CN103256941A - Practical method of high order temperature compensation for MEMS (Micro Electro Mechanical Systems) gyroscope - Google Patents
Practical method of high order temperature compensation for MEMS (Micro Electro Mechanical Systems) gyroscope Download PDFInfo
- Publication number
- CN103256941A CN103256941A CN201310136730XA CN201310136730A CN103256941A CN 103256941 A CN103256941 A CN 103256941A CN 201310136730X A CN201310136730X A CN 201310136730XA CN 201310136730 A CN201310136730 A CN 201310136730A CN 103256941 A CN103256941 A CN 103256941A
- Authority
- CN
- China
- Prior art keywords
- temperature
- gyroscope
- compensation
- drift angle
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Gyroscopes (AREA)
Abstract
The invention relates to a practical method of high order temperature compensation for an MEMS gyroscope. The method is used for temperature compensation for the MEMS gyroscope and an accelerometer. The method comprises the following steps of: (1) setting a zero-offset angular speed output value and temperature model of the gyroscope; (2) obtaining a series of temperature compensation coefficients needed for the model of the gyroscope by fitting according to the zero-offset angular speed output values under different temperatures and different angular speeds; and (3) establishing a compensation calculation model of the gyroscope in the whole temperature range according to the model and the temperature compensation coefficients, and obtaining a zero-offset angular speed output signal of the gyroscope after temperature compensation according to calculation of the compensation calculation model. According to the method, by establishment of the temperature compensation model of zero-offset angular speed, the temperature compensation model is used for compensating the zero-offset angular speed of the gyroscope, thus, null shift of the gyroscope can be reduced effectively, and the gyroscope begins to be stabilized; and the null shift stability is improved, and the temperature compensation effect on the gyroscope is realized.
Description
Technical field
The present invention relates to the temperature compensation of a kind of gyroscope (or accelerometer).
Background technology
Gyroscope is the core component that determines the inertia system precision, and wherein fast-developing silicon micromechanical gyroscope is the bigger MEMS (micro electro mechanical system) (MEMS) of a class difficulty in recent years, is to belong to the product that the micromachined of silicon combines with gyroscopic theory.The high precision gyroscope of a function admirable not only will reduce oscillating mass piece and the anchor point that is connected that detects between mass and the substrate as far as possible, also will reduce the mechanical couplings between oscillating mass piece and the detection mass as far as possible.Be that example describes with a kind of single fulcrum angular oscillation formula MEMS gyro below.
Figure 1 shows that a kind of structure of single fulcrum angular oscillation formula MEMS gyro, this structure drives outer shroud by one and a detection inner disc is formed.Drive outer shroud and be connected with inner disc by four semi-girders, and inner disc also is connected with the center anchor point by four cantilever fine strains of millet.Total just is suspended on the substrate by the strong point in center, so this gyroscope is actually a floated angular oscillation gyroscope of standard.
Gyrostatic whole travel(l)ing rest comprises that excitation rings and detection dish are all supported by the center anchor point.And the gyrostatic output of this single fulcrum is connected on the angular velocity input contact.Outer shroud under broach shape electrode drive around the whirling vibration of Z axle, when an angular acceleration around X-direction acts on gyro, gyro will be subjected to one along the coriolis force effect of Y-direction, inner disc will swing along Y-direction, and amplitude of fluctuation will be directly proportional with the coriolis force size, and the angular velocity of output is directly proportional with the coriolis force size.
Single fulcrum angular oscillation formula silicon micro mechanical MEMS gyroscope and other MEMS gyroscope and accelerometer are material with the thin silicon sheet, utilize semiconductor processing technology to make, and adopt photoetching and anisotropic etch process manufacturing to form by monocrystalline silicon piece.The current silicon micro-gyroscope major part of developing all is in the speed level, and the performance of each side far can not satisfy the application demand in fields such as industry and civilian high precision.Because silicon materials are a kind of thermo-sensitive materials, its machinery, physical characteristics temperature influence are bigger, when temperature changes, not only physical dimension will be out of shape, great variety also can take place in performances such as the elastic modulus of material, pulling strengrth, unrelieved stress, so temperature susceplibility is big, temperature drift becomes one of main error source of gyro.Because the micro-silicon inertia device all is subjected to the influence of self material, manufacturing process and each factor of working environment easily on precision and degree of stability, this directly has influence on it in the application of commerce and industrial circle, and the temperature drift that therefore solves micromechanical gyro is the gordian technique that gyro is used.But the manufacturing process of gyro and technology are difficult to be greatly enhanced in a short time, and therefore, carrying out temperature control or temperature drift compensation is the important channel of head it off.By the drift of research silicon micro-gyroscope, the precision that improves gyro in the hope of the compensation by gyroscopic drift is necessary.
According to document as can be known, the thermal expansivity of establishing silicon materials is α, and semiconductor dimensions is l
0, then during temperature variation △ T, the change in size of material is L, and L=l
0(1+ α △ T).And gyrostatic elasticity coefficient is the function of physical dimension, and temperature causes the variation of physical dimension, will cause the variation of the rigidity of semiconductor beam, thereby causes gyrostatic natural angular frequency to change.From gyrostatic kinetics equation we as can be seen, natural angular frequency and sensitivity, dynamic perfromance and stability are relevant, so temperature not only can influence gyrostatic output sensitivity, also will produce a very large impact gyrostatic dynamic perfromance and stability.
In addition, gyro uses the problem that also can cause to a certain degree.Zero drift angle speed (zero drift angle speed: NRi such as gyro, partially zero or zero-bit angular velocity refers to the output valve of gyroscope under zero input angular velocity situation, the average equivalence conversion of interior output of available long period is represented for input angular velocity) can produce drift along with the variation of the temperature and movement that moves, and variation of temperature is particularly evident, environment temperature constantly changes, and sensor length service time self temperature also changes, constantly raise, and be non-linear variation, tangible deviation can appear in Shu Chu angular velocity like this.Temperature variation is more obvious, and deviation is more big, has seriously reduced reliability and the practicality of gyro.Therefore temperature compensation is the important technical that improves Gyro Precision and range of application.
