WO2015151896A1 - Housing unit and electronic component conveyance device - Google Patents

Housing unit and electronic component conveyance device Download PDF

Info

Publication number
WO2015151896A1
WO2015151896A1 PCT/JP2015/058716 JP2015058716W WO2015151896A1 WO 2015151896 A1 WO2015151896 A1 WO 2015151896A1 JP 2015058716 W JP2015058716 W JP 2015058716W WO 2015151896 A1 WO2015151896 A1 WO 2015151896A1
Authority
WO
WIPO (PCT)
Prior art keywords
electronic component
accommodation
pocket
unit
location
Prior art date
Application number
PCT/JP2015/058716
Other languages
French (fr)
Japanese (ja)
Inventor
日出夫 南
木村 浩之
Original Assignee
上野精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上野精機株式会社 filed Critical 上野精機株式会社
Priority to JP2015518111A priority Critical patent/JP5936215B2/en
Priority to TW104110687A priority patent/TWI579202B/en
Publication of WO2015151896A1 publication Critical patent/WO2015151896A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Definitions

  • the present invention relates to a storage unit that stores an electronic component that has passed through a transfer path, and an electronic component transfer device that forms the transfer path and includes the storage unit.
  • Electronic parts such as semiconductor elements are separated into individual pieces through various assembly processes such as dicing, mounting, bonding, and sealing, and then various inspection processes are performed.
  • This process is generally performed by an electronic component inspection apparatus called a test handler.
  • the main table is rotated, the electronic components of the transport unit are held by a holding unit such as a suction nozzle, and transported to each inspection apparatus for inspection.
  • the electronic component that has been inspected is accommodated in the pocket of the carrier tape in the taping unit.
  • the carrier tape is a long belt-like body, and a row of pockets is formed along the longitudinal direction.
  • the pockets have a size and a depth for storing electronic components by design, and are equally spaced along the longitudinal direction.
  • the pocket is designed to be positioned at the center of the width of the tape, and the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape (see, for example, Patent Document 1).
  • the taping unit sets an accommodation position that overlaps with the transport path on the carrier tape, and if the carrier tape is intermittently sent so that each pocket sequentially moves toward the accommodation position, the electronic components are sequentially placed in each pocket.
  • the carrier tape is intermittently sent so that each pocket sequentially moves toward the accommodation position, the electronic components are sequentially placed in each pocket.
  • the electronic components are sequentially placed in each pocket.
  • the position of the pocket with respect to the carrier tape is, by design, located at the center of the width of the tape, and although the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape, it is subtle due to manufacturing errors. Variations may occur. Therefore, it is only necessary to design the size of the pocket in consideration of the manufacturing error and the allowable clearance between the electronic component and the pocket.
  • the present invention has been proposed in order to solve the above-described problems, and is appropriate even if there is a manufacturing error in the formation position of the storage location with respect to the storage body such as a carrier tape, a tray, or a wafer sheet. It is an object of the present invention to provide a storage unit and an electronic component transport device that can store electronic components.
  • the storage unit is a storage unit that holds a storage body having a large number of storage locations and stores electronic parts transported along a transport path at a storage position, and moves the storage body in a plane,
  • a first moving means for positioning each of the accommodation locations at the accommodation position; an accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position; and an image captured by the accommodation location imaging means.
  • a housing location deviation detecting means for detecting the displacement of the housing location, and the housing body so as to eliminate the displacement of the housing location before the electronic component is housed in the housing location where the displacement is detected.
  • a second moving means for moving the plane.
  • Component imaging means for imaging the electronic component on the transport path
  • component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component, and a reference for the electronic component You may make it further provide the 3rd moving means to which the said electronic component is planarly moved so that the shift
  • a component imaging unit that images the electronic component on the transport path; and a component position detection unit that analyzes an image captured by the component imaging unit and detects the position of the electronic component.
  • the detection means detects a displacement of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and an image captured by the accommodation location imaging means, and the second movement means
  • the accommodating body may be moved in a plane so as to eliminate the displacement of the accommodating portion with respect to the electronic component.
  • the second moving means may eliminate the displacement of the accommodation location only when the inner wall of the accommodation location and the electronic component come within a predetermined distance.
  • the second moving means may eliminate the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value.
  • a determination unit configured to determine the proximity between the inner wall of the housing location and the electronic component; and a drive control unit configured to control driving or non-driving of displacement cancellation by the second moving unit according to the determination unit. You may do it.
  • the electronic component transport device is an electronic component transport device that transports an electronic component along a transport path and stores the electronic component in a container having a large number of storage locations, and holds the electronic component.
  • holding means for separating, a transport table having the holding means on the outer periphery, intermittently rotating, a storage position set at one stop position of the holding means, and moving the storage body in a plane, Analyzing the first moving means for positioning the accommodation location at the accommodation position, the accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position, and the image captured by the accommodation location imaging means And a housing location deviation detecting means for detecting a displacement of the housing location, and before the electronic component is housed in the housing location where the displacement is detected, the displacement of the housing location is eliminated. Further comprising a second moving means for planar moving the container in so that the features a.
  • the holding means extends outward in the radial direction of the transfer table, bends toward the container, holds an electronic component at a bent tip, and the storage position is set at a bending destination of the holding means,
  • the deviation confirmation position may be set closer to the center of the transfer table than the bent tip of the holding means.
  • Rails extending in a direction orthogonal to the radial direction of the transfer table may be provided on the outer periphery of the transfer table, and the holding means may be guided by the rails and slide to advance and retract toward the container. .
  • Component imaging means for imaging the electronic component on the transport path
  • component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component, and a reference for the electronic component You may make it further provide the 3rd moving means to which the said electronic component is planarly moved so that the shift
  • a component imaging unit that images the electronic component on the transport path; and a component position detection unit that analyzes an image captured by the component imaging unit and detects the position of the electronic component.
  • the detection means detects a displacement of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and an image captured by the accommodation location imaging means, and the second movement means
  • the accommodating body may be moved in a plane so as to eliminate the displacement of the accommodating portion with respect to the electronic component.
  • the second moving means may eliminate the displacement of the accommodation location only when the inner wall of the accommodation location and the electronic component come within a predetermined distance.
  • the second moving means may eliminate the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value.
  • a determination unit configured to determine the proximity between the inner wall of the housing location and the electronic component; and a drive control unit configured to control driving or non-driving of displacement cancellation by the second moving unit according to the determination unit. You may do it.
  • the reference position and the reference orientation can be maintained at the storage position even when the storage location of the electronic component is shifted due to a manufacturing error, and the electronic component can be stored with high accuracy. Contact with the wall that defines the part storage location and insertion errors are less likely to occur.
  • positioning method of the taping unit with respect to the electronic component conveying apparatus which concerns on 1st Embodiment is shown, (a) is a top view, (b) is the side view seen from the A direction of the top view.
  • positioning method of the taping unit with respect to the electronic component conveying apparatus which concerns on 1st Embodiment is shown, (a) is a top view, (b) is the side view seen from the B direction of the top view. It is a top view which shows the structure of the electronic component conveying apparatus which concerns on 2nd Embodiment. It is a block diagram which shows control of the taping unit mounted in the electronic component conveying apparatus which concerns on 2nd Embodiment.
  • the taping unit 2 shown in FIGS. 1 and 2 is an example of a housing unit that holds the housing and houses the electronic component D in the housing location.
  • the taping unit 2 holds a carrier tape T and accommodates an electronic component D in each pocket T1 formed in the carrier tape T.
  • the taping unit 2 positions each pocket T1 in the storage position P1, and stores the electronic component D transported to the storage position P1 along the transport path in the pocket T1.
  • the electronic component D is transported along the transport path while being held by the holding means 11.
  • the holding means 11 stops at the storage position P1, and separates the electronic component D toward the pocket T1.
  • the other portion on the carrier tape T has a storage inspection position P3.
  • the storage inspection position P3 In the storage inspection position P3, erroneous storage of the electronic component D stored in the pocket T1 is detected. That is, the storage inspection position P3 includes a first imaging unit 26 that captures an image of the inside of the pocket T1 located at the storage inspection position P3.
  • the electronic component D accommodated in the pocket T1 is a component used for electrical products.
  • the electronic component D include a semiconductor element and a resistor or capacitor other than the semiconductor element.
  • the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, and thyristors, and integrated circuits such as ICs and LSIs.
  • the electronic component D other than the semiconductor includes a chip capacitor, a chip resistor, an inductor, a filter, an isolator and the like.
  • the carrier tape T held by the taping unit 2 is a long strip made of a chemical product such as paper or polystyrene resin, and is flexible so that it can be unwound and wound.
  • a row of pockets T1 is formed along the longitudinal direction.
  • the pocket T1 has a size and depth for storing the electronic component D in design, and is equally spaced along the longitudinal direction. Further, the pocket T1 is designed to be positioned at the center of the width of the tape, and the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape T.
  • This taping unit 2 moves the carrier tape T by two moving means having different purposes.
  • the first moving means is two sprockets 21 and 22 that move the carrier tape T horizontally in the longitudinal direction to sequentially move the pockets T1 to a later-described displacement confirmation position P2, accommodation position P1, and accommodation inspection position P3.
  • the second moving means is a correcting unit 25 that moves the carrier tape T in advance so that the pocket T1 is in the reference position and orientation when the pocket T1 is positioned at the storage position P1.
  • the reference position is a position at which the position immediately below the holding means 11 and the center of the pocket T1 coincide with each other when the holding means 11 reaches the storage position P1.
  • the reference direction is a direction in which the width direction or the longitudinal direction of the carrier tape T before correction coincides with one side of the pocket T1.
  • the two sprockets 21 and 22 are intermittently rotated while being fitted in sprocket holes formed at equal intervals along the longitudinal direction of the carrier tape T, thereby causing the carrier tape T to run intermittently and each pocket.
  • T1 is sequentially positioned at the storage position P1.
  • the two sprockets 21 and 22 are disks having the same diameter with protrusions protruding along the circumferential surface, arranged on the same vertical plane, and have the rotation axes parallel and at the same height.
  • the carrier tape T is bridged to both the sprockets 21 and 22, and the protrusions are engaged with the sprocket holes. An external force is received from the projection through the sprocket hole, and travels in the longitudinal direction in conjunction with the rotation of the sprockets 21 and 22.
  • the sprockets 21 and 22 are pivotally supported by corresponding motors 23 and 24, respectively, and rotate in the same circumferential direction. Both motors 23 and 24 rotate intermittently by one pitch. The pitch is the same as the design arrangement interval of the pocket T1. That is, the pocket T1 stops at a common stop position. Then, the taping unit 2 basically matches one of the stop positions of the pocket T1 with the accommodation position P1 on the transport path, and receives the electronic component D from which the holding means 11 is detached in the pocket T1 of the carrier tape T. Further, the taping unit 2 in principle matches the other stop position of the pocket T1 with the accommodation inspection position P3 on the conveyance path, and inspects the accommodation mode of the electronic component D inside the pocket T1.
  • the correction unit 25 includes a Z-axis rotation drive unit 251 that rotates the unit main body 29 of the taping unit 2 around the Z axis, an X-axis movement drive unit 252 that moves the unit main body 29 in the X-axis direction orthogonal to the Z-axis, A Y-axis movement drive unit 253 that moves the unit main body 29 in the Y-axis direction orthogonal to the Z-axis and the X-axis is provided.
  • the unit main body 29 of the taping unit 2 is a support for the carrier tape T, and is a case for supporting the sprockets 21 and 22 and the sprockets 21 and 22 pivotally.
  • the Z axis passes through the storage position P1 and is orthogonal to the opening surface of the pocket T1.
  • the X-axis passes through the storage position P1, is parallel to the opening surface of the pocket T1, and is preferably along the longitudinal direction of the carrier tape T.
  • the Y-axis passes through the storage position P1, is parallel to the opening surface of the pocket T1, and is preferably along the width direction of the carrier tape T.
  • the Z-axis rotation drive unit 251 is a motor 251 a having a rotation shaft 251 b and is disposed on the bottom surface of the unit main body 29.
  • the rotation shaft 251 b of the Z-axis rotation drive unit 251 is coaxial with the Z-axis and is fixed to the bottom surface of the unit main body 29.
  • the X-axis movement drive unit 252 includes a slider 252a on which the motor 251a of the Z-axis rotation drive unit 251 is mounted, a screw shaft 252b to which the slider 252a is fitted, and a motor 252c that rotates a screw shaft 252b extending in the X-axis direction. Consists of.
  • the Y-axis movement drive unit 253 is configured by a slider 253a on which the X-axis movement drive unit 252 is mounted, a screw shaft 253b fitted to the slider 253a, and a motor 253c that rotates the screw shaft 253b extending in the Y-axis direction.
  • the correction unit 25 moves the carrier tape T in advance so that the pocket T1 is at the reference position and orientation at the storage position P1. Therefore, the taping unit 2 has a displacement confirmation position P2 before the accommodation position P1.
  • the accommodation position P1 is located downstream in the running direction from the deviation confirmation position P2 in the running direction of the carrier tape T, and the deviation confirmation position P2 is located upstream in the running direction from the accommodation position P1. It is desirable that the displacement confirmation position P2 and the accommodation position P1 are arranged next to each other.
  • the accommodation inspection position P3 is located further downstream in the traveling direction than the accommodation position P1.
  • the displacement confirmation position P2 is provided with a second imaging unit 27 for confirming the position of the pocket T1.
  • the taping unit 2 includes a pocket shift detection unit 28 that detects a shift in the position and orientation of the pocket T1 based on information obtained by the second imaging unit 27.
  • the correction unit 25 moves the unit main body 29 so as to correct the position and orientation shift of the pocket T1 detected by the pocket shift detection unit 28.
  • the second imaging unit 27 is a camera, for example, and is arranged in the vicinity of the deviation confirmation position P2 so that the deviation confirmation position P2 is within the imaging area.
  • the pocket misalignment detection unit 28 is an image analysis device including a so-called computer.
  • the pocket shift detection unit 28 analyzes the image captured by the second image capturing unit 27 and calculates a shift amount with respect to the reference position and the reference direction of the pocket T1.
  • FIG. 3 is a schematic diagram showing the calculation of the amount of deviation of the pocket T1 by the pocket deviation detector 28.
  • the pocket shift detection unit 28 stores in advance origin information 281 with one point in the image as the origin.
  • the origin information 281 indicates the reference position of the pocket T1, and is, for example, coordinate information of one corner when the pocket T1 exists at the reference position.
  • the pocket shift detection unit 28 stores a reference direction vector 282 in advance.
  • the reference direction vector 282 indicates the reference direction of the pocket T1, and is, for example, the extending direction of one side when the pocket T1 is along the reference direction.
  • the coordinate system of the image is preferably along the longitudinal direction and the width direction of the carrier tape T, and can be adjusted by adjusting the installation position and orientation of the second imaging unit 27 or by rotating the image. Good.
  • the pocket shift detection unit 28 detects one corner of the pocket T1 from the image captured by the second imaging unit 27, and calculates a position vector 283 from the origin to the corner.
  • the position vector 283 is the shift amounts ⁇ X and ⁇ Y indicating the shift from the reference position of the pocket T1.
  • the pocket shift detection unit 28 detects one side of the pocket T1 from the image captured by the second imaging unit 27, and calculates a direction vector 284 in which the one side extends.
  • the pocket shift detection unit 28 calculates the inner product of the reference direction vector 282 and the direction vector 284, divides the result by multiplying the scalars of both direction vectors, and calculates the inverse cosine of the division result.
  • This inverse cosine calculation result ⁇ is a shift amount indicating a shift of the pocket T1 from the reference direction.
  • the correction unit 25 moves and rotates the carrier tape T so as to eliminate the shift amount with respect to the reference position and the reference direction detected by the pocket shift detection unit 28. That is, the Z-axis rotation driving unit 251 rotates in the opposite direction to the deviation by the same angle ⁇ as the deviation from the reference direction obtained by the pocket deviation detecting unit 28 from the direction vector 284.
  • the X-axis movement drive unit 252 moves in the opposite direction of the position vector by the same amount as the scalar amount ⁇ X in the X-axis direction of the position vector 283 obtained by the pocket deviation detection unit 28.
  • the Y-axis movement drive unit 253 moves in the opposite direction of the position vector by the same amount as the scalar amount ⁇ Y in the Y-axis direction of the position vector 283 obtained by the pocket deviation detection unit 28.
  • the correction of the displacement of the pocket T1 by the correcting unit 25 is performed after the displacement of the pocket T1 is confirmed at the displacement confirmation position P2 until the electronic component D is detached from the pocket T1 moved to the accommodation position P1. Any timing is acceptable.
  • FIGS. 4 to 7 are schematic diagrams showing deviation correction of the taping unit 2. 4 to 7, the travel of the carrier tape T for one pitch, the correction of the deviation amount ⁇ X in the X-axis direction, the correction of the deviation amount ⁇ Y in the Y-axis direction, and the deviation amount ⁇ around the Z-axis.
  • the correction is performed by shifting the time in order, the correction is not limited to this, and all corrections are achieved before the electronic component D is detached from the pocket T1 after moving from the misalignment confirmation position P2 to the receiving position P1. It may be all at the same time.
  • the position and orientation of the pockets T1 on the carrier tape T can be shifted to a specific degree, not uniform, due to manufacturing errors such as embossing.
  • the pocket T1 which is located two tapes ahead in the tape running direction from the storage position P1 is stopped at the deviation confirmation position P2 through the intermittent running of the carrier tape T by the sprockets 21 and 22.
  • the second imaging unit 27 images the pocket T1 at the displacement confirmation position P2
  • the pocket displacement detection unit 28 detects the positional displacement amount ⁇ X of the pocket T1 in the X-axis direction.
  • a positional deviation amount ⁇ Y in the Y-axis direction and an orientation deviation amount ⁇ around the Z-axis are calculated.
  • the correction unit 25 performs the process until the electronic component D is detached from the pocket T ⁇ b> 1 moved at an equal interval Ed from the deviation confirmation position P ⁇ b> 2 to the accommodation position P ⁇ b> 1. Correct in between. First, the position shift amount ⁇ X in the X-axis direction, the position shift amount ⁇ Y in the Y-axis direction, and the direction shift amount ⁇ are input to the correction unit 25 from the pocket shift detection unit 28.
  • the Y-axis movement drive unit 253 moves the unit main body 29 by a distance corresponding to the positional deviation amount ⁇ Y.
  • the X-axis movement driving unit 252 moves the unit main body 29 by a distance corresponding to the positional deviation amount ⁇ X.
  • the Z-axis rotation driving unit 251 rotates the unit main body 29 about the accommodation position P1 by an angle corresponding to the amount of deviation ⁇ .
  • the displacement confirmation position P2 does not have to be the previous position as long as it is upstream in the traveling direction from the accommodation position P1. However, if the displacement confirmation position P2 and the accommodation position P1 are adjacent to each other, it is possible to eliminate the influence of the positional deviation or the orientation deviation of the pocket T1 with respect to the accommodation position P1 due to distortion or bending of the carrier tape T.
  • the pocket T1 can be two-dimensionally moved in parallel with the opening surface, and the X axis and the Y axis need only be parallel to the opening surface of the pocket T1 and orthogonal to each other.
  • one movement direction of the unit main body 29 and one axis in the coordinate system of the pocket deviation detection unit 28 coincide with the longitudinal direction of the carrier tape T, and the other movement direction of the unit main body 29 and the coordinates of the pocket deviation detection unit 28 are matched. If the other axis in the system matches the width direction of the carrier tape T, the calculation for the movement amount may be simplified.
  • the taping unit 2 has the displacement confirmation position P2 at a position different from the accommodation position P1, and the carrier tape T is run by the sprockets 21 and 22, whereby each pocket T1 is accommodated via the displacement confirmation position P2. It was made to position in position P1.
  • the pocket T1 is imaged by the second imaging unit 27, and the image captured by the second imaging unit 27 is analyzed to detect the displacement of the pocket T with respect to the reference position and the reference orientation.
  • the electronic component D is accommodated at the accommodation position P1.
  • the carrier tape T was moved and rotated in a plane so as to eliminate the displacement of the pocket T1.
  • the pocket T1 is shifted in the width direction of the carrier tape T due to a manufacturing error, shifted in the longitudinal direction, or changed in direction, the reference position and the reference direction are maintained at the storage position P1, and the electronic component D Can be accommodated with high accuracy. That is, it becomes difficult to make a contact with a wall defining the pocket T of the electronic component D or an insertion error.
  • the taping unit 2 or the entire electronic component transport device including the taping unit 2 may be stopped. That is, the dimension of the pocket T1 and the hole on the bottom surface are measured from the image captured by the second imaging unit 27. Further, a dust image inside the pocket T1 is detected from the image captured by the second imaging unit 27. Then, the dimension or the hole is compared with a specified value, and if there is a deviation from the specified value or more than a predetermined value, the shape is abnormal. Further, when a dust image is detected, a contamination abnormality is assumed. Signals indicating the shape abnormality and the contamination abnormality are output to the control device, and the control device stops the taping unit 2 and the electronic component transport device.
  • the correction unit 25 moves the carrier tape T in advance so that the pocket T1 is at the reference position and orientation at the storage position P1.
  • “preliminary” refers to the time before the electronic component D starts to be stored in the pocket T1 by the detachment process of the holding means 11. Therefore, the accommodation position P1 and the deviation confirmation position P2 may be matched. That is, the location where the transport path of the electronic component D and the carrier tape T intersect is the accommodation position P1 and the displacement confirmation position P2, and the second imaging unit 27 is disposed toward the intersection.
  • FIG. 8 shows a configuration of an electronic component transport apparatus including the taping unit 2.
  • the electronic component transport apparatus 10 arranges a transport path for the electronic components D on the gantry, and aligns and transports a plurality of electronic components D along the transport path.
  • the gantry is a rectangular parallelepiped pedestal and accommodates control devices such as a computer and a controller, a power source, cables, a compressor, and an air pipe.
  • the pocket misalignment detection unit 28 of the taping unit 2 may be a control device built in the gantry, or the taping unit 2 may be provided with a control device separately. Control of the correction unit 25 of the taping unit 2 may be performed by a control device built in the gantry, or the taping unit 2 may be provided with a separate control device.
  • the conveyance path of the electronic component D is formed by the conveyance table 12 on the gantry.
  • the holding means 11 is attached to the outer periphery of the transport table 12.
  • the rotation trajectory of the holding unit 11 is a conveyance path, and the conveyance table 12 and the holding unit 11 are conveyance units that convey the electronic component D.
  • the conveyance table 12 has a shape such as a disk or a star that expands radially around one point.
  • the transport table 12 rotates intermittently by a predetermined angle in the circumferential direction.
  • the power source of the transport table 12 is a direct drive motor 13.
  • the transfer table 12 is installed on the gantry via the direct drive motor 13.
  • a plurality of holding means 11 are attached to the outer periphery of the horizontal plate of the transfer table 12 at equal circumferential positions and at the same distance from the center of the horizontal plate.
  • the transfer table 12 has a star shape, it is attached to the tip of the arm.
  • the holding means 11 is, for example, a suction nozzle, and is installed on a horizontal plate with a hollow inside, one end opened, and the open end facing downward.
  • the inside of the holding means 11 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. By generating a negative pressure in the pneumatic circuit, the holding means 11 adsorbs the electronic component D at the open end, and releases the electronic component D by vacuum break or release to the atmosphere.
