CN106706564A - Composite waveguide grating-based optical biosensor - Google Patents
Composite waveguide grating-based optical biosensor Download PDFInfo
- Publication number
- CN106706564A CN106706564A CN201710042969.9A CN201710042969A CN106706564A CN 106706564 A CN106706564 A CN 106706564A CN 201710042969 A CN201710042969 A CN 201710042969A CN 106706564 A CN106706564 A CN 106706564A
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- waveguide grating
- composite waveguide
- thin film
- optical biosensor
- silicon thin
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- 230000003287 optical effect Effects 0.000 title claims abstract description 34
- 239000002131 composite material Substances 0.000 title claims abstract description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 19
- 239000010703 silicon Substances 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 3
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 230000005540 biological transmission Effects 0.000 description 14
- 230000008859 change Effects 0.000 description 13
- 238000010276 construction Methods 0.000 description 13
- 230000004044 response Effects 0.000 description 8
- 230000000737 periodic effect Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 239000013060 biological fluid Substances 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
Abstract
The invention discloses a composite waveguide grating-based optical biosensor, and belongs to the technical field of inverted mode resonance of a composite waveguide grating. The composite waveguide grating-based optical biosensor is characterized in that a silicon thin film layer grows on silicon dioxide as a substrate material of the composite waveguide grating, and a B region with a width of fb and a longitudinal length consistent with that of the silicon thin film is etched in the transverse middle part of the silicon thin film; and a plurality of C regions with a width of fc and a longitudinal length consistent with that of the silicon thin film are respectively and uniformly etched in the two sides of the B region at an equal distance fa, wherein fa + fb + fa + fc = 1mu m. The composite waveguide grating-based optical biosensor provided by the invention has the advantages of effectively solving the problems of low sensitivity and small quality factor, and the composite waveguide grating has the characteristics of simple structure, high sensitivity, large quality factor, simplicity and convenience in operation in the detection process and the like.
Description
Technical field
The invention belongs to the reverse mould resonance technique field of composite waveguide grating, and in particular to one kind is based on composite waveguide grating
Optical biosensor.
Background technology
In recent years, the rapid advances of biologic medical level, detection to bioscience and have researched and proposed new requirement.With
People to go deep into optics research, it is there has also been in bio-science field and be widely applied.Now, scientific research and
Being realized the optics of bio-sensing in economic goods using optical principle is had a lot, for example, excite metal watch using electromagnetic wave
The plasma primitive (SPP) that face produces, bio-sensing is realized using its transmission characteristic on the metal surface；Using photon
The micro-cavity structure of crystal, it has the controllability of photon energy state density to realize bio-sensing；Using electromagnetic wave to periodically
Dielectric structure (grating) regulation and control formed diffraction, its resonant wavelength and resonance spectrum width counter structure parameter have it is sensitive, continuously
Regulatable characteristic realizes bio-sensing, and other kinds of optical bio sensing.
The development of biologic medical proposes some new requirements at the higher level to biology sensor.Modern biotechnology needs of medical treatment are more just
Take, more compact and more sensitive sensor, can be quick by simple detection operational means and be accurately detected required inspection
Survey result.The commonly used SPP optical pickocffs in present market, (metal has the problem existed by itself structure to electromagnetic wave
With the presence of inevasible loss high) the certain deficiency of its sensitivity.
The content of the invention
Present invention solves the technical problem that there is provided a kind of optical biosensor based on composite waveguide grating, the base
Can effectively solve the problem that optical biosensor sensitivity is not high and quality factor in the optical biosensor of composite waveguide grating
Problem not high.
The present invention adopts the following technical scheme that the optical bio based on composite waveguide grating is passed to solve above-mentioned technical problem
Sensor, including composite waveguide grating, it is characterised in that：Growth has one on the base material silica of the composite waveguide grating
Layer silicon thin film, the horizontal center position of the silicon thin film is etched with width for fbAnd longitudinal length is consistent with silicon thin film longitudinal length
B regions, the uniform equidistantly f of both sides difference in B regionsaMultiple width are etched with for fcAnd longitudinal length and silicon thin film longitudinal length
Consistent C regions, wherein fa+fb+fa+fc=1 μm.
