CN110361604B - Electric field detection quantum component, preparation method and quantum field intensity sensor - Google Patents
Electric field detection quantum component, preparation method and quantum field intensity sensor Download PDFInfo
- Publication number
- CN110361604B CN110361604B CN201910664244.2A CN201910664244A CN110361604B CN 110361604 B CN110361604 B CN 110361604B CN 201910664244 A CN201910664244 A CN 201910664244A CN 110361604 B CN110361604 B CN 110361604B
- Authority
- CN
- China
- Prior art keywords
- waveguide
- straight waveguide
- optical fiber
- coupling joint
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0878—Sensors; antennas; probes; detectors
- G01R29/0885—Sensors; antennas; probes; detectors using optical probes, e.g. electro-optical, luminiscent, glow discharge, or optical interferometers
Abstract
The invention discloses an electric field detection quantum component, a preparation method thereof and a quantum field intensity sensor. One embodiment of an electric field detecting quantum component comprises: a first straight waveguide (110), a second straight waveguide (120), a ring waveguide (200), a first fiber coupling joint (410) and a second fiber coupling joint (420); the first straight waveguide (110) and the second straight waveguide (120) are respectively superposed with two tangent lines parallel to each other of the annular waveguide (200), the first straight waveguide (110) and the second straight waveguide (120) are respectively communicated with the annular waveguide (200) at tangent points, the annular waveguide (200) comprises two metal gas chambers (300) which are respectively equidistant to the two tangent lines, alkali metal steam is sealed in the metal gas chambers (300), the first optical fiber coupling joint (410) is connected with one port of the first straight waveguide (110), and the second optical fiber coupling joint (420) is connected with one port of the second straight waveguide (120). The electric field detection quantum component adopts the optical fiber interface, and has small volume and easy adjustment.
Description
Technical Field
The invention relates to a quantum electric field detection technology. And more particularly to an electric field detecting quantum assembly and method of manufacture and a quantum field strength sensor.
Background
With the development of quantum technology, research on accurate measurement methods for electromagnetic field intensity by using quantum technology is started internationally. Compared with the traditional field intensity measurement modes of a dipole/detector diode probe, an integrated optical waveguide LiNbO3 electric field sensor and the like, the field intensity measurement principle of the quantum field intensity sensor is based on the relation between an external electromagnetic field and the energy level transition of alkali metal atoms, the electromagnetic field intensity measurement with different frequency bands and different intensities can be realized in principle, an electric field imaging technology can be formed through the field intensity measurement, and the quantum field intensity sensor has important influence on the aspects of future electric field measurement and electric field imaging. Some prior art adopt quantum field intensity detection technique based on the atom of the rydberg, have promoted measurement accuracy and measuring range of the electric field intensity by a wide margin, but because the adoption is all that discrete optical component and glass alkali metal air chamber, there are bulky, tune complicated technological problems.
Therefore, it is desirable to provide an electric field detection assembly that is small and easy to adjust.
Disclosure of Invention
The invention aims to provide an electric field detection quantum component, a preparation method and a quantum field intensity sensor, so as to solve at least one of the problems in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a first aspect of the invention provides an electric field detecting quantum component comprising: the optical fiber coupling device comprises a first straight waveguide, a second straight waveguide, a ring waveguide, a first optical fiber coupling joint and a second optical fiber coupling joint; the first straight waveguide and the second straight waveguide are respectively coincided with two tangent lines parallel to each other of the annular waveguide, the first straight waveguide and the second straight waveguide are respectively communicated with the annular waveguide at the tangent point, the annular waveguide comprises two metal air chambers which are respectively equidistant with the two tangent lines, alkali metal steam is sealed and stored in the metal air chambers, the first optical fiber coupling joint is connected with one port of the first straight waveguide, and the second optical fiber coupling joint is connected with one port of the second straight waveguide.
Optionally, the annular waveguide is cylindrical.
Optionally, the first straight waveguide, the second straight waveguide and the annular waveguide are manufactured by an etching process.
Optionally, the metal gas chamber is formed by performing secondary etching on the annular waveguide.
