CN103293127A - SOI (silicon-on-insulator)-based multi-slit optical waveguide grating FP (Fabry-Perot) cavity optical biochemical sensor chip - Google Patents
SOI (silicon-on-insulator)-based multi-slit optical waveguide grating FP (Fabry-Perot) cavity optical biochemical sensor chip Download PDFInfo
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Abstract
The invention provides an SOI (silicon-on-insulator)-based multi-slit optical waveguide grating FP (Fabry-Perot) cavity optical biochemical sensor chip. The sensor chip comprises a matrix formed by bonding a silicon-based layer, a silicon dioxide layer and a monocrystalline silicon layer from bottom to top in sequence in a stacked manner, and is characterized in that the monocrystalline silicon layer of the matrix comprises slit optical waveguide; an optical signal propagation path of the slit optical waveguide comprises a grating FP cavity; the overlooking direction of the matrix is an oblong; the slit optical waveguide comprises a plurality of slit grooves; slits are symmetrically distributed with a central axis in the length direction of the matrix as the axis; and the length of the slits is equal to the central axis of the matrix. The biochemical sensor chip has the beneficial effects that the effects of outside matters on optical signals are detected by forming the grating FP cavity at the monocrystalline silicon layer at the top, and meanwhile, the slit optical waveguide structure is introduced, so that the optical signals are detected in the slit space instead of the traditional evanescent field; and the biochemical sensor chip has the advantages that the density of optical energy in the slit space is far more than the density of the optical energy in the evanescent field, and the light-matter interaction is stronger, so that the detection sensitivity is higher and the detection difficulty is further reduced.
Description
Technical field
The present invention relates to the detection technique to specific chemistry such as gas molecule or biomolecule or biological substance, be specifically related to the light field of sensing technologies, be particularly related to a kind of based on SOI(Silicon-On-Insulator, the silicon on the dielectric substrate) slit light waveguide raster FP chamber optics biochemical sensitive chip.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is used for measuring specific chemistry or biological substance.Because it is significant in environmental monitoring, diseases monitoring and medicament research and development to measure these chemistry or biological substance, so the research of biochemical sensor has been seemed extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and unmarked type optics biochemical sensor two big classes, by relevant document as can be known, though fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but shortcoming such as have that equipment is huge, complicated operation and spended time are long, and special messenger's operation that need have certain professional technique usually, it is higher to popularize cost, simultaneously, also might influence the detection of sample for the fluorescence molecule of mark.Comparatively speaking, the size of unmarked type optics biochemical sensor is littler, and cost is lower, and application process is also more convenient, and no longer introduces new interference in measuring process, and the result is also more reliable.
Optics biochemical sensor based on SOI is exactly a kind of unmarked type optics biochemical sensor, simultaneously the also research focus of this area just.From existing optics biochemical sensor based on SOI, adopted evanescent wave (disappearance ripple) detection principle mostly, evanescent wave refers to because total reflection and a kind of electromagnetic wave of producing at the interphase of two kinds of different mediums, be the disappearance ripple again, its amplitude is the exponential form decay with the increase with the perpendicular degree of depth of interphase, and the evanescent wave of the optical waveguide by detecting described optics biochemical sensor is to survey the sample biochemical molecule.Its principle is that biochemical molecule in the sample to be tested can cause the change (evanscent field that shows as the optics biochemical sensor changes) of light wave transmissions character in the optics biochemical sensor, and also the biochemical molecule concentration signal that is about in the sample is converted to change in optical signal.The optical waveguide structure of optics biochemical sensor has structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration at present.To based on optical resonator structures (as the FP chamber, ring cavity etc.) optics biochemical sensor, the introducing of resonance effect can make light signal constantly resonance and amplification in optical resonator, therefore be equivalent to the increase that the optics biochemical sensor is surveyed length, can cause that more phase place change in optical signal such as (or intensity) is to detectable value, and then be implemented in and reach sensing capabilities preferably on the compact sized optical biochemical sensor, undersized optics biochemical sensor also is convenient to the miniaturization and microminiaturization of optics biochemical sensor system in addition, will reduce system cost effectively.
