WO2016098707A1 - 半導体装置用ボンディングワイヤ - Google Patents

半導体装置用ボンディングワイヤ Download PDF

Info

Publication number
WO2016098707A1
WO2016098707A1 PCT/JP2015/084823 JP2015084823W WO2016098707A1 WO 2016098707 A1 WO2016098707 A1 WO 2016098707A1 JP 2015084823 W JP2015084823 W JP 2015084823W WO 2016098707 A1 WO2016098707 A1 WO 2016098707A1
Authority
WO
WIPO (PCT)
Prior art keywords
bonding
wire
bonding wire
ball
coating layer
Prior art date
Application number
PCT/JP2015/084823
Other languages
English (en)
French (fr)
Inventor
哲哉 小山田
宇野　智裕
大造 小田
山田　隆
Original Assignee
新日鉄住金マテリアルズ株式会社
日鉄住金マイクロメタル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新日鉄住金マテリアルズ株式会社, 日鉄住金マイクロメタル株式会社 filed Critical 新日鉄住金マテリアルズ株式会社
Priority to EP15869912.4A priority Critical patent/EP3236490B1/en
Priority to SG11201704914QA priority patent/SG11201704914QA/en
Priority to US15/537,390 priority patent/US10840208B2/en
Priority to CN201580068575.XA priority patent/CN107004613B/zh
Priority to KR1020177019312A priority patent/KR102459273B1/ko
Publication of WO2016098707A1 publication Critical patent/WO2016098707A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0227—Rods, wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0255—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in welding
    • B23K35/0261—Rods, electrodes, wires
    • B23K35/0272—Rods, electrodes, wires with more than one layer of coating or sheathing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3006—Ag as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/32—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C
    • B23K35/322—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C a Pt-group metal as principal constituent
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/06—Alloys based on silver
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/43—Manufacturing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/05599—Material
    • H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05624—Aluminium [Al] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/431—Pre-treatment of the preform connector
    • H01L2224/4312—Applying permanent coating, e.g. in-situ coating
    • H01L2224/43125—Plating, e.g. electroplating, electroless plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/432—Mechanical processes
    • H01L2224/4321—Pulling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/435—Modification of a pre-existing material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/437—Involving monitoring, e.g. feedback loop
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/438—Post-treatment of the connector
    • H01L2224/4382—Applying permanent coating, e.g. in-situ coating
    • H01L2224/43825—Plating, e.g. electroplating, electroless plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/438—Post-treatment of the connector
    • H01L2224/4382—Applying permanent coating, e.g. in-situ coating
    • H01L2224/43826—Physical vapour deposition [PVD], e.g. evaporation, sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/438—Post-treatment of the connector
    • H01L2224/4382—Applying permanent coating, e.g. in-situ coating
    • H01L2224/43827—Chemical vapour deposition [CVD], e.g. laser CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/43—Manufacturing methods
    • H01L2224/438—Post-treatment of the connector
    • H01L2224/43848—Thermal treatments, e.g. annealing, controlled cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/4501—Shape
    • H01L2224/45012—Cross-sectional shape
    • H01L2224/45015—Cross-sectional shape being circular
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45105—Gallium (Ga) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45109—Indium (In) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45111—Tin (Sn) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45139—Silver (Ag) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147—Copper (Cu) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45164—Palladium (Pd) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45169—Platinum (Pt) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45541—Structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45565—Single coating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/4557—Plural coating layers
    • H01L2224/45572—Two-layer stack coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45601—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45605—Gallium (Ga) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45601—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45609—Indium (In) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45601—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of less than 400°C
    • H01L2224/45611—Tin (Sn) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45639—Silver (Ag) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45644—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45664—Palladium (Pd) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45663—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
    • H01L2224/45669—Platinum (Pt) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/4845—Details of ball bonds
    • H01L2224/48451—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/485—Material
    • H01L2224/48505—Material at the bonding interface
    • H01L2224/48507—Material at the bonding interface comprising an intermetallic compound
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85009—Pre-treatment of the connector or the bonding area
    • H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
    • H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
    • H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85053—Bonding environment
    • H01L2224/85054—Composition of the atmosphere
    • H01L2224/85065—Composition of the atmosphere being reducing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85053—Bonding environment
    • H01L2224/85054—Composition of the atmosphere
    • H01L2224/85075—Composition of the atmosphere being inert
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852—Applying energy for connecting
    • H01L2224/85201—Compression bonding
    • H01L2224/85203—Thermocompression bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852—Applying energy for connecting
    • H01L2224/85201—Compression bonding
    • H01L2224/85205—Ultrasonic bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01015—Phosphorus [P]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/0102—Calcium [Ca]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01034—Selenium [Se]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01057—Lanthanum [La]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
    • H01L2924/0132—Binary Alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181—Encapsulation

