KR101955005B1 - Layer system for use in a touch screen panel, method for manufacturing a layer system for use in a touch screen panel, and touch screen panel - Google Patents

Abstract

A layer system 100 adapted for use in a touch screen panel is provided. The layer system 100 includes at least one layer stack having three or more layers structured in the same structuring process. The three or more layers include a metal layer 110 comprising aluminum or an aluminum alloy, and two or more additional layers. Two or more additional layers may be formed of an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; And a first layer 120 comprising a molybdenum or molybdenum alloy.

Description

TECHNICAL FIELD [0001] The present invention relates to a floor system for use in a touch screen panel, a method for manufacturing a floor system for use in a touch screen panel, and a touch screen panel TOUCH SCREEN PANEL, AND TOUCH SCREEN PANEL}

[0001] Embodiments of the present disclosure relate to a layer system adapted for use in a touch screen panel, a method for manufacturing a layer system adapted for use in a touch screen panel, .

[0002] Touch screen panels are a specific kind of electronic visual display that can detect and position touch within the display area. The touch screen panels may include a layer system arranged over the screen device and configured to sense the touch. Such a layer system can be substantially transparent, so that light in the visible spectrum emitted by the screen can be transmitted through such a layer system. At least some known touch screen panels include a layer system having structured layers formed on a substrate. The touch on the display area of such a touch screen panel can cause a measurable change in capacitance in the area of the layer system. The change in capacitance can be measured using different techniques so that the location of the touch can be determined.

[0003] Layer systems for use with touch screen panels are subject to some specific requirements. By way of example, optical properties, e.g., appearance for a user, should be considered for touch screen panels. In particular, the structures of layers of a layer system, such as a structured conductor, should not be visible to the user. An additional aspect to be considered is the ever-increasing size of the displays, where, in addition to the optical properties described above, there is also increasing interest in electrical properties. In particular, the high conductivity of structured conductors is considered beneficial for large touch panel sizes.

[0004] In view of the foregoing, there is a need for a layer system for use in touch screen panels that provides improved optical and electrical performance as compared to conventional structures.

[0005] In view of the foregoing, there is provided a layer system adapted for use in a touch screen panel, a method for manufacturing a layer system adapted for use in a touch screen panel, and a touch screen panel. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.

[0006] According to aspects of the present disclosure, a layer system adapted for use in a touch screen panel is provided. The layer system comprises at least one layer stack having three or more layers structured in the same structuring process. The three or more layers include a metal layer comprising aluminum or an aluminum alloy, and two or more additional layers. Two or more additional layers may be formed of an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; And a first layer comprising a molybdenum or molybdenum alloy.

[0007] According to another aspect of the present disclosure, a touch screen panel is provided. Touch screen panels include screen devices, particularly liquid crystal displays; And a layer system as described herein. The layer system comprises at least one layer stack having three or more layers structured in the same structuring process. The three or more layers include a metal layer comprising aluminum or an aluminum alloy, and two or more additional layers. Two or more additional layers may be formed of an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; And a first layer comprising a molybdenum or molybdenum alloy.

[0008] According to yet another aspect of the present disclosure, a method is provided for manufacturing a layer system adapted for use in a touch screen panel. The method includes the steps of providing a metal layer comprising aluminum or an aluminum alloy on a substrate; Providing a first layer over the metal layer, the first layer comprising a molybdenum or molybdenum alloy; Providing an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer over the first layer; And structuring the metal layer, the first layer, and the IGZO layer or the IZO layer.

[0009] Embodiments also relate to devices for performing the disclosed methods and apparatus portions for performing each of the described method aspects. Such method aspects may be performed by hardware components, a computer programmed by suitable software, a combination of the two, or any other method. In addition, embodiments in accordance with the present disclosure also relate to methods for operating the described apparatus. This includes aspects of the method for performing all of the respective functions of the device.

[0010] In the manner in which the above-recited features of the present disclosure can be understood in detail, a more particular description of the present disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below.
Figure 1 shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel, in accordance with the embodiments described herein.
Figure 2a shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel, in accordance with further embodiments described herein.
Figure 2b shows a schematic cross-sectional view of the layer system of Figure 2a with a cover lens.
Figure 2C shows a graph illustrating the reflectivity of the layer systems of Figures 2A and 2B.
Figure 3a shows a schematic cross-sectional view of a layer system adapted for use in a touch screen panel, in accordance with further additional embodiments described herein.
Figure 3b shows a schematic cross-sectional view of the layer system of Figure 3a with a cover lens.
Figure 3c shows a graph illustrating the reflectivity of the layer systems of Figures 3a and 3b.
4 shows a schematic diagram of a touch screen panel with a layer system according to embodiments described herein.
5 shows a schematic diagram of a touch screen panel with a layer system according to further embodiments described herein.
Figure 6 illustrates a schematic diagram of a touch screen panel having a layer system in accordance with further embodiments described herein.
Figure 7 shows a schematic view of a deposition apparatus for manufacturing a layer system according to embodiments described herein.
Figure 8 shows a flow diagram of a method for manufacturing a layer system adapted for use in a touch screen panel, in accordance with embodiments described herein.

