WO2016084495A1 - ノボラック型フェノール樹脂、その製造方法、感光性組成物、レジスト材料、及び塗膜 - Google Patents
ノボラック型フェノール樹脂、その製造方法、感光性組成物、レジスト材料、及び塗膜 Download PDFInfo
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- WO2016084495A1 WO2016084495A1 PCT/JP2015/078595 JP2015078595W WO2016084495A1 WO 2016084495 A1 WO2016084495 A1 WO 2016084495A1 JP 2015078595 W JP2015078595 W JP 2015078595W WO 2016084495 A1 WO2016084495 A1 WO 2016084495A1
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- 0 CC(*)(*)C(*)c1c(*)c(C(c(cc2)ccc2O)c(cc2*)c(*)c(C)c2O)cc(*)c1O Chemical compound CC(*)(*)C(*)c1c(*)c(C(c(cc2)ccc2O)c(cc2*)c(*)c(C)c2O)cc(*)c1O 0.000 description 6
- COACVOMWZNDLKM-UHFFFAOYSA-N C1C(C2)=CCC2[CH+]1 Chemical compound C1C(C2)=CCC2[CH+]1 COACVOMWZNDLKM-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
- C08G8/20—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with polyhydric phenols
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
- C08L61/12—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols with polyhydric phenols
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D161/00—Coating compositions based on condensation polymers of aldehydes or ketones; Coating compositions based on derivatives of such polymers
- C09D161/04—Condensation polymers of aldehydes or ketones with phenols only
- C09D161/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
- C09D161/12—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols with polyhydric phenols
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/02—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group
- C08L2205/025—Polymer mixtures characterised by other features containing two or more polymers of the same C08L -group containing two or more polymers of the same hierarchy C08L, and differing only in parameters such as density, comonomer content, molecular weight, structure
Definitions
- the present invention is a photosensitive composition having excellent heat resistance, low absorbance with respect to the exposure wavelength of g-line, h-line, and i-line, and having sufficient sensitivity even when the thickness of the resist coating film is increased,
- the present invention relates to a resist material, a coating film thereof, and a novolac type phenol resin suitable for these uses.
- the positive photoresist composition described in Patent Document 1 has been developed for the purpose of improving developability such as sensitivity.
- developability such as sensitivity.
- higher integration of semiconductors has been increasing, and there is a tendency for patterns to become finer, and higher sensitivity has been demanded.
- the positive photoresist composition described in Patent Document 1 is compatible with thinning. There is a problem that sufficient sensitivity cannot be obtained.
- the coating film of the positive photoresist composition is also required to have high heat resistance, but the positive photoresist composition described in Patent Document 1 is There was a problem that was not enough heat resistance.
- the photosensitivity of the novolak resin which is an alkali-soluble resin
- the photosensitivity of the novolak resin can be increased by improving the alkali solubility, but when the alkali solubility is improved, the heat resistance tends to decrease and the heat resistance is improved. There is a problem that the photosensitivity decreases. Thus, it has been difficult to achieve both sensitivity and heat resistance at a high level in the novolac resin.
- a novolak-type phenolic resin for photoresists using a phenolic trinuclear compound obtained by condensing xylenol and a phenolic hydroxyl group-containing aromatic aldehyde as a raw material has been proposed. (For example, see Patent Documents 3 and 4).
- the novolak-type phenolic resin described in Patent Document 3 or 4 combines both sensitivity and heat resistance at a high level as compared with the conventional one, but absorbs i-line (365 nm) used during photolithography exposure. Have. For this reason, the novolak type phenol resin has a problem that the sensitivity is lowered particularly when the thickness of the resist coating film is increased.
- the problems to be solved by the present invention are excellent in heat resistance, low in absorbance to the exposure wavelength of g-line, h-line, and i-line, and sufficient sensitivity even when the thickness of the resist film is increased. It is providing the novolak-type phenolic resin suitable for these uses, and its manufacturing method.
- a phenolic trinuclear compound obtained by a condensation reaction between a dialkyl-substituted phenol and a hydroxyl group-containing aromatic aldehyde Specific molar ratio of a phenolic trinuclear compound obtained by a condensation reaction of a dialkyl-substituted phenol having an alkyl group at a position, 3, 4 or 3, 5 position and an aromatic aldehyde having no hydroxyl group
- the present invention relates to a phenol trinuclear compound (A1) obtained by a condensation reaction of a dialkyl-substituted phenol and a hydroxyl group-containing aromatic aldehyde, and the 2,3-position, 2,5-position, 3,4-position, or 3 , A phenol trinuclear compound (A2) obtained by a condensation reaction of a dialkyl-substituted phenol having an alkyl group at the 5-position and an aromatic aldehyde having no hydroxyl group, and the phenol trinuclear compound A phenolic trinuclear compound (A) having a molar ratio of (A1) to the phenolic trinuclear compound (A2) of 20:80 to 90:10 and an aldehyde (B) in the presence of an acid catalyst.
- the present invention relates to a novolak-type phenolic resin obtained by reaction.
- the present invention also relates to a method for producing the novolac type phenol resin.
- the present invention further relates to a photosensitive composition containing the novolak type phenol resin, a resist material comprising the photosensitive composition, and a coating film comprising the resist material.
- the novolak-type phenolic resin, the photosensitive composition containing the novolak-type phenolic resin, and the resist material comprising the novolak-type phenolic resin have high heat resistance and sensitivity, and also have g-line, h-line, and i-line exposure wavelengths. Absorbance is low. For this reason, by using the resist material, it is possible to provide a resist coating film that can form a pattern with high sensitivity even when the film thickness is large.
- FIG. 2 is a GPC chart of a phenol trinuclear compound (1) obtained in Synthesis Example 1.
- 3 is a 13 C-NMR spectrum chart of the phenolic trinuclear compound (1) obtained in Synthesis Example 1.
- FIG. 6 is a GPC chart of a phenol trinuclear compound (2) obtained in Synthesis Example 2.
- 3 is a chart of 13 C-NMR spectrum of a phenolic trinuclear compound (2) obtained in Synthesis Example 2.
- 6 is a GPC chart of a novolak resin (3-a) obtained in Synthesis Example 3.
- 6 is a GPC chart of a novolak resin (3-b) obtained in Synthesis Example 4.
- 10 is a GPC chart of a novolak resin (3-c) obtained in Synthesis Example 5.
- 3 is a GPC chart of a novolak resin (3-d) obtained in Comparative Synthesis Example 1.
- 6 is a GPC chart of a novolak resin (3-e) obtained in Comparative Synthesis Example 2.
- the novolak-type phenol resin according to the present invention includes a phenolic trinuclear compound (A1) obtained by a condensation reaction of a dialkyl-substituted phenol and a hydroxyl group-containing aromatic aldehyde, and 2,3, 2,5, 3,4.
- A1 phenolic trinuclear compound obtained by a condensation reaction of a dialkyl-substituted phenol and a hydroxyl group-containing aromatic aldehyde, and 2,3, 2,5, 3,4.
- a phenolic trinuclear compound (A2) obtained by a condensation reaction of a dialkyl-substituted phenol having an alkyl group at the 3rd or 5th position and an aromatic aldehyde having no hydroxyl group, and said phenolic A phenol trinuclear compound (A) having a molar ratio of the trinuclear compound (A1) and the phenol trinuclear compound (A2) of 20:80 to 90:10, and an aldehyde (B), It was obtained by reacting under an acid catalyst.
- Phenol-based trinuclear compound (A1) is a trinuclear compound composed of two benzene rings having a phenolic hydroxyl group and a benzene ring having no phenolic hydroxyl group, having absorption at i-line (365 nm).
- the system trinuclear compound (A2) does not absorb the exposure wavelengths of g-line, h-line, and i-line. For this reason, it is obtained by using not only the phenol trinuclear compound (A1) but also the phenol trinuclear compound (A2) as the phenol trinuclear compound (A) to be condensed with the aldehyde (B).
- the absorbance of the novolak-type phenol resin with respect to the exposure wavelength of g-line, h-line, and i-line can be kept low.
- a phenolic trinuclear compound (A2) used as a raw material a condensation reaction with an aromatic aldehyde having an alkyl group at the 2,3-position, 2,5-position, 3,4-position, or 3,5-position
- Sensitivity can be improved without lowering the phenol-based trinuclear compound obtained using only the compound (A1).
- the phenol trinuclear compound (A1) used in the present invention is obtained by a condensation reaction of a dialkyl-substituted phenol and a hydroxyl group-containing aromatic aldehyde.
- the condensation reaction the condensation is performed under a condition in which a difference in reaction activity energy of carbon atoms on the aromatic hydrocarbon group of the dialkyl-substituted phenol (c1) can be utilized.
- the phenol trinuclear compound (A1) can be obtained by polycondensing a dialkyl-substituted phenol (c1) and a hydroxyl group-containing aromatic aldehyde (c2) in the presence of an acid catalyst.
- the dialkyl-substituted phenol (c1) is a compound in which two hydrogen atoms bonded to the benzene ring of phenol are substituted with an alkyl group.
- the phenolic trinuclear compound (A1) becomes a phenolic trinuclear compound from which a novolac-type phenolic resin having an excellent balance between heat resistance and alkali solubility can be obtained.