Definitions

  • the present invention relates to a bonding wire for a semiconductor device used for connecting an electrode on a semiconductor element and a wiring of a circuit wiring board such as an external lead.
  • bonding wires fine wires having a wire diameter of about 15 to 50 ⁇ m are mainly used as bonding wires for semiconductor devices (hereinafter referred to as bonding wires) for bonding between electrodes on semiconductor elements and external leads.
  • the bonding wire bonding method is generally a thermocompression bonding method using ultrasonic waves, and a general-purpose bonding apparatus, a capillary jig for connecting the bonding wire through the inside, or the like is used.
  • the wire tip is heated and melted by arc heat input to form a ball portion by surface tension, and then this ball portion is pressure bonded onto the electrode of the semiconductor element heated within a range of 150 to 300 ° C.
  • the wire portion is crimped (hereinafter referred to as “wedge bonding”) to the electrode on the external lead side.
  • the electrode on the semiconductor element that is the bonding partner of the bonding wire is an electrode structure in which an alloy film mainly composed of Al is formed on a Si substrate, and the electrode on the external lead side is subjected to Ag plating, Pd plating, or the like A structure is often used.
  • the bonding wire is required to have good ball formability, ball bondability, wedge bondability, loop formability and the like.
  • Au has been mainly used as a bonding wire material that comprehensively satisfies these required performances.
  • bonding wires using materials that are less expensive than Au are being actively developed.
  • Au bonding wires are the mainstream, development aimed at substituting inexpensive materials with Au has been performed.
  • the reason why the Au bonding wire is used in the memory field is that electric resistance is low and excellent wedge bondability can be obtained.
  • the lower the electrical resistance the greater the current that can flow per bonding wire.
  • the total number of bonding wires can be reduced, the memory can be miniaturized, and high productivity can be obtained.
  • Au is soft and highly resistant to surface deterioration phenomena such as surface oxidation.
  • the Au bonding wire can provide excellent wedge bondability even when bonded under low energy conditions. Therefore, damage to the semiconductor element at the time of wedge bonding, which is a problem in a semiconductor element for memory that is becoming thinner, is obtained. Can be reduced.
  • the specific resistance of Ag is 1.6 ⁇ ⁇ cm, which is lower than the specific resistance of Au of 2.2 ⁇ ⁇ cm. From the viewpoint of reducing the specific resistance, Ag is more advantageous than Au. Further, the Young's modulus of Ag (about 83 ⁇ 10 9 N / m 2 ) is almost equal to the Young's modulus of Au (about 80 ⁇ 10 9 N / m 2 ). Ag is also highly resistant to surface degradation. Therefore, a bonding wire using Ag (hereinafter referred to as an Ag bonding wire) is expected to have excellent wedge bondability equivalent to that of an Au bonding wire.
  • the Ag bonding wire is inferior in the bonding reliability of the ball bonding portion (hereinafter abbreviated as “ball bonding reliability”) compared to the Au bonding wire, so that it is difficult to put it into practical use as a bonding wire for memory.
  • ball bonding reliability evaluation a test for accelerating the life of the semiconductor, such as a high temperature standing test and a high temperature high humidity test, is used.
  • the Ag bonding wire is a problem in aiming at practical use as a bonding wire for memory because the ball bonded portion is peeled off in a shorter time in the high temperature and high humidity test than the Au bonding wire. This is because if the separation of the ball joint portion occurs, the electrical connection is lost at the ball joint portion, causing a failure of the semiconductor device.
  • Patent Document 1 discloses a technique of adding Au and Pd to Ag to form an alloy as a method for solving the problem of ball joint reliability.
  • Ag—Au alloy is 0.01 to 30.00 wt. % Au and the balance Ag
  • the Ag—Pd alloy is 0.01 to 10.00 wt. % Pd and the balance Ag
  • the Ag—Au—Pd alloy is 0.01 to 30.00 wt. % Au, 0.01 to 10.00 wt. Alloys with% Pd and balance Ag have been reported.
  • Patent Document 2 discloses a structure in which a coating layer of Pd or Pt is provided on the outer periphery of an Ag alloy as a method for solving the problem of ball joint reliability.
  • Ball joint reliability is generally evaluated by a high temperature test or a high temperature and high humidity test.
  • a high temperature test When an Ag bonding wire is used, peeling of the ball joint portion becomes a problem particularly in a high temperature and high humidity environment.
  • the separation of the ball joint in the high temperature and high humidity test is considered to be caused by a part of the intermetallic compound of Ag and Al corroding and the adhesion at the interface between Ag and the corrosion product being lowered.
  • the high temperature and high humidity test is a test called PCT (Pressure Cooker Test) performed under the conditions of a temperature of 121 ° C.
  • HAST Highly Accelerated temperature and Humidity Stress Test
  • the wedge bondability required for memory bonding wires is evaluated by bonding a bonding wire and determining whether or not a bonding failure occurs at the wedge bonded portion.
  • the bonding failure is defined as a state in which the bonding wire is peeled off from the electrode on the lead side.
  • the bonding wire for memory is required not to cause bonding failure when wedge bonding is performed with respect to the Ag electrode on the external lead side in a temperature range of 175 ° C. or lower and low energy conditions.
  • the bonding wire in which Pd, Au or the like is added to Ag disclosed in Patent Document 1 can improve the ball bonding reliability in a high temperature and high humidity environment.
  • the bonding wire cannot satisfy the standard of ball bonding reliability required for the bonding wire for memory.
  • it is effective to increase the concentration of the alloy element.
  • the wire becomes hard and the wedge bonding property is lowered. Therefore, it has been difficult to satisfy the ball bonding reliability and the wedge bondability required for the memory bonding wire only by the Ag alloy design alone.
  • Ag easily adsorbs sulfur, sulfur adsorbed on the surface of the wire hinders the diffusion of Ag at the time of wedge bonding, and there is a problem that wedge bondability is lowered.
  • the bonding wire having a structure in which a coating layer such as Pd or Pt is provided on the surface of Ag disclosed in Patent Document 2 can improve the ball bonding reliability in a high temperature and high humidity environment. ing.
  • the bonding wire cannot satisfy the ball bonding reliability standard required for the bonding wire for memory.
  • the wedge bondability was improved by using an element having a lower sulfur adsorptivity than Ag in the coating layer, but the adhesion at the interface between the coating layer and Ag was low. There was a problem of peeling from.
  • An object of the present invention is to provide a bonding wire that solves the above-described problems and can simultaneously satisfy the ball bonding reliability and the wedge bonding properties required for a memory bonding wire.
  • the bonding wire according to the present invention includes one or more of Ga, In and Sn in a total of 0.1 to 3.0 at. And a balance containing Ag and inevitable impurities, and one or more of Pd and Pt, or one or more of Pd and Pt and Ag formed on the surface of the core, and the balance And a coating layer made of inevitable impurities, wherein the coating layer has a thickness of 0.005 to 0.070 ⁇ m.
  • ball joint reliability and wedge jointability can be satisfied at the same time.
  • Ga, In, or Sn is effective as an element added to the core material made of Ag, and its concentration is 0.1 at. % Or more is effective.
  • Pd or Pt is effective as the element used for the coating layer, and the thickness of the coating layer is 0.005 ⁇ m or more. That is, when the bonding wire according to the present embodiment was used, peeling did not occur at the ball joint with the Al electrode even after 120 hours had elapsed in HAST. In addition, the electrical connection was not lost.
  • Ga, In, or Sn is effective as an element contained in the core material, and the concentration of one or more of Ga, In, and Sn is 0.05 at. % Or more and 3.0 at. % Or less is effective.
  • Pd or Pt is effective as the element used for the coating layer, and the thickness of the coating layer is effective from 0.003 ⁇ m to 0.070 ⁇ m. That is, when the bonding wire according to the present embodiment is used, even when wedge bonding is performed at a low energy condition and 175 ° C., bonding failure does not occur. The reason why excellent wedge bondability was obtained will be described below.
  • the first reason is that softness can be maintained by appropriately controlling the total concentration of one or more of Ga, In, and Sn contained in the core material.
  • the second reason is that the core material is provided with a coating layer containing one or more of Pd and Pt, or one or more of Pd and Pt and Ag, and the balance made of unavoidable impurities. This is because it can be suppressed.
  • the third reason is that by appropriately controlling the element added to the core material, the element used for the coating layer, and the thickness of the coating layer, the adhesion between the core material and the coating layer is improved, and the coating layer layer at the time of wedge bonding is improved. This is because peeling can be suppressed. From the above, it has been clarified that the bonding wire according to the present embodiment satisfies the standard for the wedge bondability required for the bonding wire for memory.
  • a total of one or more of Ga, In and Sn is 0.1 to 3.0 at.
  • the bonding wire according to the present embodiment can satisfy the performance required for the bonding wire for memory and can be reduced in cost as compared with the Au bonding wire, so that it can be replaced with the Au bonding wire. It was.
  • the total of one or more of Ga, In and Sn is 0.1 at. If it is less than%, the growth suppression of the intermetallic compound of Ag and Al that causes corrosion in the high-temperature and high-humidity test is insufficient, and the ball joint reliability required for memory applications cannot be obtained.
  • a total of one or more of Ga, In and Sn is 3.0 at.
  • a bonding wire containing more than% is not suitable for practical use because the strength of the bonding wire increases and the wedge bondability decreases.
  • the total concentration is 0.2 to 1.5 at. % Is preferable because both softness and high ductility can be achieved, and excellent wedge bondability can be obtained.
  • the bonding wire has a total concentration of 0.3 to 1.0 at. % Is more preferable because excellent wedge bondability can be obtained.
  • one or more elements of In and Sn are 0.1 to 3.0 at. % Is preferable because a better effect of improving the ball bonding reliability can be obtained. This is because In or Sn contained in the core material is particularly excellent in the growth suppressing effect of the intermetallic compound of Ag and Al at the bonding interface.
  • the concentration of Ga, In, and Sn contained in the core material of the bonding wire according to the present embodiment is determined based on the Auger Electron Spectroscopy (AES) apparatus and the scanning electron microscope (SEM). ) Or an energy dispersive X-ray-spectrometry (EDX) apparatus provided in a transmission electron microscope (TEM).
  • AES Auger Electron Spectroscopy
  • SEM scanning electron microscope
  • EDX energy dispersive X-ray-spectrometry
  • TEM transmission electron microscope
  • a method of exposing the core material a method of embedding a bonding wire in a resin and exposing a cross section by mechanical polishing or a method of scraping the surface of the bonding wire with an Ar ion beam can be used.
  • the covering layer of the bonding wire according to this embodiment has a total concentration of Pd, Pt, and Au of 50 at. It is defined as an area over%.
  • the thickness and composition of the coating layer of the bonding wire can be measured using an Auger electron spectroscopic analyzer. A specific method is to first measure the concentration while scraping the surface of the bonding wire by sputtering or the like, and obtain a concentration profile in the depth direction. Elements targeted for the concentration profile are Ag, Ga, In, Sn, Pd, and Pt. Next, the total concentration of Pd and Pt is calculated based on the obtained concentration profile.
  • the thickness of the coating layer may be measured at one place, but it is preferable to use an average value of measured values at two or more places.
  • the bonding wire according to this embodiment includes an alloy layer that includes one or more of Ga, In, and Sn, one or more of Pd and Pt, and Ag between the core material and the coating layer, and the balance is made of inevitable impurities.
  • a ball having a small diameter hereinafter referred to as a small diameter ball
  • the occurrence of a ball having a low true sphericity hereinafter referred to as a deformed ball
  • a small-diameter ball is defined as a ball whose diameter is 1.5 to 1.7 times the wire diameter of the bonding wire. Usually, the diameter of the ball is in the range of 1.7 to 2.5 times the wire diameter of the bonding wire.
  • the total concentration of Pd and Pt is 5 to 50 at. % Region and the concentration of Ga, In, and Sn is defined as a region higher than the concentration of the central portion of the bonding wire. If the thickness of the alloy layer is 10 to 60% with respect to the thickness of the coating layer, it is preferable for small diameter balls because arc discharge is stable and variation in ball diameters can be suppressed.
  • the composition of the alloy layer can be measured by the same method as the composition of the coating layer. As a specific method, first, concentration measurement is performed while cutting the surface of the bonding wire by sputtering or the like to obtain a concentration profile in the depth direction. Elements targeted for the concentration profile are Ag, Ga, In, Sn, Pd, and Pt. Next, the total concentration of Pd and Pt is calculated based on the obtained concentration profile.
  • the thickness and composition of the alloy layer may be measured values at one place, but it is preferable to use an average value of measured values at two or more places.
  • the effectiveness of the bonding wire according to this embodiment with respect to the capillary life will be described.
  • the bonding wire according to the present embodiment 15-50 at.
  • the friction between the surface of the bonding wire and the capillary can be reduced, and the service life of the capillary can be improved. This is because Au is softer than Pd and Pt of the coating layer and has excellent ductility.
  • the Au-containing region has a thickness of 0.001 to 0.050 ⁇ m, an excellent improvement effect can be obtained, which is effective.
  • the concentration of Au is 15 at. If it is less than% or the thickness is less than 0.050 ⁇ m, the improvement effect is insufficient.
  • the concentration of Au is 50 at.
  • the thickness and composition of the Au-containing region can be measured using an Auger electron spectrometer. A specific method can be measured by the same method as the composition of the coating layer.
  • the core material further contains at least one of Cu, Pd, Pt and Au in a total amount of 0.1 to 0.7 at.
  • the content of the element is included, the crystal grains of the ball can be made finer, and a ball shape closer to a perfect circle can be obtained.
  • the concentration is 0.1 at. If it is less than%, the ball shape improvement effect cannot be obtained.
  • the concentration is 0.7 at. If it exceeds%, the ball becomes hard and chip damage at the time of joining becomes a problem, so it is not suitable for practical use.