[0011] Reference will now be made in detail to the various embodiments of the present disclosure, and one or more examples of such various embodiments are illustrated in the drawings. In the following description of the drawings, like reference numerals refer to like components. In general, only differences for the individual embodiments are described. Each example is provided by way of illustration of the present disclosure and is not intended as a limitation of the present disclosure. In addition, features illustrated or described as part of one embodiment may also be used in conjunction with other embodiments or with other embodiments to produce further embodiments. The description is intended to cover such modifications and variations.

[0012] The term "substrate " as used herein will include substrates that can be used for the manufacture of displays such as glass or plastic substrates. For example, the substrates as described herein will include substrates that can be used for LCD (liquid crystal display), PDP (plasma display panel), OLED display, and the like. Unless otherwise explicitly specified in the description, the term "substrate" should be understood as a "large area substrate" as specified herein. According to the present disclosure, large area substrates may have a size of at least 0.174 m ² . By way of example, the size may be from about 1.4 m ² to about 8 m ² , and specifically from about 2 m ² to about 9 m ² or even up to 12 m ² . However, the present disclosure is not so limited, and the term "substrate" may also include flexible substrates such as webs or foils.

The term "transparent ", as used herein, will in particular include the ability of the structure to transmit light through relatively low scattering so that, for example, light transmitted through such a structure is substantially transparent . ≪ / RTI > By way of example, the substrate comprises glass or polyethylene terephthalate (PET). PET can have a transmittance of about 90%.

[0014] FIG. 1 illustrates a schematic cross-sectional view of a layer system 100 adapted for use in a touch screen panel in accordance with embodiments described herein.

[0015] The layer system 100 includes at least one layer stack having three or more layers structured in the same structuring process, such as an etching process. The three or more layers include a metal layer 110 comprising aluminum or an aluminum alloy, and two or more additional layers. Two or more additional layers may be formed of an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; And a first layer 120 comprising a molybdenum or molybdenum alloy. In some implementations, the layer system 100 is configured for touch detection. In the following, the term "IGZO layer or IZO layer" is also expressed as "IGZO or IZO layer 130 ".

[0016] In some implementations, the aluminum alloy may be AlNd.

[0017] According to some embodiments that may be combined with other embodiments described herein, the layer system 100 includes at least one substrate, such as a first substrate 10. As shown in the example of FIG. 1, a metal layer 110 and two or more additional layers may be disposed on the first substrate 10.

[0018] According to some embodiments, which may be combined with other embodiments described herein, two or more additional layers may be formed on the metal layer 110, the metal layer 110 is blackened so that the metal layer 110 is invisible. The term "blackening" as understood herein may refer to the low surface reflectance of the layer system 100, particularly in the visible wavelength range (e.g., from about 350 to about 800 nm). The low surface reflectance can be attributed to the combination of the IGZO or IZO layer 130 and the first layer 120. The surface reflectance of the layer systems of this disclosure may be less than 20%, particularly less than 10%, and more specifically less than 5% over at least a portion of the visible wavelength range. Examples of surface reflectance of a layer system according to some embodiments are given with reference to Figures 2c and 3c.

[0019] The layer system 100 of the present disclosure has improved optical properties, such as appearance to the user. In particular, the structures of the layers, such as the metal layer 110, are not visible to the user. The layer system 100 further provides improved electrical properties. In particular, the structured conductor for touch detection is a metal layer 110 comprising an Al alloy or Al with high conductivity. This is particularly beneficial for large touch panel sizes. With this in mind, the present disclosure provides a layer system for use in a touch screen panel that provides improved optical and electrical performance compared to conventional structures. By structuring the layers in one single structuring process, the layer system can be fabricated with reduced effort and costs.

