WO2015161538A1 - Device for stabilizing spectrum of micro-ring resonator - Google Patents

Device for stabilizing spectrum of micro-ring resonator Download PDF

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Publication number
WO2015161538A1
WO2015161538A1 PCT/CN2014/077742 CN2014077742W WO2015161538A1 WO 2015161538 A1 WO2015161538 A1 WO 2015161538A1 CN 2014077742 W CN2014077742 W CN 2014077742W WO 2015161538 A1 WO2015161538 A1 WO 2015161538A1
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Prior art keywords
voltage
micro
heater
pin junction
ring resonator
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PCT/CN2014/077742
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French (fr)
Chinese (zh)
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廖明乐
邱昆
武保剑
王利辉
张中一
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电子科技大学
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Publication of WO2015161538A1 publication Critical patent/WO2015161538A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/25Preparing the ends of light guides for coupling, e.g. cutting
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D25/00Control of light, e.g. intensity, colour or phase
    • G05D25/02Control of light, e.g. intensity, colour or phase characterised by the use of electric means

Definitions

  • the present invention relates to the field of optical communication technology, and more particularly to an apparatus for stabilizing the spectrum of a microring resonator.
  • Microring resonators have high quality factor (Q value), compact structure, high integration, compatibility with existing CMOS processes, etc., and have broad application prospects in optical communication networks.
  • the main physical effects are carrier dispersion effects, thermo-optical effects, and the like.
  • the carrier dispersion effect refers to the fact that the injection or extraction of carriers causes changes in the free carriers in the optical waveguide to cause changes in the refractive index, and has the advantages of high speed, polarization insensitivity, large refractive index change, etc., which can be in the microring. High-speed switching or modulation is achieved using the carrier dispersion effect.
  • the thermo-optic effect is to change the refractive index of the micro-ring by changing the refractive index of the optical waveguide as a function of temperature.
  • the processing precision of the existing CMOS process is difficult to achieve a perfect match with the ideal design, and the thermo-optic effect can be used to compensate for the resonance wavelength drift caused by the process error.
  • the microring resonator is extremely sensitive to temperature, and its switching spectrum is susceptible to the temperature of the chip, which degrades the performance of the microring optical switch. In order to stabilize the switching spectrum of the microring resonator, not only a high-precision adjustment circuit but also a timely and effective control of the micro-ring operating temperature is required.
  • the size of the micro/nano optics is small, only on the order of micrometers, it is a major difficulty to monitor the temperature within such a small scale.
  • the composite optical integrated device developed in recent years can realize the optical device with stable temperature property by using the special material characteristics which are not sensitive to temperature, but the processing technology of the composite material cannot be compatible with the CMOS process, and the cost is high. Therefore, in the silicon-based material, in order to achieve precise control of the operating temperature of the microring resonator, a metal film is coated on the micro-ring device for heating, although the existing processing technology has been able to connect the micro-heater and the PIN junction.
  • the object of the present invention is to overcome the deficiencies of the prior art and provide a device for stabilizing the spectrum of a microring resonator, which stabilizes the microring by detecting the amount of change in the voltage across the PIN junction of the microring resonator due to temperature changes of the microring resonator.
  • the spectrum of the resonator has the characteristics of simple design process and low cost.
  • the present invention provides an apparatus for stabilizing the spectrum of a microring resonator, which is characterized by comprising:
  • a microring resonator including a heater and a PIN junction, is enabled to open or close the microring resonator by loading a current on the PIN junction through the source meter function module, and simultaneously detecting a temperature change of the microring resonator;
  • a signal processing unit includes an amplification, shaping, filtering circuit and a high-precision analog/digital converter (AD) for sequentially applying a voltage variation ⁇ fed back from the source table function module to the high-order, amplified, and filtered processing input to the high An accurate analog/digital converter (AD) that converts the analog signal into a digital signal and feeds it back to the FPGA control unit;
  • AD high-precision analog/digital converter
  • An FPGA control unit is configured to generate a switch driving signal of the a channel, receive the digital signal from the signal processing unit at the same time, and fit and analyze the output voltage signal of the b channel by fitting the digital signal; the switch driving signal of the a channel is input to The source meter function module, the voltage driving signal of the b channel is input to the heater driving unit module;
  • a source meter function module including a current type digital/analog converter (DA) and a voltage follower; the source meter function module receives a switch signal of the a channel, converts it into a constant current i through a high precision DA, and then constants The current i is input to the right half arm PIN junction of the microring resonator; at the same time, the change AU of the voltage across the PIN junction of the microring resonator due to the temperature change is detected, and the voltage variation ⁇ is fed back to the signal processing unit. ;
  • DA digital/analog converter
  • a heater driving unit comprising a DA and a peripheral matching circuit; after receiving the voltage driving signal of the b channel, the heater driving unit first converts the analog voltage driving signal by the high precision DA, and then passes the analog voltage driving signal to the peripheral matching circuit. After the impedance matching is performed, the heater is loaded into the microring resonator, and the temperature of the microring resonator is changed by changing the voltage applied to the heater.
  • the device control unit outputs a channel switch driving signal to the source after the device is started.
  • the table function module generates a constant current i after the DA conversion in the source table function module, and then inputs the constant current i to the right half arm PIN junction of the microring resonator to control the opening or closing of the microring resonator; the PIN junction is input.
  • the temperature variation of the microring resonator can be detected, and the variation ⁇ of the voltage across the PIN junction of the microring resonator caused by the temperature change is obtained, and the voltage variation ⁇ is amplified, shaped, filtered, and AD by the signal processing unit.
  • the digital signal is input to the FPGA control unit.
  • the voltage driving signal of the output b channel is loaded into the heater driving unit module, and the voltage driving signal of the b channel is converted by the DA of the heater driving unit.