  • the direct drive motor 13 is controlled to rotate intermittently by one pitch.
  • the pitch is adjusted to be equal to the arrangement interval of the holding means 11. That is, the holding means 11 follows a common movement locus with the intermittent rotation of the transport table 12 and stops at a common stop position.
  • the electronic component D can be accommodated in the carrier tape T by overlapping the accommodation position P1 of the taping unit 2 at this stop position.
  • processing units can be arranged in addition to the stop position where the taping unit 2 is provided.
  • processing units include a supply unit 15 that supplies the electronic component D to the transport path, an electrical test unit 16, an appearance inspection unit 17, a classification unit 18, a position correction unit 19, and the like.
  • the position correction unit 19 is provided immediately before the taping unit 2 and aligns the position and orientation of the electronic component D with the reference position and reference orientation.
  • the position correction unit 19 includes a third imaging unit 191 and an XY ⁇ stage 192 at two adjacent stop positions, and the positional deviation and orientation deviation of the electronic component D confirmed by the third imaging unit 191 are detected in the XY ⁇ stage. 192 to correct.
  • the third imaging unit 191 is a camera, for example, and images the electronic component D from directly below the stop position of the holding unit 11.
  • the XY ⁇ stage 192 moves in the X-axis and Y-axis directions and rotates around the Z-axis.
  • an advancing / retreating drive device 14 for advancing and retracting the holding means 11 toward the processing unit is fixed.
  • the forward / backward drive device 14 is also fixed immediately above the storage position P1.
  • the advance / retreat drive device 14 has a rod extending toward the head of the holding means 11.
  • the advancing / retracting drive device 14 applies axial thrust to the rod by a rotary motor and a cam mechanism.
  • the advancing / retracting drive device 14 generates a thrust by a rotary motor, converts the thrust into a linear thrust along the axis of the holding means 11 by a cam mechanism and a rod, and pushes the holding means 11 by a rod.
  • the electronic component D held by the holding means 11 enters the pocket T1 of the taping unit 2 by the lowering of the holding means 11, or is placed on each stage of the processing unit, detached from the pocket T1, or processing corresponding to the processing unit. Receive.
  • FIG. 9 shows a first arrangement method of the taping unit 2 with respect to such an electronic component conveying apparatus 10.
  • the taping unit 2 is arranged so that the extending direction of the carrier tape T is directed to the center of the transport table 12 and the carrier tape T travels outward of the transport table 12.
  • the accommodation position P ⁇ b> 1 is positioned immediately below the outer edge of the transport table 12 in correspondence with the holding means 11 attached to the outer edge of the transport table 12. For this reason, the deviation confirmation position P2 sinks under the transport table 12. Further, the displacement confirmation position P2 is hidden by the holding means 11 from the direction in which the carrier tape T extends.
  • the second imaging unit 27 is installed obliquely so as not to collide with the transport table 12 so that the displacement confirmation position P2 is observed.
  • the second imaging unit 27 may not be installed at a position where the shift confirmation position P2 can be observed without colliding with the transfer table 12.
  • the transfer table 12 has a disk shape, and a through hole 121 is provided directly above the storage position P1.
  • the second imaging unit 27 is fixed above the transport table 12 toward the through hole 121. Accordingly, the second imaging unit 27 can observe the displacement confirmation position P ⁇ b> 2 through the through hole 121 regardless of the size of the transport table 12.
  • FIG. 10 is a schematic diagram showing a second arrangement method of the taping unit 2 with respect to the electronic component conveying apparatus 10.
  • the taping unit 2 is arranged such that the radial direction of the transport table 12 passing through the storage position P ⁇ b> 1 and the extending direction of the carrier tape T are orthogonal or oblique.
  • the displacement confirmation position P2 is located on the outer peripheral side of the transfer table 12 or outside the first arrangement method. Therefore, the second imaging unit 27 can observe the deviation confirmation position P2 while being arranged outside the conveyance table 12 in the radial direction.
  • the weight of the transport table 12 is lighter than that of the first arrangement method, and the output of the direct drive motor 13 can be reduced.
  • FIG. 11 is a side view showing a third arrangement method of the taping unit 2 with respect to the electronic component conveying apparatus 10.
  • the taping unit 2 is arranged so that the extending direction of the carrier tape T is directed toward the center of the transport table 12 and the carrier tape T travels outward of the transport table 12.
  • the holding means 11 is attached to the transport table 12 so as to be positioned further outside the outer edge of the transport table 12. That is, the outer shape of the holding means 11 once extends radially outward from the outer periphery of the transfer table 12 and then bends directly downward.
  • a rail 122 extending downward is provided on the outer edge of the transfer table 12.
  • the holding means 11 has a slider 111 that slides on the rail 122.
  • An extension rod 112 extends from the slider 111 toward the outside of the transfer table 12.
  • a suction nozzle 113 extending downward is fixed to the tip of the extension rod 112.
  • the advancing / retracting drive device 14 has a rod 141 extending toward the slider 111 and acts to push the slider 111 in.
  • the rail 122 guides the sliding direction, so that an unbalanced load is generated. This prevents the holding means 11 from changing its orientation.
  • the taping unit 2 can be arranged with respect to the electronic component conveying apparatus 10 having the holding means 11 so that the accommodation position P1 is located outside the conveyance table 12. For this reason, the deviation confirmation position P2 is closer to the center of the conveyance table 12 than the holding means 11, but can be positioned on the outer peripheral side or outside of the conveyance table 12 as compared with the first arrangement method. Therefore, the second imaging unit 27 can observe the deviation confirmation position P2 while being arranged outside the conveyance table 12 in the radial direction.
  • the transport table 12 can be reduced in weight compared to the first arrangement method. Therefore, the output of the direct drive motor 13 can be reduced as compared with the first arrangement method.
  • the range of the taping unit 2 that occupies the periphery of the transport table 12 can be made narrower than in the second arrangement method. Therefore, as compared with the second arrangement method, a larger number of processing units can be arranged on the conveyance table 12, and the electronic component conveyance apparatus 10 can be multifunctional.
  • the second imaging unit 27 is provided on the side of the taping unit 2, and the deviation confirmation position. P2 is imaged from an oblique direction.
  • the pocket deviation detection unit 28 may calculate the deviation amount from the reference position and orientation after converting the obliquely projected image into an orthographic projection using the angle of the second imaging unit 27 as a parameter.
  • the arrangement of the second imaging unit 27 and the photographing of the pocket T1 are further facilitated. .
  • the electronic component transport apparatus 10 includes the third imaging unit 191 in the upstream of the transport path with respect to the taping unit 2, but corrects the position and orientation of the electronic component D.
  • another processing unit may be arranged to be multifunctional, or the installation location of the XY ⁇ stage 192 may be a location where the processing unit is not installed.
  • the taping unit 2 analyzes the image of the third imaging unit 191 in addition to the pocket shift detection unit 28 and electronic components from the reference position and orientation.
  • a component position detector 28a for detecting the position and orientation of D is provided.
  • the component position detection unit 28a may be provided in a control device in a gantry that performs overall control of the entire electronic component transport apparatus 10, or in the case where the taping unit 2 has a control device independently, You may make it prepare.
  • the component position detection unit 28a has the same function and operation as the pocket shift detection unit 28 according to the first embodiment except that the detection target is the electronic component D. That is, as illustrated in FIG. 14, the component position detection unit 28 a stores the origin information 281 in advance, analyzes the image of the electronic component D captured by the third imaging unit 191, and determines the reference position of the electronic component D. A position vector 285 indicating the deviation is calculated. The component position detection unit 28a stores a reference direction vector 282 in advance, analyzes the image of the electronic component D captured by the third imaging unit 191 and generates a direction vector 286 indicating a deviation from the reference direction of the electronic component D. calculate. The reference position and orientation of the pocket T1 and the reference position and orientation of the electronic component D are set in advance so as to match.
  • the position vector 285 and the direction vector 286 related to the electronic component D calculated by the component position detection unit 28a are input to the pocket shift detection unit 28 that calculates a shift in the position and orientation of the pocket T1.
  • the pocket shift detection unit 28 holds a position vector 285 related to the electronic component D as origin information 281 and holds a direction vector 286 related to the electronic component D as a reference direction vector 282.
  • the pocket shift detection unit 28 calculates the position vector 283 of the pocket D based on the origin information 281 indicated by the position vector 285, and the angle ⁇ formed by the reference vector 282 indicated by the direction vector 286 and the direction vector 284 of the pocket D. Is calculated.
  • the position vector 283 indicates the positional deviation amount ⁇ X in the X-axis direction and the positional deviation amount ⁇ Y in the Y-axis direction of the pocket T1 with respect to the electronic component D.
  • the angle formed by the direction vector 286 of the electronic component D and the direction vector 284 of the pocket T1 indicates the amount of deviation ⁇ of the pocket T1 with respect to the electronic component D.
  • the position shift amount ⁇ X, the position shift amount ⁇ Y, and the direction shift amount ⁇ are input to the correction unit 25, and when the pocket T1 reaches the storage position P1, the position shift amount ⁇ X and the position shift amount.
  • the unit main body 29 is moved and rotated so as to eliminate ⁇ Y and the direction deviation amount ⁇ .
  • both the electronic component D and the pocket T1 are matched to the absolute position and orientation of the reference position and orientation.
  • the position and orientation of the electronic component D are corrected by the position correction unit 19 provided in the upstream of the transport path with respect to the taping unit 2, and the position and orientation of the pocket T 1 are referenced by the correction unit 25 of the taping unit 2. Adjusted to position and reference orientation.
  • the displacement of the position and orientation of the electronic component and the displacement of the position and orientation of the pocket T1 are synthesized, and the position and orientation of the pocket T1 are matched with the position and orientation of the electronic component D.
  • the pocket T1 is moved and rotated in consideration of the position and orientation of the electronic component D.
  • the electronic component transport apparatus 10 ranks the degree of non-defective products of the electronic components D based on the processing results for determining the quality of the electronic components such as the electrical test unit 16 and the appearance inspection unit 17.
  • Electronic components D having the same rank are accommodated in the same carrier tape T.
  • the electronic component transport apparatus 10 includes N units of taping units 2a, 2b,...
  • the taping units of the N machine may be continuously arranged in the transport path, or other types of processing units are interposed, or there are places where the processing units are not arranged between the taping units 2a, b,. It may be discontinuous, such as.
  • the electronic component transport device 10 associates a rank with each electronic component D, and transports it to a position directly above the taping units 2a, 2b,.
  • the taping unit 2a accommodates the uppermost electronic component D in the carrier tape T
  • the taping unit 2b accommodates the upper electronic component D having a lower rank than the uppermost rank in the carrier tape T.
  • the taping unit 2a is positioned upstream of the transport path with respect to the taping unit 2b.
  • the electronic component transporting apparatus 10 includes a holding means that holds the electronic component D S It controls to disengage the electronic component D S with respect to 11. Specifically, after the holding means 11 is lowered with respect to the pocket T1, the suction force is lost by breaking the vacuum or the atmosphere.
  • the electronic component D A senior A is located at the accommodated position P1 of the taping unit 2a, the electronic component transporting apparatus 10, its electronic part D with respect to the holding means 11 Keep A held.
  • the holding means 11 is not controlled for loss of adsorption power such as vacuum break or atmospheric break.
  • the electronic components D A senior A simply passes above the taping unit 2a.
  • the electronic component D A senior A is further intermittent movement of the conveyor path and positioned to accommodate the position P1 of the taping unit 2b, an electronic component transporting apparatus 10, the electronic component controls to disengage the electronic component D a to the holding means 11 holding the D a. More specifically, the holding means 11 is broken in vacuum or in the atmosphere to lose the adsorption power.
  • each taping unit 2a, 2b,... Has a displacement confirmation position P2 in the front stage in the traveling direction from the accommodation position P1, and includes a first imaging unit 26, a pocket displacement detection unit 28, A component position detection unit 28a and a correction unit 25 are provided, and the displacement of the position and orientation of the pocket T1 moving to the storage position P1 can be corrected.
  • Each of the taping units 2a, 2b,... Moves the unit main body 29 so as to correct the position and orientation of the pocket T1 until the electronic component D to be accommodated is located at the accommodation position P1 and released. And rotate it.
  • the control device inputs the position vector 285 and the direction vector 286 to the taping unit 2a or 2b corresponding to the rank of the electronic component D having the deviation.
  • the taping unit 2a or 2b uses these as the origin information 281 and the reference direction vector 282. Then, the displacement of the position and orientation of the pocket T1 is corrected in accordance with the electronic component D that is removed at the accommodation position P1.
  • the electronic component transport apparatus 10 includes a position correction unit 19 having an XY ⁇ stage 192.
  • Each taping unit 2a, 2b,... Has a first imaging unit 26, a pocket shift detection unit 28, and a correction unit 25. It is also possible to provide both the electronic component D and the pocket T1 at the absolute position and orientation of the reference position and orientation.
  • the taping unit 2 that holds the carrier tape T that accommodates the electronic component D takes into account the displacement of the position and orientation of the electronic component D.
  • the unit main body 29 may be moved and rotated so that the pocket T1 is aligned with the position and orientation of the electronic component D.
  • FIG. 20 is a block diagram illustrating a control configuration of the correction unit 25 according to the fourth embodiment.
  • the taping unit 2 includes a determination unit 41 and a drive control unit 42.
  • the determination unit 41 and the drive control unit 42 are configured by a so-called computer, and include a CPU, a memory, and a driver interface that drives the correction unit 25.
  • the computer may also be used as a control device provided in the electronic component transport apparatus 10. That is, it functions as the determination unit 41 and the drive control unit 42 to control the taping unit 2, to control the transport table 12, to control the vacuum supply to the holding means 11, and to control the other units 15 to 19. It may be.
  • the determination unit 41 detects the proximity between the inner wall that defines the pocket T1 and the electronic component D, and determines whether the correction unit 25 needs to correct according to the proximity. To do.
  • the determination unit 41 stores a threshold value Xt of the positional deviation amount ⁇ X of the pocket T1 in the X-axis direction and a threshold value Yt of the positional deviation amount ⁇ Y of the pocket T1 in the Y-axis direction.
  • the determination unit 41 compares the positional deviation amount ⁇ X detected by the pocket deviation detection unit 28 with the threshold value Xt, and compares the positional deviation amount ⁇ Y with the threshold value Yt.
  • the drive control unit 42 drives the correction unit 25 according to the necessity of correction.
  • the necessity of correction is a determination result of the determination unit 41, and correction is required when one or both of the positional deviation amount ⁇ X and the positional deviation amount ⁇ Y exceed the threshold values Xt and Yt.
  • the drive control unit 42 makes correction unnecessary when both the positional deviation amount ⁇ X and the positional deviation amount ⁇ Y are below the threshold values Xt and Yt.
  • the drive control unit 42 outputs a drive signal to the correction unit 25 when correction is necessary. For example, the positional deviation amount ⁇ X and the positional deviation amount ⁇ Y calculated by the pocket deviation detection unit 28 suffice.
  • the correction unit 25 corrects the positional deviation of the electronic component D in response to the drive signal.
  • the drive control unit 42 does not output a drive signal to the correction unit 25 when correction is not necessary.
  • the correction unit 25 does not drive because the drive signal is not input, and does not correct the positional deviation of the electronic component D. That is, the correction unit 25 corrects the pocket T1 if the distance between the inner wall that defines the pocket T1 and the electronic component D is within a certain range, and defers the correction of the pocket T1 if the proximity is greater than a certain value.
  • FIG. 21 is a flowchart showing the operations of the determination unit 41 and the drive control unit 42.
  • the determination unit 41 compares the positional deviation amount ⁇ X and the threshold value Xt (step S02).
  • the determination unit 41 compares the positional deviation amount ⁇ Y with the threshold value Yt (step S03).
  • step S02, Yes if the positional deviation amount ⁇ X is less than the threshold value Xt (step S02, Yes) and the positional deviation amount ⁇ Y is less than the threshold value Yt (step S03, Yes), the drive control unit 42 sends a correction to the correction unit 25.
  • the process is terminated without inputting the drive signal, and the holding unit 11 causes the electronic component D to leave the pocket 1 (step S07).
  • step S02 if the positional deviation amount ⁇ X exceeds the threshold value Xt (step S02, Yes), or if the positional deviation amount ⁇ Y exceeds the threshold value Yt (step S03, Yes), the drive control unit 42 Then, a drive signal is input to the correction unit 25 (step S04).
  • the correction unit 25 receives the drive signal and drives so as to eliminate the positional deviation amount ⁇ X, the positional deviation amount ⁇ Y, and the orientation deviation amount ⁇ included in the driving signal (step S05). Then, the holding unit 11 waits for the correction of the pocket T1 to end (step S06, Yes), and causes the electronic component D to leave the pocket 1 (step S07).
  • FIG. 22 is a schematic diagram showing the threshold value Xt and the threshold value Yt.
  • the threshold value Xt and the threshold value Yt are adjusted according to the dimensions of the electronic component D, the dimension of the pocket T1, and the danger distance d.
  • the taping unit 1 corrects the pocket T1 so that the electronic component D does not approach the wall of the pocket T1 within the danger distance dd.
  • the taping unit 1 defers correction of the pocket T1.
  • the correction by the correction unit 25 is executed only for the relationship between a part of the electronic components D whose positional deviation exceeds the threshold and the pocket T1, and the subsequent electronic components D are stored. It will move to processing.
  • the correction by the correction unit 25 is skipped, and the process immediately moves to the process of storing the electronic component D.
  • an electronic component D having a length of 0.65 ⁇ 0.04 mm and a width of 0.50 ⁇ 0.04 mm is used, and a length of 0.81 ⁇ 0.03 mm and a width of 0.63 ⁇ 0 is used. It was stored in a pocket T1 of 0.03 mm.
  • the total minimum clearance vacant on both sides of the electronic component D and the pocket T1 is 0.09 mm in the length direction and 0.06 mm in the width direction. Therefore, the threshold Xt and threshold Yt were set to ⁇ 0.02 mm, and a test for accommodating 500 electronic components D in the pocket T1 was performed. The results are shown in the table of FIG. As shown in FIG. 24, the correction by the correction unit 25 was performed 47 times in total in the operation of accommodating the electronic component D and the pocket T1 500 times.
  • the accommodating operation of the electronic component D and the pocket T1 requires an average tact time of 121 msec.
  • the accommodating operation of the electronic component D and the pocket T1 requires an average tact time of 121 msec. Therefore, compared with the case where correction is executed in relation to all the electronic components D and the pockets T1, in this embodiment in which the correction operation is stopped a total of 47 times, the housing operation of the electronic components D and the pockets T1 is 123 msec on average. Shortened to tact time.
  • the correction unit 25 is configured to eliminate the displacement of the pocket T1 only when the inner wall of the pocket T1 and the electronic component D approach within the danger distance dd.
  • the correction of the pocket T1 is limited to some situations, and the correction of the pocket T1 is not performed uniformly, and the average tact time of the storing operation of the electronic component D in the pocket T1 is improved. That is, the conveyance of the electronic component D is speeded up, and the production efficiency of the electronic component D is improved.
  • the determination unit 41 is located at a position closest to the pocket T1 of the electronic component D, that is, between the four corners of the electronic component D and the inner wall of the pocket T1 in the vicinity of the electronic component D and the inner wall of the pocket T1. The distances dk1 to dk4 are calculated.
  • the determination unit 41 calculates the position of each side of the pocket T1 from the position vector 283, the direction vector 284, and the dimensions of the pocket T1 detected by the pocket deviation detection unit 28. Further, the determination unit 41 stores the position coordinates of the four corners of the electronic component D whose position and orientation are corrected in advance, or the position vector calculated by the component position detection unit 28a when the position and orientation of the electronic component D are not corrected. The positions of the four corners of the electronic component D are calculated from 285, the direction vector 286, and the dimensions of the electronic component D.
  • the determination unit 41 calculates the distance between each side of the pocket T1 and the four corners of the electronic component D, and compares each distance dk1 to dk4 for a value equal to or less than the threshold Th. If there is even one value equal to or less than the threshold Th, the drive control unit 42 drives the correction unit 25 to correct the pocket T1.
  • the correction unit 25 cancels the displacement of the pocket T1 only when the displacement of the pocket T1 detected by the pocket displacement detection unit 28 is equal to or greater than a predetermined value indicated by the threshold value Xt and the threshold value Yt. did.
  • Such driving of the correction unit 25 is performed by a determination unit 41 that determines the proximity between the inner wall of the pocket T1 and the electronic component D, and a drive control that controls driving or non-drive of deviation correction by the correction unit 25 according to the determination unit 41. This is realized by the unit 42.
  • the proximity between the inner wall of the pocket T1 and the electronic component D can be determined only by the comparison process, and the calculation can be avoided. Therefore, the load on the computer is not applied, the transportation of the electronic component D is accelerated, and the electronic component D The production efficiency is improved.
  • the modified example 1 since the closeness between the inner wall of the pocket T1 and the electronic component D is accurately calculated, the collision between the pocket T1 and the electronic component D can be avoided with a very high probability, and the reliability of the electronic component D can be avoided. Improvement in yield and yield can be realized.
  • the consideration for the orientation of the pocket T1 may be achieved by comparing the orientation deviation amount ⁇ and the threshold value ⁇ t, as shown in FIG. That is, the determination unit 41 stores in advance a threshold value Xt for the positional deviation amount ⁇ X, a threshold value Yt for the positional deviation amount ⁇ Y, and a threshold value ⁇ t for the orientation deviation amount ⁇ , and the positional deviation amount ⁇ X, the threshold value Xt, and the positional deviation amount ⁇ Y. And the threshold value Yt, and the direction deviation amount ⁇ and the threshold value ⁇ t are compared.
  • the drive control unit 42 controls the correction unit 25 to detect the pocket T1. If all the values are corrected, the correction unit 25 is not driven.
  • the proximity between the inner wall of the pocket T1 and the electronic component D can be determined only by comparison processing, and the accuracy in detecting the proximity between the inner wall of the pocket T1 and the electronic component D is improved. It is possible to achieve a balance between improving efficiency, improving the reliability of the electronic component D, and improving yield.
  • the taping unit 2 is an example of a housing unit.
  • the accommodation unit is not limited to the taping unit 2 and can achieve the object of the present invention as long as the accommodation unit holds the accommodation body in which a large number of accommodation locations are arranged and sequentially moves the accommodation locations to the accommodation position P1. can do.
  • the container in addition to the carrier tape T, may be a tray 31 in which tray pockets 32 are arranged in a two-dimensional array.
  • the tray 31 may be distorted in a wall or the like that divides the tray pocket 32 during molding, and the tray pocket 32 may be misaligned or misoriented.
  • a position that is located before moving to the storage position P1 is set as the displacement confirmation position P2, and the displacement confirmation position P2
  • a second imaging unit 27 for imaging the tray pocket 32 is provided. Then, the deviation of the tray pocket 32 obtained at the deviation confirmation position P2 is corrected before the electronic component D is accommodated at the accommodation position P1.
  • a ring holder having a container as a wafer ring is an example of a storage unit.
  • the tray moving unit 3 and the X-axis movement driving unit 252 and the Y-axis movement driving unit 253 of the ring holder move the tray 31 and the wafer sheet two-dimensionally along the parallel plane, thereby sequentially shifting the tray pocket 32 and the attachment location. It also functions as a function for positioning to the confirmation position P2 and the storage position P1 and a function for eliminating the positional deviation amount in the X-axis and Y-axis directions of the tray pocket 32 and the pasting location.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

The purpose of the present invention is to provide housing unit which can appropriately house electronic components even if there is manufacturing error in the position in which housing areas are formed on a housing body such as a carrier tape, tray, or wafer sheet, and to provide an electronic component conveyance device. A taping unit (2) has a shift verification position (P2) different from a receiving position (P1), and by displacing a carrier tape (T), each pocket (T1) can be positioned at the receiving position (P1) after passing through the shift verification position (P2). In the shift verification position (P2), the pocket (T1) is imaged with a second imaging unit (27), and the image captured by the second imaging unit (27) is analyzed to detect shift relative to the reference position and reference orientation of the pocket (T). Then, before an electronic component (D) is housed in the pocket (T1) in which the shift was detected and which is in the housing position (P1), a correction unit (25) rotates and moves in a plane the carrier tape (T) in order to cancel out the shift of said pocket (T1).

