WO2016047349A1 - Procédé de fabrication d'élément électroluminescent organique - Google Patents

Procédé de fabrication d'élément électroluminescent organique Download PDF

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Publication number
WO2016047349A1
WO2016047349A1 PCT/JP2015/073973 JP2015073973W WO2016047349A1 WO 2016047349 A1 WO2016047349 A1 WO 2016047349A1 JP 2015073973 W JP2015073973 W JP 2015073973W WO 2016047349 A1 WO2016047349 A1 WO 2016047349A1
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WIPO (PCT)
Prior art keywords
belt
organic
shaped
substrate
mask
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PCT/JP2015/073973
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English (en)
Japanese (ja)
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伸明 高橋
福田　和浩
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コニカミノルタ株式会社
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Priority to JP2016550050A priority Critical patent/JPWO2016047349A1/ja
Publication of WO2016047349A1 publication Critical patent/WO2016047349A1/fr

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Definitions

  • the present invention relates to a method for producing an organic electroluminescence element.
  • organic electroluminescence element (hereinafter referred to as “organic EL element”) is a thin film, is self-luminous, and can be made flexible. Development is underway.
  • Patent Document 1 discloses an invention of an apparatus for forming a pattern on a substrate by transporting a pattern forming mask in synchronization with the substrate and scattering the pattern forming material toward the substrate.
  • Patent Document 2 discloses that a material is deposited on a substrate in a predetermined shape through an opening of the mask while continuously moving the substrate and the elongated mask in synchronization using a transfer cylinder. A featured pattern formation method is disclosed.
  • JP 2002-235166 A Japanese Patent Laid-Open No. 2003-133067
  • the inventions described in the cited document 1 and the cited document 2 are not the intermittent film forming method but the continuous film forming method, they are useful methods for improving the production speed.
  • the number of organic EL elements arranged on the base material can be increased.
  • the area ratio of the mask opening corresponding to each organic EL element is increased, and the base material portion of the mask around the opening is thinned, so that the mechanical strength and rigidity as the mask are reduced.
  • the belt-shaped mask is transported in synchronization with the belt-shaped substrate, and therefore when the tensile force is applied to the belt-shaped mask, the belt-shaped mask is deformed or stretched, the belt-shaped mask meanders, and the conveyance is unstable. End up. For this reason, the band-shaped base material and the band-shaped mask cannot be sufficiently aligned, and the pattern accuracy to be formed is lowered.
  • the present invention has been made in view of such a situation. That is, the object of the present invention is to suppress the deformation and meandering of the band-shaped mask in the method of manufacturing an organic EL element by a roll-to-roll method, thereby improving the pattern accuracy, improving the production speed and per unit area of the substrate.
  • An object of the present invention is to provide a method for producing an organic EL device capable of simultaneously increasing the number of products.
  • the inventors have repeatedly studied a method for increasing the number of organic EL elements arranged on a base material while maintaining the transport speed of the belt-like base material using a continuous film formation method.
  • the number of products per unit area of the base material is increased, the area ratio of the corresponding mask openings increases, and the mechanical strength and rigidity of the belt-shaped mask decrease.
  • the width of the non-opened portions on both sides of the belt-like mask is reduced, deformation and elongation when a tensile tension is applied to the belt-like mask is increased, and it becomes easy to meander.
  • the present inventors have arranged a plurality of elements disposed on the band-shaped substrate. It was considered that the organic EL element was divided into two or more groups. Then, it was considered that pattern film formation was performed in a separate process for each group using two or more types of band-shaped masks corresponding to each group.
  • the area ratio of the openings of each of the two or more types of band-shaped masks was reduced, and it was possible to suppress a decrease in mechanical strength and rigidity as each band-shaped mask.
  • deformation, elongation and meandering of the belt-shaped mask are suppressed, positioning of the belt-shaped substrate and the belt-shaped mask is facilitated, and the pattern accuracy to be formed is improved.
  • the present invention has the following configuration.
  • a method for manufacturing an organic EL element which is sequentially performed using two or more types of corresponding band-shaped masks.
  • the pattern formation of the layer constituting the organic EL element is performed using a band-shaped mask that moves in synchronization with the band-shaped substrate, and the plurality of organic EL elements on the band-shaped substrate are divided into two or more groups.
  • the pattern film formation for each group is performed in the same chamber when the pattern film formation is sequentially performed for each group using two or more types of band-shaped masks corresponding to each group. 4.
