CN104614877A - Tunable cascading micro-ring filter - Google Patents
Tunable cascading micro-ring filter Download PDFInfo
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- CN104614877A CN104614877A CN201510061212.5A CN201510061212A CN104614877A CN 104614877 A CN104614877 A CN 104614877A CN 201510061212 A CN201510061212 A CN 201510061212A CN 104614877 A CN104614877 A CN 104614877A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a tunable cascading micro-ring filter which comprises input waveguide, a first-stage micro-ring resonant cavity, a first heater, connection waveguide, a second-stage micro-ring resonant cavity, a second heater and output waveguide. The input waveguide is the input waveguide of the first-stage micro-ring resonant cavity. The first heater is located on the first-stage micro-ring resonant cavity. The connection waveguide is the connection waveguide between the first-stage micro-ring resonant cavity and the second-stage micro-ring resonant cavity. The second heater is located on the second-stage micro-ring resonant cavity. The output waveguide is the output waveguide of the second-stage micro-ring resonant cavity. The first heater and the second heater heat the first-stage micro-ring resonant cavity and the second-stage micro-ring resonant cavity respectively so as to change the resonant wavelength of the first-stage micro-ring resonant cavity and the second-stage micro-ring resonant cavity.
Description
Technical field
The present invention relates to integrated optics field, provide the micro-ring wave filter of Thermo-optic tunability cascade of quasi-continuous filtering in super large Free Spectral Range.
Background technology
In modern optical networks technology, reconstructing light top and bottom path wavelength division multiplexer (ROADM) can allocate capacity and reconstruct dense wavelength division multiplexing (DWDM) network neatly, is the Primary Component of optical-fiber network automatic switch.Although FFP wave filter achieves commercialization, and the optical-fiber network that can be used for realizing low speed is applied, because its tuning range is less than EDFA wave band, so limit its application.Liquid crystal filter has the performance similar with FFP, although it has wider tunable range and tuned speed faster, it is also not large-scale commercial.MEMS wave filter, owing to there is integrity problem, makes MEMS finally can not move towards industrialization.There is not the problem with optical fiber align in FBG wave filter, achieves commercialization, but FBG tuning range is very little, can not meet the requirement that wide range of wavelengths is tuning.The problems such as acousto-optic tunable filter is also commercial and realize multi-wavelength frequency-selecting, but it is roomy to there is band, the high and frequency displacement of side lobe.Active tunable wave filter is great potential in hypervelocity and narrow bandwidth, but it is still a problem to the requirement of the stability of temperature and electric current.The people such as the Joonoh Park of Kwangwoon university of Korea S in 2008 are at IEEE Photonics TechnologyLetters, VOL.20, NO.12,2008, pp.988-990 reports a kind of Thermo-optic tunability wave filter of the micro-ring of coupling based on high molecular polymer Ploymer waveguide, concrete structure is the two micro-ring structure of single waveguide-coupled, and is also in couple state between two micro-rings, its shortcoming is filtering spectrum is multimodal envelope structure, can not realize the unimodal filtering spectral pattern of high side mode suppression ratio.Therefore be necessary to propose the micro-ring waveguide coupled structure of a kind of brand-new cascade, the unimodal filtering spectral pattern of high side mode suppression ratio can be realized.
On the other hand, the silicon photon line waveguide on SOI is specially adapted to the integrated and photonic integrated circuits of photoelectricity, and and existing microelectronics CMOS standard technology compatibility good, and its chemical stability is far superior to polymer P loymer waveguide.Although possess based on single micro-ring resonant cavity filter of SOI photon line waveguide the advantage that volume is little, pass band width is narrow, its shortcoming needs larger heating current could obtain relatively large wavelength tuning.Therefore, be necessary to adopt the novel micro-ring waveguide coupled structure of cascade, just can realize large-scale wavelength tuning amount with very little heating current.
Therefore, for solving above-mentioned variety of problems, the present invention aims to provide that a kind of size is little, low-power consumption, the micro-ring wave filter of accessible site planar optical waveguide Thermo-optic tunability cascade that tuning range is large.
Summary of the invention
The present invention aims to provide that a kind of size is little, low-power consumption, the micro-ring wave filter of accessible site planar optical waveguide Thermo-optic tunability cascade that tuning range is large, it is tuning that its advantage is to utilize the small large-scale overall wavelength of the tuning acquisition of monocycle resonance wavelength.
