CN101046531A - Adjustable optical filter based on ring resonant cavity - Google Patents
Adjustable optical filter based on ring resonant cavity Download PDFInfo
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- CN101046531A CN101046531A CN 200710098741 CN200710098741A CN101046531A CN 101046531 A CN101046531 A CN 101046531A CN 200710098741 CN200710098741 CN 200710098741 CN 200710098741 A CN200710098741 A CN 200710098741A CN 101046531 A CN101046531 A CN 101046531A
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Abstract
The adjustable optical filter based on ring resonant cavity consists of an input waveguide, a coupling waveguide, an output waveguide, a ring waveguide, an adjustable micro disc, a lower loading waveguide and an upper loading waveguide. The micro disc is made with refractive index adjustable material and in the same plane as the ring waveguide and inside the ring waveguide, with the interval in between being within one wavelength. The micro disc has the refractive index changed by means of altering the outer condition to realize tuning of the filter. All the waveguides in the filter are monomode ones, and the ring waveguide and the transmission waveguide are separated in such an interval as to ensure sufficient coupling and good machinability. The present invention is simple, convenient, easy to integrate and great in adjustable range, and may be used in WDM/DWDM and other light communication system.
Description
Affiliated technical field
The present invention relates to the optical device field, be specifically related to the design implementation method of a kind of integrated planar waveguide, adjustable light wave-filter, can be applicable to designing and producing of optical communication system median filter and wavelength-division (separating) multiplexing device etc.
Background technology
Optical filter is by having different seeing through and reflection characteristic to the different wave length signal, can realize the shunt of wavelength optical signals or close the road.Therefore can be applicable to particularly have important application prospects and value in the application and research of a large amount of optical systems such as optical communication, sensing measurement and association area at optical communication field.Application for many systems needs optical filter to have certain tunability toward contact, and promptly its response characteristic can change.
At present, people are more and more higher to the requirement of information transmission capacity, and optical communication is because advantages such as its high capacity, two-forty, low-loss have become the main means that information is transmitted.The appearance of light WDM technology has further improved power system capacity, and in recent years, along with the maturation of close wavelength-division multiplex technology, the transfer rate of optical communication system was further enhanced.No matter use any technology, the optical filter Primary Component that all is absolutely necessary.Its main effect is to utilize its filter function to download in the transmission channel to pass to the light signal of the specific wavelength of local node, and uploads the signal that remote node is mail in this locality.
Along with the develop rapidly of optical communication technique, the research of optical filter is deep day by day, the optical filter of reality, superior performance occurred can be applicable in a large number.What occurred at present uses to some extent in practice or has the optical filter of potential application foreground to mainly contain: F-P chamber type optical filter, mach-zehnder interfere type wave filter, grating filter, dielectric film wave filter and based on the optical filter of ring resonator etc.Owing to all at micron order, can realize bigger free spectral limit based on little ring radius of the optical filter of micro-ring resonant cavity, in practice, particularly have broad application prospects in the optical WDM communication system, be the focus of research at present.Regardless of the realization mechanism of wave filter, all optical filter can be divided into fixed filters and adjustable filter two big classes.For the fixed optics wave filter based on micro-ring resonant cavity, modal implementation structure is exactly to be made up of two transmission waveguides and a ring-shaped waveguide resonator.Initial restriction owing to manufacture craft, resonator cavity is to be formed by connecting by four straight wave guides, uses arc waveguide to connect in the junction of two straight wave guides, reduces the loss of resonator cavity with this.Even if adopt arc waveguide to connect, the bending radius of waveguide of this structure is still bigger.Along with the development of the development of manufacture craft, particularly micromachined and nanometer technology, can realize the waveguide of the enough circlet shapes of radius, thereby make the bending loss of ring resonator reduce greatly.Afterwards along with use in practice based on the optical filter of ring resonator progressively deeply, the researchist finds, only the filter construction of forming by a ring resonator the decay at some wavelength place inadequately soon, big inadequately.In order to address this problem, the researchist has proposed high-order ring resonator optical filter, and this wave filter is that a plurality of micro-ring resonant cavities are cascaded, thereby has improved the rate of decay and pad value in the operating wave strong point.The wave filter technology that operation wavelength is fixed is very ripe, but realize operation, particularly under dwdm system application situation more and more widely, must use a plurality of fixed filters to realize different wave length, operation is very inconvenient, will be subjected to great restriction in actual applications.And because adjustable filter can be realized the tuning and superior performance to operation wavelength easily, thereby wide application prospect is arranged in optical communication system.