Description

収容ユニット及び電子部品搬送装置Storage unit and electronic component transfer device
 本発明は、搬送経路を通った電子部品を収容する収容ユニット及び搬送経路を形成して該収容ユニットを備える電子部品搬送装置に関する。 The present invention relates to a storage unit that stores an electronic component that has passed through a transfer path, and an electronic component transfer device that forms the transfer path and includes the storage unit.
 半導体素子等の電子部品は、ダイシング、マウンティング、ボンディング、及びシーリング等の各組み立て工程を経て個片に分離された後、各種検査等の工程が行われる。この工程は、一般的にはテストハンドラと呼ばれる電子部品検査装置で行われる。これは、メインテーブルを回転させ、搬送部の電子部品を吸着ノズル等の保持手段で保持し、各検査装置に対して搬送して検査を行うものである。検査を終えた電子部品は、テーピングユニットにおいてキャリアテープのポケットに収容される。 Electronic parts such as semiconductor elements are separated into individual pieces through various assembly processes such as dicing, mounting, bonding, and sealing, and then various inspection processes are performed. This process is generally performed by an electronic component inspection apparatus called a test handler. In this method, the main table is rotated, the electronic components of the transport unit are held by a holding unit such as a suction nozzle, and transported to each inspection apparatus for inspection. The electronic component that has been inspected is accommodated in the pocket of the carrier tape in the taping unit.
 キャリアテープは長い帯状体であり、長手方向に沿ってポケットの列が形成されている。ポケットは、設計上、電子部品を収納する大きさ及び深さを有し、長手方向に沿って等間隔である。また、ポケットは、設計上、テープの幅中心に位置し、キャリアテープの幅方向及び長手方向と各辺が平行になるように向きを揃えている(例えば特許文献1参照)。 The carrier tape is a long belt-like body, and a row of pockets is formed along the longitudinal direction. The pockets have a size and a depth for storing electronic components by design, and are equally spaced along the longitudinal direction. In addition, the pocket is designed to be positioned at the center of the width of the tape, and the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape (see, for example, Patent Document 1).
 そのため、テーピングユニットは、搬送経路と重複する収容ポジションをキャリアテープ上に設定し、その収容ポジションに向けて各ポケットが順次移動するように間欠的にキャリアテープを送れば、各ポケットに順次電子部品を挿入することができた。 For this reason, the taping unit sets an accommodation position that overlaps with the transport path on the carrier tape, and if the carrier tape is intermittently sent so that each pocket sequentially moves toward the accommodation position, the electronic components are sequentially placed in each pocket. Could be inserted.
特開2012-001233号公報JP 2012-001233 A
 キャリアテープに対するポケットの位置は、設計上、テープの幅中心に位置し、キャリアテープの幅方向及び長手方向と各辺が平行になるように向きを揃えているとはいっても、製造誤差により微妙にバラツキが生じ得る。そこで、この製造誤差と電子部品とポケットとの許容可能なクリアランスとを考慮しつつ、ポケットの大きさを設計すればよかった。 The position of the pocket with respect to the carrier tape is, by design, located at the center of the width of the tape, and although the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape, it is subtle due to manufacturing errors. Variations may occur. Therefore, it is only necessary to design the size of the pocket in consideration of the manufacturing error and the allowable clearance between the electronic component and the pocket.
 しかしながら、近年は、0603サイズ(0.6mm×0.3mm)や0402サイズ(0.4mm×0.2mm)等の微小な電子部品が普及しつつある。このサイズの電子部品では、ポケットとのクリアランスが厳しく、ポケットが製造誤差により微妙にシフトしてしまっただけでも、ポケットを画成する壁と電子部品の衝突や挿入ミスが発生することとなる。例えば、0603サイズに合わせて0.7mm×0.4mm角のポケットを形成した場合、そのポケットが0.1mm横にシフトするだけで電子部品とポケットを画成する壁との衝突が発生し、0.2mm横にシフトするだけで挿入ミスが発生する。 However, in recent years, minute electronic components such as 0603 size (0.6 mm × 0.3 mm) and 0402 size (0.4 mm × 0.2 mm) are becoming widespread. In an electronic component of this size, the clearance with the pocket is strict, and even if the pocket is slightly shifted due to a manufacturing error, a collision between the wall defining the pocket and the electronic component or an insertion error occurs. For example, when a 0.7 mm × 0.4 mm square pocket is formed in accordance with the 0603 size, a collision between the electronic component and the wall defining the pocket occurs just by shifting the pocket to the side of 0.1 mm. An insertion error occurs only by shifting to the side of 0.2 mm.
 このような問題は、キャリアテープの他にもトレイやウェハシート等の電子部品を収容するあらゆる収容体に対して発生し得る。本発明は、上記のような問題点を解決するために提案されたもので、キャリアテープやトレイやウェハシート等の収容体に対して収容箇所の形成位置に製造誤差が存在していても適正に電子部品を収容することができる収容ユニット及び電子部品搬送装置を提供することを目的とする。 Such a problem may occur for any container that accommodates electronic components such as trays and wafer sheets in addition to the carrier tape. The present invention has been proposed in order to solve the above-described problems, and is appropriate even if there is a manufacturing error in the formation position of the storage location with respect to the storage body such as a carrier tape, a tray, or a wafer sheet. It is an object of the present invention to provide a storage unit and an electronic component transport device that can store electronic components.
 本発明に係る収容ユニットは、多数の収容箇所を有する収容体を保持し、搬送経路に沿って運搬された電子部品を収容ポジションで収容する収容ユニットであって、前記収容体を平面移動させ、前記各収容箇所を前記収容ポジションに位置させる第1の移動手段と、前記収容ポジション又は前記収容ポジションに至る前に前記収容箇所を撮像する収容箇所撮像手段と、前記収容箇所撮像手段が撮像した画像を解析して前記収容箇所のズレを検出する収容箇所ズレ検出手段と、ズレが検出された前記収容箇所に前記電子部品を収容する前に、当該収容箇所のズレを解消するように前記収容体を平面移動させる第2の移動手段と、を備えること、を特徴とする。 The storage unit according to the present invention is a storage unit that holds a storage body having a large number of storage locations and stores electronic parts transported along a transport path at a storage position, and moves the storage body in a plane, A first moving means for positioning each of the accommodation locations at the accommodation position; an accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position; and an image captured by the accommodation location imaging means. And a housing location deviation detecting means for detecting the displacement of the housing location, and the housing body so as to eliminate the displacement of the housing location before the electronic component is housed in the housing location where the displacement is detected. And a second moving means for moving the plane.
 前記搬送経路上で前記電子部品を撮像する部品撮像手段と、前記部品撮像手段が撮像した画像を解析して前記電子部品の基準位置に対するズレを検出する部品位置検出手段と、前記電子部品の基準位置に対するズレを解消するように前記電子部品を平面移動させる第3の移動手段と、を更に備えるようにしてもよい。 Component imaging means for imaging the electronic component on the transport path, component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component, and a reference for the electronic component You may make it further provide the 3rd moving means to which the said electronic component is planarly moved so that the shift | offset | difference with respect to a position may be eliminated.
 前記搬送経路上で前記電子部品を撮像する部品撮像手段と、前記部品撮像手段が撮像した画像を解析して前記電子部品の位置を検出する部品位置検出手段と、を更に備え、前記収容箇所ズレ検出手段は、前記部品位置検出手段が検出した前記電子部品の位置と前記収容箇所撮像手段が撮像した画像に基づき、前記収容箇所の前記電子部品に対するズレを検出し、前記第2の移動手段は、前記収容箇所の前記電子部品に対するズレを解消するように前記収容体を平面移動させるようにしてもよい。 A component imaging unit that images the electronic component on the transport path; and a component position detection unit that analyzes an image captured by the component imaging unit and detects the position of the electronic component. The detection means detects a displacement of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and an image captured by the accommodation location imaging means, and the second movement means The accommodating body may be moved in a plane so as to eliminate the displacement of the accommodating portion with respect to the electronic component.
 前記第2の移動手段は、前記収容箇所の内壁と前記電子部品が所定距離以内に近づく場合にのみ、前記収容箇所のズレを解消するようにしてもよい。 The second moving means may eliminate the displacement of the accommodation location only when the inner wall of the accommodation location and the electronic component come within a predetermined distance.
 前記第2の移動手段は、前記収容箇所ズレ検出手段により検出された前記収容箇所のズレが所定以上の場合にのみ、前記収容箇所のズレを解消するようにしてもよい。 The second moving means may eliminate the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value.
 前記収容箇所の内壁と前記電子部品との近さを判定する判定手段と、前記判定手段に従って、前記第2の移動手段によるズレ解消の駆動又は非駆動を制御する駆動制御手段と、を更に備えるようにしてもよい。 A determination unit configured to determine the proximity between the inner wall of the housing location and the electronic component; and a drive control unit configured to control driving or non-driving of displacement cancellation by the second moving unit according to the determination unit. You may do it.
 また、本発明に係る電子部品搬送装置は、電子部品を搬送経路に沿って搬送し、多数の収容箇所を有する収容体に電子部品を収容する電子部品搬送装置であって、前記電子部品を保持及び離脱させる保持手段と、前記保持手段を外周に有し、間欠回転する搬送テーブルと、前記保持手段の停止位置の一箇所に設定される収容ポジションと、前記収容体を平面移動させ、前記各収容箇所を前記収容ポジションに位置させる第1の移動手段と、前記収容ポジション又は前記収容ポジションに至る前に前記収容箇所を撮像する収容箇所撮像手段と、前記収容箇所撮像手段が撮像した画像を解析して前記収容箇所のズレを検出する収容箇所ズレ検出手段と、ズレが検出された前記収容箇所に前記電子部品を収容する前に、当該収容箇所のズレを解消するように前記収容体を平面移動させる第2の移動手段と、を備えること、を特徴とする。 The electronic component transport device according to the present invention is an electronic component transport device that transports an electronic component along a transport path and stores the electronic component in a container having a large number of storage locations, and holds the electronic component. And holding means for separating, a transport table having the holding means on the outer periphery, intermittently rotating, a storage position set at one stop position of the holding means, and moving the storage body in a plane, Analyzing the first moving means for positioning the accommodation location at the accommodation position, the accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position, and the image captured by the accommodation location imaging means And a housing location deviation detecting means for detecting a displacement of the housing location, and before the electronic component is housed in the housing location where the displacement is detected, the displacement of the housing location is eliminated. Further comprising a second moving means for planar moving the container in so that the features a.
 前記保持手段は、前記搬送テーブルの半径方向外部に延びて、前記収容体に向けて屈曲し、屈曲先端で電子部品を保持し、前記収容ポジションは、前記保持手段の屈曲先に設定され、前記ズレ確認ポジションは、前記保持手段の屈曲先端よりも前記搬送テーブルの中心寄りに設定されるようにしてもよい。 The holding means extends outward in the radial direction of the transfer table, bends toward the container, holds an electronic component at a bent tip, and the storage position is set at a bending destination of the holding means, The deviation confirmation position may be set closer to the center of the transfer table than the bent tip of the holding means.
 前記搬送テーブルの半径方向と直交する方向に延びるレールを前記搬送テーブルの外周に備え、前記保持手段は、前記レールにガイドされて摺動し、前記収容体へ向けて進退するようにしてもよい。 Rails extending in a direction orthogonal to the radial direction of the transfer table may be provided on the outer periphery of the transfer table, and the holding means may be guided by the rails and slide to advance and retract toward the container. .
 前記搬送経路上で前記電子部品を撮像する部品撮像手段と、前記部品撮像手段が撮像した画像を解析して前記電子部品の基準位置に対するズレを検出する部品位置検出手段と、前記電子部品の基準位置に対するズレを解消するように前記電子部品を平面移動させる第3の移動手段と、を更に備えるようにしてもよい。 Component imaging means for imaging the electronic component on the transport path, component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component, and a reference for the electronic component You may make it further provide the 3rd moving means to which the said electronic component is planarly moved so that the shift | offset | difference with respect to a position may be eliminated.
 前記搬送経路上で前記電子部品を撮像する部品撮像手段と、前記部品撮像手段が撮像した画像を解析して前記電子部品の位置を検出する部品位置検出手段と、を更に備え、前記収容箇所ズレ検出手段は、前記部品位置検出手段が検出した前記電子部品の位置と前記収容箇所撮像手段が撮像した画像に基づき、前記収容箇所の前記電子部品に対するズレを検出し、前記第2の移動手段は、前記収容箇所の前記電子部品に対するズレを解消するように前記収容体を平面移動させるようにしてもよい。 A component imaging unit that images the electronic component on the transport path; and a component position detection unit that analyzes an image captured by the component imaging unit and detects the position of the electronic component. The detection means detects a displacement of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and an image captured by the accommodation location imaging means, and the second movement means The accommodating body may be moved in a plane so as to eliminate the displacement of the accommodating portion with respect to the electronic component.
 前記第2の移動手段は、前記収容箇所の内壁と前記電子部品が所定距離以内に近づく場合にのみ、前記収容箇所のズレを解消するようにしてもよい。 The second moving means may eliminate the displacement of the accommodation location only when the inner wall of the accommodation location and the electronic component come within a predetermined distance.
 前記第2の移動手段は、前記収容箇所ズレ検出手段により検出された前記収容箇所のズレが所定以上の場合にのみ、前記収容箇所のズレを解消するようにしてもよい。 The second moving means may eliminate the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value.
 前記収容箇所の内壁と前記電子部品との近さを判定する判定手段と、前記判定手段に従って、前記第2の移動手段によるズレ解消の駆動又は非駆動を制御する駆動制御手段と、を更に備えるようにしてもよい。 A determination unit configured to determine the proximity between the inner wall of the housing location and the electronic component; and a drive control unit configured to control driving or non-driving of displacement cancellation by the second moving unit according to the determination unit. You may do it.
 本発明によれば、電子部品の収容箇所が製造上の誤差によりシフトしてしまっても、収容ポジションでは基準位置及び基準向きを保つことができ、電子部品を精度よく収容することができ、電子部品の収容箇所を画成する壁への接触や挿入ミスが発生しにくくなる。 According to the present invention, the reference position and the reference orientation can be maintained at the storage position even when the storage location of the electronic component is shifted due to a manufacturing error, and the electronic component can be stored with high accuracy. Contact with the wall that defines the part storage location and insertion errors are less likely to occur.
第1の実施形態に係るテーピングユニットの側面図である。It is a side view of the taping unit which concerns on 1st Embodiment. 第1の実施形態に係るテーピングユニットの上面図である。It is a top view of the taping unit concerning a 1st embodiment. 第1の実施形態に係るテーピングユニットによる収容箇所のズレ解析を示す模式図である。It is a schematic diagram which shows the shift | offset | difference analysis of the accommodation location by the taping unit which concerns on 1st Embodiment. 第1の実施形態に係るテーピングユニットによるポケットのズレ補正を示す模式図であり、第1の過程を示す。It is a schematic diagram which shows the gap | deviation correction | amendment of the pocket by the taping unit which concerns on 1st Embodiment, and shows a 1st process. 第1の実施形態に係るテーピングユニットによるポケットのズレ補正を示す模式図であり、第2の過程を示す。It is a schematic diagram which shows the gap | deviation correction | amendment of the pocket by the taping unit which concerns on 1st Embodiment, and shows a 2nd process. 第1の実施形態に係るテーピングユニットによるポケットのズレ補正を示す模式図であり、第3の過程を示す。It is a schematic diagram which shows the gap | deviation correction | amendment of the pocket by the taping unit which concerns on 1st Embodiment, and shows a 3rd process. 第1の実施形態に係るテーピングユニットによるポケットのズレ補正を示す模式図であり、第4の過程を示す。It is a schematic diagram which shows the gap | deviation correction | amendment of the pocket by the taping unit which concerns on 1st Embodiment, and shows a 4th process. 第1の実施形態に係る電子部品搬送装置の構成を示す上面図である。It is a top view which shows the structure of the electronic component conveying apparatus which concerns on 1st Embodiment. 第1の実施形態に係る電子部品搬送装置に対するテーピングユニットの第1の配置方法を示し、(a)は上面図であり、(b)は側面図である。The 1st arrangement | positioning method of the taping unit with respect to the electronic component conveying apparatus which concerns on 1st Embodiment is shown, (a) is a top view, (b) is a side view. 第1の実施形態に係る電子部品搬送装置に対するテーピングユニットの第2の配置方法を示し、(a)は上面図であり、(b)は上面図のA方向から見た側面図である。The 2nd arrangement | positioning method of the taping unit with respect to the electronic component conveying apparatus which concerns on 1st Embodiment is shown, (a) is a top view, (b) is the side view seen from the A direction of the top view. 第1の実施形態に係る電子部品搬送装置に対するテーピングユニットの第3の配置方法を示し、(a)は上面図であり、(b)は上面図のB方向から見た側面図である。The 3rd arrangement | positioning method of the taping unit with respect to the electronic component conveying apparatus which concerns on 1st Embodiment is shown, (a) is a top view, (b) is the side view seen from the B direction of the top view. 第2の実施形態に係る電子部品搬送装置の構成を示す上面図である。It is a top view which shows the structure of the electronic component conveying apparatus which concerns on 2nd Embodiment. 第2の実施形態に係る電子部品搬送装置が搭載するテーピングユニットの制御を示す構成図である。It is a block diagram which shows control of the taping unit mounted in the electronic component conveying apparatus which concerns on 2nd Embodiment. 第2の実施形態に係るテーピングユニットによる電子部品のズレ解析を示す模式図である。It is a schematic diagram which shows the shift | offset | difference analysis of the electronic component by the taping unit which concerns on 2nd Embodiment. 第2の実施形態に係るテーピングユニットによるポケットのズレ解析を示す模式図である。It is a schematic diagram which shows the gap | deviation analysis of the pocket by the taping unit which concerns on 2nd Embodiment. 第2の実施形態に係るテーピングユニットによるポケットのズレ補正を示す模式図である。It is a schematic diagram which shows the gap | deviation correction | amendment of the pocket by the taping unit which concerns on 2nd Embodiment. 第3の実施形態に係る電子部品搬送装置の構成を示す上面図である。It is a top view which shows the structure of the electronic component conveying apparatus which concerns on 3rd Embodiment. 第3の実施形態に係る電子部品搬送装置による電子部品のキャリアテープへの搬送を示す模式図である。It is a schematic diagram which shows conveyance to the carrier tape of the electronic component by the electronic component conveying apparatus which concerns on 3rd Embodiment. 第3の実施形態に係るテーピングユニットによる制御を示す構成図である。It is a block diagram which shows the control by the taping unit which concerns on 3rd Embodiment. 第4の実施形態に係る補正部の制御構成を示すブロック図である。It is a block diagram which shows the control structure of the correction | amendment part which concerns on 4th Embodiment. 第4の実施形態に係る判定部と駆動制御部の動作を示すフローチャートである。It is a flowchart which shows operation | movement of the determination part and drive control part which concern on 4th Embodiment. 第4の実施形態において閾値Xtと閾値Ytを示す模式図である。It is a schematic diagram which shows threshold value Xt and threshold value Yt in 4th Embodiment. 第4の実施形態に係り、横軸を電子部品、縦軸を位置ズレとして、閾値との関係を示したグラフである。It is a graph which showed the relationship with a threshold value regarding 4th Embodiment by making a horizontal axis an electronic component and making a vertical axis | shaft into position shift. 第4の実施形態に係り、電子部品のポケットへの収納動作の平均タクトタイムを示す表である。It is a table | surface which concerns on 4th Embodiment and shows the average tact time of the accommodation operation | movement to the pocket of an electronic component. 第4の実施形態の変形例1に係り、ポケットの内壁と電子部品との近さを算出する模式図である。It is a schematic diagram concerning the modification 1 of 4th Embodiment and calculating the proximity of the inner wall of a pocket and an electronic component. 第4の実施形態の変形例2に係り、ポケットの内壁と電子部品との近さを算出する模式図である。It is a schematic diagram concerning the modification 2 of 4th Embodiment and calculating the proximity of the inner wall of a pocket and an electronic component. 収容ユニットの他の態様であるトレイ移動ユニットを示す側面図である。It is a side view which shows the tray movement unit which is another aspect of a storage unit. 収容ユニットの他の態様であるトレイ移動ユニットを示す上面図である。It is a top view which shows the tray movement unit which is another aspect of a storage unit.
 (第1の実施形態)
 (テーピングユニット)
 本発明の実施形態に係るテーピングユニットについて、図面を参照しつつ詳細に説明する。まず、図1及び2に示すテーピングユニット2は、収容体を保持して収容箇所に電子部品Dを収容する収容ユニットの一例である。このテーピングユニット2は、キャリアテープTを保持し、キャリアテープTに形成された各ポケットT1に電子部品Dを収容する。
(First embodiment)
(Taping unit)
A taping unit according to an embodiment of the present invention will be described in detail with reference to the drawings. First, the taping unit 2 shown in FIGS. 1 and 2 is an example of a housing unit that holds the housing and houses the electronic component D in the housing location. The taping unit 2 holds a carrier tape T and accommodates an electronic component D in each pocket T1 formed in the carrier tape T.
 キャリアテープT上の一箇所には、電子部品Dの搬送経路と重複する収容ポジションP1を有する。テーピングユニット2は、収容ポジションP1に各ポケットT1を位置させ、搬送経路に沿って収容ポジションP1に運搬された電子部品DをポケットT1に収容する。電子部品Dは、保持手段11によって保持されながら搬送経路に沿って運搬される。保持手段11は、収容ポジションP1で停止し、電子部品DをポケットT1に向けて離脱させる。 At one location on the carrier tape T, there is an accommodation position P1 that overlaps the transport path of the electronic component D. The taping unit 2 positions each pocket T1 in the storage position P1, and stores the electronic component D transported to the storage position P1 along the transport path in the pocket T1. The electronic component D is transported along the transport path while being held by the holding means 11. The holding means 11 stops at the storage position P1, and separates the electronic component D toward the pocket T1.
