WO2016072263A1

WO2016072263A1 - Peeling device and peeling method

Info

Publication number: WO2016072263A1
Application number: PCT/JP2015/079718
Authority: WO
Inventors: 正敬近藤; 北島　功朗; 栄治菊地; 田中　利典
Original assignee: オムロン株式会社
Priority date: 2014-11-06
Filing date: 2015-10-21
Publication date: 2016-05-12
Also published as: CN106794955B; CN106794955A; JP2016088704A; JP6398622B2

Abstract

The peeling device according to the present invention is for peeling a sheet affixed to a work piece, and is provided with a plurality of chucking parts for chucking the sheet. The plurality of chucking parts include a first chucking part disposed on one end side of the sheet and a second chucking part disposed on the other end side of the sheet. The first chucking part is configured so as to move away from the work piece in a state of chucking the sheet, and the second chucking part is configured so as to move away from the work piece in a state of chucking the sheet after the movement of the first chucking part.

Description

Peeling apparatus and peeling method

The present invention relates to a peeling apparatus and a peeling method.

Conventionally, a peeling apparatus that peels off a sheet attached to a workpiece is known (for example, see Patent Document 1).

Patent Document 1 discloses a protective film peeling apparatus that peels off a protective film attached to a liquid crystal panel. In this protective film peeling apparatus, the protective film is peeled from the liquid crystal panel by moving the peeling hand in parallel along the surface of the liquid crystal panel in a state where one corner of the protective film is held by the peeling hand. It is like that.

JP 2009-233988 A

However, since the conventional protective film peeling apparatus as described above is bent at an acute angle when the protective film is peeled off, a load is applied to the peeled protective film, which may cause damage or curling of the protective film. . Therefore, it is difficult to reuse the peeled protective film.

The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a peeling apparatus and a peeling method capable of suppressing a load on a sheet to be peeled from a workpiece. That is.

The peeling apparatus according to the present invention is a peeling apparatus that peels off a sheet attached to a workpiece, and includes a plurality of suction portions that suck the sheet. The plurality of suction units include a first suction unit disposed on the one end side of the sheet and a second suction unit disposed on the other end side of the sheet. The first suction unit is configured to move away from the workpiece while the sheet is sucked, and the second suction unit is separated from the workpiece while sucking the sheet after the first suction unit is moved. It is configured to move.

With this configuration, the sheets can be peeled in order from the one end side to the other end side of the work in a state where the plurality of sucking parts suck and hold the sheet. It is possible to suppress a load from being applied to the sheet.

In the peeling apparatus, the plurality of adsorption units include a third adsorption unit disposed between the first adsorption unit and the second adsorption unit, and the third adsorption unit is after the movement of the first adsorption unit. The structure may be such that the sheet is moved away from the work in a state where the sheet is sucked before the second suction part is moved.

In the peeling device in which the plurality of suction units include a third suction unit, the first suction unit and the third suction unit are configured to move in a direction inclined from the vertical direction to the workpiece to the other end side of the sheet, The 2nd adsorption | suction part may be comprised so that it may move to the orthogonal | vertical direction with respect to a workpiece | work.

In this case, a base part provided with the second suction part, an elastically deformable connecting member for connecting the first suction part, the second suction part and the third suction part, and the base part are provided with the first suction part. And a lifting member that pulls up diagonally upward.

In the peeling apparatus, the workpiece may include an illuminating body, and the sheet may include a protective sheet that protects the illuminating body.

Further, the peeling method according to the present invention is a peeling method in a peeling apparatus that includes a plurality of suction portions that suck a sheet attached to a workpiece and peels the sheet. The plurality of suction units include a first suction unit disposed on the one end side of the sheet and a second suction unit disposed on the other end side of the sheet. The peeling method includes a step in which the first suction unit and the second suction unit suck the sheet, a step in which the first suction unit moves away from the workpiece in a state in which the sheet is sucked, and a movement of the first suction unit. And a step of moving the second suction portion away from the workpiece while the sheet is sucked.

According to the peeling apparatus and the peeling method of the present invention, it is possible to suppress a load from being applied to the sheet peeled from the workpiece.