  • the heater is loaded into the microring resonator after impedance matching with the peripheral matching circuit of the heater driving unit, and the temperature of the microring resonator is adjusted by changing the voltage applied to the heater to change the temperature of the microring resonator. Thereby maintaining the spectral stability of the microring resonator.
  • the switch driving signal of the a channel is input to the source table function module before the FPGA control unit analyzes the digital signal.
  • the device for stabilizing the spectrum of the microring resonator after the current is applied to the PIN junction of the microring resonator, detects the change of the voltage across the PIN junction of the microring resonator due to the temperature change of the microring resonator, and then After the voltage variation is processed by the signal processing unit and the FPGA control unit, a voltage driving signal for stabilizing the spectrum of the microring resonator is generated, which has the characteristics of simple design process and easy operation.
  • the PIN junction detects the operating temperature of each micro-ring switch in real time, solves the problem that the number of micro-rings cannot be located, and does not require additional functional devices, and has a fast temperature detection and low cost.
  • the advantage is that it can adapt to the needs of the rapid development of current optical communication systems.
  • the device for stabilizing the spectrum of the microring resonator of the present invention has the following beneficial effects:
  • the invention stabilizes the spectrum of the microring resonator by detecting the variation of the voltage across the PIN junction of the microring resonator due to the temperature change of the microring resonator, and has the characteristics of simple design process and easy operation.
  • the PIN junction detects the operating temperature of each micro-ring switch in real time, solves the problem that the number of micro-rings cannot be located, and does not require additional functional devices, and has the advantages of fast temperature detection and low cost. .
  • FIG. 1 is a block diagram of an apparatus for stabilizing a spectrum of a microring resonator of the present invention
  • FIG. 1 is a block diagram of a device for stabilizing a microring resonator spectrum of the present invention.
  • Figure 2 is a graph showing the voltage-current relationship of the PIN junction as a function of temperature in the microring resonator of Figure 1.
  • Fig. 3 is a graph showing the relationship between the voltage of the PIN junction and the temperature in the microring resonator of Fig. 1.
  • a ridge waveguide structure having a dispersion of 0 at a wavelength of 1.55 um and supporting only a TE base film is exemplified, and a P-type impurity is heavily doped on both sides of the left arm of the ridge waveguide, and is left on the right arm of the ridge waveguide. Focusing on the doping of the N-type impurity and the heavily doped P-type impurity on the right side, in order to increase the conductivity, the intrinsic I region in the middle is lightly doped with the N-type impurity.
  • a device for stabilizing the spectrum of a microring resonator includes:
  • a microring resonator 1 comprising a heater and a PIN junction, is enabled to open or close the microring resonator 1 by a current applied to the PIN junction by the source meter function module 4, and simultaneously detects a temperature change of the microring resonator 1;
  • the signal processing unit 2 includes an amplification, shaping, filtering circuit and a high-precision analog/digital converter (AD) for sequentially inputting the voltage variation ⁇ fed back from the source table function module 4 through amplification, shaping, filtering, and input to AD, converting the analog signal into a digital signal and feeding back to the FPGA control unit 3;
  • AD analog/digital converter
  • An FPGA control unit 3 is configured to generate a switch driving signal of the channel a, and simultaneously receive the digital signal from the signal processing unit 2, and by fitting and analyzing the digital signal, the voltage driving signal of the output b channel, the switch driving signal of the a channel Input to the source table function module 4, the voltage driving signal of the b channel is input to the heater driving unit module 5, the switch driving signal of the a channel is input to the source table function module 4 before the FPGA control unit 3 analyzes the digital signal;
  • a source meter function module 4 including a current type digital/analog converter (DA) and a voltage follower; the source table function module 4 receives the switch drive signal of the a channel, and converts it into a constant current i through a high precision DA, and then The constant current i is input to the right half arm PIN junction of the microring resonator 1; at the same time, the amount of change AU of the voltage across the PIN junction of the microring resonator caused by the temperature change of the microring resonator 1 is detected, and the voltage change amount AU is fed back. Giving signal processing unit 2;
  • DA digital/analog converter
  • a heater driving unit 5 comprising a DA and a peripheral matching circuit; after receiving the voltage driving signal of the b channel, the heater driving unit 5 first converts the analog voltage driving signal into high-precision DA, and then passes the analog voltage driving signal through the periphery.
  • the matching circuit performs impedance matching and is loaded into the heater of the microring resonator 1, and the temperature change of the microring resonator 1 is adjusted by changing the voltage generated by the voltage applied across the heater.
  • FPGA control unit 3 outputs a switch signal of a channel to the source meter function module 4, which is converted into a constant current of 1 mA by high-precision DA, and input into the PIN junction of the micro-ring resonator, and the current and voltage of the PIN junction
  • I I s (e Vq/kT -l)
  • I the current flowing through the PIN junction
  • 1 the reverse saturation current
  • V the voltage across the PIN
  • q the metacharge
  • k is the wave
  • T is the absolute temperature of the PIN junction. That is, when the temperature is constant, the current through which the PIN junction passes increases exponentially with voltage; when the temperature rises, as shown in Fig.
  • the voltage across the PIN junction will drop by 1.2mV.
  • This voltage change ⁇ is input to the FPGA control unit 3 through the signal processing unit 2, and the relationship between the voltage and temperature stored in the FPGA in advance can be analyzed by the FPGA. The extent to which this temperature has dropped.
  • the thermal conductivity of silicon is 1.49 W/(cm*IQ, and the size of the microring is 10 um.
  • the heat generated by the PIP heater needs to be reduced by about 0.3278 mW.
  • the impedance of the PIP heater is about 10k ohms.
  • the voltage across the PIP heater needs to be reduced by 0.4V, that is, the voltage drive signal of the b channel is sent from the FPGA control unit 3.
  • the voltage across the PIP heater is 3.6V, and as the heat decreases, the temperature continues to decrease, and the voltage driving signal of the b channel sent by the FPGA control unit 3 gradually increases. Go back to the initial state.
