
- at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms
- each R 3 is independently a single bond or a straight chain having 1 to 20 carbon atoms.
- a material for forming an underlayer film for lithography comprising the compound according to any one of [1] to [5] and / or the resin according to any one of claims 6 to 11.
- the underlayer film forming material for lithography according to [12] further comprising an organic solvent.
- a resist pattern forming method comprising: [18] A step (B-1) of forming a lower layer film on the substrate using the lower layer film forming material for lithography described in any one of [12] to [15]; Forming an intermediate layer film on the lower layer film using a resist intermediate layer film material containing silicon atoms (B-2); Forming at least one photoresist layer on the intermediate film (B-3); After the step (B-3), a step (B-4) of i
- a compound that is useful for forming a photoresist underlayer film is applicable to a wet process, has excellent heat resistance and etching resistance, and has further improved solubility in a safe solvent, A resin and a material for forming a lower layer film for lithography can be realized.
- each X independently represents an oxygen atom or a sulfur atom, or non-bridged
- R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms
- Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms
- each R 2 is independently a straight chain having 1 to 10 carbon atoms, A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group
- at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms
- m is each independently an integer of 1 to 6
- p is each independently 0 or 1
- n is an integer of 1 to
- the compound of this embodiment is useful for forming a photoresist underlayer film, can be applied to a wet process, has excellent heat resistance and etching resistance, and is soluble in a safe solvent. Is further improved.
- the compound of this embodiment has high heat resistance, a relatively high carbon concentration, a relatively low oxygen concentration, and a high solvent solubility because of its structural characteristics.
- each X independently represents an oxygen atom, a sulfur atom, or no bridge.
- the case where X is non-crosslinked means that the compound represented by the formula (1) is a compound represented by the following formula (1B).
- R 1 , R 2 , m, p and n are the same as described above.
- R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms.
- the compound of the present embodiment has a configuration in which each benzene ring is bonded via R 1 .
- the 2n-valent group may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms.
- R 2 is independently a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or 1 to It is a monovalent group selected from the group consisting of 30 alkoxy groups, aryloxy groups having 6 to 30 carbon atoms, and hydroxyl groups, and m bonds to each aromatic ring.
- at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms.
- M is an integer of 1 to 6 independently. Each p is independently 0 or 1. n is an integer of 1 to 4.
- An alkanehexyl group having 2 to 30 carbon atoms, and when n 4, an alkaneoctyl group having 3 to 30 carbon atoms.
- Examples of the 2n-valent group include those having a linear, branched or cyclic structure.
- the 2n-valent group may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms.
- the alicyclic hydrocarbon group includes a bridged alicyclic hydrocarbon group.
- the alkoxy group having 1 to 30 carbon atoms is selected from a linear hydrocarbon group, a branched hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination of two or more thereof. And a group composed of an oxygen atom.
- the alicyclic hydrocarbon group includes a bridged alicyclic hydrocarbon group.
- the alkoxy group may have a double bond, a hetero atom, or a halogen atom.
- the alkoxy group having 1 to 30 carbon atoms is not particularly limited, but is preferably a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a cyclobutyloxy group, a cyclopentyloxy group, a cyclohexyloxy group.
- the aryloxy group having 6 to 30 carbon atoms is a group composed of an aromatic hydrocarbon group having 6 to 30 carbon atoms and an oxygen atom, and contributes to improving the solubility of the compound represented by the formula (1).
- Specific examples of such an aryloxy group having 6 to 30 carbon atoms include, but are not limited to, phenyloxy group, methylphenyloxy group, dimethylphenyloxy group, trimethylphenyloxy group, ethylphenyloxy group, propylphenyl group Oxy group, butylphenyloxy group, cyclohexylphenyloxy group, biphenyloxy group, terphenyloxy group, naphthyloxy group, fluorenyloxy group, anthracyloxy group, pyrenyloxy group, methylpyrenyloxy group, dimethylpyrenyloxy group Groups and the like.
- the compound represented by the formula (1) has a relatively low molecular weight, but has high heat resistance due to the rigidity of its structure, and therefore can be used under high temperature baking conditions.
- the substrate has a relatively low molecular weight and low viscosity, it is easy to uniformly fill every corner of a step even on a substrate having a step (particularly, a fine space or a hole pattern).
- the material for forming a lower layer film for lithography using this tends to have a relatively advantageous improvement in embedding characteristics and planarization characteristics.
- it is a compound having a relatively high carbon concentration, high etching resistance is also imparted.
- having an alkoxy group having 1 to 30 carbon atoms further improves the solubility in a safe solvent for highly stabilizing the product quality.
- the compound represented by the formula (1) is preferably a compound represented by the following formula (1A) from the viewpoint of improving heat resistance by forming a rigid structure.
- R 1 , R 2 , m, p and n are the same as described above.
- the compound represented by the formula (1) is preferably a compound represented by the following formula (1B) from the viewpoint of improving the safety solvent solubility.
- R 1 , R 2 , m, p and n are the same as described above.
- the compound represented by the formula (1A) is more preferably a compound represented by the formula (1A-1) from the viewpoint of improving the heat resistance by improving the degree of crosslinking during baking by introducing an R 5 O group.
- each R 4 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or 2 to 10 carbon atoms.
- R 5 is a monovalent group having 1 to 30 carbon atoms, and is a linear hydrocarbon group, branched hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group And a monovalent group consisting of a combination of two or more thereof, which may have a double bond, a hetero atom, or a halogen atom, wherein the alicyclic hydrocarbon group As for, a bridged alicyclic hydrocarbon group is also included, wherein m 3 is each independently an integer of 0 to 4, where at least one m 3 is 1 and m 4 is each independently And m 3 + m 4 is an integer of 1 to 4, and R 1 , n and p are the same as above.
- R 1 , n and p are the same as above.
- the compound represented by the formula (1B) is more preferably a compound represented by the formula (1B-1) from the viewpoint of further improving the solubility of the safe solvent by introducing the R 5 O group. .
- the compound represented by the formula (1-2) is an embodiment in which X ⁇ O in the formula (1-2), that is, the following formula (1A-2), from the viewpoint of improving heat resistance by forming a rigid structure. It is more preferable that it is a compound represented by these.
- R 1 and p have the same meanings as described in the formula (1).
- R 6 has the same meaning as R 2 described in Formula (1), and m 6 is an integer of 1 to 3.
- the compound represented by the formula (1-2) is an embodiment in which X is non-crosslinked in the formula (1-2), that is, in the following formula (1B-2) More preferably, it is a compound represented.
- R 1 and p have the same meanings as described in the formula (1).
- R 6 has the same meaning as R 2 described in Formula (1), and m 6 is an integer of 1 to 3.
- the compound represented by the above formula (1A-2) is preferably a compound represented by the following formula (1A-3).
- R 1 has the same meaning as described in the formula (1)
- R 5 has the same meaning as that described in the formula (1A-1).
- the compound represented by the above formula (1B-2) is preferably a compound represented by the following formula (1B-3).
- R 1 has the same meaning as described in the formula (1)
- R 5 has the same meaning as described in the formula (1A-1).
- R 2 , X and m are as defined in the above formula (1).
- the compound represented by the formula (1A-2) may be a compound represented by the following formula (BisN-1-CH1) or the following formula (BisN-1-CH2). Particularly preferred.
- the compound represented by the formula (1A-2) may be a compound represented by the following formula (BisN-1-PH1) or the following formula (BisN-1-PH2). preferable.
- the compound represented by the formula (1) can be appropriately synthesized by applying a known technique, and the synthesis technique is not particularly limited. For example, under normal pressure, a phenol or thiophenol corresponding to the desired compound structure and an aldehyde or ketone corresponding to the desired compound structure are subjected to a polycondensation reaction in the presence of an acid catalyst. A compound represented by the formula (1) can be obtained. Moreover, it can also carry out under pressure as needed. By changing the reaction conditions, it is possible to control the generation ratio between the structure when X is crosslinked and the structure when X is non-crosslinked.
- the reaction temperature when the reaction temperature is increased, the reaction time is increased, and the acid strength of the acid catalyst is increased, the generation ratio of the structure crosslinked with X tends to increase.
- the reaction temperature when the reaction temperature is lowered, the reaction time is shortened, and the acid strength of the acid catalyst is weakened, the generation ratio of the structure that is non-crosslinked with X tends to increase.
- the reaction temperature is lowered, the reaction time is shortened, and the acid strength of the acid catalyst is weakened, the generation ratio of the structure that is non-crosslinked with X tends to increase.
- emphasizing high solvent solubility a higher ratio of the structure when X is non-crosslinked is preferable, while when emphasizing high heat resistance, a higher ratio of the structure when crosslinked with X is preferable. .
- phenols include, but are not limited to, phenol, methylphenol, methoxybenzene, catechol, resorcinol, hydroquinone, and the like. These can be used individually by 1 type or in combination of 2 or more types. Among these, it is more preferable to use hydroquinone because a xanthene structure can be easily formed.
- thiophenols examples include, but are not particularly limited to, benzenethiol, methylbenzenethiol, methoxybenzenethiol, benzenedithiol, and the like. These can be used individually by 1 type or in combination of 2 or more types. Among these, it is more preferable to use benzenedithiol because a thioxanthene structure can be easily formed.
- aldehydes examples include formaldehyde, trioxane, paraformaldehyde, acetaldehyde, propylaldehyde, butyraldehyde, hexylaldehyde, decylaldehyde, undecylaldehyde, phenylacetaldehyde, phenylpropylaldehyde, furfural, benzaldehyde, hydroxybenzaldehyde, fluorobenzaldehyde, Chlorobenzaldehyde, nitrobenzaldehyde, methylbenzaldehyde, dimethylbenzaldehyde, ethylbenzaldehyde, propylbenzaldehyde, butylbenzaldehyde, cyclohexylbenzaldehyde, biphenylaldehyde, naphthaldehyde, anthracenecarboxaldehyde, phen
- benzaldehyde hydroxybenzaldehyde, fluorobenzaldehyde, chlorobenzaldehyde, nitrobenzaldehyde, methylbenzaldehyde, dimethylbenzaldehyde, ethylbenzaldehyde, propylbenzaldehyde, butylbenzaldehyde, cyclohexylbenzaldehyde, biphenylaldehyde, naphthaldehyde, anthracenecarboxaldehyde, phenanthrenecarboxaldehyde , Pyrenecarboxaldehyde, glyoxal, glutaraldehyde, phthalaldehyde, naphthalene dicarboxyaldehyde, biphenyl dicarboxaldehyde, anthracene dicarboxalde
- ketones examples include acetone, methyl ethyl ketone, cyclobutanone, cyclopentanone, cyclohexanone, norbornanone, tricyclohexanone, tricyclodecanone, adamantanone, fluorenone, benzofluorenone, acenaphthenequinone, acenaphthenone, anthraquinone, and the like. However, it is not particularly limited to these. These can be used alone or in combination of two or more.
- cyclopentanone cyclohexanone, norbornanone, tricyclohexanone, tricyclodecanone, adamantanone, fluorenone, benzofluorenone, acenaphthenequinone, acenaphthenone and anthraquinone from the viewpoint of giving high heat resistance.
- the acid catalyst used in the above reaction can be appropriately selected from known ones and is not particularly limited.
- inorganic acids and organic acids are widely known, and specific examples thereof include inorganic acids such as hydrochloric acid, sulfuric acid, phosphoric acid, hydrobromic acid, hydrofluoric acid, oxalic acid, Malonic acid, succinic acid, adipic acid, sebacic acid, citric acid, fumaric acid, maleic acid, formic acid, p-toluenesulfonic acid, methanesulfonic acid, trifluoroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoromethanesulfonic acid, benzenesulfone Acids, organic acids such as naphthalene sulfonic acid, naphthalene disulfonic acid, Lewis acids such as zinc chloride, aluminum chloride, iron chloride, boron trifluoride, silicotungstic acid, phosphotungstic acid,
- an organic acid and a solid acid are preferable from the viewpoint of production, and hydrochloric acid or sulfuric acid is preferably used from the viewpoint of production such as availability and ease of handling.
- an acid catalyst 1 type can be used individually or in combination of 2 or more types.
- the amount of the acid catalyst used can be appropriately set according to the raw material used, the type of catalyst used, and the reaction conditions, and is not particularly limited, but is 0.01 to 100 per 100 parts by mass of the reactive raw material. It is preferable that it is a mass part.
- a reaction solvent may be used.
- the reaction solvent is not particularly limited as long as the reaction between the aldehyde or ketone to be used and the phenol or thiophenol proceeds, and can be appropriately selected from known ones. , Water, methanol, ethanol, propanol, butanol, tetrahydrofuran, dioxane, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, or a mixed solvent thereof.
- a solvent can be used individually by 1 type or in combination of 2 or more types.
- the usage-amount of these solvent can be suitably set according to the raw material to be used, the kind of acid catalyst to be used, and also reaction conditions.
- the amount of the solvent used is not particularly limited, but is preferably in the range of 0 to 2000 parts by mass with respect to 100 parts by mass of the reaction raw material.
- the reaction temperature in the above reaction can be appropriately selected according to the reactivity of the reaction raw materials.
- the reaction temperature is not particularly limited, but is usually in the range of 10 to 200 ° C.
- the reaction temperature is preferably higher, and specifically in the range of 60 to 200 ° C.
- the reaction method can be appropriately selected from known methods, and is not particularly limited.
- the reaction method may be a method in which phenols or thiophenols, aldehydes or ketones, and an acid catalyst are charged all at once, phenols or thiols.
- phenols, aldehydes or ketones are dropped in the presence of an acid catalyst.
- the obtained compound can be isolated according to a conventional method, and is not particularly limited. For example, in order to remove unreacted raw materials, acid catalysts, etc. existing in the system, a general technique such as raising the temperature of the reaction kettle to 130 to 230 ° C. and removing volatile components at about 1 to 50 mmHg, By taking it, the target compound can be obtained.
- reaction conditions 1 mol to excess of phenols or thiophenols and 0.001 to 1 mol of acid catalyst are used with respect to 1 mol of aldehyde or ketone, and 50 to 150 ° C. at normal pressure. The reaction proceeds for about 20 minutes to 100 hours.
- the target product can be isolated by a known method.
- the reaction solution is concentrated, pure water is added to precipitate the reaction product, cooled to room temperature, filtered and separated, and the solid obtained by filtration is dried, followed by column chromatography. Separating and purifying from the by-product, and performing solvent distillation, filtration, and drying, a compound that is a precursor of the compound represented by the formula (1), which is the target product, can be obtained.
- the precursor compound obtained by the above method can be obtained by a known method, for example, by replacing the hydrogen atom of at least one phenolic hydroxyl group with a monovalent group having 1 to 30 carbon atoms.
- a compound represented by the formula (1) can be obtained.
- the method for replacing the hydrogen atom of the phenolic hydroxyl group with a monovalent group having 1 to 30 carbon atoms is not particularly limited.
- the precursor compound is reacted with a halogenated hydrocarbon compound in the presence of a base catalyst. Can be obtained by dehydrohalogenation reaction.
- the halogenated hydrocarbon compound is not particularly limited, but a halogenated hydrocarbon compound having 1 to 30 carbon atoms is preferably used.
- the halogenated hydrocarbon compound is composed of a linear hydrocarbon group, a branched hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a group composed of two or more thereof, and a halogen atom.
- the alicyclic hydrocarbon group includes a bridged cyclic hydrocarbon group.
- the halogenated hydrocarbon compound may have a double bond, a hetero atom, or another type of halogen atom.
- halogenated hydrocarbon compound examples include methyl chloride, methyl bromide, methyl iodide, propyl chloride, propyl bromide, propyl iodide, butyl chloride, butyl bromide, butyl iodide, heptyl chloride, heptyl bromide, Examples include heptyl iodide, hexyl chloride, hexyl bromide, hexyl iodide, decyl chloride, decyl bromide, decyl iodide, or a compound group represented by the following formula (5), but are not particularly limited thereto. These can be used individually by 1 type or in combination of 2 or more types.
- Y represents a chlorine atom, a bromine atom or an iodine atom.
- a base catalyst sodium carbonate, potassium carbonate, triethylamine, ammonia, sodium hydroxide, etc.
- organic solvent such as dimethylformamide
- 0.1 to 10 halogenated hydrocarbon compounds are used per 1 mol of the precursor compound.
- the mole is reacted at 0 to 150 ° C. for about 0.5 to 20 hours.
- at least one phenolic hydroxyl group in the obtained precursor compound can be converted into an alkoxyl group.
- the compound represented by the formula (1) is obtained by filtration, washing with alcohols such as methanol, washing with water, separation by filtration, and drying.
- the molecular weight of the compound represented by the formula (1) is not particularly limited, but the weight average molecular weight Mw is preferably 350 to 5,000, and more preferably 400 to 3,000. In addition, said Mw can be measured by the method as described in the Example mentioned later.
- the compound represented by the formula (1) can be used as it is as a material for forming a lower layer film for lithography. Moreover, it can be used also as resin obtained by using the compound represented by said Formula (1) as a monomer. For example, it can also be used as a resin obtained by reacting a compound represented by the formula (1) with a compound having crosslinking reactivity. Examples of the resin obtained using the compound represented by the formula (1) as a monomer include those having a structure represented by the following formula (2). That is, the lower layer film forming material for lithography of the present embodiment may contain a resin having a structure represented by the following formula (2).
- each X independently represents an oxygen atom or a sulfur atom, or non-bridged
- R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms
- the hydrogen group may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms
- each R 2 is independently a straight chain having 1 to 10 carbon atoms.
- R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms
- each R 3 independently represents a single bond or 1 to 20 carbon atoms.
- a linear or branched alkylene group m 2 are each independently Is an integer from 1 to 5
- p are each independently 0 or 1
- n is an integer of 1-4.
- each X independently represents an oxygen atom, a sulfur atom, or no crosslinking.
- the case where X is non-crosslinked means that the structure represented by the formula (2) is a structure represented by the following formula (2B).
- R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms, and each aromatic ring is bonded through this R 1 .
- the 2n-valent group may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms.
- R 2 each independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or 1 to 30 carbon atoms.
- a monovalent group selected from the group consisting of an alkoxy group having 5 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms and a hydroxyl group, each having m 2 bonded to the aromatic ring.
- at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms.
- Each R 3 is independently a single bond or a linear or branched alkylene group having 1 to 20 carbon atoms.
- n 2 is each independently an integer of 1 to 5
- p is each independently 0 or 1
- n is an integer of 1 to 4.
- the 2n-valent group has the same meaning as described in the description relating to the formula (1).
- the structure represented by the formula (2) is preferably a structure represented by the following formula (2A) from the viewpoint of improving heat resistance by forming a rigid structure.
- the structure represented by the formula (2A) is a structure represented by the following formula (2A-1) from the viewpoint of improving heat resistance by improving the degree of crosslinking during baking by introducing an R 5 O group. Is preferred.
- the structure represented by the formula (2B) is preferably a structure represented by the following formula (2B-1) from the viewpoint of improving the safety solvent solubility.
- the crosslinkable compound is not particularly limited as long as it can oligomerize the compound represented by the formula (1), and a known compound can be used. Specific examples thereof include, but are not limited to, aldehydes, ketones, carboxylic acids, carboxylic acid halides, halogen-containing compounds, amino compounds, imino compounds, isocyanates, unsaturated hydrocarbon group-containing compounds, and the like.
- the resin having the structure represented by the formula (2) are not limited to the following, but the compound represented by the formula (1) is condensed with an aldehyde which is a compound having a crosslinking reactivity, and the like. And a novolak resin.
- aldehyde for example, formaldehyde, trioxane, paraformaldehyde, benzaldehyde, acetaldehyde, propylaldehyde, phenylacetaldehyde, phenylpropylaldehyde, hydroxybenzaldehyde
- examples thereof include, but are not limited to, chlorobenzaldehyde, nitrobenzaldehyde, methylbenzaldehyde, ethylbenzaldehyde, butylbenzaldehyde, biphenylaldehyde, naphthaldehyde, anthracenecarbaldehyde, phenanthrenecarbaldehyde, pyrenecarbaldehyde, and furfural.
- aldehydes can be used individually by 1 type or in combination of 2 or more types.
- the amount of the aldehyde used is not particularly limited, but is preferably 0.2 to 5 mol, more preferably 0.5 to 2 mol, relative to 1 mol of the compound represented by the formula (1). is there.
- an acid catalyst can be used.
- the acid catalyst used here can be appropriately selected from known ones and is not particularly limited.
- inorganic acids and organic acids are widely known, and specific examples thereof include inorganic acids such as hydrochloric acid, sulfuric acid, phosphoric acid, hydrobromic acid, hydrofluoric acid, oxalic acid, Malonic acid, succinic acid, adipic acid, sebacic acid, citric acid, fumaric acid, maleic acid, formic acid, p-toluenesulfonic acid, methanesulfonic acid, trifluoroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoromethanesulfonic acid, benzenesulfone Acids, organic acids such as naphthalene sulfonic acid, naphthalene disulfonic acid, Lewis acids such as zinc chloride, aluminum chloride, iron
- organic acids and solid acids are preferable from the viewpoint of production, and hydrochloric acid or sulfuric acid is preferable from the viewpoint of production such as availability and ease of handling.
- 1 type can be used individually or in combination of 2 or more types.
- the amount of the acid catalyst used can be appropriately set according to the raw material to be used, the type of the acid catalyst to be used, and the reaction conditions, and is not particularly limited, but is 0.01 to 100 parts by weight with respect to 100 parts by mass of the reaction raw material. The amount is preferably 100 parts by mass.
- Indene hydroxyindene, benzofuran, hydroxyanthracene, acenaphthylene, biphenyl, bisphenol, trisphenol, dicyclopentadiene, tetrahydroindene, 4-vinylcyclohexene, norbornadiene, 5-vinylnorborna-2-ene, ⁇ -pinene, ⁇ -pinene
- aldehydes may not be used.
- a reaction solvent can also be used.
- the reaction solvent in this polycondensation can be appropriately selected from known solvents and is not particularly limited. Examples thereof include water, methanol, ethanol, propanol, butanol, tetrahydrofuran, dioxane, and mixed solvents thereof. Can be mentioned.
- a solvent can be used individually by 1 type or in combination of 2 or more types.
- the amount of these solvents used can be appropriately set according to the raw material used, the type of acid catalyst used, and the reaction conditions.
- the amount of the solvent used is not particularly limited, but is preferably in the range of 0 to 2000 parts by mass with respect to 100 parts by mass of the reaction raw material.
- the reaction temperature can be appropriately selected according to the reactivity of the reaction raw material, and is not particularly limited.
- the reaction temperature is usually in the range of 10 to 200 ° C.
- the reaction method can select and use a well-known method suitably, although it does not specifically limit,
- the method of charging the compound represented by said Formula (1), aldehydes, and a catalyst collectively, said Formula (1) There is a method in which a compound or an aldehyde represented by (2) is dropped in the presence of a catalyst.
- the obtained compound can be isolated according to a conventional method, and is not particularly limited.
- a general method such as raising the temperature of the reaction vessel to 130 to 230 ° C. and removing volatile components at about 1 to 50 mmHg is adopted.
- a novolak resin as the target product can be obtained.
- the resin having the structure represented by the formula (2) may be a homopolymer of the compound represented by the formula (1), but is a copolymer with other phenols. May be.
- the copolymerizable phenols include phenol, cresol, dimethylphenol, trimethylphenol, butylphenol, phenylphenol, diphenylphenol, naphthylphenol, resorcinol, methylresorcinol, catechol, butylcatechol, methoxyphenol, methoxyphenol, Although propylphenol, pyrogallol, thymol, etc. are mentioned, it is not specifically limited to these.
