WO2015135727A1

WO2015135727A1 - Gas discharge lamp arrangement

Info

Publication number: WO2015135727A1
Application number: PCT/EP2015/053488
Authority: WO
Inventors: Harald Gross; Jan Leupold; Andreas Heisig; Udo Willkommen
Original assignee: Von Ardenne Gmbh
Priority date: 2014-03-12
Filing date: 2015-02-19
Publication date: 2015-09-17
Also published as: DE102014110677B4; DE102014110683A1; DE102014110677A1; DE102014110679A1; DE102014110678A1; DE102014110710A1; WO2015135798A1; WO2015135795A1; WO2015135904A1; DE102014110685A1; DE102014105300A1; DE102014110686A1; DE102014110671A1

Abstract

The invention relates to a gas discharge lamp arrangement, comprising a gas discharge lamp (1) with a tubular elongated lamp body (3) and a first electrode (5) accommodated in the lamp body, a first elongated electric conductor structure (10) with a first longitudinal end section (10a) which is electrically connected to a contacting section (5a) of the first electrode, the contacting section extending from said lamp body, and a first housing structure (20), which defines a cavity (26), whereby the first electric conductor structure extends through said cavity and wherein the first electric conductor structure is pre-bent once or repeatedly from a first substantially linear direction of extension to form a buffer stretching longitudinally to the lamp. Alternatively, the conductor structure can compromise a buffer section stretching longitudinally to the lamp, whereby said buffer is compressible in order to accommodate axial extensions or displacements of the gas discharge lamp.

Description

Gasen11adungs1ampenanordnung

The invention relates to a gas discharge lamp arrangement, for example a flash lamp arrangement. The invention further relates to a process chamber, for example a vacuum chamber, with such a gas discharge lamp arrangement. The

Gas discharge lamp assembly is suitable for receiving a long gas discharge lamp, i. for example, a lamp of one to several meters in length.

Gas discharge lamps and in particular flash lamps can be installed, for example, with a relatively rigid fixation in a system. This is especially true for relatively short, water-cooled flash lamps, which are embedded in a jacket tube or a so-called flowtube. Here, the sealing of electrical leads or the separation of

Cooling circuit and environment constructively, for example by means of 0-rings, which sit directly on the ends of the flash lamp on the glass body of the flash lamp done.

The longer the flash lamp, the stronger a (longitudinal) expansion of the lamp body can affect the operation, which can be caused, for example, by the explosive increase in pressure. Even assuming that the elongation can be maintained within a narrow range of less than 0.5 mm, in the case of a fixed clamping of the lamp, this can result in such a material stress, which can lead to the breakage of the so-called transition glass.

In addition to a lamp elongation due to strongly fluctuating during operation lamp internal pressures can also come in the axial direction to thermal lamp expansions and / or assembly-related displacements of the lamp with respect to two fixed clamping points. According to various embodiments, a suitable gas discharge lamp arrangement should be able to realize such axial expansions and displacements.

Axial displacement flexibility and / or

Angle flexibility can also be helpful to

Manufacturing tolerances of the lamp or storage or a plate, intermediate plate or a vacuum cap to

compensate.

In addition, a flexible bearing can be helpful to compensate for deformation of the process cover by establishing the vacuum and the associated pressure difference of about 1 bar.

In addition, it may be desirable that a suitable

Gas discharge lamp arrangement in the radial direction a

Displacement or displacement of the lamp allows to avoid overdetermination by the bearings and the electrical contacts. In addition, it may be useful to compensate for an angle at a

Lamp deflection or assembly may occur.

In general, gas discharge lamps (for example

Flash lamps), especially in the end, in the

Glass fusion of the electrode mechanically very sensitive. The gas discharge lamp may be exposed during operation and assembly forces which act on the lamp and can lead to breakage of the Elektrodeneinschmelzung.

The electrical contacting of the lamp can be done for example with a plug contact. Plug contacts can compensate for axial displacements / strains to a certain extent. If they are rotationally symmetric, they can also allow torsions. However, this flexibility is always frustrating. Once the friction is too great, the electrode melting can

be overstressed. Depending on the design of the

Contact element, usually contact blade or spring, you can compensate for radial offset and angular deviation only in the context of their travel, but always subject to a spring force.

According to various embodiments, the invention is a structurally simple, yet reliable

Gas discharge lamp assembly provided.

Additionally or alternatively, according to various

Embodiments with the invention a

Gas discharge lamp assembly provided which is compact.

Additionally or alternatively, according to various

Embodiments with the invention a

Gas discharge lamp assembly provided which is designed to be flexible, so that, for example, longitudinal expansions in

Operation or longitudinal displacements of the gas discharge lamp can be easily absorbed.

Additionally or alternatively, according to various

Embodiments with the invention a

Gas discharge lamp assembly provided a

can ensure sufficient cooling.

Additionally or alternatively, according to various

Embodiments with the invention a Gas discharge lamp assembly provided which is robust.

Additionally or alternatively, according to various

Embodiments with the invention a

A gas discharge lamp assembly is provided, which is suitable to prevent auto-ignition of the lamp.

Additionally or alternatively, according to various

Embodiments with the invention a

Gas discharge lamp assembly provided to

Use in a vacuum chamber is suitable.

Additionally or alternatively, according to various

Embodiments with the invention a

A gas discharge lamp assembly is provided which is suitable for relatively long gas discharge lamps or contains a relatively long gas discharge lamp, for example a

Gas discharge lamp (for example, flash lamp) with an axial extent and / or arc length greater than or equal to 0.5 meters, for example, greater than or equal to 1 meter, for example, greater than or equal to 1.5 meters, for example greater than or equal to 2 meters, for example greater than or equal to 2 , 5 meters, for example, greater than or equal to 3 meters, for example greater than 3.5 meters, for example greater than 4.0 meters.

According to a first aspect of this invention, according to

various embodiments a

Gas discharge lamp assembly (for example

Flash lamp assembly) a gas discharge lamp (e.g.

Flash lamp), a first, elongated electric

Have ladder structure and a first housing structure. The gas discharge lamp / flash lamp has a tubular,

elongated lamp body and a first, in the

Lamp body received electrode. The electrode can for Example as a cathode, alternatively as an anode, be formed. For example, the electrode may be made of tungsten. The electrode can be arranged, for example, at a first longitudinal end of the lamp body. The lamp body can for

Example of a quartz glass tube to be formed. As described further below, a second electrode can also be accommodated in the lamp body, for example at a second longitudinal end of the lamp body. The first, elongated electrical conductor structure has a first longitudinal end portion which leads out with a of the lamp body

Endabschnitt or contacting portion of the first electrode is electrically connected. The electrical connection may be, for example, a solder joint, for example a

Hard solder. The first, elongated electric

Conductor structure may be formed, for example, completely or at least partially by a flexible copper strand (see below). For example, with the first electrical conductor pattern, the first electrode may be connected to a voltage source

be connected. The first housing structure defines a cavity through which the first one passes

electrical conductor structure extends and in which the first electrical conductor structure to form a

Lamp longitudinal expansion buffer (for example, for receiving axial expansions and / or displacements) once or more times from a first, substantially linear

Extension direction (or extension) is pre-bent out. By pre-bent is meant that the bend or the buffer formed with it already exists before / out of operation of the lamp, so even if the lamp has not yet extended as a result of their operation. In other words, the first conductor structure is bent both in and out of operation of the lamp in the cavity, whereby a defined

Buffer portion or Leitererstrukturverformungsabschnitt for receiving / compensation of a lamp length variation is formed. The compensation is carried out in particular by a Deformation of the bending portion, ie one of the

Bend-shaped bulge or bulge may be deformed, for example due to a lamp elongation (for

Example reinforced). The buffer may additionally compensate, for example, for a radial offset. The first housing structure may be made of, for example, a suitable electrically insulating material. Of the

Cavity, for example, the electrical connection between the first electrode and the first electrical

Record ladder structure. The first, essentially linear direction of extent of the first electrical conductor structure can be, for example, the longitudinal extension direction of the

Lamp body correspond and / or to the

Connect the connecting section between the first electrode and the first conductor structure directly. By bending out the first electrical conductor structure from the first linear extension direction, a bending section or

Lamp longitudinal expansion buffers are created, the one

Longitudinal extent of the lamp body in operation and a

subsequent contraction of the same permits and

reliably compensated. The first electrical conductor structure can, for example, after the (single or multiple) bending out of the first, substantially linear extension direction back into the first, substantially linear

Extending direction be brought / be (in this case, the bending portion, for example, a meander shape or

have a meandered shape, for example an "S" shape) or, alternatively, for example be brought in a second, substantially linear extension direction, which is for example at an angle to the first, substantially linear extension direction, for example in FIG In the context of this invention, in the context of an angle specification "substantially", it is to be understood as follows: +/- 40 °, eg +/- 35 °, eg +/- 30 ° eg +/- 25 °, eg +/- 20, eg +/- 15 °, eg +/- 10 °, eg +/- 5 °, eg 90 ° +/- 5 °, 90 ° +/- 10 °, etc.