  • the organic EL device manufacturing method of the present invention is a roll-to-roll manufacturing method that suppresses deformation and meandering of a strip mask, improves pattern accuracy, improves production speed, and per unit area of a substrate.
  • the number of products can be increased at the same time.
  • FIG. 4B is a diagram showing the arrangement of grouped organic EL elements in group A.
  • FIG. 4C is a diagram showing the arrangement of grouped organic EL elements in group B. It is a figure which shows 2nd grouping of the some organic EL element on the strip
  • Fig.5 (a) is a figure which shows arrangement
  • FIG. 5B is a diagram showing the arrangement of grouped organic EL elements in group A.
  • FIG. 5C is a diagram showing the arrangement of grouped organic EL elements in group B.
  • FIG. 5D is a diagram showing the arrangement of grouped organic EL elements in group C. It is a figure which shows the 3rd grouping of the some organic EL element on the strip
  • FIG. 6 (a) is a figure which shows arrangement
  • FIG. 6B is a diagram showing the arrangement of grouped organic EL elements in group A.
  • FIG. 6C is a diagram showing the arrangement of grouped organic EL elements in group B.
  • FIG. 6D is a diagram showing the arrangement of grouped organic EL elements in group C.
  • FIG. 6E is a diagram showing the arrangement of grouped organic EL elements of group D.
  • the method for producing an organic EL element of the present invention is a method for producing an organic EL element in which a plurality of organic EL elements are continuously formed on a belt-shaped substrate made of a resin film by a roll-to-roll method.
  • the organic EL element is formed on a belt-like substrate.
  • the configuration of the organic EL element is not particularly limited, and has a conventionally known configuration. It has at least an anode, an organic light emitting layer, and a cathode.
  • various layers such as a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, a hole blocking layer, and an electron blocking layer may be included as necessary.
  • the organic EL element may be sealed with a sealing layer in order to block the influence from the outside.
  • the extraction electrode for sending an electrical signal from the exterior to the anode and cathode of an organic EL element may be formed on the strip
  • each layer constituting the organic EL element is in principle formed by a vapor phase thin film forming method.
  • the vapor phase thin film forming method includes (vacuum) vapor deposition method, sputtering method, CVD (Chemical Vapor Deposition) method, molecular beam epitaxy method, ion plating method and the like.
  • the electrode is generally formed by a vapor deposition method or a sputtering method
  • the organic layer is generally formed by a vapor deposition method.
  • Each layer constituting the organic EL element is a thin film, and the belt-like substrate is also flexible. Therefore, the belt-like substrate having the organic EL element formed on the surface is flexible as a whole.
  • the band-shaped substrate having a plurality of organic EL elements formed on the surface produced by the production method of the present invention can function as an organic EL element by cutting and cutting around the individual organic EL elements. is there.
  • the band-shaped substrate is a thin and long flexible substrate on which an organic EL element is formed on the surface by a roll-to-roll method. Usually it is rolled up.
  • the belt-like substrate is not particularly limited in the type of material, and may be transparent or opaque. When taking out light from the base material side, it is preferable that a strip
  • a particularly preferable belt-like substrate is a resin film that can easily give flexibility to the organic EL element.
  • the resin for the resin film include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyetherimide, polyetheretherketone, polyphenylene sulfide, polyarylate, polyimide, and polycarbonate (PC). , Cellulose triacetate (TAC), cellulose acetate propionate (CAP) and the like.
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PES polyethersulfone
  • PES polyetherimide
  • polyetheretherketone polyphenylene sulfide
  • PC polycarbonate
  • TAC Cellulose triacetate
  • CAP
  • the belt-like substrate preferably has a barrier layer formed of an inorganic material, an organic material, or a hybrid of these on the surface.
  • the material for forming the barrier layer may be any material that has a function of suppressing intrusion of moisture, oxygen, or the like that degrades the organic EL element.
  • silicon oxide, silicon dioxide, silicon nitride, or the like can be used.
  • the thickness of the belt-like substrate is preferably 10 to 200 ⁇ m. When the thickness of the belt-shaped substrate is within this range, a substrate having excellent mechanical strength and excellent flexibility can be obtained.
  • belt-shaped base material is 150 micrometers, and a more preferable minimum is 20 micrometers.
  • the belt-like mask is a thin and long base material having an opening having a shape pattern that allows a thin film having a predetermined shape to be formed on the belt-like base material.
