CN203385660U - Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip - Google Patents
Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip Download PDFInfo
- Publication number
- CN203385660U CN203385660U CN201320266603.7U CN201320266603U CN203385660U CN 203385660 U CN203385660 U CN 203385660U CN 201320266603 U CN201320266603 U CN 201320266603U CN 203385660 U CN203385660 U CN 203385660U
- Authority
- CN
- China
- Prior art keywords
- grating
- slit
- optical waveguide
- extension
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model provides a slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip. The optical biochemical sensor chip comprises an SOI (silicon-on-insulator) matrix formed by a silicon substrate, a silicon dioxide layer and a monocrystalline silicon layer which are stacked and bonded from bottom to top in sequence, wherein the monocrystalline silicon layer of the SOI matrix comprises two optically coupled epitaxial grating FP cavities, and epitaxial gratings of the epitaxial grating FP cavities are formed outside the SOI matrix and are convex dentate gratings. The optical biochemical sensor chip has the beneficial effects that as a slit optical waveguide structure is introduced into the scheme and the slit waveguide can furthest limit light in slit regions to reinforce the interaction between the light and substances, the optical biochemical sensor chip has the advantages that the energy density of light in the slit space is far greater than that of light in evanescent fields, the interaction between the light and the substances is relatively strong and the detection sensitivity is relatively high; moreover, the biochemical sensor chip is favorable for achieving miniaturization and on-chip sensing systems of optical biochemical sensors under the condition of achieving the same sensing properties.
Description
Technical field
The utility model relates to the detection technique to the specific chemistry such as gas molecule or biomolecule or biological substance, is specifically related to the optical sensing field, particularly a kind of based on cursor effect optical resonator biochemical sensitive chip.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is for measuring specific chemistry or biological substance.Owing to measuring, these chemistry or biological substance are significant in environmental monitoring, diseases monitoring and medicament research and development, so the research of biochemical sensor has been seemed to extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and the large class of unmarked type optics biochemical sensor two, from relevant document, although fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but have that equipment is huge, complicated operation and the shortcoming such as spended time is long, and special messenger's operation that usually need to there is certain professional technique, universal cost is higher, simultaneously, the fluorescence molecule for mark also likely affects the detection of sample.Comparatively speaking, the size of unmarked type optics biochemical sensor is less, and cost is lower, and application process is also more convenient, and no longer introduces new interference in measuring process, and result is also more reliable.
Based on SOI(Silicon-On-Insulator, the silicon on dielectric substrate) optics biochemical sensor is exactly a kind of unmarked type optics biochemical sensor, simultaneously the also study hotspot of this area just.From the existing optics biochemical sensor based on SOI, mostly adopted evanescent wave (disappearance ripple) detection principle, evanescent wave refers to due to total reflection a kind of electromagnetic wave produced on the interphase of two kinds of different mediums, its amplitude is the exponential form decay with the increase with the perpendicular degree of depth of interphase, and the evanescent wave by detecting described optics biochemical sensor optical waveguide is to survey the sample biochemical.Its principle is that biochemical in sample to be tested can cause the change (showing as the variation of the effective refractive index of optics biochemical sensor) of light wave transmissions character in the optics biochemical sensor, also is about to make the biochemical concentration signal in sample to be converted to change in optical signal.At present for the planar waveguiding structure of sensing, the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration are arranged.Wherein, for the optics biochemical sensor based on optical resonator structures (as FP chamber, ring cavity etc.), the introducing of resonance effect can make light signal constantly resonance and amplification in resonator cavity, therefore be equivalent to the increase that the optics biochemical sensor is surveyed length, more can cause that the change in optical signal such as phase place (or intensity) is to detectable value, and then realization reaches sensing capabilities preferably on the compact sized optical biochemical sensor, the miniaturization that undersized optics biochemical sensor also is convenient to optics biochemical sensor system in addition, with microminiaturized, will reduce system cost effectively.
In addition, the optics biochemical sensor based on cursor effect is proposed gradually by people in recent years, and this sensor is to utilize two sensing subsystems with different Free Spectral Ranges, forms a new sensor-based system.The principle of work of this new sensor-based system is: due to Free Spectral Range (FSR) difference of two subsystem, therefore, the Free Spectral Range of whole sensor-based system should be the lowest common multiple of the Free Spectral Range of two subsystems.Therefore, this sensor has very large Free Spectral Range and very large measurement range.And, if we are using one of them sensing subsystem as the reference system, the another one sensing subsystem is as sensor-based system, we can obtain the very high sensor of sensitivity.