  • the concentration of Pd, Pt and Au contained in the core material of the bonding wire can be measured by using an EDX apparatus in which the core material portion is provided in AES, SEM or TEM.
  • a method of exposing the core material a method of embedding a bonding wire in a resin and exposing a cross section by mechanical polishing or a method of scraping the surface of the bonding wire with an Ar ion beam can be used.
  • the bonding wire including the core material, the coating layer, and the alloy layer according to this embodiment has a total of 80 to 500 at.s of one or more of B, P, Ca, La, and Se. By including ppm, the straightness of the loop can be improved. With recent miniaturization of memory packages, the pitch of electrodes on the lead side is narrowed, and the bonding interval between bonding wires is also narrowed. The bonding wire is required to have high straightness in order to prevent a short circuit due to contact between the wires.
  • the bonding wire according to this embodiment has a total of 80 to 500 at.s of one or more of B, P, Ca, La, and Se.
  • the concentration is 80 at. If it is less than ppm, the effect of improving the straightness of the loop cannot be obtained.
  • the concentration is 500 at. If it exceeds ppm, the ball becomes hard and chip damage at the time of joining becomes a problem, so it is not suitable for practical use.
  • the concentration of B, P, Ca, La and Se contained in the bonding wire can be measured using an inductively coupled plasma (ICP) emission spectroscopic analyzer.
  • ICP inductively coupled plasma
  • the Ag alloy used for the core material of the bonding wire can be manufactured by simultaneously melting the raw materials.
  • an arc heating furnace, a high-frequency heating furnace, a resistance heating furnace, or the like can be used.
  • the procedure is as follows. A raw material is loaded into a carbon crucible processed into a cylindrical shape having a diameter of 3 to 6 mm, and dissolved in a vacuum or in an inert atmosphere such as N 2 and Ar gas to 1100 to 1500 ° C. It is completed by performing furnace cooling or air cooling.
  • the obtained Ag alloy is formed to the final wire diameter by repeatedly performing a drawing process using a die.
  • the coating layer can be formed by a method of forming a coating film on the Ag alloy wire having the final wire diameter, or after forming the coating film on the Ag alloy wire having a large intermediate wire diameter and then drawing the final wire. A method of reaching the diameter can be used.
  • quality control is simple, and when drawing after forming the film with the latter intermediate wire diameter, the adhesion with the core material is improved. It is advantageous.
  • Each manufacturing method will be specifically described.
  • a plating method As a method of forming a Pd, Pt film on the surface of the Ag alloy, a plating method, a vapor deposition method, a melting method, or the like can be used.
  • the plating method can be manufactured by either an electrolytic plating method or an electroless plating method. In electroplating called strike plating or flash plating, the plating rate is high and the adhesion to the substrate is good. Solutions used for electroless plating are classified into substitutional type and reduction type. When the film thickness is thin, substitutional plating alone is sufficient, but when forming a thick film, reduction type is used after substitutional plating. It is effective to apply plating step by step.
  • vapor deposition method physical adsorption such as sputtering, ion plating, and vacuum deposition, and chemical adsorption such as plasma CVD (Chemical Vapor Deposition) can be used. Since both are dry, there is no need for cleaning after the coating layer is formed, and there is no concern about surface contamination during cleaning.
  • plasma CVD Chemical Vapor Deposition
  • a method for forming a film on the Ag alloy wire having the final wire diameter will be described.
  • a cylindrical Ag alloy having a diameter of 3 to 6 mm obtained by melting is drawn to form a diameter of 0.9 to 1.2 mm.
  • a wire having a diameter of 300 to 600 ⁇ m is produced by continuously drawing using a die.
  • oxides and sulfides on the surface can be removed, which is effective in improving quality.
  • wire drawing is repeated to form the final wire diameter of ⁇ 15 to 25 ⁇ m.
  • a commercially available lubricant is used for wire drawing, and the wire feed speed during wire drawing is 300 to 1000 m / min.
  • a film containing one or more of Pd and Pt of 0.010 to 0.140 ⁇ m or one or more of Pd and Pt and Ag is formed on the surface of the Ag alloy wire.
  • a method of performing a final heat treatment after forming the film is effective.
  • the final heat treatment condition needs to be set to a condition that allows the thickness of the coating layer to be controlled within an appropriate range. Specifically, it is effective to control the final heat treatment temperature to 200 to 600 ° C. and the heat treatment time to be in the range of 0.2 to 1.0 seconds.
  • the elements of the coating formed on the surface of the Ag alloy wire and the Ag alloy wire are mutually diffused, and the thickness of the coating layer can be controlled in the range of 0.005 to 0.070 ⁇ m. Further, if this final heat treatment condition is used, since the work-hardened Ag alloy can be recrystallized, the softening required for the bonding wire can be realized at the same time.
  • a method will be described in which a film is formed on an Ag alloy wire having a large intermediate wire diameter and then drawn to reach the final wire diameter.
  • a cylindrical Ag alloy having a diameter of 3 to 6 mm obtained by melting is drawn to form a diameter of 0.9 to 1.2 mm.
  • a wire having a diameter of 300 to 600 ⁇ m is produced by continuously drawing using a die.
  • a film containing Ag and one or more of Pd and Pt, or one or more of Pd and Pt is formed.
  • the thickness of the film needs to be changed according to the diameter of the Ag alloy wire and the final diameter of the bonding wire at the time of forming the film.
  • the film thickness may be adjusted to 0.010 to 0.140 ⁇ m at the final wire diameter.
  • the wire diameter of the Ag alloy wire at the time of forming the coating is R 1
  • the thickness of the coating is r 1
  • the wire diameter of the Ag alloy wire at the final wire diameter is R 2
  • Expression (3) can be expressed by the following Expression (4). 0.010 ⁇ (R / R 1 ) r 1 ⁇ 0.140 (4)
  • the thickness of the film By determining the wire diameter for forming the film and the final wire diameter from Equation (4), it is possible to determine the thickness of the film to be formed at a wire diameter of ⁇ 300 to 600 ⁇ m. Thereafter, wire drawing is repeated to form the final wire diameter of ⁇ 15 to 25 ⁇ m, and final heat treatment is performed. When the final heat treatment is performed while continuously sweeping the wire, high productivity is obtained, which is effective.
  • the final heat treatment condition needs to be set to a condition that allows the thickness of the coating layer to be controlled within an appropriate range. Specifically, it is effective to control the final heat treatment temperature to 200 to 600 ° C. and the heat treatment time to be in the range of 0.2 to 1.0 seconds. It is possible to control the thickness of the coating layer in the range of 0.005 to 0.070 ⁇ m by the mutual diffusion of the elements of the coating formed on the surface of the Ag alloy wire and the Ag alloy wire.
  • Alloy layer In order to form an alloy layer between the core material and the coating layer, it is effective to perform an additional heat treatment after the final heat treatment. This promotes diffusion of Ga, In and Sn contained in the Ag alloy to the coating layer side. It is effective to change the heat treatment time when the additional heat treatment condition is 600 to 700 ° C. and the thickness of the alloy layer is controlled. By setting the heat treatment time to 0.2 to 0.5 seconds within the above heat treatment temperature range, the thickness of the alloy layer can be in the range of 10 to 60% with respect to the thickness of the coating layer. As a method for the additional heat treatment, a method in which the wire is continuously swept can be used.
  • the thickness and composition can be controlled by the same method as the method for forming the coating layer. That is, a method of forming the Au film after forming the coating layer at the stage of processing to the intermediate wire diameter, and a method of forming the Au film after forming the coating layer at the stage of processing to the final wire diameter can be used. For example, when an Au film is formed after forming a coating layer on an Ag alloy wire having a final wire diameter, a method of performing a final heat treatment after forming an Au film of 0.0008 to 0.04 ⁇ m is effective.
  • a bonding wire was produced according to the above manufacturing method.
  • Ag as a raw material has a purity of 99.99 at. % Or more, with the balance being inevitable impurities.
  • Ga, In, Sn, Cu, Pd, Pt, Au, B, P, Ca, La and Se have a purity of 99.9 at. % Or more and the balance is made of inevitable impurities.
  • 10 at. Elements with a concentration of ppm or less are unavoidable impurities.
  • an electrolytic plating method was used as a method for forming a Pd, Pt film on the surface of the Ag alloy.
  • the wire was immersed in the plating solution while continuously sweeping.
  • the electrolytic plating method was also used for forming the Au-containing region on the outermost surface of the coating layer. Also in this case, the wire was immersed in the plating solution while continuously sweeping.
  • the bonding life after the high temperature and high humidity test was evaluated under the conditions of a temperature of 130 ° C., a relative humidity of 85%, and a bias voltage of 3.6V.
  • the sample was manufactured by bonding a bonding wire to a semiconductor element using a commercially available bonding apparatus and molding with an epoxy-based sealing resin.
  • An Al electrode having a thickness of 1 ⁇ m was used as the electrode of the semiconductor element.
  • the joint life was a time at which a shear test of the ball joint was carried out every 24 hours and the value of the shear strength was 1/3 of the shear strength obtained in the initial stage.
  • the shear test after the high-temperature and high-humidity test was conducted after removing the resin by acid treatment and exposing the ball joint.
  • As the shear tester a commercially available micro strength tester was used.
  • As the value of the shear strength an average value of 10 measured values of randomly selected ball joints was used. In the above evaluation, if the bonding life is less than 120 hours, it is judged that there is a problem in practical use, and if it is ⁇ , and if it is 120 hours or more and less than 168 hours, it is judged that there is no problem in practical use. It was marked as ⁇ .
  • Wedge bonding was performed on a device having a structure in which a plurality of semiconductor elements were laminated using a bonding wire having a wire diameter of ⁇ 15 to 20 ⁇ m.
  • the bonding temperatures were 175 ° C., 160 ° C., and 150 ° C.
  • the lead-side electrode material was Ag.
  • the joining conditions were low energy conditions where the output of ultrasonic waves was lower than normal conditions. With respect to the sample after joining, 1000 wedge joints were observed, and pass / fail was judged by whether or not a defect occurred.
  • the defect is defined as a state in which the bonding wire is peeled off from the electrode.
  • Ball formation was evaluated by forming a ball using a commercially available bonding apparatus and observing its appearance.
  • the ball formation conditions were N 2 + 5% H 2 gas.
  • the diameter of the ball was 1.5 times the wire diameter.
  • An optical microscope was used to observe the appearance of the balls.
  • the ball forming property was determined based on the number of balls having inferior sphericity among 200 randomly selected balls based on the above evaluation method. If the number of balls having inferior sphericity was 3 or 4, it was judged that there was no problem in practical use.
  • the capillary life was evaluated by observing the capillary after bonding the bonding wire using a commercially available bonding apparatus, and determining the presence or absence of wear.
  • the wire diameter of the bonding wire was 20 ⁇ m and the number of bonding trials was 5000 times. Observe the hole at the tip of the capillary using an SEM, and if it can be used without any problem even if it deviates from a perfect circle due to wear, it is judged that there is no practical problem. Judged to be excellent and marked as ⁇ .
  • the pressure bonding shape of the ball was evaluated by performing ball bonding on an electrode obtained by forming a 1.0 ⁇ m thick Al film on a Si substrate using a commercially available wire bonder, and observing with an optical microscope from directly above.
  • the collapsed shape of the ball was determined to be good if the collapsed shape was close to a circle, and was determined to be defective if it was an elliptical or petal-shaped shape. Observe 100 ball joints with an optical microscope. If there are 1 to 4 defects, it is judged that there is no problem in practical use. Indicated.
  • loop formation For loop formation, bonding was performed using a commercially available wire bonder, and the loop portion was observed to evaluate whether or not the loops were in contact with each other.
  • the loop length was 2.5 mm and the loop height was 0.2 mm.
  • the loop portion of the 200 bonded bonding wires was observed with an optical microscope, and if there was a portion where the adjacent bonding wires contacted, it was determined to be defective. If there were 1 to 4 defects, it was judged that there was no problem in practical use, and it was judged that it was particularly excellent if no defect occurred at all.
  • Table 1 shows examples in which characteristics such as the composition of the bonding wire according to the present invention and evaluation results of each bonding wire are described.
  • Table 2 shows a comparative example.
  • the bonding wire according to the first claim is No. 1, 2, 17 to 24, 45, 50 to 52, 56, 62 to 66, 70 to 72, 76 to 84. It was confirmed that the ball bond reliability and wedge bondability required for memory bonding wires can be satisfied.
  • the bonding wires according to Examples 1 to 84 have a total amount of at least one of Ga, In, and Sn of 0.1 to 3.0 at. And a balance containing Ag and inevitable impurities, and one or more of Pd and Pt, or one or more of Pd and Pt and Ag formed on the surface of the core, and the balance And a coating layer made of inevitable impurities, and the thickness of the coating layer is 0.005 to 0.070 ⁇ m. Therefore, it was confirmed that the ball joint reliability and the wedge jointability were satisfied at the same time. In contrast, No. of the comparative example. As shown in 1 to 14, when the Ga, In, Sn concentration is outside the above range, or the coating layer thickness is outside the above range, the ball joint reliability and the wedge joint property must be satisfied at the same time. I confirmed that I could not.
  • the bonding wires according to Examples 3 to 6, 8, 10 to 15, 17, 19, 20, 22 to 32, 35, 36, 38 to 65, 67 to 80, and 82 to 84 have an alloy layer thickness of Since it was 10 to 60% of the thickness of the coating layer, it was confirmed that the ball forming property was excellent.
  • the bonding wires according to Examples 26, 27, 30, and 31 are made of 15 to 50 at. It was confirmed that the capillary life can be improved since the thickness of the Au-containing region containing 1% is 0.001 to 0.050 ⁇ m.
  • the bonding wires according to Examples 33 to 44, 46 to 50, and 57 to 60 have a total of 0.1 to 0.7 at. At least one of Cu, Pd, Pt, and Au as a core material. %, It was confirmed that the evaluation of the ball pressure bonding shape was particularly excellent.
  • the bonding wires according to Examples 3, 4, 9 to 16, 34 to 38, 48, 49, 54, 55, 68, 69, 74, and 75 are composed of B, P, Ca, La, and Se as a whole.