The tunability of optic tunable filter can be by changing wave filter physical size or structure, the adjusting wave filter methods such as effective refractive index of forming part realize.Because the method that changes wave filter physical size or structure is inconvenient operation in actual applications, thereby the method for regulating effective refractive index becomes the main flow of research, and a lot of tuning methods that occur all are based on the adjusting of effective refractive index at present.Some concrete implementation methods comprise: change methods such as the electric field around certain ingredient, temperature in the spacing of transmission waveguide resonant cavity, the distance that changes external electric dielectric-slab and wave filter, the change filter construction.Wherein, regulate the transmission waveguide resonant cavity spacing change degree of coupling between the two, can realize the tunability [1] of wave filter.The distance that changes external electric dielectric-slab and wave filter realizes that the principle of adjustable [2] then is when the close together of dielectric plate and wave filter, the dielectric plate of being made by optical material can exert an influence to the evanescent field of micro-ring resonant cavity in the wave filter, realizes the tunability of wave filter.These two kinds of methods can realize tuning to filter working wavelength within the specific limits, but have all used mechanical driver unit in two kinds of structures, inconvenient operation, dumb, and tunable range is relatively limited.In addition, because the application of mechanical driver unit makes that the tuned speed of this structure is slower, thereby can be subjected to the restriction of application scenario in actual applications.By covering the covering of one deck nematic liquid crystal material more than the transmission waveguide plane in filter construction as wave filter, add two electrodes then at the two ends of liquid crystal material, electrode powers up the back changes liquid crystal material by electric field arrangement mode, thereby the method [3] of the effective refractive index of change filter construction and the method [4] of directly regulating silicon or other waveguide material refractive index by temperature, only conditions such as the voltage at need change electrode two ends or temperature get final product, compare easy to operate with the filter construction of aforementioned applications mechanical driver unit, and has a bigger free spectral limit, can multiplexing more transmission channel, it is convenient to realize, simply, easy operating, and can realize bigger tunable range, have broad application prospects in actual applications.
The invention belongs to the category of the effective refractive index that changes wave filter.The refractive index that is placed on the little dish of dielectric of ring resonator inside by adjusting is regulated the effective refractive index of wave filter.Compare with filter construction designed among the present invention, aforementioned with the structure of liquid crystal material as the whole filter covering, processing technology is required than higher, realize difficulty relatively.And for the structure among the present invention, refractive index is adjustable, and little dish and transmission waveguide are in the same plane, use the slab guide process technology can be easily specific implementation in practice.Above-mentionedly realizing method and some other tuning method [5] of wave filter controllability by temperature, is to realize tunable wave length by refractive index or other characteristic that external condition directly changes transmission waveguide itself.Often be difficult to possess bigger variations in refractive index coefficient and good guide properties simultaneously for this class wave filter owing to realize the material of waveguide, so this method often is difficult to realize adjusting in a big way.Adjustable filter structure among the present invention then is to realize adjusting to the wave filter effective refractive index by the refractive index that changes transmission waveguide peripheral components or material, less to the transport property influence of light signal in waveguide, and, therefore may realize bigger tuning range because waveguide material can adopt different selections with material with adjustable.That this implementation method realizes is simple, easy to operate, it is integrated to be easy to, and can realize bigger adjustable extent.
[1]Ming-Chang?M.Lee，Ming?C.Wu.A?Reconfigurable?add-drop?filter?using?MEMS-actuatedmicro-disk?resonator.Optical?MEMS?and?Their?Applications?Conference，2005.IEEE/LEOSInternational?Conference?on?Aug.1-4，2005Page(s)：67-68.
[2]Gregory?N.Nielson，Dilan?Seneviratne，Francisco?Lopez-Royo?et?al.Integratedwavelength-selective?optical?MEMS?switching?using?ring?resonator?filters.IEEE?PhotonicsTechnology?Lett[J].2005，17(6)：1190-1192.
[3]Brett?Maune，Rhys?Lawson，Cary?Gunn?et?al.Electrically?tunable?ring?resonators?incorporatingnematic?liquid?crystals?as?cladding?layers.Appl.Phys.Lett.[J]，2003，83(23)：4689-4691.