 また、キャリアテープT上の他の箇所には、収容検査ポジションP3を有する。収容検査ポジションP3では、ポケットT1に収容された電子部品Dの誤収容を検出する。すなわち、収容検査ポジションP3には、収容検査ポジションP3に位置するポケットT1の内部を撮像する第1の撮像部26を備えている。 Also, the other portion on the carrier tape T has a storage inspection position P3. In the storage inspection position P3, erroneous storage of the electronic component D stored in the pocket T1 is detected. That is, the storage inspection position P3 includes a first imaging unit 26 that captures an image of the inside of the pocket T1 located at the storage inspection position P3.
 ポケットT1に収容される電子部品Dは、電気製品に使用される部品である。電子部品Dとしては、半導体素子、及び半導体素子以外の抵抗やコンデンサ等を挙げることができる。半導体素子としては、トランジスタ、ダイオード、LED、及びサイリスタ等のディスクリート半導体、ICやLSI等の集積回路等を挙げることができる。さらに半導体以外の電子部品Dとして、チップコンデンサ、チップ抵抗、インダクタ、フィルタ、アイソレータ等も含まれる。 The electronic component D accommodated in the pocket T1 is a component used for electrical products. Examples of the electronic component D include a semiconductor element and a resistor or capacitor other than the semiconductor element. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, and thyristors, and integrated circuits such as ICs and LSIs. Further, the electronic component D other than the semiconductor includes a chip capacitor, a chip resistor, an inductor, a filter, an isolator and the like.
 テーピングユニット2が保持するキャリアテープTは、紙やポリスチレン樹脂等の化成品から成る長い帯状体であり、巻出し及び巻取り可能に可撓性を有する。このキャリアテープTには、長手方向に沿ってポケットT1の列が形成されている。ポケットT1は、設計上、電子部品Dを収納する大きさ及び深さを有し、長手方向に沿って等間隔である。また、ポケットT1は、設計上、テープの幅中心に位置し、キャリアテープTの幅方向及び長手方向と各辺が平行になるように向きを揃えている。 The carrier tape T held by the taping unit 2 is a long strip made of a chemical product such as paper or polystyrene resin, and is flexible so that it can be unwound and wound. In the carrier tape T, a row of pockets T1 is formed along the longitudinal direction. The pocket T1 has a size and depth for storing the electronic component D in design, and is equally spaced along the longitudinal direction. Further, the pocket T1 is designed to be positioned at the center of the width of the tape, and the direction is aligned so that each side is parallel to the width direction and the longitudinal direction of the carrier tape T.
 このテーピングユニット2は、目的の異なる2つの移動手段によってキャリアテープTを移動させる。第1の移動手段は、キャリアテープTを長手方向に水平移動させて各ポケットT1を後述するズレ確認ポジションP2と収容ポジションP1と収容検査ポジションP3に順に移動させる2機のスプロケット21、22である。第2の移動手段は、収容ポジションP1にポケットT1が位置したときに、そのポケットT1が基準の位置及び向きとなるように事前にキャリアテープTを移動させる補正部25である。基準位置とは、保持手段11が収容ポジションP1に到達した際の保持手段11の真下とポケットT1の中心とが合致する位置である。また基準向きとは、補正前のキャリアテープTの幅方向又は長手方向とポケットT1の一辺とが合致する向きである。 This taping unit 2 moves the carrier tape T by two moving means having different purposes. The first moving means is two sprockets 21 and 22 that move the carrier tape T horizontally in the longitudinal direction to sequentially move the pockets T1 to a later-described displacement confirmation position P2, accommodation position P1, and accommodation inspection position P3. . The second moving means is a correcting unit 25 that moves the carrier tape T in advance so that the pocket T1 is in the reference position and orientation when the pocket T1 is positioned at the storage position P1. The reference position is a position at which the position immediately below the holding means 11 and the center of the pocket T1 coincide with each other when the holding means 11 reaches the storage position P1. The reference direction is a direction in which the width direction or the longitudinal direction of the carrier tape T before correction coincides with one side of the pocket T1.
 2機のスプロケット21、22は、キャリアテープTの長手方向に沿って等間隔に穿設されたスプロケット孔に嵌合しつつ間欠回転することで、キャリアテープTを間欠的に走行させ、各ポケットT1を収容ポジションP1に順に位置させる。この2機のスプロケット21、22は、周面に沿って突起が突設される同径の円盤であり、同一垂直面上に並び、回転軸が平行且つ同一高さである。キャリアテープTは、両スプロケット21、22に架橋され、突起がスプロケット孔に噛合する。スプロケット孔を介して突起から外力を受け、スプロケット21、22の回転に連動して長手方向に走行する。 The two sprockets 21 and 22 are intermittently rotated while being fitted in sprocket holes formed at equal intervals along the longitudinal direction of the carrier tape T, thereby causing the carrier tape T to run intermittently and each pocket. T1 is sequentially positioned at the storage position P1. The two sprockets 21 and 22 are disks having the same diameter with protrusions protruding along the circumferential surface, arranged on the same vertical plane, and have the rotation axes parallel and at the same height. The carrier tape T is bridged to both the sprockets 21 and 22, and the protrusions are engaged with the sprocket holes. An external force is received from the projection through the sprocket hole, and travels in the longitudinal direction in conjunction with the rotation of the sprockets 21 and 22.
 このスプロケット21、22は、それぞれ対応のモータ23、24で軸支され、同一周方向に回転する。両モータ23、24は、1ピッチずつ間欠回転する。そのピッチは、ポケットT1の設計上の配置間隔に同一である。つまり、ポケットT1は、共通の停止位置で停止する。そして、テーピングユニット2は、ポケットT1の停止位置の1つを搬送経路上の収容ポジションP1に原則的に合致させ、保持手段11が離脱する電子部品DをキャリアテープTのポケットT1で受ける。また、テーピングユニット2は、ポケットT1の停止位置の他の1つを搬送経路上の収容検査ポジションP3に原則的に合致させ、ポケットT1内部の電子部品Dの収容態様を検査する。 The sprockets 21 and 22 are pivotally supported by corresponding motors 23 and 24, respectively, and rotate in the same circumferential direction. Both motors 23 and 24 rotate intermittently by one pitch. The pitch is the same as the design arrangement interval of the pocket T1. That is, the pocket T1 stops at a common stop position. Then, the taping unit 2 basically matches one of the stop positions of the pocket T1 with the accommodation position P1 on the transport path, and receives the electronic component D from which the holding means 11 is detached in the pocket T1 of the carrier tape T. Further, the taping unit 2 in principle matches the other stop position of the pocket T1 with the accommodation inspection position P3 on the conveyance path, and inspects the accommodation mode of the electronic component D inside the pocket T1.
 補正部25は、テーピングユニット2のユニット本体29をZ軸周りに回転させるZ軸回転駆動部251と、ユニット本体29をZ軸と直交するX軸方向に移動させるX軸移動駆動部252と、ユニット本体29をZ軸とX軸に直交するY軸方向に移動させるY軸移動駆動部253を備える。テーピングユニット2のユニット本体29は、キャリアテープTの支持体であり、スプロケット21、22と、そのスプロケット21、22を軸支するケースである。Z軸は、収容ポジションP1を通り、ポケットT1の開口面と直交する。X軸は、収容ポジションP1を通り、ポケットT1の開口面と平行であり、望ましくはキャリアテープTの長手方向に沿う。Y軸は、収容ポジションP1を通り、ポケットT1の開口面と平行であり、望ましくはキャリアテープTの幅方向に沿う。 The correction unit 25 includes a Z-axis rotation drive unit 251 that rotates the unit main body 29 of the taping unit 2 around the Z axis, an X-axis movement drive unit 252 that moves the unit main body 29 in the X-axis direction orthogonal to the Z-axis, A Y-axis movement drive unit 253 that moves the unit main body 29 in the Y-axis direction orthogonal to the Z-axis and the X-axis is provided. The unit main body 29 of the taping unit 2 is a support for the carrier tape T, and is a case for supporting the sprockets 21 and 22 and the sprockets 21 and 22 pivotally. The Z axis passes through the storage position P1 and is orthogonal to the opening surface of the pocket T1. The X-axis passes through the storage position P1, is parallel to the opening surface of the pocket T1, and is preferably along the longitudinal direction of the carrier tape T. The Y-axis passes through the storage position P1, is parallel to the opening surface of the pocket T1, and is preferably along the width direction of the carrier tape T.
 Z軸回転駆動部251は、回転軸251bを有するモータ251aであり、ユニット本体29の底面に配置される。Z軸回転駆動部251の回転軸251bは、Z軸と同軸であり、ユニット本体29の底面に固定されている。X軸移動駆動部252は、Z軸回転駆動部251のモータ251aが載置されるスライダ252aと、スライダ252aが嵌合するネジ軸252bと、X軸方向に延びるネジ軸252bを回転させるモータ252cにより構成される。Y軸移動駆動部253は、X軸移動駆動部252が載置されるスライダ253aと、スライダ253aと嵌合するネジ軸253bと、Y軸方向に延びるネジ軸253bを回転させるモータ253cにより構成される。 The Z-axis rotation drive unit 251 is a motor 251 a having a rotation shaft 251 b and is disposed on the bottom surface of the unit main body 29. The rotation shaft 251 b of the Z-axis rotation drive unit 251 is coaxial with the Z-axis and is fixed to the bottom surface of the unit main body 29. The X-axis movement drive unit 252 includes a slider 252a on which the motor 251a of the Z-axis rotation drive unit 251 is mounted, a screw shaft 252b to which the slider 252a is fitted, and a motor 252c that rotates a screw shaft 252b extending in the X-axis direction. Consists of. The Y-axis movement drive unit 253 is configured by a slider 253a on which the X-axis movement drive unit 252 is mounted, a screw shaft 253b fitted to the slider 253a, and a motor 253c that rotates the screw shaft 253b extending in the Y-axis direction. The
 この補正部25は、収容ポジションP1でポケットT1が基準の位置及び向きとなるように事前にキャリアテープTを移動させる。そのため、このテーピングユニット2は、収容ポジションP1の前にズレ確認ポジションP2を有する。収容ポジションP1は、キャリアテープTの走行方向においてズレ確認ポジションP2よりも走行方向下流側に位置し、ズレ確認ポジションP2は、収容ポジションP1よりも走行方向上流側に位置する。ズレ確認ポジションP2と収容ポジションP1は隣同士に並ぶのが望ましい。尚、収容検査ポジションP3は、収容ポジションP1よりも更に走行方向下流側に位置する。 The correction unit 25 moves the carrier tape T in advance so that the pocket T1 is at the reference position and orientation at the storage position P1. Therefore, the taping unit 2 has a displacement confirmation position P2 before the accommodation position P1. The accommodation position P1 is located downstream in the running direction from the deviation confirmation position P2 in the running direction of the carrier tape T, and the deviation confirmation position P2 is located upstream in the running direction from the accommodation position P1. It is desirable that the displacement confirmation position P2 and the accommodation position P1 are arranged next to each other. The accommodation inspection position P3 is located further downstream in the traveling direction than the accommodation position P1.
 ズレ確認ポジションP2には、ポケットT1の位置を確認する第2の撮像部27が備えられる。また、テーピングユニット2は、第2の撮像部27により得られた情報を基にポケットT1の位置及び向きのズレを検出するポケットズレ検出部28を有する。補正部25は、このポケットズレ検出部28が検出したポケットT1の位置及び向きのズレを補正するようにユニット本体29を移動させる。第2の撮像部27は、例えばカメラであり、ズレ確認ポジションP2を撮像エリア内に収めるように、ズレ確認ポジションP2の近傍に配置される。ポケットズレ検出部28は、所謂コンピュータによりなる画像解析装置である。このポケットズレ検出部28は、第2の撮像部27が撮像した画像を解析し、ポケットT1の基準位置及び基準向きに対するズレ量を算出する。 The displacement confirmation position P2 is provided with a second imaging unit 27 for confirming the position of the pocket T1. Further, the taping unit 2 includes a pocket shift detection unit 28 that detects a shift in the position and orientation of the pocket T1 based on information obtained by the second imaging unit 27. The correction unit 25 moves the unit main body 29 so as to correct the position and orientation shift of the pocket T1 detected by the pocket shift detection unit 28. The second imaging unit 27 is a camera, for example, and is arranged in the vicinity of the deviation confirmation position P2 so that the deviation confirmation position P2 is within the imaging area. The pocket misalignment detection unit 28 is an image analysis device including a so-called computer. The pocket shift detection unit 28 analyzes the image captured by the second image capturing unit 27 and calculates a shift amount with respect to the reference position and the reference direction of the pocket T1.
 図3は、ポケットズレ検出部28によるポケットT1のズレ量算出を示す模式図である。図3に示すように、ポケットズレ検出部28は、予め画像内の一点を原点として原点情報281を予め記憶する。この原点情報281は、ポケットT1の基準位置を示し、例えばポケットT1が基準位置に存在する場合の一隅の座標情報である。また、ポケットズレ検出部28は、基準方向ベクトル282を予め記憶している。この基準方向ベクトル282は、ポケットT1の基準向きを示し、例えばポケットT1が基準向きに沿う場合の一辺の延び方向である。尚、画像の座標系は、望ましくはキャリアテープTの長手方向と幅方向に沿うのがよく、第2の撮像部27の設置位置及び設置向きを調整し、または画像の回転処理により調整すればよい。 FIG. 3 is a schematic diagram showing the calculation of the amount of deviation of the pocket T1 by the pocket deviation detector 28. As shown in FIG. As shown in FIG. 3, the pocket shift detection unit 28 stores in advance origin information 281 with one point in the image as the origin. The origin information 281 indicates the reference position of the pocket T1, and is, for example, coordinate information of one corner when the pocket T1 exists at the reference position. The pocket shift detection unit 28 stores a reference direction vector 282 in advance. The reference direction vector 282 indicates the reference direction of the pocket T1, and is, for example, the extending direction of one side when the pocket T1 is along the reference direction. The coordinate system of the image is preferably along the longitudinal direction and the width direction of the carrier tape T, and can be adjusted by adjusting the installation position and orientation of the second imaging unit 27 or by rotating the image. Good.
 ポケットズレ検出部28は、第2の撮像部27が撮像した画像からポケットT1の一隅を検出し、原点からその一隅までの位置ベクトル283を算出する。位置ベクトル283は、ポケットT1の基準位置からのズレを示すズレ量ΔX、ΔYである。また、ポケットズレ検出部28は、第2の撮像部27が撮像した画像からポケットT1の一辺を検出し、その一辺が延びる方向ベクトル284を算出する。そして、ポケットズレ検出部28は、基準方向ベクトル282と方向ベクトル284の内積を求め、両方向ベクトルのスカラーを乗算した結果で除算して、その除算結果の逆余弦を算出する。この逆余弦の算出結果ΔθがポケットT1の基準向きからのズレを示すズレ量である。 The pocket shift detection unit 28 detects one corner of the pocket T1 from the image captured by the second imaging unit 27, and calculates a position vector 283 from the origin to the corner. The position vector 283 is the shift amounts ΔX and ΔY indicating the shift from the reference position of the pocket T1. Further, the pocket shift detection unit 28 detects one side of the pocket T1 from the image captured by the second imaging unit 27, and calculates a direction vector 284 in which the one side extends. Then, the pocket shift detection unit 28 calculates the inner product of the reference direction vector 282 and the direction vector 284, divides the result by multiplying the scalars of both direction vectors, and calculates the inverse cosine of the division result. This inverse cosine calculation result Δθ is a shift amount indicating a shift of the pocket T1 from the reference direction.
 補正部25は、ポケットズレ検出部28が検出した基準位置及び基準向きに対するズレ量を解消するようにキャリアテープTを移動及び回転させる。すなわち、Z軸回転駆動部251は、ポケットズレ検出部28が方向ベクトル284より求めた基準向きからのズレと同角度Δθだけ、ズレとは反対方向に回転する。X軸移動駆動部252は、ポケットズレ検出部28が求めた位置ベクトル283のX軸方向のスカラー量ΔXと同量だけ、位置ベクトルの反対方向に移動する。Y軸移動駆動部253は、ポケットズレ検出部28が求めた位置ベクトル283のY軸方向のスカラー量ΔYと同量だけ、位置ベクトルの反対方向に移動する。尚、補正部25によるポケットT1のズレ補正は、ズレ確認ポジションP2でポケットT1のズレが確認されてから、収容ポジションP1に移動した其のポケットT1に電子部品Dが離脱されるまでの間の何れのタイミングでもよい。 The correction unit 25 moves and rotates the carrier tape T so as to eliminate the shift amount with respect to the reference position and the reference direction detected by the pocket shift detection unit 28. That is, the Z-axis rotation driving unit 251 rotates in the opposite direction to the deviation by the same angle Δθ as the deviation from the reference direction obtained by the pocket deviation detecting unit 28 from the direction vector 284. The X-axis movement drive unit 252 moves in the opposite direction of the position vector by the same amount as the scalar amount ΔX in the X-axis direction of the position vector 283 obtained by the pocket deviation detection unit 28. The Y-axis movement drive unit 253 moves in the opposite direction of the position vector by the same amount as the scalar amount ΔY in the Y-axis direction of the position vector 283 obtained by the pocket deviation detection unit 28. The correction of the displacement of the pocket T1 by the correcting unit 25 is performed after the displacement of the pocket T1 is confirmed at the displacement confirmation position P2 until the electronic component D is detached from the pocket T1 moved to the accommodation position P1. Any timing is acceptable.
 図4乃至7は、このテーピングユニット2のズレ補正を示す模式図である。尚、図4乃至7においては、キャリアテープTの1ピッチ分の走行と、X軸方向のズレ量ΔXの補正と、Y軸方向のズレ量ΔYの補正と、Z軸周りのズレ量Δθの補正を順番に時間をずらしておこなっているが、これに限られず、ズレ確認ポジションP2から収容ポジションP1まで移動してポケットT1に電子部品Dが離脱されるまでの間に全ての補正が達成されればよく、全て同時でもよい。 FIGS. 4 to 7 are schematic diagrams showing deviation correction of the taping unit 2. 4 to 7, the travel of the carrier tape T for one pitch, the correction of the deviation amount ΔX in the X-axis direction, the correction of the deviation amount ΔY in the Y-axis direction, and the deviation amount Δθ around the Z-axis. Although the correction is performed by shifting the time in order, the correction is not limited to this, and all corrections are achieved before the electronic component D is detached from the pocket T1 after moving from the misalignment confirmation position P2 to the receiving position P1. It may be all at the same time.
 図4の(a)に示すように、キャリアテープT上のポケットT1の位置は、エンボス加工等の製造上の誤差により、個々のポケットT1の位置や向きが一律でなく固有の程度でズレ得る。ここで、収容ポジションP1からテープ走行方向2つ手前に位置するポケットT1がスプロケット21、22によるキャリアテープTの間欠走行を経て、ズレ確認ポジションP2で停止したものとする。このとき、図4の(a)に示すように、ズレ確認ポジションP2のポケットT1を第2の撮像部27が撮像し、ポケットズレ検出部28は、ポケットT1のX軸方向の位置ズレ量ΔXとY軸方向の位置ズレ量ΔYとZ軸周りの向きズレ量Δθとを算出する。 As shown in FIG. 4A, the position and orientation of the pockets T1 on the carrier tape T can be shifted to a specific degree, not uniform, due to manufacturing errors such as embossing. . Here, it is assumed that the pocket T1, which is located two tapes ahead in the tape running direction from the storage position P1, is stopped at the deviation confirmation position P2 through the intermittent running of the carrier tape T by the sprockets 21 and 22. At this time, as shown in FIG. 4A, the second imaging unit 27 images the pocket T1 at the displacement confirmation position P2, and the pocket displacement detection unit 28 detects the positional displacement amount ΔX of the pocket T1 in the X-axis direction. And a positional deviation amount ΔY in the Y-axis direction and an orientation deviation amount Δθ around the Z-axis are calculated.
 位置ズレと向きズレが算出されると、図4の(b)に示すように、スプロケット21、22は1ピッチ回転し、ポケットT1の配置間隔EdだけキャリアテープTを走行させる。これにより、ズレが確認されたポケットT1は、収容ポジションP1に到達する。 When the positional deviation and the orientation deviation are calculated, as shown in FIG. 4B, the sprockets 21 and 22 are rotated by one pitch, and the carrier tape T is caused to travel by the arrangement interval Ed of the pocket T1. As a result, the pocket T1 in which the deviation has been confirmed reaches the accommodation position P1.
 次に、図5乃至7の遷移に示すように、補正部25は、このズレをズレ確認ポジションP2から収容ポジションP1までの等間隔Edを移動したポケットT1に電子部品Dが離脱されるまでの間に補正する。まず、補正部25には、ポケットズレ検出部28からX軸方向の位置ズレ量ΔXとY軸方向の位置ズレ量ΔYと向きズレ量Δθが入力される。 Next, as shown in the transition of FIGS. 5 to 7, the correction unit 25 performs the process until the electronic component D is detached from the pocket T <b> 1 moved at an equal interval Ed from the deviation confirmation position P <b> 2 to the accommodation position P <b> 1. Correct in between. First, the position shift amount ΔX in the X-axis direction, the position shift amount ΔY in the Y-axis direction, and the direction shift amount Δθ are input to the correction unit 25 from the pocket shift detection unit 28.
 そして、図5の(b)から(c)への遷移に示すように、Y軸移動駆動部253は、ユニット本体29を位置ズレ量ΔYに相当する距離だけ移動させる。次に、図6の(c)から(d)への遷移に示すように、X軸移動駆動部252は、ユニット本体29を位置ズレ量ΔXに相当する距離だけ移動させる。そして、図7の(d)から(e)の遷移に示すように、Z軸回転駆動部251は、ユニット本体29を向きズレ量Δθに相当する角度だけ、収容ポジションP1を中心に回転させる。これにより、ポケットT1が収容ポジションに到達し、電子部品DがポケットT1に向けて離脱するときには、ポケットT1は基準の位置及び向きに揃うこととなる。 Then, as shown in the transition from (b) to (c) in FIG. 5, the Y-axis movement drive unit 253 moves the unit main body 29 by a distance corresponding to the positional deviation amount ΔY. Next, as shown in the transition from (c) to (d) in FIG. 6, the X-axis movement driving unit 252 moves the unit main body 29 by a distance corresponding to the positional deviation amount ΔX. Then, as shown in the transition from (d) to (e) in FIG. 7, the Z-axis rotation driving unit 251 rotates the unit main body 29 about the accommodation position P1 by an angle corresponding to the amount of deviation Δθ. Thereby, when the pocket T1 reaches the storage position and the electronic component D is detached toward the pocket T1, the pocket T1 is aligned with the reference position and orientation.