Current, based on the FP resonance effect, the optics biochemical sensor of grating FP cavity resonator structure can be done very smallly, and shows good sensing capabilities, but the energy density that is distributed in the evanescent wave around the optics biochemical sensor optical waveguide is lower, so still there is the lower defective of sensitivity.
Summary of the invention
The present invention is in order to solve the problem that some biochemical is surveyed, in the prior art on the basis of the optics biochemical sensor of main flow, utilize existing because its evanescent wave that is detected of evanescent wave detection principle to be distributed in around the device optical waveguide and have that energy density is low to cause surveying the big defective of difficulty for further solving it, proposed a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip technology based on SOI.
To achieve these goals, technical scheme of the present invention is: based on many slits light waveguide raster FP chamber optics biochemical sensitive chip of SOI, comprise the silicon base layer that stacks gradually bonding from bottom to top, the matrix that silicon dioxide layer and monocrystalline silicon layer constitute, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the lightray propagation path of described slit optical waveguide, it is rectangle that matrix is overlooked direction, the slit optical waveguide comprises many slit grooves, described slit is that rotational symmetry distributes with the central axis of matrix length direction, and length equates with the described central axis of matrix.
Further, above-mentioned slit optical waveguide comprises three slit grooves, and wherein a slit groove is positioned on the central axis of matrix length direction, and two other slit groove is positioned at the monosymmetric position of central axis of matrix length direction.
Further, it is rectangle that described matrix is overlooked direction, and described slit optical waveguide is that rotational symmetry distributes with the center line of the length direction of matrix, and keeps direction consistent with the matrix length direction, and wherein the slit well width is 80nm～120nm.
The first above-mentioned grating or second grating comprise and are no less than 3 no more than 25 periodic units.
The cycle of above-mentioned grating periodic unit is arbitrary value of 0.3 μ m～0.6 μ m.
The dutycycle of above-mentioned grating periodic unit is arbitrary value of 40%～70%.
The ratio that the longitudinal length of above-mentioned grating periodic unit (with corresponding as the lateral length of periodic unit length) accounts for above-mentioned matrix width is arbitrary value of 70%～100%.
Beneficial effect of the present invention: optics biochemical sensitive chip of the present invention forms grating FP chamber by the monocrystalline silicon layer at the top and detects external substance to the influence of light signal, introduce the slit optical waveguide structure simultaneously, because narrow slit wave-guide can be limited in slit areas greatly with light, thereby effectively strengthened the interaction between light and the material, make the detection of light signal turn to the slit space from traditional evanscent field, it is advantageous that the density of the optical energy density luminous energy in the evanscent field in the slit space, light and matter interaction are stronger, make detection sensitivity higher, detection difficulty further reduces.In addition, this optics biochemical sensitive chip adopts the FP cavity resonator structure, utilizes the resonance effect of optical resonator, makes and can reach under the condition of identical sensing capabilities, reduce the volume of optics biochemical sensitive chip greatly, be conducive to realize sensor-based system on the microminiaturization of biochemical sensor and the sheet.Be matrix with the SOI material, can utilize ripe microelectronics CMOS processing technology, make this optics biochemical sensitive chip be easy to large-scale mass production, be conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be used for biomacromolecule (protein or DNA) liquid sample to be surveyed, and also can be used for gas molecule and detect.Therefore, the present invention compares with other biochemical sensitive chip, has the manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of characteristics such as applied widely.
Description of drawings
Fig. 1-1 is a kind of perspective view of optics biochemical sensitive chip;
Fig. 1-2 is the vertical view of the optics biochemical sensitive chip shown in Fig. 1-1;
Fig. 2-1 is the structural representation of the optics biochemical sensitive chip of embodiments of the invention;
Fig. 2-2 is the viewgraph of cross-section of the optics biochemical sensitive chip of embodiments of the invention;
Fig. 3-1 is that NaCl solution is at the response curve of sensor shown in variable concentrations figure below 1-1 to the different wave length light wave;
Fig. 3-2 is the linear fit of sensor resonance wavelength shown in different N aCl solution refractive index figure below 1-1;
Fig. 4 is the biochemical sensitive system architecture synoptic diagram that optics biochemical sensitive chip of the present invention constitutes.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
For the ease of understanding, below in conjunction with a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip structure identical with the present invention program's principle principle of the present invention is described in detail.
