WO2015137318A1 - 非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法 - Google Patents

非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法 Download PDF

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Publication number
WO2015137318A1
WO2015137318A1 PCT/JP2015/056954 JP2015056954W WO2015137318A1 WO 2015137318 A1 WO2015137318 A1 WO 2015137318A1 JP 2015056954 W JP2015056954 W JP 2015056954W WO 2015137318 A1 WO2015137318 A1 WO 2015137318A1
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WIPO (PCT)
Prior art keywords
swirl
force
swirling
swirl flow
transport
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PCT/JP2015/056954
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English (en)
French (fr)
Japanese (ja)
Inventor
佐藤　光
伊藤　彰彦
貴裕 安田
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オイレス工業株式会社
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Publication of WO2015137318A1 publication Critical patent/WO2015137318A1/ja

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion

Definitions

  • the present invention relates to a non-contact type levitation transport device in which a swirl flow forming portion for generating a swirl flow is disposed on a transport path surface for transporting a transported object, and the transported object is levitated and transported by the swirl flow, and its transport direction
  • the present invention relates to a switching method and a conveying speed adjusting method, and in particular, a non-contact type for levitating and conveying a conveyance object composed of a glass substrate for a display used in a flat panel for a solar cell, a mobile phone, a liquid crystal television, a liquid crystal monitor for a personal computer, etc.
  • the present invention relates to a levitation conveyance device, and a conveyance direction switching method and a conveyance speed adjustment method thereof.
  • a front surface of a ring-shaped member is provided by having a jet port on the back surface of a ring-shaped member having a circular through-hole penetrating from the front surface to the back surface and ejecting gas from the jet port.
  • a swirling flow forming body that generates a swirling flow in a direction away from the front surface on the side and a flow of air in the back surface direction in the vicinity of the opening of the through hole on the front surface side of the ring-shaped member.
  • Non-contact transfer device that has two or more on the transfer surface, and floats and conveys the object to be conveyed using a contact type driving mechanism while maintaining high flying height accuracy of the object to be conveyed made of liquid crystal glass or the like.
  • the swirl directions of the swirl flow of the swirl flow forming body are changed so as to maintain the flying height accuracy by avoiding the rotation and wobbling of the conveyed object on the conveyance surface.
  • the swirl force of the swirl flow sent from each swirl flow forming body onto the transport surface is intentionally canceled and swirled in the gap between the bottom surface of the object to be transported and the transport surface
  • a contact-type drive mechanism such as a friction roller or a belt. It is necessary to apply a driving force for transferring the object to the object.
  • the present invention solves the problems of the prior art as described above, that is, the object of the present invention is to use the swirl force of swirl flow without using a contact type drive mechanism.
  • Non-contact type levitation conveyance device that conveys the object to be conveyed while floating in a completely non-contact state with a simple apparatus configuration, and easily achieves forward / backward switching and conveyance speed adjustment, and its conveyance direction switching method and conveyance It is to provide a speed adjustment method.
  • the swirl flow that generates a swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed, and the swirl flow that sequentially overflows from the swirl flow formation unit.
  • a non-contact type levitation conveyance device that conveys the conveyance object with a conveyance force generated by the swirling force of the swirling flow while floating the conveyance object with a gap between the bottom surface of the conveyance object and the conveyance path surface
  • a pair of the swirl flow forming portions are arranged to be spaced apart from each other in the width direction of the transport road surface, and the swirl flows generated by the pair of left and right swirl flow forming portions disposed in the road width direction of the transport road surface, respectively.
  • Swirl force adjusting means for adjusting the swirl force of the swirl flow for each swirl flow forming portion is configured so that the swirl flow overflows from one of the pair of left and right swirl flow forming portions.
  • the swirl force of swirl flow that overflows the swirl force from the other The forward transport state of the transported object strengthened, and the return transport state of the transported object in which the swirling force of the swirling flow overflowing from one of the pair of left and right swirling flow forming portions is weaker than the swirling force of the swirling flow overflowing from the other.
  • the pair of left and right swirl flow forming portions are installed in a predetermined direction along the conveyance direction of the conveyance path surface.
  • the swirl directions of the swirl flows generated by the swirl flow forming portions disposed at a plurality of intervals and spaced apart from each other along the transport direction of the transport path surface are set in the same direction.
  • the pair of left and right swirl flow forming portions are installed in a predetermined direction along the conveyance direction of the conveyance path surface.
  • a plurality of swirl flows that are respectively spaced apart from each other and disposed in a plurality of swirl flow forming portions disposed along the transport direction of the transport path surface are set in directions opposite to each other.