  • the voltage across the PIP junction is increased by 1.2mV.
  • the voltage across the PIP heater is increased by 0.4V, that is, the heating voltage becomes 4.4V, and the additional heat generated causes the temperature to rise. high.
  • the temperature rises by 0.5K due to heating the voltage across the PIN is reduced by 0.6 mV.
  • the heating voltage becomes 4.2V.
  • the design of the high-precision circuit eliminates the influence of temperature changes on the micro-ring spectrum, and obtains a stable micro-ring optical switch spectrum. Since the PIN junction and PIP heater can be integrated in a single micro-ring switch, accurate control of each micro-ring is achieved.

Abstract

A device for stabilizing a spectrum of a micro-ring resonator (1), comprising a micro-ring resonator (1), a signal processing unit (2), an FPGA control unit (3), a source meter functional module (4) and a heater drive unit (5), wherein after a current is input into a PIN junction of the micro-ring resonator (1), the amount of variation of a voltage at two ends of the PIN junction of the micro-ring resonator (1) caused by temperature variation is detected, and then after the amount of variation of the voltage is processed through the signal processing unit (2) and the FPGA control unit (3), a voltage drive signal for stabilizing a spectrum of the micro-ring resonator (1) is generated. In the actual configuration, the PIN junction detects the working temperature of each micro-ring switch in real time, so that the problem that a large number of micro-rings cannot be positioned is solved, moreover, no additional functional devices are needed, while the device has the advantages of having high temperature detection speed, being low in cost and being simple in design process and easy to operate, and the device can meet the requirements of high speed development of current optical communication systems.

Description

说 明 书 一种稳定微环谐振器光谱的装置 技术领域 本发明属于光通信技术领域, 更为具体地讲, 涉及一种稳定微环谐振器光 谱的装置。  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the field of optical communication technology, and more particularly to an apparatus for stabilizing the spectrum of a microring resonator.
背景技术 Background technique
随着光通信系统向高速、 高容量、 低损耗、 低成本的方向发展, 对光学器 件提出了越来越高的要求。 近几年, 随着光波导工艺技术的提高, 光子集成技 术倍受关注。 微环谐振器具有高品质因数(Q值) 、 结构紧凑、 集成度高、 与现 有 CMOS工艺兼容等优点, 在光通信网络中有着广泛的应用前景。  With the development of optical communication systems in the direction of high speed, high capacity, low loss, and low cost, higher and higher requirements are imposed on optical devices. In recent years, with the improvement of optical waveguide technology, photonic integration technology has received much attention. Microring resonators have high quality factor (Q value), compact structure, high integration, compatibility with existing CMOS processes, etc., and have broad application prospects in optical communication networks.
在硅基材料中, 主要的物理效应有载流子色散效应、 热光效应等。 载流子 色散效应指的是载流子的注入或抽取导致光波导中自由载流子的变化引起折射 率的变化, 具有高速、 偏振不敏感、 折射率变化大等优势, 在微环中可以利用 载流子色散效应实现高速开关或调制。 热光效应是利用光波导的折射率随温度 变化而发生变化,从而改变微环的谐振波长。现有 CMOS工艺的加工精度很难实 现与理想设计完全匹配, 可以通过热光效应来弥补工艺误差所导致的谐振波长 漂移问题。 然而, 微环谐振器对温度极为敏感, 其开关光谱易受芯片温度的影 响, 进而劣化微环光开关的工作性能。 为了稳定微环谐振器的开关光谱, 不仅 需要高精度的调节电路, 而且需要对微环工作温度进行及时有效的控制。  In silicon-based materials, the main physical effects are carrier dispersion effects, thermo-optical effects, and the like. The carrier dispersion effect refers to the fact that the injection or extraction of carriers causes changes in the free carriers in the optical waveguide to cause changes in the refractive index, and has the advantages of high speed, polarization insensitivity, large refractive index change, etc., which can be in the microring. High-speed switching or modulation is achieved using the carrier dispersion effect. The thermo-optic effect is to change the refractive index of the micro-ring by changing the refractive index of the optical waveguide as a function of temperature. The processing precision of the existing CMOS process is difficult to achieve a perfect match with the ideal design, and the thermo-optic effect can be used to compensate for the resonance wavelength drift caused by the process error. However, the microring resonator is extremely sensitive to temperature, and its switching spectrum is susceptible to the temperature of the chip, which degrades the performance of the microring optical switch. In order to stabilize the switching spectrum of the microring resonator, not only a high-precision adjustment circuit but also a timely and effective control of the micro-ring operating temperature is required.
在现有技术中, 由于微纳光学器件的尺寸很小, 只有微米量级, 在这么 小的尺度内进行温度的监控是一大难点。 近年发展起来的复合材料光学集成器 件, 利用其对温度不敏感的特殊材料特性, 可以实现温度性质稳定的光学器件, 但复合材料的加工工艺不能与 CMOS工艺兼容,且成本高昂。因此在硅基材料中, 为了实现对微环谐振器工作温度的精准控制, 采用在微环器件的上方覆盖一层 金属薄膜进行加热, 虽然现有的加工工艺已能够将微加热器和 PIN结制作在微环 谐振器芯片中, 但并不能在微环芯片中集成温度传感器, 检测出微环芯片的工 作温度, 并通过温度的改变量来稳定微环谐振器的光谱。 发明内容 本发明的目的在于克服现有技术的不足, 提供一种稳定微环谐振器光谱的 装置, 通过检测微环谐振器因温度变化引起微环谐振器 PIN结两端电压的变化 量来稳定微环谐振器的光谱, 具有设计工艺简单和低成本的特点。 In the prior art, since the size of the micro/nano optics is small, only on the order of micrometers, it is a major difficulty to monitor the temperature within such a small scale. The composite optical integrated device developed in recent years can realize the optical device with stable temperature property by using the special material characteristics which are not sensitive to temperature, but the processing technology of the composite material cannot be compatible with the CMOS process, and the cost is high. Therefore, in the silicon-based material, in order to achieve precise control of the operating temperature of the microring resonator, a metal film is coated on the micro-ring device for heating, although the existing processing technology has been able to connect the micro-heater and the PIN junction. It is fabricated in a microring resonator chip, but it cannot integrate a temperature sensor in the microring chip, detects the operating temperature of the microring chip, and stabilizes the spectrum of the microring resonator by the amount of temperature change. Summary of the invention The object of the present invention is to overcome the deficiencies of the prior art and provide a device for stabilizing the spectrum of a microring resonator, which stabilizes the microring by detecting the amount of change in the voltage across the PIN junction of the microring resonator due to temperature changes of the microring resonator. The spectrum of the resonator has the characteristics of simple design process and low cost.