- the alkyl group include an alkyl group having 1 to 8 carbon atoms which may have a substituent.
- dialkyl-substituted phenol (c1) examples include 2,5-xylenol, 3,5-xylenol, 3,4-xylenol, 2,3-xylenol, 2,4-xylenol, 2,6-xylenol, and the like. It is done. These dialkyl-substituted phenols (c1) can be used alone or in combination of two or more, but preferably only one is used. Of these, 2,5-xylenol is preferred because it becomes a phenolic trinuclear compound from which a novolac-type phenolic resin having an excellent balance between heat resistance and alkali solubility can be obtained.
- the hydroxyl group-containing aromatic aldehyde (c2) is a compound having at least one aldehyde group and at least one hydroxyl group in the aromatic ring.
- the hydroxyl group-containing aromatic aldehyde (c2) include hydroxybenzaldehyde such as salicylaldehyde, m-hydroxybenzaldehyde and p-hydroxybenzaldehyde; dihydroxybenzaldehyde such as 2,4-dihydroxybenzaldehyde and 3,4-dihydroxybenzaldehyde; vanillin And vanillin compounds such as ortho vanillin, isovanillin and ethyl vanillin;
- p-hydroxybenzaldehyde (4-hydroxybenzaldehyde) and 2,4-dihydroxybenzaldehyde are excellent because they are easily available industrially and have a good balance between heat resistance and alkali solubility.
- hydroxyl group-containing aromatic aldehydes (c2) can be used alone or in combination of two or more, but preferably only one is used.
- the dialkyl-substituted phenol (c1) is 2,5.
- a compound that is -xylenol is preferable, and a compound obtained by a condensation reaction between 2,5-xylenol and p-hydroxybenzaldehyde (4-hydroxybenzaldehyde), 2,4-dihydroxybenzaldehyde, or 3,4-dihydroxybenzaldehyde is more preferable. More preferred are compounds obtained by condensation reaction of 2,5-xylenol and p-hydroxybenzaldehyde.
- Examples of the acid catalyst used in the condensation reaction between the dialkyl-substituted phenol (c1) and the hydroxyl group-containing aromatic aldehyde (c2) include, for example, acetic acid, oxalic acid, sulfuric acid, hydrochloric acid, phenolsulfonic acid, paratoluenesulfonic acid, zinc acetate, acetic acid. Manganese etc. are mentioned. These acid catalysts can be used alone or in combination of two or more. Of these acid catalysts, sulfuric acid and paratoluenesulfonic acid are preferred because of their excellent activity. The acid catalyst may be added before the reaction or during the reaction.
- the polycondensation of the dialkyl-substituted phenol (c1) and the hydroxyl group-containing aromatic aldehyde (c2) may be performed in the presence of an organic solvent as necessary.
- organic solvent include monoalcohols such as methanol, ethanol, and propanol; ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,4-butanediol, 1,5-pentanediol, , 6-hexanediol, 1,7-heptanediol, 1,8-octanediol, 1,9-nonanediol, trimethylene glycol, diethylene glycol, polyethylene glycol, glycerin and other polyols; 2-ethoxyethanol, ethylene glycol monomethyl ether , Ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether,
- the reaction temperature for polycondensation of the dialkyl-substituted phenol (c1) and the hydroxyl group-containing aromatic aldehyde (c2) is, for example, 60 to 140 ° C.
- the reaction time is, for example, 0.5 to 100 hours.
- the charging ratio [(c1) / (c2)] of the dialkyl-substituted phenol (c1) and the hydroxyl group-containing aromatic aldehyde (c2) is the removability of the unreacted dialkyl-substituted phenol (c1) and the yield of the product.
- the molar ratio is preferably in the range of 1 / 0.2 to 1 / 0.5, and more preferably in the range of 1 / 0.25 to 1 / 0.45.
- the phenol trinuclear compound (A1) which is the target polycondensate, unreacted substances are present. It may remain. In addition, an undesirable condensate other than the phenolic trinuclear compound (A1) may be generated. Then, before using as a raw material (phenolic trinuclear compound (A)) of the novolak type phenol resin according to the present invention, the phenolic trinuclear compound (A1) is obtained from the reaction solution (condensate) after the polycondensation reaction. Is preferably isolated and purified.
- the purity of the phenolic trinuclear compound (A1) used as the phenolic trinuclear compound (A) is preferably 85% or more, more preferably 90% or more, still more preferably 94% or more, and particularly preferably 98% or more. .
- the purity of a phenol type trinuclear compound can be calculated
- a reaction solution after the polycondensation reaction is performed using a poor solvent (in which the phenol-based trinuclear compound (A1) is insoluble or hardly soluble).
- a poor solvent in which the phenol-based trinuclear compound (A1) is insoluble or hardly soluble.
- Examples of the poor solvent (S1) used in this case include water; monoalcohols such as methanol, ethanol, and propanol; aliphatic hydrocarbons such as n-hexane, n-heptane, n-octane, and cyclohyxane; toluene, xylene And aromatic hydrocarbons.
- water and methanol are preferable because the acid catalyst can be efficiently removed at the same time.
- examples of the solvent (S2) include monoalcohols such as methanol, ethanol, and propanol; ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,4-butanediol, 1,5- Polyols such as pentanediol, 1,6-hexanediol, 1,7-heptanediol, 1,8-octanediol, 1,9-nonanediol, trimethylene glycol, diethylene glycol, polyethylene glycol, glycerin; 2-ethoxyethanol, Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, ethylene glycol monopentyl ether, ethylene glycol dimethyl ether Glycol ethers such as ethylene glycol ethyl methyl ether and ethylene glycol mono
- Examples of the phenol trinuclear compound (A1) include compounds represented by the following general formula (1).
- r represents an integer of 0 to 4, and s represents 1 or 2. However, the sum of r and s is 5 or less.
- R 1 , R 2 , and R 3 each independently represents an alkyl group having 1 to 8 carbon atoms which may have a substituent.
- a plurality of R 1 may be the same or different from each other, and a plurality of R 2 may be the same or different from each other.
- R 3 When a plurality of R 3 are present, they may be the same or different.
- the alkyl group represented by R 1 , R 2 , or R 3 may be linear, branched, or a group having a cyclic structure. Preferably there is.
- the alkyl group for R 1 , R 2 , or R 3 is preferably an alkyl group having 1 to 6 carbon atoms, and more preferably an alkyl group having 1 to 3 carbon atoms.
- the hydrogen atom in the alkyl group of R 1 , R 2 , or R 3 in the general formula (1) may be substituted with a substituent.
- the number of hydrogen atoms that can be substituted is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2.
- each substituent may be the same as or different from each other.
- substituents examples include a hydroxyl group, an alkoxy group having 1 to 6 carbon atoms, an aryl group which may have a substituent, and a halogen atom.
- substituents of the alkyl group examples include a methoxy group, an ethoxy group, a propoxy group, an n-butyloxy group, a t-butyloxy group, a pentyloxy group, and an isoamyloxy group. Hexyloxy group, cyclohexyloxy group and the like.
- examples of the aryl group which may have a substituent include a phenyl group, a naphthyl group, an indenyl group, and a biphenyl group.
- examples of the halogen atom include a fluorine atom, a chlorine atom, and a bromine atom.
- alkyl group represented by R 1 , R 2 or R 3 in the general formula (1) examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a t-butyl group.
- pentyl group isoamyl group, hexyl group, cyclohexyl group, hydroxyethyl group, hydroxypropyl group, fluoromethyl group, methoxyethyl group, ethoxyethyl group, methoxypropyl group, phenylmethyl group, hydroxyphenylmethyl group, dihydroxy Phenylmethyl, tolylmethyl, xylylmethyl, naphthylmethyl, hydroxynaphthylmethyl, dihydroxynaphthylmethyl, phenylethyl, hydroxyphenylethyl, dihydroxyphenylethyl, tolylethyl, xylylethyl, naphthylethyl, hydroxynaphthyl Ethyl group, and dihydroxynaphthyl ethyl.
- R 1 and R 2 are preferably a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a t-butyl group, a pentyl group, an isoamyl group, or a hexyl group, and a methyl group or an ethyl group Is more preferable, and a methyl group is still more preferable.
- R 1 and R 2 in the general formula (1) are preferably the same group. Further, each of R 1 and R 2 are, in the benzene ring of each R 1 and R 2 are bonded, attached to the carbon atom in the same position when viewed from the carbon atom to which phenolic hydroxyl group such as benzene ring has is attached It is preferable. A phenolic hydroxyl group is bonded to each of the benzene ring to which R 1 is bonded and the benzene ring to which R 2 is bonded. The position at which this phenolic hydroxyl group is bonded is also the same in each benzene ring. preferable.
- Examples of the compound represented by the general formula (1) include compounds represented by any one of the following general formulas (1-1) to (1-18).
- R 1 , R 2 , and R 3 are the same as those in the general formula (1)
- r1 represents an integer of 0 to 4
- r2 is 0
- compounds represented by the general formulas (1-1) to (1-18) compounds in which R 1 and R 2 are both methyl groups or both ethyl groups and r1 and r2 are 0 are preferable.
- a compound in which both 1 and R 2 are methyl groups and r 1 and r 2 are 0 is more preferable.