[0020] According to some embodiments that may be combined with other embodiments described herein, the metal layer 110 has a thickness of less than 500 micrometers, specifically less than 300 micrometers, and more specifically, , And a thickness of about 200 micrometers. In some implementations, the metal layer 110 has a conductivity of at least 2 * 10 ⁷ S * m, and specifically about 3.5 * 10 ⁷ S * m. In some embodiments, the metal layer 110 has an electrical resistivity of 5 * 10 ^-8 ohm * m, and specifically about 3 * 10 ^-8 ohm * m or 2.8 * 10 ^-8 ohm * m.

[0021] In some implementations, metal layer 110 provides a line pattern with one or more lines. The lines may be parallel lines, e.g., horizontal lines or vertical lines. By way of example, the line pattern can be configured for touch detection, in particular in combination with other line patterns. Both of the line patterns can be separated by an insulating layer. The lines of both line patterns may extend in substantially perpendicular directions to form a matrix. The matrix may be configured for touch detection, for example, by detecting a change in capacitance between two line patterns.

[0022] According to some embodiments, the lines may have a width less than 10 micrometers, specifically less than 5 micrometers, and more specifically, a width in the range of about 2 micrometers to about 3 micrometers Lt; / RTI > The combination of the IGZO or IZO layer 130 and the first layer 120 can blacken the lines such that the lines are substantially invisible to the human eye (e.g., the lines can be black have).

In some implementations, a first layer 120 is provided on or on the metal layer 110, and / or an IGZO or IZO layer 130 is provided on or on the first layer 120 . That is, the metal layer 110, the first layer 120, and the IGZO or IZO layer 130 are arranged in this order, especially on or on the first substrate 10. The metal layer 110 and the first layer 120 and / or the first layer 120 and the IGZO or IZO layer 130 may be directly disposed on each other. Alternatively, at least one additional layer may be provided between the metal layer 110 and the first layer 120 and / or between the first layer 120 and the IGZO or IZO layer 130.

It will be understood that when the terms "phase" or "stomach" are mentioned, that is, if one layer is on or on another layer, for example, starting from the first substrate 10, It is understood that other layers that are deposited on or on the first substrate 10, and which are deposited after such one layer, are on or on one such layer and are on the first substrate 10. That is, the terms "top" or "top" are used to define the order of layers, layer stacks, and / or films, where the starting point may be the first substrate 10. This is irrelevant whether the layer system is shown upside down or not. Additionally, the term "above" should include embodiments in which one or more additional layers are provided between one layer and another layer. The term "phase" means that embodiments in which additional layers are not provided between one layer and another layer, that is, one layer and another layer are disposed directly on top of each other, .

In some embodiments, the first layer 120 includes a MoO _x layer, a (Mo-alloy) O _x layer, a MoO _x N _x layer, a (Mo-alloy) O _x N _x layer, a MoNbO _x layer, And a MoNb layer. The combination of the IGZO or IZO layer 130 and the first layer 120 provides the blackening effect of the metal layer 110. That is, the structure of the metal layer 110 becomes black, and thus is not visible to the user.

Indium tin oxide (ITO) can be used as a conductive layer (electrode) for touch panel applications. However, the resistivity of the ITO layer is limited and depends on the substrate temperature (e.g., during the deposition or post-annealing process). Higher conductivity is beneficial for larger touch panel sizes (e.g., notebooks and TVs), and on-cell / in-cell touch panel solutions can use low temperature deposition. The metal layers of the present disclosure can meet such aspects by providing high conductivity with layer deposition at a limited substrate temperature.

[0027] The (inactive) high reflectivity of the metal layer can make the touch panel structures visible to the human eye. Two or more additional layers of the layer system reduce the surface reflection of the layer system as compared to the surface reflection of the aluminum and / or aluminum alloy metal layer. Two or more additional layers may be conductive and / or optically active layers and may reduce the visibility of the structured aluminum and / or aluminum alloy layers to an acceptable level for the end user. Two or more additional layers may be selected to enable wet etching of the entire black metal layer structure in one process block. Such a black metal layer structure can be disposed, for example, on a color filter glass or a cover lens, and the invisibility of the touch panel structure can be achieved.

[0028] FIG. 2a illustrates a schematic cross-sectional view of a layer system 200 adapted for use in a touch screen panel, in accordance with additional embodiments described herein.

[0029] According to some embodiments that may be combined with other embodiments described herein, the layer system 200, and in particular two or more additional layers, may comprise a second layer comprising a molybdenum or molybdenum alloy (240). By way of example, the second layer 240 may be a Mo layer or a MoNb layer. According to some embodiments, the second layer 240 comprising a molybdenum or molybdenum alloy can be configured as an adhesive layer between the substrate and the metal layer 110, such as, for example, the first substrate 10.

