CN203324183U - Slit optical waveguide based optical biochemical sensor chip adopting epitaxial grating FP (Fabry-Perot) resonators - Google Patents
Slit optical waveguide based optical biochemical sensor chip adopting epitaxial grating FP (Fabry-Perot) resonators Download PDFInfo
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- CN203324183U CN203324183U CN2013202680602U CN201320268060U CN203324183U CN 203324183 U CN203324183 U CN 203324183U CN 2013202680602 U CN2013202680602 U CN 2013202680602U CN 201320268060 U CN201320268060 U CN 201320268060U CN 203324183 U CN203324183 U CN 203324183U
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Abstract
The utility model provides a slit optical waveguide based optical biochemical sensor chip adopting epitaxial grating FP (Fabry-Perot) resonators. The optical biochemical sensor chip comprises a matrix formed by a silicon substrate layer, a silicon dioxide layer and a monocrystalline silicon layer which are stacked and bonded from bottom to top in sequence, and is characterized in that the monocrystalline silicon layer of the matrix comprises a slit optical waveguide; a light propagation path of the slit optical waveguide comprises grating FP resonators; the matrix is rectangular from the overlooking direction; gratings of the grating FP resonators are epitaxial, are arranged outside the rectangular matrix and are shaped like convex teeth. The optical biochemical sensor chip has the beneficial effects that by forming the grating FP resonators on the monocrystalline silicon layer at the top to detect the influences of outside substances on light signals as well as simultaneously introducing the slit optical waveguide structure, the detection location of the light signals is changed from traditional evanescent fields to a slit space; the optical biochemical sensor chip has the advantages that the density of light energy in the slit space is far greater than the density of light energy in the evanescent fields; the light-matter interaction is stronger, so that the detection sensitivity is higher and the detection difficulty is further reduced.
Description
Technical field
The utility model relates to the detection technique to the specific chemistry such as gas molecule or biomolecule or biological substance, be specifically related to the optical sensing field, be particularly related to a kind of based on SOI(Silicon-On-Insulator, the silicon on dielectric substrate) slit light waveguide raster FP chamber optics biochemical sensitive chip.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is for measuring specific chemistry or biological substance.Owing to measuring, these chemistry or biological substance are significant in environmental monitoring, diseases monitoring and medicament research and development, so the research of biochemical sensor has been seemed to extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and the large class of unmarked type optics biochemical sensor two, from relevant document, although fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but have that equipment is huge, complicated operation and the shortcoming such as spended time is long, and special messenger's operation that usually need to there is certain professional technique, universal cost is higher, simultaneously, the fluorescence molecule for mark also likely affects the detection of sample.Comparatively speaking, the size of unmarked type optics biochemical sensor is less, and cost is lower, and application process is also more convenient, and no longer introduces new interference in measuring process, and result is also more reliable.
Optics biochemical sensor based on SOI is exactly a kind of unmarked type optics biochemical sensor, simultaneously the also study hotspot of this area just.From the existing optics biochemical sensor based on SOI, mostly adopted evanescent wave (disappearance ripple) detection principle, evanescent wave refers to due to total reflection a kind of electromagnetic wave produced on the interphase of two kinds of different mediums, be again the disappearance ripple, its amplitude is the exponential form decay with the increase with the perpendicular degree of depth of interphase, and the evanescent wave of the optical waveguide by detecting described optics biochemical sensor is to survey the sample biochemical molecule.Its principle is that biochemical molecule in sample to be tested can cause the change (evanscent field that shows as the optics biochemical sensor changes) of light wave transmissions character in the optics biochemical sensor, and the biochemical molecule concentration signal also be about in sample is converted to change in optical signal.The optical waveguide structure of optics biochemical sensor has the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration at present.To based on optical resonator structures (as the FP chamber, ring cavity etc.) optics biochemical sensor, the introducing of resonance effect can make light signal constantly resonance and amplification in optical resonator, therefore be equivalent to the increase that the optics biochemical sensor is surveyed length, more can cause that the change in optical signal such as phase place (or intensity) is to detectable value, and then realization reaches sensing capabilities preferably on the compact sized optical biochemical sensor, the miniaturization that undersized optics biochemical sensor also is convenient to optics biochemical sensor system in addition, with microminiaturized, will reduce system cost effectively.