For this reason, the present invention proposes the micro-ring wave filter of a kind of tunable cascade, comprising:
Input waveguide, it is the input waveguide of first order micro-ring resonant cavity;
First order micro-ring resonant cavity;
Primary heater, it is positioned on first order micro-ring resonant cavity;
Connect waveguide, it is the connection waveguide between first order micro-ring resonant cavity and second level micro-ring resonant cavity;
Second level micro-ring resonant cavity;
Secondary heater, it is positioned on the micro-ring resonant cavity of the second level;
Output waveguide, it is the output waveguide of second level micro-ring resonant cavity;
Wherein, respectively described first order micro-ring resonant cavity and second level micro-ring resonant cavity are heated by described primary heater and secondary heater, to change the resonance wavelength of described first order micro-ring resonant cavity and the second micro-ring resonant cavity.
The principle of work of the micro-ring wave filter of above-mentioned Thermo-optic tunability cascade is: the radius based on two cascade micro-ring resonant cavities is different, its respective Free Spectral Range FSR is different, filter wavelength total after cascade is determined by the alignment condition of two cascade micro-ring resonant cavities periodicity resonance wavelength separately, and the resonance wavelength namely only having two cascade micro-ring resonant cavities mutually to aim at just can become the filter wavelength of the micro-ring wave filter of whole Thermo-optic tunability cascade.By adjusting the heating current of resistance heater on micro-ring resonant cavity at different levels respectively during wavelength tuning, namely can by small resonance wavelength tuning amount, obtain large-scale overall wavelength tuning amount.
The present invention replaces traditional micro-ring wave filter of single upload/download (Add/Drop) type Thermo-optic tunability with the micro-ring wave filter of Thermo-optic tunability cascade.Compared with traditional micro-ring wave filter of single upload/download (Add/Drop) type Thermo-optic tunability, the present invention has the following advantages:
(1) can the quasi-continuous selection carrying out frequency range;
(2) large-scale quasi-continuous filtering can be realized in the frequency range selected;
(3) utilize single-chip microcomputer to carry out control to the drive current of resistance heater and can realize thermo-optical tunability more accurately.
Accompanying drawing explanation
For further illustrating content of the present invention and feature, below in conjunction with drawings and Examples, the present invention is described in detail, wherein:
Fig. 1 is cascade micro-ring wave filter filter wavelength choosing principles figure;
Fig. 2 is the structure and working principle figure of the micro-ring wave filter device of tunable cascade in the present invention;
Fig. 3 is the static light spectrogram of the micro-ring wave filter device of tunable cascade in the present invention of obtaining of computer simulation;
Fig. 4 is the thermo-optical tunability spectrogram of the micro-ring wave filter device of tunable cascade in the present invention of obtaining of computer simulation.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
Refer to Fig. 2, Fig. 2 is the structure and working principle figure of the micro-ring wave filter of SOI planar optical waveguide Thermo-optic tunability cascade of a kind of large wavelength tuning amount provided by the invention, comprising:
, a SOI singlemode input waveguide 10, preferably, it is high that its waveguide cross-section is of a size of the wide 340nm of 450nm;
Article one, single mode connects waveguide 11, and it is horizontal U-shaped waveguide, and one end of U-shaped is as the output waveguide of first order SOI micro-ring resonant cavity 20, and the other end is as the input waveguide of second level SOI micro-ring resonant cavity 21;
Radius is preferably the first order SOI micro-ring resonant cavity 20 of 48 μm, and it is between input waveguide 10 and output waveguide 11, and the input waveguide of this micro-ring resonant cavity is singlemode input waveguide 10, and output waveguide is that single mode connects waveguide 11; Interval Gap between micro-ring and input and output waveguide is preferably 280nm; Wherein, singlemode input waveguide 10 is connected waveguide 11 and is common slab waveguide with single mode, locus is arranged in the both sides of first order SOI micro-ring resonant cavity 20, be preferably 280nm with the disc waveguide lateral separation Gap of first order SOI micro-ring resonant cavity 20, become the input and output waveguide of micro-ring resonant cavity 20 by the evanescent field coupling of light wave.
Can be the first resistance heater 30 of Ar material, it can be bending room structure, this well heater can be produced on the waveguide top covering of first order micro-ring resonant cavity 20 by metal sputtering and photoetching process, namely the first resistance heater 30 covers on the waveguide top covering of first order micro-ring resonant cavity 20, changed the waveguide core layer refractive index of first order micro-ring resonant cavity 20 during heating by heat transfer, and then change its resonance wavelength;
First driving power 33, it heats for driving the first electric resistance heater 30;
, a SOI single-mode output waveguide 12;
Another radius is preferably the second level SOI micro-ring resonant cavity 21 of 50 μm, the input waveguide of this micro-ring resonant cavity is that single mode connects waveguide 11, output waveguide is single-mode output waveguide 12, it connects between waveguide 11 and output waveguide 12 at described single mode, and the interval Gap between micro-ring and input and output waveguide is preferably 280nm; Single mode connects waveguide 11 and single-mode output waveguide 12 is common slab waveguide, locus is arranged in the both sides of second level SOI micro-ring resonant cavity 21, be preferably 280nm with the disc waveguide lateral separation Gap of second level SOI micro-ring resonant cavity 21, become the input and output waveguide of micro-ring resonant cavity 21 by the evanescent field coupling of light wave.