Existing, to gas molecule or biomolecule etc. in the detection technique field of specific chemistry or biological substance, the example combined in advantage and the advantages such as the measuring precision based on cursor effect of the Miniaturizable by the SOC (system on a chip) based on SOI does not almost have.In the prior art, the form that SOC (system on a chip) based on SOI adopts evanescent wave to survey more, in most of SOC (system on a chip) because the evanescent wave energy density is low, make their remolding sensitivity lower, to analysans, not too responsive, therefore while measuring to Electro-Optical Sensor Set require corresponding highlyer, and then make the holistic cost of system also corresponding higher.
The utility model content
The purpose of this utility model is in order to solve the detection problem of some biochemical, in the prior art on the basis of the biochemical sensor based on optical detection of main flow, for further solving it, utilize evanescent wave detection principle and single system to survey that existing evanescent wave energy density is low to be caused surveying difficulty and reach greatly the problems such as the single system measurement range is narrow, sensitivity is not high, proposed a kind of slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip based on cursor effect.
To achieve these goals, the technical solution of the utility model is: slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises the first optical resonator and the second optical resonator, described the first optical resonator has not identical Free Spectral Range with the second optical resonator, the two optical coupled connects, described the first optical resonator and the second optical resonator are all extension type grating FP chamber, the extension type grating in described extension type grating FP chamber is formed at the SOI matrix outside, for male type dentation grating.
Further, the monocrystalline silicon layer of the SOI matrix of above-mentioned optical resonator biochemical sensitive chip also comprises the slit optical waveguide, and described slit optical waveguide is positioned on the lightray propagation path of the first optical resonator and/or the second optical resonator.
The slit of above-mentioned slit optical waveguide is the slit formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface;
The slit depth of above-mentioned slit optical waveguide equals monocrystalline silicon layer thickness;
The slit width of above-mentioned slit optical waveguide is 80nm～120nm.
The beneficial effects of the utility model: the optical resonator formation cursor effect that optical resonator biochemical sensitive chip of the present utility model forms two Free Spectral Ranges differences and mutually is connected in the optical coupled mode by the monocrystalline silicon layer at top, the impact for detection of external substance on light signal.In addition, owing to introducing the slit optical waveguide structure in scheme, and narrow slit wave-guide can be limited in light slit areas greatly to strengthen the interaction between light and material, make the detection of light signal turn to the slit space from traditional evanscent field, it is advantageous that the optical energy density in the slit space is far longer than the density of luminous energy in evanscent field, light-matter interaction is stronger, and detection sensitivity is higher, reduced the requirement to checkout equipment, detection difficulty further reduces.In addition, this sensing chip adopts optical resonator structures, utilizes the resonance effect of optical resonator, makes and can reach under the condition of identical sensing capabilities, greatly reduce the volume of optics biochemical sensitive chip, be conducive to realize sensor-based system on the microminiaturization of optics biochemical sensor and sheet.Take the SOI material as matrix, can utilize ripe microelectronics CMOS processing technology, make this optics biochemical sensitive chip be easy to large-scale mass production, be conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be used for biomacromolecule (protein or DNA) liquid sample to be surveyed, and also can be used for gas molecule and detects.Therefore, the utility model is compared with other biochemical sensitive chip, has the manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of characteristics such as applied widely.
The accompanying drawing explanation
The structural representation of the optical resonator biochemical sensitive chip that Fig. 1-1 is embodiment;
The viewgraph of cross-section of the optical resonator biochemical sensitive chip that Fig. 1-2 is embodiment;
Fig. 2 is the biochemical sensitive system architecture schematic diagram that optical resonator biochemical sensitive chip of the present utility model forms.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
As shown in Fig. 1-1 and Fig. 1-2, the grating FP chamber of the present embodiment and micro-ring resonant cavity cascade connection type optics biochemical sensitive chip comprise and stacking gradually from bottom to top and SOI matrix that the silicon base layer 41 of bonding, silicon dioxide layer 42 and monocrystalline silicon layer 43 form, the monocrystalline silicon layer 43 of described SOI matrix comprises the first optical resonator 44 and the second optical resonator 45, described the first optical resonator 44 has not identical Free Spectral Range with the second optical resonator 45, and the two optical coupled connects.In the present embodiment, described the first optical resonator and the second optical resonator are extension type grating FP chamber.Optical resonator (extension type grating FP chamber) has the effect of frequency-selecting, the not identical Free Spectral Range of above-described two optical resonators refers to that the first optical resonator 44 is not identical with the corresponding Free Spectral Range of the second optical resonator 45 (spacing of adjacent resonance wavelength), and purpose is to make can increase by the cursor effect formed the measuring accuracy of sensing scope and the raising chip of chip when described two optical resonators are coupled connection.Because the sensor application based on cursor effect has been the prior art of sensor technical field, definite basic general knowledge that has also just become those of ordinary skill in the art of the free wavelength coverage of two resonator cavity, can by limited experiment, determine according to actual needs, therefore do not do detailed description at this.Described optical coupled connection refers to by technology such as Interface Matching and structure docking and realizes described two optical resonators are interconnected, and two optical resonators after making to be of coupled connections meet the requirement that light signal freely transmits at the two.