- the phenol-based trinuclear compound (A1) a novolac-type phenol resin capable of obtaining a coating film having heat resistance and high resolution can be obtained. Therefore, the general formulas (1-1), (1-2), ( The compound represented by 1-7), (1-8), (1-13), or (1-14) is preferred, and is represented by the general formula (1-1), (1-7), or (1-13)
- the compound represented by formula (1-1) is more preferred, and the compound represented by formula (1-1) is more preferred.
- the phenol-based trinuclear compound (A2) used in the present invention has a dialkyl-substituted phenol having an alkyl group at the 2,3-position, 2,5-position, 3,4-position, or 3,5-position and a hydroxyl group. It can be obtained by a condensation reaction with an aromatic aldehyde (a hydroxyl group-free aromatic aldehyde).
- dialkyl-substituted phenols represented by any one of the following general formulas (c′1-1) to (c′1-4) and the following general formula: It is obtained by a condensation reaction with a hydroxyl group-free aromatic aldehyde (aromatic aldehyde having no hydroxyl group) (c′2) represented by (c′2).
- R represents an alkyl group having 1 to 8 carbon atoms which may have a substituent.
- a plurality of R may be the same or different from each other, but are preferably the same.
- Examples of R include those similar to the “alkyl group having 1 to 8 carbon atoms which may have a substituent” described for R 1 and R 2 in formula (1).
- R 3 represents an optionally substituted alkyl group having 1 to 8 carbon atoms, and when there are a plurality of R 3 , they may be the same or different. May be. Examples of the alkyl group for R 3 include the same as the “alkyl group having 1 to 8 carbon atoms which may have a substituent” for R 1 and R 2 in the general formula (1). . In general formula (c′2), t represents an integer of 0 to 5.
- the phenolic trinuclear compound (A2) used in the present invention includes one or more dialkyls represented by any one of the general formulas (c′1-1) to (c′1-4). It is preferably a condensate of a substituted phenol and an aromatic aldehyde (benzaldehyde) in which t is 0 among the hydroxyl group-free aromatic aldehyde represented by the general formula (c′2), and the general formula (c ′ More preferably, it is a condensate of one or more dialkyl-substituted phenols represented by 1-2) and benzaldehyde, and one kind of dialkyl represented by the general formula (c′1-2) A condensate of a substituted phenol and benzaldehyde is more preferable, and a compound obtained by a condensation reaction of 2,5-xylenol and benzaldehyde is particularly preferable.
- the condensation reaction between one or more dialkyl-substituted phenols (c′1) and a hydroxyl-free aromatic aldehyde (c′2) is obtained by reacting carbon on the aromatic hydrocarbon group of the dialkyl-substituted phenol (c′1).
- the reaction is performed under conditions where the difference in reaction reaction energy of atoms can be utilized.
- the phenol trinuclear compound (A2) is obtained by polycondensing a dialkyl-substituted phenol (c′1) and a hydroxyl group-free aromatic aldehyde (c′2) in the presence of an acid catalyst. can get.
- the phenolic trinuclear compound (A1) obtained by the polymerization reaction is used after the polycondensation reaction before being used as a raw material for the novolak type phenolic resin (phenolic trinuclear compound (A)) according to the present invention. It is preferable to isolate and purify the phenol trinuclear compound (A2) from the reaction solution (condensate).
- the purity of the phenolic trinuclear compound (A2) used as the phenolic trinuclear compound (A2) is preferably 85% or more, more preferably 90% or more, still more preferably 94% or more, and particularly preferably 98% or more. .
- the purity of the phenol trinuclear compound (A2) can be increased in the same manner as the method of purifying the phenol trinuclear compound (A1) to increase the purity.
- Examples of the phenol trinuclear compound (A2) include compounds represented by any one of the following general formulas (2-1) to (2-4).
- t represents an integer of 0 to 5.
- R represents an alkyl group having 1 to 8 carbon atoms which may have a substituent.
- a plurality of R may be the same or different from each other, but are preferably the same.
- Examples of R include those similar to the “alkyl group having 1 to 8 carbon atoms which may have a substituent” described for R 1 and R 2 in formula (1).
- R 3 represents an optionally substituted alkyl group having 1 to 8 carbon atoms, and when there are a plurality of R 3 , They may be the same or different.
- Examples of the alkyl group for R 3 include the same as the “alkyl group having 1 to 8 carbon atoms which may have a substituent” for R 1 and R 2 in the general formula (1). .
- a compound represented by the general formula (2-1) is preferable because a photosensitive composition capable of obtaining a coating film having heat resistance and high resolution is obtained.
- compounds represented by the formula (2-1) compounds wherein R is independently a methyl group or an ethyl group and t is 0 are more preferable, and are represented by the general formula (2-1) Of the compounds, compounds in which R is a methyl group and t is 0 are more preferable.
- the phenolic trinuclear compound (A) As a raw material of the novolak type phenol resin according to the present invention, as the phenolic trinuclear compound (A), one type or two or more types of phenolic trinuclear compound (A1) and one type or two or more types of phenolic compounds are used. Trinuclear compound (A2) is used. The molar ratio of the phenolic trinuclear compound (A1) to the phenolic trinuclear compound (A2) in the phenolic trinuclear compound (A) used as a raw material is 20:80 to 90:10.
- the molar ratio of the phenolic trinuclear compound (A1) to the phenolic trinuclear compound (A2) is more preferably 25:75 to 75:25.
- the novolak-type phenol resin according to the present invention can be obtained, for example, by condensing a phenol trinuclear compound (A) and an aldehyde (B) in the presence of an acid catalyst.
- the molar ratio of the isolated and purified phenol trinuclear compound (A1) to the phenol trinuclear compound (A2) is 20:80 to 90:10. It is preferable that the condensation reaction between the resulting mixture and the aldehyde (B) can be carried out in the presence of an acid catalyst.
- aldehydes (B) used in the present invention include formaldehyde, paraformaldehyde, trioxane, acetaldehyde, propionaldehyde, polyoxymethylene, chloral, hexamethylenetetramine, furfural, glyoxal, n-butyraldehyde, caproaldehyde, allylaldehyde.
- formaldehyde is preferable because of its excellent reactivity, and formaldehyde and other aldehyde compounds may be used in combination.
- the amount of the other aldehyde compounds used is preferably in the range of 0.05 to 1 mole per mole of formaldehyde.
- the charge ratio [(A) / (B)] of the phenolic trinuclear compound (A) and the aldehydes (B) in the condensation reaction can suppress excessive high molecular weight (gelation), and phenol for photoresist. Since a resin having an appropriate molecular weight can be obtained, the molar ratio is preferably in the range of 1 / 0.5 to 1 / 1.2, and more preferably in the range of 1 / 0.6 to 1 / 0.9.
- Acid catalysts used in the reaction include inorganic acids such as sulfuric acid, hydrochloric acid, nitric acid, hydrobromic acid, perchloric acid and phosphoric acid, sulfonic acids such as p-toluenesulfonic acid, methanesulfonic acid and benzenesulfonic acid, and oxalic acid And organic acids such as succinic acid, malonic acid, monochloroacetic acid and dichloroacetic acid, and Lewis acids such as boron trifluoride, anhydrous aluminum chloride and zinc chloride.
- inorganic acids such as sulfuric acid, hydrochloric acid, nitric acid, hydrobromic acid, perchloric acid and phosphoric acid
- sulfonic acids such as p-toluenesulfonic acid, methanesulfonic acid and benzenesulfonic acid
- oxalic acid and organic acids
- organic acids such as succinic acid, malonic acid,
- sulfuric acid or p-toluenesulfonic acid is preferred because it exhibits strong acidity and promotes the reaction between the phenolic trinuclear compound (A) and the aldehydes (B) with high activity.
- the amount of these acid catalysts used is preferably in the range of 0.1 to 25% by mass relative to the total mass of the reaction raw materials.
- the condensation reaction between the phenolic trinuclear compound (A) and the aldehydes (B) may be performed in the presence of an organic solvent as necessary.
- the organic solvent include the same organic solvents that can be used in the polycondensation of the dialkyl-substituted phenol (c1) and the hydroxyl group-containing aromatic aldehyde (c2).
- the said organic solvent can also be used only by 1 type, and can also use 2 or more types together. From the viewpoint of excellent solubility of the resulting novolak type phenol resin, 2-ethoxyethanol is preferred as the organic solvent.
- the novolac type phenol resin according to the present invention is represented, for example, by a structural unit (I-1) represented by the following general formula (I-1) and the following general formula (II-1) as a repeating unit. Those having one or more structural sites selected from the group consisting of the structural site (II-1) are preferred, and the structural site (I-1-1) represented by the following general formula (I-1-1): And those having one or more structural sites selected from the group consisting of structural sites (II-1-1) represented by the following general formula (II-1-1) are more preferable.
- R 1 and R 2 are the same as those in the general formula (1), and R 4 is a hydrogen atom or an optionally substituted alkyl. Represents an aryl group which may have a group or a substituent.
- R 1 and R 2 are the same as those in the general formula (1).
- R 4 in the general formulas (I-1) and (II-1) is an alkyl group which may have a substituent
- the alkyl group may be linear or branched. It may be a group having a cyclic structure, but is preferably a linear group.
