JP5800376B1 - Electronic component conveyor - Google Patents

Abstract

An electronic device that suppresses an electronic component pickup error caused by a shift of the electronic component to a planned pickup position when the electronic component is picked up from a supply board in order to relay the electronic component to a transport path to a target device. A component conveying device is provided. An electronic component transport apparatus moves a supply board parallel to a board surface by a slider of a holder that holds the supply board, and moves each electronic component toward a predetermined position. The actual position of the electronic component due to the displacement of the supply board is detected by a camera, and the position of the arm of the pickup device that picks up the electronic component from the supply board is adjusted to the electronic component at the actual position. [Selection] Figure 1

Description

  The present invention relates to an electronic component conveying apparatus that supplies an electronic component from a supply board to a conveying path and conveys the electronic component to a target device.

  Electronic parts undergo processes such as observation of electrical characteristics, processing of bending of leads, classification by rank, transfer of storage containers, and the like in the manufacturing and shipping process. The electronic component transport device supplies the electronic component from the supply board to the transport path, and transports the electronic component to a target device that performs these processes. The supply board is, for example, a tray provided with a partition in the form of a wafer ring or a lattice, and holds electronic components arranged in an array. Generally, one route to be loaded from the supply board to the conveyance path is formed in the electronic component conveyance device, and each electronic component of the supply board is sequentially moved to the entrance of the route, and then moved to the conveyance path through the route. It is.

  The route is formed by a rotary rotary pickup with an arm with a suction nozzle attached to the tip and a manipulator with a multi-axis arm. These devices serve as relay devices to pick up electronic components from the supply panel. And transfer to the transport path. The suction nozzle attached to the tip of the arm is moved to a position where the relay device picks up the electronic component, and the electronic component is picked up.

  At the planned position for picking up the electronic component, a holder for holding the supply board moves the supply board in a plane and positions the electronic component to be picked up. There are various plane movement mechanisms, but an example is an XY stage, in which a rail and a lead screw are arranged in the direction of one axis along the arrangement of electronic components and the other axis perpendicular to the one axis. The holder holding the supply board is slid along the rail with propulsive force.

  The displacement of the electronic component to the planned position induces an electronic component pick-up error, and in the worst case, the electronic component transport apparatus may malfunction due to the dropout of the electronic component during the relay. For this reason, when the electronic component is dropped off in the middle of the relay, all the conveyance paths for sequentially arranging and conveying the electronic components must be stopped, and the dropped electronic components must be removed. Therefore, a monitoring staff must be arranged in the electronic component transport apparatus, and labor costs are also incurred. As described above, the displacement of the electronic component to the planned position causes a failure of the apparatus in the worst case, and it has been necessary to allow a decrease in production efficiency and an increase in labor in order to avoid this worst situation.

  Therefore, in recent years, a technique has also been proposed in which a movement shift from a supply board to a planned position for picking up an electronic component is detected in advance, and the holder is moved again so as to eliminate the movement shift (see, for example, Patent Document 1). .

JP 2012-119494 A

  It is well known that the greater the number of electronic components that can be held by the supply panel, the lower the production cost of the electronic components. In recent years, the size of the supply panel has been increasing. For example, when the supply board is a wafer ring, the wafer attached to the wafer ring has a practical diameter of 300 mm, and the development of 400 mm and 450 mm apertures is also progressing.

  That is, the holder needs to move on a 300 to 450 mm wafer at a high speed, and the minimum moving unit is set large for the slider for that purpose. The minimum moving unit is the value obtained by multiplying this lead length by the minimum rotation angle of the motor that can be detected by the encoder. The smallest unit distance that can be moved. It is effective for high-speed movement to increase the lead length by roughening the winding method of the screw, and it is often used for the slider provided in the holder.

  However, if the minimum movement unit of the slider is set to be large, high-speed movement is possible, but minute movement of the slider becomes theoretically difficult. If it does so, even if it tries to eliminate the movement shift to the pickup planned position by re-moving the holder as in the conventional case, it becomes difficult to eliminate the movement shift with high accuracy.

  That is, if the size of the supply panel is increased as it is, it may be difficult to accurately perform position correction for accurately positioning the electronic component at the planned pickup position with the conventional technology. If it does so, it will become difficult to correctly face an arm and an electronic component, and each problem resulting from omission of the electronic component at the time of pick-up may reignite.

  The present invention has been proposed in order to solve the above-described problems. When an electronic component is picked up from a supply board in order to relay the electronic component to a transport path to a target device, the electronic component It is an object of the present invention to provide an electronic component transport apparatus that suppresses an electronic component pickup error caused by a shift to a pickup scheduled position.

An electronic component conveying apparatus according to the present invention is an electronic component conveying apparatus that conveys electronic components arranged in an array on a supply board to a target device, and includes a holder that holds the supply plate and a conveyance path to the target device. A pickup table that is disposed between the holder and the transfer table and relays electronic components from the supply board to the transfer table, and the holder has the supply board parallel to the board surface. A supply board slider for moving each electronic component toward a predetermined position, and the pickup device includes an arm for picking up the electronic parts of the supply board, and the arm between the holder and the transfer table. Reciprocating means for reciprocating between, a detecting means for detecting an actual position due to a displacement of an electronic component moving toward the predetermined position, and detection by the detecting means Based the position of the arm to pick up the electronic component, and a correcting means for correcting in accordance with the actual position of the electronic component viewed in plan moved, the correcting means moves said arm in a direction transverse to said feed plate A first moving means; and a second moving means for moving the arm in a direction orthogonal to a direction in which the first moving means moves, the first moving means and the second moving means. At least one of these is a turning means for turning the arm around its base end as a center point .

  At least one of the first moving unit and the second moving unit may be an arm slider that slides the arm in parallel along the plane of the supply board.

