Classifications

• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70058—Mask illumination systems
  • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
  • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
  • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
  • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
  • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
  • G02B26/10—Scanning systems
  • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/08—Mirrors
  • G02B5/0891—Ultraviolet [UV] mirrors
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B5/00—Optical elements other than lenses
  • G02B5/08—Mirrors
  • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70058—Mask illumination systems
  • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
  • G03F7/70116—Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70058—Mask illumination systems
  • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems

Definitions

• the invention relates to an illumination optical assembly for a projection exposure apparatus.
• the invention furthermore relates to a method for setting such an illumination optical assembly.
• the invention relates to a facet mirror for an illumination optical assembly of a projection exposure apparatus.
• the invention relates to an illumination system compris- ing such an illumination optical assembly, an optical system comprising such an illumination optical assembly, and a projection exposure apparatus comprising such an optical system.
• the invention relates to a method for producing a micro- or nanostructured component, and a component produced according to this method.
• An illumination optical assembly for a projection exposure apparatus is known from WO
• the essence of the invention consists in choosing the displacement positions of the individual mirrors which form the first facets in such a way that the intensity distribution of the illumination radiation in the region of the second facet element does not exceed a predefined maximum value.
• the maximum value can be predefined in absolute terms as maximum permissible intensity I max . It can also be predefined relative to a mean value of the intensity distribution.
• the mean value of the intensity distribution can be given in this case in particular as an integral of the intensity distribution over the area of the respective second facet divided by the surface area of these facets.
• the maximum of the intensity distribution in the region of this facet can be greater than the mean value for example at most by a factor of 32, in particular by a factor of 16, in particular at most 8, in particular at most 4, in particular at most 2, in particular at most 1.5.
• the maximum of the intensity distribution can also be greater than the mean value of the intensity distribution by at most 100 kW/m 2 , in particular at most 50 kW/m 2 , in particular at most 30 kW/m 2 , in particular at most 20 kW/m 2 , in particular at most 10 kW/m 2 .
• the predefined maximum intensity I max can be in particular at most 500 kW/m 2 , in particular at most 300 kW/m 2 , in particular at most 200 kW/m 2 , in particular at most 100 kW/m 2 , in particular at most 50 kW/m 2 , in particular at most 30 kW/m 2 , in particular at most 20 kW/m 2 , in particular at most 10 kW/m 2 , in particular at most 5 kW/m 2 , in particular at most 2 kW/m 2 .
• the construction of the first facet element with a multiplicity of individual mirrors which are individually displaceable makes it possible to shift relative to one another the images of the intermediate focus which each of said individual mirrors generates on the respectively assigned second facet.
• the intensity distribution in the region of the second facet element can be influenced as a result. It is possible, in particular, to influence the intensity distribution in the region of the second facet element, in particular in the region of each of said second facets, by a displacement of a subset of the individual mirrors in such a way that its maximum fulfils at least one of the abovementioned criteria.
• the number of images of the intermediate focus on a given one of the second facets can in particular be equal to the number of individual mirrors which form the associated first facet. This number can be in the range of 1 to 10,000, in particular in the range of 1 to 3000, in particular in the range of 1 to 1000.
• the indications concerning the intensity and the intensity distribution are time-averaged values, in particular. In principle, it is also possible for the indicated values to indicate the temporal peak values of the intensity.
• the individual mirrors are micro mirrors, in particular.
• the individual mirrors of the first facet element have in particular side lengths of less than 1 cm, in particular less than 5 mm, in particular less than 2 mm, in particular less than 1 mm, in particular less than 700 ⁇ , in particular less than 500 ⁇ .
• the second facet element comprises a mirror array having a plurality of modular multi-mirror elements, wherein the multi-mirror elements in each case have dimensions which are at least equal to the dimensions of the images of the intermediate focus in the region of the second facet element.
• the modular multi-mirror elements are also designated as building blocks or bricks. The bricks in each case have dimensions which are at least equal to those of the source image, in particular the image of the intermediate focus in the region of the second facet element.
• the second facets are formed in particular by a multiplicity of individual mirrors, in particular a multiplicity of micro mirrors.
• the modular multi-mirror elements are embodied in particular as a multi-mirror array (MMA), in particular as a microelectromechanical system (MEMS), in particular as an MEMS-MMA.
• MEMS-MMAs microelectromechanical system
• the second facets are virtual facets, in particular.
• Pupil facets can be involved, in particular. Facets of a specular reflector can generally also be involved.
• the second facets can in particular be varied flexibly in terms of size and/or shape and/or arrangement, in particular adapted to predefined boundary conditions.
• the displacement positions of a plurality of the individual mirrors of a given first facet are chosen in such a way that they generate images of the intermediate focus on the respectively assigned second facet whose maxima are offset relative to one another by a minimum absolute value.
• the minimum absolute value of the offset of the images of the intermediate focus is in particular at least equal to the width of one of the individual mirrors which form the second facets. It can also be double the magnitude of said width.
• the offset, in particular the minimum absolute value thereof can also be defined depending on the full width at half maximum of the intensity distribution of the image of the intermediate focus on the respective second facet.
• the minimum absolute value can be in particular equal to half the full width at half maximum, equal to the full width at half maximum, equal to double the full width at half maximum or equal to triple the full width at half maximum.
• the displacement positions of the individual mirrors are chosen in particular in such a way that at most 20%, in particular at most 10%, in particular at most 5%, in particular at most 1%, of the energy of a plasma image lies beyond the respectively assigned second facet, that is to say cannot be reflected by said second facet.
• the maximum possible shift defines a region within which the shifts are distributed preferably as uniformly as possible.
• the displacement positions are chosen in particular in such a way that the intensity distribution on the second facet is as homogeneous as possible.
• the abovementioned minimum absolute value of the offset of the images of the intermediate focus on the second facet can form a lower limit for the maximum distance between second in- termediate focus images on the same virtual second facet.
• An offset of the images of the intermediate focus relative to one another makes it possible to widen the intensity distribution on the second facets in a targeted manner. It is possible, in particular, to shift an intensity from a central region of a second facet into an edge region. It is possible, in particular, to make the illumination of the second facets more homogeneous.
• the individual mirrors of at least one of the first facets are displaced in such a way that in the case of a given intensity distribution in the intermediate focus the intensity distribution of the image of the intermediate focus on the corresponding second facet has a full width at half maximum which is at least 10%, in particular at least 20%, in particular at least 30%, in particular at least 50%, in particular at least 70%, in particular at least 100%, in particular at least 150%, in particular at least 200%, in particular at least 300%, greater than the full width at half maximum - scaled by an imaging scale of the illumination optical assembly - of the intensity distribution in the intermediate focus.
• a widening of the intensity distribution of the image of the intermediate focus on the second facets makes it possible to reduce the maximum value of the intensity on the second facets.
• the fact that in general the shape of the intensity distribution on the second facets is also altered here is of secondary importance in the present context.
• at least two of the second facets have different dimensions.
• those second facets which serve for illuminating particularly large partial fields can be made larger than those second facets which illuminate smaller partial fields.
• the size of the virtual second facets can be chosen in particular depending on the size of the partial fields to be illuminated. A larger size of the second facets enables a larger shift of the images of the intermediate focus. The radiation power can thus be distributed over a larger region, that is to say that the intensity, in particular the maximum intensity of the illumination radiation on the second facets, can be reduced.
• the facets which illuminate partial fields which are arranged at a common height with respect to the scan direction that is to say which have the same y-coordinate with the coordinate system that will be introduced below, have an identical shape. Field dependencies in the pupil can be avoided as a result.
• the facets depending on the y-coordinate, can have different grid constants in the x-direction of the pupil. It can be provided, in particular, that at least two facets which have different y-coordinates have different dimensions in the x-direction.
• the latter has a variable distance of the illumination channels in the x-direction depending on the pupil coordinates in the y-direction. This property of the pupil is very predominant and has to be taken into account in the design of the mask.
• the essence of the invention consists in displacing a subset of the individual mirrors of the first facets in such a way that the intensity distribution on the second facets fulfils specific boundary conditions.
• a displacement of the individual mirrors of the first facets makes it possible to en- sure, in particular, that the maximum intensity on the second facets is at most equal to a predefined maximum value I max .
• a displacement of a subset of the individual mirrors of the first facets is provided, in particular, if the intensity distribution ⁇ ( ⁇ ) on at least one of the second facets has a maximum which is greater than the predefined permissible maximum value I max ,
• a minimum transmittance Tmi n is predefined which is attained by the second facets after the displacement of the individual mirrors.
• transmittance should be understood geometrically in this context. It should be under- stood, in particular, to the effect that it specifies the ratio of the power of the illumination radiation actually reflected by one of the second facets after the displacement of the individual mirrors of the first facets with respect to the theoretically possible reflected power of the illumination radiation in the case where all images of the intermediate focus are centred on the second facet and the second facet has a simply connected, in particular an uninterrupted, reflection surface.
• the transmittance serves in particular for characterizing the proportion of the illumination radiation which falls off the second facets as a result of the displacement of the individual mirrors of the first facets.
• What can be achieved with the boundary condition of a predefined minimum transmittance is that the maximum intensity on the second facets is reduced, while the mean value of the intensity on the second facets and in particular the area integral of the intensity distribution over the sec- ond facets, that is to say the power respectively reflected by the second facets, decrease at most as far as a predefined value, in particular remain substantially constant.
• the size of the second facets is chosen de- pending on a power to be reflected and/or an expected thermal load and/or a predefined minimum transmission value.
• the size of the second facets which are formed in particular by a multiplicity of individual mirrors, that is to say which are embodied as virtual second facets, to be chosen flexibly as required.
• all of the second facets it is possible for all of the second facets to have an identical shape and/or an identical size.
• at least two of the second facets it is also possible for at least two of the second facets to have a different shape and/or a different size.
• the size of the second facets can in particular also be chosen depending on the partial field to be illuminated. Generally, the second facets which serve for illuminating larger partial fields can be made larger than those second facets which serve for illuminating smaller partial fields.
• a facet mirror comprising a multi-mirror array having a multiplicity of displaceable individual mirrors, wherein the number and arrangement of the individual mirrors of the multi-mirror array are chosen in such a way that the possibilities of a grouping thereof to form virtual facets have a reducible representation.
• n and m are chosen in particular in such a way that they each have at least two different prime factors; n and m are chosen in particular in such a way that they have a particularly high number of devisors.
• the number of lines and/or columns is, in particular, 12, 18, 20, 24, 28, 30, 32, 36, 40, 42, 44, 45, 48 or 60.
• the values are 12, 24, 36, 48 or 60. These are in each case the smallest integers which have at least 6, 8, 9, 10 and 12 devisors, respectively.
• the facet mirror is, in particular, a constituent of the second facet element. It can be, in particu- lar, a constituent of a specular reflector. In the case where the latter is arranged in a pupil plane of the illumination optical assembly, said mirror is also designated as a pupil facet mirror.
• Figure 1 shows highly schematically in meridional section a projection exposure apparatus for EUV micro lithography comprising a radiation source, an illumination optical assembly and a projection optical assembly
• Figure 2 shows schematically and likewise in meridional section a beam path of selected individual rays of illumination radiation within the illumination optical assembly according to Figure 1 , proceeding from an intermediate focus through to a reticle arranged in an object plane,
• Figure 3 shows schematically an enlarged excerpt from the beam path of one of the illumination channels in accordance with Figure 2, shows an illustration in accordance with Figure 3 after a displacement of the individual mirrors of the first facet, shows a schematic illustration of the intensity distribution in the region of one of the second facets in the case of the beam path in accordance with Figure 3, shows a corresponding illustration for the beam path in accordance with Figure 4, shows an illustration of the normalized averaged power density for each of the individual mirrors of a second facet in the case of an intensity distribution in accordance with Figure 5, shows a corresponding illustration for an intensity distribution in accordance with Figure 6, shows schematically an illustration for the exemplary elucidation of the relationship between the achievable reduction of the absorbed power density as a function of a predefined transmission (y-axis) and plasma image size (x-axis),
• Figure 10 shows an illustration in accordance with Figure 9 in the case of larger virtual second facets
• Figure 11 shows schematically a subdivision of a modular multi-mirror element having 24 x 24 micro mirrors into virtual second facets, wherein the individual facets have different shapes
• Figure 12 shows a schematic illustration of one of the poles of a y-dipole illumination setting for a classification of the virtual second facets in accordance with Figure 11 .
• Figure 13 shows a schematic illustration corresponding to Figure 4 for explaining an advantageous tilting of the individual mirrors of the first facet.
• a projection exposure apparatus 1 for microlithography that is illustrated highly schematically and in meridional section in Figure 1 has a radiation source 2 for illumination radiation 3.
• the radiation source is an EUV radiation source that generates light in a wavelength range of between 5 nm and 30 nm.
• This can be an LPP (Laser Produced Plasma) light source, a DPP (Discharge Produced Plasma) light source or a synchrotron-radiation-based light source, for example a free electron laser (FEL).
• LPP Laser Produced Plasma
• DPP discharge Produced Plasma
• FEL free electron laser
• a transfer optical assembly 4 For guiding the illumination radiation 3, proceeding from the radiation source 2, use is made of a transfer optical assembly 4.
• the latter has a collector 5, which is illustrated only with regard to its reflective effect in Figure 1, and a first facet mirror 6, which is also designated as transfer facet mirror or as field facet mirror or generally as first facet element.
• An intermediate focus ZF of the illumination radiation 3 is arranged between the collector 5 and the transfer facet mirror 6.
• a second facet mirror 7, which is also designated as second facet element, is disposed downstream of the first facet mirror 6 and thus the transfer optical assembly 4.
• the optical components 5 to 7 are parts of an illumination optical assembly 11 of the projection exposure apparatus 1.
• the illumination optical assembly 11 together with the radiation source 2 forms parts of an illumination system 20.
• the first facet mirror 6 is arranged in a field plane of the illumination optical assembly 11.
• the second facet mirror 7 can be arranged in or in the region of a pupil plane of the illumination optical assembly 11 and is then also designated as pupil facet mirror.
• the second facet mirror 7 of the illumination optical assembly 11 can also be arranged at a distance from the pupil plane or the pupil planes of the illumination optical assembly 11.
• specular reflector Such an embodiment is also designated as specular reflector.
• the arrangement of the second facet mirror 7 in a pupil plane is a special case of the specular reflector.
• specular reflector hereinafter is designated exclusively for an arrangement of the second facet mirror 7 at a distance from the pupil plane or the pupil planes of the illumination optical assembly 11.
• the general case, which is not restricted to a specific arrangement within the illumination optical assembly 11 is designated as second facet mirror 7 for the sake of simplicity.
• a reticle 12 is disposed downstream of the second facet mirror 7 in the beam path of the illumination radiation 3, said reticle being arranged in an object plane 9 of a downstream projection optical assembly 10 of the projection exposure apparatus 1.
• the projection optical assembly 10 and the projection optical assemblies of the further embodiments described below are in each case a projection lens.
• the illumination optical assembly 11 is used to illuminate an object field 8 on the reticle 12 in the object plane 9 in a defined manner.
• the object field 8 simultaneously constitutes an illumination field of the illumination optical assembly 11.
• the illumination field is formed in such a way that the object field 8 can be arranged in the illumination field.
• the second facet mirror 7 is part of a pupil illumination unit of the illumination optical assembly and serves for illuminating an entrance pupil of the projection optical assembly 10 with the illumination radiation 3 with a predefined pupil intensity distribution.
• the entrance pupil of the projection optical assembly 10 can be arranged in the illumination beam path upstream of the object field 8 or else downstream of the object field 8.
• said pupil plane can be imaged into the entrance pupil of the projection optical assembly 10 via a downstream transfer optical assembly.
• the illumination predefmition facet mirror 7 can also be arranged in the pupil plane of the entrance pupil of the projection optical assembly 10.
• a transfer optical assembly is not necessary and it is unimportant, in principle, whether the entrance pupil of the projection optical assembly 10 is arranged in the illumination beam path upstream of the object field 8 or downstream of the object field 8.
• a Cartesian xyz-coordinate system is used hereinafter.
• the x-direction runs perpendicularly to the plane of the drawing into the latter in Figure 1.
• the y-direction runs towards the right in Figure 1.
• the z-direction runs downwards in Figure 1.
• Coordinate systems used in the drawing have x-axes running parallel to one another in each case.
• the course of a z-axis of said coordinate systems follows a respective principal direction of the radiation 3 within the figure respectively under consideration.
• the y-direction is parallel to the scan direction in which the reticle 12 is scanned.
• the object field 8 has an arcuate or partly circular shape and is delimited by two mutually parallel circle arcs and two straight side edges which run in the y-direction with a length yo and are at a distance xo from one another in the x-direction.
• the aspect ratio xo/yo is 13 to 1.
• An insert in Figure 1 shows a plan view of the object field 8, this plan view not being true to scale.
• a boundary shape 8a is arcuate.
• the boundary shape thereof is rectangular, likewise with aspect ratio xo/yo-
• the projection optical assembly 10 is indicated only in part and highly schematically in Figure 1.
• An object field side numerical aperture 13 and an image field side numerical aperture 14 of the projection optical assembly 10 are illustrated.
• optical components 15, 16 of the projection optical assembly 10 which components can be embodied for example as mirrors that are reflective for the illumination radiation 3, there are situated further optical components - not illustrated in Figure 1 - of the projection optical assembly 10 for guiding the illumination radiation 3 between these optical components 15, 16.
• the projection optical assembly 10 images the object field 8 into an image field 17 in an image plane 18 on a wafer 19, which, like the reticle 12 as well, is carried by a holder (not illustrated in more specific detail). Both the reticle holder and the wafer holder are displaceable both in the x- direction and in the y-direction by means of corresponding displacement drives.
• the y-direction is, in particular, parallel to the scan direction.
• the first facet mirror 6 has a multiplicity of first facets 21i.
• the first facets 21i are displaceable into different displacement positions. They are also designated as switchable first facets 21i.
• the first facets 21i are formed in each case by a multiplicity of displaceable individual mirrors 31.
• the individual mirrors 31 are in particular micro mirrors, that is to say mirrors having an edge length in the micrometres range. However, the individual mirrors 31 can also have an edge length of up to a few millimetres.
• the individual mirrors 31 are embodied in particular as a micro electromechanical system (MEMS). They are embodied as a multi-mirror array (MMA) 32.
• MEMS micro electromechanical system
• MMA multi-mirror array
• the first facet mirror 6 can comprise in particular a multiplicity of modular MMAs 32.
• the individual mirrors 31 are in each case displaceable. They have in particular at least two degrees of freedom, in particular at least two degrees of freedom of tilting.
• the individual mirrors 31 and in particular the arrangement thereof in the multi-mirror array 32 reference should be made to DE 10 2011 006 100 Al .
• the first facets 21 are formed by a multiplicity of the individual mirrors 31. Virtual first facets are involved, in particular. The grouping of the individual mirrors 31 to form individual first facets 21 is flexibly variable. From the first facets 21;, a line having a total of nine first facets 21; is illustrated schematically in the yz-sectional view according to Figure 2, said first facets being designated from left to right by 211 to 219 in Figure 2. In actual fact, the first facet mirror 6 has a significantly greater number of facets 21i.
• an x/y aspect ratio of the first facets 6 is at least equal to the x/y aspect ratio of the object field 8.
• the first facets 6 can have an extent of 70 mm in the x-direction and of approximately 4 mm in the y-direction.
• the first facets 6 in each case guide a proportion of the illumination radiation 3 via an illumination channel for partial or complete illumination of the object field 8.
• the second facet mirror 7 comprises a multiplicity of second facets 25.
• the second facets 25 are displaceable. They have in particular at least two degrees of freedom of displacement, in particular at least two degrees of freedom of tilting.
• the second facet mirror 7 comprises a multi-mirror array 33 having a plurality of modular multi-mirror elements 34, which are also designated as bricks.
• the multi-mirror elements 34 are embodied in particular as MEMS, in particular as an
• MEMS-MMA Metal-Assisted Multi-mirrors
• Their structural construction can correspond to that of the multi-mirror elements of the first facet mirror 6, to the description of which reference is made.
• the second facets 25 are in particular virtual facets formed by a multiplicity of individual mirrors 35 of the multi-mirror elements 34.
• a plurality of the second facets 25 can be formed on a single one of the multi-mirror elements 34.
• the second facets 25 in particular do not extend beyond the edge of one of the multi-mirror elements 34.
• the multi-mirror elements 34 in each case comprise in particular a significant number of facets 25;. The subdivision of the multi-mirror elements 34 for forming the second facets 25 is described in even greater detail below.
• a respective one of the first facets 21; is assigned to a respective one of the second facets 25;.
• the desired assignment of the first facets 21; to the second facets 25; for defining the illumination channels is predefined in particular before the exposure of the wafer 19.
• the first facets 21 are aligned so as to bring about the illumination of the second facet mirror 7 with a predefined boundary shape and a predefined assignment of the first facets 21; to second facets 25; of the second facet mirror 7.
• WO 2010/099 807 A For further details of the embodiment of the second facet mirror 7 and of the projection optical assembly 10, reference is made to WO 2010/099 807 A.
• FIG. 2 One example of a predefined assignment of the first facets 21; to the second facets 25; is illustrated in Figure 2.
• the second facets 25; respectively assigned to the first facets 211 to 21 9 are indexed according to this assignment.
• the second facets 25 are illuminated from left to right on the basis of this assignment in the order 25 6 , 25s, 25 3 , 25 4 , 25i, 25 7 , 25 5 , 25 2 and 25g.
• the facets 21;, 25; having the indexes 6, 8 and 3 form three illumination channels VI, VIII and III.
• the indexes 5, 2 and 9 of the facets 21, 25 belong to three further illumination channels V, II, IX.
• the illumination of the object field 8 via the first facet mirror 6 and the second facet mirror 7 can be carried out in the manner of a specular reflector.
• the principle of the specular reflector is known from US 2006/0132747 Al .
• Some aspects of the illumination optical assembly 1 1, in particular of the facet mirrors 6, 7 and of the facets 21;, 25;, will be described again in different words below.
• the illumination optical assembly 11 is in particular a faceted illumination optical assembly 11 , in particular a doubly faceted illumination optical assembly 11. It serves for illuminating the object field 8 with illumination radiation 3 from the radiation source 2.
• the first facet mirror 6 can be arranged in a field plane, that is to say in a plane of the illumination optical assembly 11 that is conjugate with respect to the object field 8 to be illuminated.
• the first facets 21i are correspondingly also designated as field facets.
• the field facets 21 serve for imaging the intermediate focus ZF onto the respectively assigned second facets 25;.
• the second facets 25 serve for imaging the re- spective first facets 21; onto the reticle 12.
• the second facet mirror 7 can be arranged in a pupil plane of the illumination optical assembly 11. In this case, together with the first facet mirror 6 it forms a fly's eye condenser.
• the two facet mirrors 6, 7 need not necessarily be situated in planes which are conjugate with respect to a field and pupil plane, respectively, of the projection optical assembly 10.
• specular reflector designates in particular the arrangement in which the first facet mirror 6 is arranged in a field plane, but the second facet mirror 7 is not arranged in a pupil plane, but rather at a distance therefrom.
• the first facet mirror 6 comprises a multiplicity of individual mirrors 31 in the form of a multi-mirror array 32.
• the individual mirrors 31 are displaceable, in particular. This enables a flexible assignment of the first facets 21; to the second facets 25; for forming illumination channels, in particular for setting a predefined illumination setting.
• an illumination setting shall denote in particular the predefinition of an illumination angle distribution at the reticle 12, that is to say the predefinition of an illumination pupil.
• the second facets 25 respectively image the first facets 21; into the reticle 12.
• the second facets 25; are preferably switchable.
• the second facet mirror 7 comprises in particular a multiplicity of individual mirrors 35.
• the individual mirrors 35 are displaceable, in particular. They have in particular at least two degrees of freedom of displacement, in particular at least two degrees of freedom of tilting.
• the individual mirrors 35 of the second facet mirror 7 are embodied in particular as a multi-mirror element 34, which is also designated as a brick.
• the multi-mirror element 34 comprises a multiplicity of individual mirrors 35, in particular in the form of micro mirrors.
• the latter can be grouped flexibly to form second facets 25;, which, for their part, are therefore also designated as virtual facets.
• the images of the intermediate focus ZF on the second facet mirror 7 are chosen in such a way that they do not extend, or at any rate extend only slightly, beyond the edge of the assigned virtual second facet 25;, in particular beyond the edge of the multi-mirror element 34.
• the extent to which the images of the intermediate focus ZF can maximally project beyond the virtual second facets, in particular beyond the edge of the re- spective multi-mirror element 34 it is possible to predefine that the images of the intermedia focus ZF are permitted to project beyond the respective second facets 25;, in particular beyond the edge of the respective multi-mirror element 34, maximally to such an extent that at most 30%, in particular at most 20%, in particular at most 10%, in particular at most 5%, in particular at most 1%, of the illumination radiation 3 becomes situated outside the virtual second facet, in particular outside the envelope of the multi-mirror element 34, and therefore does not contribute to the illumination of the object field 8.
• the radiation source 2 can have a very high output power.
• the output power of the radiation source 2 can have in particular at least 100 W, in particular at least 300 W, in particular at least 500 W, in particular at least 1000 W, in particular at least 2000 W, in particular at least 3000 W. This can have the effect that the optical components of the illumination system 20 are subjected to severe thermal loading. This is the case, in particular, if the radiation source 2 has a large spectral bandwidth, as is the case for example for LPP and DPP radiation sources.
• a high thermal load can occur in particular in the region of the second facets 25;, in particular in the region of the individual mirrors 35 which form the second facets 25;, which thermal load must be dissipated by the respective facets 25;, in particular the individual mirrors 35 thereof.
• the thermal loading in particular the mean thermal loading and/or the maximum thermal loading, of the individual mirrors 35 does not exceed a predefined maximum value. In particular the risk of permanent damage can be reduced as a result.
• a given intensity distribution 36 in the intermediate focus ZF is imaged by the individual mirrors 31 of one of the first facets 21; onto the associated second facet 25;, in particular onto the individual mirrors 35 thereof.
• each of the individual mirrors 31 of the first facet 21 images the intensity distribution 36 of the intermediate focus ZF onto the second facet 25;.
• the intensity distribution 37 has a maximum I*.
• the mean intensity of the illumination radiation 3 in the region of the second facet 25; is indicated schematically and designated by I m . This has the effect that the individual mirror or individual mirrors 35*, situated precisely in the region of the maximum I* of the intensity distribution 37, are impinged on with a significantly higher intensity and, associated therewith, with a significantly higher thermal load than the other individual mirrors 35, in particular the individual mirrors 35 at the edge of the second facet 25;.
• the image of the intermediate focus ZF that is to say the image of the radiation source 2, on the second facets 25; is composed of many individual images
• the principle according to the invention is illustrated schematically in Figure 4.
• the initial situation illustrated schematically in Figure 4 corresponds to that illustrated in Figure 3.
• the maximum intensity I* of the intensity distribution 37 of the illumination radiation 3 in the region of the second facet 25 is considerably reduced, while the mean intensity I m remains substantially constant.
• the maximum of the power density of the illumination radiation 3 on the virtual second facets 25 can be greatly reduced, without more than a predefined maximum permissible proportion of the illumination radiation 3 being lost in the process via the edge of the virtual second facet 25;, in particular via the edge of the group of the individual mirrors 35 which form the second facet 25;, in particular via the edge of the multi-mirror element 34.
• Figure 5 schematically shows the plan view of a group of individual mirrors 35 which form one of the second facets 25;.
• the individual mirrors 35 are parts of one of the multi-mirror elements 34.
• the arrangement of the second facets 25; on the multi-mirror elements 34 is described in even greater detail below.
• Figure 5 schematically depicts iso intensity lines 38 which characterize the intensity distribution 37. In this case, the ratio with respect to the maximum of the intensity I* in the region of the respective second facet 25; in per cent is indicated numerically for each of the iso intensity lines 38.
• the radiation power reflected overall by the second facets 25; is proportional to the sum of the intensity values indicated in Figure 7.
• Figures 6 and 8 reproduce representations corresponding to those in Figures 5 and 7 for the situation illustrated schematically in Figure 4.
• the normalization in Figure 6 corresponds precisely to that in Figure 5
• the normalization in Figure 8 corresponds precisely to that in Figure 7.
• the maximum intensity averaged over the individual mirrors 35 was able to be reduced by 37% by means of a tilting of the individual mirrors 3 1 of the first facet 21 i and a resultant shift in the images of the intermediate focus ZF in the region of the second facet 25; relative to one another.
• the associated loss of radiation power was able to be limited to less than 10%.
• the geometrical transmission T ge0 m should be understood to mean the ratio of the energy which impinges on the second facets 25; and the total energy of the assigned intermediate focus images.
• the maximum pos- sible value of T ge0 m is always less than 1. A further reduction of this value arises in the case of a shift of the images of the intermediate focus ZF, since part of the illumination radiation 3 falls off laterally at the edge of the second facet 25; as a result.
• Figure 9 illustrates by way of example the case where the second facet 25; is formed by a group- ing of 8 x 8 individual mirrors 35 on the multi-mirror element 34.
• the virtual second facet 25 has a size of 5.5 x 5.5 mm 2 .
• the virtual second facet 25 was formed by a grouping of 12 x 12 individual mirrors 35 on the multi-mirror element 34. It had an area of 7 x 7 mm 2 .
• the respective upper edge of the figures represents the case where all the images of the interme- diate focus ZF on the respective second facet 25; are arranged in a centred manner.
• the top right corners are white because for a given source size there is no realization with transmission of corresponding magnitude since too much energy already is incident between the micro mirrors or lies beyond the virtual facets 25.
• This effect can be reproduced in Figures 9 and 10 as movement parallel to the y-axis in the direction of descending values.
• the potential of the method according to the invention is dependent on the size of the images of the intermediate focus ZF in the region of the second facets 25;, in particular on the full width at half maximum ⁇ of the intensity distribution 37.
• larger radiation sources show less potential if the loss of radiation is intended to be kept small.
• a shift of the images of the intermediate focus ZF on the virtual second facets 25 is not necessarily provided for all the illumination channels.
• Such a shift is provided in particular only for the illumination channels which lead to a maximum intensity on at least one of the individual mirrors 35 which is above a predefined permissible maximum value Imax, that is to say leads to an impermissibly high thermal loading of said individual mirrors 35.
• Imax a predefined permissible maximum value
• a shift does not have to take place in the same way for all the illumination settings.
• the multi-mirror elements 34 are intended to be covered with virtual second facets 25; in as uninterrupted a manner as possible.
• the possi- bilities of the representable virtual second facets 25 can be designated as irreducible in accordance with the representation theory of finite-dimensional groups.
• the number of lines and/or columns of the individual mirrors 35 of the multi-mirror element 34 is chosen in such a way that this is not the case, that is to say that the possibilities of the grouping of the indi- vidual mirrors 35 to form virtual facets 25; has a reducible representation.
• the number of lines and/or columns is chosen, in particular, in such a way that they have a particularly high number of devisors. This increases the flexibility in the uninterrupted division of the multi-mirror array, particularly in the division into identical partial fields.
• the number of lines and/or columns is in particular 12, 18, 20, 24, 28, 30, 32, 36, 40, 42, 44, 45, 48 or 60.
• the values 12, 24, 36, 48 or 60 are particularly preferred. These are in each case the smallest integers which have at least 6, 8, 9, 10 and 12 devisors, respectively.
• a finer coordination of the size of the virtual second facets 25; can be achieved by permitting non-square shapes thereof.
• the illumination channels have a larger pupil extent in the scanning direction anyway on account of the scan process. They are therefore also designated as rod pupils.
• the multi-mirror element 34 in accordance with Figure 11 is a brick having 24 x 24 individual mirrors 35 in the form of micro mirrors.
• the individual mirrors 35 can in each case have dimensions of 0.6 x 0.6 mm 2 .
• the distance between adjacent individual mirrors 35 is 0.04 mm.
• the multi-mirror element 34 comprises four lines each having six square virtual second facets 25; ,which are formed in each case from 4 x 4 indiviual mirrors 35. Two lines having rectangular, non-square virtual facets 25; having the size of 4 x 6 individual mirrors 35 are arranged in the centre between in each case two lines having the square facets 25;.
• Such a division is advantageous particularly if precisely the central virtual facets 25;, on account of their position on the second facet mirror 7 of a specular reflector, have to illuminate particu- larly large partial fields in the object field 8 and are therefore subjected to severe thermal loading.
• the facets 25; can be larger in a central region of the second facet mirror 7, in particu- lar in a central region of the pupil, than in an edge region.
• the facets 25; of the second facet mirror 7 can have different sizes. In particular, they are larger in a first region of the second facet mirror 7 than in a second region.
• the size difference is in particular at least 10%, in particular at least 30%, in particular at least 50%, in particular at least 100%, of the size of the smallest facet 25; of the second facet mirror 7.
• Figure 12 illustrates by way of example the image of the pupil in the object field 8.
• the individual pupil spots 39 are embodied in an elongate, rod- shaped fashion.
• the pupil spots 39 are not situated on a regular grid.
• the invention provides for all of the virtual facets 25; having a substantially identical y-coordinate to be classified substantially identically. A field dependence of the pupil can be avoided as a result.
• Figures 11 and 12 illustrate an illumination of each of the virtual second facets 25; by in each case three images of the intermediate focus ZF.
• the actual number of images of the intermediate focus ZF on each of the virtual second facets 25 can be significantly higher.
• the images of the intermediate focus ZF are shifted relative to one another in the x-direction, that is to say offset relative to one another.
• the offset is to a lesser extent than in the case of the central, larger, rectangular, non-square facets 25;.
• Isointensity lines 38 are once again depicted for clarifying the images of the intermediate focus ZF.
• the numerical values reproduced in Figure 11 indicate in each case the intensity in per cent of the maximum intensity.
• Figure 12 illustrates one of the poles of a y-dipole for a classification of the multi-mirror element 34 into virtual facets 25; in accordance with Figure 11.
• the rectangular facets 25; in the centre of the multi-mirror element 34 have the effect that the rod-shaped pupil spots 39 are situated further apart in a central region of the pole, in particular where its x-extent is the largest. Thus, the intensity is reduced there as well.
• the pupil spots 39 that belong to the respective individual mirrors 31 are shifted relative to one another in the y-direction.
• pupil spots 39 offset in the x-direction arise which jointly act like a rotated rod, that is to say have a rod-shaped, rotated envelope.
• the direction of rotation was adapted such that it is oriented to the shape of the pole. As a result, it was possible to improve the filling of the pole.
• the central rods are rotated in particular to a greater extent since the associated images of the intermediate focus ZF on the virtual second facets 25; are shifted to a greater extent in the x-direction.
• the shift in the y-direction and the shape of the individual pupil spots 39 are identical at all points.
• the images of the intermediate focus ZF on the virtual second facets 25; are identical in each case.
• the size of the first facets 21; and of the individual mirrors 31 thereof is also identical in each case.
• a homocentric pupil is involved.
• the radiation source 2 moves in such a way that the outermost one of the images of the intermediate focus ZF on one side of the virtual second facet 25; slips further over the edge thereof and illumination radiation 3 for illuminating the object field 8 is lost as a result, then at the same time the image of the intermediate focus ZF on the opposite side of the second facet 25; is captured to a greater extent.
• the power of the illumination radiation 3 that is reflected by two individual mirrors 31 of one of the first facets 21; which are imaged adjacently into the reticle 12 is substantially identical. They are assigned to one of the second facets 25;, in particular pivoted, in particular in such a way that the respective changes in the intensity in the region of said second facet 25; upon a movement of the radiation source 2 substantially mutually cancel one another out.
• a particu- larly smooth course of the intensity profile, in particular a particularly homogeneous illumination of the reticle 12, can be achieved as a result.
• the effect of an undesirable, highly disturbing local dose error can be reduced, in particular avoided.
• a further possibility would be to choose the shift of the individual images of the intermediate focus ZF on the vertical second facets 25; in such a way that the length of the rod-shaped pupil spots 39 is reduced.
• the resulting rod- shaped pupil spots can be rotated in such a way that they have an orientation tangential to the pupil boundary at least at the edge of the pupil.
• the individual images are shifted only slightly relative to one another. It may even be pos- sible to completely dispense with a shift.
• the images for the second facets 25; which are illuminated by very many and/or very high- intensity first individual mirrors 31 are shifted relative to one another to a correspondingly greater extent.
• the resultant systematic, long-wave variations in the object field 8 or in the pupil in particular an increase in the energy at the edge of the object field 8 or the pupil, can be compensated for, for example, by switching on or off, that is to say pivoting, the individual mirrors 31 of the first facets 21; and/or by means of an adapted channel assignment.

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