Optionally, a port of the first straight waveguide connected to the first optical fiber coupling joint is not adjacent to a port of the second straight waveguide connected to the second optical fiber coupling joint.
Optionally, the first optical fiber coupling joint is used for accessing a probe optical fiber; the second optical fiber coupling joint is used for connecting and coupling the optical fiber.
A second aspect of the invention provides a quantum field intensity sensor comprising an electric field sensing quantum assembly as any one of the above.
A third aspect of the present invention provides a method for preparing an electric field detection quantum component, comprising: forming a first straight waveguide, a second straight waveguide and an annular waveguide based on etching of a silicon dioxide substrate, wherein the first straight waveguide and the second straight waveguide are respectively superposed with two mutually parallel tangent lines of the annular waveguide, and the first straight waveguide and the second straight waveguide are respectively communicated with the annular waveguide at tangent points; performing secondary etching on the annular waveguide to form two metal air chambers, wherein the two metal air chambers are respectively equidistant to the two tangent lines; under the high-temperature vacuum condition, filling alkali metal into the metal gas chamber, and sealing the steam of the alkali metal in the metal gas chamber through the bonding of the silicon dioxide substrate and the annular waveguide; and connecting a first optical fiber coupling joint with one port of the first straight waveguide, and connecting a second optical fiber coupling joint with one port of the second straight waveguide.
Alternatively, the annular waveguide is formed in a cylindrical shape.
Optionally, the probe optical fiber is connected to a port of the first straight waveguide through the first optical fiber coupling joint, and the coupling optical fiber is connected to a port of the second straight waveguide through the second optical fiber coupling joint.
The invention has the following beneficial effects:
the electric field detection quantum component provided by the technical scheme of the invention adopts the optical fiber interface, so that the detection light and the coupling light can directly interact in the integrated module, and the technical problems of large volume and difficult tuning caused by the volume of the alkali metal gas chamber and discrete optical path components and parts are solved, and the volume is small and easy to adjust.
Drawings
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings;
fig. 1 shows a top view of an electric field detection quantum assembly provided by an embodiment of the present invention;
fig. 2 illustrates a side view of an electric field detecting quantum assembly provided by an embodiment of the present invention;
fig. 3 is a flow chart illustrating a method for manufacturing an electric field detection quantum component according to an embodiment of the present invention;
Detailed Description
In order to more clearly illustrate the invention, the invention is further described below with reference to preferred embodiments and the accompanying drawings. It is to be understood by persons skilled in the art that the following detailed description is illustrative and not restrictive, and is not to be taken as limiting the scope of the invention.
As shown in fig. 1 and 2, an embodiment of the present invention provides an electric field detecting quantum component, including: a first straight waveguide 110, a second straight waveguide 120, a ring waveguide 200, a first fiber coupling joint 410 and a second fiber coupling joint 420; the first straight waveguide 110 and the second straight waveguide 120 are respectively overlapped with two mutually parallel tangent lines of the annular waveguide 200, the first straight waveguide 110 and the second straight waveguide 120 are respectively communicated with the annular waveguide 200 at tangent points, the annular waveguide 200 comprises two metal gas chambers 300 which are respectively equidistant to the two tangent lines, alkali metal steam is sealed in the metal gas chambers 300, the first optical fiber coupling joint 410 is connected with one port (port A or port B) of the first straight waveguide 110, and the second optical fiber coupling joint 420 is connected with one port (port C or port D) of the second straight waveguide 120.
As an alternative embodiment, the ring waveguide 200 may have a cylindrical, disk or racetrack shape, and preferably, the ring waveguide 200 has a cylindrical shape to reduce light loss. Other shapes may be used as desired, as long as the loss of light is minimized.
As an alternative embodiment, the first straight waveguide 110, the second straight waveguide 120 and the ring waveguide 200 are formed by an etching process. The metal gas cell 300 is formed by performing secondary etching on the ring waveguide 200.
In a preferred embodiment, the port of the first straight waveguide (110) connected with the first optical fiber coupling joint (410) is not adjacent to the port of the second straight waveguide (120) connected with the second optical fiber coupling joint (420).
