CN203705340U - Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator - Google Patents
Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator Download PDFInfo
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- CN203705340U CN203705340U CN201320465697.0U CN201320465697U CN203705340U CN 203705340 U CN203705340 U CN 203705340U CN 201320465697 U CN201320465697 U CN 201320465697U CN 203705340 U CN203705340 U CN 203705340U
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Abstract
The utility model proposes an optical biochemical sensor chip of an FP cavity embedded into a micro-ring resonator to solve the problem of detection of a few of biochemistry matters. The chip comprises an input/output straight waveguide and a first resonant cavity on a monocrystalline silicon layer of an SOI substrate; the first resonant cavity is the micro-ring resonator formed by an annular waveguide; the annular waveguide of the micro-ring resonator also comprises an optical grating FP cavity; the optical grating of the FP cavity is etched on the annular waveguide of the micro-ring resonator. By adopting the structure, the volume of the optical biochemical sensor chip disclosed by the utility model is reduced under the condition that the same sensing property is achieved, microminiaturization of the optical biochemical sensor chip and an on-chip sensing system are achieved, and the optical biochemical sensor chip can be applied to biomacromolecule (protein or DNA) liquid sample detection or gas molecule detection. Compared with other biochemical sensor chips, the optical biochemical sensor chip has a series of characteristics of standardized fabrication process, integration convenience, excellent sensing property, broad application range, and the like.
Description
Technical field
The utility model relates to the detection technique to the specific chemistry such as gas molecule or biomolecule or biological substance, is specifically related to optical sensing field, particularly the optics biochemical sensitive chip in the embedded FP of micro-ring resonant cavity chamber.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is for measuring specific chemistry or biological substance.Owing to measuring, these chemistry or biological substance are significant in environmental monitoring, diseases monitoring and medicament research and development, so the research of biochemical sensor has been seemed to extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and the large class of unmarked type optics biochemical sensor two, from the document of being correlated with, although fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but have that equipment is huge, complicated operation and the shortcoming such as spended time is long, and conventionally need to there is special messenger's operation of certain professional technique, universal cost is higher, meanwhile, also likely affect the detection of sample for the fluorescence molecule of mark.Comparatively speaking, the size of unmarked type optics biochemical sensor is less, and cost is lower, and application process is also more convenient, and in measuring process, no longer introduces new interference, and result is also more reliable.
Based on SOI(Silicon-On-Insulator, the silicon in dielectric substrate) optics biochemical sensor be exactly a kind of unmarked type optics biochemical sensor, the also study hotspot of this area just simultaneously.From the existing optics biochemical sensor based on SOI, mostly adopt evanescent wave (disappearance ripple) detection principle, evanescent wave refers to a kind of electromagnetic wave producing on the interphase of two kinds of different mediums due to total reflection, its amplitude is with being exponential form decay with the increase of the perpendicular degree of depth of interphase, and the evanescent wave by detecting described optics biochemical sensor optical waveguide is to survey sample biochemical.Its principle is that biochemical in sample to be tested can cause the change (showing as the variation of the effective refractive index of optics biochemical sensor) of light wave transmissions character in optics biochemical sensor, is also about to make the biochemical concentration signal in sample to be converted to change in optical signal.There have been at present the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration for the planar waveguiding structure of sensing.Wherein, to based on optical resonator structures (as FP chamber, ring cavity etc.) optics biochemical sensor, the introducing of resonance effect can make light signal constantly resonance and amplification in resonator cavity, therefore be equivalent to optics biochemical sensor and survey the increase of length, more can cause that the change in optical signal such as phase place (or intensity) are to detectable value, and then realization reaches good sensing capabilities on compact sized optical biochemical sensor, the miniaturization that undersized optics biochemical sensor is also convenient to optics biochemical sensor system is in addition with microminiaturized, to effectively reduce system cost.
In addition, the optics biochemical sensor based on cursor effect is proposed gradually by people in recent years, and this sensor is to utilize two sensing subsystems with different Free Spectral Ranges, forms a new sensor-based system.The principle of work of this new sensor-based system is: due to Free Spectral Range (FSR) difference of two subsystem, therefore, the Free Spectral Range of whole sensor-based system should be the lowest common multiple of the Free Spectral Range of two subsystems.Therefore, this sensor has very large Free Spectral Range and very large measurement range.
