WO2016070933A1

WO2016070933A1 - Layer system for use in a touch screen panel, method for manufacturing a layer system for use in a touch screen panel, and touch screen panel

Info

Publication number: WO2016070933A1
Application number: PCT/EP2014/074060
Authority: WO
Inventors: Jürgen Grillmayer; Hsu Chung KO
Original assignee: Applied Materials, Inc.
Priority date: 2014-11-07
Filing date: 2014-11-07
Publication date: 2016-05-12
Also published as: TW201618951A; KR101955005B1; CN107430466B; KR20170084161A; CN107430466A; TWI661933B

Abstract

A layer system (100) adapted for use in a touch screen panel is provided. The layer system (100) includes at least one layer stack having three or more layers which are structured in the same structuring process. The three or more layers include a metal layer (110) including aluminium or an aluminium alloy and two or more further layers. The two or more further layers include an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; and a layer (120) including molybdenum or a molybdenum alloy.

Description

LAYER SYSTEM FOR USE IN A TOUCH SCREEN PANEL, METHOD FOR MANUFACTURING A LAYER SYSTEM FOR USE IN A TOUCH SCREEN PANEL, AND TOUCH SCREEN PANEL

FIELD

[0001] Embodiments of the present disclosure relate to a layer system adapted for use in a touch screen panel, a method for manufacturing a layer system adapted for use in a touch screen panel, and a touch screen panel.

BACKGROUND

[0002] Touch screen panels are a particular class of electronic visual display able to detect and locate a touch within a display area. Touch screen panels can include a layer system disposed over a screen device and configured to sense a touch. Such a layer system can be substantially transparent, so that light in the visible spectrum emitted by the screen can be transmitted therethrough. At least some known touch screen panels include a layer system having structured layers formed over a substrate. A touch on the display area of such a touch screen panel can result in a measurable change of capacitance in a region of the layer system. The change in capacitance may be measured using different technologies, so that the position of the touch can be determined.

[0003] A layer system for use with a touch screen panel is subject to some particular requirements. As an example, optical characteristics, e.g. an appearance to a user, has to be taken into account for touch screen panels. In particular, structures of layers of the layer system, e.g., of the structured conductor, should not be visible for a user. A further aspect to be considered is the steadily increasing size of displays, wherein beyond the optical characteristics described above, also electrical characteristics are of increasing interest. In particular, a high conductivity of the structured conductor is considered as beneficial for large touch panel sizes. [0004] In view of the above, there is a need for a layer system for use in a touch screen panel, which provides enhanced optical and electrical performance compared to conventional structures.

SUMMARY

[0005] In light of the above, a layer system adapted for use in a touch screen panel, a method for manufacturing a layer system adapted for use in a touch screen panel and a touch screen panel are provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings. [0006] According to an aspect of the present disclosure, a layer system adapted for use in a touch screen panel is provided. The layer system includes at least one layer stack having three or more layers which are structured in the same structuring process. The three or more layers include a metal layer including aluminium or an aluminium alloy and two or more further layers. The two or more further layers include an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; and a first layer including molybdenum or a molybdenum alloy.

[0007] According to another aspect of the present disclosure, a touch screen panel is provided. The touch screen panel includes a screen device, in particular a liquid crystal display; and a layer system as described herein. The layer system includes at least one layer stack having three or more layers which are structured in the same structuring process. The three or more layers include a metal layer including aluminium or an aluminium alloy and two or more further layers. The two or more further layers include an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; and a first layer including molybdenum or a molybdenum alloy. [0008] According to still another aspect of the present disclosure, a method for manufacturing a layer system adapted for use in a touch screen panel is provided. The method includes providing a metal layer including aluminium or an aluminium alloy over a substrate; providing a first layer over the metal layer, wherein the first layer includes molybdenum or a molybdenum alloy; providing an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer over the first layer; and structuring the metal layer, the first layer and the IGZO layer or the IZO layer.

