TW202007624A - Film take-out device and method for manufacturing flexible printed circuit board including a first suction member, a second suction member, a fist lifting member, a second lifting member and a control portion - Google Patents

Film take-out device and method for manufacturing flexible printed circuit board including a first suction member, a second suction member, a fist lifting member, a second lifting member and a control portion Download PDF

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TW202007624A
TW202007624A TW108126185A TW108126185A TW202007624A TW 202007624 A TW202007624 A TW 202007624A TW 108126185 A TW108126185 A TW 108126185A TW 108126185 A TW108126185 A TW 108126185A TW 202007624 A TW202007624 A TW 202007624A
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suction
film
control
lifting
unit
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TW108126185A
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Chinese (zh)
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TWI791873B (en
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藤村隆之
高木弘喜
岡修平
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日商日本美可多龍股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00Separating articles from piles
    • B65H3/08Separating articles from piles using pneumatic force
    • B65H3/0808Suction grippers
    • B65H3/0816Suction grippers separating from the top of pile
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00Separating articles from piles
    • B65H3/46Supplementary devices or measures to assist separation or prevent double feed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00Separating articles from piles
    • B65H3/46Supplementary devices or measures to assist separation or prevent double feed
    • B65H3/50Elements, e.g. fingers, plates, rollers, inserted or traversed between articles to be separated and remainder of the pile
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/10Handled articles or webs
    • B65H2701/11Dimensional aspect of article or web
    • B65H2701/113Size
    • B65H2701/1131Size of sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/10Handled articles or webs
    • B65H2701/17Nature of material
    • B65H2701/173Metal

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

無。

Description

薄膜取出裝置以及柔性印刷電路板的製造方法Film take-out device and method for manufacturing flexible printed circuit board

本發明涉及薄膜取出裝置和柔性印刷電路板的製造方法。The invention relates to a film taking-out device and a method of manufacturing a flexible printed circuit board.

在柔性印刷電路板的製造步驟中,存在有:從層疊有多個銅箔等的薄膜狀部件之部位中取出一個薄膜狀部件,並提供給其他處理部位的步驟。作為這樣的取出柔性印刷電路板的製造中使用之薄膜狀部件的裝置,存在有專利文獻1中所揭露的裝置。在專利文獻1所揭露之構成中,作為用於防止同時取出兩個薄膜狀部件之機構,具體如下,即:在多個薄膜狀部件的層疊狀態下,在利用真空吸盤吸附位於層疊順序之最上面位置的薄膜狀部件之後,使第一氣缸工作而抬高移動框架。 (先前技術文獻) (專利文獻)In the manufacturing steps of the flexible printed circuit board, there is a step of taking out one film-like member from a part where a plurality of film-like members such as copper foil are stacked and providing it to other processing parts. As a device for taking out the film-like member used in the manufacture of such a flexible printed circuit board, there is a device disclosed in Patent Document 1. In the configuration disclosed in Patent Document 1, the mechanism for preventing the simultaneous removal of two film-shaped members is specifically as follows. After the film-like member in the upper position, the first cylinder is operated to raise the moving frame. (Prior technical literature) (Patent Literature)

專利文獻1:日本專利實開昭59-108744號公報Patent Document 1: Japanese Patent Publication No. 59-108744

但是,在專利文獻1所揭露之構成中,是在層疊有多個薄膜狀部件的狀態下,按壓固定框架側和移動框架側之真空吸盤,在該按壓狀態下,不使固定框架側上昇,而是使移動框架側上昇。因此,有時薄膜狀部件彎曲而發生歪扭。尤其是,銅箔容易發生彎曲或形成折線等的變形,因此,若在真空吸盤之按壓狀態下抬高單側的移動框架側,則成為形成上述歪扭的原因。However, in the configuration disclosed in Patent Document 1, the vacuum chucks on the fixed frame side and the moving frame side are pressed in a state where a plurality of film-like members are stacked, and the fixed frame side is not raised in this pressed state. Instead, the mobile frame side is raised. Therefore, the film-like member may be bent and twisted. In particular, the copper foil is susceptible to bending or deformation such as fold lines. Therefore, if the one-side moving frame side is raised in the pressed state of the vacuum chuck, it causes the above-mentioned distortion.

這樣的歪扭,在製造柔性印刷電路板時成為不良的原因,因此並不理想。Such distortion is a cause of defects when manufacturing a flexible printed circuit board, and therefore it is not ideal.

本發明是鑒於上述問題而完成的,其目的在於提供一種:能夠以薄膜狀部件上不產生歪扭的狀態,防止同時取出多個薄膜狀部件之薄膜取出裝置以及柔性印刷電路板的製造方法。The present invention has been made in view of the above problems, and an object of the present invention is to provide a film taking-out device and a method for manufacturing a flexible printed circuit board that can prevent a plurality of film-like parts from being taken out simultaneously without causing distortion in the film-like parts.

為了解決上述課題,根據本發明的第一觀點,提供一種薄膜取出裝置,該薄膜取出裝置是取出柔性印刷電路板的製造中使用之薄膜狀部件的裝置,該薄膜取出裝置具有如下特徵。 本發明的薄膜取出裝置,具備:第一吸引構件,其能夠吸引保持薄膜狀部件之一邊緣部側,第二吸引構件,其能夠吸引保持薄膜狀部件之另一邊緣部側,第一昇降構件,其使第一吸引構件上昇或下降,第二昇降構件,其使第二吸引構件上昇或下降,控制部,其控制第一昇降構件和第二昇降構件之動作;控制部進行第一控制,在該第一控制中,控制第一昇降構件和第二昇降構件之動作,從而透過第一吸引構件和第二吸引構件,從層疊有多個薄膜狀部件之層疊體中吸引保持層疊在最上面的薄膜狀部件,在該第一控制之後,控制部進行第二控制,在該第二控制中,控制第一昇降構件和第二昇降構件中之至少一者的動作,從而使第一吸引構件和第二吸引構件中之任意一者相對於任意另一者相對地上昇或下降,由此,將被吸引保持之薄膜狀部件之外的其他薄膜狀部件抖落。In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided a film take-out device that takes out a film-shaped member used in the manufacture of a flexible printed circuit board. The film take-out device has the following features. The film take-out device of the present invention includes a first suction member capable of attracting and holding one of the edge portions of the film-like member, a second suction member capable of attracting and holding the other edge of the film-like member, and a first lifting member , Which raises or lowers the first suction member, the second lifting member, which raises or lowers the second suction member, and the control unit controls the operation of the first lifting member and the second lifting member; the control unit performs the first control, In this first control, the operation of the first elevating member and the second elevating member is controlled so that the first suction member and the second attraction member suck and hold the stacked top layer from the stacked body in which a plurality of film-like members are stacked After the first control, the control unit performs a second control in which the first suction member is controlled by controlling the operation of at least one of the first lifting member and the second lifting member When one of the second suction members is relatively raised or lowered relative to the other, the other film-shaped member other than the film-shaped member attracted and held is shaken off.

另外,本發明的另一側面,是在上述發明中,優選:在第一控制之後,控制部進行第三控制,在該第三控制中,控制第一昇降構件和第二昇降構件之動作,從而使透過第一吸引構件和第二吸引構件被吸引保持之薄膜狀部件,朝向從層疊體分離的方向移動,並且,在第三控制之後,控制部進行第二控制。In addition, another aspect of the present invention is that in the above invention, preferably, after the first control, the control section performs a third control in which the operations of the first elevating member and the second elevating member are controlled, As a result, the film-like member sucked and held by the first suction member and the second suction member moves in a direction away from the laminate, and after the third control, the control section performs the second control.

另外,本發明的另一側面,是在上述發明中,優選:第一昇降構件具備使第一吸引構件之長度方向的一側上昇或下降的一側第一昇降構件和使第一吸引構件之長度方向的另一側上昇或下降的另一側第一昇降構件,第二昇降構件具備使第二吸引構件之長度方向的一側上昇或下降的一側第二昇降構件和使第二吸引構件之長度方向的另一側上昇或下降的另一側第二昇降構件,在第二控制中,控制部進行如下控制:控制一側第一昇降構件之之動作,使第一吸引構件之長度方向的一側上昇,在該動作開始之後,控制另一側第一昇降構件之動作,使第一吸引構件之長度方向的另一側上昇,進一步地,控制一側第二昇降構件之動作,使第二吸引構件之長度方向的一側上昇,在該動作開始之後,控制另一側第二昇降構件之動作,使第二吸引構件之長度方向的另一側上昇。In addition, another aspect of the present invention is the above invention, it is preferable that the first elevating member includes a side first elevating member that raises or lowers one side of the first suction member in the longitudinal direction, and The other side first raising and lowering member that rises or falls on the other side in the longitudinal direction, the second raising and lowering member includes a second raising and lowering member that raises or lowers one side in the longitudinal direction of the second suction member and a second suction member In the second control, the control unit performs the following control to control the operation of the first lifting member on one side so that the length of the first suction member After the start of the operation, the movement of the first lifting member on the other side is controlled to raise the other side in the longitudinal direction of the first suction member. Further, the movement of the second lifting member on the one side is controlled so that One side of the second suction member in the longitudinal direction rises, and after the start of the operation, the operation of the second lifting member on the other side is controlled to raise the other side of the second suction member in the longitudinal direction.

另外,本發明的另一側面,是在上述發明中,優選:在第二控制中,控制第一昇降構件和第二昇降構件之動作,從而形成使第一吸引構件和第二吸引構件中之任意一者,朝向從層疊體分離的方向移動,且使第一吸引構件和第二吸引構件中之任意另一者不移動的狀態,並且,在該動作開始之後,控制第一昇降構件和第二昇降構件之動作,從而形成使第一吸引構件和第二吸引構件中之任意一者不移動的狀態,且使第一吸引構件和第二吸引構件中之剩餘一者,朝向從層疊體分離的方向移動。In addition, another aspect of the present invention is that in the above invention, preferably: in the second control, the operation of the first lifting member and the second lifting member is controlled to form one of the first suction member and the second suction member Either, move toward the direction of separation from the laminated body, and make the other one of the first suction member and the second suction member not move, and after the start of the operation, control the first lifting member and the first The movements of the two lifting members form a state in which neither the first suction member nor the second suction member moves, and the remaining one of the first suction member and the second suction member is separated from the laminate Moving in the direction of.

另外,本發明的另一側面,是在上述發明中,優選:薄膜取出裝置,具備:分離構件,其被插入相鄰的薄膜狀部件之間,防止這些薄膜狀部件之間之吸附,移動構件,其使該分離構件移動,從而將分離構件插入相鄰的薄膜狀部件之間;控制部控制移動構件之動作,並且,在第三控制之後,控制部進行第四控制,在該第四控制中,控制移動構件之動作,從而將分離構件配置在如下位置,即:透過第一吸引構件和第二吸引構件被保持之薄膜狀部件和層疊體之最上面的薄膜狀部件之間。In addition, another aspect of the present invention is the above-mentioned invention. Preferably, the film take-out device includes a separating member that is inserted between adjacent film-like members to prevent adsorption between the film-like members and to move the member , Which moves the separating member to insert the separating member between adjacent film-like members; the control section controls the movement of the moving member, and, after the third control, the control section performs a fourth control, where the fourth control In controlling the movement of the moving member, the separating member is arranged at a position between the film-like member held by the first suction member and the second suction member and the uppermost film-like member of the laminate.

另外,本發明的另一側面,是在上述發明中,優選:薄膜取出裝置具備吸附底座,該吸附底座能夠將薄膜狀部件呈平面狀地吸引保持,並且,能夠相對於層疊體上昇或下降,該吸附底座的動作是透過控制部被控制;在第四控制之後,控制部進行第五控制,在該第五控制中,控制第一吸引構件和第二吸引構件之動作,從而解除透過第一吸引構件和第二吸引構件被保持之薄膜狀部件的保持,由此,將薄膜狀部件層疊在層疊體上,在第五控制之後,控制部進行如下控制:透過使吸附底座下降,利用該吸附底座按壓該層疊體,並且,控制吸附底座之動作,從而吸引保持層疊體之最上面的薄膜狀部件。In addition, in another aspect of the present invention, in the above invention, it is preferable that the film take-out device includes an adsorption base capable of attracting and holding the film-like member in a planar state, and capable of rising or falling relative to the laminate, The operation of the suction base is controlled through the control section; after the fourth control, the control section performs a fifth control in which the movement of the first suction member and the second suction member is controlled to release the transmission through the first The suction member and the second suction member are held by the held film-like member, whereby the film-like member is laminated on the laminate, and after the fifth control, the control section performs the following control: by lowering the suction base, the suction is utilized The base presses the laminated body, and controls the operation of attracting the base, thereby attracting and holding the uppermost film-like member of the laminated body.

另外,本發明的另一側面,是在上述發明中,優選:第一吸引構件和第二吸引構件具備吸附吸盤,該吸附吸盤以彈性部件作為材質,並且,被設置為折皺狀。In addition, in another aspect of the present invention, in the above invention, it is preferable that the first suction member and the second suction member include a suction chuck made of an elastic member and configured to be wrinkled.

另外,根據本發明的第二觀點,提供一種柔性印刷電路板的製造方法,該柔性印刷電路板的製造方法是從層疊有多個薄膜狀部件的層疊體中取出最上面的薄膜狀部件,製造柔性印刷電路板的方法。 該柔性印刷電路板的製造方法之特徵在於,包括:吸引步驟,在該吸引步驟中,控制第一昇降構件和第二昇降構件之動作,從而透過能夠吸引保持薄膜狀部件之一邊緣部側的第一吸引構件和能夠吸引保持薄膜狀部件之另一邊緣部側的第二吸引構件,從層疊體中吸引保持層疊在最上面的薄膜狀部件;抖落步驟,該抖落步驟是在上述吸引步驟之後實施,在該抖落步驟中,使第一昇降構件和第二昇降構件中之至少一者動作,從而使第一吸引構件和第二吸引構件中之任意一者相對於任意另一者相對地上昇或下降,由此,抖落被吸引保持之薄膜狀部件之外的其他薄膜狀部件,其中,上述第一昇降構件使第一吸引構件上昇或下降,上述第二昇降構件使第二吸引構件上昇或下降。 (發明功效)In addition, according to a second aspect of the present invention, there is provided a method for manufacturing a flexible printed circuit board in which the uppermost film-shaped member is taken out from a laminate in which a plurality of film-shaped members are stacked and manufactured Flexible printed circuit board method. The manufacturing method of the flexible printed circuit board is characterized by comprising: a suction step in which the operation of the first lifting member and the second lifting member is controlled so as to attract and hold one of the edge parts of the film-like member The first suction member and the second suction member capable of attracting and holding the other edge side of the film-like member, sucking and holding the film-like member stacked on the uppermost layer from the laminated body; a shake-off step, the shake-off step is the above-mentioned suction After the step is performed, in this shaking-off step, at least one of the first lifting member and the second lifting member is operated, so that any one of the first suction member and the second suction member is relative to any other Relatively rising or falling, thereby shaking off other film-shaped members other than the film-shaped member that is attracted and held, wherein the first lifting member raises or lowers the first suction member, and the second lifting member makes the second The attracting member goes up or down. (Effect of invention)

根據本發明,能夠提供一種:能夠以薄膜狀部件上不產生歪扭的狀態,防止同時取出多個薄膜狀部件之薄膜取出裝置以及柔性印刷電路板的製造方法。According to the present invention, it is possible to provide a film taking-out device and a method for manufacturing a flexible printed circuit board that can prevent a film-like member from being taken out at the same time in a state where no distortion occurs on the film-like member.