[0030] In some implementations, the second layer 240 is provided on or on the metal layer 110. The second layer 240 may be provided on the side of the metal layer 110 opposite the side where the first layer 120 is provided. For example, the second layer 240 is provided between the metal layer 110 and at least one substrate, such as the first substrate 10, for example.

[0031] Figure 2b shows a schematic cross-sectional view of the layer system of Figure 2a with a cover lens 20.

[0032] According to some embodiments that may be combined with other embodiments described herein, the layer system further includes a cover lens 20. The cover lens 20 may be provided on or on the IGZO or IZO layer 130. As an example, a transparent adhesive layer 15 comprising, for example, an optically transparent adhesive (OCA) may be applied to the cover lens 20 and the IGZO or IZO layer (not shown) to attach the cover lens 20 to the IGZO or IZO layer 130 130, respectively. In some implementations, the term "cover lens" may refer to the top glass of the touch screen panel. The cover lens 20 may be made of a glass having a thickness of 0.1 mm or more, such as about 0.5 mm, 0.7 mm, 0.9 mm, or 1 mm.

[0033] FIG. 2C shows a graph illustrating the reflectivity (R) of the layer systems of FIGS. 2A and 2B.

The x-axis of the graph represents the wavelength in units of nanometers, and the y-axis represents the reflectance (R). The first curve 250 represents the measured reflectance directly on the IGZO layer of FIG. 2A. The second curve 260 represents the reflectance measured on the cover lens 20 of FIG. 2B. Layer system provides a low surface reflectance, particularly in the visible wavelength range (e.g., from about 350 to about 800 nm). The low surface reflectance may result from a combination of the IGZO or IZO layer 130 and the first layer 120, and optional additional layers such as the second layer 240.

[0035] FIG. 3a shows a schematic cross-sectional view of a layer system 30 adapted for use in a touch screen panel, in accordance with further additional embodiments described herein.

[0036] According to some embodiments, which may be combined with other embodiments described herein, the layer system 300, and in particular two or more additional layers, may comprise a third layer comprising a molybdenum or molybdenum alloy (350), wherein the third layer (350) is a Mo layer or a MoNb layer. In some implementations, a third layer 350 is provided on or on the metal layer 110. As an example, a third layer 350 may be provided between the metal layer 110 and the first layer 120.

The combination of the first layer 120, the IGZO or IZO layer 130, the second layer 240, and the third layer 350 may further reduce the surface reflectivity, Optical properties are further improved.

[0038] Figure 3b shows a schematic cross-sectional view of the layer system of Figure 3a with a cover lens 20.

[0039] According to some embodiments that may be combined with other embodiments described herein, the layer system further includes a cover lens 20. The cover lens 20 may be provided on or on the IGZO or IZO layer 130. As an example, a transparent adhesive layer 15 comprising, for example, an optically transparent adhesive (OCA) may be applied to the cover lens 20 and the IGZO or IZO layer (not shown) to attach the cover lens 20 to the IGZO or IZO layer 130 130, respectively. In some implementations, the term "cover lens" may refer to the top glass of the touch screen panel. The cover lens 20 may be made of a glass having a thickness of 0.1 mm or more, such as about 0.5 mm, 0.7 mm, 0.9 mm, or 1 mm.

[0040] FIG. 3C shows a graph illustrating the reflectivity of the layer systems of FIGS. 3A and 3B.

The x-axis of the graph represents the wavelength in nanometers, and the y-axis represents the reflectance. The first curve 351 represents the reflectance R measured directly on the IGZO layer of FIG. 3A. The second curve 360 represents the reflectance R measured on the cover lens 20 of Figure 3B. Layer system provides a low surface reflectance, particularly in the visible wavelength range (e.g., from about 350 to about 800 nm). The low surface reflectance may result from the combination of the IGZO or IZO layer 130 and the first layer 120 and from the optional layers such as the second layer 240 and the third layer 350.

[0042] The following description of the embodiments shown in FIGS. 4-6 illustrate that at least one layer stack may comprise a first substrate, a second substrate (e.g., a color filter substrate or color filter glass), and a third substrate TFT substrate or TFT glass) on or above one or more different substrates.

[0043] FIG. 4 shows a schematic diagram of a touch screen panel 400 having a layer system according to embodiments described herein.

[0044] According to aspects of the present disclosure, touch screen panel 400 includes a screen device and a layer system as described herein. By way of example, and as illustrated in the examples of Figs. 4-6, the screen device may be a liquid crystal display (LCD). However, the present disclosure is not limited to LCDs, and other screen technologies such as, for example, OLED displays may be employed in combination with the layer system of the present disclosure.