为实现上述发明目的, 本发明一种稳定微环谐振器光谱的装置, 其特征在 于包括:  In order to achieve the above object, the present invention provides an apparatus for stabilizing the spectrum of a microring resonator, which is characterized by comprising:
一微环谐振器, 包括加热器和 PIN结, 通过源表功能模块加载给 PIN结上 的电流实现微环谐振器的开或关, 同时检测微环谐振器的温度变化;  A microring resonator, including a heater and a PIN junction, is enabled to open or close the microring resonator by loading a current on the PIN junction through the source meter function module, and simultaneously detecting a temperature change of the microring resonator;
一信号处理单元, 包括放大、 整形、 滤波电路和高精度的模拟 /数字转换器 (AD), 用于将源表功能模块反馈的电压变化量 ΔΙΙ依次经过放大、 整形、 滤波 处理后输入到高精度的模拟 /数字转换器 (AD), 将模拟信号转换成数字信号反 馈给 FPGA控制单元;  A signal processing unit includes an amplification, shaping, filtering circuit and a high-precision analog/digital converter (AD) for sequentially applying a voltage variation ΔΙΙ fed back from the source table function module to the high-order, amplified, and filtered processing input to the high An accurate analog/digital converter (AD) that converts the analog signal into a digital signal and feeds it back to the FPGA control unit;
一 FPGA控制单元, 用于生成 a路的开关驱动信号, 同时接收来自信号处 理单元的数字信号, 通过对数字信号进行拟合、 分析输出 b路的电压驱动信号; a路的开关驱动信号输入给源表功能模块, b路的电压驱动信号输入给加热器驱 动单元模块;  An FPGA control unit is configured to generate a switch driving signal of the a channel, receive the digital signal from the signal processing unit at the same time, and fit and analyze the output voltage signal of the b channel by fitting the digital signal; the switch driving signal of the a channel is input to The source meter function module, the voltage driving signal of the b channel is input to the heater driving unit module;
一源表功能模块, 包括电流型数字 /模拟转换器(DA)和电压跟随器; 源表 功能模块接收到 a路的开关驱动信号后, 通过高精度的 DA转换成恒定电流 i, 再将恒定电流 i输入到微环谐振器的右半臂 PIN结;同时检测微环谐振器因温度 变化引起微环谐振器 PIN结两端电压的变化量 AU, 并将电压变化量 ΔΙΙ反馈给 信号处理单元;  A source meter function module, including a current type digital/analog converter (DA) and a voltage follower; the source meter function module receives a switch signal of the a channel, converts it into a constant current i through a high precision DA, and then constants The current i is input to the right half arm PIN junction of the microring resonator; at the same time, the change AU of the voltage across the PIN junction of the microring resonator due to the temperature change is detected, and the voltage variation ΔΙΙ is fed back to the signal processing unit. ;
一加热器驱动单元, 包括 DA 和外围匹配电路; 加热器驱动单元接收到 b 路的电压驱动信号后, 先通过高精度的 DA 转换成模拟电压驱动信号, 再将模 拟电压驱动信号经过外围匹配电路实现阻抗匹配后加载到微环谐振器的加热 器, 通过改变加载到加热器两端的电压产生热量来调节微环谐振器温度变化; 装置启动后, 由 FPGA控制单元输出 a路开关驱动信号到源表功能模块, 经源表功能模块中的 DA转换后生成恒定电流 i, 再将恒定电流 i输入到微环谐 振器的右半臂 PIN结控制微环谐振器的开或关; PIN结在输入电流后能检测出 微环谐振器的温度变化量, 得到由温度变化引起微环谐振器 PIN结两端电压的 变化量 ΔΙΙ, 将电压变化量 ΔΙΙ经过信号处理单元的放大、 整形、 滤波、 AD处 理后得到数字信号, 数字信号输入到 FPGA控制单元, 经拟合、 分析后, 输出 b 路的电压驱动信号加载到加热器驱动单元模块, b路的电压驱动信号经加热器驱 动单元的 DA 转换后生成模拟电压驱动信号, 与加热器驱动单元的外围匹配电 路实现阻抗匹配后加载到微环谐振器的加热器, 通过改变加载到加热器两端的 电压产生热量来调节微环谐振器温度变化, 从而保持微环谐振器的光谱稳定。 a heater driving unit, comprising a DA and a peripheral matching circuit; after receiving the voltage driving signal of the b channel, the heater driving unit first converts the analog voltage driving signal by the high precision DA, and then passes the analog voltage driving signal to the peripheral matching circuit. After the impedance matching is performed, the heater is loaded into the microring resonator, and the temperature of the microring resonator is changed by changing the voltage applied to the heater. The device control unit outputs a channel switch driving signal to the source after the device is started. The table function module generates a constant current i after the DA conversion in the source table function module, and then inputs the constant current i to the right half arm PIN junction of the microring resonator to control the opening or closing of the microring resonator; the PIN junction is input. After the current, the temperature variation of the microring resonator can be detected, and the variation ΔΙΙ of the voltage across the PIN junction of the microring resonator caused by the temperature change is obtained, and the voltage variation ΔΙΙ is amplified, shaped, filtered, and AD by the signal processing unit. At After obtaining the digital signal, the digital signal is input to the FPGA control unit. After fitting and analyzing, the voltage driving signal of the output b channel is loaded into the heater driving unit module, and the voltage driving signal of the b channel is converted by the DA of the heater driving unit. After generating an analog voltage driving signal, the heater is loaded into the microring resonator after impedance matching with the peripheral matching circuit of the heater driving unit, and the temperature of the microring resonator is adjusted by changing the voltage applied to the heater to change the temperature of the microring resonator. Thereby maintaining the spectral stability of the microring resonator.