[4]Douwe?H.Geuzebroek，Edwin?J.Klein，Henry?Kelderman?et?al.Wavelength-selective?switchusing?thermally?tunable?micro-ring?resonators.Microresonators?as?Building?Blocks?for?VLSIPhotonics：International?School?of?Quantum?Electronics，39th?course.413-414.
[5]Y.K.Fetisov，G.Srinivasan.Electric?field?tuning?characteristics?of?a?ferrite-piezoelectircmicrowave?resonator.Appl.Phys.Lett.[J]，2006，88(14)143503(1)-143503(3).
Summary of the invention
Technical matters
The present invention provides a kind of tunable optical filter, solves the problem of implementation of optical filter tunability.The method that a kind of tunable optic filter structure is provided and realizes wave filter frequency of operation tunability.It is simple in structure, volume is little, it is integrated to be easy to, insertion and coupling loss are low, has tunability and realizes simple, easy to operate, the high outstanding advantage of stability.
Technical scheme
A kind of adjustable optical filter, this wave filter by input waveguide (1), coupled waveguide (2), output waveguide (3), disc waveguide (4), the little dish of scalable (5), download waveguide (6) and upload waveguide (7) and formed, as shown in Figure 1.The light signal that frequency component is abundant is input in the filter construction by input waveguide, by coupled waveguide the time, light signal is coupled into ring resonator, and the light signal that wherein satisfies condition of resonance forms resonance in resonator cavity, downloading end output, realized the download of local signal.The optical signals of all the other frequency components still along output waveguide output, passes toward distant-end node in not satisfying condition of resonance.Uploading the end input for the light signal that upload this locality, light signal is coupled into resonator cavity via coupled waveguide, and a part of frequency component satisfies condition of resonance and form resonance in resonator cavity, and this part signal finally in output terminal output, has been realized uploading of local signal.Consider the symmetry in this filter construction, arbitrary port all can be used as the input port of signal, and its excess-three port is realized other function corresponding respectively.The coupled waveguide part is made of the part of part transmission waveguide and disc waveguide, and in the coupled zone, the distance between two waveguides should be less, can guarantee enough degrees of coupling, takes into account the processibility of structure simultaneously.In the structure, disc waveguide is as optical resonator, and little dish of scalable and disc waveguide are in the same plane, are placed on disc waveguide inside, and the gap between little dish and the disc waveguide should be less than a wavelength, to realize tangible controllability.Gap bigger between little dish and the disc waveguide can significantly reduce tunable range, thereby should reduce gap between the two as far as possible.So in order to realize best regulating effect, little dish and disc waveguide should be connected airtight, promptly spacing is zero.The shape of disc waveguide inner edge should be identical with the shape of the outer rim of the little dish of scalable, can realize connecting airtight between the two so more easily.Two end faces at little dish can be placed electrode, heating arrangement, pressure apparatus etc., change the external conditions such as temperature, voltage of little dish, thereby change the dielectric property of material.
In the described in front tunable optical filter, the tunability of operation wavelength is to realize by placing little dish of being made by the refractive index material with adjustable in the inside of disc waveguide.The refractive index of utilizing the change of external condition to regulate little dish makes the dielectric property of ring resonator material around change, and influenced pattern and the field distribution in the disc waveguide, and then the effective refractive index of disc waveguide changes.According to the λ that concerns between resonance wavelength, free spectral limit and the effective refractive index
m=2 π n
eR/m, f
FSR=c/n
eL, the resonance wavelength of ring resonator and free spectral limit change, thereby make the operation wavelength of wave filter change, and have realized the tunability of wave filter.
Described little disk material can be electrooptical material, magneto-optic memory technique, and the relevant material of dielectric property and temperature, pressure etc.Transmission waveguide described in the filter construction and disc waveguide are single mode waveguide for operation wavelength, and the refringence of waveguide material and substrate is bigger, make waveguide have higher transfer efficiency; The disc waveguide radius is in micron dimension, and to guarantee bigger Free Spectral Range, disc waveguide simultaneously also should have lower bending loss, to reduce the insertion loss of wave filter.