  The first moving means is an arm slider that slides the arm in parallel along the plane of the wafer, and the second moving means is a turning means that turns the arm around its base end center point. There may be.

  The holder holds the supply board vertically, the transport table is disposed above the pickup device with the transport path horizontal, and the first moving means of the pickup device raises the arm. The arm slider is moved at a constant height, the reciprocating means and the second moving means of the pickup device are the common turning means, and the turning means is a turning that displaces the angle of attack of the arm. As the second moving means, the angle of attack of the arm is displaced toward the electronic component to be picked up, and as the reciprocating means, the position from the position where the angle of attack is displaced is directed upward toward the transport table. The arm may be swung.

  The detection means includes a camera that captures the scheduled position and its surroundings in a field of view, and an analysis unit that analyzes imaging data of the camera and detects an actual position. You may make it analyze the imaging data at the time of turning and moving right above facing a conveyance table.

  The arm has a holding means for holding an electronic component at a tip, the holding means is arranged off the axis of the arm, and the camera is held by the reciprocating means from the rear end of the holding means. You may make it catch the said scheduled position and its circumference in a visual field through the movement locus | trajectory of a means.

  The correction means controls the first moving means, the second moving means, and the supply board slider, and moves both the arm and the supply board to move the arm to the actual position. You may do it.

  The arm has a holding means for holding an electronic component at a tip, and the pickup device has an advance / retreat driving means for moving the holding means in the axial direction, and the advance / retreat driving means is connected to the holding means. A first rod and a second rod that advances toward the first rod and pushes the first rod in an axial direction, and is in contact with the first rod and the second rod. Each surface may have a curved portion.

  The arm has a holding means for holding an electronic component at a tip thereof, the pickup apparatus has an advancing / retreating drive means for moving the holding means back and forth in the axial direction, and the holder protrudes the electronic component to the pickup apparatus side. The advancing / retreating drive means has a projecting pin, the advance / retreat drive means advances toward the first rod, the first rod connected via the voice coil motor, the holding means and the voice coil motor, A second rod that extrudes one rod in the axial direction, and the second rod is equal to or greater than a distance between the electronic component at the predetermined position and the holding means when the arm moves sideways. When the voice coil motor receives a vertical drag from the electronic component, the holding means may be moved backward relative to the voice coil motor.

  The arm includes a holding unit that holds an electronic component at a tip, and the pickup device includes an advancing / retreating driving unit that advances and retracts the holding unit in the axial direction, and the advancing / retreating driving unit is connected to the holding unit. A first rod, and a second rod that advances toward the first rod and pushes the first rod in an axial direction, and the second moving means swivels the arm. Further, distance calculating means for calculating the distance between the holding means and the electronic component after the above may be further provided, and the second rod may advance by the distance calculated by the distance calculating means.

  The holder further includes a projecting pin that projects the electronic component toward the pickup device, and further includes a distance calculating unit that calculates a distance between the holding unit and the electronic component after the second moving unit swivels the arm. The holder may advance the protrusion pin based on the distance calculated by the distance calculation means.

The correction means moves the supply board by a multiple of the minimum movement unit of the supply board slider,
The arm may be moved by a distance less than the minimum movement unit of the supply board slider.

  According to the present invention, when an electronic component is picked up from the supply board, it is possible to accurately suppress a pickup mistake of the electronic component even if the electronic component is moved to a planned pickup position.

It is a top view which shows the whole structure of the electronic component conveying apparatus which concerns on 1st Embodiment. It is a front view which shows the whole structure of the electronic component conveying apparatus which concerns on 1st Embodiment. It is a side view which shows the whole structure of the electronic component conveying apparatus which concerns on 1st Embodiment. It is a front view which shows the detailed structure of the pick-up apparatus which concerns on 1st Embodiment. It is a top view which shows the detailed structure of the pick-up apparatus which concerns on 1st Embodiment. It is a side view which shows the detailed structure of the pick-up apparatus which concerns on 1st Embodiment. It is an enlarged view which shows the contact surface of the driven rod of a pick-up apparatus, and the rod of an arm. It is a block diagram which shows the control apparatus of the pick-up apparatus which concerns on 1st Embodiment. It is a schematic diagram which shows the slide of the supply board by a holder. It is a side view which shows the pick-up apparatus in the state which the arm stopped just above. It is a schematic diagram which shows the analysis of an actual position. It is a transition diagram which shows the slide to the horizontal direction of an arm. It is a transition diagram which shows the angle of attack displacement of an arm. It is a schematic diagram which shows advance to the electronic component of the arm which concerns on 1st Embodiment. It is a block diagram which shows the control apparatus of the pick-up apparatus which concerns on 2nd Embodiment. It is a schematic diagram which shows advance to the electronic component of the arm which concerns on 2nd Embodiment. It is a block diagram which shows the control apparatus of the pick-up apparatus which concerns on 3rd Embodiment. It is a schematic diagram which shows advance to the electronic component of the arm which concerns on 3rd Embodiment, and push-up of a push-up pin. It is a perspective view which shows the detailed structure of the holder which concerns on 4th Embodiment. It is a schematic diagram which shows distribution of position shift correction which concerns on 4th Embodiment.

(First embodiment)
The electronic component conveying apparatus according to the first embodiment will be described in detail with reference to the drawings. 1 to 3 supplies the electronic component 11 of the supply board 10 to the conveyance path 31 and conveys it to the target device 2 on the conveyance path 31. The supply board 10 is a board surface in which electronic components 11 to be supplied are arranged in an array, for example, a wafer ring in which chips that have been diced are arranged, or a tray in which the electronic components 11 are placed in various places partitioned in a grid. . The electronic component 11 is a component used for an electrical product, and includes a semiconductor element. The semiconductor element is a transistor, an LED, an integrated circuit, or a resistor, a capacitor, or the like.

