WO2016047582A1 - End-section processing device and end-section processing method for glass plate - Google Patents

End-section processing device and end-section processing method for glass plate Download PDF

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Publication number
WO2016047582A1
WO2016047582A1 PCT/JP2015/076646 JP2015076646W WO2016047582A1 WO 2016047582 A1 WO2016047582 A1 WO 2016047582A1 JP 2015076646 W JP2015076646 W JP 2015076646W WO 2016047582 A1 WO2016047582 A1 WO 2016047582A1
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WIPO (PCT)
Prior art keywords
glass plate
support
processing
thickness dimension
support portion
Prior art date
Application number
PCT/JP2015/076646
Other languages
French (fr)
Japanese (ja)
Inventor
浩一 下津
松下　哲也
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020177005186A priority Critical patent/KR102274705B1/en
Priority to CN201580046539.3A priority patent/CN106795041B/en
Publication of WO2016047582A1 publication Critical patent/WO2016047582A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices

Definitions

  • the present invention relates to an edge processing apparatus and an edge processing method for a glass plate.
  • flat panel displays such as liquid crystal displays, plasma displays, organic EL displays, and field emission displays have been widely used in place of CRT type displays that have been widely used from the viewpoint of space saving. And in these flat panel displays, further thinning is required.
  • the organic EL display and the organic EL lighting it is possible to have a function of being able to fold and wind up by utilizing the fact that the thickness dimension is very small (thin).
  • the thickness dimension is very small (thin).
  • Patent Document 1 proposes a glass plate having a thickness of 300 ⁇ m or less (a glass plate of this size may be referred to as a glass film). It is possible to give the glass plate as much flexibility as possible.
  • glass plate used for electronic devices such as flat panel displays and solar cells are subjected to various processing related to electronic device manufacturing such as secondary processing and cleaning.
  • various processing related to electronic device manufacturing such as secondary processing and cleaning.
  • the glass plates used in these electronic devices are made thinner, they may be damaged by a slight change in stress, which makes it very difficult to handle electronic device manufacturing-related processing. is there.
  • a glass plate (glass film) having a thickness dimension of 300 ⁇ m or less, particularly 200 ⁇ m or less is rich in flexibility, there is a problem that it is difficult to perform positioning when performing various manufacturing-related processes.
  • Patent Document 2 proposes a method of conveying a glass plate in a predetermined direction while sandwiching a glass plate from both front and back sides with a pair of endless belts, and grinding the end with a grindstone disposed on the side. ing.
  • the surface of this type of glass plate may be required to have very high surface accuracy in order to attach other elements according to its use or to use it as it is. For this reason, if possible, it is desirable to perform processing such as grinding so that no member is brought into contact with at least one of the front and back surfaces.
  • a grindstone having a grinding surface having a shape according to the processing mode is usually used, and when grinding with this whetstone, the material, size, and grinding mode of the glass plate are used. Accordingly, high-pressure grinding fluid (water or the like) is sprayed mainly on the contact portion between the grindstone and the end of the glass plate. At this time, although the back surface (lower surface) of the glass plate is supported by a surface plate or the like, grinding is performed with the surface (upper surface) of the glass plate exposed for the reasons described above.
  • Patent Document 3 a cover portion that covers the grindstone is provided, an opening is formed in the cover portion, and the end of the glass plate to be ground can be brought into contact with the grindstone through the opening.
  • a grinding apparatus has been proposed.
  • the cover portion prevents the grinding liquid supplied to the contact portion between the grindstone and the end of the glass plate from splashing to the center side of the surface of the glass plate as much as possible. ing.
  • JP 2010-132531 A Japanese Patent No. 3587104 JP 2009-172749 A
  • the glass plate is easily deformed by an external load as the thickness of the glass plate is reduced, there is a high possibility that the glass plate is deformed to bend downward due to the load when contacting the grindstone. If grinding is performed in such a deformed state, adverse effects on grinding accuracy such as chamfering amount are unavoidable. Moreover, since the strength against an external load decreases as the thickness dimension decreases, there is a concern that the glass plate is broken (broken) due to contact with the grindstone.
  • the end of the glass plate may be deformed or vibrated, so that the clearance between the opening of the cover portion and the glass plate may be widened.
  • this clearance is set to an appropriate size according to the supply conditions (water volume, water pressure, etc.) of the grinding fluid used and the thickness of the glass plate.
  • the clearance is reduced by the smaller amount.
  • the possibility that the above-described deformation and vibration are likely to occur increases the possibility that the clearance will fluctuate (increase). This increases the risk that the grinding fluid will scatter and adhere to the center of the surface of the glass plate, which may adversely affect product quality such as surface accuracy and cleanliness.
  • the clearance between the glass plate and the opening can also be set in advance, but this time, the problem that the glass plate and the opening interfere with each other due to deflection or fluttering of the glass plate. Newly occurs.
  • the end processing apparatus includes a support base that supports the glass plate, a processing section that performs predetermined processing on the end of the glass plate supported by the support base, covers the processing section, and covers the glass.
  • An end processing apparatus for a glass plate comprising a cover portion provided with an opening for enabling contact between the end portion of the plate and the processing portion, wherein the support base is a central region of the glass plate And a second support part that supports the end side region of the glass plate, the thickness dimension of the second support part is smaller than that of the first support part, and the end of the glass plate It is characterized in that it is set to such a size that it can pass through the opening of the cover part while supporting the part side region.
  • the center side region and the end side region here are respectively the region and the end portion that are closer to the center than the intermediate position, with the middle position between the center position and the end position in a state of viewing the glass plate in plan view. It shall mean the area on the side.
  • the support base is provided with the first support portion that supports the central region of the glass plate and the second support portion that supports the end portion region of the glass plate. Even if the thickness dimension of a board is small, the edge part side area
  • the thickness of the second support portion is made smaller than that of the first support portion, and the second support portion can pass through the opening of the cover portion while supporting the end side region of the glass plate. Since it is set to a large size, it is possible to contact the end portion of the glass plate and the processing portion covered by the cover portion in a state where the end side region of the glass plate is supported by the second support portion. it can.
  • the second support part may be formed separately from the first support part.
  • the second support part may be configured to be detachable from the first support part.
  • the first support part required to support the center side area of the glass plate and the end side area of the glass plate are provided. It can be set as a different specification with the 2nd support part requested
  • the end side region of the glass plate is usually formed with the second support portion in a state where the end portion protrudes from the second support portion by a predetermined dimension in order to smoothly and reliably perform the processing by the processing portion.
  • the thickness dimension of the glass plate was particularly the conventional size. It has been found that the appropriate size (range) of the protrusion size changes greatly due to the change from one to the recent thin wall size (so-called film size). Therefore, even if it is a case where a plurality of types of glass plates having different thickness dimensions are processed on the same processing line, the second support portion is configured to be detachable from the first support portion. An appropriate support state of the glass plate can be created simply by changing. Thereby, it becomes possible to perform a highly accurate process for every glass plate from which a thickness dimension differs.
  • the edge part processing apparatus of the glass plate which concerns on this invention is A [mm] and the thickness dimension of the glass plate from the 2nd support part of the edge part of the glass plate of the state supported by the support stand.
  • the protrusion dimension A may be set so as to satisfy A ⁇ t ⁇ 200.
  • the above-described dimension setting is particularly effective when processing a glass plate having a thickness dimension of 300 ⁇ m or less. That is, with a conventional glass plate having a thickness dimension (700 ⁇ m or more), even if the protrusion dimension is larger than 200 times the thickness dimension (for example, about 300 times), the problem of deformation or vibration is particularly serious. It was possible to machine the end portion. On the other hand, when the thickness dimension of the glass plate was 300 ⁇ m or less, there was a tendency to behave significantly differently from the glass sheet having the conventional thickness dimension.
  • the present invention has been made in view of the above tendency, and in particular, when processing a glass plate having a thickness of 300 ⁇ m or less, by setting the protrusion size of the glass plate within the above range,
  • the glass plate can be appropriately supported according to the thickness dimension. Therefore, it becomes possible to perform highly accurate processing by effectively suppressing deformation and vibration of the glass plate during processing.
  • the second support portion of an appropriate size is configured so that the projecting size varies depending on the thickness dimension by configuring the second support portion to be removable from the first support portion as described above. Can be replaced. Thereby, it becomes possible to process a plurality of types of glass plates having a thickness of 300 ⁇ m or less and different thickness dimensions with high accuracy on the same processing line.
  • a second support portion having a shape and size that can be a conventional surface plate or the like is prepared separately, and these are replaced manually or automatically. By doing so, it becomes possible to process both the conventional glass plate and the thin glass plate reliably and with high precision.
  • the second support portion may be formed of a material having higher rigidity than the first support portion.
  • the thickness dimension of the second support part is never small, considering that the opening part of the cover part is allowed to pass through while supporting the end side region of the glass plate. On the other hand, if the thickness dimension of the second support part is too small, it is difficult to ensure the rigidity of the second support part itself.
  • the second support portion can be formed in a thickness dimension of an appropriate size that can ensure the rigidity of the second support portion itself.
  • the thickness dimension of the second support part may be set to 0.25 mm or more and 4.0 mm or less, preferably 0.5 mm. It may be set to 2.0 mm or less.
  • the thickness dimension of the second support portion can be set in a relatively small area in the above-described range, and further workability (workability) can be improved.
  • the glass plate edge processing apparatus can be suitably applied to a glass plate whose thickness dimension is set to 300 ⁇ m or less.
  • the thickness dimension is preferably set to 5 ⁇ m or more if possible.
  • the present invention can be suitably applied to a glass plate having a smaller thickness dimension (less than 5 ⁇ m).
  • this end portion processing method is a method for performing predetermined processing on the end portion of the glass plate supported by the support base at the processing portion covered with the cover portion.
  • the support base includes a first support for supporting a central region of the glass plate, and an end of the glass plate.
  • a second support part for supporting the side region, the thickness dimension of the second support part is smaller than that of the first support part, and the opening part of the cover part is supported while supporting the end side region of the glass plate.
  • the size of the glass plate is set so that it can pass through, and the second support portion in a state of supporting the end portion side region of the glass plate is inserted into the opening portion so that the end portion of the glass plate and the processed portion are in contact with each other. Characterized by what to do.
  • the support base is provided with the first support part that supports the central side region of the glass plate and the second support part that supports the end side region of the glass plate. Therefore, even if the thickness dimension of the glass plate is small, the end side region of the glass plate can be reliably supported.
  • the thickness of the second support portion is made smaller than that of the first support portion, and the second support portion can pass through the opening of the cover portion while supporting the end side region of the glass plate. Since it is set to a large size, it is possible to contact the end portion of the glass plate and the processing portion covered by the cover portion in a state where the end side region of the glass plate is supported by the second support portion. it can.
  • the end side region including the region close to the end of the glass plate introduced into the cover portion can be supported before the start of processing, so the deformation of the glass plate when contacting the processing portion
  • the vibration of the glass plate due to the spraying of the grinding fluid or the like can be suppressed, and high-precision processing becomes possible.
  • the situation where the clearance between the opening of the cover part and the glass plate largely fluctuates can be avoided by suppressing deformation and vibration. Therefore, the clearance can be maintained at a predetermined size, and it is possible to prevent as much as possible a situation where a liquid such as a grinding liquid scatters and adheres to the surface center side of the glass plate.
  • the glass plate is passed through the opening of the cover portion while supporting the end side region. It is possible to bring the end portion of the material into contact with the processed portion. Therefore, it is possible to prevent the deformation of the glass plate and the adhesion of the liquid to the surface of the glass plate as much as possible, and to perform highly accurate processing on the end portion of the glass plate.
  • FIG. 2 is an AA cross-sectional view of the end portion processing apparatus shown in FIG. 1. It is a principal part enlarged view of FIG. 2 before a process. It is a principal part enlarged view of FIG. 2 at the time of a process. It is principal part sectional drawing of the edge part processing apparatus of the glass plate which concerns on 2nd embodiment of this invention.
  • FIG. 1 is a plan view for explaining the outline of the glass sheet edge processing apparatus according to the first embodiment of the present invention.