A kind of slit light waveguide raster FP chamber optics biochemical sensitive chip as Figure 1-1, the matrix that comprises the silicon base layer 11, silicon dioxide layer 12 and monocrystalline silicon layer 13 formations that stack gradually bonding from bottom to top, the monocrystalline silicon layer 13 of described matrix comprises slit optical waveguide 15, comprise grating FP chamber 14 on the propagation path of light AA` of slit optical waveguide 15, be used for making the optical resonance of propagating along the slit optical waveguide.For the ease of the optical transmission performance of technology making and assurance slit optical waveguide, the slit of above-mentioned slit optical waveguide is straight slit; This slit optical waveguide is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface; Its lithographic method for example, use electron beam exposure and by the RIE(reactive ion etching) etching technics etching on the single crystal silicon material of SOI obtains; In addition, the slit groove depth of described slit optical waveguide need meet some requirements, and this condition is specially that the slit groove depth is monocrystalline silicon layer thickness in the slit optical waveguide.Slit groove the purpose here is flashlight to be concentrated in the slit propagate, make the energy density of light signal bigger, be convenient to analyzing and testing, another purpose is to improve the performances such as sensitivity of sensing chip by the contact area that increases measured matter and sensor simultaneously.Shown in Fig. 1-2, it is rectangle that matrix is overlooked direction, and slit optical waveguide 15 comprises a slit groove, and described slit groove is positioned on the central axis of matrix length direction, and wherein the slit well width is arbitrary value of 80nm～120nm.In this programme, the slit groove is positioned at the central axis place of matrix length direction, and the slit well width is 100nm.Slit groove in the slit optical waveguide is the travel path of light signal, on this path, also comprise grating FP chamber, grating FP chamber comprises first grating 141 and second grating 142 in this programme, first grating 141 and second grating, 142 equal etchings are on the slit optical waveguide, described first grating and at intervals d identical with second optical grating construction, and form grating FP resonator cavity in the slit optical waveguide, described parameter apart from d and grating is determined jointly by the phase condition of grating and the condition of resonance of FP resonator cavity.Grating FP resonator cavity is used for the selection of wavelength in scheme, utilize the resonance effect in grating FP chamber, can allow the light that satisfies condition of resonance in resonator cavity, shake back and forth, guarantee under device microsize condition, to realize allowing light fully contact with material, improve sensing capabilities.Because those of ordinary skill in the art uses prior art can more easily determine apart from d and grating parameter according to light source frequency range and the target component used, so be not described in detail at this.Concrete, first grating 141 or second grating 142 comprise and are no less than 3 no more than 25 grating periodic units.The cycle of described grating periodic unit refers to the length value of one-period unit, is arbitrary value of 0.3 μ m～0.6 μ m in this programme.
Here, the dutycycle of grating periodic unit is arbitrary value of 40%～70%, and the dutycycle here refers to constitute be etched in the grating periodic unit width of groove and accounts for the ratio of whole grating periodic unit lateral length.The ratio that the longitudinal length of grating periodic unit accounts for the rectangular base width is arbitrary value of 70%～100%, and the degree of depth of the groove that is etched in the grating periodic unit is 70%～100% of monocrystalline silicon layer thickness.Because the slit optical waveguide can be limited in slit areas greatly with the light in the FP resonator cavity, the FP resonator cavity can make light concussion back and forth in resonator cavity simultaneously, increase intensity and the effective length of light and matter interaction, thereby improve the interaction between the flowing material in light and the slit areas, make the sensitivity of device improve.
Be depicted as specific embodiments of the invention as Fig. 2-1 and Fig. 2-2, many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of present embodiment comprises the matrix that the silicon base layer 21 that stacks gradually bonding from bottom to top, silicon dioxide layer 22 and monocrystalline silicon layer 23 constitute.With comparing shown in Fig. 1-1, its difference is, in an embodiment of the present invention, comprises many slits optical waveguide 25 that many slit grooves constitute on the monocrystalline silicon layer 23, described slit is that rotational symmetry distributes with the central axis of matrix length direction, and length equates with the described central axis of matrix.Wherein, the situation of three slit grooves shown in Fig. 2-1 is a concrete preferred version of present embodiment, here only be for the accompanying drawing statement just, should not be understood that the restriction to the present invention program.