Can be the second resistance heater 31 of Ar material, it can be bending room structure, this well heater can be produced on second level micro-ring resonant cavity 21 by metal sputtering and photoetching process, namely the second resistance heater 31 covers on the waveguide top covering of second level micro-ring resonant cavity 21, changed the waveguide core layer refractive index of second level micro-ring resonant cavity 21 during heating by heat transfer, and then change its resonance wavelength;
Second driving power 32, it heats for driving the second resistance heater 31;
One monolithic controller 40, radius is preferably the first resistance heater 30 of the first order micro-ring resonant cavity 20 of 48 μm and the first driving power 32 and radius thereof and is preferably the second resistance heater 31 of the second level micro-ring resonant cavity 21 of 50 μm and the second driving power 33 thereof and is all connected on this single-chip microcomputer and controls by it, and the driving power namely controlling the first resistance heater 30 and the second resistance heater 31 by single-chip microcomputer preset program exports predetermined heating current.
Referring to Fig. 2, a branch of wide spectrum optical inputs from singlemode input waveguide 10 and is coupled into the micro-ring resonant cavity 20 that first order radius is 48 μm, after the resonator, filter effect of micro-ring resonant cavity 20, the spectrum transmitted by singlemode input waveguide 10 transmission port is a series of recess spectrum of approximately equal wavelength interval, the resonance wavelengths at different levels of the corresponding micro-ring resonant cavity of recess wavelength, the interval between recess wavelength is exactly the free spectrum wide FSR1 ≈ 2.6nm of first order micro-ring resonant cavity 20.Exported by the coupled one end connecting waveguide 11 at the output light of its download port by single mode after first order micro-ring resonant cavity 20 filtering, output spectra is a series of needle pattern spectrum of approximately equal wavelength interval, a series of depression spectral wavelength one_to_one corresponding of the approximately equal wavelength interval that its spectrum spike wavelength and singlemode input waveguide 10 transmission port transmit.The other end that single mode connects waveguide 11 is coupling-connected on second level micro-ring resonant cavity 21 as input waveguide, the input light of light as second level micro-ring resonant cavity 21 of waveguide 11 one end output is connected by single mode, again after the resonator, filter effect of second level micro-ring resonant cavity 21, because the vernier scale effect (English is Vernier effect) of cascade double filter filter wavelength only has the wavelength of the condition of resonance meeting above-mentioned two micro-ring resonant cavities could to export from single-mode output waveguide 12 end of second level micro-ring resonant cavity simultaneously, so just achieve the frequency-selective filtering of single wavelength.
When a certain resonance wavelength of first order radius to be the micro-ring resonant cavity 20 of 48 μm and second level radius the be micro-ring resonant cavity 21 of 50 μm
00during coincidence, then the filter wavelength of cascade micro-ring resonant cavity filter is λ
00; When the resistance heater 31 by radius being 50 μm heats, when being the effective refractive index of micro-ring waveguide of the micro-ring resonant cavity 21 of 50 μm by thermo-optic effect change second level radius, the resonance wavelength of second level micro-ring resonant cavity 21 will be moved (blue shift or red shift depend on and heat up or cooling).The wide FSR of free spectrum due to two micro-ring resonant cavities is different, when the resonance wavelength of a micro-ring resonant cavity moves, due to the vernier scale effect (the Vernier effect namely in english literature) of wave length filtering, in a wavelength range, only has another wavelength X of the resonance wavelength being simultaneously first order micro-ring resonant cavity 20 and second level micro-ring resonant cavity 21
01just can be overlapped, therefore will be realized the change of the filter wavelength of wave filter by thermo-optical tunability, namely realize wavelength tuning function.It is tuning with above-mentioned change second level radius to be that the mode of micro-ring resonant cavity 21 temperature of 50 μm can only obtain discrete discrete wavelength, namely filter wavelength is in spectrally discontinuous change, but the saltus step of certain small wavelength interval, this small wavelength interval equals the difference of the Free Spectral Range FSR of first order micro-ring resonant cavity 20 and second level micro-ring resonant cavity 21.Obtain quasi continuous spectrum wavelength tuning, need to carry out thermo-optical tunability to two micro-ring resonant cavities simultaneously, utilize single-chip microcomputer 40 Control Radius to be the first resistance heater 30 of the micro-ring resonant cavity 20 of 48 μm and radius to be the drive current on the second resistance heater 31 of the micro-ring resonant cavity 21 of 50 μm and then control it and add heat, be the selection that the thermo-optical tunability of the micro-ring resonant cavity 20 of 48 μm carries out different wave length frequency range within the scope of 65nm to first order radius, this 65nm scope is exactly the Δ λ marked in Fig. 1
maxit depends on the difference of the Free Spectral Range of the first micro-ring resonant cavity 20 and the second micro-ring resonant cavity 21, be the wavelength fine setting that the thermo-optical tunability of the micro-ring resonant cavity 21 of 50 μm carries out in selected frequency range to second level radius, utilize the cascading filter vernier scale effect of two micro-ring resonant cavities can realize quasi-continuous frequency-selective filtering on a large scale.