[0009] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. It includes method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0010] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel according to embodiments described herein;

FIG. 2A shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel according to further embodiments described herein;

FIG. 2B shows a schematic cross- sectional view of the layer system of FIG. 2A having a cover lens;

FIG. 2C shows a graph illustrating a reflectance of the layer systems of FIGs. 2A and 2B;

FIG. 3A shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel according to still further embodiments described herein; FIG. 3B shows a schematic cross- sectional view of the layer system of FIG. 3A having a cover lens;

FIG. 3C shows a graph illustrating a reflectance of the layer systems of FIGs. 3A and 3B; FIG. 4 shows a schematic view of a touch screen panel having a layer system according to embodiments described herein;

FIG. 5 shows a schematic view of a touch screen panel having a layer system according to further embodiments described herein; FIG. 6 shows a schematic view of a touch screen panel having a layer system according to still further embodiments described herein;

FIG. 7 shows a schematic view of a deposition apparatus for manufacturing a layer system according to embodiments described herein; and

FIG. 8 shows a flow chart of method for manufacturing a layer system adapted for use in a touch screen panel according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0011] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Generally, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0012] The term "substrate" as used herein shall embrace substrates which can be used for display manufacturing, such as glass or plastic substrates. For example, substrates as described herein shall embrace substrates which can be used for an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel), an OLED display, and the like. Unless explicitly specified otherwise in the description, the term "substrate" is to be understood as "large area substrate" as specified herein. According to the present disclosure, large area substrates may have a size of at least 0.174 m². As an example, the size can be about 1.4 m 2 to about 8 m 2 , and specifically about 2 m 2 to about 9 m² or even up to 12 m². However, the present disclosure is not limited thereto and the term "substrate" may also embrace flexible substrates such as a web or a foil.

[0013] The term "transparent" as used herein shall particularly include the capability of a structure to transmit light with relatively low scattering, so that, for example, light transmitted therethrough can be seen in a substantially clear manner. As an example, the substrate includes glass or polyethylene terephthalate (PET). PET can have a transmittance of about 90%.

[0014] FIG. 1 shows a schematic cross-sectional view of a layer system 100 adapted for use in a touch screen panel according to embodiments described herein. [0015] The layer system 100 includes at least one layer stack having three or more layers, which are structured in the same structuring process, e.g., an etching process. The three or more layers include a metal layer 110 including aluminium or an aluminium alloy and two or more further layers. The two or more further layers include an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; and a first layer 120 including molybdenum or a molybdenum alloy. In some implementations, the layer system 100 is configured for touch detection. In the following, the term "IGZO layer or IZO layer" is also expressed as "IGZO or IZO layer 130"

[0016] In some implementations, the aluminium alloy can be AINd. [0017] According to some embodiments, which can be combined with other embodiments described herein, the layer system 100 includes at least one substrate, such as a first substrate 10. The metal layer 110 and the two or more further layers can be disposed over the first substrate 10, as it is shown in the example of FIG. 1. [0018] According to some embodiments, which can be combined with other embodiments described herein, the two or more further layers are configured to blacken the metal layer 110 so that the structure of the metal layer 110 is substantially invisible for a human eye. The term "blacken" as understood herein may refer to a low surface reflectance of the layer system 100, in particular in a visible wavelength range (e.g., about 350 to about 800 nm). The low surface reflectance can result from the combination of the first layer 120 with the IGZO or IZO layer 130. The surface reflectance of the layer system of the present disclosure can be less than 20%, specifically less than 10%, and more specifically less than 5% over at least a part of the visible wavelength range. Examples of the surface reflectance of the layer system according to some embodiments are given with reference to FIGs. 2C and 3C.

[0019] The layer system 100 of the present disclosure has enhanced optical characteristics, e.g., appearance to a user. In particular, structures of the layers, e.g., of the metal layer 110, are not visible for a user. The layer system 100 further provides improved electrical characteristics. In particular, the structured conductor for touch detection is the metal layer 110 including Al or and Al alloy having a high conductivity. This is particularly beneficial for large touch panel sizes. In view of this, the present disclosure provides a layer system for use in a touch screen panel, which provides enhanced optical and electrical performance compared to conventional structures. By structuring the layers in one single structuring process, the layer system can be manufactured with reduced effort and costs.

[0020] According to some embodiments, which can be combined with other embodiments described herein, the metal layer 110 has a thickness of less than 500 micro meters, specifically less than 300 micro meters, and has more specifically a thickness of about 200 micro meters. In some implementations, the metal layer 110 has a conductivity of at least 2*10 7 S*m, and specifically of about 3.5*107 S*m. In some embodiments, the metal layer 120 has an electrical resistivity of less than 5*10^" Ohm*m, and specifically of about 3*10^~8 Ohm*m or 2.8* 10^"8 Ohm*m.