  • the swirl force adjusting means sets the swirl force of the swirl flow respectively generated from the swirl flow forming unit in a checkered pattern strength state along the transport direction, thereby further solving the above-described problem. .
  • the swirl flow forming portion is provided below the conveyance path surface.
  • a bottomed peripheral side wall that is opened on the conveyance path surface, and a gas injection port that generates a swirl flow by injecting the gas into a swirl forming space region surrounded by the peripheral side wall from a tangential direction of the peripheral side wall.
  • the swirl force adjusting means further solves the aforementioned problems by adjusting the gas injection force for each swirl flow forming portion.
  • the swirl flow forming portion that generates the swirl flow composed of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed, and the swirl flow that sequentially overflows from the swirl flow formation portion. Is moved in the gap between the bottom surface of the object to be conveyed and the surface of the conveying path, and the conveying object is levitated and the conveying direction of the non-contact type levitation conveying apparatus that conveys the object to be conveyed by the conveying force generated by the swirling force of the swirling flow.
  • the swirl force adjusting means that makes the swirl force of the swirl flow that overflows from one of the pair of left and right swirl flow forming portions stronger than the swirl force of the swirl flow that overflows from the other and the pair of left and right transport states
  • One side of swirl flow forming part By characterized in that the switching between the return transport state of the conveyed object to a turning force was weaker than the turning force of the swirling flow overflowing from the other swirling flow to Luo extravasation, it solves the problems mentioned above.
  • the swirl flow forming portion that generates the swirl flow made of gas is disposed on a flat conveyance path surface that conveys the object to be conveyed, and the swirl flow that sequentially overflows from the swirl flow formation portion.
  • the swirl force adjusting means is used to bring the swirl force of the swirl flow that overflows from one of the pair of left and right swirl flow forming portions into an accelerated transport state of the object to be conveyed that is stronger than the swirl force of the swirl flow that overflows from the other.
  • the swirling force of the swirling flow overflowing from one of the pair of swirling flow forming portions is changed to the decelerated conveying state of the conveyed object that is weaker than the swirling force of the swirling flow overflowing from the other, the above-described problem is solved. is there.
  • the non-contact type levitation conveyance device, the conveyance direction switching method of the non-contact type levitation conveyance device, and the conveyance speed adjustment method of the non-contact type levitation conveyance device of the present invention include a swirl flow forming unit that generates a swirl flow composed of gas.
  • the swirl flow that sequentially overflows from the swirl flow forming unit is interposed in the gap between the bottom surface of the conveyed object and the conveyance path surface, and the conveyed object floats up.
  • a pair of swirl flow forming portions are arranged spaced apart from each other in the width direction of the conveyance road surface and arranged in the width direction of the conveyance road surface.
  • the turning directions of the swirling flows respectively generated by the pair of left and right swirling flow forming sections are set in the same direction, and swirl force adjusting means for adjusting the swirling force of the swirling flow for each swirling flow forming section is provided as a pair of left and right swirling flows.
  • the swirl flow that overflows from one of the swirl flow forming portions of the swirl flow that is stronger than the swirl force of the swirl flow that overflows from the other, and the swirl flow that overflows from one of the pair of left and right swirl flow forming portions can be reduced by changing the swirl force of the swirl flow from the other side. Transfer direction and transfer just by switching Since the magnitude relationship of the force acting in the direction of the road also changes, the direction of movement of the object to be conveyed can be switched to the conveyance forward direction and the conveyance return direction without using a contact-type drive mechanism by utilizing the swirl force of the swirl flow Can do.
  • the negative pressure due to the swirl flow is lower on the side where the swirl force is stronger (larger on the minus side) than the weaker side, and the force that attracts the conveyed object toward the swirl flow forming part increases, and the swirl on the weak swirl force side
  • the swirl flow is more susceptible to the swirl flow due to the swirl flow forming part on the side where the swirl force is stronger than the swirl flow due to the swirl flow.
  • the swirl flow acting force acting toward the conveyance backward direction due to the swirl flow is reduced by the swirl flow acting force acting toward the conveyance forward direction due to the swirl flow of the swirl flow forming portion on the side where the swirl force is weak, and a pair of left and right From the swirl flow acting force acting toward the conveyance forward direction by the swirl flow of the swirl flow forming portion on the outer side in the width direction of the swirl flow forming portion acting toward the conveyance forward direction due to the swirl flow To grow To generate a conveying force can be conveyed towards and the conveying forward direction transported object without contact.
  • the transport direction of the object to be transported can be switched. it can.
