CN103575698B - The optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber - Google Patents
The optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber Download PDFInfo
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Abstract
The present invention is to solve the detection problem of some biochemical, propose the optics biochemical sensitive chip in a kind of micro-ring resonant cavity embedded FP chamber, this chip comprises input/output straight wave guide and the first resonator cavity on the monocrystalline silicon layer of SOI matrix, first resonator cavity is the micro-ring resonant cavity that ring-like waveguide is constituted, also comprising grating FP chamber on the ring-like waveguide of micro-ring resonant cavity, the grating in FP chamber is etched on the ring-like waveguide of described micro-ring resonant cavity.By using said structure, the optics biochemical sensitive chip of the present invention, under conditions of reaching identical sensing capabilities, reduces the volume of optics biochemical sensitive chip, is advantageously implemented miniaturization and the sensor-based system on sheet of optical biochemical sensor.Can be used for the detection of biomacromolecule (protein or DNA) liquid sample and gas Molecular Detection.Have compared with other biochemical sensitive chip processing technology standardization, be easy to integrated, sensing capabilities is excellent and a series of features such as applied widely.
Description
Technical field
The present invention relates to chemistry specific to gas molecule or biomolecule etc. or the detection technique of biological substance, be specifically related to optical sensing field, particularly to the optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber.
Background technology
Biochemical sensor is the coalition of a kind of bioactive materials and respective transducer, and it is used for measuring specific chemistry or biological substance.Due to measure these chemistry or biological substance in environmental monitoring, diseases monitoring and medicament research and development significant, so the research to biochemical sensor has seemed extremely important.The most typical optical biochemical sensor can be divided mainly into fluorescent labeling type optical biochemical sensor and the big class of unmarked type optical biochemical sensor two, from the document being correlated with, although fluorescent labeling type optical biochemical sensor has been used for detection and distinguishes specific biochemical molecule, but have that equipment is huge, operation is complicated and spends the shortcomings such as time length, and typically require special messenger's operation with certain professional technique, universal relatively costly, meanwhile, for the fluorescence molecule of labelling it is also possible to affect the detection of sample.Comparatively speaking, unmarked type optical biochemical sensor smaller, cost is lower, and application process is the most convenient, and is not re-introduced into new interference during measuring, and result is the most relatively reliable.
Based on SOI(Silicon-On-Insulator, the silicon in dielectric substrate) optical biochemical sensor be exactly a kind of unmarked type optical biochemical sensor, the simultaneously study hotspot of this area the most just.From the point of view of existing optical biochemical sensor based on SOI, mostly have employed evanescent wave (evanescent waves) detection principle, evanescent wave refers to a kind of electromagnetic wave produced on the separating surface of two kinds of different mediums due to total reflection, the exponentially form decay with the increase of the degree of depth perpendicular with separating surface of its amplitude, by the evanescent wave of optical biochemical sensor fiber waveguide described in detection to detect sample biochemical.Its principle is in sample to be tested that biochemical can cause the change (showing as the change of the effective refractive index of optical biochemical sensor) of light wave transmissions character in optical biochemical sensor, also will make the biochemical concentration signal in sample be converted to change in optical signal.The planar waveguiding structure having been used for sensing at present has the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, annular chamber, surface plasma body resonant vibration.Wherein, to optically-based cavity resonator structure (such as FP chamber, annular chamber etc.) optical biochemical sensor for, the introducing of resonance effect can make optical signal continuous resonance and amplification in resonator cavity, therefore the increase of optical biochemical sensor detection length it is equivalent to, the change in optical signal such as phase place (or intensity) more can be caused to detectable value, and then realize on compact sized optical biochemical sensor, reach preferable sensing capabilities, the most undersized optical biochemical sensor also allows for miniaturization and the miniaturization of optical biochemical sensor system, system cost will be effectively reduced.
Additionally, optical biochemical sensor based on cursor effect is gradually proposed by people in recent years, this sensor is to utilize two sensing subsystems with different Free Spectral Range, forms a new sensor-based system.The operation principle of this new sensor-based system is: owing to the Free Spectral Range (FSR) of two subsystem is different, therefore, the Free Spectral Range of whole sensor-based system should be the least common multiple of the Free Spectral Range of two subsystems.Therefore, this sensor has the biggest Free Spectral Range and the biggest measurement scope.