Abstract

　Ｇａ，Ｉｎ及びＳｎの１種以上を総計で０．１～３．０ａｔ．％含み、残部がＡｇおよび不可避不純物からなる芯材と、前記芯材の表面に形成された、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇ、を含み、残部が不可避不純物からなる被覆層とを備え、前記被覆層の厚さが０．００５～０．０７０μｍであることを特徴とする、メモリ用ボンディングワイヤに要求されるボール接合信頼性、ウェッジ接合性を同時に満足することができるボンディングワイヤを提供する。

Description

半導体装置用ボンディングワイヤ
　本発明は、半導体素子上の電極と外部リード等の回路配線基板の配線を接続するために利用される半導体装置用ボンディングワイヤに関するものである。
　現在、半導体素子上の電極と外部リードの間を接合する半導体装置用ボンディングワイヤ（以下、ボンディングワイヤという）として、線径１５～５０μｍ程度の細線が主として使用されている。ボンディングワイヤの接合方法は超音波併用熱圧着方式が一般的であり、汎用ボンディング装置、ボンディングワイヤをその内部に通して接続するキャピラリ冶具等が用いられる。ボンディングワイヤの接合プロセスは、ワイヤ先端をアーク入熱で加熱溶融し、表面張力によりボール部を形成した後に、１５０～３００℃の範囲内で加熱した半導体素子の電極上にこのボール部を圧着接合（以下、ボール接合という）し、次にループを形成した後、外部リード側の電極にワイヤ部を圧着接合（以下、ウェッジ接合という）することで完了する。ボンディングワイヤの接合相手である半導体素子上の電極には、Ｓｉ基板上にＡｌを主体とする合金膜を成膜した電極構造、外部リード側の電極にはＡｇめっき、Ｐｄめっきなどを施した電極構造が用いられることが多い。
　ボンディングワイヤには、良好なボール形成性、ボール接合性、ウェッジ接合性、ループ形成性などの性能が要求される。これらの要求性能を総合的に満足するボンディングワイヤの材料として、Ａｕが主に用いられてきた。一方で、近年のＡｕ価格の高騰により、Ａｕに比べて安価な材料を用いたボンディングワイヤの開発が盛んに行われている。最近では、Ａｕを用いたボンディングワイヤ（以下、Ａｕボンディングワイヤという）が主流であるメモリ分野において、Ａｕから安価な材料への代替を目指した開発が行われている。
　メモリ分野においてＡｕボンディングワイヤが使用されているのは、電気抵抗が低く、優れたウェッジ接合性が得られるためである。電気抵抗が低いほど、ボンディングワイヤ１本あたりに流すことのできる電流が大きくなる。これにより、ボンディングワイヤの総数を減らすことができ、メモリを小型化できたり、高い生産性を得ることができる。また、Ａｕは軟質かつ表面酸化等の表面劣化現象への耐性が高い。このため、Ａｕボンディングワイヤは、低エネルギー条件での接合においても優れたウェッジ接合性が得られるので、薄型化が進んでいるメモリ用の半導体素子で問題となるウェッジ接合時の半導体素子の損傷を低減できる。
　上記のメモリ用ボンディングワイヤの要求性能を満たし、Ａｕに対して低コスト化を実現する材料として、Ａｇが着目されている。Ａｇの比抵抗は１．６μΩ・ｃｍとＡｕの比抵抗の２．２μΩ・ｃｍに比べて低く、低比抵抗化の観点からはＡｇの方がＡｕよりも有利である。また、Ａｇのヤング率（約８３×１０９　Ｎ／ｍ２）は、Ａｕのヤング率（約８０×１０９Ｎ／ｍ２）とほぼ等しい。Ａｇは表面の劣化現象に対する耐性も高い。したがって、Ａｇを用いたボンディングワイヤ（以下、Ａｇボンディングワイヤという）は、Ａｕボンディングワイヤと同等の優れたウェッジ接合性が得られると期待されている。
　しかしながら、Ａｇボンディングワイヤは、Ａｕボンディングワイヤに比べてボール接合部の接合信頼性（以下、ボール接合信頼性と略す。）が劣るため、メモリ用ボンディングワイヤとしての実用化が困難とされている。ボール接合信頼性評価には、高温放置試験、高温高湿試験などの半導体の寿命を加速評価する試験が用いられる。Ａｇボンディングワイヤは、高温高湿試験において、Ａｕボンディングワイヤに比べて短時間でボール接合部の剥離が発生するためメモリ用ボンディングワイヤとして実用化を目指す上で問題とされている。これはボール接合部の剥離が発生すると、ボール接合部で電気的な接続が損なわれて半導体デバイスの故障の原因となるためである。
　特許文献１には、ボール接合信頼性の課題を解決する方法として、ＡｇにＡｕ，Ｐｄを添加し、合金化する技術が開示されている。Ａｇ－Ａｕ合金が０．０１から３０．００ｗｔ．％のＡｕおよび残余のＡｇを含み、Ａｇ－Ｐｄ合金が０．０１から１０．００ｗｔ．％のＰｄおよび残余のＡｇを含み、Ａｇ－Ａｕ－Ｐｄ合金が０．０１から３０．００ｗｔ．％のＡｕ、０．０１から１０．００ｗｔ．％のＰｄおよび残余のＡｇを含む合金が報告されている。特許文献２には、ボール接合信頼性の課題を解決する方法として、Ａｇ合金の外周にＰｄ又はＰｔの被覆層を設けた構造が開示されている。
特開２０１３－１３９６３５号公報 特開２０１３－３３８１１号公報
　本発明者らは、先行特許文献に開示されているＡｇボンディングワイヤについて評価した結果、メモリ用ボンディングワイヤに要求されるボール接合信頼性、ウェッジ接合性の基準を満たすことができなかった。
　はじめに、メモリ用ボンディングワイヤに要求されるボール接合信頼性について説明する。ボール接合信頼性は、一般に、高温試験又は高温高湿試験によって評価を行う。Ａｇボンディングワイヤを用いた場合、特に高温高湿環境においてボール接合部の剥離が問題となる。高温高湿試験におけるボール接合部の剥離は、ＡｇとＡｌの金属間化合物の一部が腐食し、Ａｇと腐食生成物の界面の密着性が低下することが原因と考えられている。これまで高温高湿試験は、温度が１２１℃、相対湿度が１００％の条件で行うＰＣＴ（Ｐｒｅｓｓｕｒｅ　Ｃｏｏｋｅｒ　Ｔｅｓｔ）と呼ばれる試験や、温度が１３０℃、相対湿度が８５％の条件で行うｕＨＡＳＴ（ｕｎｂｉａｓｅｄ　Ｈｉｇｈｌｙ　Ａｃｃｅｌｅｒａｔｅｄ　ｔｅｍｐｅｒａｔｕｒｅ　ａｎｄ　ｈｕｍｉｄｉｔｙ　Ｓｔｒｅｓｓ　Ｔｅｓｔ）と呼ばれる試験が主流であった。近年では、ボール接合信頼性への要求は厳しくなっており、ｕＨＡＳＴの温度、湿度環境下でさらにボール接合部に３．６Ｖのバイアス電圧を印加して劣化を加速させるＨＡＳＴと呼ばれる試験での性能が要求されている。メモリ用ボンディングワイヤには、ＨＡＳＴにおいて１２０時間経過後も正常に動作することが求められている。
　次に、メモリ用ボンディングワイヤに要求されるウェッジ接合性について説明する。ウェッジ接合性は、ボンディングワイヤを接合し、ウェッジ接合部における接合不良の発生有無によって評価を行う。ここで接合不良とは、ボンディングワイヤがリード側の電極から剥がれた状態と定義する。メモリ用ボンディングワイヤには、外部リード側のＡｇ電極に対して、１７５℃以下の温度域、低エネルギー条件でウェッジ接合した際に、接合不良が発生しないことが求められる。
　上記特許文献１に開示されているＡｇにＰｄ，Ａｕなどを添加したボンディングワイヤは、高温高湿環境におけるボール接合信頼性を向上させることが可能であることが述べられている。しかしながら前記ボンディングワイヤでは、メモリ用ボンディングワイヤに要求されるボール接合信頼性の基準を満たすことができなかった。ボール接合信頼性を改善するためには、合金元素の濃度を高くすることが有効であるが、ワイヤが硬質化してウェッジ接合性が低下する課題があった。したがって、Ａｇの合金設計だけでは、メモリ用ボンディングワイヤに要求されるボール接合信頼性とウェッジ接合性を同時に満足することは困難であった。また、Ａｇは硫黄が吸着し易いため、ワイヤの表面に吸着した硫黄がウェッジ接合時にＡｇの拡散を阻害して、ウェッジ接合性が低下する課題があった。
　上記特許文献２に開示されているＡｇの表面にＰｄ，Ｐｔなどの被覆層を設けた構造のボンディングワイヤは、高温高湿環境におけるボール接合信頼性を向上させることが可能であることが述べられている。しかしながらボール接合信頼性は、被覆層の構成元素や厚さによって変化すると考えられるが、前記ボンディングワイヤでは、メモリ用ボンディングワイヤに要求されるボール接合信頼性の基準を満たすことができなかった。ウェッジ接合性については、Ａｇに比べて硫黄の吸着性が低い元素を被覆層に用いることで改善が見られたが、被覆層とＡｇの界面の密着性が低く、ウェッジ接合において被覆層がＡｇから剥離する課題があった。
　また、Ａｇの合金設計とＡｇ合金の表面に被覆層を設ける技術を組み合わせた場合においても、メモリ用ボンディングワイヤに要求されるボール接合信頼性を得ることができなかった。
　以上の理由から、先行技術文献に開示されているＡｇボンディングワイヤ及びその組み合わせでは、メモリ用ボンディングワイヤに要求されるボール接合信頼性とウェッジ接合性を同時に満足することができないことが判明した。