Current, based on the FP resonance effect, the optics biochemical sensor of grating FP cavity resonator structure can be done very smallly, and shows good sensing capabilities, but the energy density that is distributed in the evanescent wave around optics biochemical sensor optical waveguide is lower, therefore still there is the lower defect of sensitivity.
The utility model content
The problem that the utility model is surveyed in order to solve some biochemical, in the prior art on the basis of the optics biochemical sensor of main flow, for further solving it, utilize the evanescent wave detection principle existing because its evanescent wave be detected is distributed in around the device optical waveguide and has that energy density is low to be caused surveying the defect that difficulty is large, proposed a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip technology based on SOI.
To achieve these goals, the technical solution of the utility model is: based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, the matrix that comprises the silicon base layer, silicon dioxide layer and the monocrystalline silicon layer formation that stack gradually bonding from bottom to top, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the propagation path of light of described slit optical waveguide, it is rectangle that matrix is overlooked direction, the grating in described grating FP chamber is the extension type grating, being positioned at the rectangular base outside, is male type dentation grating.
Further, the slit of above-mentioned slit optical waveguide is the straight slit groove;
The slit of above-mentioned slit optical waveguide is the slit formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface;
The slit depth of above-mentioned slit optical waveguide is monocrystalline silicon layer thickness.
Further, it is rectangle that described matrix is overlooked direction, and described slit optical waveguide be take the center line of length direction of matrix and is that rotational symmetry distributes, and keeps direction consistent with the matrix length direction, and wherein slit width is 80nm～120nm.
Further, above-mentioned grating FP chamber comprises the first grating and the second grating, the first grating and the equal etching of the second grating are on the slit optical waveguide, described the first grating and the second grating be d at intervals, and the first grating and the second grating have identical structure, and etching forms grating FP chamber on the slit optical waveguide, the described parameter apart from d and grating is determined jointly by the phase condition of grating and the condition of resonance of FP resonator cavity.
The first above-mentioned grating or the second grating comprise and are no less than 3 no more than 25 periodic units.
Arbitrary value that the cycle of above-mentioned grating periodic unit is 0.3 μ m～0.6 μ m.
Arbitrary value that the dutycycle of above-mentioned grating periodic unit is 40%～70%.
The longitudinal length of above-mentioned grating periodic unit (corresponding with the lateral length as periodic unit length) accounts for arbitrary value that the ratio of above-mentioned matrix width is 70%～100%.
The beneficial effects of the utility model: optics biochemical sensitive chip of the present utility model forms grating FP chamber by the monocrystalline silicon layer at top and detects the impact of external substance on light signal, introduce the slit optical waveguide structure simultaneously, because narrow slit wave-guide can be limited in slit areas greatly by light, thereby effectively strengthened the interaction between light and material, make the detection of light signal turn to the slit space from traditional evanscent field, it is advantageous that optical energy density in the slit space density much larger than luminous energy in evanscent field, light-matter interaction is stronger, make detection sensitivity higher, detection difficulty further reduces.In addition, this optics biochemical sensitive chip adopts the FP cavity resonator structure, utilizes the resonance effect of optical resonator, makes and can reach under the condition of identical sensing capabilities, greatly reduce the volume of optics biochemical sensitive chip, be conducive to realize sensor-based system on the microminiaturization of biochemical sensor and sheet.Take the SOI material as matrix, can utilize ripe microelectronics CMOS processing technology, make this optics biochemical sensitive chip be easy to large-scale mass production, be conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be surveyed for biomacromolecule (protein or DNA) liquid sample, also can detect for gas molecule.Therefore, the utility model is compared with other biochemical sensitive chip, has the manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of characteristics such as applied widely.