In the such scheme of the present embodiment, because segmentation scheme has wherein also been continued to use the mode that the existing sensing chip based on SOI utilizes its evanscent field to survey, therefore also there is on this basis further technological improvement space, in order to overcome in such scheme the step of utilizing the evanscent field detection mode, a kind of preferred implementation of the present embodiment based on such scheme is proposed here, this preferred implementation also comprises the slit optical waveguide at the monocrystalline silicon layer of the SOI of optical resonator biochemical sensitive chip matrix, the slit optical waveguide is positioned on the lightray propagation path of the first optical resonator and/or the second optical resonator.The slit optical waveguide is set can be focused in slit by the light signal on transmission path in a large number, when sensor application, can make sample pass through the slit space, sample and light signal are limited in the slit space interacting like this, and its action intensity will be with respect to will be stronger by the evanescent wave effect.Simultaneously, the change information after this effect is fed and detection system, with this, realizes improving the purpose of the performances such as system sensitivity.Owing to so long as this slit optical waveguide is set on the path of lightray propagation, can realizing above-mentioned purpose, just realize on the degree of effect slightly different, therefore this slit optical waveguide can be arranged at arbitrary position in system lightray propagation path, such as can be arranged on the lightray propagation path of the first optical resonator or be arranged on the lightray propagation path of the second optical resonator, also can this slit optical waveguide all be set on the lightray propagation path of described two optical resonators, its effect is excellent to be set to simultaneously.In addition, described slit optical waveguide is preferably perpendicular to monocrystalline surface to be offered downwards by monocrystalline silicon layer, and the degree of depth of slit groove equates with the thickness of monocrystalline silicon layer, and now light signal and the sample action effect in the slit optical waveguide is best.Further, the slit width of the slit optical waveguide here is 80nm～120nm.Its role is to make the action effect optimum of light signal and sample in the slit groove, because the ability of wide its gathered light signal of slit groove will be not improved even variation, simultaneously can be to sacrifice the small-sized cost that turns to of device, to affect if slit is narrow the gathering that sample enters slit and light signal, therefore draw the span of this slit width by optimization simultaneously.Especially, the different expression mode that related slit groove and slit optical waveguide belong to same structure in instructions of the present utility model; Extension type grating FP chamber and extension type grating FP resonator cavity also belong to the different expression mode of same structure.
Extension type grating FP chamber for first and second optical resonator of conduct adopted in the present embodiment, wherein arbitrary extension type grating FP chamber comprises and comprises the first grating and the second grating, the first grating and the second grating are opened on the slit optical waveguide, described the first grating and at intervals d identical with the second optical grating construction, and form extension type grating FP chamber on the slit optical waveguide, described definite according to light signal wave band and grating parameter apart from d.Extension type grating FP chamber for the selection of wavelength, utilizes the resonance effect in extension type grating FP chamber in the scheme of the present embodiment, can under device microsize condition, realize allowing light fully contact with material, improves sensing capabilities.Because using prior art, those of ordinary skill in the art can easily determine the structural parameters apart from d and grating according to the phase condition of grating and the condition of resonance of extension type FP resonator cavity, therefore no further details to be given herein.Concrete, first grating of the present embodiment or the second grating comprise and are no less than 3 no more than 25 periodic units.The cycle of described grating periodic unit refers to the lateral length value of one-period unit, is preferably in the present embodiment arbitrary value of 0.3um～0.6um.Further, arbitrary value that the dutycycle of the grating periodic unit in the present embodiment is 40%～70%, the dutycycle here refers to that the width that forms in the grating periodic unit groove that is etched accounts for the ratio of whole grating periodic unit lateral length in the present embodiment.The degree of depth of groove of being etched in the grating periodic unit is 70%～100% of monocrystalline silicon layer thickness.The longitudinal length of grating periodic unit accounts for arbitrary value that the ratio of rectangular base width is 70%～100%.Wherein, the grating periodic unit related to laterally with the direction such as vertical, be described as those of ordinary skill in the art's common practise, be the clearly form of presentation of this area acquiescence, the parameter restriction nature of using it for technical scheme in the utility model scheme is also clearly.
