CN105091883A - MEMS-integrated IMU temperature compensation improving method - Google Patents
MEMS-integrated IMU temperature compensation improving method Download PDFInfo
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- CN105091883A CN105091883A CN201510499372.8A CN201510499372A CN105091883A CN 105091883 A CN105091883 A CN 105091883A CN 201510499372 A CN201510499372 A CN 201510499372A CN 105091883 A CN105091883 A CN 105091883A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
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- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Gyroscopes (AREA)
Abstract
The invention provides an MEMS-integrated IMU temperature compensation improving method. An inner temperature sensor of an MEMS device is used for compensating for vibration of an MEMS gyroscope and outputting filtered temperature for IMU component level compensation. In order to reduce influences of temperature on the vibration frequency of the MEMS gyroscope, the inner temperature sensor is adopted for temperature compensation. Due to the fact that compensation noise will be increased when temperature changes, in order to reduce the influences of temperature changes on a compensation effect, the temperature output by the temperature sensor is filtered, and stable temperature data are used for modeling compensation. Meanwhile, the filtered temperature data are output, the same temperature is used for compensating for the temperature of the gyroscope and an IMU, and compensation consistency of the MEMS gyroscope and the IMU component is improved.
Description
Technical field
The present invention is that a kind of MEMS integration IMU temperature compensation is improved one's methods, and is applicable to inertial navigation, navigational guidance and control, micro electronmechanical processing and manufacturing field.
Background technology
With regard to current technological development present situation, microsensor is to a large amount of different application field, and the signal detection system as aviation, long-range detection, medical treatment and industrial automation creates far-reaching influence.It is portable that low precision MEMS inertial sensor is mainly used in mobile phone, game machine, music player, wireless mouse, digital camera, PD, hard disk protection, intelligent toy, passometer, burglary-resisting system, GPS navigation etc. as consumable electronic product.Owing to having acceleration analysis, inclination measurement, the vibration survey even fundamental measurement function such as rotation measuring, consumer-electronics applications to be excavated is had constantly to occur.
Middle rank MEMS inertial sensor is as technical grade and automotive grade product, then be mainly used in automobile electronic stabilization system (ESP or ESC) GPS secondary navigation system, the measurement of safe automobile air bag, vehicle attitude, accurate agricultural, industrial automation, large medical equipment, robot, instrument and meter, engineering machinery etc.
High-precision MEMS inertial sensor as army grade and aerospace level product, major requirement high precision, the full index such as warm area, shock resistance.Be mainly used in that communications satellite is wireless, the application of missile homer, optical aiming system equistability; Aircraft/missile flight control, gesture stability, yaw damping etc. control guidance application, long-range vehicle boats and ships instrument, the battlefield robots etc. such as application and intermediate range missile guidance, inertia GPS navigation.
Past three year, the development trend forward of global MEMS inertial sensor polarises and develops, and consumer electronics application on the one hand, application are constantly expanded, and demand improves rapidly, and attracting manufacturer constantly increases, intensified competition, and unit price constantly declines; On the other hand, technical grade and army grade application precision improve constantly, and unit price rises very fast.
Existing low side gyro, the foundation of its static model mainly sets up concordance list (i.e. tumbling with temperature, as Honeywell Honeywell company of the U.S., Crossbow company of the U.S. etc.), when mainly considering different temperatures work, temperature is on the impact of gyro drift, gyro scale factor, gyro misalignment.
But the temperature affecting gyro static model also has a lot, mainly contains: the factor such as initial work (namely starting shooting), initial temperature, temperature variation, thermograde, warm variable Rate, slewing rate, rotation direction.The precision of low precision MEMS gyro, equally by the impact of temperature, thermograde etc., also has significantly non-linear, and there is item relevant to g.How for MEMS gyro, set up more accurate model, do the multifactor analysis of variance further, cancelling noise impact and secondary cause, describe more accurately to gyro static model, contributes to the raising that system information merges performance.
On the whole, the impact of temperature on MEMS is huge.If can serviceability temperature compensation method effectively, the precision and stability of MEMS gyro instrument can be increased substantially.
Summary of the invention
The invention discloses a kind of MEMS integration IMU temperature compensation to improve one's methods, use MEMS internal temperature sensor, compensate the vibration of MEMS gyro instrument, filtered temperature exported simultaneously, the component-level for IMU compensates.In order to reduce the impact of temperature on MEMS gyro vibration frequency, internal temperature sensor is adopted to carry out temperature compensation.Because temperature variation can increase comfort noise, the present invention, in order to reduce the impact of temperature variation on compensation effect, carries out filtering to the temperature that temperature sensor exports, uses stable temperature data to carry out modeling compensation., filtered temperature data is exported meanwhile, use same temperature to carry out temperature compensation to gyroscope and IMU, enhance the consistance of MEMS gyro and the compensation of IMU parts.
Compared with prior art, the beneficial effect had is as follows in the present invention.
1, applied widely, may be used for multiple MEMS sensor application.
2, do not increase additional hardware, the temperature sensor using MEMS inside to carry obtains data, achieves data-reusing and shares.
3, the processor utilizing MEMS inside to carry carries out temperature data filtering, makes full use of the computation capability of FPGA, is not significantly increased system operations burden.
4, MEMS gyro instrument and MEMSIMU use same temperature source to carry out temperature compensation, achieve the consistance of temperature compensation.
Technological innovation of the present invention comprise following some.
1, complete the prototyping of high precision MEMS gyro instrument, approved product is produced and is widely used in domestic and international air market.
2, adopt two-stage temperature compensation to reduce the temperature drift of MEMS gyro instrument, solve in gyroscope application and make important full temperature work problem.