- R 4 is preferably an alkyl group having 1 to 12 carbon atoms, more preferably an alkyl group having 1 to 8 carbon atoms, and an alkyl group having 1 to 6 carbon atoms. More preferred are groups.
- R 4 in formulas (I-1) and (II-1) is an alkyl group
- the hydrogen atom in the alkyl group may be substituted with a substituent.
- the substituent include a hydroxyl group, an alkoxy group having 1 to 6 carbon atoms, an aryl group which may have a substituent, and a halogen atom.
- the alkoxy group and aryl group having 1 to 6 carbon atoms are the same as the alkoxy group and aryl group exemplified as the substituent that the alkyl group such as R 1 in the general formula (1) may have, respectively.
- the number of hydrogen atoms that can be substituted is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2.
- each substituent may be the same as or different from each other.
- Specific examples of the alkyl group for R 4 include methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, pentyl, isoamyl, hexyl, and cyclohexyl.
- R 4 in the general formulas (I-1) and (II-1) is an aryl group which may have a substituent
- examples of the aryl group include a phenyl group, a naphthyl group, an indenyl group, and biphenyl. Groups and the like.
- the hydrogen atom in the aryl group may be substituted with a substituent. Examples of the substituent include a hydroxyl group, an alkoxy group having 1 to 6 carbon atoms, an aryl group, and a halogen atom.
- the alkoxy group and aryl group having 1 to 6 carbon atoms are the same as the alkoxy group and aryl group exemplified as the substituent that the alkyl group such as R 1 in the general formula (1) may have, respectively. Can be mentioned.
- the number of hydrogen atoms that can be substituted is not particularly limited, but is preferably 1 to 3, more preferably 1 or 2. When one aryl group has a plurality of substituents, each substituent may be the same as or different from each other.
- aryl group optionally having a substituent for R 4 include a phenyl group, a hydroxyphenyl group, a dihydroxyphenyl group, a hydroxyalkoxyphenyl group, an alkoxyphenyl group, a tolyl group, a xylyl group, and a naphthyl group. , Hydroxy naphthyl group, dihydroxy naphthyl group, bromophenyl group and the like.
- R 1 and R 2 are both the same group and R 4 is a hydrogen atom are preferable, and R 1 and More preferably, R 2 is the same unsubstituted alkyl group having 1 to 3 carbon atoms and R 4 is a hydrogen atom, R 1 and R 2 are both methyl groups, and R 4 More preferably, is a hydrogen atom.
- the weight average molecular weight of the novolak type phenolic resin according to the present invention is preferably 1,000 to 3,5,000.
- the molecular weight of the novolac type phenol resin having the structural unit represented by the general formula (I-1) or the structural unit represented by the general formula (II-1) as a repeating unit is excellent in heat resistance and sensitivity. Since a positive photoresist composition can be obtained, the weight average molecular weight (Mw) is preferably 5,000 to 100,000, more preferably 5,000 to 70,000, and further preferably 5,000 to 35,000. 7,000 to 2,5000 are particularly preferred.
- the weight average molecular weight (Mw) and the number average molecular weight (Mn) of the novolak type phenol resin are measured by gel permeation chromatography (hereinafter abbreviated as “GPC”) as follows. It is measured under conditions.
- the novolak type phenolic resin according to the present invention has many benzene rings, and therefore has excellent heat resistance, and also contains a relatively large number of hydroxyl groups, and thus has high alkali solubility. Furthermore, the light absorbency with respect to the exposure wavelength of g line
- the proportion of structural units derived from the condensation reaction of the phenolic trinuclear compound (A1) and the aldehydes (B) in the entire resin is lower than that of the resulting resin, and the exposure wavelength for g-line, h-line, and i-line Absorbance is also low. For this reason, in the same manner as the photosensitive composition containing the novolak type phenol resin according to the present invention, the photosensitive composition containing the novolac type phenol resin (A1) and the novolac type phenol resin (A2) is used. A coating film having excellent sensitivity and sufficient sensitivity can be formed even when the coating film thickness is increased.
- the content ratio of the novolac type phenol resin (A1) and the novolac type phenol resin (A2) is determined in the photosensitive composition.
- a structural unit derived from a condensation reaction of a phenolic trinuclear compound (A1) and an aldehyde (B) and a structural unit derived from a condensation reaction of a phenolic trinuclear compound (A2) and an aldehyde (B) The molar ratio is preferably 20:80 to 90:10, more preferably 25:75 to 90:10, and even more preferably 25:75 to 75:25.
- the condensation reaction between the phenolic trinuclear compound (A1) and the aldehydes (B) and the condensation reaction between the phenolic trinuclear compound (A2) and the aldehydes (B) It can be carried out in the same manner as the condensation reaction of (A) and aldehydes (B).
- Photosensitive composition according to the present invention both the photosensitive composition containing the novolak type phenolic resin according to the present invention and the photosensitive composition containing the novolac type phenolic resin (A1) and the novolac type phenolic resin (A2)
- other alkali-soluble resins may be used in combination. Any other alkali-soluble resin may be used as long as it is soluble in an alkali developer or can be dissolved in an alkali developer by using an additive such as a photoacid generator. Can also be used.
- alkali-soluble resins used here include, for example, phenolic hydroxyl group-containing resins other than the novolak type phenolic resin according to the present invention, p-hydroxystyrene and p- (1,1,1,3,3,3-hexa).
- Homopolymers or copolymers of hydroxy group-containing styrene compounds such as (fluoro-2-hydroxypropyl) styrene, those having hydroxyl groups modified with acid-decomposable groups such as carbonyl groups and benzyloxycarbonyl groups, (meth) acrylic Examples include an acid homopolymer or copolymer, and an alternating polymer of an alicyclic polymerizable monomer such as a norbornene compound or a tetracyclododecene compound and maleic anhydride or maleimide.
- phenolic hydroxyl group-containing resin other than the novolak-type phenolic resin according to the present invention examples include phenol novolak resin, cresol novolak resin, naphthol novolak resin, co-condensed novolak resin using various phenolic compounds, and aromatic hydrocarbon formaldehyde resin.
- Modified phenolic resin dicyclopentadiene phenol addition resin, phenol aralkyl resin (Zylok resin), naphthol aralkyl resin, trimethylol methane resin, tetraphenylol ethane resin, biphenyl modified phenolic resin (multiple phenol nuclei linked by bismethylene group) Polyphenol compound), biphenyl-modified naphthol resin (polyvalent naphthol compound in which phenol nuclei are linked by bismethylene groups), aminotriazine-modified phenol resin (melami) And phenolic resins such as benzoguanamine and the like, and phenolic compounds such as alkoxy group-containing aromatic ring-modified novolak resins (polyhydric phenolic compounds in which phenolic nuclei and alkoxy group-containing aromatic rings are connected by formaldehyde). It is done.
- a cresol novolak resin or a co-condensed novolak resin of cresol and another phenolic compound is preferable because it is a photosensitive resin composition having high sensitivity and excellent heat resistance.
- the cresol novolak resin or the co-condensed novolak resin of cresol and another phenolic compound comprises at least one cresol selected from the group consisting of o-cresol, m-cresol and p-cresol and an aldehyde. It is a novolak resin obtained as an essential raw material and appropriately used in combination with other phenolic compounds.
- phenol examples include phenol; xylenol such as 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 2,6-xylenol, 3,4-xylenol, and 3,5-xylenol.
- Ethylphenols such as o-ethylphenol, m-ethylphenol and p-ethylphenol; butylphenols such as isopropylphenol, butylphenol and pt-butylphenol; p-pentylphenol, p-octylphenol, p-nonylphenol, p-alkyl Alkylphenols such as milphenol; halogenated phenols such as fluorophenol, chlorophenol, bromophenol, and iodophenol; p-phenylphenol, aminophenol, nitrophenol, dinitrophenol Monosubstituted phenols such as trinitrophenol; condensed polycyclic phenols such as 1-naphthol and 2-naphthol; resorcin, alkylresorcin, pyrogallol, catechol, alkylcatechol, hydroquinone, alkylhydroquinone, phloroglucin, bis
- phenolic compounds may be used alone or in combination of two or more.
- the amount used is preferably such that the other phenolic compound is in the range of 0.05 to 1 mol with respect to a total of 1 mol of the cresol raw material.
- the aldehyde used in the production of the cresol novolak resin or the co-condensed novolak resin of cresol and other phenolic compounds for example, the aldehydes described above can be used.
- Aldehydes may be used alone or in combination of two or more. Among these, formaldehyde is preferable because of its excellent reactivity, and formaldehyde and other aldehyde compounds may be used in combination.
- the amount of the other aldehyde compounds used is preferably in the range of 0.05 to 1 mole per mole of formaldehyde.
- the reaction ratio between the phenolic compound and the aldehyde when producing the novolak resin is such that a photosensitive composition having excellent sensitivity and heat resistance can be obtained.
- the range is preferably 0.6 mol, and more preferably 0.5 to 1.3.
- the reaction between the phenolic compound and the aldehyde is performed in the presence of an acid catalyst at a temperature of 60 to 140 ° C., and then water and residual monomers are removed under reduced pressure.