[0045] According to some embodiments that may be combined with other embodiments described herein, the layer system may include a first line pattern 430 having one or more first lines, and one or more Wherein the first line pattern 430 and the second line pattern 440 are separated by an insulating layer 435. The first line pattern 430 and the second line pattern 440 are separated by an insulating layer 435. [ The first line pattern 430 and the second line pattern 440 may be configured for touch detection.

One or more first lines of the first line pattern 430 and / or one or more second lines of the second line pattern 440 may be parallel lines, eg, horizontal lines or Vertical lines. One or more of the first lines of the first line pattern 430 and one or more of the second lines of the second line pattern 440 may extend in substantially perpendicular directions to form a matrix . By way of example, one or more first lines of the first line pattern 430 may extend in a first direction, e.g., an x-direction. One or more of the second lines of the second line pattern 440 may extend in a second direction, e.g., the y-direction. The first direction and the second direction may be substantially perpendicular. The matrix may be configured for touch detection, for example, by detecting a change in capacitance between the first line pattern 430 and the second line pattern 440.

The term " substantially vertical "refers to a direction in which one or more of the first lines of the first line pattern 430 and the second lines of the second line pattern 440 are substantially Where the deviation from the correct vertical orientation, e.g., a deviation of up to 10 degrees, or even up to 15 degrees, is still considered "substantially vertical ".

In some implementations, one or more of the first lines of the first line pattern 430 are provided by a transparent conductive oxide, particularly indium tin oxide (ITO), and one of the second line patterns 440 Or more of the second lines are provided by at least one layer stack of the layer system. In other implementations, one or more of the second lines of the second line pattern 440 may be provided by a transparent conductive oxide, particularly indium tin oxide, and may be provided by one or more first The lines are provided by at least one layer stack of layer systems.

[0049] The line pattern provided by at least one layer stack of the layer system, such as the second line pattern 440, may be constructed in accordance with the embodiments described herein. By way of example, the second line pattern 440 (or the first line pattern 430) may include a first substrate 10, a metal layer 110, and two or more additional layers. Two or more additional layers may include an IGZO layer or IZO layer, and a first layer (denoted by reference numeral 470), and optionally a second layer (denoted by reference numeral 460).

[0050] According to some embodiments that may be combined with other embodiments described herein, the transparent conductive oxide may include an indium tin oxide (ITO) layer, a doped ITO layer, impurity-doped ZnO, In ₂ O ₃ , Combinations of SnO ₂ and CdO, ITO (In ₂ O ₃ : Sn), AZO (ZnO: Al), IZO (ZnO: In), GZO (ZnO: Ga), ZnO, In ₂ O ₃ and SnO ₂ Or multi-component oxides composed of such combinations, such as a layer stack from at least an ITO layer and a metal layer, such as an ITO / metal / ITO-stack or a metal / ITO / metal-stack.

[0051] In an LCD, a layer of liquid crystals is aligned between two electrodes and two polarizing layers or polarization filters (eg, parallel and perpendicular) (their transmission axes are perpendicular to each other) are provided . Depending on the orientation of the liquid crystals, light passing through one polarizing filter is not blocked or blocked by another polarizing filter. In some embodiments, the layer system includes a polarizing layer 450 wherein the first lines of the first line pattern 430 or the second lines of the second line pattern 440 are aligned with the polarizing layer 450 ).

[0052] According to some embodiments, the layer system includes at least one substrate, such as a second substrate 425. The second substrate 425 may be a substrate on which the color filter matrix 420 of the screen device is disposed. The second substrate 425 may be referred to as a "color filter substrate" or a "color filter (CF) glass ". The second substrate 425 may have a first side and a second side. The first line pattern 430, the insulating layer 435, the second line pattern 440, the polarizing layer 450 and optionally the adhesive layer 15 and the cover lens 20 are disposed on the second substrate 425, Or on the first side of the < / RTI > A color filter matrix 420 (or a color filter layer) may be arranged on or above the second side of the second substrate 425. The first side of the second substrate 425 may be opposite the second side of the second substrate 425.

[0053] In some implementations, touch screen panel 400 includes a screen device. The screen device may include a third substrate 405, such as a glass substrate ("TFT-glass"). An array or layer 410 of thin film transistors (TFTs) may be arranged on or on a third substrate 405 and a liquid crystal layer 415 may be arranged on an array or layer 410 of thin film transistors (TFTs) Or on top of it. An array or layer of TFTs 410 may be configured to drive the pixels of the screen device. The screen device may further include a backlight. The color filter matrix 420 may be arranged on or above the liquid crystal layer 415.