The example cylindrical lamp body can for

Example be made of glass or crystalline sapphire. The (cylindrical) lamp body has, for example, at least one arc length greater than or equal to 0.5 meters, for example greater than or equal to 1 meter, for example greater than 1.5 meters, for example greater than or equal to 2 meters, for example greater than or equal to 2.5 meters , for example, greater than or equal to 3 meters, for example greater than or equal to 3.5 meters, for example, greater than or equal to 4.0 meters. The thickness of the lamp wall or the cylinder wall can in

Generally, for example, between 0.2mm and 6mm, for example between 0.5mm and 3mm, for example between 1mm and 2.5mm for a glass substrate. The radiation duration of the

Flash lamp may be, for example, from 0.01 milliseconds to 50 milliseconds, for example from 0.1 milliseconds to 10

Milliseconds, enough. Such lamps are generally in the form of sealed glass tubes which are further filled with a noble gas, typically xenon, argon, helium or krypton, and at their ends with electrodes

are equipped. Under the action of an electric

Short duration pulse, obtained by discharging a capacitor, ionizes the gas and generates it

especially strong incoherent light. For example, flash lamps with a length of over 3.5m may have voltages between 10kV-50kV. The voltage can be approximately proportional to the length of the flash lamp. The

For example, total energy density output by flash lamps applied to the surface of a layer is between 0.1 J / cm ² and 100 J / cm ² , for example, between 1 J / cm ² and 30 J / cm ² between 2 J / cm ² and 10 J / cm ² with a pulse duration of eg 0.5 ms. At pulse durations of significantly more than 0.5 ms, the dose may also be significantly higher than 100 J / cm ² , for example up to 1000 J / cm ² . The exemplary ones described below

Embodiments and examples thereof may be used either alternatively or (if appropriate / appropriate) in common, i. in combination with one another, whereby several or all embodiments / examples can be combined with one another.

According to an exemplary embodiment, the first electrical conductor structure is designed to be flexible, in particular bendable, at least in the section of the buffer formed by it. For example, the entire first electrical

Ladder structure be flexible. But it is equally possible to have a section of the first electrical

Ladder structure rigid / rigid form, for example, the lamp facing away from the longitudinal end portion.

According to an exemplary embodiment, the

Gas discharge lamp flexibly mounted, for example, movably mounted, for example, axially movable.

According to an exemplary embodiment, the first electrical conductor structure has a first strand, for example a copper strand and / or a strand that is electrically insulated on the peripheral side. For example, the first strand is flexible, in particular bendable. The individual wires of the strand can be provided with a lacquer layer, in particular to prevent corrosion with a cooling medium and to minimize the skin effect at high currents. For example, the entire first electrical conductor pattern may be formed by or consist of a strand. This may apply, for example, to the case where the first electrode forms an anode. In the case where the first electrode is a cathode

However, for example, a so-called. Water electrode may be provided or be formed by the conductor structure, which, for example, from a massive, stiff / rigid

Metal component (for example, copper pin with gold coating) may be formed. For example, the first strand forms the above-mentioned flexible portion. For example, the strand forms the first longitudinal end portion of the first,

elongated electrical conductor structure, which is electrically connected to the led out of the lamp body end portion of the first electrode (for example

Brazing).

According to various exemplary embodiments, the gas discharge lamp / flash lamp is supported / held in such a way that it (at least) on the side of the first electrode or at the corresponding longitudinal end in the axial direction

can expand unhindered. This can be achieved, for example, with an axially displaceable lamp holder which supports / supports the corresponding longitudinal end of the lamp body, for example with the axially displaceable spacer of the type described below. Alternatively, for example, an immovable support in axial direction can be provided which of the lamp body, however, axially displaceable

is included. Optionally, according to different

exemplary embodiments the

Gas discharge lamp / flash lamp be mounted so that they are both on the side of the first electrode and on the side of the second electrode in the axial direction

can expand unhindered. For example, in this case also on the side of the second electrode, a lamp longitudinal expansion buffer according to the invention may be provided; see below.

According to an exemplary embodiment, the first electrical conductor structure may extend substantially with an L-shape through the cavity. The L-shape can have a first and a second leg, which by a curved section are interconnected. For example, the first and second legs may be substantially linear or rectilinear. The length of the two

Thighs can be either the same or different. In the bent portion, the first conductor pattern may be bent once or more. For example, you can

at least one leg (optionally both legs) and the bent portion of the first electrical conductor structure may be formed by a strand. The second leg can for

Example optionally be at least partially formed by a solid component.

As already indicated above, according to an exemplary embodiment, the first electrical conductor structure in the cavity can be bent to form an angle of substantially 90 °. For example, this 90 ° bending portion may form the above-mentioned bent portion between the two legs.

According to an exemplary embodiment, the second longitudinal end portion of the first electrical conductor structure may be led out of the cavity through a through hole in the first housing structure. For example, the bushing may be sealed using one or more sealing means, for example, O-rings, so as to avoid / limit leakage of cooling fluid in the cavity. The axial extent of the through hole may be at an angle to the longitudinal direction of the lamp body and, for example, be arranged substantially perpendicular thereto. Outside the cavity, the second longitudinal end portion may be connected to an electric power source, for example. The described embodiments "L-shape", "angle", for example 90 °, etc., for example, a sufficient

Allow flexibility in a small / compact space.

According to an exemplary embodiment, the

A gas discharge lamp assembly further comprising a jacket tube in which (e.g., at least) a central portion of the

Lamp body forming a cross-section

annular gap is received at a radial distance. For example, such a jacket tube or "Flowtube" can be made of a material that is the same as or similar to that of the lamp body The jacket tube can, for example, serve to protect the lamp body or prevent fragments of the lamp body from failing in the lamp body Environment and the vacuum chamber, and may also receive a cooling fluid for cooling the lamp.

According to an exemplary embodiment, the first housing structure may be at least partially (for example completely) formed by a first head part, which is connected to a first longitudinal end of the jacket tube and is, for example, in fluid communication therewith. The first headboard can for

Example be formed as a separate component to the jacket tube. The first head part may for example consist of a

electrically insulating material, and may be, for example, a ceramic component, for example, containing alumina. For example, a first portion of the first header may be connected directly to the jacket tube, for example, using one or more

Sealants, for example O-rings. For example, the first portion may be hollowed around one

To allow implementation / recording of the first conductor structure and / or an end portion of the lamp body. The through hole described above may be formed, for example, by / in another portion of the first header. The For example, the first header forms at least a portion of the cavity through which the first one passes

Ladder structure to form the Lampenlängsehnungs- buffer extends. For example, the first header may be passed through a vacuum chamber wall portion, for example, using one or more sealants, for example O-rings.

According to an exemplary embodiment, at least the above-described annular gap, for example, the cavity of the housing structure, be filled with a cooling fluid and for example flowed through by this. The cooling fluid may be, for example, a cooling fluid, for example, cooling water, for example, electrically conductive cooling water. The gas discharge lamp can thus according to various

Embodiments are operated in a water-cooled Flowtube, optionally also / additionally in a water-cooled end head. As a result, an appropriate cooling of the

Gas discharge lamp reaches, for example, also of their so-called transition glass, which is located at the extreme end of the tapered lamp body end portion where the outer end portion of the first electrode is led out of the lamp body. Furthermore, this can increase the robustness of the gas discharge lamp arrangement, since the

Gas discharge lamp, for example, the entire tapered portion of the lamp body (including the so-called transition glass), is located in the cooling water, so that the

Incompressibility of the water leads to a higher burst limit of the lamp. For example, the cooling of the entire lamp can be done exclusively with water, i. for example, without the use of compressed air.

According to an exemplary embodiment, the first electrical conductor structure in the cavity may have an electrically conductive, exposed portion, which is connected to the Cooling fluid is in direct contact or can be brought.

Otherwise, the first electrical conductor structure in the cavity can be electrically insulated on the circumference. This exposed portion may be, for example, a so-called.

Water electrode form (when using water as a cooling medium) and as already stated above, for example, be formed by a solid metal component, for example a copper pin, which is coated with a protective layer, for example a gold layer. The exposed portion or water electrode may be electrically connected to the strand described above (for example, by soldering), thereby forming the second longitudinal end portion of the first conductor pattern and / or the other leg of the L shape. For example, in the case of the exposed portion, the first electrode may be formed as a cathode, and the cooling medium may be an electrically conductive medium. The one with the

exposed section reached contact of the electrical supply line with the cooling medium, for example cooling water,

allows a prevention of auto-ignition of the lamp. For example, no electrical contact of the electrical supply line with the cooling water is provided on the anode side of the lamp (see below) in order to prevent a short circuit with an optional wire ignition or auxiliary electrode embedded in the cooling medium. In the latter case, for example, the cathode may be at a high negative voltage relative to the grounded anode, and the

Ignition wire, which is inserted from the anode side into the jacket tube, ends, for example, at a long distance from the cathode. Alternatively, the cathode may be grounded, for example, with the anode at a high positive voltage. In this case, the ignition wire is inserted from the cathode side and ends at a long distance to the anode, wherein the cathode is not electrical

Contact with the cooling water must. The anode has one electrical contact with the cooling water, the cathode, however, not.

According to an exemplary embodiment, the

Lamp longitudinal expansion buffers be adapted to an axial stretching or displacement by deformation of the

Accommodate / compensate bending section.

According to an exemplary embodiment, at least the gas discharge lamp / flash lamp in a vacuum chamber

be recorded / arranged, for example, together with the surrounding the flashlamp casing jacket tube. For example, the head part can also be accommodated (at least in sections) in the vacuum chamber. In other words, the present invention also provides a vacuum chamber having a as described herein

Gas discharge lamp assembly / flash assembly is equipped.