Existing to the detection technique field of the specific chemistry such as gas molecule or biomolecule or biological substance in, almost do not have at the example that the advantages such as the advantage of the Miniaturizable of the SOC (system on a chip) based on SOI and the measuring precision based on cursor effect are combined.
Utility model content
The purpose of this utility model is the detection problem in order to solve some biochemical, on the basis of the biochemical sensor based on optical detection of main flow, has proposed a kind of based on cursor effect optical resonator biochemical sensitive chip in the prior art.
To achieve these goals, the technical solution of the utility model is: the optics biochemical sensitive chip in the embedded FP of micro-ring resonant cavity chamber, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises input straight wave guide, straight wave guide output and the first resonator cavity, described the first resonator cavity is the micro-ring resonant cavity that ring-type waveguide forms, described micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively, in the ring-type waveguide of micro-ring resonant cavity, also comprise grating FP chamber, described grating FP chamber comprises the first grating and the second grating, described the first grating and the second grating are etched in the ring-type waveguide of described micro-ring resonant cavity, described micro-ring resonant cavity has not identical Free Spectral Range with grating FP chamber, the two optical coupled connects, described the first optical resonator and the second optical resonator are all grating FP chamber.
The beneficial effects of the utility model: the monocrystalline silicon layer of optics biochemical sensitive chip of the present utility model by top forms the different but optical resonator (micro-ring resonant cavity and FP chamber) that is coupled of two Free Spectral Ranges, the impact for detection of external substance on light signal.Especially, an optical resonator of this sensing chip employing embeds another optical resonator structures and reaches coupling condition, utilize its resonance effect, make under the condition that reaches identical sensing capabilities, greatly reduce the volume of optics biochemical sensitive chip, be conducive to realize sensor-based system on the microminiaturization of optics biochemical sensor and sheet.Taking SOI material as matrix, can utilize ripe microelectronics CMOS processing technology, make this optics biochemical sensitive chip be easy to large-scale mass production, be conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be used for biomacromolecule (protein or DNA) liquid sample to be surveyed, and also can be used for gas molecule and detects.Therefore, the utility model, compared with other biochemical sensitive chip, has manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of features such as applied widely.
Brief description of the drawings
Fig. 1 is the structural representation of the optics biochemical sensitive chip of the utility model embodiment;
Fig. 2 is the viewgraph of cross-section of the optics biochemical sensitive chip of the utility model embodiment;
Fig. 3 is the biochemical sensitive system architecture schematic diagram that optics biochemical sensitive chip of the present utility model forms.
Description of reference numerals: input straight wave guide 1, coupled zone waveguide 2, the first resonator cavitys 3, grating FP chamber 4, the first grating 41, the second gratings 42, straight wave guide output 5, silicon base layer 61, silicon dioxide layer 62, monocrystalline silicon layer 63,
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
As depicted in figs. 1 and 2, the optics biochemical sensitive chip in the embedded FP of the micro-ring resonant cavity chamber of the present embodiment, comprise the SOI matrix that the silicon base layer 61, silicon dioxide layer 62 and the monocrystalline silicon layer 63 that stack gradually bonding from bottom to top forms, the monocrystalline silicon layer of described SOI matrix comprises input straight wave guide 1, straight wave guide output 5 and the first resonator cavity 3.The micro-ring resonant cavity that wherein the first resonator cavity 3 forms for ring-type waveguide, this micro-ring resonant cavity is of coupled connections by coupled zone waveguide 2 with input straight wave guide and straight wave guide output respectively, in the ring-type waveguide of micro-ring resonant cavity, also comprise grating FP chamber 4, described grating FP chamber 4 comprises the first grating 41 and the second grating 42, described the first grating 41 and the second grating 42 are etched in the ring-type waveguide of micro-ring resonant cavity, described micro-ring resonant cavity has not identical Free Spectral Range with grating FP chamber 4, the two optical coupled connects, described the first optical resonator and the second optical resonator are all grating FP chamber.Optical resonator (the first resonator cavity and grating FP chamber) has