  • the pair of left and right swirl flow forming portions are provided along the conveyance direction of the conveyance road surface with a predetermined amount.
  • the swirl directions of the swirl flows generated by the swirl flow forming portions disposed at a number of intervals between the installation intervals and disposed along the transport direction of the transport path surface are set in the same direction.
  • the swirl flow that acts on the object to be conveyed toward the transport forward direction or the transport return direction due to the swirl flow of the swirl flow forming portion on the side where the jet force is strong on the outer side in the road width direction of the pair of left and right swirl flow formation portions Since there are a plurality of locations of the acting force in the transport direction, the acceleration of the transported object can be increased and the transport speed can be increased accordingly.
  • the pair of left and right swirl flow forming portions are provided in a predetermined direction along the conveyance direction of the conveyance road surface.
  • a plurality of swirl flows that are generated at each swirl flow forming section that is spaced apart from each other at each installation interval and that is arranged in a large number along the transport direction of the transport path surface are set in opposite directions.
  • the force adjusting means sets the swirl force of the swirl flow generated from the swirl flow forming unit in a checkered pattern strength state along the conveying direction, thereby turning the swirl flow generated from the swirl flow forming unit.
  • the location where the force is increased occurs not only on one side in the road width direction but on both sides, and the one side and the other side in the road width direction are in the same state.
  • the acting force acts to convey the object to be conveyed. Can.
  • the swirl flow forming portion is located below the surface of the conveyance path.
  • a bottomed peripheral side wall that is provided and opens on the conveyance path surface, and a gas injection port that generates a swirl flow by injecting gas into a swirl formation space region surrounded by the peripheral side wall from a tangential direction of the peripheral side wall.
  • the swirl force adjustment means adjusts the gas injection force for each swirl flow forming section, so that swirl flow is formed with a simple and compact configuration.
  • the conveying device can be simplified. Further, since the strength of the swirling force of the swirling flow can be easily changed by adjusting the gas injection force, the swirling force of the swirling flow can be easily adjusted.
  • a pair of swirl flows that are spaced apart from each other in the width direction of the transport road surface and arranged in the same swirl direction are provided.
  • the swirl force adjusting means that adjusts the swirl force of the swirl flow that overflows from the swirl flow forming part to be generated respectively, and the swirl force swirl of the swirl flow that overflows from one of the pair of left and right swirl flow forming parts is swirled from the other.
  • a pair of them are arranged apart from each other in the left and right direction in the width direction of the conveyance road surface, so
  • the swirl force adjusting means that adjusts the swirl force of the swirl flow that overflows from the swirl flow forming part to be generated respectively, and the swirl force swirl of the swirl flow that overflows from one of the pair of left and right swirl flow forming parts is swirled from the other
  • the object to be conveyed is made to be in an accelerated conveyance state stronger than the force, and after this accelerated conveyance state, the swirl force of the swirl flow overflowing from one of the pair of left and right swirl flow forming portions is made weaker than the swirl force of the swirl flow overflowing from the other.
  • the magnitude relationship between the swirling flow acting force acting in the conveying direction advance direction and the conveying direction backward direction can be changed by simply switching the strength of the swirling force overflowing from the swirling flow forming portion.
  • Strange Order to accelerate towards the objects to be conveyed to the conveying direction traveling direction it is possible to then decelerate.
  • FIG. 3 is an enlarged perspective view showing a swirl flow forming portion at a location denoted by reference numeral 2 in FIG. 1.
  • FIG. 3 is a conceptual cross-sectional view illustrating the principle of generating a swirling flow and a force to draw downward by the swirling flow forming unit of the present invention. It is a top view seen from the code
  • a pair of swirl flow forming portions are arranged spaced apart from each other in the width direction of the transport road surface and a pair of left and right swirl flows disposed in the width direction of the transport road surface.
  • the swirling direction of the swirling flow generated in each of the forming portions is set to the same direction, and the swirling force adjusting means for adjusting the swirling force of the swirling flow for each swirling flow forming portion is one of the left and right swirling flow forming portions.
  • a non-contact type levitation conveying apparatus comprising: a swirl flow forming unit that generates a swirl flow in the same swirl direction by being spaced apart from each other in the width direction of the transport road surface by a pair.
  • the swirl force adjusting means for adjusting the swirl force of the swirling flow that overflows makes the swirl force of the swirl flow that overflows from one of the pair of left and right swirl flow forming portions stronger than the swirl force of the swirl flow that overflows from the other.
  • the swirl flow is switched between the forward transfer state of the left and right swirl flows that are overflowing from one of the pair of left and right swirl flow forming portions, and the return transport state of the object to be conveyed that is weaker than the swirl force of the swirl flow that overflows from the other.