　本発明は、上記の課題を解決してメモリ用ボンディングワイヤに要求されるボール接合信頼性、ウェッジ接合性を同時に満足することができるボンディングワイヤを提供することを目的とする。
　本発明に係るボンディングワイヤは、Ｇａ，Ｉｎ及びＳｎの１種以上を総計で０．１～３．０ａｔ．％含み、残部がＡｇおよび不可避不純物からなる芯材と、前記芯材の表面に形成された、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇ、を含み、残部が不可避不純物からなる被覆層とを備え、前記被覆層の厚さが０．００５～０．０７０μｍであることを特徴とする。
　本発明によれば、ボール接合信頼性とウェッジ接合性を同時に満足することができる。
（ボール接合信頼性およびウェッジ接合性）
　本発明者らは、鋭意検討した結果、ボール接合信頼性およびウェッジ接合性を同時に満足するためには、芯材に添加する元素と濃度、被覆層に用いる元素と被覆層の膜厚を適切に制御する必要があることを見出した。
　本実施形態に係るボンディングワイヤのボール接合信頼性に対する有効性を説明する。Ａｇからなる芯材に添加される元素は、Ｇａ，Ｉｎ又はＳｎが有効であり、その濃度は０．１ａｔ．％以上が有効である。被覆層に用いる元素は、Ｐｄ又はＰｔが有効であり、被覆層の厚さは０．００５μｍ以上が有効である。すなわち、本実施形態に係るボンディングワイヤを用いれば、ＨＡＳＴにおいて１２０時間経過後もＡｌ電極とのボール接合部において剥離は発生しなかった。また、電気的な接続が失われることもなかった。本実施形態に係るボンディングワイヤの芯材に含まれるＧａ，Ｉｎ又はＳｎ、および被覆層に含まれるＰｄ又はＰｔが、高温高湿試験中のボール接合部におけるＡｇとＡｌの金属間化合物の成長を抑制することができた。これは、芯材に含まれる元素と被覆層に含まれる元素を主体とする化合物層が、ボール接合部の接合界面に形成され、ＡｇとＡｌの拡散を効果的に抑制したためと考えられる。以上より、本実施形態に係るボンディングワイヤはメモリ用ボンディングワイヤに要求されるボール接合信頼性に対する基準を満たすことが明らかとなった。
　次に、本実施形態に係るボンディングワイヤのウェッジ接合性に対する有効性を説明する。芯材に含まれる元素は、Ｇａ，Ｉｎ又はＳｎが有効であり、その濃度はＧａ，Ｉｎ及びＳｎの１種以上を総計で０．０５ａｔ．％以上３．０ａｔ．％以下が有効である。また、被覆層に用いる元素は、Ｐｄ又はＰｔが有効であり、被覆層の厚さは０．００３μｍ以上０．０７０μｍ以下が有効である。すなわち、本実施形態に係るボンディングワイヤを用いれば、低エネルギー条件、１７５℃でウェッジ接合を行った場合においても、接合不良は発生しなかった。優れたウェッジ接合性が得られた理由を以下説明する。１つめの理由は、芯材に含まれるＧａ，Ｉｎ及びＳｎの１種以上の総計濃度を適切に制御することで軟質であることを維持できるためである。２つめの理由は、芯材の周囲にＰｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇを含み、残部が不可避不純物からなる被覆層を設けることで、硫黄の吸着を抑制できるためである。３つめの理由は、芯材に添加する元素と被覆層に用いる元素および被覆層の厚さを適切に制御することで、芯材と被覆層の密着性を高め、ウェッジ接合時の被覆層の剥離を抑制できるためである。以上より、本実施形態に係るボンディングワイヤはメモリ用ボンディングワイヤに要求されるウェッジ接合性に対する基準を満たすことが明らかとなった。
　メモリ用ボンディングワイヤに要求されるボール接合信頼性とウェッジ接合性に対する基準を同時に満足するためには、Ｇａ，Ｉｎ及びＳｎの１種以上を総計で０．１～３．０ａｔ．％含み、残部がＡｇおよび不可避不純物からなる芯材と、前記芯材の表面に形成された、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇ、を含み、残部が不可避不純物からなる被覆層とを備え、前記被覆層の厚さが０．００５～０．０７０μｍであることが有効である。本実施形態に係るボンディングワイヤは、メモリ用ボンディングワイヤに要求される性能を満足しつつ、Ａｕボンディングワイヤに比べて抵コスト化できることから、Ａｕボンディングワイヤからの代替が可能であることが明らかになった。
　ここで、Ｇａ，Ｉｎ及びＳｎの１種以上の総計が０．１ａｔ．％未満の場合、高温高湿試験において腐食の原因となるＡｇとＡｌの金属間化合物の成長抑制が不十分であり、メモリ用途で要求されるボール接合信頼性は得られない。Ｇａ，Ｉｎ及びＳｎの１種以上を総計で３．０ａｔ．％超含むボンディングワイヤは、ボンディングワイヤの強度が増加し、ウェッジ接合性が低下するため実用に適さない。前記総計濃度が０．２～１．５ａｔ．％であれば、軟質性と高い延性が両立でき、優れたウェッジ接合性が得られるため、好ましい。さらにボンディングワイヤは、前記総計濃度が０．３～１．０ａｔ．％であれば、さらに優れたウェッジ接合性が得られるため、より好ましい。
　芯材に含まれる元素のうち、Ｉｎ及びＳｎの１種以上の元素を０．１～３．０ａｔ．％含んでいればより優れたボール接合信頼性の改善効果が得られるため、好ましい。これは、芯材に含まれるＩｎ又はＳｎが接合界面のＡｇとＡｌの金属間化合物の成長抑制効果に特に優れていることによる。
　本実施形態に係るボンディングワイヤの芯材に含まれるＧａ，Ｉｎ及びＳｎの濃度は、芯材の部分をオージェ電子分光分析（ＡＥＳ：Auger Electron Spectroscopy）装置、走査型電子顕微鏡（ＳＥＭ：Scanning Electron Microscope）もしくは透過型電子顕微鏡（ＴＥＭ：Transmission Electron Microscope）に備え付けたエネルギー分散型X線分析(ＥＤＸ：Energy dispersive X-ray spectrometry)装置などを用いて測定することができる。芯材を露出させる方法は、ボンディングワイヤを樹脂に埋込み、機械研磨によって断面を露出させる方法やボンディングワイヤの表面をＡｒイオンビームによって削る方法が使用できる。
　本実施形態に係るボンディングワイヤの被覆層は、ボンディングワイヤの表面と中心を直線で結んだ領域のうち、Ｐｄ，Ｐｔ及びＡｕの総計濃度が５０ａｔ．％以上の領域と定義する。ボンディングワイヤの被覆層の厚さおよび組成は、オージェ電子分光分析装置を用いて測定することができる。具体的な方法は、まずボンディングワイヤの表面からスパッタ等で削りながら濃度測定を行い、深さ方向の濃度プロファイルを所得する。濃度プロファイルの対象とする元素は、Ａｇ，Ｇａ，Ｉｎ，Ｓｎ，Ｐｄ及びＰｔとする。次に得られた濃度プロファイルをもとにＰｄ及びＰｔの総計濃度を算出する。被覆層の厚さは、１か所の測定値でも良いが、２か所以上の測定値の平均値を用いるほうが好ましい。
（ボール形成性）
　次に、本実施形態に係るボンディングワイヤのボール形成性の改善に対する有効性を説明する。本実施形態に係るボンディングワイヤは、芯材と被覆層の間にＧａ，Ｉｎ及びＳｎの１種以上と、Ｐｄ及びＰｔの１種以上と、Ａｇとを含み、残部が不可避不純物からなる合金層を有することにより、直径が小さいボール（以下、小径ボールという）において、真球性が低いボール（以下、異形ボールという）の発生を抑制することができる。小径ボールとは、直径がボンディングワイヤの線径の１．５～１．７倍のボールと定義する。通常、ボールの直径はボンディングワイヤの線径の１．７～２．５倍の範囲である。
　Ａｇボンディングワイヤのボールを形成する際には、アーク放電を安定させるために、窒素あるいは窒素に水素を３～５％添加した混合ガスを吹き付ける。異形は、ボンディングワイヤの表面がアーク放電によって溶融する際に、表面と内部が溶けるタイミングがずれるため発生する。この課題に対して、芯材と被覆層の間にＧａ，Ｉｎ及びＳｎの１種以上と、Ｐｄ及びＰｔの１種以上と、Ａｇとを含み、残部が不可避不純物からなる合金層を有することにより、異形ボールの発生を抑制できる。これは前記合金層を形成することで、ボンディングワイヤの表面から内部にかけて、融点の勾配が連続的に変化することにより、ワイヤの表面から内部にかけて連続的に溶融させることができるためである。吹き付けるガスに窒素ガスを用いた場合、ガスを使用しなかった場合においても異形ボールの発生を抑制することができる。
　前記合金層は、ボンディングワイヤの表面と中心を直線で結んだ領域のうち、Ｐｄ及びＰｔの総計濃度が５～５０ａｔ．％の領域でかつＧａ，Ｉｎ及びＳｎの濃度がボンディングワイヤの中心部分の濃度よりも高い領域と定義する。前記合金層の厚さが被覆層の厚さに対して、１０～６０％であれば、小径ボールにおいて、アーク放電が安定し、ボールの直径のばらつきを抑制することができるため、好ましい。合金層の組成は、被覆層の組成と同様の方法で測定することができる。具体的な方法は、まずボンディングワイヤの表面からスパッタ等で削りながら濃度測定を行い、深さ方向の濃度プロファイルを取得する。濃度プロファイルの対象とする元素は、Ａｇ，Ｇａ，Ｉｎ，Ｓｎ，Ｐｄ及びＰｔとする。次に得られた濃度プロファイルをもとにＰｄ及びＰｔの総計濃度を算出する。合金層の厚さおよび組成は、１か所の測定値でも良いが、２か所以上の測定値の平均値を用いるほうが好ましい。
