WO2015159618A1 - Procédé de fabrication d'un rouleau de formation, et rouleau de formation. - Google Patents

Procédé de fabrication d'un rouleau de formation, et rouleau de formation. Download PDF

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Publication number
WO2015159618A1
WO2015159618A1 PCT/JP2015/057273 JP2015057273W WO2015159618A1 WO 2015159618 A1 WO2015159618 A1 WO 2015159618A1 JP 2015057273 W JP2015057273 W JP 2015057273W WO 2015159618 A1 WO2015159618 A1 WO 2015159618A1
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WO
WIPO (PCT)
Prior art keywords
mold
roll
side support
mold sheet
sheet
Prior art date
Application number
PCT/JP2015/057273
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English (en)
Japanese (ja)
Inventor
朋一 梅澤
敦史 藤田
小川 正太郎
Original Assignee
富士フイルム株式会社
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Filing date
Publication date
Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Publication of WO2015159618A1 publication Critical patent/WO2015159618A1/fr

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts

Definitions

  • the present invention relates to a method for producing a mold roll having fine irregularities on the surface and a mold roll.
  • Such a nanoimprint has a fine concavo-convex pattern on the surface of a conveyance path between a feeding roll for feeding a sheet to be processed (for example, a resin film or an inorganic substrate) and a take-up roll for winding the sheet.
  • a mold roll also called a mold roll or a stamper roll
  • the sheet is conveyed from the feeding roll to the winding roll while the mold roll is in contact with the processed surface of the sheet.
  • the above-mentioned mold roll is usually, for example, by winding a mold sheet having a concavo-convex pattern around a cylindrical roll body serving as a rotation axis, and welding the opposite ends of the mold sheet that makes one round of the roll body, Manufactured (for example, see Patent Document 1).
  • Patent Document 1 it is not easy to firmly fix the mold sheet to the roll body without creating a gap between the mold sheet and the roll body.
  • Patent Document 2 discloses that the roll sheet is formed in a cylindrical shape first, and a roll body whose outer diameter can be changed is used. A method is disclosed in which the outer diameter is increased after being inserted into the cylinder.
  • Patent Document 3 discloses a method in which a suction roll is used as the roll body, the mold sheet is wound around the suction roll while sucking the mold sheet, and the opposite ends of the mold sheet that has made one round of the suction roll are welded to each other. .
  • the present inventors have difficulty in fixing the mold sheet to the roll body in the thinness of the mold sheet in the order of micrometers. I found a problem. That is, since the mold sheet is very thin, the mold sheet is likely to be wrinkled, broken, and torn, and the mold sheet is considered difficult to handle.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a mold roll manufacturing method and a mold roll that facilitate the handling of the mold sheet in the manufacture of the mold roll.
  • an object of the present invention is to provide a mold roll with improved quality.
  • the method for producing a mold roll of the present invention comprises: In the method for producing a mold roll having an uneven pattern on the roll surface, A laminating step of laminating a support on at least one of the front surface and the back surface of the mold sheet having an uneven pattern on the surface; And a winding step of winding and fixing the mold sheet on which the support is laminated to the roll body.
  • a lamination process includes the process of laminating
  • the back side support includes an adhesive layer, and the back side support is fixed to the roll body by the adhesive layer in the winding step.
  • a back surface side support body contains the cushion layer which can be elastically deformed.
  • a lamination process includes the process of laminating
  • the lamination step includes a step of laminating the back side support
  • an electroforming product as a mold sheet is formed on the surface on which the uneven pattern of the mold is formed by electroforming before the lamination step. It has a casting process, and it is preferable that a back surface side support body is laminated
  • the laminating step may include a step of laminating a surface side support on the surface of the mold sheet via an adhesive that can be peeled off from the mold sheet.
  • the surface-side support has a notch at the boundary between the portion of the surface-side support laminated on the portion fixed to the roll body of the mold sheet and the other portion of the surface-side support. .
  • the first mold roll of the present invention is A laminate having a mold sheet having a concavo-convex pattern on the surface, and a back-side support laminated on the back of the mold sheet; And a roll body, The laminate is fixed by being wound around the roll body with the back-side support on the roll body side.
  • the back side support has an adhesion layer, and the layered product is fixed to the roll body by the adhesion layer.
  • the laminate preferably has a surface-side support laminated on the surface of the mold sheet.