As an alternative embodiment, the first fiber coupling joint 410 is used for accessing a probe optical fiber; the second fiber coupling joint 420 is used for coupling in the optical fiber. At the port a of the first straight waveguide 110 and the port C of the second straight waveguide 120, the pigtail or tapered fiber is aligned and adhesively fixed, respectively, to increase the energy of the coupling light and the probe light entering the waveguides. When the electric field detection quantum component is used, coupled light enters the second straight waveguide 120 from the port C and is coupled into the annular waveguide 200, the coupled light propagates clockwise (or anticlockwise) in the annular waveguide 200 and passes through the metal gas chamber 300 every time, detection light enters the first straight waveguide 110 from the port A and is coupled into the annular waveguide 200, the coupled light propagates anticlockwise (or clockwise) in the annular waveguide 200 and passes through the metal gas chamber 300 every time, when the coupled light and the detection light act with alkali metal in the annular waveguide 200 simultaneously, if an external electric field exists, a signal representing the electric field intensity can be generated, the technical effect same as that of the existing separation structure can be generated, and a unit for the interaction of the light, the alkali metal and the electric field can be directly replaced. Wherein, the propagation directions of the two beams are opposite.
The electric field detection quantum component provided by the embodiment adopts the optical fiber interface, so that the detection light and the coupling light can directly interact in the integrated module, and the technical problems of large volume and difficult tuning caused by the volume of the alkali metal gas chamber and discrete optical path components are solved.
Another embodiment of the present invention provides a quantum field intensity sensor comprising the electric field sensing quantum assembly provided by the above embodiments.
As shown in fig. 3, another embodiment of the present invention provides a method for preparing an electric field detection quantum assembly, including the steps of:
s100: forming a first straight waveguide, a second straight waveguide and an annular waveguide based on etching of the silicon dioxide substrate, wherein the first straight waveguide and the second straight waveguide are respectively superposed with two mutually parallel tangent lines of the annular waveguide, and the first straight waveguide and the second straight waveguide are respectively communicated with the annular waveguide at tangent points;
s200: performing secondary etching on the annular waveguide to form two metal air chambers, wherein the two metal air chambers are respectively equidistant to the two tangent lines;
s300: under the condition of high-temperature vacuum, filling alkali metal into the metal gas chamber, and sealing the steam of the alkali metal in the metal gas chamber by bonding the silicon dioxide substrate and the annular waveguide;
s400: and connecting the first optical fiber coupling joint with one port of the first straight waveguide, and connecting the second optical fiber coupling joint with one port of the second straight waveguide.
As an alternative embodiment, the annular waveguide is formed in a cylindrical shape.
In an alternative embodiment, the probe optical fiber is connected to a port of the first straight waveguide through a first fiber coupling joint, and the coupling optical fiber is connected to a port of the second straight waveguide through a second fiber coupling joint.
In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
It is further noted that, in the description of the present invention, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
It should be understood that the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention, and it will be obvious to those skilled in the art that other variations and modifications can be made on the basis of the above description, and all embodiments cannot be exhaustive, and all obvious variations and modifications belonging to the technical scheme of the present invention are within the protection scope of the present invention.
Claims (10)
1. An electric field detecting quantum assembly, comprising:
a first straight waveguide (110), a second straight waveguide (120), a ring waveguide (200), a first fiber coupling joint (410) and a second fiber coupling joint (420);
the first straight waveguide (110) and the second straight waveguide (120) coincide with two tangent lines of the annular waveguide (200) which are parallel to each other respectively, the first straight waveguide (110) and the second straight waveguide (120) are communicated with the annular waveguide (200) at tangent points respectively, the annular waveguide (200) comprises two metal gas chambers (300) which are respectively equidistant to the two tangent lines, alkali metal steam is sealed in the metal gas chambers (300), the first optical fiber coupling joint (410) is connected with a port of the first straight waveguide (110), and the second optical fiber coupling joint (420) is connected with a port of the second straight waveguide (120).
2. The electric field detecting quantum component of claim 1,
the annular waveguide (200) is cylindrical.
3. The electric field detecting quantum component of claim 1,
the first straight waveguide (110), the second straight waveguide (120) and the annular waveguide (200) are manufactured through an etching process.