It is the perspective view which showed schematic structure of the peeling apparatus by one Embodiment of this invention. It is the perspective view which looked at the peeling apparatus of FIG. 1 from the lower side. It is the perspective view which showed the state which the raising / lowering member fell in the peeling apparatus of FIG. It is the side view which showed the peeling apparatus of FIG. It is the side view which showed the state which the air cylinder act | operated in the peeling apparatus of FIG. It is the perspective view which showed the state which the raising / lowering member raised in the peeling apparatus of FIG. It is the perspective view which showed the state which the slide member moved in the peeling apparatus of FIG. It is the perspective view which showed the state in which the protection sheet was mounted in the temporary placement part in the peeling apparatus of FIG. It is the disassembled perspective view which expanded and showed the illumination body and the protection sheet.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

-Constitution-
First, with reference to FIG. 1, FIG. 2, and FIG. 9, the structure of the peeling apparatus 100 by one Embodiment of this invention is demonstrated. The peeling device 100 is provided in, for example, an inspection device (not shown) for inspecting the illuminating body 200, and is configured to peel off the protective sheet 250 attached to the illuminating body 200 before the inspection. . The inspection apparatus is configured to re-attach the peeled protective sheet 250 to the illuminating body 200 after the inspection is completed.

Here, the illuminating body 200 is a planar illuminating body used for a liquid crystal display device or the like, for example. As shown in FIG. 9, the illuminating body 200 is provided with a rectangular frame-shaped double-sided tape 201 on the surface 200 a, and the protective sheet 250 is attached to the surface 200 a of the illuminating body 200 with the double-sided tape 201. . The double-sided tape 201 is formed such that the width of the short side 201a on one end side (X1 direction side) is wider than the width of the other side. The illuminating body 200 is an example of the “workpiece” in the present invention, and the protective sheet 250 is an example of the “sheet” in the present invention.

Further, as shown in FIG. 1, the illuminating body 200 is supplied to the peeling device 100 by a conveying member 300 of the inspection device. The conveyance member 300 includes a placement unit 301 on which the illuminating body 200 is placed, and a temporary placement unit 302 on which the protective sheet 250 peeled off by the peeling device 100 is temporarily placed. The placement unit 301 and the temporary placement unit 302 are disposed adjacent to each other. And the conveyance member 300 is comprised so that the illumination body 200 mounted in the mounting part 301 may be adsorbed and hold | maintained from a back surface side.

As shown in FIG. 2, the peeling device 100 includes a peeling mechanism unit 1, a lifting member 2 for moving the peeling mechanism unit 1 in the vertical direction (Z1 and Z2 directions), and a lifting member 2 in the horizontal direction (Y1 and And a slide member 3 for moving in the Y2 direction).

The peeling mechanism part 1 includes a base part 11, a plurality of suction cups 12, a plurality of suction cup bases 13 provided with the suction cups 12, a connecting member 14 that connects the suction cup bases 13, and an air cylinder 15.

The base part 11 is attached to the elevating member 2.

Support rods

11 a and 11 b extending in the longitudinal direction (X1 direction) of the illuminating body 200 are formed on the base portion 11. The

support rods

11a and 11b are arranged in parallel at the same height position, and the support rod 11b is longer than the support rod 11a. Specifically, the support rod 11a is formed to extend to a suction cup base 13c described later, and the support rod 11b is formed to extend to a suction cup base 13a described later.

The plurality of suction cups 12 include a suction cup 12a disposed on one end side (X1 direction side) in the longitudinal direction of the protection sheet 250 (illuminating body 200), and the other end side (X2 direction side) in the longitudinal direction of the protection sheet 250. ) And a suction cup 12c arranged between the

suction cups

12a and 12b. The

suction cups

12a, 12b, and 12c are examples of the “first suction part”, “second suction part”, and “third suction part” of the present invention, respectively.

Each of the

suction cups

12a, 12b and 12c is provided in a plurality (three in this embodiment) and is arranged so as to be continuous in the short direction (Y1 and Y2 directions) of the protective sheet 250. That is, the plurality of suction cups 12 are arranged in a matrix (lattice form) with respect to the rectangular illuminating body 200.

The plurality of suction cup bases 13 include a suction cup base 13a provided with the suction cup 12a, a suction cup base 13b provided with the suction cup 12b, and a suction cup base 13c provided with the suction cup 12c. The

suction cups

13a, 13b and 13c are arranged at intervals in the longitudinal direction (X1 and X2 directions) of the protective sheet 250.