The present invention is a kind of optical filter based on annular tunable cavity, and its tunability is pattern and the field distribution that influences ring resonator by the refractive index material with adjustable, changes that its effective refractive index realizes.Because the effective refractive index difference of light signal in waveguide of different mode, in the structure, transmission waveguide should be single mode waveguide for operation wavelength, to guarantee the adjustable extent of wave filter.Suitably select the distance between input waveguide and the disc waveguide, guarantee enough degrees of coupling, take into account the processibility of structure simultaneously.Little dish that the adjustable dielectric substance of refractive index is made is placed in inside at resonator cavity, regulates the resonance wavelength and the free spectral limit of resonator cavity.Little dish and waveguide are in a plane, and the outer rim of little dish and the inner edge shape and the size of disc waveguide are mated fully simultaneously, to guarantee to realize maximum range of adjustment.Utilize existing slab guide process technology can realize this structure fully in actual applications.In a word, this controllability optical filter is simple in structure, be easy to realize, little dish up and down two end faces place electrodes or other device, just can change its dielectric property, easy to operate.Therefore, this structure has that size is little, simple in structure, coupling and input loss are low, be easy to process, have bigger tunable range, be easy to integrated and advantage such as use.
Description of drawings
Fig. 1: the structured flowchart of median filter of the present invention: wherein 1, input waveguide; 2, coupled waveguide; 3, output waveguide; 4, disc waveguide; 5, the little dish of scalable; 6, download waveguide; 7, upload waveguide
Fig. 2: the planimetric map of respective filter structure in the embodiment
Fig. 3: near the 1550nm wavelength, the transmission curve of tunable optical filter under the different voltages.Solid line is the transmission curve of little dish both end voltage value when being zero, and dotted line and dash line corresponding voltage value respectively are 50V, the transmission curve during-50V.
Embodiment
A kind of embodiment of this adjustable filter structure: this filter construction by input waveguide, coupled waveguide, output waveguide, disc waveguide, the little dish of scalable, download waveguide and upload waveguide and formed, concrete structure is as shown in Figure 2.Input waveguide links to each other with coupled waveguide, output waveguide successively, disc waveguide links to each other with two coupled waveguides respectively as optical resonator, download waveguide successively with coupled waveguide, upload waveguide and link to each other, the little dish of scalable is realized the adjusting to the resonator cavity effective refractive index, and then realizes the adjusting to filter working wavelength.Centre wavelength is that the Gauss's modulating wave with certain spectrum width of 1550nm is imported by the input waveguide end shown in Fig. 2, via coupled waveguide, output waveguide transmission, through coupled waveguide the time, the incoming wave that part satisfies condition of resonance forms resonance in resonator cavity, downloading the output of waveguide end, realized filter function.The tunability principle of median filter structure of the present invention is by changing the refractive index of little disk material, influence the pattern and the field distribution of optical resonator, thereby has changed the effective refractive index of optical resonantor, according to formula λ
m=2 π n
eR/m, f
FSR=c/n
eL (λ wherein
mBe the m rank resonance wavelength of resonator cavity, f
FSRFree spectral limit for resonator cavity) as can be known, the change of effective refractive index makes the resonator cavity resonance frequency change, thereby has realized the tuning of filter working wavelength.
The SOI material is all adopted in the waveguide of transmission waveguide and composition resonator cavity in the structure, the refractive index ratio of SOI waveguide material and substrate is 3.5/1.5, higher substrate/material refractive index ratio can reduce the loss of waveguide, and the bending loss with waveguide drops to negligible level simultaneously.In addition, narrower transmission waveguide can improve the transfer efficiency of system, increases the Q value of wave filter, thereby the width of rectangular waveguide and disc waveguide is made as 500nm, and thickness is 200nm, and length is 50 μ m.Distance between transmission waveguide and the disc waveguide is set to 0, to guarantee enough degrees of coupling.The little dish outer rim of scalable is identical with disc waveguide inner edge shape, distance between the two is near more, refractive index is adjustable, and little dish is obvious more to the influence of pattern in the resonator cavity and field distribution, and attainable tuning range is big more, thereby distance between the two should be not more than an input wavelength.In the present embodiment, disc waveguide is circular, thereby the outer rim of little dish is shaped as circle, both are in the same plane, be easy to use the slab guide process technology to carry out processing and fabricating, and make that the distance between little dish of scalable and the disc waveguide is 0, to realize maximum tunable range.
The free spectral limit of wave filter must be greater than the communication window in the optical communication system, promptly greater than the bandwidth of single transmission channel, can realize like this transmission wavelength in some channels is handled and does not influence other transmission channels.For micro-ring resonant cavity, by formula f
FSR=c/n
eMore little its free spectral limit of the radius that l encircles as can be known is big more, thereby the radius of micro-ring resonant cavity should be as far as possible little.It is ripe less than the technology of 5 microns disc waveguides to make at present radius, thereby the radius of choosing disc waveguide is 5 microns, can satisfy the application requirements in the reality, has also taken into account the complexity of processing simultaneously.
