CN104390939A - Sensor and method for detecting refractive index of liquid in micro-fluid system - Google Patents
Sensor and method for detecting refractive index of liquid in micro-fluid system Download PDFInfo
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- CN104390939A CN104390939A CN201410782274.0A CN201410782274A CN104390939A CN 104390939 A CN104390939 A CN 104390939A CN 201410782274 A CN201410782274 A CN 201410782274A CN 104390939 A CN104390939 A CN 104390939A
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Abstract
The invention discloses a sensor and a method for detecting the refractive index of liquid in a micro-fluid system. The sensor is a novel functional device which is used in the micro-fluid system, and the size of output light power is changed under the influence of the refractive index of the liquid by utilizing the transmission and reflection degrees of a light beam in a wave guide at the interface position between the wave guide and a micro-fluid channel, so that the size of the refractive index of the liquid can be indirectly determined according to the output size of the light power. By ingeniously combining the basic principle, the sensor has the advantages that the light wave guide and the micro-fluid channel have a simple planar structure, the manufacturing process is simple, the refractive index of the liquid is convenient to test, and optical devices and micro-fluid functional devices can be integrated; according to the detection method, in the process of detecting the refractive index of the liquid by utilizing the sensor, the fluid channel is coplanar to a light path, and the testing process is greatly simplified; moreover, the testing process is slightly affected by an external environment due to co-planarity, so that the detection accuracy and the stability are improved.
Description
Technical field
The invention belongs to microfluid photonics and integrated optics field, relate to fiber waveguide device, being specifically related to a kind of sensor for detecting liquid refractivity in microfluid system and method.
Background technology
The basic operation units such as microfluid system is by sample preparation, the reaction involved by chemistry and the field such as biological, be separated, detection are integrated on the chip of a piece very little, network is formed by Micro Channel Architecture, fluid can be controlled and run through whole system, in order to replace a kind of technology platform of the various functions of conventional chemical or biology laboratory.Micro-fluidic chip (being also called chip lab) is the Typical Representative of microfluid system.Compared with conventional analytical techniques, microfluidic chip technology is the analytical technology platform of a kind of micro-and " entirely ", has that sample requirement is little, separation efficiency is high, analysis speed is fast, equipment volume is little, automaticity advantages of higher.
Microfluid photonics is the emerging cross discipline between Microfluidics and integrated optics, and its microfluid photonic device has huge applications market at numerous areas such as bio-sensing, chemical analysis, drug discoveries.Along with the development of microfluid photonics, adopt optical instrument to analyze, detect, diagnose the demand of sample in microfluid system more and more extensively, its precision is more and more higher, and its detection speed is more and more faster.Conventional optical instrument has spectral analysis, optical imagery etc.
Refractive index is the basic optical parameter that optoelectronic device must be considered in Design and manufacture process, equally, is also the important parameter realizing liquid ingredient analysis and the control of chemical-biological course of reaction.Refractive index is the inherent feature of reflection material, and it usually can be subject to the impact of physics, chemistry and biological effect and change, so realize being undoubtedly most convenient and direct approach to the sensing of various chemical quantity by refractometry.Usually, method for measuring liquid refractive has photometry, Ellipsometric, prism coupling etc., but, there is complex structure, design and fabrication difficulty, regulation and control poor stability in these methods, be subject to the shortcomings such as external environmental factor impact, and its direction of beam propagation and microfluid plane be not in same plane, be difficult to the effective integration realizing microfluid system and optical system.Based on this, explore have that structure is simple, performance good, be easy to design and fabrication for the liquid refractive index sensor in microfluid system, there is significant application value.
Summary of the invention
The object of this invention is to provide a kind of sensor for detecting liquid refractivity in microfluid system and method, this sensor is made up of deviation flexure type optical waveguide and microfluidic channel, light beam is at the generation transmission and reflection at the interface location place of waveguide and microfluidic channel, thus the luminous power of output waveguide port is decayed, utilize damping capacity to calculate and obtain liquid refractivity.