The research work of domestic gyroscope temperature compensation starts from late nineteen eighties, and there are Tsing-Hua University, Southeast China University, the National University of Defense technology, Shanghai Communications University, BJ University of Aeronautics ﹠ Astronautics etc. in main research unit.The research of these units biases toward the foundation of system temperature model and the research of theoretical method.As following list of references:
Publication number is the patent of invention " a kind of distributed layer-dividing grade temperature error compensating method of optical fiber gyroscope " of 101408427A;
Publication number is the patent of invention " a kind of gyroscope method for temperature drift compensation " of 102230806A;
2007, BJ University of Aeronautics ﹠ Astronautics's journal, vol33, NO12, " periodic error of quartzy MEMS gyroscopic drift is demarcated the level compensation ".
There is certain limitation in these methods, mainly show:
Conventional compensation approach is to adopt simulated mode that signal of sensor is calibrated and compensated, and there are some shortcomings in the method, is subjected to Temperature Influence equally as compensating element; Compensation precision is subjected to the restriction of the nonlinearity erron of sensor; The realization of local temperature control need change the inner structure of sensor usually, and material or increase extra temperature control system is realized comparatively complexity etc.
In order not change the structure of sensor, more adopt the method for software compensation.But software compensation is prerequisite with the accurate sensor model, needs complicated temp. controlling box and complicated testing apparatus usually.
Method itself at the temperature compensation of silicon MEMS gyro is many unlike the gyro of other structures, and the method that can simple and effective realizes still less, rests on theoretical and software stage more.So need to inquire into a kind of realization method of the MEMS gyroscope being carried out temperature compensation that can simple and effective
Summary of the invention
The purpose of this invention is to provide a kind of method of can simple and effective ground the MEMS gyroscope being carried out temperature compensation.
For achieving the above object, the technical solution used in the present invention is:
The high-order temperature compensated practical approach of a kind of MEMS gyroscope is used for various MEMS gyroscopes and the accelerometer of the MEMS gyroscope that comprises single fulcrum angular oscillation formula are carried out temperature compensation, and this method comprises:
(1) sets up the model of described gyrostatic zero drift angle speed output valve and temperature;
(2) obtain the required a series of temperature compensation coefficient of described gyrostatic above-mentioned model according to described gyrostatic zero drift angle speed output valve under different temperature and the different angular velocity by match;
(3) set up the compensation computation model of described gyroscope in the total temperature scope according to described model and described temperature compensation coefficient, calculate the zero drift angle velocity output signal of described gyroscope after temperature compensation according to described compensation computation model.
Preferably, in the described step (1), described model is
Wherein, N
RBe described gyrostatic zero drift angle speed output valve, T is temperature, and m, n are positive integer.
Preferably, in the described model, n=5, namely described gyrostatic compensation order is 5, required 21 the described temperature compensation coefficients of this described model.
Preferably, in the described step (2), adopt surface fitting to obtain a series of described temperature compensation coefficient.
Preferably, described gyroscope is carried out comprehensive match to described temperature compensation coefficient under different temperature and different angular velocity, sampling is described gyrostatic zero drift angle speed output valve under different temperatures, different angular velocity, match in the three-dimensional system of coordinate that is made of temperature, angular velocity, zero drift angle speed output valve obtains the temperature coefficient curved surface of described gyroscope in total temperature, gamut according to above-mentioned sampled value, obtains a series of described temperature compensation coefficients by described temperature coefficient surface fitting.
Preferably, according to the needs of precision described temperature is divided into several isometric minizones, the described zero drift angle speed output valve of repeatedly sampling in each described minizone is also averaged as the sampled value of this minizone.
Preferably, obtain being constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve according to described sampled value described point in described three-dimensional system of coordinate, obtain the temperature coefficient curved surface of described gyroscope in total temperature, gamut by match again.
Preferably, adopt least-squares estimation or way of fitting and obtain the temperature coefficient curved surface of described gyroscope in total temperature, gamut at described actual three-dimension curved surface.
Preferably, in the described step (3), described model and described temperature compensation coefficient are done dot product and obtained the compensation computation model of described gyroscope in the total temperature scope.
This method realizes by bucking-out system;
Described bucking-out system comprises
PC, described PC is connected with the output signal that contains described zero drift angle speed output valve that described gyroscope is exported, and according to described temperature and the described zero described temperature compensation coefficient of drift angle speed output valve match, and set up the compensation computation model of described gyroscope in the total temperature scope according to described model and described temperature compensation coefficient;
Storer, described storer is connected with described PC by interface module and stores described temperature compensation coefficient and the compensation computation model of described gyroscope in the total temperature scope;
Main arithmetical unit, described main arithmetical unit has three input ends, the output signal that contains described zero drift angle speed output valve that described first input end of main arithmetical unit is exported by the first conversion process module and described gyroscope is connected, the output signal that contains temperature value that second input end of described main arithmetical unit exported by the second conversion process module and temperature sensor is connected, and the 3rd input end of described main arithmetical unit is connected with the output terminal of described storer; The output terminal of described main arithmetical unit is connected with the treatment conversion module; Described main arithmetical unit reads described temperature compensation coefficient and the compensation computation model of described gyroscope in the total temperature scope in the described storer, and according to described gyrostatic zero drift angle speed output valve and described temperature described gyroscope is carried out temperature compensation calculating and exports the zero drift angle velocity output signal of described gyroscope after temperature compensation.
Above-mentioned storer and main arithmetical unit both can adopt the mode of special circuit to realize, also can adopt form realizations such as microprocessor.
Because technique scheme is used, the present invention compared with prior art has following advantage: the model of temperature compensation of the present invention by zero drift angle speed has been set up in processing and the analysis of test figure, utilize this model of temperature compensation of setting up that gyrostatic zero drift angle speed is compensated, can effectively reduce gyrostatic drift, and make it to tend towards stability; Drift stability is improved, thereby has reached gyrostatic effect temperature compensation, makes it can satisfy the application of engineering to a certain extent.
Description of drawings
Accompanying drawing 1 is the gyrostatic structural representation of existing single fulcrum angular oscillation formula MEMS.
The synoptic diagram by temperature, angular velocity, zero drift angle speed output valve constitute actual three-dimension curved surface of accompanying drawing 2 in three-dimensional system of coordinate, obtaining among the present invention.
Accompanying drawing 3 is the synoptic diagram of the temperature coefficient curved surface of gyroscope in total temperature, gamut that obtain by match among the present invention.
Accompanying drawing 4 is the theory diagram of bucking-out system among the present invention.
Embodiment
Be further described below in conjunction with the present invention of embodiment shown in the drawings.
Embodiment one: the high-order temperature compensated practical approach of a kind of MEMS gyroscope is used for various MEMS gyroscopes and the accelerometer of the MEMS gyroscope that comprises single fulcrum angular oscillation formula are carried out temperature compensation.In the present embodiment, compensate with the gyrostatic temperature drift of MEMS to single fulcrum angular oscillation formula and to be example.Because it is comparatively responsive to temperature variation to constitute the performance of electron device in the material of silicon micro mechanical gyrotron and the gyroscope peripheral circuit, cause the output accuracy of silicon micro mechanical gyrotron to be subjected to the serious restriction of environment temperature.When environment temperature changes, gyrostatic zero obviously aggravation of drift partially.Therefore the temperature characterisitic of silicon micro mechanical gyrotron is studied, analyze gyroscope output zero inclined to one side rule, grasp the relation between partially zero and the environment temperature, it is compensated, for reducing the susceptibility of silicon micro mechanical gyrotron to temperature, the service precision that improves the silicon micro mechanical gyrotron is extremely important.
The correlation parameter explanation:
1, zero drift angle speed: NRi, partially zero or zero-bit angular velocity refer to the output valve of gyroscope under zero input angular velocity situation, and the equivalent conversion of the average of output is represented for input angular velocity in the available long period.The structured material of micro-mechanical gyroscope (especially silicon materials) performance is subjected to the influence of environment temperature bigger, and zero drift angle speed can change along with the variation of factors such as time, environment temperature, and therefore, zero inclined to one side stability often provides under certain temperature conditions;
2, fitting coefficient: Ci; Fitting coefficient in this method amounts to 21, C
0-C
20
3, temperature: Ti, the temperature range in this method is-55 ℃ to 125 ℃.
The high-order temperature compensated practical approach of this MEMS gyroscope comprises:
(1) sets up the model of gyrostatic zero drift angle speed output valve and temperature.
This model is at normalized zero drift angle speed output valve N
RSet up with normalized temperature T.This model is
Wherein, N
RBe gyrostatic zero drift angle speed output valve, T is temperature, and m, n are positive integer.In order to improve compensation effect, improve fitting precision as far as possible, simultaneously be conducive to quick compensation deals again, and hardware system can realize, be 5 through demonstration compensation order repeatedly, i.e. n=5, above-mentioned model is
This order in micromechanics MEMS gyro than higher.
(2) obtain the required a series of temperature compensation coefficient of gyrostatic above-mentioned model according to gyrostatic zero drift angle speed output valve under different temperature and the different angular velocity by match.
Because the gyrostatic zero drift angle speed output valve of above-mentioned foundation and the model of temperature are 5 rank, so its required 21 temperature compensation coefficients are respectively C
0-C
20
In this step, adopt surface fitting to obtain a series of temperature compensation coefficient.Gyroscope is carried out comprehensive match to temperature compensation coefficient, the gyrostatic zero drift angle speed output valve under different temperatures, different angular velocity of at first sampling under different temperature and different angular velocity.In above-mentioned sampling process, can temperature be divided into several isometric minizones according to the needs of precision, the zero drift angle speed output valve of repeatedly sampling in each minizone is also averaged as the sampled value of this minizone.Match in the three-dimensional system of coordinate that is made of temperature, angular velocity, zero drift angle speed output valve obtains the temperature coefficient curved surface of gyroscope in total temperature, gamut according to above-mentioned sampled value then.Concrete, obtain being constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve according to sampled value described point in three-dimensional system of coordinate, obtain the temperature coefficient curved surface of gyroscope in total temperature, gamut by match again.Adopt least-squares estimation or way of fitting to obtain series of temperature penalty coefficient C by the temperature coefficient curved surface at last
0-C
20
Be described in detail below in conjunction with specific embodiment.For the zero drift angle speed under the different temperatures is compensated, need earlier batch property or single gyro to be carried out the match of temperature compensation coefficient.Surface fitting method is adopted in match, guarantees comprehensive match of different temperatures, different angular velocity.
Fitting method is: fix one of them parameter in temperature, angular velocity, such as temperature, change angular velocity, test one group of zero drift angle velocity amplitude; Fixing another one parameter again, such as angular velocity, transformation temperature is tested one group of zero drift angle velocity amplitude again.The value of test is carried out match.
In the process of data acquisition, data are evenly distributed in the bigger temperature range as far as possible, and can measure and repeatedly reduce measuring error.
Needs according to precision, temperature is divided into isometric one by one minizone, carry out data acquisition in each temperature range, on each minizone, can repeatedly sample, and make that the number of samples of each minizone is basic identical on the temperature axis, sampled value on each minizone is carried out arithmetic mean, obtain a value in each minizone, as this interval sampled value.So just, obtained the value of the zero drift angle speed that quantity is identical between some and dividing regions.In order to study temperature to the zero inclined to one side influence of MEMS gyro, certain type MEMS micromechanical gyro is placed in the temperature control box, such as at-50 ℃ ,-40 ℃ ,-30 ℃ ,-20 ℃ ,-10 ℃, 0 ℃, 10 ℃, 20 ℃, 30 ℃, 40 ℃, 50 ℃, 60 ℃ ... under 100 ℃ even the higher environment temperature, it is carried out zero bias testing.After treating that each temperature field is constant, sampling is respectively got its average as zero inclined to one side stationary value of gyro under this temperature.
Be example with single shaft MEMS gyro, (three gyro is in like manner), the process of temperature compensation coefficient match is such:
(1) fixed temperature changes angular velocity, the value of test zero drift angle speed.
Under same temperature conditions, in the range ability of MEMS gyro, change different angular velocity, be designated as ω i.Gather the value NRi_t of next group zero drift angle speed of this temperature;
(2) fixed angles speed changes temperature, the value of test zero drift angle speed.
Under same angular velocity condition, choose some probe temperature points in temperature range-55 in to 125 ℃, be designated as Ti=T0+ △ T, △ T is temperature increment; The value NRi_ ω of the zero drift angle speed when gathering different temperatures under this angular velocity condition;
(3) surface fitting
In the three-dimensional system of coordinate that---ω i---NRi constitutes at Ti, adopt statistical recurrence to carry out surface fitting to two groups of above-mentioned sampling numerical value, obtain the relation of temperature and zero gyro drift angle speed.The process of match is like this: in three-dimensional system of coordinate, zero drift angle velocity amplitude described point with each Ti, each ω i, constitute an irregular curved surface, namely constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve, as shown in Figure 2.
Adopt least square method or other approximating methods to carry out match, draw the ideal surface of the temperature coefficient of gyroscope in total temperature, gamut at last, as shown in Figure 3, the Ci that obtains by match is temperature compensation coefficient again.
(3) set up the compensation computation model of gyroscope in the total temperature scope according to model and temperature compensation coefficient, calculate the zero drift angle velocity output signal of gyroscope after temperature compensation according to the compensation computation model.
Model and temperature compensation coefficient done dot product and to obtain the compensation computation model of gyroscope in the total temperature scope as follows:
Rate（T）=C
0+C
1N
R+C
2T+…+C
i-1N
RT
n-1+C
iT
n。
And 5 complete rank compensation computation model is as follows:
By the calculating of following formula, can obtain the zero drift angle velocity output signal of gyroscope after temperature compensation.
Said method is realized by bucking-out system, shown in accompanying drawing 4.Bucking-out system comprises PC, storer, main arithmetical unit.
PC is connected with the output signal that contains zero drift angle speed output valve that gyroscope is exported, and according to temperature and zero drift angle speed output valve match temperature compensation coefficient, and set up the compensation computation model of gyroscope in the total temperature scope according to model and temperature compensation coefficient.
Storer is connected with PC and storing temperature penalty coefficient and the compensation computation model of gyroscope in the total temperature scope by interface module.Interface module comprises the series interface board (for example adopting NI USB-6281 interface board) that is connected with PC and fitting coefficient string and the modular converter that is connected with this series interface board, and fitting coefficient string and modular converter are connected with storer.This storer is nonvolatile memory EEPROM.
Main arithmetical unit has three input ends.The output signal that contains zero drift angle speed output valve that first input end of main arithmetical unit is exported by the first conversion process module and gyroscope is connected.The first conversion process module comprise with gyroscope or add the A/D converter that is connected of meter and be connected in A/D converter and main arithmetical unit between the normalized module.The output signal that contains temperature value that second input end of main arithmetical unit exported by the second conversion process module and temperature sensor is connected.The second conversion process module comprise the A/D converter that is connected with temperature sensor and be connected in A/D converter and main arithmetical unit between the normalized module.The 3rd input end of main arithmetical unit is connected with the output terminal of storer.
The output terminal of main arithmetical unit is connected with the treatment conversion module, and this treatment conversion module comprises anti-normalized module and D/A converter.Main arithmetical unit reads the temperature compensation coefficient in the storer, utilize the compensation computation model of spiral shell instrument in the total temperature scope, according to gyrostatic zero drift angle speed output valve and temperature gyroscope is carried out temperature compensation calculating, and the output gyroscope is through the zero drift angle velocity output signal after the temperature compensation.
Above-mentioned storer and main arithmetical unit both can adopt the mode of special circuit to realize, also can adopt form realizations such as microprocessor.
Specifically, the course of work of above-mentioned bucking-out system is divided into two parts: the one, write coefficient, and the 2nd, computing.
First step work is for writing coefficient, and the original output of gyro zero drift angle speed is carried out match in PC, write in the storer by standard SPI series interface board then, and serial data is imported from the temperature compensation input port.After internal system is carried out the fitting coefficient conversion, 21 groups of 32bits data are stored in the nonvolatile memory EEPROM.
The work of second step is multinomial operation, after all storage finishes with 21 groups of fitting coefficient Ci, imports zero drift angle speed N again
RAnd temperature T, carry out multinomial operation with the Ci data of from EEPROM, reading.
Zero drift angle speed N
RFrom adding meter or gyro, after the A/D converter conversion, data serial input temp master arithmetical unit carries out normalized in circuit inside, obtains the normalization parallel digital signal and sends in the main arithmetical unit; Temperature T obtains by temperature sensor, and after the A/D converter conversion, data serial input temp master arithmetical unit carries out normalized in circuit inside, obtains the normalization parallel digital signal and sends into equally in the main arithmetical unit equally.With Ci, N
RCarry out above-mentioned multinomial operation with three groups of data of T at main arithmetical unit.
Zero drift angle speed RateD after being compensated behind the multinomial operation can directly export after parallel/serial conversion.If need be converted to simulating signal, also need carry out anti-normalized and parallel/serial conversion, serial output data Rate is converted to required simulating signal NR ' through D/A converter.
Hardware realization system shown in the accompanying drawing 4 externally angular velocity frequency is under the situation of 100kHz, and through the computing of whole compensation process, output is about 1ms with the time delay of the zero drift angle of input speed, can see to have good real time performance.
Show that through the test statistics data micromechanical gyro is through adopting temperature compensation of the present invention, zero drift angle speed reduces the deviation of an order of magnitude, can satisfy the needs that sensor is used in real time.The temperature compensation multinomial model of this patent by zero drift angle speed has been set up in processing and the analysis of test figure.And with the model of setting up drift angular velocity is compensated.From the result of compensation as can be seen: the drift of compensation back gyro effectively reduces, and tends towards stability; Drift stability is improved, thereby has reached compensation effect, can satisfy the application of engineering to a certain extent.
The present invention has following advantage:
5 rank polynomial expressions are adopted in compensation, and fitting coefficient adopts the mode of surface fitting, compensation precision height;
Zero drift angle speed to be compensated becomes digital signal by analog to digital converter and carries out computing, reduced intractability, the hardware of bucking-out system is realized easy, only need the coefficient of match be write in the nonvolatile memory by the serial line interface of standard, compensate computing by arithmetical unit, both can independently carry out computing by a little arithmetical unit, also can become one with the signal processing circuit of MEMS gyro.
Above-described embodiment only is explanation technical conceive of the present invention and characteristics, and its purpose is to allow the personage who is familiar with this technology can understand content of the present invention and enforcement according to this, can not limit protection scope of the present invention with this.All equivalences that spirit essence is done according to the present invention change or modify, and all should be encompassed within protection scope of the present invention.
Claims (10)
1. high-order temperature compensated practical approach of a kind of MEMS gyroscope is used for various MEMS gyroscopes and the accelerometer of the MEMS gyroscope that comprises single fulcrum angular oscillation formula are carried out temperature compensation, and it is characterized in that: this method comprises:
(1) sets up the model of described gyrostatic zero drift angle speed output valve and temperature;
(2) obtain the required a series of temperature compensation coefficient of described gyrostatic above-mentioned model according to described gyrostatic zero drift angle speed output valve under different temperature and the different angular velocity by match;
(3) set up the compensation computation model of described gyroscope in the total temperature scope according to described model and described temperature compensation coefficient, calculate the zero drift angle velocity output signal of described gyroscope after temperature compensation according to described compensation computation model.
2. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 1, it is characterized in that: in the described step (1), described model is
Wherein, N
RBe described gyrostatic zero drift angle speed output valve, T is temperature, and m, n are positive integer.
3. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 2 is characterized in that: in the described model, and n=5, namely described gyrostatic compensation order is 5, required 21 the described temperature compensation coefficients of this described model.
4. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 1 is characterized in that: in the described step (2), adopt surface fitting to obtain a series of described temperature compensation coefficient.
5. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 4, it is characterized in that: described gyroscope is carried out comprehensive match to described temperature compensation coefficient under different temperature and different angular velocity, sampling is in different temperatures, described gyrostatic zero drift angle speed output valve under the different angular velocity, according to above-mentioned sampled value by temperature, angular velocity, match obtains described gyroscope at total temperature in the three-dimensional system of coordinate that zero drift angle speed output valve constitutes, temperature coefficient curved surface in the gamut obtains a series of described temperature compensation coefficients by described temperature coefficient surface fitting.
6. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 5, it is characterized in that: the needs according to precision are divided into several isometric minizones with described temperature, and the described zero drift angle speed output valve of repeatedly sampling in each described minizone is also averaged as the sampled value of this minizone.
7. according to claim 5 or the high-order temperature compensated practical approach of 6 described a kind of MEMS gyroscopes, it is characterized in that: obtain being constituted actual three-dimension curved surface by temperature, angular velocity, zero drift angle speed output valve according to described sampled value described point in described three-dimensional system of coordinate, obtain the temperature coefficient curved surface of described gyroscope in total temperature, gamut by match again.
8. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 7 is characterized in that: adopt least-squares estimation or way of fitting and obtain the temperature coefficient curved surface of described gyroscope in total temperature, gamut at described actual three-dimension curved surface.
9. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 1, it is characterized in that: in the described step (3), described model and described temperature compensation coefficient are done dot product and obtained the compensation computation model of described gyroscope in the total temperature scope.
10. the high-order temperature compensated practical approach of a kind of MEMS gyroscope according to claim 1, it is characterized in that: this method realizes by bucking-out system;
Described bucking-out system comprises
PC, described PC is connected with the output signal that contains described zero drift angle speed output valve that described gyroscope is exported, and according to described temperature and the described zero described temperature compensation coefficient of drift angle speed output valve match, and set up the compensation computation model of described gyroscope in the total temperature scope according to described model and described temperature compensation coefficient;
Storer, described storer is connected with described PC by interface module and stores described temperature compensation coefficient and the compensation computation model of described gyroscope in the total temperature scope;
Main arithmetical unit, described main arithmetical unit has three input ends, the output signal that contains described zero drift angle speed output valve that described first input end of main arithmetical unit is exported by the first conversion process module and described gyroscope is connected, the output signal that contains temperature value that second input end of described main arithmetical unit exported by the second conversion process module and temperature sensor is connected, and the 3rd input end of described main arithmetical unit is connected with the output terminal of described storer; The output terminal of described main arithmetical unit is connected with the treatment conversion module; Described main arithmetical unit reads described temperature compensation coefficient and the compensation computation model of described gyroscope in the total temperature scope in the described storer, and according to described gyrostatic zero drift angle speed output valve and described temperature described gyroscope is carried out temperature compensation calculating and exports the zero drift angle velocity output signal of described gyroscope after temperature compensation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310136730.XA CN103256941B (en) | 2013-04-19 | 2013-04-19 | A kind of method that MEMS gyroscope is high-order temperature compensated |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310136730.XA CN103256941B (en) | 2013-04-19 | 2013-04-19 | A kind of method that MEMS gyroscope is high-order temperature compensated |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103256941A true CN103256941A (en) | 2013-08-21 |
| CN103256941B CN103256941B (en) | 2016-12-28 |
Family
ID=48961008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310136730.XA Active CN103256941B (en) | 2013-04-19 | 2013-04-19 | A kind of method that MEMS gyroscope is high-order temperature compensated |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103256941B (en) |
Cited By (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558415A (en) * | 2013-11-19 | 2014-02-05 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS accelerometer with temperature compensation function |
| CN103776469A (en) * | 2014-02-26 | 2014-05-07 | 东南大学 | Field programmable gate array (FPGA)-based temperature control and temperature compensation circuit device for silicon microgyroscope |
| CN103940427A (en) * | 2014-03-11 | 2014-07-23 | 哈尔滨工程大学 | Temperature error compensation method during MEMS inertial measurement unit cold start |
| CN104317550A (en) * | 2014-09-28 | 2015-01-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS (Micro Electro Mechanical System) temperature compensation operation circuit |
| CN104330105A (en) * | 2014-10-24 | 2015-02-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS (Micro Electro Mechanical Systems) inertial sensor nonlinearity compensation method |
| CN104502632A (en) * | 2014-11-28 | 2015-04-08 | 郑州合智汇金电子科技有限公司 | Temperature compensation method for quartz acceleration sensor |
| CN104596547A (en) * | 2015-01-27 | 2015-05-06 | 北京航天时代光电科技有限公司 | Full-temperature and full-dynamic testing method of acceleration measurement channel of inertia measurement device |
| CN105068032A (en) * | 2015-08-13 | 2015-11-18 | 湖南大学 | Photovoltaic convergence box current acquisition channel temperature drift coefficient calibration method |
| CN105091883A (en) * | 2015-08-14 | 2015-11-25 | 宋长峰 | MEMS-integrated IMU temperature compensation improving method |
| CN105222765A (en) * | 2015-09-18 | 2016-01-06 | 工业和信息化部电子第五研究所 | The temperature compensation of MEMS gyro and system |
| CN105277215A (en) * | 2015-11-19 | 2016-01-27 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS gyroscopic acceleration sensitivity compensation method based on centrifugal acceleration |
| CN105974156A (en) * | 2016-06-23 | 2016-09-28 | 中国兵器工业集团第二四研究所苏州研发中心 | Accelerometer signal processing circuit zero offset test method |
| CN106370173A (en) * | 2016-08-17 | 2017-02-01 | 中国船舶重工集团公司第七0七研究所 | Modeling and verifying method of laser gyroscope temperature compensation model |
| CN106546267A (en) * | 2016-10-27 | 2017-03-29 | 陕西航天时代导航设备有限公司 | A kind of zero-bit temperature calibration method of rate gyroscope |
| CN107462261A (en) * | 2017-08-15 | 2017-12-12 | 歌尔科技有限公司 | A kind of compensation method of gyroscope, device and gyroscope |
| CN107533339A (en) * | 2015-04-20 | 2018-01-02 | 深圳市大疆创新科技有限公司 | System and method for sensor operations to be carried out with thermal conditioning |
| CN107870000A (en) * | 2017-11-06 | 2018-04-03 | 中国人民解放军63686部队 | Raising optical fibre gyro bias instaility method based on Polynomial Fitting Technique |
| CN108562306A (en) * | 2018-03-02 | 2018-09-21 | 无锡凌思科技有限公司 | A kind of comprehensive compensation method of MEMS gyroscope temperature-compensating |
| CN109752024A (en) * | 2017-11-07 | 2019-05-14 | 山东神戎电子股份有限公司 | A kind of temperature drift bearing calibration of micromechanical gyro |
| CN109883411A (en) * | 2019-03-12 | 2019-06-14 | 哈尔滨工程大学 | A method of inhibiting optical fibre gyro temperature error or vibration error |
| CN110231052A (en) * | 2019-04-25 | 2019-09-13 | 深圳大漠大智控技术有限公司 | A kind of detection method of gyroscope exception temperature drift |
| CN110542437A (en) * | 2019-09-21 | 2019-12-06 | 中北大学 | Mechanical sensitivity self-compensation method for driving-detecting mode interchange micro-mechanical gyroscope |
| CN110726852A (en) * | 2019-10-09 | 2020-01-24 | 湖南海迅自动化技术有限公司 | MEMS accelerometer temperature compensation method |
| CN112461261A (en) * | 2020-11-06 | 2021-03-09 | 长沙天仪空间科技研究院有限公司 | Device and method for correcting temperature drift of MEMS gyroscope |
| CN113155114A (en) * | 2021-04-23 | 2021-07-23 | 三一重型装备有限公司 | Temperature compensation method and device for gyro zero position of MEMS (micro-electromechanical systems) inertial measurement unit |
| CN113203429A (en) * | 2021-04-02 | 2021-08-03 | 同济大学 | Online estimation and compensation method for temperature drift error of gyroscope |
| CN114018233A (en) * | 2021-04-01 | 2022-02-08 | 东方空间技术(山东)有限公司 | Temperature compensation method and device of micromechanical gyroscope |
| CN114184212A (en) * | 2021-12-27 | 2022-03-15 | 北京计算机技术及应用研究所 | Zero-position temperature compensation method for inertial instrument |
| CN114440923A (en) * | 2021-12-20 | 2022-05-06 | 中船航海科技有限责任公司 | Inertial device testing system and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6598455B1 (en) * | 1999-06-30 | 2003-07-29 | California Institute Of Technology | Non-inertial calibration of vibratory gyroscopes |
| CN101029833A (en) * | 2007-03-12 | 2007-09-05 | 北京航空航天大学 | Method for calibrating connected MEMS gyro dynamic error |
| CN102230806A (en) * | 2011-04-26 | 2011-11-02 | 中国科学院软件研究所 | Temperature drift compensation method for gyroscope |
-
2013
- 2013-04-19 CN CN201310136730.XA patent/CN103256941B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6598455B1 (en) * | 1999-06-30 | 2003-07-29 | California Institute Of Technology | Non-inertial calibration of vibratory gyroscopes |
| CN101029833A (en) * | 2007-03-12 | 2007-09-05 | 北京航空航天大学 | Method for calibrating connected MEMS gyro dynamic error |
| CN102230806A (en) * | 2011-04-26 | 2011-11-02 | 中国科学院软件研究所 | Temperature drift compensation method for gyroscope |
Non-Patent Citations (3)
| Title |
|---|
| 许德新等: "MEMS惯性测量组件德温度误差补偿模型研究", 《哈尔滨工程大学学报》 * |
| 赵旭等: "大温差应用环境下的MEMS陀螺零偏补偿研究", 《传感技术学报》 * |
| 魏泽松等: "温度对IMU微机械陀螺仪零偏影响及标定补偿", 《国外电子测量技术》 * |
Cited By (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558415B (en) * | 2013-11-19 | 2016-05-11 | 中国兵器工业集团第二一四研究所苏州研发中心 | With the mems accelerometer of temperature-compensating |
| CN103558415A (en) * | 2013-11-19 | 2014-02-05 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS accelerometer with temperature compensation function |
| CN103776469A (en) * | 2014-02-26 | 2014-05-07 | 东南大学 | Field programmable gate array (FPGA)-based temperature control and temperature compensation circuit device for silicon microgyroscope |
| CN103940427A (en) * | 2014-03-11 | 2014-07-23 | 哈尔滨工程大学 | Temperature error compensation method during MEMS inertial measurement unit cold start |
| CN103940427B (en) * | 2014-03-11 | 2017-01-25 | 哈尔滨工程大学 | Temperature error compensation method during MEMS inertial measurement unit cold start |
| CN104317550A (en) * | 2014-09-28 | 2015-01-28 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS (Micro Electro Mechanical System) temperature compensation operation circuit |
| CN104330105A (en) * | 2014-10-24 | 2015-02-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS (Micro Electro Mechanical Systems) inertial sensor nonlinearity compensation method |
| CN104502632A (en) * | 2014-11-28 | 2015-04-08 | 郑州合智汇金电子科技有限公司 | Temperature compensation method for quartz acceleration sensor |
| CN104502632B (en) * | 2014-11-28 | 2017-06-16 | 郑州合智汇金电子科技有限公司 | A kind of temperature compensation of quartz acceleration sensor |
| CN104596547A (en) * | 2015-01-27 | 2015-05-06 | 北京航天时代光电科技有限公司 | Full-temperature and full-dynamic testing method of acceleration measurement channel of inertia measurement device |
| CN104596547B (en) * | 2015-01-27 | 2018-02-09 | 北京航天时代光电科技有限公司 | A kind of complete full dynamic testing method of temperature of inertial measuring unit acceleration analysis passage |
| CN107533339B (en) * | 2015-04-20 | 2020-05-22 | 深圳市大疆创新科技有限公司 | System and method for thermally regulating sensor operation |
| CN107533339A (en) * | 2015-04-20 | 2018-01-02 | 深圳市大疆创新科技有限公司 | System and method for sensor operations to be carried out with thermal conditioning |
| CN105068032A (en) * | 2015-08-13 | 2015-11-18 | 湖南大学 | Photovoltaic convergence box current acquisition channel temperature drift coefficient calibration method |
| CN105068032B (en) * | 2015-08-13 | 2017-10-03 | 湖南大学 | A kind of calibration method of photovoltaic combiner box current acquisition channel temperature coefficient of deviation |
| CN105091883A (en) * | 2015-08-14 | 2015-11-25 | 宋长峰 | MEMS-integrated IMU temperature compensation improving method |
| CN105222765A (en) * | 2015-09-18 | 2016-01-06 | 工业和信息化部电子第五研究所 | The temperature compensation of MEMS gyro and system |
| CN105222765B (en) * | 2015-09-18 | 2018-06-12 | 工业和信息化部电子第五研究所 | The temperature-compensation method and system of MEMS gyro |
| CN105277215B (en) * | 2015-11-19 | 2017-12-12 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS gyro BURNING RATE ACCELERATION SENSITIVITY compensation method based on centrifugal acceleration |
| CN105277215A (en) * | 2015-11-19 | 2016-01-27 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS gyroscopic acceleration sensitivity compensation method based on centrifugal acceleration |
| CN105974156B (en) * | 2016-06-23 | 2018-11-16 | 中国兵器工业集团第二一四研究所苏州研发中心 | A kind of accelerometer signal processing circuit zero bias test method |
| CN105974156A (en) * | 2016-06-23 | 2016-09-28 | 中国兵器工业集团第二四研究所苏州研发中心 | Accelerometer signal processing circuit zero offset test method |
| CN106370173A (en) * | 2016-08-17 | 2017-02-01 | 中国船舶重工集团公司第七0七研究所 | Modeling and verifying method of laser gyroscope temperature compensation model |
