CN109917975A - Red touch module of one and preparation method thereof and touch control display apparatus - Google Patents

Red touch module of one and preparation method thereof and touch control display apparatus Download PDF

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Publication number
CN109917975A
CN109917975A CN201910172058.7A CN201910172058A CN109917975A CN 109917975 A CN109917975 A CN 109917975A CN 201910172058 A CN201910172058 A CN 201910172058A CN 109917975 A CN109917975 A CN 109917975A
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China
Prior art keywords
oxide layer
molybdenum oxide
metal mesh
substrate
layer
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CN201910172058.7A
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Chinese (zh)
Inventor
刘威
吴德生
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Truly Opto Electronics Ltd
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Truly Opto Electronics Ltd
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Priority to CN201910172058.7A priority Critical patent/CN109917975A/en
Publication of CN109917975A publication Critical patent/CN109917975A/en
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Abstract

The invention belongs to the technical fields that touch-control is shown, more particularly to the red touch module of one and touch control display apparatus.The present invention provides a kind of red touch modules of one, comprising: substrate;At least one layer of metal mesh compartment, each layer of metal mesh compartment is set on the substrate by magnetron sputtering technique, wherein, the metal mesh compartment includes the first molybdenum oxide layer, layers of copper and the second molybdenum oxide layer, and the first molybdenum oxide layer and the second molybdenum oxide layer are respectively arranged on the two sides of the layers of copper.The color of touch module of the invention is red, and the color that can effectively solve touch-control mould display device in the prior art selects few technological deficiency.