  • the transport force is generated without using a contact-type drive mechanism by utilizing the turning force of the transport to transport the transported object in a non-contact manner, and the transport direction of the transported object in the transport forward direction and transport return direction To switch If, specific embodiments thereof are it may be any one.
  • the method for adjusting the conveyance speed of the non-contact type levitation conveyance apparatus is a swirl flow formation in which a pair is arranged spaced apart from each other in the width direction of the conveyance road surface to generate a swirl flow in the same swirl direction.
  • the swirl force adjusting means for adjusting the swirl force of the swirl flow that overflows from the section makes the swirl force of the swirl flow that overflows from one of the pair of left and right swirl flow forming parts stronger than the swirl force of the swirl flow that overflows from the other.
  • the transport force is generated without using a contact type drive mechanism by utilizing the swirl force of the swirl flow, and the transported object is transported in a non-contact manner, and the transported object is transported in the transport direction. Accelerate in the direction of travel Allowed, as long as it can then decelerate, specific embodiments thereof are may be any one.
  • a specific embodiment of the swirl flow forming portion employed in the present invention may be directly formed on the base portion itself constituting the conveyance path surface by drilling or cutting, but a chip by resin processing or the like. It may be formed separately from the base part that constitutes the conveyance path surface, such as a shaped molded product, and when the swirl flow forming part is formed separately from the base part, It is more preferable because the options for manufacturing can be diversified. Further, the specific structure of the swirl flow forming portion may be anything as long as it forms a swirl flow from a gas such as air.
  • the swirl flow may be formed by the gas injected from the gas injection port of the swirl flow forming section flowing along the peripheral side wall having a depth of about 3 to 10 mm of the guide recess for guiding in the swirl direction.
  • the shape of the guide recess in plan view is not particularly limited.
  • the specific shape of the guide recess may be, for example, a circular shape, an annular shape, an elliptical shape, a polygonal shape, a circular shape with a notch formed therein, and more specifically, a circular cup with a hook. The shape is more preferable.
  • an air inlet and a fan may be provided in a guide recess provided with a peripheral side wall, and a swirling flow directed upward from the guide recess surrounded by the peripheral side wall may be formed by rotating the fan.
  • sequence form of the swirl flow formation part in this invention as mentioned above, the turning direction of the swirl flow set to the pair of left and right swirl flow formation parts is the pair of left and right swirl flow formation parts.
  • any arrangement may be used as long as it constructs a levitation transport mechanism that can transport a transported object while floating using the swirl force of the flow.
  • the pair of swirl flow forming portions that are separated from each other in the width direction of the conveyance road surface may be arranged in the same positional relationship in the conveyance direction, or arranged in a positional relationship that is shifted from each other in the conveyance direction. May be.
  • the swirl force adjusting means may be anything as long as it adjusts the strength of the swirl force of the swirl flow that sequentially overflows from the swirl flow forming unit.
  • the pressure of the gas injected from the gas injection port of the swirl flow forming unit is adjusted to adjust the strength of the swirling force of the swirl flow, or the size of the gas injection port of the swirl flow forming unit is adjusted to rotate
  • the strength of the swirling force of the swirling flow may be adjusted by adjusting the strength of the swirling force of the flow or by adjusting the rotational speed of the fan of the swirling flow forming unit.
  • the conveyance path surface in this invention is flat, and it goes without saying that if the processing accuracy of this flat conveyance path surface is high, a more stable conveyance state of the object to be conveyed can be obtained.
  • the guide plate is transported in order to prevent the gas released from the swirl flow forming portion from excessively leaking from both side edges in the road width direction and to guide and restrict the object to be transported in the transport direction. It may be provided on both side edges of the road surface.
  • a thin plate made of a material such as glass, plastic, metal, etc. It is a glass substrate for display having a thickness of about 0.1 to 0.5 mm used for a flat panel for a battery, a mobile phone, a liquid crystal television, a liquid crystal monitor for a personal computer, and the like.
  • FIG. 1 is a perspective view showing a non-contact type levitation conveying apparatus 100 of the first embodiment of the present invention
  • FIG. 2 is an enlarged perspective view showing a swirl flow forming portion 130 at a location 2 in FIG.
  • FIG. 3 is a conceptual cross-sectional view showing the principle of generation of a swirling flow R and a force D to be drawn downward by the swirling flow forming unit 130 of the present invention
  • FIG. 4 is a reference numeral 4 in FIG.
  • FIG. 5 is an enlarged plan view seen from FIG. 1 and shows the principle of the conveyance force generated in the first embodiment.