[0021] In some implementations, the metal layer 110 provides a line pattern having one or more lines. The lines can be parallel lines, e.g., horizontal lines or vertical lines. As an example, the line pattern can be configured for touch detection, in particular in combination with another line pattern. Both line patterns can be separated by an insulating layer. The lines of both line patterns can extend in substantially perpendicular directions to form a matrix. The matrix can be configured for touch detection, e.g., by detecting a change in capacitance between the two line patterns. [0022] According to some embodiments, the lines can have a width of less than 10 micro meters, specifically less than 5 micro meters, and can more specifically have a width in the range of about 2 micro meters to about 3 micro meters. The combination of the first layer 120 with the IGZO or IZO layer 130 can blacken the lines (i.e., make the lines black) so that the lines are substantially invisible for a human eye. [0023] In some implementations, the first layer 120 is provided on or over the metal layer 110, and/or the IGZO or IZO layer 130 is provided on or over the first layer 120. In other words, the metal layer 110, the first layer 120 and the IGZO or IZO layer 130 are arranged in this order, in particular on or over the first substrate 10. The metal layer 110 and the first layer 120 and/or the first layer 120 and the IGZO or IZO layer 130 can be disposed directly on each other. Alternatively, at least one additional layer can be provided between the metal layer 110 and the first layer 120 and/or between the first layer 120 and the IGZO or IZO layer 130.

[0024] When reference is made to the terms "on" or "over", i.e. one layer being on or over the other, it is understood that, e.g., starting from the first substrate 10, the one layer is deposited on or over the first substrate 10, and the other layer, deposited after the one layer, is thus on or over the one layer and over the first substrate 10. In other words, the terms "on" or "over" are used to define an order of layers, layer stacks, and/or films wherein the starting point can be the first substrate 10. This is irrespective of whether the layer system is depicted upside down or not. Further, the term "over" should include embodiments where one or more additional layers are provided between the one layer and the other layer. The term "on" should include embodiments where no additional layers are provided between the one layer and the other layer, i.e., the one layer and the other layer are directly disposed on each other, or, in other words, are in contact with each other.

[0025] In some embodiments, the first layer 120 is selected from the group including a MoOx layer, a (Mo-alloy)Ox layer, a MoOxNx layer, a (Mo-alloy)OxNx layer, a MoNbOx layer, and a MoNb layer. The combination of the first layer 120 with the IGZO or IZO layer 130 provides the blackening effect of the metal layer 110. In other words, the structure of the metal layer 110 is made black and thus not visible for a user.

[0026] Indium tin oxide (ITO) can be used as a conductive layer (electrode) for touch panel applications. However, a resistivity of an ITO layer is limited and depends on a substrate temperature (e.g., during deposition or a post annealing process). Higher conductivity is beneficial for larger touch panel sizes (e.g., notebooks and TV), and on cell/in cell touch panel solutions can use low temperature deposition. The metal layer of the present disclosure can fulfill these aspects delivering a high conductivity with a layer deposition at a limited substrate temperature.

[0027] An (inert) high reflectance of a metal layer can make the touch panel structures visible for human eyes. The two or more further layers of the layer system reduce the surface reflection of the layer system compared to a surface reflection of the aluminum and/or aluminum alloy metal layer. The two or more further layers can be conductive and/or optical active layers and can reduce a visibility of the structured aluminum and/or aluminum alloy layer to an acceptable level for the end user. The two or more further layers can be selected in order to enable wet etching of the complete black metal layer structure in one process block. Such a black metal layer structure can for instance be placed on a color filter glass or a cover lens, and an invisibility of the touch panel structure can be achieved.

[0028] FIG. 2A shows a schematic cross-sectional view of layer system 200 adapted for use in a touch screen panel according to further embodiments described herein.

[0029] According to some embodiments, which can be combined with other embodiments described herein, the layer system 200, and in particular the two or more further layers, include a second layer 240 including molybdenum or a molybdenum alloy. As an example, the second layer 240 can be a Mo layer or a MoNb layer. According to some embodiments, the second layer 240 including molybdenum or a molybdenum alloy can be configured as an adhesive layer, e.g., between the metal layer 110 and a substrate such as the first substrate 10.

[0030] In some implementations, the second layer 240 is provided on or over the metal layer 110. The second layer 240 can be provided on a side of the metal layer 110 opposite the side where the first layer 120 is provided. As an example, the second layer 240 is provided between the at least one substrate, e.g., the first substrate 10, and the metal layer 110.

[0031] FIG. 2B shows a schematic cross- sectional view of the layer system of FIG. 2A having a cover lens 20.

