WO2015132878A1 - Dispositif de mesure et procédé de mesure - Google Patents

Dispositif de mesure et procédé de mesure Download PDF

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Publication number
WO2015132878A1
WO2015132878A1 PCT/JP2014/055447 JP2014055447W WO2015132878A1 WO 2015132878 A1 WO2015132878 A1 WO 2015132878A1 JP 2014055447 W JP2014055447 W JP 2014055447W WO 2015132878 A1 WO2015132878 A1 WO 2015132878A1
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WO
WIPO (PCT)
Prior art keywords
light
measuring apparatus
scattered
measurement target
grating
Prior art date
Application number
PCT/JP2014/055447
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English (en)
Japanese (ja)
Inventor
育也 菊池
敦也 伊藤
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パイオニア株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to PCT/JP2014/055447 priority Critical patent/WO2015132878A1/fr
Priority to JP2016505980A priority patent/JPWO2015132878A1/ja
Publication of WO2015132878A1 publication Critical patent/WO2015132878A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/662—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
    • G01F1/661—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters using light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements

Definitions

  • the present invention relates to a technical field of a measuring apparatus and a measuring method for measuring a measurement target by irradiating a laser beam.
  • a device that detects the velocity of a fluid using a laser beam Doppler shift for example, a device that detects the velocity of a fluid using a laser beam Doppler shift (so-called laser Doppler) is known.
  • laser Doppler a device that detects the velocity of a fluid using a laser beam Doppler shift
  • Patent Document 1 laser light separated into two by a beam splitter is irradiated to the same location of the fluid to be measured from different angles, and the velocity of the measurement target is detected by Doppler shift of the reflected light.
  • the technology is proposed.
  • the measurement target may be damaged by the laser beam.
  • the measurement target is blood of a living body
  • the components in the blood are destroyed by the laser beam, and there is a possibility of serious influence. Therefore, it is preferable that the power of the laser beam is not too high.
  • the power of the laser beam is low, the S / N ratio (signal-to-noise ratio) of the detection light deteriorates, resulting in a technical problem that accurate measurement cannot be performed.
  • Patent Document 1 when the laser beam separated into two parts is to be irradiated to the same location, high accuracy is required for the optical system on the irradiation side. In addition, there is a technical problem that adjustment work is required every time the measurement target is changed.
  • a measuring apparatus for solving the above-described problem is a separation irradiation means for separating laser light into a plurality of light beams, and irradiating the plurality of light beams to different portions of the measurement target at different angles of incidence, and the plurality of light beams
  • Light receiving means for receiving scattered light scattered by the measurement target.
  • a measurement method for solving the above-described problems includes a separation irradiation step of separating laser light into a plurality of light beams, and irradiating the plurality of light beams to different portions of a measurement target at different incident angles, and the plurality of light beams A light receiving step of receiving scattered light scattered by the measurement target.
  • the measuring apparatus separates laser light into a plurality of light beams, and irradiates the plurality of light beams to different portions of the measurement target at different angles of incidence, and the plurality of light beams
  • Light receiving means for receiving scattered light scattered by the measurement object.
  • the object to be measured for example, a fluid such as blood flowing inside the transparent tube or an individual such as a plate member flowing on the conveyor
  • Laser light is irradiated.
  • the laser beam according to the present embodiment is separated into a plurality of light beams by the separating and irradiating means, and is irradiated to different portions of the measurement target at different incident angles.
  • the separation irradiation unit includes, for example, a grating (diffraction grating), a half mirror, and the like.
  • the plurality of light beams irradiated to the measurement target are scattered (specifically, transmitted or reflected) by the measurement target, and become a plurality of scattered lights.
  • the plurality of scattered lights are received by a common light receiving means.
  • the light receiving means is configured as a photodiode or the like, for example.
  • the intensity of the scattered light received is signaled and used for calculation of the measurement result. More specifically, for example, speed calculation of the measurement target using Doppler shift is executed.
  • the laser light is separated into a plurality of light beams and irradiated at different incident angles at different positions of the measurement target.
  • the power of the laser beam irradiated to the same location can be reduced.
  • the power of the laser light irradiated to one place is reduced compared to the case where the same place is irradiated without separation or the same place after separation. Is done. Therefore, it is possible to reduce damage that the measurement target receives due to laser light irradiation.
  • the separation light flux since the separated light flux only needs to be irradiated to different places (that is, it may not be irradiated to one point), high positional accuracy is not required for the light flux irradiated to the measurement target. Therefore, the adjustment of the optical system is easy and the reliability is improved. In particular, when the measurement target is replaced and the measurement is continued (more specifically, when the measurement is performed by exchanging a tube or the like in which the fluid to be measured flows), the adjustment after the replacement is performed. Little or no need.
  • scattered light scattered at different locations on the measurement target is detected by the light receiving means. That is, the laser beam separated at the time of irradiating the measurement target is also detected by the light receiving means. Therefore, it can be avoided that the intensity of the detection signal is reduced due to the separation of the laser light. As a result, it is possible to obtain a signal having an S / N ratio equivalent to that in the case where the signals are not separated, and perform accurate measurement.
  • the measurement apparatus According to the measurement apparatus according to the present embodiment, it is possible to suitably perform measurement while reducing damage to the measurement target.
  • the separation irradiation unit includes a grating.
  • the laser light is incident on the grating (diffraction grating) and is separated into a plurality of light beams. For this reason, compared with the case where a laser beam is isolate
  • the grating may be a blazed grating.
  • the grating is parallel to the measurement target (that is, the emission surface of the grating and the irradiation surface of the measurement target are parallel). Can be arranged). Therefore, for example, the layout space can be effectively used as compared with the case where the grating is disposed obliquely with respect to the measurement target. As a result, for example, simplification and downsizing of the device configuration can be realized.
  • the said grating may have a condensing effect.
  • the grating it is possible to make the focal positions of the plurality of separated light beams different from each other. Thereby, even if it is a case where the optical path length to each to-be-measured object of a some light beam differs mutually, it can each be suitably condensed on a measurement object position.
  • the separation irradiation unit includes a partial reflection unit that reflects a part of the laser beam.
  • the laser beam is partially reflected by the partially reflecting means configured as a half mirror, for example, and the other part is transmitted. Therefore, the laser beam can be reliably separated into a plurality of light beams.
  • the separation irradiation unit may further include a reflection unit whose position relative to the partial reflection unit is fixed.
  • At least one of the plurality of light beams separated by the reflecting means is reflected by the reflecting means and becomes a light beam directed toward the measurement target.
  • the reflecting means since the reflecting means is fixed in position relative to the partially reflecting means (in other words, configured as a dihedral mirror), the angle of the partially reflecting means and the reflecting means can be adjusted. You don't have to do it separately. Therefore, it is possible to easily adjust the irradiation angle of the laser beam.
  • a post-scattering condensing unit that condenses the scattered light on the light receiving unit is further provided.
  • scattered light irradiated in a relatively wide range can be efficiently collected in the light receiving means. Therefore, the intensity of light detected by the light receiving means can be increased, and as a result, measurement accuracy can be increased.
  • a post-separation condensing unit that condenses the plurality of light fluxes on the measurement target is further provided.
  • the post-separation condensing means can also be used for adjusting the incident angle of a plurality of separated light beams.
  • the separation irradiation unit irradiates the laser beam separately into at least a first light beam and a second light beam, and the first light beam is scattered by the measurement target.
  • the optical path of the first scattered light to the light receiving means is parallel to the optical path of the second light flux, and the second scattered light scattered by the measurement target to the light receiving means.
  • the optical path is parallel to the optical path of the second light flux.
  • the optical path of the first light beam (specifically, the optical path from the first light beam separating and irradiating means to the measurement target) and the optical path of the scattered light of the second light beam (specifically, the second light beam).
  • the optical path from the object to be measured to the light receiving means after scattering of the light beam is parallel to each other.
  • the optical path of the second light beam (specifically, the optical path from the second light beam separating and irradiating means to the measurement target) and the optical path of the scattered light of the first light beam (specifically, the scattering of the first light beam).
  • the optical path from the object to be measured to the light receiving means) is parallel to each other. Therefore, the optical path of the first light beam, the optical path of the second light beam, the optical path of the scattered light of the first light beam, and the optical path of the scattered light of the second light beam form each side of the parallelogram.
  • the detection intensity of scattered light in the light receiving means can be theoretically maximized. Accordingly, measurement can be performed with high accuracy without increasing the power of the laser beam more than necessary. Even if the optical path is not a perfect parallelogram, the above-described effects can be achieved by making the shape close to a parallelogram.
  • the measuring device further includes speed detecting means for detecting the speed of the measurement target from the Doppler shift of the scattered light received by the light receiving means.
  • the speed of the measurement target can be detected using the Doppler shift generated in the scattered light of each of the separated light beams.
  • the speed of the measurement target can be detected using beat signals of a plurality of scattered lights.
  • the measuring apparatus can reduce damage to the measurement target due to the laser beam, and thus is remarkably effective when detecting the speed of blood or the like that can be seriously affected by the damage, for example. Demonstrate.
  • the measurement method includes a separation irradiation step in which laser light is separated into a plurality of light beams, and the plurality of light beams are irradiated to different parts of the measurement target at different incident angles, and the plurality of light beams are A light receiving step for receiving scattered light scattered by the measurement object.
  • the measurement method according to the present embodiment it is possible to suitably perform measurement while reducing damage to the measurement target, similarly to the measurement apparatus according to the present embodiment described above.
  • FIG. 1 is a side view showing the overall configuration of the measuring apparatus according to the first embodiment.
  • the measuring apparatus 1 includes a light source 100, a grating 200, and a detector 500 as main components.
  • the light source 100 is a laser light source configured to output the irradiation light Li.
  • the light source 100 can adjust the output intensity of the laser light.
  • the grating 200 is an example of the “separation irradiation means” in the present invention, and is configured as a binary type grating.
  • the grating 200 separates the irradiation light Li emitted from the light source 100 into separated light Ld1 and Ld2, and irradiates the fluid 400 flowing in the right direction in the drawing in the transparent tube 300.
  • the separated lights Ld1 and Ld2 are incident on the fluid 400 to be measured at different angles at different positions. Specifically, the separated light Ld1 is scattered (transmitted) by the scatterer 401 in the fluid 400. As a result, scattered light Ls1 is emitted from the scatterer 401. On the other hand, the separated light Ld2 is scattered (transmitted) by the scatterer 402 in the fluid 400. As a result, scattered light Ls2 is emitted from the scatterer 402.
  • the detector 500 is an example of the “light receiving means” in the present invention, and is configured as, for example, a photodetector.
  • the detector 500 is disposed on the opposite side of the light source 100 when viewed from the fluid 400, and the scattered light Ls1 and Ls2 transmitted through the fluid 400 can be detected on the detection surface thereof. That is, the detector 500 is configured to detect the interference light of the scattered light Ls1 and Ls2.
  • the intensity of the interference light detected by the detector 500 is converted into a signal and used for various calculations in an arithmetic circuit (not shown). More specifically, the speed of the fluid 400 is calculated by a speed calculation unit which is an example of the “speed detection unit” of the present invention.
  • FIG. 2 to FIG. 4 are side views showing the overall configuration of a modification of the measuring apparatus according to the first embodiment.
  • the detector 500 is disposed on the same side as the light source 100 when viewed from the fluid 400, and the scattered light Ls1b reflected by the fluid 400 on the detection surface. And Ls2b can be detected.
  • the detector 500 may be configured to be able to detect the scattered light Ls1b and Ls2b reflected by the fluid 400, instead of the scattered light Ls1 and Ls2 (see FIG. 1) transmitted through the fluid 400. Even in this case, the measurement can be performed in the same manner as when the transmitted scattered light Ls is detected.
  • a blazed grating 200b is provided instead of the binary grating 200.
  • the blazed grating 200b emits the separated light Ld1 at the same angle as the incident angle of the irradiation light Li (that is, so as to go straight).
  • the blazed grating 200b can be arranged so that the emission surface is parallel to the transparent tube 300. Therefore, for example, the degree of freedom in layout becomes higher compared to the case of using a binary grating 200 (see FIG. 1) in which the emission surface has to be disposed obliquely with respect to the transparent tube 300.
  • a blazed grating 200b is used, and the detector 500 is configured to detect scattered light Ls1b and Ls2b that are reflected light.
  • the grating 200 is a binary type or a blaze type, and whether the measurement target of the detector 500 is transmitted light or reflected light. Absent.
  • FIG. 5 is a conceptual diagram showing a detection sensitivity optimization method.
  • the measurement apparatus 1c shown in FIG. 3 that is, a transmission type apparatus including the blazed grating 200b
  • FIG. 5 shows a detection sensitivity optimization method.
  • the measurement apparatus 1c shown in FIG. 3 that is, a transmission type apparatus including the blazed grating 200b
  • FIG. 3 that is, a transmission type apparatus including the blazed grating 200b
  • other examples are optimized by the same method. Can be done.
  • the angle between the exit surface of the grating 200b and the separated light Ld1 is ⁇ 1, and the angle between the exit surface of the grating 200b and the separated light Ld2 is ⁇ 2.
  • An angle formed by the detection surface of the detector 500 and the scattered light Ls1 is ⁇ 3, and an angle formed by the detection surface of the detector 500 and the scattered light Ls2 is ⁇ 4.
  • the angle between the separating light Ld1 and separating light Ld2 is 2 [Theta]
  • the angle between the scattered light Ls1 and scattered light Ls2 is to 2 [Theta] 2.
  • ⁇ is an angle formed by the 2 ⁇ center line and a line along the direction in which the scatterers 401 and 402 flow
  • ⁇ is an angle formed by the 2 ⁇ 2 center line and the line along the direction in which the scatterers 401 and 402 flow.
  • the frequency ⁇ f of the beat signal can be expressed as the following formulas (1) to (4) using the above parameters, the light frequency fe and the light velocity c.
  • the detection sensitivity increases if ⁇ and the ⁇ 2 code are the same, and the detection sensitivity decreases if they are different.
  • the detection sensitivity is maximized. Therefore, the detection sensitivity can be maximized by adjusting the optical system so that the quadrangle formed by the separated light Ld1 and Ld2 and the scattered light Ls1 and Ls2 is a parallelogram.
  • FIG. 6 is a side view showing the overall configuration of the measuring apparatus according to the comparative example.
  • the irradiation light Li irradiated from the light source is separated by the half mirror 210. That is, the light transmitted through the half mirror 210 is the separated light Ld1, and the light reflected by the half mirror 210 is the separated light Ld2.
  • the separated light Ld2 is reflected by the mirror 220 and travels toward the fluid 400 to be measured.
  • the separated lights Ld1 and Ld2 are irradiated to the same position of the fluid 400. That is, the separated light Ld1 and Ld2 are irradiated to the same scatterer 401.
  • the separated lights Ld1 and Ld2 applied to the scatterer 401 become scattered lights Ls1 and Ls2, respectively, and are detected by the detector 500.
  • the light intensity at the irradiation position is likely to be relatively high, and damage is caused to the fluid 400 that is the measurement target by irradiation.
  • the possibility increases.
  • the measurement target is blood
  • a part of the blood may be destroyed by irradiating a high-intensity laser beam, which may adversely affect the living body.
  • the light intensity detected by the detector 500 is reduced, and the S / N ratio is deteriorated. As a result, there is a possibility that accurate measurement cannot be performed.
  • each of the separated lights Ld1 and Ld2 separated by the grating 200 is different from each other in the fluid 400 (that is, the scatterers 401 and 402). Therefore, if the intensity of the laser light emitted from the light source 100 is the same, the damage received at the same location is halved as compared with the comparative example described above. Moreover, since the scattered lights Ls1 and Ls2 scattered at different locations are detected, the S / N ratio does not deteriorate. That is, according to the measuring apparatus 1 according to the first embodiment, damage to the measurement target can be reduced without deteriorating the detection sensitivity.
  • the incident angles of the separated lights Ld1 and Ld2 can be adjusted by adjusting only the grating 200. Therefore, compared with the case where adjustment is performed using two mirrors as in the comparative example, the adjustment operation can be performed very easily. As a result, the reliability of the apparatus is improved, and furthermore, the cost can be reduced and the apparatus configuration can be simplified by reducing the number of parts.
  • the measuring apparatus 1 As described above, according to the measuring apparatus 1 according to the first embodiment, it is possible to appropriately measure while reducing damage to the measurement target by separating the laser beam and irradiating it at different positions. Is possible.
  • FIG. 7 is a side view showing the overall configuration of the measuring apparatus according to the second embodiment.
  • the second embodiment differs from the first embodiment described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from 1st Example already demonstrated is demonstrated in detail, and description shall be abbreviate
  • the grating 200c has a light condensing effect (lens effect). Therefore, each of the separated lights Ld1 and Ld2 can be efficiently irradiated onto the fluid 400 (specifically, the scatterers 401 and 402). Therefore, the detection sensitivity can be improved without increasing the intensity of the irradiation light Li from the light source 100.
  • the grating 200c can set the focal lengths of the separated lights Ld1 and Ld2 to different values. Therefore, even when the distances from the grating 200c to the scatterers 401 and 402 are different from each other, the separated lights Ld1 and Ld2 can be suitably condensed.
  • FIG. 8 is a side view showing the overall configuration of the measuring apparatus according to the third embodiment.
  • the third embodiment differs from the first and second embodiments described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the already demonstrated 1st and 2nd Example is demonstrated in detail, and description is abbreviate
  • a dihedral mirror 250 is used instead of the grating 200.
  • the dihedral mirror 250 includes a half mirror 251 that separates the irradiation light Li from the light source 100 and a mirror 252 that reflects the separated light Ld2 reflected by the half mirror 251.
  • adjustment work is easy as with the grating 200.
  • the adjustment work can be suitably performed as compared with a configuration in which the half mirror 210 and the mirror 220 are individually adjusted.
  • FIG. 9 is a side view showing the overall configuration of the measurement apparatus according to the fourth embodiment
  • FIG. 10 is a side view showing the overall configuration of a modification of the measurement apparatus according to the fourth embodiment.
  • the fourth embodiment differs from the first to third embodiments described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the 1st-3rd Example already demonstrated is demonstrated in detail, and description is abbreviate
  • a condenser lens 600 is disposed between the transparent tube 300 and the detector 500.
  • the condenser lens 600 is an example of the “post-scattering condensing means” of the present invention, and has a function of condensing the scattered light Ls1 and Ls2 on the detector 500.
  • the condenser lens 600 may be configured as a cylinder lens or the like in addition to a normal lens.
  • an optical member having a light collecting effect may be used instead of a lens.
  • the condenser lens 600 By arranging the condenser lens 600, the scattered light Ls1 and Ls2 can be efficiently detected by the detector 500. Therefore, the detection sensitivity can be improved without increasing the intensity of the irradiation light Li from the light source 100.
  • two condenser lenses 610 and 620 are disposed between the transparent tube 300 and the detector 500.
  • the condensing lens 610 functions as condensing the scattered light Ls1 on the detector 500.
  • the condensing lens 620 functions to condense the scattered light Ls2 onto the detector 500.
  • the dedicated condensing lenses 610 and 620 are arranged for each of the scattered lights Ls1 and Ls2, the scattered lights Ls1 and Ls2 can be collected more efficiently. Therefore, detection sensitivity can be improved more effectively.