  • the second mold roll of the present invention is A laminate having a mold sheet having a concavo-convex pattern on the surface, and a surface-side support laminated on the surface of the mold sheet; And a roll body, The laminate is fixed by being wound around the roll body with the mold sheet facing the roll body.
  • the mold roll manufacturing method of the present invention includes a laminating step of laminating a support on at least one of the front and back surfaces of the mold sheet, and a winding step of winding and fixing the mold sheet on which the support is laminated on the roll body. Therefore, handling of the mold sheet becomes easy.
  • FIG. 2a and 2b are schematic cross-sectional views showing a winding step of the method for manufacturing a mold roll according to the first embodiment
  • FIG. 2c is a diagram showing the mold roll.
  • FIG. 1 is a schematic cross-sectional view illustrating a stacking process of a method for manufacturing a mold roll according to the first embodiment.
  • FIGS. 2A and 2B illustrate winding of the method for manufacturing a mold roll according to the first embodiment. It is a schematic sectional drawing which shows a process, and c of FIG. 2 is a figure showing a type
  • the mold roll manufacturing method according to this embodiment is an electroforming process for forming an electroformed product as the mold sheet 11 (see a in FIG. 1).
  • a laminating step (see b to d in FIG. 1), a cutting step (see e in FIG. 1) for cutting the laminated body 15 to a required size, and the cut laminated body 15 as a roll body 17 has a winding step (see a and b in FIG. 2).
  • an electroformed product as the mold sheet 11 is formed on the surface of the mold 10 on which the concavo-convex pattern is formed by electroforming.
  • the mold 10 is a mold for forming an electroformed product.
  • a concavo-convex pattern having a shape complementary to the concavo-convex pattern formed on the mold sheet is formed on one surface of the mold.
  • the material of the mold 10 is, for example, silicon, quartz glass, or metal.
  • the mold 10 preferably has conductivity on at least the surface on which the uneven pattern is formed. Therefore, when the mold 10 is made of a material other than metal, a conductive layer is formed on the surface before electroforming. This conductive layer is formed by a film forming method such as a sputtering method, and the same metal material as the material constituting the electroformed product is used, for example.
  • the material of the mold sheet 11 (that is, the electroformed product) is not particularly limited, but is a metal including at least one of nickel, cobalt, gold, silver, copper and iron, and preferably nickel.
  • the thickness (t ⁇ m) of the mold sheet 11 is, for example, 200 ⁇ m or less, and more preferably 100 ⁇ m or less. The thinner the mold sheet 11 is, the more useful the present invention is. In relation to the diameter (Dmm) of the roll body around which the mold sheet 11 is wound, it is preferable that 2t ⁇ D in order to suppress distortion during winding.
  • the determination of whether or not the thickness of the mold sheet belongs to these ranges is to calculate the thickness for each position of the mold sheet, and at least one place where the thickness belongs to the above range. Depending on whether or not there is.
  • Each convex part (or each concave part) included in the concavo-convex pattern formed on the surface of the mold sheet 11 has, for example, a width (length in the left-right direction in FIG. 1) of 20 nm to 20 ⁇ m and a height (or depth) (FIG. 1 is 20 nm to 3 ⁇ m, and the length (the length in the direction perpendicular to the paper surface in FIG. 1) is 20 nm or more.
  • the surface of the mold sheet 11 on which the concavo-convex pattern is formed is referred to as “the front surface of the mold sheet”, and the opposite surface is referred to as “the back surface of the mold sheet”.
  • a mold release process may be performed on the surface of the mold sheet 11.
  • the mold release treatment is performed by a surface treatment method such as a dip coating method using Optool (registered trademark) manufactured by Daikin Industries, Ltd., for example.
  • the electroforming method may be a known method, and from the viewpoint of productivity, electroforming using a nickel sulfamate bath is particularly preferable.
  • a support that supports the shape of the mold sheet 11 is laminated on the front surface and / or the back surface of the mold sheet 11.
  • the support is made of a material having a rigidity that can support the shape of the mold sheet 11 and a flexibility that can be wound around the roll body.
  • the material for the support is not particularly limited, and for example, a resin material such as PET (polyethylene terephthalate) or acrylic can be used.
  • the thickness of the support is preferably 30 to 300 ⁇ m as a whole, and particularly preferably 50 to 200 ⁇ m, from the viewpoint of the balance between rigidity and flexibility.
  • the support can be laminated on the mold sheet 11 by, for example, a method of applying a resin material by a coating method such as a spin coating method or a spray method, or a method of attaching a resin film.
  • a resin film for example, BT-150E-KL (material: PET (separator part), acrylic (adhesive layer part), EVA (ethylene vinyl acetate) (base part part), thickness manufactured by Nitto Denko Corporation Can be used.
