CN103776469A - Field programmable gate array (FPGA)-based temperature control and temperature compensation circuit device for silicon microgyroscope - Google Patents
Field programmable gate array (FPGA)-based temperature control and temperature compensation circuit device for silicon microgyroscope Download PDFInfo
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Abstract
The invention discloses a field programmable gate array (FPGA)-based temperature control and temperature compensation circuit device for a silicon microgyroscope. The FPGA-based temperature control and temperature compensation circuit device comprises a microgyroscope integrated with a miniature heater and a temperature sensor, an interface circuit and an FPGA processing circuit; a temperature control loop, a drive control loop and a detection control loop are formed by mutual connection. The chip-level temperature control and temperature compensation of the silicon microgyroscope are achieved by using the temperature sensor and the miniature heater integrated inside the microgyroscope. The FPGA-based temperature control and temperature compensation circuit device has the advantages of high sensitivity, good repeatability, small inertia, high reliability of temperature information, small power consumption, high control accuracy and the like, the effect of temperature drift of an analogue circuit is reduced by an FPGA-based digital temperature control and temperature compensation platform, meanwhile, a digitalized platform is flexible to adjust parameters, and strong in function, kinds of complicated temperature control and temperature compensation algorithms can be flexibly achieved, and optimization of the performance of the system is facilitated.
Description
Technical field
The present invention relates to silicon micro-gyroscope temperature control field, be specifically related to a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA.
Background technology
Silicon micro-gyroscope adopts micromachining technology and SIC (semiconductor integrated circuit) manufacturing process, and device volume is little, low in energy consumption, reliability is high, is easy to digitizing and intellectuality, is applied widely in military and civilian field.Silicon micro-gyroscope environment for use complexity, its performance is subject to variation of ambient temperature impact.Along with improving constantly of silicon micro-gyroscope precision, it is more and more outstanding that its temperature error has seemed.Therefore, the temperature error of correction silicon micro-gyroscope has very important meaning for improving silicon micro-gyroscope performance.
The existing compensation for silicon micro-gyroscope temperature error and bearing calibration are more, at present conventional have three kinds: the first is that the structure by improving silicon micro-gyroscope is eliminated or suppresses temperature error, but its structure and complex process, cost is higher, only can eliminate small part temperature error.Second method is to carry out temperature error compensation by hardware circuit or software algorithm, only can approximate reverse answer micro-gyro environment temperature characteristic but be arranged in micro-gyro temperature sensor around, and temperature error is larger, directly affects compensation effect.The third method is to adopt certain hardware measure to make the gyrostatic operating ambient temperature of MEMS constant as far as possible, as thermoshield, temperature control etc., conventional temperature control is generally using whole gyroscope as temperature control object, programming rate is slow, and power consumption is large, and inertia is large, accuracy of temperature control is limited, poor temperature uniformity, and general temperature control device and MEMS technique incompatible, be unfavorable for micro-gyro miniaturization and integrated.
Above three kinds of conventional temperature error compensations and bearing calibration have the defect of self, are difficult to reach good effect.Study for this problem, become the developing direction of prior art.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA, this device is on micro-gyro basis of existing integrated microheater and temperature sensor, adopt FPGA platform to realize the chip-scale temperature control temperature compensation circuit of silicon micro-gyroscope, solved the problem of prior art.