  • a metal having a small linear thermal expansion coefficient can be preferably used.
  • Invar and 42 alloy there are Invar and 42 alloy.
  • these metal masks those bonded to the mask frame by spot welding or the like are preferably used.
  • pattern formation of a layer constituting an organic EL element is performed using a band-shaped mask that moves in synchronization with the band-shaped substrate, and two or more organic EL elements on the band-shaped substrate are formed. It is characterized in that it is divided into groups, and pattern film formation is sequentially performed for each group using two or more kinds of band-shaped masks corresponding to each group.
  • a method of dividing a plurality of organic EL elements on the belt-like substrate into two or more groups will be described based on the first grouping to the third grouping.
  • FIG. 4 is a diagram showing a first grouping of a plurality of organic EL elements on a strip-shaped substrate.
  • Fig.4 (a) has shown arrangement
  • the anode of the layers constituting the organic EL element when forming the anode of the layers constituting the organic EL element, the anode is formed on almost the entire surface of the organic EL element. Therefore, if an anode is to be formed with a single strip mask, it is necessary to form an opening in a portion occupied by all the organic EL elements shown in FIG. Therefore, the area of the part that is not opened is less than about one quarter of the total area of the strip mask. Then, when a tensile tension is applied between the rolls in the longitudinal direction of the belt-like mask, the belt-like mask is deformed, stretched, or meanders, and the conveyance becomes unstable. For this reason, the alignment between the band-shaped substrate and the band-shaped mask cannot be performed accurately, and the accuracy of the pattern to be formed is lowered.
  • the arrows in FIG. 4 indicate the longitudinal direction.
  • the organic EL elements shown in FIG. 4A are divided into two groups, and the organic EL elements of group A shown in FIG. 4B and those of group B shown in FIG. It will be divided into organic EL elements.
  • the organic EL elements adjacent in either the longitudinal direction of the belt-like substrate or the direction perpendicular thereto belong to different groups (see FIG. 4A). Moreover, the organic EL elements belonging to the same group on the belt-like substrate are present at equal intervals in the longitudinal direction of the belt-like substrate.
  • the pattern formation of the organic EL elements divided into the two groups described in FIG. 4A is sequentially performed for each group using two types of band-shaped masks corresponding to each group. That is, the pattern formation of the layer of the organic EL element of the group A described in FIG. 4B is first performed, and then the pattern formation of the layer of the organic EL element of the group B described in FIG. Then do.
  • the area of the unopened portion exceeds about one half of the total area of the band-shaped mask. ing. If it does so, when a tension
  • the band-shaped mask for forming the anode of the group B organic EL elements described in FIG. 4C is the same as the band-shaped mask in FIG. 4B.
  • the organic EL elements that are adjacent to each other in the longitudinal direction of the band-shaped substrate and the direction perpendicular thereto on the band-shaped substrate all belong to different groups. It is preferable that deformation and elongation with respect to the tensile tension of the belt-shaped mask are suppressed.
  • the organic EL elements belonging to the same group on the belt-like substrate are present at equal intervals in the longitudinal direction of the belt-like substrate, the degree of deformation and elongation of the belt-shaped mask with respect to the tensile tension is stabilized in the longitudinal direction.
  • the meandering is preferably suppressed.
  • the organic EL elements are arranged in three rows in the longitudinal direction. In any of the three rows, the organic EL elements belonging to the same group are preferably present at regular intervals in the longitudinal direction of the belt-like substrate.
  • interval of the longitudinal direction of the organic EL element which belongs to the same group is the same also in any row of 3 rows.
  • belt-shaped base material can be variously set according to the width
  • the organic EL elements belonging to the same group on the belt-like substrate are arranged symmetrically with respect to the longitudinal direction of the belt-like substrate.
  • the degree of deformation and elongation with respect to the tensile tension of the belt-like mask is the longitudinal direction. Therefore, meandering is suppressed, which is preferable.
  • the organic EL elements can be divided into two groups to form a pattern.
  • the area of the opening is small, and the openings for all the organic EL elements shown in FIG. 4A are formed in one strip mask.
  • FIG. 5 is a diagram showing a second grouping of the plurality of organic EL elements on the belt-like substrate.
  • Fig.5 (a) has shown arrangement
  • the arrows in FIG. 5 indicate the longitudinal direction.