Further preferably, adjacent C regions and the spacing f between adjacent B regions and C regionsa=0.35 μm, B regions
Width fb=0.148 μm, the width f in C regionsc=0.152 μm.
Further preferably, the refractive index n of the base material silica2=1.48.
Further preferably, the refractive index n of the silicon thin film1=3.48.
Further preferably, the thickness of the composite waveguide grating is da=0.16 μm.
The present invention has the advantages that compared with prior art：The composite waveguide grating in nanometer, the yardstick of micron,
Beneficial to being integrated into other devices；The sensor construction of composite waveguide grating support is simpler, and making actual device can
Row is higher；It is detection without the volume of the added sample of strict control when the sensor of composite waveguide grating support is detected
There is provided convenience；The transducer sensitivity supported by the composite waveguide grating resonates and surface than the reverse mould of single fill factor, curve factor
The sensitivity of plasma sensor is higher, and quality factor are bigger.
Brief description of the drawings
Fig. 1 is the structural representation of composite waveguide grating in the present invention；
Fig. 2 for the present invention in only change biofluid refractive index (n) variable when, resonant transmission peak with wavelength response
Curve；
Fig. 3 is change biofluid refractive index (n) and grating fill-factor f in the present inventionaWhen, resonant transmission peak is with wavelength
Response curve；
Fig. 4 is different grating fill-factor f in the present inventionaFor different biofluids refractive index (n) and wavelength change
The resonant transmission peak of relation with wavelength response linear curve；
Fig. 5 changes grating fill-factor f in the present inventionbWhen corresponding resonant transmission peak spectrum width figure；
Fig. 6 be when only changing biological solution depth d in the present invention corresponding formant with wavelength variation relation figure.
Specific embodiment
Particular content of the invention is described in detail with reference to accompanying drawing.The composite waveguide grating of special construction, Each part ginseng
Number continuously adjustabe, periodic structure can also arbitrarily change.So can be achieved with the reverse mould resonant transmission peak in optical grating construction
Response with wavelength is presented line style change with the change of optical grating construction (biofluid refractive index), and this characteristic constitutes sensing
Basis；Sensitivity and the quality factor of the sensor can also be regulated and controled by adjusting the fill factor, curve factor of grating, so that Gao Ling
The optical biosensor of sensitivity and high quality factor is achieved.
The optical biosensor of optical grating construction be by refractive index be n1Medium periodic arrangement exists according to certain rules
(refractive index is n to base material2) on, the thickness for setting the grating in optical grating construction is da(along the length of Z axis)；Biofluid
Thickness (depth) is d, and refractive index is n.The periodic coefficient of medium is f in optical grating constructiona, the periodic coefficient of biological solution is fbWith
fc=0.3-fb(μm).Physically, grating periodic structure can be formed single slit diffraction and multislit interference by the regulation and control of electromagnetic wave,
The pattern of the spectrum of formation is considered as the superposition of many patterns.When electromagnetic wave is propagated from substrate into optical grating construction, due to
Electromagnetic wave propagation phase is different in different medium, can provide a reverse mould, when different biological solutions are added, reverse mould energy
Different diffraction patterns are excited, a series of reverse mould resonance is formed.The resonance of these reverse moulds can shift with wavelength, and this is with regard to structure
Into the basis of sensor.Then each fill factor, curve factor to the composite waveguide optical grating construction is optimized, and chooses suitable ginseng
Number, makes response of its resonant transmission peak to wavelength be greatly improved so as to obtain on the change of the refractive index of biofluid
Sensitivity sensor higher and bigger quality factor.
In Fig. 1, growth has one layer of silicon thin film, the horizontal stroke of the silicon thin film on the base material silica of composite waveguide grating
Width is etched with for f to center positionbAnd the longitudinal length B region consistent with silicon thin film longitudinal length, the both sides difference in B regions
Uniform equidistantly faMultiple width are etched with for fcAnd the longitudinal length C region consistent with silicon thin film longitudinal length, fa+fb+fa+fc
=1 μm, the refractive index n of silicon thin film1=3.48, the refractive index n of base material silica2=1.48, the thickness of composite waveguide grating
It is d to spenda=0.16 μm, depth d=β (μm) of biological solution, β continuously adjustabes.B regions and C regions are to hold biological fluids in figure
The container part of body, is coordinate center line with the midline position in C regions, and optical grating construction is equal to the both sides (X-direction) of center line
Even equidistant extension.