Technical scheme: a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA, the micro-gyro that has comprised microheater and temperature sensor integrated, one group of A/D sample circuit, one group drive interface circuit, a group interface amplifying circuit and one group of D/A change-over circuit;
Described micro-gyro comprises detection resonator, drives resonator, drives detecting electrode, drive electrode and sensitive electrode; Be provided with two input ends and three output terminals; Wherein, drive resonator and drive electrode to form and drive electric capacity, drive resonator and drive detecting electrode to form to drive Detection capacitance, detect resonator and sensitive electrode formation sensitization capacitance;
It is characterized in that, comprise FPGA treatment circuit, this circuit comprises three input ends and three output terminals; Three output terminals of micro-gyro are respectively temperature sensors, detect the output terminal of resonator and driving resonator, after these three output terminals pass through interface amplifying circuit respectively, through three input ends of A/D sample circuit access FPGA treatment circuit;
FPGA treatment circuit comprises filtration module, comparison module, PI control module, constant multiplier temperature compensation module, amplitude control module, frequency control module, modulation control module, detection signal conditioning module and zero bias temperature compensating module;
The connection of micro-gyro and FPGA treatment circuit forms respectively three groups of loops: temperature control loop, driving control loop and detection control loop;
Temperature control loop is that temperature sensor is for measuring temperature information, temperature signal accesses filtration module after amplification and A/D sampling, filtration module is realized the filtering of temperature signal, the output terminal of filtration module is connected with the input end of comparison module realizes design temperature and the comparison of measuring temperature, the output terminal of comparison module is connected with the input end of PI control module to realize proofreading and correct to be controlled, the output terminal of PI control module is through D/A conversion and drive interface circuit to access the input end of microheater, and microheater is realized heating; Meanwhile, the output terminal of filtration module is connected with the input end of constant multiplier temperature compensation module and zero bias temperature compensating module respectively, for these two modules provide temperature information;
Drive control loop for driving Detection capacitance signal to input FPGA treatment circuit afterwards by driving detecting electrode to be connected with interface amplifying circuit and A/D sample circuit, be divided into two-way, after one tunnel access frequency control module, enter frequency control module, realize frequency control and Phase Tracking; Another road enters constant multiplier temperature compensation module, realizes constant multiplier compensation and controls; An output terminal access amplitude control module of constant multiplier temperature compensation module output terminal and frequency control module, realizes amplitude detection and control; The output terminal access modulation control module of amplitude control module, another output terminal of frequency control module also accesses modulation control module, realizes amplitude modulation(PAM) control; The output terminal of modulation control module is connected with driving resonator drive electrode with driving interface circuit through D/A conversion, realizes closed loop and drives control;
Detecting control loop is that responsive Detection capacitance signal accesses detection signal conditioning module by sensitive electrode after amplification and A/D sampling, an output terminal of frequency control module also accesses detection signal conditioning module simultaneously, realizes detection signal and amplifies, separates mediation filtering; The output terminal of detection signal conditioning module is connected with two input ends of zero bias temperature compensating module respectively with the output terminal of filtration module, realizes zero bias temperature compensation; The output terminal of zero bias temperature compensating module is connected with output signal port Vout realizes signal output;
In driving control loop, described constant multiplier temperature compensation module is the variable gain amplifier that is subject to temperature information control; In the time that the temperature coefficient of temperature information is positive coefficient, constant multiplier temperature compensation module will take negative coefficient to compensate; In the time that described temperature coefficient is negative coefficient, constant multiplier temperature compensation module will take positive coefficient to compensate;
In detection control loop, described zero bias temperature compensating module is adding circuit; In the time that described temperature coefficient is positive coefficient, the zero bias temperature coefficient of zero bias temperature compensating module is positive coefficient, and zero bias temperature compensating module takes negative coefficient to compensate; In the time that described temperature coefficient is negative coefficient, the zero bias temperature coefficient of zero bias temperature compensating module is negative coefficient, and zero bias temperature compensating module takes positive coefficient to compensate.
State frequency control module and comprise time delay adjusting module, amplitude saturator, detuner, wave filter, PI controller and VCO module;
The input end of time delay modulation module, as the input end of frequency control module, receives and drives the signal of Detection capacitance signal after amplification and A/D sampling, and time delay modulation module is realized phase place adjustment; Time delay modulation module output terminal access amplitude saturator, realizes amplitude information isolation, and by the frequency of AC signal and phase information access detuner, an output terminal of voltage-controlled concussion module also accesses detuner simultaneously, realizes phase demodulating; The output terminal of detuner is connected with the input end of wave filter, realizes phase information filtering; The output terminal of wave filter is connected with the input end of PI controller, realizes phase correction control; The output terminal of PI controller is connected with the input end of VCO module, realizes frequency and the phase place adjustment of output AC signal; Two output terminals of VCO module are as output terminal input range control module and the modulation control module respectively of frequency control module.
