CN103411924A - Double-microring resonator optical biochemical sensing chip based on vernier effect - Google Patents
Double-microring resonator optical biochemical sensing chip based on vernier effect Download PDFInfo
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Abstract
The invention provides a double-microring resonator optical biochemical sensing chip based on the vernier effect and aims to solve the detection problem of some biochemistry matters. The double-microring resonator optical biochemical sensing chip mainly comprises an input straight waveguide, an output straight waveguide and two microring resonators, wherein the first microring resonator comprises an annular waveguide and is coupled with the input straight waveguide and the output straight waveguide; the second microring resonator is positioned on the inner side of the annular waveguide of the first microring resonator and has a free spectral range different from that of the first microring resonator, and the two microring resonators are connected in an optical coupling manner. Through the above scheme adopted by the optical biochemical sensing chip, the second optical resonator is positioned on the inner side of the first optical resonator and connected with the first optical resonator in a lateral coupling manner to form the vernier effect and detect the influence on an optical signal from external substances. Under the condition of meeting the same sensing performance, the size of the optical biochemical sensing chip is greatly reduced, and miniaturization of the optical biochemical sensor and the on-chip sensing system are favorably realized.
Description
Technical field
The present invention relates to the detection technique to the specific chemistry such as gas molecule or biomolecule or biological substance, be specifically related to the optical sensing field, particularly based on two micro-ring resonant cavity optics biochemical sensitive chips of cursor effect.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is be used to measuring specific chemistry or biological substance.These chemistry or biological substance are significant in environmental monitoring, diseases monitoring and medicament research and development owing to measuring, so the research of biochemical sensor has been seemed to extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and the large class of unmarked type optics biochemical sensor two, as can be known by relevant document, although fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but have that equipment is huge, complicated operation and the shortcoming such as spended time is long, and special messenger's operation that usually need to have certain professional technique, universal cost is higher, simultaneously, the fluorescence molecule for mark also likely affects the detection of sample.Comparatively speaking, the size of unmarked type optics biochemical sensor is less, and cost is lower, and application process is also more convenient, and in measuring process, no longer introduces new interference, and result is also more reliable.
Based on SOI(Silicon-On-Insulator, the silicon on dielectric substrate) optics biochemical sensor is exactly a kind of unmarked type optics biochemical sensor, simultaneously the also study hotspot of this area just.From the existing biochemical sensor of optics based on SOI, mostly adopted evanescent wave (disappearance ripple) detection principle, evanescent wave refers to due to total reflection a kind of electromagnetic wave produced on the interphase of two kinds of different mediums, its amplitude is the exponential form decay with the increase with the perpendicular degree of depth of interphase, and the evanescent wave by detecting described optics biochemical sensor optical waveguide is to survey the sample biochemical.Its principle is that biochemical in sample to be tested can cause the change (showing as the variation of the effective refractive index of optics biochemical sensor) of light wave transmissions character in the optics biochemical sensor, also is about to make the biochemical concentration signal in sample to be converted to change in optical signal.At present for the planar waveguiding structure of sensing, the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration are arranged.Wherein, for the optics biochemical sensor based on micro-ring resonant cavity configuration (as FP chamber, ring cavity etc.), the introducing of resonance effect can make light signal constantly resonance and amplification in resonator cavity, therefore be equivalent to the increase that the optics biochemical sensor is surveyed length, can cause that more the change in optical signal such as phase place (or intensity) is to detectable value, and then realization reaches sensing capabilities preferably on the compact sized optical biochemical sensor, undersized optics biochemical sensor also is convenient to the miniaturization and microminiaturization of optics biochemical sensor system in addition, will effectively reduce system cost.
In addition, by people, proposed gradually in recent years based on the optics biochemical sensor of cursor effect, this sensor is to utilize two sensing subsystems with different Free Spectral Ranges, forms a new sensor-based system.The principle of work of this new sensor-based system is: due to Free Spectral Range (FSR) difference of two subsystem, therefore, the Free Spectral Range of whole sensor-based system should be the lowest common multiple of the Free Spectral Range of two subsystems.Therefore, this sensor has very large Free Spectral Range and very large measurement range.