The suction cup base 13a is disposed on the side away from the base portion 11 (X1 direction side) and is formed to extend in the short direction (Y1 and Y2 direction) of the protective sheet 250. A plurality of suction cups 12a are provided at intervals on the lower surface of the suction cup base 13a. Moreover, the connection member 14 is attached to the lower surface of the suction cup stand 13a between the suction cups 12a.

Further, an air passage (not shown) is formed in the suction cup base 13a, and the suction cup 12a communicates with the air passage. A mounting bracket 131a of an air hose (not shown) is provided on one side surface (side surface on the Y2 direction side) of the suction cup base 13a, and an air passage is communicated with the mounting bracket 131a. And by sucking and discharging air to and from the suction cup 12a through the air hose and the air passage, the suction cup 12a performs suction and release.

As shown in FIG. 1, a protrusion 132a and a holding rod 133a are formed on the other side surface (side surface on the Y1 direction side) of the suction cup base 13a. The protrusion 132a is formed so as to protrude outward (Y1 direction side), and is disposed above the support rod 11b. That is, the protrusion 132a is supported by the support rod 11b. The holding rod 133a is formed so as to extend toward the base portion 11 (X2 direction side), and is disposed above a protrusion 132c described later.

And the suction cup base 13a is rotatably attached to the air cylinder 15, and is configured to be lifted obliquely upward (D direction in FIG. 5) by the air cylinder 15.

The suction cup base 13b is attached to the base portion 11 and formed so as to extend in the short direction (Y1 and Y2 directions) of the protective sheet 250. As shown in FIG. 2, a plurality of suction cups 12b are provided at intervals on the lower surface of the suction cup base 13b. Moreover, the connection member 14 is attached to the lower surface of the suction cup stand 13b between the suction cups 12b.

Further, an air passage (not shown) is formed in the suction cup base 13b, and the suction cup 12b communicates with the air passage. A mounting bracket 131b of an air hose (not shown) is provided on one side surface (side surface in the Y2 direction) of the suction cup base 13b, and an air passage is communicated with the mounting bracket 131b. Then, air is supplied to and discharged from the suction cup 12b via the air hose and the air passage, so that the suction cup 12b performs suction and release.

The suction cup 13c is disposed between the

suction cups

13a and 13b and is formed to extend in the short direction (Y1 and Y2 direction) of the protective sheet 250. A plurality of suction cups 12c are provided at intervals on the lower surface of the suction cup base 13c. Moreover, the connection member 14 is attached to the lower surface of the suction cup stand 13c between the suction cups 12c.

Further, an air passage (not shown) is formed in the suction cup base 13c, and the suction cup 12c is communicated with the air passage. A mounting bracket 131c for an air hose (not shown) is provided on the upper end surface of the suction cup 13c, and an air passage is communicated with the mounting bracket 131c. Then, air is supplied to and discharged from the suction cup 12c via the air hose and the air passage, so that the suction cup 12c is sucked and released.

A protrusion 132c is formed on the side surface of the suction cup base 13c so as to protrude outward. On the other hand, the protrusion 132c on the side surface (side surface on the Y2 direction side) is disposed above the support rod 11a and supported by the support rod 11a. The protrusion 132c on the other side surface (side surface on the Y1 direction side) is disposed above the support rod 11b and supported by the support rod 11b. In addition, a holding rod 133a of the suction cup base 13a is disposed above the protrusion 132c on the other side surface.

The sucker base 13c is configured to be lifted obliquely upward along with the sucker base 13a when the suction base 13a is pulled upward diagonally (D direction in FIG. 5).

The connecting member 14 is provided for connecting the

suction cups

13a, 13b and 13c. The connecting member 14 is configured to be elastically deformable, and is formed so as to extend in the longitudinal direction (X1 and X2 directions) of the protective sheet 250. In addition, the connecting member 14 is formed in a band plate shape, and a plurality (two in this embodiment) are provided.

As shown in FIG. 1, the air cylinder 15 includes a cylinder body 151 attached to the base portion 11 and a movable member 152 that slides relative to the cylinder body 151. The air cylinder 15 is provided to move the suction cups 13 a and 13 c with respect to the base portion 11. The air cylinder 15 is an example of the “lifting member” in the present invention.

The cylinder body 151 is provided with a fitting 151a for an air hose (not shown) so that air can be supplied and discharged via the air hose. An arm 152a is provided at the tip of the movable member 152, and the suction cup 13a is rotatably attached to the arm 152a. In the air cylinder 15, the movable member 152 slides relative to the cylinder body 151 by supplying and discharging air.

The elevating member 2 is provided on the slide member 3 and is configured to move up and down with respect to the slide member 3. Thereby, the peeling mechanism part 1 attached to the raising / lowering member 2 raises / lowers with respect to the conveyance member 300. As shown in FIG.

The slide member 3 is provided on the frame 4 (see FIG. 2) and is configured to move in the horizontal direction (Y1 and Y2 directions) with respect to the frame 4. As a result, the peeling mechanism unit 1 and the elevating member 2 move between the placement unit 301 and the temporary placement unit 302 above the transport member 300.

-Operation-
Next, the operation of the peeling apparatus 100 according to the present embodiment will be described with reference to FIGS. Hereinafter, a case where the illuminating body 200 on which the protective sheet 250 is attached to the peeling device 100 is sequentially conveyed by the conveying member 300 will be described as an example.

First, as shown in FIG. 1, the illumination member 200 on which the protective sheet 250 is attached is conveyed (supplied) by the conveying member 300. Accordingly, the illuminating body 200 is disposed below the peeling mechanism unit 1.

The illuminating body 200 is placed on the placement unit 301 of the transport member 300 and is held by the transport member 300. In the illuminator 200, a short side 201a (see FIG. 9) having a wide width of the double-sided tape 201 having a rectangular frame shape is arranged on the X1 direction side.

3 and 4, the lifting member 2 moves (lowers) in the Z1 direction, so that the plurality of suction cups 12 are brought into contact with the protective sheet 250. In this state, each suction cup 12 sucks the protective sheet 250.

In addition, the suction cup 12 (refer FIG. 2) is provided in matrix form, and hold | maintains the protective sheet 250 entirely. The suction cup 12a is set so that the suction force is higher than the

suction cups

12b and 12c. Further, the suction forces of the

suction cups

12b and 12c may be set to be the same, or the suction cup 12b may be set to have a higher suction power than the suction cup 12c.

Thereafter, when the air cylinder 15 is operated, the movable member 152 moves in the direction D as shown in FIG. The D direction is a direction inclined from the direction perpendicular to the surface 200a (see FIG. 9) of the illuminating body 200 to the X2 direction side (base part 11 side).

Here, the suction cup 13 a is rotatably provided on the movable member 152, and the suction cup 13 a moves in the D direction together with the movable member 152. Accordingly, the suction cup 12a moves in the D direction so as to be separated from the illuminating body 200 in a state where the protective sheet 250 is adsorbed, and thus the protective sheet 250 is peeled off from the end of the illuminating body 200 on the X1 direction side.

Further, the suction cup base 13c is connected to the suction cup base 13a by the connecting member 14, and the suction cup base 13c moves in the D direction together with the suction cup base 13a. Thereby, after the suction cup 12a starts to move, the suction cup 12c moves in the direction D away from the illuminating body 200 while adsorbing the protective sheet 250, so that the protective sheet 250 is further peeled from the illuminating body 200. That is, the protective sheet 250 is peeled in order from the end portion on the X1 direction side toward the end portion on the X2 direction side.

Thus, when the air cylinder 15 is activated, the suction cup 13a is rotated so that the suction cup 12a faces the X1 direction. Further, the connecting member 14 is elastically deformed, and the protrusion 132c of the suction cup base 13c is pressed by the holding rod 133a of the suction cup base 13a. For this reason, the suction cup 12c is arrange | positioned in the position lower than the suction cup 12a. Moreover, since the suction cup stand 13b is provided in the base part 11, the position of the suction cup 12b does not change. That is, the end portion of the protective sheet 250 on the X2 direction side remains attached to the illuminating body 200.

Thereafter, the elevating member 2 moves (rises) in the Z2 direction. Thereby, since the peeling mechanism part 1 raises, the edge part by the side of the X2 direction of the protective sheet 250 is also peeled from the illuminating body 200. Specifically, after the

suction cups

12a and 12c are moved, the suction cup 12b moves in the vertical direction (Z2 direction) away from the illuminating body 200 while adsorbing the protection sheet 250. Therefore, the X2 direction side of the protection sheet 250 The end is peeled from the illuminating body 200. Thereby, the protective sheet 250 is completely peeled from the illuminating body 200.

Then, the operation of the air cylinder 15 is released. As a result, as shown in FIG. 6, the protective sheet 250 is disposed above the illuminating body 200 with the sucker 12 adsorbing the peeled protective sheet 250. At this time, the protrusion 132a of the suction cup 13a is supported by the support rod 11b, and the protrusion 132c of the suction cup 13c is supported by the

support rods

11a and 11b. Thereby, the elastic deformation of the connecting member 14 is eliminated, and the peeled protective sheet 250 is held by the suction cup 12 in a substantially flat state.

Then, the slide member 3 moves to the Y1 direction side. Accordingly, as shown in FIG. 7, the peeled protective sheet 250 is disposed above the temporary placement portion 302 of the transport member 300. Thereafter, the elevating member 2 moves (lowers) in the Z1 direction, and the protective sheet 250 is placed on the temporary placement unit 302. Then, the suction of the protective sheet 250 by the suction cup 12 is released. Thereafter, the elevating member 2 moves (rises) in the Z2 direction, and the slide member 3 moves in the Y2 direction, whereby the peeling mechanism unit 1 is returned to the original position as shown in FIG.

In this manner, the protective sheet 250 attached to the illuminating body 200 is peeled off, and the peeled protective sheet 250 is placed on the temporary placement unit 302. Thereafter, the illuminating body 200 and the peeled protective sheet 250 are conveyed (discharged) by the conveying member 300, and the new illuminating body 200 to which the protective sheet 250 is attached is conveyed (supplied).

After that, the above operation is repeated.

-effect-
In the present embodiment, as described above, the plurality of suction cups 12 that adsorb the protection sheet 250 are provided, and the

suction cups

12a, 12c, and 12b sequentially move away from the lighting body 200, whereby the plurality of suction cups 12 are protected. The protective sheet 250 can be peeled in order from the one end side of the illuminating body 200 toward the other end side in a state where the 250 is adsorbed and held. Accordingly, the protective sheet 250 can be peeled off with a small force, and deformation of the protective sheet 250 at the time of peeling can be suppressed, so that it is possible to suppress the load on the protective sheet 250. Therefore, since the protective sheet 250 is hardly damaged or curled, the peeled protective sheet 250 can be reused. For example, the protective sheet 250 peeled off from the illuminating body 200 before the inspection can be attached to the illuminating body 200 after the inspection.

Moreover, in this embodiment, when the suction cup base 13a is moved by the air cylinder 15 by providing the connecting member 14 for connecting the

suction cup bases

13a and 13c, the suction cup base 13c is moved along with the suction cup base 13a. Can do.

In the present embodiment, the protective sheet 250 is peeled off by peeling the protective sheet 250 in two steps, that is, the action of moving the

suction cups

12a and 12c in the D direction and the action of moving the suction cup 12b in the Z2 direction. 250 is disposed above the illuminating body 200. That is, since the protective sheet 250 can be peeled in a region corresponding to the illuminating body 200, it is possible to suppress the peeling device 100 from becoming large.

Moreover, in this embodiment, the suction force of the suction cup 12a is made higher than that of the

suction cups

12b and 12c, thereby protecting the one end side (X1 direction side) where the short side 201a having the wide width of the double-sided tape 201 is disposed. The sheet 250 can be appropriately peeled off.

-Other embodiments-
In addition, embodiment disclosed this time is an illustration in all the points, Comprising: It does not become a basis of limited interpretation. Therefore, the technical scope of the present invention is not interpreted only by the above-described embodiments, but is defined based on the description of the scope of claims. Further, the technical scope of the present invention includes all modifications within the meaning and scope equivalent to the scope of the claims.

For example, in the present embodiment, an example in which the present invention is applied to the peeling device 100 provided in the inspection apparatus has been described. May be.

In the present embodiment, the illuminating body 200 is shown as an example of a work, but the present invention is not limited thereto, and a sheet may be attached to a work other than the illuminating body. Moreover, although the protective sheet 250 was shown as an example of a sheet | seat, it is not restricted to this, Sheets other than a protective sheet may be affixed on the workpiece | work.

In the present embodiment, the example in which the rectangular frame-shaped double-sided tape 201 is provided on the illuminating body 200 has been described. However, the present invention is not limited thereto, and the double-sided tape may be provided on the entire surface of the illuminating body. Further, an adhesive other than the double-sided tape may be provided on the lighting body.

Further, in the present embodiment, an example in which the illuminating body 200 is supplied to the peeling device 100 by the transport member 300 is shown, but the present invention is not limited thereto, and the peeling device may include a transport member that transports the illuminating body.

In this embodiment, the suction cups 12a (12b, 12c) are provided in one row. However, the present invention is not limited to this, and the suction cups 12a (12b, 12c) may be provided in a plurality of rows. Further, the suction cup 12c may not be provided between the

suction cups

12a and 12b.

Further, in the present embodiment, an example in which three suction cups 12a (12b, 12c) are provided on the suction cups 13a (13b, 13c) is shown, but the number is not limited to this, and how many suction cups are provided on the suction cups. There may be.

In the present embodiment, an example is shown in which the suction force of the suction cup 12a is set to be higher than that of the

suction cups

12b and 12c. However, the present invention is not limited to this, and the suction force of the suction cup can be set as appropriate. For example, it is preferable to set the suction force of the suction cup according to the location where the protective sheet is applied to the illuminating body and the adhesive force thereof.

In the present embodiment, an example in which the suction cup 13a is pulled up by the air cylinder 15 has been described. However, the present invention is not limited to this, and the suction cup may be lifted by an electromagnetic solenoid actuator or the like.

In the present embodiment, the example in which the operation of the air cylinder 15 is released after the elevating member 2 is raised and before the slide member 3 is moved in the horizontal direction is shown. The timing at which the operation of the air cylinder is released may be any time after the rise.

In the present embodiment, an example in which the protective sheet 250 is attached so as to cover the entire surface of the illuminating body 200 has been described. However, the present invention is not limited thereto, and the protective sheet is attached so as to cover a part of the surface of the illuminating body. It may be done. Moreover, the protective sheet may protrude from the illuminating body, or the protective sheet may be accommodated in the illuminating body.

The present invention can be used for a peeling apparatus and a peeling method for peeling a sheet attached to a workpiece.

11 Base part 12 Suction cup (Suction part)
12a Suction cup (first suction part)
12b Suction cup (second suction part)
12c Suction cup (third suction part)
14 Connecting member 15 Air cylinder (lifting member)
100 Peeling device 200 Illumination body (work)
250 Protection sheet (sheet)

Claims

A peeling device for peeling a sheet attached to a workpiece,
Comprising a plurality of adsorbing portions for adsorbing the sheet;
The plurality of suction units include a first suction unit disposed on one end side of the sheet and a second suction unit disposed on the other end side of the sheet,
The first suction unit is configured to move away from the workpiece in a state where the sheet is sucked,
The second suction unit is configured to move away from the workpiece while the sheet is sucked after the first suction unit is moved.
In the peeling apparatus of Claim 1,
The plurality of adsorption units include a third adsorption unit disposed between the first adsorption unit and the second adsorption unit,
The third suction unit is configured to move away from the workpiece while the sheet is sucked after the first suction unit is moved and before the second suction unit is moved. A peeling device characterized by the above.
In the peeling apparatus of Claim 2,
The first suction part and the third suction part are configured to move in a direction inclined from the direction perpendicular to the workpiece to the other end side of the sheet,
The peeling device, wherein the second suction unit is configured to move in a direction perpendicular to the workpiece.
In the peeling apparatus of Claim 3,
A base portion provided with the second adsorption portion;
An elastically deformable connecting member that connects the first suction portion, the second suction portion, and the third suction portion;
A peeling apparatus comprising: a pulling member provided on the base portion and pulling up the first suction portion obliquely upward.
The peeling apparatus according to any one of claims 1 to 4,
The workpiece includes a lighting body,
The said sheet | seat contains the protection sheet which protects the said illumination body, The peeling apparatus characterized by the above-mentioned.
A peeling method in a peeling apparatus comprising a plurality of suction portions for sucking a sheet attached to a workpiece, and peeling the sheet,
The plurality of suction units include a first suction unit disposed on one end side of the sheet and a second suction unit disposed on the other end side of the sheet,
The first suction part and the second suction part sucking the sheet;
Moving the first suction part away from the workpiece in a state of sucking the sheet;
And a step of moving the second suction portion away from the workpiece in a state where the second suction portion sucks the sheet after the first suction portion is moved.