The problem of another one key is the choosing of electrooptical material of realizing the wave filter controllability, and electro-optic crystal (solid or liquid) is in extra electric field, and along with the change of electric field strength E, the refractive index of crystal can change, and this phenomenon is called electrooptical effect.Usually the change of refractive that electric field is caused is represented with following formula: n=n
0+ aE
0+ bE
0 2+ ..., a and b are constant in the formula, n
0Be E
0=0 o'clock refractive index.The kind of the electrooptical material that has been found that at present is a lot, comprises inorganic material, semiconductor material and polymeric material etc.For electrooptical material, the quality factor n of material
3It is big that r/ ε wants, and it has determined the size of electrooptical effect; And material also should have lower low-frequency dielectric constant to realize higher tuned speed.The little dish of scalable adopts modal electrooptical material---LiNbO in the structure
3Make, its electrooptical coefficient is 31pm/V, and quality factor is 12.4, at LiNbO
3Two electrodes that are used to regulate little dish voltage are placed at little dish two ends, use continuously adjustable dc offset voltage source by electrode at LiNbO
3Little dish two ends add ± voltage about 50V, and the LiNbO that can realize
3Material refractive index range of adjustment is ± 0.02.
Use above-mentioned condition to carry out numerical simulation, when simulation parameter is set, the refractive index of waveguide material is made as 2.5985, make the TE mould effective refractive index of waveguide in the designed wave filter and TE pattern effective refractive index identical (near the effective refractive index the 1550nm wavelength is 2.38) in the actual SOI waveguide, substrate is SiO in the filter construction
2, its refractive index is 1.5.Simulation result with the output signal normalization of input field signal to output terminal, obtains the transmitance of filter construction specifically as shown in Figure 3, can observe the performance index such as operation wavelength, bandwidth and transmitance of filter construction by transmission curve.Among the figure solid line be little dish up and down two end face institute making alive values be near the transmission curve of 0 o'clock wave filter 1550nm, dotted line and dash line are respectively near wave filter the transmission curve 1550nm of little dish when two end face institute making alive values are for-50V and 50V up and down.Can find that to simulation result analysis near the operation wavelength 1550nm of optical communication system, little dish both ends of the surface institute making alive value is respectively-50V, 0V, during 50V, the resonance wavelength of resonator cavity is respectively: 1542.32nm; 1543.3nm; 1544.23nm the variation range of resonator cavity resonance wavelength that hence one can see that is about 1nm, promptly the tunable range of the operation wavelength of wave filter is 1nm, and pairing frequency-tunable scope is about 125GHz.
Claims (6)
1, a kind of tunable optical filter, it is characterized in that this wave filter by input waveguide, coupled waveguide, output waveguide, disc waveguide, the little dish of scalable, download waveguide and upload waveguide and formed, the light signal that frequency component is abundant is input in the filter construction by input waveguide, by coupled waveguide the time, the light signal of input is coupled into ring resonator, the light signal that wherein satisfies condition of resonance forms resonance in resonator cavity, finally, realized the download of local signal downloading the output of waveguide end; The optical signals of all the other frequency components, passes toward distant-end node along output waveguide output in not satisfying condition of resonance; Uploading the input of waveguide end for the light signal that upload this locality, light signal is coupled into resonator cavity via coupled waveguide, part frequency component satisfies condition of resonance and form resonance in resonator cavity, and this part signal finally in output terminal output, has been realized uploading of local signal; Consider the symmetry in this filter construction, arbitrary port all can be used as the input port of signal, and its excess-three port is realized other function corresponding respectively; Coupled waveguide is made of the part of transmission waveguide and the part of disc waveguide, and in the coupled zone, the distance between two waveguides should be able to guarantee enough degrees of coupling, takes into account the processibility of structure simultaneously; Little dish of scalable and disc waveguide are in the same plane, are placed on disc waveguide inside, and the gap between little dish and the disc waveguide should be less than a wavelength.
2, a kind of implementation method of tunability of the operation wavelength that is used for the described optical filter of claim 1, it is characterized in that placing little dish of forming by the adjustable material of refractive index in the inside of resonator cavity, the refractive index of utilizing the change of external condition to regulate little dish, because the change of the dielectric property of material around makes the effective refractive index of disc waveguide change, thereby make the operation wavelength of wave filter change.
