WO2016011779A1 - 蒸发镀膜装置 - Google Patents

蒸发镀膜装置 Download PDF

Info

Publication number
WO2016011779A1
WO2016011779A1 PCT/CN2014/095378 CN2014095378W WO2016011779A1 WO 2016011779 A1 WO2016011779 A1 WO 2016011779A1 CN 2014095378 W CN2014095378 W CN 2014095378W WO 2016011779 A1 WO2016011779 A1 WO 2016011779A1
Authority
WO
WIPO (PCT)
Prior art keywords
evaporation
heating
hollow sleeve
crucible
vapor deposition
Prior art date
Application number
PCT/CN2014/095378
Other languages
English (en)
French (fr)
Inventor
赵德江
王路
藤野诚治
Original Assignee
京东方科技集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/768,587 priority Critical patent/US9945025B2/en
Priority to EP14882152.3A priority patent/EP3173506B1/en
Publication of WO2016011779A1 publication Critical patent/WO2016011779A1/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Definitions

  • Embodiments of the invention relate to an evaporation coating apparatus.
  • evaporation The technique of heating, evaporating, and plating an organic material onto a substrate in a vacuum environment is called an evaporation coating technique (referred to as evaporation). This technology is favored by technicians in the industry for its wide application range and low pollution level.
  • the wire source is commonly used in the heating source during the evaporation coating process, and the wire source is usually a heating wire, which can improve the coating efficiency and the utilization rate of the material.
  • a known process for applying a wire source based evaporation coating technique to an OLED (Organic Light-Emitting Diode) product includes: loading an organic material into a crucible that matches the size of the substrate, by wrapping or pasting The heating wire attached to the periphery of the crucible heats the organic material in the crucible, and after heating, the material is uniformly evaporated to the surface of the substrate on the upper side of the crucible through a plurality of evaporation holes at the top of the crucible to complete the coating operation of the substrate in the OLED product.
  • At least one embodiment of the present invention provides an evaporation coating apparatus including a heating body and a columnar body located inside the heating body, wherein the columnar body includes a hollow sleeve and a cylinder that fits within the hollow sleeve
  • the surface of the cylinder body is provided with a groove, the groove extends along the axial center line direction of the cylindrical body, and a plurality of compartments are arranged in the groove;
  • the top end of the hollow sleeve is provided a first evaporation hole;
  • each of the compartments is provided with a crucible, the crucible includes an open end, a sealed body, and a cover coupled to the body, the body being located in the compartment And the cover is provided with a second evaporation hole corresponding to the first evaporation hole;
  • the outer surface of the hollow sleeve is provided with an inner heating wire, the inner heating wire is connected with a control unit; and the heating The body is a hollow columnar structure, and an outer
  • the hollow sleeve is a cylindrical structure having a circular cross section, the columnar structure is continuous at both ends in an axial direction; the cylindrical body has a U-shaped cross section, and the compartment is in the An equidistant, uniform arrangement within the recess; and the compartment is defined by a baffle disposed within the recess that is parallel to an axial centerline of the barrel.
  • the cross section of the crucible is circular, and the cross section of the body is a U-shaped structure conforming to the cross section of the barrel; and a plurality of the first evaporation holes are along the column shape
  • the longitudinal centerline directions of the bodies are arranged in rows.
  • the second evaporation hole is located at an outer side surface of the cover and adjacent to a top end of the cover; the first evaporation hole is located at an outer side surface of the hollow sleeve and adjacent to the The top of the hollow sleeve is placed.
  • a region of the inner side wall of the barrel corresponding to the compartment is provided with a condensation tube.
  • the nozzle is cylindrical and a plurality of the nozzles are arranged in a row along the longitudinal direction of the heating body.
  • the upper end side of the heating body is further provided with a shutter.
  • two of the shutters are disposed obliquely on opposite sides of the nozzle.
  • the inner heating wire is uniformly wound around an outer surface of the hollow sleeve and corresponds to a position of the weir; the outer heating wire is uniformly wound around an outer surface of the heating body.
  • the evaporation coating device further includes a crystal oscillation sensing member connected to the control unit at a position corresponding to the compartment or a region corresponding to between the two of the compartments; and the crystal oscillator The sensing member is used to detect the rate of evaporation coating.
  • FIG. 1 is a schematic structural view of an evaporation coating device according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural view of a hollow sleeve of a columnar body in an evaporation coating device according to an embodiment of the present invention
  • FIG. 3 is a schematic structural view of a cylindrical body of a columnar body in an evaporation coating device according to an embodiment of the present invention
  • FIG. 4 is a top view of a cylindrical body of a columnar body in an evaporation coating device according to an embodiment of the present invention
  • FIG. 5 is a schematic structural view of a crucible in an evaporation coating device according to an embodiment of the present invention.
  • FIG. 6 is a schematic structural view of primary vapor deposition in an evaporation coating device according to an embodiment of the present invention.
  • 1-columnar; 1'-groove; 11- is a compartment; 111-separator; 12-cylinder; 13-hollow sleeve; 131-first evaporation hole; 2- ⁇ ; 21-body; Cover; 221-second evaporation hole; 3-heating body; 31-nozzle; 4-internal heating wire; 5-external heating wire; 6-organic material; 7-condensing tube; 8--shield; Pieces.
  • An evaporation coating apparatus includes a heating body 3 and a columnar body 1 located inside the heating body 3.
  • the columnar body 1 includes a hollow sleeve 13 and a cylindrical body 12 which is sleeved in the hollow sleeve 13 and has a groove 1' on the surface thereof; the groove 1' extends along the axial center line direction of the cylindrical body 12, and is concave.