For detecting a sensor for liquid refractivity in microfluid system, comprise substrate 10, subtegulum 11, clad material layer 1, the deviation waveguide of S type and microfluidic channel 7;
Described clad material layer 1 is located between substrate 10 and subtegulum 11;
Described S type deviation waveguide and microfluidic channel 7 are located in described clad material layer 1;
Described microfluidic channel is provided with fluid inlet port 8 and fluid export port 9;
The waveguide of described S type deviation is made up of core material, comprises the light input straight wave guide 2, first be connected successively and is partial to the waveguide 4 of waveguide 3, second deflection, the 3rd deflection waveguide 5 and light output straight wave guide 6;
Wherein, the described first deflection side of waveguide and a side contacts of described microfluidic channel 7, and the first deflection waveguide 3 and light horizontal sextant angle input between straight wave guide 2 are θ, the second deflection waveguide 4 and the 3rd be partial to waveguide 5 input with light respectively straight wave guide 2 angle be in the horizontal direction 2 θ and θ;
0<θ<cos
-1(N
1/N
2)
Wherein, N
1and N
2represent the TE ripple equivalent refractive index in the non-waveguide band of position and waveguide region respectively; The described non-waveguide band of position refers to other bands of position not comprising the deviation waveguide of S type and microfluidic channel.
The described thickness of S type deviation waveguide in core material is the span of d, d is 0.5-2 μm.
Above the waveguide of described S type deviation, centre is provided with ridge, and ridge is high and ridge is wide is respectively h and w, and the span of h is the span of 0.5-1.5 μm, w is 4-8 μm.
The described thickness of S type deviation waveguide in core material is d, ridge height h and the wide w of ridge, can set, different physical dimensions, for measuring the liquid refractivity of different range according to actual needs.
Described core material and clad material are organic polymer material.
Described core material is SU-8.
Described clad material is polymeric material UV15.
A kind of method for detecting liquid refractivity in microfluid system, the sensor for detecting liquid refractivity in microfluid system described in employing, tested liquid is injected fluid inlet port 8, and tested liquid exports from fluid export port 9 through microfluidic channel; Utilize light source irradiation light to input straight wave guide, light signal is when the first deflection waveguide, and at the first deflection waveguide and microfluidic channel surface of contact generation reflection and transmission, reflected light is along S type deviation waveguide until light output straight wave guide exports; Transmitted light is by the liquid absorption in microfluidic channel;
The normalization luminous power that the ratio that the luminous power utilizing light output straight wave guide to export and light input the luminous power that straight wave guide inputs obtains contrasts the refractive index that refractive index calibration curve obtains fluid to be measured;
Wherein, the calibration curve of described sensor utilizes the liquid of known refractive index to input microfluidic channel in described sensor, by light source irradiation light input straight wave guide, go out to obtain the luminous power exported from light output straight wave guide, the normalization luminous power that the ratio that the luminous power and the light that export according to light output straight wave guide inputs the luminous power that straight wave guide inputs obtains, by liquid refractivity and the acquisition of normalization luminous power of correspondence.
The refractive index calibration curve of described sensor is relevant with the physical dimension of sensor, is the build-in attribute of sensor.
The light source of described irradiation light input straight wave guide to be wavelength the be near infrared light of 1.55 μm, and optical polarization is TE ripple.
Described S type deviation optical waveguide and microfluidic channel adopt optical lithography method to make.
