CN115128880A - Double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on SOI (silicon on insulator) material - Google Patents

Double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on SOI (silicon on insulator) material Download PDF

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Publication number
CN115128880A
CN115128880A CN202210454239.0A CN202210454239A CN115128880A CN 115128880 A CN115128880 A CN 115128880A CN 202210454239 A CN202210454239 A CN 202210454239A CN 115128880 A CN115128880 A CN 115128880A
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waveguide
micro
ring
response unit
waveguides
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胡国华
孙耀辉
邓春雨
汪冬宇
恽斌峰
崔一平
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Southeast University
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Southeast University
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/212—Mach-Zehnder type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure

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  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention relates to a double-injection micro-ring reconfigurable multi-spectral response unit prepared based on an SOI material, which comprises three symmetrical Mach Zehnder interferometers prepared based on the SOI material and two groups of connecting waveguides with equal length respectively, wherein each Mach Zehnder interferometer comprises two 2 multiplied by 2 multimode interferometers and the connecting waveguides thereof, and in addition, the double-injection micro-ring reconfigurable multi-spectral response unit also comprises a plurality of hot electrodes right above the waveguides. Firstly, an input optical signal is divided into two beams of light according to a required power ratio through a tunable MZI beam splitter; then enters a tunable micro-ring resonator consisting of two tunable MZIs after passing through a group of equilong waveguides, and in the process, the phase relation of two beams of light is controlled by a thermal tuner; and the two beams of light respectively enter the opposite side ports of the tunable micro-ring resonator, and the coupling coefficients of the two beams of light entering the micro-ring are controlled by using the tunable MZI respectively. By controlling the optical power ratio, the phase relation and the coupling coefficient, various frequency spectrum responses and frequency spectrum reconstruction of the unit device can be realized.

Description

Double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on SOI (silicon on insulator) material
Technical Field
The invention relates to a response unit, in particular to a double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on an SOI (silicon on insulator) material, belonging to the technical field of optical communication.
Background
With the rapid development of communication technology, the requirements for information transmission and processing are also higher and higher. Optical communication is receiving attention due to its advantages of low loss, large bandwidth, interference resistance, etc., and the development of integrated optics is greatly promoted. For integrated optics, what kind of material is selected to design the waveguide device with high integration level and low loss not only relates to the performance parameters of the device, but also relates to the problems of manufacturing cost, processing feasibility, compatibility with the existing system and the like.
SOI material systems allow optical signals to be well confined in silicon due to the large refractive index difference between silicon and silicon dioxide. In addition, silicon has the same order of thermal-optical coefficient as that of polymer, and is suitable for being used as waveguide material. The SOI has the advantages of small bending loss, mature manufacturing process, low manufacturing cost, compatibility with CMOS (complementary metal oxide semiconductor) process and the like, and is favorable for the miniaturization of waveguide devices and the large-scale integration.
Compared with the advantages of an integrated circuit in digital computation, the integrated optical circuit has more outstanding advantages in transmission and analog signal processing. Currently, the mainstream design method of the Integrated optical circuit is an aspic (application Specific Photonic Integrated circuit), but the design method has the problems of long research and iteration cycles and the like, so a general optical processor architecture is required to reduce the development time. This architecture is called "optical FPGA", i.e., FPPGA (field Programmable photon Gate array).
The cell devices used in the currently proposed FPPGA architecture include an MZI cell and an mdr (micro Disk resonator) cell, which have advantages and disadvantages, and have complementary functions, but have specific spectrum shapes, and multiple tuning units are required to implement complex spectra, which may result in reduced device stability.
The double injection of the micro-ring structure willTwo beams of coherent light are injected into a predetermined location of one resonator and the output at the final port can be considered as the superposition of the outputs of the through and drain terminals of two almost identical add-drop type ring resonators. To ensure coherence, a beam of light is split into E at a certain power ratio by a beam splitter i1 、E i2 And enter the micro-ring through different optical paths, keeping the same direction of the detour in the ring. Different frequency response results can be realized by adjusting the power ratio and the phase difference of the two beams of light injected into the micro-ring and the coupling coefficient of the micro-ring. However, in the structure, a fixed splitting ratio, a fixed phase difference and a fixed coupling coefficient are designed in advance to realize a certain specific spectrum form, and a theoretically abundant spectrum response form cannot be exerted, so that a new scheme is urgently needed to solve the technical problem.