The accompanying drawing explanation
The perspective view that Fig. 1-1 is a kind of optics biochemical sensitive chip;
The vertical view that Fig. 1-2 is the optics biochemical sensitive chip shown in Fig. 1-1;
The structural representation of the optics biochemical sensitive chip that Fig. 2-1 is embodiment of the present utility model;
The viewgraph of cross-section of the optics biochemical sensitive chip that Fig. 2-2 are embodiment of the present utility model;
Fig. 3-1 be NaCl solution at sensor shown in variable concentrations figure below 1-1 the response curve to the different wave length light wave;
The linear fit that Fig. 3-2 are sensor resonant wavelength shown in different N aCl solution refractive index figure below 1-1;
Fig. 4 is the biochemical sensitive system architecture schematic diagram that optics biochemical sensitive chip of the present utility model forms.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
For the ease of understanding, below in conjunction with a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip structure identical with the utility model scheme principle, principle of the present utility model is described in detail.
As Figure 1-1, for a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip, the matrix that comprises the silicon base layer 11, silicon dioxide layer 12 and monocrystalline silicon layer 13 formations that stack gradually bonding from bottom to top, the monocrystalline silicon layer 13 of described matrix comprises slit optical waveguide 15, comprise grating FP chamber 14 on the propagation path of light AA` of slit optical waveguide 15, for making the optical resonance of propagating along the slit optical waveguide.Make and guarantee the optical transmission performance of slit optical waveguide for the ease of technique, the slit of above-mentioned slit optical waveguide is straight slit; This slit optical waveguide is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface; Its lithographic method for example, use electron beam exposure and by the RIE(reactive ion etching) etching technics etching on the single crystal silicon material of SOI obtains; In addition, the slit depth of described slit optical waveguide need to meet some requirements, and it is monocrystalline silicon layer thickness that this condition is specially slit depth in the slit optical waveguide.Slit the purpose here is flashlight to be concentrated in slit propagate, and makes the energy density of light signal larger, is convenient to analyzing and testing, and another purpose is to improve the performances such as sensitivity of sensing chip by the contact area of increase measured matter and sensor simultaneously.As shown in Figure 1-2, it is rectangle that matrix is overlooked direction, and slit optical waveguide 15 comprises a slit groove, and described slit groove is positioned on the central axis of matrix length direction, arbitrary value that wherein the slit well width is 80nm～120nm.In this programme, the slit groove is positioned at the central axis place of matrix length direction, and the slit well width is 100nm.Slit groove in the slit optical waveguide is the travel path of light signal, also comprise grating FP chamber on this path, grating FP chamber comprises the first grating 141 and the second grating 142, the first grating 141 and the equal etching of the second grating 142 are on the slit optical waveguide, described the first grating and at intervals d identical with the second optical grating construction, and form grating FP resonator cavity on the slit optical waveguide, the described parameter apart from d and grating is determined jointly by the phase condition of grating and the condition of resonance of FP resonator cavity.Grating FP resonator cavity in scheme for the selection of wavelength, utilize the resonance effect in grating FP chamber, can allow the light that meets condition of resonance shake back and forth in resonator cavity, guarantee to realize allowing light fully contact with material under device microsize condition, improve sensing capabilities.Because using prior art, those of ordinary skill in the art can determine relatively easily apart from d and grating parameter according to light source frequency range and the target component used, therefore no further details to be given herein.Concrete, the first grating 141 or the second grating 142 comprise and are no less than 3 no more than 25 grating periodic units.The cycle of described grating periodic unit refers to the length value of one-period unit, is specially arbitrary value of 0.3 μ m～0.6 μ m.
Here, arbitrary value that the dutycycle of grating periodic unit is 40%～70%, the dutycycle here refers to that the width that forms in the grating periodic unit groove that is etched accounts for the ratio of whole grating periodic unit lateral length here.The longitudinal length of grating periodic unit accounts for arbitrary value that the ratio of rectangular base width is 70%～100%, and the degree of depth of the groove that is etched in the grating periodic unit is 70%～100% of monocrystalline silicon layer thickness.Because the slit optical waveguide can be limited in slit areas greatly by the light in the FP resonator cavity, the FP resonator cavity can make light concussion back and forth in resonator cavity simultaneously, increase intensity and the effective length of light-matter interaction, thereby improve the interaction between the flowing material in light and slit areas, make the sensitivity of device improve.