  • FIG. 1 is a perspective view showing a non-contact type levitation conveying apparatus 100 of the first embodiment of the present invention
  • FIG. 2 is an enlarged perspective view showing a swirl flow forming portion 130 at a location 2 in FIG.
  • FIG. 3 is a conceptual cross-sectional view showing the principle of generation of a swirling flow R and a force D to be drawn downward by the swirling flow forming
  • FIG. 5 is a plan view seen from the reference numeral 5 in FIG.
  • FIG. 6 is a diagram showing a state in which the pressure of the part 130a is made higher than the pressure of the other swirl flow forming part 130b
  • FIG. 6 is a plan view seen from the reference numeral 6 in FIG. It is a figure which shows a mode that it reversed.
  • the non-contact type levitation transfer apparatus 100 has a swirl flow forming unit 130 that generates a swirl flow R made of gas, for example, having a thickness of 0.
  • the swirl flow R which is disposed on the flat transport path surface 111 for transporting the thin plate-shaped transport object C made of a glass substrate for display of about 3 mm and which sequentially overflows from the swirl flow forming unit 130 is used as the bottom surface of the transport object C.
  • the transported object C is floated by being interposed in the gap between the transport path surface 111 and the transported object C is transported by a transport force generated by the swirl force of the swirl flow R.
  • the non-contact type levitation transfer apparatus 100 includes a base portion 110 and a machine base frame 120 that supports the base portion 110.
  • a circular cup-shaped swirling flow forming portion 130 with a flange formed by resin molding is formed on the conveyance path surface 111 of the base portion 110 facing the object to be conveyed C.
  • a large number are arranged along the transport direction T.
  • the swirl flow forming portion 130 is provided between the peripheral side wall 131a of the bottomed guide recess 131 provided below the transport path surface and opening on the transport path surface, and the peripheral side wall 131a from the tangential direction of the peripheral side wall 131a.
  • the swirl flow forming unit 130 includes two guide recesses 131 that guide the air in the swirl direction, and two air jets that respectively inject air along a cylindrical peripheral side wall that surrounds the guide recess 131.
  • a gas injection port 132 In the case of the present embodiment, these two gas injection ports 132 are provided at a position that bisects the cylindrical peripheral side wall surrounding the guide recess 131, and the swirling flow R is generated reliably and stably. It is supposed to let you.
  • the swirl flow forming unit 130 configured as described above causes the swirl flow R to overflow between the transport path surface 111 and the transport object C, thereby floating the transport object C by, for example, about 0.05 mm.
  • the hooked circular cup-shaped member formed by resin molding forming the swirl flow forming portion 130 is formed as a member separate from the base portion 110 and is fitted into the base portion 110.
  • the base portion 110 itself may be integrally formed.
  • the machine base frame 120 is provided so that the posture of the base portion 110 with respect to the horizontal direction can be adjusted, and in this embodiment, the installation posture of the conveyance path surface 111 of the base portion 110 is adjusted to be horizontal.
  • a swirl flow R discharged from the swirl flow forming unit 130 and a force D for attracting the conveyed object C to the lower swirl flow forming unit 130 side are respectively generated.
  • the principle will be described.
  • the swirl flow R is continuous in the guide recess 131. It is formed continuously.
  • vortex flow R continuously generate
  • the swirl radius of the swirl flow R is swirled by the centrifugal force of the overflow swirl flow R.
  • the swirl flow R swirls while spreading in the radial direction.
  • the air in the vicinity of the turning center of the swirling flow R is pulled in the radial direction, so that the air pressure in the vicinity of the turning center of the swirling flow R decreases and becomes relatively lower than the air pressure generated in the swirling portion of the swirling flow R. .
  • a negative pressure acts on the conveyed object C, and a force D is generated to attract and attract the conveyed object C toward the lower swirl flow forming unit 130 side.
  • the force D to be attracted and the force to be lifted by the swirling flow R overflowing the conveyed object C are balanced, and the conveyed object C is held at the floating position of the conveyed object.
  • a pair of swirl flow forming portions 130 are disposed apart from each other in the road width direction S of the conveyance path surface 111.
  • the arrow on the U axis indicates the flying direction (vertical direction).
  • a plurality of elements are arranged in the transport direction T as an example, but one may be provided in the transport direction T. In FIG. 4, only one is shown in the transport direction T in order to explain the principle that the transport force is generated.
  • the swirl directions of the swirl flows Ra and Rb generated by the pair of left and right swirl flow forming portions 130a and 130b are set to be the same direction.