  • FIG. 11 is a side view showing the overall configuration of the measuring apparatus according to the fifth embodiment.
  • the fifth embodiment differs from the first to fourth embodiments described above only in part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the already demonstrated 1st-4th Example is demonstrated in detail, and description is abbreviate
  • a condensing lens 700 is disposed between the grating 200 b and the transparent tube 300.
  • the condensing lens 700 is an example of the “post-separation condensing unit” of the present invention, and has a function of condensing the separated lights Ld1 and Ld2.
  • the condensing lens 700 is configured as one lens common to the separated lights Ld1 and Ld2, but a lens may be provided for each of the separated lights Ld1 and Ld2.
  • the scatterers 401 and 402 can be efficiently irradiated with the separated light Ld1 and Ld2. As a result, the detection sensitivity can be improved without increasing the intensity of the irradiation light Li from the light source 100.
  • the traveling directions of the separated lights Ld1 and Ld2 can be changed.
  • the incident angle with respect to the fluid 400 of the separated lights Ld1 and Ld2 can be adjusted to an appropriate value.
  • the incident angles of the separated lights Ld1 and Ld2 may be set so that the incident angles intersect with each other and do not intersect within the transparent tube 300.
  • FIG. 12 is a side view showing the overall configuration of the measuring apparatus according to the sixth embodiment.
  • the sixth embodiment is different from the first to fifth embodiments described above only in a part of the configuration, and the other configurations and operations are substantially the same. For this reason, below, a different part from the already demonstrated 1st-5th Example is demonstrated in detail, and description is abbreviate
  • the irradiation light Li from the light source 100 is separated into three separated lights Ld1, Ld2, and Ld3 in the grating 200c having a light condensing effect.
  • the separated lights Ld1, Ld2, and Ld3 are the 0th order light, the + 1st order light, and the ⁇ 1st order light of the grating 200d, respectively (however, the light that can be used in this embodiment is not limited to these). Absent).
  • the present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification.
  • the measuring method is also included in the technical scope of the present invention.
  • Measuring device 100
  • Light source 200
  • Grating 210
  • Half mirror 220 Mirror 250
  • Two-sided mirror 300
  • Transparent tube 400
  • Condensing lens Li Irradiation light Ld1, Ld2, Ld3 Separated light Ls1, Ls2, Ls3 Scattered light

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Abstract

Un dispositif de mesure (1) est pourvu d'un moyen d'exposition et de séparation (200) pour séparer une lumière laser (Li) en une pluralité de faisceaux lumineux (Ld1, Ld2) et exposer à la lumière la pluralité de faisceaux lumineux sur différentes parties (401, 402) d'un objet en cours de mesure (400) à différents angles d'incidence et d'un moyen de réception de lumière (500) pour recevoir la lumière diffusée (Ls1, Ls2) obtenue de la pluralité de faisceaux de lumière étant diffusés par l'objet en cours de mesure. Ce dispositif de mesure réduit les dommages causés à un objet en cours de mesure dus à la lumière laser et rend possible une mesure appropriée.
PCT/JP2014/055447 2014-03-04 2014-03-04 Dispositif de mesure et procédé de mesure WO2015132878A1 (fr)

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PCT/JP2014/055447 WO2015132878A1 (fr) 2014-03-04 2014-03-04 Dispositif de mesure et procédé de mesure
JP2016505980A JPWO2015132878A1 (ja) 2014-03-04 2014-03-04 測定装置及び測定方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425787A (ja) * 1990-05-21 1992-01-29 Canon Inc ドップラー速度計
JP2012098169A (ja) * 2010-11-02 2012-05-24 Tokai Univ レーザドップラ速度計

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425787A (ja) * 1990-05-21 1992-01-29 Canon Inc ドップラー速度計
JP2012098169A (ja) * 2010-11-02 2012-05-24 Tokai Univ レーザドップラ速度計

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