（キャピラリ寿命）
　次に、本実施形態に係るボンディングワイヤのキャピラリ寿命に対する有効性を説明する。本実施形態に係るボンディングワイヤは、被覆層の最表面にＡｕを１５～５０ａｔ．％以上含むＡｕ含有領域を有することでボンディングワイヤの表面とキャピラリの摩擦を低減し、キャピラリの使用寿命を改善するができる。これはＡｕが被覆層のＰｄ及びＰｔよりも軟質であり延性にも優れることによる。Ａｕ含有領域の厚さが、０．００１～０．０５０μｍであれば、優れた改善効果が得られるため、有効である。Ａｕの濃度が１５ａｔ．％未満あるいは該厚さが０．０５０μｍ未満では、改善効果が不十分である。Ａｕの濃度が５０ａｔ．％超又はＡｕ含有領域の厚さが０．０５０μｍ超では、Ａｕがキャピラリに詰まることがあり、キャピラリ寿命の改善効果は得られない。Ａｕ含有領域の厚さおよび組成は、オージェ電子分光分析装置を用いて測定することができる。具体的な方法は被覆層の組成と同様の方法で測定することができる。
（ボール圧着形状）
　次に、本実施形態に係るボンディングワイヤのボール圧着形状に対する有効性を説明する。メモリパッケージの小型化に伴い、半導体素子の電極間の距離が短くなっている。従来、Ａｇボンディングワイヤのボール接合時には、ボールが超音波の印加方向に優先的に変形するため、隣接する電極に接触し短絡を引起こすことがあった。したがって、ボール接合においてボール変形の異方性を低減し、真円に近いつぶれ形状に制御する必要がある。ボール変形の異方性は結晶粒径が大きいほど増加する傾向があるため、ボール部の結晶粒を微細化する技術が有効である。本実施形態に係るボンディングワイヤは、前記芯材にさらにＣｕ，Ｐｄ，Ｐｔ及びＡｕの１種以上を総計で０．１～０．７ａｔ．％含むことで、ボールの結晶粒を微細化し、より真円に近いボール形状を得ることが可能となる。ここで、上記濃度が０．１ａｔ．％未満では、ボール形状の改善効果は得られない。また、上記濃度が０．７ａｔ．％超では、ボールが硬質化し、接合時のチップ損傷が問題となるため実用に適さない。ボンディングワイヤの芯材に含まれるＰｄ，Ｐｔ及びＡｕの濃度は、芯材の部分をＡＥＳ、ＳＥＭもしくはＴＥＭに備え付けたＥＤＸ装置などを用いて測定することができる。芯材を露出させる方法は、ボンディングワイヤを樹脂に埋込み、機械研磨によって断面を露出させる方法やボンディングワイヤの表面をＡｒイオンビームによって削る方法が使用できる。
（ループ形成性）
　次に、本実施形態に係るボンディングワイヤのループ形成性に対する有効性を説明する。本実施形態に係る芯材と被覆層と合金層を含むボンディングワイヤは、ボンディングワイヤにＢ，Ｐ，Ｃａ，Ｌａ及びＳｅの１種以上を総計で８０～５００ａｔ．ｐｐｍ含むことにより、ループの直進性を改善することができる。近年のメモリパッケージの小型化に伴い、リード側の電極の狭ピッチ化し、ボンディングワイヤ同士の接合間隔も狭くなっている。ボンディングワイヤには、ワイヤ同士の接触による短絡を防ぐため、高い直進性が求められている。本実施形態に係るボンディングワイヤは、Ｂ，Ｐ，Ｃａ，Ｌａ及びＳｅの１種以上を総計で８０～５００ａｔ．ｐｐｍ含むことで曲げ強度を向上させることが可能となり、高いループの直進性が得られる。ここで、上記濃度が８０ａｔ．ｐｐｍ未満では、ループの直進性の改善効果は得られない。また、上記濃度が５００ａｔ．ｐｐｍ超では、ボールが硬質化し、接合時のチップ損傷が問題となるため実用に適さない。ボンディングワイヤに含まれるＢ，Ｐ，Ｃａ，Ｌａ及びＳｅの濃度は、誘導結合プラズマ（ＩＣＰ：Inductively Coupled Plasma）発光分光分析装置を用いて測定することができる。
（製造方法）
　次に、上記実施形態に係るボンディングワイヤの製造方法を説明する。
（芯材）
　ボンディングワイヤの芯材に用いるＡｇ合金は、原料を同時に溶解することによって製造できる。溶解には、アーク加熱炉、高周波加熱炉、抵抗加熱炉等を利用することができる。その手順は、直径がφ３～６ｍｍの円柱型に加工したカーボンるつぼに原料を装填し、真空中もしくはＮ２及びＡｒガス等の不活性雰囲気で１１００～１５００℃まで加熱して溶解させた後、炉冷もしくは空冷を行うことで完了する。得られたＡｇ合金は、ダイスを用いた引抜加工を繰り返し行うことで最終線径まで成形する。
（被覆層）
　被覆層を形成する方法は、最終線径のＡｇ合金線に被覆層となる皮膜を形成する手法、あるいは、中間線径の太いＡｇ合金線に上記皮膜を形成した後に、伸線して最終線径に到達する手法等を用いることができる。前者の最終線径で皮膜を形成する場合には、品質管理が簡便であり、後者の中間線径で皮膜を形成後に伸線を行う場合には、芯材との密着性を向上させるのに有利である。それぞれの製造方法について具体的に説明する。
　Ａｇ合金の表面にＰｄ，Ｐｔの皮膜を形成する方法は、めっき法、蒸着法、溶融法等を用いることができる。めっき法は、電解めっき法、無電解めっき法のどちらでも製造可能である。ストライクめっき、フラッシュめっきと呼ばれる電解めっきでは、めっき速度が速く、下地との密着性も良好である。無電解メッキに使用する溶液は、置換型と還元型に分類され、膜厚が薄い場合には置換型めっきのみでも十分であるが、厚い膜を形成する場合には置換型めっきの後に還元型めっきを段階的に施すことが有効である。蒸着法では、スパッタ法、イオンプレーティング法、真空蒸着等の物理吸着と、プラズマＣＶＤ（化学蒸着：Chemical Vapor Deposition）等の化学吸着を利用することができる。いずれも乾式であるため、被覆層形成後の洗浄が不要で、洗浄時の表面汚染等の心配がない。
　最終線径のＡｇ合金線に皮膜を形成する手法について説明する。溶解によって得られたφ３～６ｍｍの円柱状のＡｇ合金に対して、引抜加工を行ってφ０．９～１．２ｍｍまで成形する。その後、ダイスを用いて連続的に伸線加工することによって、φ３００～６００μｍのワイヤを作製する。このとき、塩酸等を用いた酸洗処理を行うと、表面の酸化物や硫化物等が除去でき品質の向上に有効である。その後、伸線加工を繰返して最終線径のφ１５～２５μｍまで成形する。伸線には市販の潤滑液を用い、伸線時のワイヤ送り速度は３００～１０００ｍ／分とする。
　最終線径のＡｇ合金線に皮膜を形成する場合、Ａｇ合金線の表面に０．０１０～０．１４０μｍのＰｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇを含む皮膜を形成した後、最終熱処理を行う方法等が有効である。最終熱処理はワイヤを連続的に掃引しながら行うと、高い生産性が得られるため、有効である。最終熱処理条件は、被覆層の厚さを適正な範囲に制御できる条件に設定する必要がある。具体的には最終熱処理温度は２００～６００℃とし、熱処理時間は０．２～１．０秒の範囲に制御することが有効である。この最終熱処理により、Ａｇ合金線とＡｇ合金線の表面に形成した皮膜の元素が相互拡散して、被覆層の厚さを０．００５～０．０７０μｍの範囲に制御することが可能である。また、この最終熱処理条件を用いれば、加工硬化したＡｇ合金を再結晶させることができるため、ボンディングワイヤに要求される軟質化も同時に実現できる。
　次に、中間線径の太いＡｇ合金線に皮膜を形成した後に、伸線して最終線径に到達する手法について説明する。溶解によって得られたφ３～６ｍｍの円柱状のＡｇ合金に対して、引抜加工を行ってφ０．９～１．２ｍｍまで成形する。その後、ダイスを用いて連続的に伸線加工することによって、φ３００～６００μｍのワイヤを作製する。φ３００～６００μｍのＡｇ合金線において、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇを含む皮膜を形成する。このとき皮膜の厚さは、皮膜を形成する時点におけるＡｇ合金線の線径とボンディングワイヤの最終線径によって変える必要がある。具体的には、最終線径において皮膜の厚さが０．０１０～０．１４０μｍとなるように調整すれば良い。ここで、皮膜を形成する時点におけるＡｇ合金線の線径をＲ１、皮膜の厚さをｒ１、最終線径におけるＡｇ合金線の線径をＲ２とすると、最終線径における皮膜の厚さｒ２は次式（１）～（３）で表わされる。それぞれの単位はμｍとする。
ｒ２＝（Ｒ２／Ｒ１）ｒ１…（１）
０．０１０≦ｒ２＜０．１４０…（２）
（１）、（２）式より
０．０１０≦（Ｒ２／Ｒ１）ｒ１＜０．１４０…（３）
　最終線径におけるＡｇ合金線の線径は、皮膜の厚さに対して十分大きいため、ボンディングワイヤの最終線径をＲとすれば、Ｒ２≒Ｒと近似できる。したがって、式（３）は次式（４）で表わすことができる。
０．０１０≦（Ｒ／Ｒ１）ｒ１＜０．１４０…（４）
　式（４）より、皮膜を形成する線径と最終線径を決めれば、φ３００～６００μｍの線径において形成させる皮膜の厚さを決定することが可能である。その後、伸線加工を繰返して最終線径のφ１５～２５μｍまで成形し、最終熱処理を行う。最終熱処理はワイヤを連続的に掃引しながら行うと、高い生産性が得られるため、有効である。最終熱処理条件は、被覆層の厚さを適正な範囲に制御できる条件に設定する必要がある。具体的には最終熱処理温度は２００～６００℃とし、熱処理時間は０．２～１．０秒の範囲に制御することが有効である。Ａｇ合金線とＡｇ合金線の表面に形成した皮膜の元素が相互拡散して、被覆層の厚さを０．００５～０．０７０μｍの範囲に制御することが可能である。
（合金層）
　芯材と被覆層の間に合金層を形成するためには、最終熱処理後に追加熱処理をすることが有効である。これによりＡｇ合金に含まれるＧａ，Ｉｎ及びＳｎの被覆層側への拡散が促進される。追加熱処理条件は、６００～７００℃とし、合金層の厚さを制御する場合には、熱処理時間を変えることが有効である。上記熱処理温度範囲で、熱処理時間を０．２～０．５秒とすることで、前記合金層の厚さが被覆層の厚さに対して１０～６０％の範囲にすることができる。追加熱処理の方法はワイヤを連続的に掃引しながら行う方法を用いることができる。
（Ａｕ含有領域）
　被覆層の最表面にＡｕ含有領域を設ける場合も、被覆層の形成方法と同様の方法を利用することができる。またその厚さや組成の制御も被覆層の形成方法と同様の方法を用いることができる。すなわち、中間線径まで加工した段階で被覆層を形成した後にＡｕ皮膜を形成する方法、最終線径まで加工した段階で被覆層を形成した後にＡｕ皮膜を形成する方法が利用できる。例えば、最終線径のＡｇ合金線に被覆層を形成した後にＡｕ皮膜を形成する場合、０．０００８～０．０４μｍのＡｕ皮膜を形成した後、最終熱処理を行う方法等が有効である。
　以下、実施例について詳細に説明する。上記製造方法に従い、ボンディングワイヤを作製した。原材料となるＡｇは純度が９９．９９ａｔ．％以上で、残部が不可避不純物からなるものを用いた。Ｇａ，Ｉｎ，Ｓｎ，Ｃｕ，Ｐｄ，Ｐｔ，Ａｕ，Ｂ，Ｐ，Ｃａ，Ｌａ及びＳｅは、純度が９９．９ａｔ．％以上で残部が不可避不純物からなるものを用いた。ここで、１０ａｔ．ｐｐｍ以下の濃度の元素は不可避不純物とする。中間線径の太いＡｇ合金線にＰｄ，Ｐｔの皮膜を形成した後に、伸線して最終線径に到達する手法を用いて、被覆層を形成した。Ａｇ合金の表面にＰｄ，Ｐｔの皮膜を形成する方法は、電解めっき法を用いた。ワイヤを連続的に掃引しながらめっき液に浸漬させた。被覆層の最表面にＡｕ含有領域を形成する方法も、電解めっき法を用いた。この場合もワイヤを連続的に掃引しながらめっき液に浸漬させた。
（ボール接合信頼性の評価）
　ボール接合信頼性は、温度が１３０℃、相対湿度が８５％、バイアス電圧が３．６Ｖの条件で高温高湿試験後の接合寿命を評価した。サンプルは、市販の接合装置によって半導体素子にボンディングワイヤを接合し、エポキシ系の封止樹脂でモールドして作製した。半導体素子の電極には厚さ１μｍのＡｌ電極を用いた。接合寿命は、２４時間毎にボール接合部のシェア試験を実施し、シェア強度の値が初期に得られたシェア強度の１／３となる時間とした。高温高湿試験後のシェア試験は、酸処理によって樹脂を除去して、ボール接合部を露出させてから行った。シェア試験機は市販の微小強度試験機を用いた。シェア強度の値は無作為に選択したボール接合部の１０か所の測定値の平均値を用いた。上記の評価において、接合寿命が１２０時間未満であれば実用上問題があると判断し△印、１２０時間以上１６８時間未満であれば、実用上問題ないと判断し○印、１６８時間以上であれば優れていると判断し◎印と表記した。
（ウェッジ接合性の評価）
　複数の半導体素子が積層された構造を有するデバイスに対して、線径がφ１５～２０μｍのボンディングワイヤを用いてウェッジ接合を行った。接合時の温度は１７５℃、１６０℃、１５０℃とし、リード側の電極材料はＡｇを用いた。接合条件は、通常の条件よりも超音波の出力を下げた低エネルギー条件とした。接合後のサンプルに対して、１０００箇所のウェッジ接合部の観察を行い、不良が発生したか否かで合否を判定した。ここで、不良とはボンディングワイヤが電極から剥離した状態と定義する。１７５℃でのウェッジ接合において不良が発生すれば実用上問題があると判断し△印、不良が発生しなければ実用上問題がないと判断し○印と表記した。１６０℃でのウェッジ接合において不良が発生しなければ優れていると判断し◎印、１５０℃でのウェッジ接合において不良が発生しなければ、特に優れていると判断し☆印と表記した。
（ボール形成性の評価）
　ボール形成性は、市販の接合装置を用いてボールを形成し、その外観観察を行い評価した。ボールの形成条件は、Ｎ２＋５％Ｈ２ガスとした。ボールの直径はワイヤ線径の１．５倍とした。ボールの外観観察には光学顕微鏡を用いた。ボール形成性は、上記の評価方法に基づいて、無作為に選んだ２００個のボールのうち真球性が劣るボールの数によって判定した。真球性が劣るボールの数が３，４個であれば実用上問題がないと判断し○印、２個以下であれば優れていると判断し◎印と表記した。
（キャピラリ寿命の評価）
　キャピラリ寿命の評価は、市販の接合装置を用いてボンディングワイヤを接合後、キャピラリの観察を行い、摩耗の有無によって判定した。ボンディングワイヤの線径は２０μｍ、接合の試行回数は５０００回とした。キャピラリの先端の穴をＳＥＭを用いて観察し、摩耗によって真円形状からずれていても問題なく使用可能であれば実用上問題がないと判断し○印、真円形状を維持していれば優れていると判断し◎印と表記した。
（ボール圧着形状の評価）
　ボールの圧着形状は、Ｓｉ基板に厚さ１．０μｍのＡｌ膜を成膜した電極に、市販のワイヤボンダーを用いてボール接合を行い、直上から光学顕微鏡で観察し、評価した。ボールのつぶれ形状の判定は、つぶれ形状が円形に近いのであれば良好と判定し、楕円形や花弁状の形状であれば不良と判定した。１００箇所のボール接合部を光学顕微鏡で観察し、不良が１～４個であれば実用上問題がないと判断し○印、不良が全く発生しなければ特に優れていると判断し◎印と表記した。
（ループ形成性の評価）
　ループ形成性は、市販のワイヤボンダーを用いて接合を行い、ループ部分を観察してループ同士が接触しているか否かを評価した。ループ長さは２．５ｍｍ、ループ高さは０．２ｍｍとした。接合した２００本のボンディングワイヤのループ部分を光学顕微鏡で観察し、隣接するボンディングワイヤが接触した箇所があれば不良と判定した。不良が１～４箇所であれば実用上問題がないと判断し○印、不良が全く発生しなければ特に優れていると判断し◎印と表記した。
　表１は本発明に係るボンディングワイヤの組成などの特徴とそれぞれのボンディングワイヤの各評価結果を記載した実施例を示している。表２は比較例を示している。
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000005
　第１請求項に係るボンディングワイヤはＮｏ．１、２、１７～２４、４５、５０～５２、５６、６２～６６、７０～７２、７６～８４である。メモリ用ボンディングワイヤに要求されるボール接合信頼性とウェッジ接合性を満足できることを確認した。
　実施例１～８４に係るボンディングワイヤは、Ｇａ，Ｉｎ及びＳｎの１種以上を総計で０．１～３．０ａｔ．％含み、残部がＡｇおよび不可避不純物からなる芯材と、前記芯材の表面に形成された、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇ、を含み、残部が不可避不純物からなる被覆層とを備え、前記被覆層の厚さが０．００５～０．０７０μｍであることから、ボール接合信頼性とウェッジ接合性を同時に満足することが確認された。これに対し比較例のＮｏ．１～１４に示すように、Ｇａ，Ｉｎ，Ｓｎの濃度が上記の範囲外、又は被覆層の厚さが上記の範囲外の場合には、ボール接合信頼性とウェッジ接合性を同時に満足することができないことを確認した。
　実施例３～６、８、１０～１５、１７、１９、２０、２２～３２、３５、３６、３８～６５、６７～８０、８２～８４に係るボンディングワイヤは、合金層の厚さが、前記被覆層の厚さに対して、１０～６０％であることから、ボール形成性が優れることが確認された。
　実施例２６、２７、３０、３１に係るボンディングワイヤは、Ａｕを１５～５０ａｔ．％含むＡｕ含有領域の厚さが０．００１～０．０５０μｍであることから、キャピラリ寿命を改善できることが確認された。
　実施例３３～４４、４６～５０、５７～６０に係るボンディングワイヤは、芯材にＣｕ，Ｐｄ，Ｐｔ及びＡｕの１種以上を総計で０．１～０．７ａｔ．％含むことから、ボール圧着形状の評価が特に優れていることが確認された。
　実施例３、４、９～１６、３４～３８、４８、４９、５４、５５、６８、６９、７４、７５に係るボンディングワイヤは、ワイヤ全体として、Ｂ，Ｐ，Ｃａ，Ｌａ，及びＳｅの１種以上を総計で８０～５００ａｔ．ｐｐｍ含むことから、ループ形成性の評価が特に優れていることが確認された。