  • the end processing apparatus 10 is an apparatus for performing predetermined processing on the end portion Ge of the glass plate G obtained by, for example, cutting or cleaving the molded mother glass into a predetermined shape.
  • the support table 11 for supporting the glass plate and the processing unit 12 for performing predetermined processing on the end portion Ge of the glass plate G supported by the support table 11 are provided.
  • the processing unit 12 is a grinding unit, and serves as a processing unit provided in the processing unit 12 along an end portion Ge (edge) of the glass plate G obtained by cutting into a rectangular shape.
  • the grindstone 13 can be ground by bringing the grindstone 13 into contact with the end portion Ge while relatively moving the grindstone 13.
  • the glass plate G is formed of, for example, silicate glass, silica glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass.
  • an alkali component is contained in the glass plate G, a phenomenon of so-called soda blowing may occur on its surface.
  • a structurally rough portion occurs in the glass plate G, if the glass plate G is used in a curved state, there is a risk of causing damage starting from the roughened portion due to aging. is there.
  • the alkali-free glass here refers to glass that does not substantially contain an alkali component (alkali metal oxide), and specifically refers to glass having an alkali component of 3000 ppm or less.
  • glass of 1000 ppm or less is preferable, glass of 500 ppm or less is more preferable, and glass of 300 ppm or less is more preferable.
  • the thickness dimension of the glass plate G is set to 300 ⁇ m or less, preferably 200 ⁇ m or less, and more preferably 100 ⁇ m or less.
  • the lower limit value of the thickness dimension can be set without any particular limitation, but is set to 1 ⁇ m or more, preferably 5 ⁇ m or more in consideration of molding accuracy or handleability after molding.
  • size of surface roughness Ra of surface Ga on the opposite side to the support stand 11 of the glass plate G is not specifically limited.
  • the surface roughness Ra is preferably 2.0 nm or less, more preferably 1.0 nm or less, and 0.2 nm or less. More preferably it is.
  • the glass plate G described above is formed by a known forming method such as a down draw method, and is preferably formed by an overflow down draw method. It is also possible to mold by a float method, a slot down draw method, a roll out method, an up draw method or the like. In addition, it is also possible to set it to the thickness dimension of less than 100 micrometers by giving a secondary process as needed (stretching a glass primary molded object by a redraw).
  • the processing unit 12 includes a grindstone 13, a rotation drive unit 14 that rotationally drives the grindstone 13, an elevating drive unit 15 that drives the grindstone 13 up and down, a cover unit 16 that covers the grindstone 13, and a grindstone 13 and the horizontal movement drive part 17 for enabling the cover part 16 to move horizontally.
  • These drive units are composed of, for example, servo motors for the purpose of highly accurate position control, but of course, other drive means (various actuators such as cylinders) may be used.
  • the process unit 12 further has the grinding fluid supply part which supplies grinding fluid (for example, pure water) toward the contact part of the edge part Ge of the glass plate G, and the grindstone 13, or its periphery. It may be provided.
  • the grinding fluid supply unit may be disposed inside the cover unit 16 or may be disposed outside the cover unit 16.
  • the grindstone 13 has a grinding surface 18 having a shape corresponding to the processing content to be applied to the end portion Ge of the glass plate G on the outer periphery thereof.
  • the grinding surface 18 is configured by a slope for applying one side to the end portion Ge.
  • a plurality of abrasive surfaces 18 are provided on the outer periphery of the grindstone 13 for the purpose of extending the maintenance interval.
  • only one abrasive surface 18 may be provided.
  • the raising / lowering drive part 15 may raise / lower the grindstone 13 with respect to the cover part 16, and may raise / lower the grindstone 13 and the cover part 16 integrally.
  • the shape of the abrasive surface 18 can be appropriately set according to the processing content (here, the grinding content).
  • the cover portion 16 is provided with an opening 19 for allowing the end portion Ge of the glass plate G to be processed to come into contact with the grindstone 13.
  • the opening 19 is formed in a portion of the cover 16 that faces the support 11 and has a shape that penetrates the cover 16 in the direction of relative movement of the grindstone 13 (see FIG. 1 and FIG. 1). Figure 2).
  • the opening width dimension w of the opening 19 allows a part of the support base 11 to be described later and the glass plate G to pass through, and can reliably avoid interference between the glass plate G and the like and the cover portion 16 during processing. It is set to a size of about.
  • the support base 11 includes a first support portion 20 that supports the center side region G1 of the glass plate G, and a second support portion 21 that supports the end portion side region G2 of the glass plate G.
  • the thickness dimension ts of 21 is set smaller than the thickness dimension of the first support portion 20.
  • the support base 11 includes a plate-like member 22 and a base 23 that is formed separately from the plate-like member 22 and is attached to the stepped portion.
  • the plate-like member 22 mainly functions as the second support portion 21, and the base 23 mainly functions as the first support portion 20.
  • the plate-like member 22 has a part to be attached to the base 23, and thus functions not only as the second support part 21 but also as the first support part 20.
  • the plate-like member 22 functions as the entire second support portion 21 and a part (end portion side) of the first support portion 20, and the base 23 functions as the remaining portion (center side) of the first support portion 20. It is like that.
  • the shape of the 2nd support part 21 is made into the shape (frame shape which has four corner
  • the support base 11 may further include a misalignment prevention means for holding the glass plate G and preventing misalignment during processing.
  • suction comprised by the one or several hole part 25 opened to the support surface 24 provided in the upper side of the 1st support part 20, and the intake part 26 for performing intake via the hole part 25 is shown.
  • a holding portion 27 is provided on the support base 11 (base 23). Thereby, the glass plate G placed on the support surface 24 can be sucked and held.
  • the hole 25 is preferably arranged at a position where the central region G1 of the glass plate G can be adsorbed, for example.
  • the thickness dimension ts of the second support portion 21 may be appropriately set according to the thickness dimension tg of the glass plate G while maintaining the above-described magnitude relationship. Specifically, the thickness dimension ts of the second support portion 21 may be set so as to satisfy tg [mm] ⁇ 0.1 ⁇ ts [mm]. Thereby, the rigidity of the second support portion 21 itself can be secured, and the deformation of the glass plate G can be more reliably suppressed.
  • the thickness dimension ts of the second support portion 21 may be set so as to satisfy 10.
  • the thickness dimension ts of the second support portion 21 is specifically set to 0.25 mm or more and 4.0 mm or less. It may be a thing, Preferably, it may be set to 0.5 mm or more and 2.0 mm or less.
  • Lg [mm] ⁇ tg [mm] Lg [mm] ⁇ tg [mm] ]
  • the protruding dimension Lg may be set so as to satisfy ⁇ 200.
  • the protrusion dimension Lg of the glass plate G is specifically set to 0.5 mm or more and 20 mm or less. Preferably, it is set to 1.0 mm or more and 10 mm or less.
  • the glass plate G protrudes from the support base 11 at all four edge portions of the glass plate G.
  • the installation mode of the processing unit 12, etc. Accordingly, it is possible to adopt a form in which the glass plate G protrudes from the support base 11 at one, two, or three edge portions.
  • the protrusion dimension Ls is preferably set to 10 mm or more and 50 mm or less, and preferably 15 mm or more and 35 mm or less.
  • the horizontal movement drive unit 17 of the processing unit 12 is driven, and the grindstone 13 and the cover unit 16 are moved close to the support base 11.
  • the grindstone 13 and the cover portion 16 are placed on the virtual extension line of the end portion Ge. It is moved horizontally (position indicated by a two-dot chain line in FIG. 1). Then, the processing unit 12 is brought close to the end portion Ge of the glass plate G and brought into contact with one end portion Ge1 (FIG. 1) in the longitudinal direction of the end portion Ge.
  • the grinding surface 18 of the grindstone 13 is previously set to the same height level as the end portion Ge of the glass plate G to be processed by the lifting drive unit 15.
  • the grinding surface 18 is adjusted according to the thickness dimension tg.
  • the grindstone 13 is rotated at a predetermined rotational speed by the rotation drive unit 14. Thereby, the grinding process is performed on the end portion Ge of the glass plate G, and the end portion Ge is finished into a shape according to the grinding surface 18 (FIG. 4).
  • a tapered chamfer (single side chamfering) is applied only to the upper side of the end portion Ge by the above processing. Then, by moving the grindstone 13 along the longitudinal direction of the end portion Ge from this state, the end portion Ge of the glass plate G is ground over the entire longitudinal direction and finished in the shape as described above. .
  • the thickness dimension ts of the second support portion 21 is set to be smaller than the thickness dimension of the first support portion 20, and the glass plate G and the opening portion 19 of the cover portion 16 can be inserted while supporting the glass plate G. It is set to a size of about. Thereby, the 2nd support part 21 can pass the opening part 19 without any interference with the glass plate G, and the edge part Ge of the glass plate G can be made to contact
  • FIG. 4 in a state where the end portion Ge of the glass plate G is in contact with the grinding surface 18 of the grindstone 13, the clearance C between the opening 19 and the upper surface Ga of the glass plate G is It is maintained at 5 mm or less.
  • the grinding fluid supplied from the grinding fluid supply section (not shown) toward the contact portion between the glass plate G and the grindstone 13 or the periphery thereof passes through the clearance C, reaches the surface Ga, and adheres. Can be effectively prevented.
  • this clearance C is too small, there is a concern about interference between the glass plate G and the opening 19, so it is desirable to ensure that the clearance C is at least 1 mm.
  • the processing unit 12 When the grinding of one end Ge (edge) of the glass plate G is completed in this way, the processing unit 12 is moved to a position facing the other adjacent edge (edge), and the above-described processing is performed. By repeating the operation, the same grinding process is performed on the other end portions. Thereby, a predetermined grinding process (one side chamfering process) is performed on all four ends (edges) of the glass plate G, and the grinding process is completed.
  • the plate-like member 22 that mainly constitutes the second support portion 21 is formed separately from the base 23 that mainly constitutes the first support portion 20, so that the central region of the glass plate G is formed.
  • the first support part 20 required to support G1 and the second support part 21 required to support the end side region G2 of the glass plate G can have different specifications. Thereby, it is possible to prevent the individual support portions 20 and 21 from being over-spec, and to finish the support portions 20 and 21 with high accuracy while keeping the manufacturing cost low.
  • the base 23 that occupies most of the support base 11 and needs to be processed into a complicated shape in order to attach the suction holding portion 27 and the like is formed of aluminum or aluminum alloy that is workable and relatively inexpensive.
  • the second support portion 21 is configured to be detachable from the first support portion 20, even when processing a plurality of types of glass plates G having different thickness dimensions tg on the same processing line, An appropriate support state of the glass plate G can be created simply by changing the two support portions 21. Thereby, it becomes possible to perform highly accurate processing for each glass plate G having different thickness dimensions.
  • edge part processing apparatus and edge part processing method of the glass plate which concerns on this invention was described, this processing apparatus and processing method naturally take arbitrary forms within the scope of the present invention. Can do.
  • FIG. 5 shows a cross-sectional view of the main part of the end portion processing apparatus 10 ′ according to the second embodiment of the present invention.
  • This end processing apparatus 10 ′ is formed by integrally forming a second support portion 21 and a first support portion 20.
  • the support base 11 can be made into an integral product by forming the second support portion 21 and the first support portion 20 integrally, a higher dimensional accuracy is obtained compared to the case where they are made separate. It becomes possible.
  • the second support portion 21 may be formed in a frame shape having four corner portions.
  • the processing unit 12 is moved and the support base 11 is fixed to the ground is exemplified, but it is of course not limited to this form.
  • the support base 11 is configured to be rotatable around the vertical axis so that all four ends (edges) of the glass plate G are processed even when the processing unit 12 is fixed to the ground. It becomes possible.
  • the grinding process (one-side chamfering process) of the end portion Ge is performed with the grindstone 13 provided with the tapered grinding surface 18 is illustrated.
  • other processing modes can be employed.
  • the chamfered shape is also arbitrary (such as an R shape).
  • the grinding process using the grindstone 13 was illustrated as a process given to the glass plate G, of course, it is also possible to apply this invention to the process of the edge part Ge using a tool other than this. It is.
  • the present invention can be applied to grinding (polishing) processing, etching processing, or the like using a tape or a belt.
