CN107478607A - A kind of integrated biochemical sensor based on ridge optical waveguide - Google Patents
A kind of integrated biochemical sensor based on ridge optical waveguide Download PDFInfo
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- CN107478607A CN107478607A CN201710623106.0A CN201710623106A CN107478607A CN 107478607 A CN107478607 A CN 107478607A CN 201710623106 A CN201710623106 A CN 201710623106A CN 107478607 A CN107478607 A CN 107478607A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
Abstract
A kind of integrated biochemical sensor based on ridge optical waveguide, it is included in the MZI detection chips that formation is processed on same soi wafer, structure of fiber_optic, multiple polymer cavitys, micro sprue system and the photodetector set in polymer cavity and detection circuit.MZI detection chips include ridge optical waveguide, media slot, sample cell, media slot beam splitter and media slot bundling device.Optical fiber couples with ridge optical waveguide, and ridge optical waveguide is coupled to photodetector and detection circuit.The light transmitted by the input of ridge optical waveguide resolves into two branch beams by media slot beam splitter, transmitted respectively along two waveguide arms, one waveguide arm is coupled to sample cell, its light beam realizes phase-modulation by the sample in sample cell, after two light beams output beam is merged into through media slot bundling device, by photodetector and detect the change of circuit probe light intensity and be converted into electric signal, realize to the sample detection in sample cell.The sensor is easy to process, compact-sized, high sensitivity, and cost is low.
Description
Technical field
The present invention relates to optics biochemical sensitive technical field, more particularly to a kind of integrated biochemical based on ridge optical waveguide passes
Sensor.
Background technology
With the rapid development of science and technology, continuous infiltration of the related discipline advanced technology to biomedical sector, biology
There is the phenomenon that more and more significantly produces a polarization in the development of medical test technology.On the one hand be all kinds of large automatics, high-performance,
High efficiency instrument and equipment is come out one after another, and substantially increases the operating efficiency of lab analysis detection；On the other hand it is then experiment
The miniaturization of instrument, portability, easy to operateization, result are promptly and accurately changed, and caused new biology doctor on this basis
Learn test mode, i.e. Point of Care Testing (POCT).
Most of integrated biochemical sensor interferometer structure length, coupling efficiency is low, is not easy to integrate.Generally, MZI is passed
Sensor is in order to reduce radiation loss, using low-angle y-branch structure, in order to obtain preferable phase-modulation as a result, it is desirable to very
Big overall dimensions；The waveguide MZI sensors of submicron order usually require to use grating coupled modes, it is impossible to directly using end face
Coupling, coupling efficiency are low；The mode that generally use is directly soaked when waveguide contacts with sample, is unfavorable for integrated system-on-chip.
The content of the invention
It is a primary object of the present invention to overcome the deficiencies in the prior art, there is provided a kind of integrated life based on ridge optical waveguide
Change sensor, can be with the direct efficient coupling of optical fiber, easy to process, high sensitivity, anti-electromagnetic-radiation, environment resistance are strong, easily
Integrated in being miniaturized, cost is cheap.
To achieve the above object, the present invention uses following technical scheme：
A kind of integrated biochemical sensor based on ridge optical waveguide, is included in the MZI that formation is processed on same soi wafer
(Mach-Zehnder interferometer, Mach-Zehnder interferometer) detection chip, structure of fiber_optic, it is bonded in the MZI inspections
Survey multiple polymer cavitys that the polymer of chip surface is formed, the miniflow formed by a part for the multiple polymer cavity
Road system and the photodetector set in another part of the multiple polymer cavity and detection circuit, the MZI inspections
Surveying chip includes ridge optical waveguide, sample cell, media slot beam splitter and media slot bundling device, and optical fiber is by described through structure of fiber_optic
With the end coupling of the input of the ridge optical waveguide, the ridge optical waveguide is two waveguides in propagation path top set
Arm, forms two light propagation passages, and the output end of the ridge optical waveguide is coupled to the photodetector and detection circuit, institute
A waveguide arm for stating ridge optical waveguide is coupled to the sample cell, and the micro sprue system connects the sample cell, for more
The sample changed in the sample cell, the light transmitted by the input of the ridge optical waveguide resolve into two by media slot beam splitter
Individual branch beam, a branch beam realize phase as reference signal, another branch beam by the sample in the sample cell
Position modulation, and output beam is merged into through the media slot bundling device respectively along after two waveguide arms propagation, from the ridged
Fiber waveguide output end outgoing, by the photodetector and detection circuit probe output intensity change and be converted into telecommunications
Number, realize to detection of the sample in the sample cell about composition or concentration.