the effect of frequency-selecting, the not identical Free Spectral Range of two above optical resonators refers to that the corresponding Free Spectral Range of micro-ring resonant cavity and grating FP chamber (spacing of adjacent resonance wavelength) is not identical, and object is to make can increase by the cursor effect forming in the time that two described optical resonators are coupled connection the sensing scope and the measuring accuracy that improves chip of chip.Because the sensor application based on cursor effect has been the prior art of sensor technical field, definite basic general knowledge that has also just become those of ordinary skill in the art of the free wavelength coverage of two resonator cavity, can determine by limited experiment according to actual needs, therefore do not describe in detail at this.Described optical coupled connects and refers to by technology such as Interface Matching and structure docking and realize two described optical resonators are interconnected, and two optical resonators after making to be of coupled connections meet the requirement that light signal freely transmits at the two.For two optical resonators that are coupled by this kind of mode, only have those light waves that simultaneously meet micro-ring resonant condition and FP chamber condition of resonance just can be coupled into transmission and generation micro-ring resonant transmission and generation FP resonance in FP resonator cavity in micro-ring resonant cavity, thereby increase the effective coverage of light and interaction between substances, strengthen the intensity of light and interaction between substances, under device microsize, realize highly sensitive detection.Meanwhile, in the output spectrum of the cursor effect sensor of this micro-ring resonant cavity that is embedded with FP chamber, the distance of adjacent two crests is the product of micro-ring resonant cavity and FP resonator cavity Free Spectral Range separately.
In the above-described embodiments, micro-ring resonant cavity and the object of the coupling in grating FP chamber are to make the two pass through that certain mode is connected and in the time of frequency-selecting, form cursor effect.Can reach the grating FP chamber of this kind of object and the connected mode of micro-ring resonant cavity is all contained among the coupling scheme of grating FP chamber of the present utility model and micro-ring resonant cavity.
For making the scheme of utility model clearer and more definite, a kind of coupled structure that realizes micro-ring resonant cavity and grating FP chamber in above-described embodiment is below specifically provided, be specially, first grating in grating FP chamber and the second grating are etched in the waveguide of micro-ring resonant cavity ring-type, and in the center line connecting direction of described the first grating and the second grating and ring-type waveguide, this section of wave guide direction is consistent.
Further, the grating provision width of first grating in grating FP chamber and the second grating equals the duct width of ring-type waveguide.Described the first grating and at intervals d identical with the second optical grating construction, describedly determines according to light signal wave band and grating parameter apart from d.Grating FP chamber for the selection of wavelength, utilizes the resonance effect in grating FP chamber in the scheme of the present embodiment, can under device microsize condition, realize and allow light fully contact with material, improves sensing capabilities.Because using prior art, those of ordinary skill in the art can easily determine the structural parameters apart from d and grating according to the condition of resonance of the phase condition of grating and FP resonator cavity, therefore no further details to be given herein.Concrete, first grating 41 of the present embodiment or the second grating 42 comprise and are no less than 5 no more than 30 periodic units.The cycle of described grating periodic unit refers to the longitudinal length value of one-period unit, is preferably in the present embodiment arbitrary value of 0.3um～0.7um.Further, arbitrary value that the dutycycle of the grating periodic unit in the present embodiment is 30%～80%, the dutycycle here refers to that the width that forms the groove that is etched in grating periodic unit accounts for the ratio of whole grating periodic unit longitudinal length in the present embodiment.The degree of depth of groove of being etched in grating periodic unit is 50%～100% of monocrystalline silicon layer thickness.The ratio that the lateral length of grating periodic unit accounts for rectangular base width is 1:1.Wherein, the common practise that is laterally described as those of ordinary skill in the art with the direction such as longitudinal of the grating periodic unit relating to, be the clearly form of presentation of this area acquiescence, the parameter restriction nature of using it for technical scheme in utility model scheme is also clearly.