进一步地, 所述 a路的开关驱动信号在 FPGA控制单元对数字信号进行分 析之前输入给源表功能模块。  Further, the switch driving signal of the a channel is input to the source table function module before the FPGA control unit analyzes the digital signal.
本发明的发明目的是这样实现的:  The object of the invention is achieved in this way:
本发明稳定微环谐振器光谱的装置, 给微环谐振器的 PIN结通入一电流后, 通过检测微环谐振器因温度变化引起微环谐振器 PIN结两端电压的变化量, 再 将电压变化量经信号处理单元和 FPGA控制单元处理后, 生成用于稳定微环谐 振器光谱的电压驱动信号, 具有设计工艺简单、 易操作的特点。 在实际的配置 中, PIN结实时检测每个微环开关的工作温度,解决了因微环数目多而无法定位 的问题, 且不需要额外的功能器件, 同时具有温度检测速度快和低成本的优点, 能够适应当前光通信系统高速发展的需要。  The device for stabilizing the spectrum of the microring resonator, after the current is applied to the PIN junction of the microring resonator, detects the change of the voltage across the PIN junction of the microring resonator due to the temperature change of the microring resonator, and then After the voltage variation is processed by the signal processing unit and the FPGA control unit, a voltage driving signal for stabilizing the spectrum of the microring resonator is generated, which has the characteristics of simple design process and easy operation. In the actual configuration, the PIN junction detects the operating temperature of each micro-ring switch in real time, solves the problem that the number of micro-rings cannot be located, and does not require additional functional devices, and has a fast temperature detection and low cost. The advantage is that it can adapt to the needs of the rapid development of current optical communication systems.
同时, 本发明稳定微环谐振器光谱的装置还具有以下有益效果:  At the same time, the device for stabilizing the spectrum of the microring resonator of the present invention has the following beneficial effects:
( 1 )、 本发明通过检测微环谐振器因温度变化引起微环谐振器 PIN结两端 电压的变化量来稳定微环谐振器的光谱, 具有设计工艺简单、 易操作的特点。  (1) The invention stabilizes the spectrum of the microring resonator by detecting the variation of the voltage across the PIN junction of the microring resonator due to the temperature change of the microring resonator, and has the characteristics of simple design process and easy operation.
(2)、 本发明中 PIN结实时检测每个微环开关的工作温度, 解决了因微环 数目多而无法定位的问题, 且不需要额外的功能器件, 具有温度检测快和低成 本的优点。  (2) In the present invention, the PIN junction detects the operating temperature of each micro-ring switch in real time, solves the problem that the number of micro-rings cannot be located, and does not require additional functional devices, and has the advantages of fast temperature detection and low cost. .
附图说明 DRAWINGS
图 1是本发明稳定微环谐振器光谱的装置架构图;  1 is a block diagram of an apparatus for stabilizing a spectrum of a microring resonator of the present invention;
图 2是图 1所示微环谐振器中 PIN结随温度变化的电压-电流关系图; 图 3是图 1所示微环谐振器中 PIN结的电压随温度变化关系图。 具体实施方式 下面结合附图对本发明的具体实施方式进行描述, 以便本领域的技术人员更 好地理解本发明。 需要特别提醒注意的是, 在以下的描述中, 当己知功能和设 计的详细描述也许会淡化本发明的主要内容时, 这些描述在这里将被忽略。 实施例 图 1是本发明稳定微环谐振器光谱的装置架构图。 2 is a voltage-current relationship diagram of a PIN junction as a function of temperature in the microring resonator of FIG. 1. FIG. 3 is a graph showing voltage versus voltage of a PIN junction in the microring resonator of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The specific embodiments of the present invention are described below in conjunction with the drawings in order to provide a better understanding of the invention. Need to pay special attention to the following description, in the description of the function and design When the detailed description of the meter may dilute the main content of the present invention, these descriptions will be omitted here. Embodiment FIG. 1 is a block diagram of a device for stabilizing a microring resonator spectrum of the present invention.
图 2是图 1所示微环谐振器中 PIN结随温度变化的电压-电流关系图。  Figure 2 is a graph showing the voltage-current relationship of the PIN junction as a function of temperature in the microring resonator of Figure 1.
图 3是图 1所示微环谐振器中 PIN结的电压随温度变化关系图。  Fig. 3 is a graph showing the relationship between the voltage of the PIN junction and the temperature in the microring resonator of Fig. 1.