As shown in Fig. 1-1 and Fig. 1-2, the slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip of body embodiments, described extension type grating is formed at the SOI matrix outside, for male type dentation grating, in the present embodiment, the dutycycle of the raster unit in grating FP chamber 44 refers to that the grid facewidth degree of raster unit accounts for the ratio of whole periodic unit length.In like manner, can can adopt the optimal way of the preferred implementations such as slit optical waveguide 46 and preferred parameter thereof as the present embodiment in the present embodiment, the effect in the present embodiment of this optimal way and effect and its do not have essential distinction in the various embodiments described above yet.
Biochemical sensor is mainly used in the detection of biomacromolecule as DNA or protein detection etc. and military upper toxic gas or virus.Below in conjunction with concrete application, embodiment of the present utility model is described in further detail:
Application with detect in unknown sample whether contain that we wish the material detected or detect in unknown sample to contain which material certain, the selectivity difference that this requires sensor to have different material, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, when certain has specific biomacromolecule when with fluid sample, entering into sensor fluid passage and flowing through sensing chip, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then make the resonance wavelength of sensor also drift about, go out this variation by the data processes and displays, can infer in sample to be tested whether contain that we want to contain those materials in the test substance surveyed or sample certain,
Be applied in known sample to be tested contain certain material, want now to measure the concentration of this material in sample and be how many, in this case, at first we configure a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that meets resonance wavelength is inputted into the optics resonator cavity of going forward side by side from the port of the slit optical waveguide of top, resonance effect from optical resonator, when the light wave integral multiple that after round a week, the optical path difference of generation is wavelength in resonator cavity, light wave can mutually be interfered and produce the resonance enhancement effect with the light wave that newly is coupled into optical resonator, light can shake back and forth in resonator cavity, thereby the intensity that has increased the length of light and interaction between substances and strengthened light and interaction between substances, and, slit in optical resonator can be by the slit areas of light field restriction, be convenient to interact between the material of light and slit areas, thereby further improve the interaction between light and material.Two forms with different Free Spectral Range resonator cavity cascades that we adopt, it is very large that the Free Spectral Range of whole system can become, and be the lowest common multiple of the Free Spectral Range of two resonator cavitys, thereby we can realize large-scale detection.Photodetector is surveyed the intensity size of output optical signal, obtain corresponding resonance wavelength simultaneously, then allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element, because variation has occurred in the concentration of solution, the effective refractive index of sensing chip changes, and then make the resonance wavelength of sensor also drift about, light signal by measuring the output waveguide port and in addition data process the spectrogram that can obtain output optical signal, and then the position of the harmonic peak after being drifted about and corresponding resonance wavelength, relative size according to the resonance wavelength drift value, we can determine the concentration of certain material in analysans, thereby realize sensor function as scheduled.