[0054] FIG. 5 illustrates a schematic diagram of a touch screen panel 500 having a layer system in accordance with further embodiments described herein. The embodiment of FIG. 5 is similar to the embodiment of FIG. 4, and the descriptions of similar or identical elements are omitted. The embodiment of FIG. 5 differs from the embodiment of FIG. 4 in the construction of the first line pattern. The first line pattern 530 in FIG. 5 does not include a transparent conductive oxide, but includes a layer stack of the layer system of the present disclosure.

[0055] According to some embodiments that may be combined with other embodiments described herein, the at least one layer stack includes a first layer stack and a second layer stack, wherein the first line pattern 530 are provided by a first layer stack and one or more second lines of a second line pattern 440 are provided by a second layer stack.

The first line pattern 530 and / or the second line pattern 440 may comprise a layer system according to the embodiments described herein, for example, a layer system denoted by reference numeral 440 in FIG. 4 . The second line pattern 440 and the first line pattern 430 having a layer stack of the layer system of the present disclosure provide a high conductivity in both the line patterns, resulting in improved performance of the touch detection function.

[0057] In some implementations, the layer system includes at least one substrate, such as a second substrate 425. The at least one substrate may have a first side and a second side, wherein a first layer stack and a second layer stack are both provided on the first side. The first layer may be the side of the second substrate 425, e.g., provided with layers for touch detection, polarizing layer (s), and / or cover lens 20. The second side of the second substrate 425 may be the side of the second substrate 425 where the screen device is provided. The screen device may include a third substrate 405, such as a glass substrate ("TFT-glass"), an array or layer 410 of thin film transistors (TFTs), and a liquid crystal layer 415.

[0058] FIG. 6 illustrates a schematic diagram of a touch screen panel 600 having a layer system in accordance with further embodiments described herein. The embodiment of Fig. 6 is similar to the embodiments of Figs. 4 and 5, and a description of similar or identical elements is omitted. The embodiment of Fig. 6 differs from the embodiments of Figs. 4 and 5 in the configuration of the second line pattern. The second line pattern 640 in FIG. 6 is embedded in the color filter matrix 420.

[0059] In some implementations, the layer system includes at least one substrate, such as a second substrate 425. The at least one substrate may have a first side and a second side, wherein a first layer stack is provided on the first side and a second layer stack is provided on the second side. According to some embodiments, the layer system may include a color filter matrix 420, wherein one or more first lines or second line patterns 640 of the first line pattern 530, One or more second lines of the color filter matrix 420 are embedded in the color filter matrix 420. In the example of FIG. 6, the second line pattern 640 is embedded in the color filter matrix 420.

[0060] According to some embodiments that may be combined with other embodiments described herein, one or more second lines of the second line pattern 640 embedded in the color filter matrix 420, One or more first lines of the first line pattern 530 are configured as a black matrix. The black matrix may be configured to spatially separate the individual colors or segments of the color filter matrix, such as red (R), green (G), and blue (B) colors or segments. By providing one or more first lines of the first line pattern 530 or one or more second lines of the second line pattern 640 as black matrices, The process steps can be omitted, and the manufacturing complexity and costs can be reduced.

[0061] In the above examples of Figs. 4 to 6, the first line pattern and the second line pattern can define a matrix (xy pattern) for touch detection, but one line pattern, e.g., It should be appreciated that a second line pattern may be provided and configured for touch detection. In such a case, there may not be a matrix of line patterns, but only one line pattern may be present. By way of example, one line pattern may comprise a layer stack of the present disclosure. One or more lines of one line pattern may be, for example, contact lines. In particular, since there is no x-y pattern, the manufacturing process can be facilitated.

[0062] FIG. 7 shows a schematic diagram of a deposition apparatus 700 for manufacturing a layer system according to embodiments described herein.

[0063] Illustratively, a vacuum chamber 702 is shown for deposition of layers therein. As indicated in FIG. 7, additional chambers may be provided near the vacuum chamber 702. The vacuum chamber 702 can be separated from the adjacent chambers by valves having the valve housing 704 and the valve unit 705. [ The valve unit 705 can be closed after the carrier 714 having the substrate 701 on it is inserted into the vacuum chamber 702 as indicated by the arrow 1. The atmosphere in vacuum chambers 702 can be controlled individually by creating a technical vacuum with, for example, vacuum pumps connected to vacuum chamber 702 and / or by inserting process gases into the deposition zone in vacuum chamber 702, Lt; / RTI >

[0064] According to some embodiments, the process gases may include inert gases such as argon and / or reactive gases such as oxygen, nitrogen, hydrogen and ammonia (NH ₃ ), ozone (O ₃ ) And the like. Within the vacuum chamber 702, rollers 710 are provided to transport the carrier 714 having the substrate 701 thereon into and out of the vacuum chamber 702.

Although the example of FIG. 7 shows two different groups of deposition sources 722 and 724 in the same vacuum chamber 702, different deposition processes are provided by groups of deposition sources 722 and 724 It is to be understood that groups of deposition sources 722 and 724 may be provided in different vacuum chambers 702. [ The deposition sources 722 and 724 may be formed by depositing layers of a layer system such as a metal layer and two or more additional layers such as an indium gallium zinc oxide (IGZO) layer and / or indium zinc oxide (IZO) Layer, and a first layer comprising a molybdenum or molybdenum alloy.

[0066] Deposition sources 722 and 724 can be, for example, rotatable cathodes with targets of material to be deposited on substrate 701. The cathodes may be rotatable cathodes having a magnetron therein. Magnetron sputtering may be performed for deposition of the layers. The deposition sources 722 and 724 are connected to the AC power supply 723 so that the deposition sources 722 and 724 can be biased alternately.

[0067] As used herein, "magnetron sputtering" refers to sputtering performed using a magnet assembly, ie, a unit capable of generating a magnetic field. Such a magnet assembly may consist of a permanent magnet. Such permanent magnets may be coupled to the planar target or may be arranged in a rotatable target in a manner that allows free electrons to be trapped within the generated magnetic field generated below the rotatable target surface. Such a magnet assembly may also be arranged coupled to the planar cathode. Magnetron sputtering may be realized by deposition sources 722 and 724, such as, but not limited to, a dual magnetron cathode, i.e., a TwinMag ^TM cathode assembly.

[0068] According to embodiments, the layers of the layer system may be deposited by sputtering, such as magnetron sputtering, of rotatable cathodes having an AC power supply. Additionally, sputtering from the target for the transparent conductive oxide layer can be performed as DC sputtering. Deposition sources 722 and 724 are connected to DC power supply 726 along with anodes 725 that collect electrons during sputtering. Thus, according to further embodiments, which may be combined with other embodiments described herein, transparent conductive oxide layers, such as ITO layers, may be formed by DC sputtering, i.e., by an assembly having deposition sources 722 and 724 Can be sputtered.

[0069] For simplicity, deposition sources 722 and 724 are illustrated as being provided in one vacuum chamber 702. Deposition sources for depositing the different layers of the layer system may be provided in different vacuum chambers 702, such as, for example, as shown in FIG. 7, such as a vacuum chamber 702 and another vacuum chamber adjacent to the vacuum chamber 702 . By providing groups of deposition sources 722 and 724 in different vacuum chambers 702, an appropriate processing gas and / or atmosphere with a suitable degree of technical vacuum can be provided in each deposition region.

[0070] According to some embodiments, deposition is performed by sputtering one or more rotatable targets. More specifically, in accordance with embodiments herein, at least one of the layers of the above-mentioned layer system is deposited by sputtering of a rotatable target to facilitate the formation of a high quality stable layer system. For example, according to embodiments herein, a layer with higher uniformity and low density of defects and contaminating particles can be deposited. The manufacture of high-quality layer systems not only yields appropriate optical and electrical properties, but also yields stable performance over time. In addition, the fabrication process involving sputtering of one or more rotatable targets can further facilitate production of a higher production rate and fewer contaminant particles as compared to other deposition methods.

[0071] FIG. 8 shows a flow diagram of a method 800 for manufacturing a layer system adapted for use in a touch screen panel, in accordance with the embodiments described herein.

[0072] The method 800 includes the steps of providing a metal layer comprising aluminum or an aluminum alloy on a substrate (block 810); Providing a first layer over the metal layer, the first layer comprising a molybdenum or molybdenum alloy (block 820); Providing an indium gallium zinc oxide (IGZO) layer or indium zinc oxide (IZO) layer over the first layer (block 830); And structuring the metal layer, the first layer, and the IGZO layer or the IZO layer (block 840), especially in one step.

[0073] According to some embodiments that may be combined with other embodiments described herein, the structuring of the metal layer, the first layer, and the IGZO layer or the IZO layer is performed in the same structuring process. By way of example, the structuring process is an etching process, in particular a wet etching process. By structuring all layers in one single structuring process, the layer system can be fabricated with reduced effort and costs.