Described slit optical waveguide 25 is that axis of symmetry is symmetrically distributed on the monocrystalline silicon layer with the central axis of the length direction of rectangular base, and concrete, the first slit groove is positioned at the axis of symmetry place, and second and third slit groove is symmetrically distributed in the both sides of the first slit groove.In the structure of many slits optical waveguide 25 of present embodiment, light signal forms path BB` accordingly in each slit groove, and namely light signal has the travel path number corresponding with slit optical waveguide slit groove number.Corresponding therewith, in the travel path formation grating FP chamber 24 of each light signal.The scheme of present embodiment is because slit groove number is more with respect to the sensing chip shown in Fig. 1-1, so the useful area for detection of change in optical signal increases in the present embodiment, corresponding detected light signal strength is also corresponding higher.Especially, in the present embodiment, each slit groove parameter unanimity of many slits optical waveguide is and has run through whole substrate, and namely the length of slit groove is identical with the length of rectangular base.
Need to prove: in technical scheme of the present invention and all embodiment, related grating FP resonator cavity is the different statements of same parts with grating FP chamber; The common practise that laterally is described as those of ordinary skill in the art with direction such as vertical of the grating periodic unit that relates to is the clearly form of presentation of this area acquiescence, and it also is clearly that the parameter of using it for technical scheme in the invention scheme limits nature.
Biochemical sensor is mainly used in biomacromolecule such as DNA or protein detection etc. and military detection of going up toxic gas or virus.A kind of concrete application below in conjunction with present embodiment is described in further detail technical scheme of the present invention:
Be applied to detect and whether contain in the unknown sample that we wish detected material or detect in the unknown sample to contain which material certain, the selectivity difference that this requires sensor that different material is had, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, when certain has specific biomacromolecule when entering into sensor fluid passage and flowing through sensing chip with fluid sample, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then make the resonance wavelength of sensor also drift about, go out this variation by the data processes and displays, can infer whether contain in the sample to be tested that we want to contain those materials in the test substance surveyed or the sample certain;
Be applied to contain in the known sample to be tested certain material, want now to measure how much concentration of this material is in the sample, in this case, we at first dispose a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that satisfies resonance wavelength is imported into the grating FP chamber of going forward side by side from the port of the slit optical waveguide of top, by the resonance effect in FP chamber as can be known, when the optical path difference that produces when light wave comes and goes a week in resonator cavity after is the integral multiple of wavelength, light wave can be interfered generation resonance enhancement effect mutually with the light wave that newly is coupled into grating FP chamber, light can shake in resonator cavity back and forth, thereby the intensity that has increased the length of light and interaction between substances and strengthened light and interaction between substances, and, single slit groove 4 in the FP resonator cavity can be with the slit areas of light field restriction, be convenient to interact between the material of light and slit areas, thereby further improve the interaction between light and the material.Photodetector is surveyed the intensity size of output light signal, obtain corresponding resonance wavelength simultaneously, allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element then, because variation has taken place in the concentration of solution, the effective refractive index of sensing chip changes, and then make the resonance wavelength of sensor also drift about, light signal by measuring the output waveguide port and in addition data handle the spectrogram that can obtain exporting light signal, and then the position of the harmonic peak after obtaining drifting about and corresponding resonance wavelength, according to the relative size of resonance wavelength drift value, we can determine the concentration of certain material in the analysans.Thereby realize sensor function as scheduled.
Shown in Fig. 3-1 be the sensing chip shown in Fig. 1-1 to the response curve under the NaCl solution variable concentrations, be the linear fit of sensor resonance wavelength shown in the corresponding diagram 1-1 under the different N aCl solution refractive index shown in Fig. 3-2.Relation from figure is not difficult to find out, the sensing chip shown in Fig. 1-1 can be with the concentration of NaCl solution by the wavelength location of output light signal and intensity is corresponding and detect by detection system and to show.
Be understood that, according to the analysis of above effect to the sensing chip shown in Fig. 1-1 and principle in conjunction with embodiments of the invention with respect to the sensing chip advantage shown in Fig. 1-1, draw the beneficial effect of embodiments of the invention easily.
Figure 4 shows that the biochemical sensitive system architecture synoptic diagram based on optics biochemical sensitive chip of the present invention, comprise sensor chip, photodetector, laser instrument, temperature controller and computer control part, also comprise the Micropump of control fluid to be measured input simultaneously and inject valve, analysans enters sensing chip by injecting valve, is collected as waste liquid behind the sensing chip of flowing through.Below will describe in detail by the course of work to this sensor-based system, so that the principle of optics biochemical sensitive chip of the present invention and interaction energy are better understood: during this sensor-based system work, at first flashlight emits from laser instrument, enter into sensing chip by photo-coupler, for fear of the Effect on Performance of temperature to sensor, we have installed temperature controller in the slit optical waveguide of sensor, be used for to sensor heating or refrigeration (monitoring temperature).When flashlight transmits in sensor, the light that satisfies the raster phase condition nearly all is reflected back, but She Ji grating is weak reflection grating here, the light that namely satisfies the raster phase condition has only part to be reflected back, a part still can transmissive and is entered into the FP resonator cavity in addition, that part of light that satisfies the raster phase condition that enters into the FP resonator cavity will be continued to reflect back by second grating, by the light of second optical grating reflection will with see through that part of light that satisfies the raster phase condition that is entered into the FP resonator cavity by first grating again and interfere, because two gratings have formed the FP resonator cavity, so incident light and reflected light can interfere in grating FP chamber, concussion back and forth, thus a series of harmonic peak formed at transmission window.When the analysans sample is injected into microfluidic channel by Micropump, and when reaching the top covering of sensor chip, sample can make the sensor surrounding environment change, cause the effective refractive index of sensor to change, and then make the harmonic peak of sensor output port to drift about, by measuring this variation at the photodetector of sensor output port, and the data of distribution of light intensity are delivered in the computing machine handle, the database information that each material in result calculated and the computing machine is formed is compared, can draw the relevant information of measured object, thereby realize sensing function.
The above is the specific embodiment of the present invention only, one skilled in the art will appreciate that can carry out various modifications, replacement and change to the present invention in the disclosed technical scope of the present invention.Therefore the present invention should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (10)
1. based on many slits light waveguide raster FP chamber optics biochemical sensitive chip of SOI, the matrix that comprises the silicon base layer, silicon dioxide layer and the monocrystalline silicon layer formation that stack gradually bonding from bottom to top, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the lightray propagation path of described slit optical waveguide, it is rectangle that matrix is overlooked direction, the slit optical waveguide comprises many slit grooves, described slit is that rotational symmetry distributes with the central axis of matrix length direction, and length equates with the described central axis of matrix.
2. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1, it is characterized in that, described slit optical waveguide comprises three slit grooves, wherein a slit groove is positioned on the central axis of matrix length direction, and two other slit groove is positioned at the monosymmetric position of central axis of matrix length direction.
3. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1 is characterized in that the slit of described slit optical waveguide is the slit that is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface.
4. according to the described many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of each claim of claim 1 to 3, it is characterized in that the slit depth of described slit optical waveguide is monocrystalline silicon layer thickness.
5. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1 is characterized in that described slit well width is 80nm～120nm.
6. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1, it is characterized in that, described grating FP chamber comprises first grating and second grating, first grating and the equal etching of second grating are on the slit optical waveguide, described first grating and second grating are at intervals, and first grating has identical structure with second grating, and forms grating FP chamber in the slit optical waveguide.
7. according to claim 1,2,3,5 and 6 the described many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of each claim, it is characterized in that described first grating or second grating comprise and be no less than 3 no more than 25 periodic units.
8. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 7 is characterized in that the cycle of described grating periodic unit is arbitrary value of 0.3 μ m～0.6 μ m.
9. the many slits light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 8 is characterized in that the dutycycle of described grating periodic unit is arbitrary value of 40%～70%.
10. according to Claim 8 or 9 described many slits light waveguide raster FP chamber optics biochemical sensitive chips based on SOI, it is characterized in that the ratio that the longitudinal length of described grating periodic unit accounts for described matrix width is arbitrary value of 70%～100%.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360438A (en) * | 2014-11-14 | 2015-02-18 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN107764791A (en) * | 2017-10-11 | 2018-03-06 | 河南仕佳光子科技股份有限公司 | A kind of ion concentration test chip based on evanescent wave |
| CN107978648A (en) * | 2017-11-27 | 2018-05-01 | 北京协同创新研究院 | A kind of germanium detector based on Slot waveguides and preparation method thereof |
| CN110530855A (en) * | 2019-10-12 | 2019-12-03 | 重庆理工大学 | High-throughput optical waveguide biosensor sensing chip |
| CN117096038A (en) * | 2023-10-20 | 2023-11-21 | 盛合晶微半导体(江阴)有限公司 | Double-sided photoelectric interconnection packaging structure and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
| CN102282458A (en) * | 2009-03-12 | 2011-12-14 | 特拉维夫大学未来技术发展有限合伙公司 | Peled asher [il]; nathan menachem [il]; ruschin shlomo [il]; betzalel yifaat [il]; rishpon judith [il] |
| CN203324180U (en) * | 2013-05-16 | 2013-12-04 | 电子科技大学 | SOI (silicon-on-insulator)-based multi-slit optical waveguide optical biochemical sensor chip adopting grating FP (Fabry-Perot) resonators |
-
2013
- 2013-05-16 CN CN201310180709XA patent/CN103293127A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
| CN102282458A (en) * | 2009-03-12 | 2011-12-14 | 特拉维夫大学未来技术发展有限合伙公司 | Peled asher [il]; nathan menachem [il]; ruschin shlomo [il]; betzalel yifaat [il]; rishpon judith [il] |
| CN203324180U (en) * | 2013-05-16 | 2013-12-04 | 电子科技大学 | SOI (silicon-on-insulator)-based multi-slit optical waveguide optical biochemical sensor chip adopting grating FP (Fabry-Perot) resonators |
Non-Patent Citations (2)
| Title |
|---|
| CARLOS ANGULO BARRIOS: "《Optical Slot-Waveguide Based Biochemical Sensors》", 《SENSORS》, vol. 9, no. 6, 16 June 2009 (2009-06-16), pages 4751 - 4765 * |
| SHUN-HUI YANG.ETC: "《Giant birefringence in multi-slotted silicon nanophotonic waveguides》", 《OPTICS EXPRESS》, vol. 16, no. 11, 2 May 2008 (2008-05-02) * |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360438A (en) * | 2014-11-14 | 2015-02-18 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN104360438B (en) * | 2014-11-14 | 2017-02-22 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN107764791A (en) * | 2017-10-11 | 2018-03-06 | 河南仕佳光子科技股份有限公司 | A kind of ion concentration test chip based on evanescent wave |
| CN107764791B (en) * | 2017-10-11 | 2021-03-23 | 河南仕佳光子科技股份有限公司 | Ion concentration test chip based on evanescent wave |
| CN107978648A (en) * | 2017-11-27 | 2018-05-01 | 北京协同创新研究院 | A kind of germanium detector based on Slot waveguides and preparation method thereof |
| CN107978648B (en) * | 2017-11-27 | 2019-06-28 | 北京协同创新研究院 | A kind of germanium detector and preparation method thereof based on Slot waveguide |
| CN110530855A (en) * | 2019-10-12 | 2019-12-03 | 重庆理工大学 | High-throughput optical waveguide biosensor sensing chip |
| CN117096038A (en) * | 2023-10-20 | 2023-11-21 | 盛合晶微半导体(江阴)有限公司 | Double-sided photoelectric interconnection packaging structure and preparation method thereof |
| CN117096038B (en) * | 2023-10-20 | 2024-01-30 | 盛合晶微半导体(江阴)有限公司 | Double-sided photoelectric interconnection packaging structure and preparation method thereof |
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Application publication date: 20130911 |