As shown in Fig. 2-1 and Fig. 2-2, the utility model embodiment's is a kind of based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, comprises the matrix of the silicon base layer 41, silicon dioxide layer 42 and monocrystalline silicon layer 43 formations that stack gradually bonding from bottom to top.With the sensing chip shown in Fig. 1-1, compare, the difference of the optics biochemical sensitive chip of the present embodiment is, the grating in described grating FP chamber is the extension type grating.As shown in Fig. 2-1, the extension type grating is formed at the upper rectangular base of the optical signal path DD` outside, for male type dentation grating, in the present embodiment, the dutycycle of the raster unit in grating FP chamber 44 refers to that the grid facewidth degree of grating periodic unit accounts for the ratio of whole grating periodic unit lateral length.Wherein, the position of slit groove 45 is identical with slit groove in the sensing chip shown in Fig. 1-1.The present embodiment has been to provide the implementation of the utility model scheme of another kind of thinking with respect to the meaning of the sensing chip shown in Fig. 1-1.
It should be noted that: in the technical solution of the utility model and all embodiment, the different expression that related grating FP resonator cavity and grating FP chamber are same parts; The grating periodic unit related to laterally with the direction such as vertical, be described as those of ordinary skill in the art's common practise, be the clearly form of presentation of this area acquiescence, it is also clearly that the parameter of using it for technical scheme in the utility model scheme limits nature.
Biochemical sensor is mainly used in the detection of biomacromolecule as DNA or protein detection etc. and military upper toxic gas or virus.A kind of concrete application below in conjunction with the present embodiment is described in further detail the technical solution of the utility model:
Be applied to detect in unknown sample and whether contain that we wish the material detected or detect in unknown sample to contain which material certain, the selectivity difference that this requires sensor to have different material, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, when certain has specific biomacromolecule when with fluid sample, entering into sensor fluid passage and flowing through sensing chip, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then make the resonance wavelength of sensor also drift about, go out this variation by the data processes and displays, can infer in sample to be tested whether contain that we want to contain those materials in the test substance surveyed or sample certain,
Be applied in known sample to be tested contain certain material, want now to measure the concentration of this material in sample and be how many, in this case, at first we configure a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that meets resonance wavelength, from the port of the slit optical waveguide of top, input into the grating FP chamber of going forward side by side, resonance effect from the FP chamber, when the light wave integral multiple that after round a week, the optical path difference of generation is wavelength in resonator cavity, light wave can mutually be interfered and produce the resonance enhancement effect with the light wave that newly is coupled into grating FP chamber, light can shake back and forth in resonator cavity, thereby the intensity that has increased the length of light and interaction between substances and strengthened light and interaction between substances, and, single slit groove 4 in the FP resonator cavity can be by the slit areas of light field restriction, be convenient to interact between the material of light and slit areas, thereby further improve the interaction between light and material.Photodetector is surveyed the intensity size of output optical signal, obtain corresponding resonance wavelength simultaneously, then allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element, because variation has occurred in the concentration of solution, the effective refractive index of sensing chip changes, and then make the resonance wavelength of sensor also drift about, light signal by measuring the output waveguide port and in addition data process the spectrogram that can obtain output optical signal, and then the position of the harmonic peak after being drifted about and corresponding resonance wavelength, relative size according to the resonance wavelength drift value, we can determine the concentration of certain material in analysans.Thereby realize sensor function as scheduled.
As shown in Fig. 3-1, be the sensing chip shown in Fig. 1-1 to the response curve under NaCl solution variable concentrations, shown in Fig. 3-2, be the linear fit of sensor resonant wavelength shown in corresponding diagram 1-1 under different N aCl solution refractive index.Relation from figure is not difficult to find out, the sensing chip shown in Fig. 1-1 can be by the concentration of NaCl solution the wavelength location by output optical signal and intensity corresponding and detect and show by detection system.