在本实施例中, 以波长为 1.55um处色散为 0且只支持 TE基膜的脊型波导 结构为例,脊型波导左臂两侧重掺杂 P型杂质,在脊型波导右臂的左侧重掺杂 N 型杂质、 右侧重掺杂 P型杂质, 为了增加导电性, 中间的本征 I区进行了 N型 杂质的轻度掺杂。 如图 1所示, 一种稳定微环谐振器光谱的装置, 包括:  In the present embodiment, a ridge waveguide structure having a dispersion of 0 at a wavelength of 1.55 um and supporting only a TE base film is exemplified, and a P-type impurity is heavily doped on both sides of the left arm of the ridge waveguide, and is left on the right arm of the ridge waveguide. Focusing on the doping of the N-type impurity and the heavily doped P-type impurity on the right side, in order to increase the conductivity, the intrinsic I region in the middle is lightly doped with the N-type impurity. As shown in FIG. 1, a device for stabilizing the spectrum of a microring resonator includes:
一微环谐振器 1, 包括加热器和 PIN结, 通过源表功能模块 4加载给 PIN 结上的电流实现微环谐振器 1的开或关, 同时检测微环谐振器 1的温度变化; 一信号处理单元 2, 包括放大、 整形、 滤波电路和高精度的模拟 /数字转换 器 (AD), 用于将源表功能模块 4反馈的电压变化量 Δυ依次经过放大、 整形、 滤波处理后输入到 AD, 将模拟信号转换成数字信号反馈给 FPGA控制单元 3;  a microring resonator 1, comprising a heater and a PIN junction, is enabled to open or close the microring resonator 1 by a current applied to the PIN junction by the source meter function module 4, and simultaneously detects a temperature change of the microring resonator 1; The signal processing unit 2 includes an amplification, shaping, filtering circuit and a high-precision analog/digital converter (AD) for sequentially inputting the voltage variation Δυ fed back from the source table function module 4 through amplification, shaping, filtering, and input to AD, converting the analog signal into a digital signal and feeding back to the FPGA control unit 3;
一 FPGA控制单元 3, 用于生成 a路的开关驱动信号, 同时接收来自信号处 理单元 2的数字信号, 通过对数字信号进行拟合、 分析输出 b路的电压驱动信 号, a路的开关驱动信号输入给源表功能模块 4, b路的电压驱动信号输入给加 热器驱动单元模块 5, a路的开关驱动信号在 FPGA控制单元 3对数字信号进行 分析之前输入给源表功能模块 4;  An FPGA control unit 3 is configured to generate a switch driving signal of the channel a, and simultaneously receive the digital signal from the signal processing unit 2, and by fitting and analyzing the digital signal, the voltage driving signal of the output b channel, the switch driving signal of the a channel Input to the source table function module 4, the voltage driving signal of the b channel is input to the heater driving unit module 5, the switch driving signal of the a channel is input to the source table function module 4 before the FPGA control unit 3 analyzes the digital signal;
一源表功能模块 4, 包括电流型数字 /模拟转换器 (DA) 和电压跟随器; 源 表功能模块 4接收到 a路的开关驱动信号后,通过高精度的 DA转换成恒定电流 i,再将恒定电流 i输入到微环谐振器 1的右半臂 PIN结; 同时检测微环谐振器 1 因温度变化引起微环谐振器 PIN结两端电压的变化量 AU, 并将电压变化量 AU 反馈给信号处理单元 2;  A source meter function module 4, including a current type digital/analog converter (DA) and a voltage follower; the source table function module 4 receives the switch drive signal of the a channel, and converts it into a constant current i through a high precision DA, and then The constant current i is input to the right half arm PIN junction of the microring resonator 1; at the same time, the amount of change AU of the voltage across the PIN junction of the microring resonator caused by the temperature change of the microring resonator 1 is detected, and the voltage change amount AU is fed back. Giving signal processing unit 2;
一加热器驱动单元 5, 包括 DA和外围匹配电路; 加热器驱动单元 5接收到 b路的电压驱动信号后, 先通过高精度的 DA转换成模拟电压驱动信号, 再将模 拟电压驱动信号经过外围匹配电路实现阻抗匹配后加载到微环谐振器 1 的加热 器, 通过改变加载到加热器两端的电压产生热量来调节微环谐振器 1温度变化。  a heater driving unit 5, comprising a DA and a peripheral matching circuit; after receiving the voltage driving signal of the b channel, the heater driving unit 5 first converts the analog voltage driving signal into high-precision DA, and then passes the analog voltage driving signal through the periphery. The matching circuit performs impedance matching and is loaded into the heater of the microring resonator 1, and the temperature change of the microring resonator 1 is adjusted by changing the voltage generated by the voltage applied across the heater.
本实施例中, 由于光波导的加工工艺存在误差, 为了使微环谐振器 1 的波 长在理想的状态, 在 PIP两端加上一个合适的电压 V=4V, 通过热光效应来弥补 工艺的误差。 In this embodiment, since the processing process of the optical waveguide has an error, in order to make the wave of the microring resonator 1 In the ideal state, a suitable voltage V=4V is applied across the PIP to compensate for the process error by the thermo-optic effect.
设温度只在小范围内做波动, 在初始状态下, 微环谐振器稳定地工作在 Let the temperature fluctuate only in a small range. In the initial state, the microring resonator works stably.
310K, FPGA控制单元 3输出一个 a路的开关驱动信号给源表功能模块 4中通 过高精度 DA后转换成 1mA恒定电流, 输入到微环谐振器的 PIN结中, 则 PIN 结的电流与电压之间的关系为 I = Is (eVq/kT -l),其中 I是流过 PIN结的电流, 1是 反向饱和电流, V是 PIN两端的电压, q是元电荷, k是波尔茨曼常数, T是 PIN 结的绝对温度。 即温度一定时, PIN结通过的电流随电压呈指数递增; 当温度升 高时, 如图 2所示, 其 I-V曲线向上移动。 同时, 从上式可以看出, 当输入电流 一定时, PIN结两端的电压与所处的温度呈线性关系, 在 310K温度处的输出电 压为 0.84V,因此可以以此电压为基准判断电压的变化,从而得到温度的变化量。 当温度增加时, 其两端的电压下降, 如图 3所示, 电压下降 1.2mV, 表明温度 上升 1K。 从图 3表明, 只要检测 PIN结两端的电压, 就可以得到温度信息, 电 压与温度具有很好的线性度, 这保证了 PIN结探测微环谐振器 1温度的可靠性 及准确性。 310K, FPGA control unit 3 outputs a switch signal of a channel to the source meter function module 4, which is converted into a constant current of 1 mA by high-precision DA, and input into the PIN junction of the micro-ring resonator, and the current and voltage of the PIN junction The relationship is I = I s (e Vq/kT -l), where I is the current flowing through the PIN junction, 1 is the reverse saturation current, V is the voltage across the PIN, q is the metacharge, and k is the wave The ltzmann constant, T is the absolute temperature of the PIN junction. That is, when the temperature is constant, the current through which the PIN junction passes increases exponentially with voltage; when the temperature rises, as shown in Fig. 2, the IV curve moves upward. At the same time, it can be seen from the above formula that when the input current is constant, the voltage across the PIN junction is linear with the temperature at which it is placed. The output voltage at the temperature of 310K is 0.84V, so the voltage can be judged based on this voltage. Change to get the amount of change in temperature. When the temperature increases, the voltage across it decreases. As shown in Figure 3, the voltage drops by 1.2 mV, indicating a temperature rise of 1K. It is shown in Fig. 3 that as long as the voltage across the PIN junction is detected, temperature information can be obtained, and the voltage and temperature have a good linearity, which ensures the reliability and accuracy of the temperature of the PIN junction detecting microring resonator 1.