3, the method for designing of the little dish of forming by the refractive index material with adjustable in the structure of tunable optical filter described in the claim 1 of dielectric, the shape of inner edge that it is characterized in that the outer rim of the little dish of dielectric substance and disc waveguide is identical, size is basic identical, bigger gap makes tunable range significantly reduce, thereby the gap between little dish and the disc waveguide should be not more than a wavelength, to realize certain tunable range, when connecting airtight, both can realize maximum tunable range.
4, the implementation method of the tunability of optical filter according to claim 2, it is characterized in that little dish made by electrooptical material, electrode is placed at two ends at the little dish of dielectric, the magnitude of voltage that changes little dish two ends by electrode changes the refractive index of little dish, thereby realizes tuning to filter working wavelength.
5, the implementation method of the tunability of optical filter according to claim 2, it is characterized in that little dish made by warm luminescent material, heating arrangement is placed at two ends at the little dish of dielectric, the refractive index of the little dish of temperature change by regulating little disk material, thus realize tuning to filter working wavelength.
6, the implementation method of the tunability of optical filter according to claim 2, it is characterized in that little dish made by magneto-optic memory technique, place magnetic field device at the little dish of dielectric two ends, change the refractive index of little dish by the magnetic field of regulating around little disk material, thereby realize tuning to filter working wavelength.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102564960A (en) * | 2010-12-09 | 2012-07-11 | 苏州生物医学工程技术研究所 | Optical waveguide resonant cavity type sensor equipment |
| CN104034717A (en) * | 2014-06-20 | 2014-09-10 | 浙江大学 | Raman spectrum based optical waveguide sensor |
| CN105009487A (en) * | 2013-12-31 | 2015-10-28 | 华为技术有限公司 | Optical transmitter and optical transmitting method |
| CN105607190A (en) * | 2016-03-10 | 2016-05-25 | 北京邮电大学 | De-multiplexing apparatus based on add-drop type three-waveguide coupling double square resonant cavities |
| WO2018068507A1 (en) * | 2016-10-14 | 2018-04-19 | 华为技术有限公司 | Control method and device for micro-ring resonator |
| CN110824730A (en) * | 2019-11-21 | 2020-02-21 | 中国科学院半导体研究所 | Narrow-band optical filter |
| CN112415788A (en) * | 2020-11-16 | 2021-02-26 | 北京理工大学 | Silicon-based integrated high-speed microdisk electro-optical modulator chip |
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- 2007-04-26 CN CN 200710098741 patent/CN101046531A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102564960A (en) * | 2010-12-09 | 2012-07-11 | 苏州生物医学工程技术研究所 | Optical waveguide resonant cavity type sensor equipment |
| CN105009487A (en) * | 2013-12-31 | 2015-10-28 | 华为技术有限公司 | Optical transmitter and optical transmitting method |
| US9806820B2 (en) | 2013-12-31 | 2017-10-31 | Huawei Technologies Co., Ltd. | Optical transmitter and optical transmission method |
| CN105009487B (en) * | 2013-12-31 | 2017-12-15 | 华为技术有限公司 | A kind of optical sender and light launching technique |
| CN104034717A (en) * | 2014-06-20 | 2014-09-10 | 浙江大学 | Raman spectrum based optical waveguide sensor |
| CN105607190A (en) * | 2016-03-10 | 2016-05-25 | 北京邮电大学 | De-multiplexing apparatus based on add-drop type three-waveguide coupling double square resonant cavities |
| CN105607190B (en) * | 2016-03-10 | 2019-01-18 | 北京邮电大学 | A kind of Deplexing apparatus of three waveguides coupling both sides' shape resonant cavity based on add-drop type |
| WO2018068507A1 (en) * | 2016-10-14 | 2018-04-19 | 华为技术有限公司 | Control method and device for micro-ring resonator |
| US10670811B2 (en) | 2016-10-14 | 2020-06-02 | Huawei Technologies Co., Ltd. | Microring resonator control method and apparatus |
| CN110824730A (en) * | 2019-11-21 | 2020-02-21 | 中国科学院半导体研究所 | Narrow-band optical filter |
| CN112415788A (en) * | 2020-11-16 | 2021-02-26 | 北京理工大学 | Silicon-based integrated high-speed microdisk electro-optical modulator chip |
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