- the resin having the structure represented by the formula (2) may be copolymerized with a polymerizable monomer in addition to the other phenols described above.
- the copolymerization monomer include naphthol, methylnaphthol, methoxynaphthol, dihydroxynaphthalene, indene, hydroxyindene, benzofuran, hydroxyanthracene, acenaphthylene, biphenyl, bisphenol, trisphenol, dicyclopentadiene, tetrahydroindene, 4-vinylcyclohexene.
- the resin having the structure represented by the above formula (2) is a binary or more (for example, 2-4 quaternary) copolymer of the compound represented by the above formula (1) and the above-described phenols. Even if it is a binary or more (for example, 2-4 quaternary) copolymer of the compound represented by the formula (1) and the above-mentioned copolymerization monomer, it is represented by the formula (1). It may be a ternary or more (for example, ternary to quaternary) copolymer of the above compound, the above-mentioned phenols, and the above-mentioned copolymerization monomer.
- the molecular weight of the resin having the structure represented by the formula (2) is not particularly limited, but the polystyrene equivalent weight average molecular weight (Mw) is preferably 500 to 30,000, more preferably 750 to 20,000. Further, from the viewpoint of increasing the crosslinking efficiency and suppressing the volatile components in the baking, the molecular weight of the resin having the structure represented by the formula (2) is such that the dispersity (weight average molecular weight Mw / number average molecular weight Mn) is 1. Those within the range of 2 to 7 are preferred.
- the compound represented by the formula (1) and / or the resin having the structure represented by the formula (2) has high solubility in a solvent from the viewpoint of easier application of a wet process. It is preferable. More specifically, these compounds and / or resins preferably have a solubility in 1-methoxy-2-propanol (PGME) or propylene glycol monomethyl ether acetate (PGMEA) of 10% by mass or more.
- PGME 1-methoxy-2-propanol
- PGMEA propylene glycol monomethyl ether acetate
- the solubility with respect to PGME or PGMEA is defined as “the mass of the compound and / or resin ⁇ (the mass of the compound and / or the resin + the mass of the solvent) ⁇ 100 (mass%)”.
- the material for forming a lower layer film for lithography of the present embodiment contains at least one substance selected from the group consisting of the compound of the present embodiment and the resin of the present embodiment. More specifically, the material for forming a lower layer film for lithography of the present embodiment is obtained by reacting the compound represented by the formula (1) and the compound represented by the formula (1) with a compound having a crosslinking reaction. It contains at least one substance selected from the group consisting of resins.
- the content of the compound of the present embodiment and / or the resin of the present embodiment is not particularly limited, but includes an organic solvent.
- the total amount is preferably 1 to 33 parts by mass, more preferably 2 to 25 parts by mass, and still more preferably 3 to 20 parts by mass with respect to 100 parts by mass.
- the underlayer film forming material for lithography of the present embodiment may contain other components such as a crosslinking agent, an acid generator, and an organic solvent, as necessary.
- these optional components will be described.
- the lower layer film forming material for lithography of the present embodiment may contain a crosslinking agent as necessary from the viewpoint of suppressing intermixing.
- a crosslinking agent that can be used in this embodiment include double bonds such as melamine compounds, guanamine compounds, glycoluril compounds or urea compounds, epoxy compounds, thioepoxy compounds, isocyanate compounds, azide compounds, alkenyl ether groups, and the like.
- the compound include those substituted with at least one group selected from a methylol group, an alkoxymethyl group, and an acyloxymethyl group, but are not particularly limited thereto.
- these crosslinking agents can be used individually by 1 type or in combination of 2 or more types. These may be used as additives, but these crosslinkable groups may be introduced as pendant groups in the polymer side chain.
- a compound containing a hydroxy group can also be used as a crosslinking agent.
- the melamine compound include, but are not limited to, hexamethylol melamine, hexamethoxymethyl melamine, a compound in which 1 to 6 methylol groups of hexamethylol melamine are methoxymethylated, or a mixture thereof, hexamethoxyethyl melamine, hexa
- examples include acyloxymethyl melamine, compounds in which 1 to 6 methylol groups of hexamethylol melamine are acyloxymethylated, or a mixture thereof.
- epoxy compound examples include, but are not limited to, tris (2,3-epoxypropyl) isocyanurate, trimethylolmethane triglycidyl ether, trimethylolpropane triglycidyl ether, triethylolethane triglycidyl ether, and the like. .
- the guanamine compound include, but are not limited to, a compound in which 1 to 4 methylol groups of tetramethylolguanamine, tetramethoxymethylguanamine, and tetramethylolguanamine are methoxymethylated, or a mixture thereof, tetramethoxyethylguanamine, tetra Examples include compounds in which 1 to 4 methylol groups of acyloxyguanamine and tetramethylolguanamine are acyloxymethylated, or a mixture thereof.
- glycoluril compound examples include, but are not limited to, a compound in which 1 to 4 methylol groups of tetramethylol glycoluril, tetramethoxyglycoluril, tetramethoxymethylglycoluril, tetramethylolglycoluril are methoxymethylated or Examples thereof include a mixture thereof, a compound in which 1 to 4 methylol groups of tetramethylol glycoluril are acyloxymethylated, or a mixture thereof.
- urea compound examples include, but are not limited to, tetramethylol urea, tetramethoxymethyl urea, a compound in which 1 to 4 methylol groups of tetramethylol urea are methoxymethylated, or a mixture thereof, tetramethoxyethyl urea, and the like. Can be mentioned.
- the compound containing an alkenyl ether group include, but are not limited to, ethylene glycol divinyl ether, triethylene glycol divinyl ether, 1,2-propanediol divinyl ether, 1,4-butanediol divinyl ether, tetramethylene glycol.
- the content of the crosslinking agent is not particularly limited, but is 5 to 50 with respect to 100 parts by mass of the compound of the present embodiment and / or the resin of the present embodiment.
- the amount is preferably part by mass, more preferably 10 to 40 parts by mass.
- the lower layer film forming material for lithography of the present embodiment may contain an acid generator as necessary from the viewpoint of further promoting the crosslinking reaction by heat.
- an acid generator those that generate acid by thermal decomposition and those that generate acid by light irradiation are known, and any of them can be used.
- R 101a , R 101b and R 101c are each independently a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, an alkenyl group, an oxoalkyl group or an oxoalkenyl group, and 6 to 6 carbon atoms.
- 20 aryl groups, aralkyl groups having 7 to 12 carbon atoms, or aryloxoalkyl groups, part or all of hydrogen atoms of these groups may be substituted with alkoxy groups or the like.
- R 101b and R 101c may form a ring. When a ring is formed, R 101b and R 101c each independently represent an alkylene group having 1 to 6 carbon atoms.
- K ⁇ represents a non-nucleophilic counter ion.
- R 101d , R 101e , R 101f and R 101g are each independently represented by adding a hydrogen atom to R 101a , R 101b and R 101c .
- R 101d and R 101e , R 101d and R 101e and R 101f may form a ring, and in the case of forming a ring, R 101d and R 101e and R 101d , R 101e and R 101f have 3 carbon atoms.
- R 101a , R 101b , R 101c , R 101d , R 101e , R 101f and R 101g may be the same as or different from each other.
- Specific examples of the alkyl group include, but are not limited to, for example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group.
- alkenyl groups include, but are not limited to, vinyl groups, allyl groups, propenyl groups, butenyl groups, hexenyl groups, and cyclohexenyl groups.
- Examples of the oxoalkyl group include, but are not limited to, 2-oxocyclopentyl group, 2-oxocyclohexyl group, 2-oxopropyl group, 2-cyclopentyl-2-oxoethyl group, 2-cyclohexyl-2- An oxoethyl group, a 2- (4-methylcyclohexyl) -2-oxoethyl group, and the like can be given.
- Examples of the oxoalkenyl group include, but are not limited to, a 2-oxo-4-cyclohexenyl group, a 2-oxo-4-propenyl group, and the like.
- aryl group examples include, but are not limited to, phenyl group, naphthyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group.
- alkoxyphenyl group such as m-tert-butoxyphenyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert-butylphenyl group, 4-butylphenyl group, Alkylphenyl groups such as dimethylphenyl group, alkyl naphthyl groups such as methyl naphthyl group and ethyl naphthyl group, alkoxy naphthyl groups such as methoxy naphthyl group and ethoxy naphthyl group, dialkyl naphthyl groups such as dimethyl naphthyl group and diethyl naphthyl group, dimethoxy naphthyl group Group, diethoxynaphthy Dialkoxy naphthyl group such as a group.
- aralkyl group For example, a benzyl group, a phenylethyl group, a phenethyl group etc. are mentioned.
- aryloxoalkyl groups include, but are not limited to, 2-phenyl-2-oxoethyl group, 2- (1-naphthyl) -2-oxoethyl group, 2- (2-naphthyl) -2-oxoethyl group, and the like. And 2-aryl-2-oxoethyl group.
- non-nucleophilic counter ion of K ⁇ examples include, but are not limited to, halide ions such as chloride ion and bromide ion, triflate, 1,1,1-trifluoroethanesulfonate, nonafluorobutanesulfonate, and the like.
- the heteroaromatic ring is not limited to the following, but an imidazole derivative (for example, imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.), pyrazole derivatives, furazane derivatives, pyrroline derivatives (eg pyrroline, 2-methyl-1-pyrroline etc.), pyrrolidine derivatives (eg pyrrolidine, N-methyl) Pyrrolidine, pyrrolidinone, N-methylpyrrolidone, etc.), imidazoline derivatives, imidazolidine derivatives, pyridine derivatives (eg pyridine, methylpyridine, ethylpyridine, propylpyridine, butylpyridine, 4- (1-butylpentyl) pyridine, dimethylpyridine, trimethyl) Pyridine, triethyl
- imidazole derivative for example, imidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, etc.
- the onium salts of the formulas (P1a-1) and (P1a-2) have a function as a photoacid generator and a thermal acid generator.
- the onium salt of the formula (P1a-3) has a function as a thermal acid generator.
- R 102a and R 102b each independently represent a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms.
- R 103 represents a linear, branched or cyclic alkylene group having 1 to 10 carbon atoms.
- R 104a and R 104b each independently represent a 3-oxoalkyl group having 3 to 7 carbon atoms.
- K ⁇ represents a non-nucleophilic counter ion.
- R 102a and R 102b include, but are not limited to, a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.
- R 103 include, but are not limited to, methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene.
- R 103 includes, but are not limited to, methylene group, ethylene group, propylene group, butylene group, pentylene group, hexylene group, heptylene group, octylene group, nonylene group, 1,4-cyclohexylene.
- R 104a and R 104b include, but are not limited to, 2-oxopropyl group, 2-oxocyclopentyl group, 2-oxocyclohexyl group, 2-oxocycloheptyl group and the like.
- K - is the formula (P1a-1), can be exemplified the same ones as described in (P1a-2) and (P1a-3).
- R 105 and R 106 are each independently a linear, branched or cyclic alkyl group or halogenated alkyl group having 1 to 12 carbon atoms, an aryl group having 6 to 20 carbon atoms or halogen. An aryl group or an aralkyl group having 7 to 12 carbon atoms.
- alkyl group for R 105 and R 106 examples include, but are not limited to, for example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl.
- halogenated alkyl group examples include, but are not limited to, a trifluoromethyl group, a 1,1,1-trifluoroethyl group, a 1,1,1-trichloroethyl group, and a nonafluorobutyl group.
- aryl group examples include, but are not limited to, phenyl group, p-methoxyphenyl group, m-methoxyphenyl group, o-methoxyphenyl group, ethoxyphenyl group, p-tert-butoxyphenyl group, m-tert- Alkoxyphenyl groups such as butoxyphenyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, ethylphenyl group, 4-tert-butylphenyl group, 4-butylphenyl group, dimethylphenyl group, etc.
- An alkylphenyl group is mentioned.
- halogenated aryl group examples include, but are not limited to, a fluorophenyl group, a chlorophenyl group, a 1,2,3,4,5-pentafluorophenyl group, and the like.
- aralkyl group examples include, but are not limited to, a benzyl group and a phenethyl group.
- R 107 , R 108 and R 109 are each independently a linear, branched or cyclic alkyl group or halogenated alkyl group having 1 to 12 carbon atoms, or aryl having 6 to 20 carbon atoms.
- R 108 and R 109 may be bonded to each other to form a cyclic structure.
- R 108 and R 109 each represent a linear or branched alkylene group having 1 to 6 carbon atoms. .
- Examples of the alkyl group, halogenated alkyl group, aryl group, halogenated aryl group, and aralkyl group of R 107 , R 108 , and R 109 include the same groups as those described for R 105 and R 106 .
- the alkylene group for R 108 and R 109 is not limited to the following, and examples thereof include a methylene group, an ethylene group, a propylene group, a butylene group, and a hexylene group.
- R 101a and R 101b are the same as above.
- R 110 represents an arylene group having 6 to 10 carbon atoms, an alkylene group having 1 to 6 carbon atoms, or an alkenylene group having 2 to 6 carbon atoms, and part or all of the hydrogen atoms of these groups May further be substituted with a linear or branched alkyl group or alkoxy group having 1 to 4 carbon atoms, a nitro group, an acetyl group, or a phenyl group.
- R 111 represents a linear, branched or substituted alkyl group, alkenyl group, alkoxyalkyl group, phenyl group, or naphthyl group having 1 to 8 carbon atoms, and some or all of the hydrogen atoms of these groups are further An alkyl group or alkoxy group having 1 to 4 carbon atoms; a phenyl group optionally substituted with an alkyl group, alkoxy group, nitro group or acetyl group having 1 to 4 carbon atoms; a heteroaromatic group having 3 to 5 carbon atoms; Alternatively, it may be substituted with a chlorine atom or a fluorine atom.
- the arylene group of R 110 is not limited to the following, and examples thereof include a 1,2-phenylene group and a 1,8-naphthylene group.
- the alkylene group include, but are not limited to, methylene group, ethylene group, trimethylene group, tetramethylene group, phenylethylene group, norbornane-2,3-diyl group, and the like.
- the alkenylene group include, but are not limited to, 1,2-vinylene group, 1-phenyl-1,2-vinylene group, 5-norbornene-2,3-diyl group, and the like.
- the alkyl group for R 111 include the same groups as R 101a to R 101c .
- alkenyl group examples include, but are not limited to, vinyl group, 1-propenyl group, allyl group, 1-butenyl group, 3-butenyl group, isoprenyl group, 1-pentenyl group, 3-pentenyl group, 4-pentenyl group. Group, dimethylallyl group, 1-hexenyl group, 3-hexenyl group, 5-hexenyl group, 1-heptenyl group, 3-heptenyl group, 6-heptenyl group, 7-octenyl group and the like.
- alkoxyalkyl group examples include, but are not limited to, for example, methoxymethyl group, ethoxymethyl group, propoxymethyl group, butoxymethyl group, pentyloxymethyl group, hexyloxymethyl group, heptyloxymethyl group, methoxyethyl group, Ethoxyethyl group, propoxyethyl group, butoxyethyl group, pentyloxyethyl group, hexyloxyethyl group, methoxypropyl group, ethoxypropyl group, propoxypropyl group, butoxypropyl group, methoxybutyl group, ethoxybutyl group, propoxybutyl group, A methoxypentyl group, an ethoxypentyl group, a methoxyhexyl group, a methoxyheptyl group, etc. are mentioned.
- the optionally substituted alkyl group having 1 to 4 carbon atoms is not limited to the following, but for example, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert- A butyl group etc. are mentioned.
- alkoxy group having 1 to 4 carbon atoms include, but are not limited to, methoxy group, ethoxy group, propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, and tert-butoxy group.
- Examples of the phenyl group which may be substituted with an alkyl group having 1 to 4 carbon atoms, an alkoxy group, a nitro group, or an acetyl group include, but are not limited to, for example, a phenyl group, a tolyl group, a p-tert-butoxyphenyl group , P-acetylphenyl group, p-nitrophenyl group and the like.
- Examples of the heteroaromatic group having 3 to 5 carbon atoms include, but are not limited to, a pyridyl group and a furyl group.
- the acid generator include, but are not limited to, tetramethylammonium trifluoromethanesulfonate, tetramethylammonium nonafluorobutanesulfonate, triethylammonium nonafluorobutanesulfonate, pyridinium nonafluorobutanesulfonate, triethyl camphorsulfonate Ammonium, pyridinium camphorsulfonate, tetra-n-butylammonium nonafluorobutanesulfonate, tetraphenylammonium nonafluorobutanesulfonate, tetramethylammonium p-toluenesulfonate, diphenyliodonium trifluoromethanesulfonate, trifluoromethanesulfonic acid (p- tert-butoxyphenyl) phenyliodonium, p-toluene
- triphenylsulfonium trifluoromethanesulfonate trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid Triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid cyclo
- the content of the acid generator is not particularly limited, but the content of the compound of the present embodiment and / or the resin of the present embodiment is 0.1 parts by mass.
- the amount is preferably 1 to 50 parts by mass, and more preferably 0.5 to 40 parts by mass.
- the material for forming a lower layer film for lithography according to the present embodiment may contain a basic compound from the viewpoint of improving storage stability.
- the basic compound serves as a quencher for the acid to prevent the acid generated in a trace amount from the acid generator from causing the crosslinking reaction to proceed.
- Examples of such basic compounds include primary, secondary or tertiary aliphatic amines, hybrid amines, aromatic amines, heterocyclic amines, nitrogen-containing compounds having a carboxy group, A nitrogen-containing compound having a sulfonyl group, a nitrogen-containing compound having a hydroxyl group, a nitrogen-containing compound having a hydroxyphenyl group, an alcoholic nitrogen-containing compound, an amide derivative, an imide derivative, and the like are exemplified, but not limited thereto.
- primary aliphatic amines include, but are not limited to, ammonia, methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, tert-butylamine, Examples include pentylamine, tert-amylamine, cyclopentylamine, hexylamine, cyclohexylamine, heptylamine, octylamine, nonylamine, decylamine, dodecylamine, cetylamine, methylenediamine, ethylenediamine, tetraethylenepentamine and the like.
- secondary aliphatic amines include, but are not limited to, dimethylamine, diethylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, Dipentylamine, dicyclopentylamine, dihexylamine, dicyclohexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, didodecylamine, dicetylamine, N, N-dimethylmethylenediamine, N, N-dimethylethylenediamine, N, N-dimethyl Examples include tetraethylenepentamine.
- tertiary aliphatic amines include, but are not limited to, trimethylamine, triethylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, triisobutylamine, tri-sec-butylamine , Tripentylamine, tricyclopentylamine, trihexylamine, tricyclohexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, tridodecylamine, tricetylamine, N, N, N ′, N ′ -Tetramethylmethylenediamine, N, N, N ', N'-tetramethylethylenediamine, N, N, N', N'-tetramethyltetraethylenepentamine and the like.
- hybrid amines include, but are not limited to, dimethylethylamine, methylethylpropylamine, benzylamine, phenethylamine, benzyldimethylamine, and the like.
- aromatic amines and heterocyclic amines include, but are not limited to, aniline derivatives (for example, aniline, N-methylaniline, N-ethylaniline, N-propylaniline, N, N-dimethylaniline, 2 -Methylaniline, 3-methylaniline, 4-methylaniline, ethylaniline, propylaniline, trimethylaniline, 2-nitroaniline, 3-nitroaniline, 4-nitroaniline, 2,4-dinitroaniline, 2,6-dinitro Aniline, 3,5-dinitroaniline, N, N-dimethyltoluidine, etc.), diphenyl (p-tolyl) amine, methyldiphenylamine, triphenylamine, phenyl (p-
- nitrogen-containing compounds having a carboxy group include, but are not limited to, aminobenzoic acid, indolecarboxylic acid, amino acid derivatives (for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine). Glycylleucine, leucine, methionine, phenylalanine, threonine, lysine, 3-aminopyrazine-2-carboxylic acid, methoxyalanine) and the like.
- aminobenzoic acid indolecarboxylic acid
- amino acid derivatives for example, nicotinic acid, alanine, arginine, aspartic acid, glutamic acid, glycine, histidine, isoleucine.
- nitrogen-containing compound having a sulfonyl group examples include, but are not limited to, 3-pyridinesulfonic acid, pyridinium p-toluenesulfonate, and the like.
- Specific examples of the nitrogen-containing compound having a hydroxyl group, the nitrogen-containing compound having a hydroxyphenyl group, and the alcoholic nitrogen-containing compound include, but are not limited to, 2-hydroxypyridine, aminocresol, 2,4-quinolinediol, 3- Indolemethanol hydrate, monoethanolamine, diethanolamine, triethanolamine, N-ethyldiethanolamine, N, N-diethylethanolamine, triisopropanolamine, 2,2'-iminodiethanol, 2-aminoethanol, 3-amino- 1-propanol, 4-amino-1-butanol, 4- (2-hydroxyethyl) morpholine, 2- (2-hydroxyethyl) pyridine, 1- (2-hydroxyethyl) piperazine,
- amide derivatives include, but are not limited to, formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide and the like.
- imide derivative include, but are not limited to, phthalimide, succinimide, maleimide and the like.
- the content of the basic compound is not particularly limited, but is 0.001 to 2 with respect to 100 parts by mass of the compound of the present embodiment and / or the resin of the present embodiment. It is preferably part by mass, more preferably 0.01 to 1 part. By making it into the above preferred range, the storage stability tends to be enhanced without excessively impairing the crosslinking reaction.
- Organic solvent The material for forming a lower layer film for lithography of the present embodiment may contain an organic solvent. Any known organic solvent can be used as long as it can dissolve at least the compound of this embodiment and / or the resin of this embodiment. Specific examples of organic solvents include ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone, cellosolve solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate, ethyl lactate, methyl acetate, ethyl acetate and butyl acetate.
- ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone
- cellosolve solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate, ethyl lactate, methyl acetate,
- Ester solvents such as isoamyl acetate, ethyl lactate, methyl methoxypropionate and methyl hydroxyisobutyrate, alcohol solvents such as methanol, ethanol, isopropanol and 1-ethoxy-2-propanol, aromatics such as toluene, xylene and anisole Examples thereof include, but are not limited to, hydrocarbons. These organic solvents can be used individually by 1 type or in combination of 2 or more types.
- cyclohexanone propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl hydroxyisobutyrate, and anisole are particularly preferable from the viewpoint of safety.
- the content of the organic solvent is not particularly limited, but is 100 to 10,000 parts by mass with respect to 100 parts by mass of the compound of the present embodiment and / or the resin of the present embodiment from the viewpoint of solubility and film formation.
- the amount is preferably 200 to 5,000 parts by mass.
- the material for forming a lower layer film for lithography of the present embodiment may contain other resins and / or compounds for the purpose of imparting thermosetting properties and controlling absorbance.
- other resins and / or compounds include naphthol resins, xylene resins, naphthol-modified resins, phenol-modified resins of naphthalene resins, polyhydroxystyrene, dicyclopentadiene resins, (meth) acrylates, dimethacrylates, trimethacrylates, tetra Resins containing no heterocyclic ring or aromatic ring such as methacrylate, vinyl naphthalene, polyacenaphthylene and other naphthalene rings, phenanthrenequinone, biphenyl rings such as fluorene, hetero rings having hetero atoms such as thiophene and indene; rosin resins; Examples thereof include resins or compounds containing an alicyclic structure
- the lower layer film for lithography of this embodiment is formed from the lower layer film forming material for lithography of this embodiment.
- the resist pattern forming method of the present embodiment includes a step (A-1) of forming a lower layer film on a substrate using the lower layer film forming material for lithography of the present embodiment, and at least on the lower layer film.