  • a plurality of compartments 11 are disposed in the slot 1'; a first evaporation hole 131 is disposed in a top end region of the hollow sleeve 13; a ⁇ 2 is disposed in each compartment 11 of the cylinder 12, and each cymbal 2 includes an open end a surrounding body 21 and a cover 22 coupled to the body 21, and the cover 22 is provided with a second evaporation hole 221 corresponding to the first evaporation hole 131; the outer surface of the column 1 is provided with an inner heating wire 4 The inner heating wire 4 is connected to the control unit.
  • the heating body 3 has a hollow columnar structure, and is provided with an outer heating wire 5 and a nozzle 31 corresponding to the first evaporation hole 131.
  • the independent inner heating wire disposed at the corresponding position of the column outer surface and the plurality of compartments in the cylindrical groove is controlled by the control unit to respectively respectively respectively
  • the plurality of crucibles in the compartments are heated, so that the organic material in the crucible body is evaporated by heat, sequentially passes through the second evaporation holes on the crucible cover, and the first evaporation holes on the hollow sleeve of the column body are evaporated and distributed in the heating.
  • the organic material in the heating body is heated again by heating the external heating wire provided on the outer surface of the body, and the secondary heated organic material is uniformly distributed to the substrate through the nozzle provided on the heating body corresponding to the first evaporation hole, Thereby the coating operation is completed. Since the heating temperature of the heating wire in each corresponding crucible can be individually controlled, it can be ensured that each crucible is heated the same, so that the organic material at different positions of the corresponding substrate can be uniformly heated and evaporated; and since the outer heating wire is partitioned The evaporated organic material is further subjected to secondary heating and emission, so that the organic material can be recombined and concentrated in a second time, thereby further improving the uniformity of film formation on the surface of the substrate. Thereby, the problem that the uniformity of film formation of the organic material on the surface of the substrate due to the longer and longer wire source for heating can be solved in the prior art.
  • FIG. 1 and FIG. 6 only show a partial structure at a ⁇ position, and the evaporation coating device provided by the embodiment of the present invention is composed of a plurality of parts of the same structure shown in FIG. 1; 2 - 4 also shows only the hollow sleeve of the columnar body and the partial structure of the cylinder.
  • the specific specifications of the evaporation coating device need to be adjusted according to different production conditions.
  • the number of cylinder compartments of the columnar body shown in the drawing and the distance between adjacent compartments are also merely exemplary. In practical applications, reasonable design is required to ensure that the distribution of the compartments does not affect. Formation of a film in a coating process.
  • the hollow sleeve 13, the cylinder 12, the heating body 3, and the inner and outer heating wires 4, 5 may be made of materials such as tungsten, molybdenum, niobium, etc., such as tungsten strands, but the invention is not limited thereto. .
  • the hollow sleeve 13 of the columnar body 1 may have a circular cross section.
  • the columnar structure is penetrated at both ends in the axial direction, thereby facilitating insertion of the cylinder 12 containing the plurality of crucibles 2 into the hollow sleeve 13.
  • the cross section of the cylinder 12 may be U-shaped, that is, the upper end of the cylinder 12 is an open structure; Insertion and removal in the barrel 12.
  • the present invention is not limited thereto, and the columnar body 1 may have other structures, for example, the cross section of the cylindrical body 12 may be an open rectangular structure or the like.
  • the cross section of the crucible 2 may have a circular structure, for example, the body 21 and the cover 22 may be included.
  • the cross section of the body 21 of the crucible 2 may be a U-shaped structure conforming to the cross section of the cylinder 12, thereby securing the body 21 and the cylinder of the columnar body 1 when the body 21 is placed in the compartment 11. Good contact between 12, thus ensuring good thermal conductivity and fixed stability between the two.
  • the body 21 of the crucible 2 and the cover 22 may be hingedly connected, so that when the organic material 6 needs to be added to the crucible 2, it is only necessary to open the cover. 22 is easy to operate.
  • the body 21 of a single crucible and its cover 22 may be made of a ceramic material such as boron nitride or alumina. Of course, the invention is not limited thereto.
  • the first evaporation holes 131 on the hollow sleeve 13 of the columnar body 1 may be provided in plurality and may be along the center of the columnar body 1.
  • the line directions are arranged in rows.
  • the compartment 11 (the portion indicated by the thick line in FIG. 4) is The grooves 1' may be arranged equidistantly and evenly spaced apart; however, the present invention is not limited thereto, and the specific arrangement of the compartments 11 may be appropriately adjusted according to actual production conditions and the like.
  • each of the compartments 11 may be defined by two partitions 111 disposed parallel to the cross section of the cylinder 12 (as shown by the thick lines in FIG. 3).
  • the cover 22 may be a curved cover structure having an open bottom surface and a three-sided seal. As shown in FIG. 5, the side surrounded by the thick line and the side symmetric thereto are sealed, thereby making the cover The portion where the cover 22 is in contact with the body 21 is a closed structure. In one example, in order to save cost, the cover 22 may also be a curved cover that is open on three sides and has only one side sealed. As shown in FIG. 5, the side surrounded by the thick lines and the side symmetric thereto and the bottom surface of the cover 22 All are open structures.
  • the second evaporation hole 221 may be located on a side surface of the cover 22 and disposed adjacent to the top end of the cover 22.
  • the evaporation holes 221 of each crucible 2 may be set to eight in total, arranged in two rows, four in each row, and the two rows of evaporation holes 221 are respectively located in the cover.
  • the two side surfaces of the cover 22 are adjacent to the top end of the cover 22; correspondingly, the first evaporation hole 131 on the columnar body 1 may be located on the side surface of the hollow sleeve 13 and adjacent to the top end of the hollow sleeve 13; the first evaporation hole