Biochemical sensor is mainly used in biomacromolecule as the detection of DNA or protein detection etc. and military upper toxic gas or virus.Below in conjunction with concrete application, embodiment of the present utility model is described in further detail:
Be applied to detect and in unknown sample, whether contain certain we wish the material detecting or detect in unknown sample to contain which material, the selectivity difference that this requires sensor to have different material, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, in the time that certain has specific biomacromolecule and enters into sensor fluid passage and flow through sensing chip with fluid sample, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then the resonance wavelength of sensor is also drifted about, demonstrate this variation by data processing, can infer in sample to be tested, whether to contain that we want to contain those materials in the test substance surveyed or sample certain,
Be applied to and in known sample to be tested, contain certain material, want now to measure the concentration of this material in sample and be how many, in this case, first we configure a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that meets resonance wavelength is inputted into and gone forward side by side micro-ring resonant cavity from the port of the input straight wave guide of top, from the resonance effect of micro-ring resonant cavity, in the time of the light wave integral multiple that after round a week, the optical path difference of generation is wavelength in resonator cavity, light wave can mutually be interfered and produce resonance enhancement effect with the light wave that is newly coupled into micro-ring resonant cavity, light can shake back and forth in resonator cavity, thereby increase the length of light and interaction between substances and strengthened the intensity of light and interaction between substances.Two forms with different Free Spectral Range resonator cavity cascades that we adopt, it is very large that the Free Spectral Range of whole system can become, and be the lowest common multiple of the Free Spectral Range of two resonator cavitys, thereby we can realize large-scale detection.Photodetector is surveyed the intensity size of output optical signal, obtain corresponding resonance wavelength simultaneously, then allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element, because variation has occurred the concentration of solution, the effective refractive index of sensing chip changes, and then the resonance wavelength of sensor is also drifted about, by measure the light signal of output waveguide port and in addition data processing can obtain the spectrogram of output optical signal, and then obtain position and the corresponding resonance wavelength of harmonic peak after drift, according to the relative size of resonance wavelength drift value, we can determine the concentration of certain material in analysans, thereby realize sensor function as scheduled.And the coupling scheme that a resonator cavity embedded to another resonator cavity that adopt, for the further miniaturization of device provides wider space.
Figure 3 shows that the optics biochemical sensitive system architecture schematic diagram of the optics biochemical sensitive chip (being illustrated as photon sensor chip) based on embodiment of the present utility model, comprise sensor chip (photon sensor chip), photodetector, laser instrument, temperature controller and computer control part, also comprise simultaneously and control the Micropump of fluid to be measured input and inject valve, analysans enters sensing chip by injecting valve, after the sensing chip of flowing through, is collected as waste liquid.To describe in detail by the course of work to this sensor-based system below, so that principle and the interaction energy of the optics biochemical sensitive chip in the embedded FP of micro-ring resonant cavity of the present utility model chamber are better understood: when this sensor-based system work (analyzing) in conjunction with the embodiments, first flashlight emits from laser instrument, enter into sensing chip by photo-coupler, the impact of the performance for fear of temperature on sensor, we have installed temperature controller in the slit optical waveguide of sensor, are used for to sensor heating or refrigeration (monitoring temperature).In the time that flashlight transmits in sensor, the light that meets raster phase condition is nearly all reflected back, but the grating that design is here weak reflection grating, the light that meets raster phase condition only has part to be reflected back, a part still can transmissive and is entered into the first optical resonator (micro-ring resonant cavity) in addition, the light that the part that enters into the first optical resonator meets raster phase condition will be continued to reflect back by the second optical resonator (grating FP chamber), by the light of the second optical resonance cavity reflection will with again see through the light that the part that enters of the first optical resonator meets optical resonator condition of resonance and interfere, in optical resonator, incident light and reflected light can interfere and shake, thereby form a series of harmonic peak.These resonance signals from the first optical resonator outgoing can enter into the second optical resonator subsequently, Analysis on action mechanism is the same, the Free Spectral Range difference of the harmonic peak forming due to two resonator cavitys, so the resonance signal of the first optical resonator outgoing will be modulated by the second optical resonator, thereby it is very wide to export a kind of Free Spectral Range at senser element output port, the tuning curve that quality factor is very high.When analysans sample is injected into microfluidic channel by Micropump, and while reaching the top covering of sensor chip, sample can make sensor surrounding environment change, cause the effective refractive index of sensor to change, and then the harmonic peak of sensor output port can be drifted about, we are by measuring this variation at the photodetector of sensor output port, and the data of distribution of light intensity are delivered in computing machine and processed, the database information of each material composition in the result of calculating and computing machine is compared, we can draw the relevant information of measured object, thereby realize sensing function.