In fig. 2, response curve (the now f of the biological solution of different refractivity with wavelength is givena=0.35 (μ
M), fb=0.11 (μm), d=0.16 (μm)), the resonant transmission peak for finding different biological solutions is change with wavelength, this
The basis of sensor can just be constituted.In figs. 3 and 4, the biological solution of correspondence different refractivity is given respectively and different is filled out
Fill factor faResonant transmission peak with wavelength response curve schematic diagram (now fb=0.11 (μm), d=0.16 (μm)), find
Different fill factor, curve factor faCorresponding optical grating construction resonant transmission peak is similar with the Changing Pattern of wavelength, but specific change
Degree is different.
Fig. 3 is summarized and obtains Fig. 4 line style schematic diagram of wavelength response (variations in refractive index with), it is found that correspondence is different
Fill factor, curve factor fa, in the case where the biological solution of different refractivity is added, resonant transmission peak is linear change with wavelength, this
The biological solution and formant for meaning different refractivity are one-to-one, and this characteristic ensure that the accurate of testing result
Property.Said on side, for unknown biological solution, can accurately measure its type, this has great meaning in medical treatment detection
Justice.
In fig. 4, the slope of straight line illustrate resonant transmission peak with wavelength change speed i.e. sensor it is sensitive
Degree (S), finds for different fill factor, curve factor fa, the speed of its change is different, corresponding fa=0.35 (μm), fa=
0.25 (μm), fa=0.18 (μm), their S is respectively 576nmRIU-1、635nm·RIU-1And 678nmRIU-1.Contrast
The grating sensor of single fill factor, curve factor optical grating construction and SPP types, the sensitivity of the optical biosensor is their 3-5
Times.
In Figure 5, the halfwidth (FWHM) of resonant transmission peak is given with different fill factor, curve factor fbChange schematic diagram (this
When fa=0.35 (μm), d=0.16 (μm), n=2.3), find with fbIncrease, FWHM is less and less, for (d) figure
(fb=0.13 (μm)) FWHM reached 0.5nm.Another index of the performance of general measurement sensor is quality factor, it
The ability that sensor recognizes spectrum is represented, is represented with FOM, wherein FOM=S (nmRIU-1)/HWHM (nm) compared to single filling because
The grating sensor of sub-gratings structure and SPP types, the quality factor of the optical biosensor improve about three quantity
Level.
In figure 6, biofluid (the now f for different depth is founda=0.35 (μm), fb=0.11 (μm), n=
2.3), with wavelength substantially without change, this means that molten when to measure a certain biology its resonant transmission peak in practice
During liquid, add biological solution volume number be on measurement result be do not have it is influential.This characteristic is that actual measurement is carried
Very big facility is supplied, it is to avoid artificial precise control needs the biological fluids scale of construction for adding.
In a word, the composite waveguide grating of the optical biosensor have that simple structure, sensitivity be high, quality factor are big and
The features such as detection process is easy to operate.
Embodiment above describes general principle of the invention, principal character and advantage, the technical staff of the industry should
Understand, the present invention is not limited to the above embodiments, simply original of the invention is illustrated described in above-described embodiment and specification
Reason, under the scope for not departing from the principle of the invention, various changes and modifications of the present invention are possible, and these changes and improvements each fall within
In the scope of protection of the invention.
Claims (5)
1. the optical biosensor based on composite waveguide grating, including composite waveguide grating, it is characterised in that：The complex wave
Growth has one layer of silicon thin film on the base material silica of guide grating, and the horizontal center position of the silicon thin film is etched with width and is
fbAnd the longitudinal length B region consistent with silicon thin film longitudinal length, the uniform equidistantly f of both sides difference in B regionsaIt is etched with multiple
Width is fcAnd the longitudinal length C region consistent with silicon thin film longitudinal length, wherein fa+fb+fa+fc=1 μm.