Further：
The MZI detection chips are included in the first medium groove that formation is processed on the soi wafer, preferably air groove,
The first medium groove is engaged to form the media slot beam splitter with the T-shaped bifurcation of the ridge optical waveguide, with using entirely
Light beam is divided into two beams by internal reflection, is propagated respectively along described two light propagation passages and is completed sample detection.
The ridge optical waveguide has 90 ° of many places bending structure, and the MZI detection chips are included on the soi wafer
Process the multiple second medium grooves formed, preferably air groove, the bending place of the second medium groove and the ridge optical waveguide
It is engaged to change the direction of propagation of the light in MZI detection chips by predefined paths using total internal reflection, so that light is by described pre-
Determine propagated and complete sample detection.
One waveguide arm directly contacts with the sample in the sample cell.
Described two light propagation passages are symmetricly set on the both sides of the input/output terminal waveguide axis of the ridge optical waveguide.
The polymer is PDMS, it is preferred to use the micro-nano technology technique cavity formed therein that of impressing.
The ridge waveguide is single mode waveguide, the waveguides sections of the ridge optical waveguide protrude from the surface of base material and
In ridged.
The input end of the structure of fiber_optic and the ridge waveguide is in same axis, through soi wafer surface deep etching shape
Into size is suitable with single-mode fiber covering；Preferably, the photodetector is in the axis of the output end of the ridge waveguide
On.
The micro sprue system includes inlet, liquid feeding end liquid storage tank, liquid outlet and outlet end liquid storage tank, the inlet
The liquid feeding end liquid storage tank is connected, the liquid feeding end liquid storage tank connects the liquid feeding end of the sample cell, and the sample cell goes out liquid
End connects the outlet end liquid storage tank, and the outlet end liquid storage tank connects the liquid outlet；Preferably, by the fluid channel
The mode that negative pressure is produced in system realizes the circulation of liquid.
With multigroup the MZI detection chips, the micro sprue system and the photodetector and detection circuit, formed
Detected while array is to realize different samples.
Beneficial effects of the present invention：
The present invention is proposed with a kind of integrated biochemical sensor based on ridge optical waveguide, the sensor detection sensitivity
Height, anti-electromagnetic-radiation, environment resistance are strong, easy to process, and cost is cheap, are easy to be miniaturized integrated.When sample in sample cell
When concentration or composition change, the effective refractive index of former waveguide arm is changed so that the phase difference of two waveguide arms changes
Become, in output end because interference causes output intensity that significant change occurs, the change of light intensity is detected by the sensor to be obtained
Know sample variation.Present invention employs the transmission that ridge optical waveguide is used for light field, it is preferable that coordinates the beam splitter based on air groove
And bending structure, the beam splitting of light intensity and the change of the direction of propagation in feasible system, light beam splitting can ensure the phase of two-beam
The uniformity of position, amplitude and polarization direction so that outgoing luminous energy forms stable interference.Above structure design and processing can be micro-
Meter level is other, can carry out mass production by the micro-nano technology technique of maturation.Coordinate the fluid channel for being bonded in detection chip surface
And structure of fiber_optic, photodetector, it is possible to achieve the detection of sample.If in addition, carrying out array to chip, optimize fluid channel
Structure, it can carry out monitoring while different samples simultaneously, the detecting system after array can also be realized real using monochromatic source
Existing quantitative analysis.