当温度上升 1K时, PIN结两端的电压将下降 1.2mV, 将此电压变化量 Δυ 经过信号处理单元 2输入到 FPGA控制单元 3,从预先存储在 FPGA内部的电压 与温度的关系, FPGA可以分析出此温度的下降程度。 在硅基材料中, 硅的导热 率为 1.49 W/(cm*IQ, 微环的尺寸为 10um。 为了使温度下降 1K, PIP加热器产 生的热量需减小约 0.3278mW。在本实施例的设计中, PIP加热器的阻抗约为 10k 欧姆,为了少产生 0.3278mW能量,通入到 PIP加热器两端的电压需要减小 0.4V, 即此时从 FPGA控制单元 3发送 b路的电压驱动信号到加热器驱动单元 5,经过 处理得到 PIP加热器两端的电压为 3.6V,随着热量的减小,温度持续下降, FPGA 控制单元 3发送出的 b路的电压驱动信号也慢慢增加, 最后回到初始状态。  When the temperature rises by 1K, the voltage across the PIN junction will drop by 1.2mV. This voltage change Δυ is input to the FPGA control unit 3 through the signal processing unit 2, and the relationship between the voltage and temperature stored in the FPGA in advance can be analyzed by the FPGA. The extent to which this temperature has dropped. In the silicon-based material, the thermal conductivity of silicon is 1.49 W/(cm*IQ, and the size of the microring is 10 um. In order to lower the temperature by 1 K, the heat generated by the PIP heater needs to be reduced by about 0.3278 mW. In this embodiment In the design, the impedance of the PIP heater is about 10k ohms. In order to generate 0.3278mW of energy, the voltage across the PIP heater needs to be reduced by 0.4V, that is, the voltage drive signal of the b channel is sent from the FPGA control unit 3. To the heater driving unit 5, the voltage across the PIP heater is 3.6V, and as the heat decreases, the temperature continues to decrease, and the voltage driving signal of the b channel sent by the FPGA control unit 3 gradually increases. Go back to the initial state.
当温度下降 1K时, 此时探测到 PIN结两端的电压增加 1.2mV, 经过 FPGA 的分析后, 增加 PIP加热器两端的电压 0.4V, 即加热电压变为 4.4V, 产生的额 外热量使温度升高。 当温度因加热而上升 0.5K时, PIN两端的电压减小 0.6mV。 此时只需产生额外的热量 0.1639mW, 加热电压变为 4.2V。 温度逐渐升高、 探 测到的电压变化减小, 加热电压逐渐降低, 最后都趋近于平衡状态。 由以上可知, 通过高精度电路的设计实现, 消除了温度变化对微环光谱的 影响, 获得稳定的微环光开关光谱。 由于在单个微环开关中都能够集成 PIN结 和 PIP加热器, 实现了对每个微环的准确控制。 When the temperature drops by 1K, the voltage across the PIN junction is increased by 1.2mV. After the analysis of the FPGA, the voltage across the PIP heater is increased by 0.4V, that is, the heating voltage becomes 4.4V, and the additional heat generated causes the temperature to rise. high. When the temperature rises by 0.5K due to heating, the voltage across the PIN is reduced by 0.6 mV. At this point, only an additional amount of heat of 0.1639 mW is generated, and the heating voltage becomes 4.2V. The temperature gradually rises, the detected voltage changes decrease, the heating voltage gradually decreases, and finally approaches equilibrium. It can be seen from the above that the design of the high-precision circuit eliminates the influence of temperature changes on the micro-ring spectrum, and obtains a stable micro-ring optical switch spectrum. Since the PIN junction and PIP heater can be integrated in a single micro-ring switch, accurate control of each micro-ring is achieved.
尽管上面对本发明说明性的具体实施方式进行了描述, 以便于本技术领域 的技术人员理解本发明, 但应该清楚, 本发明不限于具体实施方式的范围, 对 本技术领域的普通技术人员来讲, 只要各种变化在所附的权利要求限定和确定 的本发明的精神和范围内, 这些变化是显而易见的, 一切利用本发明构思的发 明创造均在保护之列。  While the invention has been described with respect to the preferred embodiments of the present invention, it should be understood that These variations are obvious as long as the various changes are within the spirit and scope of the invention as defined and claimed in the appended claims, and all inventions that utilize the inventive concept are protected.