According to an exemplary embodiment, the

Gas discharge lamp assembly further comprises a first

Spacer having a first, tapered

Receiving longitudinal end portion of the lamp body. The first

Spacer may for example consist of an electric

be made of insulating material. The first

Spacer may, for example, from a suitable

Plastic, for example, be made of PTFE. PTFE has high UV compatibility and good flexibility. The first

Spacer may, for example, with a central opening or central receptacle for holding the tapered

Be provided lamp section. For example, the first spacer may have a plurality of radially extending legs with which it bears against the inner circumferential wall of the flow tube / housing structure. For example, the first spacer may be a tripod or quadrupole or general purpose. Be formed multi-legged. The first spacer may be designed to be permeable to the cooling medium, for example, so that the cooling medium in the axial direction over the

Spacer can flow away; This can be achieved, for example, with the embodiment as a tripod. For example, the first spacer may be axially movably received in the first housing structure, for example, axially movable in a longitudinal end portion of the jacket tube. The first

Spacer, for example, record the longitudinal end portion of the lamp body axially movable. By means of the

Spacer, for example, the above-mentioned annular gap can be formed, and the lamp body can be safely and reliably supported in the jacket tube, for example, without hindering the longitudinal extent of the lamp during operation. In other words, for example, with a longitudinal extent of the lamp, the spacer may be pushed axially outward by the latter so that the spacer will yield / yield to the longitudinal expansion.

According to an exemplary embodiment, the

Gas discharge lamp assembly further comprise a first electrically insulating sheath, which surrounds (at least) the electrical connection between the first electrode and the first electrical conductor structure circumferentially. The sheath can be made of silicone, for example, and be formed for example by a silicone shrink tubing. Optionally, for example, the sheath can also be used to insulate the first strand, in which case the first

Sheath extends substantially the entire length of the strand, and e.g. a chemical reaction with the cooling medium, e.g. Prevents water. However, for example, the strand may also be provided with a separate insulation, in which case the sheath does not extend over the entire strand

needs to extend. In the case of the water electrode or the exposed portion, for example, at the electrical Connection between the strand and the exposed portion may be provided another electrically insulating sheath, or the first sheath extends, for example, over the electrical connection between the strand and

exposed section. For example, a free end of the first sheath may form a stop limiting the axial range of motion relative to each other between the first spacer and the lamp body, such that, in the case of an axial shrinking movement of the lamp body, the stop is on the (outer) side of the lamp body

Attach spacers and take them with you. This represents a particularly simple but still reliable

Possibility to place the spacer at a

Shrink movement of the lamp with the lamp to move back to ensure the support function. However, the stop need not necessarily be formed by the casing, and it is also conceivable, the lamp body axially immovable in the

Pick up spacers.

According to an exemplary embodiment, at least the gas discharge lamp and the first electrical

Conductor structure (for example, the first strand and the optional water electrode) may be formed as an integral assembly whose components are interchangeable together. For example, the first spacer may also be part of the integral assembly or may be interchangeable with the lamp. That is, the first electrical conductor structure (for example, both the stranded cable and the water electrode) is part of the manufactured flashlamp and is changed together with the flashlamp, so that the requirements for waterproofness, mechanical stability due to currents in the kiloampere range and corrosion protection less are high than with a component, which is over the entire life of a flash unit over several years in operation. According to an exemplary embodiment, the gas discharge lamp arrangement may further comprise: a second electrode accommodated in the lamp body, a second,

elongated electrical conductor structure and a second housing structure. The second electrode may be formed, for example, as an anode. The second conductor pattern may have a first longitudinal end portion connected to one of

Lamp body led out end portion of the second

Electrode is electrically connected, for example by soldering, for example brazing. The second housing structure may define a cavity through which the second electrical conductor pattern extends and in which the second electrical conductor structure forms a cavity

Lamp longitudinal expansion buffer is vorgebogen one or more times from a first, substantially linear extension direction out. The above for the first conductor structure and the first housing structure above applies analogously to the second

Conductor structure and second housing structure (except for the electrically conductive exposed section, see below). For example, the second electrical conductor structure may also be formed by a (second) strand.

According to an exemplary embodiment, the

Gas discharge lamp assembly further comprising: a second head part and / or a second spacer and / or a second electrically insulating sheath. For this

Elements / components applies analogously to what has been said for the first head part, the first spacer and the first sheath.

The integral assembly described above can be used as a further component, for example, the second electrical

Have ladder structure. In this case, therefore, the two (anode-side and cathode-side) conductor structures can be replaced together with the gas discharge lamp. According to an exemplary embodiment, the first head part and the second head part can be over the jacket tube

be in fluid communication with each other so that the entire gas discharge lamp in a cooling fluid, for example

Cooling water, is absorbable.

According to an exemplary embodiment, the second electrical conductor structure - unlike the first

Conductor structure in the case of a water electrode - be completely electrically isolated in the cavity of the second housing structure. In this case, the second electrical

Ladder structure, for example, be formed entirely of a strand.

According to a second aspect of this invention, according to

various embodiments a

Gas discharge lamp assembly (for example

Flash lamp assembly) comprises a gas discharge lamp (for example a flash lamp) which has a tubular, elongate lamp body and a first, (at least partially) received in the lamp body electrode. The first electrode may for example be designed rod-shaped. The first

For example, the electrode may be fused into the lamp body. The gas discharge lamp assembly may further include a first electrical conductor structure having a first electrical conductor structure

End portion which is electrically connected to the first electrode (for example, on a lead out of the lamp body electrode contacting portion of the first electrode). The first electrical conductor structure may be arranged, for example, to electrically contact the first electrode, eg to electrically connect it to a voltage source (directly or indirectly, for example indirectly via a plug contact arrangement between conductor structure and voltage source). The first electrical conductor structure has a

electrically conductive (for example mechanically flexible) lamp longitudinal expansion buffer section (hereinafter also

only "buffer section"), which for receiving axial expansions or axial displacements of

Gas discharge lamp is compressible. The buffer section is thus set up in such a way that it is compressed during assembly as a result of axial expansion of the lamp during operation and / or axial displacement of the lamp. In other words, the buffer portion is compressed due to axial expansion or axial displacement of the lamp to thereby accommodate or compensate for the axial expansion / displacement of the lamp. For example, the buffer portion has an extension in a direction that is substantially parallel or identical to the longitudinal direction of the

Gas discharge lamp, wherein the buffer portion is compressed or compressed due to the axial expansion or displacement of the flash lamp while shortening this extension.

The buffer portion may also be bendable to accommodate radial displacement or offset, i. the electrically conductive

Lamp longitudinal expansion buffer section may also be such

be arranged such that a radial displacement of the lamp leads to a bending of the buffer portion.

For example, the buffer portion may be considered an electrically conductive variable spacer, that is, an electrically conductive one

Connecting piece, which has a variable distance between lamp and voltage source or fixed electrical clamping

allows. The distance can be at least in the axial

Direction of the lamp vary, for example, also in the radial direction. Further, the buffer portion may be further configured to compensate for some torsion.

By means of the electrically conductive, mechanically flexible

Lamp longitudinal expansion buffer section can thus vividly so for example, a sufficient / appropriate mechanical decoupling of / between the lamp or lamp mounting and voltage source or fixed electrical clamping are possible.

With the lamp arrangement according to this aspect of the invention, axial displacements can be compensated for in a simple and yet efficient manner, with very little effort

Maintaining an extremely compact installation space, i. without the requirement of a large installation space.

The exemplary ones described below

According to an exemplary embodiment, the

For example, the buffer portion may be formed by an elongated body (e.g., a linear member) due to axial expansion of the lamp (for example, during operation of the lamp) or axial displacement of the lamp while shortening its longitudinal extent (particularly under

Maintaining its linear shape) to compensate for this expansion / displacement is axially compressed (esp. Along its longitudinal extent). The longitudinal axis or longitudinal extent The elongated body may be, for example, substantially parallel or in an axial extension to the longitudinal axis or longitudinal extent of the lamp. The elongate body may have in the longitudinal direction, for example, a substantially straight / linear extension or a substantially straight / linear axis.

For example, the elongated body may be elongated

Hollow body, for example, with an inner cavity which extends in the longitudinal direction through the body. The elongated body can thus, for example, tubular or

be formed tubular.

According to a possible embodiment, the buffer section may, for example, consist of one or more electrically conductive ones

Be made wires (for example, metal wires). The one or more wires can, for example, the (possibly

porous) form the circumferential wall of the elongated hollow body.

For example, the buffer portion may be formed by a flexible tube member formed of a plurality of wires. The wires can form, for example, a wire mesh or wire mesh, from which in turn the tubular element is formed. The hose member may then be referred to as a wire mesh hose or wire mesh hose. The wire fabric hose or

Wire mesh hose can be designed, for example, in such a way that it can be compressed axially under a change in diameter or extension (for example in the case of a very large diameter)

low spring forces), and also bendable and rotatable.

Alternatively, the buffer portion may be one or more of a flexible wire member, for example

wound / wound wires are formed. The individual turns are arranged, for example, at a distance from each other, that is, do not lie against each other. For example, several wires can be arranged side by side with their longitudinal extension and, for example, twisted together. The one or more wires can become hollow, for example

Cylindrical, conical or barrel shape wound / wound. Illustratively, the flexible wire element can thus be designed, for example, essentially in the shape of a helical spring. Here, too, both longitudinal expansions / longitudinal displacements and radial displacements of the lamp from / with the

Record buffer section.

