WO2015132952A1

WO2015132952A1 - Screen printing apparatus and screen printing method

Info

Publication number: WO2015132952A1
Application number: PCT/JP2014/055959
Authority: WO
Inventors: 猛志藤本; 英樹吉川; 利昌若林
Original assignee: ヤマハ発動機株式会社
Priority date: 2014-03-07
Filing date: 2014-03-07
Publication date: 2015-09-11
Also published as: CN106061740B; JPWO2015132952A1; JP6297136B2; CN106061740A

Abstract

A screen printing apparatus for printing a pattern on a substrate and plate-releasing the substrate from the mask body, the screen printing apparatus being provided with: a mask comprising a frame for holding the mask body and elastic members interposed between the mask body and the frame; a holding section for holding the substrate; an adhesion section for adhering the mask body when the substrate held by the holding section and the mask body are superposed; and a separating section for relatively separating the holding section and the adhesion section from the frame in directions perpendicular to the substrate plate surface when the mask body is adhering to the adhesion section after a pattern has been printed on the substrate. The present invention makes the manner in which the mask body is removed from the substrate to be uniform, making it possible to release the substrate from the mask body favorably.

Description

Screen printing apparatus and screen printing method

It relates to a screen printing apparatus that prints a pattern on a substrate using a mask.

Conventionally, in screen printing in which a pattern is printed on a printing object such as a substrate using a mask body on which a pattern to be printed is formed, a good printing result is obtained when the printing object is separated from the mask body after printing. Therefore, a technique is known in which a mask body having plasticity is bent, and the mask body is peeled from the mask body while maintaining the state in which the mask body is bent in the direction of the printing object (for example, patents). Reference 1).

JP 2000-263748 A

(Problems to be solved by the invention)
However, in the conventional technique described above, the mask body is peeled from the printing object while keeping the state where the pressing member is brought into contact with the center of the mask body and bent in the direction of the printing object. There is a problem in that the way out of the object is not uniform.
In the present specification, a technique capable of satisfactorily separating the substrate from the mask body is disclosed.

(Means for solving the problem)
A screen printing apparatus disclosed in the present specification is a screen printing apparatus that prints a pattern on a substrate and separates the substrate from the mask body, the frame holding the mask body, the mask body, and the frame A mask having an elastic member interposed therebetween, a holding portion for holding the substrate, and the mask main body in a state where the substrate held by the holding portion and the mask main body overlap each other. The suction part to be sucked and a direction perpendicular to the plate surface of the substrate from the frame in a state where the suction part sucks the mask body after the pattern is printed on the substrate. And a separation portion that is relatively separated from each other.

According to the above screen printing apparatus, the mask main body adsorbed by the adsorbing portion is separated from the frame while receiving a pulling force from the elastic member to the frame side. For this reason, when the suction is released, the mask body is pulled toward the frame by the elastic member, and the substrate and the mask body are separated from each other at high speed. When the substrate and the mask body are separated from each other at high speed, the paste used for printing hardly remains on the mask body side. Therefore, the way the mask body comes off from the substrate becomes uniform, and the substrate can be satisfactorily separated from the mask body.

Further, the adsorbing portion includes a contact member in which a hole is formed on a surface in contact with the mask main body in a state where the substrate and the mask main body overlap, and a suction device that sucks air in the hole, The separation portion may separate the holding portion and the contact member from the frame in a state where the suction portion sucks the mask main body.

According to the above-mentioned screen printing apparatus, for example, compared with the case of suction using a suction cup, control of the magnitude of the suction force and the timing for releasing the suction becomes easier.

Further, the suction unit may include a main control unit that causes the suction device to stop suction at a preset timing after the separation by the separation unit is started.

According to the screen printing apparatus, when printing on a plurality of substrates, it is possible to prevent timing variations between the substrates.

Further, a timing setting unit that sets a timing for stopping suction by the suction device may be further provided, and the main control unit may stop suction by the suction device at a timing set by the timing setting unit.