The poor 90o of phase of output signal of two output terminals of VCO module.
Temperature sensor comprises the responsive interface circuit that adopts constant current source.The responsive interface circuit of temperature sensor that adopts constant current source, the linearity is good, and circuit structure is simple, has eliminated unnecessary temperature-coefficient of electrical resistance impact; Output directly, is convenient to follow-up docking port part resistance residual temperature coefficient and is carried out calibration and compensation.
Beneficial effect:
1, utilize the inner integrated temperature sensor of micro-gyro and microheater to realize that silicon micro-gyroscope chip-scale control temp mending sensitivity is high, reproducible, inertia is little, temperature information is with a high credibility, power consumption is little, control accuracy is high;
2, the digital temperature control temperature compensation platform based on FPGA, has reduced the impact of mimic channel self-temperature drift, and digital Platform parameter adjustment is simultaneously flexible, powerful, can realize flexibly the temperature control temperature compensation algorithm of various complexity, is conducive to system function optimization;
3, driving in control loop, realize actuating speed constant control by temperature controlled variable signal compensation module, complete constant multiplier compensation, there is compensation directly, the linearity is little, can partly eliminate because actuating speed temperature drift causes zero bias temperature drift simultaneously;
4, the responsive interface circuit of temperature sensor that adopts constant current source, the linearity is good, and circuit structure is simple, has eliminated unnecessary temperature-coefficient of electrical resistance impact; Output directly, is convenient to follow-up docking port part resistance residual temperature coefficient and is carried out calibration and compensation.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is for driving control loop structural representation
Fig. 3 is for detecting control loop structural representation
Fig. 4 is integrated micro heater-driven interface circuit schematic diagram
Fig. 5 is the responsive interface amplifying circuit of integrated temperature sensor schematic diagram
Embodiment
Below in conjunction with accompanying drawing, the present invention is done further and explained.
As shown in Figure 1, in conjunction with Fig. 1, a silicon micro-gyroscope 1 instrument temperature control temperature compensation circuit arrangement based on FPGA, the micro-gyro 1 that has comprised microheater and temperature sensor integrated, one group of A/D sample circuit, one group drive interface circuit, a group interface amplifying circuit and one group of D/A change-over circuit; Utilize inner integrated temperature sensor and the microheater of micro-gyro to realize silicon micro-gyroscope chip-scale temperature control temperature compensation, have highly sensitive, reproducible, inertia is little, temperature information is with a high credibility, power consumption is little, control accuracy advantages of higher; Digital temperature control temperature compensation platform based on FPGA simultaneously, has reduced the impact of mimic channel self-temperature drift, and digital Platform parameter adjustment is simultaneously flexible, powerful, can realize flexibly the temperature control temperature compensation algorithm of various complexity, is conducive to system function optimization.
Micro-gyro 1 comprises detection resonator, drives resonator, microheater, temperature sensor, driving detecting electrode C, drive electrode D and sensitive electrode S; Be provided with two input ends and three output terminals; Wherein, drive resonator and drive electrode D to form and drive electric capacity, drive resonator and drive detecting electrode C to form to drive Detection capacitance, detect resonator and sensitive electrode S formation sensitization capacitance.
Be FPGA treatment circuit 2 for what control, this circuit comprises three input ends and three output terminals; Three output terminals of micro-gyro 1 are respectively temperature sensors, detect the output terminal of resonator and driving resonator, after these three output terminals pass through interface amplifying circuit respectively, through three input ends of A/D sample circuit access FPGA treatment circuit 2;
The connection of micro-gyro 1 and FPGA treatment circuit 2 forms respectively three groups of loops: temperature control loop, driving control loop and detection control loop;
In the temperature control loop of chip-scale, integrated temperature sensor is connected and is used for measuring temperature information with the input end of temperature interface amplifying circuit, the output terminal of temperature interface amplifying circuit is connected and realizes analog to digital conversion with the input end of A/D sample circuit, the output terminal of A/D sample circuit is connected with the input end of temperature signal filtration module the filtering that realizes temperature signal, the output terminal of temperature signal filtration module is connected with the input end of comparison module realizes design temperature and the comparison of measuring temperature, the output terminal of simultaneous temperature signal filtering module is connected to constant multiplier with the input end of constant multiplier temperature compensation module and zero bias temperature compensating module respectively and zero offset compensation provides temperature information, the output terminal of comparison module is connected with the input end of PI control module to realize proofreading and correct to be controlled, the output terminal of PI control module is connected and realizes digital-to-analog conversion with the input end of D/A modular converter, the output terminal of D/A modular converter is connected with the input end of temperature-driven interface circuit, the output terminal of temperature-driven interface circuit is connected with integrated micro well heater realizes heating.Wherein temperature signal filtration module, comparison module and PI control module realize by the programming of hardware circuit descriptive language in FPGA treatment circuit 2.
Driving in control loop, drive Detection capacitance signal to drive detection signal to amplify by driving detecting electrode C to be connected with the input end that drives interface amplifying circuit to realize, drive the output terminal of interface amplifying circuit to be connected and to realize analog to digital conversion with the input end of A/D sample circuit, the output terminal of the output terminal of A/D sample circuit and temperature signal filtration module is connected with two input ends of constant multiplier temperature compensation module respectively realizes constant multiplier compensation control, the output terminal of A/D sample circuit is connected and realizes frequency control and Phase Tracking with the input end of frequency control module simultaneously, the output terminal of constant multiplier temperature compensation module and the output terminal B of frequency control module are connected and realize amplitude detection and control with two input ends of amplitude control module respectively, the output terminals A of phase control module is connected with an input end of detection signal conditioning module simultaneously, the output terminals A of phase control module is connected and realizes amplitude modulation(PAM) control with two input ends of modulation control module respectively with the output terminal of amplitude control module, the output terminal of modulation control module is connected and realizes digital-to-analog conversion with the input end of D/A change-over circuit, the output terminal of D/A change-over circuit is connected with the input end that drives interface circuit, the output terminal of driving interface circuit is connected with drive electrode D realizes closed loop driving control.Wherein, constant multiplier temperature compensation module, amplitude control module, frequency control module and modulation control module realize by the programming of hardware circuit descriptive language in FPGA treatment circuit 2.
Detecting in control loop, responsive Detection capacitance signal is connected with the input end of responsive interface amplifying circuit by sensitive electrode S realizes sensitive signal amplification, the output terminal of responsive interface amplifying circuit is connected and realizes analog to digital conversion with the input end of A/D sample circuit, the output terminal of A/D sample circuit is connected with two input ends of detection signal conditioning module respectively and realizes detection signal amplification with the output terminals A of frequency control module, separate mediation filtering, the output terminal of the output terminal of detection signal conditioning module and temperature signal filtration module is connected with two input ends of zero bias temperature compensating module respectively realizes zero bias temperature compensation, the output terminal of zero bias temperature compensating module is connected with output signal port Vout realizes signal output.Wherein detection signal conditioning module and zero bias temperature compensating module are realized by the programming of hardware circuit descriptive language in FPGA treatment circuit 2.