- an acid catalyst used here include oxalic acid, sulfuric acid, hydrochloric acid, phenolsulfonic acid, p-toluenesulfonic acid, zinc acetate, manganese acetate, etc., and each may be used alone or in combination of two or more. Also good. Of these, oxalic acid is preferred because of its excellent catalytic activity.
- the cresol novolac resin using metacresol alone, or the cresol novolak resin using metacresol and paracresol in combination is a photosensitive resin composition having an excellent balance between sensitivity and heat resistance, so that the ratio is 10/0 to 2/8.
- the range is preferable, and the range of 7/3 to 2/8 is more preferable.
- the blending ratio of the novolac type phenol resin according to the present invention and the other alkali-soluble resin can be arbitrarily adjusted depending on the desired application.
- the novolac type phenol resin according to the present invention is used in an amount of 60% by mass or more based on the total of the novolac type phenol resin according to the present invention and other alkali-soluble resins. It is preferable to use 80% by mass or more.
- the photosensitive composition according to the present invention preferably contains an organic solvent together with the novolak type phenolic resin according to the present invention, and is more preferably a solution in which the novolac type phenolic resin according to the present invention is dissolved in the organic solvent.
- the organic solvent include ethylene glycol alkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, and the like.
- Diethylene glycol dialkyl ethers Diethylene glycol dialkyl ethers; ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate; propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc.
- esters such as ethyl. These organic solvents can be used alone or in combination of two or more.
- the photosensitive composition according to the present invention may further contain a photosensitive agent used for a normal resist material.
- the photosensitizer used here include compounds having a quinonediazide group.
- Specific examples of the compound having a quinonediazide group include, for example, an aromatic (poly) hydroxy compound, naphthoquinone-1,2-diazide-5-sulfonic acid, naphthoquinone-1,2-diazide-4-sulfonic acid, orthoanthra
- Examples thereof include complete ester compounds, partial ester compounds, amidated products, and partially amidated products with sulfonic acids having a quinonediazide group such as quinonediazidesulfonic acid.
- aromatic (poly) hydroxy compound used here examples include 2,3,4-trihydroxybenzophenone, 2,4,4′-trihydroxybenzophenone, 2,4,6-trihydroxybenzophenone, 2,3,4, 6-trihydroxybenzophenone, 2,3,4-trihydroxy-2′-methylbenzophenone, 2,3,4,4′-tetrahydroxybenzophenone, 2,2 ′, 4,4′-tetrahydroxybenzophenone, 2, 3 ′, 4,4 ′, 6-pentahydroxybenzophenone, 2,2 ′, 3,4,4′-pentahydroxybenzophenone, 2,2 ′, 3,4,5-pentahydroxybenzophenone, 2,3 ′, 4,4 ′, 5 ′, 6-hexahydroxybenzophenone, 2,3,3 ′, 4,4 ′, 5′-hexahydroxyben Polyhydroxy benzophenone compounds such phenone;
- a tris (hydroxyphenyl) methane compound such as phenyl) -3,4-dihydroxyphenylmethane, bis (4-hydroxy-3,5-dimethylphenyl) -3,4-dihydroxyphenylmethane, or a methyl-substituted product thereof;
- the blending amount thereof is a composition having excellent photosensitivity, so that it is used in the range of 5 to 50 parts by mass with respect to 100 parts by mass of the resin solid content in the photosensitive composition according to the present invention. It is preferable.
- the photosensitive composition according to the present invention may contain a surfactant for the purpose of improving the film forming property and pattern adhesion when used for resist applications, and reducing development defects.
- a surfactant for the purpose of improving the film forming property and pattern adhesion when used for resist applications, and reducing development defects.
- the surfactant used here include polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene alkyl ether compounds such as polyoxyethylene oleyl ether, polyoxyethylene octylphenol ether, polyoxyethylene Polyoxyethylene alkyl allyl ether compounds such as ethylene nonylphenol ether, polyoxyethylene / polyoxypropylene block copolymers, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, sorbitan tristearate Sorbitan fatty acid ester compounds such as poly
- the blending amount of these surfactants is preferably in the range of 0.001 to 2 parts by mass with respect to 100 parts by mass of the resin solid content in the photosensitive composition according to the present invention.
- the photosensitive composition according to the present invention may further contain a curing agent.
- curing agent When the photosensitive composition concerning this invention contains a hardening
- Examples of the curing agent that the photosensitive composition according to the present invention may contain include, for example, a melamine compound substituted with at least one group selected from a methylol group, an alkoxymethyl group, and an acyloxymethyl group, a guanamine compound, Examples include glycoluril compounds, urea compounds, resol resins, epoxy compounds, isocyanate compounds, azide compounds, compounds containing double bonds such as alkenyl ether groups, acid anhydrides, and oxazoline compounds.
- the melamine compound examples include hexamethylol melamine, hexamethoxymethyl melamine, a compound in which 1 to 6 methylol groups of hexamethylol melamine are methoxymethylated, hexamethoxyethyl melamine, hexaacyloxymethyl melamine, hexamethylol melamine Examples thereof include compounds in which 1 to 6 methylol groups are acyloxymethylated.
- guanamine compound examples include tetramethylolguanamine, tetramethoxymethylguanamine, tetramethoxymethylbenzoguanamine, a compound in which 1 to 4 methylol groups of tetramethylolguanamine are methoxymethylated, tetramethoxyethylguanamine, tetraacyloxyguanamine, Examples thereof include compounds in which 1 to 4 methylol groups of tetramethylolguanamine are acyloxymethylated.
- glycoluril compound examples include 1,3,4,6-tetrakis (methoxymethyl) glycoluril, 1,3,4,6-tetrakis (butoxymethyl) glycoluril, 1,3,4,6-tetrakis. (Hydroxymethyl) glycoluril and the like.
- urea compound examples include 1,3-bis (hydroxymethyl) urea, 1,1,3,3-tetrakis (butoxymethyl) urea and 1,1,3,3-tetrakis (methoxymethyl) urea. Can be mentioned.
- resole resins examples include phenols, alkylphenols such as cresol and xylenol, bisphenols such as phenylphenol, resorcinol, biphenyl, bisphenol A and bisphenol F, phenolic hydroxyl group-containing compounds such as naphthol and dihydroxynaphthalene, and aldehyde compounds.
- alkylphenols such as cresol and xylenol
- bisphenols such as phenylphenol, resorcinol, biphenyl, bisphenol A and bisphenol F
- phenolic hydroxyl group-containing compounds such as naphthol and dihydroxynaphthalene
- aldehyde compounds examples include polymers obtained by reacting under alkaline catalyst conditions.
- epoxy compound examples include tris (2,3-epoxypropyl) isocyanurate, trimethylolmethane triglycidyl ether, trimethylolpropane triglycidyl ether, triethylolethane triglycidyl ether, and the like.
- isocyanate compound examples include tolylene diisocyanate, diphenylmethane diisocyanate, hexamethylene diisocyanate, and cyclohexane diisocyanate.
- azide compound examples include 1,1′-biphenyl-4,4′-bisazide, 4,4′-methylidenebisazide, 4,4′-oxybisazide, and the like.
- Examples of the compound containing a double bond such as an alkenyl ether group include ethylene glycol divinyl ether, triethylene glycol divinyl ether, 1,2-propanediol divinyl ether, 1,4-butanediol divinyl ether, and tetramethylene glycol divinyl ether.
- Vinyl ether neopentyl glycol divinyl ether, trimethylolpropane trivinyl ether, hexanediol divinyl ether, 1,4-cyclohexanediol divinyl ether, pentaerythritol trivinyl ether, pentaerythritol tetravinyl ether, sorbitol tetravinyl ether, sorbitol pentavinyl ether, trimethylolpropane tri Examples include vinyl ether.
- the acid anhydride examples include phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, 4 , 4 ′-(isopropylidene) diphthalic anhydride, aromatic aromatic anhydrides such as 4,4 ′-(hexafluoroisopropylidene) diphthalic anhydride; tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, hexahydro anhydride Examples thereof include alicyclic carboxylic acid anhydrides such as phthalic acid, methylhexahydrophthalic anhydride, endomethylenetetrahydrophthalic anhydride dodecenyl succinic anhydride, and trialkyltetrahydrophthalic anhydride.
- a glycoluril compound, a urea compound, and a resol resin are preferable, and a glycoluril compound is particularly preferable because it is a composition having excellent curability and excellent thermal decomposition resistance.
- the blending amount of the curing agent is 0.1 to 50 parts by mass with respect to 100 parts by mass of the novolac type phenol resin according to the present invention.
- the ratio is preferably 0.1 to 30 parts by mass, more preferably 0.5 to 20 parts by mass.
- the photosensitive composition according to the present invention may further contain a photoacid generator.
- a photoacid generator When the photosensitive composition which concerns on this invention contains a photo-acid generator, it may contain 1 type of photo-acid generators and may contain 2 or more types of photo-acid generators.
- the photoacid generator examples include organic halogen compounds, sulfonic acid esters, onium salts, diazonium salts, disulfone compounds, and the like. These may be used alone or in combination of two or more. Specific examples thereof include, for example, tris (trichloromethyl) -s-triazine, tris (tribromomethyl) -s-triazine, tris (dibromomethyl) -s-triazine, and 2,4-bis (tribromomethyl). Haloalkyl group-containing s-triazine derivatives such as -6-p-methoxyphenyl-s-triazine;
- Halogen-substituted paraffinic hydrocarbon compounds such as 1,2,3,4-tetrabromobutane, 1,1,2,2-tetrabromoethane, carbon tetrabromide, iodoform; hexabromocyclohexane, hexachlorocyclohexane, hexabromocyclo Halogen-substituted cycloparaffinic hydrocarbon compounds such as dodecane;
- Halogenated benzene derivatives such as bis (trichloromethyl) benzene and bis (tribromomethyl) benzene; Sulfone compounds containing haloalkyl groups such as tribromomethylphenylsulfone and trichloromethylphenylsulfone; Halogen containing such as 2,3-dibromosulfolane Sulfolane compounds; haloalkyl group-containing isocyanurate compounds such as tris (2,3-dibromopropyl) isocyanurate;
- Sulfonium such as triphenylsulfonium chloride, triphenylsulfonium methanesulfonate, triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium tetrafluoroborate, triphenylsulfonium hexafluoroarsenate, triphenylsulfonium hexafluorophosphonate salt;
- Iodonium salts such as diphenyliodonium trifluoromethanesulfonate, diphenyliodonium p-toluenesulfonate, diphenyliodonium tetrafluoroborate, diphenyliodonium hexafluoroarsenate, diphenyliodonium hexafluorophosphonate;
- O-nitrobenzyl ester compounds such as o-nitrobenzyl-p-toluenesulfonate; sulfone hydrazide compounds such as N, N'-di (phenylsulfonyl) hydrazide and the like.
- the addition amount of these photoacid generators is a photosensitive composition with high photosensitivity, so that 0.1 to 20 parts by mass of resin solids in the photosensitive composition according to the present invention is 100 parts by mass. It is preferable to use within a range.
- the photosensitive composition according to the present invention may contain an organic base compound for neutralizing the acid generated from the photoacid generator during exposure.
- the addition of the organic base compound has an effect of preventing the dimensional variation of the resist pattern due to the movement of the acid generated from the photoacid generator.
- Examples of the organic base compound used here include organic amine compounds selected from nitrogen-containing compounds.
- Pyridine compounds such as pyridine, 4-dimethylaminopyridine, 2,6-dimethylpyridine;
- Amine compounds substituted with a hydroxyalkyl group having 1 to 4 carbon atoms such as diethanolamine, triethanolamine, triisopropanolamine, tris (hydroxymethyl) aminomethane, bis (2-hydroxyethyl) iminotris (hydroxymethyl) methane ;
- Examples include aminophenol compounds such as 2-aminophenol, 3-aminophenol, and 4-aminophenol. These may be used alone or in combination of two or more. Among them, the pyrimidine compound, the pyridine compound, or the amine compound having a hydroxy group is preferable, and the amine compound having a hydroxy group is particularly preferable because of excellent dimensional stability of the resist pattern after exposure.
- the addition amount is preferably in the range of 0.1 to 100 mol% with respect to the content of the photoacid generator. A range of ⁇ 50 mol% is more preferred.
- the photosensitive composition according to the present invention may further contain a filler.
- the filler can further improve the hardness and heat resistance of the coating film.
- the filler contained in the photosensitive composition according to the present invention may be an organic filler, but is preferably an inorganic filler.
- inorganic fillers include silica, mica, talc, clay, bentonite, montmorillonite, kaolinite, wollastonite, calcium carbonate, calcium hydroxide, magnesium carbonate, titanium oxide, alumina, aluminum hydroxide, barium sulfate, and titanium.
- Examples thereof include barium acid, potassium titanate, zinc oxide, and glass fiber. Among them, it is preferable to use silica because the coefficient of thermal expansion can be lowered.
- the photosensitive composition according to the present invention includes other resins, photosensitive agents, surfactants, curing agents, photoacid generators, fillers, and organic bases as necessary. It is preferable that various additives such as compounds, dyes, pigments, and dissolution accelerators are dissolved or dispersed in an organic solvent.
- a coating film can be formed by applying a material dissolved in an organic solvent to a substrate or the like.
- the dyes, pigments, and dissolution accelerators can be appropriately selected from those commonly used as additives for resist materials in consideration of the application to be used.
- the photosensitive composition according to the present invention can be prepared by blending the above components and mixing them using a stirrer or the like. Moreover, when the said photosensitive composition contains a filler and a pigment, it can adjust by disperse
- dispersers such as a dissolver, a homogenizer, and a 3 roll mill.
- the photosensitive composition according to the present invention may be used as a resist material.
- the photosensitive composition according to the present invention may be used as a resist solution as it is dissolved or dispersed in an organic solvent, or it may be removed by applying a film dissolved or dispersed in an organic solvent.
- a solvent may be used as a resist film.
- the support film used as the resist film include synthetic resin films such as polyethylene, polypropylene, polycarbonate, and polyethylene terephthalate, and may be a single layer film or a plurality of laminated films.
- the surface of the support film may be a corona-treated one or a release agent.
- a resist material is applied onto an object to be subjected to silicon substrate photolithography, and prebaked at a temperature of 60 to 150 ° C.
- the coating method at this time may be any method such as spin coating, roll coating, flow coating, dip coating, spray coating, doctor blade coating and the like.
- a resist pattern is created.
- the resist material is a positive type
- the target resist pattern is exposed through a predetermined mask, and the exposed portion is dissolved in an alkali developer to form a resist pattern. Form a pattern.
- Examples of the exposure light source here include infrared light, visible light, ultraviolet light, far-ultraviolet light, X-rays, and electron beams.
- Examples of ultraviolet light include g-line (wavelength 436 nm) and h-line (wavelength 436 nm) of a high-pressure mercury lamp. Examples include a wavelength 405 nm) i-line (wavelength 365 nm), a KrF excimer laser (wavelength 248 nm), an ArF excimer laser (wavelength 193 nm), an F2 excimer laser (wavelength 157 nm), and an EUV laser (wavelength 13.5 nm). Since the photosensitive composition according to the present invention has low absorbance for these exposure wavelengths, it is possible to create a resist pattern with high sensitivity and high resolution regardless of which light source is used.
- the photosensitive composition according to the present invention is excellent in heat resistance, a thin film (for example, a resist coating film) made of the photosensitive composition mainly composed of the novolak-type phenol resin according to the present invention, After forming a resist pattern as necessary, it is suitable as a permanent film remaining in the final product.
- a thin film for example, a resist coating film
- the photosensitive composition mainly composed of the novolak type phenol resin according to the present invention After forming a resist pattern as necessary, it is suitable as a permanent film remaining in the final product.
- distortion may occur due to a difference in thermal expansion between the member side and the gap side of the permanent film, but the photosensitive composition mainly composed of the novolak type phenol resin according to the present invention.
- the permanent film made of has an excellent property that such distortion is unlikely to occur.
- a permanent film is a coating film made of a photosensitive composition formed on or between parts constituting a product in a display device such as a semiconductor device such as an IC or LSI, or a thin display. It remains even after completion.
- Specific examples of permanent films include solder resists, package materials, underfill materials, package adhesive layers such as circuit elements, adhesive layers between integrated circuit elements and circuit boards, and thin displays such as LCD and OELD. Examples include a thin film transistor protective film, a liquid crystal color filter protective film, a black matrix, and a spacer.
- 10 mL of sulfuric acid was added to the reaction solution in the four-necked flask while cooling in an ice bath, and then the temperature was raised to 80 ° C. in an oil bath, heated for 4 hours, and reacted while stirring. Water was added to the reaction solution after completion of the reaction and reprecipitation was performed to obtain a crude product. The crude product was redissolved in acetone, and further reprecipitation operation was performed with water.
- a GPC chart of the novolak resin (3-b) is shown in FIG.
- the number average molecular weight (Mn) 2,529
- the weight average molecular weight (Mw) 11,421
- the polydispersity (Mw / Mn) 4.516. there were.
- a GPC chart of the novolak resin (3-c) is shown in FIG.
- the number average molecular weight (Mn) 3,313
- the weight average molecular weight (Mw) 25,435
- the polydispersity (Mw / Mn) 7.678. It was.
- a GPC chart of the novolak resin (3-d) is shown in FIG.
- number average molecular weight (Mn) 2,733
- weight average molecular weight (Mw) 10,984
- polydispersity (Mw / Mn) 4.019. there were.
- a GPC chart of the novolak resin (3-e) is shown in FIG.
- number average molecular weight (Mn) 1,450
- weight average molecular weight (Mw) 10,316
- polydispersity (Mw / Mn) 7.116. there were.
- the photosensitive composition was applied onto a 5-inch silicon wafer with a spin coater and dried on a hot plate at 110 ° C. for 60 seconds to obtain a thin film having a thickness of about 1 ⁇ m.
- the obtained wafer was immersed in a developer (2.38% tetramethylammonium hydroxide aqueous solution) for 60 seconds, and then dried on a 110 ° C. hot plate for 60 seconds.
- the film thickness of the coating film of the photosensitive composition was measured before and after immersion in the developer, and the value obtained by dividing the difference by 60 was defined as the alkali dissolution rate (ADR (nm / second)), and the alkali developability was evaluated.
- the film thickness of the coating film was measured using a film thickness meter (“F-20” manufactured by Filmetrics Co., Ltd.).
- a PGMEA solution in which a novolak resin was dissolved in PGMEA to a solid content of 40% by mass was used as the photosensitive composition.
- the photosensitive composition was applied on a 5-inch silicon wafer with a spin coater to a thickness of about 1 ⁇ m, and dried on a hot plate at 110 ° C. for 60 seconds.
- the resin content was scraped from the obtained wafer and Tg was measured.
- Tg was measured using a differential scanning calorimeter “(DSC) Q100” (manufactured by TA Instruments Co., Ltd.) under a nitrogen atmosphere, temperature range: ⁇ 100 to 200 ° C., temperature rising temperature: 10 ° C./min. Scanning was performed under the conditions, and the measurement result was the glass transition temperature (Tg).
- a novolac resin was dissolved in PGMEA to prepare a PGMEA solution having a solid content of 1% by mass.
- the absorbance of the prepared PGMEA solution was measured at 365 nm, 405 nm, and 436 nm in the visible region.
- the absorbance was measured with an ultraviolet-visible photometer “UV-1600” (manufactured by Shimadzu Corporation) equipped with a quartz measurement cell (optical path length: 10 mm, optical path width: 10 mm).
- the setting parameters were a spectral bandwidth of 2 nm, a measurement wavelength range of 190 to 750 nm, a wavelength scale of 25 nm / cm, and a scan speed of 100 nm / min.
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Abstract
Description
本発明はさらに、前記ノボラック型フェノール樹脂を含有する感光性組成物、前記感光性組成物からなるレジスト材料、及び前記レジスト材料からなる塗膜に関する。
測定装置:東ソー株式会社製「HLC-8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF803」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmI.D.×300mm)、
カラム温度:40℃、
検出器: RI(示差屈折計)、
データ処理:東ソー株式会社製「GPC-8020モデルIIバージョン4.30」、
展開溶媒:テトラヒドロフラン、
流速:1.0mL/分、
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの、
注入量:0.1mL、
標準試料:下記単分散ポリスチレン
東ソー株式会社製「A-500」
東ソー株式会社製「A-2500」
東ソー株式会社製「A-5000」
東ソー株式会社製「F-1」
東ソー株式会社製「F-2」
東ソー株式会社製「F-4」
東ソー株式会社製「F-10」
東ソー株式会社製「F-20」
樹脂の分子量分布は、GPCにより、ポリスチレン標準法において、以下の測定条件にて測定した。
測定装置:東ソー株式会社製「HLC-8220 GPC」、
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF803」(8.0mmI.D.×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmI.D.×300mm)、
検出器: RI(示差屈折計)、
測定条件:カラム温度 40℃
展開溶媒 テトラヒドロフラン(THF)
流速 1.0mL/分
試料:樹脂固形分換算で1.0質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの(5μL)、
データ処理:東ソー株式会社製「GPC-8020モデルIIデータ解析バージョン4.30」、
標準試料:前記「GPC-8020モデルIIデータ解析バージョン4.30」の測定マニュアルに準拠して、分子量が既知の下記の単分散ポリスチレンを用いた。
東ソー株式会社製「A-500」
東ソー株式会社製「A-1000」
東ソー株式会社製「A-2500」
東ソー株式会社製「A-5000」
東ソー株式会社製「F-1」
東ソー株式会社製「F-2」
東ソー株式会社製「F-4」
東ソー株式会社製「F-10」
東ソー株式会社製「F-20」
東ソー株式会社製「F-40」
東ソー株式会社製「F-80」
東ソー株式会社製「F-128」
東ソー株式会社製「F-288」
東ソー株式会社製「F-550」
樹脂の13C-NMRスペクトルの測定は、日本電子株式会社製「JNM-LA300」を用い、試料のDMSO-d6溶液を分析して構造解析を行った。以下に、13C-NMRスペクトルの測定条件を示す。
測定モード:SGNNE(NOE消去の1H完全デカップリング法)
パルス角度:45℃パルス
試料濃度:30wt%
積算回数:10000回
冷却管を取り付けた2L容4つ口フラスコに、2,5-キシレノール293.2g(2.4モル)、4-ヒドロキシベンズアルデヒド122g(1モル)、及び2-エトキシエタノール500mLを仕込み、2-エトキシエタノールに2,5-キシレノール及び4-ヒドロキシベンズアルデヒドを溶解させた。続いて、当該4つ口フラスコ内の反応溶液に、氷浴中で冷却しながら硫酸10mLを添加した後、マントルヒーターで100℃、2時間加熱し、攪拌しながら反応させた。反応終了後の反応溶液に水を添加して再沈殿操作を行い、粗生成物を得た。当該粗生成物をアセトンに再溶解させた後、さらに水で再沈殿操作を行った。再沈殿操作により得られた生成物を濾別し、真空乾燥を行い、白色結晶の前駆体化合物(フェノール系3核体化合物(1))213gを得た。フェノール系3核体化合物(1)について、GPC及び13C-NMRスペクトル測定を行ったところ、目的の化合物であり、純度はGPCの面積比で98.2質量%であることを確認した。フェノール系3核体化合物(1)のGPCのチャート図を図1に、13C-NMRスペクトルのチャート図を図2に、それぞれ示す。
4-ヒドロキシベンズアルデヒド122g(1モル)に代えて、ベンズアルデヒド106.1g(1モル)を用いた以外は合成例1と同様にして、白色結晶の前駆体化合物(フェノール系3核体化合物(2))206gを得た。フェノール系3核体化合物(2)について、GPC及び13C-NMRスペクトル測定を行ったところ、目的の化合物であり、純度はGPCの面積比で98.7質量%であることを確認した。フェノール系3核体化合物(2)のGPCのチャート図を図3に、13C-NMRスペクトルのチャート図を図4に、それぞれ示す。
冷却管を取り付けた300mL容4つ口フラスコに、合成例1で得たフェノール系3核体化合物(1)4.2g(0.012モル)と合成例2で得たフェノール系3核体化合物(2)12.6g(0.038モル)、92%パラホルムアルデヒド1.6g(0.05モル)、2-エトキシエタノール15mL、及び酢酸15mLを仕込み、2-エトキシエタノールと酢酸の混合溶媒中にフェノール系3核体化合物(1)及びパラホルムアルデヒドを溶解させた(フェノール系3核体化合物(1):フェノール系3核体化合物(2)=25:75)。続いて、当該4つ口フラスコ内の反応溶液に、氷浴中で冷却しながら硫酸10mLを添加した後、オイルバスで80℃に昇温し、4時間加熱し、攪拌しながら反応させた。反応終了後の反応溶液に水を添加して再沈殿操作を行い、粗生成物を得た。当該粗生成物をアセトンに再溶解させた後、さらに水で再沈殿操作を行った。再沈殿操作により得られた生成物を濾別し、真空乾燥を行い、淡赤色粉末のノボラック型フェノール樹脂(ノボラック樹脂(3-a))16.5gを得た。ノボラック樹脂(3-a)のGPCチャートを図5に示す。ノボラック樹脂(3-a)について、GPCを行ったところ、GPCを行ったところ、数平均分子量(Mn)=3,654、重量平均分子量(Mw)=18,798、多分散度(Mw/Mn)=5.144であった。
合成例1で得たフェノール系3核体化合物(1)4.2g(0.012モル)と合成例2で得たフェノール系3核体化合物(2)12.6g(0.038モル)に代えて、合成例1で得たフェノール系3核体化合物(1)8.7g(0.025モル)と合成例2で得たフェノール系3核体化合物(2)8.3g(0.025モル)を用いた(フェノール系3核体化合物(1):フェノール系3核体化合物(2)=50:50)以外は合成例3と同様にして、淡赤色粉末のノボラック型フェノール樹脂(ノボラック樹脂(3-b))16.2gを得た。ノボラック樹脂(3-b)のGPCチャートを図6に示す。ノボラック樹脂(3-b)について、GPCを行ったところ、数平均分子量(Mn)=2,529、重量平均分子量(Mw)=11,421、多分散度(Mw/Mn)=4.516であった。
合成例1で得たフェノール系3核体化合物(1)4.2g(0.012モル)と合成例2で得たフェノール系3核体化合物(2)12.6g(0.038モル)に代えて、合成例1で得たフェノール系3核体化合物(1)13.2g(0.038モル)と合成例2で得たフェノール系3核体化合物(2)4.0g(0.012モル)を用いた(フェノール系3核体化合物(1):フェノール系3核体化合物(2)=75:25)以外は合成例3と同様にして、淡赤色粉末のノボラック型フェノール樹脂(ノボラック樹脂(3-c))16.7gを得た。ノボラック樹脂(3-c)のGPCチャートを図7に示す。ノボラック樹脂(3-c)、GPCを行ったところ、数平均分子量(Mn)=3,313、重量平均分子量(Mw)=25,435、多分散度(Mw/Mn)=7.678であった。
合成例1で得たフェノール系3核体化合物(1)4.2g(0.012モル)と合成例2で得たフェノール系3核体化合物(2)12.6g(0.038モル)に代えて、合成例1で得たフェノール系3核体化合物(1)17.4g(0.05モル)を用いた(フェノール系3核体化合物(1):フェノール系3核体化合物(2)=100:0)以外は合成例3と同様にして、淡赤色粉末のノボラック型フェノール樹脂(ノボラック樹脂(3-d))16.8gを得た。ノボラック樹脂(3-d)のGPCチャートを図8に示す。ノボラック樹脂(3-d)について、GPCを行ったところ、数平均分子量(Mn)=2,733、重量平均分子量(Mw)=10,984、多分散度(Mw/Mn)=4.019であった。
温度計及び撹拌装置を備えた2L容4つ口フラスコに、m-クレゾール648g(6モル)、p-クレゾール432g(4モル)、シュウ酸2.5g(0.2モル)、42%ホルムアルデヒド492gを仕込み、100℃まで昇温させ、反応させた。反応終了後の反応溶液を常圧で200℃まで脱水して蒸留した後、230℃で6時間減圧蒸留を行って、黄色固形のノボラック樹脂(ノボラック樹脂(3-e))736gを得た。ノボラック樹脂(3-e)のGPCチャートを図9に示す。ノボラック樹脂(3-e)について、GPCを行ったところ、数平均分子量(Mn)=1,450、重量平均分子量(Mw)=10,316、多分散度(Mw/Mn)=7.116であった。
合成例3~5及び比較合成例1~2で合成したノボラック樹脂(3-a)~(3-e)について、ノボラック樹脂と感光剤「P-200」(4,4’-[1-[4-[1-(4-ヒドロキシフェニル)-1メチルエチル]フェニル]エチリデン]ビスフェノール(1モル)と1,2-ナフトキノン-2-ジアジド-5-スルホニルクロリド(2モル)の縮合物)(東洋合成工業製)、及びプロピレングリコールモノメチルエーテルアセテート(PGMEA)を20/5/75(質量部)で混合して溶解させた後、0.2μmメンブランフィルターを用いて濾過し、感光性組成物とした。
感度測定のためには、感光剤なしの感光性組成物として、ノボラック樹脂をPGMEAに溶解した組成物(ノボラック樹脂/PGMEA=20/80(質量部))を調製した。
感光性組成物を、5インチシリコンウェハー上にスピンコーターで塗布し、110℃のホットプレート上で60秒間乾燥させ、約1μmの厚さの薄膜を得た。得られたウェハーを、現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬させた後、110℃のホットプレート上で60秒間乾燥させた。当該感光性組成物の塗膜の膜厚を、現像液浸漬前後で測定し、その差分を60で除した値をアルカリ溶解速度(ADR(nm/秒))とし、アルカリ現像性を評価した。塗膜の膜厚は、膜厚計(フィルメトリクス株式会社製「F-20」)を用いて測定した。
感光性組成物を約1μmの厚さで塗布して乾燥せしめたウェハー上に、ラインアンドスペースが1:1の1~10μmレジストパターン対応のマスクを密着させた後、g・h・i線ランプ(ウシオ電機株式会社製、マルチライト)でL/S=3μmを忠実に再現することのできる露光量(Eop露光量)を求めた。
感光性組成物を塗布して乾燥したシリコンウェハー上にフォトマスクを乗せ、g・h・i線ランプ(ウシオ電機株式会社製、マルチライト)で200mJ/cm2照射し感光せしめた。照射後の塗膜を、ADR測定と同様にして現像し乾燥させた。現像後のウェハー上のレジストパターンのパターン状態を、キーエンス社製レーザーマイクロスコープ(VK-X200)を用いて評価した。評価は、L/S=5μmで解像できているものを「○」、L/S=5μmで解像できていないものを「×」とした。
耐熱性評価には、ノボラック樹脂をPGMEAに溶解し、固形分40質量%にしたPGMEA溶液を感光性組成物として用いた。 感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒間乾燥させた。得られたウェハーより樹脂分をかきとり、Tgを測定した。Tgの測定は、示差走査熱量計「(DSC)Q100」(株式会社TAインスツルメント製)を用いて、窒素雰囲気下、温度範囲:-100~200℃、昇温温度:10℃/分の条件で、走査を行い、測定結果をガラス転移温度(Tg)とした。
ノボラック樹脂をPGMEAに溶解し、固形分1質量%にしたPGMEA溶液を調製した。調製したPGMEA溶液について、可視領域にあたる365nm、405nm、436nmの各波長において、吸光度を測定した。吸光度測定は、紫外可視光光度計「UV-1600」(島津製作所株式会社製)に、石英製の測定セル(光路長:10mm、光路幅:10mm)を設置したもので測定した。設定パラメーターは、スペクトルバンド幅を2nm、測定波長範囲を190~750nm、波長スケールを25nm/cm、スキャンスピードを100nm/分とした。
Claims (16)
- ジアルキル置換フェノールと水酸基含有芳香族アルデヒドとの縮合反応により得られるフェノール系3核体化合物(A1)と、2,3位、2,5位、3,4位、又は3,5位の位置にアルキル基を有するジアルキル置換フェノールと水酸基を有さない芳香族アルデヒドとの縮合反応により得られるフェノール系3核体化合物(A2)とからなり、かつ前記フェノール系3核体化合物(A1)と前記フェノール系3核体化合物(A2)のモル比が20:80~90:10であるフェノール系3核体化合物(A)と、アルデヒド類(B)とを、酸触媒下で反応させて得られたことを特徴とする、ノボラック型フェノール樹脂。
- 前記フェノール系3核体化合物(A1)が、下記一般式(1-1)、(1-2)、(1-7)、(1-8)、(1-13)、及び(1-14)
で表される化合物からなる群から選ばれる1種以上の化合物であり、フェノール系3核体化合物(A2)が下記一般式(2-1)、(2-2)、(2-3)、及び(2-4)
で表される化合物からなる群から選ばれる1種以上の化合物である、請求項1に記載のノボラック型フェノール樹脂。 - 前記一般式(1-1)、(1-2)、(1-7)、(1-8)、(1-13)、及び(1-14)中のR1及びR2が共にメチル基又は共にエチル基であり、かつr1及びr2が0であり、
前記一般式(2-1)、(2-2)、(2-3)、及び(2-4)中のRがメチル基又はエチル基であり、かつ、tが0である、請求項3記載のノボラック型フェノール樹脂。 - 前記フェノール系3核体化合物(A1)が2,5-キシレノールとp-ヒドロキシベンズアルデヒドとの縮合反応により得られる化合物であり、前記フェノール系3核体化合物(A2)が2,5-キシレノールとベンズアルデヒドとの縮合反応により得られる化合物である、請求項1に記載のノボラック型フェノール樹脂。
- 繰り返し単位として、下記一般式(I-1)
で表される構造部位(I-1)、及び下記一般式(II-1)
で表される構造部位(II-1)からなる群より選択される1種以上の構造部位を有する、請求項1に記載のノボラック型フェノール樹脂。 - 重量平均分子量が5,000~35,000である、請求項4に記載のノボラック型フェノール樹脂。
- ジアルキル置換フェノールと水酸基含有芳香族アルデヒドとの縮合反応を行い、得られた縮合物から、フェノール系3核体化合物(A1)を単離精製する工程と、
2,3位、2,5位、3,4位、又は3,5位の位置にアルキル基を有するジアルキル置換フェノールと水酸基を有さない芳香族アルデヒドとの縮合反応を行い、得られた縮合物から、フェノール系3核体化合物(A2)を単離精製する工程と、
単離精製されたフェノール系3核体化合物(A1)とフェノール系3核体化合物(A2)をモル比が20:80~90:10となるように混合し、得られた混合物とアルデヒド類(B)との縮合反応を酸触媒下で行い、ノボラック型フェノール樹脂を得る工程と、
を有することを特徴とする、ノボラック型フェノール樹脂の製造方法。 - 請求項1~7の何れか一項に記載のノボラック型フェノール樹脂を含有する、感光性組成物。
- ジアルキル置換フェノールと水酸基含有芳香族アルデヒドとの縮合反応により得られるフェノール系3核体化合物(A1)とアルデヒド類(B)とを酸触媒下で反応させて得られるノボラック型フェノール樹脂(A1)と、
2,3位、2,5位、3,4位、又は3,5位の位置にアルキル基を有するジアルキル置換フェノールと水酸基を有さない芳香族アルデヒドとの縮合反応により得られるフェノール系3核体化合物(A2)とアルデヒド類(B)とを酸触媒下で反応させて得られるノボラック型フェノール樹脂(A2)とを含有することを特徴とする、感光性組成物。 - 前記ノボラック型フェノール樹脂(A1)と前記ノボラック型フェノール樹脂(A2)の含有比率が、フェノール系3核体化合物(A1)とアルデヒド類(B)との縮合反応に由来する構成単位と、フェノール系3核体化合物(A2)とアルデヒド類(B)との縮合反応に由来する構成単位のモル比で20:80~90:10となる範囲である、請求項10記載の感光性組成物。
- さらに、感光剤を含有する、請求項9~11のいずれか1項に記載の感光性組成物。
- さらに、クレゾールノボラック樹脂を含有する、請求項9~12のいずれか一項に記載の感光性組成物。
- 請求項9~13のいずれか一項に記載の感光性組成物からなるレジスト材料。
- 請求項14に記載のレジスト材料からなる塗膜。
- 膜厚が2μm以上である、請求項15に記載の塗膜。
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