- the circuit pattern forming method of this embodiment includes a step (B-1) of forming a lower layer film on a substrate using the lower layer film forming material for lithography of the present embodiment, and a silicon film on the lower layer film.
- B-2 resist intermediate layer film material containing atoms
- B-3 a predetermined region of the photoresist layer is irradiated with radiation and developed to form a resist pattern (B-4)
- the intermediate layer film is etched using the resist pattern as a mask, the lower layer film is etched using the obtained intermediate layer film pattern as an etching mask, and the substrate is etched using the obtained lower layer film pattern as an etching mask.
- the formation method of the underlayer film for lithography of the present embodiment is not particularly limited as long as it is formed from the above-described material for forming an underlayer film for lithography, and a known method can be applied.
- a known method can be applied.
- the lower layer film forming material for lithography described above onto a substrate by a known coating method such as spin coating or screen printing or a printing method the lower layer film is removed by evaporating an organic solvent or the like. Can be formed.
- baking is preferably performed in order to suppress the occurrence of the mixing phenomenon with the upper layer resist and to promote the crosslinking reaction.
- the baking temperature is not particularly limited, but is preferably in the range of 80 to 450 ° C., more preferably 200 to 400 ° C.
- the baking time is not particularly limited, but is preferably within the range of 10 to 300 seconds.
- the thickness of the lower layer film can be appropriately selected according to the required performance and is not particularly limited, but is usually preferably about 30 to 20,000 nm, more preferably 50 to 15,000 nm. It is preferable.
- a silicon-containing resist layer thereon or a single-layer resist made of ordinary hydrocarbons in the case of a three-layer process, a silicon-containing intermediate layer is further formed thereon It is preferable to produce a single-layer resist layer that does not contain silicon. In this case, a well-known thing can be used as a photoresist material for forming this resist layer.
- a silicon-containing resist layer or a single layer resist made of normal hydrocarbon is formed on the lower layer film, and in the case of a three-layer process, a silicon-containing layer is formed on the lower layer film.
- a single-layer resist layer not containing silicon can be formed on the intermediate layer and further on the silicon-containing intermediate layer.
- the photoresist material for forming the resist layer can be appropriately selected from known materials and is not particularly limited.
- a silicon-containing resist material for a two-layer process from the point of resistance to oxygen gas etching, a silicon atom-containing polymer such as a polysilsesquioxane derivative or a vinylsilane derivative is used as a base polymer, and an organic solvent, an acid generator, If necessary, a positive photoresist material containing a basic compound or the like is preferably used.
- a silicon atom-containing polymer a known polymer used in this type of resist material can be used.
- a polysilsesquioxane-based intermediate layer is preferably used as the silicon-containing intermediate layer for the three-layer process.
- the intermediate layer With an effect as an antireflection film, reflection tends to be effectively suppressed.
- the k value increases and the substrate reflection tends to increase, but by suppressing the reflection in the intermediate layer, The substrate reflection can be reduced to 0.5% or less.
- polysilsesquioxane crosslinked with acid or heat into which a light absorbing group having a phenyl group or a silicon-silicon bond is introduced is preferably used for 193 nm exposure.
- an intermediate layer formed by a Chemical-Vapor-deposition (CVD) method can be used.
- the intermediate layer having a high effect as an antireflection film produced by the CVD method is not limited to the following, but for example, a SiON film is known.
- the formation of the intermediate layer by a wet process such as spin coating or screen printing has a simpler and more cost-effective advantage than the CVD method.
- the upper layer resist in the three-layer process may be either a positive type or a negative type, and the same one as a commonly used single layer resist can be used.
- the lower layer film of this embodiment can also be used as an antireflection film for a normal single layer resist or a base material for suppressing pattern collapse. Since the lower layer film of this embodiment is excellent in etching resistance for the base processing, it can be expected to function as a hard mask for the base processing.
- a wet process such as spin coating or screen printing is preferably used as in the case of forming the lower layer film.
- prebaking is usually performed, but this prebaking is preferably performed at 80 to 180 ° C. for 10 to 300 seconds.
- a resist pattern can be obtained by performing exposure, post-exposure baking (PEB), and development.
- the thickness of the resist film is not particularly limited, but is generally preferably 30 to 500 nm, more preferably 50 to 400 nm.
- the exposure light may be appropriately selected and used according to the photoresist material to be used.
- high energy rays having a wavelength of 300 nm or less, specifically, 248 nm, 193 nm, 157 nm excimer laser, 3 to 20 nm soft X-ray, electron beam, X-ray and the like can be mentioned.
- the resist pattern formed by the above method is one in which pattern collapse is suppressed by the lower layer film of this embodiment. Therefore, by using the lower layer film of this embodiment, a finer pattern can be obtained, and the exposure amount necessary for obtaining the resist pattern can be reduced.
- gas etching is preferably used as the etching of the lower layer film in the two-layer process.
- gas etching etching using oxygen gas is suitable.
- an inert gas such as He or Ar, or CO, CO 2 , NH 3 , SO 2 , N 2 , NO 2 or H 2 gas can be added.
- the latter gas is used for side wall protection for preventing undercut of the pattern side wall.
- gas etching is also preferably used in the etching of the intermediate layer in the three-layer process.
- the gas etching the same one as described in the above two-layer process can be applied.
- the processing of the intermediate layer in the three-layer process is preferably performed using a fluorocarbon gas and a resist pattern as a mask.
- the lower layer film can be processed by, for example, oxygen gas etching using the intermediate layer pattern as a mask.
- a silicon oxide film, a silicon nitride film, or a silicon oxynitride film is formed by a CVD method, an ALD method, or the like.
- the method for forming the nitride film is not limited to the following, and examples thereof include methods described in Japanese Patent Application Laid-Open No. 2002-334869 (Patent Document 6) and WO 2004/066377 (Patent Document 7).
- a photoresist film can be formed directly on such an intermediate film, but an organic antireflection film (BARC) is formed on the intermediate film by spin coating, and a photoresist film is formed thereon. May be.
- BARC organic antireflection film
- an intermediate layer based on polysilsesquioxane is also preferably used.
- the resist intermediate layer film As an antireflection film, reflection tends to be effectively suppressed.
- Specific materials of the polysilsesquioxane-based intermediate layer are not limited to the following, but are described, for example, in JP-A-2007-226170 (Patent Document 8) and JP-A-2007-226204 (Patent Document 9). The thing which was done is mentioned.
- Etching of the next substrate can also be performed by a conventional method.
- the substrate is SiO 2 or SiN
- etching mainly using a chlorofluorocarbon gas if p-Si, Al, or W is chlorine or bromine gas, Etching mainly composed of can be performed.
- p-Si, Al, or W is chlorine or bromine gas
- Etching mainly composed of can be performed.
- the substrate is etched with a chlorofluorocarbon gas, the silicon-containing resist of the two-layer resist process and the silicon-containing intermediate layer of the three-layer process are peeled off simultaneously with the substrate processing.
- the silicon-containing resist layer or the silicon-containing intermediate layer is separately peeled, and generally, dry etching peeling with a chlorofluorocarbon-based gas is performed after the substrate is processed. .
- the lower layer film of this embodiment is characterized by excellent etching resistance of these substrates.
- a known substrate can be appropriately selected and used, and is not particularly limited. Examples thereof include Si, ⁇ -Si, p-Si, SiO 2 , SiN, SiON, W, TiN, and Al. .
- the substrate may be a laminate having a film to be processed (substrate to be processed) on a base material (support). Examples of such processed films include various low-k films such as Si, SiO 2 , SiON, SiN, p-Si, ⁇ -Si, W, W-Si, Al, Cu, and Al-Si, and their stopper films. In general, a material different from the base material (support) is used.
- the thickness of the substrate to be processed or the film to be processed is not particularly limited, but is usually preferably about 50 to 10,000 nm, more preferably 75 to 5,000 nm.
- the compound of the present embodiment or the resin of the present embodiment may be used for the above purification alone, but two or more kinds may be mixed and used for the above purification. Moreover, the compound of this embodiment or the resin of this embodiment may contain various surfactants, various crosslinking agents, various acid generators, various stabilizers, and the like.
- the organic solvent that is not arbitrarily miscible with water used in the present embodiment is not particularly limited, but is an organic solvent having a solubility in water of less than 30% at room temperature, more preferably less than 20%, Particularly preferred is an organic solvent that can be safely applied to a semiconductor manufacturing process of less than 10%.
- the amount of the organic solvent to be used is usually relative to the resin obtained by the reaction of the compound represented by the formula (1) or the compound represented by the formula (1) with a compound having a crosslinking reaction. About 1 to 100 times the mass is used.
- solvents include, but are not limited to, ethers such as diethyl ether and diisopropyl ether, esters such as ethyl acetate, n-butyl acetate and isoamyl acetate, methyl ethyl ketone, methyl isobutyl ketone and ethyl isobutyl ketone.
- Ketones such as cyclohexanone, cyclopentanone, 2-heptanone, 2-pentanone, glycols such as ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate Ether acetates, aliphatic hydrocarbons such as n-hexane and n-heptane, aromatic hydrocarbons such as toluene and xylene, methylene chloride, chlorine Halogenated hydrocarbons such as Holm and the like.
- glycols such as ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate Ether acetates
- aliphatic hydrocarbons such as
- toluene, 2-heptanone, cyclohexanone, cyclopentanone, methyl isobutyl ketone, propylene glycol monomethyl ether acetate, ethyl acetate and the like are preferable, methyl isobutyl ketone, ethyl acetate, cyclohexanone, propylene glycol monomethyl ether acetate are more preferable, More preferred are methyl isobutyl ketone and ethyl acetate.
- Methyl isobutyl ketone, ethyl acetate, and the like have a relatively high saturation solubility and a relatively low boiling point of the compound of the present embodiment or the resin of the present embodiment. It becomes possible to reduce the load in the.
- These solvents can be used alone or in combination of two or more.
- the acidic aqueous solution used in the present embodiment is appropriately selected from aqueous solutions in which generally known organic and inorganic compounds are dissolved in water.
- aqueous solutions in which generally known organic and inorganic compounds are dissolved in water.
- a mineral acid such as hydrochloric acid, sulfuric acid, nitric acid, phosphoric acid or the like is dissolved in water, or acetic acid, propionic acid, succinic acid, malonic acid, succinic acid, fumaric acid, maleic acid, tartaric acid
- an organic acid such as citric acid, methanesulfonic acid, phenolsulfonic acid, p-toluenesulfonic acid or trifluoroacetic acid is dissolved in water.
- acidic aqueous solutions can be used alone or in combination of two or more.
- one or more mineral acid aqueous solutions selected from the group consisting of hydrochloric acid, sulfuric acid, nitric acid and phosphoric acid, or acetic acid, propionic acid, succinic acid, malonic acid, succinic acid, fumaric acid, maleic acid
- Aqueous solutions of carboxylic acids such as succinic acid, tartaric acid, and citric acid are more preferred
- aqueous solutions of sulfuric acid, succinic acid, tartaric acid, and citric acid are more preferred
- the pH of the acidic aqueous solution used in this embodiment is not particularly limited, but it is preferable to adjust the acidity of the aqueous solution in consideration of the influence on the compound of this embodiment or the resin of this embodiment. Normally, the pH range is about 0 to 5, preferably about 0 to 3.
- the amount of acidic aqueous solution used in the present embodiment is not particularly limited, but from the viewpoint of reducing the number of extractions for metal removal and from the viewpoint of ensuring operability in consideration of the total amount of liquid, the amount used is It is preferable to adjust. From the above viewpoint, the amount of the aqueous solution used is usually 10 to 200% by mass, preferably 20 to 100% by mass with respect to the solution of the compound of the present embodiment or the resin of the present embodiment dissolved in an organic solvent. .
- the metal component is extracted by bringing the acidic aqueous solution as described above into contact with the compound of the present embodiment or the resin of the present embodiment and a solution containing an organic solvent that is arbitrarily immiscible with water. be able to.
- the solution (A) further contains an organic solvent that is arbitrarily mixed with water.
- an organic solvent arbitrarily mixed with water is included, the amount of the compound of the present embodiment or the resin of the present embodiment can be increased, the liquid separation property is improved, and purification can be performed with high pot efficiency. It tends to be possible.
- the method for adding an organic solvent arbitrarily mixed with water is not particularly limited. For example, any of a method of adding to a solution containing an organic solvent in advance, a method of adding to water or an acidic aqueous solution in advance, and a method of adding after bringing a solution containing an organic solvent into contact with water or an acidic aqueous solution may be used. Among these, the method of adding to the solution containing an organic solvent in advance is preferable from the viewpoint of the workability of the operation and the ease of management of the charged amount.
- the organic solvent arbitrarily mixed with water used in the present embodiment is not particularly limited, but an organic solvent that can be safely applied to a semiconductor manufacturing process is preferable.
- the amount of the organic solvent arbitrarily mixed with the water to be used is not particularly limited as long as the solution phase and the aqueous phase are separated from each other. About 1 to 100 times the mass is used.
- the solvent arbitrarily mixed with water used in the present embodiment include, but are not limited to, ethers such as tetrahydrofuran and 1,3-dioxolane, alcohols such as methanol, ethanol and isopropanol, acetone, Examples thereof include ketones such as N-methylpyrrolidone, and aliphatic hydrocarbons such as ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether (PGME), and glycol ethers such as propylene glycol monoethyl ether.
- ethers such as tetrahydrofuran and 1,3-dioxolane
- alcohols such as methanol, ethanol and isopropanol
- acetone examples thereof include ketones such as N-methylpyrrolidone, and aliphatic hydrocarbons such as ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, propylene glycol mono
- N-methylpyrrolidone, propylene glycol monomethyl ether and the like are preferable, and N-methylpyrrolidone and propylene glycol monomethyl ether are more preferable.
- These solvents can be used alone or in combination of two or more.
- the temperature at the time of contacting the solution (A) with the acidic aqueous solution is usually 20 to 90 ° C., and preferably 30 to 80 ° C.
- extraction operation is not specifically limited, For example, after mixing well by stirring etc., it is performed by leaving still. Thereby, the metal content contained in the solution containing the compound of the present embodiment or the resin of the present embodiment and the organic solvent is transferred to the aqueous phase. Moreover, the acidity of a solution falls by this operation, and the quality change of the compound of this embodiment or the resin of this embodiment can be suppressed.
- the compound of the present embodiment or the resin of the present embodiment is decanted or the like. And a solution containing the organic solvent is recovered.
- the standing time is not particularly limited, but it is preferable to adjust the standing time from the viewpoint of improving the separation between the solution phase containing the organic solvent and the aqueous phase.
- the time for standing is 1 minute or longer, preferably 10 minutes or longer, more preferably 30 minutes or longer.
- the extraction process may be performed only once, but it is also effective to repeat the operations of mixing, standing, and separation a plurality of times.
- the solution (A) it is preferable to include a step of performing an extraction process with water after performing an extraction process by bringing the solution (A) into contact with an acidic aqueous solution. That is, after performing the above extraction process using an acidic aqueous solution, the solution containing the compound of this embodiment or the resin of this embodiment and the organic solvent extracted and recovered from the aqueous solution is further subjected to an extraction process with water. It is preferable to provide.
- the extraction treatment with water is not particularly limited.
- the extraction treatment with water can be performed by mixing well by stirring and then allowing to stand.
- the solution obtained after the standing is separated into a solution phase and an aqueous phase containing the compound of the present embodiment or the resin of the present embodiment and an organic solvent, and an aqueous phase, and therefore the compound of the present embodiment or the resin of the present embodiment by decantation or the like.
- a solution phase containing an organic solvent can be recovered.
- the water used here is a thing with little metal content, for example, ion-exchange water etc. according to the objective of this embodiment.
- the extraction process may be performed only once, but it is also effective to repeat the operations of mixing, standing, and separation a plurality of times. Further, the use ratio of both in the extraction process, conditions such as temperature and time are not particularly limited, but they may be the same as those in the contact process with the acidic aqueous solution.
- the water that can be mixed into the compound of the present embodiment thus obtained or the solution containing the resin of the present embodiment and an organic solvent can be easily removed by performing an operation such as vacuum distillation. Moreover, an organic solvent can be added as needed, and the density
- the method of isolating the compound of the present embodiment or the resin of the present embodiment from the obtained compound of the present embodiment or the solution containing the resin of the present embodiment and an organic solvent is not particularly limited, and is removed under reduced pressure and reprecipitated. Can be carried out by a known method such as separation by, and combinations thereof. If necessary, known processes such as a concentration operation, a filtration operation, a centrifugal separation operation, and a drying operation can be performed.
- Carbon concentration and oxygen concentration Carbon concentration and oxygen concentration (mass%) were measured by organic elemental analysis.
- GC-MS analysis measurement was performed using Agilent 5975 / 6890N manufactured by Agilent.
- the molecular weight was determined by field desorption mass spectrometry (FD-MS) analysis.
- Evaluation A Thermal decomposition temperature is ⁇ 150 ° C.
- Evaluation C Thermal decomposition temperature ⁇ 150 ° C (solubility) At 23 ° C., the compound was dissolved in cyclohexanone (CHN) so as to be a 5 mass% solution, and then allowed to stand at 5 ° C. for 30 days. The results were evaluated according to the following criteria. Evaluation A: Visually confirmed no deposit Evaluation C: Visually confirmed presence of deposit
- the molecular weight of the obtained BisN-1-CH1 was 548.
- the carbon concentration was 85.3% by mass, and the oxygen concentration was 8.8% by mass.
- the obtained BisN-1-CH2 had a molecular weight of 630. Moreover, carbon concentration was 85.7 mass% and oxygen concentration was 7.6 mass%.
- the obtained BisN-1-PH1 had a molecular weight of 542.
- the carbon concentration was 86.3% by mass, and the oxygen concentration was 8.9% by mass.
- the obtained BisN-1-PH2 had a molecular weight of 618.
- the carbon concentration was 87.4% by mass, and the oxygen concentration was 7.8% by mass.
- the obtained resin (CR-1) was Mn: 885, Mw: 2220, and Mw / Mn: 4.17.
- the carbon concentration was 89.1% by mass, and the oxygen concentration was 4.5% by mass.
- Acid generator Ditertiary butyl diphenyliodonium nonafluoromethanesulfonate manufactured by Midori Kagaku Co. (denoted as “DTDPI” in the table)
- Cross-linking agent Nikalac MX270 manufactured by Sanwa Chemical Co., Ltd. (indicated in the table as “Nikalac”)
- Organic solvent cyclohexanone (indicated in the table as “CHN”)
- Etching resistance was evaluated according to the following procedure. First, a novolac underlayer film was prepared under the same conditions as in Example 1 except that novolak (PSM4357 manufactured by Gunei Chemical Co., Ltd.) was used instead of the compound (BisN-1-CH1) used in Example 1.
- novolak PSM4357 manufactured by Gunei Chemical Co., Ltd.
- the compound of the following formula (11) is 4.15 g of 2-methyl-2-methacryloyloxyadamantane, 3.00 g of methacryloyloxy- ⁇ -butyrolactone, 2.08 g of 3-hydroxy-1-adamantyl methacrylate, azobisisobutyro 0.38 g of nitrile was dissolved in 80 mL of tetrahydrofuran, polymerized for 22 hours under a nitrogen atmosphere while maintaining the reaction temperature at 63 ° C., and then the reaction solution was dropped into 400 mL of n-hexane to give a product resin. Coagulated and purified, and the resulting white powder was filtered and dried overnight at 40 ° C. under reduced pressure.
- the photoresist layer was subjected to mask exposure using an electron beam lithography apparatus (ELIONX, ELS-7500, 50 keV), baked at 115 ° C. for 90 seconds (PEB), and 2.38 mass% tetramethylammonium hydroxide.
- ELIONX electron beam lithography apparatus
- PEB baked at 115 ° C. for 90 seconds
- TMAH aqueous solution of
- Table 1 shows the results of observing the shapes and defects of the obtained 55 nm L / S (1: 1) and 80 nm L / S (1: 1) resist patterns.
- Comparative Example 2 Except for using CR-1, it was carried out in the same manner as in Examples 1 to 4 and Comparative Example 1, and an underlayer film forming material was prepared and spin-coated on a silicon substrate, and then at 240 ° C. for 60 seconds and further at 400 ° C. Was baked for 120 seconds to prepare a lower layer film having a thickness of 200 nm. Thereafter, etching resistance was evaluated. The results are shown in Table 1.
- Example 1 using BisN-1-CH1, which is a compound satisfying the configuration of the present embodiment, Example 2 using BisN-1-CH2, and BisN-1-PH1 were used.
- Example 3 and Example 4 using BisN-1-PH2 it was confirmed that the heat resistance, solubility, and etching resistance were all good.
- Comparative Example 1 using the polyphenol compound BisN-1 the heat resistance and etching resistance were good, but the solubility was poor.
- the etching resistance was poor.
- Comparative Example 1 it was confirmed that the resist pattern shape after development was poor and there were many defects. This is presumably because BisN-1 used in Comparative Example 1 has low solubility in the coating solvent. Further, it was confirmed that Examples 1 to 4 were significantly superior in both resolution and sensitivity as compared with Comparative Example 3 in which the formation of the lower layer film was omitted. From the difference in the resist pattern shape after development, it was shown that the lower layer film forming materials for lithography in Examples 1 to 4 had good adhesion to the resist material.
- Example 5 The lower layer film forming material for lithography used in Example 1 was applied onto a 300 nm thick SiO 2 substrate and baked at 240 ° C. for 60 seconds and further at 400 ° C. for 120 seconds, thereby forming a lower layer having a thickness of 80 nm. A film was formed. On this lower layer film, a silicon-containing intermediate layer material was applied and baked at 200 ° C. for 60 seconds to form an intermediate layer film having a thickness of 35 nm. Further, the ArF resist solution was applied on this intermediate layer film and baked at 130 ° C. for 60 seconds to form a 150 nm-thick photoresist layer.
- the silicon-containing intermediate layer material As the silicon-containing intermediate layer material, a silicon atom-containing polymer described in JP-A-2007-226170 ⁇ Synthesis Example 1> was used. Next, the photoresist layer was subjected to mask exposure using an electron beam lithography apparatus (ELIONX, ELS-7500, 50 keV), baked at 115 ° C. for 90 seconds (PEB), and 2.38 mass% tetramethylammonium hydroxide. By developing with (TMAH) aqueous solution for 60 seconds, a positive resist pattern of 55 nm L / S (1: 1) was obtained.
- ELIONX electron beam lithography apparatus
- the silicon-containing intermediate layer film (SOG) was dry-etched using the obtained resist pattern as a mask, and then the obtained silicon-containing intermediate layer film pattern was A dry etching process for the lower layer film using the mask and a dry etching process for the SiO 2 film using the obtained lower layer film pattern as a mask were sequentially performed.
- Example 5 The pattern cross section (shape of the SiO 2 film after etching) of Example 5 obtained as described above was observed using an electron microscope (S-4800) manufactured by Hitachi, Ltd. As a result, it was confirmed that in Example 5 using the lower layer film satisfying the configuration of the present embodiment, the shape of the SiO 2 film after etching in the multi-layer resist processing is rectangular, and no defects are observed, which is good. It was.
- the present invention provides, for example, an electrical insulating material, a resist resin, a semiconductor sealing resin, an adhesive for printed wiring boards, an electrical laminate mounted on electrical equipment / electronic equipment / industrial equipment, etc. ⁇ Matrix resin for prepregs, built-up laminate materials, resin for fiber reinforced plastics, sealing resin for liquid crystal display panels, paints, various coating agents, adhesives, and coatings for semiconductors installed in electronic equipment and industrial equipment It can be used widely and effectively in an agent, a resist resin for a semiconductor, a resin for forming a lower layer film and the like. In particular, the present invention can be used particularly effectively in the field of lithography lower layer films and multilayer resist lower layer films.