Fig. 3 is the static light spectrogram of the micro-ring wave filter device of tunable cascade provided by the invention of computer simulation, and its Free Spectral Range is 65nm.
Fig. 4 is the thermo-optical tunability spectrogram of the micro-ring wave filter device of tunable cascade provided by the invention of computer simulation, calculate in figure when second level radius be 50 μm micro-ring resonant cavity 21 when initial temperature and fluctuate 2 degrees Celsius adjustable filter total output spectrum figure.Its crosstalk can reach below-40dB, can well realize the frequency-selective filtering of spectrum.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the micro-ring wave filter of tunable cascade, comprising:
Input waveguide (10), it is the input waveguide of first order micro-ring resonant cavity (20);
First order micro-ring resonant cavity (20);
Primary heater (30), it is positioned on first order micro-ring resonant cavity (20);
Connect waveguide (11), it is the connection waveguide between first order micro-ring resonant cavity (20) and second level micro-ring resonant cavity (21);
Second level micro-ring resonant cavity (21);
Secondary heater (31), it is positioned on second level micro-ring resonant cavity (21);
Output waveguide (12), it is the output waveguide of second level micro-ring resonant cavity;
Wherein, respectively described first order micro-ring resonant cavity (20) and second level micro-ring resonant cavity (21) are heated by described primary heater (30) and secondary heater (31), to change the resonance wavelength of described first order micro-ring resonant cavity (20) and the second micro-ring resonant cavity (21).
2. the micro-ring wave filter of tunable cascade as claimed in claim 1, wherein, described first order micro-ring resonant cavity (20) is different with micro-ring radius of the second micro-ring resonant cavity (21).
3. the micro-ring wave filter of tunable cascade as claimed in claim 1, wherein, the refractive index of described first order micro-ring resonator chamber (20) and described second level micro-ring resonant cavity (21) is changed respectively by the heating of described primary heater and secondary heater.
4. the micro-ring wave filter of tunable cascade as claimed in claim 1, wherein, by primary heater (30), the first micro-ring resonant cavity (20) is heated, or by secondary heater (31) to the second micro-ring resonant cavity (21) heating, to change the filter wavelength of described wave filter.
5. the micro-ring wave filter of tunable cascade as claimed in claim 1, wherein, described first order micro-ring resonant cavity (20) and second level micro-ring resonant cavity (21) are heated by primary heater (30) and secondary heater (31) simultaneously, obtain quasi continuous spectrum wavelength tuning.
6. the micro-ring wave filter of tunable cascade as claimed in claim 1, wherein, described primary heater and secondary heater are resistance heater.
7. the micro-ring wave filter of tunable cascade as claimed in claim 6, wherein, described primary heater and secondary heater are produced on described first order micro-ring resonant cavity and second level micro-ring resonant cavity.
8. the micro-ring wave filter of the tunable cascade as described in any one of claim 1-7, wherein, the radius of described first order micro-ring resonant cavity and second level micro-ring resonant cavity is respectively 48 μm and 50 μm.
9. the micro-ring wave filter of the tunable cascade as described in any one of claim 1-7, it also comprises:
First driving power (32), drives described primary heater for electric current;
Second driving power (33), drives described secondary heater for electric current;
Controller (40), for controlling described first driving power (32) and the second driving power (33) exports predetermined heating current.