According to another possible embodiment of the

Buffering section, for example, of one or more

be formed meandering curved electrically conductive bands (for example, metal bands). For example, a plurality of metal bands may be arranged one above the other or connected in parallel. The meander-shaped curved / wavy band can be clearly compressed accordion-like, to absorb longitudinal strains of the lamp. In addition, according to this embodiment, radial displacements of the

Buffer section are added.

The first electrical conductor structure can, for example, directly with the electrode or from the lamp body

led out electrode-contacting portion of the first electrode to be connected.

The first electrical conductor structure may, for example, be fixed to the electrode or the lamp body

led out electrode contacting portion of the first electrode, for example by soldering.

In principle, the buffer section can be one of the lamps

facing end portion of the first electrical

Form a ladder structure, for example in the case of a direct, fixed connection of electrode and conductor structure to be soldered directly to the former.

However, the first electrical conductor structure may also have an (intermediate) connector, which is electrically connected on the one hand to a first end of the lamp longitudinal extension buffer section, for example by means of a

Press connection, and on the other hand electrically connected to the first electrode, for example, fixed, for example by means of a solder joint.

Such a connector may be formed, for example, electrically conductive.

For example, the connector may have an opening at a first end into which a rod-shaped end portion of the electrode or a rod-shaped end portion of the electrode-contacting portion is inserted. The rod-shaped end portion may be soldered to the connector in the retracted state, for example.

The lamp longitudinal expansion buffer portion may, for example, be press-bonded to the connector using a support projection or support pin (for example, at a second end of the connector).

For example, the connector may have a (first)

The end portion of the lamp longitudinal extension buffer portion together with a separate support pin receiving a sleeve, wherein the end portion of the lamp longitudinal extension buffer portion is pressed by the separate support pin against the connector.

Alternatively, from the connector, for example

Support projection be integrally formed and a (first) end portion of the lamp longitudinal extension buffer portion on the Support projection of the connector can be applied and pressed against this, for example using a press ring.

For example, the first electrical conductor pattern may further include a contact piece electrically connected to a second end portion of the lamp longitudinal extension buffer portion, for example by means of a press connection.

The contact piece can be, for example, as a male or

female connector part (e.g., male or female). The contact piece can thus, for example, with a contact opening for receiving a

Contact pin / pin or be formed with a contact pin for insertion into a contact opening. To the

An example is the contact piece at a first end with the second end of the lamp elongation buffer section

electrically connected, and is formed at a second end as a male or female connector part.

The contact piece may, for example, be connected with its end formed as a male or female connector part to a connector arrangement (see below), which in turn is connected to the voltage source.

The lamp longitudinal extension buffer portion or its second end may be press-bonded to the contact piece, for example, using a support projection or support pin.

The contact piece can, for example, a (second)

End section of the lamp longitudinal extension buffer portion together with a separate support pin receiving a sleeve, wherein the end portion of the lamp longitudinal extension buffer portion is pressed by the separate support pin against the contact piece. Alternatively, from the contact piece, for example, a support projection may be integrally formed and an end portion of the lamp longitudinal expansion buffer portion may be formed on the

Support projection of the contact portion are applied and pressed against this / sin, for example by means of a

Press ring.

For example, the first electrical conductor pattern may have an elongate, substantially rectilinear extent.

This can, for example, with the electrode or their

Contacting section substantially rectilinear

be arranged one behind the other.

The first electrical conductor structure may be connected, for example, via a connector arrangement with the voltage source

be electrically connected, wherein the connector assembly, for example, substantially perpendicular to the

Lamp longitudinal extension buffer portion and / or the entire first electrical conductor structure may extend. The

Connector assembly may include, for example, a female contact and a complementary contact pin or plug. For example, one member may be received by the socket and plug in a first header (see below), the other member being received by the socket and plug in a common plate or process chamber cover (see below).

As already explained above, the

Lamp longitudinal extension buffer section further be adapted to receive a radial displacement or a radial offset of the lamp and / or to compensate for torsions and / or to compensate for an angular displacement of the lamp,

in addition to balancing the axial

Shifts / longitudinal strains. For example, the Buffer section to be additionally bendable and / or rotatable configured.

The lamp assembly may further include, for example:

a jacket tube in which a central portion of the

Lamp body forming a cross-section

annular gap is received at a radial distance, and / or

a first head portion defining a cavity in which a first, tapered longitudinal end portion of the lamp body is received and in which the first electrical

Conductor structure extends (for example, the conductor structure is completely absorbed in the cavity).

In the annular gap, for example, a cooling fluid, for example cooling fluid, for example cooling water, may be accommodated for cooling the lamp.

The jacket tube can be made, for example, of transparent material, for example quartz glass.

The head part can, for example, be made of an electric

insulating and resistant to light radiation,

temperature-resistant material such as ceramic or fluorine plastic (PTFE or PVDF) to be made.

The jacket tube can, for example, on the head part

be supported / stored.

The jacket tube and the head part can be sealed against one another, for example, so that escape of cooling fluid from the jacket tube is avoided, for example using one or more sealing elements, for example sealing rings. For example, the jacket tube can be applied to the first header part or a projection section / front-side section of the

Headboard pushed / put on, where on the

Inside the jacket tube is sealed.

For example, the cavity may be formed as a passageway extending through the head portion (other than a blind hole) and opening into a first opening facing the lamp and a second opening facing away from the lamp is. Of the

For example, the cavity may be elongated, and may extend, for example, with its longitudinal axis at least predominantly parallel or in extension to the longitudinal axis of the lamp. The cavity may, for example, have an L-shape with the conductor pattern received in the long leg.

The lamp body can, for example, with a first,

tapered longitudinal end portion to be received axially movably in the cavity, i. so on / in the headboard

be supported / stored that at least one axial

Displacement of the longitudinal end portion of the lamp body is possible. The storage is designed as soft as possible, for example, to initiate no high local stresses in the lamp material. By way of example, soft seals / bearings made of FKM or FFKM or PTFE may be mentioned. For example, the materials may be selected to be resistant to heat and UV radiation. In addition, the rejuvenated

Longitudinal portion of the lamp body to be sealed against the peripheral wall of the cavity. The cavity can therefore be sealed inwards towards the optional cooling fluid.

For example, the first head part may be formed as a cooled head part, or be crossed by one or more cooling channels. For example, in the first header one or more cooling channels may be formed, which open at one end face (the lamp-facing side) of the head part in a respective opening for the admission or discharge of cooling fluid. Thus, cooling fluid can be supplied / removed through the openings to the annular gap described above. Several cooling channels can, for example, in the cavity

Cross section in the circumferential direction at least partially surrounded (at least along a longitudinal section of

Cavity).

The cavity may, for example, open at the end facing away from the lamp in a gas inlet opening, wherein in the first head part further comprises one or more gas channels

are formed, which at one end (which is arranged for example adjacent to the gas inlet opening and / or facing away from the lamp) in a respective

Gas outlet open and which at the other end (which is, for example, further away from the gas inlet opening and / or the lamp facing) in fluid communication with the cavity, so that gas for the purpose of cooling and / or leakage discharge through the Gas inlet opening can flow into the head part, then the cavity and the respective gas channel can flow through one behind the other and then can flow through the gas outlet. The at least one gas channel can be at his

Gas inlet opening via a peripheral groove on the outer circumference of the head part with the cavity in fluid communication. The circumferential groove may for example be positioned between two sealing elements, which serve for sealing the head part relative to the jacket tube.

The lamp assembly may include, for example, a plurality of

Have gas discharge lamps, which are connected at their respective first longitudinal end with a respectively associated first head part, wherein the first head parts on a common plate are mounted. For example, the plate may form or may be a process chamber cover for covering an opening of a process chamber

Process chamber cover be attached. For example, the plate may have a channel structure that is configured to distribute a cooling fluid to the first headers, i. in the one or more cooling channels of the respective head part. Further, the plate may, for example, a gas inlet to

Feeding gas into the respective cavity and a

Form gas outlet for discharging gas from the respective gas channel.

The lamp assembly may further include, for example:

a second, received in the lamp body electrode and

a second electrical conductor pattern having a first end portion electrically connected to the second electrode,

wherein the second electrical conductor structure is a

electrically conductive (for example, mechanically flexible)

Has lamp longitudinal extension buffer portion which for receiving axial expansions or displacements of the lamp

is compressible.

The first electrode may, for example, at a first

Longitudinal end of the lamp may be arranged, whereas the second electrode is arranged at the other longitudinal end of the lamp. The second electrode and the second conductor pattern may be similar to the first electrode and the first, respectively, for example

Ladder structure be formed (see above). Also, at the other longitudinal end of the lamp, a second head part may be provided, on which the jacket tube is supported and in which the other longitudinal end of the lamp is accommodated. For example, the first header and the second header may be slab-topped be connected to each other, for example by means of the common plate described above.

According to various embodiments, a

Process chamber arrangement, for example as

Vacuum chamber arrangement is formed, a

Gas discharge lamp assembly according to the first aspect or the second aspect of this invention.

According to various embodiments, the

Gas discharge lamp assembly according to the first aspect or the second aspect of this invention or the

For example, the substrate may be a 3.3m x 6.0m x 0.1m architectural glass.