In conjunction with Fig. 2, in constant multiplier compensating circuit, the output terminal of A/D sample circuit is connected with two input ends of constant multiplier temperature compensation module respectively and realizes constant multiplier compensation control with temperature information T, and the output terminal of A/D sample circuit is connected and realizes frequency control and Phase Tracking with the input end of frequency control module simultaneously.Wherein frequency control module comprises time delay adjusting module, amplitude saturator, detuner, wave filter, PI controller and voltage controlled oscillator DCO module, two output terminals A of voltage controlled oscillator DCO module and B phase phasic difference 90o.The output terminal of A/D sample circuit is connected and realizes phase place adjustment with the input end of time delay adjusting module, the output terminal of time delay adjusting module is connected with the input end of amplitude saturator realizes amplitude information isolation, only retain frequency and the phase information of AC signal, the output terminal of the output terminal of amplitude saturator and voltage controlled oscillator DCO module is connected and realizes phase demodulating with two input ends of detuner respectively, the output terminal of detuner is connected and realizes phase information filtering with the input end of wave filter, the output terminal of wave filter is connected and realizes phase correction control with the input end of PI controller, the output terminal of PI controller is connected the frequency and the phase place adjustment that realize output AC signal with the input end of voltage controlled oscillator DCO module.The output terminal of constant multiplier temperature compensation module is connected and realizes amplitude control with the input end of amplitude control module, and wherein amplitude control module comprises that amplitude demodulation module, filtering circuit and amplitude PI control.The output terminal of constant multiplier temperature compensation module is connected with the input end of amplitude demodulation module realizes amplitude information extraction, the output terminal of constant multiplier temperature compensation module is connected with two input ends of amplitude demodulation module respectively and realizes amplitude information extraction with the output terminal B of voltage controlled oscillator DCO module, the input end link information filtering of the output terminal of amplitude demodulation module and filtering circuit, the input end that the output terminal of filtering circuit is controlled with amplitude PI is connected realizes amplitude control, the output terminal that amplitude PI controls is connected and realizes amplitude modulation(PAM) with two input ends of modulation control module respectively with the output terminals A of voltage controlled oscillator DCO module.
It is to change because the temperature coefficient of structure or circuit causes the actuating speed of silicon micro-gyroscope 1 instrument that constant multiplier varies with temperature main cause.Driving in control loop, frequency and phase control module and amplitude control module are controlled respectively driving frequency and the driving amplitude of silicon micro-gyroscope 1, therefore, can be in amplitude control loop the tc compensation to structure and circuit.Because the input voltage of amplitude demodulation module is controlled at a certain steady state value by amplitude control module, constant multiplier temperature compensation module is the variable gain amplifier that controlled by temperature information T.In the time that the temperature coefficient of structure and circuit is positive coefficient, the temperature coefficient of constant multiplier is negative coefficient, constant multiplier temperature compensation module will take negative coefficient to compensate, it is same in the time that the temperature coefficient of structure and circuit is negative coefficient, the temperature coefficient of constant multiplier is positive coefficient, and constant multiplier temperature compensation module will take positive coefficient to compensate.
In conjunction with Fig. 3, at zero offset compensation circuit, the output terminal of A/D sample circuit is connected with the input end of detection signal conditioning module realizes detection signal amplification, separate mediation filtering, detection signal conditioning module comprises signal amplification circuit sensitive signal demodulation module and wave filter, the output terminal of A/D sample circuit is connected with the input end of signal amplification circuit realizes signal amplification, the output terminal Vref of the output terminal of signal amplification circuit and voltage controlled oscillator DCO module is connected and realizes sensitive signal demodulation with two input ends of sensitive signal demodulation module respectively, the output terminal of sensitive signal demodulation module is connected with the input end of wave filter and realizes signal filtering after demodulation, the output terminal T of the output terminal of wave filter and temperature signal filtration module is connected with two input ends of zero bias temperature compensating module respectively and realizes zero bias temperature compensation, the output terminal of zero bias temperature compensating module is connected with output signal port Vout realizes signal output.
Zero partially to vary with temperature main cause be to change because the temperature coefficient of structure or circuit causes the responsive common-mode error of silicon micro-gyroscope 1 instrument.Detecting in control loop, output signal Vout directly reacts zero bias temperature to be changed, zero bias temperature compensation is an adding circuit, the No. of believing one side only zero of temperature signal T and wave filter output is inputted respectively adding circuit and is realized plus and minus calculation, in the time that the temperature coefficient of structure and circuit is positive coefficient, zero inclined to one side temperature coefficient is positive coefficient, zero inclined to one side temperature compensation module will take negative coefficient to compensate, it is same in the time that the temperature coefficient of structure and circuit is negative coefficient, zero inclined to one side temperature coefficient is negative coefficient, and zero inclined to one side temperature compensation module will take positive coefficient to compensate.