The foregoing is only embodiment of the present utility model, one skilled in the art will appreciate that in the disclosed technical scope of the utility model, can carry out various amendments, replacement and change to the utility model.Therefore the utility model should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (8)
1. the optics biochemical sensitive chip in the embedded FP of micro-ring resonant cavity chamber, comprise the silicon base layer that stacks gradually bonding from bottom to top, the SOI matrix that silicon dioxide layer and monocrystalline silicon layer form, it is characterized in that, the monocrystalline silicon layer of described SOI matrix comprises input straight wave guide, straight wave guide output and the first resonator cavity, described the first resonator cavity is the micro-ring resonant cavity that ring-type waveguide forms, described micro-ring resonant cavity is of coupled connections with input straight wave guide and straight wave guide output respectively, in the ring-type waveguide of micro-ring resonant cavity, also comprise grating FP chamber, described grating FP chamber comprises the first grating and the second grating, described the first grating and the second grating are etched in the ring-type waveguide of described micro-ring resonant cavity, described micro-ring resonant cavity has not identical Free Spectral Range with grating FP chamber, the two optical coupled connects, described the first optical resonator and the second optical resonator are all grating FP chamber.
2. optics biochemical sensitive chip according to claim 1, it is characterized in that, first grating in grating FP chamber and the second grating are etched in the ring-type waveguide of micro-ring resonant cavity, and in the center line connecting direction of the first grating and the second grating and ring-type waveguide, this section of wave guide direction is consistent.
3. optics biochemical sensitive chip according to claim 1, is characterized in that, the grating provision width of first grating in grating FP chamber and the second grating equals the duct width of ring-type waveguide.
4. according to the optics biochemical sensitive chip described in claim 2 or 3, it is characterized in that, first grating in described grating FP chamber is identical with the second optical grating construction.
5. according to the optics biochemical sensitive chip described in any one claim of claims 1 to 3, it is characterized in that, the first described grating or the second grating comprise and are no less than 3 no more than 30 periodic units.
6. optics biochemical sensitive chip according to claim 5, is characterized in that, arbitrary value that the cycle of described grating periodic unit is 0.3um～0.7um.
7. optics biochemical sensitive chip according to claim 6, is characterized in that, arbitrary value that the dutycycle of described grating periodic unit is 30%～80%.
8. according to the optics biochemical sensitive chip described in claim 6 or 7, it is characterized in that, the be etched degree of depth of groove of described grating periodic unit is 50%～100% of monocrystalline silicon layer thickness.
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| CN201320465697.0U CN203705340U (en) | 2013-07-31 | 2013-07-31 | Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575698A (en) * | 2013-07-31 | 2014-02-12 | 电子科技大学 | Optical biochemical sensing chip of micro-ring resonant cavity embedded FP (Fabry-Pero) cavity |
| CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
| CN110361604A (en) * | 2019-07-23 | 2019-10-22 | 北京无线电计量测试研究所 | Electric field detecting quantum assembly and preparation method and quantum field strength sensor |
-
2013
- 2013-07-31 CN CN201320465697.0U patent/CN203705340U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103575698A (en) * | 2013-07-31 | 2014-02-12 | 电子科技大学 | Optical biochemical sensing chip of micro-ring resonant cavity embedded FP (Fabry-Pero) cavity |
| CN103575698B (en) * | 2013-07-31 | 2016-10-26 | 电子科技大学 | The optics biochemical sensitive chip in micro-ring resonant cavity embedded FP chamber |
| CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
| CN110361604A (en) * | 2019-07-23 | 2019-10-22 | 北京无线电计量测试研究所 | Electric field detecting quantum assembly and preparation method and quantum field strength sensor |
| CN110361604B (en) * | 2019-07-23 | 2021-08-13 | 北京无线电计量测试研究所 | Electric field detection quantum component, preparation method and quantum field intensity sensor |
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Granted publication date: 20140709 Termination date: 20160731 |