  • the swirl force adjusting means for adjusting the swirl force of the swirl flow Ra, Rb for each swirl flow forming unit 130a, 130b
  • the injection pressure of air ejected from the gas injection port 132 of the swirl flow forming unit 130 An injection force adjusting means 140 for adjusting the pressure is provided.
  • the jet force adjusting means 140 uses the swirl force of the swirling flow overflowing from the left swirl flow forming portion 130a in FIG. 4 which is one of the left and right pairs, and the right swirl flow in FIG. Adjustment is made relatively stronger than the swirling force of the swirling flow overflowing from the forming portion 130b (the forward conveyance state of the conveyed object C).
  • the injection force adjusting means 140 changes the injection pressure of the air injected from the gas injection port 132a of the left swirl flow forming portion 130a in FIG. 4 which is one of the left and right pair in FIG. It adjusts relatively higher than the injection pressure of the air injected from the gas injection port 132b of the right swirl flow forming unit 130b.
  • the negative pressure due to the swirling flow Ra is lower (larger toward the minus side) in the swirling flow forming portion 130a on the left side in FIG. 4 where the injection pressure is higher than that on the right swirling flow forming portion 130b where the injection pressure is low.
  • the force D that tends to draw the swirl flow toward the swirl flow forming portion 130 side increases. And it becomes easy to receive the influence of the swirl flow Ra by the swirl flow formation part 130a of the left side in FIG. 4 whose injection pressure is higher than the influence of the swirl flow Rb by the swirl flow formation part 130b of the right side in FIG. .
  • the injection force adjusting means 140 is set as the forward transfer state in which the transfer object C is transferred in the transfer forward direction or the accelerated transfer state in which the transfer object C is accelerated.
  • the injection pressure of the air injected from the gas injection port 132a of the pair of left and right swirl flow forming portions 130a is greater than the injection pressure of the air injected from the gas injection port 132b of the swirl flow formation portion 130b which is the other pair of left and right. Adjust relatively high.
  • the conveyance force in the conveyance forward direction indicated by the white arrow (right side in FIG. 5) acts on the conveyed object C, and the conveyance object C is conveyed in the conveyance forward direction indicated by the white arrow (in FIG. 5). To the right) and move.
  • the injection force adjusting means 140 is in one of a pair of left and right as a return path transport state in which the transport object C is transported in the transport return path direction or a decelerated transport state in which the transport object C is decelerated.
  • the injection pressure of the air injected from the gas injection port 132a of the swirling flow forming unit 130a is adjusted to be relatively lower than the injection pressure of the air injected from the gas injection port 132b of the swirling flow forming unit 130b which is the other of the left and right pair. Then, the conveyance force in the conveyance return path direction (left side in FIG. 6) indicated by the white arrow acts on the conveyed object C.
  • the injection force adjusting means 140 is an injection pressure of air injected from the gas injection port 132a of the pair of left and right swirl flow forming portions 130a and an injection of air injected from the gas injection port 132b of the other swirl flow forming portion 130b.
  • the height relationship with pressure can be switched freely.
  • the magnitude relationship of the swirl flow acting forces F1 and F2 acting in the transport forward direction and the transport return direction also changes. That is, the moving direction of the conveyed object C is easily switched by simply switching the level of the injection pressure of the air injected from the gas injection ports 132a and 132b of the swirl flow forming portions 130a and 130b. In addition, acceleration and deceleration are switched.
  • a plurality of left and right swirl flow forming portions 130 a and 130 b are arranged spaced apart from each other at predetermined installation intervals along the conveyance direction T of the conveyance path surface 111.
  • the swirling directions of the swirling flows Ra and Rb respectively generated by the swirling flow forming portions 130a and 130b arranged along the T are set in the same direction.
  • a plurality of swirl flow acting forces F1 and F2 acting on the object C to be conveyed in the direction are plural in the conveying direction T.
  • the swirl flow forming portions 130a and 130b are separated from each other in the road width direction S of the conveyance road surface 111 and are paired with each other.
  • the swirl directions of the swirl flows Ra and Rb respectively generated by the pair of left and right swirl flow forming portions 130a and 130b disposed in the width direction S of the transporting road surface 111 are set in the same direction.
  • the injection force adjusting means 140 as the turning force adjusting means for adjusting the turning force of the swirling flows Ra and Rb for each of the forming portions 130a and 130b swirls overflowing from one (130a) of the pair of left and right swirling flow forming portions 130a and 130b.