 尚、ズレ確認ポジションP2は、収容ポジションP1よりも走行方向上流であれば、直前位置でなくともよい。但し、ズレ確認ポジションP2と収容ポジションP1とが隣接していれば、キャリアテープTの歪みや撓みにより収容ポジションP1に対するポケットT1の位置ズレや向きズレの影響を排除することができる。 Note that the displacement confirmation position P2 does not have to be the previous position as long as it is upstream in the traveling direction from the accommodation position P1. However, if the displacement confirmation position P2 and the accommodation position P1 are adjacent to each other, it is possible to eliminate the influence of the positional deviation or the orientation deviation of the pocket T1 with respect to the accommodation position P1 due to distortion or bending of the carrier tape T.
 また、ポケットT1を開口面と平行に2次元移動できればよく、X軸とY軸とは、ポケットT1の開口面と平行であり、互いに直交していればよい。但し、ユニット本体29の一方の移動方向とポケットズレ検出部28の座標系における1軸とキャリアテープTの長手方向とを一致させ、ユニット本体29の他方の移動方向とポケットズレ検出部28の座標系における他軸とキャリアテープTの幅方向とを一致させれば、移動量算出のための演算を簡略化できるのでよい。 Further, it is only necessary that the pocket T1 can be two-dimensionally moved in parallel with the opening surface, and the X axis and the Y axis need only be parallel to the opening surface of the pocket T1 and orthogonal to each other. However, one movement direction of the unit main body 29 and one axis in the coordinate system of the pocket deviation detection unit 28 coincide with the longitudinal direction of the carrier tape T, and the other movement direction of the unit main body 29 and the coordinates of the pocket deviation detection unit 28 are matched. If the other axis in the system matches the width direction of the carrier tape T, the calculation for the movement amount may be simplified.
 このように、テーピングユニット2は、収容ポジションP1とは異なる位置のズレ確認ポジションP2を有し、スプロケット21、22でキャリアテープTを走行させることで、各ポケットT1をズレ確認ポジションP2経由で収容ポジションP1に位置させるようにした。ズレ確認ポジションP2では、ポケットT1を第2の撮像部27で撮像し、第2の撮像部27が撮像した画像を解析してポケットTの基準位置及び基準向きに対するズレを検出する。そして、X軸移動駆動部252、Y軸移動駆動部253及びZ軸回転駆動部251を備える補正部25によって、ズレが検出されたポケットT1が収容ポジションP1で電子部品Dを収容する前に、当該ポケットT1のズレを解消するようにキャリアテープTを平面移動及び回転させるようにした。 In this way, the taping unit 2 has the displacement confirmation position P2 at a position different from the accommodation position P1, and the carrier tape T is run by the sprockets 21 and 22, whereby each pocket T1 is accommodated via the displacement confirmation position P2. It was made to position in position P1. At the displacement confirmation position P2, the pocket T1 is imaged by the second imaging unit 27, and the image captured by the second imaging unit 27 is analyzed to detect the displacement of the pocket T with respect to the reference position and the reference orientation. Then, before the pocket T1 in which the displacement is detected by the correction unit 25 including the X-axis movement driving unit 252, the Y-axis movement driving unit 253, and the Z-axis rotation driving unit 251, the electronic component D is accommodated at the accommodation position P1. The carrier tape T was moved and rotated in a plane so as to eliminate the displacement of the pocket T1.
 これにより、ポケットT1が製造上の誤差によりキャリアテープTの幅方向にシフトし、長手方向にシフトし、又は向きが変わっていても、収容ポジションP1では基準位置及び基準向きを保ち、電子部品Dを精度よく収容することができる。すなわち、電子部品DのポケットTを画成する壁への接触や挿入ミスが発生しにくくなる。 Thereby, even if the pocket T1 is shifted in the width direction of the carrier tape T due to a manufacturing error, shifted in the longitudinal direction, or changed in direction, the reference position and the reference direction are maintained at the storage position P1, and the electronic component D Can be accommodated with high accuracy. That is, it becomes difficult to make a contact with a wall defining the pocket T of the electronic component D or an insertion error.
 尚、ズレ確認ポジションP2でのポケットT1の観察を利用して、ポケットT1の寸法不正や底面穴無し等の形状異常や、ポケットT1内へのゴミの混入等の混入物異常を検出するようにし、これら形状異常や混入物異常が発生していると、テーピングユニット2、或いはテーピングユニット2を備える電子部品搬送装置全体を停止するようにしてもよい。すなわち、第2の撮像部27で撮像した画像からポケットT1の寸法や底面の穴を計測する。また、第2の撮像部27で撮像した画像からポケットT1内部のゴミ画像を検出する。そして、寸法や穴を規定値と比較し、規定値と所定以上のズレが生じていると、形状異常とする。また、ゴミ画像を検出すると、混入物異常とする。この形状異常及び混入物異常を示す信号を制御機器に出力し、制御機器は、テーピングユニット2や電子部品搬送装置を停止させる。 By using the observation of the pocket T1 at the misalignment confirmation position P2, it is possible to detect abnormalities in the shape of the pocket T1 such as improper dimensions and no bottom hole, and contamination abnormalities such as dust contamination in the pocket T1. When the shape abnormality or the contamination abnormality occurs, the taping unit 2 or the entire electronic component transport device including the taping unit 2 may be stopped. That is, the dimension of the pocket T1 and the hole on the bottom surface are measured from the image captured by the second imaging unit 27. Further, a dust image inside the pocket T1 is detected from the image captured by the second imaging unit 27. Then, the dimension or the hole is compared with a specified value, and if there is a deviation from the specified value or more than a predetermined value, the shape is abnormal. Further, when a dust image is detected, a contamination abnormality is assumed. Signals indicating the shape abnormality and the contamination abnormality are output to the control device, and the control device stops the taping unit 2 and the electronic component transport device.
 また、この実施形態において補正部25は、収容ポジションP1でポケットT1が基準の位置及び向きとなるように事前にキャリアテープTを移動させる。ここで事前とは、保持手段11の離脱処理によるポケットT1への電子部品Dの収納開始前である。従って、収容ポジションP1とズレ確認ポジションP2とを一致させるようにしてもよい。すなわち、電子部品Dの搬送経路とキャリアテープTとが交差する箇所が収容ポジションP1であるとともにズレ確認ポジションP2となり、この交差箇所に向けて第2の撮像部27が配置される。 In this embodiment, the correction unit 25 moves the carrier tape T in advance so that the pocket T1 is at the reference position and orientation at the storage position P1. Here, “preliminary” refers to the time before the electronic component D starts to be stored in the pocket T1 by the detachment process of the holding means 11. Therefore, the accommodation position P1 and the deviation confirmation position P2 may be matched. That is, the location where the transport path of the electronic component D and the carrier tape T intersect is the accommodation position P1 and the displacement confirmation position P2, and the second imaging unit 27 is disposed toward the intersection.
 この場合、第1番目に、スプロケット21、22によるキャリアテープTの移動によるポケットT1の収容ポジションP1への移動、第2番目に、収容ポジションP1にて第2の撮像部27によるポケットT1の撮像、第3番目に、ポケットズレ検出部28による位置ズレと向きズレの算出、第4番目に、補正部25による補正を行い、最後に、保持手段11の電子部品Dの離脱によるポケットT1への電子部品Dの収納が行われることになる。 In this case, first, movement of the pocket T1 to the accommodation position P1 by movement of the carrier tape T by the sprockets 21 and 22, and second, imaging of the pocket T1 by the second imaging unit 27 at the accommodation position P1. Third, the positional deviation and orientation deviation are calculated by the pocket deviation detecting unit 28, and the fourth is corrected by the correcting unit 25. Finally, the holding means 11 is moved to the pocket T1 by the removal of the electronic component D. The electronic component D is stored.
 (電子部品搬送装置)
 図8は、このテーピングユニット2を備える電子部品搬送装置の構成を示す。図8に示すように、電子部品搬送装置10は、架台上に電子部品Dの搬送経路を配設し、搬送経路に沿って複数の電子部品Dを同時に整列搬送し、搬送経路上で各電子部品Dを処理する。架台は、直方体の台であり、内部にコンピュータやコントローラ等の制御機器、電源、ケーブル類、コンプレッサや空気管を収容している。テーピングユニット2のポケットズレ検出部28は、この架台内に内蔵される制御機器であってもよいし、テーピングユニット2が別に制御機器を備えるようにしてもよい。テーピングユニット2の補正部25に対する制御は、この架台内に内蔵される制御機器によりなされてもよいし、テーピングユニット2が別に制御機器を備えるようにしてもよい。
(Electronic component conveyor)
FIG. 8 shows a configuration of an electronic component transport apparatus including the taping unit 2. As shown in FIG. 8, the electronic component transport apparatus 10 arranges a transport path for the electronic components D on the gantry, and aligns and transports a plurality of electronic components D along the transport path. Process part D. The gantry is a rectangular parallelepiped pedestal and accommodates control devices such as a computer and a controller, a power source, cables, a compressor, and an air pipe. The pocket misalignment detection unit 28 of the taping unit 2 may be a control device built in the gantry, or the taping unit 2 may be provided with a control device separately. Control of the correction unit 25 of the taping unit 2 may be performed by a control device built in the gantry, or the taping unit 2 may be provided with a separate control device.
 電子部品Dの搬送経路は、架台上の搬送テーブル12により形成される。保持手段11は、搬送テーブル12の外周に取り付けられる。保持手段11の回転軌跡が搬送経路であり、搬送テーブル12と保持手段11が電子部品Dを搬送する搬送手段である。搬送テーブル12は、一点を中心にして放射状に拡がる円盤又は星形等の形状を有する。この搬送テーブル12は、周方向に間欠的に所定角度ずつ回転する。搬送テーブル12の動力源は、ダイレクトドライブモータ13である。搬送テーブル12は、ダイレクトドライブモータ13を介して架台に設置される。 The conveyance path of the electronic component D is formed by the conveyance table 12 on the gantry. The holding means 11 is attached to the outer periphery of the transport table 12. The rotation trajectory of the holding unit 11 is a conveyance path, and the conveyance table 12 and the holding unit 11 are conveyance units that convey the electronic component D. The conveyance table 12 has a shape such as a disk or a star that expands radially around one point. The transport table 12 rotates intermittently by a predetermined angle in the circumferential direction. The power source of the transport table 12 is a direct drive motor 13. The transfer table 12 is installed on the gantry via the direct drive motor 13.
 保持手段11は、搬送テーブル12の水平盤外周に円周等配位置で、且つ水平盤の中心から同一距離に複数取り付けられる。搬送テーブル12が星形の場合、アームの先端に取り付けられる。保持手段11は、例えば吸着ノズルであり、内部が中空で一端が開口し、開口端を下向きにして水平盤に設置される。保持手段11の内部は真空ポンプやエジェクタ等の負圧発生装置の空気圧回路と連通している。空気圧回路に負圧を発生させることにより、保持手段11は開口端で電子部品Dを吸着し、真空破壊や大気解放によって電子部品Dを離脱させる。 A plurality of holding means 11 are attached to the outer periphery of the horizontal plate of the transfer table 12 at equal circumferential positions and at the same distance from the center of the horizontal plate. When the transfer table 12 has a star shape, it is attached to the tip of the arm. The holding means 11 is, for example, a suction nozzle, and is installed on a horizontal plate with a hollow inside, one end opened, and the open end facing downward. The inside of the holding means 11 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. By generating a negative pressure in the pneumatic circuit, the holding means 11 adsorbs the electronic component D at the open end, and releases the electronic component D by vacuum break or release to the atmosphere.
 ダイレクトドライブモータ13は、1ピッチずつ間欠回転するように制御される。そのピッチは、保持手段11の配置間隔に等しくなるように調整されている。つまり、保持手段11は、搬送テーブル12の間欠回転に伴って共通の移動軌跡を辿り、共通の停止位置で停止する。この停止位置にテーピングユニット2の収容ポジションP1を重ねることで、電子部品DをキャリアテープTに収容することができる。 The direct drive motor 13 is controlled to rotate intermittently by one pitch. The pitch is adjusted to be equal to the arrangement interval of the holding means 11. That is, the holding means 11 follows a common movement locus with the intermittent rotation of the transport table 12 and stops at a common stop position. The electronic component D can be accommodated in the carrier tape T by overlapping the accommodation position P1 of the taping unit 2 at this stop position.
 尚、テーピングユニット2が設けられる停止位置以外には他の処理ユニットを配置することができる。他の処理ユニットとしては、電子部品Dを搬送経路に供給する供給ユニット15、電気テストユニット16、外観検査ユニット17、分類ユニット18、位置補正ユニット19等を挙げることができる。位置補正ユニット19は、テーピングユニット2の直前に設けられ、電子部品Dの位置及び向きを基準位置及び基準向きに揃える。 In addition, other processing units can be arranged in addition to the stop position where the taping unit 2 is provided. Examples of other processing units include a supply unit 15 that supplies the electronic component D to the transport path, an electrical test unit 16, an appearance inspection unit 17, a classification unit 18, a position correction unit 19, and the like. The position correction unit 19 is provided immediately before the taping unit 2 and aligns the position and orientation of the electronic component D with the reference position and reference orientation.
 位置補正ユニット19は、隣接する2箇所の停止位置に第3の撮像部191とXYθステージ192とを備え、第3の撮像部191で確認した電子部品Dの位置ズレ及び向きのズレをXYθステージ192に載せて補正する。第3の撮像部191は、例えばカメラであり、保持手段11の停止位置の真下から電子部品Dを撮像する。XYθステージ192は、X軸及びY軸方向に移動し、Z軸周りに回転する。 The position correction unit 19 includes a third imaging unit 191 and an XYθ stage 192 at two adjacent stop positions, and the positional deviation and orientation deviation of the electronic component D confirmed by the third imaging unit 191 are detected in the XYθ stage. 192 to correct. The third imaging unit 191 is a camera, for example, and images the electronic component D from directly below the stop position of the holding unit 11. The XYθ stage 192 moves in the X-axis and Y-axis directions and rotates around the Z-axis.
 各停止位置には、保持手段11を処理ユニットに向けて進退させる進退駆動装置14が固定されている。収容ポジションP1の直上にも進退駆動装置14が固定されている。この進退駆動装置14は、保持手段11の頭部に向けて延びるロッドを有する。進退駆動装置14は、このロッドに対して回転モータ及びカム機構により軸線方向の推力を与える。進退駆動装置14は、回転モータにより推力を発生させ、その推力をカム機構及びロッドにより保持手段11の軸線に沿った直線推力に変換し、ロッドで保持手段11を押し込む。保持手段11が保持した電子部品Dは、保持手段11の下降によってテーピングユニット2のポケットT1に入り込み、又は処理ユニットの各ステージに載置され、ポケットT1に離脱され、又は処理ユニットに応じた処理を受ける。 At each stop position, an advancing / retreating drive device 14 for advancing and retracting the holding means 11 toward the processing unit is fixed. The forward / backward drive device 14 is also fixed immediately above the storage position P1. The advance / retreat drive device 14 has a rod extending toward the head of the holding means 11. The advancing / retracting drive device 14 applies axial thrust to the rod by a rotary motor and a cam mechanism. The advancing / retracting drive device 14 generates a thrust by a rotary motor, converts the thrust into a linear thrust along the axis of the holding means 11 by a cam mechanism and a rod, and pushes the holding means 11 by a rod. The electronic component D held by the holding means 11 enters the pocket T1 of the taping unit 2 by the lowering of the holding means 11, or is placed on each stage of the processing unit, detached from the pocket T1, or processing corresponding to the processing unit. Receive.
 このような電子部品搬送装置10に対するテーピングユニット2の第1の配置方法を図9に示す。図9に示すように、テーピングユニット2は、キャリアテープTの延び方向が搬送テーブル12の中心に向き、キャリアテープTが搬送テーブル12の外方へ走行するように配置される。収容ポジションP1は、搬送テーブル12の外縁に取り付けられる保持手段11に対応させて、搬送テーブル12の外縁直下に位置する。そのため、ズレ確認ポジションP2は、搬送テーブル12の下に潜り込む。また、キャリアテープTが延びる方向からは、保持手段11によってズレ確認ポジションP2が隠されている。 FIG. 9 shows a first arrangement method of the taping unit 2 with respect to such an electronic component conveying apparatus 10. As shown in FIG. 9, the taping unit 2 is arranged so that the extending direction of the carrier tape T is directed to the center of the transport table 12 and the carrier tape T travels outward of the transport table 12. The accommodation position P <b> 1 is positioned immediately below the outer edge of the transport table 12 in correspondence with the holding means 11 attached to the outer edge of the transport table 12. For this reason, the deviation confirmation position P2 sinks under the transport table 12. Further, the displacement confirmation position P2 is hidden by the holding means 11 from the direction in which the carrier tape T extends.
 そのため、第2の撮像部27は、搬送テーブル12と衝突しないように斜め向きに設置し、ズレ確認ポジションP2を観察させるようにする。但し、搬送テーブル12の大きさによっては、第2の撮像部27が搬送テーブル12と衝突せずにズレ確認ポジションP2を観察できる位置に設置できない場合がある。この場合、搬送テーブル12は、円盤形状とし、収容ポジションP1の直上に通し穴121が貫設される。第2の撮像部27は、搬送テーブル12の上方に通し穴121に向けて固定される。これにより、搬送テーブル12の大きさに拠らず、第2の撮像部27は通し穴121を通してズレ確認ポジションP2を観察できる。 Therefore, the second imaging unit 27 is installed obliquely so as not to collide with the transport table 12 so that the displacement confirmation position P2 is observed. However, depending on the size of the transfer table 12, the second imaging unit 27 may not be installed at a position where the shift confirmation position P2 can be observed without colliding with the transfer table 12. In this case, the transfer table 12 has a disk shape, and a through hole 121 is provided directly above the storage position P1. The second imaging unit 27 is fixed above the transport table 12 toward the through hole 121. Accordingly, the second imaging unit 27 can observe the displacement confirmation position P <b> 2 through the through hole 121 regardless of the size of the transport table 12.
 図10は、電子部品搬送装置10に対するテーピングユニット2の第2の配置方法を示す模式図である。図10に示すように、テーピングユニット2は、収容ポジションP1を通る搬送テーブル12の半径方向とキャリアテープTの延び方向とが直交或いは斜交するように配置される。この配置方法では、ズレ確認ポジションP2が第1の配置方法よりも搬送テーブル12の外周側若しくは外部に位置する。そのため、第2の撮像部27は、搬送テーブル12の半径方向外部に配置しつつ、ズレ確認ポジションP2を観察できる。この第2の配置方法によれば、搬送テーブル12の重量が第1の配置方法と比べて軽くなり、ダイレクトドライブモータ13の出力を低減できる。 FIG. 10 is a schematic diagram showing a second arrangement method of the taping unit 2 with respect to the electronic component conveying apparatus 10. As shown in FIG. 10, the taping unit 2 is arranged such that the radial direction of the transport table 12 passing through the storage position P <b> 1 and the extending direction of the carrier tape T are orthogonal or oblique. In this arrangement method, the displacement confirmation position P2 is located on the outer peripheral side of the transfer table 12 or outside the first arrangement method. Therefore, the second imaging unit 27 can observe the deviation confirmation position P2 while being arranged outside the conveyance table 12 in the radial direction. According to the second arrangement method, the weight of the transport table 12 is lighter than that of the first arrangement method, and the output of the direct drive motor 13 can be reduced.
 図11は、電子部品搬送装置10に対するテーピングユニット2の第3の配置方法を示す側面図である。テーピングユニット2は、キャリアテープTの延び方向が搬送テーブル12の中心に向き、キャリアテープTが搬送テーブル12の外方へ走行するように配置される。保持手段11は、搬送テーブル12の外縁の更に外側に位置するように搬送テーブル12に取り付けられている。すなわち、この保持手段11の外形は、搬送テーブル12の外周から半径方向外側に一旦延びてから真下へ屈曲する。 FIG. 11 is a side view showing a third arrangement method of the taping unit 2 with respect to the electronic component conveying apparatus 10. The taping unit 2 is arranged so that the extending direction of the carrier tape T is directed toward the center of the transport table 12 and the carrier tape T travels outward of the transport table 12. The holding means 11 is attached to the transport table 12 so as to be positioned further outside the outer edge of the transport table 12. That is, the outer shape of the holding means 11 once extends radially outward from the outer periphery of the transfer table 12 and then bends directly downward.
 詳細には、搬送テーブル12の外縁には下方へ延びたレール122が設けられる。保持手段11は、このレール122を摺動するスライダ111を有する。スライダ111からは延長ロッド112が搬送テーブル12の外方へ向けて延びる。延長ロッド112の先端には、下方へ延びる吸着ノズル113が固定される。進退駆動装置14は、このスライダ111に向けて延びるロッド141を有し、スライダ111を押し込むように作用する。進退駆動装置14から推力を付与されるスライダ111と昇降する吸着ノズル113とが延長ロッド112を介することにより離間しているが、レール122が摺動方向をガイドしているため、偏荷重の発生による保持手段11の向き変化を阻止している。 Specifically, a rail 122 extending downward is provided on the outer edge of the transfer table 12. The holding means 11 has a slider 111 that slides on the rail 122. An extension rod 112 extends from the slider 111 toward the outside of the transfer table 12. A suction nozzle 113 extending downward is fixed to the tip of the extension rod 112. The advancing / retracting drive device 14 has a rod 141 extending toward the slider 111 and acts to push the slider 111 in. Although the slider 111 to which thrust is applied from the advancing / retreating drive device 14 and the suction nozzle 113 that moves up and down are separated by way of the extension rod 112, the rail 122 guides the sliding direction, so that an unbalanced load is generated. This prevents the holding means 11 from changing its orientation.
