CN102564960A - Optical waveguide resonant cavity type sensor equipment - Google Patents
Optical waveguide resonant cavity type sensor equipment Download PDFInfo
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- CN102564960A CN102564960A CN2010105815015A CN201010581501A CN102564960A CN 102564960 A CN102564960 A CN 102564960A CN 2010105815015 A CN2010105815015 A CN 2010105815015A CN 201010581501 A CN201010581501 A CN 201010581501A CN 102564960 A CN102564960 A CN 102564960A
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Abstract
The invention discloses optical waveguide resonant cavity type sensor equipment composed of a sensing chip and peripheral detection equipments. An input optical waveguide, one or a plurality of optical waveguide annular resonant cavities, one or a plurality of coupling areas, one or a plurality of sensing areas, an output optical waveguide, and an planar waveguide grating served as a spectral expansion zone are provided on the sensing chip. The input optical waveguide and the optical waveguide annular resonant cavity are connected through the coupling area. The output optical waveguide and the optical waveguide annular resonant cavity are connected through the coupling area. The planar waveguide grating and the optical waveguide annular resonant cavity are connected through the output optical waveguide. The surface of the optical waveguide annular resonant cavity is completely or partially exposed in the sensing area. One end of the sensing area is connected with a feeding port, and the other end of the sensing area is connected with a discharging port. The equipment provided by the invention is advantaged in no requirement on fluorescent labeling, high sensitivity, compact structure, no requirement on spectrometric analysis apparatus in peripheral detection equipments, and low cost.
Description
Technical field
The present invention relates to a kind of sensing equipment, concrete relate to a kind of optical waveguide resonant cavity type sensing equipment.
Background technology
In in the face of new disease and disease variation, traditional major disease is still brought significant stress in the medical department that gives China.Ensure that the people is healthy, carry out the work of prevention and treatment, press for the biological substance that human health is exerted an influence potential on molecular level and carry out accurate detection.Based on the principle sensor of optical waveguide evanescent wave sensing, utilize total reflection to propagate the evanescent wave that produces and come the extraneous variations in refractive index of perception.When testing sample passes through sensitive zones; The sensing unit refractive index can change; Cause the emission of sandwich layer effective refractive index to change; Utilize principles such as interference, resonance can effective refractive index be changed and be transformed in the output spectrum curvilinear motion, measure output spectrum through spectral analysis and change, can calculate the concentration of determinand.
The annular resonance cavity configuration is set up mode of resonance in ring optical waveguide, significantly promote the outer evanscent field intensity of disc waveguide, thereby strengthen the perception of variations in refractive index to external world.Length L is surveyed in its equivalence
Eff≈ LQ, L is a sensing unit length here, and Q is the resonator cavity quality factor, and therefore the optical waveguide resonator cavity of high Q value can significantly increase the equivalent action length and the action time of light and material, promotes sensing sensitivity.Sensor based on optical waveguides ring-shaped resonant cavity need not mark, and is simple in structure, and integrated level is high, can realize that function is many, compatible fully with microflow control technique.But survey variations in refractive index on every side, need in peripheral checkout equipment, adopt special spectral analysis device, thereby cause the checkout equipment volume big, complex structure costs an arm and a leg, and the wave band specific aim is not high.
Summary of the invention
In order to overcome deficiency of the prior art; The object of the present invention is to provide a kind of optical waveguide resonant cavity type sensing equipment; This sensing equipment need not the special spectral analysis device or the tunable light source of narrow linewidth, and is cheap, can realize measuring accurately to biological substance.
In order to solve the problems of the technologies described above, realize above-mentioned purpose, the present invention realizes through following technical scheme:
A kind of optical waveguide resonant cavity type sensing equipment; Constitute by sensing chip and peripheral checkout equipment; Be manufactured with an input waveguide, one or more optical waveguides ring-shaped resonant cavity, one or more coupled zone, one or more sensing unit, output optical waveguide and a waveguide grating as the spectral evolution district on the substrate base of said sensing chip; Said input waveguide is connected through the coupled zone with optical waveguides ring-shaped resonant cavity; Said output optical waveguide is connected through the coupled zone with optical waveguides ring-shaped resonant cavity; Said waveguide grating is connected through output optical waveguide with said optical waveguides ring-shaped resonant cavity, all or part of being exposed in the sensing unit in said optical waveguides ring-shaped resonant cavity surface, and sensing unit one end is connected with injection port, the other end is connected with outlet.
Preferably; Coupled zone between said input waveguide and the said optical waveguides ring-shaped resonant cavity; And the coupled zone between output optical waveguide and the said optical waveguides ring-shaped resonant cavity is same coupled zone, and promptly said optical waveguides ring-shaped resonant cavity, said coupled zone and said sensing unit all are same.
Preferably; Said optical waveguides ring-shaped resonant cavity comprises first optical waveguides ring-shaped resonant cavity and second optical waveguides ring-shaped resonant cavity; Said coupled zone comprises first coupled zone and second coupled zone; Said sensing unit comprises first sensing unit and second sensing unit, and said injection port comprises first injection port and second injection port, and said outlet comprises first outlet and second outlet; Said first injection port is connected said first sensing unit respectively with first outlet, and said second injection port is connected said second sensing unit respectively with second outlet; Said first optical waveguides ring-shaped resonant cavity is connected with said first coupled zone; Said second optical waveguides ring-shaped resonant cavity and said second coupled zone interconnect; Said input waveguide is connected through first coupled zone with said first optical waveguides ring-shaped resonant cavity; Said output optical waveguide is connected through second coupled zone with said second optical waveguides ring-shaped resonant cavity, and said first coupled zone is connected through a transmission optical waveguide with second coupled zone.
Further, said peripheral checkout equipment comprises the wideband light source module that is successively set on said sensing chip input end, imports optical coupler module and is successively set on output optical coupler module, photoelectric sensor assembly and the data processing circuit of said sensing chip output terminal.
Further, said photoelectric sensor assembly can drive the stepper motor that said photodetector moves by a photodetector and in image planes, connects through a gearing between said photodetector and the said stepper motor.
Further, have one to be used to regulate the diaphragm that hot spot sees through size on the position that light signal gets into before the said photodetector.
Preferably, said photoelectric sensor assembly is a linear array infrared photoelectric detector.
Equipment of the present invention through to the harmonic light analysis of spectrum of output obtaining variations in refractive index, and extrapolate corresponding variation determinand content.Specify detection principle of the present invention below.
Light gets into the coupled zone via input waveguide, and a part of luminous power will be coupled into annular or dish-shaped resonator cavity, and phase place is identical after the week if light detours in resonator cavity, and the enhancing that can superpose forms resonance.Its resonance wavelength is provided by formula (1).
Wherein, m is a positive integer, n
EffBe effective refractive index, L
uIt is the girth of ring resonator.
The optical wavelength that resonance takes place will be assembled significant amount of energy in resonator cavity, make that the loss when light detours in resonator cavity increases, if make the coupling ratio of coupled zone satisfy certain relation, even can to make the luminous power of output optical waveguide be zero.The resonator cavity that this means this structure can be introduced a strong absorption point at the resonance frequency place.
In solution, behind the feeding test substance, can introduce the light guide surface in the sensing unit through pipeline, the refractive index around causing changes, if the change amount of refractive index is Δ n on every side
M, owing to the effect of evanscent field, the effective refractive index of resonator cavity optical waveguide will change so.Effective refractive index is following with the relation of variations in refractive index on every side:
Wherein, Δ n
EffThe variation of effective refractive index, Δ n
MBe the variations in refractive index that takes place after immunoreactive, η
0Be the characteristic impedance of free space, E is an electric field intensity, and P is the general power in whole cross section, and the zone that refractive index changes takes place M.
Can know that according to formula (2) variations in refractive index that light guide surface takes place will cause that the effective refractive index of overall optical waveguide changes, according to formula (1), this will cause moving of resonance frequency again, and therefore, the absorption point of output spectrum also will move thereupon.Its amount of movement Δ λ
ResChanges delta n with effective refractive index
EffRelation be:
Because the refractive index change delta n of waveguide surface
MCan provide by (4) formula with the relation of reactive material concentration:
Δn
M＝σρV (4)
Wherein, V is the liquor capacity that contains test substance that adds, and ρ is a test substance concentration, and σ is the variations in refractive index coefficient of the immune response generation that can take place.Therefore, according to formula (1)-(4), can obtain resonance wavelength and move the relation with the content of test substance.
According to the relation of the spacing of waveguide grating (AWG) output spectrum and wavelength, optical grating construction, can obtain required array waveguide grating progression and grating region size again.
Optical waveguide resonant cavity type sensing equipment compared with prior art of the present invention is simple in structure; Ring optical waveguide cavity resonator structure based on compact conformation; Utilize waveguide grating to realize expansion, and utilize photodetector scanning image planes image to obtain spectrum change information to spectrum.The cost of equipment is low, and applied range has good application prospects.
Above-mentioned explanation only is the general introduction of technical scheme of the present invention, understands technological means of the present invention in order can more to know, and can implement according to the content of instructions, below with preferred embodiment of the present invention and conjunction with figs. specify as after.Embodiment of the present invention is provided by following examples and accompanying drawing thereof in detail.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is done further detailed explanation.
Fig. 1 is the structural representation of the sensing chip of optical waveguide resonant cavity type sensing equipment of the present invention.
Fig. 2 is the structural framing synoptic diagram of optical waveguide resonant cavity type sensing equipment of the present invention.
Fig. 3 is the structural representation of the photoelectric sensor assembly of optical waveguide resonant cavity type sensing equipment of the present invention.
Fig. 4 be optical waveguide resonant cavity type sensing equipment of the present invention when having only a ring resonator, feed the output spectrum curve before and after the determinand solution.
Label declaration among the figure: 1, sensing chip, 11, input waveguide, 121, first coupled zone, 122, second coupled zone; 13, output optical waveguide, 141, first optical waveguides ring-shaped resonant cavity, 142, second optical waveguides ring-shaped resonant cavity, 151, first sensing unit; 152, second sensing unit, 161, first injection port, 162, second injection port, 171, first outlet; 172, second outlet, 18, waveguide grating, 19, transmission optical waveguide, 21, the wideband light source module; 23, input coupling module, 24, the output coupling module, 25, photoelectric sensor assembly, 251, diaphragm; 252, photodetector, 253, gearing, 254, stepper motor, 26, data processing circuit.
Embodiment
Referring to Fig. 1, shown in Figure 2; A kind of optical waveguide resonant cavity type sensing equipment; Constitute by sensing chip 1 and peripheral checkout equipment 2; Be manufactured with an input waveguide 11, one or more optical waveguides ring-shaped resonant cavity, one or more coupled zone, one or more sensing unit, output optical waveguide 13 and a waveguide grating 18 as the spectral evolution district on the substrate base of said sensing chip 1; Said input waveguide 11 is connected through the coupled zone with optical waveguides ring-shaped resonant cavity, and said output optical waveguide 13 is connected through the coupled zone with optical waveguides ring-shaped resonant cavity, and said waveguide grating 18 is connected through output optical waveguide 13 with said optical waveguides ring-shaped resonant cavity; All or part of being exposed in the sensing unit in said optical waveguides ring-shaped resonant cavity surface, sensing unit one end is connected with injection port, the other end is connected with outlet.
Said optical waveguides ring-shaped resonant cavity comprises first optical waveguides ring-shaped resonant cavity 141 and second optical waveguides ring-shaped resonant cavity 142; Said coupled zone comprises first coupled zone 121 and second coupled zone 122; Said sensing unit comprises first sensing unit 151 and second sensing unit 152; Said injection port comprises first injection port 161 and second injection port 162; Said outlet comprises first outlet 171 and second outlet 172, and said first injection port 161 is connected said first sensing unit 151 respectively with first outlet 171, and said second injection port 162 is connected said second sensing unit 152 respectively with second outlet 172; Said first optical waveguides ring-shaped resonant cavity 141 is connected with said first coupled zone 121; Said second optical waveguides ring-shaped resonant cavity 142 interconnects with said second coupled zone 122; Said input waveguide 11 is connected through first coupled zone 121 with said first optical waveguides ring-shaped resonant cavity 141; Said output optical waveguide 13 is connected through second coupled zone 122 with said second optical waveguides ring-shaped resonant cavity 142, and said first coupled zone 121 is connected through a transmission optical waveguide 19 with second coupled zone 122.
Referring to shown in Figure 2, said peripheral checkout equipment 2 comprises wideband light source module 21, input optical coupler module 23 that is successively set on said sensing chip 1 input end and output optical coupler module 24, photoelectric sensor assembly 25 and the data processing circuit 26 that is successively set on said sensing chip 1 output terminal.
Preferably, said photoelectric sensor assembly 25 is a linear array infrared photoelectric detector.
Further; Referring to shown in Figure 3; Said photoelectric sensor assembly 25 can drive the stepper motor 254 that said photodetector 252 moves by a photodetector 252 and in image planes, connect through a gearing 253 between said photodetector 252 and the said stepper motor 254.
Further, have one to be used to regulate the diaphragm 251 that hot spot sees through size on the position that light signal gets into before the said photodetector 252.Through the utilization of above technology, concrete testing process of the present invention is following:
Step 4. feeds test substance through first injection port 161 or second injection port 162.
Step 5. utilizes stepper motor 254 to drive photodetector 252, ceaselessly the spectral signal by 24 imagings of output coupling module is scanned, and notes the spectral signal of this moment.
Step 6. can calculate the concentration of test substance through the analysis to the spectral signal variation, and the variation that takes place in real time.
As shown in Figure 4, for optical waveguide resonant cavity type sensing equipment of the present invention when having only a ring resonator, feed the output spectrum curve before and after the determinand solution.
The foregoing description just is to let the one of ordinary skilled in the art can understand content of the present invention and enforcement according to this in order technical conceive of the present invention and characteristics to be described, to be its objective is, can not limit protection scope of the present invention with this.The variation or the modification of every equivalence that the essence of content has been done according to the present invention all should be encompassed in protection scope of the present invention.