  The target device 2 is a device that achieves the purpose of transporting the electronic component 11 and is a device that observes, processes, classifies, or transfers the electronic component 11. Examples of observation devices include appearance inspection devices and electrical property inspection devices, and processing devices include posture correction devices and laser marking devices. Classification and transfer devices include chip reattachment targets. Examples include a ring holder that translates a wafer ring, an XY stage that translates a tray that re-accommodates the electronic component 11, and a taping unit that travels a tape on which a pocket that re-accommodates the electronic component 11 is formed.

  One or a plurality of target devices 2 are arranged on the conveyance path 31. For example, when the electronic component 11 is inspected before shipping, a posture correction device, an appearance inspection device, an electrical property inspection device, and a plurality of classification devices prepared according to ranks are arranged along the transport path 31. The

  The electronic component transport apparatus 1 rotates and supplies a holder 4 that holds a supply board 10, a transport table 3 that transports the electronic parts 11 of the supply board 10 to a target device 2, and an arm 51 that holds the electronic parts 11. A pick-up device 5 that relays the electronic component 11 from the board 10 to the transfer table 3 is connected and provided. The pickup device 5 is disposed between the holder 4 and the transport table 3. In particular, as shown in FIG. 2, the transport table 3, the pickup device 5, and the holder 4 are arranged such that the plane 3 a of the transport table 3, the panel surface 4 a of the supply panel 10 of the holder 4, and the rotation surface 5 a of the arm 51 are orthogonal to each other. The

  The holder 4 holds the supply board 10 vertically. The holder 4 includes a slider 41 that moves the supply board 10 in parallel with the board surface, and sequentially positions the electronic components 11 of the supply board 10 toward the planned position 12. The slider 41 is a lead screw, for example. Further, when the supply board 10 is a wafer ring, the holder 4 has a push-up pin 42 at the center of the movable range of the supply board 10 as shown in FIG. The push-up pin 42 extends toward the supply board 10 from the side opposite to the side where the electronic components 11 are arranged. The push-up pin 42 can advance in the axial direction. The slider 41 causes each electronic component 11 to sequentially face the push-up pin 42, and the push-up pin 42 pushes the facing electronic component 11 from the back side of the supply panel 10. The planned position 12 is a position where the electronic component 11 to be picked up is to be moved, and is a directly facing position with the push-up pin 42 when the supply board 10 is a wafer.

  The pickup device 5 directs the arm 51 toward the electronic component 11 at the actual position 13, picks up the arm 51, and passes it to the transfer table 3. The actual position 13 is a position where the electronic component 11 to be picked up currently exists, and deviates from the planned position 12. The actual position 13 is caused by the movement accuracy of the slider 41 of the holder 4. A suction nozzle 52 is attached to the tip of the arm 51. The suction nozzle 52 is a holding unit that picks up the electronic component 11 by suction.

  The suction nozzle 52 is hollow inside and has one end opened, and the open end projects from the tip of the arm 51. The inside of the suction nozzle 52 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. The electronic component 11 is attracted to the opening end by the generation of the negative pressure of the pneumatic circuit, and the electronic component 11 is detached by the vacuum break or the air release.

  The pickup device 5 turns the arm 51 around the base end of the arm 51 to displace the angle of attack of the arm 51. The arm 51 faces the supply board 10 of the holder 4 when facing sideways, and can pick up the electronic component 11. When the arm 51 faces straight upward, it faces the transport table 3 directly above, and the electronic component 11 can be delivered. In addition to the turning of the arm 51, the pickup device 5 translates the arm 51 in a direction perpendicular to the turning surface at a constant height.

  In this pickup device 5, the turning of the arm 51 is involved in preparation for pickup in the vertical direction toward the actual position 13 in addition to the relay of the electronic component 11. Further, the parallel movement of the arm 51 is involved in preparation for the lateral pickup toward the actual position 13. The pickup preparation is a process of aligning the arm 51 with the actual position 13 and is a step of compensating the displacement of the supply board 10 on the pickup device 5 side and correcting the position of the arm 51. The pickup device 5 turns the arm 51 in a straight line with the actual position 13 by turning and parallelly moving the arm 51, picks up the electronic component 11, turns the arm 51 straight up, and puts the electronic component 11 on the transfer table 3. hand over.

  The conveyance table 3 has a conveyance path 31 that extends horizontally, and sequentially conveys the electronic components 11 to one or a plurality of target devices 2 on the conveyance path 31. The transfer table 3 is a horizontal plate that extends horizontally at a position higher than the tip of the arm 51 facing upward. The transfer table 3 has a shape such as a disk or a star that expands radially around one point. The transport table 3 rotates intermittently by a predetermined angle in the circumferential direction. The power source of the transfer table 3 is a direct drive motor 33.

  On the outer periphery of the transfer table 3, suction nozzles 32 are attached at equal circumferential positions and at the same distance from the center of the transfer table 3. The suction nozzle 32 is hollow inside and has one open end, and the open end is installed downward. The suction nozzle 32 is arranged so as to be in a straight line with the arm 51 directed upward, and pulls the electronic component 11 from the pickup device 5 by lowering and suction.

  Further detailed configuration of the pickup device 5 is as follows. FIG. 4 is a front view showing the detailed configuration of the pickup device 5, and FIG. 5 is a top view showing the detailed configuration of the pickup device 5. FIG. 6 is a side view showing a detailed configuration of the pickup device 5. The arm 51 moves in three directions. The first direction is the angle-of-attack displacement of the arm 51 for preparation of pickup in the vertical direction and delivery to the transfer table 3. The second direction is a parallel movement in preparation for the horizontal pickup. The third direction is the forward / backward movement of the arm 51 in the axial direction. That is, the pickup device 5 has a turning device 53 and displaces the arm 51 at an angle of attack around its base end. The pickup device 5 has a slider 54, and slides the arm 51 in a direction perpendicular to its axis and parallel to a constant height. Further, the pickup device 5 has an advance / retreat drive device 55, and moves the arm 51 forward and backward in its axial direction.