  • the back-side support 12 is laminated on the back surface of the mold sheet 11. After that, the laminate of the mold sheet 11 and the back side support 12 is peeled from the mold 10 (see c in FIG. 1). Before the back surface side support 12 is laminated, the back surface of the mold sheet 11 may be polished. Next, the surface side support body 13 is laminated
  • the back side support 12 is a support that is supported from the back side of the mold sheet 11
  • the front side support 13 is a support that is supported from the front side of the mold sheet 11. Further, the surface side support 13 also functions to protect the uneven pattern of the mold sheet 11.
  • the materials of the back side support 12 and the front side support 13 may be different from each other, but are preferably the same from the viewpoint of the stress balance acting on the mold sheet 11.
  • the back surface side support body 12 includes an adhesive layer at a position in contact with the roll body 17.
  • seat 11 and a support body can be more firmly fixed to a roll main body.
  • the material of the adhesive layer is preferably an acrylic adhesive, for example, a double-sided adhesive tape LA-50 manufactured by Nitto Denko Corporation (material: polyester (release liner part), acrylic (adhesive layer part), thickness: 50 ⁇ m) Can be used.
  • the back surface side support body 12 contains the cushion layer which can be elastically deformed.
  • the cushioning property of the cushion layer ensures the close contact between the mold sheet 11 and the inorganic substrate.
  • the pattern can be transferred appropriately.
  • the material of the cushion layer is preferably a fluorine rubber, and the thickness thereof is preferably 0.1 to 1 mm.
  • the back surface side support body 12 assumes that it serves as both an adhesion layer and a cushion layer with one layer.
  • the surface side support 13 includes a peelable adhesive at a position in contact with the mold sheet 11. Thereby, when the surface side support body 13 is peeled from the type
  • a surface-side support include BT-150E-KL or ELP-BT-130E-SL (materials: PET (release liner part), acrylic (adhesive layer part), EVA (base) manufactured by Nitto Denko Corporation. Material part), thickness: 130 ⁇ m) can be used.
  • the surface side support body 13 is laminated
  • a part of the surface side support 13 that obstructs the fixing work. It is possible to eliminate the loss of the support function and the protection function of the surface side support 13.
  • the position where the cut 13a is formed is set according to the position of the mold sheet 11 to which the fixing process is performed. Further, the cut 13a is formed in, for example, a straight line shape or a dotted line shape, and the depth thereof is appropriately adjusted.
  • the laminate 15 including the mold sheet 11 and the support is cut so as to have a desired size and shape suitable for winding around the roll body 17.
  • the cutting method is not particularly limited, but cutting using a punching die or cutting using a laser beam may be used.
  • E of FIG. 1 shows a state of cutting using the laser light L.
  • the laminate 15 including the mold sheet 11 is wound around and fixed to the roll body 17 so that the back surface of the mold sheet 11 is on the inside.
  • the diameter of the roll body 17 is, for example, 200 mm or less, and more preferably 100 mm or less. The thinner the roll body 17, the more useful the present invention is.
  • the timing for performing the fixing process is not particularly limited, and may be a method in which both ends E1 and E2 are welded with the laser beam L and fixed to the roll body 17 after winding, or the end E1 is first welded with the laser beam L. A method may be used in which the mold sheet 11 is wound around the roll main body 17 with reference to the fixing position, and the end E2 is finally fixed by welding (see a and b in FIG. 2).
  • the timing for removing the part may be before or after the mold sheet 11 is wound. Further, the laminate 15 may be fixed by suction. Moreover, when the back surface side support body 12 has an adhesion layer, it is not necessary to perform a fixing process.
  • FIG. 2b the case where the length of the mold sheet 11 and the circumference of the roll body 17 coincide (that is, the ends E1 and E2 are connected by one round) is shown. It does not necessarily need to match.
  • the mold roll 19 As shown in FIG. 2c is obtained. That is, the mold roll 19 includes a mold sheet 11 having a concavo-convex pattern 11 a on the surface, a back-side support 12 laminated on the back of the mold sheet 11, and a front-side support 13 laminated on the surface of the mold sheet 11. And a roll body 17.
  • the laminated body 15 is wound around and fixed to the roll body 17 with the back-side support 12 on the roll body 17 side.
  • the method for manufacturing a mold roll according to the present embodiment includes a stacking process in which a support is stacked on the front and back surfaces of a mold sheet, and a winding process in which the mold sheet on which the support is stacked is wound around and fixed to the roll body. And have. Since the mold sheet is supported by the support, the mold sheet is less likely to be wrinkled, broken, or torn. As a result, handling of the mold sheet becomes easy. And since handling of a mold sheet became easy, fixation to a roll body of a mold sheet becomes easier than before.