  • the number and distribution of 131 may correspond to the second evaporation holes 221, and are set at 4*2. This arrangement allows the organic material 6 evaporated from the crucible 2 and the columnar body 1 to be more uniformly and sufficiently diffused and distributed in the upper region of the heating body 3 to achieve a better dispersion effect.
  • the area corresponding to the compartment 11 on the inner side wall of the cylindrical body 12 of the cylindrical body 1 may be provided with a condensation tube 7;
  • the evaporation temperature of the organic material 6 is smoothly maintained within a reasonable range by the warming action of the inner heating wire 4 disposed at the position of the outer surface of the columnar body 1 corresponding to the compartment 11 and the cooling effect of the cooling tube 7 described above. .
  • a recess can be provided on the inner side wall of the barrel 12 and the condensing tube 7 can be placed in the recess, which prevents the condensing tube 7 from obstructing the placement of the raft 2 within the compartment 11, i.e., the condensing tube 7 is located between the crucible 2 and the columnar body 1.
  • the specific number and placement position of the condensation tube 7 in the embodiment of the present invention can be flexibly set according to actual needs.
  • the condenser tubes 7 are two, for example, respectively located at both sides of the center of the barrel 12.
  • the nozzle 31 on the heating body 3 may be cylindrical, and may be provided in plurality, for example, in the first evaporation hole 131 corresponding to the columnar body 1.
  • Six nozzles 31 are disposed at positions; and the plurality of nozzles 31 are disposed in a row and at equal intervals along the extending direction of the heating body 3; thereby causing the organic material 6 in the crucible 2 to evaporate by heating of the inner heating wire 4, and from The first and second evaporation holes (131, 221) are diffused into the heating body 3, further uniformly distributed by the secondary heating evaporation of the outer heating wire 5, and finally uniformly evaporated from the nozzle 31 onto the surface of the substrate.
  • the upper end side of the heating body 3 may further be provided with a shutter 8.
  • the shutter 8 may be a heat radiation prevention panel; for example, the shutter 8 may be provided at two sides, respectively, on both sides of the nozzle 31 and are disposed obliquely; in addition, the two shutters 8 are provided. There is a gap therebetween to avoid occluding the nozzle 31 so that the organic material 6 diffused out of the nozzle 31 can smoothly evaporate through the gap onto the surface of the substrate.
  • the inner heating wire 4 is uniformly wound around the outer surface of the hollow sleeve 13 of the columnar body 1, and each winding section and the cylinder body thereof
  • the position of the inner crucible 2 corresponds to 12; the outer heating wire 5 is evenly wound around the outer surface of the heating body 3.
  • the inner heating wire 4 may be wound in such a manner as to be attached to the outer surface of the hollow sleeve 13 Wrap around, or surround the outer surface with a gap with the surface of the hollow sleeve 13; similarly, the outer heating wire 5 can be wound in the manner of fitting the outer surface of the heating body 3, or with the heating body 3
  • the outer surface surrounds the outer surface in the form of a gap. Fitting and winding can save space, and the gap winding can transfer heat evenly. In practical application, according to different evaporation conditions, one of the winding methods can be appropriately selected or two ways can be combined to achieve the best steaming. Plated state.
  • the inner heating wire 4 is heated to both the columnar body 1 and the crucible 2.
  • the provided evaporation coating device may further comprise a crystal induction member 9 connected to the control unit; the crystal oscillation sensing member 9 is configured to detect the rate of evaporation coating, thereby discriminating the uniformity of the evaporation coating and feeding back to the control unit, so that the control unit can be combined
  • the heating temperature of the inner heating wire 4 is controlled and adjusted to further control and adjust the rate and uniformity of the evaporation coating to ensure the uniformity of film formation of the entire substrate.
  • the crystal oscillation sensing member 9 may be provided only at a position corresponding to the compartment 11.
  • the implementation and working principle of the crystal oscillator are well-known in the art, and are not limited or described herein.
  • the organic material 6 is separately added to a plurality of crucibles 2, and then these crucibles 2 are respectively loaded into the compartments 11 of the cylinder 12 of the columnar body 1; then, the cylinders 12 carrying the crucibles 2 are entirely inserted into the columnar shape.
  • the columnar body 1 is further connected to the heating body 3 as a whole, and then the inner heating wire 4 is controlled by the control unit 2 to heat the columnar body 1 and the crucible 2,
  • the organic material 6 is evaporated and sequentially passed through the first evaporation hole 131 and the second evaporation hole 221 and then diffused and distributed inside the heating body 3; finally, the heating body 3 is heated by the external heating wire 5 to cause the evaporated organic material 6 to proceed.
  • the second uniform evaporation is diffused and uniformly evaporated to the surface of the substrate through the nozzle 31.
  • the entire columnar body 1 has a temperature retention, thereby preventing the organic material 6 from being deposited on the surface of the columnar body 1; the heating body 3 also has a temperature retention, thereby preventing the organic material 6 from condensing and blocking the nozzle 31.
  • the evaporation coating device heats and evaporates the organic material, and concentrates on secondary evaporation and diffusion, and simultaneously controls the evaporation rate as a whole, and improves the film formation of the evaporation process. Uniformity;
  • the replacement of the column can be replaced by the replacement of the columnar body, which is convenient to operate and saves space, thereby reducing maintenance time and reducing operating costs.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明公开了一种蒸发镀膜装置，包括：加热体（3）以及位于加热体（3）内部的柱状体（1），其中，所述柱状体（1）包括中空套筒（13）以及配合套设在中空套筒（13）内的筒体（12），所述筒体（12）表面设有凹槽（1'），所述凹槽（1'）沿所述筒体（12）的轴向中心线方向延伸，且所述凹槽（1'）内间隔设有多个隔间（11）；所述中空套筒（13）顶端区域设有第一蒸发孔（131）；每一所述隔间（11）处设有坩埚（2），所述坩埚（2）包括一端敞口、四周密封的本体（21）以及与所述本体（21）配合连接的盖罩（22），所述本体（21）位于所述隔间（11）内，并且所述盖罩（22）上设有与所述第一蒸发孔（131）相对应的第二蒸发孔（221）；所述中空套筒（13）外表面设有内加热丝（4），所述内加热丝（4）连接有控制单元。所述加热体（3）为中空柱状结构，且其外表面上设有外加热丝（5）以及与所述第一蒸发孔（131）相对应的喷嘴（31）。本发明主要用于大尺寸显示器的制作，可提高有机材料在基板表面成膜的均一性。