4. The electric field detecting quantum component of claim 3,
the metal gas chamber (300) is formed by performing secondary etching on the annular waveguide (200).
5. The electric field detecting quantum component of claim 1,
the port of the first straight waveguide (110) connected with the first optical fiber coupling joint (410) is not adjacent to the port of the second straight waveguide (120) connected with the second optical fiber coupling joint (420).
6. The electric field detecting quantum component of claim 1,
the first optical fiber coupling joint (410) is used for accessing a probe optical fiber;
the second optical fiber coupling joint (420) is used for connecting and coupling optical fibers.
7. A quantum field intensity sensor comprising an electric field detecting quantum assembly according to any of claims 1 to 6.
8. A preparation method of an electric field detection quantum component is characterized by comprising the following steps:
forming a first straight waveguide, a second straight waveguide and an annular waveguide based on etching of a silicon dioxide substrate, wherein the first straight waveguide and the second straight waveguide are respectively superposed with two mutually parallel tangent lines of the annular waveguide, and the first straight waveguide and the second straight waveguide are respectively communicated with the annular waveguide at tangent points;
performing secondary etching on the annular waveguide to form two metal air chambers, wherein the two metal air chambers are respectively equidistant to the two tangent lines;
under the high-temperature vacuum condition, filling alkali metal into the metal gas chamber, and sealing the steam of the alkali metal in the metal gas chamber through the bonding of the silicon dioxide substrate and the annular waveguide;
and connecting a first optical fiber coupling joint with one port of the first straight waveguide, and connecting a second optical fiber coupling joint with one port of the second straight waveguide.
9. The method of claim 8,
the annular waveguide is formed in a cylindrical shape.
10. The method of claim 8,
and connecting a detection optical fiber with one port of the first straight waveguide through the first optical fiber coupling joint, and connecting a coupling optical fiber with one port of the second straight waveguide through the second optical fiber coupling joint.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910664244.2A CN110361604B (en) | 2019-07-23 | 2019-07-23 | Electric field detection quantum component, preparation method and quantum field intensity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910664244.2A CN110361604B (en) | 2019-07-23 | 2019-07-23 | Electric field detection quantum component, preparation method and quantum field intensity sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110361604A CN110361604A (en) | 2019-10-22 |
CN110361604B true CN110361604B (en) | 2021-08-13 |
Family
ID=68220661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910664244.2A Active CN110361604B (en) | 2019-07-23 | 2019-07-23 | Electric field detection quantum component, preparation method and quantum field intensity sensor |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110361604B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115666377A (en) * | 2020-03-19 | 2023-01-31 | 斯坦福研究院 | Quantum electromagnetic field sensor and imager |
CN112526221B (en) * | 2020-10-26 | 2023-04-14 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | Electromagnetic field composite probe and detection system |
WO2023014740A1 (en) * | 2021-08-02 | 2023-02-09 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Photonic rydberg atom radio frequency receiver and measuring a radio frequency electric field |
Citations (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101165977A (en) * | 2006-10-20 | 2008-04-23 | 香港理工大学 | Optical fibre gas laser and optical fiber type ring laser gyroscope possessing the laser |