[0074] According to embodiments described herein, a method for manufacturing a layered system adapted for use in a touch screen panel comprises the steps of: providing a computer program, software, computer software products, and a CPU, memory, May be implemented by means of correlated controllers that may have input and output means for communicating with corresponding components of an apparatus for processing an area substrate.

[0075] The layer system of the present disclosure has improved optical properties, such as appearance to the user. In particular, the structures of the layers, such as the structured metal layer, are not visible to the user. The layer system provides improved electrical properties. In particular, the structured conductor is a metal layer comprising an Al alloy or Al with high conductivity. This is beneficial for large touch panel sizes. With this in mind, the present disclosure provides a layer system for use in a touch screen panel that provides improved optical and electrical performance compared to conventional structures. By structuring the layers in a single unified structuring process, the layer system can be fabricated with reduced effort and costs.

While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, and the scope of the present disclosure is defined by the following claims Is determined by the claims.

Claims (15)

A layer system adapted for use in a touch screen panel,
At least one layer stack having three or more layers structured in the same structuring process,
/ RTI >
The three or more layers may be < RTI ID = 0.0 >
A metal layer comprising aluminum or an aluminum alloy and providing a line pattern configured for touch detection; And
Two or more additional layers
/ RTI >
The two or more additional layers,
An indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer; And
A first layer comprising a molybdenum or molybdenum alloy
/ RTI >
Wherein the two or more additional layers are configured to blacken the metal layer such that the structure of the metal layer is substantially invisible to the human eye.
Layer system. delete The method according to claim 1,
Wherein the first layer is provided on or above the metal layer, or the IGZO layer or the IZO layer is provided on or above the first layer,
Layer system. The method according to claim 1,
Wherein the first layer is selected from the group consisting of a MoO _x layer, a (Mo-alloy) O _x layer, a MoO _x N _x layer, a (Mo- alloy) O _x N _x layer, a MoNbO _x layer,
Layer system. The method according to claim 1,
A second layer comprising a molybdenum or molybdenum alloy; And
A third layer comprising a molybdenum or molybdenum alloy
≪ / RTI >
Layer system. 6. The method of claim 5,
Said second layer being provided on or on said metal layer,
Layer system. 6. The method of claim 5,
Said third layer being provided on or on said metal layer,
Layer system. 8. The method according to any one of claims 1 to 7,
At least one of a first line pattern having one or more first lines or a second line pattern having one or more second lines, wherein at least one of the first line pattern or the second line pattern Which is configured for touch detection,
Layer system. 9. The method of claim 8,
Wherein the one or more first lines are provided by the at least one layer stack or the one or more second lines are provided by a transparent conductive oxide,
Wherein the one or more second lines are provided by the at least one layer stack or the one or more first lines are provided by the transparent conductive oxide,
Layer system. 9. The method of claim 8,
Wherein the at least one layer stack comprises a first layer stack and a second layer stack, wherein the one or more first lines of the first line pattern are provided by the first layer stack, Said one or more second lines of the pattern being provided by said second layer stack,
Layer system. 11. The method of claim 10,
Further comprising at least one substrate,
The at least one substrate having a first side and a second side,
Wherein the first layer stack is provided on the first side, the second layer stack is provided on the second side, or
Wherein the first layer stack and the second layer stack are provided on the first side,
Layer system. 9. The method of claim 8,
The polarizing layer - the one or more first lines of the first line pattern, or the one or more second lines of the second line pattern are embedded in the polarizing layer; and
A color filter matrix, wherein the one or more first lines of the first line pattern, or the one or more second lines of the second line pattern are embedded in the color filter matrix -
≪ / RTI >
Layer system. As a touch screen panel,
Screen devices; And
The layer system of claim 1,
/ RTI >
Touch screen panel. A method for fabricating a layer system adapted for use in a touch screen panel,
Providing a metal layer over the substrate comprising aluminum or an aluminum alloy;
Providing a first layer over the metal layer, the first layer comprising a molybdenum or molybdenum alloy;
Providing an indium gallium zinc oxide (IGZO) layer or an indium zinc oxide (IZO) layer over the first layer; And
Structuring the metal layer, the first layer, and the IGZO layer or the IZO layer,
Wherein the metal layer provides a line pattern configured for touch detection, wherein the first layer, and the IGZO layer or the IZO layer are formed such that the structure of the metal layer is substantially invisible to the human eye, And a black-
Layer system. 15. The method of claim 14,
Wherein the step of structuring the metal layer, the first layer, and the IGZO layer or the IZO layer is performed in the same structuring process,
Layer system.

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