Beneficial effect
A kind of sensor for detecting liquid refractivity in microfluid system that the present invention proposes and method, this sensor is a kind of for the new function device in microfluid system, utilize waveguide inner light beam in the generation transmission and reflection degree at the interface location place of waveguide and microfluidic channel, the impact of liquid body refractive index, change the luminous power size of output, thus can export by luminous power the size that size carrys out indirect determination liquid refractivity.Optical waveguide, cleverly in conjunction with this ultimate principle, is become to make simple planar structure with microfluidic channel by this sensor, manufacturing process is simple, test liquid refractive index time easy to operate, achieve the integrated of optical device and microfluid function element; Detection method of the present invention, utilize this sensor carry out liquid refractivity detect time, fluid passage plane and light path coplanar, significantly simplify test process, and be subject to external environment influence little due to the coplanar test process that makes, thus improve accuracy of detection and stability.
Accompanying drawing explanation
Fig. 1 is the planar structure schematic diagram of liquid refractive index sensor provided by the invention;
Fig. 2 is that liquid refractive index sensor provided by the invention carries out the schematic cross-section of subdivision along AA ' line in Fig. 1;
Fig. 3 is that liquid refractive index sensor provided by the invention carries out the schematic cross-section of subdivision along BB ' line in Fig. 1;
Fig. 4 is that the normalization luminous power of liquid refractive index sensor in embodiment exports with liquid refractivity variation relation;
Fig. 5 be in embodiment liquid refractive index sensor at the optical field distribution schematic diagram of liquid refractivity optical signal in communication process of different refractivity, wherein, a in (), liquid refractivity is 1.5436, in (b), liquid refractivity is 1.5636;
Fig. 6 is that the normalization luminous power of embodiment liquid refractive index sensor exports with operation wavelength variation relation schematic diagram, and wherein, solid line and dotted line express liquid refractive index are respectively 1.5436 and 1.5636.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described further.
As shown in Figure 1-Figure 3, a kind of sensor for detecting liquid refractivity in microfluid system, comprises substrate 10, subtegulum 11, clad material layer 1, the deviation waveguide of S type and microfluidic channel 7;
Described clad material layer 1 is located between substrate 10 and subtegulum 11;
Described S type deviation waveguide and microfluidic channel 7 are located in described clad material layer 1;
Described microfluidic channel is provided with fluid inlet port 8 and fluid export port 9;
The waveguide of described S type deviation is made up of core material, comprises the light input straight wave guide 2, first be connected successively and is partial to the waveguide 4 of waveguide 3, second deflection, the 3rd deflection waveguide 5 and light output straight wave guide 6;
Wherein, the described first deflection side of waveguide and a side contacts of described microfluidic channel 7, and the first deflection waveguide 3 and light horizontal sextant angle input between straight wave guide 2 are θ, the second deflection waveguide 4 and the 3rd be partial to waveguide 5 input with light respectively straight wave guide 2 angle be in the horizontal direction 2 θ and θ;
0<θ<cos
-1(N
1/N
2)
Wherein, N
1and N
2represent the TE ripple equivalent refractive index in the non-waveguide band of position and waveguide region respectively; The described non-waveguide band of position refers to other bands of position not comprising the deviation waveguide of S type and microfluidic channel.
In the present embodiment, the described thickness d of S type deviation waveguide in core material, ridge height h and the wide w of ridge are respectively 1.0 μm, 0.8 μm, 5.0 μm, and its deflection angle theta is 0.5 degree.
Described core material is SU-8, and refractive index is 1.575.
Described clad material is polymeric material UV15, refractive index 1.50.
The operation wavelength of the light signal selected is 1.55 μm, and its optical polarization is TE ripple.
Liquid refractivity scope to be detected is 1.530 ~ 1.580.