| CN106370173B (en) * | 2016-08-17 | 2019-05-24 | 中国船舶重工集团公司第七0七研究所 | A kind of modeling of lasergyro model of temperature compensation and verification method |
| CN106546267A (en) * | 2016-10-27 | 2017-03-29 | 陕西航天时代导航设备有限公司 | A kind of zero-bit temperature calibration method of rate gyroscope |
| CN107462261B (en) * | 2017-08-15 | 2020-11-17 | 歌尔光学科技有限公司 | Compensation method and device of gyroscope and gyroscope |
| CN107462261A (en) * | 2017-08-15 | 2017-12-12 | 歌尔科技有限公司 | A kind of compensation method of gyroscope, device and gyroscope |
| CN107870000A (en) * | 2017-11-06 | 2018-04-03 | 中国人民解放军63686部队 | Raising optical fibre gyro bias instaility method based on Polynomial Fitting Technique |
| CN109752024A (en) * | 2017-11-07 | 2019-05-14 | 山东神戎电子股份有限公司 | A kind of temperature drift bearing calibration of micromechanical gyro |
| CN108562306A (en) * | 2018-03-02 | 2018-09-21 | 无锡凌思科技有限公司 | A kind of comprehensive compensation method of MEMS gyroscope temperature-compensating |
| CN109883411A (en) * | 2019-03-12 | 2019-06-14 | 哈尔滨工程大学 | A method of inhibiting optical fibre gyro temperature error or vibration error |
| CN110231052A (en) * | 2019-04-25 | 2019-09-13 | 深圳大漠大智控技术有限公司 | A kind of detection method of gyroscope exception temperature drift |
| CN110542437A (en) * | 2019-09-21 | 2019-12-06 | 中北大学 | Mechanical sensitivity self-compensation method for driving-detecting mode interchange micro-mechanical gyroscope |
| CN110726852A (en) * | 2019-10-09 | 2020-01-24 | 湖南海迅自动化技术有限公司 | MEMS accelerometer temperature compensation method |
| CN112461261A (en) * | 2020-11-06 | 2021-03-09 | 长沙天仪空间科技研究院有限公司 | Device and method for correcting temperature drift of MEMS gyroscope |
| CN112461261B (en) * | 2020-11-06 | 2024-01-30 | 长沙天仪空间科技研究院有限公司 | Device and method for correcting temperature drift of MEMS gyroscope |
| CN114018233A (en) * | 2021-04-01 | 2022-02-08 | 东方空间技术(山东)有限公司 | Temperature compensation method and device of micromechanical gyroscope |
| CN114018233B (en) * | 2021-04-01 | 2023-03-14 | 东方空间技术(山东)有限公司 | Temperature compensation method and device of micromechanical gyroscope |
| CN113203429A (en) * | 2021-04-02 | 2021-08-03 | 同济大学 | Online estimation and compensation method for temperature drift error of gyroscope |
| CN113155114A (en) * | 2021-04-23 | 2021-07-23 | 三一重型装备有限公司 | Temperature compensation method and device for gyro zero position of MEMS (micro-electromechanical systems) inertial measurement unit |
| CN113155114B (en) * | 2021-04-23 | 2023-11-17 | 三一重型装备有限公司 | Temperature compensation method and device for gyro zero position of MEMS inertial measurement unit |
| CN114440923A (en) * | 2021-12-20 | 2022-05-06 | 中船航海科技有限责任公司 | Inertial device testing system and method |
| CN114184212A (en) * | 2021-12-27 | 2022-03-15 | 北京计算机技术及应用研究所 | Zero-position temperature compensation method for inertial instrument |
| CN114184212B (en) * | 2021-12-27 | 2023-09-26 | 北京计算机技术及应用研究所 | Zero temperature compensation method for inertial instrument |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103256941B (en) | 2016-12-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103256941A (en) | Practical method of high order temperature compensation for MEMS (Micro Electro Mechanical Systems) gyroscope | |
| CN101067555B (en) | Force balancing resonance micro-mechanical gyro | |
| CN101968360B (en) | Circuit system for bell-shaped vibrator angular rate gyro | |
| CN103353310B (en) | A kind of laser near-net shaping | |
| CN101246023A (en) | Closed-loop calibration method of micro-mechanical gyroscope inertial measuring component | |
| CN111024119B (en) | Rapid calibration method for triaxial MEMS gyroscope | |
| CN104819710B (en) | A kind of resonant micromechanical silicon gyro with temperature compensation structure | |
| CN102878989A (en) | Triaxial angular vibration measuring method through adopting satellite-borne linear accelerometers | |
| CN106248078A (en) | Machine laser gyroscope shaking sensitive axes dynamic deflection error parameter is estimated and compensation method | |
| CN102539832A (en) | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' | |
| KR101658473B1 (en) | Compensation method of acceleration sensitivity of mems gyroscope | |
| CN106918438A (en) | The measuring method and system of a kind of multi -components power and torque | |
| Hou et al. | A quadrature compensation method to improve the performance of the butterfly vibratory gyroscope | |
| Kou et al. | Analysis and Study of a MEMS Vibrating Ring Gyroscope with High Sensitivity | |
| CN102636184A (en) | Specific force-sensitive term calibration method for flexible gyroscope based on centrifuge in environment without angular movement | |
| Wang et al. | Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform | |
| CN104677356B (en) | A kind of paddle speed calculation method exported based on angle increment and specific force | |
| CN104678126A (en) | Phase-shift temperature compensation method based on parasitic resistance for micro-mechanical capacitive accelerometer | |
| Cui et al. | Design and experiment of MEMS solid-state wave gyroscope quadrature error correction system | |
| CN208459793U (en) | Micro-mechanical accelerometer control device | |
| CN105953781A (en) | Tuning-fork micromechanical gyroscope sensor applied to wireless sensor network | |
| CN114858187A (en) | MEMS inertial navigation system calibration method | |
| CN201689108U (en) | Asynchronous driving piezoelectric-vibration angular rate sensor | |
| CN103712634A (en) | Vibration-magnetic field cross-coupling degree measurement method for fiber-optic gyroscope | |
| Yin et al. | Vibration effect correction method of inclinometer in intermittent transonic wind tunnel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180813 Address after: 233030 2016 Tang He road, Bengbu, Anhui Patentee after: Huadong Photoelectric Integrated Device Research Institute Address before: 215163 No. 89 Longshan Road, hi tech Zone, Suzhou, Jiangsu Patentee before: China North Industries Group Corporation No.214 Research Institute Suzhou R&D Center |