Description

蒸发镀膜装置 技术领域
本发明的实施例涉及蒸发镀膜装置。
背景技术
在真空环境中将有机材料加热、蒸发并镀到基板上的技术称为蒸发镀膜技术(简称蒸镀)。该技术凭借应用范围广、污染程度小等优点而被业内的技术人员所青睐。
蒸发镀膜工艺过程中的加热源普遍使用线源，线源通常为加热丝，可以提高镀膜效率和材料的利用率。已知的一种将基于线源的蒸发镀膜技术应用于OLED(Organic Light-Emitting Diode，有机发光二极管)产品中的工艺包括：将有机材料装入与基板尺寸匹配的坩埚内，通过环绕或贴合在坩埚外围的加热丝对坩埚内的有机材料进行加热，材料经加热后通过坩埚顶端的多个蒸发孔均匀蒸发到坩埚上侧的基板表面上以完成OLED产品中基板的镀膜操作。
如今，OLED产品正在朝大尺寸方向发展，导致其基板的尺寸越来越大，对应的坩埚尺寸也变大，从而使加热用的线源也越来越长。因此，对于大尺寸基板，线源的温度均一控制等难度增加，使有机材料在基板表面成膜的均一性变差。
发明内容
本发明的至少一个实施例提供一种蒸发镀膜装置，包括加热体以及位于所述加热体内部的柱状体，其中，所述柱状体包括中空套筒以及配合套设在中空套筒内的筒体，所述筒体表面设有凹槽，所述凹槽沿所述筒体的轴向中心线方向延伸，且所述凹槽内间隔设有多个隔间；所述中空套筒顶端区域设有第一蒸发孔；每一所述隔间处设有坩埚，所述坩埚包括一端敞口、四周密封的本体以及与所述本体配合连接的盖罩，所述本体位于所述隔间内，并且所述盖罩上设有与所述第一蒸发孔相对应的第二蒸发孔；所述中空套筒外表面设有内加热丝，所述内加热丝连接有控制单元；并且所述加热体为中空柱状结构，其外表面上设有外加热丝以及与所述第一蒸发孔相对应的喷嘴。
在一个示例中，所述中空套筒为圆形截面的柱状结构，所述柱状结构沿轴向方向是两端贯通的；所述筒体的横截面为U型，所述隔间在所述凹槽内等距、均匀排布；并且所述隔间由设置在所述凹槽内的、平行于所述筒体的轴向中心线的隔板界定。
在一个示例中，所述坩埚的横截面为圆形，并且所述本体的横截面为与所述筒体的横截面相符的U型结构；并且多个所述第一蒸发孔沿所述柱状体的纵向中心线方向成排设置。
在一个示例中，所述第二蒸发孔位于所述盖罩的外部侧表面并且临近所述盖罩的顶端设置；所述第一蒸发孔位于所述中空套筒的外部侧表面并且临近所述中空套筒的顶端设置。
在一个示例中，所述筒体的内侧壁上对应于所述隔间的区域设有冷凝管。
在一个示例中，所述喷嘴为圆柱状，且多个所述喷嘴沿所述加热体的纵向成排设置。
在一个示例中，所述加热体上端侧还设有遮板。
在一个示例中，两个所述遮板倾斜设置于所述喷嘴两侧。
在一个示例中，所述内加热丝均匀缠绕在所述中空套筒的外表面且与所述坩埚的位置相对应；所述外加热丝均匀缠绕在所述加热体的外表面。
在一个示例中，在对应于所述隔间或对应于两个所述隔间之间的区域的位置处，所述蒸发镀膜装置还包括与所述控制单元连接的晶振感应件；并且所述晶振感应件用于检测蒸发镀膜的速率。
附图说明
以下将结合附图对本发明的实施例进行更详细的说明，以使本领域普通技术人员更加清楚地理解本发明，其中：
图1为本发明实施例提供的蒸发镀膜装置的结构示意图；
图2为本发明实施例提供的蒸发镀膜装置中柱状体的中空套筒结构示意图；
图3为本发明实施例提供的蒸发镀膜装置中柱状体的筒体结构示意图；
图4为本发明实施例提供的蒸发镀膜装置中柱状体的筒体俯视图；
图5为本发明实施例提供的蒸发镀膜装置中坩埚的结构示意图；
图6为本发明实施例提供的蒸发镀膜装置中一次蒸镀的结构示意图。
附图标记：
1-柱状体；1′-凹槽；11-为隔间；111-隔板；12-筒体；13-中空套筒；131-第一蒸发孔；2-坩埚；21-本体；22-盖罩；221-第二蒸发孔；3-加热体；31-喷嘴；4-内加热丝；5-外加热丝；6-有机材料；7-冷凝管；8-遮板；9-晶振感应件。
具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。
除非另作定义，此处使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开专利申请说明书以及权利要求书中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。同样，“一个”或者“一”等类似词语也不表示数量限制，而是表示存在至少一个。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系，当被描述对象的绝对位置改变后，则该相对位置关系也相应地改变。