10. the micro-ring wave filter of tunable cascade as claimed in claim 5, wherein, by primary heater heating first order micro-ring resonant cavity to select the different wave length frequency range in preset range, by secondary heater heating second level micro-ring resonant cavity to carry out wavelength fine setting in selected wavelength band.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106054317A (en) * | 2016-06-03 | 2016-10-26 | 浙江大学 | Polarization-insensitive micro-ring filter based on silicon nanowire waveguide |
| CN106842634A (en) * | 2016-12-14 | 2017-06-13 | 上海理工大学 | Automatically controlled tunable optic filter and preparation method based on three-dimensional micro-ring resonant cavity |
| CN108845390A (en) * | 2018-07-02 | 2018-11-20 | 南京航空航天大学 | Reflection-type micro-ring resonator, multi-wavelength light delayer, photon beam forming chip |
| CN110323665A (en) * | 2019-06-27 | 2019-10-11 | 上海交通大学 | Wavelength tunable directly modulates silicon substrate outside cavity gas laser |
| CN110543034A (en) * | 2019-07-18 | 2019-12-06 | 武汉邮电科学研究院有限公司 | On-chip integrated broadband adjustable photon filter |
| CN110596819A (en) * | 2019-09-19 | 2019-12-20 | 中国科学院半导体研究所 | Narrow-band optical filter based on micro-ring resonator |
| CN110673266A (en) * | 2019-09-19 | 2020-01-10 | 中国科学院半导体研究所 | Narrow-band optical filter based on high-order micro-ring resonator |
| CN110764191A (en) * | 2019-11-01 | 2020-02-07 | 灵芯光电(天津)有限公司 | Micro-ring-based rectangular optical filter and design method thereof |
| CN110927885A (en) * | 2019-11-29 | 2020-03-27 | 中国科学院半导体研究所 | Narrow-band optical filter based on microdisc resonator |
| CN113031162A (en) * | 2021-03-15 | 2021-06-25 | 中国科学院半导体研究所 | Optical filter |
| CN113810115A (en) * | 2020-06-11 | 2021-12-17 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN114428379A (en) * | 2020-10-29 | 2022-05-03 | 青岛海信宽带多媒体技术有限公司 | Optical module |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106054317A (en) * | 2016-06-03 | 2016-10-26 | 浙江大学 | Polarization-insensitive micro-ring filter based on silicon nanowire waveguide |
| CN106842634A (en) * | 2016-12-14 | 2017-06-13 | 上海理工大学 | Automatically controlled tunable optic filter and preparation method based on three-dimensional micro-ring resonant cavity |
| CN106842634B (en) * | 2016-12-14 | 2019-06-28 | 上海理工大学 | Automatically controlled tunable optic filter and preparation method based on three-dimensional micro-ring resonant cavity |
| CN108845390A (en) * | 2018-07-02 | 2018-11-20 | 南京航空航天大学 | Reflection-type micro-ring resonator, multi-wavelength light delayer, photon beam forming chip |
| CN110323665A (en) * | 2019-06-27 | 2019-10-11 | 上海交通大学 | Wavelength tunable directly modulates silicon substrate outside cavity gas laser |
| CN110543034A (en) * | 2019-07-18 | 2019-12-06 | 武汉邮电科学研究院有限公司 | On-chip integrated broadband adjustable photon filter |
| CN110596819B (en) * | 2019-09-19 | 2020-06-19 | 中国科学院半导体研究所 | Narrow-band optical filter based on micro-ring resonator |
| CN110596819A (en) * | 2019-09-19 | 2019-12-20 | 中国科学院半导体研究所 | Narrow-band optical filter based on micro-ring resonator |
| CN110673266A (en) * | 2019-09-19 | 2020-01-10 | 中国科学院半导体研究所 | Narrow-band optical filter based on high-order micro-ring resonator |
| CN110764191A (en) * | 2019-11-01 | 2020-02-07 | 灵芯光电(天津)有限公司 | Micro-ring-based rectangular optical filter and design method thereof |
| CN110927885A (en) * | 2019-11-29 | 2020-03-27 | 中国科学院半导体研究所 | Narrow-band optical filter based on microdisc resonator |
| CN110927885B (en) * | 2019-11-29 | 2020-11-13 | 中国科学院半导体研究所 | Narrow-band optical filter based on microdisc resonator |
| CN113810115A (en) * | 2020-06-11 | 2021-12-17 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN113810115B (en) * | 2020-06-11 | 2023-02-17 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN114428379A (en) * | 2020-10-29 | 2022-05-03 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN114428379B (en) * | 2020-10-29 | 2023-09-15 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN113031162A (en) * | 2021-03-15 | 2021-06-25 | 中国科学院半导体研究所 | Optical filter |
| CN113031162B (en) * | 2021-03-15 | 2022-08-05 | 中国科学院半导体研究所 | Optical filter |
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Application publication date: 20150513 |