 この第3の配置方法では、テーピングユニット2は、この保持手段11を有する電子部品搬送装置10に対して、搬送テーブル12の外方に収容ポジションP1が位置するように配置できる。そのため、ズレ確認ポジションP2は、保持手段11よりも搬送テーブル12の中心よりであるが、第1の配置方法と比べて搬送テーブル12の外周側若しくは外部に位置させることができる。そのため、第2の撮像部27は、搬送テーブル12の半径方向外部に配置しつつ、ズレ確認ポジションP2を観察できる。この第3の配置方法では、第1の配置方法と比べて搬送テーブル12を軽量化できる。そのため、第1の配置方法に比べて、ダイレクトドライブモータ13の出力低減を図ることができる。また、この第3の配置方法では、第2の配置方法に比べて、搬送テーブル12の周りを占拠するテーピングユニット2の範囲を狭くすることができる。そのため、第2の配置方法に比べて、搬送テーブル12に多くの処理ユニットを配置でき、電子部品搬送装置10の多機能化を図ることができる。 In this third arrangement method, the taping unit 2 can be arranged with respect to the electronic component conveying apparatus 10 having the holding means 11 so that the accommodation position P1 is located outside the conveyance table 12. For this reason, the deviation confirmation position P2 is closer to the center of the conveyance table 12 than the holding means 11, but can be positioned on the outer peripheral side or outside of the conveyance table 12 as compared with the first arrangement method. Therefore, the second imaging unit 27 can observe the deviation confirmation position P2 while being arranged outside the conveyance table 12 in the radial direction. In the third arrangement method, the transport table 12 can be reduced in weight compared to the first arrangement method. Therefore, the output of the direct drive motor 13 can be reduced as compared with the first arrangement method. Further, in the third arrangement method, the range of the taping unit 2 that occupies the periphery of the transport table 12 can be made narrower than in the second arrangement method. Therefore, as compared with the second arrangement method, a larger number of processing units can be arranged on the conveyance table 12, and the electronic component conveyance apparatus 10 can be multifunctional.
 尚、第2の配置方法及び第3の配置方法において、ズレ確認ポジションP2が搬送テーブル12の外部に露出しない場合には、第2の撮像部27をテーピングユニット2の脇に設け、ズレ確認ポジションP2を斜めから撮像することになる。この場合、ポケットズレ検出部28は、斜投影された画像を第2の撮像部27の角度をパラメータとして正斜投影に変換してから基準の位置及び向きからのズレ量を算出すればよい。 In the second arrangement method and the third arrangement method, when the deviation confirmation position P2 is not exposed to the outside of the transport table 12, the second imaging unit 27 is provided on the side of the taping unit 2, and the deviation confirmation position. P2 is imaged from an oblique direction. In this case, the pocket deviation detection unit 28 may calculate the deviation amount from the reference position and orientation after converting the obliquely projected image into an orthographic projection using the angle of the second imaging unit 27 as a parameter.
 また、第1の配置方法乃至第3の配置方法において、ズレ確認ポジションP2を収容ポジションP1と一致させるようにすることで、更に第2の撮像部27の配置及びポケットT1の撮影が容易となる。 Further, in the first to third arrangement methods, by making the deviation confirmation position P2 coincide with the accommodation position P1, the arrangement of the second imaging unit 27 and the photographing of the pocket T1 are further facilitated. .
 (第2の実施形態) (Second embodiment)
 図12に示すように、第2の実施形態に係る電子部品搬送装置10は、テーピングユニット2よりも搬送経路前段に第3の撮像部191が備えるが、電子部品Dの位置及び向きを補正するXYθステージ192は存在しない。XYθステージ192の代わりに他の処理ユニットを配置して多機能化してもよいし、XYθステージ192の設置箇所は処理ユニットの未設置箇所としてもよい。 As illustrated in FIG. 12, the electronic component transport apparatus 10 according to the second embodiment includes the third imaging unit 191 in the upstream of the transport path with respect to the taping unit 2, but corrects the position and orientation of the electronic component D. There is no XYθ stage 192. Instead of the XYθ stage 192, another processing unit may be arranged to be multifunctional, or the installation location of the XYθ stage 192 may be a location where the processing unit is not installed.
 また、図13に示すように、第2の実施形態に係るテーピングユニット2は、ポケットズレ検出部28に加えて、第3の撮像部191の画像を解析して基準位置及び向きからの電子部品Dの位置及び向きを検出する部品位置検出部28aを備えている。この部品位置検出部28aは、電子部品搬送装置10全体を統括制御する架台内の制御機器に備えるようにしてもよいし、テーピングユニット2が独自に制御機器を備える場合には、その制御機器に備えるようにしてもよい。 As shown in FIG. 13, the taping unit 2 according to the second embodiment analyzes the image of the third imaging unit 191 in addition to the pocket shift detection unit 28 and electronic components from the reference position and orientation. A component position detector 28a for detecting the position and orientation of D is provided. The component position detection unit 28a may be provided in a control device in a gantry that performs overall control of the entire electronic component transport apparatus 10, or in the case where the taping unit 2 has a control device independently, You may make it prepare.
 この部品位置検出部28aは、検出対象が電子部品Dである他、機能及び動作は第1の実施形態に係るポケットズレ検出部28と同じである。すなわち、図14に示すように、部品位置検出部28aは、予め原点情報281を記憶し、第3の撮像部191が撮像した電子部品Dの画像を解析して、電子部品Dの基準位置からのズレを示す位置ベクトル285を算出する。部品位置検出部28aは、予め基準方向ベクトル282を記憶し、第3の撮像部191が撮像した電子部品Dの画像を解析して、電子部品Dの基準向きからのズレを示す方向ベクトル286を算出する。尚、ポケットT1の基準位置及び向きと電子部品Dの基準位置及び向きは、合致するように予め設定される。 The component position detection unit 28a has the same function and operation as the pocket shift detection unit 28 according to the first embodiment except that the detection target is the electronic component D. That is, as illustrated in FIG. 14, the component position detection unit 28 a stores the origin information 281 in advance, analyzes the image of the electronic component D captured by the third imaging unit 191, and determines the reference position of the electronic component D. A position vector 285 indicating the deviation is calculated. The component position detection unit 28a stores a reference direction vector 282 in advance, analyzes the image of the electronic component D captured by the third imaging unit 191 and generates a direction vector 286 indicating a deviation from the reference direction of the electronic component D. calculate. The reference position and orientation of the pocket T1 and the reference position and orientation of the electronic component D are set in advance so as to match.
 部品位置検出部28aが算出した電子部品Dに関する位置ベクトル285と方向ベクトル286は、ポケットT1の位置及び向きのズレを算出するポケットズレ検出部28に入力される。図15に示すように、ポケットズレ検出部28は、電子部品Dに関する位置ベクトル285を原点情報281として保持し、電子部品Dに関する方向ベクトル286を基準方向ベクトル282として保持する。そして、ポケットズレ検出部28は、位置ベクトル285で示される原点情報281によってポケットDの位置ベクトル283を算出し、方向ベクトル286で示される基準ベクトル282とポケットDの方向ベクトル284とがなす角度Δθを算出する。 The position vector 285 and the direction vector 286 related to the electronic component D calculated by the component position detection unit 28a are input to the pocket shift detection unit 28 that calculates a shift in the position and orientation of the pocket T1. As shown in FIG. 15, the pocket shift detection unit 28 holds a position vector 285 related to the electronic component D as origin information 281 and holds a direction vector 286 related to the electronic component D as a reference direction vector 282. The pocket shift detection unit 28 calculates the position vector 283 of the pocket D based on the origin information 281 indicated by the position vector 285, and the angle Δθ formed by the reference vector 282 indicated by the direction vector 286 and the direction vector 284 of the pocket D. Is calculated.
 この位置ベクトル283は、電子部品Dに対するポケットT1のX軸方向の位置ズレ量ΔXとY軸方向の位置ズレ量ΔYを示す。電子部品Dの方向ベクトル286とポケットT1の方向ベクトル284がなす角度は、電子部品Dに対するポケットT1の向きズレ量Δθを示す。図16に示すように、補正部25には、これら位置ズレ量ΔXと位置ズレ量ΔYと向きズレ量Δθが入力され、収容ポジションP1にポケットT1が到達すると、位置ズレ量ΔX、位置ズレ量ΔY、及び向きズレ量Δθを解消するように、ユニット本体29を移動及び回転させる。 The position vector 283 indicates the positional deviation amount ΔX in the X-axis direction and the positional deviation amount ΔY in the Y-axis direction of the pocket T1 with respect to the electronic component D. The angle formed by the direction vector 286 of the electronic component D and the direction vector 284 of the pocket T1 indicates the amount of deviation Δθ of the pocket T1 with respect to the electronic component D. As shown in FIG. 16, the position shift amount ΔX, the position shift amount ΔY, and the direction shift amount Δθ are input to the correction unit 25, and when the pocket T1 reaches the storage position P1, the position shift amount ΔX and the position shift amount. The unit main body 29 is moved and rotated so as to eliminate ΔY and the direction deviation amount Δθ.
 すなわち、第1の実施形態では、電子部品DとポケットT1の位置及び向きを合致させるために、基準位置及び向きという絶対位置及び向きに電子部品DとポケットT1の双方を合わせた。具体的には、電子部品Dの位置や向きは、テーピングユニット2よりも搬送経路前段に設けられる位置補正ユニット19で補正し、ポケットT1の位置及び向きは、テーピングユニット2の補正部25により基準位置及び基準向きに合わせた。一方、第2の実施形態では、電子部品の位置及び向きのズレとポケットT1の位置及び向きのズレとを合成し、電子部品Dの位置及び向きにポケットT1の位置及び向きを合わせるように、ポケットT1を電子部品Dの位置及び向きを加味して移動及び回転させる。 That is, in the first embodiment, in order to match the positions and orientations of the electronic component D and the pocket T1, both the electronic component D and the pocket T1 are matched to the absolute position and orientation of the reference position and orientation. Specifically, the position and orientation of the electronic component D are corrected by the position correction unit 19 provided in the upstream of the transport path with respect to the taping unit 2, and the position and orientation of the pocket T 1 are referenced by the correction unit 25 of the taping unit 2. Adjusted to position and reference orientation. On the other hand, in the second embodiment, the displacement of the position and orientation of the electronic component and the displacement of the position and orientation of the pocket T1 are synthesized, and the position and orientation of the pocket T1 are matched with the position and orientation of the electronic component D. The pocket T1 is moved and rotated in consideration of the position and orientation of the electronic component D.
 これにより、ポケットT1に設計上の位置ズレや向きズレが生じていても電子部品Dを精度良く収容することが可能となるとともに、電子部品Dを補正するXYθステージ192を排除できるため、テーピングユニット2又は電子部品搬送装置10の製造コストを低減することができ、XYθステージ192の代わりに他の処理ユニットを配置することができるため、電子部品搬送装置10を多機能化することが可能となる。 This makes it possible to accurately store the electronic component D even if a design position shift or orientation shift occurs in the pocket T1, and eliminates the XYθ stage 192 for correcting the electronic component D. 2 or the manufacturing cost of the electronic component transport apparatus 10 can be reduced, and another processing unit can be arranged instead of the XYθ stage 192, so that the electronic component transport apparatus 10 can be multi-functional. .
 (第3の実施形態)
 第3の実施形態に係る電子部品搬送装置10は、電気テストユニット16や外観検査ユニット17等の電子部品の品質を判定する処理結果を基に、電子部品Dの良品の程度をランク分けし、同一ランクの電子部品Dを同一のキャリアテープTに収容させる。この電子部品搬送装置10は、図17に示すように、2以上の整数であるN機のテーピングユニット2a、2b・・・を搬送経路上に備える。N機のテーピングユニットは搬送経路に連続して並べてもよいし、他の種類の処理ユニットが介在したり、テーピングユニット2a、b・・・の間に処理ユニットが配置されない箇所を有していたりする等のように不連続であってもよい。
(Third embodiment)
The electronic component transport apparatus 10 according to the third embodiment ranks the degree of non-defective products of the electronic components D based on the processing results for determining the quality of the electronic components such as the electrical test unit 16 and the appearance inspection unit 17. Electronic components D having the same rank are accommodated in the same carrier tape T. As shown in FIG. 17, the electronic component transport apparatus 10 includes N units of taping units 2a, 2b,... The taping units of the N machine may be continuously arranged in the transport path, or other types of processing units are interposed, or there are places where the processing units are not arranged between the taping units 2a, b,. It may be discontinuous, such as.
 この電子部品搬送装置10は、各電子部品Dにランクを紐付けしておき、保持手段11によりランクに応じたテーピングユニット2a、2b・・・の直上まで搬送させて離脱させる。例えば、テーピングユニット2aは、最上級の電子部品DをキャリアテープTに収容し、テーピングユニット2bは、最上級よりもランクの低い上級の電子部品DをキャリアテープTに収容するものとする。また、テーピングユニット2aがテーピングユニット2bよりも搬送経路上流に位置するものとする。 The electronic component transport device 10 associates a rank with each electronic component D, and transports it to a position directly above the taping units 2a, 2b,. For example, it is assumed that the taping unit 2a accommodates the uppermost electronic component D in the carrier tape T, and the taping unit 2b accommodates the upper electronic component D having a lower rank than the uppermost rank in the carrier tape T. Further, it is assumed that the taping unit 2a is positioned upstream of the transport path with respect to the taping unit 2b.
 図18の(a)に示すように、最上級Sの電子部品Dがテーピングユニット2aの収容ポジションP1に位置すると、電子部品搬送装置10は、その電子部品Dを保持している保持手段11に対して電子部品Dを離脱させるように制御する。具体的には、保持手段11をポケットT1に対して下降させた後、真空破壊又は大気破壊させて吸着力を喪失させる。 As shown in (a) of FIG. 18, the electronic component D S superlative S is positioned in the accommodation position P1 of the taping unit 2a, the electronic component transporting apparatus 10 includes a holding means that holds the electronic component D S It controls to disengage the electronic component D S with respect to 11. Specifically, after the holding means 11 is lowered with respect to the pocket T1, the suction force is lost by breaking the vacuum or the atmosphere.
 一方、図18の(b)に示すように、上級Aの電子部品Dがテーピングユニット2aの収容ポジションP1に位置すると、電子部品搬送装置10は、保持手段11に対して其の電子部品Dを保持させたままとする。具体的には、保持手段11に対して真空破壊又は大気破壊等の吸着力喪失の制御はしない。これにより、上級Aの電子部品Dは、テーピングユニット2aの上方を単に通過する。そして、図18の(b)に示すように、上級Aの電子部品Dが搬送経路を更に間欠移動し、テーピングユニット2bの収容ポジションP1に位置すると、電子部品搬送装置10は、その電子部品Dを保持している保持手段11に対して電子部品Dを離脱させるように制御する。具体的には、保持手段11に対して真空破壊又は大気破壊させて吸着力を喪失させる。 On the other hand, as shown in (b) of FIG. 18, the electronic component D A senior A is located at the accommodated position P1 of the taping unit 2a, the electronic component transporting apparatus 10, its electronic part D with respect to the holding means 11 Keep A held. Specifically, the holding means 11 is not controlled for loss of adsorption power such as vacuum break or atmospheric break. Thus, the electronic components D A senior A simply passes above the taping unit 2a. Then, as shown in (b) of FIG. 18, the electronic component D A senior A is further intermittent movement of the conveyor path and positioned to accommodate the position P1 of the taping unit 2b, an electronic component transporting apparatus 10, the electronic component controls to disengage the electronic component D a to the holding means 11 holding the D a. More specifically, the holding means 11 is broken in vacuum or in the atmosphere to lose the adsorption power.
 この電子部品搬送装置10において、各テーピングユニット2a、2b・・・は、それぞれ収容ポジションP1よりも走行方向前段にズレ確認ポジションP2を有し、第1の撮像部26、ポケットズレ検出部28、部品位置検出部28a及び補正部25を備え、収容ポジションP1に移動するポケットT1の位置及び向きのズレを補正可能となっている。 In this electronic component conveying apparatus 10, each taping unit 2a, 2b,... Has a displacement confirmation position P2 in the front stage in the traveling direction from the accommodation position P1, and includes a first imaging unit 26, a pocket displacement detection unit 28, A component position detection unit 28a and a correction unit 25 are provided, and the displacement of the position and orientation of the pocket T1 moving to the storage position P1 can be corrected.
 この各テーピングユニット2a、2b・・・は、収容予定の電子部品Dが収容ポジションP1に位置して離脱させられるまでの間に、ポケットT1の位置及び向きを補正するようにユニット本体29を移動及び回転させておく。 Each of the taping units 2a, 2b,... Moves the unit main body 29 so as to correct the position and orientation of the pocket T1 until the electronic component D to be accommodated is located at the accommodation position P1 and released. And rotate it.
 すなわち、電子部品Dが第3の撮像部191で撮像されて、基準位置からのズレを示す位置ベクトル285と基準向きからのズレを示す方向ベクトル286が算出されると、電子部品搬送装置10の制御機器は、図19の(a)及び(b)に示すように、そのズレを有する電子部品Dのランクに対応するテーピングユニット2a又は2bに位置ベクトル285と方向ベクトル286を入力する。位置ベクトル285と方向ベクトル286が入力されたテーピングユニット2a又は2bは、これらを原点情報281及び基準方向ベクトル282とする。そして、収容ポジションP1で離脱させられる電子部品Dに合わせてポケットT1の位置及び向きのズレを補正しておく。 That is, when the electronic component D is imaged by the third imaging unit 191 and the position vector 285 indicating the deviation from the reference position and the direction vector 286 indicating the deviation from the reference direction are calculated, As shown in FIGS. 19A and 19B, the control device inputs the position vector 285 and the direction vector 286 to the taping unit 2a or 2b corresponding to the rank of the electronic component D having the deviation. The taping unit 2a or 2b, to which the position vector 285 and the direction vector 286 are input, uses these as the origin information 281 and the reference direction vector 282. Then, the displacement of the position and orientation of the pocket T1 is corrected in accordance with the electronic component D that is removed at the accommodation position P1.
 尚、この電子部品搬送装置10では、XYθステージ192を有する位置補正ユニット19を備え、各テーピングユニット2a、2b・・・は、第1の撮像部26、ポケットズレ検出部28及び補正部25を備えるようにし、基準位置及び向きという絶対位置及び向きに電子部品DとポケットT1の双方を合わせることもできる。 The electronic component transport apparatus 10 includes a position correction unit 19 having an XYθ stage 192. Each taping unit 2a, 2b,... Has a first imaging unit 26, a pocket shift detection unit 28, and a correction unit 25. It is also possible to provide both the electronic component D and the pocket T1 at the absolute position and orientation of the reference position and orientation.
 このように、電子部品DをランクごとにキャリアテープTに収容する場合、電子部品Dを収容するキャリアテープTを保持するテーピングユニット2が其の電子部品Dの位置及び向きのズレを加味して、ポケットT1を電子部品Dの位置及び向きに合わせるように、ユニット本体29を移動及び回転させればよい。 Thus, when the electronic component D is accommodated in the carrier tape T for each rank, the taping unit 2 that holds the carrier tape T that accommodates the electronic component D takes into account the displacement of the position and orientation of the electronic component D. The unit main body 29 may be moved and rotated so that the pocket T1 is aligned with the position and orientation of the electronic component D.
 (第4の実施形態)
 (構成)
 図20は、第4の実施形態に係る補正部25の制御構成を示すブロック図である。図20に示すように、テーピングユニット2は、判定部41と駆動制御部42を備える。この判定部41と駆動制御部42は、所謂コンピュータにより構成され、CPU、メモリ及び補正部25を駆動させるドライバインターフェースにより成る。コンピュータは、電子部品搬送装置10が備える制御機器を兼用としてもよい。すなわち、判定部41及び駆動制御部42として機能してテーピングユニット2を制御すると共に、搬送テーブル12を制御し、保持手段11への真空供給を制御し、他のユニット15~19を制御するようにしてもよい。
(Fourth embodiment)
(Constitution)
FIG. 20 is a block diagram illustrating a control configuration of the correction unit 25 according to the fourth embodiment. As shown in FIG. 20, the taping unit 2 includes a determination unit 41 and a drive control unit 42. The determination unit 41 and the drive control unit 42 are configured by a so-called computer, and include a CPU, a memory, and a driver interface that drives the correction unit 25. The computer may also be used as a control device provided in the electronic component transport apparatus 10. That is, it functions as the determination unit 41 and the drive control unit 42 to control the taping unit 2, to control the transport table 12, to control the vacuum supply to the holding means 11, and to control the other units 15 to 19. It may be.
 判定部41は、ポケットT1の補正が無いと仮定した場合、ポケットT1を画成する内壁と電子部品Dとの近さを検出し、当該近さに応じて補正部25による補正要否を決定する。この判定部41は、ポケットT1のX軸方向の位置ズレ量ΔXの閾値Xtと、ポケットT1のY軸方向の位置ズレ量ΔYの閾値Ytを記憶している。判定部41は、ポケットズレ検出部28が検出した位置ズレ量ΔXと閾値Xtを比較し、位置ズレ量ΔYと閾値Ytを比較する。 If it is assumed that there is no correction of the pocket T1, the determination unit 41 detects the proximity between the inner wall that defines the pocket T1 and the electronic component D, and determines whether the correction unit 25 needs to correct according to the proximity. To do. The determination unit 41 stores a threshold value Xt of the positional deviation amount ΔX of the pocket T1 in the X-axis direction and a threshold value Yt of the positional deviation amount ΔY of the pocket T1 in the Y-axis direction. The determination unit 41 compares the positional deviation amount ΔX detected by the pocket deviation detection unit 28 with the threshold value Xt, and compares the positional deviation amount ΔY with the threshold value Yt.
 駆動制御部42は、補正要否に従って補正部25を駆動する。補正要否は、判定部41の判定結果であり、位置ズレ量ΔXと位置ズレ量ΔYの一方又は両方が閾値Xt、Ytを上回ると補正要とする。一方、駆動制御部42は、位置ズレ量ΔXと位置ズレ量ΔYの両方が閾値Xt、Ytを下回ると補正不要とする。駆動制御部42は、補正要の場合には、補正部25に駆動信号を出力する。駆動信号は、例えばポケットズレ検出部28が算出した位置ズレ量ΔXと位置ズレ量ΔYで足りる。 The drive control unit 42 drives the correction unit 25 according to the necessity of correction. The necessity of correction is a determination result of the determination unit 41, and correction is required when one or both of the positional deviation amount ΔX and the positional deviation amount ΔY exceed the threshold values Xt and Yt. On the other hand, the drive control unit 42 makes correction unnecessary when both the positional deviation amount ΔX and the positional deviation amount ΔY are below the threshold values Xt and Yt. The drive control unit 42 outputs a drive signal to the correction unit 25 when correction is necessary. For example, the positional deviation amount ΔX and the positional deviation amount ΔY calculated by the pocket deviation detection unit 28 suffice.