Brief description of the drawings
Fig. 1 is miniature a kind of embodiment of MZI multi-channel biochemicals sensing and detecting system of the invention based on ridge optical waveguide
Structural representation；
Fig. 2 is miniature a kind of embodiment of MZI multi-channel biochemicals sensing and detecting system of the invention based on ridge optical waveguide
Top view；
Fig. 3 is the heavy in section ridge optical waveguide schematic cross-section in an embodiment of the present invention；
Fig. 4 is the MZI multi-channel biochemical sensing and detecting system schematic diagrames of example 1.
Fig. 5 is the MZI multi-channel biochemical sensing and detecting system schematic diagrames of the array of example 2.
Embodiment
Embodiments of the present invention are elaborated below.It is emphasized that what the description below was merely exemplary,
The scope being not intended to be limiting of the invention and its application.
Refering to Fig. 1 to Fig. 5, in one embodiment, a kind of integrated biochemical sensor based on ridge optical waveguide, it is included in
The MZI detection chips of formation and structure of fiber_optic 1 are processed on same soi wafer, is bonded in polymerizeing for the MZI detection chips surface
Multiple polymer cavitys that thing 10 is formed, by the micro sprue system that is formed of a part of the multiple polymer cavity and described
The photodetector and detection circuit 9, the MZI detection chips set in another part of multiple polymer cavitys includes ridged
Fiber waveguide 3, sample cell 8, media slot beam splitter 2 and media slot bundling device 5, optical fiber is by described through structure of fiber_optic 1 and the ridge
The end coupling of the input of shape fiber waveguide 3, the output end of the ridge optical waveguide 3 are coupled to the photodetector and detection
Circuit 9, a waveguide arm of the ridge optical waveguide 3 are coupled to the sample cell 8, and the micro sprue system connects the sample
Pond 8, for changing the sample in the sample cell 8, the light transmitted by the input of the ridge optical waveguide 3 passes through the medium
Groove beam splitter 2 resolves into two branch beams, and a branch beam is as reference signal, and another branch beam is by the sample
Sample in pond realizes phase-modulation, and is merged into one through media slot bundling device 5 respectively along after two waveguide arms propagation
Beam, it is emitted from the output end of the ridge optical waveguide 3, is radiated on the photodetector and detection circuit 9, passes through the light
The change that electric explorer and detection circuit 9 detect light intensity is simultaneously converted into electric signal, realize it is relevant to sample in the sample cell 8 into
Point or concentration detection.
In a preferred embodiment, the MZI detection chips are included in the first medium that formation is processed on the soi wafer
Groove, preferably air groove, the first medium groove are engaged to form the medium with the T-shaped bifurcation of the ridge optical waveguide 3
Groove beam splitter 2, so that light beam is divided into two beams using total internal reflection, is propagated respectively along described two light propagation passages and complete sample
Product examine is surveyed.
In a preferred embodiment, the ridge optical waveguide 3 has 90 ° of many places bending structure, the MZI detection chips bag
Include multiple second medium grooves 4 that formation is processed on the soi wafer, preferably air groove, the first medium groove 4 with it is described
The bending place of ridge optical waveguide 3 is engaged to change propagation of the light in MZI detection chips by predefined paths using total internal reflection
Direction, so that light is propagated by the predefined paths and completes sample detection.
In a preferred embodiment, a waveguide arm directly contacts with the sample in the sample cell 8, more preferably from
The waveguide arm passes through out of described sample cell 8.
In a preferred embodiment, described two light propagation passages are symmetricly set on the input and output of the ridge optical waveguide
Hold the both sides of waveguide axis.
In a preferred embodiment, the polymer is PDMS, and the micro-nano technology technique of impressing can be used formed therein that
Cavity.
In a preferred embodiment, the ridge waveguide is single mode waveguide.The waveguides sections of the ridge optical waveguide 2 protrude
In the surface of base material be in ridged, as shown in Figure 3.
In a preferred embodiment, the structure of fiber_optic 1 passes through with the input end of the ridge waveguide in same axis
Soi wafer surface deep etching is formed, and size is suitable with single-mode fiber covering；
In a preferred embodiment, the photodetector is on the axis of the output end of the ridge waveguide.