The invention will be explained in more detail by means of exemplary embodiments with reference to the drawing. The drawing shows in:

Figure 1 shows a gas discharge lamp assembly / flash assembly according to a first embodiment of the invention, which is applicable for example to the cathode region of a flash lamp and shows an optional water electrode;

Figure 2 is a gas discharge lamp assembly / flash assembly according to a second embodiment of the invention, which is applicable, for example, to the cathode region of a flash lamp and shows an optional water electrode;

FIG. 3 shows a gas discharge lamp arrangement / flashlamp arrangement according to a third embodiment of the invention, which is applicable, for example, to the anode area of a flashlamp, shows an optional ignition wire terminal and is applicable, for example, in combination with the first or second embodiment;

Figure 4a shows a first embodiment of a watertight electrical connection for use in the present invention;

Figure 4b shows a second embodiment of a watertight electrical connection for use in the present invention; Figures 5a to 5e a gas discharge lamp assembly according to a fourth embodiment of the invention; 6a to 6e, a gas discharge lamp assembly according to a fifth embodiment of the invention and the figures 7a to 7f, a gas discharge lamp assembly according to a sixth embodiment of the invention.

Figure 1 shows a flash lamp assembly according to a first embodiment of the invention. The inventive

Flash lamp arrangement was used here by way of example on the cathode region of a flash lamp. In addition, an optional water electrode to prevent auto-ignition is shown. The flash lamp arrangement shown in Figure 1 is analogously applicable to the anode region of a flash lamp, in which case the water electrode can be replaced by, for example, an electrically insulated metal component or a corresponding extension portion of the strand. In addition, the cathode side shown in FIG. 1 can be combined either with a "conventional" anode side or alternatively with an anode side, which is also known as an "anode" Flash lamp assembly according to the invention is designed, such as

Example of an anode side according to FIG. 3.

The flash lamp assembly of Figure 1 has a

Flashlamp 1, a first, elongated electric

Ladder structure 10, a first housing structure 20 and a lamp holder or lamp suspension, here exemplified in the form of a first spacer 30th

The flash lamp has a tubular, elongated lamp body 3 and a first, in the lamp body

received electrode 5, here in the form of a cathode K. The flash lamp further comprises a non-illustrated in Figure 1 second electrode, which is also received in the lamp body 3 and formed as an anode. The first electrode is connected via the first, elongated electrical conductor structure 10 to a voltage source (not shown).

To this end, a first longitudinal end portion 10a of the conductor pattern is provided with an end portion (e.g., contacting portion) 5a of the first electrode led out from the lamp body 3

electrically connected, here exemplifying a so-called.

Lotschiffchen or Lotverbindungsstück 18, wherein a second longitudinal end portion 10b, which faces away from the cathode, directly or indirectly with the voltage source

connected / connectable.

In FIG. 1, a horizontally arranged / suspended flash lamp or its one longitudinal end is shown. Alternatively, the flash lamp may be arranged / suspended with its longitudinal axis in the vertical direction, for example. For example, the flash lamp can have an arc length of 3 to 4 meters. The longitudinal direction is indicated in Figure 1 by the double arrow "L". The first housing structure 20 is formed in FIG. 1 by way of example by a first head part 22 and a longitudinal end section 24a of a jacket tube, but may alternatively also be formed completely by the head part 22, for example. The first

Housing structure 20 defines and defines a cavity 26 through which the first electrical

Conductor structure 10 extends and in which the first electrical conductor structure is bent once or more times from a first, substantially linear extension direction to form a lamp longitudinal expansion buffer. In Figure 1, in the cavity 26 and the electrical connection

added between the cathode and the conductor structure.

The first housing structure 20 is arranged predominantly in a vacuum chamber 100 in FIG. 1 and penetrates with a section a vacuum chamber wall 104 which separates the vacuum chamber 100 from the environment 102. The passage is here sealed with a sealant "D." The same applies to FIG

Execution of the first ladder structure by the first

Housing structure.

In the jacket tube 24 is a central portion of the

Lamp body forming a cross-section

annular gap 28 received at a radial distance.

This annular gap 28 can of a cooling medium, here

Cooling water, flows through / be to cool the lamp. The annular gap 28 is here with the cavity 26 in

Fluid connection, so that the cooling medium on the lamp holder or the spacer 30 away in the first conductor structure receiving cavity 26 can flow (or vice versa) to there the first conductor structure and the tapered lamp body portion 3a, including the so-called transition glass the led out

Surrounding electrode section to cool. For example, as shown in FIG. 1, the first header 22 may be in fluid communication with the first longitudinal end 24 a of the jacket tube 24 via one or more sealants D, here two 0-rings. For this purpose, the first head part can be provided, for example, with a hollow, projecting connecting section, onto or into which the first longitudinal end 24a of the jacket tube 24 is inserted or inserted.

The first electrical conductor structure 10 is here

illustratively formed of a flexible strand 12 (eg, copper strand) and an optional water electrode 14. The water electrode can, for example, be made of a solid

Copper component be formed with a

Corrosion protection coating is coated. The strand 12 is electrically connected at its one longitudinal end via the optional connector 18 to the cathode and electrically connected at its other longitudinal end to the water electrode.

Here, by way of example, a continuous first electrically insulating sheath 16 extends between the two electrical connections and over them

is exemplified by a silicone shrink tubing and which is flexible as the strand.

As can be seen from FIG. 1, the first extends

electrical conductor structure 10 according to this exemplary embodiment substantially with an L-shape through the cavity 26. In this case, the strand 12 forms a first leg, and the water electrode 14 forms a second leg, and the two legs are connected by a bent portion. The bent portion is also formed by the (flexible) strand 12 and is here

exemplary bent exactly once, here exemplifying at an angle of substantially 90 °. It should be noted that the first conductor pattern in the bent portion also may be bent several times, for example to / in a meandering shape, and that also an angle other than 90 ° can be selected. The first leg or the

corresponding, the cathode-facing portion of the strand 12 may, for example, as shown in Figure 1 substantially in the longitudinal direction L of the lamp or extend parallel thereto, and the second leg or the optional

Water electrode (alternatively, for example, a

Extension portion of the strand) may, for example, as shown in Figure 1 is substantially transversely, for example in

Extend substantially perpendicular to the longitudinal direction L of the lamp. As shown in FIG. 1, the respective limb may, for example, have a substantially rectilinear extent.

As can also be seen from FIG. 1, the second longitudinal end section 10b of the first electrical conductor structure 10 can be led out of the cavity 26 through a through hole 21 in the first housing structure. The bushing may be sealed with a suitable sealant, here in the form of two O-rings. For example, as shown in Figure 1, the through-hole may be provided at an upper portion of the housing structure or end cap, whereas the conductor structure enters the cavity through a side opening (with the lamp horizontally disposed). As a result, a flexible and compact lamp arrangement can be achieved. As shown in FIG. 1, the axial extension of the through-hole may be arranged at an angle, for example substantially perpendicular thereto, to the longitudinal extension direction of the lamp body, for example. Outside the cavity or the vacuum chamber, the lamp or the conductor structure can be connected to the voltage source (not shown). As mentioned above, the first electrical conductor structure 10 in the cavity 26 may include an electrically conductive, exposed portion 14 that communicates with the cooling fluid, here

Cooling water is in direct contact and of which a so-called water electrode is formed. With the

Water electrode, the cooling water can be set to potential to avoid auto-ignition of the lamp or to increase the self-ignition voltage.

The lamp holder or lamp suspension / support, here exemplarily in the form of the first spacer 30, is designed such that it allows an axial longitudinal extent of the lamp body and / or an axial lamp displacement by a certain amount during operation or during assembly ,

In FIG. 1, during operation, for example, the longitudinal end 3a of the lamp body 3 can shift to the left by several millimeters, whereby the first conductor structure 10, in particular its bent portion, is deformed. In the

subsequent contraction of the lamp (movement of the longitudinal end 3 to the right), the conductor structure, in particular its curved portion, again deformed. The longitudinal expansion of the lamp body according to this embodiment is thus in the bent portion under a deformation thereof

recorded.

According to this exemplary embodiment, the

Lamp holder in the form of the first spacer 30th

provided receiving a first, tapered longitudinal end portion 3a of the lamp body, for example in a radially central opening or receptacle. The first spacer 30 is axially movable in the first

Housing structure 20 and the longitudinal end portion 24a of the

Casing tube 24 was added. For this purpose, the first

Spacer with play in the first housing structure 20 and be included in the jacket tube. For example, the first spacer may be made of PTFE. For example, the first spacer may be the longitudinal end portion of the

Lamp body 3 record axially movable. The spacer may, for example, be supported on the inner circumferential wall of the housing structure 20 or of the jacket tube 24 via a plurality of legs.

The cathode-facing free end of the first electrically insulating sheath 16, which surrounds at least the electrical connection between the first electrode 5 and the first electrical conductor structure 10 circumferentially, for example, form a stop 16a, the axial

Range of motion relative to each other between the first

Spacer 30 and lamp body 3 limited so that strikes at an axial shrinking movement of the lamp body, the stop on the lamp body side facing away from the spacer and entrains it. For this purpose, for example, the outer diameter of the sheath be chosen to be larger than the diameter of the receptacle / opening in the spacer.

The flashlamp 3 shown in FIG. 1 and the first electrical conductor structure 10 may be designed, for example, as an integral subassembly and replaced together. That is, both the stranded wire 12 and the water electrode 14 may be part of the manufactured flashlamp 1 and replaced with the flash lamp, so that the

Requirements regarding watertightness, mechanical

Stability due to currents in the kiloampere range and corrosion protection are less high compared to one

Component, which over the entire life of a

Flash system is operated for several years.

Figures 4a and 4b show possible embodiments of a watertight electrical connection for use in the present invention. The watertight connection can be applied to both the connection between the first electrode and the first conductor structure as well as to the

Connection between first strand and optional

Water electrode within the first conductor structure. In the case of the optional water electrode can be two separate

Insulations / sheaths or alternatively - as shown in Figure 1 - a continuous insulation / sheathing

be provided.

With reference to Figure 4a, the electrical connection

between the strand 12 and the water electrode 14 (or the end 5a of the first electrode 5 led out of the lamp body), for example using a jacket 16 (for example in the form of a hose, for example (soft) silicone hose or PTFE hose / coating ), which is attached over the joint or pulled over the same, and to be attached to the ends of fixation 16a (for example in the form of a string or wire) done.

With reference to Figure 4b, the electrical connection

between the strand 12 and the water electrode 14 (or the end 5a of the first electrode 5 led out of the lamp body), for example, using a sheath 16 in the form of a heat-shrinkable tube which is attached over the joint, and an epoxy - Resin 16b take place, which before attaching the

Shrink tubing in still pasty form on the

Transition point / junction is applied.

Subsequently, the shrink tube can be heated so that it contracts. The pasty resin is thereby distributed in the cavities and then cured.

The above two methods are merely exemplary, have been proven in practice, however, for the Alternative to Figure 4a, a larger choice of material is available or hoses with a higher UV stability can be used against shrink tubing.

FIG. 2 shows a flash lamp arrangement according to a second embodiment of the invention, which is similar to FIG

Flash lamp assembly according to the first embodiment is also applicable to the cathode region of a flash lamp and shows an optional water electrode. The following is therefore primarily on the differences to the first

Embodiment received.

In FIG. 2, it is also easy to see how the free end of the sheath facing the lamp forms a stop with respect to the spacer, the latter at a distance

Shrink movement of the lamp can take.

In Figure 2, the spacer 30 is located at an axially outermost position in which it abuts a portion of the head portion 20. However, the corresponding portion of the head portion 20 may be reset so that it does not come to the shown stop.

Unlike in the first embodiment, the stranded wire 12 is here provided with a separate / own insulation, and the two electrical connection points water electrode strand and stranded electrode are provided with a separate casing 16 or 17, which respectively form a watertight insulation. instead of the continuous casing of FIG. 1

Further, in Figure 2, a water connection "W" and a

electrical connection "E" shown, which are not shown in Figure 1. Furthermore, it can be seen in FIG. 2 that the head part belongs to the

Example may be formed in two parts and that the

Cavity 26 for receiving the first conductor structure for

Example may be formed solely by the headboard.

Figure 3 shows a flash lamp assembly according to a third embodiment of the invention, which is applicable, for example, to the anode region of a flash lamp and a

optional ignition wire connection P shows. The flash lamp arrangement shown in FIG. 3 can also be used analogously to the cathode region of a flash lamp (in the case of a design of the

Cathode side without water electrode). In addition, the anode side shown in FIG. 3 can be equipped either with a "conventional"

Cathode side or alternatively with a cathode side

are combined, which also as inventive

Flash lamp assembly is formed, such as a cathode side of Figure 1 or 2.

In the following, the differences between the third embodiment and the first or second embodiment are primarily discussed. Here, the case is described that the

Anode side of Figure 3 in combination with a

Cathode side is provided according to Figure 1 or 2, so that, for example, by a second electrode 7, a second, elongated electrical conductor structure 40, a second spacer 60, a second housing structure 50, a second head portion 52, etc. is spoken.

As shown in Figure 3, the second electrode 7 is formed here as an anode. The led out of the lamp body 3 end 7a of the anode is by means of a Lotschiffchens or

Connector 48 is connected to a longitudinal end 40a of the second electrical conductor structure. The second electrical conductor structure 40 is here alone formed by a second strand 42, which in a second cavity 56 of a second Housing structure 50 is added. The other longitudinal end 40b of the second strand 42 is disposed outside the cavity where it is connected to an electrical voltage source.

Similar to FIG. 2, in the cavity 56 of the second housing structure 50, the second electrical conductor pattern 40 is once out of its first, substantially linear, forming a (second) lamp longitudinal expansion buffer

Extension direction pre-bent.

An essential difference to the figures 1 and 2 is that in Figure 3, no water electrode is provided, but the second electrical conductor structure 40 in the

Cavity 56 of the second housing structure 50 completely

electrically isolated due to a non-sketched optional ignition wire in the jacket tube and around a

Short circuit to avoid.

The second electrically insulating sheath 46, the second head part 52 and the second spacer 60 may, for example, be formed analogously to the first electrically insulating sheath 16, the first head part 22 and the first spacer 30 from FIG. 2, respectively.

The integral assembly of lamp 1 and first conductor structure 10 described with reference to FIG

Component of the second electrical conductor structure 40th

have, so that together with the lamp and the two electrical conductor structures are changed.

The first head part 22 of Figure 1 or 2 and the second

Head part 52 from FIG. 3 can be transferred via the jacket tube 24

in fluid communication with each other, so that the entire flash lamp 3, including the two tapered

Longitudinal end portions, is receivable in a cooling fluid. 3b also designates a second, longitudinal tapered end section of the lamp body, 46a designates a second stop, which is formed by the second jacket 46, and 51 denotes a through hole in the second

Housing structure 50 and de m second header 52 denotes.

Referring to Figs. 5a to 5e, a gas discharge lamp assembly according to a fourth embodiment will be described below

Embodiment of the invention described.

As shown in Figures 5c and 5d, the

A gas discharge lamp assembly according to this embodiment comprises a gas discharge lamp 1 (hereinafter also referred to simply as "lamp"), which may be configured, for example, as a flashlamp The lamp has a tubular, elongated lamp body 3, of which only the right end portion is shown here, and a first one The electrode section 5b of the electrode 5 accommodated in the lamp body is shown by dashed lines in Figure 5c In the other figures, the electrode section accommodated in the lamp body is not shown, but only the contacting section 5a of the first led out of the lamp body Electrode.

As further shown in FIGS. 5c and 5d, FIG

Gas discharge lamp assembly also has a first electrical conductor structure 10, which has a first end portion 10a, which is connected to the first electrode 5 and their

Contacting section 5a is electrically connected. Here, the end portion 10a and the contacting portion 5a are fixedly connected by way of example by brazing (see below).

The first electrical conductor structure 10 has an electrically conductive, mechanically flexible lamp longitudinal expansion Buffer section 101 (hereafter also simple

In this case, axial expansions or axial displacements of the lamp 3 take place along the double arrow in FIG. 5c, that is to say along the longitudinal axis of the lamp.

The buffer portion 101 thereby forms a variable axial spacer which allows a variable axial distance between the lamp 3 and (not shown) voltage source. In other words, longitudinal expansion or longitudinal displacement of the lamp is absorbed / compensated by compression of the buffer portion 101.

For example, as shown in FIGS. 5a-5d, the buffer portion 101 may be formed by an elongate hollow body that is axially compressed as a result of axial expansion or displacement of the gas discharge lamp while shortening its longitudinal extent.

The buffer section 101 shown here is here

exemplarily made of a plurality of electrically conductive wires and provided in the form of a flexible hose member. The wires can be, for example

be intertwined or interwoven.

However, the invention is not specific to this

The design ("hose element") of the lamp longitudinal expansion buffer section is limited

Lamp longitudinal extension buffer portion may be configured differently and, for example, one or more meandering curved electrically conductive bands or of a

be formed helically wound wire element. The tube element shown here by way of example is electrically highly conductive and mechanically extremely flexible. The tube element shown is axially compressing under diameter change and at very low spring forces well, and can also be bent or partially displaced radially.

It also compensates for minor torsions. Of the

Lamp longitudinal expansion buffer section 101 is thus here

by way of example also for receiving a radial displacement of the gas discharge lamp and / or to compensate for torsions and / or to compensate for an angular displacement of

Gas discharge lamp set up.

The first electrical conductor structure 10 can consist of the hose element or the buffer element 101, for example.

Alternatively, the conductor structure 10 may include other components, such as the optional connector 103 described below, and the optional one described below

Contact piece 105. In other words, a respective end of the hose element can be either directly or indirectly electrically connected to the electrode 5 or the one described below

Connector assembly 80 are connected / be.

The optional connector 103 is on the one hand (in Figure 5c at its right end) to a first end (here the left end) of the buffer portion 101 electrically connected to

Example by means of a press connection, and on the other hand electrically connected to the first electrode 5, for example by means of a solder joint.

Here, the rod-shaped contacting portion 5b of the first electrode 5 is used as an example in an opening of the connector 103 and soldered in the inserted state with the latter. At the right end portion of the connector 103 is the

Buffer portion 101 exemplified using a separate support pin 107 with the connector 103rd

press-fitted. The connector 103 takes the left

End portion of the buffer portion 101 together with the

separate support pin 107 sleeve-like in a corresponding recess, wherein the left end portion of

Buffer portion of the separate support pin against the

Connector is pressed.

The optional contact piece 105 is here electrically connected to the right end of the buffer portion 101, for example by means of a press connection. At the end facing away from the lamp, the contact piece is exemplarily formed as a female connector part. See the contact opening (without reference numeral) in Figure 5c and Figure 5d.

The buffer portion 101 may at its right end portion with the contact piece using another

Support pin 107 press-connected.

As can be seen in FIGS. 5a to 5d, the first electrical conductor structure 10, formed from connector 103, buffer section 101 and contact piece 105, can have an elongated, substantially rectilinear extent.