The tension of the elastic member may differ depending on the mask. According to the screen printing apparatus, since the timing for releasing the suction can be set, an appropriate timing can be set according to the mask.

The suction device may be configured to send air into the hole, and the main control unit may cause the suction device to send air at a timing set by the timing setting unit.

According to the above-mentioned screen printing apparatus, since the inside of the hole becomes positive pressure by sending air into the hole, the plate can be separated more smoothly.

Further, a pressure setting unit that sets a target pressure may be further provided, and the adsorption unit may include a regulator that adjusts the pressure of the air sucked by the suction device to the target pressure set by the pressure setting unit.

According to the above screen printing device, it is possible to set the timing for separating the plates.

Further, the screen printing method disclosed in the present specification is a screen printing method for printing a pattern on a substrate and separating the substrate from the mask body, and includes a frame for holding the mask body and the mask body. An elastic member is interposed between the holding step for holding the substrate by the holding portion, and the mask main body is attached to the suction portion in a state where the substrate held by the holding portion and the mask main body overlap each other. A sucking step for sucking, and after the pattern is printed on the substrate, the holding unit and the sucking unit in a direction perpendicular to the plate surface of the substrate from the frame in a state in which the sucking unit sucks the mask body And a separation step of relatively separating them.

According to the above screen printing method, the substrate can be satisfactorily separated from the mask body.

(The invention's effect)
According to the above screen printing apparatus, the substrate can be satisfactorily separated from the mask body.

FIG. 2 is a schematic diagram illustrating a simplified overall configuration of the screen printing apparatus according to the first embodiment. The perspective view of a printing stage part and a board | substrate fixing | fixed part. The block diagram which simplifies and shows the electrical structure of a screen printing apparatus. The schematic diagram of a mask. 10 is a flowchart of print control processing. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. Schematic diagram showing the flow of printing in time series. The schematic diagram which shows a comparative example. FIG. 3 is a schematic diagram illustrating a result of plate separation using the screen printing apparatus according to the first embodiment. The schematic diagram which shows the force which pulls up the mask main body which concerns on Embodiment 2, and the force which adsorb | sucks a mask main body. FIG. 5 is a block diagram showing a simplified electrical configuration of a screen printing apparatus according to a second embodiment.

<Embodiment 1>
The first embodiment will be described with reference to FIGS.
(1) Overall Configuration of Screen Printing Apparatus First, the overall configuration of the screen printing apparatus 1 according to the first embodiment will be schematically described with reference to FIG. The screen printing apparatus 1 prints a pattern on the substrate 2 using a mask 50 having a mask main body 51, a frame 52 for holding the mask main body 51, and an elastic member 53 interposed between the mask main body 51 and the frame 52. Thereafter, the apparatus separates the substrate 2 from the mask body 51.

The screen printing apparatus 1 includes a frame fixing unit 10, a printing unit 20, a printing stage unit 30, and a substrate fixing unit 40. Here, the screen printing apparatus 1 further includes a main control unit 60, an ejector 61, a setting unit 62, and the like shown in FIG. 3, but these are omitted in FIG.

The frame fixing unit 10 is a mechanism for fixing the frame 52 so that it does not move during printing.
The printing unit 20 is a mechanism for printing a pattern on the substrate 2 using a mask 50. The printing unit 20 includes a squeegee 21 and a squeegee driving unit 22 (see FIG. 3) that moves the squeegee 21 in a direction parallel to the plate surface of the mask main body 51.

Next, the printing stage unit 30 and the substrate fixing unit 40 will be described with reference to FIG.
The printing stage unit 30 is a mechanism for positioning the substrate 2 with respect to the mask main body 51. The printing stage unit 30 moves the lifting table 30A in the front-rear direction (X-axis direction), the left-right direction (Y-axis direction), and the up-down direction (Z-axis direction) with respect to the lifting table 30A and a base (not shown). A stage driving unit 30B (see FIG. 3) for rotating the lifting table 30A around a vertical line parallel to the Z axis with respect to a base (not shown) is provided.

The printing stage unit 30 described above and a main control unit 60 described later constitute a separation unit 90. The vertical direction is an example of a direction perpendicular to the plate surface of the substrate.

The substrate fixing unit 40 is provided in the printing stage unit 30. Accordingly, when the printing stage unit 30 is raised, the substrate fixing unit 40 is also raised, and when the printing stage unit 30 is lowered, the substrate fixing unit 40 is also lowered. The substrate fixing unit 40 includes a conveyor unit 41, a clamp unit 42, a substrate elevating unit 43, an ascending restriction unit 44, and the like.

The conveyor unit 41 is a mechanism for transporting the substrate 2 in the X-axis direction. The conveyor unit 41 includes two

belt units

41A and 41B extending in parallel with the X-axis direction, a belt driving unit 41C (see FIG. 3) for driving the

belt units

41A and 41B, and the like. Each of the

belt units

41A and 41B includes a plurality of pulleys, a belt driven by the plurality of pulleys, and the like.

The clamp part 42 is a mechanism for holding the substrate 2. The clamp unit 42 includes a pair of

clamps

42A and 42B that sandwich and fix the substrate 2 from the Y-axis direction, a clamp drive unit 42C (see FIG. 3) that moves the

clamps

42A and 42B in the Y-axis direction, and the like. A plurality of holes 42D are provided on the upper surfaces of the

clamps

42A and 42B. The hole 42D passes through the

clamps

42A and 42B in the Z-axis direction, and the lower end side is connected to an ejector 61 (see FIG. 3) described later via a pipe (not shown).

The above-described clamp part 42 and the main control part 60 described later constitute a holding part 70. Further, the clamp 42 A, the clamp 42 B, the main control unit 60 described later, and the ejector 61 constitute an adsorption unit 80. The

clamps

42A and 42B described above are examples of the abutting members. That is, in this embodiment, the

clamps

42A and 42B serve as both a holding part and a suction part. The upper surfaces of the

clamps

42A and 42B are an example of a surface that comes into contact with the mask main body in a state where the substrate and the mask main body overlap each other.

The substrate elevating unit 43 is a mechanism for lifting the substrate 2 conveyed by the conveyor unit 41. The substrate elevating unit 43 includes a mounting table 43A, a mounting table driving unit 43B (see FIG. 3) that moves the mounting table 43A up and down in the Z-axis direction with respect to the lifting table 30A. Although omitted in FIG. 2, a plurality of backup pins 43C (see FIG. 1) for supporting the substrate 2 from below are provided on the upper surface of the mounting table 43A.

The rise restricting portion 44 is a mechanism that regulates the rise of the substrate 2 so that the upper surface of the substrate 2 and the upper surfaces of the

clamps

42A and 42B are flush with each other when the substrate 2 is lifted by the mounting table 43A. The ascending restriction portion 44 has a pair of restricting

plates

44A and 44B provided corresponding to the

clamps

42A and 42B, and these restricting

plates

44A and 44B are positioned so as not to restrict the ascent of the substrate 2 (position shown in FIG. 6A). It has a restricting plate driving portion 44C (see FIG. 3) that is displaced to a position (position shown in FIG. 6B) that restricts the rising of the substrate 2.

(2) Electrical Configuration of Screen Printing Apparatus Next, the electrical configuration of the screen printing apparatus 1 will be described with reference to FIG. The screen printing apparatus 1 includes a main control unit 60. In addition to the various drive units described above, an ejector 61, a setting unit 62, and the like are electrically connected to the main control unit 60.

The main control unit 60 includes a CPU 60A, a ROM 60B, a RAM 60C, and the like. The CPU 60A controls each unit of the screen printing apparatus 1 by executing a control program stored in the ROM 60B. The ROM 60B stores a control program executed by the main control unit 60 and various data. The RAM 60C is used as a main storage device for the main control unit 60 to execute various processes.

The ejector 61 is a device that sucks air. As described above, the ejector 61 is connected to the hole 42D through the pipe, and when the ejector 61 sucks air, the inside of the hole 42D becomes negative pressure. Further, the ejector 61 is configured to be able to send out air to make the inside of the hole 42D have a positive pressure. The ejector 61 is an example of a suction device.

The setting unit 62 includes a display device such as a liquid crystal display and various operation buttons. The operator can perform various settings such as “timing for releasing suction” described later by operating the setting unit 62. The setting unit 62 is an example of a timing setting unit.

(3) Configuration of Mask Next, the mask 50 will be described with reference to FIG. FIG. 4 shows a case where the mask 50 is viewed from above in FIG. The mask body 51 is supported via an elastic member 53 inside a rectangular frame 52 formed of a metal such as aluminum or iron. The mask body 51 is made of aluminum, iron, or the like, and has an opening 51A corresponding to a pattern to be printed. The elastic member 53 is formed of a plate-like resin, rubber, or the like. The elastic member 53 may be a spring, for example.

(4) Print Control Process Next, the print control process executed by the main control unit 60 will be described with reference to FIGS. 5 and 6A to 6H. Here, FIGS. 6A to 6H show a case where the screen printing apparatus 1 is viewed from the front side shown in FIG. That is, in FIGS. 6A to 6H, the substrate 2 is transported from the back side to the front side.

In S101, the main control unit 60 controls the conveyor unit 41 to convey the substrate 2 above the placement table 43A as shown in FIG. 6A.
In S102, the main control unit 60 controls the restricting plate driving unit 44C to displace the restricting

plates

44A and 44B to a position where the rising of the substrate 2 is restricted as shown in FIG. 6B. At the position where the ascent of the substrate 2 is restricted, the restricting

plates

44A and 44B are positioned above the substrate 2 in a state where a part thereof is in contact with the upper surfaces of the

clamps

42A and 42B.

The main control unit 60 then controls the mounting table driving unit 43B to raise the mounting table 43A. When the mounting table 43A rises, the substrate 2 is lifted from the conveyor unit 41 and comes into contact with the

regulation plates

44A and 44B. The substrate 2 is restricted from rising further by contacting the restricting

plates

44A and 44B.

The main control unit 60 controls the clamp driving unit 42C to move the two

clamps

42A and 42B to the substrate 2 side. Thereby, the board | substrate 2 is fixed by

clamp

42A and 42B.

In S103, the main control unit 60 controls the regulation plate driving unit 44C to displace the

regulation plates

44A and 44B to positions where the elevation of the substrate 2 is not regulated as shown in FIG. 6C.
In S104, the main control unit 60 controls the stage driving unit 30B to raise the lifting table 30A. Since the

clamps

42A and 42B for fixing the substrate 2 and the mounting table 43A are provided on the lifting table 30A, when the lifting table 30A is raised, the

clamps

42A and 42B and the mounting table 43A are also lifted, as shown in FIG. 6D. As shown, the substrate 2 and the mask body 51 overlap and come into close contact with each other, and the

clamps

42A and 42B and the mask body 51 come into close contact with each other.

In S105, the main control unit 60 controls the ejector 61 to suck air. Thereby, the mask main body 51 is adsorbed by the

clamps

42A and 42B. When the mask main body 51 is adsorbed by the

clamps

42A and 42B, the mask main body 51 can be prevented from being displaced with respect to the substrate 2 during printing.

In S106, the main control unit 60 controls the squeegee driving unit 22 to move the squeegee 21 as shown in FIG. 6E. When the squeegee 21 moves, the paste 80 spreads out evenly on the mask body 51 and fills the openings 51A (see FIG. 4) formed in the mask body 51. As a result, a pattern is printed on the substrate 2.

In S107, the main control unit 60 controls the stage driving unit 30B to lower the lifting table 30A. As shown in FIGS. 6F and 6G, when the lifting table 30A is lowered, the

clamps

42A and 42B are also lowered. As a result, the

clamps

42A and 42B are separated from the frame 52 in a direction perpendicular to the plate surface of the substrate 2. At this time, the main controller 60 lowers the lifting table 30A with the

clamps

42A and 42B adsorbing the mask body 51. For this reason, the mask main body 51 is lowered together with the

clamps

42A and 42B, and the elastic member 53 holding the mask main body 51 extends to increase the force for pulling the mask main body 51 upward.

In S108, the main control unit 60 starts the lowering of the lifting table 30A, and then controls the ejector 61 at a preset timing to stop air suction. As a result, the suction of the mask body 51 by the

clamps

42A and 42B is released. When the suction is released, the mask body 51 is pulled upward by the elastic member 53, and the substrate 2 is separated from the mask body 51. The mask body 51 pulled upward returns to the original position as shown in FIG. 6H.

Here, the timing at which the suction is released may be a timing when a preset time has elapsed since the descent of the lifting table 30A is started, or the lifting table 30A is lowered by a preset distance. It may be timing. This timing can be variably set by the operator by operating the setting unit 62.

(5) Effects of the Embodiment According to the screen printing apparatus 1 according to the first embodiment described above, the

clamps

42A and 42B with the

clamps

42A and 42B adsorbing the mask main body 51 after printing on the substrate 2 are performed. Since the mask body 51 is separated from the frame 52, the mask main body 51 adsorbed by the

clamps

42A and 42B is separated from the frame 52 while receiving the pulling force from the elastic member 53 upward. Therefore, when the suction is released, the mask main body 51 is strongly pulled upward by the elastic member 53, and the substrate 2 and the mask main body 51 are separated from each other at high speed. When the substrate 2 and the mask body 51 are separated from each other at high speed, the paste 80 used for printing hardly remains on the mask body 51 side, so that the substrate 2 can be separated from the mask body 51 satisfactorily. This will be specifically described below.

FIG. 7A is a comparative example showing a result of releasing the plate by lowering the

clamps

42A and 42B in a state where the

clamps

42A and 42B are not adsorbing the mask main body 51. FIG. When the

clamps

42A and 42B are lowered while the

clamps

42A and 42B are not attracting the mask main body 51, the elastic member 53 separates the plate while the force pulling the mask main body 51 upward is small. If the force with which the elastic member 53 pulls the mask body 51 upward is small, the speed at which the substrate 2 and the mask body 51 are separated from each other is reduced. If the separation speed is low, a part of the paste 80 may remain on the mask body 51 side as shown in FIG. 7A.

Further, when the speed of releasing the plate is slow, a portion where the paste 80 is left on the mask body 51 side and a portion where the paste 80 is not left are generated, or a difference is generated in the remaining amount depending on the portion. There may be unevenness in the thickness of the film. Accordingly, the way in which the mask body 51 is detached from the substrate 2 is not uniform, and the substrate 2 cannot be separated from the mask body 51 satisfactorily. Here, the bump refers to the paste 80 remaining on the substrate 2.

On the other hand, FIG. 7B shows a result of performing plate separation using the screen printing apparatus 1 according to the first embodiment. When the plate is separated at a high speed, the paste 80 hardly remains on the mask body 51 side as shown in FIG. 7B. This is presumed to be because the force for separating the mask body 51 and the paste 80 increases when the plate is separated at a high speed. If the paste 80 does not easily remain on the mask body 51 side, it is possible to suppress unevenness in the bump thickness as a result. Therefore, the way in which the mask main body 51 is detached from the substrate 2 is uniform, and the substrate 2 can be satisfactorily separated from the mask main body 51.

Furthermore, according to the screen printing apparatus 1, since the mask main body 51 is sucked by the ejector 61, for example, the magnitude of the sucking force and the timing for releasing the sucking can be easily adjusted as compared with the case of sucking using the sucker.

Furthermore, according to the screen printing apparatus 1, since the suction is released at a preset timing after the lowering of the

clamps

42A and 42B is started, the suction between the substrates 2 is performed when printing on a plurality of substrates 2. It is possible to prevent the release timing from fluctuating.

Furthermore, according to the screen printing apparatus 1, the operator can set the timing for releasing the suction by operating the setting unit 62. Since the tension of the elastic member 53 may differ depending on the mask 50, if the timing for releasing the suction can be set variably, an appropriate timing can be set according to the mask 50.

<Embodiment 2>
Next, a second embodiment of the present invention will be described with reference to FIGS.
In the first embodiment described above, the case where the suction is released by stopping the suction by the ejector 61 has been described as an example. On the other hand, the screen printing apparatus 1 according to the second embodiment lowers the lifting table 30A until the suction is naturally released.

Specifically, as shown in FIG. 8, when the clamps 42 A and 42 B are lowered while the clamps 42 A and 42 B are attracting the mask body 51, the force Fs that the elastic member 53 pulls up the mask body 51 gradually increases. The suction is naturally released when the

clamps

42A and 42B become larger than the force Fv for sucking the mask main body 51 (Fs> Fv).

Here, Fs is a parameter determined from the material and size of the elastic member 53, the distance at the time of separating the plate, and the like, and is a parameter that varies depending on the substrate 2 to be printed and the mask 50 to be used. Fv is a parameter determined from the pressure at which the ejector 61 sucks air, the size of the opening of the hole 42D, and the like.

Even when the

clamps

42A and 42B are lowered until the suction is naturally released, the timing at which the plates are separated can be controlled by adjusting the force Fv for the

clamps

42A and 42B to suck the mask main body 51. Therefore, the screen printing apparatus 1 according to the second embodiment adjusts the force Fv that the

clamps

42A and 42B attract the mask main body 51 by adjusting the pressure with which the ejector 61 sucks air.

As shown in FIG. 9, the screen printing apparatus 1 according to the second embodiment includes a regulator 63 in addition to the configuration of the screen printing apparatus 1 according to the first embodiment. The regulator 63 is provided in the middle of the pipe connecting the hole 42D and the ejector 61, and adjusts the pressure of the air sucked by the ejector 61 to the target pressure.

In the screen printing apparatus 1 according to the second embodiment, the operator can set the above-described target pressure variably by operating the setting unit 62. The setting unit 62 according to the second embodiment is an example of a pressure setting unit.

According to the screen printing apparatus 1 according to the second embodiment described above, the plate 42 is adjusted by adjusting the force Fv with which the

clamps

42A and 42B attract the mask body 51 when the substrate 2 and the mask body 51 are naturally separated from each other. The timing of leaving can be adjusted.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and the drawings, and for example, the following embodiments are also included in the technical scope.

(1) In the above embodiment, the case where the clamp 42A and the clamp 42B serve as the holding unit 70 and the suction unit 80 has been described as an example. On the other hand, the clamp 42 A and the clamp 42 B may not serve as the holding unit 70 and the suction unit 80. For example, the holes 42D may be provided in the

restriction plates

44A and 44B, and the

restriction plates

44A and 44B may suck the mask main body 51. In this case, the adsorbing portion 80 is configured by the restricting plate 44A, the restricting plate 44B, the main control unit 60, and the ejector 61. In this case, the restricting

plates

44A and 44B are examples of contact members.

(2) In the first embodiment, the suction of air by the ejector 61 is only stopped when releasing the suction. However, the air inside the hole 42D is positively positively fed by sending air from the ejector 61. Also good. In this way, it is possible to quickly eliminate the difficulty of releasing the plate due to the negative pressure, so that it is possible to prevent the plate releasing speed from being slowed by the influence of the negative pressure.

(3) In the above embodiment, the case where the substrate fixing unit 40 is relatively separated from the frame 52 by lowering the substrate fixing unit 40 has been described as an example. On the other hand, the substrate fixing unit 40 may be relatively separated from the frame 52 by raising the frame fixing unit 10, or the substrate fixing unit 40 is lowered and the substrate is fixed by raising the frame fixing unit 10. The fixing unit 40 may be relatively separated from the frame 52.

(4) In the above embodiment, the case where each process is executed by the CPU 60A has been described as an example. On the other hand, the main control unit 60 may include an ASIC, and some of these processes may be executed by the ASIC.

DESCRIPTION OF SYMBOLS 1 ... Screen printing apparatus 2 ... Board | substrate 30 ... Printing stage part (an example of a "separation part")
40 ... Board fixing part 42 ... Clamping part (an example of "holding part")
42A... Clamp (part of “adsorption part”, example of “contact member”)
42B... Clamp (part of “adsorption part”, example of “contact member”)
42C: Clamp driving part (part of “holding part”)
42D ... hole 50 ... mask 51 ... mask body 52 ... frame 53 ... elastic member 60 ... main control part ("holding part", "adsorption part", "separation part" part)
61... Ejector (part of “holding part”, example of “suction device”)
62... Setting unit (an example of “timing setting unit” and “pressure setting unit”)
63 ... Regulator 70 ... Holding part 80 ... Adsorption part 90 ... Separation part

Claims

A screen printing apparatus that prints a pattern on a substrate and separates the substrate from the mask body,
A frame for holding the mask body;
An elastic member interposed between the mask body and the frame;
A mask having
A holding unit for holding the substrate;
An adsorbing portion that adsorbs the mask main body in a state where the substrate held by the holding portion and the mask main body overlap each other;
After the pattern is printed on the substrate, the holding unit and the suction unit are relatively separated from the frame in a direction perpendicular to the plate surface of the substrate while the suction unit is sucking the mask body. A spacing portion;
A screen printing apparatus.
The screen printing apparatus according to claim 1,
The adsorption part is
A contact member in which a hole is formed in a surface in contact with the mask main body in a state where the substrate and the mask main body overlap each other;
A suction device for sucking air in the hole;
Including
The separation unit is a screen printing apparatus that separates the holding unit and the contact member from the frame in a state where the adsorption unit is adsorbing the mask main body.
The screen printing apparatus according to claim 2,
The suction unit includes a main control unit that causes the suction device to stop suction at a preset timing after separation is started by the separation unit.
The screen printing apparatus according to claim 3,
A timing setting unit for setting timing for stopping suction by the suction device;
The screen printing apparatus, wherein the main control unit stops suction by the suction device at a timing set by the timing setting unit.
The screen printing apparatus according to claim 3 or 4, wherein
The suction device is configured to be able to send air into the hole,
The main control unit is a screen printing device that causes the suction device to send out air at a timing set by the timing setting unit.
The screen printing apparatus according to claim 2,
A pressure setting unit for setting a target pressure;
The said adsorption | suction part is a screen printing apparatus containing the regulator which adjusts the pressure of the air attracted | sucked by the said suction device to the target pressure set by the said pressure setting part.
A screen printing method for printing a pattern on a substrate and separating the substrate from the mask body,
An elastic member is interposed between the frame holding the mask body and the mask body,
A holding step of holding the substrate in a holding unit;
An adsorption step of adsorbing the mask body to the adsorption unit in a state where the substrate and the mask body held by the holding unit overlap;
After the pattern is printed on the substrate, the holding unit and the suction unit are relatively separated from the frame in a direction perpendicular to the plate surface of the substrate while the suction unit is sucking the mask body. A separation step;
Including a screen printing method.