  • the mold roll manufactured by the manufacturing method according to the present embodiment is less likely to be wrinkled, broken, and torn, it has higher quality than before.
  • FIG. 3 is a schematic sectional drawing which shows the lamination process of the manufacturing method of the type
  • the method for manufacturing a mold roll according to the present embodiment is different from the method for manufacturing a mold roll according to the first embodiment in that the support is mainly laminated only on the surface of the mold sheet. Therefore, detailed description of the same components as those in the first embodiment is omitted unless particularly necessary.
  • the mold roll manufacturing method includes an electroforming step (see a in FIG. 3) for forming an electroformed product as the mold sheet 21, and a surface side on the surface of the mold sheet 21.
  • a laminating step (see c in FIG. 3) for laminating the support 23, a cutting step (see d in FIG. 3) for cutting the laminated body 25 into a necessary size, and the cut laminated body 25 as a roll body And a winding step of winding around.
  • the electroforming process and the cutting process are the same as in the first embodiment.
  • the surface side support 23 is formed on the surface of the mold sheet 21.
  • the front support 23 is provided with a cut 23a.
  • the laminate 25 (see e in FIG. 3) including the mold sheet 21 is wound and fixed so that the back surface of the mold sheet 21 is on the inside.
  • the laminated body 25 is fixed to the roll body by, for example, an adhesive and / or a fixing process.
  • the mold roll according to the present embodiment includes a laminate 25 having a mold sheet 21 having a concavo-convex pattern on the surface, and a surface side support 23 laminated on the surface of the mold sheet 21, and a roll body.
  • the laminate 25 is wound and fixed around the roll body with the mold sheet 21 facing the roll body.
  • the method for manufacturing a mold roll according to this embodiment also includes a laminating process for laminating a support on the mold sheet and a winding process for winding and fixing the mold sheet on which the support is laminated on the roll body. Since the mold sheet is supported by the support, the mold sheet is less likely to be wrinkled, broken, or torn, and thus the same effects as those of the first embodiment can be obtained.
  • the mold roll manufactured by the manufacturing method according to the present embodiment is less likely to be wrinkled, broken, and torn, it is of higher quality than before.
  • FIG. 4 is a schematic cross-sectional view showing a stacking step of the mold roll manufacturing method according to the third embodiment.
  • the mold roll manufacturing method according to the present embodiment is different from the mold roll manufacturing method according to the first embodiment in that the support is mainly laminated only on the back surface of the mold sheet. Therefore, detailed description of the same components as those in the first embodiment is omitted unless particularly necessary.
  • the mold roll manufacturing method includes an electroforming process for forming an electroformed product as the mold sheet 31, and a laminating process for laminating the back side support 32 on the back surface of the mold sheet 31. (Refer to a in FIG. 4), a cutting step (see c in FIG. 4) for cutting the laminated body 35 to a required size, and a winding step for winding the cut laminated body 35 around the roll body.
  • the electroforming process and the cutting process are the same as in the first embodiment.
  • the back surface side support 32 is formed on the back surface of the mold sheet 31 before the mold sheet 31 is peeled off from the mold 30 (see a in FIG. 4). And after the laminated body 35 which consists of the type
  • the laminated body 35 (see d in FIG. 4) including the mold sheet 31 is wound and fixed so that the back surface of the mold sheet 31 is on the inner side.
  • the laminated body 35 is fixed to the roll body by, for example, the adhesive layer and / or fixing process of the back side support 32.
  • the mold roll according to the present embodiment includes a laminated body 35 having a mold sheet 31 having a concavo-convex pattern on the surface thereof, a back surface side support 32 laminated on the back surface of the mold sheet 31, and a roll body.
  • the laminated body 35 is wound around and fixed to the roll body with the back surface side support 32 as the roll body side.
  • the method for manufacturing a mold roll according to this embodiment also includes a laminating process for laminating a support on the mold sheet and a winding process for winding and fixing the mold sheet on which the support is laminated on the roll body. Since the mold sheet is supported by the support, the mold sheet is less likely to be wrinkled, broken, or torn, and thus the same effects as those of the first embodiment can be obtained.
  • the mold roll manufactured by the manufacturing method according to the present embodiment is less likely to be wrinkled, broken, and torn, it is of higher quality than before.
  • FIG. 5 is a schematic cross-sectional view showing another embodiment of the back side support. 5 has a two-layer structure including a cushion layer 42a and an adhesive layer 42b. And when the laminated body 45 which consists of the type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