本发明的一个实施例提供的蒸发镀膜装置如图1-图6所示，包括加热体3以及位于加热体3内的柱状体1。柱状体1包括中空套筒13以及配合套设在中空套筒13内的、表面设有凹槽1′的筒体12；凹槽1′沿筒体12的轴向中心线方向延伸，且凹槽1′内间隔设有多个隔间11；中空套筒13顶端区域设有第一蒸发孔131；筒体12的每个隔间11内设有一坩埚2，每个坩埚2包括一端敞口、四周密封的本体21以及与本体21配合连接的盖罩22，且盖罩22上设有与第一蒸发孔131相对应的第二蒸发孔221；柱状体1外表面设有内加热丝4，该内加热丝4连接有控制单元。加热体3为中空柱状结构，其上设有有外加热丝5以及与第一蒸发孔131相对应的喷嘴31。
本发明实施例提供的蒸发镀膜装置中，通过控制单元控制间隔设置在柱状体外表面与筒体凹槽内多个隔间相对应位置处的独立的内加热丝来分别对筒体凹槽中多个隔间内的多个坩埚进行加热，使坩埚本体内的有机材料受热蒸发、依次通过坩埚盖罩上的第二蒸发孔及柱状体中空套筒上的第一蒸发孔蒸发出来并分布在加热体内；通过加热体外表面设置的外加热丝对加热体内的有机材料再次整体进行加热，并使二次加热的有机材料通过加热体上与第一蒸发孔对应设置的喷嘴均匀地散发到基板上，从而完成镀膜操作。由于可以单独控制每个对应坩埚处内加热丝的加热温度，可以保证每个坩埚受热相同，从而使对应基板的不同位置处的有机材料都可以均匀受热蒸发；并且由于通过外加热丝对已分区蒸发过的有机材料再整体进行二次加热散发，使有机材料可以二次重组并集中扩散，进一步提高有机材料在基板表面成膜的均一性。由此，可以解决现有技术中因加热用线源越来越长而导致的有机材料在基板表面成膜的均一性变差的问题。
此处需要说明的是，图1和图6中仅示出了一个坩埚位置处的局部结构，本发明的该实施例提供的蒸发镀膜装置由若干个相同结构的图1所示部分构成；图2-图4也仅示出了柱状体的中空套筒及筒体的局部结构，实际应用时，蒸发镀膜装置的具体规格需根据不同的生产情况进行调整。另外，附图中示出的柱状体的筒体内隔间的数量以及相邻隔间之间的距离也仅为示例性的，在实际应用中需要合理进行设计以保证隔间的分布不会影响镀膜工艺中膜的形成。在一个示例中，上述中空套筒13、筒体12、加热体3以及内、外加热丝4、5分别可由钨，钼，钽等材料制成，例如钨绞丝，但本发明不限于此。
在一个示例中，为了方便将多个坩埚2在一次操作中整体放入加热体3内并保证放置的稳固性，如图2所示，柱状体1的中空套筒13可以为圆形截面的柱状结构，且该柱状结构沿轴向方向是两端贯通的，从而方便将装有多个坩埚2的筒体12插入中空套筒13中。
在一个示例中，为了节约成本、减少用料，如图3所示，筒体12的横截面可以为U型，即：筒体12的上端为敞口结构；同时此结构可以方便坩埚2在筒体12内的放入与取出。当然，本发明不限于此，柱状体1也可以为其它结构，例如其筒体12的横截面可以为敞口的长方形结构等。
在一个示例中，为了保证坩埚2和柱状体1中的筒体12结构相匹配， 并且同时为了使坩埚2整体受热均匀以避免存在转角区域而影响受热，在筒体12横截面为U型时，坩埚2的横截面可以为圆形结构，例如可以包括本体21和盖罩22，如图3所示，坩埚2的本体21的横截面可以为与筒体12横截面相符的U型结构，从而在将本体21置于隔间11中时保证本体21与柱状体1的筒体12之间的良好接触，进而保证两者之间良好的导热性和固定稳固性。在一个示例中，为了方便向坩埚2内加入有机材料6，坩埚2的本体21与盖罩22之间可以为铰接连接，从而当需要向坩埚2内加入有机材料6时只需掀开盖罩22即可，操作简便。在一个示例中，单个坩埚的本体21及其盖罩22可以使用氮化硼，氧化铝等陶瓷材质制成。当然，本发明不限于此。
在一个示例中，为了使有机材料6可以充分且均匀扩散，如图2所示，柱状体1的中空套筒13上的第一蒸发孔131可以设置为多个且可以沿柱状体1的中心线方向成排设置。
在一个示例中，为了配合坩埚2在柱状体1内的合理分布以使有机材料6可以均匀地在基板表面成膜，如图4所示，隔间11(图4中粗线条所示部位)在凹槽1′内可以等距、均匀地间隔排布；但本发明不限于此，隔间11的具体排布方式也可以根据实际生产情况等进行合理调整。例如如图3所示，每个隔间11可以由平行于筒体12横截面设置的两个隔板111界定(如图3中粗线条所示部位)。
此处需要说明的是，由于不同的有机材料6的性质及工艺状态等方面有所差异，一般会避免将有机材料6添满整个坩埚2，而是留有一定的空间，从而使有机材料6在坩埚2中的添加量能充满整个本体21但不会接触到盖罩22。为此目的，在一个示例中，盖罩22可以为底面敞开、三面密封的弧形盖罩结构，如图5所示，粗线条所围的一面及与其对称的一面均为密封结构，从而使盖罩22与本体21相接触的部位为封闭结构。在一个示例中，为了节约成本，盖罩22也可以为三面敞开、仅有一面密封的弧形盖罩，如图5所示，粗线条所围的一面及与其对称的一面以及盖罩22的底面均为敞开结构。
在一个示例中，如图5和图6所示，上述第二蒸发孔221可以位于盖罩22的侧表面且临近盖罩22的顶端设置。例如，每个坩埚2的蒸发孔221可以总共设置八个，分为两排设置，每排四个，且两排蒸发孔221分别位于盖 罩22的两个侧表面并临近盖罩22的顶端；相应地，柱状体1上的第一蒸发孔131可以位于中空套筒13的侧表面且临近中空套筒13的顶端；第一蒸发孔131的数量和分布可与第二蒸发孔221对应，呈4*2设置。这种设置使得从坩埚2及柱状体1中蒸发出来的有机材料6可以更均匀、充分地扩散并分布在加热体3的上部区域中，达到较好的分散效果。