Existing to gas molecule or biomolecule etc. in the detection technique field of specific chemistry or biological substance, the example that the Dominant Facies such as the advantage of the Miniaturizable of SOC(system on a chip) based on SOI and the measuring precision based on cursor effect are combined almost without.
Summary of the invention
The invention aims to solve the detection problem of some biochemical, in the prior art on the basis of the biochemical sensor of the optically-based detection of main flow, it is proposed that a kind of based on cursor effect optical resonator biochemical sensitive chip.
nullTo achieve these goals，The technical scheme is that the optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber，Including the silicon base layer stacking gradually bonding from bottom to top、The SOI matrix that silicon dioxide layer and monocrystalline silicon layer are constituted，It is characterized in that，The monocrystalline silicon layer of described SOI matrix comprises input straight wave guide、Straight wave guide output and the first resonator cavity，Described first resonator cavity is the micro-ring resonant cavity that ring-like waveguide is constituted，Described micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively，The ring-like waveguide of micro-ring resonant cavity also comprises grating FP chamber，Described grating FP chamber comprises the first grating and the second grating，Described first grating and the second grating are etched on the ring-like waveguide of described micro-ring resonant cavity，Described micro-ring resonant cavity and grating FP chamber have the Free Spectral Range differed，The two optical coupled connection，Described first optical resonator and the second optical resonator are all grating FP chamber.
Beneficial effects of the present invention: the optics biochemical sensitive chip of the present invention forms that two Free Spectral Ranges are different but the optical resonator (micro-ring resonant cavity and FP chamber) that is coupled by monocrystalline silicon layer at top, for detecting the external substance impact on optical signal.Particularly, this sensing chip one optical resonator of employing embeds another optical resonator structures and reaches coupling condition, utilize its resonance effect, make under conditions of reaching identical sensing capabilities, it is greatly reduced the volume of optics biochemical sensitive chip, is advantageously implemented miniaturization and the sensor-based system on sheet of optical biochemical sensor.With SOI material as matrix, it is possible to use ripe microelectronics CMOS processing technique so that this optics biochemical sensitive chip is prone to large-scale mass production, advantageously reduces the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip can be not only used for the detection of biomacromolecule (protein or DNA) liquid sample it can also be used to gas molecule detects.Therefore, the present invention, compared with other biochemical sensitive chip, has processing technology standardization, price is low, volume is little, it is integrated to be easy to, sensing capabilities is excellent and a series of features such as applied widely.
Accompanying drawing explanation
Fig. 1 is the structural representation of the optics biochemical sensitive chip of the embodiment of the present invention；
Fig. 2 is the viewgraph of cross-section of the optics biochemical sensitive chip of the embodiment of the present invention；
Fig. 3 is the biochemical sensitive system structure schematic diagram of the optics biochemical sensitive chip composition of the present invention.
Description of reference numerals: input straight wave guide 1, coupled zone waveguide 2, the first resonator cavity 3, grating FP chamber 4, the first grating 41, the second grating 42, straight wave guide output 5, silicon base layer 61, silicon dioxide layer 62, monocrystalline silicon layer 63,
Detailed description of the invention
With embodiment, the present invention is further described below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, the optics biochemical sensitive chip in the micro-ring resonant cavity embedded FP chamber of the present embodiment, including stacking gradually the SOI matrix that the silicon base layer 61 of bonding, silicon dioxide layer 62 and monocrystalline silicon layer 63 are constituted from bottom to top, the monocrystalline silicon layer of described SOI matrix comprises input straight wave guide 1, straight wave guide output 5 and the first resonator cavity 3.The micro-ring resonant cavity that wherein the first resonator cavity 3 is constituted for ring-like waveguide, this micro-ring resonant cavity is of coupled connections by coupled zone waveguide 2 with input straight wave guide and straight wave guide output respectively, the ring-like waveguide of micro-ring resonant cavity also comprises grating FP chamber 4, described grating FP chamber 4 comprises the first grating 41 and the second grating 42, described first grating 41 and the second grating 42 are etched on the ring-like waveguide of micro-ring resonant cavity, described micro-ring resonant cavity and grating FP chamber 4 have the Free Spectral Range