  • the organic EL elements described in FIG. 5A are divided into three groups. That is, the group A organic EL elements shown in FIG. 5B, the group B organic EL elements shown in FIG. 5C, and the group C organic EL elements shown in FIG. Let's divide.
  • the area of the part not opened exceeds about one half of the total area of the band-shaped mask. ing. If it does so, when a tension
  • the band-shaped mask for forming the anode of the group B organic EL elements described in FIG. 5C is also the band-shaped mask for forming the anode of the group C organic EL elements illustrated in FIG.
  • the mask is the same as that in the case of the band-shaped mask in FIG.
  • the organic EL elements belonging to the same group on the belt-like substrate are not arranged symmetrically with respect to the longitudinal direction of the belt-like substrate. Therefore, compared to the case where organic EL elements belonging to the same group on the strip-shaped substrate are arranged symmetrically with respect to the longitudinal direction of the strip-shaped substrate, the degree of deformation and elongation with respect to the tensile tension is perpendicular to the longitudinal direction. There is a case where the symmetry is slightly lacking and the meandering is not sufficiently suppressed.
  • FIG. 6 is a diagram showing a third grouping of a plurality of organic EL elements on a strip-shaped substrate.
  • FIG. 6A shows the arrangement of a plurality of organic EL elements on the finally produced strip-like substrate.
  • the arrows in FIG. 6 indicate the longitudinal direction.
  • the organic EL elements described in FIG. 6A are divided into four groups. That is, the group A organic EL elements shown in FIG. 6B, the group B organic EL elements shown in FIG. 6C, and the group C organic EL elements shown in FIG. Let it be divided into group D organic EL elements shown in FIG.
  • the area of the unopened portion exceeds about one half of the total area of the band-shaped mask. ing. If it does so, when a tension
  • the band-shaped masks for forming the anodes of the organic EL elements of groups B, C, and D described in FIGS. 6C, 6D, and 6E are also shown in FIG. This is the same as in the case of a strip mask.
  • the other explanation of the third grouping is the same as in the case of the first grouping, so the explanation is omitted.
  • the number of groupings of the plurality of organic EL elements is not particularly limited as long as it is 2 or more.
  • the number of groupings is preferably an even number rather than an odd number because the left and right balance is improved.
  • the manufacturing method of the organic EL element of the present invention will be further described based on embodiments of three types of specific manufacturing apparatuses, ie, a first manufacturing apparatus, a second manufacturing apparatus, and a third manufacturing apparatus.
  • FIG. 1 is a schematic cross-sectional view of a first manufacturing apparatus according to a method for manufacturing an organic EL element of the present invention.
  • the manufacturing apparatus is demonstrated taking the case where the anode of an organic EL element is formed on a strip
  • the 1st manufacturing apparatus is accommodated in the chambers 10 and 20 which can be pressure-reduced to a vacuum.
  • a roll 12 in which a belt-like substrate is wound in a roll shape is installed in the chamber 10.
  • the belt-like base material 11 is pulled out from the roll 12.
  • the strip-shaped substrate 11 is conveyed between two guide rolls placed horizontally.
  • the belt-like mask 13 has an endless belt shape and is conveyed in parallel with the belt-like substrate 11 by a guide roll or a drive roll. Then, the belt-like mask 13 is brought into close contact with the lower surface of the belt-like substrate 11.
  • the conveyance speed and the tension are adjusted so that the band-shaped substrate 11 and the band-shaped mask 13 move in synchronization.
  • the metal for forming the anode is irradiated from the sputtering apparatus 14 to the belt-like base material 11 and the belt-like mask 13.
  • a cooling device 15 for controlling the temperature of the belt-like base material 11 and the belt-like mask 13 is installed on the back side of the belt-like base material 11 to suppress an increase in temperature.
  • a mask having a pattern corresponding to FIG. As a result of sputtering, an anode having a pattern corresponding to FIG. 4B is formed on the belt-like substrate 11.
  • the belt-like substrate 11 is conveyed to the chamber 20 through the guide roll.
  • a manufacturing apparatus similar to the chamber 10 is installed.
  • the belt-like mask 16 has an endless belt shape and is conveyed in parallel with the belt-like substrate 11 by a guide roll or a drive roll. Further, a sputtering device 17 and a cooling device 18 are installed, and a metal for forming an anode on the belt-like substrate 11 is irradiated.
  • a metal for forming an anode on the belt-like substrate 11 is irradiated.