  • etching is performed as an example, the end Ge is etched by rotating the sponge roller impregnated with an etching solution while the sponge roller is rotated, and an R chamfered portion is formed on the end Ge.
  • the method of forming As a grinding method using a tape or a belt, for example, the method and apparatus disclosed in Japanese Patent Application Laid-Open No. 2008-264914 and Japanese Patent Application Laid-Open No. 5-329760 can be used.
  • the use of the glass plate G subjected to the above processing is not particularly limited.
  • the present invention can be applied to processing of glass plates used for various purposes such as glass substrates and cover glasses used in conventionally known electronic devices.

Abstract

This end-section processing device 10 for glass plates is equipped with a support base 11 for supporting a glass plate G, a processing unit 13 for subjecting the end section Ge of the glass plate G to a prescribed processing while the same is being supported by the support base 11, and a cover section 16 for covering the processing unit 13. The support base 11 has a first support part 20 for supporting the center-side region G1 of the glass plate G and a second support part 21 for supporting the end-side region G2 of the glass plate G. The thickness dimension ts of the second support part 21 is set so as to be smaller than that of the first support part 20, and of a size capable of passing through an opening 19 in the cover section 16, while the end-side region G2 of the glass plate G is being supported.

Description

ガラス板の端部加工装置及び端部加工方法End processing apparatus and end processing method for glass plate
　本発明は、ガラス板の端部加工装置及び端部加工方法に関する。 The present invention relates to an edge processing apparatus and an edge processing method for a glass plate.
　近年、省スペース化の観点から、従来普及していたＣＲＴ型ディスプレイに替わり、液晶ディスプレイ、プラズマディスプレイ、有機ＥＬディスプレイ、フィールドエミッションディスプレイ等のフラットパネルディスプレイが普及している。そして、これらのフラットパネルディスプレイにおいては、更なる薄型化が求められている。 In recent years, flat panel displays such as liquid crystal displays, plasma displays, organic EL displays, and field emission displays have been widely used in place of CRT type displays that have been widely used from the viewpoint of space saving. And in these flat panel displays, further thinning is required.
　特に、有機ＥＬディスプレイや有機ＥＬ照明においては、その厚み寸法が非常に小さい（薄い）ことを利用して、折り畳んだり、巻き取ったりできるといった機能を持たせ得る。これにより、持ち運びが容易になるだけでなく、従来の平面状態に加えて曲面状態での使用が可能になるため、様々な用途への活用が期待されている。従って、これらの変形可能な電子デバイスに使用されるガラス基板やカバーガラスには、更なる可撓性の向上が求められている。 Especially, in the organic EL display and the organic EL lighting, it is possible to have a function of being able to fold and wind up by utilizing the fact that the thickness dimension is very small (thin). As a result, not only is it easy to carry, but it can be used in a curved surface state in addition to the conventional flat state, and therefore, it is expected to be used for various purposes. Therefore, further improvement in flexibility is required for glass substrates and cover glasses used in these deformable electronic devices.
　上記ガラス板の可撓性を高めるには、ガラス板を薄肉化するのが有効である。ここで、例えば特許文献１には、厚み寸法３００μｍ以下のガラス板（この寸法サイズのガラス板をガラスフィルムと称呼することもある。）が提案されており、これにより、曲面状態での使用が可能な程度の可撓性をガラス板に付与可能としている。 To increase the flexibility of the glass plate, it is effective to reduce the thickness of the glass plate. Here, for example, Patent Document 1 proposes a glass plate having a thickness of 300 μm or less (a glass plate of this size may be referred to as a glass film). It is possible to give the glass plate as much flexibility as possible.
　一方、フラットパネルディスプレイや太陽電池等の電子デバイスに使用されるガラス板には、二次加工や洗浄など、様々な電子デバイス製造関連の処理が施される。ところが、これら電子デバイスに使用されるガラス板を薄肉化すると、多少の応力変化によっても破損に至る場合が生じ、電子デバイスの製造関連処理を行う際に、取扱いが非常に困難になるといった問題がある。加えて、厚み寸法３００μｍ以下、特に２００μｍ以下のガラス板（ガラスフィルム）は可撓性に富むため、各種製造関連処理を施す際に位置決めを行うことが難しいといった問題もある。 On the other hand, glass plate used for electronic devices such as flat panel displays and solar cells are subjected to various processing related to electronic device manufacturing such as secondary processing and cleaning. However, if the glass plates used in these electronic devices are made thinner, they may be damaged by a slight change in stress, which makes it very difficult to handle electronic device manufacturing-related processing. is there. In addition, since a glass plate (glass film) having a thickness dimension of 300 μm or less, particularly 200 μm or less, is rich in flexibility, there is a problem that it is difficult to perform positioning when performing various manufacturing-related processes.
　上記問題に関し、例えば特許文献２には、一対の無端ベルトでガラス板を表裏両側から挟持しながら所定の方向に搬送して、側方に配設した砥石で端部を研削する方法が提案されている。 Regarding the above-mentioned problem, for example, Patent Document 2 proposes a method of conveying a glass plate in a predetermined direction while sandwiching a glass plate from both front and back sides with a pair of endless belts, and grinding the end with a grindstone disposed on the side. ing.
　一方で、この種のガラス板の表面には、その用途に応じて他の要素を取り付けたり、そのままの状態で使用するために非常に高い面精度が求められる場合がある。そのため、できることなら、少なくとも表裏一方の面には何らの部材も当接させないように研削等の加工を行うことが望ましい。 On the other hand, the surface of this type of glass plate may be required to have very high surface accuracy in order to attach other elements according to its use or to use it as it is. For this reason, if possible, it is desirable to perform processing such as grinding so that no member is brought into contact with at least one of the front and back surfaces.
　そこで、例えばガラス板の表裏一方の面のみ（通常、下側の面のみ）を定盤などで支持した状態で端部に研削加工を施す手法が考えられるが、この場合には、従来の厚み寸法のガラス板を加工する際には想定していなかった問題が起こり得る。 Therefore, for example, a method of grinding the end portion with only one surface of the glass plate (usually only the lower surface) supported by a surface plate or the like can be considered. Problems that were not envisaged can occur when processing glass plates of dimensions.
　すなわち、この種の加工（研削加工）には、通常、加工態様に準じた形状の砥面を有する砥石が用いられ、また、この砥石による研削加工時には、ガラス板の材質やサイズ、研削態様に応じて、高圧の研削液（水など）が主に砥石とガラス板の端部との当接部に吹き付けられる。この際、ガラス板の裏面（下側の面）は定盤などで支持されているが、上述した理由からガラス板の表面（上側の面）は露出した状態で研削加工が行われる。 That is, for this kind of processing (grinding), a grindstone having a grinding surface having a shape according to the processing mode is usually used, and when grinding with this whetstone, the material, size, and grinding mode of the glass plate are used. Accordingly, high-pressure grinding fluid (water or the like) is sprayed mainly on the contact portion between the grindstone and the end of the glass plate. At this time, although the back surface (lower surface) of the glass plate is supported by a surface plate or the like, grinding is performed with the surface (upper surface) of the glass plate exposed for the reasons described above.
　そのため、例えば特許文献３には、砥石を覆うカバー部を設けると共に、このカバー部に開口部を形成して、この開口部を介して研削すべきガラス板の端部を砥石に当接可能とした研削加工装置が提案されている。これにより、砥石とガラス板の端部との当接部に供給された研削液がガラス板の表面中央側に飛散し、当該表面に付着する事態をカバー部により可及的に防止するようにしている。 Therefore, for example, in Patent Document 3, a cover portion that covers the grindstone is provided, an opening is formed in the cover portion, and the end of the glass plate to be ground can be brought into contact with the grindstone through the opening. A grinding apparatus has been proposed. As a result, the cover portion prevents the grinding liquid supplied to the contact portion between the grindstone and the end of the glass plate from splashing to the center side of the surface of the glass plate as much as possible. ing.
特開２０１０－１３２５３１号公報JP 2010-132531 A 特許第３５８７１０４号Japanese Patent No. 3587104 特開２００９－１７２７４９号公報JP 2009-172749 A
　しかしながら、ガラス板はその厚み寸法が小さくなるにつれて外的負荷により容易に変形を生じることになるため、砥石と当接した際の負荷で下方にたわむような変形を生じるおそれが高まる。このように変形した状態で研削加工を施すと、面取り量などの研削精度への悪影響が避けられない。また、厚み寸法が小さくなるほど、外的負荷に対する強度も小さくなるため、砥石との当接によるガラス板の破損（割れ）が懸念される。 However, since the glass plate is easily deformed by an external load as the thickness of the glass plate is reduced, there is a high possibility that the glass plate is deformed to bend downward due to the load when contacting the grindstone. If grinding is performed in such a deformed state, adverse effects on grinding accuracy such as chamfering amount are unavoidable. Moreover, since the strength against an external load decreases as the thickness dimension decreases, there is a concern that the glass plate is broken (broken) due to contact with the grindstone.
　また、定盤などでガラス板を支持する場合には、加工すべきガラス板の端部を定盤などから食み出させた状態で加工を行う必要がある。しかしながら、ガラス板の一部を支持しない状態で加工を施すとなると、ガラス板の端部がその自重のみでたわみ変形を生じるおそれがある。また、研削液は、通常、高圧状態で供給される（吹き付けられる）ため、何ら支持されていない状態のガラス板の端部が研削液を受けると、当該端部がばたつく（振動する）おそれがある。上述の現象は、ガラス板の厚み寸法が小さくなるにつれて顕著に現れる。 Also, when a glass plate is supported by a surface plate or the like, it is necessary to perform processing with the end of the glass plate to be processed protruding from the surface plate or the like. However, if processing is performed in a state where a part of the glass plate is not supported, the end of the glass plate may be bent and deformed only by its own weight. In addition, since the grinding fluid is normally supplied (sprayed) in a high pressure state, if the end of the glass plate in a state where it is not supported at all receives the grinding fluid, the end may flutter (vibrate). is there. The phenomenon described above appears more prominently as the thickness dimension of the glass plate becomes smaller.
　また、上述の理由でガラス板の端部が変形したり振動することで、カバー部の開口部とガラス板とのクリアランスが広がる事態が起こり得る。通常、使用する研削液の供給条件（水量や水圧など）やガラス板の厚み寸法などに応じてこのクリアランスは適正な大きさに設定されるが、厚み寸法が小さくなると、小さくなった分だけクリアランスが増大するのに加えて、上記変形や振動が生じ易くなることによってもクリアランスが大きく変動（増大）するおそれが高まる。これでは、ガラス板の表面中央側に研削液が飛散して付着するおそれが高まるため、表面精度や清浄度などの製品品質に悪影響を及ぼすおそれがある。変形等によるクリアランスの増加に対処するため、予めガラス板と開口部とのクリアランスを小さく設定することもできるが、そうすると今度は、ガラス板のたわみやばたつきによりガラス板と開口部とが干渉する問題が新たに生じる。 Also, for the reasons described above, the end of the glass plate may be deformed or vibrated, so that the clearance between the opening of the cover portion and the glass plate may be widened. Normally, this clearance is set to an appropriate size according to the supply conditions (water volume, water pressure, etc.) of the grinding fluid used and the thickness of the glass plate. However, when the thickness is reduced, the clearance is reduced by the smaller amount. In addition to the increase in the clearance, the possibility that the above-described deformation and vibration are likely to occur increases the possibility that the clearance will fluctuate (increase). This increases the risk that the grinding fluid will scatter and adhere to the center of the surface of the glass plate, which may adversely affect product quality such as surface accuracy and cleanliness. In order to deal with the increase in clearance due to deformation, etc., the clearance between the glass plate and the opening can also be set in advance, but this time, the problem that the glass plate and the opening interfere with each other due to deflection or fluttering of the glass plate. Newly occurs.
　以上の事情に鑑み、本明細書では、厚み寸法が従来に比べて小さいガラス板であっても、ガラス板の変形及びガラス板表面への液体の付着を可及的に防止して、ガラス板の端部に高精度な加工を施すことを、本発明により解決すべき技術的課題とする。 In view of the above circumstances, in the present specification, even if the thickness of the glass plate is smaller than the conventional one, the deformation of the glass plate and the adhesion of the liquid to the surface of the glass plate are prevented as much as possible. It is a technical problem to be solved by the present invention that high-precision processing is performed on the end portion of the steel plate.
　前記課題の解決は、本発明に係るガラス板の端部加工装置により達成される。すなわち、この端部加工装置は、ガラス板を支持する支持台と、支持台に支持された状態のガラス板の端部に所定の加工を施すための加工部と、加工部を覆い、かつガラス板の端部と加工部との当接を可能とするための開口部が設けられたカバー部とを備えたガラス板の端部加工装置であって、支持台は、ガラス板の中央側領域を支持する第一支持部と、ガラス板の端部側領域を支持する第二支持部とを有し、第二支持部の厚み寸法は第一支持部のそれより小さく、かつガラス板の端部側領域を支持した状態でカバー部の開口部を通過可能な程度の大きさに設定されている点をもって特徴付けられる。なお、ここでいう中央側領域と端部側領域とはそれぞれ、ガラス板を平面視した状態における中心位置と端部位置との中間位置を境として、中間位置よりも中心側の領域と端部側の領域を意味するものとする。 The solution to the above problem is achieved by the glass plate edge processing apparatus according to the present invention. That is, the end processing apparatus includes a support base that supports the glass plate, a processing section that performs predetermined processing on the end of the glass plate supported by the support base, covers the processing section, and covers the glass. An end processing apparatus for a glass plate, comprising a cover portion provided with an opening for enabling contact between the end portion of the plate and the processing portion, wherein the support base is a central region of the glass plate And a second support part that supports the end side region of the glass plate, the thickness dimension of the second support part is smaller than that of the first support part, and the end of the glass plate It is characterized in that it is set to such a size that it can pass through the opening of the cover part while supporting the part side region. The center side region and the end side region here are respectively the region and the end portion that are closer to the center than the intermediate position, with the middle position between the center position and the end position in a state of viewing the glass plate in plan view. It shall mean the area on the side.
　このように、本発明では、支持台に、ガラス板の中央側領域を支持する第一支持部と、ガラス板の端部側領域を支持する第二支持部とを設けるようにしたので、ガラス板の厚み寸法が小さい場合であっても、ガラス板の端部側領域を確実に支持することができる。また、この場合に、第二支持部の厚み寸法を第一支持部のそれより小さくすると共に、ガラス板の端部側領域を支持した状態で第二支持部がカバー部の開口部を通過可能な大きさに設定したので、ガラス板の端部側領域が第二支持部に支持された状態で、当該ガラス板の端部とカバー部に覆われた加工部との当接を図ることができる。これにより、カバー部内に導入されるガラス板の端部に近い領域を含め端部側領域の大部分を加工開始前から支持することができるので、加工部に当接した際のガラス板の変形を抑制すると共に、研削液等の吹き付けによるガラス板の振動を抑制でき、高精度な加工が可能となる。また、変形や振動が抑えられることで、カバー部の開口部とガラス板とのクリアランスが大きく変動する事態を回避できる。よって、上記クリアランスを所定の大きさに維持して、研削液等の液体がガラス板の表面中央側へ飛散し、付着する事態を可及的に防止することが可能となる。 As described above, in the present invention, the support base is provided with the first support portion that supports the central region of the glass plate and the second support portion that supports the end portion region of the glass plate. Even if the thickness dimension of a board is small, the edge part side area | region of a glass plate can be supported reliably. In this case, the thickness of the second support portion is made smaller than that of the first support portion, and the second support portion can pass through the opening of the cover portion while supporting the end side region of the glass plate. Since it is set to a large size, it is possible to contact the end portion of the glass plate and the processing portion covered by the cover portion in a state where the end side region of the glass plate is supported by the second support portion. it can. As a result, most of the end side region including the region close to the end of the glass plate introduced into the cover portion can be supported before the start of processing, so the deformation of the glass plate when contacting the processing portion In addition, the vibration of the glass plate due to the spraying of the grinding fluid or the like can be suppressed, and high-precision processing becomes possible. Moreover, the situation where the clearance between the opening of the cover part and the glass plate largely fluctuates can be avoided by suppressing deformation and vibration. Therefore, it is possible to prevent as much as possible the situation in which the clearance is maintained at a predetermined size and the liquid such as the grinding liquid scatters and adheres to the surface center side of the glass plate.
　また、本発明に係るガラス板の端部加工装置は、第二支持部が、第一支持部とは別体に形成されるものであってもよい。また、この場合、第二支持部は、第一支持部に対して脱着可能に構成されるものであってもよい。 Further, in the glass plate end processing apparatus according to the present invention, the second support part may be formed separately from the first support part. In this case, the second support part may be configured to be detachable from the first support part.
　このように第二支持部を第一支持部とは別体に形成することで、ガラス板の中央側領域を支持することが要求される第一支持部と、ガラス板の端部側領域を支持することを要求される第二支持部とで、異なる仕様とすることができる。これにより、個々の支持部がオーバースペックになることを防いで、各支持部の製作コストを低く抑えつつも高精度に仕上げることが可能となる。また、ガラス板の端部側領域は、通常、加工部による加工を円滑にかつ確実に行うために、その端部を第二支持部から所定寸法だけ食み出させた状態で第二支持部により支持される。この場合において、第二支持部からのガラス板の端部の食み出し寸法と、当該ガラス板の厚み寸法との関係を調べたところ、ガラス板の厚み寸法によって、特に厚み寸法が従来サイズのものから最近の薄肉サイズ（いわゆるフィルムサイズ）に変わったことによって、食み出し寸法の適切な大きさ（範囲）が大きく変化することが判明した。よって、第二支持部を第一支持部に対して脱着可能に構成することで、厚み寸法の異なる複数種類のガラス板を同一の加工ラインで加工する場合であっても、第二支持部を付け替えるだけで、適切なガラス板の支持状態を作り出すことができる。これにより、厚み寸法の異なるガラス板ごとに高精度な加工を施すことが可能となる。 In this way, by forming the second support part separately from the first support part, the first support part required to support the center side area of the glass plate and the end side area of the glass plate are provided. It can be set as a different specification with the 2nd support part requested | required to support. As a result, it is possible to prevent the individual support portions from becoming overspec, and to finish the support portions with high accuracy while keeping the manufacturing cost of each support portion low. In addition, the end side region of the glass plate is usually formed with the second support portion in a state where the end portion protrudes from the second support portion by a predetermined dimension in order to smoothly and reliably perform the processing by the processing portion. Is supported by In this case, when the relationship between the protruding dimension of the end of the glass plate from the second support part and the thickness dimension of the glass plate was examined, the thickness dimension of the glass plate was particularly the conventional size. It has been found that the appropriate size (range) of the protrusion size changes greatly due to the change from one to the recent thin wall size (so-called film size). Therefore, even if it is a case where a plurality of types of glass plates having different thickness dimensions are processed on the same processing line, the second support portion is configured to be detachable from the first support portion. An appropriate support state of the glass plate can be created simply by changing. Thereby, it becomes possible to perform a highly accurate process for every glass plate from which a thickness dimension differs.
　また、本発明に係るガラス板の端部加工装置は、支持台に支持された状態のガラス板の端部の第二支持部からの食み出し寸法をＡ［ｍｍ］、ガラス板の厚み寸法をｔ［ｍｍ］とした場合、Ａ＜ｔ×２００、を満たすように、食み出し寸法Ａが設定されるものであってもよい。 Moreover, the edge part processing apparatus of the glass plate which concerns on this invention is A [mm] and the thickness dimension of the glass plate from the 2nd support part of the edge part of the glass plate of the state supported by the support stand. When t is [mm], the protrusion dimension A may be set so as to satisfy A <t × 200.
　上述した寸法設定は、特に厚み寸法が３００μｍ以下のガラス板に対して加工を施す際に有効である。すなわち、従来の厚み寸法（７００μｍもしくはそれ以上）のガラス板であれば、食み出し寸法が厚み寸法の２００倍より大きくても（例えば３００倍程度であっても）、特に変形や振動の問題なく端部を加工することが可能であった。一方、ガラス板の厚み寸法が３００μｍ以下になると、従来の厚み寸法のガラス板とは大きく異なる挙動を示す傾向が見られた。本発明は上記傾向を踏まえて成されたもので、特に厚み寸法が３００μｍ以下のガラス板に対して加工を施す際、上記範囲にガラス板の食み出し寸法を設定することで、ガラス板の厚み寸法に応じてガラス板を適切に支持することができる。よって、加工時におけるガラス板の変形や振動を効果的に抑えて、高精度な加工を施すことが可能となる。また、この場合、上述のように第二支持部を第一支持部に対して脱着可能に構成することで、厚み寸法ごとに異なる食み出し寸法となるよう、適切なサイズの第二支持部に付け替えることができる。これにより、３００μｍ以下の範囲でかつ厚み寸法の異なる複数種類のガラス板を同一の加工ラインで高精度に加工することが可能となる。 The above-described dimension setting is particularly effective when processing a glass plate having a thickness dimension of 300 μm or less. That is, with a conventional glass plate having a thickness dimension (700 μm or more), even if the protrusion dimension is larger than 200 times the thickness dimension (for example, about 300 times), the problem of deformation or vibration is particularly serious. It was possible to machine the end portion. On the other hand, when the thickness dimension of the glass plate was 300 μm or less, there was a tendency to behave significantly differently from the glass sheet having the conventional thickness dimension. The present invention has been made in view of the above tendency, and in particular, when processing a glass plate having a thickness of 300 μm or less, by setting the protrusion size of the glass plate within the above range, The glass plate can be appropriately supported according to the thickness dimension. Therefore, it becomes possible to perform highly accurate processing by effectively suppressing deformation and vibration of the glass plate during processing. Further, in this case, the second support portion of an appropriate size is configured so that the projecting size varies depending on the thickness dimension by configuring the second support portion to be removable from the first support portion as described above. Can be replaced. Thereby, it becomes possible to process a plurality of types of glass plates having a thickness of 300 μm or less and different thickness dimensions with high accuracy on the same processing line.
　もちろん、従来の厚み寸法を有するガラス板との混合ラインとする場合においても、従来形態の定盤等となるような形状及びサイズの第二支持部を別に用意し、これらを手動又は自動で交換することで、従来サイズのガラス板と薄肉サイズのガラス板とを共に確実かつ高精度に加工することが可能となる。 Of course, even in the case of a mixing line with a glass plate having a conventional thickness dimension, a second support portion having a shape and size that can be a conventional surface plate or the like is prepared separately, and these are replaced manually or automatically. By doing so, it becomes possible to process both the conventional glass plate and the thin glass plate reliably and with high precision.
　また、本発明に係るガラス板の端部加工装置は、第二支持部が、第一支持部よりも剛性の高い材料で形成されているものであってもよい。 Also, in the glass plate end processing apparatus according to the present invention, the second support portion may be formed of a material having higher rigidity than the first support portion.
　第二支持部は、ガラス板の端部側領域を支持した状態でカバー部の開口部を通過させる点に鑑みれば、その厚み寸法は小さいに越したことはない。一方で、第二支持部の厚み寸法をあまりに小さくし過ぎるとと、第二支持部自体の剛性を確保することが難しくなる。以上の点に鑑み、第二支持部を第一支持部よりも剛性の高い材料で形成することで、カバー部の開口部を通過し得る程度の厚み寸法に第二支持部を形成しつつも、第二支持部自体の剛性を確保することが可能な、適切な大きさの厚み寸法に第二支持部を形成することが可能となる。 The thickness dimension of the second support part is never small, considering that the opening part of the cover part is allowed to pass through while supporting the end side region of the glass plate. On the other hand, if the thickness dimension of the second support part is too small, it is difficult to ensure the rigidity of the second support part itself. In view of the above points, by forming the second support portion with a material having higher rigidity than the first support portion, while forming the second support portion to a thickness that can pass through the opening of the cover portion. In addition, the second support portion can be formed in a thickness dimension of an appropriate size that can ensure the rigidity of the second support portion itself.
　また、本発明に係るガラス板の端部加工装置は、第二支持部の厚み寸法が０．２５ｍｍ以上でかつ４．０ｍｍ以下に設定されるものであってもよく、好ましくは、０．５ｍｍ以上でかつ２．０ｍｍ以下に設定されるものであってもよい。 Further, in the edge processing apparatus for a glass plate according to the present invention, the thickness dimension of the second support part may be set to 0.25 mm or more and 4.0 mm or less, preferably 0.5 mm. It may be set to 2.0 mm or less.
　上述した理由より、第二支持部の厚み寸法を上述の範囲に設定することで、カバー部の開口部をガラス板と共に通過可能としつつも、所要の剛性を確保することが可能となる。特に、支持台の基部となる第一支持部を加工性のよいアルミ等で形成する場合、第一支持部よりも剛性の高い材料（例えばステンレスなど）で第二支持部を形成する場合であれば、上述の範囲のうち比較的寸法の小さい領域で第二支持部の厚み寸法を設定することができ、さらなる加工性（作業性）の向上を図ることが可能となる。 For the reasons described above, by setting the thickness dimension of the second support portion within the above range, it is possible to ensure the required rigidity while allowing the opening of the cover portion to pass through with the glass plate. In particular, when the first support part that is the base part of the support base is formed of aluminum having good workability, the second support part is formed of a material that is higher in rigidity than the first support part (for example, stainless steel). For example, the thickness dimension of the second support portion can be set in a relatively small area in the above-described range, and further workability (workability) can be improved.
　また、本発明に係るガラス板の端部加工装置は、厚み寸法が３００μｍ以下に設定されるガラス板に対して好適に適用可能である。また、この場合、厚み寸法があまりに小さくなり過ぎると、成形技術の観点から、ガラス板の成形精度が低下することが考えられるため、できれば厚み寸法を５μｍ以上に設定するのがよい。もちろん、成形技術の点で問題がないようであれば、より厚み寸法の小さい（５μｍ未満の）ガラス板に対しても本願発明は好適に適用可能である。 Further, the glass plate edge processing apparatus according to the present invention can be suitably applied to a glass plate whose thickness dimension is set to 300 μm or less. In this case, if the thickness dimension becomes too small, it is conceivable that the molding accuracy of the glass plate is lowered from the viewpoint of molding technology. Therefore, the thickness dimension is preferably set to 5 μm or more if possible. Of course, as long as there is no problem in terms of forming technology, the present invention can be suitably applied to a glass plate having a smaller thickness dimension (less than 5 μm).
　また、前記課題の解決は、本発明に係るガラス板の端部加工方法によっても達成される。すなわち、この端部加工方法は、支持台で支持された状態のガラス板の端部に対して、カバー部で覆われた加工部で所定の加工を施すための方法であって、カバー部には、ガラス板の端部と加工部との当接を可能とするための開口部が設けられ、支持台は、ガラス板の中央側領域を支持する第一支持部と、ガラス板の端部側領域を支持する第二支持部とを有し、第二支持部の厚み寸法は第一支持部のそれより小さく、かつガラス板の端部側領域を支持した状態でカバー部の開口部を通過可能な程度の大きさに設定され、これによりガラス板の端部側領域を支持した状態の第二支持部を開口部に挿通して、ガラス板の端部と加工部との当接を行う点をもって特徴付けられる。 Moreover, the solution of the above-mentioned problem is also achieved by the method for processing an edge of a glass plate according to the present invention. That is, this end portion processing method is a method for performing predetermined processing on the end portion of the glass plate supported by the support base at the processing portion covered with the cover portion. Is provided with an opening for enabling contact between the end of the glass plate and the processed portion, and the support base includes a first support for supporting a central region of the glass plate, and an end of the glass plate. A second support part for supporting the side region, the thickness dimension of the second support part is smaller than that of the first support part, and the opening part of the cover part is supported while supporting the end side region of the glass plate. The size of the glass plate is set so that it can pass through, and the second support portion in a state of supporting the end portion side region of the glass plate is inserted into the opening portion so that the end portion of the glass plate and the processed portion are in contact with each other. Characterized by what to do.
　このように、本発明に係る加工方法によっても、支持台に、ガラス板の中央側領域を支持する第一支持部と、ガラス板の端部側領域を支持する第二支持部とを設けるようにしたので、ガラス板の厚み寸法が小さい場合であっても、ガラス板の端部側領域を確実に支持することができる。また、この場合に、第二支持部の厚み寸法を第一支持部のそれより小さくすると共に、ガラス板の端部側領域を支持した状態で第二支持部がカバー部の開口部を通過可能な大きさに設定したので、ガラス板の端部側領域が第二支持部に支持された状態で、当該ガラス板の端部とカバー部に覆われた加工部との当接を図ることができる。これにより、カバー部内に導入されるガラス板の端部に近い領域を含め端部側領域の大部分を加工開始前から支持することができるので、加工部に当接した際のガラス板の変形を抑制すると共に、研削液等の吹き付けによるガラス板の振動を抑制でき、高精度な加工が可能となる。また、変形や振動が抑えられることで、カバー部の開口部とガラス板とのクリアランスが大きく変動する事態を回避できる。よって、クリアランスを所定の大きさに維持して、研削液等の液体がガラス板の表面中央側へ飛散し、付着する事態を可及的に防止することが可能となる。 Thus, also by the processing method according to the present invention, the support base is provided with the first support part that supports the central side region of the glass plate and the second support part that supports the end side region of the glass plate. Therefore, even if the thickness dimension of the glass plate is small, the end side region of the glass plate can be reliably supported. In this case, the thickness of the second support portion is made smaller than that of the first support portion, and the second support portion can pass through the opening of the cover portion while supporting the end side region of the glass plate. Since it is set to a large size, it is possible to contact the end portion of the glass plate and the processing portion covered by the cover portion in a state where the end side region of the glass plate is supported by the second support portion. it can. As a result, most of the end side region including the region close to the end of the glass plate introduced into the cover portion can be supported before the start of processing, so the deformation of the glass plate when contacting the processing portion In addition, the vibration of the glass plate due to the spraying of the grinding fluid or the like can be suppressed, and high-precision processing becomes possible. Moreover, the situation where the clearance between the opening of the cover part and the glass plate largely fluctuates can be avoided by suppressing deformation and vibration. Therefore, the clearance can be maintained at a predetermined size, and it is possible to prevent as much as possible a situation where a liquid such as a grinding liquid scatters and adheres to the surface center side of the glass plate.
　以上に述べたように、本発明によれば、厚み寸法が従来に比べて小さいガラス板であっても、その端部側領域を支持した状態でカバー部の開口部を通過させて、ガラス板の端部と加工部とを当接させることができる。よって、ガラス板の変形及びガラス板表面への液体の付着を可及的に防止して、ガラス板の端部に高精度な加工を施すことが可能となる。 As described above, according to the present invention, even if the thickness of the glass plate is smaller than that of the conventional glass plate, the glass plate is passed through the opening of the cover portion while supporting the end side region. It is possible to bring the end portion of the material into contact with the processed portion. Therefore, it is possible to prevent the deformation of the glass plate and the adhesion of the liquid to the surface of the glass plate as much as possible, and to perform highly accurate processing on the end portion of the glass plate.
本発明の第一実施形態に係るガラス板の端部加工装置の概要を示す平面図である。It is a top view which shows the outline | summary of the edge part processing apparatus of the glass plate which concerns on 1st embodiment of this invention. 図１に示す端部加工装置のＡ－Ａ断面図である。FIG. 2 is an AA cross-sectional view of the end portion processing apparatus shown in FIG. 1. 加工前における図２の要部拡大図である。It is a principal part enlarged view of FIG. 2 before a process. 加工時における図２の要部拡大図である。It is a principal part enlarged view of FIG. 2 at the time of a process. 本発明の第二実施形態に係るガラス板の端部加工装置の要部断面図である。It is principal part sectional drawing of the edge part processing apparatus of the glass plate which concerns on 2nd embodiment of this invention.
　以下、本発明に係るガラス板の端部加工装置の第一実施形態を、図１～図４を参照して説明する。なお、以下の説明における「上下方向」は、説明の理解を容易にするために便宜的に設定したもので、実際の使用態様を特定するものではない。 Hereinafter, a first embodiment of an edge processing apparatus for a glass plate according to the present invention will be described with reference to FIGS. Note that “up and down direction” in the following description is set for convenience in order to facilitate understanding of the description, and does not specify an actual usage mode.
　図１は、本発明の第一実施形態に係るガラス板の端部加工装置の概要を説明するための平面図である。この端部加工装置１０は、例えば成形後のマザーガラスから切断又は割断等によって所定の形状に分割して得られたガラス板Ｇの端部Ｇｅに対して所定の加工を施すための装置であって、ガラス板を支持する支持台１１と、支持台１１で支持した状態のガラス板Ｇの端部Ｇｅに所定の加工を施すための加工ユニット１２とを備える。本実施形態では、加工ユニット１２は研削ユニットであり、矩形に切断等して得られたガラス板Ｇの端部Ｇｅ（辺縁部）に沿って加工ユニット１２内に設けられた加工部としての砥石１３を相対移動させつつ当該砥石１３を端部Ｇｅに当接させることで、端部Ｇｅに研削加工を施すことを可能としている。 FIG. 1 is a plan view for explaining the outline of the glass sheet edge processing apparatus according to the first embodiment of the present invention. The end processing apparatus 10 is an apparatus for performing predetermined processing on the end portion Ge of the glass plate G obtained by, for example, cutting or cleaving the molded mother glass into a predetermined shape. The support table 11 for supporting the glass plate and the processing unit 12 for performing predetermined processing on the end portion Ge of the glass plate G supported by the support table 11 are provided. In this embodiment, the processing unit 12 is a grinding unit, and serves as a processing unit provided in the processing unit 12 along an end portion Ge (edge) of the glass plate G obtained by cutting into a rectangular shape. The grindstone 13 can be ground by bringing the grindstone 13 into contact with the end portion Ge while relatively moving the grindstone 13.
　ここで、ガラス板Ｇは、例えばケイ酸塩ガラス、シリカガラスなどで形成され、好ましくはホウ珪酸ガラスで形成され、より好ましくは無アルカリガラスで形成される。ガラス板Ｇにアルカリ成分が含まれていると、その表面に陽イオンの脱落、いわゆるソーダ吹きの現象が起こり得る。その場合、構造的に粗となる部分がガラス板Ｇに生じるため、このガラス板Ｇを湾曲させた状態で使用していると、経年劣化により粗となった部分を起点として破損を招くおそれがある。以上の理由より、非平坦状態でガラス板Ｇを使用する可能性がある場合、無アルカリガラスでガラス板Ｇを形成するのが好適である。 Here, the glass plate G is formed of, for example, silicate glass, silica glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. When an alkali component is contained in the glass plate G, a phenomenon of so-called soda blowing may occur on its surface. In that case, since a structurally rough portion occurs in the glass plate G, if the glass plate G is used in a curved state, there is a risk of causing damage starting from the roughened portion due to aging. is there. For the above reasons, when there is a possibility of using the glass plate G in a non-flat state, it is preferable to form the glass plate G with non-alkali glass.
　なお、ここでいう無アルカリガラスとは、アルカリ成分（アルカリ金属酸化物）が実質的に含まれていないガラスを指し、具体的には、アルカリ成分が３０００ｐｐｍ以下のガラスを指す。もちろん、上述した理由による経年劣化を少しでも防止又は軽減する観点からは、１０００ｐｐｍ以下のガラスが好ましく、５００ｐｐｍ以下のガラスがより好ましく、３００ｐｐｍ以下のガラスがさらに好ましい。 In addition, the alkali-free glass here refers to glass that does not substantially contain an alkali component (alkali metal oxide), and specifically refers to glass having an alkali component of 3000 ppm or less. Of course, from the viewpoint of preventing or reducing deterioration over time due to the above reason, glass of 1000 ppm or less is preferable, glass of 500 ppm or less is more preferable, and glass of 300 ppm or less is more preferable.
　ガラス板Ｇの厚み寸法は、３００μｍ以下に設定され、好ましくは２００μｍ以下に設定され、より好ましくは１００μｍ以下に設定される。厚み寸法の下限値については特段の制約なく設定可能であるが、成形精度又は成形後の取り扱い性などを考慮すると、１μｍ以上、好ましくは５μｍ以上に設定される。 The thickness dimension of the glass plate G is set to 300 μm or less, preferably 200 μm or less, and more preferably 100 μm or less. The lower limit value of the thickness dimension can be set without any particular limitation, but is set to 1 μm or more, preferably 5 μm or more in consideration of molding accuracy or handleability after molding.
　また、ガラス板Ｇの支持台１１とは反対側の表面Ｇａの表面粗さＲａの大きさは特に限定されない。例えば、成膜等の電子デバイス関連処理を施すことを想定した場合、その表面粗さＲａは２．０ｎｍ以下であることが好ましく、１．０ｎｍ以下であることがより好ましく、０．２ｎｍ以下であることがさらに好ましい。 Moreover, the magnitude | size of surface roughness Ra of surface Ga on the opposite side to the support stand 11 of the glass plate G is not specifically limited. For example, when it is assumed that electronic device-related processing such as film formation is performed, the surface roughness Ra is preferably 2.0 nm or less, more preferably 1.0 nm or less, and 0.2 nm or less. More preferably it is.
　上述したガラス板Ｇは、ダウンドロー法など公知の成形方法で成形され、好ましくはオーバーフローダウンドロー法で成形される。また、フロート法やスロットダウンドロー法、ロールアウト法、アップドロー法などによって成形することも可能である。なお、必要に応じて二次加工を施して（リドローによりガラス一次成形体を引き伸ばして）、１００μｍ未満の厚み寸法に設定することも可能である。 The glass plate G described above is formed by a known forming method such as a down draw method, and is preferably formed by an overflow down draw method. It is also possible to mold by a float method, a slot down draw method, a roll out method, an up draw method or the like. In addition, it is also possible to set it to the thickness dimension of less than 100 micrometers by giving a secondary process as needed (stretching a glass primary molded object by a redraw).
　加工ユニット１２は、図２に示すように、砥石１３と、砥石１３を回転駆動させる回転駆動部１４と、砥石１３を昇降駆動させる昇降駆動部１５と、砥石１３を覆うカバー部１６と、砥石１３及びカバー部１６を水平移動可能とするための水平移動駆動部１７とを有する。これらの駆動部は、高精度な位置制御を目的として例えばサーボモータで構成されるが、もちろんそれ以外の駆動手段（シリンダなどの各種アクチュエータ）で構成して構わない。また、図示は省略するが、加工ユニット１２は、ガラス板Ｇの端部Ｇｅと砥石１３との当接部又はその周辺に向けて研削液（例えば純水）を供給する研削液供給部をさらに備えるものであってもよい。この研削液供給部は、カバー部１６の内側に配設されてもよく、カバー部１６の外側に配設されてもよい。 As shown in FIG. 2, the processing unit 12 includes a grindstone 13, a rotation drive unit 14 that rotationally drives the grindstone 13, an elevating drive unit 15 that drives the grindstone 13 up and down, a cover unit 16 that covers the grindstone 13, and a grindstone 13 and the horizontal movement drive part 17 for enabling the cover part 16 to move horizontally. These drive units are composed of, for example, servo motors for the purpose of highly accurate position control, but of course, other drive means (various actuators such as cylinders) may be used. Moreover, although illustration is abbreviate | omitted, the process unit 12 further has the grinding fluid supply part which supplies grinding fluid (for example, pure water) toward the contact part of the edge part Ge of the glass plate G, and the grindstone 13, or its periphery. It may be provided. The grinding fluid supply unit may be disposed inside the cover unit 16 or may be disposed outside the cover unit 16.
　砥石１３はその外周に、ガラス板Ｇの端部Ｇｅに施すべき加工内容に応じた形状の砥面１８を有する。本実施形態では、砥面１８は、端部Ｇｅに片側面取りを施すための斜面で構成される。なお、砥面１８は、本図示例ではメンテナンス間隔の長期化を狙って砥石１３の外周に複数設けられているが、もちろん、１つの砥面１８のみが設けられていてもよい。この場合、昇降駆動部１５は、砥石１３をカバー部１６に対して昇降させるものでもよく、砥石１３とカバー部１６とを一体的に昇降させるものでもよい。また、砥面１８の形状についても、加工内容（ここでは研削内容）に応じて適宜設定が可能である。 The grindstone 13 has a grinding surface 18 having a shape corresponding to the processing content to be applied to the end portion Ge of the glass plate G on the outer periphery thereof. In the present embodiment, the grinding surface 18 is configured by a slope for applying one side to the end portion Ge. In the illustrated example, a plurality of abrasive surfaces 18 are provided on the outer periphery of the grindstone 13 for the purpose of extending the maintenance interval. Of course, only one abrasive surface 18 may be provided. In this case, the raising / lowering drive part 15 may raise / lower the grindstone 13 with respect to the cover part 16, and may raise / lower the grindstone 13 and the cover part 16 integrally. Also, the shape of the abrasive surface 18 can be appropriately set according to the processing content (here, the grinding content).
　カバー部１６には、加工対象となるガラス板Ｇの端部Ｇｅを砥石１３と当接可能とするための開口部１９が設けられる。詳述すると、この開口部１９は、カバー部１６のうち支持台１１と対向する部位に形成され、砥石１３の相対移動方向に向けてカバー部１６を貫通する形状をなしている（図１及び図２）。また、開口部１９の開口幅寸法ｗは、後述する支持台１１の一部とガラス板Ｇが通過可能で、かつ加工時におけるガラス板Ｇ等とカバー部１６との干渉を確実に回避可能な程度の大きさに設定される。 The cover portion 16 is provided with an opening 19 for allowing the end portion Ge of the glass plate G to be processed to come into contact with the grindstone 13. Specifically, the opening 19 is formed in a portion of the cover 16 that faces the support 11 and has a shape that penetrates the cover 16 in the direction of relative movement of the grindstone 13 (see FIG. 1 and FIG. 1). Figure 2). The opening width dimension w of the opening 19 allows a part of the support base 11 to be described later and the glass plate G to pass through, and can reliably avoid interference between the glass plate G and the like and the cover portion 16 during processing. It is set to a size of about.
　支持台１１は、ガラス板Ｇの中央側領域Ｇ１を支持する第一支持部２０と、ガラス板Ｇの端部側領域Ｇ２を支持する第二支持部２１とを有するもので、第二支持部２１の厚み寸法ｔｓは第一支持部２０の厚み寸法よりも小さく設定される。本実施形態では、支持台１１は、板状部材２２と、この板状部材２２と別体に形成され、板状部材２２が段部に取付けられる基台２３とを構成要素に含む。これにより、板状部材２２は主に第二支持部２１として機能すると共に、基台２３は主に第一支持部２０として機能する。この図示例では、板状部材２２は基台２３への取付け部位を有することから、第二支持部２１としてだけではなく、第一支持部２０としても一部機能する。すなわち、板状部材２２が第二支持部２１の全体及び第一支持部２０の一部（端部側）として機能し、基台２３が第一支持部２０の残部（中央側）として機能するようになっている。また、第二支持部２１の形状は、ガラス板Ｇの四つの辺縁部に対応した形状（四つの角部を有する枠体状）とされている（図１）。よって、第二支持部２１の大部分を構成する板状部材２２も同様に、四つの角部を有する枠体状とされている。 The support base 11 includes a first support portion 20 that supports the center side region G1 of the glass plate G, and a second support portion 21 that supports the end portion side region G2 of the glass plate G. The thickness dimension ts of 21 is set smaller than the thickness dimension of the first support portion 20. In this embodiment, the support base 11 includes a plate-like member 22 and a base 23 that is formed separately from the plate-like member 22 and is attached to the stepped portion. Thereby, the plate-like member 22 mainly functions as the second support portion 21, and the base 23 mainly functions as the first support portion 20. In this illustrated example, the plate-like member 22 has a part to be attached to the base 23, and thus functions not only as the second support part 21 but also as the first support part 20. That is, the plate-like member 22 functions as the entire second support portion 21 and a part (end portion side) of the first support portion 20, and the base 23 functions as the remaining portion (center side) of the first support portion 20. It is like that. Moreover, the shape of the 2nd support part 21 is made into the shape (frame shape which has four corner | angular parts) corresponding to the four edge parts of the glass plate G (FIG. 1). Therefore, the plate-like member 22 constituting most of the second support portion 21 is also formed in a frame shape having four corner portions.
　また、支持台１１は、ガラス板Ｇを保持して加工時の位置ずれを防止するための位置ずれ防止手段をさらに有するものであってもよい。本実施形態では、第一支持部２０の上側に設けた支持面２４に開口する１又は複数の穴部２５と、穴部２５を介して吸気を行うための吸気部２６とで構成される吸着保持部２７が支持台１１（基台２３）に設けられている。これにより、支持面２４上に載置されたガラス板Ｇを吸着保持可能としている。このうち穴部２５は、例えばガラス板Ｇの中央側領域Ｇ１を吸着可能な位置に配設されるのがよい。 Further, the support base 11 may further include a misalignment prevention means for holding the glass plate G and preventing misalignment during processing. In this embodiment, the adsorption | suction comprised by the one or several hole part 25 opened to the support surface 24 provided in the upper side of the 1st support part 20, and the intake part 26 for performing intake via the hole part 25 is shown. A holding portion 27 is provided on the support base 11 (base 23). Thereby, the glass plate G placed on the support surface 24 can be sucked and held. Of these, the hole 25 is preferably arranged at a position where the central region G1 of the glass plate G can be adsorbed, for example.
　ここで、第二支持部２１の厚み寸法ｔｓは、上述の大小関係を維持しつつ、ガラス板Ｇの厚み寸法ｔｇに応じて適宜設定されるものであってもよい。具体的には、ｔｇ［ｍｍ］×０．１≦ｔｓ［ｍｍ］を満たすように、第二支持部２１の厚み寸法ｔｓが設定されるものであってもよい。これにより、第二支持部２１自体の剛性を確保して、ガラス板Ｇの変形をより確実に抑制することが可能となる。ただし、あまりに第二支持部２１が厚すぎると、ガラス板を支持した状態でカバー部１６の開口部１９を何らの干渉なく通過させることが難しくなるため、ｔｓ［ｍｍ］≦ｔｇ［ｍｍ］×１０　を満たすように、第二支持部２１の厚み寸法ｔｓを設定してもかまわない。 Here, the thickness dimension ts of the second support portion 21 may be appropriately set according to the thickness dimension tg of the glass plate G while maintaining the above-described magnitude relationship. Specifically, the thickness dimension ts of the second support portion 21 may be set so as to satisfy tg [mm] × 0.1 ≦ ts [mm]. Thereby, the rigidity of the second support portion 21 itself can be secured, and the deformation of the glass plate G can be more reliably suppressed. However, if the second support portion 21 is too thick, it is difficult to pass through the opening portion 19 of the cover portion 16 without any interference in a state where the glass plate is supported, so ts [mm] ≦ tg [mm] × 10 The thickness dimension ts of the second support portion 21 may be set so as to satisfy 10.
　以上の点を踏まえつつ、ガラス板Ｇの厚み寸法ｔｇが３００μｍ以下である場合、第二支持部２１の厚み寸法ｔｓは、具体的には、０．２５ｍｍ以上でかつ４．０ｍｍ以下に設定されるものであってもよく、好ましくは、０．５ｍｍ以上でかつ２．０ｍｍ以下に設定されるものであってもよい。第二支持部２１の厚み寸法ｔｓを上述の範囲に設定することで、カバー部１６の開口部１９をガラス板Ｇと共に通過可能としつつも、所要の剛性を確保することが可能となる。 In consideration of the above points, when the thickness dimension tg of the glass plate G is 300 μm or less, the thickness dimension ts of the second support portion 21 is specifically set to 0.25 mm or more and 4.0 mm or less. It may be a thing, Preferably, it may be set to 0.5 mm or more and 2.0 mm or less. By setting the thickness dimension ts of the second support portion 21 in the above-described range, it is possible to ensure the required rigidity while allowing the opening portion 19 of the cover portion 16 to pass through with the glass plate G.
　また、支持台１１に支持された状態のガラス板Ｇの端部側領域Ｇ２の第二支持部２１からの食み出し寸法Ｌｇ［ｍｍ］を設定するに際しては、Ｌｇ［ｍｍ］＜ｔｇ［ｍｍ］×２００、を満たすように、食み出し寸法Ｌｇが設定されるものであってもよい。 Moreover, when setting the protrusion dimension Lg [mm] from the second support portion 21 of the end portion side region G2 of the glass plate G supported by the support base 11, Lg [mm] <tg [mm] ] The protruding dimension Lg may be set so as to satisfy × 200.
　また、以上の点を踏まえつつ、ガラス板Ｇの厚み寸法ｔｇが３００μｍ以下である場合、ガラス板Ｇの食み出し寸法Ｌｇは、具体的には、０．５ｍｍ以上でかつ２０ｍｍ以下に設定され、好ましくは１．０ｍｍ以上でかつ１０ｍｍ以下に設定される。上述の範囲に食み出し寸法Ｌｇを設定することで、ガラス板Ｇの厚み寸法ｔｇが従来に比べて小さい（３００μｍ以下）場合においても、ガラス板Ｇを安定的に支持することが可能となる。 Further, in consideration of the above points, when the thickness dimension tg of the glass plate G is 300 μm or less, the protrusion dimension Lg of the glass plate G is specifically set to 0.5 mm or more and 20 mm or less. Preferably, it is set to 1.0 mm or more and 10 mm or less. By setting the protrusion dimension Lg within the above range, the glass sheet G can be stably supported even when the thickness dimension tg of the glass sheet G is smaller (300 μm or less) than the conventional one. .
　なお、本実施形態では、図１に示すように、ガラス板Ｇの四つの辺縁部全てにおいて、ガラス板Ｇが支持台１１から食み出ているが、もちろん、加工ユニット１２の設置態様等に応じて、一つ又は二つ又は三つの辺縁部においてガラス板Ｇが支持台１１から食み出ている形態を採ることも可能である。 In this embodiment, as shown in FIG. 1, the glass plate G protrudes from the support base 11 at all four edge portions of the glass plate G. Of course, the installation mode of the processing unit 12, etc. Accordingly, it is possible to adopt a form in which the glass plate G protrudes from the support base 11 at one, two, or three edge portions.
　なお、第二支持部２１の第一支持部２０からの突出寸法Ｌｓについても、支持すべきガラス板Ｇの厚み寸法ｔｇに応じて設定するのがよく、具体的には、ガラス板Ｇの厚み寸法ｔｇが３００μｍ以下の場合に、突出寸法Ｌｓは１０ｍｍ以上でかつ５０ｍｍ以下に設定されるのがよく、好ましくは１５ｍｍ以上でかつ３５ｍｍ以下に設定されるのがよい。 In addition, it is good to set also about the protrusion dimension Ls from the 1st support part 20 of the 2nd support part 21 according to the thickness dimension tg of the glass plate G which should be supported, specifically, the thickness of the glass plate G. When the dimension tg is 300 μm or less, the protrusion dimension Ls is preferably set to 10 mm or more and 50 mm or less, and preferably 15 mm or more and 35 mm or less.
　次に、上記構成の端部加工装置１０を用いた研削加工の一例を本発明の利点と共に説明する。 Next, an example of grinding using the end processing apparatus 10 having the above-described configuration will be described together with advantages of the present invention.
　まず、図３に示す状態から、加工ユニット１２の水平移動駆動部１７を駆動させて、砥石１３及びカバー部１６を支持台１１に近接移動させる。本実施形態では、加工すべきガラス板Ｇの端部Ｇｅから外れた位置（対向しない位置）に加工ユニット１２を配設した後、砥石１３及びカバー部１６を端部Ｇｅの仮想延長線上にまで水平移動させる（図１中、二点鎖線で示す位置）。そして、加工ユニット１２をガラス板Ｇの端部Ｇｅに近づけていき、端部Ｇｅの長手方向一端部Ｇｅ１（図１）に当接させる。この際、予め砥石１３の砥面１８は、昇降駆動部１５により、加工すべきガラス板Ｇの端部Ｇｅと同一の高さレベルに設定されている。ガラス板Ｇの厚み寸法ｔｇの異なるガラス板ｔｇを加工する際には、その厚み寸法ｔｇに応じて砥面１８を調整する。また、砥石１３は回転駆動部１４により所定の回転数で回転させている。これにより、ガラス板Ｇの端部Ｇｅに研削加工が施され、当該端部Ｇｅが砥面１８に準じた形状に仕上げられる（図４）。本実施形態では、砥面１８はテーパ状の斜面で構成されることから、上記加工により端部Ｇｅの上側のみにテーパ状の面取り（片側面取り）が施される。そして、この状態から砥石１３を端部Ｇｅの長手方向に沿って移動させていくことで、ガラス板Ｇの端部Ｇｅがその長手方向全域にわたって研削加工を施され、上述の如き形状に仕上げられる。 First, from the state shown in FIG. 3, the horizontal movement drive unit 17 of the processing unit 12 is driven, and the grindstone 13 and the cover unit 16 are moved close to the support base 11. In this embodiment, after disposing the processing unit 12 at a position deviated from the end portion Ge of the glass plate G to be processed (a position not facing), the grindstone 13 and the cover portion 16 are placed on the virtual extension line of the end portion Ge. It is moved horizontally (position indicated by a two-dot chain line in FIG. 1). Then, the processing unit 12 is brought close to the end portion Ge of the glass plate G and brought into contact with one end portion Ge1 (FIG. 1) in the longitudinal direction of the end portion Ge. At this time, the grinding surface 18 of the grindstone 13 is previously set to the same height level as the end portion Ge of the glass plate G to be processed by the lifting drive unit 15. When processing the glass plate tg from which the thickness dimension tg of the glass plate G differs, the grinding surface 18 is adjusted according to the thickness dimension tg. Further, the grindstone 13 is rotated at a predetermined rotational speed by the rotation drive unit 14. Thereby, the grinding process is performed on the end portion Ge of the glass plate G, and the end portion Ge is finished into a shape according to the grinding surface 18 (FIG. 4). In the present embodiment, since the grinding surface 18 is composed of a tapered slope, a tapered chamfer (single side chamfering) is applied only to the upper side of the end portion Ge by the above processing. Then, by moving the grindstone 13 along the longitudinal direction of the end portion Ge from this state, the end portion Ge of the glass plate G is ground over the entire longitudinal direction and finished in the shape as described above. .
　この際、第二支持部２１の厚み寸法ｔｓは第一支持部２０の厚み寸法より小さく設定され、かつガラス板Ｇを支持した状態でガラス板Ｇと共にカバー部１６の開口部１９を挿通可能な程度の大きさに設定されている。これにより、第二支持部２１がガラス板Ｇと共に開口部１９を何らの干渉もなく通過でき、ガラス板Ｇの端部Ｇｅを砥石１３に当接させることができる。また、図４に示すように、ガラス板Ｇの端部Ｇｅを砥石１３の砥面１８に当接させた状態では、開口部１９とガラス板Ｇの上側の表面Ｇａとの間のクリアランスＣが５ｍｍ以下に維持される。これにより、図示しない研削液供給部からガラス板Ｇと砥石１３との当接部又はその周辺に向けて供給され、飛散した研削液が、このクリアランスＣを通過して表面Ｇａに到達し、付着する事態を効果的に防止することができる。ただ、あまりにこのクリアランスＣが小さいと、ガラス板Ｇと開口部１９との干渉が懸念されることから、クリアランスＣは少なくとも１ｍｍ以上を確保することが望ましい。 At this time, the thickness dimension ts of the second support portion 21 is set to be smaller than the thickness dimension of the first support portion 20, and the glass plate G and the opening portion 19 of the cover portion 16 can be inserted while supporting the glass plate G. It is set to a size of about. Thereby, the 2nd support part 21 can pass the opening part 19 without any interference with the glass plate G, and the edge part Ge of the glass plate G can be made to contact | abut to the grindstone 13. FIG. In addition, as shown in FIG. 4, in a state where the end portion Ge of the glass plate G is in contact with the grinding surface 18 of the grindstone 13, the clearance C between the opening 19 and the upper surface Ga of the glass plate G is It is maintained at 5 mm or less. As a result, the grinding fluid supplied from the grinding fluid supply section (not shown) toward the contact portion between the glass plate G and the grindstone 13 or the periphery thereof passes through the clearance C, reaches the surface Ga, and adheres. Can be effectively prevented. However, if this clearance C is too small, there is a concern about interference between the glass plate G and the opening 19, so it is desirable to ensure that the clearance C is at least 1 mm.
　また、本実施形態では、支持台１１に支持された状態のガラス板Ｇの端部側領域Ｇ２の第二支持部２１からの食み出し寸法Ｌｇ［ｍｍ］を設定するに際しては、Ｌｇ［ｍｍ］＜ｔｇ［ｍｍ］×２００、を満たすように、食み出し寸法Ｌｇを設定した。これにより、特に厚み寸法が３００μｍ以下のガラス板Ｇに対して加工を施す際、上記範囲にガラス板Ｇの食み出し寸法Ｌｇを設定することで、ガラス板Ｇの厚み寸法ｔｇに応じてガラス板Ｇを適切に支持することができる。よって、加工時におけるガラス板Ｇの変形や振動を効果的に抑えて、高精度な加工を施すことが可能となる。 Moreover, in this embodiment, when setting the protrusion size Lg [mm] from the second support part 21 of the end part side region G2 of the glass plate G in a state of being supported by the support base 11, Lg [mm ] The protruding dimension Lg was set so as to satisfy <tg [mm] × 200. Thereby, when processing with respect to the glass plate G whose thickness dimension is 300 micrometers or less especially, by setting the protrusion dimension Lg of the glass plate G in the said range, it is glass according to the thickness dimension tg of the glass plate G. The board G can be supported appropriately. Therefore, it is possible to effectively suppress deformation and vibration of the glass plate G during processing and perform high-precision processing.
　このようにしてガラス板Ｇの一つの端部Ｇｅ（辺縁部）の研削加工が終了したら、加工ユニット１２を隣接する他の端部（辺縁部）と対向する位置に移動させ、上述の動作を繰り返すことで、他の端部に対しても同様の研削加工を施す。これにより、ガラス板Ｇの四つの端部（辺縁部）全てに対して所定の研削加工（片側面取り加工）が施され、研削加工が終了する。 When the grinding of one end Ge (edge) of the glass plate G is completed in this way, the processing unit 12 is moved to a position facing the other adjacent edge (edge), and the above-described processing is performed. By repeating the operation, the same grinding process is performed on the other end portions. Thereby, a predetermined grinding process (one side chamfering process) is performed on all four ends (edges) of the glass plate G, and the grinding process is completed.
　上述のように第二支持部２１を主に構成する板状部材２２を、第一支持部２０を主に構成する基台２３とは別体に形成することで、ガラス板Ｇの中央側領域Ｇ１を支持することが要求される第一支持部２０と、ガラス板Ｇの端部側領域Ｇ２を支持することを要求される第二支持部２１とで、異なる仕様とすることができる。これにより、個々の支持部２０，２１がオーバースペックになることを防いで、各支持部２０，２１の製作コストを低く抑えつつも高精度に仕上げることが可能となる。例えば、支持台１１の大部分を占め、かつ吸着保持部２７などを取り付けるために複雑な形状への加工が必要となる基台２３を、加工性及び比較的廉価なアルミもしくはアルミ合金で形成する一方で、薄さと剛性との両立が求められる第二支持部２１を、ステンレスやチタンなどの高剛性材料で形成することが可能となる。 As described above, the plate-like member 22 that mainly constitutes the second support portion 21 is formed separately from the base 23 that mainly constitutes the first support portion 20, so that the central region of the glass plate G is formed. The first support part 20 required to support G1 and the second support part 21 required to support the end side region G2 of the glass plate G can have different specifications. Thereby, it is possible to prevent the individual support portions 20 and 21 from being over-spec, and to finish the support portions 20 and 21 with high accuracy while keeping the manufacturing cost low. For example, the base 23 that occupies most of the support base 11 and needs to be processed into a complicated shape in order to attach the suction holding portion 27 and the like is formed of aluminum or aluminum alloy that is workable and relatively inexpensive. On the other hand, it becomes possible to form the 2nd support part 21 in which compatibility of thinness and rigidity is calculated | required with highly rigid materials, such as stainless steel and titanium.
　また、第二支持部２１を第一支持部２０に対して脱着可能に構成することで、厚み寸法ｔｇの異なる複数種類のガラス板Ｇを同一の加工ラインで加工する場合であっても、第二支持部２１を付け替えるだけで、適切なガラス板Ｇの支持状態を作り出すことができる。これにより、厚み寸法の異なるガラス板Ｇごとに高精度な加工を施すことが可能となる。 Further, by configuring the second support portion 21 to be detachable from the first support portion 20, even when processing a plurality of types of glass plates G having different thickness dimensions tg on the same processing line, An appropriate support state of the glass plate G can be created simply by changing the two support portions 21. Thereby, it becomes possible to perform highly accurate processing for each glass plate G having different thickness dimensions.
　以上、本発明に係るガラス板の端部加工装置及び端部加工方法の第一実施形態を説明したが、この加工装置及び加工方法は、当然に本発明の範囲内において任意の形態を採ることができる。 As mentioned above, although 1st embodiment of the edge part processing apparatus and edge part processing method of the glass plate which concerns on this invention was described, this processing apparatus and processing method naturally take arbitrary forms within the scope of the present invention. Can do.
　例えば上記実施形態では、第二支持部２１と第一支持部２０とを別体に形成（支持台１１を板状部材２２と基台２３とで別体に形成）した場合を例示したが、もちろん支持台１１を一体品として形成することも可能である。図５は、本発明の第二実施形態に係る端部加工装置１０’の要部断面図を示している。この端部加工装置１０’は、第二支持部２１と第一支持部２０とを一体に形成してなる。このように、第二支持部２１と第一支持部２０とを一体に形成することで、支持台１１を一体品とすることができるので、別体とする場合に比べて高い寸法精度を得ることが可能となる。もちろん、この場合も、第二支持部２１は、四つの角部を有する枠体状に形成され得る。 For example, in the above-described embodiment, the second support portion 21 and the first support portion 20 are separately formed (the support base 11 is formed separately from the plate-like member 22 and the base 23). Of course, the support base 11 can also be formed as an integral product. FIG. 5 shows a cross-sectional view of the main part of the end portion processing apparatus 10 ′ according to the second embodiment of the present invention. This end processing apparatus 10 ′ is formed by integrally forming a second support portion 21 and a first support portion 20. Thus, since the support base 11 can be made into an integral product by forming the second support portion 21 and the first support portion 20 integrally, a higher dimensional accuracy is obtained compared to the case where they are made separate. It becomes possible. Of course, also in this case, the second support portion 21 may be formed in a frame shape having four corner portions.
　なお、上記実施形態では、加工ユニット１２が移動し、支持台１１が接地固定された場合を例示したが、もちろんこの形態には限定されない。例えば、加工ユニット１２が接地固定され、支持台１１が図示しない駆動手段により移動する形態を採ることも可能である。この場合、支持台１１が鉛直軸まわりに回転可能な構成とすることで、加工ユニット１２を接地固定した状態であってもガラス板Ｇの四つの端部（辺縁部）全てに加工を施すことが可能となる。 In the above embodiment, the case where the processing unit 12 is moved and the support base 11 is fixed to the ground is exemplified, but it is of course not limited to this form. For example, it is possible to adopt a form in which the machining unit 12 is fixed to the ground and the support base 11 is moved by a driving means (not shown). In this case, the support base 11 is configured to be rotatable around the vertical axis so that all four ends (edges) of the glass plate G are processed even when the processing unit 12 is fixed to the ground. It becomes possible.
　また、上記実施形態では、テーパ形状の砥面１８を設けた砥石１３で端部Ｇｅの研削加工（片側面取り加工）を行う場合を例示したが、もちろんこれ以外の加工態様も採用可能である。例えば砥面１８を両側面取り用の形状とし、この砥面１８を端部Ｇｅの全面に当接させることで、端部Ｇｅに両側面取り加工を施すことも可能である。また、面取り形状も任意（Ｒ形状など）であることはもちろんである。 Further, in the above embodiment, the case where the grinding process (one-side chamfering process) of the end portion Ge is performed with the grindstone 13 provided with the tapered grinding surface 18 is illustrated. Of course, other processing modes can be employed. For example, it is also possible to chamfer both ends of the end portion Ge by making the polishing surface 18 into a shape for chamfering on both sides and bringing the polishing surface 18 into contact with the entire surface of the end portion Ge. Of course, the chamfered shape is also arbitrary (such as an R shape).
　また、上記実施形態では、ガラス板Ｇに施す加工として、砥石１３を用いた研削加工を例示したが、もちろんこれ以外のツールを用いた端部Ｇｅの加工等に本発明を適用することも可能である。例えば図示は省略するが、テープやベルトを用いた研削（研磨）加工、エッチング加工等に本発明を適用することが可能である。一例としてエッチング加工を施す場合、エッチング液を含浸させたスポンジローラを回転させつつ端部Ｇｅに当該ローラを当接させることで、端部Ｇｅにエッチング処理を施し、端部ＧｅにＲ面取り部を形成する方法をとることが可能である。また、テープやベルトを用いた研削方法としては、例えば特開２００８－２６４９１４号公報や、特開平５－３２９７６０号公報に開示される方法及び装置を用いることが可能である。 Moreover, in the said embodiment, although the grinding process using the grindstone 13 was illustrated as a process given to the glass plate G, of course, it is also possible to apply this invention to the process of the edge part Ge using a tool other than this. It is. For example, although not shown, the present invention can be applied to grinding (polishing) processing, etching processing, or the like using a tape or a belt. When etching is performed as an example, the end Ge is etched by rotating the sponge roller impregnated with an etching solution while the sponge roller is rotated, and an R chamfered portion is formed on the end Ge. It is possible to take the method of forming. As a grinding method using a tape or a belt, for example, the method and apparatus disclosed in Japanese Patent Application Laid-Open No. 2008-264914 and Japanese Patent Application Laid-Open No. 5-329760 can be used.
　また、以上の加工を施されるガラス板Ｇについても、その用途は特に問わない。従来公知の電子デバイスに使用されるガラス基板やカバーガラスなど種々の用途に用いられるガラス板の加工に本発明を適用することが可能である。 Also, the use of the glass plate G subjected to the above processing is not particularly limited. The present invention can be applied to processing of glass plates used for various purposes such as glass substrates and cover glasses used in conventionally known electronic devices.
１０   端部加工装置
１１   支持台
１２   加工ユニット
１３   砥石
１４   回転駆動部
１５   昇降駆動部
１６   カバー部
１７   水平移動駆動部
１８   砥面
１９   開口部
２０   第一支持部
２１   第二支持部
２２   支持面
２３   穴部
２４   吸気部
２５   吸着保持部
２６   板状部材
２７   基台 DESCRIPTION OF SYMBOLS 10 End part processing apparatus 11 Support stand 12 Processing unit 13 Grinding wheel 14 Rotation drive part 15 Elevation drive part 16 Cover part 17 Horizontal movement drive part 18 Grinding surface 19 Opening part 20 First support part 21 Second support part 22 Support surface 23 Hole Part 24 air intake part 25 adsorption holding part 26 plate-like member 27 base

Claims (8)

  1. 　ガラス板を支持する支持台と、該支持台に支持された状態の前記ガラス板の端部に所定の加工を施すための加工部と、該加工部を覆い、かつ前記ガラス板の端部と前記加工部との当接を可能とするための開口部が設けられたカバー部とを備えたガラス板の端部加工装置であって、
    　前記支持台は、前記ガラス板の中央側領域を支持する第一支持部と、前記ガラス板の端部側領域を支持する第二支持部とを有し、
    　前記第二支持部の厚み寸法は前記第一支持部のそれより小さく、かつ前記ガラス板の端部側領域を支持した状態で前記カバー部の前記開口部を通過可能な程度の大きさに設定されているガラス板の端部加工装置。     A support base for supporting the glass plate, a processing portion for applying predetermined processing to an end portion of the glass plate in a state supported by the support base, an end portion of the glass plate covering the processing portion, and A glass plate end processing device provided with a cover portion provided with an opening for enabling contact with the processing portion,
    The support base includes a first support portion that supports a central region of the glass plate, and a second support portion that supports an end portion region of the glass plate,
    The thickness dimension of the second support part is smaller than that of the first support part, and is set to such a size that it can pass through the opening part of the cover part while supporting the end side region of the glass plate. Glass plate end processing equipment.
  2. 　前記第二支持部は、前記第一支持部とは別体に形成され、かつ前記第一支持部に対して脱着可能に構成されている請求項１に記載のガラス板の端部加工装置。 The glass plate end processing apparatus according to claim 1, wherein the second support portion is formed separately from the first support portion and is configured to be detachable from the first support portion.
  3. 　前記支持台に支持された状態の前記ガラス板の端部側領域の前記第二支持部からの食み出し寸法をＡ［ｍｍ］、前記ガラス板の厚み寸法をｔ［ｍｍ］とした場合、Ａ＜ｔ×２００、を満たすように、食み出し寸法Ａが設定される請求項１又は２に記載のガラス板の端部加工装置。 When the protruding dimension from the second support part of the end side region of the glass plate in a state supported by the support base is A [mm], and the thickness dimension of the glass plate is t [mm], The edge processing apparatus of the glass plate of Claim 1 or 2 by which the protrusion dimension A is set so that A <tx200 may be satisfy | filled.
  4. 　前記第二支持部は、前記第一支持部よりも剛性の高い材料で形成されている請求項１～３の何れかに記載のガラス板の端部加工装置。 The glass plate end processing apparatus according to any one of claims 1 to 3, wherein the second support portion is formed of a material having higher rigidity than the first support portion.
  5. 　前記第二支持部の厚み寸法は、０．２５ｍｍ以上でかつ４．０ｍｍ以下に設定される請求項１～４の何れかに記載のガラス板の端部加工装置。 The glass plate edge processing apparatus according to any one of claims 1 to 4, wherein a thickness dimension of the second support portion is set to 0.25 mm or more and 4.0 mm or less.
  6. 　前記ガラス板の厚み寸法は、３００μｍ以下に設定される請求項１～５の何れかに記載のガラス板の端部加工装置。 The glass plate edge processing apparatus according to any one of claims 1 to 5, wherein a thickness dimension of the glass plate is set to 300 µm or less.
  7. 　前記ガラス板の厚み寸法は、５μｍ以上に設定される請求項６に記載のガラス板の端部加工装置。 The glass plate edge processing apparatus according to claim 6, wherein a thickness dimension of the glass plate is set to 5 µm or more.
  8. 　支持台で支持された状態のガラス板の端部に対して、カバー部で覆われた加工部で所定の加工を施すための方法であって、
    　前記カバー部には、前記ガラス板の端部と前記加工部との当接を可能とするための開口部が設けられ、
    　前記支持台は、前記ガラス板の中央側領域を支持する第一支持部と、前記ガラス板の端部側領域を支持する第二支持部とを有し、
    　前記第二支持部の厚み寸法は前記第一支持部のそれより小さく、かつ前記ガラス板の端部側領域を支持した状態で前記カバー部の前記開口部を通過可能な程度の大きさに設定され、これにより前記ガラス板の端部側領域を支持した状態の前記第二支持部を前記開口部に挿通して、前記ガラス板の端部と前記加工部との当接を行うガラス板の端部加工方法。     A method for applying a predetermined process to the end portion of the glass plate in a state supported by a support base at a processing portion covered with a cover portion,
    The cover portion is provided with an opening for enabling contact between the end portion of the glass plate and the processed portion,
    The support base includes a first support portion that supports a central region of the glass plate, and a second support portion that supports an end portion region of the glass plate,
    The thickness dimension of the second support part is smaller than that of the first support part, and is set to such a size that it can pass through the opening part of the cover part while supporting the end side region of the glass plate. Thus, the second support portion in a state of supporting the end portion side region of the glass plate is inserted into the opening portion, and the end portion of the glass plate and the processing portion are brought into contact with each other. Edge processing method.
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