在一个示例中，为了能够更好地控制有机材料6的加热温度，如图1所示，柱状体1筒体12的内侧壁上对应于隔间11的区域可以设有冷凝管7；从而可以通过柱状体1外表面对应于隔间11的位置处设置的内加热丝4的升温作用以及上述冷凝管7的降温作用的共同配合来保证有机材料6的蒸发温度平稳地保持在合理的范围内。在一个示例中，可以在筒体12的内侧壁上设置凹槽并将冷凝管7放置在该凹槽内，这可避免冷凝管7阻碍坩埚2在隔间11内的放置，即，冷凝管7位于坩埚2及柱状体1之间。本发明实施例中冷凝管7的具体数量及放置位置可以根据实际需要灵活设置。在一个示例中，冷凝管7为两根，例如可分别位于筒体12的中心位置处两侧。
在一个示例中，为了便于加工制造，如图1所示，加热体3上的喷嘴31可以为圆柱状，且可以设置多个，例如，可在对应于柱状体1的第一蒸发孔131的位置处设置六个上述喷嘴31；并且多个喷嘴31可沿加热体3的延伸方向成排、等间距设置；从而使坩埚2内的有机材料6通过内加热丝4的加热而蒸发，并从第一、第二蒸发孔(131、221)扩散到加热体3内，再通过外加热丝5的二次加热蒸发进一步地均匀分布，最后从喷嘴31均匀地蒸发到基板表面上。
在一个示例中，为了避免蒸发镀膜装置的温度影响到基板的温度，如图1所示，加热体3的上端侧还可以设有遮板8。例如，为了增强隔热效果，该遮板8可为防热辐射板；例如，该遮板8可以设置两个，分别位于喷嘴31的两侧并且均倾斜设置；另外，这两个遮板8之间具有间隙，以避免将喷嘴31遮挡，从而使由喷嘴31扩散出来的有机材料6可以顺利地穿过该间隙蒸发到基板表面上。
在一个示例中，为了保证蒸发镀膜装置整体的加热稳定、均匀性，如图1所示，内加热丝4均匀缠绕在柱状体1的中空套筒13外表面，且其各缠绕段与筒体12内坩埚2的位置相对应；外加热丝5均匀缠绕在加热体3外表面。例如，内加热丝4的缠绕方式可以为贴合中空套筒13的外表面而缠 绕，或者以与中空套筒13的表面存在间隙的方式环绕该外表面；类似地，外加热丝5的缠绕方式也可以为贴合加热体3的外表面而缠绕，或者以与加热体3的外表面存在间隙的方式环绕该外表面。贴合缠绕可以节省空间，而间隙缠绕可以传热均匀，在实际应用时，可以根据不同的蒸镀情况，适当选择其中一种缠绕方式或合理将两种方式组合使用，以达到最佳的蒸镀状态。
此处需要说明的是，为了防止柱状体1上沾染到有机材料6而造成原料的浪费，内加热丝4要对柱状体1及坩埚2均进行加热。
在一个示例中，为了探测有机材料6的蒸发速率并反馈给控制单元，如图1所示，在对应于隔间11和两个隔间11之间的区域的位置处，本发明一实施例提供的蒸发镀膜装置还可以包括与控制单元连接的晶振感应件9；该晶振感应件9用于检测蒸发镀膜的速率，从而辨别蒸发镀膜的均一性并反馈给控制单元，使控制单元可以通过联合控制、调节内加热丝4的加热温度等进一步控制、调节蒸发镀膜的速率及均一性等情况，以保证整个基板成膜的均一性。当然，为了便于控制，也可以只在对应于隔间11的位置设置晶振感应件9。晶振感应件的实施方式和工作原理属于本领域成熟技术，在此不做限制和赘述。
下面结合图1对本发明一个实施例提供的蒸发镀膜装置的蒸镀过程进行详细的说明。
首先，将有机材料6分别添加到若干个坩埚2内，然后将这些坩埚2分别装入柱状体1的筒体12的隔间11内；然后，将承载这些坩埚2的筒体12整体插入柱状体1的中空套筒13内，此时再将柱状体1连带多个坩埚2整体放入加热体3内；之后，通过控制单元2控制内加热丝4对柱状体1及坩埚2进行加热，使有机材料6蒸发并依次通过第一蒸发孔131和第二蒸发孔221后扩散分布在加热体3内部；最后，通过外加热丝5对加热体3进行加热，使已蒸发的有机材料6进行二次均匀蒸发扩散，并通过喷嘴31均匀地蒸发到基板表面上。
此处需要说明的是，整个柱状体1有一个保有温度，从而防止有机材料6沉积在柱状体1的表面上；加热体3也有一个保有温度，从而防止有机材料6凝结并堵塞住喷嘴31。
本发明实施例提供的蒸发镀膜装置分区对有机材料进行加热、蒸发，并集中进行二次蒸发、扩散，同时整体控制蒸发速率，提高了蒸镀工艺成膜的 均一性；另外，可以通过替换柱状体对坩埚进行整体更换，操作方便、节约空间，从而减少了维护时间并降低了运营成本。
以上实施方式仅用于说明本公开，而并非对本公开的限制，有关技术领域的普通技术人员，在不脱离本公开的精神和范围的情况下，还可以做出各种变化和变型，因此所有等同的技术方案也属于本公开的范畴，本公开的专利保护范围应由权利要求限定。
本申请要求于2014年7月21日提交的名称为“蒸发镀膜装置”的中国专利申请No.201410347668.3的优先权，该申请全文以引用方式合并于本文。