 

Claims (6)

  1. Ｇａ，Ｉｎ及びＳｎの１種以上を総計で０．１～３．０ａｔ．％含み、残部がＡｇおよび不可避不純物からなる芯材と、
    前記芯材の表面に形成された、Ｐｄ及びＰｔの１種以上、又は、Ｐｄ及びＰｔの１種以上とＡｇ、を含み、残部が不可避不純物からなる被覆層と
    を備え、前記被覆層の厚さが０．００５～０．０７０μｍであることを特徴とする半導体装置用ボンディングワイヤ。
  2. 前記芯材と前記被覆層の間に、Ｇａ，Ｉｎ及びＳｎの１種以上と、Ｐｄ及びＰｔの１種以上と、Ａｇとを含み、残部が不可避不純物からなる合金層を備えることを特徴とする請求項１記載の半導体装置用ボンディングワイヤ。
  3. 前記合金層の厚さが、前記被覆層の厚さに対して、１０～６０％であることを特徴とする請求項２記載の半導体装置用ボンディングワイヤ。
  4. 前記被覆層の最表面にＡｕを１５～５０ａｔ．％含むＡｕ含有領域を有し、前記Ａｕ含有領域の厚さが０．００１～０．０５０μｍであることを特徴とする請求項３記載の半導体装置用ボンディングワイヤ。
  5. さらに前記芯材にＣｕ，Ｐｄ，Ｐｔ及びＡｕの１種以上を総計で０．１～０．７ａｔ．％含むことを特徴とする請求項１～３のいずれか１項記載の半導体装置用ボンディングワイヤ。
  6. さらにワイヤ全体として、Ｂ，Ｐ，Ｃａ，Ｌａ，及びＳｅの１種以上を総計で８０～５００ａｔ．ｐｐｍ含むことを特徴とする請求項１～３、及び５のいずれか１項記載の半導体装置用ボンディングワイヤ。

     
PCT/JP2015/084823 2014-12-17 2015-12-11 半導体装置用ボンディングワイヤ WO2016098707A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP15869912.4A EP3236490B1 (en) 2014-12-17 2015-12-11 Bonding wire for semiconductor device
SG11201704914QA SG11201704914QA (en) 2014-12-17 2015-12-11 Bonding wire for semiconductor device
US15/537,390 US10840208B2 (en) 2014-12-17 2015-12-11 Bonding wire for semiconductor device
CN201580068575.XA CN107004613B (zh) 2014-12-17 2015-12-11 半导体装置用接合线
KR1020177019312A KR102459273B1 (ko) 2014-12-17 2015-12-11 반도체 장치용 본딩 와이어

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014255111A JP6516465B2 (ja) 2014-12-17 2014-12-17 半導体装置用ボンディングワイヤ
JP2014-255111 2014-12-17

Publications (1)

Publication Number Publication Date
WO2016098707A1 true WO2016098707A1 (ja) 2016-06-23

Family

ID=56126597

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/084823 WO2016098707A1 (ja) 2014-12-17 2015-12-11 半導体装置用ボンディングワイヤ

Country Status (7)

Country Link
US (1) US10840208B2 (ja)
EP (1) EP3236490B1 (ja)
JP (1) JP6516465B2 (ja)
KR (1) KR102459273B1 (ja)
CN (1) CN107004613B (ja)
SG (1) SG11201704914QA (ja)
WO (1) WO2016098707A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7142761B1 (ja) 2021-12-13 2022-09-27 タツタ電線株式会社 ボンディングワイヤ及び半導体装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6207793B1 (ja) * 2016-04-28 2017-10-04 日鉄住金マイクロメタル株式会社 半導体装置用ボンディングワイヤ
KR102167478B1 (ko) 2017-08-09 2020-10-19 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 반도체 장치용 Cu 합금 본딩 와이어
JP6869920B2 (ja) 2018-04-02 2021-05-12 田中電子工業株式会社 ボールボンディング用貴金属被覆銀ワイヤおよびその製造方法、ならびにボールボンディング用貴金属被覆銀ワイヤを使用した半導体装置およびその製造方法
JP6869919B2 (ja) * 2018-04-02 2021-05-12 田中電子工業株式会社 ボールボンディング用貴金属被覆銀ワイヤおよびその製造方法、ならびにボールボンディング用貴金属被覆銀ワイヤを使用した半導体装置およびその製造方法
JP6807426B2 (ja) 2019-04-12 2021-01-06 田中電子工業株式会社 金被覆銀ボンディングワイヤとその製造方法、及び半導体装置とその製造方法
EP3993017A4 (en) * 2019-11-22 2023-07-12 NIPPON STEEL Chemical & Material Co., Ltd. AG ALLOY CONNECTOR WIRE FOR SEMICONDUCTOR DEVICE
JPWO2021205931A1 (ja) * 2020-04-07 2021-10-14
CN112207481A (zh) * 2020-09-09 2021-01-12 中山大学 一种低温无压烧结微米银焊膏及其制备方法和应用
CN112687649B (zh) * 2020-12-25 2024-03-12 中国科学院宁波材料技术与工程研究所 键合线表面的耐腐蚀抗氧化涂层及其制备方法与应用
TWI778583B (zh) 2021-04-16 2022-09-21 樂金股份有限公司 銀合金線材

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001176912A (ja) * 1999-12-16 2001-06-29 Noge Denki Kogyo:Kk 金被覆した銀線ボンディングワイヤ
JP2007123597A (ja) * 2005-10-28 2007-05-17 Nippon Steel Materials Co Ltd 半導体装置用ボンディングワイヤ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0479245A (ja) * 1990-07-20 1992-03-12 Tanaka Denshi Kogyo Kk 半導体素子用ボンディング線
JP2003045909A (ja) 2001-07-31 2003-02-14 Tanaka Electronics Ind Co Ltd 電子回路接続用ボンディングワイヤ
US7524351B2 (en) * 2004-09-30 2009-04-28 Intel Corporation Nano-sized metals and alloys, and methods of assembling packages containing same
KR101001700B1 (ko) 2007-03-30 2010-12-15 엠케이전자 주식회사 반도체 패키지용 은합금 와이어
US8815019B2 (en) * 2009-03-17 2014-08-26 Nippon Steel & Sumikin Materials., Ltd. Bonding wire for semiconductor
KR101707244B1 (ko) * 2009-07-30 2017-02-15 신닛테츠스미킹 마테리알즈 가부시키가이샤 반도체용 본딩 와이어
JP2013033811A (ja) 2011-08-01 2013-02-14 Tatsuta Electric Wire & Cable Co Ltd ボールボンディングワイヤ
US20150322586A1 (en) * 2011-11-26 2015-11-12 Microbonds Inc. Bonding wire and process for manufacturing a bonding wire
US8940403B2 (en) 2012-01-02 2015-01-27 Wire Technology Co., Ltd. Alloy wire and methods for manufacturing the same
KR101513493B1 (ko) * 2013-02-19 2015-04-20 엠케이전자 주식회사 은 합금 본딩 와이어
TWI536397B (zh) * 2013-02-21 2016-06-01 Silver alloy soldered wire for semiconductor packages

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001176912A (ja) * 1999-12-16 2001-06-29 Noge Denki Kogyo:Kk 金被覆した銀線ボンディングワイヤ
JP2007123597A (ja) * 2005-10-28 2007-05-17 Nippon Steel Materials Co Ltd 半導体装置用ボンディングワイヤ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7142761B1 (ja) 2021-12-13 2022-09-27 タツタ電線株式会社 ボンディングワイヤ及び半導体装置
WO2023112444A1 (ja) * 2021-12-13 2023-06-22 タツタ電線株式会社 ボンディングワイヤ及び半導体装置
JP2023087547A (ja) * 2021-12-13 2023-06-23 タツタ電線株式会社 ボンディングワイヤ及び半導体装置

Also Published As

Publication number Publication date
US10840208B2 (en) 2020-11-17
KR102459273B1 (ko) 2022-10-25
CN107004613A (zh) 2017-08-01
JP6516465B2 (ja) 2019-05-22
EP3236490A1 (en) 2017-10-25
CN107004613B (zh) 2020-05-08
EP3236490B1 (en) 2023-10-11
SG11201704914QA (en) 2017-07-28
EP3236490A4 (en) 2018-08-29
US20170365576A1 (en) 2017-12-21
JP2016115875A (ja) 2016-06-23
KR20170095317A (ko) 2017-08-22

Similar Documents

Publication Publication Date Title
JP6516465B2 (ja) 半導体装置用ボンディングワイヤ
JP6420015B2 (ja) 半導体装置用ボンディングワイヤ
JP6167227B2 (ja) 半導体装置用ボンディングワイヤ
JP5839763B1 (ja) 半導体装置用ボンディングワイヤ
JP6400155B2 (ja) 半導体装置用ボンディングワイヤ
KR102167478B1 (ko) 반도체 장치용 Cu 합금 본딩 와이어
WO2020059856A1 (ja) 半導体装置用Ｃｕ合金ボンディングワイヤ
JP2021114609A (ja) 半導体装置用ボンディングワイヤ
TW201921531A (zh) 半導體裝置用銅合金接合導線
JP2019071423A5 (ja)
JP6207793B1 (ja) 半導体装置用ボンディングワイヤ
JP5937770B1 (ja) 半導体装置用ボンディングワイヤ
WO2018155283A1 (ja) 半導体装置用ボンディングワイヤ
JP6651065B1 (ja) 半導体装置用Ｃｕ合金ボンディングワイヤ
WO2021166081A1 (ja) 半導体装置用Ｃｕ合金ボンディングワイヤ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15869912

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 15537390

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 11201704914Q

Country of ref document: SG

REEP Request for entry into the european phase

Ref document number: 2015869912

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 20177019312

Country of ref document: KR

Kind code of ref document: A