Be understood that, according to the analysis of the above effect to the sensing chip shown in Fig. 1-1 and principle in conjunction with embodiment of the present utility model with respect to the sensing chip advantage shown in Fig. 1-1, easily draw the beneficial effect of embodiment of the present utility model.
Figure 4 shows that the biochemical sensitive system architecture schematic diagram based on optics biochemical sensitive chip of the present utility model, comprise sensor chip, photodetector, laser instrument, temperature controller and computer control part, also comprise the Micropump of controlling the fluid to be measured input simultaneously and inject valve, analysans enters sensing chip by injecting valve, after the sensing chip of flowing through, as waste liquid, is collected.Below will be described in detail by the course of work to this sensor-based system, so that the principle of optics biochemical sensitive chip of the present utility model and interaction energy are better understood: during this sensor-based system work, at first flashlight emits from laser instrument, enter into sensing chip by photo-coupler, impact for fear of temperature on the performance of sensor, we have installed temperature controller in the slit optical waveguide of sensor, are used for to sensor heating or refrigeration (monitoring temperature).When flashlight transmits in sensor, the light that meets the raster phase condition nearly all is reflected back, but the grating that design here is weak reflection grating, the light that meets the raster phase condition only has part to be reflected back, a part still can transmissive and is entered into the FP resonator cavity in addition, the light that the part that enters into the FP resonator cavity meets the raster phase condition will be continued to reflect back by second grating, by the light of second optical grating reflection, will be interfered with the light that again sees through the part that is entered into the FP resonator cavity by first grating and meet the raster phase condition, because two gratings have formed the FP resonator cavity, so incident light and reflected light can interfere in grating FP chamber, concussion back and forth, thereby form a series of harmonic peak at transmission window.When the analysans sample is injected into microfluidic channel by Micropump, and while reaching the top covering of sensor chip, sample can make the sensor surrounding environment change, cause the effective refractive index of sensor to change, and then make the harmonic peak of sensor output port to drift about, we measure this variation by the photodetector at the sensor output port, and the data of distribution of light intensity are delivered in computing machine and processed, the database information that in the result of calculating and computing machine, each material forms is compared, we can draw the relevant information of measured object, thereby realize sensing function.
The foregoing is only embodiment of the present utility model, one skilled in the art will appreciate that and can carry out various modifications, replacement and change to the utility model in the disclosed technical scope of the utility model.Therefore the utility model should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (10)
1. based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, the matrix that comprises the silicon base layer, silicon dioxide layer and the monocrystalline silicon layer formation that stack gradually bonding from bottom to top, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the propagation path of light of described slit optical waveguide, it is rectangle that matrix is overlooked direction, and the grating in described grating FP chamber is the extension type grating, being positioned at the rectangular base outside, is male type dentation grating.
2. according to claim 1ly based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, the slit of described slit optical waveguide is straight slit.
3. according to claim 1ly based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, the slit of described slit optical waveguide is the slit formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface.
4. according to any one claim of claims 1 to 3 is described, based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, the slit depth of described slit optical waveguide is monocrystalline silicon layer thickness.
5. according to claim 1ly based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, the slit width of described slit optical waveguide is 80nm～120nm.
6. according to claim 1 based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, described grating FP chamber comprises the first grating and the second grating, the first grating and the equal etching of the second grating are on the slit optical waveguide, described the first grating and the second grating be d at intervals, and the first grating and the second grating have identical structure, and form grating FP chamber on the slit optical waveguide.
7. according to claim 6ly based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, described the first grating or the second grating comprise and are no less than 3 no more than 25 periodic units.
8. according to claim 7 based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that arbitrary value that the cycle of described grating periodic unit is 0.3um～0.6um.
9. according to claim 8 based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that arbitrary value that the dutycycle of described grating periodic unit is 40%～70%.
According to claim 8 or claim 9 based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip, it is characterized in that, the longitudinal length of described grating periodic unit accounts for arbitrary value that the ratio of described matrix width is 70%～100%.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293129A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity based optical biochemical sensor chip |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293129A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity based optical biochemical sensor chip |
| CN103293129B (en) * | 2013-05-16 | 2015-12-23 | 成都谱视科技有限公司 | Based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip |
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