Figure 2 shows that the optics biochemical sensitive system architecture schematic diagram of the slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip (being illustrated as the photon sensor chip) based on embodiment of the present utility model, comprise sensor chip (photon sensor chip), photodetector, laser instrument, temperature controller and computer control part, also comprise the Micropump of controlling the fluid to be measured input simultaneously and inject valve, analysans enters sensing chip by injecting valve, after the sensing chip of flowing through, as waste liquid, is collected.Below will be described in detail by the course of work to this sensor-based system, so that principle and the interaction energy of optical resonator of the present utility model (extension type grating FP chamber) biochemical sensitive chip are better understood: during this sensor-based system work (analyzing) in conjunction with the embodiments, at first flashlight emits from laser instrument, enter into sensing chip by photo-coupler, impact for fear of temperature on the performance of sensor, we have installed temperature controller in the slit optical waveguide of sensor, are used for to sensor heating or refrigeration (monitoring temperature).When flashlight transmits in sensor, the light that meets the raster phase condition nearly all is reflected back, but the grating that design here is weak reflection grating, the light that meets the raster phase condition only has part to be reflected back, a part still can transmissive and is entered into the first optical resonator in addition, the light that the part that enters into the first optical resonator meets the raster phase condition will be continued to reflect back by the second optical resonator, by the light of the second optical resonance cavity reflection, will be interfered with the light that again sees through part that the first optical resonator enters and meet the optical resonator condition of resonance, in optical resonator, incident light and reflected light can interfere and shake, thereby form a series of harmonic peak.These resonance signals from the first optical resonator outgoing can enter into the second optical resonator subsequently, Analysis on action mechanism is the same, the Free Spectral Range difference of the harmonic peak formed due to two resonator cavitys, so the resonance signal of the first optical resonator outgoing will be modulated by the second optical resonator, thereby it is very wide to export a kind of Free Spectral Range at the senser element output port, the tuning curve that quality factor is very high.When the analysans sample is injected into microfluidic channel by Micropump, and while reaching the top covering of sensor chip, sample can make the sensor surrounding environment change, cause the effective refractive index of sensor to change, and then make the harmonic peak of sensor output port to drift about, we measure this variation by the photodetector at the sensor output port, and the data of distribution of light intensity are delivered in computing machine and processed, the database information that in the result of calculating and computing machine, each material forms is compared, we can draw the relevant information of measured object, thereby realize sensing function.
The foregoing is only embodiment of the present utility model, one skilled in the art will appreciate that and can carry out various modifications, replacement and change to the utility model in the disclosed technical scope of the utility model.Therefore the utility model should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (10)
1. slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises the first optical resonator and the second optical resonator, described the first optical resonator has not identical Free Spectral Range with the second optical resonator, the two optical coupled connects, described the first optical resonator and the second optical resonator are all extension type grating FP chamber, the extension type grating in described extension type grating FP chamber is formed at the SOI matrix outside, for male type dentation grating.
2. slit optical waveguide extension grating FP according to claim 1 chamber cascade connection type optics biochemical sensitive chip, it is characterized in that, the monocrystalline silicon layer of the SOI matrix of described biochemical sensitive chip also comprises the slit optical waveguide, and described slit optical waveguide is positioned on the lightray propagation path of the first optical resonator and/or the second optical resonator.
3. slit optical waveguide extension grating FP according to claim 2 chamber cascade connection type optics biochemical sensitive chip, is characterized in that, the slit of described slit optical waveguide is the slit formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface.
4. according to the described slit optical waveguide of claim 2 or 3 extension grating FP chamber cascade connection type optics biochemical sensitive chip, it is characterized in that, the slit depth of described slit optical waveguide equals monocrystalline silicon layer thickness.
5. according to the described slit optical waveguide of claim 2 or 3 extension grating FP chamber cascade connection type optics biochemical sensitive chip, it is characterized in that, the slit width of described slit optical waveguide is 80nm～120nm.
6. according to the described slit optical waveguide of claim 2 or 3 extension grating FP chamber cascade connection type optics biochemical sensitive chip, it is characterized in that, described extension type grating FP chamber comprises the first grating and the second grating, the first grating and the equal etching of the second grating are on the slit optical waveguide, described the first grating and the second grating be d at intervals, and the first grating and the second grating have identical structure, and form grating FP cavity configuration on the slit optical waveguide.
7. slit optical waveguide extension grating FP according to claim 6 chamber cascade connection type optics biochemical sensitive chip, is characterized in that, described the first grating or the second grating comprise and be no less than 3 no more than 25 periodic units.
8. slit optical waveguide extension grating FP according to claim 7 chamber cascade connection type optics biochemical sensitive chip, is characterized in that arbitrary value that the cycle of described grating periodic unit is 0.3um～0.6um.
9. slit optical waveguide extension grating FP according to claim 8 chamber cascade connection type optics biochemical sensitive chip, is characterized in that arbitrary value that the dutycycle of described grating periodic unit is 40%～70%.