 補正部25は、駆動信号に応答して電子部品Dの位置ズレを補正する。駆動制御部42は、補正不要の場合には、補正部25に駆動信号を出力しない。補正部25は、駆動信号の未入力のために駆動せず、電子部品Dの位置ズレを補正しない。すなわち、補正部25は、ポケットT1を画成する内壁と電子部品Dとの近さが一定以内であれば、ポケットT1を補正し、一定以上であれば、ポケットT1の補正を見送る。 The correction unit 25 corrects the positional deviation of the electronic component D in response to the drive signal. The drive control unit 42 does not output a drive signal to the correction unit 25 when correction is not necessary. The correction unit 25 does not drive because the drive signal is not input, and does not correct the positional deviation of the electronic component D. That is, the correction unit 25 corrects the pocket T1 if the distance between the inner wall that defines the pocket T1 and the electronic component D is within a certain range, and defers the correction of the pocket T1 if the proximity is greater than a certain value.
 図21は、この判定部41と駆動制御部42の動作を示すフローチャートである。図21に示すように、位置ズレ量ΔXと位置ズレ量ΔYが算出されると(ステップS01)、判定部41は、位置ズレ量ΔXと閾値Xtを比較する(ステップS02)。また判定部41は、位置ズレ量ΔYと閾値Ytを比較する(ステップS03)。 FIG. 21 is a flowchart showing the operations of the determination unit 41 and the drive control unit 42. As shown in FIG. 21, when the positional deviation amount ΔX and the positional deviation amount ΔY are calculated (step S01), the determination unit 41 compares the positional deviation amount ΔX and the threshold value Xt (step S02). The determination unit 41 compares the positional deviation amount ΔY with the threshold value Yt (step S03).
 比較の結果、位置ズレ量ΔXが閾値Xtを下回り(ステップS02,Yes)、且つ位置ズレ量ΔYが閾値Ytを下回っていると(ステップS03,Yes)、駆動制御部42は、補正部25に駆動信号を入力せずに処理を終了し、保持手段11は電子部品Dをポケット1に離脱させる(ステップS07)。 As a result of the comparison, if the positional deviation amount ΔX is less than the threshold value Xt (step S02, Yes) and the positional deviation amount ΔY is less than the threshold value Yt (step S03, Yes), the drive control unit 42 sends a correction to the correction unit 25. The process is terminated without inputting the drive signal, and the holding unit 11 causes the electronic component D to leave the pocket 1 (step S07).
 一方、比較の結果、位置ズレ量ΔXが閾値Xtを上回っていると(ステップS02,Yes)、又は位置ズレ量ΔYが閾値Ytを上回っていると(ステップS03,Yes)、駆動制御部42は、補正部25に駆動信号を入力する(ステップS04)。補正部25は、駆動信号を受けて、その駆動信号に含まれる位置ズレ量ΔX、位置ズレ量ΔY、向きズレ量Δθを解消するように駆動する(ステップS05)。そして、保持手段11は、このポケットT1の補正が終了するのを待って(ステップS06,Yes)、電子部品Dをポケット1に離脱させる(ステップS07)。 On the other hand, as a result of the comparison, if the positional deviation amount ΔX exceeds the threshold value Xt (step S02, Yes), or if the positional deviation amount ΔY exceeds the threshold value Yt (step S03, Yes), the drive control unit 42 Then, a drive signal is input to the correction unit 25 (step S04). The correction unit 25 receives the drive signal and drives so as to eliminate the positional deviation amount ΔX, the positional deviation amount ΔY, and the orientation deviation amount Δθ included in the driving signal (step S05). Then, the holding unit 11 waits for the correction of the pocket T1 to end (step S06, Yes), and causes the electronic component D to leave the pocket 1 (step S07).
 (作用)
 図22は、閾値Xtと閾値Ytを示す模式図である。図22に示すように、電子部品DがポケットT1の壁際まで危険距離dd以内に近づいている場合、機械の作動誤差等によって電子部品DがポケットT1に衝突する危険性が増す。電子部品Dの中心とポケットT1の中心が合致した場合、電子部品Dの縁からポケットT1の壁際までの距離をdrとする。閾値Xt及び閾値Ytは、Xt=dr-dd及びYt=dr-ddである。この閾値Xtと閾値Ytは、電子部品Dの寸法とポケットT1の寸法と危険距離dの設定に応じて調整される。
(Function)
FIG. 22 is a schematic diagram showing the threshold value Xt and the threshold value Yt. As shown in FIG. 22, when the electronic component D is close to the wall of the pocket T1 within the danger distance dd, there is an increased risk of the electronic component D colliding with the pocket T1 due to a machine operation error or the like. When the center of the electronic component D coincides with the center of the pocket T1, the distance from the edge of the electronic component D to the wall of the pocket T1 is defined as dr. The threshold value Xt and the threshold value Yt are Xt = dr−dd and Yt = dr−dd. The threshold value Xt and the threshold value Yt are adjusted according to the dimensions of the electronic component D, the dimension of the pocket T1, and the danger distance d.
 この閾値Xtと閾値Ytによれば、電子部品Dが閾値Xtを上回ってX軸方向に位置ズレしていると、電子部品DがポケットT1の壁際まで危険距離dd以内に近づいていることを示す。また、電子部品DのY軸方向に閾値Ytを上回って位置ズレしていると、ポケットT1の壁際に対して電子部品Dが危険距離d以内に近づいていることを示す。従って、テーピングユニット1は、電子部品DがポケットT1の壁際まで危険距離dd以内に近づかないように、ポケットT1を補正する。 According to the threshold value Xt and the threshold value Yt, if the electronic component D exceeds the threshold value Xt and is displaced in the X-axis direction, it indicates that the electronic component D is approaching the dangerous distance dd to the wall of the pocket T1. . Further, if the position of the electronic component D is shifted in the Y-axis direction above the threshold value Yt, it indicates that the electronic component D is approaching the dangerous distance d with respect to the wall of the pocket T1. Therefore, the taping unit 1 corrects the pocket T1 so that the electronic component D does not approach the wall of the pocket T1 within the danger distance dd.
 一方、電子部品DのX軸方向の位置ズレが閾値Xtを下回っていると、ポケットT1の壁際から電子部品Dが危険距離dd以上に離れていることを示す。また、電子部品DのY軸方向の位置ズレが閾値Ytを下回っていると、ポケットT1の壁際から電子部品Dが危険距離d以上に離れていることを示す。電子部品DがポケットT1の壁際まで危険距離dd以上に離れている場合、電子部品D及びポケットT1の寸法公差を考慮しても電子部品DがポケットT1に衝突する危険性は少ない。従って、テーピングユニット1は、ポケットT1の補正を見送る。 On the other hand, when the positional deviation of the electronic component D in the X-axis direction is below the threshold value Xt, it indicates that the electronic component D is separated from the wall of the pocket T1 by the danger distance dd or more. Further, if the positional deviation of the electronic component D in the Y-axis direction is less than the threshold value Yt, it indicates that the electronic component D is separated from the danger distance d by the wall of the pocket T1. When the electronic component D is separated from the wall of the pocket T1 by a danger distance dd or more, the risk of the electronic component D colliding with the pocket T1 is small even if the dimensional tolerance between the electronic component D and the pocket T1 is taken into consideration. Therefore, the taping unit 1 defers correction of the pocket T1.
 この結果、図23に示すように、位置ズレが閾値を上回っている一部の電子部品DとポケットT1との関係についてのみ、補正部25による補正が実行され、その後の電子部品Dを収納する処理に移ることになる。一方、位置ズレが閾値を下回っている他の電子部品DとポケットT1との関係については、補正部25による補正を飛ばして速やかに電子部品Dを収納する処理に移ることになる。 As a result, as shown in FIG. 23, the correction by the correction unit 25 is executed only for the relationship between a part of the electronic components D whose positional deviation exceeds the threshold and the pocket T1, and the subsequent electronic components D are stored. It will move to processing. On the other hand, regarding the relationship between the other electronic component D whose position deviation is below the threshold and the pocket T1, the correction by the correction unit 25 is skipped, and the process immediately moves to the process of storing the electronic component D.
 ここで、実際に、長さが0.65±0.04mmで幅が0.50±0.04mmの電子部品Dを、長さが0.81±0.03mmで幅が0.63±0.03mmのポケットT1に収納させた。電子部品DとポケットT1の両側に空く合計の最小クリアランスは、長さ方向で0.09mmであり、幅方向で0.06mmである。そこで、閾値Xtと閾値Ytを±0.02mmとして、500個の電子部品DをポケットT1に収容する試験を実施した。その結果を図24の表に示す。図24に示すように、500回の電子部品DとポケットT1の収容動作のうち、補正部25による補正が実行されたのは計47回であった。 Here, in practice, an electronic component D having a length of 0.65 ± 0.04 mm and a width of 0.50 ± 0.04 mm is used, and a length of 0.81 ± 0.03 mm and a width of 0.63 ± 0 is used. It was stored in a pocket T1 of 0.03 mm. The total minimum clearance vacant on both sides of the electronic component D and the pocket T1 is 0.09 mm in the length direction and 0.06 mm in the width direction. Therefore, the threshold Xt and threshold Yt were set to ± 0.02 mm, and a test for accommodating 500 electronic components D in the pocket T1 was performed. The results are shown in the table of FIG. As shown in FIG. 24, the correction by the correction unit 25 was performed 47 times in total in the operation of accommodating the electronic component D and the pocket T1 500 times.
 図24の表に示すように、実際の電子部品搬送装置10では、ポケットT1の補正が無い場合、電子部品DとポケットT1の収容動作は、平均121msecのタクトタイムを必要とした。また、ポケットTの補正が含まれる場合、電子部品DとポケットT1の収容動作は、平均121msecのタクトタイムを必要とした。そのため、全ての電子部品DとポケットT1との関係において補正を実行する場合と比べて、補正動作が計47回に止まった本実施形態では、電子部品DとポケットT1の収容動作が平均123msecのタクトタイムに縮まった。 As shown in the table of FIG. 24, in the actual electronic component transport apparatus 10, when the pocket T1 is not corrected, the accommodating operation of the electronic component D and the pocket T1 requires an average tact time of 121 msec. When the pocket T correction is included, the accommodating operation of the electronic component D and the pocket T1 requires an average tact time of 121 msec. Therefore, compared with the case where correction is executed in relation to all the electronic components D and the pockets T1, in this embodiment in which the correction operation is stopped a total of 47 times, the housing operation of the electronic components D and the pockets T1 is 123 msec on average. Shortened to tact time.
 (効果)
 以上のように、第4の実施形態では、補正部25は、ポケットT1の内壁と電子部品Dが危険距離dd以内に近づく場合にのみ、ポケットT1のズレを解消するようにした。これにより、衝突の危険性の少ないポケットT1と電子部品Dとの位置関係においても、衝突の危険性を回避する補正を行うといった事態を回避できる。そのため、ポケットT1の補正は一部の状況に限られ、ポケットT1の補正を一律に行うことはなくなり、電子部品DのポケットT1への収納動作の平均タクトタイムは向上する。すなわち、電子部品Dの搬送が高速化され、電子部品Dの生産効率が向上する。
(effect)
As described above, in the fourth embodiment, the correction unit 25 is configured to eliminate the displacement of the pocket T1 only when the inner wall of the pocket T1 and the electronic component D approach within the danger distance dd. As a result, even in the positional relationship between the pocket T1 and the electronic component D with a low risk of collision, it is possible to avoid a situation where correction for avoiding the risk of collision is performed. Therefore, the correction of the pocket T1 is limited to some situations, and the correction of the pocket T1 is not performed uniformly, and the average tact time of the storing operation of the electronic component D in the pocket T1 is improved. That is, the conveyance of the electronic component D is speeded up, and the production efficiency of the electronic component D is improved.
 (変形例1)
 第4の実施形態に対し、ポケットT1の位置のみならず、ポケットT1の向きも考慮して、ポケットT1の内壁と電子部品Dとの近さを正確に算出するようにしてもよい。判定部41は、図25に示すように、電子部品DとポケットT1の内壁との近さにおいて、電子部品Dの最もポケットT1に近い箇所、すなわち電子部品Dの四隅とポケットT1の内壁との間の距離dk1~dk4を算出する。
(Modification 1)
In contrast to the fourth embodiment, not only the position of the pocket T1 but also the orientation of the pocket T1 may be considered, and the proximity between the inner wall of the pocket T1 and the electronic component D may be accurately calculated. As shown in FIG. 25, the determination unit 41 is located at a position closest to the pocket T1 of the electronic component D, that is, between the four corners of the electronic component D and the inner wall of the pocket T1 in the vicinity of the electronic component D and the inner wall of the pocket T1. The distances dk1 to dk4 are calculated.
 具体的には、判定部41は、ポケットズレ検出部28が検出した位置ベクトル283と方向ベクトル284とポケットT1の寸法から、ポケットT1の各辺の位置を算出する。また、判定部41は、予め位置及び向きが補正された電子部品Dの四隅の位置座標を記憶し、或いは電子部品Dの位置及び向きが補正されない場合に部品位置検出部28aが算出した位置ベクトル285と方向ベクトル286と電子部品Dの寸法から、電子部品Dの四隅の位置を算出する。 Specifically, the determination unit 41 calculates the position of each side of the pocket T1 from the position vector 283, the direction vector 284, and the dimensions of the pocket T1 detected by the pocket deviation detection unit 28. Further, the determination unit 41 stores the position coordinates of the four corners of the electronic component D whose position and orientation are corrected in advance, or the position vector calculated by the component position detection unit 28a when the position and orientation of the electronic component D are not corrected. The positions of the four corners of the electronic component D are calculated from 285, the direction vector 286, and the dimensions of the electronic component D.
 そして、判定部41は、ポケットT1の各辺と電子部品Dの四隅との距離を算出し、各距離dk1~dk4のうち、閾値Th以下の値がないか比較する。閾値Th以下の値が1つでもあれば、駆動制御部42は、補正部25を駆動させ、ポケットT1を補正する。 Then, the determination unit 41 calculates the distance between each side of the pocket T1 and the four corners of the electronic component D, and compares each distance dk1 to dk4 for a value equal to or less than the threshold Th. If there is even one value equal to or less than the threshold Th, the drive control unit 42 drives the correction unit 25 to correct the pocket T1.
 第4の実施形態では、補正部25は、ポケットズレ検出部28により検出されたポケットT1のズレが閾値Xt、閾値Ytで示される所定以上の場合にのみ、ポケットT1のズレを解消するようにした。このような補正部25の駆動は、ポケットT1の内壁と電子部品Dとの近さを判定する判定部41と、判定部41に従って補正部25によるズレ解消の駆動又は非駆動を制御する駆動制御部42によって実現した。 In the fourth embodiment, the correction unit 25 cancels the displacement of the pocket T1 only when the displacement of the pocket T1 detected by the pocket displacement detection unit 28 is equal to or greater than a predetermined value indicated by the threshold value Xt and the threshold value Yt. did. Such driving of the correction unit 25 is performed by a determination unit 41 that determines the proximity between the inner wall of the pocket T1 and the electronic component D, and a drive control that controls driving or non-drive of deviation correction by the correction unit 25 according to the determination unit 41. This is realized by the unit 42.
 これによって、ポケットT1の内壁と電子部品Dとの近さを比較処理のみで決定でき、演算を回避できるため、コンピュータの負荷がかからず、電子部品Dの搬送が高速化され、電子部品Dの生産効率が向上する。 Thereby, the proximity between the inner wall of the pocket T1 and the electronic component D can be determined only by the comparison process, and the calculation can be avoided. Therefore, the load on the computer is not applied, the transportation of the electronic component D is accelerated, and the electronic component D The production efficiency is improved.
 一方、変形例1によれば、ポケットT1の内壁と電子部品Dとの近さを正確に算出するため、極めて高い確率でポケットT1と電子部品Dとの衝突を回避でき、電子部品Dの信頼性向上及び歩留まり向上を実現できる。 On the other hand, according to the modified example 1, since the closeness between the inner wall of the pocket T1 and the electronic component D is accurately calculated, the collision between the pocket T1 and the electronic component D can be avoided with a very high probability, and the reliability of the electronic component D can be avoided. Improvement in yield and yield can be realized.
 (変形例2)
 また、第4の実施形態及び変形例1に対し、ポケットT1の向きに対する考慮は、図26に示すように、向きズレ量Δθと閾値θtとの比較によって達成するようにしてもよい。すなわち、判定部41は、位置ズレ量ΔXに対する閾値Xtと、位置ズレ量ΔYに対する閾値Ytと、向きズレ量Δθに対する閾値θtとを予め記憶し、位置ズレ量ΔXと閾値Xt、位置ズレ量ΔYと閾値Yt、及び向きズレ量Δθと閾値θtを比較する。
(Modification 2)
Further, with respect to the fourth embodiment and the first modification, the consideration for the orientation of the pocket T1 may be achieved by comparing the orientation deviation amount Δθ and the threshold value θt, as shown in FIG. That is, the determination unit 41 stores in advance a threshold value Xt for the positional deviation amount ΔX, a threshold value Yt for the positional deviation amount ΔY, and a threshold value θt for the orientation deviation amount Δθ, and the positional deviation amount ΔX, the threshold value Xt, and the positional deviation amount ΔY. And the threshold value Yt, and the direction deviation amount Δθ and the threshold value θt are compared.
 そして、駆動制御部42は、位置ズレ量ΔXが閾値Xtを上回り、位置ズレ量ΔYが閾値Ytが上回り、又は向きズレ量Δθが閾値θtを上回れば、補正部25を制御してポケットT1を補正し、全てが下回れば、補正部25を非駆動とする。 Then, when the positional deviation amount ΔX exceeds the threshold value Xt, the positional deviation amount ΔY exceeds the threshold value Yt, or the orientation deviation amount Δθ exceeds the threshold value θt, the drive control unit 42 controls the correction unit 25 to detect the pocket T1. If all the values are corrected, the correction unit 25 is not driven.
 これにより、ポケットT1の内壁と電子部品Dとの近さを比較処理のみで決定でき、且つポケットT1の内壁と電子部品Dとの近さ検出において正確性が向上するため、電子部品Dの生産効率向上と電子部品Dの信頼性向上及び歩留まり向上を高いバランスで両立できる。 As a result, the proximity between the inner wall of the pocket T1 and the electronic component D can be determined only by comparison processing, and the accuracy in detecting the proximity between the inner wall of the pocket T1 and the electronic component D is improved. It is possible to achieve a balance between improving efficiency, improving the reliability of the electronic component D, and improving yield.
 (他の実施形態)
 以上のように本発明の各実施形態を説明したが、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。そして、これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、請求の範囲に記載された発明とその均等の範囲に含まれる。例えば、保持手段11として吸着ノズルを例に採り説明したが、静電吸着方式、ベルヌーイチャック方式、又は電子部品Dを機械的に挟持するチャック機構を配してもよい。
(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof. For example, although the suction nozzle has been described as an example of the holding unit 11, an electrostatic suction method, a Bernoulli chuck method, or a chuck mechanism that mechanically clamps the electronic component D may be provided.
 また、テーピングユニット2は収容ユニットの一例である。収容ユニットは、多数の収容箇所が並ぶ収容体を保持し、その収容箇所を収容ポジションP1へ順次移動させる態様のものであれば、テーピングユニット2に限定されることなく、本発明の目的を達成することができる。例えば、図27及び28に示すように、収容体はキャリアテープTの他に、トレイポケット32を2次元アレイ状に並べたトレイ31であってもよい。このトレイ31は、成型の際にトレイポケット32を区切る壁等に歪みが生じ、トレイポケット32に位置ズレや向きズレが発生する場合があり得る。 Further, the taping unit 2 is an example of a housing unit. The accommodation unit is not limited to the taping unit 2 and can achieve the object of the present invention as long as the accommodation unit holds the accommodation body in which a large number of accommodation locations are arranged and sequentially moves the accommodation locations to the accommodation position P1. can do. For example, as shown in FIGS. 27 and 28, in addition to the carrier tape T, the container may be a tray 31 in which tray pockets 32 are arranged in a two-dimensional array. The tray 31 may be distorted in a wall or the like that divides the tray pocket 32 during molding, and the tray pocket 32 may be misaligned or misoriented.
 そのため、図27及び28に示すように、トレイ31を保持するトレイ移動ユニット3であっても、収容ポジションP1への移動前に位置する箇所をズレ確認ポジションP2に設定し、そのズレ確認ポジションP2のトレイポケット32を撮像する第2の撮像部27を設ける。そして、ズレ確認ポジションP2で得られたトレイポケット32のズレを収容ポジションP1で電子部品Dを収容する前に補正する。その他、収容体をウェハリングとするリングホルダも収容ユニットの一例である。 Therefore, as shown in FIGS. 27 and 28, even in the tray moving unit 3 that holds the tray 31, a position that is located before moving to the storage position P1 is set as the displacement confirmation position P2, and the displacement confirmation position P2 A second imaging unit 27 for imaging the tray pocket 32 is provided. Then, the deviation of the tray pocket 32 obtained at the deviation confirmation position P2 is corrected before the electronic component D is accommodated at the accommodation position P1. In addition, a ring holder having a container as a wafer ring is an example of a storage unit.
 このトレイ移動ユニット3とリングホルダのX軸移動駆動部252及びY軸移動駆動部253は、トレイ31やウェハシートを平行面に沿って2次元移動させてトレイポケット32や貼着箇所を順次ズレ確認ポジションP2及び収容ポジションP1へ位置させる機能と、トレイポケット32や貼着箇所のX軸及びY軸方向の位置ズレ量を解消する機能を兼ねる。 The tray moving unit 3 and the X-axis movement driving unit 252 and the Y-axis movement driving unit 253 of the ring holder move the tray 31 and the wafer sheet two-dimensionally along the parallel plane, thereby sequentially shifting the tray pocket 32 and the attachment location. It also functions as a function for positioning to the confirmation position P2 and the storage position P1 and a function for eliminating the positional deviation amount in the X-axis and Y-axis directions of the tray pocket 32 and the pasting location.
2 テーピングユニット
21 スプロケット
22 スプロケット
23 モータ
24 モータ
25 補正部
251 Z軸回転駆動部
251a モータ
251b 回転軸
252 X軸移動駆動部
252a スライダ
252b ネジ軸
252c モータ
253 Y軸移動駆動部
253a スライダ
253b ネジ軸
253c モータ
26 第1の撮像部
27 第2の撮像部
28 ポケットズレ検出部
28a 部品位置検出部
281 原点情報
282 基準方向ベクトル
283 位置ベクトル
284 方向ベクトル
285 位置ベクトル
286 方向ベクトル
29 ユニット本体
41 判定部
42 駆動制御部
T キャリアテープ
T1 ポケット
D 電子部品
P1 収容ポジション
P2 ズレ確認ポジション
P3 収容検査ポジション
10 電子部品搬送装置
11 保持手段
111 スライダ
112 延長ロッド
113 吸着ノズル
12 搬送テーブル
121 通し穴
122 レール
13 ダイレクトドライブモータ
14 進退駆動装置
141 ロッド
15 供給ユニット
16 電気テストユニット
17 外観検査ユニット
18 分類ユニット
19 位置補正ユニット
191 第3の撮像部
192 XYθステージ
3 トレイ移動ユニット
31 トレイ
32 トレイポケット