  The turning device 53 displaces the angle of attack of the arm 51 so that the tip of the arm 51 is lifted and the tip of the arm 51 is suspended. The turning device 53 is an actuator that rotatably supports the base end of the arm 51. When the turning device 53 is a rotary motor, the base end of the arm is fixed to the motor shaft. The axis of the turning device 53 is orthogonal to the axis of the arm 51 and extends at a constant height (see FIG. 5). The movable range of the arm 51 is taken into consideration that at least the electronic component 11 is deviated downward from the planned position 12 in addition to the 90-degree range directly above the transport table 3 and directly opposite the supply board 10. A range in which the suction nozzle 52 is lowered by, for example, about several tens of μm from the side. The several tens of μm is the maximum length that the electronic component 11 can deviate from the planned position 12 in the vertical direction.

  The advance / retreat drive 55 is roughly divided into an advance mechanism and a retract mechanism. The retraction mechanism is, for example, a compression spring 551. The compression spring 551 biases the arm 51 in the contracting direction. Here, the arm 51 includes a base end plate 511 and a frame 512 engaged with the base end plate 511. The suction nozzle 52 is attached to the frame 512 via a voice coil motor 515. The swivel device 53 pivotally supports the base end plate 511 of the arm 51. The frame 512 has one rod 513, and the rod 513 is inserted into the bearing of the proximal end plate 511 so as to be integrated with the proximal end plate 511. The compression spring 551 fixes the end to the rod 513 and pushes the frame 512 back toward the proximal end plate 511.

  The advance mechanism of the advance / retreat drive device 55 includes a driven rod 552, a cylindrical cam 554, and a rotation motor 555. The driven rod 552 extends from the back of the arm 51 toward the supply board 10 of the holder 4 and contacts the rod 513 of the arm 51 at its ends. The cylindrical cam 554 is connected to the rotation motor 555 and rotates in the circumferential direction. The cylindrical cam 554 moves the driven rod 552 in the axial direction. The circumferential surface of the cylindrical cam 554 is continuously separated from the center. The driven rod 552 follows the circumferential surface of the cylindrical cam 554. The advance mechanism of the advance / retreat drive device 55 drives the rotary motor 555, converts the rotational motion into a linear motion with the cylindrical cam 554 and the driven rod 552, and pushes out the rod 513 of the arm 51 with the driven rod 552, thereby compressing the compression spring 551. The arm 51 is advanced in the axial direction against the urging force.

  As shown in FIG. 7, the contact surfaces of the driven rod 552 and the rod 513 of the arm 51 are both curved portions 553. Even if the driven rod 552 and the arm 51 are not in a straight line, the driven rod 552 applies a propulsive force in the axial direction of the arm 51 by the bending portion 553. That is, even if the angle of attack of the arm 51 is other than right side, the advance / retreat drive device 55 can advance the arm 51.

  Returning to FIG. 6, the slider 54 translates the arm 51 in a direction perpendicular to the axis of the arm 51 and at a constant height. The slider 54 includes a common bracket 541 that supports the arm 51, the turning device 53, and the advance / retreat drive device 55, a rail 542 that slides the bracket 541, and a lead screw 543 that applies a sliding driving force of the bracket 541. . The rail 542 and the lead screw 543 are arranged in a direction orthogonal to the axis of the arm 51 and at a constant height.

  Further, the pickup device 5 captures an image of the planned position 12 of the supply board 10 and its surroundings, and detects the actual position 13 of the electronic component 11. The arm 51 is directed to the actual position 13 in accordance with the detection result, and the electronic component 11 at the actual position 13 is picked up and transferred to the transport table 3. As shown in FIG. 5, the pickup device 5 further includes a camera 56 that houses the planned position 12 at the center of the visual field. The angle of view of the camera 56 is preferably in a range at least several tens of μm away from the planned position 12 with the planned position 12 as the center of the visual field. Several tens of μm is a range in which the actual position 13 is accommodated.

  The field of view of the camera 56 is directed to the supply board 10 via the prism 57. The prism 57 does not become behind the base end of the arm, and guides the field of view of the camera 56 through the movement locus of the suction nozzle 52 to the predetermined position 12 of the supply board 10 existing further on the movement locus. Be placed. Therefore, the prism 57 is arranged beside the base end plate 511. Further, the frame 512 of the arm 51 has a letter “b” shape in which a ring 514 is integrated with one end of a rod 513, and the ring 514 bulges on the opposite side to the turning device 53. The prism 57 is disposed beside the base end plate 511 and inside the movement locus of the suction nozzle 52.

  As shown in FIG. 8, the pickup device 5 includes a control device 58 that receives image data of the camera 56 and controls the turning device 53, the advance / retreat drive device 55, and the slider 54. The control device 58 is a so-called computer, and includes an analysis unit 581, a correction control unit 582, and a relay control unit 583 by program processing. The control device 58 may be an independent computer that exclusively controls the pickup device 5, or may be a computer that integrally controls the electronic component transport device 1.