differed, the two optical coupled connection, described first optical resonator and the second optical resonator are all grating FP chamber.Optical resonator (the first resonator cavity and grating FP chamber) has the effect of frequency-selecting, the Free Spectral Range differed of two above optical resonators i.e. refers to that the Free Spectral Range (spacing of adjacent resonance wavelength) corresponding to micro-ring resonant cavity and grating FP chamber differs, it is therefore intended that make to increase the sensing scope of chip by the cursor effect formed when two described optical resonators are coupled and connect and improve the certainty of measurement of chip.Owing to sensor based on cursor effect application has been the prior art of sensor technical field, the determination of the free wave-length coverage of two resonator cavity has the most just become the basic general knowledge of those of ordinary skill in the art, can be determined by limited experimentation according to actual needs, therefore be not detailed at this.Described optical coupled connection refers to realize being connected with each other two described optical resonators by technology such as Interface Matching and structure docking, and makes two optical resonators after being of coupled connections meet the requirement that optical signal freely transmits between the two.For two optical resonators coupled by this kind of mode, only those light waves simultaneously meeting micro-ring resonant condition and FP chamber condition of resonance just can be coupled in micro-ring resonant cavity and transmit and occur micro-ring resonant and transmit in FP resonator cavity and FP resonance occurs, thus increase the effective coverage of light and interaction between substances, strengthen the intensity of light and interaction between substances, under device microsize, it is achieved highly sensitive detection.Meanwhile, in the output spectrum of the cursor effect sensor of this micro-ring resonant cavity being embedded with FP chamber, the distance of adjacent two crests is micro-ring resonant cavity and the product of the respective Free Spectral Range of FP resonator cavity.
In the above-described embodiments, micro-ring resonant cavity is to make the two be connected by certain mode and form cursor effect when frequency-selecting with the purpose of the coupling in grating FP chamber.The connected mode in the grating FP chamber and micro-ring resonant cavity that can reach this kind of purpose is both contained among the grating FP chamber of the present invention and the coupled modes of micro-ring resonant cavity.
Scheme for making invention is clearer and more definite, there is provided a kind of in detail below and realize micro-ring resonant cavity and the coupled structure in grating FP chamber in above-described embodiment, it is specially, first grating and second grating in grating FP chamber are etched on micro-ring resonant cavity ring-like waveguide, and the center line connecting direction of described first grating and the second grating is consistent with this section of wave guide direction in ring-like waveguide.
Further, first grating in grating FP chamber and the grating provision width of the second grating are equal to the duct width of ring-like waveguide.Described first grating and the second optical grating construction is identical and at intervals d, described distance d determines according to optical signal wave band and grating parameter.Grating FP chamber for the selection of wavelength, utilizes the resonance effect in grating FP chamber in the scheme of the present embodiment, it is possible to realizes allowing light be fully contacted with material under the conditions of device microsize, improves sensing capabilities.Owing to those of ordinary skill in the art uses prior art can be readily determined the structural parameters of distance d and grating according to the phase condition of grating and the condition of resonance of FP resonator cavity, therefore no further details to be given herein.Concrete, first grating 41 of the present embodiment or the second grating 42 include being not more than 30 periodic units no less than 5.The cycle of described screen periods unit refers to the longitudinal length value of a periodic unit, any value of the most preferably 0.3um～0.7um.Further, any value that dutycycle is 30%～80% of the screen periods unit in the present embodiment, dutycycle here refers to constitute in screen periods unit the width of the groove that is etched in the present embodiment and accounts for the ratio of whole screen periods unit longitudinal length.Be etched in screen periods unit the degree of depth is monocrystalline silicon layer thickness 50%～the 100% of groove.It is 1:1 that the lateral length of screen periods unit accounts for the ratio of rectangular base width.Wherein, the direction such as laterally and longitudinally of the screen periods unit related to is described as the common knowledge of those of ordinary skill in the art, is the clearly form of presentation of this area acquiescence, uses it for the parameter of technical scheme in scheme of the invention and limits and be naturally also clearly.
Biochemical sensor is mainly used in biomacromolecule such as DNA or protein detection etc. and military upper toxic gas or the detection of virus.Below in conjunction with concrete application, embodiments of the invention are described in further detail:
nullIt is applied to detect whether unknown sample contains certain it is desirable that containing which material in the material that detects or detection unknown sample，This requires that the selectivity that different material is had by sensor is different，Show as the specificity sensing of sensor，Common practice is the outer surface one layer of biological sensitive materials of coating at sensor，When certain have specific biomacromolecule enter in sensor fluid passage with fluid sample and flow through sensing chip time，This biomacromolecule will be with the sensitive material generation compatible reaction of censorchip surface，The surface characteristic making sensing chip changes，The effective refractive index causing sensor changes，And then the resonance wavelength of sensor is also drifted about，Processed by data and demonstrate this change，Can be inferred that whether sample to be tested contain we want in the test substance of detection or sample containing those materials certain；
It is applied in known sample to be tested containing certain material, want now that it is how many for measuring the concentration of this material in sample, in this case, first we configure a standard solution as reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight meeting resonance wavelength is entered from the port input of the input straight wave guide of top and enters micro-ring resonant cavity, from the resonance effect of micro-ring resonant cavity, when the integral multiple that optical path difference is wavelength produced after light wave was resonance intracavity round trip one week, light wave can interfere generation resonance enhancement effect with the light wave being newly coupled into micro-ring resonant cavity, light can shake in resonator cavity back and forth, thus add light and the length of interaction between substances and enhance the intensity of light and interaction between substances.Two forms with different Free Spectral Range resonator cavity cascades that we use, the Free Spectral Range of whole system can become very big, be the least common multiple of the Free Spectral Range of two resonator cavitys, thus we can realize detecting on a large scale.The intensity size of photodetector detection output optical signal, obtain corresponding resonance wavelength simultaneously, then the upper epidermis of a certain amount of solution flows through sensor part to be measured is allowed, owing to the concentration of solution there occurs change, the effective refractive index change of sensing chip, and then the resonance wavelength of sensor is also drifted about, by measure output waveguide port optical signal and in addition data process and can obtain the spectrogram of output optical signal, and then the position of the resonance peak after being drifted about and corresponding resonance wavelength, relative size according to resonance wavelength drift value, we can determine whether the concentration of certain material in analysans, thus realize sensor function as scheduled.And the coupled modes that a resonator cavity embeds another resonator cavity used, the further miniaturization for device provides broader space.
Fig. 3 show the optics biochemical sensitive system structure schematic diagram of optics biochemical sensitive chip (being illustrated as photon sensor chip) based on embodiments of the invention, part is controlled including sensor chip (photon sensor chip), photodetector, laser instrument, temperature controller and computer, the most also include controlling the Micropump of fluid to be measured input and injecting valve, analysans enters sensing chip by injecting valve, is collected as waste liquid after flowing through sensing chip.Below by by the work process of this sensor-based system is described in detail, so that the principle of the optics biochemical sensitive chip in the micro-ring resonant cavity of the present invention embedded FP chamber and effect can be better understood: (analyze) during the work of this sensor-based system in conjunction with the embodiments, first flashlight emits from laser instrument, enter in sensing chip by photo-coupler, in order to avoid the temperature impact on the performance of sensor, we are mounted with temperature controller in the slit optical waveguide of sensor, are used for sensor heating or refrigeration (monitoring temperature).When flashlight transmits in the sensor, the light meeting raster phase condition is nearly all reflected back, but the grating that design here is weak reflecting grating, the light only part i.e. meeting raster phase condition is reflected back, another part still can be with transmissive and enter in the first optical resonator (micro-ring resonant cavity), enter into the part in the first optical resonator to meet the light of raster phase condition and will be continued to reflect back by the second optical resonator (grating FP chamber), the light of optical resonator condition of resonance will be met with the part again entered through the first optical resonator by the light of the second optical resonance cavity reflection to interfere, in optical resonator, incident illumination can interfere and shake with reflection light, thus form a series of resonance peak.These can enter into the second optical resonator subsequently from the resonance signal of the first optical resonator outgoing, Analysis on action mechanism is ibid, Free Spectral Range difference due to the resonance peak that two resonator cavitys are formed, so the resonance signal of the first optical resonator outgoing will be modulated by the second optical resonator, thus at senser element output port by the widest for a kind of for output Free Spectral Range, that quality factor is the highest resonance curve.When analysans sample is injected into microfluidic channel by Micropump, and when reaching the top covering of sensor chip, sample can make sensor surrounding change, the effective refractive index causing sensor changes, and then the resonance peak of sensor output mouth can be drifted about, we are by measuring this change at the photodetector of sensor output mouth, and deliver to computer processes by the data of distribution of light intensity, the result of the calculating database information that each material forms with computer is compared, we can draw the relevant information of measured object, thus realize sensing function.
The foregoing is only the detailed description of the invention of the present invention, it will be appreciated by those skilled in the art that in the technical scope that disclosed herein, the present invention can be carried out various amendment, replace and change.Therefore the present invention should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (7)
1. the optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber, including stack gradually from bottom to top bonding silicon base layer,
The SOI matrix that silicon dioxide layer and monocrystalline silicon layer are constituted, it is characterised in that the monocrystalline silicon layer of described SOI matrix comprises input
Straight wave guide, straight wave guide output and the first resonator cavity, described first resonator cavity is the micro-ring resonant cavity that ring-like waveguide is constituted, described
Micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively, also comprises on the ring-like waveguide of micro-ring resonant cavity
Grating FP chamber, described grating FP chamber comprises the first grating and the second grating, and described first grating and the second grating are etched in
On the ring-like waveguide of described micro-ring resonant cavity, described micro-ring resonant cavity and grating FP chamber have the Free Spectral Range differed,
The two optical coupled connection, described first optical resonator and the second optical resonator are all grating FP chamber；
Described first grating or the second grating include being not more than 30 periodic units, screen periods unit horizontal no less than 5
It is 1:1 that length accounts for the ratio of rectangle SOI matrix width.
Optics biochemical sensitive chip the most according to claim 1, it is characterised in that first grating in grating FP chamber with
Second grating is etched on the ring-like waveguide of micro-ring resonant cavity, and the center line connecting direction of the first grating and the second grating with
In ring-like waveguide, this section of wave guide direction is consistent.
Optics biochemical sensitive chip the most according to claim 1, it is characterised in that first grating in grating FP chamber with
The grating provision width of the second grating is equal to the duct width of ring-like waveguide.
4. according to the optics biochemical sensitive chip described in Claims 2 or 3, it is characterised in that the of described grating FP chamber
One grating and the second optical grating construction are identical.
Optics biochemical sensitive chip the most according to claim 1, it is characterised in that the cycle of described screen periods unit
Any value for 0.3um～0.7um.
Optics biochemical sensitive chip the most according to claim 5, it is characterised in that the duty of described screen periods unit
Than any value being 30%～80%.
7. according to the optics biochemical sensitive chip described in claim 5 or 6, it is characterised in that described screen periods unit quilt
The degree of depth of etching groove is the 50%～100% of monocrystalline silicon layer thickness.
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| CN103955247B (en) * | 2014-04-24 | 2015-12-02 | 电子科技大学 | A kind of device of stable micro-ring resonator spectrum |
| CN104570219B (en) * | 2015-01-05 | 2016-10-19 | 浙江大学宁波理工学院 | A kind of integrated optical sensor based on period waveguide microcavity resonance interference effect |
| CN104865639B (en) * | 2015-05-06 | 2017-10-31 | 东南大学 | Three-dimensionally integrated smooth work(based on tunable optical grid-type micro-loop point/interleaver |
| CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
| CN105044031B (en) * | 2015-08-31 | 2017-07-28 | 北京市煤炭矿用机电设备技术开发有限公司 | The test device and method of methane concentration are tested using fiber waveguide micro-ring resonator |
| CN106706564A (en) * | 2017-01-19 | 2017-05-24 | 河南师范大学 | Composite waveguide grating-based optical biosensor |
| CN107389611A (en) * | 2017-06-23 | 2017-11-24 | 哈尔滨工业大学深圳研究生院 | A kind of inexpensive biochemical sensor based on narrow linewidth microcavity and wide frequency light source |
| CN109596570A (en) * | 2018-10-24 | 2019-04-09 | 昆明理工大学 | A kind of biochemical sensitive system based on Si-based photodetectors |
| CN111221075B (en) * | 2018-11-26 | 2022-04-12 | 上海新微技术研发中心有限公司 | Optical device for generating Kerr frequency comb |
| CN113686367B (en) * | 2021-03-17 | 2023-12-29 | 广东工业大学 | Sensing structure based on optical fiber coupling induction transparency, manufacturing process and sensing device |
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