Abstract
Description
[1]
下記式(1)で表される、化合物。
(式(1)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、mは各々独立して、1~6の整数であり、pは各々独立して、0又は1であり、nは1~4の整数である。)
[2]
前記式(1)で表される化合物が下記式(1A-2)で表される化合物である、[1]に記載の化合物。
(式(1A-2)中、R1及びpは前記と同様であり、R6は、前記式(1)で説明したR2と同義であり、m6は、各々独立して1~3の整数である。)
[3]
前記式(1)で表される化合物が下記式(1B-2)で表される化合物である、[1]に記載の化合物。
(式(1B-2)中、R1及びpは前記と同様であり、R6は、前記式(1)で説明したR2と同義であり、m6は、各々独立して1~3の整数である。)
[4]
前記式(1A-2)で表される化合物が下記式(BisN-1-CH1)又は下記式(BisN-1-CH2)で表される化合物である、[2]に記載の化合物。
[5]
前記式(1A-2)で表される化合物が下記式(BisN-1-PH1)又は下記式(BisN-1-PH2)で表される化合物である、[2]に記載の化合物。
[6]
[1]~[5]のいずれか1項に記載の化合物をモノマーとして得られる、樹脂。
[7]
[1]~[5]のいずれか1項に記載の化合物と架橋反応性のある化合物との反応によって得られる、請求項6に記載の樹脂。
[8]
前記架橋反応性のある化合物が、アルデヒド、ケトン、カルボン酸、カルボン酸ハライド、ハロゲン含有化合物、アミノ化合物、イミノ化合物、イソシアネート及び不飽和炭化水素基含有化合物からなる群より選ばれる少なくとも1つである、[7]に記載の樹脂。
[9]
下記式(2)で表される構造を含む、[6]に記載の樹脂。
(式(2)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は、各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、R3は各々独立して、単結合又は炭素数1~20の直鎖状若しくは分岐状のアルキレン基であり、m2は各々独立して、1~5の整数であり、pは各々独立して0又は1であり、nは1~4の整数である。)
[10]
前記式(2)で表される構造を有する樹脂が、下記式(2A)で表される構造を有する樹脂である、[9]に記載の樹脂。
(式(2A)中、R1、R2、R3、m2、p及びnは、前記と同様である。)
[11]
前記式(2)で表される構造を有する樹脂が、下記式(2B)で表される構造を有する樹脂である、[9]に記載の樹脂。
(式(2B)中、R1、R2、R3、m2、p及びnは、前記と同様である。)
[12]
[1]~[5]のいずれか1項に記載の化合物及び/又は請求項6~11のいずれか1項に記載の樹脂を含有する、リソグラフィー用下層膜形成材料。
[13]
有機溶媒をさらに含有する、[12]に記載のリソグラフィー用下層膜形成材料。
[14]
酸発生剤をさらに含有する、[12]又は[13]に記載のリソグラフィー用下層膜形成材料。
[15]
架橋剤をさらに含有する、[12]~[14]のいずれか1項に記載のリソグラフィー用下層膜形成材料。
[16]
[12]~[15]のいずれか1項に記載のリソグラフィー用下層膜形成材料から形成される、リソグラフィー用下層膜。
[17]
基板上に、[12]~[15]のいずれか1項に記載のリソグラフィー用下層膜形成材料を用いて下層膜を形成する工程(A-1)と、
前記下層膜上に、少なくとも1層のフォトレジスト層を形成する工程(A-2)と、
前記工程(A-2)の後、前記フォトレジスト層の所定の領域に放射線を照射し、現像を行う工程(A-3)と、
を有するレジストパターン形成方法。
[18]
基板上に、[12]~[15]のいずれか1項に記載のリソグラフィー用下層膜形成材料を用いて下層膜を形成する工程(B-1)と、
前記下層膜上に、珪素原子を含有するレジスト中間層膜材料を用いて中間層膜を形成工程(B-2)と、
前記中間層膜上に、少なくとも1層のフォトレジスト層を形成する工程(B-3)と、
前記工程(B-3)の後、前記フォトレジスト層の所定の領域に放射線を照射し、現像してレジストパターンを形成する工程(B-4)と、
前記工程(B-4)の後、前記レジストパターンをマスクとして前記中間層膜をエッチングし、得られた中間層膜パターンをエッチングマスクとして前記下層膜をエッチングし、得られた下層膜パターンをエッチングマスクとして基板をエッチングすることで基板にパターンを形成する工程(B-5)と、
を有する、回路パターン形成方法。
[19]
水と任意に混和しない有機溶媒、及び[1]~[5]のいずれか1項に記載の化合物又は[6]~[11]のいずれか1項に記載の樹脂を含有する溶液(A)と、酸性の水溶液と、を接触させて抽出する工程を含む、精製方法。 That is, the present invention provides the following [1] to [19].
[1]
The compound represented by following formula (1).
(In the formula (1), each X independently represents an oxygen atom or a sulfur atom, or non-bridged, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms, Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms, A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group, And at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, m is each independently an integer of 1 to 6, and p is each independently 0 or 1 and n is an integer of 1 to 4.)
[2]
The compound according to [1], wherein the compound represented by the formula (1) is a compound represented by the following formula (1A-2).
(In the formula (1A-2), R 1 and p are the same as described above, R 6 has the same meaning as R 2 described in the formula (1), and each m 6 independently represents 1 to 3 Is an integer.)
[3]
The compound according to [1], wherein the compound represented by the formula (1) is a compound represented by the following formula (1B-2).
(In formula (1B-2), R 1 and p are as defined above, R 6 has the same meaning as R 2 described in formula (1), and m 6 is independently 1 to 3 Is an integer.)
[4]
The compound according to [2], wherein the compound represented by the formula (1A-2) is a compound represented by the following formula (BisN-1-CH1) or the following formula (BisN-1-CH2).
[5]
The compound according to [2], wherein the compound represented by the formula (1A-2) is a compound represented by the following formula (BisN-1-PH1) or the following formula (BisN-1-PH2).
[6]
[1] A resin obtained by using the compound according to any one of [1] to [5] as a monomer.
[7]
The resin according to claim 6, which is obtained by reacting the compound according to any one of [1] to [5] with a compound having a crosslinking reactivity.
[8]
The crosslinking reactive compound is at least one selected from the group consisting of aldehydes, ketones, carboxylic acids, carboxylic acid halides, halogen-containing compounds, amino compounds, imino compounds, isocyanates and unsaturated hydrocarbon group-containing compounds. [7] Resin.
[9]
Resin as described in [6] containing the structure represented by following formula (2).
(In the formula (2), each X independently represents an oxygen atom, a sulfur atom, or a non-bridged group, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms. Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms. A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group, Here, at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, and each R 3 is independently a single bond or a straight chain having 1 to 20 carbon atoms. a Jo or branched alkylene group, m 2 are each independently 1 to Of integers, p is independently 0 or 1, n is an integer of 1-4.)
[10]
The resin according to [9], wherein the resin having a structure represented by the formula (2) is a resin having a structure represented by the following formula (2A).
(In formula (2A), R 1 , R 2 , R 3 , m 2 , p and n are the same as described above.)
[11]
The resin according to [9], wherein the resin having a structure represented by the formula (2) is a resin having a structure represented by the following formula (2B).
(In formula (2B), R 1 , R 2 , R 3 , m 2 , p and n are the same as described above.)
[12]
A material for forming an underlayer film for lithography, comprising the compound according to any one of [1] to [5] and / or the resin according to any one of claims 6 to 11.
[13]
The underlayer film forming material for lithography according to [12], further comprising an organic solvent.
[14]
The underlayer film forming material for lithography according to [12] or [13], further containing an acid generator.
[15]
The material for forming an underlayer film for lithography according to any one of [12] to [14], further comprising a crosslinking agent.
[16]
[12] A lithography lower layer film formed from the lithography lower layer film forming material according to any one of [15] to [15].
[17]
A step (A-1) of forming a lower layer film on the substrate using the lower layer film forming material for lithography described in any one of [12] to [15];
Forming at least one photoresist layer on the lower layer film (A-2);
After the step (A-2), a step of irradiating a predetermined region of the photoresist layer with radiation and developing (A-3);
A resist pattern forming method comprising:
[18]
A step (B-1) of forming a lower layer film on the substrate using the lower layer film forming material for lithography described in any one of [12] to [15];
Forming an intermediate layer film on the lower layer film using a resist intermediate layer film material containing silicon atoms (B-2);
Forming at least one photoresist layer on the intermediate film (B-3);
After the step (B-3), a step (B-4) of irradiating a predetermined region of the photoresist layer with radiation and developing to form a resist pattern;
After the step (B-4), the intermediate layer film is etched using the resist pattern as a mask, the lower layer film is etched using the obtained intermediate layer film pattern as an etching mask, and the obtained lower layer film pattern is etched. Forming a pattern on the substrate by etching the substrate as a mask (B-5);
A circuit pattern forming method.
[19]
A solution (A) containing an organic solvent which is not arbitrarily miscible with water, and the compound according to any one of [1] to [5] or the resin according to any one of [6] to [11] And a step of bringing the aqueous solution into contact with an acidic aqueous solution for extraction.
本実施形態の化合物は、下記式(1)で表される。 [Compound]
The compound of this embodiment is represented by the following formula (1).
(式(1)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、mは各々独立して、1~6の整数であり、pは各々独立して、0又は1であり、nは1~4の整数である。)
(In the formula (1), each X independently represents an oxygen atom or a sulfur atom, or non-bridged, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms, Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms, A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group, And at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, m is each independently an integer of 1 to 6, and p is each independently 0 or 1 and n is an integer of 1 to 4.)
(式(1B)中、R1、R2、m、p及びnは、前記と同様である。) In the above formula (1), each X independently represents an oxygen atom, a sulfur atom, or no bridge. Here, the case where X is non-crosslinked means that the compound represented by the formula (1) is a compound represented by the following formula (1B).
(In formula (1B), R 1 , R 2 , m, p and n are the same as described above.)
(式(1A-1)中、R4は、各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基又は水酸基であり、R5は、炭素数1~30の1価の基であり、直鎖状炭化水素基、分岐状炭化水素基、脂環式炭化水素基、芳香族炭化水素基及びそれらの二以上の組み合わせからなる1価の基より選ばれる基である。該基は二重結合、ヘテロ原子、ハロゲン原子を有していてもよい。ここで、前記脂環式炭化水素基については、有橋脂環式炭化水素基も含まれる。m3は、各々独立して0~4の整数であり、ここで、少なくとも1つのm3は1であり、m4は、各々独立して0~3の整数であり、m3+m4は1~4の整数であり、R1、n及びpは、前記と同様である。)
(In formula (1A-1), each R 4 independently represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or 2 to 10 carbon atoms. R 5 is a monovalent group having 1 to 30 carbon atoms, and is a linear hydrocarbon group, branched hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group And a monovalent group consisting of a combination of two or more thereof, which may have a double bond, a hetero atom, or a halogen atom, wherein the alicyclic hydrocarbon group As for, a bridged alicyclic hydrocarbon group is also included, wherein m 3 is each independently an integer of 0 to 4, where at least one m 3 is 1 and m 4 is each independently And m 3 + m 4 is an integer of 1 to 4, and R 1 , n and p are the same as above. Like.)
(式(1B-1)中、R1、R4、R5、m3、m4、n及びpは前記と同様である。)
(In formula (1B-1), R 1 , R 4 , R 5 , m 3 , m 4 , n and p are the same as described above.)
前記式(1)で表される化合物は、リソグラフィー用下層膜形成材料として、そのまま使用することができる。また、前記式(1)で表される化合物をモノマーとして得られる樹脂としても使用することができる。例えば、前記式(1)で表される化合物と架橋反応性のある化合物とを反応させて得られる樹脂としても使用することができる。前記式(1)で表される化合物をモノマーとして得られる樹脂としては、例えば、以下の式(2)に表される構造を有するものが挙げられる。すなわち、本実施形態のリソグラフィー用下層膜形成材料は、下記式(2)に表される構造を有する樹脂を含有するものであってもよい。 [resin]
The compound represented by the formula (1) can be used as it is as a material for forming a lower layer film for lithography. Moreover, it can be used also as resin obtained by using the compound represented by said Formula (1) as a monomer. For example, it can also be used as a resin obtained by reacting a compound represented by the formula (1) with a compound having crosslinking reactivity. Examples of the resin obtained using the compound represented by the formula (1) as a monomer include those having a structure represented by the following formula (2). That is, the lower layer film forming material for lithography of the present embodiment may contain a resin having a structure represented by the following formula (2).
(式(2)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該炭化水素基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は、各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、R3は各々独立して、単結合又は炭素数1~20の直鎖状若しくは分岐状のアルキレン基であり、m2は各々独立して、1~5の整数であり、pは各々独立して0又は1であり、nは1~4の整数である。)
(In the formula (2), each X independently represents an oxygen atom or a sulfur atom, or non-bridged, R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms, The hydrogen group may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms. A chain, branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group. Wherein at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, and each R 3 independently represents a single bond or 1 to 20 carbon atoms. a linear or branched alkylene group, m 2 are each independently Is an integer from 1 to 5, p are each independently 0 or 1, n is an integer of 1-4.)
(式(2B)中、R1、R2、R3、m2、n及びpは、前記と同様である。)
(In formula (2B), R 1 , R 2 , R 3 , m 2 , n and p are the same as described above.)
(式(2A)中、R1、R2、R3、m2、n及びpは、前記と同様である。)
(In formula (2A), R 1 , R 2 , R 3 , m 2 , n and p are the same as described above.)
(式(2A-1)中、R1、R4、R5、m3、m4、n及びpは前記と同様である。)
(In the formula (2A-1), R 1 , R 4 , R 5 , m 3 , m 4 , n and p are the same as described above.)
(式(2B-1)中、R1、R4、R5、m3、m4、n及びpは前記と同様である。)
(In the formula (2B-1), R 1 , R 4 , R 5 , m 3 , m 4 , n and p are the same as above.)
本実施形態のリソグラフィー用下層膜形成材料は、本実施形態の化合物及び本実施形態の樹脂からなる群より選ばれる少なくとも1つの物質を含有するものである。より詳細には、本実施形態のリソグラフィー用下層膜形成材料は、前記式(1)で表される化合物及び前記式(1)で表される化合物と架橋反応性のある化合物との反応によって得られる樹脂からなる群より選ばれる少なくとも1つの物質を含有するものである。 [Underlayer film forming material for lithography]
The material for forming a lower layer film for lithography of the present embodiment contains at least one substance selected from the group consisting of the compound of the present embodiment and the resin of the present embodiment. More specifically, the material for forming a lower layer film for lithography of the present embodiment is obtained by reacting the compound represented by the formula (1) and the compound represented by the formula (1) with a compound having a crosslinking reaction. It contains at least one substance selected from the group consisting of resins.
本実施形態のリソグラフィー用下層膜形成材料は、インターミキシングを抑制する等の観点から、必要に応じて架橋剤を含有していてもよい。本実施形態で使用可能な架橋剤の具体例としては、メラミン化合物、グアナミン化合物、グリコールウリル化合物又はウレア化合物、エポキシ化合物、チオエポキシ化合物、イソシアネート化合物、アジド化合物、アルケニルエーテル基などの2重結合を含む化合物であって、メチロール基、アルコキシメチル基、アシロキシメチル基から選ばれる少なくとも一つの基で置換されたものなどが挙げるが、これらに特に限定されない。なお、これらの架橋剤は、1種を単独で、或いは2種以上を組み合わせて用いることができる。また、これらは添加剤として用いてもよいが、これら架橋性基をポリマー側鎖にペンダント基として導入してもよい。また、ヒドロキシ基を含む化合物も架橋剤として用いることができる。 [Crosslinking agent]
The lower layer film forming material for lithography of the present embodiment may contain a crosslinking agent as necessary from the viewpoint of suppressing intermixing. Specific examples of the crosslinking agent that can be used in this embodiment include double bonds such as melamine compounds, guanamine compounds, glycoluril compounds or urea compounds, epoxy compounds, thioepoxy compounds, isocyanate compounds, azide compounds, alkenyl ether groups, and the like. Examples of the compound include those substituted with at least one group selected from a methylol group, an alkoxymethyl group, and an acyloxymethyl group, but are not particularly limited thereto. In addition, these crosslinking agents can be used individually by 1 type or in combination of 2 or more types. These may be used as additives, but these crosslinkable groups may be introduced as pendant groups in the polymer side chain. A compound containing a hydroxy group can also be used as a crosslinking agent.
本実施形態のリソグラフィー用下層膜形成材料は、熱による架橋反応をさらに促進させるなどの観点から、必要に応じて酸発生剤を含有していてもよい。当業界において酸発生剤としては、熱分解によって酸を発生するもの、光照射によって酸を発生するものなどが知られているが、いずれのものも使用することができる。 [Acid generator]
The lower layer film forming material for lithography of the present embodiment may contain an acid generator as necessary from the viewpoint of further promoting the crosslinking reaction by heat. In the industry, as an acid generator, those that generate acid by thermal decomposition and those that generate acid by light irradiation are known, and any of them can be used.
1)下記一般式(P1a-1)、(P1a-2)、(P1a-3)又は(P1b)のオニウム塩、
2)下記一般式(P2)のジアゾメタン誘導体、
3)下記一般式(P3)のグリオキシム誘導体、
4)下記一般式(P4)のビススルホン誘導体、
5)下記一般式(P5)のN-ヒドロキシイミド化合物のスルホン酸エステル、
6)β-ケトスルホン酸誘導体、
7)ジスルホン誘導体、
8)ニトロベンジルスルホネート誘導体、
9)スルホン酸エステル誘導体
等が挙げられるが、これらに特に限定されない。なお、これらの酸発生剤は、1種を単独で、或いは2種以上を組み合わせて用いることができる。 As an acid generator,
1) Onium salts of the following general formula (P1a-1), (P1a-2), (P1a-3) or (P1b)
2) a diazomethane derivative of the following general formula (P2),
3) a glyoxime derivative of the following general formula (P3),
4) A bissulfone derivative of the following general formula (P4),
5) A sulfonic acid ester of an N-hydroxyimide compound of the following general formula (P5),
6) β-ketosulfonic acid derivative,
7) a disulfone derivative,
8) Nitrobenzyl sulfonate derivative,
9) Examples thereof include, but are not particularly limited to, sulfonic acid ester derivatives. In addition, these acid generators can be used individually by 1 type or in combination of 2 or more types.
これらのなかでも、特に、トリフルオロメタンスルホン酸トリフェニルスルホニウム、トリフルオロメタンスルホン酸(p-tert-ブトキシフェニル)ジフェニルスルホニウム、トリフルオロメタンスルホン酸トリス(p-tert-ブトキシフェニル)スルホニウム、p-トルエンスルホン酸トリフェニルスルホニウム、p-トルエンスルホン酸(p-tert-ブトキシフェニル)ジフェニルスルホニウム、p-トルエンスルホン酸トリス(p-tert-ブトキシフェニル)スルホニウム、トリフルオロメタンスルホン酸トリナフチルスルホニウム、トリフルオロメタンスルホン酸シクロヘキシルメチル(2-オキソシクロヘキシル)スルホニウム、トリフルオロメタンスルホン酸(2-ノルボニル)メチル(2-オキソシクロヘキシル)スルホニウム、1,2’-ナフチルカルボニルメチルテトラヒドロチオフェニウムトリフレート等のオニウム塩、ビス(ベンゼンスルホニル)ジアゾメタン、ビス(p-トルエンスルホニル)ジアゾメタン、ビス(シクロヘキシルスルホニル)ジアゾメタン、ビス(n-ブチルスルホニル)ジアゾメタン、ビス(イソブチルスルホニル)ジアゾメタン、ビス(sec-ブチルスルホニル)ジアゾメタン、ビス(n-プロピルスルホニル)ジアゾメタン、ビス(イソプロピルスルホニル)ジアゾメタン、ビス(tert-ブチルスルホニル)ジアゾメタン等のジアゾメタン誘導体、ビス-(p-トルエンスルホニル)-α-ジメチルグリオキシム、ビス-(n-ブタンスルホニル)-α-ジメチルグリオキシム等のグリオキシム誘導体、ビスナフチルスルホニルメタン等のビススルホン誘導体、N-ヒドロキシスクシンイミドメタンスルホン酸エステル、N-ヒドロキシスクシンイミドトリフルオロメタンスルホン酸エステル、N-ヒドロキシスクシンイミド1-プロパンスルホン酸エステル、N-ヒドロキシスクシンイミド2-プロパンスルホン酸エステル、N-ヒドロキシスクシンイミド1-ペンタンスルホン酸エステル、N-ヒドロキシスクシンイミドp-トルエンスルホン酸エステル、N-ヒドロキシナフタルイミドメタンスルホン酸エステル、N-ヒドロキシナフタルイミドベンゼンスルホン酸エステル等のN-ヒドロキシイミド化合物のスルホン酸エステル誘導体が好ましく用いられる。 Specific examples of the acid generator include, but are not limited to, tetramethylammonium trifluoromethanesulfonate, tetramethylammonium nonafluorobutanesulfonate, triethylammonium nonafluorobutanesulfonate, pyridinium nonafluorobutanesulfonate, triethyl camphorsulfonate Ammonium, pyridinium camphorsulfonate, tetra-n-butylammonium nonafluorobutanesulfonate, tetraphenylammonium nonafluorobutanesulfonate, tetramethylammonium p-toluenesulfonate, diphenyliodonium trifluoromethanesulfonate, trifluoromethanesulfonic acid (p- tert-butoxyphenyl) phenyliodonium, p-toluenesulfonic acid diphenyliodonium P-toluenesulfonic acid (p-tert-butoxyphenyl) phenyliodonium, trifluoromethanesulfonic acid triphenylsulfonium, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid bis (p-tert- Butoxyphenyl) phenylsulfonium, tris (p-tert-butoxyphenyl) sulfonium trifluoromethanesulfonate, triphenylsulfonium p-toluenesulfonate, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfone Bis (p-tert-butoxyphenyl) phenylsulfonium acid, Tris (p-tert-butoxyphenyl) p-toluenesulfonate Phonium, triphenylsulfonium nonafluorobutanesulfonate, triphenylsulfonium butanesulfonate, trimethylsulfonium trifluoromethanesulfonate, trimethylsulfonium p-toluenesulfonate, cyclohexylmethyl (2-oxocyclohexyl) sulfonium trifluoromethanesulfonate, p-toluene Cyclohexylmethyl (2-oxocyclohexyl) sulfonium sulfonate, dimethylphenylsulfonium trifluoromethanesulfonate, dimethylphenylsulfonium p-toluenesulfonate, dicyclohexylphenylsulfonium trifluoromethanesulfonate, dicyclohexylphenylsulfonium p-toluenesulfonate, trifluoromethanesulfonic acid Trinaphthylsulfonium Cyclohexylmethyl trifluoromethanesulfonate (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonate (2-norbornyl) methyl (2-oxocyclohexyl) sulfonium, ethylenebis [methyl (2-oxocyclopentyl) sulfonium trifluoromethanesulfonate], Onium salts such as 1,2'-naphthylcarbonylmethyltetrahydrothiophenium triflate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (xylenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (Cyclopentylsulfonyl) diazomethane, bis (n-butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane, Bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, bis (n-amylsulfonyl) diazomethane, bis (isoamylsulfonyl) diazomethane, Bis (sec-amylsulfonyl) diazomethane, bis (tert-amylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-butylsulfonyl) diazomethane, 1-cyclohexylsulfonyl-1- (tert-amylsulfonyl) diazomethane, 1- diazomethane derivatives such as tert-amylsulfonyl-1- (tert-butylsulfonyl) diazomethane, bis- (p-toluenesulfonyl) -α-dimethyl group Oxime, bis- (p-toluenesulfonyl) -α-diphenylglyoxime, bis- (p-toluenesulfonyl) -α-dicyclohexylglyoxime, bis- (p-toluenesulfonyl) -2,3-pentanedione glyoxime, Bis- (p-toluenesulfonyl) -2-methyl-3,4-pentanedione glyoxime, bis- (n-butanesulfonyl) -α-dimethylglyoxime, bis- (n-butanesulfonyl) -α-diphenylglyoxime Oxime, bis- (n-butanesulfonyl) -α-dicyclohexylglyoxime, bis- (n-butanesulfonyl) -2,3-pentanedione glyoxime, bis- (n-butanesulfonyl) -2-methyl-3, 4-Pentanedione glyoxime, bis- (methanesulfonyl) -α-dimethylglyoxy Shim, bis- (trifluoromethanesulfonyl) -α-dimethylglyoxime, bis- (1,1,1-trifluoroethanesulfonyl) -α-dimethylglyoxime, bis- (tert-butanesulfonyl) -α-dimethylglyoxime Oxime, bis- (perfluorooctanesulfonyl) -α-dimethylglyoxime, bis- (cyclohexanesulfonyl) -α-dimethylglyoxime, bis- (benzenesulfonyl) -α-dimethylglyoxime, bis- (p-fluorobenzene) Sulfonyl) -α-dimethylglyoxime, bis- (p-tert-butylbenzenesulfonyl) -α-dimethylglyoxime, bis- (xylenesulfonyl) -α-dimethylglyoxime, bis- (camphorsulfonyl) -α-dimethyl Glyoximes such as glyoximes Conductors, bissulfone derivatives such as bisnaphthylsulfonylmethane, bistrifluoromethylsulfonylmethane, bismethylsulfonylmethane, bisethylsulfonylmethane, bispropylsulfonylmethane, bisisopropylsulfonylmethane, bis-p-toluenesulfonylmethane, bisbenzenesulfonylmethane, Β-ketosulfone derivatives such as 2-cyclohexylcarbonyl-2- (p-toluenesulfonyl) propane, 2-isopropylcarbonyl-2- (p-toluenesulfonyl) propane, disulfone derivatives such as diphenyldisulfone derivatives, dicyclohexyldisulfone derivatives, p- Nitrobenzyl sulfonate derivatives such as 2,6-dinitrobenzyl toluenesulfonate, 2,4-dinitrobenzyl p-toluenesulfonate, Sulfonic acid ester derivatives such as 1,3-tris (methanesulfonyloxy) benzene, 1,2,3-tris (trifluoromethanesulfonyloxy) benzene, 1,2,3-tris (p-toluenesulfonyloxy) benzene, N- Hydroxysuccinimide methanesulfonate, N-hydroxysuccinimide trifluoromethanesulfonate, N-hydroxysuccinimide ethanesulfonate, N-hydroxysuccinimide 1-propanesulfonate, N-hydroxysuccinimide 2-propanesulfonate, N- Hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide 1-octanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfone Esters, N-hydroxysuccinimide p-methoxybenzenesulfonate, N-hydroxysuccinimide 2-chloroethanesulfonate, N-hydroxysuccinimidebenzenesulfonate, N-hydroxysuccinimide-2,4,6-trimethylbenzenesulfonate N-hydroxysuccinimide 1-naphthalenesulfonic acid ester, N-hydroxysuccinimide 2-naphthalenesulfonic acid ester, N-hydroxy-2-phenylsuccinimide methanesulfonic acid ester, N-hydroxymaleimide methanesulfonic acid ester, N-hydroxymaleimide ethane Sulfonic acid ester, N-hydroxy-2-phenylmaleimide methanesulfonic acid ester, N-hydroxyglutarimide meta Sulfonate, N-hydroxyglutarimide benzenesulfonate, N-hydroxyphthalimide methanesulfonate, N-hydroxyphthalimide benzenesulfonate, N-hydroxyphthalimide trifluoromethanesulfonate, N-hydroxyphthalimide p-toluenesulfone Acid ester, N-hydroxynaphthalimide methanesulfonate, N-hydroxynaphthalimide benzenesulfonate, N-hydroxy-5-norbornene-2,3-dicarboximide methanesulfonate, N-hydroxy-5-norbornene -2,3-dicarboximide trifluoromethanesulfonate, N-hydroxy-5-norbornene-2,3-dicarboximide p-to Sulfonic acid ester derivatives of N- hydroxy imide compounds such as toluenesulfonic acid esters.