以下,對本發明一實施方式涉及之薄膜取出裝置10進行說明。在以下的說明中,將支承軸41的長度方向作為X方向,X1側為圖1中的紙面右側,X2側為圖1中的紙面左側。另外,將連接第一吸附單元20和第二吸附單元120的方向作為Y方向,Y1側為圖1中的紙面前側,Y2側為圖1中的紙面後側。另外,將連接圖5中的吸附底座220和載置台單元200的方向(上下方向)作為Z方向,Z1側為圖5中的紙面後側(上側),Z2側為圖5中的紙面前側(下側)。 (關於薄膜取出裝置的構成)Hereinafter, the film take-out device 10 according to an embodiment of the present invention will be described. In the following description, the longitudinal direction of the support shaft 41 is referred to as the X direction, the X1 side is the right side of the paper surface in FIG. 1, and the X2 side is the left side of the paper surface in FIG. 1. In addition, let the direction connecting the first suction unit 20 and the second suction unit 120 be the Y direction, the Y1 side is the front side of the paper in FIG. 1, and the Y2 side is the rear side of the paper in FIG. 1. In addition, the direction (vertical direction) connecting the suction base 220 and the mounting table unit 200 in FIG. 5 is taken as the Z direction, the Z1 side is the paper back side (upper side) in FIG. 5, and the Z2 side is the paper front side in FIG. 5 ( Lower side). (About the structure of the film take-out device)

圖1係顯示薄膜取出裝置10之構成的概略圖。如圖1中所示,薄膜取出裝置10之主要構成元件包括:第一吸附單元20、第二吸附單元120、載置台單元200、控制部210以及吸附底座220(參照圖5)。FIG. 1 is a schematic diagram showing the configuration of the film take-out device 10. As shown in FIG. 1, the main constituent elements of the film take-out device 10 include a first suction unit 20, a second suction unit 120, a stage unit 200, a control unit 210, and a suction base 220 (see FIG. 5 ).

其中,第一吸附單元20具備:吸附保持部30、轉動機構40、吸引機構50、昇降機構60以及分離板單元70。其中,吸附保持部30對應於第一吸引構件之一部分。另外,第一吸引構件不僅對應於吸附保持部30,還對應於吸引機構50。Among them, the first suction unit 20 includes a suction holding unit 30, a rotation mechanism 40, a suction mechanism 50, a lifting mechanism 60, and a separation plate unit 70. Among them, the suction holding portion 30 corresponds to a part of the first suction member. In addition, the first suction member corresponds not only to the suction holding portion 30 but also to the suction mechanism 50.

圖2係顯示吸附保持部30之概略構成的圖。圖2中所示之吸附保持部30是吸附保持薄膜狀部件S的部分,該吸附保持部30安裝於構成轉動機構40的支承軸41上。該吸附保持部30具備吸附吸盤31,該吸附吸盤31安裝于支承臂32上。FIG. 2 is a diagram showing a schematic configuration of the adsorption and holding unit 30. The suction holding portion 30 shown in FIG. 2 is a portion that suction-holds the film-shaped member S, and the suction holding portion 30 is attached to a support shaft 41 that constitutes the rotating mechanism 40. The suction holding portion 30 includes a suction chuck 31 that is attached to the support arm 32.

該吸附吸盤31之材質,由例如橡膠或彈性體等的具有彈性之彈性部件形成。因此,構成為:即使吸附吸盤31的前端側之薄膜抵接部31a抵接在薄膜狀部件S上,也不會對薄膜狀部件S造成損傷。另外,吸附吸盤31是設置為折皺狀的筒狀部件。因此,薄膜抵接部31a的方向能夠跟隨薄膜狀部件S容易發生變化,因此,即使薄膜狀部件S上產生翹曲等的變形,也能夠跟隨其變形。The material of the suction pad 31 is formed of an elastic member having elasticity such as rubber or an elastic body. Therefore, the configuration is such that even if the film contact portion 31 a of the front end side of the suction chuck 31 abuts on the film-shaped member S, the film-shaped member S will not be damaged. In addition, the suction chuck 31 is a cylindrical member provided in a wrinkle shape. Therefore, the direction of the film contact portion 31a can easily change following the film-shaped member S, and therefore, even if deformation such as warpage occurs in the film-shaped member S, it can follow the deformation.

另外,吸附吸盤31安裝于支承臂32之前端側(一端側)。支承臂32由例如金屬等的具有剛性之部件形成,該支承臂32能夠支承吸附吸盤31和吸引分支管道。另外,支承臂32透過轉動機構40進行轉動,由此,構成為:能夠進行使吸附吸盤31抵接在薄膜狀部件S的抵接動作和使吸附吸盤31從薄膜狀部件S分離的退避動作。In addition, the suction chuck 31 is attached to the front end side (one end side) of the support arm 32. The support arm 32 is formed of a rigid member such as metal. The support arm 32 can support the suction chuck 31 and the suction branch pipe. In addition, the support arm 32 is rotated by the rotation mechanism 40, and thus, it is configured to be able to perform the contact operation of bringing the suction chuck 31 into contact with the film member S and the retreating operation of separating the suction chuck 31 from the film member S.

圖3係顯示吸附保持部30、轉動機構40、吸引機構50以及昇降機構60之概略構成的圖。轉動機構40具備支承軸41、支承柱42以及轉動用驅動器43。支承軸41是供支承臂32之另一端側安裝的部分,是透過後述的轉動用驅動器43之工作而轉動的部件。該支承軸41是至少兩個部位以能夠轉動的方式支承于支承柱42上的軸部件。另外,支承柱42是從框架44豎立設置的部件,是支承支承軸41或吸附保持部30的部分。另外,框架44是支承支承柱42的部件,例如,配置于支承柱42之下方側的由金屬製成之長部件為框架。FIG. 3 is a diagram showing a schematic configuration of the suction holding section 30, the rotation mechanism 40, the suction mechanism 50, and the lifting mechanism 60. The rotation mechanism 40 includes a support shaft 41, a support column 42, and a rotation driver 43. The support shaft 41 is a portion to which the other end side of the support arm 32 is attached, and is a member that is rotated by the operation of a rotation driver 43 described later. The support shaft 41 is a shaft member that is rotatably supported on the support column 42 in at least two locations. In addition, the support column 42 is a member erected from the frame 44 and is a portion that supports the support shaft 41 or the suction holding portion 30. The frame 44 is a member that supports the support column 42. For example, a long member made of metal disposed below the support column 42 is a frame.

另外,在支承軸41之一端側上,經由驅動傳遞機構45安裝有轉動用驅動器43。透過該轉動用驅動器43的工作,使支承軸41轉動。該轉動動作中之一端部為吸附吸盤31抵接於薄膜狀部件S的抵接動作之終點,而該轉動動作中之另一端部為吸附吸盤31從薄膜狀部件S分離的退避動作之終點。在此,作為轉動用驅動器43,可以使用例如空氣氣缸、液壓缸、電磁缸、電磁線圈以及電動機等。另外,轉動用驅動器43也可以直接連結在支承軸41上。In addition, on one end side of the support shaft 41, a driver 43 for rotation is mounted via a drive transmission mechanism 45. The operation of the rotation driver 43 causes the support shaft 41 to rotate. One end of the rotation operation is the end point of the contact operation of the suction chuck 31 against the film member S, and the other end of the rotation operation is the end point of the retraction operation of the suction chuck 31 separated from the film member S. Here, as the rotation driver 43, for example, an air cylinder, a hydraulic cylinder, an electromagnetic cylinder, an electromagnetic coil, a motor, and the like can be used. In addition, the rotation driver 43 may be directly connected to the support shaft 41.

另外,吸引機構50具備吸引泵51和吸引管道52。吸引泵51是施加負壓的部件,該負壓用於透過吸附吸盤31吸引保持薄膜狀部件S。該吸引泵51上連接有吸引管道52之一端側,該吸引管道52之另一端側連接在吸附吸盤31上。因此,當吸引泵51進行工作,吸附吸盤31抵接在薄膜狀部件S上時,能夠透過吸附吸盤31吸引保持薄膜狀部件S。In addition, the suction mechanism 50 includes a suction pump 51 and a suction duct 52. The suction pump 51 is a member that applies negative pressure for sucking and holding the film-shaped member S through the suction pad 31. One end of the suction duct 52 is connected to the suction pump 51, and the other end of the suction duct 52 is connected to the suction chuck 31. Therefore, when the suction pump 51 operates and the suction chuck 31 abuts on the film-shaped member S, the film-shaped member S can be sucked and held through the suction chuck 31.

另外,關於吸引管道52,只要是例如由具有彈性的材質形成之管道、金屬或樹脂制之導管等能夠使空氣流通的筒狀部件,便可以使用任何一種部件。另外,當上述支承臂32設置為筒狀時,該支承臂32也為吸引管道52之一個構成元件。In addition, as for the suction duct 52, any member can be used as long as it is a tubular member capable of circulating air, such as a duct formed of an elastic material, a duct made of metal or resin, or the like. In addition, when the support arm 32 is provided in a cylindrical shape, the support arm 32 is also a constituent element of the suction duct 52.

另外,昇降機構60是用於使上述的吸附保持部30、轉動機構40以及吸引管道52之至少一部分上昇或下降的機構。另外,也可以構成為:昇降機構60不僅使吸引管道52之至少一部分上昇或下降,還可以使吸引泵51上昇或下降。另外,昇降機構60對應於第一昇降構件。該昇降機構60分別配置在框架44之長度方向的兩端側。該昇降機構60具備懸掛部件61和昇降缸62。In addition, the elevating mechanism 60 is a mechanism for raising or lowering at least a part of the above-mentioned suction holding portion 30, the rotating mechanism 40, and the suction duct 52. In addition, the lift mechanism 60 may be configured not only to raise or lower at least a part of the suction duct 52, but also to raise or lower the suction pump 51. In addition, the lifting mechanism 60 corresponds to the first lifting member. The elevating mechanisms 60 are arranged on both ends of the frame 44 in the longitudinal direction. The lifting mechanism 60 includes a suspension member 61 and a lifting cylinder 62.

懸掛部件61是連接框架44之端部和昇降缸62的活塞杆之前端部的機構,例如,該懸掛部件61可以使用聯杆機構或軸承等。尤其是,當使用聯杆機構時,能夠進行使框架44的一端側之昇降缸62和框架44的另一端側之昇降缸62以不同的時機(timing)上昇或下降的動作,由此,能夠使框架44和支承於該框架44之吸附保持部30等傾斜。The suspension member 61 is a mechanism that connects the end of the frame 44 and the front end of the piston rod of the lift cylinder 62. For example, the suspension member 61 may use a link mechanism or a bearing. In particular, when the link mechanism is used, the lifting cylinder 62 at one end of the frame 44 and the lifting cylinder 62 at the other end of the frame 44 can be raised or lowered at different timings. The frame 44 and the suction holding portion 30 supported by the frame 44 are inclined.

但是,關於懸掛部件61,也可以不使用聯杆機構或軸承,而是使用例如金屬制的柱狀部件連接框架44和昇降缸62之間。另外,昇降缸62之活塞杆通常是不能傾斜的,因此,當懸掛部件61由金屬制的柱狀部件構成時,優選進行:使框架44的一端側之昇降缸62和框架44的另一端側之昇降缸62以同一時機上昇或下降的動作。However, the suspension member 61 may not use a link mechanism or a bearing, but may use a columnar member made of metal, for example, to connect the frame 44 and the lift cylinder 62. In addition, the piston rod of the lifting cylinder 62 is usually not tiltable. Therefore, when the suspension member 61 is made of a metal columnar member, it is preferable to make the lifting cylinder 62 at one end of the frame 44 and the other end of the frame 44 The lifting cylinder 62 moves up or down at the same timing.

另外,昇降缸62是施加驅動力的部件,利用該驅動力,使框架44或吸附保持部30等上昇或下降。作為該昇降缸62,可以使用例如空氣氣缸、液壓缸、電磁缸、電磁線圈以及電動機等。In addition, the lifting cylinder 62 is a member that applies a driving force, and the driving force is used to raise or lower the frame 44 or the suction holding section 30 and the like. As the lift cylinder 62, for example, an air cylinder, a hydraulic cylinder, an electromagnetic cylinder, an electromagnetic coil, a motor, and the like can be used.

圖4係顯示分離板單元70之概略構成的圖。如圖4中所示,分離板單元70具備分離板71、支承臂72、連接橫樑73、分離板驅動器74以及導向部件75。分離板71是如下的板狀部件,即:在維持層疊體PS(參照圖5)之最上面的薄膜狀部件S透過吸附保持部30被保持的狀態不變的情況下被抬高時,插入被抬高之薄膜狀部件S和位於該被抬高之薄膜狀部件S的正下方的薄膜狀部件S之間。透過該分離板71的插入,即使之後被吸附保持部30保持的薄膜狀部件S下降,也能夠防止被吸附保持部30保持之薄膜狀部件S與正下方的薄膜狀部件S貼緊而不能分離。另外,分離板71對應於分離構件。FIG. 4 is a diagram showing a schematic structure of the separation plate unit 70. As shown in FIG. 4, the separation plate unit 70 includes a separation plate 71, a support arm 72, a connecting beam 73, a separation plate driver 74 and a guide member 75. The separation plate 71 is a plate-shaped member that is inserted when it is raised while maintaining the state where the uppermost film-like member S of the laminated body PS (refer to FIG. 5) is held by the suction holding section 30. The raised film-like member S and the film-like member S located directly below the raised film-like member S. Through the insertion of the separation plate 71, even if the film-like member S held by the suction holding section 30 is lowered later, the film-like member S held by the suction holding section 30 can be prevented from being in close contact with the film-like member S directly below and cannot be separated . In addition, the separation plate 71 corresponds to a separation member.

在此,分離板71由不易對薄膜狀部件S造成損傷的材質形成。具體而言,分離板71由如下材質形成,即:即使因為薄膜狀部件S被施加按壓力,也能夠容易變形的材質。作為這種材質,可以舉出例如彈簧鋼或具有彈性的樹脂。另外,從防止塵埃附著於薄膜狀部件S的觀點出發,分離板71之材質優選為彈簧鋼。Here, the separation plate 71 is formed of a material that does not easily damage the film-shaped member S. Specifically, the separation plate 71 is formed of a material that can be easily deformed even if a pressing force is applied to the film-shaped member S. Examples of such a material include spring steel and elastic resin. In addition, from the viewpoint of preventing dust from adhering to the film-shaped member S, the material of the separation plate 71 is preferably spring steel.

另外,支承臂72是支承分離板71的部件,該支承臂72保持分離板71之一端側。另外,連接橫樑73是連接多個(圖1和圖4中為三個)支承臂72的部件。另外,分離板驅動器74對應於移動構件,是使支承臂72進行相對於薄膜狀部件S靠近或分離的動作的部分。作為這種分離板驅動器74,可以使用例如空氣氣缸、液壓缸、電磁缸、電磁線圈以及電動機等。另外,在本實施方式中,分離板驅動器74被安裝為能夠使連接橫樑73移動。另外,導向部件75是引導基於分離板驅動器74的工作進行之連接橫樑73的移動的部件,該導向部件75例如為導軌狀的部件或直線導軌等。In addition, the support arm 72 is a member that supports the separation plate 71, and the support arm 72 holds one end side of the separation plate 71. In addition, the connection beam 73 is a member that connects a plurality of support arms 72 (three in FIG. 1 and FIG. 4 ). In addition, the separation plate driver 74 corresponds to the moving member, and is a part that moves the support arm 72 toward or away from the film-like member S. As such a separation plate driver 74, for example, an air cylinder, a hydraulic cylinder, an electromagnetic cylinder, an electromagnetic coil, a motor, and the like can be used. In addition, in the present embodiment, the separating plate driver 74 is installed so as to be able to move the connecting beam 73. The guide member 75 is a member that guides the movement of the connecting beam 73 based on the operation of the separation plate driver 74. The guide member 75 is, for example, a rail-shaped member or a linear rail.

另外,如圖1中所示,第二吸附單元120具有與第一吸附單元20相同的構成。具體而言,第二吸附單元120具備:吸附保持部130、轉動機構140、吸引機構150、昇降機構160以及分離板單元170。In addition, as shown in FIG. 1, the second adsorption unit 120 has the same configuration as the first adsorption unit 20. Specifically, the second suction unit 120 includes a suction holding unit 130, a rotation mechanism 140, a suction mechanism 150, a lifting mechanism 160, and a separation plate unit 170.