3, use wavelet analysis method to analyze gyro data, set up MEMS gyro instrument error model, the application for MEMS gyro provides mathematics to support.
4, develop integrated calibration algorithm, improve gyroscope and demarcate efficiency, ensure that gyroscope can volume production.
Accompanying drawing explanation
Fig. 1 is the gyroscope ultimate principle figure based on MEMS technology.Inside casing framework and vertical quality can be regarded as gyro element soon, and outer gimbal support can be regarded as motor, and each framework is connected with another one framework by a set of orthogonal flexible shaft.Wherein housing flexible shaft is vibration driving shaft, and inside casing flexible shaft is vibration output shaft.These axles are lower in sense of rotation rigidity, stronger at other directional stiffness.When outside framework axle is with the vibration of low-angle, inner axis is the responsive angular speed to occurring along the axle perpendicular to frame plane just, and inner frame is by with the amplitude vibrations proportional with input angle speed, and vibration frequency is identical with outside framework vibration frequency.Driving and the detection of these vibrations are all realized by static capacitor elements, electrode is arranged on above internal and external frame, by measuring the capacitance variations between inner frame and electrode, can detects the amplitude that inner frame vibrates, thus measuring the size of angular speed.
Fig. 2 is MEMS gyro instrument structural drawing.By at chip-scale integrated temperature sensor, the temperature of real-time monitor gyro, sets up the temperature model of silicon chip and flexible stent, is compensated by the vibration frequency of temperature model to gyro.
Embodiment
1, real-Time Compensation is carried out to driving circuit.
The detection of gyro signal is realized by the electric capacity on sheet, in order to ensure the accuracy that signal reads, must ensure the precision of electric capacity, reducing distributed capacitance as far as possible, chip increases prime amplifier, reduce the noise of signal.
2, self-checking circuit on sheet is increased.
On sheet, self-checking circuit is also supervisory circuit simultaneously, and the reason that MEMS gyro instrument precision reduces sometimes is that on sheet, functional circuit breaks down.If fault is not obvious, directly gyro failure detection cannot be carried out by output interface.If increase function detection module on chip, the state of internal current source, voltage source, distributed capacitance resistance and compensating circuit can be monitored in real time, in time going wrong, directly export malfunction by 422 interfaces, be convenient to the reason analyzing Gyro Precision reduction.
3, permanent width, high q-factor frequency-tracking resonator control technology is taked.
Adopt self-excited oscillatory frequency tracking control technology, to ensure the permanent width of resonator, the high stability of high q-factor.
4, wavelet analysis method is used to carry out gyro data process.
Wavelet analysis is the one of modern signal processing method, can time domain and frequency domain analyze signal again.Signal decomposition flow process is as follows.By the analysis to gyro signal, frequency filtering reasonable in design, had both ensured the bandwidth of MEMS gyro, the precision of guaranteed gyro.
5, gamut total temperature error modeling is carried out to MEMS gyro.
By the MEMS gyro error modeling method of our company, set up the error model of gyro, by compensation data algorithm, provide user high-precision gyro data.
Claims (4)
1. the present invention is that a kind of temperature compensation based on MEMS integration IMU is improved one's methods, and use MEMS internal temperature sensor, compensate the vibration of MEMS gyro instrument, filtered temperature exported simultaneously, the component-level for IMU compensates.
2. MEMS integration IMU according to claim 1 temperature compensation is improved one's methods, and it is characterized in that: in order to reduce the impact of temperature on MEMS gyro vibration frequency, adopting internal temperature sensor to carry out temperature compensation.
3. MEMS integration IMU according to claim 1 temperature compensation is improved one's methods, and it is characterized in that: in order to reduce the impact of temperature variation on compensation effect, carrying out filtering, use stable temperature data to carry out modeling compensation to the temperature that temperature sensor exports.
4. MEMS integration IMU according to claim 1 temperature compensation is improved one's methods, it is characterized in that: in order to carry out the consistance of MEMS gyro and the compensation of IMU parts, filtered temperature data is exported, uses same temperature to carry out temperature compensation to gyroscope and IMU.
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| CN201510499372.8A CN105091883A (en) | 2015-08-14 | 2015-08-14 | MEMS-integrated IMU temperature compensation improving method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108534942A (en) * | 2018-03-28 | 2018-09-14 | 西南交通大学 | A kind of minute-pressure resistive sensor vibration and temperature interference compensation model and system |
| CN110186446A (en) * | 2019-06-27 | 2019-08-30 | 重庆芯力源科技有限公司 | A kind of north searching instrument method based on MEMS gyro |
| CN113514076A (en) * | 2020-04-09 | 2021-10-19 | 阿里巴巴集团控股有限公司 | Data processing method, device, equipment and storage medium |
| CN115655317A (en) * | 2022-12-26 | 2023-01-31 | 西安航天精密机电研究所 | Method for detecting and debugging working temperature range and working temperature point of double-floating-top gyroscope |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108534942A (en) * | 2018-03-28 | 2018-09-14 | 西南交通大学 | A kind of minute-pressure resistive sensor vibration and temperature interference compensation model and system |
| CN110186446A (en) * | 2019-06-27 | 2019-08-30 | 重庆芯力源科技有限公司 | A kind of north searching instrument method based on MEMS gyro |
| CN113514076A (en) * | 2020-04-09 | 2021-10-19 | 阿里巴巴集团控股有限公司 | Data processing method, device, equipment and storage medium |
| CN113514076B (en) * | 2020-04-09 | 2024-05-14 | 阿里巴巴集团控股有限公司 | Data processing method, device, equipment and storage medium |
| CN115655317A (en) * | 2022-12-26 | 2023-01-31 | 西安航天精密机电研究所 | Method for detecting and debugging working temperature range and working temperature point of double-floating-top gyroscope |
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