In conjunction with Fig. 4, integrated micro heat driven interface circuit mainly converts D/A output signal to the control voltage that integrated heater needs, the output of D/A is connected with one end of resistance R 4, the backward end of resistance R 4 another termination operational amplifier U2, the ground connection of end in the same way of U2, resistance R 5 is connected across backward end and the output terminal of operational amplifier U2, and operational amplifier U2 mainly realizes the symbol transition of input voltage Input; Resistance R 1 one terminations+5V bias voltage, the backward end of another termination operational amplifier U1, resistance R 2 one end ground connection, the end in the same way of another termination operational amplifier U1, resistance R 3 is connected across the end in the same way and the output terminal that meet operational amplifier U1, and operational amplifier U1 mainly produces the direct current biasing of bias voltage for compensated operational amplifier U3 input end; The output terminal of R6 mono-termination U1, the backward end of another termination operational amplifier U3, the output terminal of R7 mono-termination U2, the backward end of another termination operational amplifier U3, resistance R 8 is connected across backward end and the output terminal of operational amplifier U3, integrated micro heating resistor R9 one end ground connection, the output terminal of a termination operational amplifier U3, operational amplifier U3 realizes signal to synthesize, and produces suitable signal driver integrated micro heating resistor R9.
In conjunction with Fig. 5, the responsive interface circuit of integrated temperature sensor adopts constant current source, and advantage is that the linearity is good, and circuit structure is simple, has eliminated unnecessary temperature-coefficient of electrical resistance impact; Output directly, is convenient to follow-up docking port part resistance residual temperature coefficient and is carried out calibration and compensation.The responsive interface circuit of integrated temperature sensor is mainly realized signal extraction and the amplification of temperature sensor, one end ground connection of constant current source I1, the positive input of another termination instrument amplifier U4, for converting voltage signal to, integrated temperature sensor R13 provides constant electric current, the positive input of integrated temperature sensor R13 mono-termination instrument amplifier U4, other end ground connection, one end ground connection of constant current source I2, the reverse input end of another termination instrument amplifier U4, the reverse input end of resistance R 12 1 termination instrument amplifier U4, the other end is connected with resistance R 14 one end, the other end ground connection of resistance R 14, resistance R 15 is connected across 3 pin and 4 pin of instrument amplifier U4 and realizes gain adjustment.Resistance R 12 and R14 series arm are the differential compensation branch roads of resistance R 13, are mainly used to eliminate the common mode output of instrument amplifier.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (4)
1. the silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA, the micro-gyro (1) that has comprised microheater and temperature sensor integrated, one group of A/D sample circuit, one group drive interface circuit, a group interface amplifying circuit and one group of D/A change-over circuit;
Described micro-gyro (1) comprises detection resonator, drives resonator, drives detecting electrode (C), drive electrode (D) and sensitive electrode (S); Be provided with two input ends and three output terminals; Wherein, drive resonator and drive electrode (D) to form and drive electric capacity, drive resonator and drive detecting electrode (C) to form to drive Detection capacitance, detect resonator and sensitive electrode (S) formation sensitization capacitance;
It is characterized in that, comprise FPGA treatment circuit (2), this circuit comprises three input ends and three output terminals; Three output terminals of micro-gyro (1) are respectively temperature sensors, detect the output terminal of resonator and driving resonator, after these three output terminals pass through interface amplifying circuit respectively, through three input ends of A/D sample circuit access FPGA treatment circuit (2);
FPGA treatment circuit (2) comprises filtration module, comparison module, PI control module, constant multiplier temperature compensation module, amplitude control module, frequency control module, modulation control module, detection signal conditioning module and zero bias temperature compensating module;
The connection of micro-gyro (1) and FPGA treatment circuit (2) forms respectively three groups of loops: temperature control loop, driving control loop and detection control loop;
Temperature control loop is that temperature sensor is for measuring temperature information, temperature signal accesses filtration module after amplification and A/D sampling, filtration module is realized the filtering of temperature signal, the output terminal of filtration module is connected with the input end of comparison module realizes design temperature and the comparison of measuring temperature, the output terminal of comparison module is connected with the input end of PI control module to realize proofreading and correct to be controlled, the output terminal of PI control module is through D/A conversion and drive interface circuit to access the input end of microheater, and microheater is realized heating; Meanwhile, the output terminal of filtration module is connected with the input end of constant multiplier temperature compensation module and zero bias temperature compensating module respectively, for these two modules provide temperature information (T);