In a preferred embodiment, the micro sprue system includes inlet, liquid feeding end liquid storage tank 6, liquid outlet and goes out liquid
Liquid storage tank 7 is held, the inlet connects the liquid feeding end liquid storage tank 6, and the liquid feeding end liquid storage tank 6 connects the sample cell 8
Liquid feeding end, the outlet end of the sample cell 8 connect the outlet end liquid storage tank 7, the outlet end liquid storage tank 7 connect it is described go out liquid
Mouthful.
In a preferred embodiment, the stream of fluid sample is realized by way of producing negative pressure in the micro sprue system
It is logical.
In a preferred embodiment, the integrated biochemical sensor has multigroup MZI detection chips, the fluid channel
System and the photodetector and detection circuit, are detected while forming array to realize different samples.
The specific embodiment of the present invention is further described below in conjunction with accompanying drawing.
Refering to Fig. 1 to Fig. 5, the integrated biochemical sensor based on ridge optical waveguide include by ridge optical waveguide 3, air groove,
MZI detection chips, micro sprue system, structure of fiber_optic 1, photodetector and the detection circuit 9 that sample cell 8 is formed.The MZI inspections
Survey chip, structure of fiber_optic 1 is the microstructure processed in same dielectric substrate on silicon (SOI) silicon chip；Micro sprue system exists
It is bonded in the polymer cavity body of chip surface, photodetector array and detection circuit are equally in the cavity of above-mentioned polymer
It is interior.The change of sample concentration in sample cell 8 or composition can be converted into the change of output intensity by the biochemical detection system, pass through
Photodetector can detect the change of light intensity, and then obtain the change of sample in sample cell 8.The detecting system can directly with band
The LASER Light Source and photodetector of single-mode fiber are used cooperatively, and pass through array, it is possible to achieve are examined while different samples
Survey.Ridge waveguide is single mode waveguide in the MZI detection chips.The hollow tank structure of MZI detection chips is utilized in complete
Beam splitter and bending waveguiding structure are realized in reflection, and light beam can be divided into two beams by beam splitter, the light intensity after beam splitting with beam splitter with
The relative position of ridge optical waveguide 3 changes, and bending waveguiding structure is used to change transmission direction of the light in chip, the change in direction by
Waveguide and air groove axis relative angle determine.The structure of fiber_optic 1 and ridge waveguide input end are easy to pair in same axis
Standard, formed through SOI pieces surface deep etching, size is suitable with single-mode fiber covering, can be packaged with the aggregation of bonding.
The polymer for being bonded in MZI detection chips surface is PDMS (dimethyl silicone polymer), can use the micro-nano of impressing
Processing technology cavity formed therein that, the PDMS after processing are bonded in detection chip surface.The fluid channel is in polymer cavity
In vivo, fluid channel has inlet and liquid outlet, and liquid storage tank, and the circulation of liquid can be carried out by producing negative pressure in runner,
Micro sprue system is used to change the sample in sample cell 8.Photodetector is on the axis of ridge waveguide output end, can be passed through
Polymer is packaged.
The integrated biochemical sensor directly can be used cooperatively with the LASER Light Source with single-mode fiber and photodetector, and logical
Cross array, it is possible to achieve detected while different samples.
As depicted in figs. 1 and 2, the light that light source is sent is through optical fiber at structure of fiber_optic 1 and the input end face coupling of ridge optical waveguide 3
After conjunction, light field is transmitted into detection chip.Beam is punished in media slot beam splitter 2, after bending waveguide 4 changes transmission direction respectively
By two waveguide arms, wherein a waveguide arm directly contacts with the sample in sample cell 8, light is after reflection along ridged light wave
Export is penetrated, and is radiated at photodetector and detection circuit 9, is completed transformation of the optical signal to electric signal.
Further illustrated below in conjunction with example：
Example 1
It it is 10 μm from top layer silicon thickness, insulating barrier silicon oxide thickness is 2 μm, and substrate silicon thickness is 475 μm of insulator
Upper silicon (SOI) is used as manufacture material.By deep UV lithography and inductively coupled plasma dry etching obtain ridge waveguide with
And air slot structure.As shown in figure 4, input tunable laser, single-mode fiber is coordinated to form real-time protein solution concentration
Detecting system, by demarcation, exiting light beam intensity, test sample protein concentration are measured by photodetector.
Example 2
As shown in figure 5, to said detecting system carry out array, have multiple integrated biochemical sensors (MZI sensors 1,
MZI sensors 2, MZI sensors 3 ... MZI sensors n)；Tunable laser can be replaced using mono-colour laser, and provided
The light λ of multi-wavelength1、λ2、λ3……λn.Meanwhile with the use of multiple photoelectric detector PDs 1, PD2, PD3 ... PDn.Pass through
The array of detecting system, the measurement of determinand output intensity is realized, solution is changed and carries out quantitative analysis.
Above content is to combine specific/preferred embodiment further description made for the present invention, it is impossible to is recognized
The specific implementation of the fixed present invention is confined to these explanations.For general technical staff of the technical field of the invention,
Without departing from the inventive concept of the premise, it can also make some replacements or modification to the embodiment that these have been described,
And these are substituted or variant should all be considered as belonging to protection scope of the present invention.
Claims (10)
1. a kind of integrated biochemical sensor based on ridge optical waveguide, it is characterised in that be included on same soi wafer and process shape
Into MZI detection chips, structure of fiber_optic, be bonded in the MZI detection chips surface polymer formed multiple polymer cavities
Body, by the micro sprue system that is formed of a part of the multiple polymer cavity and in another portion of the multiple polymer cavity
The photodetector and detection circuit, the MZI detection chips set in point includes ridge optical waveguide, sample cell, media slot point
Beam device and media slot bundling device, optical fiber by the end coupling through structure of fiber_optic Yu the input of the ridge optical waveguide,
The ridge optical waveguide is two waveguide arms in propagation path top set, forms two light propagation passages, the ridge optical waveguide
Output end be coupled to the photodetector and detection circuit, a waveguide arm of the ridge optical waveguide is coupled to the sample
Product pond, the micro sprue system connects the sample cell, for changing the sample in the sample cell, by the ridge optical waveguide
The light of input transmission resolve into two branch beams by media slot beam splitter, a branch beam as reference signal,
Another branch beam realizes phase-modulation by the sample in the sample cell, and through institute after being propagated respectively along two waveguide arms
State media slot bundling device and be merged into output beam, be emitted from the output end of the ridge optical waveguide, by the photodetector and
Detect the change of circuit probe output intensity and be converted into electric signal, realize to the relevant composition of sample or concentration in the sample cell
Detection.
2. integrated biochemical sensor as claimed in claim 1, it is characterised in that the MZI detection chips are included in the SOI
Process the first medium groove of formation, preferably air groove on silicon chip, T-shaped point of the first medium groove and the ridge optical waveguide
It is engaged to form the media slot beam splitter at branch, so that light beam is divided into two beams using total internal reflection, is passed along described two light
Passage is broadcast to propagate respectively and complete sample detection.
3. the integrated biochemical sensor as described in any one of claim 1 to 2, it is characterised in that the ridge optical waveguide has
90 ° of many places bending structure, the MZI detection chips are included in multiple second medium grooves that formation is processed on the soi wafer, excellent
Elect air groove as, the second medium groove is engaged with the bending place of the ridge optical waveguide to utilize total internal reflection by predetermined road
Footpath changes the direction of propagation of the light in MZI detection chips, so that light is propagated by the predefined paths and completes sample detection.
4. the integrated biochemical sensor as described in any one of claims 1 to 3, it is characterised in that the waveguide arm and the sample
Sample in product pond directly contacts.
5. the integrated biochemical sensor as described in any one of Claims 1-4, it is characterised in that described two light propagation passages
It is symmetricly set on the both sides of the input/output terminal waveguide axis of the ridge optical waveguide.
6. the integrated biochemical sensor as described in any one of claim 1 to 5, it is characterised in that the polymer is PDMS, excellent
Choosing is using the micro-nano technology technique cavity formed therein that imprinted.
7. the integrated biochemical sensor as described in any one of claim 1 to 6, it is characterised in that the ridge waveguide is single mode
Waveguide, the waveguides sections of the ridge optical waveguide protrude from the surface of base material and are in ridged.
8. the integrated biochemical sensor as described in any one of claim 1 to 7, it is characterised in that the structure of fiber_optic with it is described
The input end of ridge waveguide is formed, size is suitable with single-mode fiber covering in same axis through soi wafer surface deep etching；
Preferably, the photodetector is on the axis of the output end of the ridge waveguide.
9. the integrated biochemical sensor as described in any one of claim 1 to 8, it is characterised in that the micro sprue system includes
Inlet, liquid feeding end liquid storage tank, liquid outlet and outlet end liquid storage tank, the inlet connects the liquid feeding end liquid storage tank, described
Liquid feeding end liquid storage tank connects the liquid feeding end of the sample cell, and the outlet end of the sample cell connects the outlet end liquid storage tank, institute
State outlet end liquid storage tank and connect the liquid outlet；Preferably, realized by way of producing negative pressure in the micro sprue system
The circulation of liquid.
10. the integrated biochemical sensor as described in any one of claim 1 to 9, it is characterised in that there is multigroup MZI inspections
Chip, the micro sprue system and the photodetector and detection circuit are surveyed, forms array to realize the same of different samples
When detect.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710623106.0A CN107478607A (en) | 2017-07-27 | 2017-07-27 | A kind of integrated biochemical sensor based on ridge optical waveguide |
| PCT/CN2017/098663 WO2019019241A1 (en) | 2017-07-27 | 2017-08-23 | Integrated biochemical sensor based on rib optical waveguide |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710623106.0A CN107478607A (en) | 2017-07-27 | 2017-07-27 | A kind of integrated biochemical sensor based on ridge optical waveguide |
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| WO (1) | WO2019019241A1 (en) |
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| CN109765178A (en) * | 2018-05-30 | 2019-05-17 | 京东方科技集团股份有限公司 | A kind of micro-fluidic device, driving method and micro-fluidic detection system |
| CN109765178B (en) * | 2018-05-30 | 2020-04-21 | 京东方科技集团股份有限公司 | Microfluidic device, driving method and microfluidic detection system |
| US11383237B2 (en) | 2018-05-30 | 2022-07-12 | Boe Technology Group Co., Ltd. | Microfluidic device, driving method and microfluidic detection system |
| CN110018136A (en) * | 2019-04-16 | 2019-07-16 | 江苏集萃智能传感技术研究所有限公司 | A kind of biomolecule test chip and detection system based on optofluidic |
| CN112098768A (en) * | 2019-05-30 | 2020-12-18 | 上海新微技术研发中心有限公司 | Method and equipment for testing silicon optical chip |
| CN114096829A (en) * | 2019-07-10 | 2022-02-25 | ams有限公司 | Photothermal gas detector including integrated on-chip optical waveguide |
| CN111671415A (en) * | 2020-06-01 | 2020-09-18 | 天津大学 | Bioelectric signal detection system based on thermo-optic effect |
| CN111671415B (en) * | 2020-06-01 | 2023-09-12 | 天津大学 | Bioelectric signal detection system based on thermo-optical effect |
| CN113109276A (en) * | 2021-03-04 | 2021-07-13 | 宁波大学 | Turbidity detection micro-nano optical sensor and manufacturing and detection method thereof |
| CN113155760A (en) * | 2021-04-02 | 2021-07-23 | 宁波大学 | Spectrophotometric detection sensor |
| CN113155760B (en) * | 2021-04-02 | 2022-11-15 | 宁波大学 | Spectrophotometric detection sensor |
| CN113740300A (en) * | 2021-08-27 | 2021-12-03 | 电子科技大学 | On-chip optical acetone gas sensor and preparation process and application thereof |
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