[0032] According to some embodiments, which can be combined with other embodiments described herein, the layer system further includes the cover lens 20. The cover lens 20 can be provided on or over the IGZO or IZO layer 130. As an example, a transparent adhesive layer 15, e.g., including an optically clear adhesive (OCA), can be provided between the cover lens 20 and the IGZO or IZO layer 130 to attach the cover lens 20 to the IGZO or IZO layer 130. In some implementations, the term "cover lens" can refer to a topmost glass of a touch screen panel. The cover lens 20 can be made of glass having a thickness of 0.1 mm or above, e.g. of about 0.5 mm, 0.7 mm, 0.9 mm, or 1 mm.

[0033] FIG. 2C shows a graph illustrating a reflectance R of the layer systems of FIGs. 2 A and 2B.

[0034] The x-axis of the graph denotes a wavelength in units of nano meters, and the y- axis denotes a reflectance R. A first curve 250 indicates a reflectance measured directly on the IGZO layer of FIG. 2A. A second curve 260 indicates a reflectance measured on the cover lens 20 of FIG. 2B. The layer system provides a low surface reflectance, in particular in the visible wavelength range (e.g., about 350 to about 800 nm). The low surface reflectance can result from the combination of the first layer 120 with the IGZO or IZO layer 130, and the optional additional layers such as the second layer 240. [0035] FIG. 3A shows a schematic cross-sectional view of layer system 300 adapted for use in a touch screen panel according to still further embodiments described herein.

[0036] According to some embodiments, which can be combined with other embodiments described herein, the layer system 300, and in particular the two or more further layers, include a third layer 350 including molybdenum or a molybdenum alloy, in particular wherein the third layer 350 is a Mo layer or a MoNb layer. In some implementations, the third layer 350 is provided on or over the metal layer 110. As an example, the third layer 350 can be provided between the metal layer 110 and the first layer 120. [0037] The combination of the first layer 120, the IGZO or IZO layer 130, the second layer 240 and the third layer 350 can further reduce the surface reflectance, and the optical characteristics of the layer system 300 are further improved.

[0038] FIG. 3B shows a schematic cross- sectional view of the layer system of FIG. 3A having a cover lens 20. [0039] According to some embodiments, which can be combined with other embodiments described herein, the layer system further includes the cover lens 20. The cover lens 20 can be provided on or over the IGZO or IZO layer 130. As an example, a transparent adhesive layer 15, e.g., including an optically clear adhesive (OCA), can be provided between the cover lens 20 and the IGZO or IZO layer 130 to attach the cover lens 20 to the IGZO or IZO layer 130. In some implementations, the term "cover lens" can refer to a topmost glass of a touch screen panel. The cover lens 20 can be made of glass having a thickness of 0.1 mm or above, e.g. of about 0.5 mm, 0.7 mm, 0.9 mm, or 1 mm.

[0040] FIG. 3C shows a graph illustrating a reflectance of the layer systems of FIGs. 3A and 3B. [0041] The x-axis of the graph denotes a wavelength in units of nanometers, and the y- axis denotes a reflectance. A first curve 351 indicates a reflectance R measured directly on the IGZO layer of FIG. 3A. A second curve 360 indicates a reflectance R measured on the cover lens 20 of FIG. 3B. The layer system provides a low surface reflectance, in particular in the visible wavelength range (e.g., about 350 to about 800 nm). The low surface reflectance can result from the combination of the first layer 120 with the IGZO or IZO layer 130, and the optional layers such as the second layer 240 and the third layer 350.

[0042] The following descriptions of embodiments shown in FIGs. 4 to 6 illustrate examples where the at least one layer stack is disposed on or over one or more different substrates such as the first substrate, a second substrate (e.g., a color filter substrate or color filter glass) and a third substrate (e.g., a TFT substrate or TFT glass).

[0043] FIG. 4 shows a schematic view of a touch screen panel 400 having a layer system according to embodiments described herein.

[0044] According to an aspect of the present disclosure, the touch screen panel 400 includes a screen device and a layer system as described herein. As an example, the screen device can be a liquid crystal display (LCD), as it is illustrated in the examples of FIGs. 4 to 6. However, the present disclosure is not limited to LCDs, and other screen technologies could be employed in combination with the layer system of the present disclosure, e.g., OLED displays. [0045] According to some embodiments, which can be combined with other embodiments described herein, the layer system includes a first line pattern 430 having one or more first lines and a second line pattern 440 having one or more second lines, wherein the first line pattern 430 and the second line pattern 440 are separated by an insulating layer 435. The first line pattern 430 and the second line pattern 440 can be configured for touch detection.

[0046] The one or more first lines of the first line pattern 430 and/or the one or more second lines of the second line pattern 440 can be parallel lines, e.g., horizontal lines or vertical lines. The one or more first lines of the first line pattern 430 and the one or more second lines of the second line pattern 440 can extend in substantially perpendicular directions to form a matrix. As an example, the one or more first lines of the first line pattern 430 can extend in a first direction, e.g., an x-direction. The one or more second lines of the second line pattern 440 can extend in a second direction, e.g., a y-direction. The first direction and the second direction can be substantially perpendicular. The matrix can be configured for touch detection, e.g., by detecting a change in capacitance between the first line pattern 430 and the second line pattern 440.

[0047] The term "substantially perpendicular" relates to a substantially perpendicular orientation e.g. of the one or more first lines of the first line pattern 430 and the one or more second lines of the second line pattern 440, wherein a deviation of a few degrees, e.g. up to 10° or even up to 15°, from an exact perpendicular orientation is still considered as "substantially perpendicular".

[0048] In some implementations, the one or more first lines of the first line pattern 430 are provided by a transparent conductive oxide, in particular indium tin oxide (ITO), and the one or more second lines of the second line pattern 440 are provided by the at least one layer stack of the layer system. In other implementations, the one or more second lines of the second line pattern 430 are provided by the transparent conductive oxide, in particular indium tin oxide, and the one or more first lines of the first line pattern 430 are provided by the at least one layer stack of the layer system. [0049] The line pattern provided by the at least one layer stack of the layer system, e.g., the second line pattern 440, can be configured according to the embodiments described herein. As an example, the second line pattern 440 (or the first line pattern 430) can include the first substrate 10, the metal layer 110, and the two or more further layers. The two or more further layers can include the IGZO layer or the IZO layer and the first layer (indicated with reference numeral 470), and optionally the second layer (indicated with reference numeral 460).

[0050] According to some embodiments, which can be combined with other embodiments described herein, the transparent conductive oxide can be an indium tin oxide (ITO) layer, a doped ITO layer, impurity-doped ZnO, ln₂0₃, Sn0₂ and CdO, ITO (In203:Sn), AZO (ZnO:Al), IZO (ZnO: In), GZO (ZnO:Ga), multi-component oxides including or consisting of combinations of ZnO, ln₂0₃ and Sn0_2i a layer stack from at least an ITO layer and a metal layer, e.g. an ITO/metal/ITO-stack or a metal/ITO/metal-stack.

[0051] In an LCD, a layer of liquid crystals is aligned between two electrodes, and two polarizing layers or polarizing filters (e.g., parallel and perpendicular), the axes of transmission of which are perpendicular to each other, are provided. Depending on the orientation of the liquid crystals, light passing through one polarizing filter is either blocked by the other polarizing filter or not. In some embodiments, the layer system includes a polarizing layer 450, wherein the first lines of the first line pattern 430 or the second lines of the second line pattern 440 are embedded in the polarizing layer 450.

[0052] According to some embodiments, the layer system includes at least one substrate, such as a second substrate 425. The second substrate 425 can be a substrate on which a color filter matrix 420 of the screen device is disposed. The second substrate 425 can be referred to as "color filter substrate" or "color filter (CF) glass". The second substrate 425 can have a first side and a second side. The first line pattern 430, the insulating layer 435, the second line pattern 440, the polarizing layer 450, and optionally the adhesive layer 15 and the cover lens 20 can be arranged on or over the first side of the second substrate 425. The color filter matrix 420 (or color filter layer) can be arranged on or over the second side of the second substrate 425. The first side of the second substrate 425 can be opposite the second side of the second substrate 425.

[0053] In some implementations, the touch screen panel 400 includes the screen device. The screen device can include a third substrate 405, e.g., a glass substrate ("TFT-glass"). An array or layer 410 of thin film transistors (TFTs) can be arranged on or over the third substrate 405, and a liquid crystal layer 415 can be arranged on or over the array or layer 410 of thin film transistors (TFTs). The array or layer 410 of TFTs can be configured for driving pixels of the screen device. The screen device can further include a backlight. The color filter matrix 420 can be arranged on or over the liquid crystal layer 415.