It is possible, for example, first to assemble the conductor structure, that is, the buffer section 10 with the

connect optional connector 103 and / or the optional contact piece 103, and then the conductor structure or the

Solder connector 103 to the electrode. The resulting lamp assembly can then with its conductor structure 10 and a tapered longitudinal end portion 3a of the lamp 3 in the below-described cavity 26 of the optional head portion 22nd

be used. Figure 5a (assembled state of header 22 and panel 70) and Figure 5b (header and panel are from each other

separated) show a connector assembly 80, comprising a plug or contact pin 81 and a contact socket 83. The contact socket 83 is provided with a contact element 85, for example one or more contact springs. Through this optional connector assembly 80, the first electrical conductor structure 10 is electrically connected to a voltage source (not shown). The connector assembly 80 is exemplified perpendicular to the

Conductor structure 10 and the buffer portion 101. One of the plug and the socket, here the plug, is arranged in the head portion 22 described below to the

Contact piece 105 to contact electrically. The other one of the plug and the socket may be received in the plate 70 described below, for example.

For example, as shown in FIG. 5 a, the gas discharge lamp assembly may include a jacket tube 24 in which a central portion of the lamp body 3 is formed to form an img

Cross-section annular gap 28 is received at a radial distance, and having a first head portion 22 which defines a cavity 26 in which a first, tapered longitudinal end portion 3a of the lamp body and the first

electrical conductor structure 10 is added.

The annular gap 28 is exemplified here with a cooling fluid, such as a cooling fluid

For example, cooling water, filled. For example, the annular gap 28 can be traversed by the cooling fluid.

Between the head part 22 and the jacket tube 24, one or more sealing elements D (here two sealing rings) may be provided to prevent leakage of the cooling fluid. The jacket tube 24, For example, made of highly transparent material such as quartz glass, for example, by the head part 22 and the one or more sealing elements D can be stored and sealed on largely cylindrical surfaces /. The seals can seal on the outside or inside of the jacket tube. So that one can arrange a plurality of lamps at a small distance parallel to each other, it may be advantageous to seal on the inside of the jacket tube.

As shown in Figure 5a, the first / right tapered longitudinal end portion 3a of the lamp body 3 may be axially movably received in the cavity 26, for example by means of a bearing L, i. be mounted on / in the head part 22 that at least an axial displacement of the longitudinal end portion of the lamp body is possible. In addition, the rejuvenated

Longitudinal section 3a of the lamp body against the

Be circumferential wall of the cavity 26 sealed, here using two sealing elements D between the headboard and lamp. The cavity may thus be sealed inwardly against the optional cooling fluid so that the cooling fluid is prevented from entering the cavity. The lamp can, for example, at a suitable location on

Outer diameter are both stored radially and be secured with some play against axial displacement. The storage can be designed as soft as possible, in order to initiate no high local stresses in the glass material. switch

Seals made of FKM or FFKM or PTFE have proven their worth. For example, the materials are resistant to heat and UV radiation. The axial play is necessary to tolerances, thermal expansion and strains of the lamp

to balance out.

As shown in FIGS. 5 a and 5 b, one or more cooling channels 23 may be formed in the first head part 22, which on the end face of the head part (that of the lamp facing side of the head part) open into a respective opening for admitting or discharging cooling fluid. In other words, by the one or more cooling channels 23rd

Cooling fluid in the casing tube 24 and the annular gap 28th

be introduced or discharged from this (in addition, the headboard can be cooled). In this case, for example, cooling fluid can be added to the first head part 22, the cooling fluid being discharged at a second head part (not shown) at the other longitudinal end of the lamp.

FIG. 5a and FIG. 5b also show an optional plate 70, which is detachably connected to the first head part 22. The second header, not shown, may also be connected to the plate 70 or a second similar plate. Between plate 70 and the respective head part 22, one or more sealing elements D are arranged.

The head part as well as the optional flap 70 can be used for

Example of a good electrical insulating and strong light radiation resistant, temperature-resistant material such as ceramic or fluorine plastic (PTFE or PVDF) to be made.

The plate 70 may, for example, a plurality of first

Connect headers 22 together. In / on the respective first head part 22, in turn, a longitudinal end portion of a respective gas discharge lamp can be mounted. The plate may, for example, form a process chamber cover for covering an opening of a process chamber or be attached to such a process chamber cover. This allows a simple and quick change of a lamp field together with the end pieces. For example, the plate 70 may be attached to a vacuum chamber lid and sealed to the head portions 22 and the lid, respectively. For example, as shown in Figure 5a, the plate may have a channel structure 71 which is configured to distribute a cooling fluid to and from a respective first header.

It should be understood that the gas discharge lamp further includes a second, received in the lamp body 3

Electrode may have (on the left side of the lamp, not shown).

In addition, the gas discharge lamp assembly may be provided on the left side, not shown, for example, with a second electrical conductor structure which is connected to the second electrode and may be constructed similar to the first conductor structure described above. Likewise, a second head part may be provided.

The gas discharge lamp assembly described above may be part of a process chamber assembly, for example

Vacuum chamber arrangement, be. Insofar called the

Reference character V in Figure 5a is a vacuum environment, and

the reference character A in Fig. 5a denotes the atmosphere.

If the ignition of the gas discharge lamp / flash lamp realized via an introduced into the annular gap 28 ignition wire, the electrical contacting of the ignition wire on the

Anode side happen within the head parts 22, for example by the one or more cooling water channels. That too

Introducing an electrical potential to

Self-ignition suppression of the lamp on the cathode side may occur within the head portions 22, for example, through the one or more cooling water passages. In the illustrated embodiment, heat dissipation may occur from the conductive structure 10, for example via the contact stud 81, which may be made of copper, for example.

In general, heat can be generated by the electrical

Line resistance is caused or from the electrode (the electrode heats up by the operation of

Gas discharge lamp) on the electric line and the

Tube element is transmitted,

o be discharged via electrical lines, for

Example of a cooled contact socket; Prerequisite are sufficiently dimensioned

Conductor cross sections and a good conductive material such as copper; and or

o are delivered to the cooled housing via a gaseous or liquid heat transfer medium (e.g., air, nitrogen or an oil or grease) in the cavity 26; this will be described in detail below with reference to Figures 6a-6e;

and or

o be removed by a flow of a gas (such as air); the gas can be guided in such a way that possibly also penetrating

Leaks are discharged from the connection area and the intermediate seal area; this will be described in detail below with reference to Figs. 7a-7f; and or

o be discharged via the main cooling circuit or the cooling fluid, under the conditions:

^■ arrangement of the seal (s) behind the flexible buffer section 101, at the level of

Contact piece 105,

^■ Chemical resistance of the lamp connection

opposite the main cooling medium • Suitable materials (stainless steel) or

Protective layers and / or

• non-corrosive cooling medium

^■ no electrical flashover to the ignition wire or electrical potential to

Auto-ignition suppression by suitable routes, non-conductive cooling medium or absence of these elements.

Referring to Figs. 6a to 6e, a gas discharge lamp assembly according to a fifth embodiment will be described below

Embodiment of the invention described.

On a description of similar to the fourth embodiment or identical features is largely dispensed with.

The gas discharge lamp assembly according to the fifth

Embodiment, as the gas discharge lamp assembly of the fourth embodiment, a gas discharge lamp 1, which may be configured, for example, as a flashlamp. The lamp 1 has a tubular, elongate lamp body 3, of which again only the right end section is shown here, as well as a first electrode 5 accommodated in the lamp body.

As shown in Figures 6c and 6d, the

Contacting section 5a is electrically connected.

The first electrical conductor structure 10 also has an electrically conductive, mechanical according to this embodiment

flexible lamp longitudinal expansion buffer portion 101, the Absorption of axial expansions or axial displacements of the gas discharge lamp is compressible.

The buffer section 101 is here again in the form of a

flexible hose element provided, which consists of a

Made of wires. The wires can be intertwined or interwoven, for example.

As already described for the fourth embodiment, the first electrical conductor structure 10 according to the fifth embodiment may further comprise an optional connector 103 ^λ and an optional contact piece 105 ^λ . However, the optional connector 103 ^λ and the optional contact piece 105 ^λ are modified from the fourth embodiment.

In this case, which is designed in figure 6c left end of the connector 103 ^λ 5c similar to the left end of the connector 103 of the figure, ie with an opening for receiving the

Contacting section 5a of the electrode. Connector ^103λ and electrode 5 may be soldered again.

However, this is different from the right end of the connector 103 of Figure 5c with an integral support projection in Figure 6c right end of the connector 103 ^λ 107 ^λ

equipped / formed, on which the buffer portion 101 is supported. The buffer section 101 can in this case with a

optional press ring 109 are fixed to the projection 107 ^λ .

The optional contact piece 105 ^λ is formed at its right end than the contact piece 105 of the fourth embodiment as a male connector part, and is also at its left end unlike the contact piece 105 of the fourth embodiment equipped with a one-piece support projection 107 ^λ / formed on the the buffer portion 101 is supported (with its right end portion). Of the Buffer portion 101 can be fixed again with an optional press ring 109 on the projection 107 ^λ .

From the different design of the optional

Contact piece 105 ^λ as a male connector part results in a further difference from the fourth embodiment, namely a relation to the fourth embodiment reversed connector assembly 80. As can be seen in Figures 6a and 6b, here are the plug or contact pins 81 in the plate 70th and the female contact 83 in the head part 22

arranged.