CN101424619A (en) * | 2008-11-27 | 2009-05-06 | 上海电力学院 | Method for producing wave guide ring shaped resonant cavity nitrogen dioxide gas sensor |
CN101494353A (en) * | 2009-02-27 | 2009-07-29 | 山东科技大学 | THz Laman fibre-optical laser |
CN101661137A (en) * | 2008-08-27 | 2010-03-03 | 中国科学院半导体研究所 | Method for making silicon waveguide photoelectric converter used in 1.55mu m communication wave band |
CN101871790A (en) * | 2010-06-08 | 2010-10-27 | 浙江大学 | Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter |
CN102062988A (en) * | 2010-12-27 | 2011-05-18 | 中国科学院半导体研究所 | Optical logic gate based on double parallel microring resonators |
CN102684694A (en) * | 2011-03-14 | 2012-09-19 | 精工爱普生株式会社 | Optical module for atomic oscillator and atomic oscillator |
CN103066490A (en) * | 2012-12-11 | 2013-04-24 | 华中科技大学 | Optical fiber alkali metal vapor laser |
CN203133311U (en) * | 2013-03-27 | 2013-08-14 | 深圳大学 | Gas doping device for photonic crystal fiber |
CN103490277A (en) * | 2013-09-23 | 2014-01-01 | 电子科技大学 | Tunable semiconductor ring laser |
CN103501200A (en) * | 2013-09-23 | 2014-01-08 | 电子科技大学 | Tunable optical chaotic signal generation device and method |
CN203705340U (en) * | 2013-07-31 | 2014-07-09 | 电子科技大学 | Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator |
CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
CN204789621U (en) * | 2015-06-29 | 2015-11-18 | 广西师范大学 | Two cylindrical MIM surface plasma waveguide structure adds speed sensing device |
CN105552698A (en) * | 2016-03-10 | 2016-05-04 | 中国科学院电子学研究所 | Side face pumping slab waveguide DPAL laser device |
CN106124856A (en) * | 2016-07-25 | 2016-11-16 | 山西大学 | The radio frequency source calibration steps of jump frequency of directly tracing to the source between atom highly excited level |
CN107703101A (en) * | 2017-09-25 | 2018-02-16 | 电子科技大学 | Biology sensor based on 1-D photon crystal coupling micro-loop chamber |
CN108152602A (en) * | 2016-12-15 | 2018-06-12 | 中国计量科学研究院 | A kind of antenna gain measuring device based on quantum coherence effect |
CN108963755A (en) * | 2018-08-01 | 2018-12-07 | 太原理工大学 | A kind of full light random code chip of integreted phontonics |
CN108982975A (en) * | 2018-07-17 | 2018-12-11 | 北京无线电计量测试研究所 | A kind of electric field detector |
CN109541745A (en) * | 2018-12-14 | 2019-03-29 | 电子科技大学 | A kind of follow-on micro-ring resonator in coupled zone and preparation method thereof |
CN109709069A (en) * | 2018-12-26 | 2019-05-03 | 中国科学院半导体研究所 | Gas sensor and preparation method thereof |
CN109831247A (en) * | 2019-01-28 | 2019-05-31 | 钟林晟 | Ultra-compact Modulator efficiency test device and test method based on micro-loop structure |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1219926B1 (en) * | 2000-11-28 | 2010-10-20 | Politecnico di Bari | Integrated optical angular velocity sensor |
EP1241746A1 (en) * | 2001-03-14 | 2002-09-18 | Europäische Organisation für astronomische Forschung in der südlichen Hemisphäre | Narrow band high power fibre lasers |
WO2002098808A1 (en) * | 2001-05-31 | 2002-12-12 | Corning Incorporated | Method of low pmd optical fiber manufacture |
US6933491B2 (en) * | 2002-12-12 | 2005-08-23 | Weatherford/Lamb, Inc. | Remotely deployed optical fiber circulator |
DE602005014984D1 (en) * | 2004-04-14 | 2009-07-30 | Rohm & Haas Elect Mat | Waveguide compositions and waveguides made therefrom |
US7349452B2 (en) * | 2004-12-13 | 2008-03-25 | Raydiance, Inc. | Bragg fibers in systems for the generation of high peak power light |
CN101764350B (en) * | 2009-07-24 | 2011-09-28 | 中国科学院安徽光学精密机械研究所 | Optical fiber type tunable gas Raman laser light source based on hollow-core photonic crystal fiber |
US9008983B2 (en) * | 2011-05-17 | 2015-04-14 | Canon Kabushiki Kaisha | Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide |
EP2544319B1 (en) * | 2011-07-08 | 2015-03-25 | Alcatel Lucent | Laser source for photonic integrated devices |
CN103489936A (en) * | 2012-06-13 | 2014-01-01 | 北京邮电大学 | Parallel-connection multi-micro-ring optical waveguide detector |
WO2014043598A1 (en) * | 2012-09-14 | 2014-03-20 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Reconfigurable liquid metal fiber-optic mirror |
CN103048917B (en) * | 2012-12-21 | 2015-08-05 | 成都天奥电子股份有限公司 | For the cylindrical waveguide microwave cavity of rubidium clock |
WO2014159450A1 (en) * | 2013-03-11 | 2014-10-02 | The Regents Of The University Of California | Hollow plastic waveguide for data center communications |
CN103259190A (en) * | 2013-05-13 | 2013-08-21 | 天津大学 | Annular semiconductor laser of vertical coupling structure and preparing method thereof |
EP2933885B1 (en) * | 2014-04-16 | 2017-05-31 | Alcatel Lucent | Tunable emitting device with a directly modulated laser coupled to a ring resonator |
CN104078839B (en) * | 2014-06-26 | 2017-04-19 | 中国科学院半导体研究所 | Optical pulse synchronizing signal source based on waveguide coupling microdisk photon molecular lasers |
CN104459350B (en) * | 2014-12-05 | 2017-07-18 | 清华大学 | A kind of lithium niobate straight wave guide electric field measurement system |
CN107923932B (en) * | 2015-10-16 | 2020-12-01 | 捷客斯金属株式会社 | Optical modulation element and electric field sensor |
CN105675529B (en) * | 2016-01-21 | 2018-10-12 | 电子科技大学 | Microminiature mid-infrared light waveguide gas sensor |
WO2017180736A1 (en) * | 2016-04-12 | 2017-10-19 | Massachusetts Institute Of Technology | Apparatus and methods for locked quantum communication using photonic integrated circuits |
-
2019
- 2019-07-23 CN CN201910664244.2A patent/CN110361604B/en active Active
Patent Citations (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101165977A (en) * | 2006-10-20 | 2008-04-23 | 香港理工大学 | Optical fibre gas laser and optical fiber type ring laser gyroscope possessing the laser |
CN101661137A (en) * | 2008-08-27 | 2010-03-03 | 中国科学院半导体研究所 | Method for making silicon waveguide photoelectric converter used in 1.55mu m communication wave band |
CN101424619A (en) * | 2008-11-27 | 2009-05-06 | 上海电力学院 | Method for producing wave guide ring shaped resonant cavity nitrogen dioxide gas sensor |
CN101494353A (en) * | 2009-02-27 | 2009-07-29 | 山东科技大学 | THz Laman fibre-optical laser |
CN101871790A (en) * | 2010-06-08 | 2010-10-27 | 浙江大学 | Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter |
CN102062988A (en) * | 2010-12-27 | 2011-05-18 | 中国科学院半导体研究所 | Optical logic gate based on double parallel microring resonators |
CN102684694A (en) * | 2011-03-14 | 2012-09-19 | 精工爱普生株式会社 | Optical module for atomic oscillator and atomic oscillator |
CN103066490A (en) * | 2012-12-11 | 2013-04-24 | 华中科技大学 | Optical fiber alkali metal vapor laser |
CN203133311U (en) * | 2013-03-27 | 2013-08-14 | 深圳大学 | Gas doping device for photonic crystal fiber |
CN203705340U (en) * | 2013-07-31 | 2014-07-09 | 电子科技大学 | Optical biochemical sensor chip of FP cavity embedded into micro-ring resonator |
CN103501200A (en) * | 2013-09-23 | 2014-01-08 | 电子科技大学 | Tunable optical chaotic signal generation device and method |
CN103490277A (en) * | 2013-09-23 | 2014-01-01 | 电子科技大学 | Tunable semiconductor ring laser |
CN104990871A (en) * | 2015-06-16 | 2015-10-21 | 电子科技大学 | Optical waveguide biochemical sensor with grating annulet intermodulation structure |
CN204789621U (en) * | 2015-06-29 | 2015-11-18 | 广西师范大学 | Two cylindrical MIM surface plasma waveguide structure adds speed sensing device |
CN105552698A (en) * | 2016-03-10 | 2016-05-04 | 中国科学院电子学研究所 | Side face pumping slab waveguide DPAL laser device |
CN106124856A (en) * | 2016-07-25 | 2016-11-16 | 山西大学 | The radio frequency source calibration steps of jump frequency of directly tracing to the source between atom highly excited level |
CN108152602A (en) * | 2016-12-15 | 2018-06-12 | 中国计量科学研究院 | A kind of antenna gain measuring device based on quantum coherence effect |