Description

Red touch module of one and preparation method thereof and touch control display apparatus
Technical field
The invention belongs to the technical fields that touch-control is shown, more particularly to the red touch module of one and touch control display apparatus.
Background technique
With the raising of people's level of consumption, feature phone is gradually to the transition of smartphone, and consumer is to intelligence The requirement of mobile phone hardware aspect of performance is also being continuously improved.Therefore touch screen (the touch as smart phone important component Panel, TP) it is also rapidly developing.
Touch display technology is broadly divided into resistance-type, condenser type, infrared type and surface acoustic wave mode, wherein capacitive touch Control display device is divided into surface capacitance type and inductance capacitance formula again.Inductance capacitance formula touch control display apparatus, which has, realizes true multiple spot It touches, the advantages that transparency is good, durability is good, high resolution, has become the consumer electronics products such as mobile phone, tablet computer Mainstream technology.
Now with the continuous development of touch technology, the application of touch control display apparatus is more and more wider.Touch-control display dress It sets and is typically provided touch module, touch function is realized by touch module.The modern life is more and more exquisiter, pursues ultimate attainment beauty It sees.With the raising that consumers' aesthetic is seen, requirement of the user for touch control display apparatus is also increasingly improved.Currently, most touching Control display device is integrated black effect, and the black effect of one refers to that the visible area of touch control display apparatus and rim area can when ceasing screen There is consistent black display effect.The touch control display apparatus of the black effect of one also allows consumers' aesthetic tired, so that consumer Selectable range become smaller, therefore, the integrated effects of other colors becomes an important indicator of touch control display apparatus, is now Touch control display apparatus can be made to realize the integrated effect of other colors, have using visual region increase setting extinction plate or The schemes such as light polarizing film, but technology difficulty is increased in this way, improve production cost.
Summary of the invention
In view of this, the object of the present invention is to provide the touch module of the red effect of one, it is aobvious to touch-control with abundant consumer The selection of showing device.
The present invention provides the red touch modules of one, comprising:
Substrate;
At least one layer of metal mesh compartment, each layer of metal mesh compartment are set on the substrate by magnetron sputtering technique, In, the metal mesh compartment includes the first molybdenum oxide layer, layers of copper and the second molybdenum oxide layer, the first molybdenum oxide layer and the second molybdenum oxide Layer is respectively arranged on the two sides of the layers of copper.
Preferably, the layers of copper with a thickness of 120-1600nm;First molybdenum oxide layer and second molybdenum oxide The thickness of layer is respectively 20-35nm, and the thickness of first molybdenum oxide layer and second molybdenum oxide layer is equal.
Preferably, the logical amount of oxygen of the magnetron sputtering technique is 60-70sccm;The logical argon of the magnetron sputtering technique Tolerance: 100sccm.
Preferably, the metal mesh compartment is to sequentially form the first oxidation by magnetron sputtering technique on the substrate Molybdenum layer, layers of copper and the second molybdenum oxide layer, side of second molybdenum oxide layer far from the substrate form grid by yellow light technique Line.
Preferably, the grid line width of the metal mesh compartment is 5-8um;The grid diagonal line of the metal mesh compartment Length be 0.2-0.5mm.
Preferably, the quantity of the metal mesh compartment is two layers.
Preferably, each layer of metal mesh compartment is additionally provided with insulating layer far from the side of the substrate.
Preferably, being additionally provided with ink layer on the substrate.
The present invention also provides the preparation methods of the red touch module of the one, comprising the following steps:
Step 1 sputters the first molybdenum oxide layer by magnetron sputtering technique on the surface of the substrate;
Step 2, in side magnetron sputtering layers of copper of first molybdenum oxide layer far from the substrate;
Step 3, in side magnetron sputtering second molybdenum oxide layer of the layers of copper far from the substrate;
Step 4 makes first molybdenum oxide layer, the copper by yellow light technique on the surface of second molybdenum oxide layer Layer and second molybdenum oxide layer form metal mesh compartment.
Specifically, grid lines is formed by yellow light technique on the surface of second molybdenum oxide layer, so that first oxygen Change molybdenum layer, the layers of copper and the second molybdenum oxide layer three-decker and is etched into grid lines together.
The present invention also provides a kind of touch control display apparatus, including the red touch module of one.
The purpose of the application selects few technology to lack for touch module and the color of touch control display apparatus in the prior art It falls into.For the application using magnetron sputtering technique in substrate surface splash-proofing sputtering metal clathrum, magnetron sputtering technique makes metal mesh compartment Compact structure it is good, since the first molybdenum oxide layer and the second molybdenum oxide layer are respectively arranged on the two sides of layers of copper, form " sandwich " knot Structure.The application has the following technical effect that layers of copper has good electric action, the first molybdenum oxide layer and the second molybdenum oxide layer Thickness so that metal mesh compartment present it is red, and the thickness size of the second molybdenum oxide layer can determine metal mesh compartment it is red Color depth is shallow.So that touch module is applied to can effectively ensure that the consistent of visible area and rim area when touch control display apparatus Property, effectively improve the red display effect of one.Touch control display apparatus can be effectively realized using touch module provided by the present application The red effect of one simultaneously need not increase other component, simplify technology difficulty, reduce production cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described.
Fig. 1 is the structural schematic diagram of the metal mesh compartment of the red touch module of one provided by the present application;
Fig. 2 is the structural schematic diagram of the red touch module of one provided by the present application;
Fig. 3 is the grid arrangement figure of the metal mesh compartment of the red touch module of one provided by the present application;
Fig. 4 is the cornerwise schematic diagram of grid of Fig. 3;
Fig. 5 is thickness and the touching of the first molybdenum oxide layer and the second molybdenum oxide layer of the red touch module of one provided by the present application The color relationship figure of mould group is controlled, a is red green axis, and b is champac axis;
Wherein, appended drawing reference, substrate 1, metal mesh compartment 2, the first molybdenum oxide layer 21, layers of copper 22, the second molybdenum oxide layer 23, The cornerwise length L of grid lines 200, ink layer 3, insulating layer 4, grid.
Specific embodiment
The present invention provides the red touch module of one and touch control display apparatus, effectively solve touch-control mould in the prior art and show The color of device selects few technological deficiency.
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects It encloses.
In order to better understand the touch module of the application, as shown in Figure 1, which show the red touchings of one provided by the present application Control mould group, including substrate 1;At least one layer of metal mesh compartment 2, each layer of metal mesh compartment are set to substrate by magnetron sputtering technique On 1, wherein metal mesh compartment 2 includes the first molybdenum oxide layer 21, layers of copper 22 and the second molybdenum oxide layer 23, the first molybdenum oxide layer 21 The two sides of layers of copper 22 are respectively arranged on the second molybdenum oxide layer 23.The present embodiment is sputtered using magnetron sputtering technique on 1 surface of substrate Metal mesh compartment 2, magnetron sputtering technique make the compact structure of metal mesh compartment 2 good, due to the first molybdenum oxide layer 21 and Titanium dioxide molybdenum layer 23 is respectively arranged on the two sides of layers of copper 22, forms " sandwich " structure, and layers of copper 22 has a good electric action, and first The thickness of molybdenum oxide layer 21 and the second molybdenum oxide layer 23, so that red, and the thickness of the second molybdenum oxide layer 23 is presented in metal mesh compartment 2 Degree size can determine metal mesh compartment 2 the red depth.So that touch module is applied to energy when touch control display apparatus The consistency of visible area and rim area is enough effectively ensured, effectively improves the red display effect of one.Use touching provided by the present application Control mould group can effectively realize the red effect of the one of touch control display apparatus while need not increase other component, simplify technique hardly possible Degree, reduces production cost.
Specifically, layers of copper 22 with a thickness of 120-160nm;The thickness of first molybdenum oxide layer 21 and the second molybdenum oxide layer 23 point It Wei not 20-35nm.The logical amount of oxygen of magnetron sputtering technique is 60-70sccm;The argon tolerance of magnetron sputtering technique: 100sccm. The logical amount of oxygen of the thickness and magnetron sputtering technique of first molybdenum oxide layer 21 and the second molybdenum oxide layer 23 can be to the red effect of one Touch module tone and shading value make further fine tuning, the red touch module of a variety of one can be prepared, as shown in figure 5, Fig. 5 is the first molybdenum oxide layer of the red touch module of one provided by the present application and the thickness of the second molybdenum oxide layer and touch module Color relationship figure, when the first molybdenum oxide layer 21 and the second molybdenum oxide layer 23 are with a thickness of 20nm, cerise is presented in touch module, When the first molybdenum oxide layer 21 and the second molybdenum oxide layer 23 are with a thickness of 30nm, pink is presented in touch module.
Specifically, present embodiments providing the preparation method of the red touch module of one, comprising the following steps: step 1 passes through Magnetron sputtering technique sputters the first molybdenum oxide layer 21 on the surface of substrate 1;Step 2, the first molybdenum oxide layer 21 far from substrate 1 it Side magnetron sputtering layers of copper 22;Step 3, in side magnetron sputtering second molybdenum oxide layer 23 of the layers of copper 22 far from substrate 1;Step 4, Side of the titanium dioxide molybdenum layer 23 far from substrate 1 forms grid lines 200 by yellow light technique.
It is (existing to be specially placed in magnetic control sputtering device by the preparation method of the red touch module of the one of the present embodiment for substrate Equipment) on, after assembling corresponding target, start magnetic control sputtering device, power 5.2KW;Oxygen-supply quantity is 60-70sccm;It is logical Argon gas amount is 100sccm;Sputter rate is 1m/min.The application uses existing common magnetic control sputtering device, splashes on substrate The first molybdenum oxide layer, layers of copper and the second molybdenum oxide layer of different-thickness are penetrated, the running parameter of magnetic control sputtering device is according to equipment It is required that setting, does not do limit one by one herein.
The grid lines of the metal mesh compartment of the red touch module of one in order to better understand the application, as shown in Figure 3-4, Metal mesh compartment 2 is to sequentially form the first molybdenum oxide layer 21, layers of copper 22 and the second oxidation by magnetron sputtering technique on substrate 1 Molybdenum layer 23, side of second molybdenum oxide layer 23 far from substrate 1 form grid lines by yellow light technique (prior art).Wherein, yellow light Technique the specific steps are the second side of the molybdenum oxide layer 23 far from substrate 1 with checkered manner smear photoresist, then successively into Row exposure and imaging, photoresist can show lattice at this time, then be etched, so that the place of photoresist can be eclipsed Quarter is fallen, and thus will form grid, finally carries out demoulding processing, and metal mesh compartment 2 is made in the photoresist taken off.Further, In the present embodiment, as shown in Figure 3-4, the width of the grid lines 200 of metal mesh compartment 2 is 5-8um.The net of metal mesh compartment 2 It is integrally red ineffective when 200 width of ruling is too small, and it is too wide will affect display effect so that the grid of metal mesh compartment 2 The width of line 200 is that 5-8um can effectively take into account the red effect of one and display effect, effectively improves product quality.Further, In the present embodiment, the grid of metal mesh compartment 2 is that diamond shape specifically can be preferably square, the net of metal mesh compartment 2 The cornerwise length L of lattice is 0.2-0.5mm.When the grid lines of metal mesh compartment 2 is excessively intensive, the red effect of one is better, still Transmitance can be lower, so that the grid diagonal line of metal mesh compartment 2 is 0.2-0.5mm, can effectively ensure that transmitance in 75%- Between 80%, integrated red effect and transmitance requirement are effectively taken into account, ensure that product quality.
Specifically, in the present embodiment, as shown in Fig. 2, the quantity of metal mesh compartment 2 is two layers, each layer of metal grill Layer 2 is additionally provided with insulating layer 4 (prior art) backwards to the side of substrate 1, and insulating layer 4 can be effectively spaced apart double layer of metal clathrum 2, prevents Only short circuit occurs for double layer of metal clathrum 2, while playing the role of the good protection to metal mesh compartment 2, specifically, substrate 1 Material is glass, the film or composite plate, and certainly, other materials that may be used as substrate are also feasible.Specifically, on substrate 1 It is also provided with ink layer 3 (prior art), ink layer 3 can be that red or other colors, ink layer can be with complexed metal nets The red tone and shading value that the colour match client of compartment 2 likes, touch module can be corresponded to non-show by being equipped with ink layer 3 Show that the position in area shelters from, play decoration, block the effect of cabling, guarantees the red display effect of one.Wherein, double layer of metal grid The intersection point of the grid lines of layer 2 is staggered, as the intersection point of the grid lines of one layer of metal mesh compartment 2 falls in another layer of metal mesh compartment 2 The white space of grid.
Specifically, as shown in Figure 1, the preparation method of the red touch module of one is the following steps are included: step in the present embodiment 1, ink layer 3 is set on the surface of substrate 1;Step 2 passes through magnetron sputtering technique in substrate far from the side of substrate 1 in ink layer 3 1 surface sputters the first molybdenum oxide layer 21;Step 3, in side magnetron sputtering layers of copper 22 of first molybdenum oxide layer 21 far from substrate 1; Step 4, in side magnetron sputtering second molybdenum oxide layer 23 of the layers of copper 22 far from substrate 1;It is step 5, separate in the second molybdenum oxide layer 23 The side of substrate 1 forms grid lines 200 by yellow light technique;Step 6, be equipped with grid lines 200 the second molybdenum oxide layer 23 table Insulating layer 4 is arranged in face;Step 7, in side magnetron sputtering first molybdenum oxide layer 21 of the insulating layer 4 far from substrate 1;Step 8, first Side magnetron sputtering layers of copper 22 of the molybdenum oxide layer 21 far from substrate 1;Step 9, in side magnetron sputtering second of the layers of copper 22 far from substrate 1 Molybdenum oxide layer 23;Step 10, the second molybdenum oxide layer 23 far from substrate 1 side by yellow light technique to the first molybdenum oxide layer 21, Layers of copper 22 and the second molybdenum oxide layer 23 form grid lines 200;Step 11, be equipped with grid lines 200 23 shape of the second molybdenum oxide layer At grid lines 200;Insulating layer 4 is arranged on the surface for being equipped with the second molybdenum oxide layer 23 of grid lines 200 in step 11.
Further, the embodiment of the present application also provides a kind of touch control display apparatus, including the above touch module.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered It is considered as protection scope of the present invention.

Claims (10)

1. the red touch module of one characterized by comprising
Substrate;
At least one layer of metal mesh compartment, each layer of metal mesh compartment are set on the substrate by magnetron sputtering technique, wherein institute Stating metal mesh compartment includes the first molybdenum oxide layer, layers of copper and the second molybdenum oxide layer, and the first molybdenum oxide layer and the second molybdenum oxide layer are divided Not She Yu the layers of copper two sides.
2. the red touch module of one according to claim 1, which is characterized in that the layers of copper with a thickness of 120-160nm; The thickness of first molybdenum oxide layer and second molybdenum oxide layer is respectively 20-35nm.
3. the red touch module of one according to claim 1, which is characterized in that the logical amount of oxygen of the magnetron sputtering technique For 60-70sccm;The argon tolerance of the magnetron sputtering technique: 100sccm.
4. the red touch module of one according to claim 1, which is characterized in that the metal mesh compartment is in the substrate Upper to sequentially form the first molybdenum oxide layer, layers of copper and the second molybdenum oxide layer by magnetron sputtering technique, second molybdenum oxide layer is remote Side from the substrate forms net to first molybdenum oxide layer, the layers of copper and second molybdenum oxide layer by yellow light technique Ruling.
5. the red touch module of one according to claim 4, which is characterized in that the grid line width of the metal mesh compartment For 5-8um;The cornerwise length of grid of the metal mesh compartment is 0.2-0.5mm.
6. the red touch module of one according to claim 1, which is characterized in that the quantity of the metal mesh compartment is two Layer.
7. the red touch module of one according to claim 1, which is characterized in that each layer of metal mesh compartment is far from the base The side of plate is additionally provided with insulating layer.
8. the red touch module of one according to claim 6, which is characterized in that be additionally provided with ink layer on the substrate.
9. the preparation method of the red touch module of one described in a kind of claim 1 to 8 any one, which is characterized in that including Following steps:
Step 1 sputters the first molybdenum oxide layer by magnetron sputtering technique on the surface of the substrate;
Step 2, in side magnetron sputtering layers of copper of first molybdenum oxide layer far from the substrate;
Step 3, in side magnetron sputtering second molybdenum oxide layer of the layers of copper far from the substrate;
Step 4, the surface of second molybdenum oxide layer by yellow light technique make first molybdenum oxide layer, the layers of copper and Second molybdenum oxide layer forms metal mesh compartment.
10. a kind of touch control display apparatus, which is characterized in that including the red touch module of the described in any item one of claim 1-8.
CN201910172058.7A 2019-03-07 2019-03-07 Red touch module of one and preparation method thereof and touch control display apparatus Pending CN109917975A (en)

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Application publication date: 20190621