A kind of method for detecting liquid refractivity in microfluid system, the sensor for detecting liquid refractivity in microfluid system described in employing, tested liquid is injected fluid inlet port 8, and tested liquid exports from fluid export port 9 through microfluidic channel; Utilize light source irradiation light to input straight wave guide, light signal is when the first deflection waveguide, and at the first deflection waveguide and microfluidic channel surface of contact generation reflection and transmission, reflected light is along S type deviation waveguide until light output straight wave guide exports; Transmitted light is by the liquid absorption in microfluidic channel;
The normalization luminous power that the ratio that the luminous power utilizing light output straight wave guide to export and light input the luminous power that straight wave guide inputs obtains contrasts the refractive index that refractive index calibration curve obtains fluid to be measured;
Wherein, the calibration curve of described sensor utilizes the liquid of known refractive index to input microfluidic channel in described sensor, by light source irradiation light input straight wave guide, go out to obtain the luminous power exported from light output straight wave guide, the normalization luminous power that the ratio that the luminous power and the light that export according to light output straight wave guide inputs the luminous power that straight wave guide inputs obtains, by liquid refractivity and the acquisition of normalization luminous power of correspondence.
The light source of described irradiation light input straight wave guide to be wavelength the be near infrared light of 1.55 μm, and optical polarization is TE ripple.
Described S type deviation optical waveguide adopts optical lithography method to make.
Calculating for simplifying, adopting Effective Index Method that three-dimensional waveguide is equivalent to two-dimensional flat plate waveguide.1.5520 and 1.5336 are respectively at the equivalent refractive index of waveguide core layer and cladding regions.
In this example, beam propagation method (BPM) optical property to liquid refractive index sensor provided by the invention is adopted to simulate.When the refractive index of testing liquid changes between 1.530 ~ 1.580, the normalization luminous power of its output waveguide port exports with liquid refractivity change as shown in Figure 4.As seen from the figure, its luminous power exports and increases and monotonic decreasing with refractive index, and variable dynamic range is greater than 31dB.In addition, its optical waveguide loss is only 0.07dB.When the refractive index of liquid is respectively 1.5436 and 1.5636, in liquid refractive index sensor, optical field distribution is as shown in Fig. 5 (a) He (b), as seen from the figure, part Coupling power is in microfluidic channel, its luminous power being coupled to microfluidic channel is relevant with liquid refractivity size, namely liquid refractivity is larger, and its luminous power being coupled to microfluidic channel is higher.
Usually, there is certain spectrum width in incident optical signal, about tens ran, as optical communication system C is with window to be 1530nm ~ 1565nm.The present invention has investigated liquid refractive index sensor performance provided by the invention further to the dependence of its operation wavelength.This give analog result, as shown in Figure 6, represent that luminous power exports and change with operation wavelength.Analog result shows, its luminous power exports with operation wavelength change very little.Therefore, the wavelength dependency of this device is very low, and this is very useful for its practical application.
In Fig. 4 and Fig. 6, ordinate normalized optical power is normalization luminous power, horizontal ordinate n express liquid refractive index.
Claims (8)
1. one kind for detecting the sensor of liquid refractivity in microfluid system, it is characterized in that, comprise substrate (10), subtegulum (11), clad material layer (1), the deviation waveguide of S type and microfluidic channel (7);
Described clad material layer (1) is located between substrate (10) and subtegulum (11);
Described S type deviation waveguide and microfluidic channel (7) are located in described clad material layer (1);
Described microfluidic channel is provided with fluid inlet port (8) and fluid export port (9);
The waveguide of described S type deviation is made up of core material, comprises light input straight wave guide (2), the first deflection waveguide (3), the second deflection waveguide (4), the 3rd deflection waveguide (5) and the light output straight wave guide (6) that are connected successively;
Wherein, the described side of the first deflection waveguide (3) and a side contacts of described microfluidic channel (7), and first deflection waveguide (3) with light horizontal sextant angle input between straight wave guide (2) be θ, second be partial to waveguide (4) and the 3rd be partial to waveguide (5) input with light respectively straight wave guide (2) angle be in the horizontal direction 2 θ and θ;
0<θ<cos
-1(N
1/N
2)
Wherein, N
1and N
2represent the TE ripple equivalent refractive index in the non-waveguide band of position and waveguide region respectively; The described non-waveguide band of position refers to other bands of position not comprising the deviation waveguide of S type and microfluidic channel.
2. the sensor for detecting liquid refractivity in microfluid system according to claim 1, is characterized in that, the described thickness of S type deviation waveguide in core material is the span of d, d is 0.5-2 μm.
3. the sensor for detecting liquid refractivity in microfluid system according to claim 2, it is characterized in that, above the waveguide of described S type deviation, centre is provided with ridge, and ridge is high and ridge is wide is respectively h and w, the span of h is the span of 0.5-1.5 μm, w is 4-8 μm.
4. the sensor for detecting liquid refractivity in microfluid system according to any one of claim 1-3, it is characterized in that, described core material and clad material are organic polymer material.
5. the sensor for detecting liquid refractivity in microfluid system according to claim 4, is characterized in that, described core material is SU-8.
6. the sensor for detecting liquid refractivity in microfluid system according to claim 4, is characterized in that, described clad material is polymeric material UV15.
7. one kind for detecting the method for liquid refractivity in microfluid system, it is characterized in that, adopt the sensor for detecting liquid refractivity in microfluid system described in any one of claim 1-6, tested liquid is injected fluid inlet port 8, and tested liquid exports from fluid export port (9) through microfluidic channel; Utilize light source irradiation light to input straight wave guide, light signal is when the first deflection waveguide, and at the first deflection waveguide and microfluidic channel surface of contact generation reflection and transmission, reflected light is along S type deviation waveguide until light output straight wave guide exports; Transmitted light is by the liquid absorption in microfluidic channel;
The normalization luminous power that the ratio that the luminous power utilizing light output straight wave guide to export and light input the luminous power that straight wave guide inputs obtains contrasts the refractive index that refractive index calibration curve obtains fluid to be measured;
Wherein, the calibration curve of described sensor utilizes the liquid of known refractive index to input microfluidic channel in described sensor, by light source irradiation light input straight wave guide, go out to obtain the luminous power exported from light output straight wave guide, the normalization luminous power that the ratio that the luminous power and the light that export according to light output straight wave guide inputs the luminous power that straight wave guide inputs obtains, by liquid refractivity and the acquisition of normalization luminous power of correspondence.
8. the detection method for liquid refractivity in microfluid system according to claim 7, is characterized in that, the light source of described irradiation light input straight wave guide to be wavelength the be near infrared light of 1.55 μm, and optical polarization is TE ripple.
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Cited By (4)
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| CN105319645A (en) * | 2015-05-26 | 2016-02-10 | 湖南师范大学 | Waveguide dimmable power splitter on the basis of microfluidics technology |
| CN105823759A (en) * | 2016-06-15 | 2016-08-03 | 中国工程物理研究院材料研究所 | Surface plasma resonance sensor based on silicon optical waveguides on insulator |
| CN112816411A (en) * | 2021-01-04 | 2021-05-18 | 武汉大学 | Refractive index detection sensor, chip and method based on transmission loss of bent waveguide |
| CN113588599A (en) * | 2021-08-12 | 2021-11-02 | 苏州国溯科技有限公司 | 3D micro-lens cascading chip refractive index sensor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319645A (en) * | 2015-05-26 | 2016-02-10 | 湖南师范大学 | Waveguide dimmable power splitter on the basis of microfluidics technology |
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| CN112816411A (en) * | 2021-01-04 | 2021-05-18 | 武汉大学 | Refractive index detection sensor, chip and method based on transmission loss of bent waveguide |
| CN112816411B (en) * | 2021-01-04 | 2022-06-14 | 武汉大学 | Refractive index detection sensor, chip and method based on transmission loss of bent waveguide |
| CN113588599A (en) * | 2021-08-12 | 2021-11-02 | 苏州国溯科技有限公司 | 3D micro-lens cascading chip refractive index sensor |
| CN113588599B (en) * | 2021-08-12 | 2024-04-12 | 苏州国溯科技有限公司 | 3D microlens cascade chip refractive index sensor |
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