Existing, to gas molecule or biomolecule etc. in the detection technique field of specific chemistry or biological substance, will almost not have based on the advantage of the Miniaturizable of the SOC (system on a chip) of SOI with based on the example that the advantages such as the measuring precision of cursor effect combine.
Summary of the invention
The objective of the invention is in order to solve the detection problem of some biochemical, on the basis of the biochemical sensor based on optical detection of main flow, proposed the two micro-ring resonant cavity optics biochemical sensitive chips based on cursor effect in the prior art.
To achieve these goals, technical scheme of the present invention is: based on two micro-ring resonant cavity optics biochemical sensitive chips of cursor effect, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises the input straight wave guide, straight wave guide output, the first micro-ring resonant cavity and the second micro-ring resonant cavity, wherein, the first micro-ring resonant cavity comprises the ring-type waveguide, described the first micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively, the second micro-ring resonant cavity and the first micro-ring resonant cavity are positioned at same plane, and be positioned at the ring-type waveguide inboard of the first micro-ring resonant cavity, with the first micro-ring resonant cavity, be of coupled connections, described the first micro-ring resonant cavity has not identical Free Spectral Range with the second micro-ring resonant cavity, the two optical coupled connects.
Further, the ring-type waveguide of the first micro-ring resonant cavity comprises that two sections isometric and straight wave guide that be arranged in parallel is equal with two sections radiuses and the relative semicircular waveguide of opening, and four sections waveguides join end to end and form the first micro-ring resonant cavity in same plane.
Further, input straight wave guide and straight wave guide output is coupled with the first micro-ring resonant cavity at two sections straight wave guide places of the first micro-ring resonant cavity respectively.
Further, in the waveguide-coupled district of input straight wave guide and straight wave guide output and the coupling of the first micro-ring resonant cavity, input or output straight wave guide length and be no more than 5um.
Beneficial effect of the present invention: optics biochemical sensitive chip of the present invention forms the different but optical resonator (two micro-ring resonant cavities) that is coupled of two Free Spectral Ranges by the monocrystalline silicon layer at top, for detection of the impact of external substance on light signal.Especially, with the second optical resonator, be located in the first optical resonator inboard by the side-coupled mode formation cursor effect that is connected, for detection of the impact of external substance on light signal.Make reaching under the condition of identical sensing capabilities, greatly reduce the volume of optics biochemical sensitive chip, be conducive to realize sensor-based system on the microminiaturization of optics biochemical sensor and sheet.The SOI material of take is matrix, can utilize ripe microelectronics CMOS processing technology, makes this optics biochemical sensitive chip be easy to large-scale mass production, is conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be used for biomacromolecule (protein or DNA) liquid sample to be surveyed, and also can be used for gas molecule and detects.Therefore, the present invention compares with other biochemical sensitive chip, has the manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of characteristics such as applied widely.
The accompanying drawing explanation
Fig. 1 is the structural representation of the optics biochemical sensitive chip of the embodiment of the present invention;
Fig. 2 is the viewgraph of cross-section of the optics biochemical sensitive chip of the embodiment of the present invention;
Fig. 3 is the biochemical sensitive system architecture schematic diagram that optics biochemical sensitive chip of the present invention forms.
Description of reference numerals: input straight wave guide 11(12), straight wave guide output 13(14), coupled zone straight wave guide 15(16), waveguide-coupled district 21(22), the first micro-ring resonant cavity 3, the second micro-ring resonant cavities 4, waveguide-coupled district 5, silicon base layer 61, silicon dioxide layer 62, monocrystalline silicon layer 63.
Embodiment
Below in conjunction with drawings and Examples, the present invention is further described.
As depicted in figs. 1 and 2, two micro-ring resonant cavity optics biochemical sensitive chips based on cursor effect of the present embodiment, comprise silica-based 61 layers that stack gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer 62 and monocrystalline silicon layer 63 form, the monocrystalline silicon layer 63 of described SOI matrix comprises input straight wave guide 11(12), straight wave guide output 13(14), the first micro-ring resonant cavity 3 and the second micro-ring resonant cavity 4, wherein, the first micro-ring resonant cavity 3 comprises the ring-type waveguide, described the first micro-ring resonant cavity 3 respectively with input straight wave guide 11(12) and straight wave guide output 13(14) be of coupled connections, the second micro-ring resonant cavity 4 and the first micro-ring resonant cavity 3 are positioned at same plane, it is same monocrystalline silicon layer 63, and be positioned at the ring-type waveguide inboard of the first micro-ring resonant cavity 3, with the first micro-ring resonant cavity 3, be of coupled connections, described the first micro-ring resonant cavity 3 is different from the Free Spectral Range of the second micro-ring resonant cavity 4.Especially, the ring-type waveguide of the first micro-ring resonant cavity comprises that two sections isometric and straight wave guide that be arranged in parallel is equal with two sections radiuses and the relative semicircular waveguide of opening, and four sections waveguides endings are connected to form the first micro-ring resonant cavity 3 of track type.Preferably, input straight wave guide 11(12) and straight wave guide output 13(14) respectively two sections straight wave guide places and the first micro-ring resonant cavity at the first micro-ring resonant cavity be coupled.The waveguide-coupled district 21(22 that input straight wave guide and straight wave guide output and the first micro-ring resonant cavity 3 are coupled) length in, coupled zone straight wave guide 15(16) is no more than 5um.The effect that has frequency-selecting due to micro-ring resonant cavity, the not identical Free Spectral Range of the described micro-ring resonant cavity of embodiment refers to that namely the first micro-ring resonant cavity 3 is not identical with the corresponding Free Spectral Range of the second micro-ring resonant cavity 4 (spacing of adjacent resonance wavelength), and purpose is to make while connecting, can increase by the cursor effect formed the measuring accuracy of sensing scope and the raising chip of chip when described two micro-ring resonant cavities are coupled.Only have those light waves that meet simultaneously two micro-ring resonant conditions just can be coupled into transmission and generation micro-ring resonant transmission and generation micro-ring resonant in the second micro-ring resonant cavity in the first micro-ring resonant cavity, thereby increase the effective coverage of light and interaction between substances, strengthen the intensity of light and interaction between substances, under the device microsize, realize highly sensitive detection; And be impossible enter into micro-ring resonant cavity for those light waves that do not meet first micro-ring resonant condition; For those light waves that meet first micro-ring resonant condition, still do not meet the light wave of second micro-ring resonant condition, can only in first micro-ring, resonance occur, and export by coupling.Therefore the output spectrum structure at whole sensing chip is: meet simultaneously the light wave position of two micro-ring resonant conditions at those, the spectral line of output is very sharp-pointed, and very large of the spacing between adjacent such spectral line, extinction ratio is very high, also be the Free Spectral Range (Free Spectral Range of whole sensing chip is the lowest common multiple of the Free Spectral Range of two micro-ring resonant cavities) of whole sensing chip, simultaneously between adjacent sharp-pointed like this output spectral line, also there is the wider harmonic peak of some output spectral lines, this is but that those meet first micro-ring resonant condition do not meet the corresponding crest of light wave of second micro-ring resonant condition, the peak-to-peak spacing of adjacent like this ripple is the Free Spectral Range size of first micro-ring resonant cavity.
Because the sensor application based on cursor effect has been the prior art of sensor technical field, definite basic general knowledge that has also just become those of ordinary skill in the art of the free wavelength coverage of two resonator cavity, can by limited experiment, determine according to actual needs, therefore do not do detailed description at this.Described optical coupled connection refers to by technology such as Interface Matching and structure docking and realizes described two micro-ring resonant cavities are interconnected, and two micro-ring resonant cavities after making to be of coupled connections meet light signal in the two requirement of freely transmitting.
In above-mentioned specific embodiment, the first micro-ring resonant cavity 3 and the equal etching of the second micro-ring resonant cavity 4 are on the optical waveguide of monocrystalline silicon layer, described the first micro-ring resonant cavity 3 is that racetrack structure and the second micro-ring resonant cavity 4 are loop configuration, d at intervals between them, by side-coupled, be connected, described definite according to light signal wave band and micro-loop coupling parameter apart from d.Two micro-ring resonant cavities for the selection of wavelength, utilize the resonance effect in optical micro-ring resonant chamber in the scheme of the present embodiment, can under device microsize condition, realize allowing light fully contact with material, improve sensing capabilities.Because using prior art, those of ordinary skill in the art can determine relatively easily the structural parameters apart from d and micro-ring according to the micro-ring resonant condition, therefore no further details to be given herein.Concrete, the radius of first micro-ring resonant cavity of the present embodiment is the radius that the radius of 8-10um(the first micro-ring resonant cavity refers to the waveguide of semicircular area), coupled zone waveguide length 15,16 is between 0-5um, the radius of the second micro-ring resonant cavity is 5-6um, the width of all optical waveguides is 300-600nm, and thickness is 200-300nm.Wherein, the characteristic parameter of the micro-ring resonant cavity related to etc. is described as those of ordinary skill in the art's common practise, is the clearly form of presentation of this area acquiescence, and the parameter restriction nature of using it for technical scheme in scheme of the invention is also clearly.
Biochemical sensor is mainly used in the detection of biomacromolecule such as DNA or protein detection etc. and military upper toxic gas or virus.Below in conjunction with concrete application, embodiments of the invention are described in further detail:
Application with detect in unknown sample whether contain that we wish the material detected or detect in unknown sample to contain which material certain, the selectivity difference that this requires sensor to have different material, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, when certain has specific biomacromolecule when with fluid sample, entering into sensor fluid passage and flowing through sensing chip, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then make the resonance wavelength of sensor also drift about, by the data processes and displays, go out this variation, can infer in sample to be tested whether contain certain we want in the test substance of surveying or sample to contain those materials,
Be applied in known sample to be tested contain certain material, want now to measure the concentration of this material in sample and be how many, in this case, at first we configure a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that meets resonance wavelength is inputted into the micro-ring resonant cavity of going forward side by side from the port of the slit optical waveguide of top, resonance effect by micro-ring resonant cavity is as can be known, when light wave, came and went in resonator cavity when a week, the rear optical path difference produced was the integral multiple of wavelength, light wave can mutually be interfered and produce the resonance enhancement effect with the light wave that newly is coupled into micro-ring resonant cavity, light can shake back and forth in resonator cavity, thereby the intensity that has increased the length of light and interaction between substances and strengthened light and interaction between substances, two forms with different Free Spectral Range resonator cavity cascades that we adopt, it is very large that the Free Spectral Range of whole system can become, it is the lowest common multiple of the Free Spectral Range of two resonator cavitys, thereby we can realize large-scale detection.Photodetector is surveyed the intensity size of output optical signal, obtain simultaneously corresponding resonance wavelength, then allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element, because variation has occurred in the concentration of solution, the effective refractive index of sensing chip changes, and then make the resonance wavelength of sensor also drift about, light signal by measuring the output waveguide port and in addition data process the spectrogram that can obtain output optical signal, and then the position of the harmonic peak after being drifted about and corresponding resonance wavelength, relative size according to the resonance wavelength drift value, we can determine the concentration of certain material in analysans, thereby realize sensor function as scheduled.
Figure 3 shows that the optics biochemical sensitive system architecture schematic diagram of the two micro-ring resonant cavity optics biochemical sensitive chips (being illustrated as the photon sensor chip) based on cursor effect of the embodiment of the present invention, comprise sensor chip (photon sensor chip), photodetector, laser instrument, temperature controller and computer control part, also comprise simultaneously the Micropump of controlling the fluid to be measured input and inject valve, analysans enters sensing chip by injecting valve, as waste liquid, is collected after the sensing chip of flowing through.Below will describe in detail by the course of work to this sensor-based system, so that principle and the interaction energy of micro-ring resonant cavity of the present invention (grating FP chamber) biochemical sensitive chip are better understood: during this sensor-based system work (analyzing in conjunction with the embodiments), at first flashlight is from emitting laser instrument, by photo-coupler, enter into sensing chip, for fear of the impact of temperature on the performance of sensor, we have installed temperature controller in the slit optical waveguide of sensor, be used for to sensor heating or refrigeration (monitoring temperature).When flashlight transmits in sensor, the light that meets the raster phase condition nearly all is reflected back, but the grating that design here is weak reflection grating, the light that namely meets the raster phase condition only has part to be reflected back, a part still can transmissive and is entered into the first micro-ring resonant cavity (grating FP chamber) in addition, the light that the part that enters into the first micro-ring resonant cavity meets the raster phase condition will be continued to reflect back by the second micro-ring resonant cavity, by the light of the second micro-ring resonant cavity reflection, will be interfered with the light that again sees through part that the first micro-ring resonant cavity enters and meet the micro-ring resonant cavity condition of resonance, incident light and reflected light can interfere and shake in micro-ring resonant cavity, thereby form a series of harmonic peak.These resonance signals from the first micro-ring resonant cavity outgoing can enter into the second micro-ring resonant cavity subsequently, Analysis on action mechanism is the same, the Free Spectral Range difference of the harmonic peak formed due to two resonator cavitys, so the resonance signal of the first micro-ring resonant cavity outgoing will be modulated by the second micro-ring resonant cavity, thereby it is very wide at the senser element output port, will to export a kind of Free Spectral Range, the tuning curve that quality factor is very high.When the analysans sample is injected into microfluidic channel by Micropump, and while reaching the top covering of sensor chip, sample can make the sensor surrounding environment change, cause the effective refractive index of sensor to change, and then make the harmonic peak of sensor output port to drift about, we measure this variation by the photodetector at the sensor output port, and the data of distribution of light intensity are delivered in computing machine and processed, the database information that each material in the result of calculating and computing machine forms is compared, we can draw the relevant information of measured object, thereby realize sensing function.
The foregoing is only the specific embodiment of the present invention, one skilled in the art will appreciate that and can carry out various modifications, replacement and change to the present invention in the disclosed technical scope of the present invention.Therefore the present invention should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (8)
1. based on two micro-ring resonant cavity optics biochemical sensitive chips of cursor effect, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises the input straight wave guide, straight wave guide output, the first micro-ring resonant cavity and the second micro-ring resonant cavity, wherein, the first micro-ring resonant cavity comprises the ring-type waveguide, described the first micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively, the second micro-ring resonant cavity and the first micro-ring resonant cavity are positioned at same plane, and be positioned at the ring-type waveguide inboard of the first micro-ring resonant cavity, with the first micro-ring resonant cavity, be of coupled connections, described the first micro-ring resonant cavity has not identical Free Spectral Range with the second micro-ring resonant cavity, the two optical coupled connects.
2. optics biochemical sensitive chip according to claim 1, it is characterized in that, the ring-type waveguide of the first micro-ring resonant cavity comprises that two sections isometric and straight wave guide that be arranged in parallel is equal with two sections radiuses and the relative semicircular waveguide of opening, and four sections waveguides join end to end and form the first micro-ring resonant cavity in same plane.
3. optics biochemical sensitive chip according to claim 2, is characterized in that, input straight wave guide and straight wave guide output are coupled with the first micro-ring resonant cavity at two sections straight wave guide places of the first micro-ring resonant cavity respectively.
4. optics biochemical sensitive chip according to claim 3, is characterized in that, in the waveguide-coupled district of input straight wave guide and straight wave guide output and the coupling of the first micro-ring resonant cavity, inputs or outputs straight wave guide length and be no more than 5um.
5. optics biochemical sensitive chip according to claim 1, is characterized in that, the radius of described the first micro-ring resonant cavity is 8-10um.
6. optics biochemical sensitive chip according to claim 5, is characterized in that, the radius of described the second micro-ring resonant cavity is 5-6um.
7. according to the described optics biochemical sensitive chip of any one claim of claim 1-6, it is characterized in that, the width of all waveguides is 300-600nm.
8. optics biochemical sensitive chip according to claim 7, is characterized in that, the thickness of all waveguides is 200-300nm.
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