In addition, according to this embodiment, the cavity 26 is filled with a heat transfer fluid F to allow / promote heat dissipation to the cooled header 22. The

For example, heat transfer fluid may be selected from the group consisting of air, nitrogen, a heat transfer oil, and a heat transfer grease.

Otherwise, the fifth embodiment corresponds to

Essentially the fourth embodiment, and it is dispensed with a repetition of the common features.

Referring to Figs. 7a to 7f, a gas discharge lamp assembly according to a sixth embodiment will be described below

Embodiment of the invention described.

On a description of the fourth or fifth

Embodiment similar or identical features is omitted.

The gas discharge lamp assembly according to the sixth

Embodiment is basically very similar to the gas discharge lamp assembly according to the fifth embodiment.

The main difference is that according to the sixth Embodiment in the head part 22 a separate

Gas flow channel structure is formed (separately from the one or more cooling channels, in which cooling fluid, for example

Coolant, to cool the lamp flows). The

Gas flow channel structure extends inter alia through the cavity 26 or includes / includes this, so that the

Cavity can be flowed through with gas, whereby heat from the cavity 26 for the purpose of cooling the conductor structure 10 can be efficiently dissipated. The gas can be, for example, air.

The leadership of the gas flow (or the course of the

Gas flow channel structure) is shown in Figure 7a with the four arrows. See also Figure 7c.

The gas can flow through a gas inlet 91 in the optional plate 70 into a gas inlet opening 26a of the cavity 26. The gas inlet opening 26a is arranged at the end of the cavity 26a facing away from the lamp. The gas

then flows through the cavity in the direction of the lamp.

The Gasströmkanalstruktur also has one or more, formed in the first head part 22 gas channels 95, which at their respective end facing away from the lamp in a

respective gas outlet opening 95a and which at their respective lamp-facing end 95b are in fluid communication with the cavity 26 (for example at a portion of the cavity located near the lamp) so that the gas flows through the gas inlet opening 26a and the gas inlet opening 26a

Cavity 26 through the respective gas channel 95 through can flow out of the head part 22 again.

The gas can on the one hand the purpose of cooling the

electrical conductor structure 10 have. On the other hand, the gas flow can also be used, possibly penetrating Leakage dissipate, for example, a leakage of cooling fluid into the cavity 26 inside.

It is also possible to dissipate a possibly penetrating leakage from the intermediate seal area by connecting the cavity 26 and the at least one gas channel 95 via a circumferential groove 97 which extends at least in sections (for

Example complete) along the outer periphery of the head portion 22 extends. The intermediate seal portion extends in the axial direction between the two or more

Sealing elements D (for example, sealing rings), the between

Jacket tube 24 and head 22 are arranged. The circumferential groove 97 is located within this

Intermediate seal area, i. between the two or

several sealing elements D.

Claims

A gas discharge lamp assembly comprising:

a gas discharge lamp (1) having a tubular, elongate lamp body (3) and a first electrode (5) accommodated in the lamp body,

a first, elongated electrical conductor structure (10) having a first longitudinal end portion (10a) which is electrically connected to a leading out of the lamp body contacting portion (5a) of the first electrode, and

a first housing structure (20) defining a cavity (26) through which the first electrical conductor pattern (10) extends and in which the first electrical conductor structure (10) forms a cavity

Lamp longitudinal expansion buffer is vorgebogen one or more times from a first, substantially linear extension direction out.

2. A gas discharge lamp assembly according to claim 1, wherein the first electrical conductor structure (10) at least in the

Section of the lamp elongation buffer formed by it is flexible.

3. A gas discharge lamp assembly according to claim 1 or 2, wherein the first electrical conductor structure (10) comprises a first strand

(12), preferably a copper wire and / or a

Circumferential electrically insulated stranded wire.

A gas discharge lamp assembly according to any one of the preceding claims, wherein the first electrical conductor pattern (10) is substantially L-shaped, having first and second legs defined by a bent shape

Section are connected to each other through the cavity (26).

A gas discharge lamp assembly according to any one of the preceding claims, wherein the first electrical conductor pattern (10) is pre-bent in the cavity (26) to form an angle of substantially 90 °.

6. The gas discharge lamp assembly according to claim 1, wherein the second longitudinal end portion of the first electrical conductor structure is led out of the cavity through a through hole in the first housing structure, wherein the axial extent of the through hole extends the longitudinal direction of the lamp body is at an angle and is preferably substantially perpendicular thereto.

7. A gas discharge lamp assembly according to any one of the preceding claims, wherein the first electrical conductor structure (10) in the cavity (26) has an electrically conductive, exposed portion (14) which is in direct contact or can be brought with cooling fluid.

A gas discharge lamp assembly according to any one of the preceding claims, further comprising a first spacer (30) having a first longitudinal tapered end portion (3a) of the first

Lamp body absorbs.

9. Gas discharge lamp arrangement according to claim 8,

wherein the first spacer (30) is received axially movable in the first housing structure (20) and / or a longitudinal end portion (24a) of a jacket tube (24), and / or

wherein the first spacer is made of PTFE or a ceramic, and / or

wherein the first spacer receives the longitudinal end portion of the lamp body (3) axially movable.

10. A gas discharge lamp assembly according to one of the preceding claims, further comprising a first electrically insulating sheath (16) which controls the electrical connection between the first electrode (5) and the first electrical

Conductor structure (10) circumferentially surrounds, wherein preferably a free end of the casing forms a stop (16a) which limits the axial movement margin relative to each other between the first spacer (30) and lamp body (3), so that at an axial shrinkage movement of the lamp body of the stop on the side facing away from the lamp body of the

Attach spacers and take them with you.

11. Gas discharge lamp arrangement according to one of the preceding claims, wherein at least the gas discharge lamp (3) and the first electrical conductor structure (10) are formed as an integral assembly whose components are interchangeable.

12. A gas discharge lamp assembly, comprising:

a gas discharge lamp (1) comprising a

tubular, elongated lamp body (3) and a first, received in the lamp body electrode (5), and

a first electrical conductor pattern (10) having a first end portion (10a) electrically connected to the first electrode (5),

wherein the first electrical conductor pattern (10) comprises an electrically conductive lamp longitudinal extension buffer portion (101) which is compressible for receiving axial expansions or axial displacements of the gas discharge lamp.

13. A gas discharge lamp assembly according to claim 12, wherein the lamp longitudinal expansion buffer portion (101) of an elongated body, for example, hollow body is formed, which as a result of axial expansion or axial displacement of the

Gas discharge lamp (1) while shortening its Longitudinal extent to compensate for the axial expansion or axial displacement of the lamp is axially compressed.

14. A gas discharge lamp assembly according to claim 12 or 13, wherein the lamp longitudinal expansion buffer portion (101) is made of one or more electrically conductive wires, wherein the lamp longitudinal expansion buffer portion (101) for

Example of a flexible hose member made of a plurality of wires, or is formed by a flexible wire member of one or more coiled wires.

15. A gas discharge lamp assembly according to claim 12 or 13, wherein the lamp longitudinal expansion buffer portion (101) is formed of one or more meandering bent electrically conductive bands.

16. A gas discharge lamp assembly according to any one of claims 12 to 15, wherein the first electrical conductor structure (10) further comprises a connector (103, 103 ^λ ), which is electrically connected on the one hand to a first end of the lamp longitudinal extension buffer portion (101), for example by means one

Press connection, and on the other hand electrically connected to the first electrode (5), for example by means of a

Solder joint.

17. A gas discharge lamp assembly according to claim 16,

wherein the lamp longitudinal stretch buffer portion (101) using a supporting protrusion (107 ^λ) or the support pin (107) with the connector (103, 103 ^λ) is press-bonded,

wherein, for example, the connector (103) sleeve-engages an end portion of the lamp longitudinal extension buffer portion (101) together with a separate support pin (107) and the end portion of the lamp longitudinal extension buffer portion is pressed against the connector by the separate support pin, or wherein, for example, from the connector (103 ^λ ), a support projection (107 ^λ ) is integrally formed and a

End portion of the lamp longitudinal extension buffer portion (101) is applied to the support projection of the connector and is pressed against this, for example by means of a

Press ring (109).

18. A gas discharge lamp assembly according to any one of claims 12 to 17, wherein the first electrical conductor pattern (10) further comprises a contact piece (105, 105 ^λ ), which is electrically connected to a second end of the lamp longitudinal extension buffer portion (101), for example by means of a press connection.

The gas discharge lamp assembly according to claim 18, wherein the lamp longitudinal expansion buffer portion (101) is press bonded to the contact piece (105, 105 ^λ ) using a support projection (107 ^λ ) or support pin (107), for example, the contact piece (105)

End portion of the lamp longitudinal extension buffer portion (101) together with a separate support pin (107) receiving a sleeve-like and the end portion of the lamp longitudinal expansion buffer portion of the separate support pin against the

Contact piece is pressed, or

wherein, for example, from the contact piece (105 ^λ ) a

Support projection (107 ^λ ) is integrally formed and a

End portion of the lamp longitudinal extension buffer portion is applied to the support projection of the contact portion and is pressed against this, is, for example by means of a

Press ring (109).

20. A gas discharge lamp assembly according to any one of claims 12 to 19, wherein the first electrical conductor structure (10) has an elongate, substantially rectilinear extent and / or wherein the first electrical conductor structure (10) via a connector assembly (80) with a voltage source electrically connected is.