  The analysis unit 581 detects the actual position 13 of the electronic component 11 by analyzing the imaging data. The correction control unit 582 performs pickup preparation for directing the arm 51 to the actual position 13 under the control of the turning device 53 and the slider 54. That is, the arm 51 is translated in the horizontal direction by the slider 54 and moved toward the actual position 13, and the angle of attack is displaced in the vertical direction by the turning device 53 and is moved toward the actual position 13. The relay control unit 583 extends the arm 51 toward the electronic component 11 at the actual position 13 by picking up the electronic component 11 by controlling the advance / retreat drive device 55 and the suction nozzle 52 of the arm 51, and moves the arm 51 from the actual position 13. The angle of attack is displaced directly above, and the electronic component 11 is delivered to the suction nozzle 32 on the transport table 3 side. Further, the relay control unit 583 controls the advancement of the suction nozzle 52 by operating the voice coil motor 515 during pickup.

  The control operation of the pickup device 5 is as follows. First, as shown in FIG. 9, the slider 41 of the holder 4 moves the supply board 10 in parallel and directs the electronic component 11 to be picked up toward the planned position 12. Depending on the movement accuracy of the slider 41, the electronic component 11 to be picked up cannot move to the planned position 12, but stops at the actual position 13 that deviates from the planned position 12.

  The analysis unit 581 detects the actual position 13 by analyzing the imaging data output by the camera 56 while supplying the preceding electronic component 11 to the transport table 3. As shown in FIG. 10, the arm 51 stops right above while the preceding electronic component 11 is supplied to the transfer table 3. The suction nozzle 52 is installed so as to be shifted parallel to the rotation surface of the arm 51, and the rear end 52a of the suction nozzle 52 is located outward from the turning center 51a. The nozzle 52 is separated to a position higher than the turning center 51a of the arm 51, and the straight line from the prism 57 to the planned position 12 of the electronic component 11 is opened.

  Therefore, when the arm 51 faces directly upward, the camera 56 can capture the planned position 12 of the supply board 10 in the field of view 56 a through the movement locus of the suction nozzle 52. The analysis unit 581 can detect the deviation between the planned position 12 and the actual position 13 without being disturbed by the arm 51 or the suction nozzle 52 by using the imaging data obtained by the imaging processing at this timing as an analysis target. It becomes.

  As illustrated in FIG. 11, the analysis unit 581 binarizes the imaging data and emphasizes the edge 111 of the electronic component 11. The holder 4 illuminates around or behind the push-up pin 42 to illuminate the planned position 12 and its periphery, and the edge 111 of the electronic component 11 is easily distinguished. When the edge 111 of the electronic component 11 is emphasized, the analysis unit 581 calculates the center of gravity 112 of the electronic component 11 from the raised edge. Then, the analysis unit 581 subtracts the coordinates of the center of gravity 112 of the electronic component 11 from the coordinates of the visual field center 561 that is the planned position 12, and calculates the vertical component movement shift Y and the horizontal component shift X, respectively.

  When the lateral component movement deviation X is calculated, the correction control unit 582 controls the slider 54 to eliminate the movement deviation X. As shown in FIG. 12, the slider 54 slides the arm 51 in the lateral direction by a distance corresponding to the displacement X under the control of the correction control unit 582, so Align the direction.

  As shown in FIG. 13, when the movement shift Y of the vertical component is calculated, the correction control unit 582 calculates the angle of attack θ for preparation for setup. First, the position coordinate of the suction nozzle 52 is set to N1 (X, Y, Z1) in a state where the arm 51 is directed sideways and the retracting mechanism of the advance / retreat drive device 55 contracts the arm 51. Further, the position coordinates after the electronic component 11 at the planned position 12 is pushed up are N2 (X, Y, Z2). The separation distance L1 between the suction nozzle 52 and the electronic component 11 is a difference between the position coordinate N1 and the position coordinate N2, and this separation distance L1 is known from the arrangement relationship between the pickup device 5 and the holder 4. The correction control unit 582 stores the separation distance L1 in advance.

  The correction control unit 582 calculates the angle of attack θ using an inverse trigonometric function from the separation distance L1, the length of the arm 51, and the positional deviation Y of the vertical component. Then, as shown in FIG. 13, the correction control unit 582 controls the turning device 53 in response to the calculation result of the angle of attack θ. Under the control of the correction control unit 582, the swivel device 53 displaces the arm 51, which faces upward, to the position advanced by the angle of attack θ from the side to the vertical direction of the electronic component 11 existing at the arm 51 and the actual position 13. Align the direction.

  As shown in FIG. 14A, when the arm 51 faces the electronic component 11 at the actual position 13, the relay control unit 583 controls the advance / retreat driving device 55 to bring the suction nozzle 52 closer to the electronic component 11. The advance / retreat drive device 55 advances the arm 51 by a certain distance L2 regardless of the angle of attack of the arm 51. The constant distance L2 is the maximum distance that can occur between the electronic component 11 after being pushed up and the suction nozzle 52. In terms of geometry, the greater the angle of attack, the longer the distance between the electronic component 11 and the suction nozzle 52, and the shorter the distance between the electronic component 11 and the suction nozzle 52 at the planned position 12. In other words, the greater the displacement of the electronic component 11, the longer the distance between the electronic component 11 and the suction nozzle 52.

  If the difference between the advancing distance L3 and the fixed distance L2 between the electronic component 11 and the suction nozzle 52 is large, the advancing suction nozzle 52 may apply an excessive load to the electronic component 11. Therefore, the relay control unit 583 operates the voice coil motor 515 while the arm 51 is advanced. The voice coil motor 515 generates a thrust that is slightly weaker than the vertical drag that the electronic component 11 applies to the suction nozzle 52. Therefore, as shown in FIG. 14B, the voice coil motor 515 receives the vertical drag and moves the suction nozzle 52 backward by a distance L4 obtained by subtracting the advance distance L3 from the constant distance L2. By this retreat, the suction nozzle 52 advances the advance distance L3, and an overload to the electronic component 11 is avoided.