[0054] FIG. 5 shows a schematic view of a touch screen panel 500 having a layer system according to further embodiments described herein. The embodiment of FIG. 5 is similar to the embodiment of FIG. 4, and descriptions of similar or identical elements have been omitted. The embodiment of FIG. 5 differs from the embodiment of FIG. 4 in a configuration of the first line pattern. The first line pattern 530 in FIG. 5 does not include a transparent conductive oxide, but includes the layer stack of the layer system of the present disclosure. [0055] According to some embodiments, which can be combined with other embodiments described herein, the at least one layer stack includes a first layer stack and a second layer stack, wherein the one or more first lines of the first line pattern 530 are provided by the first layer stack and the one or more second lines of the second line pattern 440 are provided by the second layer stack.

[0056] The first line pattern 530 and/or the second line pattern 440 can include the layer system according to the embodiments described herein, e.g., the layer system indicated with reference numeral 440 in FIG. 4. The first line pattern 430 and the second line pattern 440 having the layer stack of the layer system of the present disclosure provide high conductivity in both line patterns, resulting in an improved performance of the touch detection function.

[0057] In some implementations, the layer system includes at least one substrate, such as the second substrate 425. The at least one substrate can have a first side and a second side, wherein the first layer stack and the second layer stack are (both) provided over the first side. The first side can be a side of the second substrate 425 where e.g. layers for touch detection, polarizing layer(s) and/or the cover lens 20 are provided. The second side of the second substrate 425 can be a side of the second substrate 425 where the screen device is provided. The screen device can include the third substrate 405, e.g., a glass substrate ("TFT-glass"), the array or layer 410 of thin film transistors (TFTs), and the liquid crystal layer 415.

[0058] FIG. 6 shows a schematic view of a touch screen panel 600 having a layer system according to still further embodiments described herein. The embodiment of FIG. 6 is similar to the embodiments of FIGs. 4 and 5, and a description of similar or identical elements is omitted. The embodiment of FIG. 6 differs from the embodiments of FIGs. 4 and 5 in a configuration of the second line pattern. The second line pattern 640 in FIG. 6 is embedded in the color filter matrix 420.

[0059] In some implementations, the layer system includes at least one substrate, such as the second substrate 425. The at least one substrate can have the first side and the second side, wherein the first layer stack is provided over the first side and the second layer stack is provided over the second side. According to some embodiments, the layer system can include the color filter matrix 420, wherein the one or more first lines of the first line pattern 530 or the one or more second lines of the second line pattern 640 are embedded in the color filter matrix 420. In the example of FIG, 6, the second line pattern 640 is embedded in the color filter matrix 420. [0060] According to some embodiments, which can be combined with other embodiments described herein, the one or more first lines of the first line pattern 530 or the one or more second lines of the second line pattern 640 embedded in the color filter matrix 420 are configured as a black matrix. The black matrix can be configured to spatially separate individual colors or segments of the color filter matrix, such as red (R), green (G) and blue (B) colors or segments. By providing the one or more first lines of the first line pattern 530 or the one or more second lines of the second line pattern 640 as the black matrix, a process step for forming a separate black matrix can be omitted, and manufacturing complexity and costs can be reduced.

[0061] Although in the above examples of FIGs. 4 to 6 the first line pattern and the second line pattern may define a matrix (x-y pattern) for touch detection, it is to be understood that one line pattern, e.g., the first line pattern or the second line pattern, can be provided and can be configured for touch detection. In such a case, no there may be no matrix of line patterns, but there may be only one line pattern. As an example, the one line pattern can include the layer stack of the present disclosure. The one or more lines of the one line pattern can for instance be contact lines. A manufacturing process can be facilitated, in particular since there is no x-y pattern.

[0062] FIG. 7 shows a schematic view of a deposition apparatus 700 for manufacturing a layer system according to embodiments described herein.

[0063] Exemplarily, a vacuum chamber 702 for deposition of layers therein is shown. As indicated in FIG. 7, further chambers can be provided adjacent to the vacuum chamber 702. The vacuum chamber 702 can be separated from adjacent chambers by a valve having a valve housing 704 and the valve unit 705. After a carrier 714 with a substrate 701 thereon is, as indicated by arrow 1, inserted into the vacuum chamber 702, the valve unit 705 can be closed. The atmosphere in the vacuum chambers 702 can be individually controlled by generating a technical vacuum, for example with vacuum pumps connected to the vacuum chamber 702, and/or by inserting process gases in a deposition region in the vacuum chamber 702.