  • the swirl flow (Ra) overflowing from (130a) is provided so as to be switchable between the return conveyance state of the conveyed object C in which the swirl force of the swirl flow (Rb) overflowing from the other (130b) is weakened. Accordingly, the pair of left and right swirl flow forming portions 130a and 130b generate and lift the buoyancy with a simple apparatus configuration without using a contact-type drive mechanism by utilizing the swirl force of the swirl flows Ra and Rb.
  • a conveyance force can be generated to convey the object C to be conveyed in a non-contact state, and the movement direction of the object C to be conveyed in the forward direction and the backward direction of the conveyance can be switched. it can.
  • the swirl forming space 130a, 130b is provided with a bottomed peripheral side wall 131a provided below the transport path surface and opened on the transport path surface, and a swirl formation space surrounded by the peripheral side wall 131a from the tangential direction of the peripheral side wall 131a.
  • a gas injection port 132 for injecting air into the region to generate the swirling flows Ra and Rb, and the injection force adjusting means 140 adjusts the gas injection force for each of the swirling flow forming portions 130a and 130b,
  • the non-contact levitation conveyance device 100 can be simplified by eliminating the need for a rotating structure such as a motor, and the swirl forces of the swirl flows Ra and Rb can be easily adjusted.
  • a plurality of left and right swirl flow forming portions 130 a and 130 b are arranged spaced apart from each other at predetermined intervals along the transport direction T of the transport path surface 111, and along the transport direction T of the transport path surface 111.
  • the swirl flow acting forces acting on the object to be conveyed C by setting the swirl directions of the swirl flows Ra and Rb generated in the swirl flow forming portions 130a and 130b arranged in the same direction to each other.
  • the acceleration of the object to be conveyed C can be increased by the amount of F1 and F2 in the conveyance direction T, and the conveyance speed can be increased.
  • a pair is arranged spaced apart from each other in the width direction S of the transport path surface 111 and the same turning direction is mutually used.
  • a pair of left and right swirl flows is formed by the jet force adjusting means 140 as swirl force adjusting means for respectively adjusting the swirl forces of the swirl flows Ra and Rb overflowing from the swirl flow forming portions 130a and 130b that generate the swirl flows Ra and Rb.
  • the swirl force of the swirl flow (Ra) overflowing from one (130a) of the pair of swirl flow forming portions 130a and 130b is weaker than the swirl force of the swirl flow (Rb) overflowing from the other (130b).
  • the pair of left and right swirl flow forming portions 130a and 130b generate buoyancy and lift the transported object C at the same time by generating transport force and switching the transported object C to the non-transported state. It can be transported in a contact state, and the movement direction of the transported object C in the transport forward direction and the transport return direction can be switched.
  • the method for adjusting the conveyance speed of the non-contact type levitation conveyance apparatus 100 is a method in which a pair is arranged spaced apart from each other in the width direction S of the conveyance road surface 111 and swivels in the same turning direction.
  • a pair of left and right swirl flow forming portions 130a is provided by the jet force adjusting means 140 as swirl force adjusting means for adjusting the swirl forces of the swirl flow Ra and Rb overflowing from the swirl flow forming portions 130a and 130b that generate the flows Ra and Rb.
  • the swirl force of the swirl flow (Ra) overflowing from one (130a) of 130b is made stronger than the swirl force of the swirl flow (Rb) overflowing from the other (130b), and the accelerated transport state of the conveyed object C is made.
  • the swirl force of the swirl flow (Ra) overflowing from one (130a) of the pair of left and right swirl flow forming portions 130a, 130b after the state is swirled by the swirl flow (Rb) overflowing from the other (130b)
  • the transporting force C is generated in the transport direction in a non-contact manner by generating a transport force with a simple apparatus configuration without attaching a contact-type drive mechanism. The effect is enormous, such as being able to accelerate in the direction and then decelerate.
  • FIG. 7 is a plan view showing a non-contact levitation conveyance apparatus 200 of the second embodiment of the present invention.
  • the non-contact type levitation transfer device 200 of the second embodiment includes swirl flow forming portions 130a and 130b that are arranged along the transfer direction T of the transfer path surface 111 in the non-contact type levitation transfer device 100 of the first embodiment.
  • the swirl directions of the swirling flows Ra and Rb that are generated are set to be opposite to each other in the transport direction T, and since many elements are common to the non-contact type levitation transport device 100 of the first embodiment, common matters Detailed description is omitted, and only the reference numerals in the 200s are used for the last two digits.
  • the pair of left and right swirl flow forming portions 230Aa and 230Ab are arranged in the conveyance direction T of the conveyance path surface 211. A plurality of them are arranged spaced apart from each other at predetermined installation intervals. Further, the swirl flow swirl directions RA and RB respectively generated in the swirl flow forming portions 230Aa and 230Ab (230Ba and 230Bb) arranged along the transport direction T of the transport path surface 211 are set to be opposite to each other. Yes.