Among these, in particular, triphenylsulfonium trifluoromethanesulfonate, trifluoromethanesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, trifluoromethanesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, p-toluenesulfonic acid Triphenylsulfonium, p-toluenesulfonic acid (p-tert-butoxyphenyl) diphenylsulfonium, p-toluenesulfonic acid tris (p-tert-butoxyphenyl) sulfonium, trifluoromethanesulfonic acid trinaphthylsulfonium, trifluoromethanesulfonic acid cyclohexylmethyl (2-oxocyclohexyl) sulfonium, trifluoromethanesulfonic acid (2-norbornyl) methyl (2-oxocyclohexyl) Sil) sulfonium, onium salts such as 1,2'-naphthylcarbonylmethyltetrahydrothiophenium triflate, bis (benzenesulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (n- Diazomethane derivatives such as butylsulfonyl) diazomethane, bis (isobutylsulfonyl) diazomethane, bis (sec-butylsulfonyl) diazomethane, bis (n-propylsulfonyl) diazomethane, bis (isopropylsulfonyl) diazomethane, bis (tert-butylsulfonyl) diazomethane, Glyoxime derivatives such as bis- (p-toluenesulfonyl) -α-dimethylglyoxime and bis- (n-butanesulfonyl) -α-dimethylglyoxime; Bissulfone derivatives such as naphthylsulfonylmethane, N-hydroxysuccinimide methanesulfonate, N-hydroxysuccinimide trifluoromethanesulfonate, N-hydroxysuccinimide 1-propanesulfonate, N-hydroxysuccinimide 2-propanesulfonate, N-hydroxysuccinimide 1-pentanesulfonic acid ester, N-hydroxysuccinimide p-toluenesulfonic acid ester, N-hydroxynaphthalimide methanesulfonic acid ester, N-hydroxynaphthalimide benzenesulfonic acid ester, etc. Acid ester derivatives are preferably used.
本実施形態のリソグラフィー用下層膜形成材料は、有機溶媒を含有していてもよい。有機溶媒としては本実施形態の化合物及び/又は本実施形態の樹脂が少なくとも溶解するものであれば、公知のものを適宜用いることができる。
有機溶媒の具体例としては、アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロヘキサノン等のケトン系溶媒、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート等のセロソルブ系溶媒、乳酸エチル、酢酸メチル、酢酸エチル、酢酸ブチル、酢酸イソアミル、乳酸エチル、メトキシプロピオン酸メチル、ヒドロキシイソ酪酸メチル等のエステル系溶媒、メタノール、エタノール、イソプロパノール、1-エトキシ-2-プロパノール等のアルコール系溶媒、トルエン、キシレン、アニソール等の芳香族系炭化水素等が挙げられるが、これらに特に限定されない。これらの有機溶媒は、1種を単独で、或いは2種以上を組み合わせて用いることができる。 [Organic solvent]
The material for forming a lower layer film for lithography of the present embodiment may contain an organic solvent. Any known organic solvent can be used as long as it can dissolve at least the compound of this embodiment and / or the resin of this embodiment.
Specific examples of organic solvents include ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone, cellosolve solvents such as propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate, ethyl lactate, methyl acetate, ethyl acetate and butyl acetate. Ester solvents such as isoamyl acetate, ethyl lactate, methyl methoxypropionate and methyl hydroxyisobutyrate, alcohol solvents such as methanol, ethanol, isopropanol and 1-ethoxy-2-propanol, aromatics such as toluene, xylene and anisole Examples thereof include, but are not limited to, hydrocarbons. These organic solvents can be used individually by 1 type or in combination of 2 or more types.
また、本実施形態のリソグラフィー用下層膜形成材料は、熱硬化性の付与や吸光度をコントロールする目的で、他の樹脂及び/又は化合物を含有していてもよい。このような他の樹脂及び/又は化合物としては、ナフトール樹脂、キシレン樹脂ナフトール変性樹脂、ナフタレン樹脂のフェノール変性樹脂、ポリヒドロキシスチレン、ジシクロペンタジエン樹脂、(メタ)アクリレート、ジメタクリレート、トリメタクリレート、テトラメタクリレート、ビニルナフタレン、ポリアセナフチレンなどのナフタレン環、フェナントレンキノン、フルオレンなどのビフェニル環、チオフェン、インデンなどのヘテロ原子を有する複素環を含む樹脂や芳香族環を含まない樹脂;ロジン系樹脂、シクロデキストリン、アダマンタン(ポリ)オール、トリシクロデカン(ポリ)オール及びそれらの誘導体等の脂環構造を含む樹脂又は化合物等が挙げられるが、これらに特に限定されない。さらに、本実施形態のリソグラフィー用下層膜形成材料は、公知の添加剤、例えば、紫外線吸収剤、界面活性剤、着色剤、ノニオン系界面活性剤等を含有していてもよい。 [Other ingredients]
Further, the material for forming a lower layer film for lithography of the present embodiment may contain other resins and / or compounds for the purpose of imparting thermosetting properties and controlling absorbance. Examples of such other resins and / or compounds include naphthol resins, xylene resins, naphthol-modified resins, phenol-modified resins of naphthalene resins, polyhydroxystyrene, dicyclopentadiene resins, (meth) acrylates, dimethacrylates, trimethacrylates, tetra Resins containing no heterocyclic ring or aromatic ring such as methacrylate, vinyl naphthalene, polyacenaphthylene and other naphthalene rings, phenanthrenequinone, biphenyl rings such as fluorene, hetero rings having hetero atoms such as thiophene and indene; rosin resins; Examples thereof include resins or compounds containing an alicyclic structure such as cyclodextrin, adamantane (poly) ol, tricyclodecane (poly) ol, and derivatives thereof, but are not particularly limited thereto. Furthermore, the lower layer film forming material for lithography of the present embodiment may contain a known additive, for example, an ultraviolet absorber, a surfactant, a colorant, a nonionic surfactant and the like.
本実施形態のリソグラフィー用下層膜は、本実施形態のリソグラフィー用下層膜形成材料から形成される。 [Liquid lower layer film and multilayer resist pattern forming method]
The lower layer film for lithography of this embodiment is formed from the lower layer film forming material for lithography of this embodiment.
このような中間層膜の上に直接フォトレジスト膜を形成することができるが、中間層膜の上に有機反射防止膜(BARC)をスピンコートで形成して、その上にフォトレジスト膜を形成してもよい。 Here, when an inorganic hard mask intermediate layer film is formed as the intermediate layer, a silicon oxide film, a silicon nitride film, or a silicon oxynitride film (SiON film) is formed by a CVD method, an ALD method, or the like. The method for forming the nitride film is not limited to the following, and examples thereof include methods described in Japanese Patent Application Laid-Open No. 2002-334869 (Patent Document 6) and WO 2004/066377 (Patent Document 7).
A photoresist film can be formed directly on such an intermediate film, but an organic antireflection film (BARC) is formed on the intermediate film by spin coating, and a photoresist film is formed thereon. May be.
なお、基板は、公知のものを適宜選択して使用することができ、特に限定されないが、Si、α-Si、p-Si、SiO2、SiN、SiON、W、TiN、Al等が挙げられる。また、基板は、基材(支持体)上に被加工膜(被加工基板)を有する積層体であってもよい。このような被加工膜としては、Si、SiO2、SiON、SiN、p-Si、α-Si、W、W-Si、Al、Cu、Al-Si等種々のLow-k膜及びそのストッパー膜等が挙げられ、通常、基材(支持体)とは異なる材質のものが用いられる。なお、加工対象となる基板或いは被加工膜の厚さは、特に限定されないが、通常、50~10,000nm程度であることが好ましく、より好ましくは75~5,000nmである。 The lower layer film of this embodiment is characterized by excellent etching resistance of these substrates.
A known substrate can be appropriately selected and used, and is not particularly limited. Examples thereof include Si, α-Si, p-Si, SiO 2 , SiN, SiON, W, TiN, and Al. . The substrate may be a laminate having a film to be processed (substrate to be processed) on a base material (support). Examples of such processed films include various low-k films such as Si, SiO 2 , SiON, SiN, p-Si, α-Si, W, W-Si, Al, Cu, and Al-Si, and their stopper films. In general, a material different from the base material (support) is used. The thickness of the substrate to be processed or the film to be processed is not particularly limited, but is usually preferably about 50 to 10,000 nm, more preferably 75 to 5,000 nm.
本実施形態における化合物又は樹脂の精製方法は、水と任意に混和しない有機溶媒及び、本実施形態の化合物又は本実施形態の樹脂を含む溶液(A)と、酸性の水溶液と、を接触させて抽出する工程を含む。上記のように構成されているため、本実施形態の精製方法によれば、本実施形態の化合物又は本実施形態の樹脂に不純物として含まれうる種々の金属の含有量を低減することができる。
より詳細には、本実施形態においては、前記化合物又は前記樹脂を水と任意に混和しない有機溶媒に溶解させ、さらにその溶液を酸性水溶液と接触させて抽出処理を行うものとすることができる。これにより、溶液(A)に含まれる金属分を水相に移行させたのち、有機相と水相を分離して金属含有量の低減された、本実施形態の化合物又は本実施形態の樹脂を得ることができる。 [Method for purifying compound or resin]
In the purification method of the compound or resin in the present embodiment, an organic solvent that is not arbitrarily miscible with water and a solution (A) containing the compound of the present embodiment or the resin of the present embodiment are contacted with an acidic aqueous solution. An extracting step. Since it is comprised as mentioned above, according to the purification method of this embodiment, content of the various metals which can be contained as an impurity in the compound of this embodiment or the resin of this embodiment can be reduced.
More specifically, in this embodiment, the compound or the resin can be dissolved in an organic solvent that is not arbitrarily miscible with water, and the solution is further brought into contact with an acidic aqueous solution to perform the extraction treatment. Thus, after the metal component contained in the solution (A) is transferred to the aqueous phase, the organic phase and the aqueous phase are separated to reduce the metal content, thereby reducing the compound of the present embodiment or the resin of the present embodiment. Obtainable.
これらの溶媒はそれぞれ単独で用いることもできるし、また2種以上を混合して用いることもできる。 Specific examples of the solvent used include, but are not limited to, ethers such as diethyl ether and diisopropyl ether, esters such as ethyl acetate, n-butyl acetate and isoamyl acetate, methyl ethyl ketone, methyl isobutyl ketone and ethyl isobutyl ketone. , Ketones such as cyclohexanone, cyclopentanone, 2-heptanone, 2-pentanone, glycols such as ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monoethyl ether acetate Ether acetates, aliphatic hydrocarbons such as n-hexane and n-heptane, aromatic hydrocarbons such as toluene and xylene, methylene chloride, chlorine Halogenated hydrocarbons such as Holm and the like. Among these, toluene, 2-heptanone, cyclohexanone, cyclopentanone, methyl isobutyl ketone, propylene glycol monomethyl ether acetate, ethyl acetate and the like are preferable, methyl isobutyl ketone, ethyl acetate, cyclohexanone, propylene glycol monomethyl ether acetate are more preferable, More preferred are methyl isobutyl ketone and ethyl acetate. Methyl isobutyl ketone, ethyl acetate, and the like have a relatively high saturation solubility and a relatively low boiling point of the compound of the present embodiment or the resin of the present embodiment. It becomes possible to reduce the load in the.
These solvents can be used alone or in combination of two or more.
また、ここで用いる水は、本実施形態の目的に沿って、金属含有量の少ないもの、例えばイオン交換水等であることが好ましい。抽出処理は1回だけでもかまわないが、混合、静置、分離という操作を複数回繰り返して行うのも有効である。また、抽出処理における両者の使用割合や、温度、時間等の条件は特に限定されないが、先の酸性の水溶液との接触処理の場合と同様で構わない。 In the present embodiment, it is preferable to include a step of performing an extraction process with water after performing an extraction process by bringing the solution (A) into contact with an acidic aqueous solution. That is, after performing the above extraction process using an acidic aqueous solution, the solution containing the compound of this embodiment or the resin of this embodiment and the organic solvent extracted and recovered from the aqueous solution is further subjected to an extraction process with water. It is preferable to provide. The extraction treatment with water is not particularly limited. For example, the extraction treatment with water can be performed by mixing well by stirring and then allowing to stand. The solution obtained after the standing is separated into a solution phase and an aqueous phase containing the compound of the present embodiment or the resin of the present embodiment and an organic solvent, and an aqueous phase, and therefore the compound of the present embodiment or the resin of the present embodiment by decantation or the like. A solution phase containing an organic solvent can be recovered.
Moreover, it is preferable that the water used here is a thing with little metal content, for example, ion-exchange water etc. according to the objective of this embodiment. The extraction process may be performed only once, but it is also effective to repeat the operations of mixing, standing, and separation a plurality of times. Further, the use ratio of both in the extraction process, conditions such as temperature and time are not particularly limited, but they may be the same as those in the contact process with the acidic aqueous solution.
有機元素分析により炭素濃度及び酸素濃度(質量%)を測定した。
装置:CHNコーダーMT-6(ヤナコ分析工業(株)製)
(分子量)
GC-MS分析により、Agilent社製Agilent5975/6890Nを用いて測定した。あるいは、LC-MS分析により、Water社製Acquity UPLC/MALDI-Synapt HDMSを用いて測定した。
(分子量測定)
電界脱離質量分析法(FD-MS)分析により、分子量を求めた。
(ポリスチレン換算分子量)
ゲル浸透クロマトグラフィー(GPC)分析により、ポリスチレン換算の重量平均分子量(Mw)、数平均分子量(Mn)を求め、分散度(Mw/Mn)を求めた。
装置:Shodex GPC-101型(昭和電工(株)製)
カラム:KF-80M×3
溶離液:THF 1mL/min
温度:40℃
(熱分解温度(Tg))
エスアイアイ・ナノテクノロジー社製EXSTAR6000DSC装置を使用し、試料約5mgをアルミニウム製非密封容器に入れ、窒素ガス(30mL/min)気流中昇温速度10℃/minで500℃まで昇温した。その際、ベースラインに減少部分が現れる温度を熱分解温度(Tg)とし、以下の基準で耐熱性を評価した。
評価A:熱分解温度が≧150℃
評価C:熱分解温度が<150℃
(溶解度)
23℃にて、化合物をシクロヘキサノン(CHN)に対して5質量%溶液になるよう溶解させ、その後、5℃にて30日間静置し、結果を以下の基準で評価した。
評価A:目視にて析出物なしを確認
評価C:目視にて析出物ありを確認 (Carbon concentration and oxygen concentration)
Carbon concentration and oxygen concentration (mass%) were measured by organic elemental analysis.
Apparatus: CHN coder MT-6 (manufactured by Yanaco Analytical Co., Ltd.)
(Molecular weight)
By GC-MS analysis, measurement was performed using Agilent 5975 / 6890N manufactured by Agilent. Alternatively, measurement was performed by LC-MS analysis using Water UP Acquity UPLC / MALDI-Synapt HDMS.
(Molecular weight measurement)
The molecular weight was determined by field desorption mass spectrometry (FD-MS) analysis.
(Molecular weight in terms of polystyrene)
The weight average molecular weight (Mw) and number average molecular weight (Mn) in terms of polystyrene were determined by gel permeation chromatography (GPC) analysis, and the degree of dispersion (Mw / Mn) was determined.
Apparatus: Shodex GPC-101 (manufactured by Showa Denko KK)
Column: KF-80M x 3
Eluent: THF 1mL / min
Temperature: 40 ° C
(Thermal decomposition temperature (Tg))
Using an EXSTAR6000DSC apparatus manufactured by SII Nanotechnology, about 5 mg of a sample was placed in an aluminum non-sealed container, and the temperature was increased to 500 ° C. at a temperature increase rate of 10 ° C./min in a nitrogen gas (30 mL / min) air stream. At that time, the temperature at which the reduced portion appeared in the baseline was defined as the thermal decomposition temperature (Tg), and the heat resistance was evaluated according to the following criteria.
Evaluation A: Thermal decomposition temperature is ≧ 150 ° C.
Evaluation C: Thermal decomposition temperature <150 ° C
(solubility)
At 23 ° C., the compound was dissolved in cyclohexanone (CHN) so as to be a 5 mass% solution, and then allowed to stand at 5 ° C. for 30 days. The results were evaluated according to the following criteria.
Evaluation A: Visually confirmed no deposit Evaluation C: Visually confirmed presence of deposit
攪拌機、冷却管及びビュレットを備えた内容積1000mLの容器に、2,6-ナフタレンジオール(シグマ-アルドリッチ社製試薬)16.0g(100mmol)と、4-ビフェニルアルデヒド(三菱瓦斯化学社製)18.2g(100mmol)と、メチルイソブチルケトン300mLとを仕込み、95%の硫酸50mLを加えて、反応液を100℃で6時間撹拌して反応を行った。次に、反応液を濃縮し、純水500gを加えて反応生成物を析出させ、室温まで冷却した後、濾過を行って分離した。濾過により得られた固形物を乾燥させた後、カラムクロマトによる分離精製を行うことにより、下記式で表される目的化合物(BisN-1)30.5gを得た。
なお、400MHz-1H-NMRにより以下のピークが見出され、下記式の化学構造を有することを確認した。また、2,6-ジヒドロキシナフトールの置換位置が1位であることは、3位と4位のプロトンのシグナルがダブレットであることから確認した。
1H-NMR:(d-DMSO、内部標準TMS)
δ(ppm)9.7(2H,O-H)、7.2~8.5(19H,Ph-H)、6.6(1H,C-H) (Synthesis Example 1) Synthesis of BisN-1 In a 1000 mL internal vessel equipped with a stirrer, a condenser tube and a burette, 16.0 g (100 mmol) of 2,6-naphthalenediol (Sigma-Aldrich reagent) and 4- Biphenyl aldehyde (Mitsubishi Gas Chemical Co., Ltd.) 18.2g (100mmol) and methyl isobutyl ketone 300mL were prepared, 95% sulfuric acid 50mL was added, and reaction was performed by stirring the reaction liquid at 100 degreeC for 6 hours. Next, the reaction solution was concentrated, 500 g of pure water was added to precipitate the reaction product, cooled to room temperature, and then filtered to separate. The solid obtained by filtration was dried and then separated and purified by column chromatography to obtain 30.5 g of the target compound (BisN-1) represented by the following formula.
The following peaks were found by 400 MHz-1H-NMR, and confirmed to have a chemical structure of the following formula. In addition, the substitution position of 2,6-dihydroxynaphthol was confirmed to be the 1st position because the signals of protons at the 3rd and 4th positions were doublets.