Disclosure of Invention
The invention provides a double-injection micro-ring type reconfigurable multi-spectral response unit based on SOI material, aiming at the problems in the prior art, the technical scheme has the aim of a multi-spectral response reconfigurable optical unit with simple tuning means, and the invention discloses a double-injection micro-ring type reconfigurable multi-spectral response unit based on SOI material by utilizing the advantages of high integration level and mature process of an SOI material system based on a double-injection micro-ring type structure, and provides a simple and effective unit device required by FPPGA. Compared with the existing FPPGA unit device, the device can realize richer spectrum forms under less modulation, thereby meeting the requirements of more diversified optical processing environments.
In order to achieve the purpose, the technical scheme of the invention is that a double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on SOI materials comprises SiO 2 And a waveguide layer horizontally arranged is arranged in the cladding. The waveguide layer is prepared from a Si material. SiO 2 2 The upper plane of the cladding is provided with a hot electrode. The waveguide layer comprises three MZIs and two groups of connecting waveguides, and each group comprises two equal-length waveguides; the MZI is composed of two MMIs with equal power ratio and two equal-length waveguides. The thermode has a shape consistent with that of the corresponding waveguide and is located in the MZI structureDirectly above the first MZI output, on one of the waveguides. SiO is arranged between the thermode and the waveguide 2 As a buffer layer, required bias voltage is applied to two ends of the thermode to realize the functions of different coupling coefficients, power ratios or phase differences, and finally different frequency spectrum responses are realized.
As a preferred technical scheme of the invention: the MZI splits the input optical signal, the splitting ratio of the MZI is determined by the voltage of a hot electrode which is arranged right above a connecting waveguide between MMIs, the continuous change of the splitting ratio of 0-1 can be realized, and two beams of coherent light with the required power ratio can be obtained.
As a preferred technical scheme of the invention: the two MZIs are connected by a group of ring waveguides to form a tunable micro-ring resonator, each MZI is used as a tunable coupler, the coupling coefficient of each MZI is determined by the voltage of a hot electrode above the connecting waveguide between the MMIs, and continuous change of the coupling coefficient of 0-1 can be realized to meet flexible regulation and control requirements.
As a preferred technical scheme of the invention: the group of equilong waveguides is connected with the MZI with the beam splitting function and the two MZIs forming the tunable micro-ring resonator, the equilong waveguides ensure that extra phase difference is not generated by two paths of split light due to different optical paths, the phase difference of the two paths of split light is determined by the voltage of a hot electrode right above the group of waveguides, and continuous change of the phase difference of 0-2 pi can be realized.
As a preferred technical scheme of the invention: the two ports selected by the tunable micro-ring resonator are different sides, so that the propagation directions of optical signals input from the two ports in the ring are the same, and the better coherence of two paths of light in the ring is realized.
As a preferred technical scheme of the invention: the waveguide layer comprises three MZIs and two groups of equal-length waveguides, which are all prepared by an SOI material system, all waveguides are rectangular waveguides, and the cross-sectional dimension of each connecting waveguide is 500nm multiplied by 220 nm.
As a preferred technical scheme of the invention: in the MMI structure in the MZI, a multi-mode waveguide area and a single-mode waveguide need to be connected in an auxiliary mode by adopting a Taper-type graded waveguide. To reduce optical loss due to mode mismatch.
As a preferred technical scheme of the invention: the waveguide used by the unit device is long, and for example, an euler curve and the like can be introduced to realize a 90-degree bent waveguide in the scheme so as to reduce the propagation loss of light. The thermode is made of TiN material, the temperature of which can be changed by applying a voltage across the thermode, and the cross-sectional width of which is 5 μm.