  When the electronic component 11 and the suction nozzle 52 come into contact with each other, the relay control unit 583 controls the suction nozzle 52 to generate a negative pressure inside the suction nozzle 52. The suction nozzle 52 in contact with the electronic component 11 holds the electronic component 11. The relay control unit 583 turns the arm 51 right above and releases the holding of the electronic component 11 by atmospheric breakdown or vacuum breakdown. In accordance with the turning timing of the transfer table 3 just above the arm 51, the suction nozzle 52 attached to the outer periphery is directly opposed to the arm 51 and lowered, and the electronic component 11 is held by the generation of the negative pressure. Rotate in the circumferential direction.

  As described above, as a result of detecting the actual position 13 of the electronic component 11 accompanying the displacement of the supply board 10, the electronic component transport apparatus 1 corrects the position of the arm 51 of the pickup device 5 and the electronic component at the actual position 13. 11 and the arm 51 are aligned. According to the electronic component conveying apparatus 1, the displacement can be compensated more finely than the minimum movement unit of the supply board 10, and the arm 51 and the electronic component 11 can be accurately aligned. For this reason, it is possible to prevent the electronic component 11 from dropping off at the time of pick-up, and to prevent the electronic component transport apparatus 1 from malfunctioning.

  The position of the arm 51 is corrected by a first moving means for moving the arm 51 in a direction crossing the supply board 10 and a second moving means for moving the arm 51 in a direction orthogonal to the moving direction by the first moving means. You just have to prepare. That is, for example, the arm 51 may be moved in a plane with respect to the board surface of the supply board 10. The first moving means and the second moving means may be either a slide system using a lead screw or a slide system using a rack and pinion.

  In the present embodiment, the first moving means is a slider 54 that slides the arm 51 in parallel along the plane of the supply board 10, while the second moving means uses the arm 51 as its base end center point. Although the turning device 53 for turning is used, both moving means may be the slider 54 or the turning device 53.

  However, the electronic component conveying apparatus 1 of the present embodiment holds the supply board 10 vertically and horizontally arranges the conveying table 3. The pickup device 5 turns so that the arm 51 faces the supply board 10, picks up the electronic component 11, turns so that the arm 51 faces directly above, and delivers the electronic component 11 to the transport table 3. If the angle of attack is displaced in order to direct the arm 51 to the actual position 13, the reciprocating means for relaying the electronic component 11 and the means for directing the arm 51 to the actual position 13 can be used by the turning device 53. According to the electronic component conveying apparatus 1, it is possible to reduce the production cost of the electronic component conveying apparatus 1 even if the displacement is corrected on the pickup device 5 side.

  In addition, when the slider 54 of the pickup device 5 and the slider 41 of the holder 4 are employed as means for correcting the displacement in the vertical direction, there is no play between the tooth surfaces of the lead screw and the rack and pinion due to the influence of gravity, wear and the like. It is considered that the accuracy of correcting the displacement in the vertical direction is gradually lowered because the deterioration over time is increased. However, as in the present embodiment, the vertical direction is corrected by the turning device 53, so that the propulsion direction and the gravity direction do not coincide with each other, so there is little occurrence of wear or the like due to the weight of the turning device 53, and correction of the movement displacement in the vertical direction. Accuracy can be maintained.

  In addition, the electronic component transport apparatus 1 is provided with a camera 56 that captures the planned position 12 and its surroundings in the field of view 56a, and the actual position from the imaging data when the arm 51 pivots upward toward the transport table 3. 13 was analyzed. In particular, the arm 51 and the suction nozzle 52 at the tip thereof are arranged off the axis. Therefore, the camera 56 can capture the planned position 12 and its surroundings in the field of view 56 a through the movement locus of the suction nozzle 52 by turning the arm 51 from the rear end of the suction nozzle 52. As a result, the camera 56 can accurately capture the actual position 13, and the correction accuracy of the displacement is improved. In the present embodiment, when the camera 56 is small, the prism 57 may be eliminated and the camera 56 may be disposed directly on the rear end side of the suction nozzle 57.

  Further, in the electronic component conveying apparatus 1, the contact surfaces of the driven rod 552 of the advance / retreat driving apparatus 55 and the rod 513 of the arm 51 each have a curved portion 553. As a result, even if the arm 51 has an angle of attack other than right side, an axial thrust can be applied to the rod 513 of the arm 51, and the arm 51 having an angle of attack other than right side is advanced toward the electronic component 11 in the axial direction. Can be made. Therefore, even with a system that eliminates vertical displacement by angle-of-attack displacement, high-precision pickup is possible.

  Here, when the arm 51 is directed to the electronic component 11 by the angle-of-attack displacement, the distance between the base end of the arm 51 and the supply board 10 is constant, so the distance between the suction nozzle 52 and the electronic component 11 depends on the angle of attack. Will change. On the other hand, if the advancement distance of the suction nozzle 52 is not accurate, an excessive load may be applied to the electronic component 11 or the pickup nozzle 52 may not reach the electronic component 11 and a pickup error may occur. is there.

  Therefore, in the electronic component transport apparatus 1, the maximum distance that can occur between the suction nozzle 52 and the electronic component 11 after the arm 51 is displaced in the angle of attack is advanced. Further, the suction nozzle 52 is attached to the arm 51 via a voice coil motor 515. Thereby, an excessive advance is absorbed by the voice coil motor 515 moving the suction nozzle 52 backward. Therefore, by causing the arm 51 to advance a certain distance L2 regardless of the angle of attack, it is possible to prevent the suction nozzle 52 from reaching the electronic component 11 and to suppress overloading the electronic component 11 by the voice coil motor 515.