1H-NMR: (d-DMSO, internal standard TMS)
δ (ppm) 9.7 (2H, OH), 7.2 to 8.5 (19H, Ph—H), 6.6 (1H, C—H)
攪拌機、冷却管及びビュレットを備えた内容積1000mLの容器に、前記で得られたBisN-1 11.7g(25mmol)、炭酸カリウム108g(810mmol)と、ジメチルホルムアミド200mLとを仕込み、ブロモシクロヘキサン250g(1.53mol)を加えて、反応液を110℃で24時間撹拌して反応を行った。次に、反応液を濃縮し、純水500gを加えて反応生成物を析出させ、室温まで冷却した後、濾過を行って分離した。得られた固形物を濾過し、乾燥させた後、カラムクロマトによる分離精製を行うことにより、下記式で表される目的化合物(BisN-1-CH1)2.4g及び(BisN-1-CH2)9.6gを得た。
得られた化合物について、前記測定条件でNMR測定を行ったところ、以下のピークが見出され、下記式の化学構造を有することを確認した。 (Synthesis Example 1) Synthesis of BisN-1-CH1 and BisN-1-CH2 Into a 1000 mL container equipped with a stirrer, a condenser tube and a burette, 11.7 g (25 mmol) of BisN-1 obtained above was added. 108 g (810 mmol) of potassium carbonate and 200 mL of dimethylformamide were added, 250 g (1.53 mol) of bromocyclohexane was added, and the reaction was stirred at 110 ° C. for 24 hours to carry out the reaction. Next, the reaction solution was concentrated, 500 g of pure water was added to precipitate the reaction product, cooled to room temperature, and then filtered to separate. The obtained solid was filtered and dried, followed by separation and purification by column chromatography, whereby 2.4 g of the target compound (BisN-1-CH1) represented by the following formula and (BisN-1-CH2) 9.6 g was obtained.
About the obtained compound, when the NMR measurement was performed on the said measurement conditions, the following peaks were found and it confirmed that it had a chemical structure of a following formula.
ここで、Cy-Hとは、シクロヘキシル基のプロトンのシグナルである。 BisN-1-CH1: δ (ppm) 9.7 (1H, OH), 7.2 to 8.5 (19H, Ph—H), 6.6 (1H, C—H), 1.4 ~ 4.5 (11H, Cy-H)
Here, Cy-H is a signal of the proton of the cyclohexyl group.
ここで、Cy-Hとは、シクロヘキシル基のプロトンのシグナルである。 BisN-1-CH2: δ (ppm) 7.2 to 8.5 (19H, Ph—H), 6.6 (1H, C—H), 1.4 to 4.5 (22H, Cy—H)
Here, Cy-H is a signal of the proton of the cyclohexyl group.
得られたBisN-1-CH2の分子量は、630であった。また、炭素濃度は85.7質量%、酸素濃度は7.6質量%であった。 The molecular weight of the obtained BisN-1-CH1 was 548. The carbon concentration was 85.3% by mass, and the oxygen concentration was 8.8% by mass.
The obtained BisN-1-CH2 had a molecular weight of 630. Moreover, carbon concentration was 85.7 mass% and oxygen concentration was 7.6 mass%.
攪拌機、冷却管及びビュレットを備えた内容積1000mLの容器に、前記で得られたBisN-1 9.3g(20mmol)、炭酸セシウム26g(80mmol)、ヨウ化銅0.8g(4mmol)、ジメチルグリシン塩酸塩1.7g(12mmol)と、ジオキサン80mLとを仕込み、ヨウ化ベンゼン8.2g(40mmol)を加えて、反応液を90℃で6時間撹拌して反応を行った。次に、酢酸エチル500mLを加えて反応生成物を析出させ、室温まで冷却した後、濾過を行って分離した。得られた固形物を濾過し、乾燥させた後、カラムクロマトによる分離精製を行うことにより、下記式で表される目的化合物(BisN-1-PH1)7.2gを得た。
得られた化合物について、前記測定条件でNMR測定を行ったところ、以下のピークが見出され、下記式の化学構造を有することを確認した。 (Synthesis Example 2) Synthesis of BisN-1-PH1 In a container having a volume of 1000 mL equipped with a stirrer, a condenser tube and a burette, 9.3 g (20 mmol) of BisN-1 obtained above and 26 g (80 mmol) of cesium carbonate were obtained. , 0.8 g (4 mmol) of copper iodide, 1.7 g (12 mmol) of dimethylglycine hydrochloride and 80 mL of dioxane, 8.2 g (40 mmol) of benzene iodide were added, and the reaction solution was stirred at 90 ° C. for 6 hours. The reaction was carried out with stirring. Next, 500 mL of ethyl acetate was added to precipitate the reaction product, which was cooled to room temperature and then separated by filtration. The obtained solid was filtered and dried, followed by separation and purification by column chromatography to obtain 7.2 g of the target compound (BisN-1-PH1) represented by the following formula.
About the obtained compound, when the NMR measurement was performed on the said measurement conditions, the following peaks were found and it confirmed that it had a chemical structure of a following formula.
攪拌機、冷却管及びビュレットを備えた内容積1000mLの容器に、前記で得られたBisN-1 9.3g(20mmol)、炭酸セシウム26g(80mmol)、ヨウ化銅0.8g(4mmol)、ジメチルグリシン塩酸塩1.7g(12mmol)と、ジオキサン80mLとを仕込み、ヨウ化ベンゼン8.2g(40mmol)を加えて、反応液を90℃で67時間撹拌して反応を行った。次に、酢酸エチル500mLを加えて反応生成物を析出させ、室温まで冷却した後、濾過を行って分離した。得られた固形物を濾過し、乾燥させた後、カラムクロマトによる分離精製を行うことにより、下記式で表される目的化合物(BisN-1-PH2)6.8gを得た。 (Synthesis Example 3) Synthesis of BisN-1-PH2 In a container having a volume of 1000 mL equipped with a stirrer, a condenser tube and a burette, 9.3 g (20 mmol) of BisN-1 obtained above and 26 g (80 mmol) of cesium carbonate were obtained. Then, 0.8 g (4 mmol) of copper iodide, 1.7 g (12 mmol) of dimethylglycine hydrochloride and 80 mL of dioxane were added, 8.2 g (40 mmol) of benzene iodide was added, and the reaction solution was stirred at 90 ° C. for 67 hours. The reaction was carried out with stirring. Next, 500 mL of ethyl acetate was added to precipitate the reaction product, which was cooled to room temperature and then separated by filtration. The obtained solid was filtered and dried, followed by separation and purification by column chromatography to obtain 6.8 g of the target compound (BisN-1-PH2) represented by the following formula.
得られたBisN-1-PH2の分子量は、618であった。また、炭素濃度は87.4質量%、酸素濃度は7.8質量%であった。 The obtained BisN-1-PH1 had a molecular weight of 542. The carbon concentration was 86.3% by mass, and the oxygen concentration was 8.9% by mass.
The obtained BisN-1-PH2 had a molecular weight of 618. The carbon concentration was 87.4% by mass, and the oxygen concentration was 7.8% by mass.
ジムロート冷却管、温度計及び攪拌翼を備えた、底抜きが可能な内容積10Lの四つ口フラスコに、窒素気流中、1,5-ジメチルナフタレン1.09kg(7mol、三菱ガス化学(株)製)、40質量%ホルマリン水溶液2.1kg(ホルムアルデヒドとして28mol、三菱ガス化学(株)製)及び98質量%硫酸(関東化学(株)製)0.97mlを仕込み、常圧下、100℃で還流させながら7時間反応させた。その後、希釈溶媒としてエチルベンゼン(和光純薬工業(株)製試薬特級)1.8kgを反応液に加え、静置後、下相の水相を除去した。さらに、中和及び水洗を行い、エチルベンゼン及び未反応の1,5-ジメチルナフタレンを減圧下で留去することにより、淡褐色固体のジメチルナフタレンホルムアルデヒド樹脂1.25kgを得た。
得られたジメチルナフタレンホルムアルデヒドの分子量は、Mn:562、Mw:1168、Mw/Mn:2.08であった。また、炭素濃度は84.2質量%、酸素濃度は8.3質量%であった。 (Production Example 1)
A 4-liter flask with an internal volume of 10 L, equipped with a Dimroth condenser, thermometer, and stirring blade and capable of bottoming out, was charged with 1.09 kg of 1,5-dimethylnaphthalene (7 mol, Mitsubishi Gas Chemical Co., Ltd.) in a nitrogen stream. ), 2.1 kg of 40% by weight formalin aqueous solution (28 mol as formaldehyde, manufactured by Mitsubishi Gas Chemical Co., Ltd.) and 0.97 ml of 98% by weight sulfuric acid (manufactured by Kanto Chemical Co., Ltd.), and refluxed at 100 ° C. under normal pressure. And allowed to react for 7 hours. Thereafter, 1.8 kg of ethylbenzene (special grade reagent manufactured by Wako Pure Chemical Industries, Ltd.) as a diluent solvent was added to the reaction solution, and after standing, the lower aqueous phase was removed. Further, neutralization and washing with water were carried out, and ethylbenzene and unreacted 1,5-dimethylnaphthalene were distilled off under reduced pressure to obtain 1.25 kg of a light brown solid dimethylnaphthalene formaldehyde resin.
The molecular weight of the obtained dimethylnaphthalene formaldehyde was Mn: 562, Mw: 1168, Mw / Mn: 2.08. Moreover, carbon concentration was 84.2 mass% and oxygen concentration was 8.3 mass%.
得られた樹脂(CR-1)は、Mn:885、Mw:2220、Mw/Mn:4.17であった。また、炭素濃度は89.1質量%、酸素濃度は4.5質量%であった。 Thereafter, 100 g (0.51 mol) of dimethylnaphthalene formaldehyde resin obtained in Production Example 1 and paratoluene were added to a 0.5 L four-necked flask equipped with a Dimroth condenser, a thermometer and a stirring blade under a nitrogen stream. The sulfonic acid 0.05g was prepared, and it heated up to 190 degreeC, heated for 2 hours, and then stirred. Thereafter, 52.0 g (0.36 mol) of 1-naphthol was further added, and the temperature was further raised to 220 ° C. to react for 2 hours. After the solvent was diluted, neutralization and water washing were performed, and the solvent was removed under reduced pressure to obtain 126.1 g of a dark brown solid modified resin (CR-1).
The obtained resin (CR-1) was Mn: 885, Mw: 2220, and Mw / Mn: 4.17. The carbon concentration was 89.1% by mass, and the oxygen concentration was 4.5% by mass.
上記BisN-1-CH1、BisN-1-CH2、BisN-1-PH1、BisN-1-PH2及びBisN-1につき、耐熱性試験及び溶解度試験を行った。結果を表1に示す。
また、表1に示す組成のリソグラフィー用下層膜形成材料を各々調製した。次に、これらの下層膜形成材料をシリコン基板上に回転塗布し、その後、240℃で60秒間、さらに400℃で120秒間ベークして、膜厚200nmの下層膜を各々作製した。酸発生剤、架橋剤及び有機溶媒については次のものを用いた。
酸発生剤:みどり化学社製 ジターシャリーブチルジフェニルヨードニウムノナフルオロメタンスルホナート(表中、「DTDPI」と表記する。)
架橋剤:三和ケミカル社製 ニカラックMX270(表中、「ニカラック」と表記する。)
有機溶媒:シクロヘキサノン(表中、「CHN」と表記する。) (Examples 1 to 4, Comparative Example 1)
The BisN-1-CH1, BisN-1-CH2, BisN-1-PH1, BisN-1-PH2, and BisN-1 were subjected to a heat resistance test and a solubility test. The results are shown in Table 1.
In addition, materials for forming a lower layer film for lithography having the composition shown in Table 1 were prepared. Next, these lower layer film-forming materials were spin-coated on a silicon substrate, and then baked at 240 ° C. for 60 seconds and further at 400 ° C. for 120 seconds to prepare lower layer films each having a thickness of 200 nm. The following were used about the acid generator, the crosslinking agent, and the organic solvent.
Acid generator: Ditertiary butyl diphenyliodonium nonafluoromethanesulfonate manufactured by Midori Kagaku Co. (denoted as “DTDPI” in the table)
Cross-linking agent: Nikalac MX270 manufactured by Sanwa Chemical Co., Ltd. (indicated in the table as “Nikalac”)
Organic solvent: cyclohexanone (indicated in the table as “CHN”)
さらに、下記に示す条件でエッチング試験を行い、エッチング耐性を評価した。評価結果を表1に示す。
エッチング装置:サムコインターナショナル社製 RIE-10NR
出力:50W
圧力:20Pa
時間:2min
エッチングガス
Arガス流量:CF4ガス流量:O2ガス流量=50:5:5(sccm)
[エッチング耐性の評価]
エッチング耐性の評価は、以下の手順で行った。
まず、実施例1において用いる化合物(BisN-1-CH1)に代えてノボラック(群栄化学社製 PSM4357)を用いること以外は、実施例1と同様の条件で、ノボラックの下層膜を作製した。そして、このノボラックの下層膜の上記のエッチング試験を行い、そのときのエッチングレートを測定した。
次に、実施例1及び比較例1の下層膜のエッチング試験を同様に行い、そのときのエッチングレートを測定した。
そして、ノボラックの下層膜のエッチングレートを基準として、以下の評価基準でエッチング耐性を評価した。結果を表1に示す。
<評価基準>
A;ノボラックの下層膜に比べてエッチングレートが、-10%未満
B;ノボラックの下層膜に比べてエッチングレートが、-10%~+5%
C;ノボラックの下層膜に比べてエッチングレートが、+5%超 [Etching test]
Furthermore, an etching test was performed under the conditions shown below to evaluate etching resistance. The evaluation results are shown in Table 1.
Etching device: RIE-10NR manufactured by Samco International
Output: 50W
Pressure: 20Pa
Time: 2min
Etching gas Ar gas flow rate: CF 4 gas flow rate: O 2 gas flow rate = 50: 5: 5 (sccm)
[Evaluation of etching resistance]
Etching resistance was evaluated according to the following procedure.
First, a novolac underlayer film was prepared under the same conditions as in Example 1 except that novolak (PSM4357 manufactured by Gunei Chemical Co., Ltd.) was used instead of the compound (BisN-1-CH1) used in Example 1. Then, the above-described etching test of the novolak underlayer film was performed, and the etching rate at that time was measured.
Next, the etching test of the lower layer film of Example 1 and Comparative Example 1 was similarly performed, and the etching rate at that time was measured.
Then, the etching resistance was evaluated according to the following evaluation criteria based on the etching rate of the novolak underlayer film. The results are shown in Table 1.
<Evaluation criteria>
A: Etching rate is less than -10% compared to the novolac lower layer film B: Etching rate is -10% to + 5% compared to the novolac lower layer film
C: Etching rate is more than + 5% compared to the novolak underlayer
下記式(11)の化合物は、2-メチル-2-メタクリロイルオキシアダマンタン4.15g、メタクリルロイルオキシ-γ-ブチロラクトン3.00g、3-ヒドロキシ-1-アダマンチルメタクリレート2.08g、アゾビスイソブチロニトリル0.38gを、テトラヒドロフラン80mLに溶解させ、窒素雰囲気下、反応温度を63℃に保持して、22時間重合させた後、反応溶液を400mLのn-ヘキサン中に滴下して、生成樹脂を凝固精製させ、生成した白色粉末をろ過、減圧下40℃で一晩乾燥させて得た。 Next, the materials for forming a lower layer film for lithography of Examples 1 to 4 and Comparative Example 1 containing BisN-1-CH1, BisN-1-CH2, BisN-1-PH1, BisN-1-PH2, and BisN-1 respectively Each solution was applied on a 300 nm thick SiO 2 substrate and baked at 240 ° C. for 60 seconds and further at 400 ° C. for 120 seconds to form an underlayer film having a thickness of 80 nm. On this lower layer film, an ArF resist solution was applied and baked at 130 ° C. for 60 seconds to form a 150 nm-thick photoresist layer. As the ArF resist solution, a compound of the following formula (11): 5 parts by mass, triphenylsulfonium nonafluoromethanesulfonate: 1 part by mass, tributylamine: 2 parts by mass, and PGMEA: 92 parts by mass are blended. The prepared one was used.
The compound of the following formula (11) is 4.15 g of 2-methyl-2-methacryloyloxyadamantane, 3.00 g of methacryloyloxy-γ-butyrolactone, 2.08 g of 3-hydroxy-1-adamantyl methacrylate, azobisisobutyro 0.38 g of nitrile was dissolved in 80 mL of tetrahydrofuran, polymerized for 22 hours under a nitrogen atmosphere while maintaining the reaction temperature at 63 ° C., and then the reaction solution was dropped into 400 mL of n-hexane to give a product resin. Coagulated and purified, and the resulting white powder was filtered and dried overnight at 40 ° C. under reduced pressure.
(式(11)中、40、40、20とあるのは各構成単位の比率を示すものであり、ブロック共重合体を示すものではない。)
(In the formula (11), 40, 40 and 20 indicate the ratio of each structural unit, and do not indicate a block copolymer.)
CR-1を用いること以外は、実施例1~4、比較例1と同様に行い、下層膜形成材料を調製してシリコン基板上に回転塗布し、その後、240℃で60秒間、さらに400℃で120秒間ベークして、膜厚200nmの下層膜を作製した。その後、エッチング耐性を評価した。結果を表1に示す。 (Comparative Example 2)
Except for using CR-1, it was carried out in the same manner as in Examples 1 to 4 and Comparative Example 1, and an underlayer film forming material was prepared and spin-coated on a silicon substrate, and then at 240 ° C. for 60 seconds and further at 400 ° C. Was baked for 120 seconds to prepare a lower layer film having a thickness of 200 nm. Thereafter, etching resistance was evaluated. The results are shown in Table 1.
下層膜の形成を行わないこと以外は、実施例1~4、比較例1と同様に行い、フォトレジスト層をSiO2基板上に直接形成し、ポジ型のレジストパターンを得た。評価結果を表1に示す。 (Comparative Example 3)
Except not forming the lower layer film, it was carried out in the same manner as in Examples 1 to 4 and Comparative Example 1, and a photoresist layer was directly formed on the SiO 2 substrate to obtain a positive resist pattern. The evaluation results are shown in Table 1.
また、実施例1~4では、現像後のレジストパターン形状が良好であり、欠陥も見られないことが確認された。一方、比較例1は、現像後のレジストパターン形状が不良であり、欠陥も多いことが確認された。これは、比較例1で用いたBisN-1が塗布溶媒に対して低溶解性である為と推察される。
さらに、実施例1~4は、下層膜の形成を省略した比較例3に比して、解像性および感度ともに有意に優れていることが確認された。
現像後のレジストパターン形状の相違から、実施例1~4のリソグラフィー用下層膜形成材料は、レジスト材料との密着性が良いことが示された。 As is apparent from Table 1, Example 1 using BisN-1-CH1, which is a compound satisfying the configuration of the present embodiment, Example 2 using BisN-1-CH2, and BisN-1-PH1 were used. In Example 3 and Example 4 using BisN-1-PH2, it was confirmed that the heat resistance, solubility, and etching resistance were all good. On the other hand, in Comparative Example 1 using the polyphenol compound BisN-1, the heat resistance and etching resistance were good, but the solubility was poor. In Comparative Example 2 using CR-1 (phenol-modified dimethylnaphthalene formaldehyde resin (CR-1)), the etching resistance was poor.
In Examples 1 to 4, it was confirmed that the resist pattern shape after development was good and no defects were observed. On the other hand, in Comparative Example 1, it was confirmed that the resist pattern shape after development was poor and there were many defects. This is presumably because BisN-1 used in Comparative Example 1 has low solubility in the coating solvent.
Further, it was confirmed that Examples 1 to 4 were significantly superior in both resolution and sensitivity as compared with Comparative Example 3 in which the formation of the lower layer film was omitted.
From the difference in the resist pattern shape after development, it was shown that the lower layer film forming materials for lithography in Examples 1 to 4 had good adhesion to the resist material.
実施例1において用いたリソグラフィー用下層膜形成材料の溶液を膜厚300nmのSiO2基板上に塗布して、240℃で60秒間、さらに400℃で120秒間ベークすることにより、膜厚80nmの下層膜を形成した。この下層膜上に、珪素含有中間層材料を塗布し、200℃で60秒間ベークすることにより、膜厚35nmの中間層膜を形成した。さらに、この中間層膜上に、前記ArF用レジスト溶液を塗布し、130℃で60秒間ベークすることにより、膜厚150nmのフォトレジスト層を形成した。なお、珪素含有中間層材料としては、特開2007-226170号公報<合成例1>に記載の珪素原子含有ポリマーを用いた。
次いで、電子線描画装置(エリオニクス社製;ELS-7500,50keV)を用いて、フォトレジスト層をマスク露光し、115℃で90秒間ベーク(PEB)し、2.38質量%テトラメチルアンモニウムヒドロキシド(TMAH)水溶液で60秒間現像することにより、55nmL/S(1:1)のポジ型のレジストパターンを得た。
その後、サムコインターナショナル社製 RIE-10NRを用いて、得られたレジストパターンをマスクにして珪素含有中間層膜(SOG)のドライエッチング加工を行い、続いて、得られた珪素含有中間層膜パターンをマスクにした下層膜のドライエッチング加工と、得られた下層膜パターンをマスクにしたSiO2膜のドライエッチング加工とを順次行った。 (Example 5)
The lower layer film forming material for lithography used in Example 1 was applied onto a 300 nm thick SiO 2 substrate and baked at 240 ° C. for 60 seconds and further at 400 ° C. for 120 seconds, thereby forming a lower layer having a thickness of 80 nm. A film was formed. On this lower layer film, a silicon-containing intermediate layer material was applied and baked at 200 ° C. for 60 seconds to form an intermediate layer film having a thickness of 35 nm. Further, the ArF resist solution was applied on this intermediate layer film and baked at 130 ° C. for 60 seconds to form a 150 nm-thick photoresist layer. As the silicon-containing intermediate layer material, a silicon atom-containing polymer described in JP-A-2007-226170 <Synthesis Example 1> was used.
Next, the photoresist layer was subjected to mask exposure using an electron beam lithography apparatus (ELIONX, ELS-7500, 50 keV), baked at 115 ° C. for 90 seconds (PEB), and 2.38 mass% tetramethylammonium hydroxide. By developing with (TMAH) aqueous solution for 60 seconds, a positive resist pattern of 55 nm L / S (1: 1) was obtained.
Thereafter, using RIE-10NR manufactured by Samco International, the silicon-containing intermediate layer film (SOG) was dry-etched using the obtained resist pattern as a mask, and then the obtained silicon-containing intermediate layer film pattern was A dry etching process for the lower layer film using the mask and a dry etching process for the SiO 2 film using the obtained lower layer film pattern as a mask were sequentially performed.
レジストパターンのレジスト中間層膜へのエッチング条件
出力:50W
圧力:20Pa
時間:1min
エッチングガス
Arガス流量:CF4ガス流量:O2ガス流量=50:8:2(sccm)
レジスト中間膜パターンのレジスト下層膜へのエッチング条件
出力:50W
圧力:20Pa
時間:2min
エッチングガス
Arガス流量:CF4ガス流量:O2ガス流量=50:5:5(sccm)
レジスト下層膜パターンのSiO 2 膜へのエッチング条件
出力:50W
圧力:20Pa
時間:2min
エッチングガス
Arガス流量:C5F12ガス流量:C2F6ガス流量:O2ガス流量
=50:4:3:1(sccm) Each etching condition is as shown below.