2. the optical biosensor based on composite waveguide grating according to claim 1, it is characterised in that：Adjacent C
Spacing f between region and adjacent B regions and C regionsa=0.35 μm, the width f in B regionsb=0.148 μm, the width in C regions
Degree fc=0.152 μm.
3. the optical biosensor based on composite waveguide grating according to claim 1, it is characterised in that：The substrate
The refractive index n of materials silicon dioxide2=1.48.
4. the optical biosensor based on composite waveguide grating according to claim 1, it is characterised in that：The silicon is thin
The refractive index n of film1=3.48.
5. the optical biosensor based on composite waveguide grating according to claim 1, it is characterised in that：It is described compound
The thickness of waveguide optical grating is da=0.16 μm.
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| CN201710042969.9A CN106706564A (en) | 2017-01-19 | 2017-01-19 | Composite waveguide grating-based optical biosensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113418893A (en) * | 2021-05-11 | 2021-09-21 | 山西恒光微电子集成科技有限公司 | Ultra-sensitive refractive index optical biosensor based on sub-wavelength grating |
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| CN202094161U (en) * | 2011-03-23 | 2011-12-28 | 东南大学 | Long-range plasma excimer waveguide array synergy unit for solar cell |
| US20130058370A1 (en) * | 2010-02-24 | 2013-03-07 | The Regents Of The University Of California | Planar, high na, low loss transmitting or reflecting lenses using sub-wavelength high contrast grating |
| CN103245636A (en) * | 2013-05-16 | 2013-08-14 | 成都谱视科技有限公司 | Enhancement-type slit optical waveguide grating FP (Fabry Perot) cavity optical biochemistry sensing chip |
| CN103293129A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity based optical biochemical sensor chip |
| CN103424376A (en) * | 2013-08-02 | 2013-12-04 | 贵州大学 | Biological chip based on grating guided-mode resonance technology and preparation method thereof |
| CN103575698A (en) * | 2013-07-31 | 2014-02-12 | 电子科技大学 | Optical biochemical sensing chip of micro-ring resonant cavity embedded FP (Fabry-Pero) cavity |
| CN105706316A (en) * | 2013-10-29 | 2016-06-22 | 慧与发展有限责任合伙企业 | High contrast grating optoelectronics |
| CN206470188U (en) * | 2017-01-19 | 2017-09-05 | 河南师范大学 | optical biosensor based on composite waveguide grating |
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2017
- 2017-01-19 CN CN201710042969.9A patent/CN106706564A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130058370A1 (en) * | 2010-02-24 | 2013-03-07 | The Regents Of The University Of California | Planar, high na, low loss transmitting or reflecting lenses using sub-wavelength high contrast grating |
| CN202094161U (en) * | 2011-03-23 | 2011-12-28 | 东南大学 | Long-range plasma excimer waveguide array synergy unit for solar cell |
| CN103245636A (en) * | 2013-05-16 | 2013-08-14 | 成都谱视科技有限公司 | Enhancement-type slit optical waveguide grating FP (Fabry Perot) cavity optical biochemistry sensing chip |
| CN103293129A (en) * | 2013-05-16 | 2013-09-11 | 成都谱视科技有限公司 | Slit optical waveguide epitaxial grating FP (Fabry-Perot) cavity based optical biochemical sensor chip |
| CN103575698A (en) * | 2013-07-31 | 2014-02-12 | 电子科技大学 | Optical biochemical sensing chip of micro-ring resonant cavity embedded FP (Fabry-Pero) cavity |
| CN103424376A (en) * | 2013-08-02 | 2013-12-04 | 贵州大学 | Biological chip based on grating guided-mode resonance technology and preparation method thereof |
| CN105706316A (en) * | 2013-10-29 | 2016-06-22 | 慧与发展有限责任合伙企业 | High contrast grating optoelectronics |
| CN206470188U (en) * | 2017-01-19 | 2017-09-05 | 河南师范大学 | optical biosensor based on composite waveguide grating |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113418893A (en) * | 2021-05-11 | 2021-09-21 | 山西恒光微电子集成科技有限公司 | Ultra-sensitive refractive index optical biosensor based on sub-wavelength grating |
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