Compared with the prior art, the double-injection micro-ring reconfigurable multi-spectrum response unit prepared based on the SOI material has the advantages that the input light is subjected to flexible power beam splitting through the MZI type tunable coupler based on the thermo-optical effect, then the phase relation of the two beams of light is modulated through a group of waveguides with equal length and through thermodes on the waveguides, the two beams of light enter the tunable micro-ring resonator consisting of two MZIs, the two beams of light enter two different side ports of the add-drop type micro-ring resonator to ensure that the directions of the two beams of light during circumambulation in a ring are consistent, and the coherent results of the two beams of light in the ring are different by adjusting two coupling coefficients forming the ring, so that various spectrum forms are formed. Compared with the existing reconfigurable optical processor based on the MZI or MDR unit, the reconfigurable optical processor based on the MZI or MDR unit can realize rich spectrum morphology without large-scale cascade and more modulation devices, improves the self-reconfiguration performance of the unit device, avoids the problem of device stability reduction caused by excessive cascade use in the future, and has wider application scenes. Moreover, the manufacturing process of the invention is compatible with the CMOS process, the process is mature, and the actual production is easy. Generally, the invention has strong functionality of unit devices, and can form a plurality of morphology spectrums to meet different signal processing requirements; the modulation method and the device based on the thermo-optic effect have simple design scheme, low production cost and low power consumption; the number of used modulation units is small, the operation is convenient, and the device has potential characteristics and advantages of higher robustness and the like.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional structure according to the present invention.
Fig. 2 is a top view structural diagram of the waveguide of the present invention.
(a) A whole waveguide model diagram; (b) a MZI section; (c) a connecting waveguide portion; (d) a tunable microring resonator section.
FIG. 3 is a schematic view of a portion of the interface of the thermode of the present invention.
FIG. 4 is a graph of the relationship between the output power and phase of a mach zehnder interferometer at a wavelength of 1550nm incident from IN 1 and tempOUT 1-2 as a function of applied power.
FIG. 5 is the output spectrum of the port (for example, incident from IN 1) at a specific applied power of the present invention, (a) the micro-ring resonator notch spectrum; (b) the micro-ring resonator notch spectrum (twice the free spectral range); (c) a square spectrum.
FIG. 6 is a graph of the variation of applied power versus waveguide temperature according to the present invention.
Detailed Description
For the purpose of enhancing an understanding of the present invention, the present embodiment will be described in detail below with reference to the accompanying drawings.
Example 1: as shown in FIG. 1 and FIG. 2(a), the present invention designs a dual-injection micro-ring reconfigurable multi-spectral response unit prepared based on SOI material, wherein the waveguide layer is embedded in SiO 2 The Si waveguide comprises the following main structures: three mach zehnder interferometers, and two sets of connecting waveguides, each set of two waveguides of equal length. As shown in fig. 2(b), the MZI structure is a rectangular waveguide process, which includes: two multimode interferometers 1-1, two connecting waveguides 1-2. For each multimode interferometer, four transition waveguides 1-1-2 are included, as well as a multimode waveguide region 1-1-1. The transition waveguide may use a Taper-type waveguide to reduce mode mismatch losses. The input ports of the MZI are IN 1, IN 2, which are also the input ports of the cell device. As shown in fig. 2(c), the waveguide is a rectangular waveguide process, which includes: waveguide 2-1 and waveguide 2-2. The two waveguides are not symmetrical, but have the same total length, and the thermode is only arranged right above one of the waveguides. As shown in fig. 2(d), the tunable microring resonator is a rectangular waveguide process, which includes: two mach-zender interferometers 3-1 as tunable couplers whose specific structural components are as shown in fig. 2(b), and two ring waveguides 3-2 for interconnection of MZIs. As shown in FIG. 1, a rectangular TiN thermoelectric device is disposed over one of the three MZIs, and over one of the long group of connected waveguidesAnd a pole 4 for generating ohmic heat by applying a voltage across the hot electrode to change the temperature of the waveguide in the region covered by the electrode. A partial cross-sectional view of the electrode is shown in fig. 3. In FIGS. 1 and 3, the upper cladding 5-1 serves to protect the electrodes; the lower cladding 5-2 is a buffer layer between the waveguide layer and the hot electrode 4; the lowermost Si base layer 6.
The principle of the unit device of the invention is as follows: the dual injection micro-ring structure injects two beams of coherent light into a predetermined location of one resonator and the output at the final port can be considered as the superposition of the outputs of the through and drain terminals of two almost identical add-drop type ring resonators. Under the structure of the invention, an input optical signal with the central wavelength at the working wavelength of a unit device enters a straight waveguide through IN 1 (or IN 2), a beam splitting of 1: 1 is formed by a multimode interferometer 1-1, under the modulation of a thermode 4-1, the phase relation of optical signals of an upper waveguide 1-2 and a lower waveguide 1-2 is changed, the optical signals enter a multimode waveguide area 1-1-1 of a second multimode interferometer 1-1 to generate interference, beam splitting with different power ratios is formed, and the optical signals are respectively output from ports tempOUT 1-1 and tempOUT 1-2; tempOUT 1-1 and tempOUT 1-2 are respectively butted with tempIN 2-1 and tempIN 2-2, so that two beams of coherent light respectively pass through waveguides 2-1 and 2-2, and the phase relation of the two beams of coherent light is modulated by a hot electrode 4-2; coherent light in the waveguide 2-1 enters the tempIN 3-1 through the tempOUT 2-1 so as to enter the adjustable micro-ring, and the coupling coefficient of the coherent light entering the ring is controlled through the thermode 4-3, and similarly, coherent light in the waveguide 2-2 enters the tempIN 3-2 through the tempOUT 2-2 so as to enter the adjustable micro-ring, and the coupling coefficient of the coherent light entering the ring is controlled through the thermode 4-4. By adjusting the hot electrode group 4, a change in the output spectrum can be achieved.
To verify that the present invention can achieve this function, a verification example is specifically illustrated.
The verification example adopts a time domain finite difference method and a transmission matrix method to carry out calculation analysis. The main parameters used in the simulation calculation are: the width of the section of the rectangular waveguide is 500nm, and the height of the rectangular waveguide is 220 nm; the thermo-optic coefficients of silicon and silicon dioxide are 1.84X 10 -4 、 1×10 -5 (ii) a For the multimode interferometer 1-1 in the mach-zender interferometer 1, the multimode waveguide region 1-1-1 has a width of 6 μm and a length 418 μm, the transition waveguide 1-1-2 is a linear Taper waveguide, the width of the long side is 1.6 μm, the length is 10 μm, and the length of the middle waveguide 1-2 is 200 μm; the connecting waveguide group 2 is a combination of multiple sections of waveguides, and the total length of the waveguides is ensured to be equal through topological design, wherein the radius of a ring waveguide is 50 mu m, the total length is pi multiplied by 2 multiplied by 50 mu m, and the total length of a straight waveguide is 332 mu m; the mach zehnder interferometer 3-1 in the tunable microring resonator 3 has parameters identical to the mach zehnder interferometer 1 connected by a 150 μm half-ring waveguide 3-2.
Taking the light input from IN 1 as an example, the curve of the relationship between the output power and the phase of MZI from IN 1 to tempOUT 1-2 with the applied power IN a 1550nm optical signal input is shown IN FIG. 4.
By the combined modulation of the hot electrode set 4, various spectrum morphologies can be obtained, fig. 5 shows three spectra with certain representativeness, fig. 5(a) is a spectrum of a straight-through end of the micro-ring resonator, fig. 5(b) is a spectrum of the straight-through end of the micro-ring resonator with an enlarged free spectral range, and fig. 5(c) is a spectrum of an approximate square.
Fig. 6 shows the waveguide temperature change amounts corresponding to different power consumptions, and it can be seen that the waveguide temperature change amounts corresponding to consumed electric power are approximately in a direct proportion relationship, the proportionality coefficient is about 3.05K/mW, and the approximately linear resonance peak shift can be better used for controlling the MZI.