(Second Embodiment)
The electronic component transport apparatus 1 according to the second embodiment will be described in detail with reference to the drawings. The same configurations and functions as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. As illustrated in FIG. 15, the electronic component transport device 1 according to the second embodiment includes an advance distance calculation unit 584 in the control device 58 of the pickup device 5.

  The advance distance calculation unit 584 calculates the advance distance between the suction nozzle 52 whose angle of attack is changed toward the actual position 13 and the pushed-up electronic component 11. The separation distance L1 between the arm 51 contracting toward the side and the electronic component 11 pushed up is known depending on the arrangement relationship between the holder 4 and the pickup device 5. The advancing distance calculation unit 584 calculates the advancing distance L3 by the Pythagorean theorem using the separation distance L1 and the vertical component movement shift Y.

  As shown in FIG. 16, the relay control unit 583 controls the advance / retreat drive device 55 to advance the arm 51 by the advance distance L3 calculated by the advance distance calculation unit 584 according to the angle of attack. As a result, the tip of the suction nozzle 51 is accurately positioned on the surface of the electronic component 11 regardless of the degree of displacement of the electronic component 11. Therefore, it is possible to suppress the overloading of the electronic component 11 and the occurrence of a pickup error of the electronic component 11. In the electronic component conveying apparatus 1, the voice coil motor 515 may be excluded, or the voice coil motor 515 may be used together to control the load applied to the electronic component 11 according to the movement accuracy. .

(Third embodiment)
An electronic component conveying apparatus 1 according to a third embodiment will be described in detail with reference to the drawings. The same configurations and functions as those of the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. As shown in FIG. 17, in the electronic component transport apparatus 1 according to the third embodiment, the control device 58 includes a push-up distance calculation unit 585. Further, a pin drive control unit 586 that controls the movement of the push-up pin 42 of the holder 4 is provided.

  As illustrated in FIG. 18, the push-up distance calculation unit 585 calculates a push-up distance L6 that brings the electronic component into contact with the suction nozzle 52 that advances a certain distance. As a premise, the separation distance L 7 between the base end of the arm 51 and the surface of the supply board 10 is known depending on the arrangement relationship between the holder 4 and the pickup device 5. First, the push-up distance calculation unit 585 uses the trigonometric function to calculate the approach distance L8 at which the suction nozzle 52 approaches the surface of the supply board 10 based on the advance distance of the suction nozzle 52, the length of the arm 51, and the angle of attack θ. calculate.

  Then, the push-up distance L6 can be calculated by subtracting the approach distance L8 from the separation distance L7. The pin drive control unit 586 controls the push-up pin 42 to advance the push-up pin 42 by the push-up distance L6 calculated by the push-up distance calculation unit 585 according to the angle of attack. Thereby, the pushed-up electronic component 11 is accurately positioned at the tip of the suction nozzle 52 regardless of the degree of displacement of the electronic component 11. Therefore, it is possible to suppress the overloading of the electronic component 11 and the occurrence of a pickup error of the electronic component 11.

(Fourth embodiment)
An electronic component conveying apparatus 1 according to a fourth embodiment will be described in detail with reference to the drawings. The same configurations and functions as those of the first to third embodiments are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 19 is a configuration diagram showing a detailed configuration of the holder 4. The holder 4 has a ring insertion portion 43 into which the supply board 10 as a wafer ring is inserted on a surface perpendicular to the installation surface of the housing. The slider 41 makes the ring insertion portion 43 movable along the surface of the supply panel 10. The push-up pin 42 is installed at a fixed point and extends from the back side of the ring insertion portion 43 toward the front side.

  The slider 41 that translates the supply board 10 includes a support plate 411 that fixes the ring insertion portion 43 and a rail 412 on which the support board 411 slides. In the center of the support plate 411, a hole that includes the entire supply board 10 is provided. The rail 412 is provided on the back surface of the support plate 411. There are two types of rails 412 extending in the horizontal direction and the vertical direction. When the support plate 411 slides along the rail 412, the ring insertion portion 43 fixed to the support plate 411 moves two-dimensionally on the parallel plane along the board surface of the supply board 10.

  In the electronic component transport apparatus 1, the correction control unit 582 is a computer that performs integrated control of the entire electronic component transport apparatus 1, and includes a slider 54 that translates the arm 51 of the pickup device 5 and a slider 54 that moves in parallel, and a holder. 4 slider 41 is controlled to direct arm 51 to the actual position. That is, the deviation between the arm 51 and the actual position 13 is distributed by the pickup device 5 and the holder 4 to be eliminated.

  As shown in FIG. 20, the correction control unit 582 divides the horizontal component movement shift X by the minimum movement unit Px of the slider 41 of the holder 4. The slider 41 of the holder 4 moves the ring insertion part 43 sideways by the number of pitches corresponding to the quotient Sx obtained by the division of the correction control part 582. The slider 54 of the pickup device 5 translates the arm 51 by a distance corresponding to the remainder Jx.

  Further, the correction control unit 582 divides the vertical component movement shift Y by the minimum movement unit Py of the slider 41 of the holder 4. The slider 41 of the holder 4 moves the ring insertion portion 43 vertically by the number of pitches corresponding to the quotient Sy. Further, the correction control unit 582 calculates the angle of attack by an inverse trigonometric function using the remainder Jy as a parameter, and causes the swing device 53 of the pickup device 5 to swing the arm 51 by the calculated angle of attack.

  As described above, the displacement caused by the feeding of the supply board 10 may be eliminated by using not only the movement of the arm 51 but also the slider 41 of the holder 4. Since both the supply panel 10 and the arm 51 move toward each other so that the actual position 13 and the arm 51 are opposed to each other, the process for eliminating the shift is accelerated and the conveyance speed of the electronic component 11 can be improved. it can.