  • the strip-shaped mask 16 a mask having a pattern corresponding to FIG.
  • an anode having a pattern corresponding to FIG. 4C is formed on the belt-like substrate 11.
  • the anode is continuously formed on the belt-like base material 11, and finally, the belt-like base material 11 in which the anode having the pattern corresponding to FIG. It is wound up as a roll 19.
  • the chamber 10 and the chamber 20 sputtering is continuously performed to form all the anodes corresponding to the organic EL elements installed on the belt-like substrate 11. Therefore, it is efficient and preferable that the chamber 10 and the chamber 20 form the same chamber. This makes it possible to perform pattern formation of the anode corresponding to each group of the plurality of organic EL elements on the strip-shaped substrate in the same chamber.
  • the organic EL elements can be divided into two groups, and pattern deposition can be performed continuously.
  • a sputtering apparatus is used as the film forming apparatus.
  • it can be replaced with another vapor phase thin film forming method such as a vapor deposition apparatus.
  • the manufacturing apparatus uses a plurality of strip-shaped masks 13 and 16, and therefore it is necessary to align the strip-shaped masks 13 and 16 with respect to the strip-shaped substrate 11 when forming a film.
  • a means for confirming the deviation of the band-shaped masks 13 and 16 in the width direction and correcting meandering is provided, or the band-shaped substrate 11 and the band-shaped masks 13 and 16 in the longitudinal direction are synchronized. It is possible to confirm and provide means for correcting the conveyance speed.
  • the alignment mark of the band-shaped substrate 11 is observed through the holes of the band-shaped masks 13 and 16, and the band-shaped substrate 11 and the band-shaped mask 13, There is a method of confirming the positional relationship between the longitudinal direction and the width direction with respect to 16.
  • the band masks 13 and 16 are endless belts, but a long band mask having both ends that are not belts can also be used.
  • the formation of a layer that does not use the vapor-phase thin film forming method or a layer to which the manufacturing apparatus cannot be applied is performed in a manufacturing apparatus or manufacturing process different from the manufacturing apparatus. Become.
  • the organic EL elements are divided into two groups, and the strip-shaped masks 13 and 16 have been described using masks having patterns corresponding to FIGS. 4B and 4C.
  • pattern formation is performed by dividing the organic EL elements into three groups, one more manufacturing apparatus similar to the manufacturing apparatus installed in the chamber 10 and the chamber 20 is added, and the chamber 20 is continuously connected.
  • the installed manufacturing apparatus having three film forming apparatuses is used.
  • belt-shaped mask for example, it will carry out sequentially using three types of strip
  • a plurality of organic EL elements can be continuously formed on the belt-like substrate 11 by the roll-to-roll method.
  • the pattern film-forming of the layer which comprises an organic EL element is performed by the continuous film-forming system using the strip
  • FIG. Moreover, the pattern formation of the layer which comprises an organic EL element divides the several organic EL element on a strip
  • Known production methods and conditions can be used as appropriate for production methods and production conditions not specifically described.
  • FIG. 2 is a schematic cross-sectional view of a second manufacturing apparatus according to the method for manufacturing an organic EL element of the present invention.
  • the manufacturing apparatus will be described by taking as an example the case where the anode of the organic EL element is formed on a band-shaped substrate by sputtering.
  • the 2nd manufacturing apparatus is accommodated in the chambers 30 and 40 which can be pressure-reduced to a vacuum.
  • a roll 32 in which a belt-like base material is wound in a roll shape is installed in the chamber 30.
  • the belt-like base material 31 is pulled out from the roll 32.
  • the strip-shaped base material 31 is transported on a large transport roll 35 having a cooling function.
  • the belt-like mask 33 has an endless belt shape, and is conveyed in close contact with the belt-like substrate 31 on the conveyance roll 35 by a guide roll or a drive roll. The conveyance speed and the tension are adjusted so that the band-shaped substrate 31 and the band-shaped mask 33 move in synchronization.
  • the metal for forming the anode is irradiated from the sputtering apparatus 34 to the belt-like base material 31 and the belt-like mask 33.
  • a cooling function for controlling the temperature of the belt-like base material 31 and the belt-like mask 33 is built in the transport roll 35 to suppress an increase in temperature.
  • the belt-like mask 33 a mask having a pattern corresponding to FIG.
  • an anode having a pattern corresponding to FIG. 4B is formed on the belt-like substrate 31.