Etching condition output to resist intermediate layer film of resist pattern : 50W
Pressure: 20Pa
Time: 1 min
Etching gas Ar gas flow rate: CF 4 gas flow rate: O 2 gas flow rate = 50: 8: 2 (sccm)
Output of etching condition to resist underlayer film of resist intermediate film pattern : 50W
Pressure: 20Pa
Time: 2min
Etching gas Ar gas flow rate: CF 4 gas flow rate: O 2 gas flow rate = 50: 5: 5 (sccm)
Etching condition output to SiO 2 film of resist underlayer film pattern : 50W
Pressure: 20Pa
Time: 2min
Etching gas Ar gas flow rate: C 5 F 12 gas flow rate: C 2 F 6 gas flow rate: O 2 gas flow rate = 50: 4: 3: 1 (sccm)
Claims (19)
- 下記式(1)で表される、化合物。
(式(1)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、mは各々独立して、1~6の整数であり、pは各々独立して、0又は1であり、nは1~4の整数である。) The compound represented by following formula (1).
(In the formula (1), each X independently represents an oxygen atom or a sulfur atom, or non-bridged, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms, Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom, or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms, A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group, And at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, m is each independently an integer of 1 to 6, and p is each independently 0 or 1 and n is an integer of 1 to 4.) - 前記式(1)で表される化合物が下記式(1A-2)で表される化合物である、請求項1に記載の化合物。
(式(1A-2)中、R1及びpは前記と同様であり、R6は、前記式(1)で説明したR2と同義であり、m6は、各々独立して1~3の整数である。) The compound according to claim 1, wherein the compound represented by the formula (1) is a compound represented by the following formula (1A-2).
(In the formula (1A-2), R 1 and p are the same as described above, R 6 has the same meaning as R 2 described in the formula (1), and each m 6 independently represents 1 to 3 Is an integer.) - 前記式(1)で表される化合物が下記式(1B-2)で表される化合物である、請求項1に記載の化合物。
(式(1B-2)中、R1及びpは前記と同様であり、R6は、前記式(1)で説明したR2と同義であり、m6は、各々独立して1~3の整数である。) The compound according to claim 1, wherein the compound represented by the formula (1) is a compound represented by the following formula (1B-2).
(In formula (1B-2), R 1 and p are as defined above, R 6 has the same meaning as R 2 described in formula (1), and m 6 is independently 1 to 3 Is an integer.) - 請求項1~5のいずれか1項に記載の化合物をモノマーとして得られる、樹脂。 A resin obtained by using the compound according to any one of claims 1 to 5 as a monomer.
- 請求項1~5のいずれか1項に記載の化合物と架橋反応性のある化合物との反応によって得られる、請求項6に記載の樹脂。 The resin according to claim 6, which is obtained by a reaction between the compound according to any one of claims 1 to 5 and a compound having a crosslinking reactivity.
- 前記架橋反応性のある化合物が、アルデヒド、ケトン、カルボン酸、カルボン酸ハライド、ハロゲン含有化合物、アミノ化合物、イミノ化合物、イソシアネート及び不飽和炭化水素基含有化合物からなる群より選ばれる少なくとも1つである、請求項7に記載の樹脂。 The crosslinking reactive compound is at least one selected from the group consisting of aldehydes, ketones, carboxylic acids, carboxylic acid halides, halogen-containing compounds, amino compounds, imino compounds, isocyanates and unsaturated hydrocarbon group-containing compounds. The resin according to claim 7.
- 下記式(2)で表される構造を含む、請求項6に記載の樹脂。
(式(2)中、Xは各々独立して、酸素原子若しくは硫黄原子、又は無架橋であることを表し、R1は単結合又は炭素数1~30の2n価の基であり、該基は、脂環式炭化水素基、二重結合、ヘテロ原子又は炭素数6~30のアリール基を有していてもよく、R2は、各々独立して、炭素数1~10の直鎖状、分岐状若しくは環状のアルキル基、炭素数6~10のアリール基、炭素数2~10のアルケニル基、炭素数1~30のアルコキシ基、炭素数6~30のアリールオキシ基又は水酸基であり、ここで、R2の少なくとも1つは炭素数1~30のアルコキシ基又は炭素数6~30のアリールオキシ基であり、R3は各々独立して、単結合又は炭素数1~20の直鎖状若しくは分岐状のアルキレン基であり、m2は各々独立して、1~5の整数であり、pは各々独立して0又は1であり、nは1~4の整数である。) The resin according to claim 6, comprising a structure represented by the following formula (2).
(In the formula (2), each X independently represents an oxygen atom, a sulfur atom, or a non-bridged group, and R 1 is a single bond or a 2n-valent group having 1 to 30 carbon atoms. Each may have an alicyclic hydrocarbon group, a double bond, a hetero atom or an aryl group having 6 to 30 carbon atoms, and each R 2 is independently a straight chain having 1 to 10 carbon atoms. A branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, an aryloxy group having 6 to 30 carbon atoms, or a hydroxyl group, Here, at least one of R 2 is an alkoxy group having 1 to 30 carbon atoms or an aryloxy group having 6 to 30 carbon atoms, and each R 3 is independently a single bond or a straight chain having 1 to 20 carbon atoms. a Jo or branched alkylene group, m 2 are each independently 1 to Of integers, p is independently 0 or 1, n is an integer of 1-4.) - 前記式(2)で表される構造を有する樹脂が、下記式(2A)で表される構造を有する樹脂である、請求項9に記載の樹脂。
(式(2A)中、R1、R2、R3、m2、p及びnは、前記と同様である。) The resin according to claim 9, wherein the resin having a structure represented by the formula (2) is a resin having a structure represented by the following formula (2A).
(In formula (2A), R 1 , R 2 , R 3 , m 2 , p and n are the same as described above.) - 前記式(2)で表される構造を有する樹脂が、下記式(2B)で表される構造を有する樹脂である、請求項9に記載の樹脂。
(式(2B)中、R1、R2、R3、m2、p及びnは、前記と同様である。) The resin according to claim 9, wherein the resin having a structure represented by the formula (2) is a resin having a structure represented by the following formula (2B).
(In formula (2B), R 1 , R 2 , R 3 , m 2 , p and n are the same as described above.) - 請求項1~5のいずれか1項に記載の化合物及び/又は請求項6~11のいずれか1項に記載の樹脂を含有する、リソグラフィー用下層膜形成材料。 A material for forming an underlayer film for lithography, comprising the compound according to any one of claims 1 to 5 and / or the resin according to any one of claims 6 to 11.
- 有機溶媒をさらに含有する、請求項12に記載のリソグラフィー用下層膜形成材料。 The material for forming a lower layer film for lithography according to claim 12, further comprising an organic solvent.
- 酸発生剤をさらに含有する、請求項12又は13に記載のリソグラフィー用下層膜形成材料。 The material for forming a lower layer film for lithography according to claim 12 or 13, further comprising an acid generator.
- 架橋剤をさらに含有する、請求項12~14のいずれか1項に記載のリソグラフィー用下層膜形成材料。 The material for forming an underlayer film for lithography according to any one of claims 12 to 14, further comprising a crosslinking agent.
- 請求項12~15のいずれか1項に記載のリソグラフィー用下層膜形成材料から形成される、リソグラフィー用下層膜。 A lithographic lower layer film formed from the lithographic lower layer film forming material according to any one of claims 12 to 15.
- 基板上に、請求項12~15のいずれか1項に記載のリソグラフィー用下層膜形成材料を用いて下層膜を形成する工程(A-1)と、
前記下層膜上に、少なくとも1層のフォトレジスト層を形成する工程(A-2)と、
前記工程(A-2)の後、前記フォトレジスト層の所定の領域に放射線を照射し、現像を行う工程(A-3)と、
を有するレジストパターン形成方法。 A step (A-1) of forming a lower layer film on the substrate using the lower layer film forming material for lithography according to any one of claims 12 to 15;
Forming at least one photoresist layer on the lower layer film (A-2);
After the step (A-2), a step of irradiating a predetermined region of the photoresist layer with radiation and developing (A-3);
A resist pattern forming method comprising: - 基板上に、請求項12~15のいずれか1項に記載のリソグラフィー用下層膜形成材料を用いて下層膜を形成する工程(B-1)と、
前記下層膜上に、珪素原子を含有するレジスト中間層膜材料を用いて中間層膜を形成工程(B-2)と、
前記中間層膜上に、少なくとも1層のフォトレジスト層を形成する工程(B-3)と、
前記工程(B-3)の後、前記フォトレジスト層の所定の領域に放射線を照射し、現像してレジストパターンを形成する工程(B-4)と、
前記工程(B-4)の後、前記レジストパターンをマスクとして前記中間層膜をエッチングし、得られた中間層膜パターンをエッチングマスクとして前記下層膜をエッチングし、得られた下層膜パターンをエッチングマスクとして基板をエッチングすることで基板にパターンを形成する工程(B-5)と、
を有する、回路パターン形成方法。 A step (B-1) of forming a lower layer film on the substrate using the lower layer film forming material for lithography according to any one of claims 12 to 15;
Forming an intermediate layer film on the lower layer film using a resist intermediate layer film material containing silicon atoms (B-2);
Forming at least one photoresist layer on the intermediate film (B-3);
After the step (B-3), a step (B-4) of irradiating a predetermined region of the photoresist layer with radiation and developing to form a resist pattern;
After the step (B-4), the intermediate layer film is etched using the resist pattern as a mask, the lower layer film is etched using the obtained intermediate layer film pattern as an etching mask, and the obtained lower layer film pattern is etched. Forming a pattern on the substrate by etching the substrate as a mask (B-5);
A circuit pattern forming method. - 水と任意に混和しない有機溶媒、及び請求項1~5のいずれか1項に記載の化合物又は請求項6~11のいずれか1項に記載の樹脂を含有する溶液(A)と、酸性の水溶液と、を接触させて抽出する工程を含む、精製方法。 An organic solvent which is not optionally miscible with water, and a solution (A) containing the compound according to any one of claims 1 to 5 or the resin according to any one of claims 6 to 11; A purification method comprising the step of extracting by contacting with an aqueous solution.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020177017342A KR20170099908A (en) | 2014-12-25 | 2015-12-14 | Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method |
JP2016566122A JP7026439B2 (en) | 2014-12-25 | 2015-12-14 | Compounds, resins, lithographic underlayer film forming materials, lithographic underlayer film, pattern forming method and purification method |
CN201580070416.3A CN107108549A (en) | 2014-12-25 | 2015-12-14 | Compound, resin, photoetching substrate film formation material, photoetching basilar memebrane, pattern formation method and purification process |
EP15872783.4A EP3239141A4 (en) | 2014-12-25 | 2015-12-14 | Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method |
SG11201705038XA SG11201705038XA (en) | 2014-12-25 | 2015-12-14 | Compound, resin, material for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and purification method |
US15/539,560 US10745372B2 (en) | 2014-12-25 | 2015-12-14 | Compound, resin, material for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and purification method |
IL253109A IL253109A0 (en) | 2014-12-25 | 2017-06-22 | Compound, resin, material for forming underlayer film for lithography, underlayer film for lithography, pattern forming method, and purification method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-262564 | 2014-12-25 | ||
JP2014262564 | 2014-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016104214A1 true WO2016104214A1 (en) | 2016-06-30 |
Family
ID=56150243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/084907 WO2016104214A1 (en) | 2014-12-25 | 2015-12-14 | Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method |
Country Status (9)
Country | Link |
---|---|
US (1) | US10745372B2 (en) |
EP (1) | EP3239141A4 (en) |
JP (1) | JP7026439B2 (en) |
KR (1) | KR20170099908A (en) |
CN (1) | CN107108549A (en) |
IL (1) | IL253109A0 (en) |
SG (1) | SG11201705038XA (en) |
TW (1) | TW201629031A (en) |
WO (1) | WO2016104214A1 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017014191A1 (en) * | 2015-07-22 | 2017-01-26 | 三菱瓦斯化学株式会社 | Compound, resin, underlayer film forming material for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method |
WO2018101463A1 (en) * | 2016-12-02 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, pattern formation method, and purification method |
WO2018099848A1 (en) * | 2016-11-30 | 2018-06-07 | Az Electronic Materials (Luxembourg) S.A.R.L. | Planarising coating-forming composition and methods for manufacturing planarizing coating and device using the same |
WO2018101376A1 (en) * | 2016-11-30 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern formation method, and circuit pattern formation method |
WO2018101377A1 (en) * | 2016-11-30 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method, and circuit pattern forming method |
JPWO2018016648A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
JPWO2018016614A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
JPWO2018016634A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin and composition, and resist pattern forming method and circuit pattern forming method |
KR20190078305A (en) * | 2017-12-26 | 2019-07-04 | 삼성에스디아이 주식회사 | Resist underlayer composition, and method of forming patterns using the composition |
US20210003921A1 (en) * | 2018-02-28 | 2021-01-07 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, composition, and film forming material for lithography using the same |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102159234B1 (en) | 2013-02-08 | 2020-09-23 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition, resist pattern formation method, and polyphenol derivative used in same |
JP6573217B2 (en) | 2014-03-13 | 2019-09-11 | 三菱瓦斯化学株式会社 | Compound, resin, lower layer film forming material for lithography, lower layer film for lithography, pattern forming method, and method for purifying compound or resin |
KR102326848B1 (en) | 2014-03-13 | 2021-11-17 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition and method for forming resist pattern |
KR20170099908A (en) | 2014-12-25 | 2017-09-01 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method |
US10747112B2 (en) * | 2015-03-30 | 2020-08-18 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, and purification method thereof, material for forming underlayer film for lithography, composition for forming underlayer film, and underlayer film, as well as resist pattern forming method and circuit pattern forming method |
WO2016158458A1 (en) | 2015-03-30 | 2016-10-06 | 三菱瓦斯化学株式会社 | Resist base material, resist composition, and method for forming resist pattern |
KR102548109B1 (en) * | 2015-03-31 | 2023-06-27 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Compound, resist composition and resist pattern formation method using the same |
KR102562846B1 (en) * | 2015-03-31 | 2023-08-02 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition, resist pattern formation method, and polyphenol compound used therein |
US11143962B2 (en) * | 2015-08-31 | 2021-10-12 | Mitsubishi Gas Chemical Company, Inc. | Material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and production method thereof, pattern forming method, resin, and purification method |
JP7020912B2 (en) * | 2015-08-31 | 2022-02-16 | 三菱瓦斯化学株式会社 | Underlayer film forming material for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and its manufacturing method, and resist pattern forming method. |
US11243467B2 (en) | 2015-09-10 | 2022-02-08 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, resist composition or radiation-sensitive composition, resist pattern formation method, method for producing amorphous film, underlayer film forming material for lithography, composition for underlayer film formation for lithography, method for forming circuit pattern, and purification method |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006259482A (en) * | 2005-03-18 | 2006-09-28 | Shin Etsu Chem Co Ltd | Material for forming lower layer film of photoresist and pattern forming method |
JP2008201954A (en) * | 2007-02-21 | 2008-09-04 | Jsr Corp | Naphthol novolak and method for producing its derivative |
JP2010160189A (en) * | 2009-01-06 | 2010-07-22 | Shin-Etsu Chemical Co Ltd | Method for forming resist underlayer film and patterning process using the same |
JP2013083833A (en) * | 2011-10-11 | 2013-05-09 | Shin Etsu Chem Co Ltd | Material for forming resist underlay film and method for forming pattern |
JP2013087173A (en) * | 2011-10-17 | 2013-05-13 | Mitsubishi Gas Chemical Co Inc | Novel epoxy compound and method for producing the same |
JP2013137524A (en) * | 2011-11-30 | 2013-07-11 | Fujifilm Corp | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device |
JP2013253161A (en) * | 2012-06-06 | 2013-12-19 | Denki Kagaku Kogyo Kk | Adhesive composition for optical component |
JP2014196288A (en) * | 2013-03-04 | 2014-10-16 | 国立大学法人東京工業大学 | Dinaphthothiophene compound, and polymer comprising dinaphthothiophene skeleton and production method thereof |
US20140363957A1 (en) * | 2013-06-11 | 2014-12-11 | Shin-Etsu Chemical Co., Ltd. | Underlayer film-forming composition and pattern forming process |
US20140363958A1 (en) * | 2013-06-11 | 2014-12-11 | Shin-Etsu Chemical Co., Ltd. | Underlayer film-forming composition and pattern forming process |
WO2014199660A1 (en) * | 2013-06-14 | 2014-12-18 | Dic株式会社 | Epoxy compound, epoxy resin, curable compound, cured product thereof, semiconductor sealing material, and printed circuit board |
Family Cites Families (131)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2100798A (en) | 1933-05-02 | 1937-11-30 | Ig Farbenindustrie Ag | Condensation products of carbenium compounds and process of preparing the same |
US2587437A (en) | 1947-03-19 | 1952-02-26 | Goodrich Co B F | Di (alkenyl carbonate) esters of alkylidene bis-phenols |
US2546872A (en) | 1947-10-10 | 1951-03-27 | Ciba Ltd | Hydroxy-compounds of the benzoxanthene series and process of making same |
JPS5017887B2 (en) | 1971-10-20 | 1975-06-25 | ||
US3947468A (en) | 1971-05-26 | 1976-03-30 | General Electric Company | Production of dibenzopyrans, their isomeric fluorenols and dibenzothiopyrans |
CA1119873A (en) | 1976-10-22 | 1982-03-16 | Scott Paper Company | Diazo composition containing an azo coupling component precursor, a light sensitive acid progenitor and a carboxylic anhydride |
US4252884A (en) | 1979-08-14 | 1981-02-24 | James River Graphics, Inc. | Negative-working diazotype photoreproduction |
US4482489A (en) | 1980-11-18 | 1984-11-13 | James River Graphics, Inc. | Light-sensitive diazonium trifluoromethane sulfonates |
US4579758A (en) | 1981-01-16 | 1986-04-01 | The B. F. Goodrich Company | Internally coated reaction vessel for use in olefinic polymerization |
JPS6294841A (en) * | 1985-10-21 | 1987-05-01 | Hodogaya Chem Co Ltd | Image forming composition |
JPS62191850A (en) | 1986-02-17 | 1987-08-22 | Nec Corp | Positive resist material |
JPH01283280A (en) | 1988-05-06 | 1989-11-14 | Asahi Denka Kogyo Kk | Novel epoxy compound and production thereof |
JP3137202B2 (en) | 1990-10-30 | 2001-02-19 | 大日本インキ化学工業株式会社 | Epoxy resin, method for producing the same, and epoxy resin composition |
JP2919142B2 (en) | 1990-12-27 | 1999-07-12 | 株式会社東芝 | Photosensitive composition and pattern forming method using the same |
JPH0534913A (en) | 1991-08-01 | 1993-02-12 | Fuji Photo Film Co Ltd | Positive type photoresist composition |
JPH05163290A (en) | 1991-12-17 | 1993-06-29 | Kikkoman Corp | N-acetyl-beta-d-glucosamine derivative, reagent for determining n-acetyl-beta-d-glucosaminidase activity with the same as active ingredient and determination of the activity using the reagent |
JP2838335B2 (en) * | 1992-02-03 | 1998-12-16 | 富士写真フイルム株式会社 | Photosensitive composition |
JPH0649402A (en) | 1992-08-04 | 1994-02-22 | Nippon Kayaku Co Ltd | Solder resist ink composition and its cured product |
JPH06242607A (en) | 1993-02-18 | 1994-09-02 | Mitsubishi Electric Corp | Positive type resist composition and pattern forming method using the same |
JP3498857B2 (en) | 1994-01-28 | 2004-02-23 | 株式会社ノエビア | External preparation for skin |
US6020481A (en) | 1996-04-01 | 2000-02-01 | The Perkin-Elmer Corporation | Asymmetric benzoxanthene dyes |
IT1298693B1 (en) | 1996-04-24 | 2000-01-12 | Hoffmann La Roche | 4'-METHYL SUBSTITUTED FLUORESCEIN DERIVATIVES |
JP3582936B2 (en) | 1996-07-10 | 2004-10-27 | 株式会社ノエビア | External preparation for skin |
JPH1172925A (en) | 1997-07-03 | 1999-03-16 | Toshiba Corp | Undercoat layer composition and pattern forming method using the same |
JP3746067B2 (en) | 1997-12-24 | 2006-02-15 | 三菱電機株式会社 | Speech decoding method and speech decoding apparatus |
JP2001042525A (en) | 1999-07-30 | 2001-02-16 | Dainippon Ink & Chem Inc | Alkali developable photosensitive resin composition |
WO2002014438A1 (en) | 2000-08-14 | 2002-02-21 | Silverbrook Research Pty Ltd | Infrared chromophores |
JP2002214769A (en) | 2001-01-18 | 2002-07-31 | Fuji Photo Film Co Ltd | Radiation sensitive positive type resist composition |
US6844273B2 (en) | 2001-02-07 | 2005-01-18 | Tokyo Electron Limited | Precleaning method of precleaning a silicon nitride film forming system |
JP3774668B2 (en) | 2001-02-07 | 2006-05-17 | 東京エレクトロン株式会社 | Cleaning pretreatment method for silicon nitride film forming apparatus |
JP2002334896A (en) | 2001-05-07 | 2002-11-22 | Nagase & Co Ltd | Method for forming bump electrode |
JP2002341542A (en) | 2001-05-18 | 2002-11-27 | Hitachi Chem Co Ltd | Positive photosensitive resin composition, method for manufacturing pattern and electronic parts |
JP4247658B2 (en) | 2001-07-12 | 2009-04-02 | Dic株式会社 | Novel epoxy resin, epoxy resin composition and cured product thereof |
US6784228B2 (en) | 2001-07-12 | 2004-08-31 | Dainippon Ink And Chemicals, Inc. | Epoxy resin composition, cured article thereof, novel epoxy resin, novel phenol compound, and process for preparing the same |
WO2003017002A1 (en) | 2001-08-20 | 2003-02-27 | Nissan Chemical Industries, Ltd. | Composition for forming antireflective film for use in lithography |
EP1300403A1 (en) | 2001-10-02 | 2003-04-09 | Aventis Pharma S.A. | Process for the manufacture of hypoxyxylerone derivatives |
CN1309783C (en) | 2001-10-24 | 2007-04-11 | 大日本油墨化学工业株式会社 | Epoxy resin compositing, its solidification product, new-type epoxy resin, phenol compound, and its preparation method |
US6794408B2 (en) * | 2002-01-29 | 2004-09-21 | Aventis Pharma Deutschland Gmbh | Drechsleranol derivatives, processes for their preparation and their use |
US7238462B2 (en) | 2002-11-27 | 2007-07-03 | Tokyo Ohka Kogyo Co., Ltd. | Undercoating material for wiring, embedded material, and wiring formation method |
JP3914493B2 (en) | 2002-11-27 | 2007-05-16 | 東京応化工業株式会社 | Underlayer film forming material for multilayer resist process and wiring forming method using the same |
JP4382750B2 (en) | 2003-01-24 | 2009-12-16 | 東京エレクトロン株式会社 | CVD method for forming a silicon nitride film on a substrate to be processed |
JP3981030B2 (en) | 2003-03-07 | 2007-09-26 | 信越化学工業株式会社 | Resist underlayer film material and pattern forming method |
KR20060071423A (en) * | 2003-09-18 | 2006-06-26 | 미츠비시 가스 가가쿠 가부시키가이샤 | Compound for resist and radiation-sensitive composition |
JP4614056B2 (en) | 2003-09-18 | 2011-01-19 | 三菱瓦斯化学株式会社 | Resist compound and radiation-sensitive composition |
CN1853141A (en) * | 2003-09-18 | 2006-10-25 | 三菱瓦斯化学株式会社 | Compound for resist and radiation-sensitive composition |