CN107703101A (en) * | 2017-09-25 | 2018-02-16 | 电子科技大学 | Biology sensor based on 1-D photon crystal coupling micro-loop chamber |
CN108982975A (en) * | 2018-07-17 | 2018-12-11 | 北京无线电计量测试研究所 | A kind of electric field detector |
CN108963755A (en) * | 2018-08-01 | 2018-12-07 | 太原理工大学 | A kind of full light random code chip of integreted phontonics |
CN109541745A (en) * | 2018-12-14 | 2019-03-29 | 电子科技大学 | A kind of follow-on micro-ring resonator in coupled zone and preparation method thereof |
CN109709069A (en) * | 2018-12-26 | 2019-05-03 | 中国科学院半导体研究所 | Gas sensor and preparation method thereof |
CN109831247A (en) * | 2019-01-28 | 2019-05-31 | 钟林晟 | Ultra-compact Modulator efficiency test device and test method based on micro-loop structure |
Non-Patent Citations (4)
Title |
---|
Design of millimeter-wave transmission standards for scattering parameters measurements in the frequency range from 140 GHz to 220 GHz;Jie Liu等;《 2016 IEEE 9th UK-Europe-China Workshop on Millimetre Waves and Terahertz Technologies (UCMMT)》;20160907;全文 * |
Simulation and design of new microwae plasma source with slotted straight waveguides;Qing Zhang等;《2009 IEEE International Conference on Plasma Science - Abstracts》;20090605;全文 * |
一种离子交换制备的玻璃光波导谐振腔滤波器;韩秀友等;《光学学报》;20060730;第26卷(第7期);全文 * |
聚合物双环谐振滤波器的研究;孔光明等;《中国激光》;20090110;第36卷(第1期);全文 * |
Also Published As
Publication number | Publication date |
---|---|
CN110361604A (en) | 2019-10-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110361604B (en) | Electric field detection quantum component, preparation method and quantum field intensity sensor | |
EP0228677B1 (en) | Optical pressure-sensing system | |
CN101788569B (en) | Optical fiber acceleration transducer probe and acceleration transducer system | |
US7499604B1 (en) | Optically coupled resonant pressure sensor and process | |
CN103557985B (en) | A kind of differential pressure method for sensing and sensor thereof | |
EP3607291B1 (en) | Hermeticity testing of an optical assembly | |
CN205562087U (en) | Quartzy two roof beam tuning fork resonance sensing element of integral type and dynamometry module | |
CN111413598A (en) | Optical fiber double-Fabry-Perot cavity ultrasonic sensor for partial discharge detection and manufacturing method thereof | |
US8174703B2 (en) | Method for fabricating a sensor, a sensor, and a method for sensing | |
CN204788749U (en) | F -P pressure sensor with compound dielectric thin film | |
CN108663113A (en) | A kind of optic fibre cantilev vibrating sensor and preparation method thereof | |
CN110726689B (en) | Micro-miniature spectral absorption type optical waveguide type mid-infrared gas sensor and application thereof | |
CN104949792B (en) | A kind of symmetrical damp type optical fiber differential pressure pickup of double-piston | |
CN109521376B (en) | Atomic magnetometer based on miniature atomic air chamber | |
KR20120036351A (en) | Pressure measuring cell arrangement comprising an optical diaphragm prssure measuing cell | |
CN115808191A (en) | High-temperature self-compensation optical fiber F-P cavity MEMS vibration sensor and manufacturing method thereof | |
CN107144378B (en) | MEMS pressure sensor | |
CN106500906B (en) | Air pressure sensor based on coreless optical fiber | |
JPH1090102A (en) | Integrated photoelectronic combustion pressure sensor | |
CN105258738B (en) | A kind of pressure/two-dimensional magnetic field monolithic integrated sensor | |
CN210180586U (en) | Device for measuring pressure of fluid in container | |
CN110297132B (en) | Quantum electric field detection module and electric field strength measurement method | |
CN207675357U (en) | A kind of pressure-detecting device based on synchro-resonance | |
CN219890619U (en) | Sensitization type flexible optical fiber pressure sensor | |
CN111595432B (en) | Vibration detection mechanism |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |