EP1088335B1 - Discharge lamp with base - Google Patents

Discharge lamp with base Download PDF

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Publication number
EP1088335B1
EP1088335B1 EP00909045A EP00909045A EP1088335B1 EP 1088335 B1 EP1088335 B1 EP 1088335B1 EP 00909045 A EP00909045 A EP 00909045A EP 00909045 A EP00909045 A EP 00909045A EP 1088335 B1 EP1088335 B1 EP 1088335B1
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EP
European Patent Office
Prior art keywords
lamp
base
discharge lamp
discharge
base according
Prior art date
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EP00909045A
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German (de)
French (fr)
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EP1088335A1 (en
Inventor
Klaus Allgeier
Ulrich Genger
Hans-Jürgen Keck
Reinhold Wittkötter
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Osram GmbH
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Osram GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/58—Means for fastening the separate part to the vessel, e.g. by cement
    • H01J5/60—Means for fastening the separate part to the vessel, e.g. by cement for fastening by mechanical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention is based on a discharge lamp with a base according to the preamble of claim 1.
  • discharge lamp includes sources of electromagnetic radiation based on gas discharges.
  • the spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range.
  • UV ultraviolet
  • VUV vacuum ultraviolet
  • IR infrared
  • a dielectrically impeded electrode is separated from the interior of the discharge vessel by means of a dielectric.
  • This dielectric can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outer wall of the discharge vessel.
  • the document EP-A-0 433 916 discloses a tubular discharge lamp having an inner electrode and an outer electrode.
  • the discharge lamp is inserted with its one end in a trough-shaped socket.
  • the socket on two spring contacts, which make electrical contact with the two electrodes.
  • the document DE-A-197 18 395 shows a tubular discharge lamp with inner and outer electrodes and a cup-shaped base, which is arranged at one end of the discharge lamp. From the pedestal base protrude two pin-shaped socket contacts, which are connected in the interior of the base with the electrodes.
  • the invention relates to a system with this discharge lamp with base and a circuit arrangement which is designed for a pulsed active power input into the discharge lamp.
  • the basic idea of the invention is to provide a spacing between the base and the outer wall of the discharge vessel. It has been shown that the problems described in the introduction are completely avoided as soon as the distance is only sufficiently large.
  • the power supply lines of the outer electrodes are arranged such that their distance from the inner electrode or the power supply of the inner electrode does not fall below the distance between each outer and inner electrode.
  • means are provided which prevent the power supply lines of the outer electrodes to contact the outer wall of the discharge vessel at the points at which the outer diameter of the discharge vessel is less than at the point where the power supply lines are contacted with the outer electrodes. This relates primarily to the lamp base, at the beginning of which the discharge vessel usually tapers.
  • an electrical conductor surrounding the longitudinal axis of the discharge lamp is provided here as means, to which the power supply lines of all external electrodes are suitably contacted.
  • Suitable for example, is a metallic ring arranged concentrically to the lamp longitudinal axis, the diameter of which is at least twice the distance between the inner electrode and a contact point of a power supply with an outer electrode. In this way, a sufficient distance between the power supply lines of the outer electrodes and the lamp base is ensured.
  • the electrical conductor may also be formed as a metal disc, which has a recess for receiving the lamp base.
  • the base is a piece over the discharge vessel pulled up such that the power supply lines of the outer electrodes and the metal ring or sheet metal disc are protected by the base against accidental contact.
  • the base is attached by means of a fastener to the lamp base of the lamp. In this way it is possible to realize the required distance to the outer wall of the discharge vessel. More details can be found in one embodiment.
  • a fastener for example, is a potting compound.
  • the base on a base sleeve. At least a portion of the space between the base sleeve and the lamp base is poured using the potting compound. In this way, the base is attached to the lamp base.
  • both the base sleeve and the potting compound have a sufficient distance from the enclosed by the wall of the discharge vessel gas space, in particular to the part of the discharge vessel in which the dielectrically impeded discharge takes place during operation of the lamp.
  • this can be achieved by covering the potting compound with only a portion of the lamp base, for example at the end of the lamp base remote from the discharge vessel.
  • the typical minimum distance between the outer wall of the discharge vessel and the inner wall of the base sleeve is on the order of one to several millimeters. This has proven itself in practice to ensure at the usual tolerances of the diameter of the discharge vessel and the base sleeve and the centering of the discharge vessel in the base sleeve everywhere a sufficient distance and thus a high radiation efficiency of the lamp.
  • an ionizable filling which preferably contains at least one noble gas, for example xenon or krypton, and alternatively additionally halogens or fluorides for the formation of excimers.
  • the dielectrically impeded discharge generates intense UV / VUV radiation during lamp operation.
  • UV / VUV-resistant materials are to be selected for both the potting compound and for the base sleeve.
  • Glass, ceramic, certain Teflon-like plastics, e.g. PVDF (polyvinylidene fluoride) or generally UV-resistant PTFE (polytetrafluoroethylene Teflon) -related plastics and metals.
  • PVDF polyvinylidene fluoride
  • a particularly high radiation yield can be achieved with the lamp according to the invention having a pedestal, if, in accordance with the method described in US Pat WO 94/23442 described method for pulsed active power input is operated.
  • the socketed lamp with a circuit arrangement which is designed for a series of pulsed active power couplings into the discharge lamp is completed to form a system.
  • the individual active power couplings are separated by pause times. Pulse widths and break times are according to the in the WO 94/23442 revealed doctrine coordinated so that the radiation efficiency is optimal.
  • a discharge lamp 1 front view
  • a flange-like base 2 section
  • UV irradiation eg surface cleaning, photolytics, ozone generation, metallization, UV curing and others.
  • the discharge lamp 1 has a circular-cylindrical discharge vessel 3 made of 0.7 mm to 1.5 mm thick quartz glass.
  • the discharge vessel 3 has an outer diameter of about 40 mm.
  • the inside of the discharge vessel 3 is filled with xenon at a pressure of 15 kPa.
  • an elongated coiled inner electrode 4 of metal wire is arranged centrally.
  • the respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively.
  • the pitch h - i.e. the distance within which the helix makes a full turn - is 12 mm.
  • On the outer wall of the discharge vessel 3 are six outer electrodes 5a-5f (the outer electrodes 5d-5f are not visible in the figure) in the form of 12 cm long platinum strips equidistant and mounted parallel to the helical longitudinal axis.
  • the discharge vessel 3 is closed like a dome and has in the center of the dome on a pump tip 6, in which a first end of the coil electrode 4 is fixed.
  • the discharge vessel 3 tapers and merges into a pinch seal 7.
  • the pinch seal 7 ensured by means of a sealing film 8 made of molybdenum gas-tight connection of the coil electrode 4 with an external power supply 9.
  • the external electrodes 5a-5f, each with a power supply 10a-10f (the power supply lines 10d to 10f are not visible in the figure) connected, which in turn are connected to each other by means of a wire ring 11 made of nickel.
  • the wire ring 11 is connected to an outwardly leading power supply 12.
  • This external power supply 12 thus serves as a common power supply for all external electrodes 5a-5f.
  • the diameter of the wire ring 11 corresponds approximately to the diameter of the discharge vessel. 3
  • the base 2 (in sectional view) consists of a rotationally symmetrical base sleeve 13 and a potting compound 14 made of ceramic putty.
  • the Sokkelhülse 13 has a tubular part 15 which merges at its lamp distal end in a flange-like part 16.
  • the potting compound 14 fills along a portion of the total length of the pinch seal 7, the space between this part of the pinch seal 7 and the base sleeve 13. In this way, the base sleeve 13 is fixed by means of the potting compound 14 on the foot or on the pinch seal 7 of the lamp 1.
  • the base sleeve 13 also encloses a portion of the discharge vessel 3 which is close to the squeeze seal and into which the helical electrode 4 and the external electrodes 5a-5f extend.
  • the flange-like part 16 is used for connection in a process chamber for UV irradiation. If the potting compound 14 is selected from a suitable material with a correspondingly low vapor pressure, the radiator is also suitable for operation in evacuatable apparatus.
  • the function of the raised base sleeve is primarily the protection of the power supply and the contacts between power supply and external electrodes. This is necessary because the power supply lines of the outer electrodes must by no means rest on the tapering part of the discharge vessel and are therefore arranged concentrically around the lamp base like a kind of crown. Through the raised Sokkelhülse it is now prevented that the power supply lines of the outer electrodes come by accidental contact undesirably close to the lamp base or even come into contact with it. Otherwise, namely between such a contact point and the inner electrode bright contracted discharge channels with high current densities, which leads to a reduction in the overall efficiency of the UV radiation of the radiator.
  • the geometric dimensions of the discharge vessel 3 and the base sleeve 13 are coordinated so that between the outer wall of the discharge vessel 3 and the inner wall facing the base sleeve 13, an annular gap 17 with a width of about 3 mm.
  • the inner diameter of the remaining base sleeve 13 in the region of the taper of the lamp base is only 42 mm.
  • the wire ring 11 is designed as a sheet metal disc (separating plate), for example made of stainless steel.
  • the separating plate has a recess which is adapted to the shape of the circumference of the pinch seal of the lamp. It is thereby achieved that the sheet metal disc can be accurately pushed over the pinch seal.
  • the sheet metal disk is arranged in the region of the pinch seal, ie with sufficient distance from the actual discharge vessel, so that no parasitic gas discharges can affect the efficiency of the lamp.
  • the sheet metal disc has the same function as the wire ring described above, namely to accomplish the electrical contact between the outer electrodes and the power supply on the one hand.
  • the tin plate but also serves to protect the Sockelkitts before the gas discharge generated UV radiation.
  • the outer diameter is chosen so large that the entire potting compound between pinch seal and base sleeve is covered. Another advantage is that during lamp production, the first soft potting compound between base sleeve and pinch seal can be filled without this can run past the sheet metal disk on the discharge vessel.
  • the discharge lamp has a phosphor layer which converts the UV / VUV radiation into light (visible electromagnetic radiation).
  • the power supply leads led out of the socket are connected to the terminals of a ballast which supplies the voltage pulses required for the operation of the lamp.
  • a suitable circuitry for this purpose is for example in the EP-A-0 781078 whose disclosure content is hereby incorporated by reference.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)

Abstract

The invention relates to a discharge lamp (1), comprising a base (2) which is suitable for operation by dielectrically impeded discharge. Said discharge lamp has a gap between the base (2) and the outer wall of the discharge vessel (3) which improves the overall efficiency of the generation of UV radiation.

Description

Technisches GebietTechnical area

Die Erfindung geht aus von einer Entladungslampe mit einem Sockel gemäß dem Oberbegriff des Anspruchs 1.The invention is based on a discharge lamp with a base according to the preamble of claim 1.

Der Begriff "Entladungslampe" umfaßt dabei Quellen elektromagnetischer Strahlung auf der Basis von Gasentladungen. Das Spektrum der Strahlung kann dabei sowohl den sichtbaren Bereich als auch den UV(Ultraviolett)/VUV(Vakuumultraviolett)-Bereich sowie den IR(Infrarot)-Bereich umfassen. Ferner kann auch eine Leuchtstoffschicht zur Konvertierung unsichtbarer in sichtbare Strahlung (Licht) vorgesehen sein.The term "discharge lamp" includes sources of electromagnetic radiation based on gas discharges. The spectrum of the radiation may include both the visible range and the UV (ultraviolet) / VUV (vacuum ultraviolet) range and the IR (infrared) range. Furthermore, it is also possible to provide a phosphor layer for converting invisible into visible radiation (light).

Es handelt sich dabei um eine Entladungslampe mit mindestens einer sogenannten dielektrisch behinderten Elektrode. Eine dielektrisch behinderte Elektrode ist gegenüber dem Innern des Entladungsgefäßes mittels eines Dielektrikums getrennt. Dieses Dielektrikum kann beispielsweise als eine die Elektrode bedeckende dielektrische Schicht ausgeführt sein, oder sie ist durch das Entladungsgefäß der Lampe selbst gebildet, nämlich wenn die Elektrode auf der Außenwandung des Entladungsgefäß angeordnet ist.It is a discharge lamp with at least one so-called dielectrically impeded electrode. A dielectrically impeded electrode is separated from the interior of the discharge vessel by means of a dielectric. This dielectric can be embodied, for example, as a dielectric layer covering the electrode, or it is formed by the discharge vessel of the lamp itself, namely when the electrode is arranged on the outer wall of the discharge vessel.

Stand der TechnikState of the art

Aus der Schrift WO-A-98/11596 , insbesondere Figuren 5a bis 5c, ist bereits eine derartige Lampe mit Edison-Schraubsockel bekannt. Diese Lampe weist eine wendelförmige Elektrode innerhalb des Entladungsgefäßes auf. Außerdem sind vier streifenförmige Elektroden auf der Außenwandung des Entladungsgefäßes angeordnet. Nachteilig bei dieser Lampe ist, daß Zündschwierigkeit auftreten können und die Strahlungsausbeute überraschend gering sein kann.From the Scriptures WO-A-98/11596 , In particular Figures 5a to 5c, such a lamp with Edison screw base is already known. This lamp has a helical electrode within the discharge vessel. In addition, four strip-shaped electrodes are arranged on the outer wall of the discharge vessel. A disadvantage of this lamp is that ignition difficulty can occur and the radiation yield can be surprisingly low.

Zum gegenwärtigen Zeitpunkt der Erkenntnis werden mit dieser Problematik folgende Zusammenhänge in Verbindung gebracht, ohne daß damit eine Festlegung auf irgendeine theoretische Deutung beabsichtigt wäre. Vermutlich kommt es in dem Sockel zu Verschiebungs- und Kriechströmen. Dadurch wird die Entladung beeinträchtigt und die Strahlungsausbeute sinkt.At the present time of knowledge, the following connections are connected with this problem, without it being intended to be bound to any theoretical interpretation. Presumably it comes in the socket to displacement and leakage currents. As a result, the discharge is impaired and the radiation yield decreases.

Das Dokument EP-A-0 433 916 offenbart eine röhrenförmige Entladungslampe mit einer Innenelektrode und einer Außenelektrode. Die Entladungslampe ist mit ihrem einen Ende in eine trogförmige Fassung eingesetzt. Dazu weist die Fassung zwei Federkontakte auf, die den elektrischen Kontakt mit den beiden Elektroden herstellen.The document EP-A-0 433 916 discloses a tubular discharge lamp having an inner electrode and an outer electrode. The discharge lamp is inserted with its one end in a trough-shaped socket. For this purpose, the socket on two spring contacts, which make electrical contact with the two electrodes.

Das Dokument DE-A-197 18 395 zeigt eine röhrenförmige Entladungslampe mit Innen- und Außenelektroden und einem topfförmigen Sockel, der an einem Ende der Entladungslampe angeordnet ist. Aus dem Sockelboden ragen zwei stiftförmige Sockelkontakte, die im Innern des Sockels mit den Elektroden verbunden sind.The document DE-A-197 18 395 shows a tubular discharge lamp with inner and outer electrodes and a cup-shaped base, which is arranged at one end of the discharge lamp. From the pedestal base protrude two pin-shaped socket contacts, which are connected in the interior of the base with the electrodes.

Darstellung der ErfindungPresentation of the invention

Es ist Aufgabe der vorliegenden Erfindung, die vorgenannten Schwierigkeiten zu vermeiden und eine Entladungslampe mit Sockel gemäß dem Oberbegriff des Anspruchs 1 mit einer verbesserten Strahlungsausbeute bereitzustellen.It is an object of the present invention to avoid the aforementioned difficulties and to provide a discharge lamp with base according to the preamble of claim 1 with an improved radiation efficiency.

Diese Aufgabe wird durch die kennzeichnenden Merkmale des Anspruchs 1 gelöst. Besonders vorteilhafte Ausgestaltungen finden sich in den abhängigen Ansprüchen.This object is solved by the characterizing features of claim 1. Particularly advantageous embodiments can be found in the dependent claims.

Weiterhin bezieht sich die Erfindung auf ein System mit dieser Entladungslampe mit Sockel und einer Schaltungsanordnung, die für eine gepulste Wirkleistungseinkopplung in die Entladungslampe ausgelegt ist.Furthermore, the invention relates to a system with this discharge lamp with base and a circuit arrangement which is designed for a pulsed active power input into the discharge lamp.

Der Grundgedanke der Erfindung besteht darin, zwischen dem Sockel und der Außenwandung des Entladungsgefäßes einen Abstand vorzusehen. Es hat sich nämlich gezeigt, daß die einleitend geschilderten Probleme gänzlich vermieden werden, sobald der Abstand nur ausreichend groß ist. Darüber hinaus sind die Stromzuführungen der Außenelektroden derart angeordnet, daß ihr Abstand zu der Innenelektrode bzw. der Stromzuführung der Innenelektrode den Abstand zwischen jeder Außen- und Innenelektrode nicht unterschreitet. Zu diesem Zweck sind Mittel vorgesehen, die verhindern, daß die Stromzuführungen der Außenelektroden die Außenwandung des Entladungsgefäßes an den Stellen berühren, an denen der Außendurchmesser des Entladungsgefäßes geringer ist als an der Stelle, wo die Stromzuführungen mit den Außenelektroden kontaktiert sind. Dies betrifft in erster Linie den Lampenfuß, an dessen Beginn sich das Entladungsgefäß üblicherweise verjüngt. Deshalb ist hier als Mittel ein die Längsachse der Entladungslampe umgebender elektrischer Leiter vorgesehen, an dem die Stromzuführungen aller Außenelektroden geeignet kontaktiert sind. Geeignet ist beispielsweise ein konzentrisch zur Lampenlängsachse angeordneter metallischer Ring, dessen Durchmesser mindestens dem doppelten Abstand zwischen Innenelektrode und einer Kontaktstelle einer Stromzuführung mit einer Außenelektrode beträgt. Auf diese Weise ist ein ausreichender Abstand zwischen den Stromzuführungen der Außenelektroden und dem Lampenfuß gewährleistet. Alternativ kann der elektrische Leiter auch als Metallscheibe ausgebildet sein, die eine Aussparung zur Aufnahme des Lampenfußes aufweist. Für weitere Details hierzu wird auf die Beschreibung der Ausführungsbeispiele verwiesen.The basic idea of the invention is to provide a spacing between the base and the outer wall of the discharge vessel. It has been shown that the problems described in the introduction are completely avoided as soon as the distance is only sufficiently large. In addition, the power supply lines of the outer electrodes are arranged such that their distance from the inner electrode or the power supply of the inner electrode does not fall below the distance between each outer and inner electrode. For this purpose, means are provided which prevent the power supply lines of the outer electrodes to contact the outer wall of the discharge vessel at the points at which the outer diameter of the discharge vessel is less than at the point where the power supply lines are contacted with the outer electrodes. This relates primarily to the lamp base, at the beginning of which the discharge vessel usually tapers. Therefore, an electrical conductor surrounding the longitudinal axis of the discharge lamp is provided here as means, to which the power supply lines of all external electrodes are suitably contacted. Suitable, for example, is a metallic ring arranged concentrically to the lamp longitudinal axis, the diameter of which is at least twice the distance between the inner electrode and a contact point of a power supply with an outer electrode. In this way, a sufficient distance between the power supply lines of the outer electrodes and the lamp base is ensured. Alternatively, the electrical conductor may also be formed as a metal disc, which has a recess for receiving the lamp base. For further details, reference is made to the description of the embodiments.

Der Sockel ist ein Stück über das Entladungsgefäß hochgezogen derart, daß die Stromzuführungen der Außenelektroden und der Metallring bzw. Blechscheibe durch den Sockel gegen unbeabsichtigtes Berühren geschützt sind.The base is a piece over the discharge vessel pulled up such that the power supply lines of the outer electrodes and the metal ring or sheet metal disc are protected by the base against accidental contact.

Der Sockel ist mit Hilfe eines Befestigungsmittels an dem Lampenfuß der Lampe befestigt. Auf diese Weise ist es möglich, den erforderlichen Abstand zur Außenwandung des Entladungsgefäßes zu realisieren. Näheres hierzu ist in einem Ausführungsbeispiel zu finden.The base is attached by means of a fastener to the lamp base of the lamp. In this way it is possible to realize the required distance to the outer wall of the discharge vessel. More details can be found in one embodiment.

Als Befestigungsmittel eignet sich beispielsweise eine Vergußmasse. Zu diesem Zweck weist der Sockel eine Sockelhülse auf. Zumindest ein Teilbereich des Raumes zwischen der Sockelhülse und dem Lampenfuß ist mit Hilfe der Vergußmasse ausgegossen. Auf diese Weise ist der Sockel an dem Lampenfuß befestigt. Ausschlaggebend dabei ist, daß sowohl die Sockelhülse als auch die Vergußmasse einen ausreichenden Abstand zu dem von der Wandung des Entladungsgefäßes eingeschlossenen Gasraum aufweisen, insbesondere zu dem Teil des Entladungsgefäßes, in dem während des Betriebes der Lampe die dielektrisch behinderte Entladung stattfindet.As a fastener, for example, is a potting compound. For this purpose, the base on a base sleeve. At least a portion of the space between the base sleeve and the lamp base is poured using the potting compound. In this way, the base is attached to the lamp base. Crucial here is that both the base sleeve and the potting compound have a sufficient distance from the enclosed by the wall of the discharge vessel gas space, in particular to the part of the discharge vessel in which the dielectrically impeded discharge takes place during operation of the lamp.

Dies läßt sich einerseits dadurch realisieren, in dem die Vergußmasse nur einen Teilbereich des Lampenfußes bedeckt, beispielsweise an dem vom Entladungsgefäß entfernten Ende des Lampenfußes. Bei der Auswahl der Größe des Teilbereichs ist natürlich darauf zu achten, daß Lampe und Sockel noch ausreichend zuverlässig miteinander verbunden sind.On the one hand, this can be achieved by covering the potting compound with only a portion of the lamp base, for example at the end of the lamp base remote from the discharge vessel. When choosing the size of the sub-area, of course, make sure that lamp and socket are still sufficiently reliable connected.

Außerdem beträgt der typische Mindestabstand zwischen der Außenwandung des Entladungsgefäßes und der Innenwandung der Sockelhülse grö-βenordnungsmäßig ein bis mehrere Millimeter. Dies hat sich in der Praxis bewährt, um bei den üblichen Toleranzen der Durchmesser des Entladungsgefäßes und der Sockelhülse sowie der Zentrierung des Entladungsgefäßes in der Sockelhülse überall einen ausreichenden Abstand und damit eine hohe Strahlungsausbeute der Lampe zu gewährleisten.In addition, the typical minimum distance between the outer wall of the discharge vessel and the inner wall of the base sleeve is on the order of one to several millimeters. This has proven itself in practice to ensure at the usual tolerances of the diameter of the discharge vessel and the base sleeve and the centering of the discharge vessel in the base sleeve everywhere a sufficient distance and thus a high radiation efficiency of the lamp.

Innerhalb des Entladungsgefäßes befindet sich eine ionisierbare Füllung, die vorzugsweise mindestens ein Edelgas, z.B. Xenon oder Krypton, und alternativ zusätzlich Halogene oder Fluoride zur Bildung von Excimeren enthält. Damit erzeugt die dielektrisch behinderte Entladung intensive UV/VUV-Strahlung während des Lampenbetriebs.Within the discharge vessel there is an ionizable filling, which preferably contains at least one noble gas, for example xenon or krypton, and alternatively additionally halogens or fluorides for the formation of excimers. Thus, the dielectrically impeded discharge generates intense UV / VUV radiation during lamp operation.

Sofern die Lampe als UV/VUV-Strahler eingesetzt wird, d.h. keine Leuchtstoffschicht zur Konvertierung der kurzwelligen Strahlung aufweist, sind sowohl für die Vergußmasse als auch für die Sockelhülse möglichst UV/VUV-resistente Materialien zu wählen. Für die Sockelhülse eignen sich insbesondere Glas, Keramik, bestimmte teflonartige Kunststoffe, z.B. PVDF (Polyvinylidenfloride) oder allgemein UV-resistente PTFE(Polytetrafluorätylen = Teflon)-verwandte Kunststoffe sowie Metalle. Als geeignete Materialien für die Vergußmasse haben sich Keramikkitt, Epoxidharz oder Sauereisen-Zement herausgestellt.If the lamp is used as a UV / VUV radiator, i. does not have a phosphor layer for converting the short-wave radiation, as UV / VUV-resistant materials are to be selected for both the potting compound and for the base sleeve. Glass, ceramic, certain Teflon-like plastics, e.g. PVDF (polyvinylidene fluoride) or generally UV-resistant PTFE (polytetrafluoroethylene = Teflon) -related plastics and metals. As suitable materials for the potting ceramic putty, epoxy resin or sour iron cement have been found.

Eine besonders hohe Strahlungsausbeute läßt sich mit der erfindungsgemä-βen Lampe mit Sockel erreichen, wenn sie gemäß dem in der WO-A-94/23442 beschriebenen Verfahren zur gepulsten Wirkleistungseinkopplung betrieben wird.A particularly high radiation yield can be achieved with the lamp according to the invention having a pedestal, if, in accordance with the method described in US Pat WO 94/23442 described method for pulsed active power input is operated.

Dazu wird die Lampe mit Sockel mit einer Schaltungsanordnung, die für eine Folge von gepulsten Wirkleistungseinkopplungen in die Entladungslampe ausgelegt ist, zu einem System komplettiert. Die einzelnen Wirkleistungseinkopplungen sind durch Pausenzeiten voneinander getrennt. Pulsbreiten und Pausenzeiten werden gemäß der in der WO-A-94/23442 offenbarten Lehre so aufeinander abgestimmt, daß die Strahlungsausbeute optimal ist.For this purpose, the socketed lamp with a circuit arrangement which is designed for a series of pulsed active power couplings into the discharge lamp is completed to form a system. The individual active power couplings are separated by pause times. Pulse widths and break times are according to the in the WO 94/23442 revealed doctrine coordinated so that the radiation efficiency is optimal.

Beschreibung der ZeichnungenDescription of the drawings

Im folgenden soll die Erfindung anhand eines Ausführungsbeispiels näher erläutert werden. Es zeigt:

  • Figur eine Entladungslampe mit flanschartigem Sockel.
In the following the invention will be explained in more detail with reference to an embodiment. It shows:
  • Figure a discharge lamp with flange-like base.

In der Figur ist eine Entladungslampe 1 (Vorderansicht) mit flanschartigem Sockel 2 (Schnitt) schematisch dargestellt. Dabei handelt es sich um einen UV/VUV-Strahler, für die UV-Bestrahlung, z.B. Oberflächenreinigung, Photolytik, Ozonerzeugung, Metallisierung, UV-Curing und andere.In the figure, a discharge lamp 1 (front view) with a flange-like base 2 (section) is shown schematically. This is a UV / VUV emitter, for UV irradiation, eg surface cleaning, photolytics, ozone generation, metallization, UV curing and others.

Die Entladungslampe 1 weist ein kreiszylindrisches Entladungsgefäß 3 aus 0,7 mm bis 1,5 mm dickem Quarzglas auf. Das Entladungsgefäß 3 weist einen Außendurchmesser von ca. 40 mm auf. Das Innere des Entladungsgefäßes 3 ist mit Xenon bei einem Druck von 15 kPa gefüllt.The discharge lamp 1 has a circular-cylindrical discharge vessel 3 made of 0.7 mm to 1.5 mm thick quartz glass. The discharge vessel 3 has an outer diameter of about 40 mm. The inside of the discharge vessel 3 is filled with xenon at a pressure of 15 kPa.

Innerhalb des Entladungsgefäßes 3 ist eine längliche gewendelte Innenelektrode 4 aus Metalldraht zentrisch angeordnet. Die jeweiligen Durchmesser des Metalldrahtes und der Wendel betragen 1 mm bzw. 8 mm. Die Ganghöhe h - d.h. die Strecke, innerhalb der die Wendel eine vollständige Umdrehung ausführt - beträgt 12 mm. Auf der Außenwandung des Entladungsgefäßes 3 sind sechs Außenelektroden 5a-5f (die Außenelektroden 5d-5f sind in der Figur nicht zu sehen) in Form von 12 cm langen Platinstreifen äquidistant und parallel zur Wendellängsachse angebracht.Within the discharge vessel 3, an elongated coiled inner electrode 4 of metal wire is arranged centrally. The respective diameters of the metal wire and the helix are 1 mm and 8 mm, respectively. The pitch h - i.e. the distance within which the helix makes a full turn - is 12 mm. On the outer wall of the discharge vessel 3 are six outer electrodes 5a-5f (the outer electrodes 5d-5f are not visible in the figure) in the form of 12 cm long platinum strips equidistant and mounted parallel to the helical longitudinal axis.

Details zu der Funktionsweise der Elektroden während des Lampenbetriebs sind in der bereits zitierten WO-A-98/11596 , insbesondere in der Beschreibung zu den Figuren 5a bis 5c, beschrieben, deren Offenbarungsgehalt hier durch Inbezugnahme eingeschlossen wird.Details on the operation of the electrodes during lamp operation are in the already cited WO-A-98/11596 , in particular in the description of Figures 5a to 5c, described, the disclosure of which is incorporated herein by reference.

An einem ersten Ende ist das Entladungsgefäß 3 kuppelartig verschlossen und weist in der Mitte der Kuppel eine Pumpspitze 6 auf, in der ein erstes Ende der Wendelelektrode 4 fixiert ist. Im Bereich des der Pumpspitze 6 entgegengesetzten Lampenfußes verjüngt sich das Entladungsgefäß 3 und geht in eine Quetschdichtung 7 über. Die Quetschdichtung 7 gewährleistet mit Hilfe einer Dichtungsfolie 8 aus Molybdän eine gasdichte Verbindung der Wendelelektrode 4 mit einer äußeren Stromzuführung 9. Am dichtungsnahen sich verjüngenden Ende des Entladungsgefäßes 3 sind die Außenelektroden 5a-5f mit je einer Stromzuführung 10a-10f (die Stromzuführungen 10d bis 10f sind in der Figur nicht zu sehen) verbunden, die ihrerseits wiederum mit Hilfe eines Drahtrings 11 aus Nickel miteinander verbunden sind. Der Drahtring 11 schließlich ist mit einer nach außen führenden Stromzuführung 12 verbunden. Diese äußere Stromzuführung 12 dient folglich als gemeinsame Stromzuführung für alle Außenelektroden 5a-5f. Der Durchmesser des Drahtringes 11 entspricht ungefähr dem Durchmesser des Entladungsgefäßes 3.At a first end, the discharge vessel 3 is closed like a dome and has in the center of the dome on a pump tip 6, in which a first end of the coil electrode 4 is fixed. In the region of the lamp tip opposite the pump tip 6, the discharge vessel 3 tapers and merges into a pinch seal 7. The pinch seal 7 ensured by means of a sealing film 8 made of molybdenum gas-tight connection of the coil electrode 4 with an external power supply 9. At the seal near tapered end of the discharge vessel 3, the external electrodes 5a-5f, each with a power supply 10a-10f (the power supply lines 10d to 10f are not visible in the figure) connected, which in turn are connected to each other by means of a wire ring 11 made of nickel. Finally, the wire ring 11 is connected to an outwardly leading power supply 12. This external power supply 12 thus serves as a common power supply for all external electrodes 5a-5f. The diameter of the wire ring 11 corresponds approximately to the diameter of the discharge vessel. 3

Der Sockel 2 (in Schnittdarstellung) besteht aus einer rotationssymmetrischen Sockelhülse 13 und einer Vergußmasse 14 aus Keramikkitt. Die Sokkelhülse 13 weist einen rohrförmigen Teil 15 auf, der an seinem lampenfernen Ende in einen flanschartigen Teil 16 übergeht. Die Vergußmasse 14 füllt entlang eines Teils der Gesamtlänge der Quetschdichtung 7 den Raum zwischen diesem Teil der Quetschdichtung 7 und der Sockelhülse 13 aus. Auf diese Weise ist die Sockelhülse 13 mittels der Vergußmasse 14 am Fuß bzw. an der Quetschdichtung 7 der Lampe 1 fixiert. Die Sockelhülse 13 umhüllt auch einen quetschdichtungsnahen Teilbereich des Entladungsgefäßes 3, in den hinein sich noch die Wendelelektrode 4 und die Außenelektroden 5a-5f erstrecken.The base 2 (in sectional view) consists of a rotationally symmetrical base sleeve 13 and a potting compound 14 made of ceramic putty. The Sokkelhülse 13 has a tubular part 15 which merges at its lamp distal end in a flange-like part 16. The potting compound 14 fills along a portion of the total length of the pinch seal 7, the space between this part of the pinch seal 7 and the base sleeve 13. In this way, the base sleeve 13 is fixed by means of the potting compound 14 on the foot or on the pinch seal 7 of the lamp 1. The base sleeve 13 also encloses a portion of the discharge vessel 3 which is close to the squeeze seal and into which the helical electrode 4 and the external electrodes 5a-5f extend.

Der flanschartige Teil 16 dient dem Anschluß in einer Prozeßkammer zur UV-Bestrahlung. Sofern die Vergußmasse 14 aus geeignetem Material mit entsprechend niedrigem Dampfdruck gewählt wird, ist der Strahler auch für den Betrieb in evakuierbaren Apparaturen geeignet.The flange-like part 16 is used for connection in a process chamber for UV irradiation. If the potting compound 14 is selected from a suitable material with a correspondingly low vapor pressure, the radiator is also suitable for operation in evacuatable apparatus.

Die Funktion der hochgezogenen Sockelhülse ist primär der Schutz der Stromzuführungen bzw. der Kontaktierungen zwischen Stromzuführungen und Außenelektroden. Dies ist erforderlich, da die Stromzuführungen der Außenelektroden auf keinen Fall an dem sich verjüngenden Teil des Entladungsgefäßes anliegen dürfen und daher wie eine Art Krone konzentrisch um den Lampenfuß herum angeordnet sind. Durch die hochgezogene Sokkelhülse wird nun verhindert, daß die Stromzuführungen der Außenelektroden durch versehentliches Berühren unerwünscht nahe an den Lampenfuß kommen oder gar mit ihm in Berührung kommen. Andernfalls bilden sich nämlich zwischen einer solchen Berührungsstelle und der Innenelektrode helle kontrahierte Entladungskanäle mit hohen Stromdichten auf, die zu einer Verminderung der Gesamteffizienz der UV-Strahlung des Strahlers führt.The function of the raised base sleeve is primarily the protection of the power supply and the contacts between power supply and external electrodes. This is necessary because the power supply lines of the outer electrodes must by no means rest on the tapering part of the discharge vessel and are therefore arranged concentrically around the lamp base like a kind of crown. Through the raised Sokkelhülse it is now prevented that the power supply lines of the outer electrodes come by accidental contact undesirably close to the lamp base or even come into contact with it. Otherwise, namely between such a contact point and the inner electrode bright contracted discharge channels with high current densities, which leads to a reduction in the overall efficiency of the UV radiation of the radiator.

Die geometrischen Dimensionen des Entladungsgefäßes 3 und der Sockelhülse 13 sind so aufeinander abgestimmt, daß zwischen der Außenwandung des Entladungsgefäßes 3 und der dazu gegenüberliegenden Innenwandung der Sockelhülse 13 ein ringförmiger Spalt 17 mit einer Breite von ca. 3 mm ist. Dazu, weist die Innenwandung der Sockelhülse 13 im Bereich des Entladungsgefäßes auf einer Länge L von ca. 11 mm eine Zylindersenkung auf, mit einem Innendurchmesser von 44 mm. Der Innendurchmesser der restlichen Sockelhülse 13 im Bereich der Verjüngung des Lampenfußes beträgt hingegen nur 42 mm.The geometric dimensions of the discharge vessel 3 and the base sleeve 13 are coordinated so that between the outer wall of the discharge vessel 3 and the inner wall facing the base sleeve 13, an annular gap 17 with a width of about 3 mm. For this purpose, the inner wall of the base sleeve 13 in the region of the discharge vessel over a length L of about 11 mm to a cylinder counterbore, with an inner diameter of 44 mm. The inner diameter of the remaining base sleeve 13 in the region of the taper of the lamp base, however, is only 42 mm.

In einer nicht dargestellten Alternative ist der Drahtring 11 als Blechscheibe (Trennblech), z.B. aus Edelstahl ausgeführt. Das Trennblech weist eine Aussparung auf, die der Form des Umfangs der Quetschdichtung der Lampe angepaßt ist. Dadurch wird erreicht, daß sich die Blechscheibe formgenau über die Quetschdichtung schieben läßt. Die Blechscheibe ist dabei im Bereich der Quetschdichtung angeordnet, d.h. mit ausreichendem Abstand zum eigentlichen Entladungsgefäß, damit keine parasitären Gasentladungen die Effizienz der Lampe beeinträchtigen können. Die Blechscheibe hat zum einen die gleiche Funktion wie der zuvor beschriebene Drahtring, nämlich die elektrische Kontaktierung zwischen den Außenelektroden und der Stromzuführung zu bewerkstelligen. Zum anderen dient die Blechscheibe aber zusätzlich dem Schutz des Sockelkitts vor der von der Gasentladung erzeugten UV-Strahlung. Zu diesem Zweck ist der Außendurchmesser so groß gewählt, daß die gesamte Vergußmasse zwischen Quetschdichtung und Sockelhülse abgedeckt ist. Ein weiterer Vorteil besteht darin, daß während der Lampenfertigung die zunächst weiche Vergußmasse zwischen Sockelhülse und Quetschdichtung eingefüllt werden kann, ohne daß diese an der Blechscheibe vorbei auf das Entladungsgefäß laufen kann.In an alternative, not shown, the wire ring 11 is designed as a sheet metal disc (separating plate), for example made of stainless steel. The separating plate has a recess which is adapted to the shape of the circumference of the pinch seal of the lamp. It is thereby achieved that the sheet metal disc can be accurately pushed over the pinch seal. The sheet metal disk is arranged in the region of the pinch seal, ie with sufficient distance from the actual discharge vessel, so that no parasitic gas discharges can affect the efficiency of the lamp. The sheet metal disc has the same function as the wire ring described above, namely to accomplish the electrical contact between the outer electrodes and the power supply on the one hand. On the other hand, the tin plate but also serves to protect the Sockelkitts before the gas discharge generated UV radiation. For this purpose, the outer diameter is chosen so large that the entire potting compound between pinch seal and base sleeve is covered. Another advantage is that during lamp production, the first soft potting compound between base sleeve and pinch seal can be filled without this can run past the sheet metal disk on the discharge vessel.

In einer Variante (nicht dargestellt) für Beleuchtungszwecke weist die Entladungslampe eine Leuchtstoffschicht auf, welche die UV/VUV-Strahlung in Licht (sichtbare elektromagnetische Strahlung) konvertiert.In a variant (not shown) for illumination purposes, the discharge lamp has a phosphor layer which converts the UV / VUV radiation into light (visible electromagnetic radiation).

In einer weiteren Variante (nicht dargestellt) sind die aus dem Sockel herausgeführten Stromzuführungen mit den Anschlußklemmen eines Vorschaltgerätes verbunden, welches die für den Betrieb der Lampe erforderlichen Spannungspulse liefert. Eine hierfür geeignete Schaltungsanordnung ist beispielsweise in der EP-A-0 781078 zu finden, deren Offenbarungsgehalt hiermit durch Inbezugnahme eingeschlossen wird.In a further variant (not shown), the power supply leads led out of the socket are connected to the terminals of a ballast which supplies the voltage pulses required for the operation of the lamp. A suitable circuitry for this purpose is for example in the EP-A-0 781078 whose disclosure content is hereby incorporated by reference.

Claims (15)

  1. Discharge lamp (1) with base (2), wherein the discharge lamp (1) has the following features:
    - a discharge vessel (3), the wall of which encloses an ionisable filling,
    - electrodes (4; 5a-5f), wherein at least one (4) of the electrodes is disposed within (inner electrode) and at least one (5a-5f) of the electrodes is disposed on the outer walling of the discharge vessel (3) (outer electrode),
    - at least one external power feed (9, 10a-10f, 12),
    - a lamp foot (7), through which the at least one inner electrode (4) is connected in a gas-tight manner to the at least one external power feed (9),
    - with the base (2) comprising a base sleeve (13) which surrounds at least the lamp foot (7),
    characterised in that
    • the lamp (1) has an attachment means (14) by which the base sleeve (13) is attached to the lamp foot (7),
    • a space is provided between the base sleeve (13) and the outer walling of the discharge vessel (3) which defines an intermediate space (17) and
    • that the outer electrodes (5a - 5f) are connected by associated power feeds (10a-10f) to an electrical conductor (11) surrounding the longitudinal axis of the discharge lamp, with the power feeds (10a-10f) of the outer electrodes (5a - 5f) and the electrical conductor (11) being disposed in the space (17) between the base sleeve (13) and the discharge vessel (3) or lamp foot (7).
  2. Discharge lamp with base according to claim 1, with the distance amounting to at least 1 mm.
  3. Discharge lamp with base according to claim 1, with the attachment means being a sealing compound (14).
  4. Discharge lamp with base according to claim 3, with the sealing compound (14) only covering a part area of the lamp foot (7).
  5. Discharge lamp with base according to claim 3 or 4, with the sealing compound (14) consisting of one of the following materials: Ceramic putty, epoxy resin or Sauereisen cement.
  6. Discharge lamp with base according to one of the preceding claims, with the lamp foot being embodied as a compression seal (7).
  7. Discharge lamp with base according to one of the preceding claims, with the ionisable filling containing a noble gas, e.g. Xenon, and/or halogens or fluorides for creation of excimers.
  8. Discharge lamp with base according to one of the preceding claims, with the conductor being embodied as a metal ring (11) concentric to the longitudinal axis of the discharge lamp.
  9. Discharge lamp with base according to claim 8, with the diameter of the metal rings (11) amounting to at least twice the distance between an outer electrode (5a-5f) and the at least one inner electrode (4).
  10. Discharge lamp with base according to one of the preceding claims, with the conductor being embodied as a metal disk which features a recess to accommodate the lamp foot.
  11. Discharge lamp with base according to claim 10, with the outer diameter of the metal disk being selected large enough for the metal disk to fully cover the attachment means between lamp foot and base.
  12. Discharge lamp with base according to one of the preceding claims, with the base (2) changing into a flange (16) at its end remote from the lamp.
  13. Discharge lamp with base according to one of the preceding claims, with the lamp having a fluorescent layer.
  14. System with a discharge lamp with base according to one of claims 1 to 14 and a circuit arrangement to operate the lamp.
  15. System according to claim 14, with the circuit arrangement being designed for a sequence of pulsed active power couplings into the discharge lamp and with the individual active power couplings being separated from one another by pauses.
EP00909045A 1999-04-14 2000-02-19 Discharge lamp with base Expired - Lifetime EP1088335B1 (en)

Applications Claiming Priority (3)

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DE19916877 1999-04-14
DE19916877A DE19916877A1 (en) 1999-04-14 1999-04-14 Discharge lamp with base
PCT/DE2000/000478 WO2000062330A1 (en) 1999-04-14 2000-02-19 Discharge lamp with base

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EP1088335A1 EP1088335A1 (en) 2001-04-04
EP1088335B1 true EP1088335B1 (en) 2012-07-04

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JP (1) JP4619547B2 (en)
KR (1) KR100451453B1 (en)
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DE (1) DE19916877A1 (en)
HU (1) HUP0103722A3 (en)
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KR20010052830A (en) 2001-06-25
US6686681B1 (en) 2004-02-03
JP4619547B2 (en) 2011-01-26
TW451252B (en) 2001-08-21
CA2334879A1 (en) 2000-10-19
HUP0103722A3 (en) 2002-04-29
WO2000062330A1 (en) 2000-10-19
HUP0103722A2 (en) 2002-02-28
DE19916877A1 (en) 2000-10-19
EP1088335A1 (en) 2001-04-04
KR100451453B1 (en) 2004-10-06
CA2334879C (en) 2008-11-18

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