[0064] According to some embodiments, process gases can include inert gases such as argon and/or reactive gases such as oxygen, nitrogen, hydrogen and ammonia (NH3), Ozone (03), activated gases or the like. Within the vacuum chamber 702, rollers 710 are provided in order to transport the carrier 714, having the substrate 701 thereon, into and out of the vacuum chamber 702.

[0065] Although the example of FIG. 7 shows at least two different groups of deposition sources 722 and 724 within the same vacuum chamber 702, it is to be understood that the groups of deposition sources 722 and 724 can be provided in different vacuum chambers 702 in the event different deposition processes are provided by the groups of deposition sources 722 and 724. The deposition sources 722 and 724 can be configured for depositing the layers of the layer system, such as the metal layer and the two or more further layers, e.g., the indium gallium zinc oxide (IGZO) layer and/or the indium zinc oxide (IZO) layer, and the first layer including molybdenum or a molybdenum alloy.

[0066] The deposition sources 722 and 724 can for example be rotatable cathodes having targets of the material to be deposited on the substrate 701. The cathodes can be rotatable cathodes with a magnetron therein. Magnetron sputtering can be conducted for depositing of the layers. The deposition sources 722 and 724 are connected to an AC power supply 723 such that the deposition sources 722 and 724 can be biased in an alternating manner.

[0067] As used herein, "magnetron sputtering" refers to sputtering performed using a magnet assembly, that is, a unit capable of generating a magnetic field. Such a magnet assembly can consist of a permanent magnet. This permanent magnet can be arranged within a rotatable target or coupled to a planar target in a manner such that the free electrons are trapped within the generated magnetic field generated below the rotatable target surface. Such a magnet assembly may also be arranged coupled to a planar cathode. Magnetron sputtering can be realized by a double magnetron cathode, i.e. the deposition sources 722 and 724, such as, but not limited to, a TwinMag™ cathode assembly. [0068] According to embodiments, the layers of the layer system can be deposited by sputtering, for example magnetron sputtering, of rotatable cathodes having an AC power supply. Further, sputtering from a target for a transparent conductive oxide layer can be conducted as DC sputtering. The deposition sources 722 and 724 are connected to the DC power supply 726 together with anodes 725 collecting electrons during sputtering. Thus, according to yet further embodiments, which can be combined with other embodiments described herein, the transparent conductive oxide layers, for example the ITO layers, can be sputtered by DC sputtering, i.e. an assembly having the deposition sources 722 and 724.

[0069] For simplicity, the deposition sources 722 and 724 are illustrated to be provided in one vacuum chamber 702. Deposition sources for depositing different layers of the layer system can be provided in different vacuum chambers 702, for example the vacuum chamber 702 and another vacuum chamber adjacent to the vacuum chamber 702, as illustrated in FIG. 7. By providing the groups of deposition sources 722 and 724 in different vacuum chambers 702, an atmosphere with an appropriate processing gas and/or the appropriate degree of technical vacuum can be provided in each deposition area.

[0070] According to some embodiments, deposition is performed by sputtering of one or more rotatable targets. More specifically, according to embodiments herein, at least one of the layers of the layer system referred to above is deposited by sputtering of a rotatable target, so that formation of a stable layer system of a high quality is facilitated. For example, according to embodiments herein, a layer may be deposited having a higher uniformity, and with a low density of defects and contamination particles. Manufacturing of a high-quality layer system not only yields proper optical and electrical characteristics, but also yields a stable performance over time. Furthermore, a manufacturing process including sputtering of one or more rotatable targets may further facilitate a higher manufacturing rate and the production of a lower number of contaminant particles as compared to other deposition methods.

[0071] FIG. 8 shows a flow chart of a method 800 for manufacturing a layer system adapted for use in a touch screen panel according to embodiments described herein.

[0072] The method 800 includes providing a metal layer including aluminium or an aluminium alloy over a substrate (block 810); providing a first layer over the metal layer, wherein the first layer includes molybdenum or a molybdenum alloy (block 820); providing an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer over the first layer (block 830); and structuring the metal layer, the first layer and the IGZO layer or the IZO layer (block 840), in particular in one step. [0073] According to some embodiments, which can be combined with other embodiments described herein, the structuring of the metal layer, the first layer and the IGZO layer or the IZO layer is conducted in the same structuring process. As an example, the structuring process is an etching process, in particular a wet etching process. By structuring all the layers in one single structuring process, the layer system can be manufactured with reduced effort and costs.

[0074] According to embodiments described herein, the method for manufacturing a layer system adapted for use in a touch screen panel can be conducted by means of computer programs, software, computer software products and the interrelated controllers, which can have a CPU, a memory, a user interface, and input and output means being in communication with the corresponding components of the apparatus for processing a large area substrate.