In conclusion, the dual-injection micro-ring reconfigurable multi-spectrum response unit prepared based on the SOI material can directly realize various frequency domain processing on optical signals, has relatively simple modulation mode and better functionality, and can be better added into the design of an optical processor. Meanwhile, the potential characteristics and advantages of simple manufacture, compatibility with CMOS and low power consumption are achieved.
It should be noted that the above-mentioned embodiments are not intended to limit the scope of the present invention, and all equivalent modifications and substitutions based on the above-mentioned technical solutions are within the scope of the present invention as defined in the claims.

Claims (10)

1. A double-injection micro-ring type reconfigurable multi-spectral response unit prepared based on SOI materials is characterized by comprising SiO 2 A cladding layer, a waveguide layer horizontally arranged in the cladding layer and prepared from Si material and SiO 2 The upper plane of the cladding is provided with a hot electrode.
2. The dual-injection micro-ring reconfigurable multi-spectral response unit of claim 1, wherein the waveguide layers comprise three Mach-Zehnder interferometers (MZIs) and two sets of connecting waveguides, each set comprising two equal-length waveguides; the MZI is composed of two Multi-Mode interferometers (MMIs) with equal power ratios and two waveguides with equal length, the hot electrode morphology is consistent with the morphology of the corresponding waveguide, and is positioned right above the straight waveguide in the MZI structure and on one waveguide of the waveguide group connected with the output end of the MZI for beam splitting.
3. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: an input signal is split through an MZI, the splitting ratio is determined by the voltage of a hot electrode above a connecting waveguide between MMIs, and continuous change of the splitting ratio of 0-1 is achieved.
4. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: the two MZIs are connected by a group of ring waveguides to form a tunable micro-ring resonator, the coupling coefficient of the tunable coupler formed by each MZI is determined by the voltage of a hot electrode right above the connecting waveguide between the MMIs, and continuous change of the coupling coefficient of 0-1 is realized.
5. A dual-injection micro-ring type reconfigurable multi-spectral response unit made on the basis of SOI materials according to claims 3-4, wherein: the beam splitting ratio and the phase difference of the two ports of the MZI are periodically changed relative to the heating power, and the phase difference of the two ports is 0 or pi.
6. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: an input signal is split by an MZI according to a required splitting ratio and is respectively input to two ports of the tunable micro-ring resonator through a group of waveguides, the total length of the group of waveguides needs to be kept equal to ensure that no extra phase difference is generated, the phase difference of two beams of light entering the tunable micro-ring resonator is determined by the voltage of a hot electrode right above the group of waveguides, and the continuous change of the phase difference of 0-2 pi is realized.
7. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 4, wherein: the two ports of the tunable micro-ring resonator are opposite sides so as to ensure that the propagation directions of optical signals input from the two ports are the same.
8. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: the thickness of the silicon waveguide layer of the SOI material system is 220nm, and the cross-sectional dimension of the connecting waveguide is 500nm multiplied by 220 nm.
9. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: in the MMI structure in the MZI, a multi-mode waveguide area and a single-mode waveguide need to be connected in an auxiliary mode by adopting a Taper-type graded waveguide.
10. The reconfigurable multi-spectral response unit of the dual-injection micro-ring type based on the SOI material as claimed in claim 1, wherein: the thermode is made of TiN material, the temperature of which can be changed by applying a voltage across the thermode, and the cross-sectional width of which is 5 μm.
CN202210454239.0A 2022-04-27 2022-04-27 Double-injection micro-ring type reconfigurable multi-spectrum response unit prepared based on SOI (silicon on insulator) material Pending CN115128880A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116841059A (en) * 2023-07-25 2023-10-03 上海铭锟半导体有限公司 Terahertz modulator of silicon-based molybdenum disulfide and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116841059A (en) * 2023-07-25 2023-10-03 上海铭锟半导体有限公司 Terahertz modulator of silicon-based molybdenum disulfide and preparation method thereof

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