即,吸附保持部130具備:具有薄膜抵接部131a之吸附吸盤131、以及支承臂132。另外,吸附保持部130對應於第二吸引構件之一部分。另外,轉動機構140具備支承軸141、支承柱142、轉動用驅動器143以及框架144。另外,吸引機構150具備吸引泵151和吸引管道152。另外,吸引機構150對應於第二吸引構件之一部分。另外,昇降機構160具備懸掛部件161和昇降缸162。另外,昇降機構160對應於第二昇降構件。另外,分離板單元170具備分離板171、支承臂172、連接橫樑173、分離板驅動器174以及導向部件175。另外,分離板171對應於分離構件,分離板驅動器174對應於移動構件。這些各部位,具有與第一吸附單元20的相對應部位之構成相同的構成,因此,省略其說明。That is, the suction holding portion 130 includes the suction chuck 131 having the film contact portion 131 a and the support arm 132. In addition, the suction holding portion 130 corresponds to a part of the second suction member. In addition, the rotation mechanism 140 includes a support shaft 141, a support column 142, a rotation driver 143, and a frame 144. In addition, the suction mechanism 150 includes a suction pump 151 and a suction duct 152. In addition, the suction mechanism 150 corresponds to a part of the second suction member. In addition, the lifting mechanism 160 includes a suspension member 161 and a lifting cylinder 162. In addition, the lifting mechanism 160 corresponds to the second lifting member. In addition, the separation plate unit 170 includes a separation plate 171, a support arm 172, a connecting beam 173, a separation plate driver 174, and a guide member 175. In addition, the separation plate 171 corresponds to the separation member, and the separation plate driver 174 corresponds to the moving member. Each of these parts has the same structure as that of the corresponding part of the first adsorption unit 20, and therefore, its description is omitted.

另外,薄膜取出裝置10具備載置台單元200。圖5係顯示包括載置台單元200和吸附底座220在內的薄膜取出裝置10之構成的概略圖,是從側面觀察薄膜取出裝置10之狀態的圖。如圖5中所示,載置台單元200具有載置台201、昇降導向件202以及載置台用氣缸203。In addition, the film take-out device 10 includes a mounting table unit 200. FIG. 5 is a schematic diagram showing the configuration of the film take-out device 10 including the mounting table unit 200 and the suction base 220, and is a view of the film take-out device 10 viewed from the side. As shown in FIG. 5, the mounting table unit 200 has a mounting table 201, an elevating guide 202, and a mounting table air cylinder 203.

載置台201是設置為平板狀的部件,在該載置台201的上面側載置有多個薄膜狀部件S。另外,昇降導向件202是如下的部件,即:透過以規定的間隔配置在載置台201之邊緣部側(例如,設置於載置台201之邊緣部側的凹部等),能夠引導載置台201沿上下方向(Z方向)上昇或下降,而不會發生位置偏移。另外,載置台用氣缸203是對載置台201賦予使其沿上下方向(Z方向)移動之驅動力的部件。作為該載置台用氣缸203,可以使用例如空氣氣缸、液壓缸、電磁缸、電磁線圈以及電動機等。The mounting table 201 is a plate-shaped member, and a plurality of film-shaped members S are mounted on the upper surface of the mounting table 201. In addition, the elevating guide 202 is a member capable of guiding the mounting table 201 along the edge of the mounting table 201 at a predetermined interval (for example, a concave portion provided on the edge of the mounting table 201). The vertical direction (Z direction) rises or falls without positional deviation. In addition, the air cylinder 203 for the mounting table is a member that imparts a driving force to move the mounting table 201 in the vertical direction (Z direction). As the air cylinder 203 for the mounting table, for example, an air cylinder, a hydraulic cylinder, an electromagnetic cylinder, an electromagnetic coil, a motor, and the like can be used.

另外,薄膜取出裝置10具備控制部210。該控制部210是控制第一吸附單元20和第二吸附單元120的各驅動部位之驅動的部分。具體而言,控制部210控制轉動用驅動器43、143、吸引泵51、151、昇降缸62、162以及分離板驅動器74、174之驅動。In addition, the film take-out device 10 includes a control unit 210. The control unit 210 is a part that controls the driving of each driving part of the first suction unit 20 and the second suction unit 120. Specifically, the control unit 210 controls the driving of the rotation drivers 43 and 143, the suction pumps 51 and 151, the lift cylinders 62 and 162, and the separation plate drivers 74 and 174.

另外,該控制部210例如是電腦,該控制部210,透過執行存儲在包括外部記憶裝置在內的記憶體中之規定的控制資料以及規定的控制程式,能夠執行各種控制動作。另外,關於控制部210所執行之控制動作,之後進行說明。In addition, the control unit 210 is, for example, a computer. The control unit 210 can execute various control operations by executing predetermined control data and a predetermined control program stored in a memory including an external memory device. In addition, the control operation performed by the control unit 210 will be described later.

如圖5中所示,吸附底座220具備吸附板221、移動機構連接部222、省略圖示之吸引構件、省略圖示之移動機構。吸附板221上設有多個省略圖示之吸引孔。因此,吸附板221能夠呈平面狀地吸引薄膜狀部件S。另外,移動機構連接部222是連接於省略圖示之移動機構上的部分。因此,透過移動機構的工作,能夠使吸附板221下降,或者,能夠將被吸附底座220吸引的薄膜狀部件S輸送至其他處理部位上。As shown in FIG. 5, the suction base 220 includes a suction plate 221, a moving mechanism connecting portion 222, a suction member (not shown), and a moving mechanism (not shown). The suction plate 221 is provided with a plurality of suction holes (not shown). Therefore, the suction plate 221 can attract the film-shaped member S in a planar shape. In addition, the moving mechanism connecting portion 222 is a portion connected to a moving mechanism not shown in the figure. Therefore, by the operation of the moving mechanism, the suction plate 221 can be lowered, or the film-shaped member S sucked by the suction base 220 can be transported to another processing site.

另外,薄膜狀部件S是柔性印刷電路板的製造中使用之薄膜狀的部件,例如為銅箔薄片、聚醯亞胺(polyimide)薄片等。另外,關於銅箔薄片或聚醯亞胺薄膜等的薄膜狀部件S,例如,可以在銅箔薄膜或聚醯亞胺薄膜等的基體材料上粘貼脫模用膜(release film)或保護膜等的其他薄膜部件,但也可以不粘貼這樣的薄膜部件。當對薄膜狀部件S中之例如銅箔材料或聚醯亞胺材料等的基體材料粘貼有其他的薄膜部件時,由於基體材料和薄膜部件之熱收縮率的不同,成為薄膜狀部件S上容易產生翹曲的狀態。In addition, the film-shaped member S is a film-shaped member used in the manufacture of a flexible printed circuit board, and is, for example, a copper foil sheet, a polyimide sheet, or the like. In addition, for the film-like member S such as a copper foil sheet or a polyimide film, for example, a release film or a protective film may be attached to a base material such as a copper foil film or a polyimide film. Other film parts, but it is not necessary to stick such film parts. When other film members are attached to a base material such as a copper foil material or a polyimide material in the film member S, due to the difference in thermal shrinkage between the base material and the film member, it becomes easy Warped state.

(關於控制動作) 以下,對使用具有如上構成的薄膜取出裝置10之柔性印刷電路板的製造方法進行說明。另外,在以下的說明中,依次記載第一步驟至第七步驟,當然,也可以在這些步驟之外,存在其他各種步驟。(About control actions) Hereinafter, a method for manufacturing a flexible printed circuit board using the film take-out device 10 configured as described above will be described. In the following description, the first step to the seventh step are described in order. Of course, there may be various other steps in addition to these steps.

(1)第一步驟:最上面的薄膜狀部件S之吸附保持(第一控制) 首先,如圖5中所示,將層疊有多個薄膜狀部件S之層疊體PS配置在規定的載置部位上。之後,如圖6中所示,控制部210使載置台用氣缸203進行工作,從而使載置台201上昇至規定的上昇位置,由此能夠使吸附保持部30的吸附吸盤31之前端部抵接在層疊體PS之最上面的薄膜狀部件S(以下,將該薄膜狀部件S稱為薄膜狀部件S1)上。此時,控制部210使吸引機構50之吸引泵51進行工作,從而透過吸附吸盤31吸引保持最上面的薄膜狀部件S。(1) First step: adsorption and retention of the uppermost film-like member S (first control) First, as shown in FIG. 5, the stacked body PS on which a plurality of film-shaped members S are stacked is arranged on a predetermined placement site. After that, as shown in FIG. 6, the control unit 210 operates the mounting table cylinder 203 to raise the mounting table 201 to a predetermined ascending position, whereby the front end of the suction chuck 31 of the suction holding unit 30 can be brought into contact On the uppermost film-shaped member S of the laminate PS (hereinafter, this film-shaped member S is referred to as a film-shaped member S1). At this time, the control unit 210 operates the suction pump 51 of the suction mechanism 50 to suck and hold the uppermost film-shaped member S through the suction chuck 31.

在此,在與吸附吸盤31抵接之最上面的薄膜狀部件S1上,有時如其端部側朝向上側(Z1側)那樣產生翹曲。但是,吸附吸盤31設置為波紋管狀,從而能夠進行彈性變形。因此,即使吸附吸盤31的前端部抵接在薄膜狀部件S1之產生翹曲的部位上,吸附吸盤31也能夠以仿效該翹曲的方式進行變形。因此,當吸附吸盤31的前端部抵接在最上面的薄膜狀部件S1上時,能夠防止對該抵接部位造成損傷。Here, on the uppermost film-like member S1 that is in contact with the suction chuck 31, warpage may sometimes occur as the end side faces upward (Z1 side). However, the suction chuck 31 is provided in a bellows shape, so that it can be elastically deformed. Therefore, even if the front end portion of the suction chuck 31 abuts on the warped portion of the film-like member S1, the suction chuck 31 can be deformed in a manner to imitate the warpage. Therefore, when the front end portion of the suction chuck 31 abuts on the uppermost film-like member S1, damage to the abutment portion can be prevented.

另外,控制部210也可以不使載置台用氣缸203工作,而是使昇降缸62進行工作,從而使吸附吸盤31朝向薄膜狀部件S1下降。即使如此,也能夠吸引保持最上面的薄膜狀部件S1。In addition, the control unit 210 may operate the lifting cylinder 62 instead of the mounting table cylinder 203 to lower the suction chuck 31 toward the film-shaped member S1. Even so, it is possible to attract and hold the uppermost film-like member S1.

(2)第二步驟:使最上面的薄膜狀部件S1從層疊體PS分離(第三控制) 接著,如圖7中所示,控制部210使載置台用氣缸203和昇降缸62進行工作,從而在吸附吸盤31吸引保持最上面的薄膜狀部件S之狀態(即,吸引泵51工作之狀態)下,使最上面的薄膜狀部件S從層疊體PS分離。(2) Second step: separating the uppermost film-like member S1 from the laminate PS (third control) Next, as shown in FIG. 7, the control unit 210 operates the stage air cylinder 203 and the lift cylinder 62 to suck and hold the uppermost film-like member S in the suction chuck 31 (that is, the state in which the suction pump 51 operates ), the uppermost film-like member S is separated from the laminate PS.

具體而言,控制部210使載置台用氣缸203進行工作,從而使載置台201下降至規定的退避位置。由此,在層疊體PS和被吸引保持之薄膜狀部件S1之間形成比較大的空間。此時,即使在將薄膜狀部件S1抬高之後,剩餘的層疊體PS中位於最上面的薄膜狀部件S(以下,將該薄膜狀部件S稱為薄膜狀部件S2)在假想的範圍內較大地翹曲,薄膜狀部件S和薄膜狀部件S2之間也會成為能夠可靠地形成間隙的空間。Specifically, the control unit 210 actuates the mounting table cylinder 203 to lower the mounting table 201 to a predetermined retreat position. Thus, a relatively large space is formed between the laminated body PS and the film-like member S1 that is attracted and held. At this time, even after the film-like member S1 is raised, the top-most film-like member S (hereinafter, the film-like member S will be referred to as the film-like member S2) of the remaining laminate PS is relatively small in the virtual range The ground is warped, and the space between the film-shaped member S and the film-shaped member S2 can also form a gap reliably.

(3)第三步驟:抖落動作的實施(第二控制) 然而,當抬高最上面的薄膜狀部件S1時,有時在該薄膜狀部件S1層疊時相鄰的下一個薄膜狀部件S2也一起被抬高。另外,有時還存在包括下一個薄膜狀部件S2在內的多個薄膜狀部件S一起被抬高的情況。尤其是,當薄膜狀部件S的表面粗糙度非常小時(薄膜狀部件S非常光滑時),空氣不易進入相鄰且貼緊的薄膜狀部件S之間,因此,容易產生這樣的薄膜狀部件S彼此間貼緊保持(以下,稱為同時取出多個薄膜狀部件S)的情況。(3) The third step: the implementation of shake-off action (second control) However, when the uppermost film-like member S1 is lifted, sometimes the next adjacent film-like member S2 is also lifted up when the film-like member S1 is stacked. In addition, there are cases where a plurality of film-shaped members S including the next film-shaped member S2 are lifted together. In particular, when the surface roughness of the film-like member S is very small (when the film-like member S is very smooth), air does not easily enter between the adjacent and closely-adjacent film-like members S, and therefore, such a film-like member S is easily generated A case where they are held tightly to each other (hereinafter, referred to as simultaneous removal of a plurality of film-shaped members S).

因此,假想在抬高層疊體PS之最上面的薄膜狀部件S1之後,其他的薄膜狀部件S貼緊該薄膜狀部件S1的情況,實施抖落其他的薄膜狀部件S之抖落動作。具體而言,控制部210將第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162控制為:不以同一時機工作,而是以不同的時機進行工作。以下,對這種抖落動作(第一動作例和第二動作例)進行說明。Therefore, it is assumed that after raising the uppermost film-like member S1 of the laminated body PS and other film-like members S are in close contact with the film-like member S1, the shaking-off operation of shaking off the other film-like member S is performed. Specifically, the control unit 210 controls the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side to operate not at the same timing but at different timings. Hereinafter, such a shaking-off operation (first operation example and second operation example) will be described.

(3-1)抖落動作的第一動作例 圖8係顯示第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162的動作時機之第一動作例的圖。如圖8中所示,控制部210最初使昇降缸62進行工作,使第一吸附單元20側的吸附保持部30上昇,但在同一時機內,不使第二吸附單元120側的吸附保持部130上昇,而是停止昇降缸162的工作。將該情況圖示於圖9中。於是,當使第一吸附單元20側的吸附保持部30上昇時,薄膜狀部件S1斜向傾斜。因此,空氣容易進入薄膜狀部件S1和與其貼緊的其他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。(3-1) The first action example of shake-off action 8 is a diagram showing a first operation example of the operation timing of the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side. As shown in FIG. 8, the control unit 210 initially operates the lift cylinder 62 to raise the suction holding unit 30 on the first suction unit 20 side, but at the same timing, does not make the suction holding unit on the second suction unit 120 side 130 rises, but the work of the lift cylinder 162 is stopped. This situation is shown in FIG. 9. Then, when the suction holding portion 30 on the side of the first suction unit 20 is raised, the film-like member S1 is inclined obliquely. Therefore, air easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and thus most of the other film-shaped member S falls from the film-shaped member S1.

接著,如圖8和圖10中所示,控制部210使昇降缸162進行工作,以與第一吸附單元20側的吸附保持部30上昇至規定位置的動作相繼地,使第二吸附單元120側的吸附保持部130上昇至規定位置。於是,成為第一吸附單元20側的吸附保持部30和第二吸附單元120側的吸附保持部130均上昇的狀態。Next, as shown in FIGS. 8 and 10, the control unit 210 causes the lift cylinder 162 to operate to move the second suction unit 120 in succession with the movement of the suction holding unit 30 on the first suction unit 20 side to a predetermined position. The suction holding unit 130 on the side rises to a predetermined position. As a result, the suction holding section 30 on the first suction unit 20 side and the suction holding section 130 on the second suction unit 120 side are both raised.

接著,控制部210控制為:使第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162再次以不同的時機進行工作。具體而言,如圖8和圖11中所示,在維持使第二吸附單元120側的吸附保持部130上昇的狀態不變的情況下,使第一吸附單元20側的吸附保持部30下降至規定位置。此時,薄膜狀部件S1斜向傾斜成第一吸附單元20側的吸附保持部30側位於下側(Z2側),而薄膜狀部件S1之第一吸附單元20側,則成為不與下一個薄膜狀部件S2接觸,而是與其具有間隔的狀態。Next, the control unit 210 controls the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side to operate at different timings again. Specifically, as shown in FIGS. 8 and 11, while maintaining the state where the adsorption holding portion 130 on the second adsorption unit 120 side is raised, the adsorption holding portion 30 on the first adsorption unit 20 side is lowered To the specified location. At this time, the film-shaped member S1 is inclined obliquely so that the suction holding portion 30 side of the first suction unit 20 side is located on the lower side (Z2 side), while the first suction unit 20 side of the film-shaped member S1 becomes different from the next The film-like member S2 is in contact with, but in a state of being spaced from.

接著,如圖8和圖12中所示,控制部210使昇降缸162進行工作,以與第一吸附單元20側的吸附保持部30下降至規定位置的動作相繼地,在維持第一吸附單元20側的吸附保持部30下降之狀態不變的情況下,使第二吸附單元120側的吸附保持部130下降至規定位置。此時,薄膜狀部件S1之第二吸附單元120側也與薄膜狀部件S1之第一吸附單元20側同樣地,成為不與下一個薄膜狀部件S2接觸,而是與其具有間隔的狀態。Next, as shown in FIGS. 8 and 12, the control unit 210 causes the lift cylinder 162 to operate to maintain the first suction unit in succession after the suction holding unit 30 on the first suction unit 20 side is lowered to a predetermined position. When the state in which the suction holding section 30 on the 20 side is lowered does not change, the suction holding section 130 on the second suction unit 120 side is lowered to a predetermined position. At this time, the second suction unit 120 side of the film-like member S1 is also in a state of being spaced apart from the next film-like member S2 in the same manner as the first suction unit 20 side of the film-like member S1.

接著,如圖8和圖9中所示,控制部210進行如下控制,即:使昇降缸62進行工作,以與第二吸附單元120側的吸附保持部130下降至規定位置的動作相繼地,再次使第一吸附單元20側的吸附保持部30上昇,但在同一時機內,不使第二吸附單元120側的吸附保持部130上昇,而是使昇降缸162的工作停止。Next, as shown in FIGS. 8 and 9, the control unit 210 performs control such that the lift cylinder 62 is operated to be in sequence with the operation of lowering the suction holding unit 130 on the second suction unit 120 side to a predetermined position, The suction holding unit 30 on the first suction unit 20 side is raised again, but at the same timing, the operation of the lift cylinder 162 is stopped without raising the suction holding unit 130 on the second suction unit 120 side.

接著,如圖8和圖10中所示,控制部210進行如下控制,即:使昇降缸162進行工作,以與第一吸附單元20側的吸附保持部30上昇至規定位置的動作相繼地,使第二吸附單元120側的吸附保持部130再次上昇至規定位置。於是,成為第一吸附單元20側的吸附保持部30和第二吸附單元120側的吸附保持部130均上昇的狀態。由此,在被吸附保持之薄膜狀部件S1和下一個薄膜狀部件S2之間形成大的間隙。另外,透過重複進行如上所述的第一吸附單元20和第二吸附單元120的上昇和下降,空氣更加容易進入薄膜狀部件S1和與其貼緊的其他薄膜狀部件S之間,由此,其他薄膜狀部件S從薄膜狀部件S1掉落。Next, as shown in FIGS. 8 and 10, the control unit 210 performs control such that the lift cylinder 162 is operated so as to be successive to the operation of raising the suction holding unit 30 on the first suction unit 20 side to a predetermined position, The suction holding portion 130 on the second suction unit 120 side is raised again to a predetermined position. As a result, the suction holding section 30 on the first suction unit 20 side and the suction holding section 130 on the second suction unit 120 side are both raised. As a result, a large gap is formed between the film-shaped member S1 that is sucked and held and the next film-shaped member S2. In addition, by repeating the ascent and descent of the first adsorption unit 20 and the second adsorption unit 120 as described above, air is more likely to enter between the film-shaped member S1 and the other film-shaped member S that is in close contact with it. The film-shaped member S falls from the film-shaped member S1.

之後,轉移至後述的第四步驟。但是,為了更加可靠地使其他薄膜狀部件S從薄膜狀部件S1掉落,也可以再次重複進行基於圖8的抖落動作。Then, move to the fourth step described later. However, in order to more reliably drop the other film-shaped member S from the film-shaped member S1, the shaking-off operation according to FIG. 8 may be repeated again.

(3-2)抖落動作的第二動作例 接著,對抖落動作的第二動作例進行說明。圖13係顯示第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162的動作時機之第二動作例的圖。如圖13中所示,最初是使昇降缸62進行工作,使第一吸附單元20側的吸附保持部30上昇至規定位置,但在同一時機內,不使第二吸附單元120側的吸附保持部130上昇,而是使昇降缸162的工作停止。該情況與已經圖示於圖9中的情況相同,當使第一吸附單元20側的吸附保持部30上昇時,薄膜狀部件S1斜向傾斜。因此,空氣容易進入薄膜狀部件S1和與其貼緊的其他薄膜狀部件S之間,從而大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。(3-2) Second action example of shake-off action Next, a second operation example of the shake-off operation will be described. 13 is a diagram showing a second operation example of the operation timing of the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side. As shown in FIG. 13, the lift cylinder 62 is initially operated to raise the suction holding portion 30 on the first suction unit 20 side to a predetermined position, but at the same timing, the suction on the second suction unit 120 side is not held The unit 130 is raised, but the operation of the lift cylinder 162 is stopped. This case is the same as the case shown in FIG. 9, and when the suction holding portion 30 on the first suction unit 20 side is raised, the film-like member S1 is inclined obliquely. Therefore, air easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and most of the other film-shaped member S falls from the film-shaped member S1.

接著,如圖13和圖14中所示,控制部210使昇降缸162進行工作,在使第二吸附單元120側的吸附保持部130上昇至規定位置之後,使該第二吸附單元120側的吸附保持部130下降至規定位置,但在同一時機內,不使第一吸附單元20側的吸附保持部30下降,而是使昇降缸62的工作停止。於是,到達至上昇之頂部的吸附保持部130再次下降,因此,薄膜狀部件S1成為與飄蕩時相同的狀態,從而空氣容易進入薄膜狀部件S和與其貼緊之其他薄膜狀部件S之間。由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。另外,當使第二吸附單元120側的吸附保持部130下降至規定位置時,薄膜狀部件S1之第二吸附保持部120側,成為不與下一個薄膜狀部件S2接觸,而是與其具有間隔的狀態。Next, as shown in FIGS. 13 and 14, the control unit 210 operates the lift cylinder 162 to raise the suction holding unit 130 on the second suction unit 120 side to a predetermined position, and then causes the second suction unit 120 side The suction holding unit 130 is lowered to a predetermined position, but at the same timing, the operation of the lift cylinder 62 is stopped without lowering the suction holding unit 30 on the first suction unit 20 side. Then, the suction holding portion 130 that has reached the top of the ascent descends again, so that the film-shaped member S1 is in the same state as when it was floating, and air easily enters between the film-shaped member S and the other film-shaped member S that is in close contact with it. As a result, most of the other film-shaped member S falls from the film-shaped member S1. In addition, when the suction holding portion 130 on the second suction unit 120 side is lowered to a predetermined position, the second suction holding portion 120 side of the film-like member S1 is not in contact with the next film-like member S2, but has a space therebetween status.

進而,如圖13和圖12中所示,控制部210使昇降缸62進行工作,以與第二吸附單元120側的吸附保持部130下降至規定位置的動作相繼地,使第一吸附單元20側的吸附保持部30下降至規定位置,但在同一時機內,不使第二吸附單元120側的吸附保持部130上昇,而是使昇降缸162的動作停止。此時,薄膜狀部件S1之第一吸附單元20側,也與薄膜狀部件S1之第二吸附單元120側相同地,成為不與下一個薄膜狀部件S2接觸,而是與其具有間隔的狀態。Further, as shown in FIGS. 13 and 12, the control unit 210 causes the lift cylinder 62 to operate so that the first suction unit 20 is moved in succession with the operation of the suction holding unit 130 on the second suction unit 120 side descending to a predetermined position. The suction holding unit 30 on the side is lowered to a predetermined position, but at the same timing, the operation of the lift cylinder 162 is stopped without raising the suction holding unit 130 on the second suction unit 120 side. At this time, the first suction unit 20 side of the film-like member S1 is also in a state of being spaced apart from the next film-like member S2 in the same manner as the second suction unit 120 side of the film-like member S1.

接著,如圖13和圖11中所示,控制部210使昇降缸162進行工作,以與第一吸附單元20側的吸附保持部30下降至規定位置的動作相繼地,使第二吸附單元120側的吸附保持部130上昇,但在同一時機內,不使第一吸附單元20側的吸附保持部30上昇,而是使昇降缸62的動作停止。Next, as shown in FIGS. 13 and 11, the control unit 210 causes the lift cylinder 162 to operate to move the second suction unit 120 in succession to the operation of lowering the suction holding unit 30 on the first suction unit 20 side to a predetermined position. The suction holding section 130 on the side rises, but at the same timing, the operation of the lift cylinder 62 is stopped without raising the suction holding section 30 on the first suction unit 20 side.

接著,如圖13和圖10中所示,控制部210使昇降缸62進行工作,以在維持使第二吸附單元120側的吸附保持部130上昇的狀態不變的情況下,再次使第一吸附單元20側的吸附保持部30上昇至規定位置。於是,成為第一吸附單元20側之吸附保持部30和第二吸附單元120側之吸附保持部130均上昇的狀態。由此,在被吸附保持之薄膜狀部件S1和下一個薄膜狀部件S2之間形成大的間隙。另外,透過重複進行如上所述的第一吸附單元20和第二吸附單元120的上昇和下降,空氣更加容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,其他薄膜狀部件S從薄膜狀部件S1掉落。Next, as shown in FIGS. 13 and 10, the control unit 210 operates the lifting cylinder 62 to maintain the state in which the suction holding unit 130 on the second suction unit 120 side is raised, and again to make the first The suction holding unit 30 on the suction unit 20 side rises to a predetermined position. As a result, both the suction holding section 30 on the first suction unit 20 side and the suction holding section 130 on the second suction unit 120 side are raised. As a result, a large gap is formed between the film-shaped member S1 that is sucked and held and the next film-shaped member S2. In addition, by repeating the ascent and descent of the first adsorption unit 20 and the second adsorption unit 120 as described above, air is more likely to enter between the film-shaped member S1 and the other film-shaped member S that is in close contact with it. The film-shaped member S falls from the film-shaped member S1.

之後轉移至後述的第四步驟。但是,為了更加可靠地使其他薄膜狀部件S從薄膜狀部件S1掉落,也可以再次重複進行基於圖13之抖落動作。Then, move to the fourth step described later. However, in order to more reliably drop the other film-shaped member S from the film-shaped member S1, the shaking-down operation based on FIG. 13 may be repeated again.

另外,使第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162不以同一時機工作,而是以不同時機工作的控制方式,並不限於上述的控制方式。即,只要是能夠使貼緊於最上面的薄膜狀部件S1之其他薄膜狀部件S良好地掉落,第一吸附單元20側的昇降缸62和第二吸附單元120側的昇降缸162的動作時機,可以是任意的時機。In addition, the control method of operating the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side at different timings is not limited to the above-mentioned control method. That is, as long as the other film-shaped member S that is close to the uppermost film-shaped member S1 can be dropped well, the movement of the lift cylinder 62 on the first suction unit 20 side and the lift cylinder 162 on the second suction unit 120 side The timing can be any timing.

(4)第四步驟:分離板71的插入(第四控制) 接著,如圖15中所示,控制部210使分離板驅動器74進行工作,以將分離板71插入如下位置,即:被吸附保持部30、130吸引保持(抬高)之薄膜狀部件S1和剩餘的層疊體PS中之最上面的薄膜狀部件S2之間的位置。(4) Fourth step: insertion of separation plate 71 (fourth control) Next, as shown in FIG. 15, the control section 210 operates the separation plate driver 74 to insert the separation plate 71 into a position where the film-like member S1 and The position between the uppermost film-like member S2 in the remaining laminate PS.

(5)第五步驟:解除最上面的薄膜狀部件S1之吸引保持(第五控制) 接著,控制部210使載置台用氣缸203進行工作,使載置台201上昇。與此同時,控制部210使第一吸附單元20側的吸引泵51和第二吸附單元120側的吸引泵151的工作停止,並解除最上面的薄膜狀部件S1之吸引保持。此時,也可以控制昇降缸62、162,使吸附保持部30、130下降。(5) The fifth step: release the suction holding of the uppermost film-like member S1 (fifth control) Next, the control unit 210 actuates the mounting table cylinder 203 to raise the mounting table 201. At the same time, the control unit 210 stops the operation of the suction pump 51 on the first suction unit 20 side and the suction pump 151 on the second suction unit 120 side, and releases the suction holding of the uppermost film-like member S1. At this time, the lift cylinders 62 and 162 may be controlled to lower the suction holding sections 30 and 130.

於是,如圖16中所示,透過解除最上面的薄膜狀部件S1之吸引保持,最上面的薄膜狀部件S1朝向薄膜狀部件S2(層疊體PS)落下。此時,成為分離板71夾入最上面的薄膜狀部件S1和薄膜狀部件S2之間的狀態。另外,由於分離板71是由能夠彈性變形的部件形成,因此,即使分離板71抵接在薄膜狀部件S1、S2上,也能夠防止對其造成損傷。Then, as shown in FIG. 16, by releasing the suction holding of the uppermost film-like member S1, the uppermost film-like member S1 falls toward the film-like member S2 (laminated body PS). At this time, the separation plate 71 is in a state where the uppermost film-like member S1 and the film-like member S2 are sandwiched. In addition, since the separation plate 71 is formed of an elastically deformable member, even if the separation plate 71 abuts on the film-shaped members S1 and S2, damage to them can be prevented.

另外,在解除對薄膜狀部件S1之吸引保持之後,控制部210使轉動用驅動器43、143進行工作,從而使吸附保持部30、130位於退避位置(參照圖17)。由此,即使在下一步驟中吸附底座220下降,也能夠防止吸附保持部30、130和吸附底座220之間發生干擾。In addition, after the suction holding of the film-like member S1 is released, the control unit 210 operates the rotation drivers 43 and 143 to position the suction holding units 30 and 130 at the retracted position (see FIG. 17 ). Thus, even if the suction base 220 is lowered in the next step, interference between the suction holding portions 30 and 130 and the suction base 220 can be prevented.

(6)第六步驟:利用吸附底座220吸引保持最上面的薄膜狀部件S1 接著,控制部210在使未圖示的吸引構件和移動機構工作的同時,使吸附底座220下降。然後,將吸附板221朝向層疊體PS按壓,從而形成為將該層疊體PS夾入吸附板221和載置台201之間的狀態。此時,即使最上面的薄膜狀部件S1上產生翹曲,透過該夾入動作,最上面的薄膜狀部件S1也是在該翹曲被矯正的狀態下,被吸附板221吸引保持。將該情況圖示於圖17中。另外,即使在圖17中所示之狀態下,與圖16中所示之狀態相同地,分離板71也是被夾入最上面的薄膜狀部件S1和薄膜狀部件S2之間。(6) Sixth step: use the suction base 220 to attract and hold the uppermost film-like member S1 Next, the control unit 210 lowers the suction base 220 while operating the suction member and the moving mechanism (not shown). Then, the suction plate 221 is pressed toward the laminated body PS, so that the laminated body PS is sandwiched between the suction plate 221 and the mounting table 201. At this time, even if warpage occurs in the uppermost film-like member S1, the uppermost film-like member S1 is attracted and held by the suction plate 221 in a state where the warpage is corrected by this pinching operation. This situation is shown in Fig. 17. In addition, even in the state shown in FIG. 17, as in the state shown in FIG. 16, the separation plate 71 is sandwiched between the uppermost film-like member S1 and the film-like member S2.

在此,若強烈按壓吸附板221,分離板71、171夾入層疊體PS和吸附板221之間,由此有可能產生刮痕。為了不產生這種刮痕,吸附底座220具備省略圖示之吸引鼓風機(blower),在利用該吸引鼓風機吸引的同時,使吸附板221徐徐地下降。然後,優選:在吸附板221將最上面的薄膜狀部件S1即將向下側(Z2側)按壓之前,以僅使最上面的薄膜狀部件S1上昇的方式進行吸引。另外,吸附板221徐徐地下降至吸附保持最上面的薄膜狀部件S1為止,當吸附保持該薄膜狀部件S1之後,使吸附板221的下降停止。在此,為了判斷出是否吸附保持了最上面的薄膜狀部件S1,吸附底座220也可以具備省略圖示的真空感測器。Here, if the suction plate 221 is strongly pressed, the separation plates 71 and 171 are sandwiched between the laminated body PS and the suction plate 221, thereby possibly causing scratches. In order not to cause such scratches, the suction base 220 is provided with a suction blower (not shown), and the suction plate 221 is gradually lowered while being sucked by the suction blower. Then, preferably, immediately before the suction plate 221 presses the uppermost film-like member S1 to the lower side (Z2 side), the suction is performed so that only the uppermost film-like member S1 is raised. In addition, the suction plate 221 is gradually lowered until the uppermost film-like member S1 is adsorbed and held. After the film-like member S1 is suction-held, the lowering of the suction plate 221 is stopped. Here, in order to determine whether or not the uppermost film-like member S1 is held by suction, the suction base 220 may include a vacuum sensor (not shown).

另外,當最上面的薄膜狀部件S1以及其他薄膜狀部件S上產生翹曲時,若吸附板221未下降至最上面的薄膜狀部件S1呈平坦狀為止,則真空感測器不判斷為最上面的薄膜狀部件S1透過吸引鼓風機被吸附保持。該情況下,最上面的薄膜狀部件S1呈平坦狀地被壓入,直至最上面的薄膜狀部件S1透過吸引鼓風機被吸引。但是,即使呈平坦狀地被壓入,當吸附保持了最上面的薄膜狀部件S1時,朝向最上面的薄膜狀部件S1的下側(Z2側)之進一步的壓入被停止,因此,能夠防止如上所述的刮痕的產生。In addition, when the uppermost film-like member S1 and other film-like members S are warped, if the suction plate 221 does not descend until the uppermost film-like member S1 is flat, the vacuum sensor does not determine the most The upper film-like member S1 is sucked and held by the suction blower. In this case, the uppermost film-like member S1 is pressed in flatly until the uppermost film-like member S1 is sucked through the suction blower. However, even if it is pressed in flat, when the uppermost film-like member S1 is adsorbed and held, further pressing-in toward the lower side (Z2 side) of the uppermost film-like member S1 is stopped, so it is possible to Prevent scratches as described above.

另外,在利用吸附板221吸引最上面的薄膜狀部件S1之後,使未圖示的移動機構工作,使吸附底座220上昇,之後將最上面的薄膜狀部件S1輸送至其他的處理部位。In addition, after the uppermost film-like member S1 is sucked by the suction plate 221, a moving mechanism (not shown) is operated to raise the suction base 220, and then the uppermost film-like member S1 is transported to another processing site.

(7)第七步驟:載置台201的下降(返回初始位置) 接著,控制部210使載置台用氣缸203工作,使載置台201下降,從而將載置台201移動至初始位置。而且,之後重複進行上述的第一步驟至第七步驟的動作,從層疊體PS中依次取出薄膜狀部件S。(7) Seventh step: lowering of the mounting table 201 (return to the initial position) Next, the control unit 210 actuates the mounting table cylinder 203 and lowers the mounting table 201 to move the mounting table 201 to the initial position. Then, the operations from the first step to the seventh step described above are repeated to sequentially take out the film-shaped member S from the laminate PS.

(關於其他控制動作) 然而,關於如上所述的第一吸附單元20側和第二吸附單元120側之使其他薄膜狀部件S掉落之動作,也可以按照下述方式進行。 首先,實施與上述圖6中說明的步驟相同的第一步驟(最上面的薄膜狀部件S之吸附保持)。關於該第一步驟已經進行說明,故省略其說明。(About other control actions) However, the operation of dropping the other film-like member S on the first suction unit 20 side and the second suction unit 120 side as described above may also be performed as follows. First, the first step (adsorption and holding of the uppermost film-like member S) similar to the step described in FIG. 6 is performed. The first step has already been described, so its description is omitted.

接著,作為兼具第二步驟(使最上面的薄膜狀部件S1從層疊體PS分離)和第三步驟(抖落動作的實施)的動作,進行如下的第八步驟至第十一步驟之動作。Next, as an operation having both the second step (separating the uppermost film-like member S1 from the laminated body PS) and the third step (implementation of shaking-off operation), the following eighth to eleventh steps are performed .

(8)第八步驟:第一吸附單元20的排列方向一側(X1側)之吸附保持部30的上昇 在第一步驟之後,控制部210控制昇降缸62的工作,使例如存在於第一吸附單元20側的吸附保持部30中之、位於排列方向一側(X1側)之吸附保持部30上昇。將該狀態圖示於圖18中。於是,支承軸41傾斜,因此,隨著從吸附保持部30中之排列方向一側(X1側)朝向另一側(X2側),吸附保持部30之高度位置逐漸變低。此時,存在於第二吸附單元120側的吸附保持部130是以高度位置一致的狀態排列,因此,成為:被吸引保持之薄膜狀部件S1不是呈平面狀地吸引保持,而是以里側(Y2側)被扭曲的方式被吸引保持的狀態。(8) Eighth step: Ascending of the adsorption holding portion 30 on one side (X1 side) of the arrangement direction of the first adsorption unit 20 After the first step, the control unit 210 controls the operation of the lift cylinder 62 to raise, for example, the suction holding unit 30 on the side in the arrangement direction (X1 side) among the suction holding units 30 present on the first suction unit 20 side. This state is shown in Fig. 18. Then, the support shaft 41 is inclined, so that the height position of the suction holding portion 30 gradually decreases from one side (X1 side) in the arrangement direction of the suction holding portion 30 to the other side (X2 side). At this time, the suction holding portions 130 present on the second suction unit 120 side are arranged in a state where the height positions are aligned, and therefore, the film-like member S1 that is sucked and held is not sucked and held in a planar manner but on the back side (Y2 side) The state of being attracted and held in a twisted manner.

透過實施這種使薄膜狀部件S1扭曲這樣的動作,空氣容易進入薄膜狀部件S1和與其貼緊之他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。By performing such an action of twisting the film-like member S1, air easily enters between the film-like member S1 and the other film-like member S that is in close contact therewith, and thus most of the other film-like member S is removed from the film-like member S1 Drop.

(9)第九步驟:第一吸附單元20的排列方向另一側的(X2側)之吸附保持部30的上昇 接著,控制部210控制昇降缸62的工作,使存在於第一吸附單元20側的吸附保持部30中之、位於排列方向另一側(X2側)之吸附保持部30上昇。將該狀態圖示於圖19中。於是,成為第一吸附單元20側之吸附保持部30整體上昇之狀態。此時,在第一吸附單元20側,在被吸附保持之薄膜狀部件S1和下一個薄膜狀部件S2之間形成間隙。(9) Ninth step: the rise of the suction holding portion 30 on the other side (X2 side) of the arrangement direction of the first suction unit 20 Next, the control unit 210 controls the operation of the lift cylinder 62 to raise the suction holding unit 30 located on the other side (X2 side) in the arrangement direction among the suction holding units 30 present on the first suction unit 20 side. This state is shown in Fig. 19. As a result, the entire suction holding portion 30 on the side of the first suction unit 20 rises. At this time, on the side of the first suction unit 20, a gap is formed between the film-like member S1 and the next film-like member S2 being held by suction.

此時,薄膜狀部件S1從扭曲狀態恢復,成為其里側(Y2側)整體被抬高的狀態。透過該動作的實施,空氣也容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。At this time, the film-like member S1 recovers from the twisted state, and the entire back side (Y2 side) is raised. Through the execution of this operation, air also easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and thus most of the other film-shaped member S falls from the film-shaped member S1.

(10)第十步驟:第二吸附單元120的排列方向一側(X1側)之吸附保持部130的上昇 接著,控制部210控制昇降缸162的工作,使存在於第二吸附單元120側的吸附保持部130中之、位於排列方向一側(X1側)之吸附保持部130上昇。將該狀態圖示於圖20中。於是,支承軸141傾斜,因此,隨著從吸附保持部130中之排列方向一側(X1側)朝向另一側(X2側),吸附保持部130之高度位置逐漸變低。此時,第一吸附單元20側的多個吸附保持部30已經以成為相同高度的方式上昇,因此,成為:被吸引保持之薄膜狀部件S1並不是呈平面狀地被吸引保持,而是以外側(Y1側)扭曲的方式被吸引保持的狀態。(10) Tenth step: the rise of the suction holding portion 130 on the side (X1 side) of the second suction unit 120 in the arrangement direction Next, the control unit 210 controls the operation of the lift cylinder 162 to raise the suction holding unit 130 on the side in the arrangement direction (X1 side) among the suction holding units 130 present on the second suction unit 120 side. This state is shown in FIG. 20. Then, the support shaft 141 is inclined, so that the height position of the suction holding portion 130 gradually decreases from one side (X1 side) in the arrangement direction of the suction holding portion 130 to the other side (X2 side). At this time, since the plurality of suction holding portions 30 on the side of the first suction unit 20 have risen to the same height, the film-like member S1 that is suctioned and held is not sucked and held in a planar manner, but outside The twisted side (Y1 side) is attracted and held.

透過實施這種使薄膜狀部件S1扭曲這樣的動作,空氣更加容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。By performing such an action of twisting the film-like member S1, air is more likely to enter between the film-like member S1 and the other film-like member S that is in close contact therewith. As a result, most other film-like members S are separated from the film-like member S1 drops.

(11)第十一步驟:第二吸附單元120的排列方向另一側(X2側)之吸附保持部130的上昇 接著,控制部210控制昇降缸162的工作,使存在於第二吸附單元120側的吸附保持部130中之、位於排列方向另一側(X2側)之吸附保持部130上昇。將該狀態圖示於圖21中。於是,成為第二吸附單元120側之吸附保持部130整體上昇的狀態。另外,此時,第一吸附單元20側之吸附保持部30已經整體上昇。因此,在被吸附保持之薄膜狀部件S1和下一個薄膜狀部件S2之間形成大致平行狀態的間隙(空間)。(11) Eleventh step: the rise of the suction holding portion 130 on the other side (X2 side) of the arrangement direction of the second suction unit 120 Next, the control unit 210 controls the operation of the lift cylinder 162 to raise the suction holding unit 130 located on the other side (X2 side) in the arrangement direction among the suction holding units 130 present on the second suction unit 120 side. This state is shown in Fig. 21. As a result, the entire suction holding portion 130 on the side of the second suction unit 120 rises. In addition, at this time, the suction holding portion 30 on the side of the first suction unit 20 has risen as a whole. Therefore, a gap (space) in a substantially parallel state is formed between the film-shaped member S1 and the next film-shaped member S2 that are adsorbed and held.

此時,薄膜狀部件S1從扭曲狀態恢復,成為其里側(Y2側)整體被抬高之狀態。透過實施這樣的動作,空氣容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,其他薄膜狀部件S從薄膜狀部件S1掉落。At this time, the film-shaped member S1 recovers from the twisted state, and the entire back side (Y2 side) is raised. By performing such an operation, air easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and the other film-shaped member S falls from the film-shaped member S1.

透過實施如上所述之第八步驟至第十一步驟的動作,空氣容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,貼緊在薄膜狀部件S1之其他薄膜狀部件S從薄膜狀部件S1掉落。By performing the operations from the eighth step to the eleventh step as described above, air easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and thus, the other film that is attached to the film-shaped member S1 The member S falls from the film member S1.

另外,在第十一步驟之後,依次執行如上所述之第四步驟(分離板71的插入)、第五步驟(解除最上面的薄膜狀部件S1之吸引保持)、第六步驟(利用吸附底座220吸引保持最上面的薄膜狀部件S1)以及第七步驟(載置台201的下降(返回初始位置))。In addition, after the eleventh step, the fourth step (insertion of the separation plate 71), the fifth step (releasing the suction holding of the uppermost film-like member S1), and the sixth step (using the suction base 220 attracts and holds the uppermost film-like member S1) and the seventh step (the lowering of the stage 201 (return to the initial position)).

另外,在上述各步驟之後,實施用於製造柔性印刷電路板之各步驟,由此製造出作為產品的柔性印刷電路板。In addition, after the above steps, each step for manufacturing a flexible printed circuit board is carried out, thereby manufacturing a flexible printed circuit board as a product.

(關於功效) 具有如上構成的薄膜取出裝置10,能夠取出柔性印刷電路板的製造中使用之薄膜狀部件S,該薄膜取出裝置10,具備:能夠吸引保持薄膜狀部件S之一邊緣部側的吸附保持部30(第一吸引構件)、能夠吸引保持薄膜狀部件S之另一邊緣部側的吸附保持部130(第二吸引構件)、使吸附保持部30(第一吸引構件)上昇或下降的昇降機構60(第一昇降構件)、使吸附保持部130(第二吸引構件)上昇或下降的昇降機構160(第二昇降構件)、以及控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)之動作的控制部210。(About efficacy) The film take-out device 10 configured as above can take out the film-shaped member S used in the manufacture of a flexible printed circuit board. The film take-out device 10 includes an adsorption holding portion 30 that can attract and hold one of the film-like members S on the edge side (First suction member), suction holding portion 130 (second suction member) capable of sucking and holding the other edge portion of the film-like member S, and an elevating mechanism 60 that raises or lowers the suction holding portion 30 (first suction member) (First lifting member), lifting mechanism 160 (second lifting member) that raises or lowers the suction holding portion 130 (second suction member), and controls the lifting mechanism 60 (first lifting member) and the lifting mechanism 160 (second Control unit 210 for the movement of the lifting member).

另外,控制部210進行第一控制,在該第一控制中,控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)之動作,從而利用吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件),從層疊有多個薄膜狀部件S的層疊體PS中,吸引保持層疊在最上面的薄膜狀部件S1,在該第一控制之後,控制部210進行第二控制,在該第二控制中,透過控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)中之至少一者的工作,從而使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者相對於任意另一者相對地上昇或下降,由此,抖落被吸引保持之薄膜狀部件之外的其他薄膜狀部件S。In addition, the control unit 210 performs a first control in which the operation of the elevating mechanism 60 (first elevating member) and the elevating mechanism 160 (second elevating member) is controlled to utilize the suction holding unit 30 (first suction Member) and the suction holding part 130 (second suction member), from the laminated body PS in which a plurality of film-like members S are stacked, the film-like member S1 stacked on the uppermost layer is sucked and held. After this first control, the control unit 210 performs a second control in which at least one of the lifting mechanism 60 (first lifting member) and the lifting mechanism 160 (second lifting member) is controlled to operate the suction holding section 30 (first One of the suction member) and the suction holding portion 130 (second suction member) is relatively raised or lowered relative to the other, thereby shaking off the other film shape except the film-shaped member that is attracted and held Part S.

因此,在透過第一控制,形成為透過吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)吸引保持最上面的薄膜狀部件S1之狀態之後,透過第二控制,在該第一控制之後,透過使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者相對於任意另一者相對地上昇或下降,從而空氣容易進入被吸引保持之薄膜狀部件S和與其貼緊之其他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。因此,能夠防止同時取出多個薄膜狀部件S。Therefore, after passing through the first control, the state in which the uppermost film-like member S1 is sucked and held by the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) is formed, and then through the second control, After the first control, by making any one of the suction holding part 30 (first suction member) and the suction holding part 130 (second suction member) relatively rise or fall relative to the other, air becomes easy Entering between the film-shaped member S that is attracted and held and the other film-shaped member S that is in close contact therewith, most of the other film-shaped member S falls from the film-shaped member S1. Therefore, it is possible to prevent a plurality of film-shaped members S from being taken out at the same time.

另外,為了防止這樣的同時取出多個薄膜狀部件S的情況,現有情況下,是透過人工方式取出薄膜狀部件S,然而,在本實施方式中,透過使用薄膜取出裝置10,能夠自動地進行該薄膜狀部件S的取出作業。因此,能夠防止薄膜狀部件S的取出作業中之人為錯誤,並且,透過實施自動取出作業,能夠提高柔性印刷電路板之生產效率。In addition, in order to prevent such a situation in which a plurality of film-like members S are taken out at the same time, the film-like members S are taken out manually in the prior art. However, in this embodiment, by using the film taking-out device 10, it can be automatically performed This film-like member S is taken out. Therefore, it is possible to prevent human error in the operation of taking out the film-shaped member S, and by performing the automatic taking out operation, it is possible to improve the production efficiency of the flexible printed circuit board.

另外,用於防止這樣的同時取出多個薄膜狀部件S之動作,是透過吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)之間之相對的昇降動作來實現,因此,能夠形成為薄膜狀部件S上不產生歪扭的狀態。In addition, the operation for preventing the simultaneous removal of the plurality of film-like members S is achieved by the relative lifting operation between the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) Therefore, it is possible to form a state where no distortion occurs on the film-shaped member S.

另外,在本實施方式中,控制部210在上述第一控制之後進行第三控制,在該第三控制中,控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)之動作,使透過吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)被吸引保持的薄膜狀部件S,朝向從層疊體PS分離的方向移動,並且,在該第三控制之後進行第二控制。In addition, in the present embodiment, the control unit 210 performs a third control after the above-described first control, and in this third control, controls one of the elevating mechanism 60 (first elevating member) and the elevating mechanism 160 (second elevating member) The operation moves the film-like member S sucked and held by the suction holding section 30 (first suction member) and the suction holding section 130 (second suction member) toward the direction of separation from the laminated body PS. After the control, the second control is performed.

因此,即使在薄膜狀部件S上產生翹曲等的變形,也能夠確保用於使貼緊在薄膜狀部件S1上的其他薄膜狀部件S掉落的空間。另外,能夠確保用於進行吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)之間的相對昇降動作之足夠的空間,由此,能夠使貼緊在薄膜狀部件S1的其他薄膜狀部件S良好地掉落。Therefore, even if deformation such as warpage occurs in the film-shaped member S, a space for dropping the other film-shaped member S that is in close contact with the film-shaped member S1 can be secured. In addition, a sufficient space for the relative lifting operation between the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) can be ensured, whereby the film-like member can be adhered to The other film-shaped member S of S1 dropped well.

進而,在本實施方式中,昇降機構60(第一昇降構件)具備使吸附保持部30(第一吸引構件)之長度方向的一側上昇或下降的昇降缸62(一側第一昇降構件)和使吸附保持部30(第一吸引構件)之長度方向的另一側上昇或下降的昇降缸62(另一側第一昇降構件)。另外,昇降機構160(第二昇降構件)具備使吸附保持部130(第二吸引構件)之長度方向的一側上昇或下降的昇降缸162(一側第二昇降構件)和使吸附保持部130(第二吸引構件)之長度方向的另一側上昇或下降的昇降缸162(另一側第二昇降構件)。另外,在第二控制中,控制部210進行如下控制:控制昇降缸62(一側第一昇降構件)的工作,使吸附保持部30(第一吸引構件)之長度方向的一側上昇,在該動作開始之後,控制昇降缸62(另一側第一昇降構件)的工作,使吸附保持部30(第一吸引構件)之長度方向的另一側上昇,進而,控制昇降缸162(一側第二昇降構件)的工作,使吸附保持部130(第二吸引構件)之長度方向一側上昇,在該動作開始之後,控制昇降缸162(另一側第二昇降構件)的工作,使吸附保持部130(第二吸引構件)之長度方向的另一側上昇。Furthermore, in this embodiment, the elevating mechanism 60 (first elevating member) includes an elevating cylinder 62 (first elevating member on one side) that raises or lowers one side of the suction holding portion 30 (first suction member) in the longitudinal direction And a lift cylinder 62 (the other side first lift member) that raises or lowers the other side of the suction holding portion 30 (first suction member) in the longitudinal direction. In addition, the elevating mechanism 160 (second elevating member) includes an elevating cylinder 162 (one side second elevating member) that raises or lowers one side of the suction holding portion 130 (second suction member) in the longitudinal direction, and the suction holding portion 130 The lift cylinder 162 (the other side second lift member) that rises or falls on the other side in the longitudinal direction of the (second suction member). In the second control, the control unit 210 controls the operation of the lifting cylinder 62 (the first lifting member on one side) to raise the longitudinal side of the suction holding unit 30 (first suction member), After the operation is started, the operation of the lift cylinder 62 (the other first lift member) is controlled to raise the other side of the suction holding portion 30 (first suction member) in the longitudinal direction, and further, the lift cylinder 162 (one side is controlled) The operation of the second lifting member) raises the longitudinal side of the suction holding portion 130 (second suction member), and after the start of the operation, controls the operation of the lifting cylinder 162 (the second lifting member on the other side) to make the suction The other side in the longitudinal direction of the holding portion 130 (second suction member) rises.

因此,位於長度方向(X方向)的一側(X1側)之吸附保持部30(第一吸引構件)相對于位於長度方向(X方向)的另一側(X2側)之吸附保持部30(第一吸引構件)上昇,因此,如圖18中所示,實施使薄膜狀部件S1扭曲這樣的動作。另外,位於長度方向(X方向)的一側(X1側)之吸附保持部130(第二吸引構件)相對于位於長度方向(X方向)的另一側(X2側)之吸附保持部130(第二吸引構件)上昇,因此,如圖20中所示,實施使薄膜狀部件S1扭曲這樣的動作。透過實施這樣的動作,空氣容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。因此,能夠良好地防止同時取出多個薄膜狀部件S。Therefore, the suction holding portion 30 (first suction member) located on one side (X1 side) of the longitudinal direction (X direction) is opposite to the suction holding portion 30 (X2 side) located on the other side (X2 side) of the longitudinal direction (X direction). The first suction member) rises, therefore, as shown in FIG. 18, an action of twisting the film-like member S1 is performed. In addition, the suction holding portion 130 (second suction member) located on one side (X1 side) of the longitudinal direction (X direction) is opposite to the suction holding portion 130 (X2 side) located on the other side (X2 side) of the longitudinal direction (X direction). The second suction member) rises, therefore, as shown in FIG. 20, an action of twisting the film-like member S1 is performed. By performing such an operation, air easily enters between the film-shaped member S1 and the other film-shaped member S that is in close contact therewith, and thus most of the other film-shaped member S falls from the film-shaped member S1. Therefore, it is possible to favorably prevent a plurality of film-shaped members S from being simultaneously taken out.

另外,在本實施方式中,在上述第二控制中,控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)之工作,形成使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者,朝向從層疊體PS分離的方向移動,且使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意另一者不移動的狀態,並且,在該動作開始之後,控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)的工作,形成使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者不移動的狀態,且使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之剩餘一者,朝向從層疊體PS分離的方向移動。In addition, in this embodiment, in the second control described above, the operations of the elevating mechanism 60 (first elevating member) and the elevating mechanism 160 (second elevating member) are controlled to form the suction holding portion 30 (first suction member) Either of the suction holding part 130 (second suction member) moves toward the direction of separation from the laminate PS, and the suction holding part 30 (first suction member) and the suction holding part 130 (second suction member) Either of the other does not move, and after the start of the operation, the operation of the elevating mechanism 60 (first elevating member) and the elevating mechanism 160 (second elevating member) is controlled to form the suction holding portion 30 (the first One of the suction member) and the suction holding part 130 (second suction member) in a state where it does not move, and one of the suction holding part 30 (first suction member) and the suction holding part 130 (second suction member) The remaining one moves in a direction separating from the laminate PS.

因此,如圖8或圖13中所示,成為吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者,以任意另一者為支點上昇或下降的狀態,因此,空氣容易進入薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間。由此,能夠使其他薄膜狀部件S從最上面的薄膜狀部件S1良好地掉落,從而能夠良好地防止同時取出多個薄膜狀部件S。Therefore, as shown in FIG. 8 or FIG. 13, it becomes any one of the suction holding part 30 (first suction member) and the suction holding part 130 (second suction member), and rises or falls with the other as a fulcrum Therefore, air easily enters between the film-like member S1 and the other film-like member S that is in close contact with it. Thereby, the other film-shaped member S can be dropped well from the uppermost film-shaped member S1, and it is possible to prevent a plurality of film-shaped members S from being taken out simultaneously.

進而,在本實施方式中,薄膜取出裝置10具備:被插入相鄰的薄膜狀部件S之間,防止這些薄膜狀部件S之間的吸附之分離板71(分離構件)、以及以將分離板71(分離構件)插入相鄰的薄膜狀部件S之間之方式,使分離板71(分離構件)移動之分離板驅動器74(移動構件)。另外,控制部210控制分離板驅動器74(移動構件)的工作,並且,控制部210在上述第三控制之後進行第四控制,在該第四控制中,控制分離板驅動器74(移動構件)的工作,將分離板71(分離構件)配置在如下位置,即:被吸附保持部30(第一吸引構件)及吸附保持部130(第二吸引構件)保持之薄膜狀部件S1和層疊體PS之最上面的薄膜狀部件S2之間的位置。Furthermore, in the present embodiment, the film take-out device 10 includes a separation plate 71 (separation member) that is inserted between adjacent film-like members S to prevent adsorption between these film-like members S, and a separation plate A separating plate driver 74 (moving member) that moves the separating plate 71 (separating member) such that 71 (separating member) is inserted between adjacent film-like members S. In addition, the control section 210 controls the operation of the separation plate driver 74 (moving member), and the control section 210 performs a fourth control after the above-described third control in which the separation plate driver 74 (moving member) is controlled. In operation, the separation plate 71 (separation member) is arranged at a position where the film-like member S1 and the laminate PS held by the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) The position between the uppermost film-like member S2.

因此,當解除被吸附保持部30和吸附保持部130(第一吸引構件和第二吸引構件)吸引保持的薄膜狀部件S1之保持,該薄膜狀部件S1朝向層疊體PS之最上面的薄膜狀部件S2下落時,成為分離板71被夾入薄膜狀部件S1和薄膜狀部件S2之間的狀態。因此,能夠防止薄膜狀部件S1和薄膜狀部件S2再次被貼緊,從而能夠使薄膜狀部件S1和薄膜狀部件S2良好地分離。Therefore, when the holding of the film-like member S1 sucked and held by the suction holding section 30 and the suction holding section 130 (the first suction member and the second suction member) is released, the film-like member S1 faces the uppermost film-like shape of the laminate PS When the member S2 falls, the separation plate 71 is sandwiched between the film-like member S1 and the film-like member S2. Therefore, it is possible to prevent the film-shaped member S1 and the film-shaped member S2 from being closely contacted again, and the film-shaped member S1 and the film-shaped member S2 can be separated well.

另外,在本實施方式中,薄膜取出裝置10具備吸附底座220,該吸附底座220能夠將薄膜狀部件S呈平面狀地吸引保持,並且,能夠相對於層疊體PS上昇或下降,該吸附底座220的動作是透過控制部210被控制。另外,在上述第四控制之後,控制部210進行第五控制,在該第五控制中,控制吸引機構50(第一吸引構件)和吸引機構150(第二吸引構件)的工作,解除被吸附保持部30和吸附保持部130(第一吸引構件和第二吸引構件)保持之薄膜狀部件的保持,並將薄膜狀部件S1層疊在層疊體PS上。另外,控制部210在第五控制之後,進行如下控制:使吸附底座220下降,按壓層疊體PS(層疊體),並且,控制吸附底座220的工作,吸引保持層疊體PS之最上面的薄膜狀部件S1。In addition, in the present embodiment, the film take-out device 10 includes an adsorption base 220 that can attract and hold the film-like member S in a planar shape, and can be raised or lowered with respect to the laminate PS. Is controlled by the control unit 210. In addition, after the fourth control described above, the control unit 210 performs a fifth control in which the operation of the suction mechanism 50 (first suction member) and the suction mechanism 150 (second suction member) is controlled to release the suction The holding portion 30 and the suction holding portion 130 (the first suction member and the second suction member) hold the film-like member, and the film-like member S1 is laminated on the laminate PS. In addition, after the fifth control, the control unit 210 performs the following control: lowers the suction base 220, presses the laminate PS (laminate), and controls the operation of the suction base 220 to attract and hold the uppermost film shape of the laminate PS Part S1.

因此,如圖17中所示,透過實施利用吸附底座220的下降按壓層疊體PS的動作,成為將層疊體PS夾入吸附板221和載置台201之間的狀態。由此,即使在最上面的薄膜狀部件S1上產生翹曲,透過該夾入動作,也能夠矯正最上面的薄膜狀部件S1之翹曲。因此,最上面的薄膜狀部件S1,能夠以成為平面狀的狀態被吸引保持在吸附底座220上。由此,在製造柔性印刷電路板之後的步驟中,能夠準確地定位薄膜狀部件S1之位置。Therefore, as shown in FIG. 17, by performing a downward pressing operation of the stacked body PS by the suction base 220, the stacked body PS is sandwiched between the suction plate 221 and the mounting table 201. Thus, even if warpage occurs in the uppermost film-like member S1, the warping operation can correct the warpage of the uppermost film-like member S1. Therefore, the uppermost film-like member S1 can be attracted and held on the suction base 220 in a planar state. Thereby, in the step after manufacturing the flexible printed circuit board, the position of the film-like member S1 can be accurately positioned.

另外,在本實施方式中,吸附保持部30和吸附保持部130(第一吸引構件和第二吸引構件)具備吸附吸盤31、131,該吸附吸盤31、131以彈性部件作為材質且設置為折皺狀。因此,吸附吸盤31、131能夠容易跟隨薄膜狀部件S發生變化,因此,即使在薄膜狀部件S上產生翹曲等的變形,也能夠跟隨其變形。因此,即使吸附吸盤31、131抵接在薄膜狀部件S上,也能夠防止對薄膜狀部件S造成損傷。In addition, in the present embodiment, the suction holding portion 30 and the suction holding portion 130 (first suction member and second suction member) are provided with suction chucks 31 and 131 made of elastic members and formed as wrinkles shape. Therefore, the suction chucks 31 and 131 can easily follow the change of the film-shaped member S, and therefore, even if deformation such as warpage occurs in the film-shaped member S, the deformation can be followed. Therefore, even if the suction chucks 31 and 131 abut on the film-shaped member S, damage to the film-shaped member S can be prevented.

另外,本實施方式涉及的柔性印刷電路板的製造方法,包括:吸引步驟,在該吸引步驟中,控制昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)的動作,從而透過能夠吸引保持薄膜狀部件S1之一邊緣部側的吸附保持部30(第一吸引構件)和能夠吸引保持薄膜狀部件S1之另一邊緣部側的吸附保持部130(第二吸引構件),從層疊體PS中吸引保持層疊在最上面的薄膜狀部件S1;抖落步驟,該抖落步驟是在上述吸引步驟之後進行,在該抖落步驟中,透過使昇降機構60(第一昇降構件)和昇降機構160(第二昇降構件)中之至少一者工作,從而使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者相對於任意另一者相對地上昇或下降,由此,將被吸引保持之薄膜狀部件之外的其他薄膜狀部件S抖落,其中,昇降機構60(第一昇降構件)使吸附保持部30(第一吸引構件)上昇或下降,昇降機構160(第二昇降構件)使吸附保持部130(第二吸引構件)上昇或下降。In addition, the method for manufacturing a flexible printed circuit board according to this embodiment includes a suction step in which the operations of the lifting mechanism 60 (first lifting member) and the lifting mechanism 160 (second lifting member) are controlled to thereby By the suction holding part 30 (first suction member) capable of attracting and holding one edge of the film-like member S1 and the suction holding part 130 (second suction member) capable of attracting and holding the other edge of the film-like member S1, The film-like member S1 stacked on the uppermost layer is sucked and held from the laminated body PS; a shake-off step, which is performed after the above-mentioned suction step, in which the lift mechanism 60 (first lift member ) And at least one of the elevating mechanism 160 (second elevating member), so that any one of the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) is relative to any other One rises or falls relatively, thereby shaking off the other film-shaped member S other than the film-shaped member sucked and held, wherein the lifting mechanism 60 (first lifting member) causes the suction holding portion 30 (first suction Member) is raised or lowered, and the lift mechanism 160 (second lift member) raises or lowers the suction holding unit 130 (second suction member).

因此,在透過實施吸引步驟,形成為最上面的薄膜狀部件S1被吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)吸引保持的狀態之後,透過實施抖落步驟,使吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)中之任意一者相對於任意另一者相對地上昇或下降,從而空氣容易進入被吸引保持之薄膜狀部件S1和與其貼緊之其他薄膜狀部件S之間,由此,使大部分的其他薄膜狀部件S從薄膜狀部件S1掉落。因此,能夠防止同時取出多個薄膜狀部件S。Therefore, after the suction step is performed, the uppermost film-like member S1 is sucked and held by the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member), and then the shake-off step is performed. , So that any one of the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member) is relatively raised or lowered relative to the other, so that air easily enters the film-like shape that is sucked and held Between the member S1 and the other film-like member S that is in close contact therewith, most of the other film-like member S is dropped from the film-like member S1. Therefore, it is possible to prevent a plurality of film-shaped members S from being taken out at the same time.

另外,為了防止這樣的同時取出多個薄膜狀部件S的情況,現有情況下,是透過人工方式取出薄膜狀部件S,然而,在本實施方式中,透過使用薄膜取出裝置10,能夠自動地進行薄膜狀部件S的取出作業。因此,能夠防止薄膜狀部件S的取出作業中之人為錯誤,並且,透過實施自動取出作業,能夠提高柔性印刷電路板之生產效率。In addition, in order to prevent such a situation in which a plurality of film-like members S are taken out at the same time, the film-like members S are taken out manually in the prior art. However, in this embodiment, by using the film taking-out device 10, it can be automatically performed The removal operation of the film-shaped member S. Therefore, it is possible to prevent human error in the operation of taking out the film-shaped member S, and by performing the automatic taking out operation, it is possible to improve the production efficiency of the flexible printed circuit board.

另外,用於防止這樣的同時取出多個薄膜狀部件S之動作,是透過吸附保持部30(第一吸引構件)和吸附保持部130(第二吸引構件)之間之相對昇降動作來實現,因此,能夠形成為薄膜狀部件S上不產生歪扭的狀態。In addition, the operation for preventing such simultaneous removal of the plurality of film-shaped members S is achieved by the relative lifting operation between the suction holding portion 30 (first suction member) and the suction holding portion 130 (second suction member). Therefore, it is possible to form a state where no distortion occurs on the film-shaped member S.

(變形例) 以上,對本發明的一實施方式進行了說明,但是,本發明除此之外也可以進行各種變形。以下,對此進行說明。(Modification) In the above, one embodiment of the present invention has been described, but the present invention can be modified in various ways. This will be explained below.

在上述實施方式中,第一吸引構件對應吸附保持部30和吸引機構50,第二吸引構件對應吸附保持部130和吸引機構150。但是,也可以使上述對應關係呈相反。即,第一吸引構件對應吸附保持部130和吸引機構150,第二吸引構件對應吸附保持部30和吸引機構50。同樣地,也可以構成為:第一昇降構件對應昇降機構160,第二昇降構件對應昇降機構60。In the above embodiment, the first suction member corresponds to the suction holding portion 30 and the suction mechanism 50, and the second suction member corresponds to the suction holding portion 130 and the suction mechanism 150. However, the above correspondence may be reversed. That is, the first suction member corresponds to the suction holding portion 130 and the suction mechanism 150, and the second suction member corresponds to the suction holding portion 30 and the suction mechanism 50. Similarly, the first lifting member may correspond to the lifting mechanism 160, and the second lifting member may correspond to the lifting mechanism 60.

另外,在上述實施方式中,吸附吸盤31構成為呈折皺狀。但是,吸附吸盤31並不限於這樣的構成,例如,也可以構成為:在規定長度的橡膠管上呈規定間距地設有吸引孔等。In addition, in the above-described embodiment, the suction pad 31 is configured to be wrinkled. However, the suction chuck 31 is not limited to such a configuration. For example, it may be configured such that a suction tube or the like is provided at a predetermined pitch in a rubber tube of a predetermined length.

另外,上述實施方式之薄膜取出裝置10,也可以進一步具備其他的構成。例如,也可以構成為:為了應對薄膜狀部件S彼此間因為靜電而吸附之情況,設置離子發生器(除電鼓風機),透過從該離子發生器噴吹帶有規定電荷的空氣,從而去除靜電。In addition, the film take-out device 10 of the above-described embodiment may further include other configurations. For example, in order to cope with the fact that the film-like members S are attracted to each other by static electricity, an ion generator (a static elimination blower) may be provided, and by blowing air with a predetermined charge from the ion generator, static electricity may be removed.

另外,關於上述各控制動作,可以在某一控制動作結束後,開始下一個控制動作,但是,也可以在某一控制動作結束的同時,或者,尚未結束前開始下一個控制動作。In addition, regarding each control operation described above, the next control operation may be started after the end of a certain control operation. However, the next control operation may be started at the same time as the end of a certain control operation, or before the end.

另外,上述實施方式中之薄膜狀部件S,可以是僅在聚醯亞胺薄膜等的基體材料的單面側存在銅箔的單面銅箔材料,也可以是基體材料的雙面側均存在銅箔的雙面銅箔材料,還可以是具有雙面銅箔材料以上的多層銅箔之多層材料。另外,關於薄膜狀部件S,除了基體材料和銅箔之外,還可以具備粘結材料層或保護該粘結材料層的脫模用膜。當具備這樣的粘結材料層或脫模用膜時,與不具備粘結材料層或脫模用膜的情況相比,使薄膜狀部件S的厚度變大。因此,即使在薄膜狀部件S上產生翹曲,當吸附板221下降而吸附保持最上面的薄膜狀部件S1時,刮痕更加不易產生。In addition, the film-like member S in the above embodiment may be a single-sided copper foil material in which copper foil is present only on one side of a base material such as a polyimide film, or may be present on both sides of the base material The double-sided copper foil material of the copper foil may also be a multilayer material having multiple layers of copper foil above the double-sided copper foil material. In addition, regarding the film-like member S, in addition to the base material and the copper foil, an adhesive material layer or a mold release film that protects the adhesive material layer may be provided. When such an adhesive material layer or a film for mold release is provided, the thickness of the film-shaped member S is increased as compared with a case where no adhesive material layer or a film for mold release is provided. Therefore, even if warpage occurs in the film-like member S, when the suction plate 221 is lowered and the uppermost film-like member S1 is sucked and held, scratches are less likely to occur.

10‧‧‧薄膜取出裝置 20‧‧‧第一吸附單元 30‧‧‧吸附保持部(對應於第一吸引構件之一部分) 31‧‧‧吸附吸盤 31a‧‧‧薄膜抵接部 32‧‧‧支承臂 40‧‧‧轉動機構 41‧‧‧支承軸 42‧‧‧支承柱 43‧‧‧轉動用驅動器 44‧‧‧框架 45‧‧‧驅動傳遞機構 50‧‧‧吸引機構(對應於第一吸引構件之一部分) 51‧‧‧吸引泵 52‧‧‧吸引管道 60‧‧‧昇降機構(對應於第一昇降構件) 61‧‧‧懸掛部件 62‧‧‧昇降缸 70‧‧‧分離板單元 71‧‧‧分離板(對應於分離構件) 72‧‧‧支承臂 73‧‧‧連接橫樑 74‧‧‧分離板驅動器(對應於移動構件) 75‧‧‧導向部件 120‧‧‧第二吸附單元 130‧‧‧吸附保持部(對應於第二吸引構件之一部分) 131‧‧‧吸附吸盤 131a‧‧‧薄膜抵接部 132‧‧‧支承臂 140‧‧‧轉動機構 141‧‧‧支承軸 142‧‧‧支承柱 143‧‧‧轉動用驅動器 144‧‧‧框架 145‧‧‧驅動傳遞機構 150‧‧‧吸引機構(對應於第二吸引構件之一部分) 151‧‧‧吸引泵 152‧‧‧吸引管道 160‧‧‧昇降機構(對應於第二昇降構件) 161‧‧‧懸掛部件 162‧‧‧昇降缸 170‧‧‧分離板單元 171‧‧‧分離板(對應於分離構件) 172‧‧‧支承臂 173‧‧‧連接橫樑 174‧‧‧分離板驅動器(對應於移動構件) 175‧‧‧導向部件 200‧‧‧載置台單元 201‧‧‧載置台 202‧‧‧昇降導向件 203‧‧‧載置台用氣缸 210‧‧‧控制部 220‧‧‧吸附底座 221‧‧‧吸附板 222‧‧‧移動機構連接部 PS‧‧‧層疊體 S、S1、S2‧‧‧薄膜狀部件10‧‧‧Film take-out device 20‧‧‧First adsorption unit 30‧‧‧Suction holding part (corresponding to a part of the first suction member) 31‧‧‧ suction cup 31a‧‧‧Film abutment 32‧‧‧support arm 40‧‧‧Rotating mechanism 41‧‧‧Support shaft 42‧‧‧Support column 43‧‧‧Rotation driver 44‧‧‧Frame 45‧‧‧Drive transmission mechanism 50‧‧‧Attraction mechanism (corresponding to a part of the first attraction member) 51‧‧‧Suction pump 52‧‧‧Attract 60‧‧‧lifting mechanism (corresponding to the first lifting member) 61‧‧‧Suspended parts 62‧‧‧Lift cylinder 70‧‧‧ Separation board unit 71‧‧‧ Separation plate (corresponding to the separation member) 72‧‧‧support arm 73‧‧‧Connecting beam 74‧‧‧ Separate plate driver (corresponding to moving member) 75‧‧‧Guide parts 120‧‧‧Second adsorption unit 130‧‧‧Suction holding part (corresponding to a part of the second suction member) 131‧‧‧ suction cup 131a‧‧‧film abutment 132‧‧‧support arm 140‧‧‧Rotating mechanism 141‧‧‧support shaft 142‧‧‧support column 143‧‧‧Rotation driver 144‧‧‧frame 145‧‧‧ drive transmission mechanism 150‧‧‧Suction mechanism (corresponding to a part of the second attraction member) 151‧‧‧ Suction pump 152‧‧‧ attraction channel 160‧‧‧lifting mechanism (corresponding to the second lifting member) 161‧‧‧Suspended parts 162‧‧‧Lift cylinder 170‧‧‧ Separation board unit 171‧‧‧ Separation plate (corresponding to the separation member) 172‧‧‧support arm 173‧‧‧Connect beam 174‧‧‧ Separate board driver (corresponding to moving member) 175‧‧‧Guide parts 200‧‧‧Stage unit 201‧‧‧Stage 202‧‧‧Lifting guide 203‧‧‧Cylinder for mounting table 210‧‧‧Control Department 220‧‧‧Adsorption base 221‧‧‧Adsorption plate 222‧‧‧Moving mechanism connection PS‧‧‧Laminate S, S1, S2

圖1係顯示本發明一實施方式涉及的薄膜取出裝置之構成的概略圖。 圖2係顯示圖1中所示之薄膜取出裝置的吸附保持部之概略構成的圖。 圖3係顯示圖1中所示之薄膜取出裝置的吸附保持部、轉動機構、吸引機構以及昇降機構之概略構成的圖。 圖4係顯示圖1中所示之薄膜取出裝置的分離板單元之概略構成的圖。 圖5係顯示包括圖1中所示之薄膜取出裝置所具備的載置台單元和吸附底座在內的薄膜取出裝置之構成的概略圖,是從側面觀察薄膜取出裝置之狀態的圖。 圖6係顯示在圖5中所示之薄膜取出裝置中,使載置台上昇至規定的上昇位置之狀態的圖。 圖7係顯示在圖5中所示之薄膜取出裝置中,吸附吸盤吸引保持最上面的薄膜狀部件,並使該薄膜狀部件上昇之狀態的圖。 圖8係顯示圖1中所示的薄膜取出裝置之第一吸附單元側的昇降缸和第二吸附單元側的昇降缸的動作時機之第一動作例的圖,係顯示各昇降缸的動作時間和高度位置之關係的圖。 圖9係顯示在圖5中所示之薄膜取出裝置中,使第一吸附單元側的吸附保持部上昇,並且,不使第二吸附單元側的吸附保持部上昇之狀態的圖。 圖10係顯示從圖9中所示之狀態,使第二吸附單元側的吸附保持部上昇之狀態的圖。 圖11係顯示在維持從圖10中所示之狀態使第二吸附單元側的吸附保持部上昇之狀態不變的情況下,使第一吸附單元側的吸附保持部下降之狀態的圖。 圖12係顯示從圖11中所示之狀態,使第二吸附單元側的吸附保持部下降之狀態的圖。 圖13係顯示圖1中所示的薄膜取出裝置之第一吸附單元側的昇降缸和第二吸附單元側的昇降缸的動作時機之第二動作例的圖,係顯示各昇降缸的動作時間和高度位置之關係的圖。 圖14係顯示從圖9中所示之狀態,使第二吸附單元側之吸附保持部上昇之後下降,並且,維持第一吸附單元側的吸附保持部停止之狀態的圖。 圖15係顯示在圖10中所示之狀態之後,將分離板插入被吸引保持之薄膜狀部件和層疊體之最上面的薄膜狀部件之間之狀態的圖。 圖16係顯示在圖15中所示之狀態之後,解除被吸引保持的薄膜狀部件之吸引保持的狀態的圖。 圖17係顯示在圖16中所示之狀態之後,使吸附保持部位於退避位置,並且,使吸附底座下降,從而將吸附板朝向層疊體按壓之狀態的圖。 圖18係顯示在圖1中所示之薄膜取出裝置中,使存在於第一吸附單元側的吸附保持部中之位於排列方向一側的吸附保持部上昇之狀態的立體圖。 圖19係顯示在圖18中所示之狀態之後,使存在於第一吸附單元側的吸附保持部中之位於排列方向另一側的吸附保持部上昇之狀態的立體圖。 圖20係顯示在圖19中所示之狀態之後,使存在於第二吸附單元側的吸附保持部中之位於排列方向一側的吸附保持部上昇之狀態的圖。 圖21係顯示在圖20中所示之狀態之後,使存在於第二吸附單元側的吸附保持部中之位於排列方向另一側的吸附保持部上昇之狀態的圖。FIG. 1 is a schematic diagram showing the configuration of a film taking-out device according to an embodiment of the present invention. FIG. 2 is a diagram showing a schematic configuration of the suction holding portion of the film take-out device shown in FIG. 1. FIG. 3 is a diagram showing a schematic configuration of the suction holding part, the rotation mechanism, the suction mechanism, and the elevating mechanism of the film take-out device shown in FIG. 1. FIG. FIG. 4 is a diagram showing a schematic configuration of a separation plate unit of the film take-out device shown in FIG. 1. FIG. FIG. 5 is a schematic view showing the configuration of a film taking-out device including a mounting table unit and an adsorption base provided in the film taking-out device shown in FIG. 1, and is a side view of the film taking-out device. FIG. 6 is a view showing a state where the mounting table is raised to a predetermined ascending position in the film take-out device shown in FIG. 5. FIG. 7 is a view showing a state in which the film-shaped member in the film take-out device shown in FIG. 5 is attracted and held by the suction chuck and the film-shaped member is raised. 8 is a diagram showing a first operation example of the operation timing of the lift cylinder on the first suction unit side and the lift cylinder on the second suction unit side of the film take-out device shown in FIG. 1, showing the operation time of each lift cylinder Diagram of the relationship between height and position. 9 is a view showing a state in which the suction holding portion on the first suction unit side is raised and the suction holding portion on the second suction unit side is not raised in the film take-out device shown in FIG. 5. FIG. 10 is a diagram showing a state where the suction holding portion on the second suction unit side is raised from the state shown in FIG. 9. FIG. 11 is a diagram showing a state where the adsorption holding portion on the first adsorption unit side is lowered while maintaining the state where the adsorption holding portion on the second adsorption unit side is raised from the state shown in FIG. 10. FIG. 12 is a diagram showing a state where the suction holding portion on the second suction unit side is lowered from the state shown in FIG. 11. 13 is a diagram showing a second operation example of the operation timing of the lift cylinder on the first suction unit side and the lift cylinder on the second suction unit side of the film take-out device shown in FIG. 1, showing the operation time of each lift cylinder Diagram of the relationship between height and position. FIG. 14 is a diagram showing that the state of FIG. 9 is such that the suction holding portion on the second suction unit side is raised and then lowered, and the state where the suction holding portion on the first suction unit side is stopped is maintained. FIG. 15 is a view showing a state where the separation plate is inserted between the film-like member attracted and held and the top-most film-like member of the laminate after the state shown in FIG. 10. FIG. 16 is a diagram showing a state where the suction holding of the film-like member sucked and held is released after the state shown in FIG. 15. FIG. 17 is a view showing a state where the suction holding portion is located at the retracted position and the suction base is lowered to press the suction plate toward the laminate after the state shown in FIG. 16. FIG. 18 is a perspective view showing a state in which the suction holding portion on the side in the arrangement direction among the suction holding portions present on the side of the first suction unit is raised in the film take-out device shown in FIG. 1. FIG. 19 is a perspective view showing a state in which the suction holding part located on the other side in the arrangement direction among the suction holding parts present on the first suction unit side is raised after the state shown in FIG. 18. FIG. 20 is a view showing a state in which the adsorption holding portion on the side in the arrangement direction among the adsorption holding portions present on the second adsorption unit side is raised after the state shown in FIG. 19. FIG. 21 is a view showing a state in which the suction holding portion located on the other side in the arrangement direction among the suction holding portions present on the second suction unit side is raised after the state shown in FIG. 20.

10‧‧‧薄膜取出裝置 10‧‧‧Film take-out device

20‧‧‧第一吸附單元 20‧‧‧First adsorption unit

30‧‧‧吸附保持部(對應於第一吸引構件之一部分) 30‧‧‧Suction holding part (corresponding to a part of the first suction member)

40‧‧‧轉動機構 40‧‧‧Rotating mechanism

41‧‧‧支承軸 41‧‧‧Support shaft

43‧‧‧轉動用驅動器 43‧‧‧Rotation driver

50‧‧‧吸引機構(對應於第一吸引構件之一部分) 50‧‧‧Suction mechanism (corresponding to a part of the first attraction member)

51‧‧‧吸引泵 51‧‧‧Suction pump

60‧‧‧昇降機構(對應於第一昇降構件) 60‧‧‧lifting mechanism (corresponding to the first lifting member)

62‧‧‧昇降缸 62‧‧‧Lift cylinder

70‧‧‧分離板單元 70‧‧‧ Separation board unit

71‧‧‧分離板(對應於分離構件) 71‧‧‧ Separation plate (corresponding to the separation member)

74‧‧‧分離板驅動器(對應於移動構件) 74‧‧‧ Separate plate driver (corresponding to moving member)

120‧‧‧第二吸附單元 120‧‧‧Second adsorption unit

130‧‧‧吸附保持部(對應於第二吸引構件之一部分) 130‧‧‧Suction holding part (corresponding to a part of the second suction member)

140‧‧‧轉動機構 140‧‧‧Rotating mechanism

141‧‧‧支承軸 141‧‧‧support shaft

143‧‧‧轉動用驅動器 143‧‧‧Rotation driver

150‧‧‧吸引機構(對應於第二吸引構件之一部分) 150‧‧‧ suction mechanism (corresponding to a part of the second suction member)

151‧‧‧吸引泵 151‧‧‧ Suction pump

160‧‧‧昇降機構(對應於第二昇降構件) 160‧‧‧lifting mechanism (corresponding to the second lifting member)

162‧‧‧昇降缸 162‧‧‧Lift cylinder

170‧‧‧分離板單元 170‧‧‧ Separation board unit

171‧‧‧分離板(對應於分離構件) 171‧‧‧ Separation plate (corresponding to the separation member)

174‧‧‧分離板驅動器(對應於移動構件) 174‧‧‧ Separate plate driver (corresponding to moving member)

200‧‧‧載置台單元 200‧‧‧Stage unit

201‧‧‧載置台 201‧‧‧Stage

203‧‧‧載置台用氣缸 203‧‧‧Cylinder for mounting table

210‧‧‧控制部 210‧‧‧Control Department

S‧‧‧薄膜狀部件 S‧‧‧Film-shaped parts

X1‧‧‧右側 X1‧‧‧right

X2‧‧‧左側 X2‧‧‧Left

Y1‧‧‧前側 Y1‧‧‧front

Y2‧‧‧後側 Y2‧‧‧back

Claims (8)

一種薄膜取出裝置,其是取出柔性印刷電路板的製造中使用之薄膜狀部件的裝置, 所述薄膜取出裝置之特徵在於, 具備: 第一吸引構件,其能夠吸引保持所述薄膜狀部件之一邊緣部側, 第二吸引構件,其能夠吸引保持所述薄膜狀部件之另一邊緣部側, 第一昇降構件,其使所述第一吸引構件上昇或下降, 第二昇降構件,其使所述第二吸引構件上昇或下降,以及 控制部,其控制所述第一昇降構件和所述第二昇降構件之動作; 所述控制部進行第一控制,在該第一控制中,控制所述第一昇降構件和所述第二昇降構件之動作,從而透過所述第一吸引構件和所述第二吸引構件,從層疊有多個所述薄膜狀部件之層疊體中,吸引保持層疊在最上面的所述薄膜狀部件,並且, 在所述第一控制之後,所述控制部進行第二控制,在該第二控制中,控制所述第一昇降構件和所述第二昇降構件中之至少一者的動作,從而使所述第一吸引構件和所述第二吸引構件中之任意一者相對於任意另一者相對地上昇或下降,由此,將被吸引保持之薄膜狀部件之外的其他所述薄膜狀部件抖落。A film taking-out device, which is a device for taking out film-like parts used in the manufacture of a flexible printed circuit board, The film taking-out device is characterized by: have: A first suction member capable of attracting and holding one of the edge portions of the film-like member, A second suction member capable of attracting and holding the other edge portion side of the film-like member, A first lifting member which raises or lowers the first attraction member, A second lifting member that raises or lowers the second attraction member, and A control part that controls the actions of the first lifting member and the second lifting member; The control unit performs a first control in which the first lift member and the second lift member are controlled to operate through the first suction member and the second suction member, from In a laminated body in which a plurality of the film-shaped members are stacked, the film-shaped member stacked on the top is attracted and held, and, After the first control, the control section performs a second control in which the operation of at least one of the first lifting member and the second lifting member is controlled so that the Either one of the first suction member and the second suction member is relatively raised or lowered relative to the other, thereby shaking off the film-shaped member other than the film-shaped member that is held by suction . 如申請專利範圍第1項所述之薄膜取出裝置,其中, 在所述第一控制之後,所述控制部進行第三控制,在該第三控制中,控制所述第一昇降構件和所述第二昇降構件之動作,從而使被所述第一吸引構件和所述第二吸引構件吸引保持的所述薄膜狀部件,朝向從所述層疊體分離的方向移動, 並且,在所述第三控制之後,所述控制部進行所述第二控制。The film take-out device as described in item 1 of the patent application scope, wherein, After the first control, the control unit performs a third control in which the first lift member and the second lift member are controlled to operate by the first suction member The film-like member sucked and held by the second suction member moves in a direction away from the laminate, In addition, after the third control, the control unit performs the second control. 如申請專利範圍第1項所述之薄膜取出裝置,其中, 所述第一昇降構件具備:使所述第一吸引構件之長度方向的一側上昇或下降的一側第一昇降構件和使所述第一吸引構件之長度方向的另一側上昇或下降的另一側第一昇降構件, 所述第二昇降構件具備:使所述第二吸引構件之長度方向的一側上昇或下降的一側第二昇降構件和使所述第二吸引構件之長度方向的另一側上昇或下降的另一側第二昇降構件, 在所述第二控制中,所述控制部進行如下控制: 控制所述一側第一昇降構件之動作,使所述第一吸引構件之長度方向的一側上昇,在該動作開始之後,控制所述另一側第一昇降構件之動作,使所述第一吸引構件之長度方向的另一側上昇, 並且,控制所述一側第二昇降構件之動作,使所述第二吸引構件之長度方向的一側上昇,在該動作開始之後,控制所述另一側第二昇降構件之動作,使所述第二吸引構件之長度方向的另一側上昇。The film take-out device as described in item 1 of the patent application scope, wherein, The first raising and lowering member includes a first raising and lowering member that raises or lowers one side of the first suction member in the longitudinal direction, and one that raises or lowers the other side of the first suction member in the longitudinal direction The first lifting member on the other side, The second elevating member includes a second elevating member that raises or lowers one side of the second suction member in the longitudinal direction, and a second elevating member that raises or lowers the other side of the second suction member in the longitudinal direction The second lifting member on the other side, In the second control, the control unit performs the following control: Controlling the movement of the first lifting member on one side to raise one side of the first suction member in the longitudinal direction, and after the start of the operation, controlling the operation of the first lifting member on the other side so that the first The other side of the longitudinal direction of a suction member rises, Furthermore, the operation of the second lifting member on one side is controlled to raise one side of the second suction member in the longitudinal direction, and after the start of the operation, the operation of the second lifting member on the other side is controlled so that The other side of the second suction member in the longitudinal direction rises. 如申請專利範圍第1或2項所述之薄膜取出裝置,其中, 在所述第二控制中,控制所述第一昇降構件和所述第二昇降構件之動作,從而形成使所述第一吸引構件和所述第二吸引構件中之任意一者,朝向從所述層疊體分離的方向移動,並且,使所述第一吸引構件和所述第二吸引構件中之任意另一者不移動的狀態, 在該動作開始之後,控制所述第一昇降構件和所述第二昇降構件之動作,從而形成使所述第一吸引構件和所述第二吸引構件中之任意一者不移動的狀態,並且,使所述第一吸引構件和所述第二吸引構件中之剩餘一者,朝向從所述層疊體分離的方向移動。The film take-out device as described in item 1 or 2 of the patent application scope, wherein, In the second control, the movements of the first lifting member and the second lifting member are controlled to form any one of the first suction member and the second suction member toward Moving the laminated body in a direction in which it is separated, and in a state where any one of the first suction member and the second suction member does not move, After the start of the operation, the operation of the first lifting member and the second lifting member is controlled so that any one of the first suction member and the second suction member does not move, and To move the remaining one of the first suction member and the second suction member toward the direction of separation from the laminate. 如申請專利範圍第2項所述之薄膜取出裝置,其中, 所述薄膜取出裝置,具備: 分離構件,其被插入相鄰的所述薄膜狀部件之間,防止這些薄膜狀部件之間之吸附, 移動構件,其使所述分離構件移動,從而將所述分離構件插入相鄰的所述薄膜狀部件之間; 所述控制部控制所述移動構件之動作,並且, 在所述第三控制之後,所述控制部進行第四控制,在該第四控制中,控制所述移動構件之動作,從而將所述分離構件配置在如下位置:透過所述第一吸引構件和所述第二吸引構件被保持之所述薄膜狀部件和所述層疊體之最上面的所述薄膜狀部件之間的位置。The film take-out device as described in item 2 of the patent application scope, in which The film take-out device includes: A separating member, which is inserted between the adjacent film-like members, to prevent the adsorption between these film-like members, A moving member that moves the separating member, thereby inserting the separating member between the adjacent film-like members; The control section controls the movement of the moving member, and, After the third control, the control unit performs a fourth control in which the movement of the moving member is controlled so that the separation member is arranged at a position through the first suction member And the position between the film-like member held by the second suction member and the film-like member at the top of the laminate. 如申請專利範圍第5項所述之薄膜取出裝置,其中, 所述薄膜取出裝置具備吸附底座,該吸附底座能夠將所述薄膜狀部件呈平面狀地吸引保持,並且,能夠相對於所述層疊體上昇或下降,所述吸附底座的動作是透過所述控制部被控制, 在所述第四控制之後,所述控制部進行第五控制,在該第五控制中,控制所述第一吸引構件和所述第二吸引構件之動作,從而解除透過所述第一吸引構件和所述第二吸引構件被保持之所述薄膜狀部件的保持,由此,將所述薄膜狀部件層疊在所述層疊體上, 在所述第五控制之後,所述控制部進行如下控制: 透過使所述吸附底座下降,利用所述吸附底座按壓所述層疊體,並且, 控制所述吸附底座之動作,從而吸引保持所述層疊體之最上面的所述薄膜狀部件。The film take-out device as described in item 5 of the patent application scope, wherein, The film take-out device includes an adsorption base capable of attracting and holding the film-like member in a planar shape, and can be raised or lowered relative to the laminate, and the operation of the adsorption base is through the control The Ministry is controlled, After the fourth control, the control unit performs a fifth control in which the operation of the first suction member and the second suction member is controlled to release the transmission through the first suction member Holding the film-like member held by the second suction member, thereby laminating the film-like member on the laminate, After the fifth control, the control section performs the following control: By lowering the suction base, the laminate is pressed by the suction base, and, The operation of the suction base is controlled so as to attract and hold the film-like member on the uppermost surface of the laminate. 如申請專利範圍1至6項中任意一項所述之薄膜取出裝置,其中, 所述第一吸引構件和所述第二吸引構件具備吸附吸盤,所述吸附吸盤以彈性部件作為材質,並且,被設置為折皺狀。The film take-out device according to any one of the patent application scopes 1 to 6, wherein, The first suction member and the second suction member are provided with suction chucks, which are made of elastic members and formed in a wrinkle shape. 一種柔性印刷電路板的製造方法,其是從層疊有多個薄膜狀部件的層疊體中取出最上面的所述薄膜狀部件,製造柔性印刷電路板的方法, 所述柔性印刷電路板的製造方法之特徵在於, 包括: 吸引步驟,在該吸引步驟中,控制第一昇降構件和第二昇降構件之動作,從而透過能夠吸引保持所述薄膜狀部件之一邊緣部側的第一吸引構件和能夠吸引保持所述薄膜狀部件之另一邊緣部側的第二吸引構件,從所述層疊體中吸引保持層疊在最上面的所述薄膜狀部件; 抖落步驟,該抖落步驟是在所述吸引步驟之後實施,在該抖落步驟中,使第一昇降構件和第二昇降構件中之至少一者動作,從而使所述第一吸引構件和所述第二吸引構件中之任意一者相對於任意另一者相對地上昇或下降,由此,抖落被吸引保持之薄膜狀部件之外的其他所述薄膜狀部件,其中,所述第一昇降構件使所述第一吸引構件上昇或下降,所述第二昇降構件使所述第二吸引構件上昇或下降。A method for manufacturing a flexible printed circuit board, which is a method for manufacturing a flexible printed circuit board by taking out the uppermost film-shaped member from a laminate in which a plurality of film-shaped members are stacked, The manufacturing method of the flexible printed circuit board is characterized in that: include: A suction step in which the operation of the first elevating member and the second elevating member is controlled so that the first attracting member capable of attracting and holding one of the edges of the thin-film member and the thin-film member can be attracted and held A second suction member on the side of the other edge of the component, sucking and holding the film-shaped member stacked on the uppermost layer from the laminate; A shaking-off step, which is carried out after the attraction step, in which at least one of the first lifting member and the second lifting member is operated to make the first attraction member and Any one of the second suction members is relatively raised or lowered relative to the other, thereby shaking off the film-shaped member other than the film-shaped member that is attracted and held, wherein the first A lifting member raises or lowers the first suction member, and the second lifting member raises or lowers the second suction member.
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