  • the swirling direction of the swirling flow RA of the swirling flow forming portions 230Aa and 230Ab and the swirling direction of the swirling flow RB of the swirling flow forming portions 230Ba and 230Bb adjacent in the transport direction T are opposite to each other.
  • the swirl flow forming portions 230Aa and 230Ab and the swirl flow forming portions 230Ba and 230Bb are alternately arranged.
  • the jet force adjusting means 240 sets the jet pressure of the air jetted from the gas jet ports of the swirl flow forming portions 230Aa, 230Ab (230Ba, 230Bb) in a checkered pattern strength state along the transport direction T. Yes. Specifically, the injection force adjusting means 240 compares the pressure of air injected from the gas injection ports of the swirl flow forming units 230Aa and 230Bb with the pressure of air injected from the gas injection port of the swirl flow forming units 230Ab and 230Ba. And relatively high. As a result, as in the first embodiment described above, the transport force in the transport forward direction indicated by the white arrow (the right side in FIG. 7) acts on the transport object C, and the transport object C is white. Accelerates and moves in the forward direction of the conveyance indicated by the extraction arrow (on the right side in FIG. 7).
  • the location where the pressure of the air injected from the gas injection ports of the swirling flow forming portions 230Aa and 230Bb is increased occurs not only on one side in the road width direction but on both sides, and the one side and the other side in the road width direction are in the same state.
  • the injection force adjustment means 240 compares the pressure of the air injected from the gas injection ports of the swirl flow forming portions 230Aa and 230Bb with respect to the pressure of the air injected from the gas injection ports of the swirl flow forming portions 230Ab and 230Ba. Is lowered, the conveying force in the conveyance return path direction (left side in FIG. 7) acts on the conveyed object C, and the conveyance object C accelerates and moves in the conveyance return path direction (left side in FIG. 7). .
  • the pair of left and right swirl flow forming portions 230Aa and 230Ab are arranged in the conveyance direction T of the conveyance path surface 211.
  • a plurality of swirl flows that are spaced apart from each other at predetermined installation intervals along the swirl flow forming portions 230Aa and 230Ab (230Ba and 230Bb) disposed along the transport direction T of the transport path surface 211.
  • the injection force adjusting means 240 conveys the injection pressure of the air injected from the gas injection ports of the swirl flow forming portions 230Aa and 230Ab (230Ba and 230Bb), respectively.
  • the road width can be reduced with a simple device configuration without a contact-type drive mechanism.
  • Non-contact type levitation conveyance apparatus 110 210 ... Base part 111, 211 ... Conveyance road surface 120 ... Machine stand frame 130, 230Aa, 230Ab ... Swirling flow formation part 230Ba, 230Bb ... Swirl flow forming part 131 ... Guide recess 132 ... Gas injection ports 140, 240 ... Injection force adjusting means (swirl force adjusting means) C ... object to be transported D ... force F1 trying to draw downward ... swirl flow acting force fa1, fa2 acting in the transport forward direction ...

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PCT/JP2015/056954 2014-03-11 2015-03-10 非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法 WO2015137318A1 (ja)

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JP7179391B1 (ja) 2022-07-07 2022-11-29 日本Ｗｓｔ合同会社 半導体処理装置

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CN111170013A (zh) * 2020-03-04 2020-05-19 上海睿范自动化设备有限公司 一种气悬浮运输装置

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WO2010058689A1 (ja) * 2008-11-18 2010-05-27 オイレス工業株式会社 非接触搬送装置
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
JP2010254463A (ja) * 2009-04-28 2010-11-11 Nitta Moore Co 非接触ワーク支持装置
JP2011235999A (ja) * 2010-05-10 2011-11-24 Oiles Corp 非接触搬送装置

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Publication number Priority date Publication date Assignee Title
JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
WO2010058689A1 (ja) * 2008-11-18 2010-05-27 オイレス工業株式会社 非接触搬送装置
JP2010254463A (ja) * 2009-04-28 2010-11-11 Nitta Moore Co 非接触ワーク支持装置
JP2011235999A (ja) * 2010-05-10 2011-11-24 Oiles Corp 非接触搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7179391B1 (ja) 2022-07-07 2022-11-29 日本Ｗｓｔ合同会社 半導体処理装置
JP2024008009A (ja) * 2022-07-07 2024-01-19 日本Ｗｓｔ合同会社 半導体処理装置

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