(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Electronic component conveyance apparatus 10 Supply board 11 Electronic component 12 Planned position 13 Actual position 2 Target apparatus 3 Conveyance table 31 Conveyance path 32 Adsorption nozzle 33 Direct drive motor 4 Holder 41 Slider 411 Support plate 412 Rail 42 Push-up pin 43 Ring insertion part 5 Pickup device 51 Arm 51a Rotation center 511 Base end plate 512 Frame 513 Rod 514 Ring 515 Voice coil motor 52 Adsorption nozzle 52a Adsorption nozzle rear end 53 Rotation device 54 Slider 541 Bracket 542 Rail 543 Lead screw 55 Advance / retraction drive device 551 Compression spring 552 Followed rod 553 Bending portion 554 Cylindrical cam 555 Rotating motor 56 Camera 56a Field of view 57 Prism 58 Control device 581 Analysis unit 582 Correction control unit 583 Relay control unit 584 Advance Away calculating unit 585 push-up distance calculating section 586 pin drive controller

Claims (12)

An electronic component transport device for transporting electronic components arranged in an array on a supply board to a target device,
A holder for holding the supply board;
A transport table having a transport path to the target device;
A pickup device that is arranged between the holder and the transfer table and relays electronic components from the supply board to the transfer table;
With
The holder is
A supply board slider for moving the supply board parallel to the board surface and moving each electronic component toward a predetermined position;
The pickup device is
An arm for picking up electronic components of the supply board;
Reciprocating means for reciprocating the arm between the holder and the transfer table;
Detecting means for detecting an actual position due to displacement of the electronic component moving toward the planned position;
Correction means for correcting the position of the arm for picking up the electronic component based on the detection of the detection means in accordance with the actual position of the electronic component moved in a plane ;
Equipped with a,
The correction means includes
First moving means for moving the arm in a direction across the supply board;
Second moving means for moving the arm in a direction perpendicular to the direction in which the first moving means is moved;
With
At least one of the first moving means and the second moving means is a turning means for turning the arm about its base end as a center point . At least one of the first moving means and the second moving means is an arm slider that slides the arm in parallel along the plane of the supply board;
The electronic component conveying apparatus according to claim 1 . The first moving means is an arm slider that slides the arm in parallel along the plane of the wafer,
The second moving means is a turning means for turning the arm around its base end center point;
The electronic component conveying apparatus according to claim 1 . The holder holds the supply board vertically,
The transport table is arranged with the transport path horizontal above the pickup device,
The first moving means of the pickup device is the arm slider that moves the arm at a constant height;
The reciprocating means and the second moving means of the pickup device are the common turning means,
The swivel means is
Swivel to displace the angle of attack of the arm,
As the second moving means, the angle of attack of the arm is displaced toward the electronic component to be picked up,
As the reciprocating means, the arm is swung in a direction directly above the transfer table from the position where the angle of attack is displaced,
The electronic component conveying apparatus according to claim 3 . The detection means includes
A camera that captures the planned position and its surroundings, and
An analysis unit that analyzes imaging data of the camera and detects an actual position;
Have
The analysis unit is configured to analyze imaging data when the arm pivots in a direction directly above the transfer table;
The electronic component carrying device according to claim 4 . The arm has a holding means for holding an electronic component at the tip,
The holding means is disposed off the arm and the shaft,
The camera captures the planned position and its surroundings in the field of view through the movement trajectory of the holding means by the reciprocating means from the rear end of the holding means,
The electronic component conveying apparatus according to claim 5 . The correction means includes
Controlling the first moving means, the second moving means, and the supply board slider, moving both the arm and the supply board, and moving the arm to the actual position;
The electronic component conveying apparatus according to claim 1 . The arm has a holding means for holding an electronic component at the tip,
The pickup device has an advancing / retreating drive means for advancing and retracting the holding means in the axial direction,
The advance / retreat driving means comprises:
A first rod connected to the holding means;
A second rod that advances toward the first rod and pushes the first rod in an axial direction;
Have
Contact surfaces of the first rod and the second rod each have a curved portion,
The electronic component conveying apparatus according to claim 1, wherein: The arm has a holding means for holding an electronic component at the tip,
The pickup device has an advancing / retreating drive means for advancing and retracting the holding means in the axial direction,
The holder has a protruding pin that protrudes an electronic component to the pickup device side,
The advance / retreat driving means comprises:
A voice coil motor,
A first rod connected via the holding means and the voice coil motor;
A second rod that advances toward the first rod and pushes the first rod in an axial direction;
Have
The second rod advances more than the distance between the electronic component at the predetermined position and the holding means when the arm moves to the side,
When the voice coil motor receives a vertical drag from an electronic component, the voice coil motor moves the holding means backward relative to the voice coil motor;
The electronic component conveying apparatus according to claim 1, wherein: The arm has a holding means for holding an electronic component at the tip,
The pickup device has an advancing / retreating drive means for advancing and retracting the holding means in the axial direction,
The advance / retreat driving means comprises:
A first rod connected to the holding means;
A second rod that advances toward the first rod and pushes the first rod in an axial direction;
Have
A distance calculating unit that calculates a distance between the holding unit and the electronic component after the second moving unit swivels the arm;
The second rod advances by the distance calculated by the distance calculating means;
The electronic component conveying apparatus according to claim 1, wherein: The holder has a protruding pin that protrudes an electronic component to the pickup device side,
A distance calculating unit that calculates a distance between the holding unit and the electronic component after the second moving unit swivels the arm;
The holder advances the protruding pin based on the distance calculated by the distance calculating means;
The electronic component conveying apparatus according to claim 1, wherein: The correction means includes
Move the supply board by a multiple of the minimum movement unit of the supply board slider,
Moving the arm by a distance less than the minimum movement unit of the supply board slider;
The electronic component carrying apparatus according to claim 1, wherein

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