10. slit optical waveguide extension grating FP according to claim 9 chamber cascade connection type optics biochemical sensitive chip, is characterized in that, the longitudinal length of described grating periodic unit accounts for arbitrary value that the ratio of described matrix width is 70%～100%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320266603.7U CN203385660U (en) | 2013-05-16 | 2013-05-16 | Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320266603.7U CN203385660U (en) | 2013-05-16 | 2013-05-16 | Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203385660U true CN203385660U (en) | 2014-01-08 |
Family
ID=49874137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320266603.7U Expired - Fee Related CN203385660U (en) | 2013-05-16 | 2013-05-16 | Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203385660U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293128A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip |
| CN106404727A (en) * | 2015-07-27 | 2017-02-15 | Pgi股份有限公司 | Sensing module and sensing method |
| CN110068549A (en) * | 2018-01-22 | 2019-07-30 | 天津大学 | A kind of flexible photonic device thin film stack of negligible power optical coupling effect |
-
2013
- 2013-05-16 CN CN201320266603.7U patent/CN203385660U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103293128A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip |
| CN103293128B (en) * | 2013-05-16 | 2016-06-08 | 成都谱视科技有限公司 | Slit optical waveguide extension grating FP chamber cascade connection type optics biochemical sensitive chip |
| CN106404727A (en) * | 2015-07-27 | 2017-02-15 | Pgi股份有限公司 | Sensing module and sensing method |
| CN106404727B (en) * | 2015-07-27 | 2020-02-28 | Pgi股份有限公司 | Sensing module and sensing method |
| CN110068549A (en) * | 2018-01-22 | 2019-07-30 | 天津大学 | A kind of flexible photonic device thin film stack of negligible power optical coupling effect |
| CN110068549B (en) * | 2018-01-22 | 2021-09-17 | 天津大学 | Flexible photonic device film stacking structure with negligible force optical coupling effect |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103308476B (en) | Based on two micro-ring resonant cavity optics biochemical sensitive chips of cursor effect | |
| CN103411924A (en) | Double-microring resonator optical biochemical sensing chip based on vernier effect | |
| CN103575698B (en) | The optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber | |
| CN103308480A (en) | Grating FP (Fabry-Perot) cavity and micro-ring resonator cascade-form optical biochemical sensing chip | |
| CN103487406B (en) | Vertical coupled Mach-Zehnder interferon etric micro-ring resonant cavity optics biochemical sensitive chip | |
| CN102565000B (en) | Multimode interference biological chemical sensor based on silicon slot waveguides | |
| CN203385650U (en) | Epitaxial grating FP (Fabry-Perot) cavity and microring resonator cascaded optical biochemical sensor chip | |
| CN203385668U (en) | Slit waveguide series grating FP (Fabry-Perot) cavity optical biochemical sensor chip | |
| CN203241340U (en) | Grating FP (Fabry-Perot) cavity and microring resonator cascaded optical biochemical sensor chip | |
| CN203385660U (en) | Slit optical waveguide and epitaxial grating FP (Fabry-Perot) cavity cascaded optical biochemical sensor chip | |
| CN203385661U (en) | Vernier effect-based optical biochemical sensor chip with double-micro-ring resonant cavity | |
| CN103293127A (en) | SOI (silicon-on-insulator)-based multi-slit optical waveguide grating FP (Fabry-Perot) cavity optical biochemical sensor chip | |
| CN203241339U (en) | Vernier effect based optical resonator biochemical sensor chip | |
| CN103293103B (en) | Extension grating FP chamber and micro-ring resonant cavity cascade connection type optics biochemical sensitive chip | |
| CN203705340U (en) | Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator | |
| CN103558183B (en) | MZ interference type optical biochemistry sensor chip embedded with FP cavity | |
| CN203479702U (en) | SOI (silicon-on-insulator)-based slit optical waveguide grating FP (Fabry-Perot) cavity optical biochemical sensor chip | |
| CN203385659U (en) | Vernier effect based optical biochemical sensor chip with double microring resonators | |
| CN103245636B (en) | A kind of enhancement mode slit light waveguide raster FP chamber optics biochemical sensitive chip | |
| CN104390939A (en) | Sensor and method for detecting refractive index of liquid in micro-fluid system | |
| CN103439317A (en) | Slit waveguide series grating FP cavity optical biochemical sensor chip | |
| CN203324180U (en) | SOI (silicon-on-insulator)-based multi-slit optical waveguide optical biochemical sensor chip adopting grating FP (Fabry-Perot) resonators | |
| CN103308479B (en) | A kind of based on cursor effect optical resonator biochemical sensitive chip | |
| CN103293129B (en) | Based on slit optical waveguide extension type grating FP chamber optics biochemical sensitive chip | |
| CN203465196U (en) | Vertical coupling Mach-Zehnder interference micro-ring resonant cavity optical biochemical sensing chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140108 Termination date: 20150516 |
|
| EXPY | Termination of patent right or utility model |