Claims (7)
1. optical waveguide resonant cavity type sensing equipment; Constitute by sensing chip (1) and peripheral checkout equipment (2); It is characterized in that: be manufactured with an input waveguide (11), one or more optical waveguides ring-shaped resonant cavity, one or more coupled zone, one or more sensing unit, an output optical waveguide (13) and a waveguide grating as the spectral evolution district (18) on the substrate base of said sensing chip (1); Said input waveguide (11) is connected through the coupled zone with optical waveguides ring-shaped resonant cavity; Said output optical waveguide (13) is connected through the coupled zone with optical waveguides ring-shaped resonant cavity; Said waveguide grating (18) is connected through output optical waveguide (13) with said optical waveguides ring-shaped resonant cavity; All or part of being exposed in the sensing unit in said optical waveguides ring-shaped resonant cavity surface, sensing unit one end is connected with injection port, the other end is connected with outlet.
2. optical waveguide resonant cavity type sensing equipment according to claim 1; It is characterized in that: the coupled zone between said input waveguide (11) and the said optical waveguides ring-shaped resonant cavity; And the coupled zone between output optical waveguide (13) and the said optical waveguides ring-shaped resonant cavity is same coupled zone, and promptly said optical waveguides ring-shaped resonant cavity, said coupled zone and said sensing unit all are same.
3. optical waveguide resonant cavity type sensing equipment according to claim 1; It is characterized in that: said optical waveguides ring-shaped resonant cavity comprises first optical waveguides ring-shaped resonant cavity (141) and second optical waveguides ring-shaped resonant cavity (142); Said coupled zone comprises first coupled zone (121) and second coupled zone (122); Said sensing unit comprises first sensing unit (151) and second sensing unit (152); Said injection port comprises first injection port (161) and second injection port (162); Said outlet comprises first outlet (171) and second outlet (172), and said first injection port (161) is connected said first sensing unit (151) respectively with first outlet (171), and said second injection port (162) is connected said second sensing unit (152) respectively with second outlet (172); Said first optical waveguides ring-shaped resonant cavity (141) is connected with said first coupled zone (121); Said second optical waveguides ring-shaped resonant cavity (142) interconnects with said second coupled zone (122); Said input waveguide (11) is connected through first coupled zone (121) with said first optical waveguides ring-shaped resonant cavity (141); Said output optical waveguide (13) is connected through second coupled zone (122) with said second optical waveguides ring-shaped resonant cavity (142), and said first coupled zone (121) is connected through a transmission optical waveguide (19) with second coupled zone (122).
4. according to claim 1 or 2 or 3 described optical waveguide resonant cavity type sensing equipments, it is characterized in that: said peripheral checkout equipment (2) comprises wideband light source module (21), input optical coupler module (23) that is successively set on said sensing chip (1) input end and output optical coupler module (24), photoelectric sensor assembly (25) and the data processing circuit (26) that is successively set on said sensing chip (1) output terminal.
5. optical waveguide resonant cavity type sensing equipment according to claim 4; It is characterized in that: said photoelectric sensor assembly (25) can drive the stepper motor (254) that said photodetector (252) moves by a photodetector (252) and in image planes, connects through a gearing (253) between said photodetector (252) and the said stepper motor (254).
6. optical waveguide resonant cavity type sensing equipment according to claim 5 is characterized in that: have one to be used to regulate the diaphragm that hot spot sees through size on said photodetector (252) position that light signal gets into before
(251)。
7. optical waveguide resonant cavity type sensing equipment according to claim 4 is characterized in that: said photodetector assembly (25) is a linear array infrared photoelectric detector.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103773852A (en) * | 2013-12-27 | 2014-05-07 | 中国科学院苏州生物医学工程技术研究所 | Kit used for detecting free miRNA (micro ribonucleic acid) in solution and operation method thereof |
| CN105572074A (en) * | 2016-02-02 | 2016-05-11 | 浙江工业大学 | Refractive index detection method based on on-chip integrated optical waveguide biosensor chip |
| CN113702297A (en) * | 2021-08-10 | 2021-11-26 | 哈尔滨工业大学（深圳） | Biosensor system and method for detecting biological sample by using same |
| CN114264294A (en) * | 2021-12-24 | 2022-04-01 | 浙江大学 | Angular velocity detection system and method based on combined modulation low coherent light integration |
| CN116952395A (en) * | 2023-07-31 | 2023-10-27 | 安庆师范大学 | System on chip for detecting wavelength of micro-ring resonant cavity sensor and application |
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| CN114264294A (en) * | 2021-12-24 | 2022-04-01 | 浙江大学 | Angular velocity detection system and method based on combined modulation low coherent light integration |
| CN116952395A (en) * | 2023-07-31 | 2023-10-27 | 安庆师范大学 | System on chip for detecting wavelength of micro-ring resonant cavity sensor and application |
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Application publication date: 20120711 |