[0075] The layer system of the present disclosure has enhanced optical characteristics, e.g. the appearance to a user. In particular, structures of the layers, e.g., of the structured metal layer, are not visible for a user. The layer system provides improved electrical characteristics. In particular, the structured conductor is a metal layer including Al or and Al alloy having a high conductivity. This is beneficial for large touch panel sizes. In view of this, the present disclosure provides a layer system for use in a touch screen panel, which provides enhanced optical and electrical performance compared to conventional structures. By structuring the layers in one single structuring process, the layer system can be manufactured with reduced effort and costs.

[0076] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. A layer system adapted for use in a touch screen panel, comprising: at least one layer stack having three or more layers which are structured in the same structuring process, wherein the three or more layers include: a metal layer including aluminium or an aluminium alloy; two or more further layers, wherein the two or more further layers include an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; and - a first layer including molybdenum or a molybdenum alloy.

2. The layer system of claim 1, wherein the two or more further layers are configured to blacken the metal layer so that the structure of the metal layer is substantially invisible for a human eye.

3. The layer system of claim 1 or 2, wherein the first layer is provided on or over the metal layer, and/or wherein the IGZO layer or the IZO layer is provided on or over the first layer.

4. The layer system of one of claims 1 to 3, wherein the first layer is selected from the group including a MoOx layer, a (Mo-alloy)Ox layer, a MoOxNx layer, a (Mo-alloy)OxNx layer, a MoNbOx layer, and a MoNb layer.

5. The layer system of one of claims 1 to 4, further including at least one of a second layer including molybdenum or a molybdenum alloy, in particular wherein the second layer is a Mo layer or a MoNb layer; and a third layer including molybdenum or a molybdenum alloy, in particular wherein the third layer is a Mo layer or a MoNb layer.

6. The layer system of claim 5, wherein the second layer is provided on or over the metal layer, in particular wherein the second layer is provided between a substrate and the metal layer.

7. The layer system of claim 5 or 6, wherein the third layer is provided on or over the metal layer, in particular wherein the third layer is provided between the metal layer and the first layer.

8. The layer system of one of claims 1 to 7, including a first line pattern having one or more first lines and/or a second line pattern having one or more second lines, wherein the first line pattern and/or the second line pattern are configured for touch detection, and in particular wherein the first line pattern and the second line pattern are separated by an insulating layer.

9. The layer system of claim 8, wherein the one or more first lines are provided by the at least one layer stack and/or wherein the one or more second lines are provided by a transparent conductive oxide, in particular indium tin oxide, or wherein the one or more second lines are provided by the at least one layer stack and/or wherein the one or more first lines are provided by the transparent conductive oxide, in particular indium tin oxide.

10. The layer system of claims 8 or 9, wherein the at least one layer stack includes a first layer stack and a second layer stack, wherein the one or more first lines of the first line pattern are provided by the first layer stack and the one or more second lines of the second line pattern are provided by the second layer stack.

11. The layer system of claim 10, further including at least one substrate, wherein the at least one substrate has a first side and a second side, wherein the first layer stack is provided over the first side and the second layer stack is provided over the second side, or wherein the first layer stack and the second layer stack are provided over the first side.

12. The layer system of one of claims 8 to 11, further including at least one of: a polarizing layer, wherein the one or more first lines of the first line pattern or the one or more second lines of the second line pattern are embedded in the polarizing layer, and a color filter matrix, wherein the one or more first lines of the first line pattern or the one or more second lines of the second line pattern are embedded in the color filter matrix, in particular wherein the one or more first lines of the first line pattern or the one or more second lines of the second line pattern embedded in the color filter matrix are configured as a black matrix.

13. A touch screen panel, comprising: a screen device, in particular a liquid crystal display; and a layer system of one of claims 1 to 12 over the screen device.

14. A method for manufacturing a layer system adapted for use in a touch screen panel, wherein the method comprises: providing a metal layer including aluminium or an aluminium alloy over a substrate; providing a first layer over the metal layer, wherein the first layer includes molybdenum or a molybdenum alloy; providing an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer over the first layer; and structuring the metal layer, the first layer and the IGZO layer or the IZO layer.

15. The method of claim 14, wherein the structuring of the metal layer, the first layer and the IGZO layer or the IZO layer is conducted in the same structuring process, in particular wherein the structuring process is an etching process.