Drive control loop for driving Detection capacitance signal by driving detecting electrode (C) to access FPGA treatment circuit (2) after amplification and A/D sampling, be divided into two-way, after one tunnel access frequency control module, enter frequency control module, realize frequency control and Phase Tracking; Another road enters constant multiplier temperature compensation module, realizes constant multiplier compensation and controls; An output terminal access amplitude control module of constant multiplier temperature compensation module output terminal and frequency control module, realizes amplitude detection and control; The output terminal access modulation control module of amplitude control module, another output terminal of frequency control module also accesses modulation control module, realizes amplitude modulation(PAM) control; The output terminal of modulation control module is connected with driving resonator drive electrode D with driving interface circuit through D/A conversion, realizes closed loop and drives control;
Detecting control loop is that responsive Detection capacitance signal accesses detection signal conditioning module by sensitive electrode (S) after amplification and A/D sampling, an output terminal of frequency control module also accesses detection signal conditioning module simultaneously, realizes detection signal and amplifies, separates mediation filtering; The output terminal of detection signal conditioning module is connected with two input ends of zero bias temperature compensating module respectively with the output terminal of filtration module, realizes zero bias temperature compensation; The output terminal of zero bias temperature compensating module is connected with output signal port Vout realizes signal output;
In driving control loop, the variable gain amplifier that described constant multiplier temperature compensation module is controlled for being subject to temperature information (T); In the time that the temperature coefficient of temperature information (T) is positive coefficient, constant multiplier temperature compensation module will take negative coefficient to compensate; In the time that described temperature coefficient is negative coefficient, constant multiplier temperature compensation module will take positive coefficient to compensate;
In detection control loop, described zero bias temperature compensating module is adding circuit; In the time that described temperature coefficient is positive coefficient, the zero bias temperature coefficient of zero bias temperature compensating module is positive coefficient, and zero bias temperature compensating module takes negative coefficient to compensate; In the time that described temperature coefficient is negative coefficient, the zero bias temperature coefficient of zero bias temperature compensating module is negative coefficient, and zero bias temperature compensating module takes positive coefficient to compensate.
2. a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA as claimed in claim 1, is characterized in that: described frequency control module comprises time delay adjusting module, amplitude saturator, detuner, wave filter, PI controller and VCO module;
The input end of time delay modulation module, as the input end of frequency control module, receives and drives the signal of Detection capacitance signal after interface amplification and A/D sampling, and time delay modulation module is realized phase place adjustment; Time delay modulation module output terminal access amplitude saturator, realizes amplitude information isolation, and by the frequency of AC signal and phase information access detuner, an output terminal of voltage-controlled concussion module also accesses detuner simultaneously, realizes phase demodulating; The output terminal of detuner is connected with the input end of wave filter, realizes phase information filtering; The output terminal of wave filter is connected with the input end of PI controller, realizes phase correction control; The output terminal of PI controller is connected with the input end of VCO module, realizes frequency and the phase place adjustment of output AC signal; Two output terminals of VCO module are as output terminal input range control module and the modulation control module respectively of frequency control module.
3. a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA as claimed in claim 2, is characterized in that the poor 90o of phase of output signal of two output terminals of described VCO module.
4. a kind of silicon micro-gyroscope temperature control temperature compensation circuit arrangement based on FPGA as claimed in claim 1, is characterized in that, described temperature sensor comprises responsive interface circuit.
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| CN111412907A (en) * | 2019-12-30 | 2020-07-14 | 南京理工大学 | Full-angle measurement and control circuit system of micro-electromechanical multi-ring gyroscope |
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| CN114509058A (en) * | 2021-12-29 | 2022-05-17 | 北京航天自动控制研究所 | Optical gyroscope starting section zero temperature error compensation method and device |
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