 
2 Taping unit 21 Sprocket 22 Sprocket 23 Motor 24 Motor 25 Correction unit 251 Z-axis rotation drive unit 251a Motor 251b Rotation shaft 252 X-axis movement drive unit 252a Slider 252b Screw shaft 252c Motor 253 Y-axis movement drive unit 253a Slider 253b Screw shaft 253c Motor 26 First imaging unit 27 Second imaging unit 28 Pocket shift detection unit 28a Component position detection unit 281 Origin information 282 Reference direction vector 283 Position vector 284 Direction vector 285 Position vector 286 Direction vector 29 Unit body 41 Determination unit 42 Drive Control unit T Carrier tape T1 Pocket D Electronic component P1 Storage position P2 Misalignment confirmation position P3 Storage inspection position 10 Electronic component transport device 11 Holding means 111 Slider 112 Extension lock 113 Adsorption nozzle 12 Carriage table 121 Through hole 122 Rail 13 Direct drive motor 14 Advance / retreat drive 141 Rod 15 Supply unit 16 Electrical test unit 17 Visual inspection unit 18 Classification unit 19 Position correction unit 191 Third imaging unit 192 XYθ stage 3 Tray moving unit 31 Tray 32 Tray pocket

Claims (14)

  1.  多数の収容箇所を有する収容体を保持し、搬送経路に沿って運搬された電子部品を収容ポジションで収容する収容ユニットであって、
     前記収容体を平面移動させ、前記各収容箇所を前記収容ポジションに位置させる第1の移動手段と、
     前記収容ポジション又は前記収容ポジションに至る前に前記収容箇所を撮像する収容箇所撮像手段と、
     前記収容箇所撮像手段が撮像した画像を解析して前記収容箇所のズレを検出する収容箇所ズレ検出手段と、
     ズレが検出された前記収容箇所に前記電子部品を収容する前に、当該収容箇所のズレを解消するように前記収容体を平面移動させる第2の移動手段と、
     を備えること、
     を特徴とする収容ユニット。
    A storage unit that holds a storage body having a large number of storage locations and stores electronic components transported along a transport path at a storage position,
    A first moving means for moving the container in a plane and positioning each of the accommodation points at the accommodation position;
    An accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position;
    An accommodation location deviation detection means for analyzing the image captured by the accommodation location imaging means and detecting a deviation of the accommodation location;
    A second moving means for moving the container in a plane so as to eliminate the displacement of the accommodation portion before accommodating the electronic component in the accommodation portion where the displacement is detected;
    Providing
    Containment unit characterized by.
  2.  前記搬送経路上で前記電子部品を撮像する部品撮像手段と、
     前記部品撮像手段が撮像した画像を解析して前記電子部品の基準位置に対するズレを検出する部品位置検出手段と、
     前記電子部品の基準位置に対するズレを解消するように前記電子部品を平面移動させる第3の移動手段と、
     を更に備えること、
     を特徴とする請求項1記載の収容ユニット。
    Component imaging means for imaging the electronic component on the transport path;
    Component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component;
    Third moving means for moving the electronic component in a plane so as to eliminate the deviation of the electronic component from the reference position;
    Further comprising,
    The housing unit according to claim 1.
  3.  前記搬送経路上で前記電子部品を撮像する部品撮像手段と、
     前記部品撮像手段が撮像した画像を解析して前記電子部品の位置を検出する部品位置検出手段と、
     を更に備え、
     前記収容箇所ズレ検出手段は、前記部品位置検出手段が検出した前記電子部品の位置と前記収容箇所撮像手段が撮像した画像に基づき、前記収容箇所の前記電子部品に対するズレを検出し、
     前記第2の移動手段は、前記収容箇所の前記電子部品に対するズレを解消するように前記収容体を平面移動させること、
     を特徴とする請求項1記載の収容ユニット。
    Component imaging means for imaging the electronic component on the transport path;
    Component position detection means for analyzing the image captured by the component imaging means and detecting the position of the electronic component;
    Further comprising
    The accommodation location deviation detection means detects the deviation of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and the image taken by the accommodation location imaging means,
    The second moving means is configured to move the container in a plane so as to eliminate the displacement of the accommodation portion with respect to the electronic component;
    The housing unit according to claim 1.
  4.  前記第2の移動手段は、
     前記収容箇所の内壁と前記電子部品が所定距離以内に近づく場合にのみ、前記収容箇所のズレを解消すること、
     を特徴とする請求項1乃至3の何れかに記載の収容ユニット。
    The second moving means includes
    Only when the inner wall of the housing location and the electronic component come within a predetermined distance, eliminate the displacement of the housing location,
    The accommodation unit according to any one of claims 1 to 3.
  5.  前記第2の移動手段は、
     前記収容箇所ズレ検出手段により検出された前記収容箇所のズレが所定以上の場合にのみ、前記収容箇所のズレを解消すること、
     を特徴とする請求項4記載の収容ユニット。
    The second moving means includes
    Eliminating the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value;
    The storage unit according to claim 4.
  6.  前記収容箇所の内壁と前記電子部品との近さを判定する判定手段と、
     前記判定手段に従って、前記第2の移動手段によるズレ解消の駆動又は非駆動を制御する駆動制御手段と、
     を更に備えること、
     を特徴とする請求項4又は5記載の収容ユニット。
    Determination means for determining the closeness between the inner wall of the housing location and the electronic component;
    Drive control means for controlling the driving or non-driving of deviation elimination by the second moving means according to the determination means;
    Further comprising,
    The housing unit according to claim 4 or 5, characterized by the above-mentioned.
  7.  電子部品を搬送経路に沿って搬送し、多数の収容箇所を有する収容体に電子部品を収容する電子部品搬送装置であって、
     前記電子部品を保持及び離脱させる保持手段と、
     前記保持手段を外周に有し、間欠回転する搬送テーブルと、
     前記保持手段の停止位置の一箇所に設定される収容ポジションと、
     前記収容体を平面移動させ、前記各収容箇所を前記収容ポジションに位置させる第1の移動手段と、
     前記収容ポジション又は前記収容ポジションに至る前に前記収容箇所を撮像する収容箇所撮像手段と、
     前記収容箇所撮像手段が撮像した画像を解析して前記収容箇所のズレを検出する収容箇所ズレ検出手段と、
     ズレが検出された前記収容箇所に前記電子部品を収容する前に、当該収容箇所のズレを解消するように前記収容体を平面移動させる第2の移動手段と、
     を備えること、
     を特徴とする電子部品搬送装置。
    An electronic component transport apparatus that transports electronic components along a transport path and stores electronic components in a container having a large number of storage locations,
    Holding means for holding and releasing the electronic component;
    A conveying table having the holding means on the outer periphery and intermittently rotating;
    An accommodation position set at one stop position of the holding means;
    A first moving means for moving the container in a plane and positioning each of the accommodation points at the accommodation position;
    An accommodation location imaging means for imaging the accommodation location before reaching the accommodation position or the accommodation position;
    An accommodation location deviation detection means for analyzing the image captured by the accommodation location imaging means and detecting a deviation of the accommodation location;
    A second moving means for moving the container in a plane so as to eliminate the displacement of the accommodation portion before accommodating the electronic component in the accommodation portion where the displacement is detected;
    Providing
    An electronic component conveying device characterized by the above.
  8.  前記保持手段は、前記搬送テーブルの半径方向外部に延びて、前記収容体に向けて屈曲し、屈曲先端で電子部品を保持し、
     前記収容ポジションは、前記保持手段の屈曲先に設定され、
     前記ズレ確認ポジションは、前記保持手段の屈曲先端よりも前記搬送テーブルの中心寄りに設定されること、
     を特徴とする請求項7記載の電子部品搬送装置。
    The holding means extends outward in the radial direction of the transfer table, bends toward the container, holds an electronic component at a bent tip,
    The accommodation position is set at a bending destination of the holding means,
    The deviation confirmation position is set closer to the center of the transfer table than the bent tip of the holding means;
    The electronic component conveying apparatus according to claim 7.
  9.  前記搬送テーブルの半径方向と直交する方向に延びるレールを前記搬送テーブルの外周に備え、
     前記保持手段は、前記レールにガイドされて摺動し、前記収容体へ向けて進退すること、
     を特徴とする請求項8記載の電子部品搬送装置。
    A rail extending in a direction orthogonal to the radial direction of the transfer table is provided on the outer periphery of the transfer table,
    The holding means slides while being guided by the rail, and advances and retreats toward the container;
    The electronic component conveying apparatus according to claim 8.
  10.  前記搬送経路上で前記電子部品を撮像する部品撮像手段と、
     前記部品撮像手段が撮像した画像を解析して前記電子部品の基準位置に対するズレを検出する部品位置検出手段と、
     前記電子部品の基準位置に対するズレを解消するように前記電子部品を平面移動させる第3の移動手段と、
     を更に備えること、
     を特徴とする請求項7乃至9の何れかに記載の電子部品搬送装置。
    Component imaging means for imaging the electronic component on the transport path;
    Component position detection means for analyzing an image captured by the component imaging means and detecting a deviation from a reference position of the electronic component;
    Third moving means for moving the electronic component in a plane so as to eliminate the deviation of the electronic component from the reference position;
    Further comprising,
    The electronic component conveying apparatus according to claim 7, wherein the electronic component conveying apparatus is an electronic component conveying apparatus.
  11.  前記搬送経路上で前記電子部品を撮像する部品撮像手段と、
     前記部品撮像手段が撮像した画像を解析して前記電子部品の位置を検出する部品位置検出手段と、
     を更に備え、
     前記収容箇所ズレ検出手段は、前記部品位置検出手段が検出した前記電子部品の位置と前記収容箇所撮像手段が撮像した画像に基づき、前記収容箇所の前記電子部品に対するズレを検出し、
     前記第2の移動手段は、前記収容箇所の前記電子部品に対するズレを解消するように前記収容体を平面移動させること、
     を特徴とする請求項7乃至9の何れかに記載の電子部品搬送装置。
    Component imaging means for imaging the electronic component on the transport path;
    Component position detection means for analyzing the image captured by the component imaging means and detecting the position of the electronic component;
    Further comprising
    The accommodation location deviation detection means detects the deviation of the accommodation location relative to the electronic component based on the position of the electronic component detected by the component position detection means and the image taken by the accommodation location imaging means,
    The second moving means is configured to move the container in a plane so as to eliminate the displacement of the accommodation portion with respect to the electronic component;
    The electronic component conveying apparatus according to claim 7, wherein the electronic component conveying apparatus is an electronic component conveying apparatus.
  12.  前記第2の移動手段は、
     前記収容箇所の内壁と前記電子部品が所定距離以内に近づく場合にのみ、前記収容箇所のズレを解消すること、
     を特徴とする請求項7乃至11の何れかに記載の電子部品搬送装置。
    The second moving means includes
    Only when the inner wall of the housing location and the electronic component come within a predetermined distance, eliminate the displacement of the housing location,
    The electronic component carrying apparatus according to claim 7, wherein
  13.  前記第2の移動手段は、
     前記収容箇所ズレ検出手段により検出された前記収容箇所のズレが所定以上の場合にのみ、前記収容箇所のズレを解消すること、
     を特徴とする請求項12記載の電子部品搬送装置。
    The second moving means includes
    Eliminating the displacement of the accommodation location only when the displacement of the accommodation location detected by the accommodation location deviation detection means is greater than or equal to a predetermined value;
    The electronic component carrying device according to claim 12.
  14.  前記収容箇所の内壁と前記電子部品との近さを判定する判定手段と、
     前記判定手段に従って、前記第2の移動手段によるズレ解消の駆動又は非駆動を制御する駆動制御手段と、
     を更に備えること、
     を特徴とする請求項12又は13記載の電子部品搬送装置。

     
    Determination means for determining the closeness between the inner wall of the housing location and the electronic component;
    Drive control means for controlling the driving or non-driving of deviation elimination by the second moving means according to the determination means;
    Further comprising,
    The electronic component conveying apparatus according to claim 12 or 13.

PCT/JP2015/058716 2014-04-04 2015-03-23 Housing unit and electronic component conveyance device WO2015151896A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015518111A JP5936215B2 (en) 2014-04-04 2015-03-23 Storage unit and electronic component transfer device
TW104110687A TWI579202B (en) 2014-04-04 2015-04-01 Storage unit and electronic parts handling device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPPCT/JP2014/059979 2014-04-04
PCT/JP2014/059979 WO2015151276A1 (en) 2014-04-04 2014-04-04 Housing unit and electronic component conveyance device

Publications (1)

Publication Number Publication Date
WO2015151896A1 true WO2015151896A1 (en) 2015-10-08

Family

ID=54239636

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2014/059979 WO2015151276A1 (en) 2014-04-04 2014-04-04 Housing unit and electronic component conveyance device
PCT/JP2015/058716 WO2015151896A1 (en) 2014-04-04 2015-03-23 Housing unit and electronic component conveyance device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/059979 WO2015151276A1 (en) 2014-04-04 2014-04-04 Housing unit and electronic component conveyance device

Country Status (3)

Country Link
JP (1) JP5936215B2 (en)
TW (1) TWI579202B (en)
WO (2) WO2015151276A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6168715B1 (en) * 2016-12-13 2017-07-26 上野精機株式会社 Carrier tape traveling device and taping device
CN108292615A (en) * 2015-10-16 2018-07-17 米尔鲍尔有限两合公司 Element control system
CN108352346A (en) * 2015-10-16 2018-07-31 米尔鲍尔有限两合公司 The device and method from main modulation of element control device for electronic component
JP2018193129A (en) * 2017-05-16 2018-12-06 太陽誘電株式会社 Electronic parts insertion device, electronic parts storage tape production device, electronic parts insertion method, and electronic parts storage tape production method
JP7089810B1 (en) 2021-08-24 2022-06-23 上野精機株式会社 Electronic component processing equipment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10741434B2 (en) * 2018-09-24 2020-08-11 Asm Technology Singapore Pte Ltd Apparatus for packing ultra-small electronic devices
FR3088630B1 (en) * 2018-11-16 2020-11-13 Commissariat Energie Atomique TRANSPORT DEVICE FOR PLATES INTENDED TO FORM ELECTRONIC COMPONENTS
JP7319774B2 (en) * 2018-12-07 2023-08-02 太陽誘電株式会社 Taping device and taping method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0486701U (en) * 1990-11-30 1992-07-28
JPH0592112U (en) * 1992-04-30 1993-12-14 東洋自動機株式会社 Bag gripping position detection device for automatic packaging machine
JP2004010148A (en) * 2002-06-10 2004-01-15 Hitachi High-Tech Instruments Co Ltd Taping device
JP2005035569A (en) * 2003-07-16 2005-02-10 Ricoh Co Ltd Taping apparatus for small component
JP2009154889A (en) * 2007-12-25 2009-07-16 Canon Machinery Inc Part feeding device and taping apparatus
JP2009286490A (en) * 2008-06-02 2009-12-10 Tesetsuku:Kk Reformation device, conveying unit, and electronic component storage system
WO2012107956A1 (en) * 2011-02-09 2012-08-16 上野精機株式会社 Electronic component transfer apparatus and taping unit

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012490U (en) * 1994-10-27 1995-06-20 浦和ポリマー株式会社 Carrier tape
JPH1013088A (en) * 1996-06-25 1998-01-16 Sony Corp Taping device
JP4202102B2 (en) * 2002-12-03 2008-12-24 上野精機株式会社 Taping device for semiconductor device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0486701U (en) * 1990-11-30 1992-07-28
JPH0592112U (en) * 1992-04-30 1993-12-14 東洋自動機株式会社 Bag gripping position detection device for automatic packaging machine
JP2004010148A (en) * 2002-06-10 2004-01-15 Hitachi High-Tech Instruments Co Ltd Taping device
JP2005035569A (en) * 2003-07-16 2005-02-10 Ricoh Co Ltd Taping apparatus for small component
JP2009154889A (en) * 2007-12-25 2009-07-16 Canon Machinery Inc Part feeding device and taping apparatus
JP2009286490A (en) * 2008-06-02 2009-12-10 Tesetsuku:Kk Reformation device, conveying unit, and electronic component storage system
WO2012107956A1 (en) * 2011-02-09 2012-08-16 上野精機株式会社 Electronic component transfer apparatus and taping unit

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108369917B (en) * 2015-10-16 2022-05-10 米尔鲍尔有限两合公司 Element control device equipped with a receiving device and method thereof
CN108292615B (en) * 2015-10-16 2022-03-11 米尔鲍尔有限两合公司 Component handling system and method
CN108292615A (en) * 2015-10-16 2018-07-17 米尔鲍尔有限两合公司 Element control system
CN108352346A (en) * 2015-10-16 2018-07-31 米尔鲍尔有限两合公司 The device and method from main modulation of element control device for electronic component
CN108369917A (en) * 2015-10-16 2018-08-03 米尔鲍尔有限两合公司 Reception system for element
JP2018533842A (en) * 2015-10-16 2018-11-15 ミュールバウアー ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディトゲゼルシャフト Component receiving device
CN108352346B (en) * 2015-10-16 2022-09-30 米尔鲍尔有限两合公司 Device and method for the autonomous adjustment of a component handling device for electronic components
JP6168715B1 (en) * 2016-12-13 2017-07-26 上野精機株式会社 Carrier tape traveling device and taping device
JP2018095280A (en) * 2016-12-13 2018-06-21 上野精機株式会社 Carrier tape travel device and taping device
JP6990590B2 (en) 2017-05-16 2022-01-12 太陽誘電株式会社 Electronic component insertion device, electronic component storage tape manufacturing device, electronic component insertion method, and electronic component storage tape manufacturing method
JP2018193129A (en) * 2017-05-16 2018-12-06 太陽誘電株式会社 Electronic parts insertion device, electronic parts storage tape production device, electronic parts insertion method, and electronic parts storage tape production method
TWI772377B (en) * 2017-05-16 2022-08-01 日商太陽誘電股份有限公司 Electronic component insertion device, electronic component storage tape manufacturing apparatus, electronic component insertion method, and electronic component storage tape manufacturing method
JP7089810B1 (en) 2021-08-24 2022-06-23 上野精機株式会社 Electronic component processing equipment
WO2023026823A1 (en) * 2021-08-24 2023-03-02 上野精機株式会社 Electronic component processing device
JP2023030917A (en) * 2021-08-24 2023-03-08 上野精機株式会社 Electronic component processing device

Also Published As

Publication number Publication date
JPWO2015151896A1 (en) 2017-04-13
TWI579202B (en) 2017-04-21
JP5936215B2 (en) 2016-06-22
TW201607842A (en) 2016-03-01
WO2015151276A1 (en) 2015-10-08

Similar Documents

Publication Publication Date Title
JP5936215B2 (en) Storage unit and electronic component transfer device
WO2014087682A1 (en) Transfer device
JP5544461B1 (en) Attitude correction device, electronic component transfer device, and electronic component transfer device
JP5674060B2 (en) Electronic component transfer device and taping unit
JP2016100394A (en) Carrier tape travel device and electronic component transfer device
JP2008530804A (en) Method for positioning a wafer
KR20140032323A (en) Taping unit and electronic part inspection apparatus
WO2015083414A1 (en) Electronic component transport apparatus
KR102633607B1 (en) Processing apparatus
KR102419700B1 (en) Aligning apparatus and aligning method
JP2011114070A (en) Processing device
JP2018098333A (en) Electronic component transfer device
KR101831256B1 (en) Semiconductor Strip Align Apparatus And Semiconductor Strip Align Method Using The Same
TW201623127A (en) Electronic component transporting device
JP2012116528A (en) Taping unit and electronic component inspection device
CN107230656B (en) Substrate transfer apparatus and substrate transfer method
JP5783652B2 (en) Attitude correction device and electrical component inspection device
CN110223946B (en) Wafer taking and placing device and wafer taking and placing and detecting system
JP5800376B1 (en) Electronic component conveyor
JPWO2014087682A1 (en) Transfer equipment
US20070262276A1 (en) Cassette conveyance method and cassette conveyance apparatus
JP6422338B2 (en) Processing equipment
JP7362308B2 (en) processing equipment
JP5645291B1 (en) Electronic component conveyor
JP2009044062A (en) Workpiece supply method

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2015518111

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15774090

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15774090

Country of ref document: EP

Kind code of ref document: A1