  • the belt-like substrate 31 is conveyed to the chamber 40 through the guide roll.
  • a manufacturing apparatus similar to the chamber 30 is installed in the chamber 40.
  • the belt-like mask 36 has an endless belt shape, and is conveyed in close contact with the belt-like substrate 31 on the conveyance roll 38 by a guide roll or a drive roll.
  • a sputtering device 37 is installed, and a metal for forming an anode on the belt-like substrate 31 is irradiated.
  • the strip mask 36 a mask having a pattern corresponding to FIG.
  • an anode having a pattern corresponding to FIG. 4C is formed on the belt-like substrate 11.
  • the anode is continuously formed on the belt-like substrate 31, and finally, the belt-like substrate 31 in which the anode having the pattern corresponding to FIG. It is wound up as a roll 39.
  • FIG. 3 is a schematic cross-sectional view of a third manufacturing apparatus according to the method for manufacturing an organic EL element of the present invention.
  • belt-shaped base material by sputtering method is demonstrated to an example, and the manufacturing apparatus is demonstrated.
  • the third manufacturing apparatus is housed in a chamber 50 that can be depressurized to a vacuum.
  • a roll 52 in which a belt-like substrate is wound in a roll shape is installed in the chamber 50.
  • the belt-like substrate 51 is pulled out from the roll 52.
  • the strip-shaped substrate 51 is transported on a large transport roll 55 having a cooling function.
  • the belt-like mask 53 has an endless belt shape, and is conveyed in close contact with the belt-like substrate 51 on the conveyance roll 55 by a guide roll or a drive roll. The conveyance speed and the tension are adjusted so that the band-shaped substrate 51 and the band-shaped mask 53 move in synchronization.
  • the metal for forming the anode is irradiated from the sputtering apparatus 54 to the belt-like substrate 51 and the belt-like mask 53.
  • the belt-like substrate 51 is conveyed in close contact with the conveyance roll 55.
  • a film is formed by sputtering in the same manner using a similar apparatus including the strip mask 56 and the sputtering apparatus 57.
  • the metal for forming the anode is irradiated from the sputtering apparatus 57 to the belt-like substrate 51 and the belt-like mask 56.
  • a cooling function for controlling the temperature of the belt-like base material 51 and the belt-like masks 53 and 56 is built in the transport roll 55 to suppress an increase in temperature.
  • anode having a pattern corresponding to FIG. 4A is formed on the belt-like substrate 51 and wound up as a roll 58.
  • the plurality of organic EL elements on the band-shaped substrate are divided into two or more groups, and two or more types of band-shaped masks corresponding to each group are sequentially used.
  • the manufacturing method of this embodiment can be applied not only to the manufacture of organic EL elements but also to various thin film devices such as solar cells and liquid crystal display elements.

Abstract

La présente invention concerne un procédé de fabrication d'un élément électroluminescent organique, le procédé permettant d'améliorer la précision de motif et de supprimer la déformation de masque en forme de courroie et les sinuosités de traitement rouleau à rouleau, ainsi que d'équilibrer une amélioration de la vitesse de production avec une augmentation du nombre de produits par surface unitaire de substrat. L'invention porte sur un procédé de fabrication d'un élément électroluminescent organique, le procédé servant à former en continu une pluralité d'éléments électroluminescents organiques par l'intermédiaire d'un traitement rouleau à rouleau sur un substrat en forme de courroie (11) comprenant un film de résine. Ce procédé de fabrication est caractérisé en ce qu'il consiste : à réaliser une formation de film de motif dans une couche constituant l'élément électroluminescent organique, en utilisant des masques en forme de courroie (13, 16) en vue du déplacement en synchronisation avec le substrat en forme de courroie (11) ; à diviser les multiples éléments électroluminescents organiques sur le substrat en forme de courroie (11) en au moins deux groupes ; et à réaliser de manière séquentielle la formation de film de motif pour chaque groupe en utilisant au moins deux types de masques en forme de courroie (13, 16) correspondant aux groupes.
PCT/JP2015/073973 2014-09-25 2015-08-26 Procédé de fabrication d'élément électroluminescent organique WO2016047349A1 (fr)

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CN111519135A (zh) * 2020-03-30 2020-08-11 维达力实业(深圳)有限公司 遮蔽装置及补锂设备

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CN111519135A (zh) * 2020-03-30 2020-08-11 维达力实业(深圳)有限公司 遮蔽装置及补锂设备

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