Claims

权 利 要 求 书 claims
1、 一种稳定微环谐振器光谱的装置, 其特征在于包括: 1. A device for stabilizing the spectrum of a microring resonator, which is characterized by including:
一微环谐振器, 包括加热器和 PIN结, 通过源表功能模块加载给 PIN结上 的电流实现微环谐振器的开或关, 同时检测微环谐振器的温度变化; A micro-ring resonator, including a heater and a PIN junction. The current loaded to the PIN junction through the source meter function module enables the micro-ring resonator to be turned on or off, and at the same time detects the temperature change of the micro-ring resonator;
一信号处理单元, 包括放大、 整形、 滤波电路和高精度的模拟 /数字转换器 (AD), 用于将源表功能模块反馈的电压变化量 U依次经过放大、 整形、 滤波 处理后输入到高精度的模拟 /数字转换器 (AD), 将模拟信号转换成数字信号反 馈给 FPGA控制单元; A signal processing unit, including amplification, shaping, filtering circuits and a high-precision analog/digital converter (AD), used to amplify, shape, and filter the voltage variation U fed back by the source meter function module in sequence and then input it to the high-voltage Precision analog/digital converter (AD) converts analog signals into digital signals and feeds them back to the FPGA control unit;
一 FPGA控制单元, 用于生成 a路的开关驱动信号, 同时接收来自信号处 理单元的数字信号, 通过对数字信号进行拟合、 分析输出 b路的电压驱动信号; a路的开关驱动信号输入给源表功能模块, b路的电压驱动信号输入给加热器驱 动单元模块; An FPGA control unit, used to generate the switch drive signal of channel a, and at the same time receive the digital signal from the signal processing unit, and output the voltage drive signal of channel b by fitting and analyzing the digital signal; the switch drive signal of channel a is input to Source meter function module, the voltage drive signal of channel b is input to the heater drive unit module;
一源表功能模块, 包括电流型数字 /模拟转换器(DA)和电压跟随器; 源表 功能模块接收到 a路的开关驱动信号后, 通过高精度的 DA转换成恒定电流 i, 再将恒定电流 i输入到微环谐振器的右半臂 PIN结;同时检测微环谐振器因温度 变化引起微环谐振器 PIN结两端电压的变化量 ΔΙΙ, 并将电压变化量 ΔΙΙ反馈给 信号处理单元; A source meter function module, including a current-type digital/analog converter (DA) and a voltage follower; after receiving the switch drive signal of channel a, the source meter function module converts it into a constant current i through high-precision DA, and then converts the constant current i The current i is input to the right half-arm PIN junction of the micro-ring resonator; at the same time, the change amount ΔΙΙ of the voltage at both ends of the micro-ring resonator PIN junction caused by the temperature change of the micro-ring resonator is detected, and the voltage change amount ΔΙΙ is fed back to the signal processing unit ;
一加热器驱动单元, 包括 DA 和外围匹配电路; 加热器驱动单元接收到 b 路的电压驱动信号后, 先通过高精度的 DA 转换成模拟电压驱动信号, 再将模 拟电压驱动信号经过外围匹配电路实现阻抗匹配后加载到微环谐振器的加热 器, 通过改变加载到加热器两端的电压产生热量来调节微环谐振器温度变化; 装置启动后, 由 FPGA控制单元输出 a路开关驱动信号到源表功能模块, 经源表功能模块中的 DA转换后生成恒定电流 i, 再将恒定电流输入到微环谐振 器的右半臂 PIN结控制微环谐振器的开或关; PIN结在输入电流后能检测出微 环谐振器的温度变化量, 得到由温度变化引起微环谐振器 PIN结两端电压的变 化量 ΔΙΙ, 将电压变化量 ΔΙΙ经过信号处理单元的放大、 整形、 滤波、 AD处理 后得到数字信号, 数字信号输入到 FPGA控制单元, 经拟合、 分析后, 输出 b 路的电压驱动信号加载到加热器驱动单元模块, b路的电压驱动信号经加热器 驱动单元的 DA转换后生成模拟电压驱动信号, 与加热器驱动单元的外围匹配 电路实现阻抗匹配后加载到微环谐振器的加热器, 通过改变加载到加热器两端 的电压产生热量来调节微环谐振器温度变化, 从而保持微环谐振器的光谱稳定。 A heater drive unit, including DA and peripheral matching circuit; after receiving the voltage drive signal of channel b, the heater drive unit first converts it into an analog voltage drive signal through high-precision DA, and then passes the analog voltage drive signal through the peripheral matching circuit After achieving impedance matching, the heater loaded into the microring resonator generates heat by changing the voltage loaded to both ends of the heater to adjust the temperature change of the microring resonator; after the device is started, the FPGA control unit outputs a switch drive signal to the source. The meter function module generates a constant current i after being converted by DA in the source meter function module, and then inputs the constant current into the right half-arm PIN junction of the microring resonator to control the opening or closing of the microring resonator; the PIN junction controls the input current Finally, the temperature change amount of the micro-ring resonator can be detected, and the change amount ΔΙΙ of the voltage at both ends of the PIN junction of the micro-ring resonator caused by the temperature change is obtained. The voltage change amount ΔΙΙ is amplified, shaped, filtered, and AD processed by the signal processing unit. Finally, the digital signal is obtained, and the digital signal is input to the FPGA control unit. After fitting and analysis, the voltage drive signal of the output channel b is loaded to the heater drive unit module. The voltage drive signal of channel b is converted by the DA of the heater drive unit. Generates analog voltage drive signals to match the periphery of the heater drive unit After the circuit achieves impedance matching, it is loaded into the heater of the microring resonator. By changing the voltage applied to both ends of the heater, heat is generated to adjust the temperature change of the microring resonator, thereby maintaining the spectral stability of the microring resonator.
2、 根据权利要求 1所述的稳定微环谐振器光谱的装置, 其特征在于包括, 所述的 a路的开关驱动信号在 FPGA控制单元对数字信号进行分析之前输入给 源表功能模块。 2. The device for stabilizing the spectrum of a microring resonator according to claim 1, characterized by comprising: the switch driving signal of path a is input to the source meter function module before the FPGA control unit analyzes the digital signal.
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