Claims (10)

  1. 一种蒸发镀膜装置，包括加热体以及位于所述加热体内部的柱状体，其中，
    所述柱状体包括中空套筒以及配合套设在中空套筒内的筒体，所述筒体表面设有凹槽，所述凹槽沿所述筒体的轴向中心线方向延伸，且所述凹槽内间隔设有多个隔间；所述中空套筒顶端区域设有第一蒸发孔；每一所述隔间处设有坩埚，所述坩埚包括一端敞口、四周密封的本体以及与所述本体配合连接的盖罩，所述本体位于所述隔间内，并且所述盖罩上设有与所述第一蒸发孔相对应的第二蒸发孔；所述中空套筒外表面设有内加热丝，所述内加热丝连接有控制单元；并且
    所述加热体为中空柱状结构，且其外表面上设有外加热丝以及与所述第一蒸发孔相对应的喷嘴。
  2. 根据权利要求1所述的蒸发镀膜装置，其中，所述中空套筒为圆形截面的柱状结构，所述柱状结构沿轴向方向是两端贯通的；所述筒体的横截面为U型，所述隔间在所述凹槽内等距、均匀排布；并且
    所述隔间由设置在所述凹槽内的、平行于所述筒体的轴向中心线的隔板界定。
  3. 根据权利要求2所述的蒸发镀膜装置，其中，所述坩埚的横截面为圆形，并且所述本体的横截面为与所述筒体的横截面相符的U型结构；并且
    多个所述第一蒸发孔沿所述柱状体的纵向中心线方向成排设置。
  4. 根据权利要求3所述的蒸发镀膜装置，其中，所述第二蒸发孔位于所述盖罩的外部侧表面并且临近所述盖罩的顶端设置；
    所述第一蒸发孔位于所述中空套筒的外部侧表面并且临近所述中空套筒的顶端设置。
  5. 根据权利要求1-4中任一项所述的蒸发镀膜装置，其中，所述筒体的内侧壁上对应于所述隔间的区域设有冷凝管。
  6. 根据权利要求1所述的蒸发镀膜装置，其中，所述喷嘴为圆柱状，且多个所述喷嘴沿所述加热体的纵向成排设置。
  7. 根据权利要求6所述的蒸发镀膜装置，其中，所述加热体上端侧还 设有遮板。
  8. 根据权利要求7所述的蒸发镀膜装置，其中，两个所述遮板倾斜设置于所述喷嘴两侧。
  9. 根据权利要求1所述的蒸发镀膜装置，其中，所述内加热丝均匀缠绕在所述中空套筒的外表面且与所述坩埚的位置相对应；所述外加热丝均匀缠绕在所述加热体的外表面。
  10. 根据权利要求1所述的蒸发镀膜装置，其中，在对应于所述隔间或对应于两个所述隔间之间的区域的位置处，所述蒸发镀膜装置还包括与所述控制单元连接的晶振感应件；并且
    所述晶振感应件用于检测蒸发镀膜的速率。
PCT/CN2014/095378 2014-07-21 2014-12-29 蒸发镀膜装置 WO2016011779A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/768,587 US9945025B2 (en) 2014-07-21 2014-12-29 Evaporation coating apparatus
EP14882152.3A EP3173506B1 (en) 2014-07-21 2014-12-29 Evaporation coating apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410347668.3A CN104178734B (zh) 2014-07-21 2014-07-21 蒸发镀膜装置
CN201410347668.3 2014-07-21

Publications (1)

Publication Number Publication Date
WO2016011779A1 true WO2016011779A1 (zh) 2016-01-28

Family

ID=51960071

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2014/095378 WO2016011779A1 (zh) 2014-07-21 2014-12-29 蒸发镀膜装置

Country Status (4)

Country Link
US (1) US9945025B2 (zh)
EP (1) EP3173506B1 (zh)
CN (1) CN104178734B (zh)
WO (1) WO2016011779A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9945025B2 (en) 2014-07-21 2018-04-17 Boe Technology Group Co., Ltd. Evaporation coating apparatus