JP4388429B2 (en) | 2004-02-04 | 2009-12-24 | 信越化学工業株式会社 | Resist underlayer film material and pattern forming method |
JP4249096B2 (en) | 2004-02-20 | 2009-04-02 | 東京応化工業株式会社 | Substrate for pattern forming material, positive resist composition, and resist pattern forming method |
KR101145088B1 (en) | 2004-04-15 | 2012-05-11 | 미츠비시 가스 가가쿠 가부시키가이샤 | Resist composition |
KR101168249B1 (en) | 2004-05-14 | 2012-07-30 | 닛산 가가쿠 고교 가부시키 가이샤 | Antireflective film-forming composition containing vinyl ether compound |
JP4966484B2 (en) | 2004-07-22 | 2012-07-04 | 大阪瓦斯株式会社 | Fluorene compound and method for producing the same |
JP2006098869A (en) | 2004-09-30 | 2006-04-13 | Sumitomo Bakelite Co Ltd | Photoresist composition |
JP2006113136A (en) | 2004-10-12 | 2006-04-27 | Sumitomo Bakelite Co Ltd | Novolac type phenolic resin composition for photoresist |
JP2006160663A (en) | 2004-12-07 | 2006-06-22 | Honshu Chem Ind Co Ltd | Method for producing 1,1'-bis(2-hydroxynaphthyl) |
TWI494697B (en) | 2004-12-24 | 2015-08-01 | Mitsubishi Gas Chemical Co | Resist compound |
JP4678195B2 (en) | 2005-02-03 | 2011-04-27 | 三菱瓦斯化学株式会社 | Phenanthrenequinone derivative and method for producing the same |
WO2006132139A1 (en) * | 2005-06-06 | 2006-12-14 | Mitsubishi Gas Chemical Company, Inc. | Compound for resist and resist composition |
JP2007019294A (en) | 2005-07-08 | 2007-01-25 | Konica Minolta Holdings Inc | Organic semiconductor material, organic semiconductor film, organic semiconductor element, and organic thin film transistor |
JP4659678B2 (en) * | 2005-12-27 | 2011-03-30 | 信越化学工業株式会社 | Photoresist underlayer film forming material and pattern forming method |
US7585613B2 (en) | 2006-01-25 | 2009-09-08 | Shin-Etsu Chemical Co., Ltd. | Antireflection film composition, substrate, and patterning process |
JP4781280B2 (en) | 2006-01-25 | 2011-09-28 | 信越化学工業株式会社 | Antireflection film material, substrate, and pattern forming method |
WO2007086415A1 (en) | 2006-01-25 | 2007-08-02 | Hitachi Chemical Co., Ltd. | Phenol resin and resin compositions |
JP4638380B2 (en) | 2006-01-27 | 2011-02-23 | 信越化学工業株式会社 | Antireflection film material, substrate having antireflection film, and pattern forming method |
JP2009098155A (en) | 2006-02-08 | 2009-05-07 | Mitsubishi Gas Chem Co Inc | Radiation-sensitive composition |
TW200741353A (en) * | 2006-02-27 | 2007-11-01 | Mitsubishi Gas Chemical Co | Compound for forming antireflective film and antireflective film |
JP2007262398A (en) | 2006-03-01 | 2007-10-11 | Hitachi Chem Co Ltd | Epoxy resin composition and electronic part device |
JP2007326847A (en) | 2006-03-31 | 2007-12-20 | Honshu Chem Ind Co Ltd | New polynuclear polyphenol compound |
JP4662063B2 (en) * | 2006-05-25 | 2011-03-30 | 信越化学工業株式会社 | Photoresist underlayer film forming material and pattern forming method |
EP2067782B2 (en) | 2006-08-28 | 2018-06-27 | Tosoh Corporation | Heteroacene derivative, tetrahaloterphenyl derivative, and their production methods |
JP4910168B2 (en) | 2006-09-07 | 2012-04-04 | Jsr株式会社 | Resist underlayer film forming composition and pattern forming method |
WO2008053974A1 (en) | 2006-11-02 | 2008-05-08 | Mitsubishi Gas Chemical Company, Inc. | Radiation-sensitive composition |
JP4858136B2 (en) | 2006-12-06 | 2012-01-18 | 三菱瓦斯化学株式会社 | Radiation-sensitive resist composition |
JP5092492B2 (en) | 2007-03-28 | 2012-12-05 | Dic株式会社 | Thermosetting polyimide resin composition |
JP5446118B2 (en) | 2007-04-23 | 2014-03-19 | 三菱瓦斯化学株式会社 | Radiation sensitive composition |
PA8779101A1 (en) | 2007-05-04 | 2008-12-18 | Wyeth Corp | "TRICYCLIC COMPOUNDS AS INHIBITORS OF MARRIAGE METALOPROTEINASES" |
US20100190107A1 (en) | 2007-06-15 | 2010-07-29 | Idemitsu Kosan Co. Ltd | Cyclic compound, photoresist base material and photoresist composition |
JP2009073738A (en) | 2007-09-18 | 2009-04-09 | Idemitsu Kosan Co Ltd | Polycarboxylate compound, photoresist substrate and photoresist composition |
WO2009048164A1 (en) | 2007-10-10 | 2009-04-16 | Sumitomo Chemical Company, Limited | Polymer compound and polymer light-emitting device using the same |
KR20090049862A (en) | 2007-11-14 | 2009-05-19 | 주식회사 동진쎄미켐 | Photosensitive compound and photoresist composition including the same |
EP2219076B1 (en) | 2007-12-07 | 2013-11-20 | Mitsubishi Gas Chemical Company, Inc. | Composition for forming base film for lithography and method for forming multilayer resist pattern |
JP5249578B2 (en) | 2007-12-26 | 2013-07-31 | 大阪瓦斯株式会社 | Epoxy compound having fluorene skeleton |
WO2009119201A1 (en) | 2008-03-28 | 2009-10-01 | Jsr株式会社 | Resist underlayer film, composition for resist underlayer film formation, and method for resist underlayer film formation |
CN102046726B (en) | 2008-05-27 | 2013-12-25 | 松下电器产业株式会社 | Epoxy resin composition for printed wiring board, solder resist composition, resin film, resin sheet, prepreg, metal foil with resin, cover lay, and flexible printed wiring board |
JP4990844B2 (en) | 2008-06-17 | 2012-08-01 | 信越化学工業株式会社 | Pattern forming method and resist material used therefor |
US20110274713A1 (en) | 2008-08-05 | 2011-11-10 | The University Of Queensland | Antigen-presenting scaffolds |
JP5336306B2 (en) | 2008-10-20 | 2013-11-06 | 信越化学工業株式会社 | Resist underlayer film forming method, pattern forming method using the same, and resist underlayer film material |
TWI400575B (en) | 2008-10-28 | 2013-07-01 | Shinetsu Chemical Co | Photoresist undercoat-forming material and patterning process |
US20100136477A1 (en) | 2008-12-01 | 2010-06-03 | Ng Edward W | Photosensitive Composition |
JP5118073B2 (en) | 2009-01-26 | 2013-01-16 | 信越化学工業株式会社 | Resist underlayer film forming method and pattern forming method using the same |
JP2010219295A (en) | 2009-03-17 | 2010-09-30 | Mitsui Chemicals Inc | Organic transistor |
JP5262915B2 (en) | 2009-03-30 | 2013-08-14 | Dic株式会社 | Curable resin composition, cured product thereof, printed wiring board, ester compound, ester resin, and production method thereof |
JP5038354B2 (en) | 2009-05-11 | 2012-10-03 | 信越化学工業株式会社 | Silicon-containing antireflection film-forming composition, silicon-containing antireflection film-forming substrate, and pattern formation method |
KR101741285B1 (en) | 2009-09-15 | 2017-06-15 | 미츠비시 가스 가가쿠 가부시키가이샤 | Aromatic hydrocarbon resin and composition for forming underlayer film for lithography |
JP5513825B2 (en) | 2009-09-28 | 2014-06-04 | 大阪ガスケミカル株式会社 | Method for producing alcohol having fluorene skeleton |
JP5466927B2 (en) | 2009-11-19 | 2014-04-09 | 大阪瓦斯株式会社 | Fluorene polyester oligomer and method for producing the same |
JP5068828B2 (en) | 2010-01-19 | 2012-11-07 | 信越化学工業株式会社 | Resist underlayer film forming composition, resist underlayer film forming method, and pattern forming method |
EP2578562A4 (en) | 2010-05-26 | 2015-12-02 | Mitsubishi Gas Chemical Co | Cyclic compound purification method |
JP5229278B2 (en) | 2010-06-21 | 2013-07-03 | 信越化学工業株式会社 | Naphthalene derivative, resist underlayer film material, resist underlayer film forming method and pattern forming method |
JP5556773B2 (en) | 2010-09-10 | 2014-07-23 | 信越化学工業株式会社 | Naphthalene derivative and method for producing the same, resist underlayer film material, resist underlayer film forming method and pattern forming method |
JP2012083731A (en) | 2010-09-13 | 2012-04-26 | Idemitsu Kosan Co Ltd | Radiation-sensitive composition and photoresist composition |
JP5485188B2 (en) | 2011-01-14 | 2014-05-07 | 信越化学工業株式会社 | Resist underlayer film material and pattern forming method using the same |
CN102070595A (en) | 2011-01-20 | 2011-05-25 | 中国人民解放军第二军医大学 | Substituted benzoxanthone type compound and application thereof |
JP5776580B2 (en) | 2011-02-25 | 2015-09-09 | 信越化学工業株式会社 | Positive resist material and pattern forming method using the same |
US8742403B2 (en) | 2011-03-08 | 2014-06-03 | Samsung Electronics Co., Ltd. | Xanthene based semiconductor compositions |
KR101869929B1 (en) | 2011-06-03 | 2018-06-21 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Phenolic resin and material for forming underlayer film for lithography |
EP2755939A4 (en) | 2011-07-14 | 2015-04-15 | Keith R Latham | Halogenated phenols for diagnostics, antioxidant protection and drug delivery |
CN103733136B (en) | 2011-08-12 | 2017-06-23 | 三菱瓦斯化学株式会社 | Lower layer film for lithography forms material, lower layer film for lithography and pattern formation method |
KR101986542B1 (en) | 2011-08-12 | 2019-06-07 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Cyclic compound, method for producing same, composition, and method for forming resist pattern |
EP3051350B1 (en) | 2011-08-12 | 2018-10-24 | Mitsubishi Gas Chemical Company, Inc. | Alcoholic compound and method for producing alcoholic compound |
JP5698184B2 (en) | 2011-09-02 | 2015-04-08 | 信越化学工業株式会社 | Positive resist material and pattern forming method |
KR101873018B1 (en) | 2011-11-02 | 2018-07-03 | 주식회사 동진쎄미켐 | Phenolic monomer, polymer for preparing resist under-layer comprising the same, and resist under-layer composition including the same |
WO2013134997A1 (en) | 2012-03-16 | 2013-09-19 | 中国科学院化学研究所 | Molecular glass photoresist with bisphenol a skeleton structure and preparation method and application thereof |
CA2875964C (en) | 2012-06-07 | 2018-01-02 | Georgia State University Research Foundation, Inc. | Seca inhibitors and methods of making and using thereof |
JP5940496B2 (en) * | 2012-09-26 | 2016-06-29 | 富士フイルム株式会社 | Semi-cured product, cured product and production method thereof, optical component, cured resin composition and compound |
CN103804196B (en) | 2012-11-06 | 2016-08-31 | 中国科学院理化技术研究所 | Star adamantane derivative molecular glass and preparation method thereof, application |
JP6388126B2 (en) | 2013-02-08 | 2018-09-12 | 三菱瓦斯化学株式会社 | COMPOUND, LITHOGRAPHIC LOWER FILM FORMING MATERIAL, LITHOGRAPHY LOWER FILM AND PATTERN FORMING METHOD |
EP2955175B1 (en) | 2013-02-08 | 2018-04-04 | Mitsubishi Gas Chemical Company, Inc. | Use of 9-[1,1'-biphenyl]-4-yl-9h-xanthene-2,7-diol and similar compounds for forming resins for use in underlayer films for lithography and in pattern forming methods |
KR102159234B1 (en) | 2013-02-08 | 2020-09-23 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition, resist pattern formation method, and polyphenol derivative used in same |
JP6183790B2 (en) | 2013-02-08 | 2017-08-23 | 三菱瓦斯化学株式会社 | Novel allyl compound and production method thereof |
JP2014205746A (en) | 2013-04-11 | 2014-10-30 | Jsr株式会社 | Colored composition, colored cured film and display element |
JP6119667B2 (en) | 2013-06-11 | 2017-04-26 | 信越化学工業株式会社 | Underlayer film material and pattern forming method |
CN104557552B (en) | 2013-10-22 | 2016-08-31 | 中国科学院理化技术研究所 | A kind of star tetraphenylethylene derivative molecular glass, positive photoresist, positive-tone photo gel coating and application thereof |
JP2015087115A (en) | 2013-10-28 | 2015-05-07 | 日立Geニュークリア・エナジー株式会社 | Neutron count analyzer and radiation measuring device |
KR102326848B1 (en) | 2014-03-13 | 2021-11-17 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition and method for forming resist pattern |
US20150309403A1 (en) * | 2014-04-29 | 2015-10-29 | Az Electronic Materials (Luxembourg) S.A.R.L. | Antireflective coating compositions and processes thereof |
US9274426B2 (en) * | 2014-04-29 | 2016-03-01 | Az Electronic Materials (Luxembourg) S.A.R.L. | Antireflective coating compositions and processes thereof |
KR20170099908A (en) | 2014-12-25 | 2017-09-01 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Compound, resin, underlayer film forming material for lithography, underlayer film for lithography, pattern forming method and purification method |
KR102548109B1 (en) | 2015-03-31 | 2023-06-27 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Compound, resist composition and resist pattern formation method using the same |
KR102562846B1 (en) | 2015-03-31 | 2023-08-02 | 미쯔비시 가스 케미칼 컴파니, 인코포레이티드 | Resist composition, resist pattern formation method, and polyphenol compound used therein |
EP3327005A4 (en) * | 2015-07-22 | 2019-09-25 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, underlayer film forming material for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method |
JP7020912B2 (en) * | 2015-08-31 | 2022-02-16 | 三菱瓦斯化学株式会社 | Underlayer film forming material for lithography, composition for forming underlayer film for lithography, underlayer film for lithography and its manufacturing method, and resist pattern forming method. |
JP2020121687A (en) | 2019-01-31 | 2020-08-13 | 横浜ゴム株式会社 | Pneumatic tire |
-
2015
- 2015-12-14 KR KR1020177017342A patent/KR20170099908A/en not_active Application Discontinuation
- 2015-12-14 WO PCT/JP2015/084907 patent/WO2016104214A1/en active Application Filing
- 2015-12-14 EP EP15872783.4A patent/EP3239141A4/en not_active Withdrawn
- 2015-12-14 US US15/539,560 patent/US10745372B2/en active Active
- 2015-12-14 CN CN201580070416.3A patent/CN107108549A/en active Pending
- 2015-12-14 JP JP2016566122A patent/JP7026439B2/en active Active
- 2015-12-14 SG SG11201705038XA patent/SG11201705038XA/en unknown
- 2015-12-24 TW TW104143626A patent/TW201629031A/en unknown
-
2017
- 2017-06-22 IL IL253109A patent/IL253109A0/en unknown
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006259482A (en) * | 2005-03-18 | 2006-09-28 | Shin Etsu Chem Co Ltd | Material for forming lower layer film of photoresist and pattern forming method |
JP2008201954A (en) * | 2007-02-21 | 2008-09-04 | Jsr Corp | Naphthol novolak and method for producing its derivative |
JP2010160189A (en) * | 2009-01-06 | 2010-07-22 | Shin-Etsu Chemical Co Ltd | Method for forming resist underlayer film and patterning process using the same |
JP2013083833A (en) * | 2011-10-11 | 2013-05-09 | Shin Etsu Chem Co Ltd | Material for forming resist underlay film and method for forming pattern |
JP2013087173A (en) * | 2011-10-17 | 2013-05-13 | Mitsubishi Gas Chemical Co Inc | Novel epoxy compound and method for producing the same |
JP2013137524A (en) * | 2011-11-30 | 2013-07-11 | Fujifilm Corp | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device |
JP2013253161A (en) * | 2012-06-06 | 2013-12-19 | Denki Kagaku Kogyo Kk | Adhesive composition for optical component |
JP2014196288A (en) * | 2013-03-04 | 2014-10-16 | 国立大学法人東京工業大学 | Dinaphthothiophene compound, and polymer comprising dinaphthothiophene skeleton and production method thereof |
US20140363957A1 (en) * | 2013-06-11 | 2014-12-11 | Shin-Etsu Chemical Co., Ltd. | Underlayer film-forming composition and pattern forming process |
US20140363958A1 (en) * | 2013-06-11 | 2014-12-11 | Shin-Etsu Chemical Co., Ltd. | Underlayer film-forming composition and pattern forming process |
WO2014199660A1 (en) * | 2013-06-14 | 2014-12-18 | Dic株式会社 | Epoxy compound, epoxy resin, curable compound, cured product thereof, semiconductor sealing material, and printed circuit board |
Non-Patent Citations (4)
Title |
---|
BENTLEY, K.W. ET AL.: "A Synthesis of alpha- Anhydrotrimethylbrazilone", TETRAHEDRON LETTERS, vol. 1, no. Issue 2, 1959, pages 11 - 14, XP055459128 * |
CHATTERJEA, J. N.: "Experiments on the syntheses of furano compounds. part XII. further transformations of isocoumaranone", JOURNAL OF THE INDIAN CHEMICAL SOCIETY, vol. 34, no. Issue 4, 1957, pages 299 - 305, XP009504132 * |
DANN, VON OTTO ET AL.: "Synthesis von (±) - Brasilin", JUSTUS LIEBIGS ANNALEN DER CHEMIE, vol. 667, no. Issue 1, 1963, pages 116 - 125, XP055459130 * |
See also references of EP3239141A4 * |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10364314B2 (en) | 2015-07-22 | 2019-07-30 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method |
WO2017014191A1 (en) * | 2015-07-22 | 2017-01-26 | 三菱瓦斯化学株式会社 | Compound, resin, underlayer film forming material for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method |
JP7069530B2 (en) | 2016-07-21 | 2022-05-18 | 三菱瓦斯化学株式会社 | Compounds, resins, compositions and pattern forming methods |
JP7194356B2 (en) | 2016-07-21 | 2022-12-22 | 三菱瓦斯化学株式会社 | Compound, resin and composition, resist pattern forming method and circuit pattern forming method |
JPWO2018016648A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
JPWO2018016614A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
JPWO2018016634A1 (en) * | 2016-07-21 | 2019-05-09 | 三菱瓦斯化学株式会社 | Compound, resin and composition, and resist pattern forming method and circuit pattern forming method |
JP7194355B2 (en) | 2016-07-21 | 2022-12-22 | 三菱瓦斯化学株式会社 | Compound, resin, composition and pattern forming method |
WO2018101377A1 (en) * | 2016-11-30 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method, and circuit pattern forming method |
JP7205716B2 (en) | 2016-11-30 | 2023-01-17 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method and circuit pattern forming method |
WO2018099848A1 (en) * | 2016-11-30 | 2018-06-07 | Az Electronic Materials (Luxembourg) S.A.R.L. | Planarising coating-forming composition and methods for manufacturing planarizing coating and device using the same |
JPWO2018101376A1 (en) * | 2016-11-30 | 2019-10-24 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method, and circuit pattern forming method |
WO2018101376A1 (en) * | 2016-11-30 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern formation method, and circuit pattern formation method |
JPWO2018101377A1 (en) * | 2016-11-30 | 2019-10-24 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method, and circuit pattern forming method |
JP7205715B2 (en) | 2016-11-30 | 2023-01-17 | 三菱瓦斯化学株式会社 | Compound, resin, composition, resist pattern forming method and circuit pattern forming method |
JPWO2018101463A1 (en) * | 2016-12-02 | 2019-10-24 | 三菱瓦斯化学株式会社 | Compound, resin, composition, pattern formation method and purification method |
JP7090843B2 (en) | 2016-12-02 | 2022-06-27 | 三菱瓦斯化学株式会社 | Compounds, resins, compositions, pattern forming methods and purification methods |
WO2018101463A1 (en) * | 2016-12-02 | 2018-06-07 | 三菱瓦斯化学株式会社 | Compound, resin, composition, pattern formation method, and purification method |
KR102215332B1 (en) | 2017-12-26 | 2021-02-10 | 삼성에스디아이 주식회사 | Resist underlayer composition, and method of forming patterns using the composition |
KR20190078305A (en) * | 2017-12-26 | 2019-07-04 | 삼성에스디아이 주식회사 | Resist underlayer composition, and method of forming patterns using the composition |
US20210003921A1 (en) * | 2018-02-28 | 2021-01-07 | Mitsubishi Gas Chemical Company, Inc. | Compound, resin, composition, and film forming material for lithography using the same |
Also Published As
Publication number | Publication date |
---|---|
JP7026439B2 (en) | 2022-02-28 |
EP3239141A1 (en) | 2017-11-01 |
SG11201705038XA (en) | 2017-07-28 |
US10745372B2 (en) | 2020-08-18 |
IL253109A0 (en) | 2017-08-31 |
CN107108549A (en) | 2017-08-29 |
JPWO2016104214A1 (en) | 2017-10-05 |
EP3239141A4 (en) | 2018-08-15 |
TW201629031A (en) | 2016-08-16 |
US20170349564A1 (en) | 2017-12-07 |
KR20170099908A (en) | 2017-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6573217B2 (en) | Compound, resin, lower layer film forming material for lithography, lower layer film for lithography, pattern forming method, and method for purifying compound or resin | |
JP5979384B2 (en) | Lower layer film forming material for lithography, lower layer film for lithography and pattern forming method | |
JP7026439B2 (en) | Compounds, resins, lithographic underlayer film forming materials, lithographic underlayer film, pattern forming method and purification method | |
JP6064904B2 (en) | Phenol-based resin and lower film forming material for lithography | |
JP6670453B2 (en) | Compound, resin, material for forming lower layer film for lithography, composition for forming lower layer film for lithography, lower layer film for lithography, method for forming resist pattern, method for forming circuit pattern, and method for purifying compound or resin | |
JP6447884B2 (en) | Lithographic film forming material, Lithographic film forming composition, Lithographic film, pattern forming method and purification method | |
JP6390911B2 (en) | COMPOUND, LITHOGRAPHIC LOWER FILM FORMING MATERIAL, LITHOGRAPHY LOWER FILM AND PATTERN FORMING METHOD | |
US10364314B2 (en) | Compound, resin, material for forming underlayer film for lithography, composition for forming underlayer film for lithography, underlayer film for lithography, resist pattern forming method, circuit pattern forming method, and purification method | |
KR102552910B1 (en) | Compound, resin, material for forming lower layer film for lithography, lower layer film for lithography, pattern formation method, and purification method of compound or resin | |
JP6388126B2 (en) | COMPOUND, LITHOGRAPHIC LOWER FILM FORMING MATERIAL, LITHOGRAPHY LOWER FILM AND PATTERN FORMING METHOD | |
JPWO2016158457A1 (en) | Compound, resin, and purification method thereof, lower layer film forming material for lithography, lower layer film forming composition, lower layer film, resist pattern forming method, and circuit pattern forming method | |
JP2016184152A (en) | Underlayer film forming material for lithography, composition comprising material and pattern formation method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15872783 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016566122 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 11201705038X Country of ref document: SG |
|
WWE | Wipo information: entry into national phase |
Ref document number: 253109 Country of ref document: IL |
|
ENP | Entry into the national phase |
Ref document number: 20177017342 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15539560 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
REEP | Request for entry into the european phase |
Ref document number: 2015872783 Country of ref document: EP |