L'invention concerne un procédé de fabrication d'un rouleau de formation, qui facilite la manipulation des feuilles de formation, et un rouleau de formation. L'invention porte sur un procédé de fabrication d'un rouleau de formation (19), qui sur la surface du rouleau présente un motif en relief, comprenant : une étape pour le contrecollage de supports (12, 13) sur la surface frontale et/ou la surface arrière d'une feuille de formation (11), qui a un motif en relief (11a) sur la face frontale ; et une étape de bobinage, pour bobiner et fixer la feuille de formation (11), sur laquelle les supports (12, 13) ont été contrecollés, sur un corps de rouleau (17).
PCT/JP2015/057273 2014-04-15 2015-03-12 Procédé de fabrication d'un rouleau de formation, et rouleau de formation. WO2015159618A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-083803 2014-04-15
JP2014083803A JP6242738B2 (ja) 2014-04-15 2014-04-15 型ロールの製造方法及び型ロール

Publications (1)

Publication Number Publication Date
WO2015159618A1 true WO2015159618A1 (fr) 2015-10-22

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TW (1) TW201538303A (fr)
WO (1) WO2015159618A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03219441A (ja) * 1990-01-24 1991-09-26 Canon Inc 長尺スタンパー及びその作製方法
JPH05200757A (ja) * 1992-01-30 1993-08-10 Canon Inc フレキシブルスタンパー、ロール状スタンパー、および光情報記録媒体用基板の製造方法
JP2008296390A (ja) * 2007-05-29 2008-12-11 Asahi Kasei Corp 転写装置および転写方法
JP2010228347A (ja) * 2009-03-27 2010-10-14 Mitsubishi Rayon Co Ltd ロール状金型を用いた光学シートの製造方法
WO2013147105A1 (fr) * 2012-03-30 2013-10-03 コニカミノルタ株式会社 Moule en forme de rouleau et procédé permettant de fabriquer un moule en forme de rouleau ainsi qu'un élément

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03219441A (ja) * 1990-01-24 1991-09-26 Canon Inc 長尺スタンパー及びその作製方法
JPH05200757A (ja) * 1992-01-30 1993-08-10 Canon Inc フレキシブルスタンパー、ロール状スタンパー、および光情報記録媒体用基板の製造方法
JP2008296390A (ja) * 2007-05-29 2008-12-11 Asahi Kasei Corp 転写装置および転写方法
JP2010228347A (ja) * 2009-03-27 2010-10-14 Mitsubishi Rayon Co Ltd ロール状金型を用いた光学シートの製造方法
WO2013147105A1 (fr) * 2012-03-30 2013-10-03 コニカミノルタ株式会社 Moule en forme de rouleau et procédé permettant de fabriquer un moule en forme de rouleau ainsi qu'un élément

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TW201538303A (zh) 2015-10-16
JP6242738B2 (ja) 2017-12-06
JP2015202646A (ja) 2015-11-16

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