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104404451A (zh) * 2014-12-16 2015-03-11 合肥鑫晟光电科技有限公司 蒸镀源和蒸镀装置
CN105648405A (zh) * 2016-03-29 2016-06-08 苏州方昇光电装备技术有限公司 一种有机材料蒸发装置
CN106987809A (zh) * 2017-05-17 2017-07-28 大连交通大学 一种有机真空蒸发源
CN110421977B (zh) * 2018-07-11 2020-12-29 广东聚华印刷显示技术有限公司 冷凝机构及减压干燥装置
DE102018119570A1 (de) * 2018-08-13 2020-02-13 TRüTZSCHLER GMBH & CO. KG Vorrichtung zur Verfestigung und/oder Strukturierung von einem Vlies sowie eine Strukturschale
CN115522167B (zh) * 2022-09-22 2024-07-26 京东方科技集团股份有限公司 一种蒸镀源设备
CN116083856A (zh) * 2023-01-07 2023-05-09 唐山斯腾光电科技有限公司 一种红外窗片加工用蒸发镀膜装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1254969A1 (en) * 2001-04-26 2002-11-06 Eastman Kodak Company PVD vapor source
CN1814854A (zh) * 2005-01-31 2006-08-09 三星Sdi株式会社 蒸发源和采用该蒸发源的蒸镀装置
CN101845612A (zh) * 2008-12-18 2010-09-29 维易科精密仪器国际贸易(上海)有限公司 线沉积源
JP2011060865A (ja) * 2009-09-07 2011-03-24 Optorun Co Ltd リニア蒸着源とその使用方法、成膜装置並びに成膜方法
CN102102175A (zh) * 2009-12-17 2011-06-22 三星移动显示器株式会社 线性蒸发源及具有该线性蒸发源的沉积设备
CN104178734A (zh) * 2014-07-21 2014-12-03 京东方科技集团股份有限公司 蒸发镀膜装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
US5596673A (en) * 1994-11-18 1997-01-21 Xerox Corporation Evaporation crucible assembly
US6830626B1 (en) * 1999-10-22 2004-12-14 Kurt J. Lesker Company Method and apparatus for coating a substrate in a vacuum
US20050147753A1 (en) * 1999-10-22 2005-07-07 Kurt J. Lesker Company Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum
DE10085115T1 (de) * 1999-10-22 2002-11-07 Kurt J Lesker Company Clairton Verfahren und Vorrichtung zum Beschichten eines Substrats im Vakuum
US7238389B2 (en) * 2004-03-22 2007-07-03 Eastman Kodak Company Vaporizing fluidized organic materials
JP4502738B2 (ja) * 2004-07-29 2010-07-14 京セラ株式会社 蒸着用ボート
JP4440837B2 (ja) 2005-01-31 2010-03-24 三星モバイルディスプレイ株式會社 蒸発源及びこれを採用した蒸着装置
KR100784953B1 (ko) * 2006-05-23 2007-12-11 세메스 주식회사 다수의 도가니를 이용한 유기발광소자 박막 제작을 위한선형증발원
KR100805531B1 (ko) * 2006-06-13 2008-02-20 삼성에스디아이 주식회사 증발원
JP5063969B2 (ja) * 2006-09-29 2012-10-31 東京エレクトロン株式会社 蒸着装置、蒸着装置の制御装置、蒸着装置の制御方法および蒸着装置の使用方法
US9127349B2 (en) * 2008-12-23 2015-09-08 Applied Materials, Inc. Method and apparatus for depositing mixed layers
DE102009038519B4 (de) * 2009-08-25 2012-05-31 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Herstellung von Stöchiometriegradientenschichten
US20110104398A1 (en) * 2009-10-29 2011-05-05 General Electric Company Method and system for depositing multiple materials on a substrate
TW201202454A (en) * 2010-07-07 2012-01-16 Hon Hai Prec Ind Co Ltd Processing apparatus for smoothing film material and evaporation deposition device with same
US20120027921A1 (en) * 2010-12-22 2012-02-02 Primestar Solar, Inc. Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate
WO2013085625A2 (en) * 2011-10-17 2013-06-13 Directed Vapor Technologies International Impact and erosion resistant thermal and environmental barrier coatings
US20140335271A1 (en) * 2012-01-10 2014-11-13 Hzo, Inc. Boats configured to optimize vaporization of precursor materials by material deposition apparatuses
CN102703866A (zh) * 2012-01-13 2012-10-03 东莞宏威数码机械有限公司 线性蒸发源装置及具有该装置的蒸发速率精控式蒸发设备
US9496527B2 (en) * 2012-08-13 2016-11-15 Kaneka Corporation Vacuum deposition device and method of manufacturing organic EL device
JP6222929B2 (ja) * 2013-01-15 2017-11-01 日立造船株式会社 真空蒸着装置
CN203593780U (zh) * 2013-09-24 2014-05-14 京东方科技集团股份有限公司 一种蒸镀喷头及蒸镀设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1254969A1 (en) * 2001-04-26 2002-11-06 Eastman Kodak Company PVD vapor source
CN1814854A (zh) * 2005-01-31 2006-08-09 三星Sdi株式会社 蒸发源和采用该蒸发源的蒸镀装置
CN101845612A (zh) * 2008-12-18 2010-09-29 维易科精密仪器国际贸易(上海)有限公司 线沉积源
JP2011060865A (ja) * 2009-09-07 2011-03-24 Optorun Co Ltd リニア蒸着源とその使用方法、成膜装置並びに成膜方法
CN102102175A (zh) * 2009-12-17 2011-06-22 三星移动显示器株式会社 线性蒸发源及具有该线性蒸发源的沉积设备
CN104178734A (zh) * 2014-07-21 2014-12-03 京东方科技集团股份有限公司 蒸发镀膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9945025B2 (en) 2014-07-21 2018-04-17 Boe Technology Group Co., Ltd. Evaporation coating apparatus

Also Published As

Publication number Publication date
US9945025B2 (en) 2018-04-17
CN104178734B (zh) 2016-06-15
EP3173506A1 (en) 2017-05-31
EP3173506B1 (en) 2020-02-26
CN104178734A (zh) 2014-12-03
US20160251751A1 (en) 2016-09-01
EP3173506A4 (en) 2018-04-04

Similar Documents

Publication Publication Date Title
WO2016011779A1 (zh) 蒸发镀膜装置
KR100778945B1 (ko) 증발 장치
KR102260572B1 (ko) 복수의 증발원을 갖는 박막 증착장치
JP2006207022A (ja) 蒸発源及びこれを採用した蒸着装置
JP2007031828A (ja) 蒸着装置
TWI447246B (zh) 真空蒸鍍裝置
JP2017509794A5 (zh)
WO2016033932A1 (zh) 蒸镀坩埚和蒸镀装置
KR20180097884A (ko) 선형 증발원용 도가니 및 선형 증발원
KR102260617B1 (ko) 복수의 도가니가 장착된 증발원을 갖는 박막 증착장치
KR100434438B1 (ko) 증착 공정용 원추형 노즐 증발원
KR102002316B1 (ko) 박막증착장치의 증발원 및 그를 가지는 박막증착장치
WO2015100787A1 (zh) 真空蒸镀装置及蒸镀方法
WO2018137322A1 (zh) 一种坩埚
KR101660393B1 (ko) 증발원 및 이를 구비한 증착장치
KR101982092B1 (ko) 증착 장비의 증발원 분배관의 히팅 장치
KR102260575B1 (ko) 복수의 증발원을 갖는 박막 증착장치
KR102150436B1 (ko) 증발원 및 이를 포함하는 증착 장치
KR101314535B1 (ko) 혼합 물질 증착을 위한 기상 증착 장치
KR101866956B1 (ko) 선형 증발원용 도가니 및 선형 증발원
KR20150068153A (ko) 도가니 개별 증발형 선형증발원
KR101006952B1 (ko) 박막 제조용 진공 증발원 장치
KR102086313B1 (ko) 진공 증착원과 이를 이용한 유기발광 디스플레이 장치 제조방법 및 유기발광 디스플레이 장치
KR20210103546A (ko) 기상 증착 장치 및 진공 챔버에서 기판을 코팅하기 위한 방법
KR101456691B1 (ko) 유기발광소자 제조용 유기물 증착장치

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 14768587

Country of ref document: US

REEP Request for entry into the european phase

Ref document number: 2014882152

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2014882152

Country of ref document: EP

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14882152

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE