WO2015129779A1 - Release film for green sheet manufacturing, release film manufacturing method for green sheet manufacturing, green sheet manufacturing method, and green sheet - Google Patents

Release film for green sheet manufacturing, release film manufacturing method for green sheet manufacturing, green sheet manufacturing method, and green sheet Download PDF

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Publication number
WO2015129779A1
WO2015129779A1 PCT/JP2015/055510 JP2015055510W WO2015129779A1 WO 2015129779 A1 WO2015129779 A1 WO 2015129779A1 JP 2015055510 W JP2015055510 W JP 2015055510W WO 2015129779 A1 WO2015129779 A1 WO 2015129779A1
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WIPO (PCT)
Prior art keywords
green sheet
release agent
layer
agent layer
mass
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PCT/JP2015/055510
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French (fr)
Japanese (ja)
Inventor
知巳 深谷
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リンテック株式会社
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Application filed by リンテック株式会社 filed Critical リンテック株式会社
Priority to CN201580010840.9A priority Critical patent/CN106029315B/en
Priority to KR1020167025637A priority patent/KR102128339B1/en
Publication of WO2015129779A1 publication Critical patent/WO2015129779A1/en
Priority to PH12016501696A priority patent/PH12016501696A1/en

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D161/00Coating compositions based on condensation polymers of aldehydes or ketones; Coating compositions based on derivatives of such polymers
    • C09D161/20Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen
    • C09D161/26Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds
    • C09D161/28Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds with melamine
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/283Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polysiloxanes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/42Layered products comprising a layer of synthetic resin comprising condensation resins of aldehydes, e.g. with phenols, ureas or melamines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • C09D5/20Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes for coatings strippable as coherent films, e.g. temporary coatings strippable as coherent films
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/718Weight, e.g. weight per square meter
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/14Polysiloxanes containing silicon bound to oxygen-containing groups
    • C08G77/16Polysiloxanes containing silicon bound to oxygen-containing groups to hydroxyl groups

Definitions

  • the present invention relates to a release film for producing a green sheet, a method for producing a release film for producing a green sheet, a method for producing a green sheet, and a green sheet.
  • release film for producing a green sheet
  • This release film is generally composed of a base material and a release agent layer.
  • the green sheet is formed on such a release film.
  • a ceramic slurry in which ceramic particles and a binder resin are dispersed and dissolved in an organic solvent is applied to obtain a coated product.
  • the green sheet is manufactured by drying the coated material. Moreover, the manufactured green sheet peels from a peeling film, and is used for manufacture of a ceramic capacitor.
  • the surface shape of the green sheet is a shape to which the surface shape of the release film is transferred. Since the surface of the conventional release film was not sufficiently smooth, there were problems such as pinholes formed on the surface of the green sheet produced using the film.
  • a release film examples include a release sheet in which a thermosetting resin layer is provided on one surface of a base sheet, and a release layer is provided on the surface of the thermosetting resin layer (for example, Patent Document 1).
  • An object of the present invention is to suppress or prevent the occurrence of pinholes and partial thickness variations on the surface of a green sheet.
  • an object of the present invention is to provide a release film for producing a green sheet that can suppress or prevent the green sheet from being damaged when the green sheet is peeled from the release film.
  • an object of the present invention is to provide a method for producing a release film for producing a green sheet capable of easily and reliably producing such a release film for producing a green sheet, and to easily and reliably produce a reliable green sheet.
  • An object of the present invention is to provide a green sheet manufacturing method that can be manufactured and to provide a highly reliable green sheet.
  • a release film used in the manufacture of green sheets A substrate having a first surface and a second surface; A smoothing layer provided on the first surface side of the substrate; A release agent layer provided on the surface side of the smoothing layer opposite to the base material,
  • the smoothing layer is formed by heating and curing a composition for forming a smoothing layer containing a melamine resin having a mass average molecular weight of 950 or less as a main component,
  • the release agent layer is formed by heating and curing a release agent layer forming composition containing a melamine resin as a main component and containing polyorganosiloxane,
  • An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less.
  • the smoothing layer forming composition contains a solid content, and the content of the melamine resin having a mass average molecular weight of 950 or less in the solid content of the smoothing layer forming composition is more than 50% by mass.
  • the composition for forming a release agent layer includes a solid content, and the content of the melamine resin in the solid content of the composition for forming a release agent layer is 60% by mass or more (1) or A release film for producing a green sheet according to (2).
  • a method for producing a release film for producing a green sheet according to any one of (1) to (6) above A base material preparation step of preparing the base material having a first surface and a second surface; The smoothing layer forming composition is applied to the first surface side of the base material to form the first coating layer, and then the first coating layer is heated and cured to cure the smoothness.
  • a release agent layer forming step of forming the release agent layer An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less.
  • a green sheet forming material containing ceramic powder and a vehicle containing a binder is provided on the release film for producing a green sheet according to any one of (1) to (6) above, to thereby produce a green sheet precursor
  • a green sheet forming material application step for forming a body is provided on the release film for producing a green sheet according to any one of (1) to (6) above, to thereby produce a green sheet precursor
  • a green sheet forming material application step for forming a body for forming a body
  • a solidifying step for solidifying the green sheet precursor.
  • the release film for producing a green sheet is excellent in surface smoothness. Therefore, according to the release film for producing a green sheet of the present invention, it is possible to suppress or prevent the occurrence of pinholes, partial thickness variations and the like on the surface of the green sheet. Moreover, according to this invention, it is excellent in the peelability with respect to the green sheet formed on the peeling film for green sheet manufacture. Therefore, it is possible to suppress or prevent the green sheet from being damaged when the green sheet is peeled off. Therefore, according to this invention, the peeling film for green sheet manufacture which can manufacture a highly reliable green sheet can be provided.
  • a release film for producing a green sheet that can produce a highly reliable green sheet can be produced easily and reliably.
  • the manufacturing method of the green sheet which can manufacture a reliable green sheet easily and reliably can be provided.
  • a reliable green sheet can be provided.
  • FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
  • the release film for producing a green sheet the method for producing a release film for producing a green sheet, the method for producing a green sheet, and the green sheet of the present invention will be described in detail based on preferred embodiments.
  • the release film for producing a green sheet of the present invention is used for producing a green sheet.
  • the manufactured green sheet is used for manufacture of a ceramic capacitor etc., for example.
  • the release film for producing a green sheet of the present invention includes a substrate, a smoothing layer, and a release agent layer.
  • the smoothing layer is formed by heating and hardening a composition for forming a smoothing layer containing a melamine resin having a mass average molecular weight of 950 or less as a main component.
  • the release agent layer is formed by heating and curing a release agent layer forming composition containing a melamine resin as a main component and containing polyorganosiloxane.
  • the arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. It has the feature in that.
  • the release film for producing a green sheet is excellent in the smoothness of the outer surface of the release agent layer. Therefore, if a green sheet is manufactured using this release film for manufacturing a green sheet, it is possible to suppress or prevent the occurrence of pinholes, partial thickness variations, and the like on the surface of the green sheet. Moreover, by having such a feature, the release film for producing a green sheet is excellent in releasability from the green sheet formed on the release film for producing a green sheet. Therefore, it can suppress or prevent that a green sheet breaks when peeling a green sheet from a peeling film. Therefore, if the release film for producing a green sheet of the present invention is used, a highly reliable green sheet can be provided. And when the obtained green sheet is laminated
  • FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
  • the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
  • a release film for green sheet production (hereinafter simply referred to as “release film”) 1 includes a substrate 11 having a first surface 111 and a second surface 112, and The smoothing layer 12 provided on the first surface 111 and the release agent layer 13 provided on the third surface (surface opposite to the base material 11) 121 of the smoothing layer 12 are provided. . That is, the release film 1 has a three-layer structure in which the base material 11, the smoothing layer 12, and the release agent layer 13 are laminated so as to be joined to each other in this order.
  • the green sheet is formed by applying a dissolved ceramic slurry on the outer surface 131 of the release agent layer 13, for example.
  • a method for producing a green sheet using such a release film 1 will be described in detail later.
  • each layer which comprises the peeling film 1 is demonstrated one by one.
  • the substrate 11 has a function of imparting physical strength such as rigidity and flexibility to the release film 1.
  • the base material 11 has a first surface 111 and a second surface 112.
  • the substrate 11 is not particularly limited, and includes, for example, polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin, polyolefin resins such as polypropylene resin and polymethylpentene resin, and plastics such as polycarbonate.
  • polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin
  • polyolefin resins such as polypropylene resin and polymethylpentene resin
  • plastics such as polycarbonate.
  • the film etc. which were formed with material are mentioned.
  • the substrate 11 may be a single layer film or a multilayer film of two or more layers of the same type or different types.
  • the substrate 11 is preferably a polyester film, more preferably a polyethylene terephthalate film, and even more preferably a biaxially stretched polyethylene terephthalate film.
  • Polyester films are less prone to dust and the like during processing and use. Therefore, if a green sheet is produced using the release film 1 having a polyester film as the base material 11, it is possible to effectively prevent a ceramic slurry coating failure due to dust or the like. As a result, a green sheet with fewer pinholes can be obtained.
  • the base material 11 may contain a filler or the like in addition to the above materials.
  • the filler include silica, titanium oxide, calcium carbonate, kaolin, and aluminum oxide.
  • the substrate 11 one or more of these can be used in combination.
  • mechanical strength can be imparted to the substrate 11, and the slipperiness of the front and back surfaces (the first surface 111 and the second surface 112) of the substrate 11 can be improved.
  • Can do For this reason, it can suppress especially that the front and back of the peeling film 1 adheres (blocking) when the peeling film 1 is stored in the wound state.
  • the base material 11 preferably has an arithmetic average roughness Ra 2 of the first surface 111 of 1 to 100 nm and a maximum protrusion height Rp 2 of the first surface 111 of 10 to 800 nm.
  • the arithmetic average roughness Ra 2 of the first surface 111 is more preferably 5 to 80 nm, and further preferably 10 to 50 nm.
  • the maximum protrusion height Rp 2 of the first surface 111 is more preferably 20 to 500 nm, and further preferably 30 to 300 nm.
  • the smoothing layer 12 even when the smoothing layer 12 described later is relatively thin.
  • the unevenness of the first surface 111 of the substrate 11 can be embedded more suitably.
  • the 3rd surface 121 of the smoothing layer 12 can also be smoothed.
  • the unevenness of the first surface 111 of the substrate 11 can be suitably prevented from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12.
  • the base material 11 having the arithmetic mean roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 within the above ranges is relatively inexpensive and easily available.
  • the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 are, for example, using an optical interference type surface shape observation device (trade name “WYKO-1100”, manufactured by Veeco Co., Ltd.) It can be determined by measuring in PSI mode, 50 magnification, measurement range: 91.2 ⁇ 119.8 ⁇ m.
  • “arithmetic average roughness and maximum protrusion height” refer to values measured as described above.
  • the base material 11 has an arithmetic average roughness Ra 3 of the second surface (back surface of the release film 1) 112 of 1 to 100 nm and a maximum protrusion height Rp 3 of the second surface 112 of 10 to 100 nm. 800 nm is preferred.
  • the arithmetic average roughness Ra 3 of the second surface 112 is more preferably 5 to 80 nm, and further preferably 10 to 50 nm.
  • the maximum protrusion height Rp 3 of the second surface 112 is more preferably 20 to 500 nm, and further preferably 30 to 300 nm.
  • the release film 1 can be wound and stored in a roll shape around a core material such as paper, plastic, or metal as necessary.
  • the air release becomes favorable when the release film 1 is wound into a roll shape, Winding deviation can be effectively suppressed. Therefore, when winding the release film 1, it is not necessary to increase the winding tension, and it is possible to suppress the deformation of the winding core portion caused by the winding tension.
  • the release film 1 when the release film 1 is wound up and stored in a roll shape, the release agent layer 13 and the base surface It is possible to more effectively prevent the occurrence of blocking that occurs when the second surface 112 of the material 11 contacts with no gap. Therefore, the roll-shaped release film 1 can be easily fed out.
  • the average film thickness of the substrate 11 is not particularly limited, but is preferably 10 to 300 ⁇ m, and more preferably 15 to 200 ⁇ m.
  • the peeling film 1 has moderate softness
  • the smoothing layer 12 is provided on the first surface 111 of the substrate 11.
  • the smoothing layer 12 has a function of reducing the unevenness of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13.
  • the smoothing layer 12 is formed by applying a smoothing layer forming composition on the first surface 111 of the substrate and applying a first coating layer (the smoothing layer forming composition on the first surface 111 of the substrate). After forming the layer obtained by coating, the first coating layer can be obtained by heating and curing.
  • a composition for forming a smoothing layer contains a melamine resin having a mass average molecular weight of 950 or less as a main component.
  • the said main component means the component in which the content rate in solid content of the composition for smoothing layer formation exceeds 50 mass%.
  • Such a composition for forming a smoothing layer has an appropriate viscosity and fluidity before being applied to the first surface 111 of the substrate 11 and heated. Therefore, if the smoothing layer 12 is formed on the 1st surface 111 of the base material 11 using such a composition for smoothing layer formation, the unevenness
  • composition for forming a smoothing layer containing the melamine resin it is possible to suppress or prevent the unevenness of the base material 11 from affecting the outer surface 131 of the release film 1.
  • the unevenness of the first surface 111 of the substrate 11 can be obtained by using the smoothing layer forming composition as described above. Can be suitably embedded. For this reason, even if it is a case where the unevenness
  • the resulting smoothing layer 12 is particularly excellent in chemical resistance.
  • the composition for forming a smoothing layer may contain a melamine resin having a mass average molecular weight of 950 or less as a main component.
  • a melamine resin having a mass average molecular weight of 300 to 700 is mainly used. It is preferable to include it as a component, and more preferable to include a melamine resin having a mass average molecular weight of 350 to 500 as a main component. Thereby, the effect mentioned above can be exhibited notably.
  • the mass average molecular weight of the melamine resin exceeds the upper limit, the fluidity of the composition for forming a smoothing layer is lowered. Therefore, the unevenness of the first surface 111 of the base material 11 may not be sufficiently embedded by the smoothing layer 12. As a result, the third surface 121 of the smoothing layer 12 may have a shape that follows the unevenness of the first surface of the substrate 11. Therefore, there is a possibility that the unevenness of the first surface 111 of the substrate 11 cannot be suppressed from affecting the outer surface 131 of the release agent layer 13.
  • Examples of the melamine resin having a mass average molecular weight within the above range include a monomethoxymethylated melamine resin, a dimethoxymethylated melamine resin, a trimethoxymethylated melamine resin, a tetramethoxymethylated melamine resin, a pentamethoxymethylated melamine resin, and a hexamethoxymethylated resin.
  • Methoxymethylated melamine resin butylated melamine resin, monomethylol melamine resin, dimethylol melamine resin, trimethylol melamine resin, tetramethylol melamine resin, pentamethylol melamine resin, hexamethylol melamine resin, imino group-containing methoxymethylated melamine resin, etc. Is mentioned.
  • the melamine resin hexamethoxymethylated melamine resin is preferable from the viewpoint of excellent reactivity. Thereby, even if the smoothing layer 12 having a relatively thin film thickness is formed, the unevenness of the first surface 111 of the substrate 11 can be filled more easily and reliably.
  • such a smoothing layer 12 is excellent in chemical resistance. Thereby, when apply
  • the content of the melamine resin in the smoothing layer forming composition may be more than 50% by mass as described above, but more preferably 60% by mass or more. More preferably, it is 65 mass% or more. Thereby, before apply
  • Such a composition for forming a smoothing layer containing the melamine resin preferably further contains a diluent having a hydroxyl group (reactive diluent), and preferably contains a diluent having a hydroxyl group at both molecular ends. More preferably, a glycol-based compound is further included.
  • Such a diluent reduces the viscosity of the smoothing layer forming composition. Moreover, when the composition for smoothing layer formation containing such a diluent is heated, a diluent will couple
  • the glycol compound is a compound having a hydroxyl group at both molecular ends, a relatively small molecular weight, and a lower viscosity than the melamine resin. Therefore, when the composition for smoothing layer formation contains a glycol compound, the viscosity of the composition for smoothing layer formation containing the said melamine resin falls more. Therefore, the smoothing layer forming composition having more appropriate fluidity can be obtained.
  • glycol compound examples include ethanediol, 1,3-propanediol, 1,4-butanediol, 2-methyl-1,3-propanediol, and the like.
  • 2-methyl-1,3-propanediol is preferable as the glycol compound.
  • the content of the diluent having a hydroxyl group in the composition for forming a smoothing layer is preferably 10 to 45% by mass, and preferably 15 to 40% by mass. % Is more preferable.
  • the viscosity of the smoothing layer-forming composition may become very high depending on the type of material contained in the smoothing layer-forming composition. There is. Moreover, even if the content rate of the diluent which has a hydroxyl group exceeds the said upper limit, the effect by containing the diluent which has a hydroxyl group cannot be heightened any more. Moreover, the content rate of materials other than the diluent which has a hydroxyl group contained in the composition for smoothing layer formation will fall.
  • the smoothing layer forming composition preferably contains an acidic catalyst as a curing catalyst.
  • the acidic catalyst acts as a crosslinking reaction catalyst that promotes the crosslinking reaction of the melamine resin. Therefore, when the composition for smoothing layer formation containing an acidic catalyst is heated and the crosslinking reaction of a melamine resin is started, the reaction rate of the crosslinking reaction can be accelerated. Thereby, the hardening reaction of the composition for smoothing layer formation can be advanced more efficiently.
  • the acid catalyst is not particularly limited and may be any catalyst as long as it functions as a crosslinking reaction catalyst as described above.
  • the acidic catalyst include organic acidic catalysts such as p-toluenesulfonic acid and methanesulfonic acid.
  • the acidic catalyst one or two or more of these can be used in combination.
  • the acidic catalyst preferably contains p-toluenesulfonic acid.
  • the content of the acidic catalyst in the smoothing layer forming composition is preferably 0.1 to 15% by mass, and preferably 0.5 to 10% by mass. More preferred.
  • the rate at which the smoothing layer-forming composition is cured may be very slow. is there. Moreover, even if the content rate of an acidic catalyst exceeds the said upper limit, the effect by containing an acidic catalyst cannot be heightened any more. Moreover, the content rate of materials other than the acidic catalyst contained in the composition for smoothing layer formation will fall.
  • the composition for smoothing layer formation may be comprised so that a solvent may be included as needed.
  • the solvent is not particularly limited.
  • ketones such as dimethyl ketone, methyl ethyl ketone, diethyl ketone, and cyclohexanenon
  • aromatic hydrocarbons such as benzene, toluene, and xylene
  • aliphatic hydrocarbons such as hexane, heptane, and octane.
  • Aliphatic hydrocarbons such as hexane, heptane and octane
  • alcohols such as methanol, ethanol and isopropanol, and mixed solvents thereof.
  • the smoothing layer forming composition may contain other components other than the above-described materials (melamine resin, diluent having a hydroxyl group, acidic catalyst, and solvent) as necessary.
  • Other components include, for example, thermosetting resins other than the melamine resin (melamine resin having a mass average molecular weight of 950 or less), diluents other than a diluent having a hydroxyl group, curing catalysts other than acidic catalysts, surface conditioners, Examples thereof include dyes, dispersants, and antistatic agents.
  • the arithmetic average roughness Ra 4 of the third surface 121 is preferably 10 nm or less.
  • the maximum protrusion height Rp 4 of the third surface 121 is preferably 200 nm or less.
  • the unevenness of the first surface 111 of the substrate 11 affects the outer surface 131 of the release agent layer 13. This can be prevented more suitably. As a result, the unevenness of the first surface 111 of the substrate 11 can be reliably prevented from affecting the outer surface 131.
  • the smoothing layer 12 can suppress the unevenness of the first surface 111 from affecting the outer surface 131. It is difficult. As a result, in order to reduce the unevenness of the first surface 111 from affecting the outer surface 131, it is necessary to make the thickness of the smoothing layer 12 larger than the thickness of the smoothing layer 12 within the above range. There is a case. Further, it may be necessary to further provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12.
  • the smoothing layer 12 when the maximum protrusion height Rp 4 of the third surface 121 exceeds the upper limit value, it is difficult for the smoothing layer 12 to suppress the unevenness of the first surface 111 from affecting the outer surface 131. It is in a state. As a result, in order to reduce the unevenness of the first surface 111 from affecting the outer surface 131, it is necessary to make the thickness of the smoothing layer 12 larger than the thickness of the smoothing layer 12 within the above range. There is a case. Further, it may be necessary to further provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12.
  • the average film thickness of the smoothing layer 12 is not particularly limited, but is preferably 0.3 to 2 ⁇ m, and more preferably 0.4 to 1 ⁇ m. Thereby, the unevenness
  • the average film thickness of the smoothing layer 12 is less than the lower limit value, the smoothness of the outer surface 131 becomes insufficient depending on the film thickness of the release agent layer 13 or the like. Therefore, when the green sheet is formed on the release agent layer 13, there is a possibility that pinholes and partial thickness variations may occur in the green sheet. Moreover, when the average film thickness of the smoothing layer 12 exceeds the above upper limit, depending on the components constituting the composition for forming the smoothing layer, curling of the release film 1 is likely to occur due to curing shrinkage of the smoothing layer 12. There is a risk.
  • a release agent layer 13 is provided on the third surface 121 of the smoothing layer 12.
  • the release agent layer 13 has a function of imparting peelability to the release film 1.
  • the release agent layer 13 can be obtained by heating and curing the release agent layer forming composition.
  • a release agent layer-forming composition contains a melamine resin as a main component and also contains a polyorganosiloxane.
  • the said main component means the component in which the content rate in solid content of the composition for release agent layer formation exceeds 50 mass%.
  • the release agent layer 13 formed using such a release agent layer forming composition is in a state where components derived from polyorganosiloxane are segregated in the vicinity of the outer surface 131. This is because the compatibility between the melamine resin contained in the release agent layer forming composition and the polyorganosiloxane is low. Specifically, the composition obtained by applying the release agent layer forming composition on the smoothing layer 12 and applying the second application layer (the release agent layer forming composition on the smoothing layer 12). ) And the second coating layer is heated to cure, the compatibility between the melamine resin and the polyorganosiloxane is low, so the component derived from the polyorganosiloxane is near the surface of the second coating layer. This is because segregation easily occurs.
  • This polyorganosiloxane is a component having excellent releasability from the green sheet. Therefore, when the component derived from polyorganosiloxane is segregated in the vicinity of the outer surface 131, the release film 1 is excellent in releasability from the green sheet. As a result, a green sheet is formed on the outer surface 131 of the release film 1, and the green sheet is prevented from adhering to the release film 1 more than necessary when the green sheet is to be released from the release film 1. Or it can be prevented. That is, it is possible to suppress or prevent the green sheet from being peeled off from the release film 1 and being damaged.
  • the content of the melamine resin in the release agent layer forming composition may be more than 50% by mass as described above, but more preferably 60% by mass or more. More preferably, it is 65 mass% or more. Thereby, before apply
  • the composition for forming a release agent layer contains a melamine resin as a main component, but preferably contains a melamine resin having a mass average molecular weight of 950 or less as a main component, and has a mass average molecular weight of 300 to 700. It is more preferable to contain a melamine resin as a main component, and it is more preferable to include a melamine resin having a mass average molecular weight of 350 to 500 as a main component. Thereby, the viscosity of the release agent layer forming composition can be moderated, and the release agent layer forming composition has appropriate fluidity.
  • the release agent layer 13 is formed using this release agent layer forming composition, the unevenness of the base material 11 that cannot be embedded by the smoothing layer 12 can be embedded more accurately.
  • the release agent layer forming composition having a mass average molecular weight within the above range is excellent in chemical resistance.
  • the release agent layer forming composition containing a solvent is applied onto the smoothing layer 12 to form the release agent layer 13, the release agent layer 13 swells or dissolves and falls off. Can be avoided.
  • the melamine resin include monomethoxymethylated melamine resin, dimethoxymethylated melamine resin, trimethoxymethylated melamine resin, tetramethoxymethylated melamine resin, pentamethoxymethylated melamine resin, hexamethoxy Methylated melamine resin, butylated melamine resin, monomethylol melamine resin, dimethylol melamine resin, trimethylol melamine resin, tetramethylol melamine resin, pentamethylol melamine resin, hexamethylol melamine resin, imino group-containing methoxymethylated melamine resin, etc. Can be mentioned.
  • the melamine resin one or a combination of two or more of these can be used.
  • the melamine resin is preferably a hexamethoxymethylated melamine resin.
  • the unevenness of the first surface 111 of the substrate 11 that could not be filled with the smoothing layer 12. Even if there is, the unevenness can be embedded more accurately.
  • the melamine resin contained in the release agent layer forming composition and the melamine resin contained in the smoothing layer forming composition are both preferably the same, and in particular, are hexamethoxymethylated melamine resins. Is preferred.
  • the adhesiveness to the smoothing layer 12 of the releasing agent layer 13 can further be improved. For this reason, it is possible to prevent the release agent layer 13 from unintentionally peeling from the smoothing layer 12.
  • the smoothing layer 12 and the release agent layer 13 formed using such a smoothing layer forming composition and a release agent layer forming composition, respectively, are excellent in chemical resistance.
  • the polyorganosiloxane preferably has a reactive functional group such as a carboxyl group, a methoxy group, or a hydroxyl group, and is particularly preferably a silanol-terminated polydimethylsiloxane having a hydroxyl group at the molecular end.
  • the polyorganosiloxane since the polyorganosiloxane has a reactive functional group, the polyorganosiloxane has reactivity with the melamine resin. Therefore, when the release agent layer-forming composition is heated and cured, the polyorganosiloxane can form a crosslinked structure with the melamine resin as the main skeleton. Therefore, when a green sheet is formed on the obtained release film 1, it is possible to suppress transfer of components derived from the polyorganosiloxane of the release agent layer 13 to the green sheet.
  • the content of the polyorganosiloxane in the release agent layer forming composition is preferably 3 to 15% by mass, and particularly preferably 5 to 12% by mass.
  • the release property of the release agent layer 13 may be increased. It becomes insufficient. As a result, the green sheet may not be normally peeled from the release film 1.
  • the second coating layer formed on the smoothing layer 12 obtained by applying the release agent layer forming composition on the smoothing layer 12.
  • the amount of segregation of components derived from polyorganosiloxane that segregates in the vicinity of the surface of the formed layer) increases. This may cause spots on the surface of the second coating layer.
  • coating a ceramic slurry on the outer surface 131 of the obtained peeling film 1 there exists a possibility that the coating property of a ceramic slurry may deteriorate and the flip of a ceramic slurry may generate
  • Such a composition for forming a release agent layer containing the melamine resin preferably further contains a diluent having a hydroxyl group (reactive diluent), and preferably contains a diluent having a hydroxyl group at both molecular ends. More preferably, a glycol-based compound is further included.
  • Such a diluent reduces the viscosity of the release agent layer forming composition. Moreover, when the composition for forming a release agent layer containing such a diluent is heated, the diluent bonds (crosslinks) with the melamine resin. Therefore, when the release agent layer forming composition contains such a diluent, the fluidity of the release agent layer forming composition can be made more suitable. Therefore, even if the smoothing layer 12 has the unevenness of the base material 11 that could not be embedded, the unevenness can be embedded more accurately.
  • the glycol compound is a compound having a hydroxyl group at both molecular ends, has a relatively small molecular weight, and has a lower viscosity than the melamine resin. Therefore, the viscosity of the composition for forming a release agent layer can be further reduced by including a glycol compound. Therefore, a release agent layer forming composition having more appropriate fluidity can be obtained.
  • glycol compounds examples include methanediol, ethanediol, 1,3-propanediol, 1,4-butanediol, 2-methyl-1,3-propanediol, and the like. Of these, 2-methyl-1,3-propanediol is preferred as the glycol compound.
  • the viscosity of the composition for forming the release agent layer can be set optimally. As a result, even if the smoothing layer 12 has unevenness of the substrate 11 that could not be embedded, the unevenness can be embedded more accurately.
  • the release agent layer forming composition contains such a diluent having a hydroxyl group
  • the content of the diluent having a hydroxyl group in the release agent layer forming composition is 10 to 45 masses. % Is preferable, and 15 to 40% by mass is more preferable.
  • the viscosity of the release agent layer-forming composition may become very high depending on the type of material contained in the release agent layer-forming composition. There is. Moreover, even if the content rate of the diluent which has a hydroxyl group exceeds the said upper limit, the effect by containing the diluent which has a hydroxyl group cannot be heightened any more. Moreover, the content rate of materials other than the diluent which has a hydroxyl group contained in the composition for release agent layer formation will fall.
  • the release agent layer forming composition preferably contains an acidic catalyst as a curing catalyst.
  • the acidic catalyst acts as a crosslinking reaction catalyst that promotes the crosslinking reaction of the melamine resin. Therefore, when the release agent layer forming composition contains an acidic catalyst, the curing reaction of the release agent layer forming composition can be advanced more efficiently.
  • the acidic catalyst is not particularly limited, and any acidic catalyst may be used as long as it functions as a crosslinking reaction catalyst with the melamine resin.
  • the acidic catalyst include organic acidic catalysts such as p-toluenesulfonic acid and methanesulfonic acid.
  • the acidic catalyst one or a combination of two or more of these can be used.
  • the acidic catalyst contains p-toluenesulfonic acid.
  • the content of the acidic catalyst in the release agent layer forming composition is preferably 0.1 to 15% by mass, and preferably 0.5 to 10% by mass. More preferred.
  • the rate of curing of the release agent layer-forming composition may be very slow. is there. Moreover, even if the content rate of an acidic catalyst exceeds the said upper limit, the effect by containing an acidic catalyst cannot be heightened any more. Moreover, the content rate of materials other than the acidic catalyst contained in the composition for release agent layer formation will fall.
  • the composition for forming a release agent layer may contain a solvent, if necessary.
  • the solvent is not particularly limited.
  • ketones such as dimethyl ketone, methyl ethyl ketone, diethyl ketone, and cyclohexanenon
  • aromatic hydrocarbons such as benzene, toluene, and xylene
  • aliphatic hydrocarbons such as hexane, heptane, and octane.
  • Aliphatic hydrocarbons such as hexane, heptane and octane
  • alcohols such as methanol, ethanol and isopropanol, and mixed solvents thereof.
  • the content of the solvent in the release agent layer forming composition is not particularly limited. What is necessary is just to select suitably as content rate of a solvent so that the viscosity of the composition for release agent layer formation at the time of forming the release agent layer 13 on the smoothing layer 12 may be made into an appropriate range.
  • composition for forming a release agent layer may contain other components other than the above-described materials (melamine resin, diluent having a hydroxyl group, acidic catalyst, and solvent) as necessary.
  • the other components include thermosetting resins other than the melamine tree, diluents other than diluents having a hydroxyl group, curing catalysts other than acidic catalysts, surface conditioners, dyes, dispersants, antistatic agents, and the like. It is done.
  • the outer surface 131 of the release agent layer 13 (the outer surface of the release film 1) has an arithmetic average roughness Ra 1 is a 8nm or less, and a maximum projection height Rp 1 of the outer surface 131 50 nm or less.
  • an arithmetic average roughness Ra 1 of the outer surface 131 is preferably at 6nm or less.
  • the maximum protrusion height Rp 1 of the outer surface 131 is preferably 40 nm or less.
  • the uneven shape of the outer surface 131 is transferred to the green sheet when the green sheet is formed. This can be suppressed or prevented. Therefore, it can prevent more suitably that a pinhole etc. generate
  • the release agent layer 13 preferably has an average film thickness of 0.3 to 2 ⁇ m, and more preferably 0.5 to 1 ⁇ m.
  • the thickness of the release agent layer 13 is less than the lower limit value, the smoothness of the release agent layer 13 becomes insufficient depending on the material constituting the release agent layer 13 or the like. Therefore, when a green sheet is formed on the release film 1, there is a possibility that pinholes and partial thickness variations occur in the green sheet.
  • the thickness of the release agent layer 13 exceeds the upper limit, curling may occur easily in the release film 1 due to curing shrinkage of the release agent layer 13.
  • the manufacturing method of the peeling film 1 of this embodiment is the base material preparation process which prepares the base material 11, apply
  • Forming a smoothing layer 12 by heating and curing the first coating layer, and a release agent layer forming composition on the third surface 121 of the smoothing layer 12 Is applied to form a second coating layer, and the second coating layer is heated and cured to form a release agent layer 13.
  • the base material 11 is prepared.
  • the base material 11 having the configuration described above can be used.
  • the first surface 111 of the substrate 11 can be subjected to a surface treatment such as an oxidation method or a primer treatment. Thereby, the adhesiveness of the base material 11 and the smoothing layer 12 provided on the base material 11 can be improved.
  • Such a surface treatment may be appropriately selected according to the type of the substrate 11 or the like.
  • the surface treatment include corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone treatment, and ultraviolet irradiation treatment.
  • corona discharge treatment it is more preferable to use corona discharge treatment as the surface treatment because it is excellent in adhesiveness with the smoothing layer 12 and the treatment operation is simple.
  • a smoothing layer forming composition is prepared.
  • the composition for smoothing layer formation may be comprised only with the melamine resin as mentioned above.
  • the composition for smoothing layer formation may be comprised with the mixture which mixed the diluent which has a hydroxyl group as mentioned above, an acidic catalyst, a solvent, and another component as needed.
  • a liquid coating composition for forming a smoothing layer is applied onto the first surface 111 of the substrate 11 and dried to obtain a first coating layer.
  • the composition for forming a smoothing layer has appropriate fluidity. For this reason, the unevenness
  • Examples of the method for applying the smoothing layer forming composition include a gravure coating method, a bar coating method, a spray coating method, a spin coating method, an air knife coating method, a roll coating method, a blade coating method, a gate roll coating method, Examples include a die coating method.
  • the gravure coating method and the bar coating method are more preferable as the method for applying the smoothing layer forming composition. Thereby, the 1st application layer of the target thickness can be formed easily.
  • the smoothing layer 12 is formed by heating and curing the obtained first coating layer.
  • the first coating layer By heating the first coating layer in which the irregularities of the first surface 111 are accurately embedded, the first coating layer can be cured while maintaining the smoothness of the outer surface of the first coating layer. As a result, the third surface 121 of the resulting smoothing layer 12 can be sufficiently smoothed.
  • the composition for smoothing layer formation contains a solvent
  • the 1st coating layer (the composition for smoothing layer formation is made into 1st of a board
  • the solvent in the layer obtained by coating on the surface 111 is removed, and the smoothing layer 12 is obtained.
  • the heating conditions are not particularly limited, but the heating temperature is preferably 120 ° C. or higher and 140 ° C. or lower, and the heating time is preferably 30 seconds or longer.
  • the heating temperature is within the above range, when the smoothing layer forming composition contains a solvent or the like, the warping or cracking of the smoothing layer 12 due to evaporation of the solvent or the like during heating is prevented. Can do.
  • the release agent layer 13 is formed on the third surface 121 of the smoothing layer 12.
  • a release agent layer forming composition is prepared.
  • the release agent layer forming composition may be composed of only the melamine resin and polyorganosiloxane as described above.
  • the release agent layer-forming composition may comprise a mixture in which a diluent having a hydroxyl group, an acidic catalyst, a solvent, and other components as described above are mixed as necessary.
  • a second release layer is obtained by applying a liquid release agent layer forming composition on the third surface 121 of the smoothing layer 12 and drying it.
  • the method exemplified in the method of applying the smoothing layer forming composition described above can be used.
  • the gravure coating method and the bar coating method are more preferable as the method for applying the release agent layer forming composition. Thereby, the 2nd application layer of the target thickness can be formed easily.
  • the release agent layer 13 is formed by heating and curing the obtained second coating layer. Thereby, the outer surface 131 of the release agent layer 13 can be sufficiently smoothed.
  • the second application layer (the release agent layer forming composition is smoothed layer 12 by heating and curing the second application layer). While the solvent in the layer obtained by coating on the top is removed, the release agent layer 13 is obtained.
  • the heating conditions are not particularly limited, but the heating temperature is preferably 120 ° C. or higher and 140 ° C. or lower, and the heating time is preferably 30 seconds or longer. Thereby, it is possible to prevent the release agent layer 13 from being unintentionally altered such as a decrease in smoothness of the release agent layer 13 due to heat shrinkage, and the release agent layer 13 can be formed particularly efficiently.
  • the heating temperature is within the above range, when the release agent layer forming composition contains a solvent or the like, the occurrence of warping or cracking of the release agent layer 13 due to evaporation of the solvent or the like during heating is particularly prevented. be able to. As described above, the release film 1 can be obtained.
  • a highly reliable release film 1 having excellent smoothness and excellent peelability can be produced easily and reliably.
  • a green sheet is manufactured using such a release film 1, it is possible to prevent a pinhole or the like from being generated on the surface of the green sheet.
  • the method for producing a green sheet of the present invention is a method for producing a green sheet using the release film for producing a green sheet of the present invention as described above.
  • the green sheet manufacturing method of the present embodiment provides a green sheet precursor by forming ceramic slurry (green sheet forming material) containing ceramic powder and a vehicle containing a binder on the release film 1 to form a green sheet precursor.
  • Ceramic slurry contains ceramic powder and a vehicle containing a binder.
  • the ceramic powder is not particularly limited, and examples thereof include powder containing alumina, zirconia, aluminum silicate, barium titanate, silicon carbide, silicon nitride, aluminum nitride and the like.
  • the ceramic powder one or a combination of two or more of these can be used.
  • barium titanate (BaTiO 3 ) is preferable as the ceramic powder.
  • Barium titanate has an extremely high relative dielectric constant and is effective for forming a ceramic capacitor using the obtained green sheet.
  • the ceramic powder may further contain subcomponent materials in addition to the above-described materials.
  • auxiliary component material examples include oxides and compounds that become oxides upon firing.
  • the compound that becomes an oxide upon firing include carbonates, oxalates, nitrates, hydroxides, and organometallic compounds.
  • the shape of such ceramic powder is not particularly limited, and examples thereof include a spherical shape, an elliptical sphere shape, a scale shape, a disc shape, an elliptical disc shape, a cylindrical shape, a rectangular parallelepiped shape, and a needle shape.
  • the average particle size is preferably 0.05 to 3.0 ⁇ m, and more preferably 0.1 to 0.7 ⁇ m.
  • the method for producing the ceramic powder is not particularly limited, and examples thereof include a wet method such as a coprecipitation method, a sol-gel method, an alkali hydrolysis method, a precipitation mixing method, and a hydrothermal synthesis method, and a dry method.
  • a ceramic powder containing barium titanate can be obtained by mixing subcomponent raw materials with barium titanate synthesized by a hydrothermal synthesis method.
  • the ceramic powder containing barium titanate can also be obtained by a dry method in which a mixture of barium carbonate (BaCO 3 ), titanium oxide (TiO 2 ), and auxiliary component raw materials is calcined to cause a solid phase reaction. .
  • the content of the ceramic powder in the ceramic slurry is not particularly limited, but is preferably about 20 to 80% by mass.
  • the vehicle may be an organic vehicle in which a binder is dissolved in an organic solvent, or may be an aqueous vehicle in which a water-soluble binder is dissolved in water.
  • the binder is not particularly limited, and examples thereof include ethyl cellulose, polyvinyl butyral, polyvinyl alcohol, cellulose, and a water-soluble acrylic resin.
  • the binder one or a combination of two or more of these can be used.
  • ethyl cellulose and polyvinyl butyral can be used as binders contained in the organic vehicle.
  • Polyvinyl alcohol, cellulose, and water-soluble acrylic resin can be used as a binder contained in an aqueous vehicle.
  • the content of the binder in the ceramic slurry is not particularly limited, but is preferably about 2 to 10% by mass.
  • the organic solvent is not particularly limited, and examples thereof include terpineol, butyl carbitol, methyl ethyl ketone, acetone, ethanol, toluene and the like.
  • the organic solvent one or a combination of two or more of these can be used.
  • the ceramic slurry may contain a plasticizer, a dispersant, a lubricant, an antistatic agent, an antioxidant and the like as necessary.
  • plasticizer examples include polyethylene glycol and phthalic acid esters such as dioctyl phthalate and dibutyl phthalate.
  • the content of the plasticizer in the ceramic slurry is not particularly limited, but is preferably about 0.1 to 5% by mass.
  • examples of the dispersant include oleic acid, rosin, glycerin, octadecylamine, ethyl oleate, menseden oil and the like.
  • the content of the dispersant in the ceramic slurry is not particularly limited, but is preferably about 0.1 to 5% by mass.
  • Application of the ceramic slurry onto the release film 1 can be performed, for example, after the release film 1 is unwound from a roll (winding) of the release film 1 stored in a rolled state.
  • the ceramic slurry can be applied by, for example, a doctor blade method, a lip coat method, a roll coat method, a gravure coat method, a die coat method, or the like.
  • Solidification of the ceramic slurry can be performed by, for example, heating and drying under reduced pressure to remove the solvent and the like from the ceramic slurry. Thereby, a green sheet is obtained.
  • the green sheet is produced using the release film 1 having excellent smoothness. For this reason, according to the manufacture of the green sheet as described above, it is possible to suppress or prevent occurrence of pinholes and partial thickness variations in the green sheet.
  • the green sheet is produced using the release film 1 having excellent peelability with respect to the green sheet. For this reason, when peeling the green sheet formed on the peeling film 1, it can suppress or prevent that a green sheet adheres to the peeling film 1 more than necessary. That is, it is possible to suppress or prevent the green sheet from being smoothly peeled off from the release film 1 and being damaged.
  • the green sheet of the present invention is manufactured by using the green sheet manufacturing method of the present invention as described above.
  • a green sheet is obtained by the above green sheet manufacturing method using the release film 1.
  • the green sheet thus formed on the release film 1 is, for example, printed with a paste-like internal electrode on its surface, and is peeled from the release film 1 after being cut into a predetermined size.
  • the peeled green sheets are laminated and then hydrostatically pressed and cut again into a predetermined shape and size. Thereafter, the green sheet can be used as a ceramic capacitor by performing a binder removal treatment, installation of external electrodes, firing, and plating treatment.
  • the occurrence of pinholes and partial thickness variations is suppressed or prevented as described above. Therefore, when such a green sheet is laminated to form a ceramic capacitor, it is possible to obtain a highly reliable ceramic capacitor in which occurrence of problems due to short circuit or disconnection is prevented.
  • each part which comprises the peeling film for green sheet manufacture of this invention and the green sheet of this invention can be substituted by the arbitrary structures which can exhibit the same function.
  • the manufacturing method of the peeling film for manufacturing the green sheet of the present invention and the manufacturing method of the green sheet of the present invention are not limited to the above-described methods, and optional steps may be added as necessary. .
  • the base material has been described as a single layer structure, but is not limited thereto.
  • the substrate may have a multilayer structure of two or more layers of the same type or different types.
  • the smoothing layer and the release agent layer have been described as single-layer structures, but are not limited thereto.
  • each of the smoothing layer and the release agent layer may have a multilayer structure of two or more layers of the same type or different types.
  • the release film for producing a green sheet has been described as a three-layer structure in which a base material, a smoothing layer, and a release agent layer are joined and laminated in this order.
  • an intermediate layer may be provided between the base material and the smoothing layer.
  • an intermediate layer may be provided between the smoothing layer and the release agent layer.
  • Such an intermediate layer may have a function of improving the adhesion of each layer.
  • the intermediate layer may have a function of further suppressing the generation of charging when the release film for producing a green sheet before forming the green sheet is wound up.
  • melamine resin Mitsubishi Chemical Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass
  • p-toluenesulfonic acid as an acidic catalyst 5
  • a composition for forming a smoothing layer having a solid content of 15% by mass was obtained by mixing part by mass and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1).
  • the obtained composition for forming a smoothing layer was applied onto the first surface 111 of the substrate 11 with a bar coater to obtain a first coating layer.
  • the smoothing layer (thickness: 0.55 ⁇ m) was formed by curing the first coating layer by heating the first coating layer at 120 ° C. for 1 minute.
  • melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 95 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Industry Co., Ltd., KF-9701, solid content 100% by weight]: 5 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio) 4/1) was mixed to obtain a release agent layer-forming composition having a solid content of 15% by mass.
  • the obtained release agent layer-forming composition was applied onto the third surface (the surface opposite to the substrate) of the smoothing layer with a bar coater to obtain a second coating layer.
  • the release agent layer (thickness: 0.50 ⁇ m) was formed by curing the second application layer by heating the second application layer at 120 ° C. for 1 minute.
  • Example 2 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
  • Melamine resin [Made by Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass]: 65 parts by mass and glycol compound [2-methyl-1, 3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., mass average molecular weight 90, solid content 100%]: 30 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, isopropyl alcohol and isobutyl alcohol And a mixed solvent (mass ratio 4/1) were mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
  • melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass]: 65 parts by mass and glycol compound [2-methyl- 1,3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., mass average molecular weight 90, solid content 100%]: 30 parts by mass of silanol-terminated polydimethylsiloxane as a silicone compound [manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content 100% by mass]: 5 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1).
  • a composition for forming a release agent layer having a solid content of 15% by mass was obtained.
  • Example 3 Biaxially stretched polyethylene terephthalate film as a substrate [thickness: 31 ⁇ m, arithmetic average roughness Ra 2 of first surface: 19 nm, maximum protrusion height Rp 2 of first surface: 216 nm, arithmetic average of second surface
  • a release film for producing a green sheet was produced in the same manner as in Example 1 except that the roughness Ra 3 : 19 nm and the maximum projection height Rp 3 of the second surface Rp 3 : 216 nm were used.
  • Example 6 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of each layer (smoothing layer and release agent layer) was changed as shown in Table 1.
  • Example 2 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer was changed to 0.20 ⁇ m.
  • Example 3 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the release agent layer forming composition obtained as described below was used.
  • Melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 99 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Manufactured by KF-9701, solid content: 100% by mass]: 1 part by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1) And a release agent layer forming composition having a solid content of 15% by mass.
  • Example 4 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the release agent layer forming composition obtained as described below was used.
  • Melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 80 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Manufactured by KF-9701, solid content: 100% by mass]: 20 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1) And a release agent layer forming composition having a solid content of 15% by mass.
  • Example 5 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
  • a mixture of a stearyl-modified alkyd compound and a methylated melamine compound [manufactured by Hitachi Chemical Polymer Co., Ltd., trade name “Tesfine 303”, mass average molecular weight 15000, solid content 48% by mass]: 100 parts by mass and a silicone compound Silanol-terminated polydimethylsiloxane (manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content: 100% by mass): 2.53 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 3 parts by mass, and isopropyl alcohol And a mixed solvent of isobutyl alcohol (mass ratio 4/1) were mixed to obtain a release agent layer forming composition having a solid content of 15% by mass.
  • a silicone compound Silanol-terminated polydimethylsiloxane manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content
  • Example 6 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
  • Polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, weight average molecular weight 3000]: 80 parts by mass, methylated melamine compound as a crosslinking agent [manufactured by Hitachi Chemical Co., Ltd., Product name “Tesfine 200”, solid content 80 mass%]: 20 mass parts mixture: 100 mass parts, p-toluenesulfonic acid as acidic catalyst: 3 mass parts, mixed solvent of toluene and methyl ethyl ketone (mass) Ratio 1/1) was mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
  • polyester compound manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000]: 80 parts by mass, methylated melamine compound [Hitachi Chemical Polymer Co., Ltd.]
  • Example 7 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used. 100 parts by mass of linear octylated melamine resin [trade name “RP-30”, manufactured by Sanba Laboratory, solid content concentration 30% by mass, mass average molecular weight 2000], and 5 parts by mass of p-toluenesulfonic acid as an acidic catalyst And a mixed solvent of toluene / methyl ethyl ketone (mass ratio 1/1) were mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
  • linear octylated melamine resin trade name “RP-30”, manufactured by Sanba Laboratory, solid content concentration 30% by mass, mass average molecular weight 2000
  • p-toluenesulfonic acid as an acidic catalyst
  • Table 1 summarizes the configurations and the like of the release films for producing green sheets of each Example and each Comparative Example.
  • melamine resin [trade name “Cymel 303” manufactured by Mitsui Cytec Co., Ltd., hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass] is “A1”, glycol compound [2-methyl-1 , 3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., weight average molecular weight 90, solid content 100%] is “A2”, a mixture of stearyl-modified alkyd compound and methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “ "Tesfine 303", mass average molecular weight 15000, solid content 48% by mass] "A3”, polyester compound [manufactured by Toyobo Co., Ltd., trade name "Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000] 80 Part by mass and methylated melamine compound as a crosslinking agent [manufactured by Hitachi Chemical Polymer Co.,
  • each content rate of a thermosetting resin, a reactive diluent, and polyorganosiloxane is the ratio of the thermosetting resin and the reactive diluent in the whole composition for smoothing layer formation (solid content).
  • the ratio of the thermosetting resin, the reactive diluent and the polyorganosiloxane in the entire composition (solid content) for forming the release agent layer is the ratio of the thermosetting resin and the reactive diluent in the whole composition for smoothing layer formation (solid content).
  • the average film thicknesses of the substrate, the smoothing layer, and the release agent layer were measured with a reflective film thickness meter “F20” (manufactured by Filmetrics Co., Ltd.).
  • the said average film thickness measured the film thickness in arbitrary 12 places in the base material etc. which were cut
  • the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface of the base material the arithmetic average roughness Ra 3 and the maximum protrusion of the second surface of the base material Height Rp 3 , arithmetic average roughness Ra 4 and maximum protrusion height Rp 4 of the third surface of the smoothing layer, and arithmetic average roughness Ra 1 and maximum protrusion height Rp 1 of the outer surface of the release agent layer
  • a double-sided tape was affixed to a glass plate.
  • a substrate is fixed on the double-sided tape so that the surface opposite to the surface to be measured is the glass plate side, and an optical interference type surface shape observation device (product surface “WYKO-1100”, stock Measured using a company Veeco).
  • the measurement conditions were PSI mode, 50 magnification, and measurement range: 91.2 ⁇ 119.8 ⁇ m.
  • the ceramic slurry is placed on the outer surface of the release film (outer surface of the release agent layer) obtained in each example and each comparative example with a die coater so that the thickness of the green sheet becomes 1 ⁇ m. Then, coating was performed over a width of 250 mm and a length of 10 m to form a green sheet precursor.
  • the green sheet precursor was dried at 80 ° C. for 1 minute. Thereby, the peeling film in which the green sheet was formed on the outer surface was obtained.
  • the release film on which the green sheet was formed was irradiated with light from the release film side with a fluorescent lamp, the green sheet surface was visually observed, and the coating property of the slurry was evaluated according to the following criteria.
  • A There was no pinhole in the green sheet.
  • B 1 to 5 pinholes were found on the green sheet.
  • C Six or more pinholes were found on the green sheet.
  • the polyvinyl butyral resin layer was transferred to a polyester tape by peeling the release film from the polyvinyl butyral resin layer.
  • the surface (observation surface) of the polyvinyl butyral resin layer on the side of the release film that was in contact with the release agent layer was observed using a light interference type surface shape observation apparatus “WYKO-1100” [manufactured by Veeco Co., Ltd.]. did. Specifically, by counting recesses having a depth of 150 nm or more to which the shape of the release agent layer was transferred within a range of 91.2 ⁇ 119.8 ⁇ m on the observation surface in PSI mode and 50 magnifications, The number of recesses in the release agent layer was evaluated based on the judgment criteria.
  • the release film for producing a green sheet of the present invention was excellent in the coating property of the ceramic slurry and the peelability of the formed green sheet. Moreover, from the evaluation of the number of recesses of the release agent layer, it was found that the release film for producing a green sheet of the present invention has an effect of suppressing the occurrence of pinholes and partial thickness variations in the green sheet. On the other hand, satisfactory results were not obtained in the comparative example.
  • the release film for producing a green sheet of the present invention includes a base material having a first surface and a second surface, a smoothing layer provided on the first surface side of the base material, and the smoothing layer.
  • a release agent layer provided on the surface opposite to the substrate, and the smoothing layer is a smoothing layer forming composition comprising a melamine resin having a mass average molecular weight of 950 or less as a main component. It is formed by heating and curing, and the release agent layer is formed by heating and curing a release agent layer forming composition containing melamine resin as a main component and containing polyorganosiloxane.
  • the arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. .
  • Release film for green sheet production 11 ... substrate 111 ... first surface 112 ... second surface (back surface of release film) 12 ... Smoothing layer 121 ... 3rd surface (surface opposite to the base material of a smoothing layer) 13 ... Release agent layer 131 ... Outer surface of release agent layer

Abstract

This release film for green sheet manufacturing is characterized by the following: including a base material (11), a smoothing layer (12), and a release agent layer (13); the smoothing layer (12) is formed by heating and curing a smoothing layer formation composition that includes as the main component a melamine resin with a mass average molar weight of 950 or less; the release agent layer (13) includes a melamine resin as the main component, and is formed by heating and curing a release agent layer formation composition that includes polyorganosiloxane; the arithmetic mean roughness (Ra1) of an outer surface (131) being 8nm or less and the maximum projection height (Rp1) of the outer surface (131) being 50nm or less.

Description

グリーンシート製造用剥離フィルム、グリーンシート製造用剥離フィルムの製造方法、グリーンシートの製造方法、およびグリーンシートPeeling film for producing green sheet, method for producing peeling film for producing green sheet, method for producing green sheet, and green sheet
 本発明は、グリーンシート製造用剥離フィルム、グリーンシート製造用剥離フィルムの製造方法、グリーンシートの製造方法、およびグリーンシートに関する。 The present invention relates to a release film for producing a green sheet, a method for producing a release film for producing a green sheet, a method for producing a green sheet, and a green sheet.
 セラミックコンデンサーの製造において、グリーンシートを形成するためにグリーンシート製造用剥離フィルム(以下、「剥離フィルム」という。)が用いられている。 In the production of ceramic capacitors, a release film for producing a green sheet (hereinafter referred to as “release film”) is used to form a green sheet.
 この剥離フィルムは、一般に基材と剥離剤層とから構成される。グリーンシートは、このような剥離フィルム上に形成される。グリーンシートの製造は、まず、セラミックス粒子とバインダー樹脂とを有機溶媒に分散、溶解させたセラミックスラリーを塗工し、塗工物を得る。この塗工物を乾燥することでグリーンシートは製造される。また、製造されたグリーンシートは、剥離フィルムから剥離して、セラミックコンデンサーの製造に用いられる。 This release film is generally composed of a base material and a release agent layer. The green sheet is formed on such a release film. In the production of the green sheet, first, a ceramic slurry in which ceramic particles and a binder resin are dispersed and dissolved in an organic solvent is applied to obtain a coated product. The green sheet is manufactured by drying the coated material. Moreover, the manufactured green sheet peels from a peeling film, and is used for manufacture of a ceramic capacitor.
 剥離フィルムを用いたグリーンシートの製造においては、グリーンシートの表面形状は、剥離フィルムの表面形状が転写された形状となる。従来の剥離フィルムの表面は十分に平滑ではなかったため、それを用いて製造されるグリーンシートの表面にピンホールが生じる等の問題があった。 In the production of a green sheet using a release film, the surface shape of the green sheet is a shape to which the surface shape of the release film is transferred. Since the surface of the conventional release film was not sufficiently smooth, there were problems such as pinholes formed on the surface of the green sheet produced using the film.
 そこで、剥離フィルムの表面の凹凸を可能な限り抑えることで、グリーンシートに対する凹凸の影響を低減させる試みが行われてきた。このような剥離フィルム(剥離シート)として、基材シートの一方の表面に、熱硬化樹脂層を設け、該熱硬化樹脂層の表面に剥離層が設けられている剥離シートが挙げられる(例えば、特許文献1参照)。 Therefore, attempts have been made to reduce the influence of the unevenness on the green sheet by suppressing the unevenness on the surface of the release film as much as possible. Examples of such a release film (release sheet) include a release sheet in which a thermosetting resin layer is provided on one surface of a base sheet, and a release layer is provided on the surface of the thermosetting resin layer (for example, Patent Document 1).
 しかしながら、近年のセラミックコンデンサーの小型化、高密度化に伴って、グリーンシートのさらなる薄膜化が求められている。このため、従来の剥離フィルムを用いて薄いグリーンシートを製造しようとすると、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が生じ易いという問題があった。 However, with the recent miniaturization and high density of ceramic capacitors, there is a demand for further thinning of the green sheets. For this reason, when it tried to manufacture a thin green sheet using the conventional peeling film, there existed a problem that the pinhole, the dispersion | variation in partial thickness, etc. occurred easily on the surface of a green sheet.
特開2007-069360号公報JP 2007-069360 A
 本発明の目的は、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを抑制または防止することにある。加えて、本発明の目的は、剥離フィルムからグリーンシートを剥離する際にグリーンシートが破損することを抑制または防止することができるグリーンシート製造用剥離フィルムを提供することにある。また、本発明の目的は、かかるグリーンシート製造用剥離フィルムを容易かつ確実に製造することができるグリーンシート製造用剥離フィルムの製造方法を提供すること、信頼性の高いグリーンシートを容易かつ確実に製造することが可能なグリーンシートの製造方法を提供すること、および信頼性の高いグリーンシートを提供することにある。 An object of the present invention is to suppress or prevent the occurrence of pinholes and partial thickness variations on the surface of a green sheet. In addition, an object of the present invention is to provide a release film for producing a green sheet that can suppress or prevent the green sheet from being damaged when the green sheet is peeled from the release film. In addition, an object of the present invention is to provide a method for producing a release film for producing a green sheet capable of easily and reliably producing such a release film for producing a green sheet, and to easily and reliably produce a reliable green sheet. An object of the present invention is to provide a green sheet manufacturing method that can be manufactured and to provide a highly reliable green sheet.
 このような目的は、下記(1)~(9)の本発明により達成される。
 (1) グリーンシートの製造に用いられる剥離フィルムであって、
 第1の面と第2の面とを有する基材と、
 前記基材の前記第1の面側に設けられた平滑化層と、
 前記平滑化層の前記基材と反対の面側に設けられた剥離剤層と、を有し、
 前記平滑化層は、質量平均分子量が950以下のメラミン樹脂を主成分として含む平滑化層形成用組成物を加熱して硬化させることにより形成されており、
 前記剥離剤層は、メラミン樹脂を主成分として含み、かつ、ポリオルガノシロキサンを含む剥離剤層形成用組成物を加熱して硬化させることにより形成されており、
 前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。
Such an object is achieved by the present inventions (1) to (9) below.
(1) A release film used in the manufacture of green sheets,
A substrate having a first surface and a second surface;
A smoothing layer provided on the first surface side of the substrate;
A release agent layer provided on the surface side of the smoothing layer opposite to the base material,
The smoothing layer is formed by heating and curing a composition for forming a smoothing layer containing a melamine resin having a mass average molecular weight of 950 or less as a main component,
The release agent layer is formed by heating and curing a release agent layer forming composition containing a melamine resin as a main component and containing polyorganosiloxane,
An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
 (2) 前記平滑化層形成用組成物は固形分を含み、前記平滑化層形成用組成物の前記固形分中における前記質量平均分子量が950以下のメラミン樹脂の含有量は、50質量%超である上記(1)に記載のグリーンシート製造用剥離フィルム。 (2) The smoothing layer forming composition contains a solid content, and the content of the melamine resin having a mass average molecular weight of 950 or less in the solid content of the smoothing layer forming composition is more than 50% by mass. The release film for producing a green sheet according to the above (1).
 (3) 前記剥離剤層形成用組成物は固形分を含み、前記剥離剤層形成用組成物の前記固形分中における前記メラミン樹脂の含有量は、60質量%以上である上記(1)または(2)に記載のグリーンシート製造用剥離フィルム。 (3) The composition for forming a release agent layer includes a solid content, and the content of the melamine resin in the solid content of the composition for forming a release agent layer is 60% by mass or more (1) or A release film for producing a green sheet according to (2).
 (4) 前記平滑化層形成用組成物は、さらに、グリコール系化合物を含んでいる上記(1)ないし(3)のいずれかに記載のグリーンシート製造用剥離フィルム。 (4) The release film for producing a green sheet according to any one of (1) to (3), wherein the composition for forming a smoothing layer further contains a glycol compound.
 (5) 前記平滑化層の平均膜厚が、0.3~2μmである上記(1)ないし(4)のいずれかに記載のグリーンシート製造用剥離フィルム。 (5) The release film for producing a green sheet according to any one of (1) to (4), wherein the smoothing layer has an average film thickness of 0.3 to 2 μm.
 (6) 前記剥離剤層の平均膜厚が、0.3~2μmである上記(1)ないし(5)のいずれかに記載のグリーンシート製造用剥離フィルム。 (6) The release film for producing a green sheet according to any one of (1) to (5), wherein an average film thickness of the release agent layer is 0.3 to 2 μm.
 (7) 上記(1)ないし(6)のいずれかに記載のグリーンシート製造用剥離フィルムの製造方法であって、
 第1の面と第2の面とを有する前記基材を準備する基材準備工程と、
 前記基材の前記第1の面側に、前記平滑化層形成用組成物を塗布して第1の塗布層を形成した後、前記第1の塗布層を加熱して硬化させることにより前記平滑化層を形成する平滑化層形成工程と、
 前記平滑化層の前記基材と反対の面側に、前記剥離剤層形成用組成物を塗布して第2の塗布層を形成した後、前記第2の塗布層を加熱して硬化させることにより、前記剥離剤層を形成する剥離剤層形成工程と、を備え、
 前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
(7) A method for producing a release film for producing a green sheet according to any one of (1) to (6) above,
A base material preparation step of preparing the base material having a first surface and a second surface;
The smoothing layer forming composition is applied to the first surface side of the base material to form the first coating layer, and then the first coating layer is heated and cured to cure the smoothness. A smoothing layer forming step of forming a condensing layer;
The second coating layer is formed by applying the release agent layer forming composition on the surface of the smoothing layer opposite to the base material, and then heating and curing the second coating layer. A release agent layer forming step of forming the release agent layer,
An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Method for producing a release film.
 (8) 上記(1)ないし(6)のいずれかに記載のグリーンシート製造用剥離フィルム上に、セラミックス粉末と、バインダーを含むビヒクルとを含有するグリーンシート形成用材料を付与し、グリーンシート前駆体を形成するグリーンシート形成用材料付与工程と、
 前記グリーンシート前駆体を固化する固化工程と、を有することを特徴とするグリーンシートの製造方法。
(8) A green sheet forming material containing ceramic powder and a vehicle containing a binder is provided on the release film for producing a green sheet according to any one of (1) to (6) above, to thereby produce a green sheet precursor A green sheet forming material application step for forming a body;
And a solidifying step for solidifying the green sheet precursor.
 (9) 上記(8)に記載のグリーンシートの製造方法により製造されたことを特徴とするグリーンシート。 (9) A green sheet produced by the method for producing a green sheet described in (8) above.
 本発明によれば、グリーンシート製造用剥離フィルムは、表面の平滑性に優れる。そのため、本発明のグリーンシート製造用剥離フィルムによれば、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを抑制または防止することができる。また、本発明によれば、グリーンシート製造用剥離フィルム上に形成されたグリーンシートに対する剥離性に優れる。そのため、グリーンシートを剥離する際にグリーンシートが破損することを抑制または防止することができる。したがって、本発明によれば、信頼性の高いグリーンシートを製造することが可能なグリーンシート製造用剥離フィルムを提供することができる。 According to the present invention, the release film for producing a green sheet is excellent in surface smoothness. Therefore, according to the release film for producing a green sheet of the present invention, it is possible to suppress or prevent the occurrence of pinholes, partial thickness variations and the like on the surface of the green sheet. Moreover, according to this invention, it is excellent in the peelability with respect to the green sheet formed on the peeling film for green sheet manufacture. Therefore, it is possible to suppress or prevent the green sheet from being damaged when the green sheet is peeled off. Therefore, according to this invention, the peeling film for green sheet manufacture which can manufacture a highly reliable green sheet can be provided.
 また、本発明によれば、信頼性の高いグリーンシートを製造することができるグリーンシート製造用剥離フィルムを容易かつ確実に製造することができる。また、本発明によれば、信頼性の高いグリーンシートを容易かつ確実に製造することが可能なグリーンシートの製造方法を提供することができる。また、本発明によれば、信頼性の高いグリーンシートを提供することができる。 Also, according to the present invention, a release film for producing a green sheet that can produce a highly reliable green sheet can be produced easily and reliably. Moreover, according to this invention, the manufacturing method of the green sheet which can manufacture a reliable green sheet easily and reliably can be provided. Moreover, according to this invention, a reliable green sheet can be provided.
図1は、本発明のグリーンシート製造用剥離フィルムの横断面図である。FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
 以下、本発明のグリーンシート製造用剥離フィルム、グリーンシート製造用剥離フィルムの製造方法、グリーンシートの製造方法、およびグリーンシートについて好適実施形態に基づいて詳細に説明する。 Hereinafter, the release film for producing a green sheet, the method for producing a release film for producing a green sheet, the method for producing a green sheet, and the green sheet of the present invention will be described in detail based on preferred embodiments.
 ≪グリーンシート製造用剥離フィルム≫
 まず、本発明のグリーンシート製造用剥離フィルムについて説明する。
≪Peeling film for green sheet manufacturing≫
First, the release film for producing the green sheet of the present invention will be described.
 本発明のグリーンシート製造用剥離フィルムは、グリーンシートの製造に用いられるものである。そして、製造されたグリーンシートは、例えば、セラミックコンデンサー等の製造に用いられる。 The release film for producing a green sheet of the present invention is used for producing a green sheet. And the manufactured green sheet is used for manufacture of a ceramic capacitor etc., for example.
 本発明のグリーンシート製造用剥離フィルムは、基材と平滑化層と剥離剤層とを備える。平滑化層は、質量平均分子量が950以下のメラミン樹脂を主成分として含む平滑化層形成用組成物を加熱して硬化させることにより形成されている。また、剥離剤層は、メラミン樹脂を主成分として含み、かつ、ポリオルガノシロキサンとを含む剥離剤層形成用組成物を加熱して硬化させることにより形成されている。そして、本発明のグリーンシート製造用剥離フィルムは、剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、剥離剤層の外表面の最大突起高さRpが50nm以下である点に特徴を有している。 The release film for producing a green sheet of the present invention includes a substrate, a smoothing layer, and a release agent layer. The smoothing layer is formed by heating and hardening a composition for forming a smoothing layer containing a melamine resin having a mass average molecular weight of 950 or less as a main component. The release agent layer is formed by heating and curing a release agent layer forming composition containing a melamine resin as a main component and containing polyorganosiloxane. In the release film for producing a green sheet of the present invention, the arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. It has the feature in that.
 このような特徴を有することにより、グリーンシート製造用剥離フィルムは、剥離剤層の外表面の平滑性に優れる。そのため、このグリーンシート製造用剥離フィルムを用いてグリーンシートを製造すれば、グリーンシートの表面にピンホールや部分的な厚みのばらつき等が発生するのを抑制または防止することができる。また、かかる特徴を有することにより、グリーンシート製造用剥離フィルムは、グリーンシート製造用剥離フィルム上に形成されたグリーンシートに対する剥離性に優れる。そのため、剥離フィルムからグリーンシートを剥離する際にグリーンシートが破損することを抑制または防止することができる。したがって、本発明のグリーンシート製造用剥離フィルムを用いれば、信頼性の高いグリーンシートを提供することができる。そして、得られたグリーンシートを積層してコンデンサを作製したときに、短絡や断線による不具合が発生することを防ぐことができる。 By having such characteristics, the release film for producing a green sheet is excellent in the smoothness of the outer surface of the release agent layer. Therefore, if a green sheet is manufactured using this release film for manufacturing a green sheet, it is possible to suppress or prevent the occurrence of pinholes, partial thickness variations, and the like on the surface of the green sheet. Moreover, by having such a feature, the release film for producing a green sheet is excellent in releasability from the green sheet formed on the release film for producing a green sheet. Therefore, it can suppress or prevent that a green sheet breaks when peeling a green sheet from a peeling film. Therefore, if the release film for producing a green sheet of the present invention is used, a highly reliable green sheet can be provided. And when the obtained green sheet is laminated | stacked and a capacitor | condenser is produced, it can prevent that the malfunction by a short circuit or a disconnection generate | occur | produces.
 以下、本実施形態のグリーンシート製造用剥離フィルム1について説明する。
 図1は、本発明のグリーンシート製造用剥離フィルムの横断面図である。なお、以下の説明では、図1中の上側を「上」、下側を「下」と言う。
Hereinafter, the release film 1 for producing the green sheet of the present embodiment will be described.
FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention. In the following description, the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
 図1に示すように、グリーンシート製造用剥離フィルム(以下、単に「剥離フィルム」という。)1は、第1の面111と第2の面112とを有する基材11と、基材11の第1の面111上に設けられた平滑化層12と、平滑化層12の第3の面(基材11と反対の面)121上に設けられた剥離剤層13とを有している。すなわち、剥離フィルム1は、基材11と、平滑化層12と、剥離剤層13とがこの順に互いに接合するように積層された三層構造をなす。 As shown in FIG. 1, a release film for green sheet production (hereinafter simply referred to as “release film”) 1 includes a substrate 11 having a first surface 111 and a second surface 112, and The smoothing layer 12 provided on the first surface 111 and the release agent layer 13 provided on the third surface (surface opposite to the base material 11) 121 of the smoothing layer 12 are provided. . That is, the release film 1 has a three-layer structure in which the base material 11, the smoothing layer 12, and the release agent layer 13 are laminated so as to be joined to each other in this order.
 なお、剥離フィルム1を用いてグリーンシートを製造する場合には、グリーンシートは、例えば、剥離剤層13の外表面131上に溶解したセラミックスラリーを塗工することにより形成される。このような剥離フィルム1を用いてグリーンシートを製造する方法については後に詳述する。 In addition, when manufacturing a green sheet using the release film 1, the green sheet is formed by applying a dissolved ceramic slurry on the outer surface 131 of the release agent layer 13, for example. A method for producing a green sheet using such a release film 1 will be described in detail later.
 以下に、剥離フィルム1を構成する各層について順次説明する。
 <基材11>
 基材11は、剥離フィルム1に、剛性、柔軟性等の物理的強度を付与する機能を有している。
Below, each layer which comprises the peeling film 1 is demonstrated one by one.
<Substrate 11>
The substrate 11 has a function of imparting physical strength such as rigidity and flexibility to the release film 1.
 基材11は、図1に示すように、第1の面111と第2の面112とを有する。
 基材11としては、特に限定されず、例えば、ポリブチレンテレフタレート樹脂、ポリエチレンテレフタレート樹脂、ポリエチレンナフタレート樹脂などのポリエステル樹脂、ポリプロピレン樹脂やポリメチルペンテン樹脂などのポリオレフィン樹脂、ポリカーボネートなどのプラスチック等を含む材料で形成されたフィルム等が挙げられる。基材11は、単層フィルムであってもよいし、同種または異種の2層以上の多層フィルムであってもよい。
As shown in FIG. 1, the base material 11 has a first surface 111 and a second surface 112.
The substrate 11 is not particularly limited, and includes, for example, polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin, polyolefin resins such as polypropylene resin and polymethylpentene resin, and plastics such as polycarbonate. The film etc. which were formed with material are mentioned. The substrate 11 may be a single layer film or a multilayer film of two or more layers of the same type or different types.
 これらの中でも特に、基材11としては、ポリエステルフィルムであるのが好ましく、ポリエチレンテレフタレートフィルムであるのがより好ましく、二軸延伸ポリエチレンテレフタレートフィルムであるのがさらに好ましい。ポリエステルフィルムは、その加工時や使用時等において、埃等が発生しにくい。そのため、基材11としてポリエステルフィルムを備える剥離フィルム1を使用してグリーンシートを製造すれば、埃等によるセラミックスラリー塗工不良等を特に効果的に防止することができる。その結果、ピンホール等がより少ないグリーンシートを得ることができる。 Among these, the substrate 11 is preferably a polyester film, more preferably a polyethylene terephthalate film, and even more preferably a biaxially stretched polyethylene terephthalate film. Polyester films are less prone to dust and the like during processing and use. Therefore, if a green sheet is produced using the release film 1 having a polyester film as the base material 11, it is possible to effectively prevent a ceramic slurry coating failure due to dust or the like. As a result, a green sheet with fewer pinholes can be obtained.
 また、基材11は、前記のような材料に加え、フィラー等を含んでいてもよい。フィラーとしては、シリカ、酸化チタン、炭酸カルシウム、カオリン、酸化アルミニウム等が挙げられる。基材11としては、これらのうち1種または2種以上を組み合わせて用いることができる。このようなフィラーを含むことにより、基材11に機械的強度を付与することができるとともに、基材11の表裏面(第1の面111および第2の面112)の滑り性を向上させることができる。このため、剥離フィルム1が巻かれた状態で保管されたときに剥離フィルム1の表裏が貼り付くこと(ブロッキング)を特に抑制することができる。 Further, the base material 11 may contain a filler or the like in addition to the above materials. Examples of the filler include silica, titanium oxide, calcium carbonate, kaolin, and aluminum oxide. As the substrate 11, one or more of these can be used in combination. By including such a filler, mechanical strength can be imparted to the substrate 11, and the slipperiness of the front and back surfaces (the first surface 111 and the second surface 112) of the substrate 11 can be improved. Can do. For this reason, it can suppress especially that the front and back of the peeling film 1 adheres (blocking) when the peeling film 1 is stored in the wound state.
 また、基材11は、第1の面111の算術平均粗さRaが1~100nmであり、かつ、第1の面111の最大突起高さRpが10~800nmであるのが好ましい。 The base material 11 preferably has an arithmetic average roughness Ra 2 of the first surface 111 of 1 to 100 nm and a maximum protrusion height Rp 2 of the first surface 111 of 10 to 800 nm.
 特に、第1の面111の算術平均粗さRaは、5~80nmであるのがより好ましく、10~50nmであるのがさらに好ましい。また、第1の面111の最大突起高さRpは、20~500nmであるのがより好ましく、30~300nmであるのがさらに好ましい。 In particular, the arithmetic average roughness Ra 2 of the first surface 111 is more preferably 5 to 80 nm, and further preferably 10 to 50 nm. Further, the maximum protrusion height Rp 2 of the first surface 111 is more preferably 20 to 500 nm, and further preferably 30 to 300 nm.
 第1の面111の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、後述する平滑化層12の膜厚が比較的薄い場合であっても、平滑化層12によって基材11の第1の面111の凹凸をより好適に埋め込むことができる。これにより、平滑化層12の第3の面121も平滑にすることができる。その結果、平滑化層12上に形成された剥離剤層13の外表面131に、基材11の第1の面111の凹凸が影響するのを好適に防ぐことができる。また、第1の面111の算術平均粗さRaおよび最大突起高さRpが前記範囲内である基材11は、比較的安価であるうえに入手が容易である。 When the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 are within the above ranges, the smoothing layer 12 even when the smoothing layer 12 described later is relatively thin. Thus, the unevenness of the first surface 111 of the substrate 11 can be embedded more suitably. Thereby, the 3rd surface 121 of the smoothing layer 12 can also be smoothed. As a result, the unevenness of the first surface 111 of the substrate 11 can be suitably prevented from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12. Moreover, the base material 11 having the arithmetic mean roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 within the above ranges is relatively inexpensive and easily available.
 なお、第1の面111の算術平均粗さRaおよび最大突起高さRpは、例えば、光干渉式表面形状観察装置(商品名「WYKO-1100」、株式会社Veeco社製)を用い、PSIモード、50倍率、測定範囲:91.2×119.8μmにて測定することにより求めることができる。また、本明細書では、特に断りの無い限り、「算術平均粗さおよび最大突起高さ」とは、前記のようにして測定された値のことを指す。 The arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 are, for example, using an optical interference type surface shape observation device (trade name “WYKO-1100”, manufactured by Veeco Co., Ltd.) It can be determined by measuring in PSI mode, 50 magnification, measurement range: 91.2 × 119.8 μm. In the present specification, unless otherwise specified, “arithmetic average roughness and maximum protrusion height” refer to values measured as described above.
 また、基材11は、第2の面(剥離フィルム1の裏面)112の算術平均粗さRaが1~100nmであり、かつ、第2の面112の最大突起高さRpが10~800nmであるのが好ましい。 The base material 11 has an arithmetic average roughness Ra 3 of the second surface (back surface of the release film 1) 112 of 1 to 100 nm and a maximum protrusion height Rp 3 of the second surface 112 of 10 to 100 nm. 800 nm is preferred.
 特に、第2の面112の算術平均粗さRaは、5~80nmであるのがより好ましく、10~50nmであるのがさらに好ましい。また、第2の面112の最大突起高さRpは、20~500nmであるのがより好ましく、30~300nmであるのがさらに好ましい。 In particular, the arithmetic average roughness Ra 3 of the second surface 112 is more preferably 5 to 80 nm, and further preferably 10 to 50 nm. Further, the maximum protrusion height Rp 3 of the second surface 112 is more preferably 20 to 500 nm, and further preferably 30 to 300 nm.
 第2の面112の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、剥離フィルム1をロール状に巻き取る際に、巻きずれ等が生じるのを好適に防ぐことができる。具体的には、剥離フィルム1は、必要に応じて、紙製、プラスチック製または金属製等のコア材にロール状に巻き取り、保管することができる。この際に、第2の面112の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、剥離フィルム1をロール状に巻き取る際に、空気抜けが良好になり、巻きずれを効果的に抑制することができる。そのため、剥離フィルム1を巻き取る際に、巻き取り張力を高める必要が無く、巻き取り張力に起因する巻き芯部の変形を抑制することが可能となる。 When the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface 112 are within the above ranges, it is preferable to prevent winding deviation or the like from occurring when the release film 1 is wound into a roll shape. Can do. Specifically, the release film 1 can be wound and stored in a roll shape around a core material such as paper, plastic, or metal as necessary. At this time, when the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface 112 are within the above ranges, the air release becomes favorable when the release film 1 is wound into a roll shape, Winding deviation can be effectively suppressed. Therefore, when winding the release film 1, it is not necessary to increase the winding tension, and it is possible to suppress the deformation of the winding core portion caused by the winding tension.
 また、第2の面112の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、剥離フィルム1をロール状に巻き取って保管した際に、剥離剤層13と基材11の第2の面112とが隙間なく接触することで生じるブロッキングの発生をより効果的に防止することができる。そのため、ロール状の剥離フィルム1の繰り出しについても、容易に行うことができる。 Further, when the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface 112 are within the above ranges, when the release film 1 is wound up and stored in a roll shape, the release agent layer 13 and the base surface It is possible to more effectively prevent the occurrence of blocking that occurs when the second surface 112 of the material 11 contacts with no gap. Therefore, the roll-shaped release film 1 can be easily fed out.
 また、基材11の平均膜厚は、特に限定されないが、10~300μmであるのが好ましく、15~200μmであるのがより好ましい。これにより、剥離フィルム1は適度な柔軟性を有し、かつ引裂きや破断等に対する耐性に特に優れる。 The average film thickness of the substrate 11 is not particularly limited, but is preferably 10 to 300 μm, and more preferably 15 to 200 μm. Thereby, the peeling film 1 has moderate softness | flexibility, and is especially excellent in the tolerance with respect to tearing, a fracture | rupture, etc.
 <平滑化層12>
 図1に示すように、基材11の第1の面111上には平滑化層12が設けられている。
<Smoothing layer 12>
As shown in FIG. 1, the smoothing layer 12 is provided on the first surface 111 of the substrate 11.
 平滑化層12は、基材11の第1の面111の凹凸が剥離剤層13の外表面131へ影響することを低減する機能を有している。 The smoothing layer 12 has a function of reducing the unevenness of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13.
 この平滑化層12は、平滑化層形成用組成物を基板の第1の面111上に塗布して第1の塗布層(平滑化層形成用組成物を基板の第1の面111上に塗布することで得られた層)を形成した後、第1の塗布層を加熱して硬化させることにより得ることができる。かかる平滑化層形成用組成物は、質量平均分子量が950以下のメラミン樹脂を主成分として含む。ここで、前記主成分とは、平滑化層形成用組成物の固形分中における含有率が50質量%を超える成分のことをいう。 The smoothing layer 12 is formed by applying a smoothing layer forming composition on the first surface 111 of the substrate and applying a first coating layer (the smoothing layer forming composition on the first surface 111 of the substrate). After forming the layer obtained by coating, the first coating layer can be obtained by heating and curing. Such a composition for forming a smoothing layer contains a melamine resin having a mass average molecular weight of 950 or less as a main component. Here, the said main component means the component in which the content rate in solid content of the composition for smoothing layer formation exceeds 50 mass%.
 このような平滑化層形成用組成物は、基材11の第1の面111に塗布して加熱する前において、適度な粘度および流動性を有する。そのため、このような平滑化層形成用組成物を用いて基材11の第1の面111上に平滑化層12を形成すれば、基材11の第1の面111の凹凸をより好適に埋め込むことができる。その結果、平滑化層12の第3の面(平滑化層12の基材11と反対の面)121をより平滑にすることができる。これにより、平滑化層12上に形成される剥離剤層13の外表面(剥離フィルム1の外表面)131を平滑にすることができる。 Such a composition for forming a smoothing layer has an appropriate viscosity and fluidity before being applied to the first surface 111 of the substrate 11 and heated. Therefore, if the smoothing layer 12 is formed on the 1st surface 111 of the base material 11 using such a composition for smoothing layer formation, the unevenness | corrugation of the 1st surface 111 of the base material 11 will be more suitable. Can be embedded. As a result, the third surface 121 of the smoothing layer 12 (the surface opposite to the substrate 11 of the smoothing layer 12) 121 can be made smoother. Thereby, the outer surface 131 (the outer surface of the release film 1) 131 of the release agent layer 13 formed on the smoothing layer 12 can be smoothed.
 このように、前記メラミン樹脂を含む平滑化層形成用組成物を用いれば、剥離フィルム1の外表面131に基材11の凹凸が影響してしまうことを抑制または防止することができる。 Thus, if the composition for forming a smoothing layer containing the melamine resin is used, it is possible to suppress or prevent the unevenness of the base material 11 from affecting the outer surface 131 of the release film 1.
 特に、基材11の第1の面111の凹凸が比較的大きい場合であっても、前記のような平滑化層形成用組成物を用いることで、基材11の第1の面111の凹凸を好適に埋め込むことができる。このため、基材11の第1の面111の凹凸が比較的大きいものを用いた場合であっても、剥離剤層13の外表面131の平滑性に優れた剥離フィルム1を得ることができる。 In particular, even when the unevenness of the first surface 111 of the substrate 11 is relatively large, the unevenness of the first surface 111 of the substrate 11 can be obtained by using the smoothing layer forming composition as described above. Can be suitably embedded. For this reason, even if it is a case where the unevenness | corrugation of the 1st surface 111 of the base material 11 is comparatively large, the peeling film 1 excellent in the smoothness of the outer surface 131 of the releasing agent layer 13 can be obtained. .
 また、質量平均分子量が前記範囲内のメラミン樹脂を含む平滑化層形成用組成物を用いれば、得られた平滑化層12は、耐薬品性に特に優れる。 Further, if a smoothing layer forming composition containing a melamine resin having a mass average molecular weight within the above range is used, the resulting smoothing layer 12 is particularly excellent in chemical resistance.
 また、平滑化層形成用組成物は、前述したように、質量平均分子量が950以下のメラミン樹脂を主成分として含んでいればよいが、特に、質量平均分子量が300~700のメラミン樹脂を主成分として含むのが好ましく、質量平均分子量が350~500のメラミン樹脂を主成分として含むのがより好ましい。これにより、前述した効果を顕著に発揮することができる。 Further, as described above, the composition for forming a smoothing layer may contain a melamine resin having a mass average molecular weight of 950 or less as a main component. In particular, a melamine resin having a mass average molecular weight of 300 to 700 is mainly used. It is preferable to include it as a component, and more preferable to include a melamine resin having a mass average molecular weight of 350 to 500 as a main component. Thereby, the effect mentioned above can be exhibited notably.
 これに対して、メラミン樹脂の質量平均分子量が前記上限値を超えると、平滑化層形成用組成物の流動性が低下してしまう。そのため、平滑化層12によって基材11の第1の面111の凹凸を十分に埋め込むことができない可能性がある。その結果、平滑化層12の第3の面121は、基材11の第1の面の凹凸に追従した形状となってしまうおそれがある。したがって、基材11の第1の面111の凹凸が、剥離剤層13の外表面131に影響することを抑制することができないおそれがある。 On the other hand, when the mass average molecular weight of the melamine resin exceeds the upper limit, the fluidity of the composition for forming a smoothing layer is lowered. Therefore, the unevenness of the first surface 111 of the base material 11 may not be sufficiently embedded by the smoothing layer 12. As a result, the third surface 121 of the smoothing layer 12 may have a shape that follows the unevenness of the first surface of the substrate 11. Therefore, there is a possibility that the unevenness of the first surface 111 of the substrate 11 cannot be suppressed from affecting the outer surface 131 of the release agent layer 13.
 質量平均分子量が前記範囲内のメラミン樹脂としては、例えば、モノメトキシメチル化メラミン樹脂、ジメトキシメチル化メラミン樹脂、トリメトキシメチル化メラミン樹脂、テトラメトキシメチル化メラミン樹脂、ペンタメトキシメチル化メラミン樹脂、ヘキサメトキシメチル化メラミン樹脂、ブチル化メラミン樹脂、モノメチロールメラミン樹脂、ジメチロールメラミン樹脂、トリメチロールメラミン樹脂、テトラメチロールメラミン樹脂、ペンタメチロールメラミン樹脂、ヘキサメチロールメラミン樹脂、イミノ基含有メトキシメチル化メラミン樹脂等が挙げられる。これらの中でも、メラミン樹脂としては、反応性に優れているという点からも、ヘキサメトキシメチル化メラミン樹脂が好ましい。これにより、膜厚が比較的薄い平滑化層12を形成したとしても、基材11の第1の面111の凹凸をより容易かつ確実に埋めることができる。また、このような平滑化層12は、耐薬品性に優れる。これにより、平滑化層12上に溶剤を含む剥離剤層形成用組成物を塗布して剥離剤層13を設けた場合に、剥離剤層形成用組成物に含まれる溶剤に起因する平滑化層12が膨潤することや、溶解して脱落することなどを回避することができる。 Examples of the melamine resin having a mass average molecular weight within the above range include a monomethoxymethylated melamine resin, a dimethoxymethylated melamine resin, a trimethoxymethylated melamine resin, a tetramethoxymethylated melamine resin, a pentamethoxymethylated melamine resin, and a hexamethoxymethylated resin. Methoxymethylated melamine resin, butylated melamine resin, monomethylol melamine resin, dimethylol melamine resin, trimethylol melamine resin, tetramethylol melamine resin, pentamethylol melamine resin, hexamethylol melamine resin, imino group-containing methoxymethylated melamine resin, etc. Is mentioned. Among these, as the melamine resin, hexamethoxymethylated melamine resin is preferable from the viewpoint of excellent reactivity. Thereby, even if the smoothing layer 12 having a relatively thin film thickness is formed, the unevenness of the first surface 111 of the substrate 11 can be filled more easily and reliably. Moreover, such a smoothing layer 12 is excellent in chemical resistance. Thereby, when apply | coating the release agent layer forming composition containing a solvent on the smoothing layer 12, and providing the release agent layer 13, the smoothing layer resulting from the solvent contained in the release agent layer forming composition It is possible to avoid swelling of 12 and dissolution and dropping off.
 また、平滑化層形成用組成物(固形分換算)中における前記メラミン樹脂の含有率は、前述したように、50質量%超であればよいが、60質量%以上であることがより好ましく、65質量%以上であることがさらに好ましい。これにより、基材11の第1の面111に塗布して加熱する前において、平滑化層形成用組成物は、適度な粘度を有する。 Further, the content of the melamine resin in the smoothing layer forming composition (in terms of solid content) may be more than 50% by mass as described above, but more preferably 60% by mass or more. More preferably, it is 65 mass% or more. Thereby, before apply | coating to the 1st surface 111 of the base material 11 and heating, the composition for smoothing layer formation has moderate viscosity.
 このような前記メラミン樹脂を含む平滑化層形成用組成物には、さらに、水酸基を有する希釈剤(反応性希釈剤)を含むことが好ましく、分子両末端に水酸基を有する希釈剤を含むことがより好ましく、グリコール系化合物を含むことがさらに好ましい。 Such a composition for forming a smoothing layer containing the melamine resin preferably further contains a diluent having a hydroxyl group (reactive diluent), and preferably contains a diluent having a hydroxyl group at both molecular ends. More preferably, a glycol-based compound is further included.
 このような希釈剤は、平滑化層形成用組成物の粘度を低下させる。また、このような希釈剤を含む平滑化層形成用組成物が加熱されると、希釈剤は前記メラミン樹脂と結合(架橋)する。したがって、水酸基を有する希釈剤を含む平滑化層形成用組成物は、より好適な流動性を得ることができる。このため、このような希釈剤を含む平滑化層形成用組成物を用いれば、基材11の第1の面111の凹凸をよりに好適に埋め込むことができる。 Such a diluent reduces the viscosity of the smoothing layer forming composition. Moreover, when the composition for smoothing layer formation containing such a diluent is heated, a diluent will couple | bond (crosslink) with the said melamine resin. Therefore, the smoothing layer forming composition containing the diluent having a hydroxyl group can obtain more suitable fluidity. For this reason, if the composition for smoothing layer formation containing such a diluent is used, the unevenness | corrugation of the 1st surface 111 of the base material 11 can be embedded more suitably.
 特に、グリコール系化合物は、分子両末端に水酸基を有し、比較的分子量が小さく、前記メラミン系樹脂に比べて粘度が低い化合物である。そのため、平滑化層形成用組成物がグリコール化合物を含むことにより、前記メラミン樹脂を含む平滑化層形成用組成物の粘度は、より低下する。よって、より適度な流動性を有する平滑化層形成用組成物を得ることができる。 In particular, the glycol compound is a compound having a hydroxyl group at both molecular ends, a relatively small molecular weight, and a lower viscosity than the melamine resin. Therefore, when the composition for smoothing layer formation contains a glycol compound, the viscosity of the composition for smoothing layer formation containing the said melamine resin falls more. Therefore, the smoothing layer forming composition having more appropriate fluidity can be obtained.
 グリコール系化合物としては、具体的には、例えば、エタンジオール、1,3-プロパンジオール、1,4-ブタンジオール、2-メチル-1,3-プロパンジオール等が挙げられる。グリコール系化合物としては、これらの中でも、2-メチル-1,3-プロパンジオールが好ましい。これにより、平滑化層形成用組成物は、最適な粘度を得ることができ、基材11の第1の面111の凹凸により効果的に埋め込まれる。 Specific examples of the glycol compound include ethanediol, 1,3-propanediol, 1,4-butanediol, 2-methyl-1,3-propanediol, and the like. Among these, 2-methyl-1,3-propanediol is preferable as the glycol compound. Thereby, the composition for smoothing layer formation can obtain optimal viscosity, and is effectively embedded by the unevenness | corrugation of the 1st surface 111 of the base material 11. FIG.
 このような水酸基を有する希釈剤を含む場合には、平滑化層形成用組成物(固形分換算)中における水酸基を有する希釈剤の含有率は、10~45質量%が好ましく、15~40質量%がより好ましい。 When such a diluent having a hydroxyl group is contained, the content of the diluent having a hydroxyl group in the composition for forming a smoothing layer (in terms of solid content) is preferably 10 to 45% by mass, and preferably 15 to 40% by mass. % Is more preferable.
 水酸基を有する希釈剤の含有率が前記下限値未満であると、平滑化層形成用組成物中に含まれる材料の種類等によっては、平滑化層形成用組成物の粘度が非常に高くなるおそれがある。また、水酸基を有する希釈剤の含有率が前記上限値を超えても、水酸基を有する希釈剤を含むことによる効果をそれ以上高めことができない。また、平滑化層形成用組成物中に含まれる水酸基を有する希釈剤以外の材料の含有率が低下してしまう。 If the content of the diluent having a hydroxyl group is less than the lower limit, the viscosity of the smoothing layer-forming composition may become very high depending on the type of material contained in the smoothing layer-forming composition. There is. Moreover, even if the content rate of the diluent which has a hydroxyl group exceeds the said upper limit, the effect by containing the diluent which has a hydroxyl group cannot be heightened any more. Moreover, the content rate of materials other than the diluent which has a hydroxyl group contained in the composition for smoothing layer formation will fall.
 また、平滑化層形成用組成物は、硬化触媒として酸性触媒を含むことが好ましい。酸性触媒は、前記メラミン樹脂の架橋反応を促進する架橋反応触媒として作用する。そのため、酸性触媒を含む平滑化層形成用組成物を加熱して、メラミン樹脂の架橋反応を開始させた場合に、その架橋反応の反応速度を速めることができる。これにより、平滑化層形成用組成物の硬化反応をより効率よく進行させることができる。 Further, the smoothing layer forming composition preferably contains an acidic catalyst as a curing catalyst. The acidic catalyst acts as a crosslinking reaction catalyst that promotes the crosslinking reaction of the melamine resin. Therefore, when the composition for smoothing layer formation containing an acidic catalyst is heated and the crosslinking reaction of a melamine resin is started, the reaction rate of the crosslinking reaction can be accelerated. Thereby, the hardening reaction of the composition for smoothing layer formation can be advanced more efficiently.
 酸性触媒としては、特に限定されず、前述したような架橋反応触媒として機能する触媒であればいかなる触媒であってもよい。酸性触媒としては、例えば、p-トルエンスルホン酸、メタンスルホン酸などの有機系の酸性触媒等が挙げられる。酸性触媒としては、これらのうちの1種または2種以上を組み合わせて用いることができる。これらの中でも特に、酸性触媒としては、p-トルエンスルホン酸を含むことが好ましい。これにより、平滑化層形成用組成物の硬化反応をさらに効率よく進行させることができる。 The acid catalyst is not particularly limited and may be any catalyst as long as it functions as a crosslinking reaction catalyst as described above. Examples of the acidic catalyst include organic acidic catalysts such as p-toluenesulfonic acid and methanesulfonic acid. As the acidic catalyst, one or two or more of these can be used in combination. Among these, the acidic catalyst preferably contains p-toluenesulfonic acid. Thereby, the hardening reaction of the composition for smoothing layer formation can be advanced further efficiently.
 このような酸性触媒を含む場合には、平滑化層形成用組成物(固形分換算)中における酸性触媒の含有率は、0.1~15質量%が好ましく、0.5~10質量%がより好ましい。 When such an acidic catalyst is included, the content of the acidic catalyst in the smoothing layer forming composition (in terms of solid content) is preferably 0.1 to 15% by mass, and preferably 0.5 to 10% by mass. More preferred.
 酸性触媒の含有率が前記下限値未満であると、平滑化層形成用組成物中に含まれる材料の種類等によっては、平滑化層形成用組成物が硬化する速度が非常に遅くなるおそれがある。また、酸性触媒の含有率が前記上限値を超えても、酸性触媒を含むことによる効果をそれ以上高めることができない。また、平滑化層形成用組成物中に含まれる酸性触媒以外の材料の含有率が低下してしまう。 If the content of the acidic catalyst is less than the lower limit, depending on the type of material contained in the smoothing layer-forming composition, the rate at which the smoothing layer-forming composition is cured may be very slow. is there. Moreover, even if the content rate of an acidic catalyst exceeds the said upper limit, the effect by containing an acidic catalyst cannot be heightened any more. Moreover, the content rate of materials other than the acidic catalyst contained in the composition for smoothing layer formation will fall.
 また、平滑化層形成用組成物は、必要に応じて、溶媒を含むように構成されていてもよい。
 溶媒としては、特に限定されないが、例えば、ジメチルケトン、メチルエチルケトン、ジエチルケトン、シクロヘキサンノンなどのケトン類、ベンゼン、トルエン、キシレンなどの芳香族炭化水素類、ヘキサン、ヘプタン、オクタンなどの脂肪族炭化水素類、ヘキサン、ヘプタン、オクタンなどの脂肪族炭化水素類、メタノール、エタノール、イソプロパノールなどのアルコール類等や、これらの混合溶媒等が挙げられる。
Moreover, the composition for smoothing layer formation may be comprised so that a solvent may be included as needed.
The solvent is not particularly limited. For example, ketones such as dimethyl ketone, methyl ethyl ketone, diethyl ketone, and cyclohexanenon, aromatic hydrocarbons such as benzene, toluene, and xylene, and aliphatic hydrocarbons such as hexane, heptane, and octane. , Aliphatic hydrocarbons such as hexane, heptane and octane, alcohols such as methanol, ethanol and isopropanol, and mixed solvents thereof.
 また、平滑化層形成用組成物中における溶媒の含有率としては、特に限定されず、平滑化層12を形成する際の平滑化層形成用組成物の粘度を適当な範囲にするよう、適宜選定すればよい。 Moreover, it does not specifically limit as content rate of the solvent in the composition for smoothing layer formation, In order to make the viscosity of the composition for smoothing layer formation at the time of forming the smoothing layer 12 into a suitable range suitably It only has to be selected.
 また、平滑化層形成用組成物には、必要に応じて、前述した材料(メラミン樹脂、水酸基を有する希釈剤、酸性触媒、および溶媒)以外のその他の成分が含まれていてもよい。その他の成分としては、例えば、前記メラミン樹脂(質量平均分子量が950以下のメラミン樹脂)以外の熱硬化性樹脂、水酸基を有する希釈剤以外の希釈剤、酸性触媒以外の硬化触媒、表面調整剤、染料、分散剤、帯電防止剤等が挙げられる。 In addition, the smoothing layer forming composition may contain other components other than the above-described materials (melamine resin, diluent having a hydroxyl group, acidic catalyst, and solvent) as necessary. Other components include, for example, thermosetting resins other than the melamine resin (melamine resin having a mass average molecular weight of 950 or less), diluents other than a diluent having a hydroxyl group, curing catalysts other than acidic catalysts, surface conditioners, Examples thereof include dyes, dispersants, and antistatic agents.
 また、平滑化層12の第3の面(平滑化層12の基材11と反対の面)121は、その算術平均粗さRaが30nm以下であり、かつ、その最大突起高さRpが300nm以下であることが好ましい。特に、第3の面121の算術平均粗さRaが10nm以下であるのが好ましい。また、第3の面121の最大突起高さRpが、200nm以下であることが好ましい。 The third surface (the surface opposite the substrate 11 of the smoothing layer 12) 121 of the smoothing layer 12, its is the arithmetic average roughness Ra 4 is 30nm or less, and the maximum projection height Rp 4 Is preferably 300 nm or less. In particular, the arithmetic average roughness Ra 4 of the third surface 121 is preferably 10 nm or less. In addition, the maximum protrusion height Rp 4 of the third surface 121 is preferably 200 nm or less.
 第3の面121の算術平均粗さRaおよび最大突起高さRpが前記範囲内であれば、基材11の第1の面111の凹凸が剥離剤層13の外表面131に影響することをより好適に防ぐことができる。その結果、基材11の第1の面111の凹凸が、外表面131に影響することを確実に防止することができる。 If the arithmetic average roughness Ra 4 and the maximum protrusion height Rp 4 of the third surface 121 are within the above ranges, the unevenness of the first surface 111 of the substrate 11 affects the outer surface 131 of the release agent layer 13. This can be prevented more suitably. As a result, the unevenness of the first surface 111 of the substrate 11 can be reliably prevented from affecting the outer surface 131.
 これに対し、第3の面121の算術平均粗さRaが前記上限値を超えると、平滑化層12は、第1の面111の凹凸が外表面131に影響することを抑制することが困難な状態となっている。その結果、第1の面111の凹凸が外表面131に影響することを低減するために、平滑化層12の厚みを、前記範囲内にある平滑化層12の厚みよりも厚くする必要が生じる場合がある。また、剥離剤層13と平滑化層12との間に、新たな平滑化層をさらに設ける必要が生じる場合がある。 On the other hand, when the arithmetic average roughness Ra 4 of the third surface 121 exceeds the upper limit value, the smoothing layer 12 can suppress the unevenness of the first surface 111 from affecting the outer surface 131. It is difficult. As a result, in order to reduce the unevenness of the first surface 111 from affecting the outer surface 131, it is necessary to make the thickness of the smoothing layer 12 larger than the thickness of the smoothing layer 12 within the above range. There is a case. Further, it may be necessary to further provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12.
 また、第3の面121の最大突起高さRpが前記上限値を超えると、平滑化層12は、第1の面111の凹凸が外表面131に影響することを抑制することが困難な状態となっている。その結果、第1の面111の凹凸が外表面131に影響することを低減するために、平滑化層12の厚みを、前記範囲内にある平滑化層12の厚みよりも厚くする必要が生じる場合がある。また、剥離剤層13と平滑化層12との間に、新たな平滑化層をさらに設ける必要が生じる場合がある。 Further, when the maximum protrusion height Rp 4 of the third surface 121 exceeds the upper limit value, it is difficult for the smoothing layer 12 to suppress the unevenness of the first surface 111 from affecting the outer surface 131. It is in a state. As a result, in order to reduce the unevenness of the first surface 111 from affecting the outer surface 131, it is necessary to make the thickness of the smoothing layer 12 larger than the thickness of the smoothing layer 12 within the above range. There is a case. Further, it may be necessary to further provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12.
 また、平滑化層12の平均膜厚は、特に限定されないが、0.3~2μmであるのが好ましく、0.4~1μmであるのがより好ましい。これにより、基材11の第1の面111の凹凸をより的確に埋め込むことができる。その結果、外表面131の平滑性をより向上させることができる。 The average film thickness of the smoothing layer 12 is not particularly limited, but is preferably 0.3 to 2 μm, and more preferably 0.4 to 1 μm. Thereby, the unevenness | corrugation of the 1st surface 111 of the base material 11 can be embedded more correctly. As a result, the smoothness of the outer surface 131 can be further improved.
 これに対して、平滑化層12の平均膜厚が前記下限値未満であると、剥離剤層13の膜厚等によっては、外表面131の平滑性が不十分となる。そのため、グリーンシートを剥離剤層13上に形成したときに、グリーンシートにピンホールや部分的な厚みのばらつきが発生するおそれがある。また、平滑化層12の平均膜厚が前記上限値を超えると、平滑化層形成用組成物を構成する成分等によっては、平滑化層12の硬化収縮により剥離フィルム1にカールが発生し易くなるおそれがある。 On the other hand, if the average film thickness of the smoothing layer 12 is less than the lower limit value, the smoothness of the outer surface 131 becomes insufficient depending on the film thickness of the release agent layer 13 or the like. Therefore, when the green sheet is formed on the release agent layer 13, there is a possibility that pinholes and partial thickness variations may occur in the green sheet. Moreover, when the average film thickness of the smoothing layer 12 exceeds the above upper limit, depending on the components constituting the composition for forming the smoothing layer, curling of the release film 1 is likely to occur due to curing shrinkage of the smoothing layer 12. There is a risk.
 <剥離剤層13>
 図1に示すように、平滑化層12の第3の面121上には剥離剤層13が設けられている。
 この剥離剤層13は、剥離フィルム1に剥離性を付与する機能を有している。
<Release layer 13>
As shown in FIG. 1, a release agent layer 13 is provided on the third surface 121 of the smoothing layer 12.
The release agent layer 13 has a function of imparting peelability to the release film 1.
 この剥離剤層13は、剥離剤層形成用組成物を加熱して硬化させることにより得ることができる。かかる剥離剤層形成用組成物は、メラミン樹脂を主成分として含み、かつ、ポリオルガノシロキサンを含む。ここで、前記主成分とは、剥離剤層形成用組成物の固形分中における含有率が50質量%を超える成分のことをいう。 The release agent layer 13 can be obtained by heating and curing the release agent layer forming composition. Such a release agent layer-forming composition contains a melamine resin as a main component and also contains a polyorganosiloxane. Here, the said main component means the component in which the content rate in solid content of the composition for release agent layer formation exceeds 50 mass%.
 このような剥離剤層形成用組成物を用いて形成された剥離剤層13は、外表面131付近にポリオルガノシロキサンに由来する成分が偏析した状態となっている。これは、剥離剤層形成用組成物中に含まれるメラミン樹脂と、ポリオルガノシロキサンとの相溶性が低いことによる。具体的には、剥離剤層形成用組成物を平滑化層12上に塗布して第2の塗布層(剥離剤層形成用組成物を平滑化層12上に塗布することで得られた層)を形成し、第2の塗布層を加熱して硬化する間に、メラミン樹脂とポリオルガノシロキサンとの相溶性が低いために、ポリオルガノシロキサンに由来する成分が第2の塗布層の表面付近に偏析し易くなるためである。 The release agent layer 13 formed using such a release agent layer forming composition is in a state where components derived from polyorganosiloxane are segregated in the vicinity of the outer surface 131. This is because the compatibility between the melamine resin contained in the release agent layer forming composition and the polyorganosiloxane is low. Specifically, the composition obtained by applying the release agent layer forming composition on the smoothing layer 12 and applying the second application layer (the release agent layer forming composition on the smoothing layer 12). ) And the second coating layer is heated to cure, the compatibility between the melamine resin and the polyorganosiloxane is low, so the component derived from the polyorganosiloxane is near the surface of the second coating layer. This is because segregation easily occurs.
 このポリオルガノシロキサンは、グリーンシートに対する剥離性に優れた成分である。したがって、外表面131付近にポリオルガノシロキサンに由来する成分が偏析した状態となることで、剥離フィルム1は、グリーンシートに対する剥離性に優れる。これにより、剥離フィルム1の外表面131上にグリーンシートを形成し、そのグリーンシートを剥離フィルム1から剥離しようとするときに、グリーンシートが剥離フィルム1に必要以上に接着してしまうことを抑制または防止することができる。すなわち、剥離フィルム1からグリーンシートを上手く剥がすことができず、グリーンシートが破損してしまうということを抑制または防止することができる。 This polyorganosiloxane is a component having excellent releasability from the green sheet. Therefore, when the component derived from polyorganosiloxane is segregated in the vicinity of the outer surface 131, the release film 1 is excellent in releasability from the green sheet. As a result, a green sheet is formed on the outer surface 131 of the release film 1, and the green sheet is prevented from adhering to the release film 1 more than necessary when the green sheet is to be released from the release film 1. Or it can be prevented. That is, it is possible to suppress or prevent the green sheet from being peeled off from the release film 1 and being damaged.
 また、剥離剤層形成用組成物(固形分換算)中における前記メラミン樹脂の含有率は、前述したように、50質量%超であればよいが、60質量%以上であることがより好ましく、65質量%以上であることがさらに好ましい。これにより、平滑化層12の第3の面121に剥離剤層形成用組成物を塗布して加熱する前において、剥離剤層形成用組成物の粘度が、より適度となる。 Further, the content of the melamine resin in the release agent layer forming composition (in terms of solid content) may be more than 50% by mass as described above, but more preferably 60% by mass or more. More preferably, it is 65 mass% or more. Thereby, before apply | coating and heating the release agent layer forming composition to the 3rd surface 121 of the smoothing layer 12, the viscosity of the releasing agent layer forming composition becomes more moderate.
 また、剥離剤層形成用組成物は、前述したように、メラミン樹脂を主成分として含むが、質量平均分子量が950以下のメラミン樹脂を主成分として含むことが好ましく、質量平均分子量が300~700のメラミン樹脂を主成分として含むことがより好ましく、質量平均分子量が350~500のメラミン樹脂を主成分として含むことがさらに好ましい。これにより、剥離剤層形成用組成物の粘度を適度にすることができ、剥離剤層形成用組成物は、適度な流動性を有する。そのため、この剥離剤層形成用組成物を用いて剥離剤層13を形成すると、平滑化層12によって埋め込みきれなかった基材11の凹凸をより的確に埋め込むことができる。また、質量平均分子量が前記範囲内である剥離剤層形成用組成物は、耐薬品性に優れる。これにより、平滑化層12上に溶剤を含む剥離剤層形成用組成物を塗布して剥離剤層13を形成した場合であっても、剥離剤層13が膨潤することや、溶解して脱落することなどを回避することができる。 Further, as described above, the composition for forming a release agent layer contains a melamine resin as a main component, but preferably contains a melamine resin having a mass average molecular weight of 950 or less as a main component, and has a mass average molecular weight of 300 to 700. It is more preferable to contain a melamine resin as a main component, and it is more preferable to include a melamine resin having a mass average molecular weight of 350 to 500 as a main component. Thereby, the viscosity of the release agent layer forming composition can be moderated, and the release agent layer forming composition has appropriate fluidity. Therefore, when the release agent layer 13 is formed using this release agent layer forming composition, the unevenness of the base material 11 that cannot be embedded by the smoothing layer 12 can be embedded more accurately. Moreover, the release agent layer forming composition having a mass average molecular weight within the above range is excellent in chemical resistance. Thus, even when the release agent layer forming composition containing a solvent is applied onto the smoothing layer 12 to form the release agent layer 13, the release agent layer 13 swells or dissolves and falls off. Can be avoided.
 また、メラミン樹脂としては、具体的には、例えば、モノメトキシメチル化メラミン樹脂、ジメトキシメチル化メラミン樹脂、トリメトキシメチル化メラミン樹脂、テトラメトキシメチル化メラミン樹脂、ペンタメトキシメチル化メラミン樹脂、ヘキサメトキシメチル化メラミン樹脂、ブチル化メラミン樹脂、モノメチロールメラミン樹脂、ジメチロールメラミン樹脂、トリメチロールメラミン樹脂、テトラメチロールメラミン樹脂、ペンタメチロールメラミン樹脂、ヘキサメチロールメラミン樹脂、イミノ基含有メトキシメチル化メラミン樹脂等が挙げられる。メラミン樹脂としては、これらのうち1種または2種以上を組み合わせて用いることができる。これらの中でも、反応性に優れているという点から、メラミン樹脂としては、ヘキサメトキシメチル化メラミン樹脂であるのが好ましい。特に、ヘキサメトキシメチル化メラミン樹脂を含む剥離剤層形成用組成物を用いて剥離剤層13を形成することにより、平滑化層12によって埋めきれなかった基材11の第1の面111の凹凸があった場合でも、その凹凸をより的確に埋め込むことができる。 Specific examples of the melamine resin include monomethoxymethylated melamine resin, dimethoxymethylated melamine resin, trimethoxymethylated melamine resin, tetramethoxymethylated melamine resin, pentamethoxymethylated melamine resin, hexamethoxy Methylated melamine resin, butylated melamine resin, monomethylol melamine resin, dimethylol melamine resin, trimethylol melamine resin, tetramethylol melamine resin, pentamethylol melamine resin, hexamethylol melamine resin, imino group-containing methoxymethylated melamine resin, etc. Can be mentioned. As the melamine resin, one or a combination of two or more of these can be used. Among these, from the viewpoint of excellent reactivity, the melamine resin is preferably a hexamethoxymethylated melamine resin. In particular, by forming the release agent layer 13 using the release agent layer forming composition containing hexamethoxymethylated melamine resin, the unevenness of the first surface 111 of the substrate 11 that could not be filled with the smoothing layer 12. Even if there is, the unevenness can be embedded more accurately.
 また、剥離剤層形成用組成物に含まれるメラミン樹脂と平滑化層形成用組成物に含まれるメラミン樹脂とは、共に、同じであることが好ましく、特に、ヘキサメトキシメチル化メラミン樹脂であるのが好ましい。これにより、剥離剤層13の平滑化層12への接着性をさらに高めることができる。このため、平滑化層12から剥離剤層13が不本意に剥離することを防ぐことができる。さらに、このような平滑化層形成用組成物および剥離剤層形成用組成物を用いてそれぞれ形成される平滑化層12および剥離剤層13は、耐薬品性に優れる。 The melamine resin contained in the release agent layer forming composition and the melamine resin contained in the smoothing layer forming composition are both preferably the same, and in particular, are hexamethoxymethylated melamine resins. Is preferred. Thereby, the adhesiveness to the smoothing layer 12 of the releasing agent layer 13 can further be improved. For this reason, it is possible to prevent the release agent layer 13 from unintentionally peeling from the smoothing layer 12. Furthermore, the smoothing layer 12 and the release agent layer 13 formed using such a smoothing layer forming composition and a release agent layer forming composition, respectively, are excellent in chemical resistance.
 また、ポリオルガノシロキサンは、カルボキシル基、メトキシ基、水酸基等の反応性官能基を有することが好ましく、特に、分子末端に水酸基を有するシラノール末端ポリジメチルシロキサンであることが好ましい。 The polyorganosiloxane preferably has a reactive functional group such as a carboxyl group, a methoxy group, or a hydroxyl group, and is particularly preferably a silanol-terminated polydimethylsiloxane having a hydroxyl group at the molecular end.
 このようにポリオルガノシロキサンが反応性官能基を有することで、ポリオルガノシロキサンはメラミン樹脂との反応性を有する。そのため、剥離剤層形成用組成物を加熱して硬化させるときに、ポリオルガノシロキサンが、主骨格となるメラミン樹脂と架橋構造を形成することができる。よって、得られた剥離フィルム1上にグリーンシートを形成したときに、剥離剤層13のポリオルガノシロキサンに由来する成分がグリーンシートへ転着することを抑制することができる。 Thus, since the polyorganosiloxane has a reactive functional group, the polyorganosiloxane has reactivity with the melamine resin. Therefore, when the release agent layer-forming composition is heated and cured, the polyorganosiloxane can form a crosslinked structure with the melamine resin as the main skeleton. Therefore, when a green sheet is formed on the obtained release film 1, it is possible to suppress transfer of components derived from the polyorganosiloxane of the release agent layer 13 to the green sheet.
 特に、ポリオルガノシロキサンとして分子末端に水酸基を有するシラノール末端ポリジメチルシロキサンを用いると、前述した効果を特に顕著に発揮することができる。 In particular, when silanol-terminated polydimethylsiloxane having a hydroxyl group at the molecular end is used as the polyorganosiloxane, the above-described effects can be exhibited particularly remarkably.
 剥離剤層形成用組成物(固形分換算)中におけるポリオルガノシロキサンの含有率は、3~15質量%が好ましく、5~12質量%であることが特に好ましい。 The content of the polyorganosiloxane in the release agent layer forming composition (in terms of solid content) is preferably 3 to 15% by mass, and particularly preferably 5 to 12% by mass.
 ポリオルガノシロキサンの含有率が前記下限値未満であると、剥離剤層形成用組成物中に含まれるポリオルガノシロキサン以外の材料の種類やその含有量等によっては、剥離剤層13の剥離性が不十分となる。その結果、剥離フィルム1からグリーンシートを正常に剥離することができないおそれがある。 When the content of the polyorganosiloxane is less than the lower limit, depending on the type of material other than the polyorganosiloxane contained in the composition for forming the release agent layer and the content thereof, the release property of the release agent layer 13 may be increased. It becomes insufficient. As a result, the green sheet may not be normally peeled from the release film 1.
 一方、ポリオルガノシロキサンの含有率が前記上限値を超えると、平滑化層12上に形成された第2の塗布層(剥離剤層形成用組成物を平滑化層12上に塗布することで得られた層)の表面付近に偏析するポリオルガノシロキサンに由来する成分の偏析量が増大する。これにより、第2の塗布層の表面に斑が生じるおそれがある。このため、得られた剥離フィルム1の外表面131上にセラミックスラリーを塗布する際に、セラミックスラリーの塗工性が悪化してセラミックスラリーの弾きが発生するおそれがある。その結果、グリーンシートにピンホールが発生し、グリーンシートの特性が悪化するおそれがある。 On the other hand, when the content of the polyorganosiloxane exceeds the upper limit value, the second coating layer formed on the smoothing layer 12 (obtained by applying the release agent layer forming composition on the smoothing layer 12). The amount of segregation of components derived from polyorganosiloxane that segregates in the vicinity of the surface of the formed layer) increases. This may cause spots on the surface of the second coating layer. For this reason, when apply | coating a ceramic slurry on the outer surface 131 of the obtained peeling film 1, there exists a possibility that the coating property of a ceramic slurry may deteriorate and the flip of a ceramic slurry may generate | occur | produce. As a result, pinholes are generated in the green sheet, which may deteriorate the characteristics of the green sheet.
 このような前記メラミン樹脂を含む剥離剤層形成用組成物には、さらに、水酸基を有する希釈剤(反応性希釈剤)を含むことが好ましく、分子両末端に水酸基を有する希釈剤を含むことがより好ましく、グリコール系化合物を含むことがさらに好ましい。 Such a composition for forming a release agent layer containing the melamine resin preferably further contains a diluent having a hydroxyl group (reactive diluent), and preferably contains a diluent having a hydroxyl group at both molecular ends. More preferably, a glycol-based compound is further included.
 このような希釈剤は、剥離剤層形成用組成物の粘度を低下させる。また、このような希釈剤を含む剥離剤層形成用組成物が加熱されると、希釈剤が前記メラミン樹脂と結合(架橋)する。したがって、剥離剤層形成用組成物がこのような希釈剤を含むことにより、剥離剤層形成用組成物の流動性をより好適とすることができる。よって、平滑化層12によって、埋め込みきれなかった基材11の凹凸があった場合でも、その凹凸をより的確に埋め込むことができる。 Such a diluent reduces the viscosity of the release agent layer forming composition. Moreover, when the composition for forming a release agent layer containing such a diluent is heated, the diluent bonds (crosslinks) with the melamine resin. Therefore, when the release agent layer forming composition contains such a diluent, the fluidity of the release agent layer forming composition can be made more suitable. Therefore, even if the smoothing layer 12 has the unevenness of the base material 11 that could not be embedded, the unevenness can be embedded more accurately.
 特に、グリコール系化合物は、分子両末端に水酸基を有する化合物であり、比較的分子量が小さく、前記メラミン系樹脂に比べて粘度が低い化合物である。そのため、グリコール化合物を含むことにより、剥離剤層形成用組成物の粘度をより低下させることができる。よって、より適度な流動性を有する剥離剤層形成用組成物を得ることができる。 In particular, the glycol compound is a compound having a hydroxyl group at both molecular ends, has a relatively small molecular weight, and has a lower viscosity than the melamine resin. Therefore, the viscosity of the composition for forming a release agent layer can be further reduced by including a glycol compound. Therefore, a release agent layer forming composition having more appropriate fluidity can be obtained.
 グリコール系化合物としては、例えば、メタンジオール、エタンジオール、1,3-プロパンジオール、1,4-ブタンジオール、2-メチル-1,3-プロパンジオール等が挙げられる。グリコール系化合物としては、これらの中でも、2-メチル-1,3-プロパンジオールであるのが好ましい。これにより、剥離剤層形成用組成物の粘度を最適に設定することができる。その結果、平滑化層12によって、埋め込みきれなかった基材11の凹凸があった場合でも、その凹凸をさらに的確に埋め込むことができる。 Examples of glycol compounds include methanediol, ethanediol, 1,3-propanediol, 1,4-butanediol, 2-methyl-1,3-propanediol, and the like. Of these, 2-methyl-1,3-propanediol is preferred as the glycol compound. Thereby, the viscosity of the composition for forming the release agent layer can be set optimally. As a result, even if the smoothing layer 12 has unevenness of the substrate 11 that could not be embedded, the unevenness can be embedded more accurately.
 剥離剤層形成用組成物がこのような水酸基を有する希釈剤を含む場合には、剥離剤層形成用組成物(固形分換算)中における水酸基を有する希釈剤の含有率は、10~45質量%が好ましく、15~40質量%がより好ましい。 When the release agent layer forming composition contains such a diluent having a hydroxyl group, the content of the diluent having a hydroxyl group in the release agent layer forming composition (in terms of solid content) is 10 to 45 masses. % Is preferable, and 15 to 40% by mass is more preferable.
 水酸基を有する希釈剤の含有率が前記下限値未満であると、剥離剤層形成用組成物中に含まれる材料の種類等によっては、剥離剤層形成用組成物の粘度が非常に高くなるおそれがある。また、水酸基を有する希釈剤の含有率が前記上限値を超えても、水酸基を有する希釈剤を含むことによる効果をそれ以上高めことができない。また、剥離剤層形成用組成物中に含まれる水酸基を有する希釈剤以外の材料の含有率が低下してしまう。 If the content of the diluent having a hydroxyl group is less than the lower limit, the viscosity of the release agent layer-forming composition may become very high depending on the type of material contained in the release agent layer-forming composition. There is. Moreover, even if the content rate of the diluent which has a hydroxyl group exceeds the said upper limit, the effect by containing the diluent which has a hydroxyl group cannot be heightened any more. Moreover, the content rate of materials other than the diluent which has a hydroxyl group contained in the composition for release agent layer formation will fall.
 また、剥離剤層形成用組成物は、硬化触媒として酸性触媒を含むことが好ましい。酸性触媒は、メラミン樹脂の架橋反応を促進する架橋反応触媒として作用する。そのため、剥離剤層形成用組成物が酸性触媒を含むことにより、剥離剤層形成用組成物の硬化反応をより効率よく進行させることができる。 Further, the release agent layer forming composition preferably contains an acidic catalyst as a curing catalyst. The acidic catalyst acts as a crosslinking reaction catalyst that promotes the crosslinking reaction of the melamine resin. Therefore, when the release agent layer forming composition contains an acidic catalyst, the curing reaction of the release agent layer forming composition can be advanced more efficiently.
 酸性触媒としては、特に限定されず、メラミン樹脂との架橋反応触媒として機能するものであればいかなるものであってもよい。具体的には、酸性触媒としては、例えば、p-トルエンスルホン酸、メタンスルホン酸などの有機系の酸性触媒等が挙げられる。酸性触媒としては、これらのうち1種または2種以上を組み合わせて用いることができる。酸性触媒としては、これらの中でも、特に、p-トルエンスルホン酸を含むことが好ましい。これにより、剥離剤層形成用組成物の硬化反応をさらに効率よく進行させることができる。 The acidic catalyst is not particularly limited, and any acidic catalyst may be used as long as it functions as a crosslinking reaction catalyst with the melamine resin. Specifically, examples of the acidic catalyst include organic acidic catalysts such as p-toluenesulfonic acid and methanesulfonic acid. As the acidic catalyst, one or a combination of two or more of these can be used. Among these, it is particularly preferable that the acidic catalyst contains p-toluenesulfonic acid. Thereby, the curing reaction of the composition for forming a release agent layer can be further efficiently advanced.
 このような酸性触媒を含む場合には、剥離剤層形成用組成物(固形分換算)中における酸性触媒の含有率は、0.1~15質量%が好ましく、0.5~10質量%がより好ましい。 When such an acidic catalyst is included, the content of the acidic catalyst in the release agent layer forming composition (in terms of solid content) is preferably 0.1 to 15% by mass, and preferably 0.5 to 10% by mass. More preferred.
 酸性触媒の含有率が前記下限値未満であると、剥離剤層形成用組成物中に含まれる材料の種類等によっては、剥離剤層形成用組成物が硬化する速度が非常に遅くなるおそれがある。また、酸性触媒の含有率が前記上限値を超えても、酸性触媒を含むことによる効果をそれ以上高めことができない。また、剥離剤層形成用組成物中に含まれる酸性触媒以外の材料の含有率が低下してしまう。 If the content of the acidic catalyst is less than the lower limit, depending on the type of material contained in the release agent layer-forming composition, the rate of curing of the release agent layer-forming composition may be very slow. is there. Moreover, even if the content rate of an acidic catalyst exceeds the said upper limit, the effect by containing an acidic catalyst cannot be heightened any more. Moreover, the content rate of materials other than the acidic catalyst contained in the composition for release agent layer formation will fall.
 また、剥離剤層形成用組成物は、必要に応じて、溶媒を含んでいてもよい。溶媒としては、特に限定されないが、例えば、ジメチルケトン、メチルエチルケトン、ジエチルケトン、シクロヘキサンノンなどのケトン類、ベンゼン、トルエン、キシレンなどの芳香族炭化水素類、ヘキサン、ヘプタン、オクタンなどの脂肪族炭化水素類、ヘキサン、ヘプタン、オクタンなどの脂肪族炭化水素類、メタノール、エタノール、イソプロパノールなどのアルコール類等や、これらの混合溶媒等が挙げられる。 Moreover, the composition for forming a release agent layer may contain a solvent, if necessary. The solvent is not particularly limited. For example, ketones such as dimethyl ketone, methyl ethyl ketone, diethyl ketone, and cyclohexanenon, aromatic hydrocarbons such as benzene, toluene, and xylene, and aliphatic hydrocarbons such as hexane, heptane, and octane. , Aliphatic hydrocarbons such as hexane, heptane and octane, alcohols such as methanol, ethanol and isopropanol, and mixed solvents thereof.
 また、剥離剤層形成用組成物中における溶媒の含有率としては、特に限定されない。溶媒の含有率としては、平滑化層12上に剥離剤層13を形成する際の剥離剤層形成用組成物の粘度を適当な範囲にするよう、適宜選定すればよい。 Further, the content of the solvent in the release agent layer forming composition is not particularly limited. What is necessary is just to select suitably as content rate of a solvent so that the viscosity of the composition for release agent layer formation at the time of forming the release agent layer 13 on the smoothing layer 12 may be made into an appropriate range.
 また、剥離剤層形成用組成物には、必要に応じて、前述した材料(メラミン樹脂、水酸基を有する希釈剤、酸性触媒、および溶媒)以外のその他の成分が含まれていてもよい。その他の成分としては、例えば、前記メラミン樹以外の熱硬化性樹脂、水酸基を有する希釈剤以外の希釈剤、酸性触媒以外の硬化触媒、表面調整剤、染料、分散剤、帯電防止剤等が挙げられる。 In addition, the composition for forming a release agent layer may contain other components other than the above-described materials (melamine resin, diluent having a hydroxyl group, acidic catalyst, and solvent) as necessary. Examples of the other components include thermosetting resins other than the melamine tree, diluents other than diluents having a hydroxyl group, curing catalysts other than acidic catalysts, surface conditioners, dyes, dispersants, antistatic agents, and the like. It is done.
 また、前述したように、剥離剤層13の外表面131(剥離フィルム1の外表面)は、算術平均粗さRaが8nm以下であり、かつ、外表面131の最大突起高さRpが50nm以下である。特に、外表面131の算術平均粗さRaが6nm以下であるのが好ましい。また、外表面131の最大突起高さRpが40nm以下であることが好ましい。 Further, as described above, the outer surface 131 of the release agent layer 13 (the outer surface of the release film 1) has an arithmetic average roughness Ra 1 is a 8nm or less, and a maximum projection height Rp 1 of the outer surface 131 50 nm or less. In particular, an arithmetic average roughness Ra 1 of the outer surface 131 is preferably at 6nm or less. In addition, the maximum protrusion height Rp 1 of the outer surface 131 is preferably 40 nm or less.
 剥離剤層13の外表面131の算術平均粗さRaおよび最大突起高さRpが前記範囲内であると、グリーンシートを形成する際に、外表面131の凹凸形状がグリーンシートに転写されることを抑制または防止することができる。そのため、グリーンシートの表面にピンホール等が発生するのをより好適に防ぐことができる。その結果、表面がより高平滑なグリーンシートを得ることができる。 When the arithmetic average roughness Ra 1 and the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 are within the above ranges, the uneven shape of the outer surface 131 is transferred to the green sheet when the green sheet is formed. This can be suppressed or prevented. Therefore, it can prevent more suitably that a pinhole etc. generate | occur | produce on the surface of a green sheet. As a result, a green sheet having a higher smooth surface can be obtained.
 また、剥離剤層13は、平均膜厚が、0.3~2μmであるのが好ましく、0.5~1μmであるのがより好ましい。剥離剤層13の厚さが前記下限値未満であると、剥離剤層13を構成する材料等によっては、剥離剤層13の平滑性が不十分となる。そのため、グリーンシートを剥離フィルム1上に形成したときに、グリーンシートにピンホールや部分的な厚みのばらつきが発生するおそれがある。一方、剥離剤層13の厚さが前記上限値を超えると、剥離剤層13の硬化収縮により剥離フィルム1にカールが発生し易くなるおそれがある。 In addition, the release agent layer 13 preferably has an average film thickness of 0.3 to 2 μm, and more preferably 0.5 to 1 μm. When the thickness of the release agent layer 13 is less than the lower limit value, the smoothness of the release agent layer 13 becomes insufficient depending on the material constituting the release agent layer 13 or the like. Therefore, when a green sheet is formed on the release film 1, there is a possibility that pinholes and partial thickness variations occur in the green sheet. On the other hand, when the thickness of the release agent layer 13 exceeds the upper limit, curling may occur easily in the release film 1 due to curing shrinkage of the release agent layer 13.
 ≪グリーンシート製造用剥離フィルムの製造方法≫
 次に、本発明のグリーンシート製造用剥離フィルムの製造方法について説明する。
≪Method for producing release film for green sheet production≫
Next, the manufacturing method of the peeling film for green sheet manufacture of this invention is demonstrated.
 以下、本実施形態の剥離フィルム1の製造方法について説明する。
 本実施形態の剥離フィルム1の製造方法は、基材11を準備する基材準備工程と、基材11の第1の面111上に平滑化層形成用組成物を塗布し第1の塗布層を形成し、第1の塗布層を加熱して硬化させることにより平滑化層12を形成する平滑化層形成工程と、平滑化層12の第3の面121上に剥離剤層形成用組成物を塗布し第2の塗布層を形成し、第2の塗布層を加熱して硬化させることにより剥離剤層13を形成する剥離剤層形成工程とを有している。
Hereinafter, the manufacturing method of the peeling film 1 of this embodiment is demonstrated.
The manufacturing method of the peeling film 1 of this embodiment is the base material preparation process which prepares the base material 11, apply | coating the smoothing layer forming composition on the 1st surface 111 of the base material 11, and a 1st application layer. Forming a smoothing layer 12 by heating and curing the first coating layer, and a release agent layer forming composition on the third surface 121 of the smoothing layer 12 Is applied to form a second coating layer, and the second coating layer is heated and cured to form a release agent layer 13.
 以下、各工程について詳細に説明する。
 <基材準備工程> 
 まず、基材11を準備する。
 基材11としては、前述したような構成の基材11を用いることができる。
Hereinafter, each step will be described in detail.
<Base material preparation process>
First, the base material 11 is prepared.
As the base material 11, the base material 11 having the configuration described above can be used.
 また、基材11の第1の面111に、酸化法などによる表面処理、あるいはプライマー処理を施すことができる。これにより、基材11と、基材11上に設けられる平滑化層12との接着性を向上させることができる。 In addition, the first surface 111 of the substrate 11 can be subjected to a surface treatment such as an oxidation method or a primer treatment. Thereby, the adhesiveness of the base material 11 and the smoothing layer 12 provided on the base material 11 can be improved.
 このような表面処理としては、基材11の種類等に応じて適宜選択すればよい。表面処理としては、例えば、コロナ放電処理、プラズマ放電処理、クロム酸化処理(湿式)、火炎処理、熱風処理、オゾン処理、紫外線照射処理等が挙げられる。これらの中でも特に、平滑化層12との接着性に優れ、処理の操作が簡便である点から、表面処理としては、コロナ放電処理を用いることがより好ましい。 Such a surface treatment may be appropriately selected according to the type of the substrate 11 or the like. Examples of the surface treatment include corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone treatment, and ultraviolet irradiation treatment. Among these, it is more preferable to use corona discharge treatment as the surface treatment because it is excellent in adhesiveness with the smoothing layer 12 and the treatment operation is simple.
 <平滑化層形成工程> 
 次に、基材11の第1の面111上に、平滑化層12を形成する。
<Smoothing layer forming step>
Next, the smoothing layer 12 is formed on the first surface 111 of the substrate 11.
 本工程では、まず、平滑化層形成用組成物を準備する。
 平滑化層形成用組成物は、前述したようなメラミン樹脂のみで構成されていてもよい。平滑化層形成用組成物は、これに加え、必要に応じて前述したような水酸基を有する希釈剤、酸性触媒、溶媒、その他の成分を混合した混合物で構成されていてもよい。
In this step, first, a smoothing layer forming composition is prepared.
The composition for smoothing layer formation may be comprised only with the melamine resin as mentioned above. In addition to this, the composition for smoothing layer formation may be comprised with the mixture which mixed the diluent which has a hydroxyl group as mentioned above, an acidic catalyst, a solvent, and another component as needed.
 次に、基材11の第1の面111上に、液状の平滑化層形成用組成物を塗布して乾燥することにより、第1の塗布層を得る。ここで、前述したように、平滑化層形成用組成物は、適度な流動性を有する。このため、基材11の第1の面111上に平滑化層形成用組成物を塗布して乾燥することで、基材11の第1の面111の凹凸を的確に埋め込み、外表面が平滑な第1の塗布層を得ることができる。 Next, a liquid coating composition for forming a smoothing layer is applied onto the first surface 111 of the substrate 11 and dried to obtain a first coating layer. Here, as described above, the composition for forming a smoothing layer has appropriate fluidity. For this reason, the unevenness | corrugation of the 1st surface 111 of the base material 11 is correctly embedded by apply | coating and drying the smoothing layer forming composition on the 1st surface 111 of the base material 11, and an outer surface is smooth. 1st coating layer can be obtained.
 平滑化層形成用組成物を塗布する方法としては、例えば、グラビアコート法、バーコート法、スプレーコート法、スピンコート法、エアーナイフコート法、ロールコート法、ブレードコート法、ゲートロールコート法、ダイコート法等が挙げられる。平滑化層形成用組成物を塗布する方法としては、これらの中でも、特に、グラビアコート法、バーコート法であるのがより好ましい。これにより、目的とする厚さの第1の塗布層を容易に形成することができる。 Examples of the method for applying the smoothing layer forming composition include a gravure coating method, a bar coating method, a spray coating method, a spin coating method, an air knife coating method, a roll coating method, a blade coating method, a gate roll coating method, Examples include a die coating method. Among these methods, the gravure coating method and the bar coating method are more preferable as the method for applying the smoothing layer forming composition. Thereby, the 1st application layer of the target thickness can be formed easily.
 次に、得られた第1の塗布層を、加熱して硬化させることにより平滑化層12を形成する。第1の面111の凹凸を的確に埋め込んだ状態の第1の塗布層を加熱することにより、第1の塗布層の外表面の平滑性を保持したまま硬化させることができる。その結果、得られる平滑化層12の第3の面121を十分に平滑にすることができる。 Next, the smoothing layer 12 is formed by heating and curing the obtained first coating layer. By heating the first coating layer in which the irregularities of the first surface 111 are accurately embedded, the first coating layer can be cured while maintaining the smoothness of the outer surface of the first coating layer. As a result, the third surface 121 of the resulting smoothing layer 12 can be sufficiently smoothed.
 ここで、平滑化層形成用組成物が溶媒を含む場合には、第1の塗布層を加熱して硬化させることにより、第1の塗布層(平滑化層形成用組成物を基板の第1の面111上に塗布することで得られた層)中の溶媒が除去されるとともに、平滑化層12が得られる。 Here, when the composition for smoothing layer formation contains a solvent, the 1st coating layer (the composition for smoothing layer formation is made into 1st of a board | substrate by heating and hardening a 1st coating layer. The solvent in the layer obtained by coating on the surface 111 is removed, and the smoothing layer 12 is obtained.
 加熱方法としては、特に限定されないが、例えば、熱風乾燥炉などで加熱する方法等が挙げられる。 Although it does not specifically limit as a heating method, For example, the method etc. which heat with a hot air drying furnace etc. are mentioned.
 また、加熱条件としては、特に限定されないが、加熱温度は、120℃以上140℃以下であるのが好ましく、加熱時間は30秒以上であるのが好ましい。これにより、熱収縮により平滑化層12の平滑性が低下するなど、平滑化層12が不本意に変質することを防ぐことができるとともに、平滑化層12を特に効率よく形成することができる。また、加熱温度が前記範囲にあると、平滑化層形成用組成物が溶媒等を含む場合に、加熱時の溶媒等の蒸発に起因する平滑化層12の反りやひび等の発生を防ぐことができる。 Further, the heating conditions are not particularly limited, but the heating temperature is preferably 120 ° C. or higher and 140 ° C. or lower, and the heating time is preferably 30 seconds or longer. Thereby, it is possible to prevent the smoothing layer 12 from unintentionally deteriorating, such as a decrease in smoothness of the smoothing layer 12 due to heat shrinkage, and the smoothing layer 12 can be formed particularly efficiently. In addition, when the heating temperature is within the above range, when the smoothing layer forming composition contains a solvent or the like, the warping or cracking of the smoothing layer 12 due to evaporation of the solvent or the like during heating is prevented. Can do.
 <剥離剤層形成工程>
 次に、平滑化層12の第3の面121上に、剥離剤層13を形成する。
<Release agent layer forming step>
Next, the release agent layer 13 is formed on the third surface 121 of the smoothing layer 12.
 本工程では、まず、剥離剤層形成用組成物を準備する。
 剥離剤層形成用組成物は、前述したようなメラミン樹脂、およびポリオルガノシロキサンのみで構成されていてもよい。剥離剤層形成用組成物は、これに加え、必要に応じて前述したような水酸基を有する希釈剤、酸性触媒、溶媒、その他の成分を混合した混合物で構成されていてもよい。
In this step, first, a release agent layer forming composition is prepared.
The release agent layer forming composition may be composed of only the melamine resin and polyorganosiloxane as described above. In addition to this, the release agent layer-forming composition may comprise a mixture in which a diluent having a hydroxyl group, an acidic catalyst, a solvent, and other components as described above are mixed as necessary.
 次に、平滑化層12の第3の面121上に、液状の剥離剤層形成用組成物を塗布して乾燥することにより、第2の塗布層を得る。 Next, a second release layer is obtained by applying a liquid release agent layer forming composition on the third surface 121 of the smoothing layer 12 and drying it.
 剥離剤層形成用組成物を塗布する方法としては、前述した平滑化層形成用組成物を塗布する方法にて例示した方法を用いることができる。剥離剤層形成用組成物を塗布する方法としては、これらの中でも特に、グラビアコート法、バーコート法であるのがより好ましい。これにより、目的とする厚さの第2の塗布層を容易に形成することができる。 As a method of applying the release agent layer forming composition, the method exemplified in the method of applying the smoothing layer forming composition described above can be used. Among these methods, the gravure coating method and the bar coating method are more preferable as the method for applying the release agent layer forming composition. Thereby, the 2nd application layer of the target thickness can be formed easily.
 次に、得られた第2の塗布層を、加熱して硬化させることにより剥離剤層13を形成する。これにより、剥離剤層13の外表面131を十分に平滑にすることができる。 Next, the release agent layer 13 is formed by heating and curing the obtained second coating layer. Thereby, the outer surface 131 of the release agent layer 13 can be sufficiently smoothed.
 ここで、剥離剤層形成用組成物中に溶媒を含む場合には、第2の塗布層を加熱して硬化させることにより第2の塗布層(剥離剤層形成用組成物を平滑化層12上に塗布することで得られた層)中の溶媒が除去されるとともに、剥離剤層13が得られる。 Here, when a solvent is contained in the release agent layer forming composition, the second application layer (the release agent layer forming composition is smoothed layer 12 by heating and curing the second application layer). While the solvent in the layer obtained by coating on the top is removed, the release agent layer 13 is obtained.
 加熱方法としては、特に限定されないが、例えば、熱風乾燥炉などで加熱する方法等が挙げられる。 Although it does not specifically limit as a heating method, For example, the method etc. which heat with a hot air drying furnace etc. are mentioned.
 また、加熱条件としては、特に限定されないが、加熱温度は、120℃以上140℃以下であるのが好ましく、加熱時間は30秒以上であるのが好ましい。これにより、熱収縮により剥離剤層13の平滑性が低下するなど、剥離剤層13が不本意に変質すること防ぐことができるとともに、剥離剤層13を特に効率よく形成することができる。また、加熱温度が前記範囲にあると、剥離剤層形成用組成物が溶媒等を含む場合に、加熱時の溶媒等の蒸発に起因する剥離剤層13の反りやひび等の発生を特に防ぐことができる。
 以上により、剥離フィルム1を得ることができる。
The heating conditions are not particularly limited, but the heating temperature is preferably 120 ° C. or higher and 140 ° C. or lower, and the heating time is preferably 30 seconds or longer. Thereby, it is possible to prevent the release agent layer 13 from being unintentionally altered such as a decrease in smoothness of the release agent layer 13 due to heat shrinkage, and the release agent layer 13 can be formed particularly efficiently. In addition, when the heating temperature is within the above range, when the release agent layer forming composition contains a solvent or the like, the occurrence of warping or cracking of the release agent layer 13 due to evaporation of the solvent or the like during heating is particularly prevented. be able to.
As described above, the release film 1 can be obtained.
 以上のような工程によれば、平滑性に優れ、かつ剥離性に優れた信頼性の高い剥離フィルム1を、容易かつ確実に製造することができる。 According to the above steps, a highly reliable release film 1 having excellent smoothness and excellent peelability can be produced easily and reliably.
 また、このような剥離フィルム1を用いてグリーンシートを製造すれば、グリーンシートの表面にピンホール等が生じるのを防止することができる。 Further, if a green sheet is manufactured using such a release film 1, it is possible to prevent a pinhole or the like from being generated on the surface of the green sheet.
 ≪グリーンシートの製造方法≫
 次に、本発明のグリーンシートの製造方法について説明する。
≪Green sheet manufacturing method≫
Next, the manufacturing method of the green sheet of this invention is demonstrated.
 本発明のグリーンシートの製造方法は、前述したような本発明のグリーンシート製造用剥離フィルムを用いてグリーンシートを製造する方法である。 The method for producing a green sheet of the present invention is a method for producing a green sheet using the release film for producing a green sheet of the present invention as described above.
 以下、本実施形態のグリーンシートの製造方法について説明する。
 本実施形態のグリーンシートの製造方法は、剥離フィルム1上に、セラミックス粉末と、バインダーを含むビヒクルとを含有するセラミックスラリー(グリーンシート形成用材料)を付与してグリーンシート前駆体を形成するグリーンシート形成用材料付与工程と、グリーンシート前駆体を固化する固化工程とを有する。
Hereinafter, the manufacturing method of the green sheet of this embodiment is demonstrated.
The green sheet manufacturing method of the present embodiment provides a green sheet precursor by forming ceramic slurry (green sheet forming material) containing ceramic powder and a vehicle containing a binder on the release film 1 to form a green sheet precursor. A sheet forming material application step, and a solidification step of solidifying the green sheet precursor.
 <グリーンシート形成用材料付与工程>
 本工程では、まず、剥離フィルム1上にセラミックスラリーを付与するにあたり、付与するセラミックスラリーを準備する。
<Green sheet forming material application process>
In this step, first, when the ceramic slurry is applied on the release film 1, a ceramic slurry to be applied is prepared.
 セラミックスラリーは、セラミックス粉末と、バインダーを含むビヒクルとを含有する。 Ceramic slurry contains ceramic powder and a vehicle containing a binder.
 セラミックス粉末としては、特に限定されず、例えば、アルミナ、ジルコニア、ケイ酸アルミニウム、チタン酸バリウム、炭化ケイ素、窒化ケイ素、窒化アルミニウム等を含む粉末が挙げられる。セラミックス粉末としては、これらのうち1種または2種以上を組み合わせて用いることができる。セラミックス粉末としては、これらの中でも、チタン酸バリウム(BaTiO)が好ましい。チタン酸バリウムは、極めて高い比誘電率を有し、得られたグリーンシートを用いてセラミックコンデンサーを形成するのに有効である。 The ceramic powder is not particularly limited, and examples thereof include powder containing alumina, zirconia, aluminum silicate, barium titanate, silicon carbide, silicon nitride, aluminum nitride and the like. As the ceramic powder, one or a combination of two or more of these can be used. Among these, barium titanate (BaTiO 3 ) is preferable as the ceramic powder. Barium titanate has an extremely high relative dielectric constant and is effective for forming a ceramic capacitor using the obtained green sheet.
 また、セラミックス粉末は、上述した材料に加え、さらに副成分原料を含んでいてもよい。 Further, the ceramic powder may further contain subcomponent materials in addition to the above-described materials.
 副成分原料としては、例えば、酸化物や、焼成により酸化物となる化合物等が挙げられる。焼成により酸化物となる化合物としては、炭酸塩、シュウ酸塩、硝酸塩、水酸化物、有機金属化合物等が挙げられる。 Examples of the auxiliary component material include oxides and compounds that become oxides upon firing. Examples of the compound that becomes an oxide upon firing include carbonates, oxalates, nitrates, hydroxides, and organometallic compounds.
 このようなセラミックス粉末の形状は、特に限定されず、例えば、球状、楕円球、状鱗片状、円盤状、楕円盤状、円柱状、直方体状、針状等が挙げられる。 The shape of such ceramic powder is not particularly limited, and examples thereof include a spherical shape, an elliptical sphere shape, a scale shape, a disc shape, an elliptical disc shape, a cylindrical shape, a rectangular parallelepiped shape, and a needle shape.
 セラミックス粉末の形状が球状である場合、その平均粒径は、0.05~3.0μmであることが好ましく、0.1~0.7μmであることがより好ましい。 When the shape of the ceramic powder is spherical, the average particle size is preferably 0.05 to 3.0 μm, and more preferably 0.1 to 0.7 μm.
 また、セラミックス粉末の製造方法としては、特に限定されず、共沈法、ゾル・ゲル法、アルカリ加水分解法、沈殿混合法、水熱合成法といった湿式法や、乾式法が挙げられる。 Further, the method for producing the ceramic powder is not particularly limited, and examples thereof include a wet method such as a coprecipitation method, a sol-gel method, an alkali hydrolysis method, a precipitation mixing method, and a hydrothermal synthesis method, and a dry method.
 例えば、チタン酸バリウムを含むセラミックス粉末は、水熱合成法によって合成されたチタン酸バリウムに、副成分原料を混合することによって得ることができる。また、チタン酸バリウムを含むセラミックス粉末は、炭酸バリウム(BaCO)と酸化チタン(TiO)と副成分原料とを混合した混合物を仮焼して固相反応させる乾式法によっても得ることができる。 For example, a ceramic powder containing barium titanate can be obtained by mixing subcomponent raw materials with barium titanate synthesized by a hydrothermal synthesis method. The ceramic powder containing barium titanate can also be obtained by a dry method in which a mixture of barium carbonate (BaCO 3 ), titanium oxide (TiO 2 ), and auxiliary component raw materials is calcined to cause a solid phase reaction. .
 また、セラミックスラリー中におけるセラミックス粉末の含有量としては、特に限定されないが、20~80質量%程度が好ましい。 The content of the ceramic powder in the ceramic slurry is not particularly limited, but is preferably about 20 to 80% by mass.
 また、ビヒクルは、バインダーを有機溶媒中に溶解した有機ビヒクルであってもよく、水溶性のバインダーを水に溶解した水系ビヒクルであってもよい。 Further, the vehicle may be an organic vehicle in which a binder is dissolved in an organic solvent, or may be an aqueous vehicle in which a water-soluble binder is dissolved in water.
 バインダーとしては、特に限定されず、例えば、エチルセルロース、ポリビニルブチラール、ポリビニルアルコール、セルロース、水溶性アクリル樹脂等が挙げられる。バインダーとしては、これらのうちの1種または2種以上を組み合わせて用いることができる。上述したバインダーのうち、エチルセルロースおよびポリビニルブチラールは、有機ビヒクル中に含まれるバインダーとして用いることができる。また、ポリビニルアルコール、セルロースおよび水溶性アクリル樹脂は、水系ビヒクル中に含まれるバインダーとして用いることができる。 The binder is not particularly limited, and examples thereof include ethyl cellulose, polyvinyl butyral, polyvinyl alcohol, cellulose, and a water-soluble acrylic resin. As the binder, one or a combination of two or more of these can be used. Of the binders described above, ethyl cellulose and polyvinyl butyral can be used as binders contained in the organic vehicle. Polyvinyl alcohol, cellulose, and water-soluble acrylic resin can be used as a binder contained in an aqueous vehicle.
 また、セラミックスラリー中におけるバインダーの含有量としては、特に限定されないが、2~10質量%程度が好ましい。 Further, the content of the binder in the ceramic slurry is not particularly limited, but is preferably about 2 to 10% by mass.
 また、有機溶媒としては、特に限定されず、例えば、テルピネオール、ブチルカルビトール、メチルエチルケトン、アセトン、エタノール、トルエン等が挙げられる。有機溶媒としては、これらのうちの1種または2種以上を組み合わせて用いることができる。 The organic solvent is not particularly limited, and examples thereof include terpineol, butyl carbitol, methyl ethyl ketone, acetone, ethanol, toluene and the like. As the organic solvent, one or a combination of two or more of these can be used.
 また、セラミックスラリーは、必要に応じて、可塑剤、分散剤、潤滑剤、帯電防止剤、酸化防止剤等を含んでいてもよい。 Further, the ceramic slurry may contain a plasticizer, a dispersant, a lubricant, an antistatic agent, an antioxidant and the like as necessary.
 可塑剤としては、ポリエチレングリコール、フタル酸エステル、例えばジオクチルフタレート、ジブチルフタレート等が挙げられる。 Examples of the plasticizer include polyethylene glycol and phthalic acid esters such as dioctyl phthalate and dibutyl phthalate.
 セラミックスラリーがこのような可塑剤を含む場合、セラミックスラリー中における可塑剤の含有量としては、特に限定されないが、0.1~5質量%程度が好ましい。 When the ceramic slurry contains such a plasticizer, the content of the plasticizer in the ceramic slurry is not particularly limited, but is preferably about 0.1 to 5% by mass.
 また、分散剤としては、例えば、オレイン酸、ロジン、グリセリン、オクタデシルアミン、オレイン酸エチル、メンセーデン油等が挙げられる。 Further, examples of the dispersant include oleic acid, rosin, glycerin, octadecylamine, ethyl oleate, menseden oil and the like.
 このような分散剤を含む場合、セラミックスラリー中における分散剤の含有量としては、特に限定されないが、0.1~5質量%程度が好ましい。 When such a dispersant is included, the content of the dispersant in the ceramic slurry is not particularly limited, but is preferably about 0.1 to 5% by mass.
 次いで、上述したような材料を含むセラミックスラリーを剥離剤層13(剥離フィルム1)の外表面131上に付与する。 Next, a ceramic slurry containing the material as described above is applied onto the outer surface 131 of the release agent layer 13 (release film 1).
 セラミックスラリーの剥離フィルム1上への付与は、例えば巻いた状態で保管された剥離フィルム1のロール(巻き)から剥離フィルム1を繰り出した後に行うことができる。 Application of the ceramic slurry onto the release film 1 can be performed, for example, after the release film 1 is unwound from a roll (winding) of the release film 1 stored in a rolled state.
 セラミックスラリーの塗工は、例えば、ドクターブレード法、リップコート法、ロールコート法、グラビアコート法、ダイコート法等によって行うことができる。 The ceramic slurry can be applied by, for example, a doctor blade method, a lip coat method, a roll coat method, a gravure coat method, a die coat method, or the like.
 <固化工程>
 次に、剥離フィルム1上に付与されたセラミックスラリーを固化させる。
<Solidification process>
Next, the ceramic slurry applied on the release film 1 is solidified.
 セラミックスラリーの固化は、例えば、加熱、減圧乾燥して、セラミックスラリーから溶媒等を除去することにより行うことができる。
 これにより、グリーンシートが得られる。
Solidification of the ceramic slurry can be performed by, for example, heating and drying under reduced pressure to remove the solvent and the like from the ceramic slurry.
Thereby, a green sheet is obtained.
 以上のようなグリーンシートの製造では、平滑性に優れた剥離フィルム1を用いてグリーンシートを製造している。このため、以上のようなグリーンシートの製造によれば、グリーンシートにピンホールや部分的な厚みのばらつきが発生することを抑制または防止することができる。 In the production of the green sheet as described above, the green sheet is produced using the release film 1 having excellent smoothness. For this reason, according to the manufacture of the green sheet as described above, it is possible to suppress or prevent occurrence of pinholes and partial thickness variations in the green sheet.
 また、上記グリーンシートの製造では、グリーンシートに対する剥離性に優れた剥離フィルム1を用いてグリーンシートを製造している。このため、剥離フィルム1上に形成したグリーンシートを剥離するときに、グリーンシートが剥離フィルム1に必要以上に接着してしまうこと抑制または防止することができる。すなわち、剥離フィルム1からグリーンシートを円滑に剥離することができず、グリーンシートが破損してしまうことを抑制または防止することができる。 Further, in the production of the green sheet, the green sheet is produced using the release film 1 having excellent peelability with respect to the green sheet. For this reason, when peeling the green sheet formed on the peeling film 1, it can suppress or prevent that a green sheet adheres to the peeling film 1 more than necessary. That is, it is possible to suppress or prevent the green sheet from being smoothly peeled off from the release film 1 and being damaged.
 このようなことから、剥離フィルム1を用いてグリーンシートを製造する上記グリーンシートの製造方法によれば、信頼性の高いグリーンシートを容易かつ確実に得ることができる。 For this reason, according to the green sheet manufacturing method of manufacturing a green sheet using the release film 1, a highly reliable green sheet can be obtained easily and reliably.
 ≪グリーンシート≫
 次に、本発明のグリーンシートについて説明する。
≪Green sheet≫
Next, the green sheet of the present invention will be described.
 本発明のグリーンシートは、前述したような本発明のグリーンシートの製造方法を用いて製造される。 The green sheet of the present invention is manufactured by using the green sheet manufacturing method of the present invention as described above.
 本実施形態では、剥離フィルム1を用いる上記グリーンシートの製造方法によって、グリーンシートを得る。
In the present embodiment, a green sheet is obtained by the above green sheet manufacturing method using the release film 1.
 このようにして剥離フィルム1上に形成されたグリーンシートは、例えば、その表面にペースト状の内部電極が印刷され、所定サイズに切断後に剥離フィルム1から剥離される。剥離されたグリーンシートは、積層された後、静水圧プレスされ、所定の形状、大きさに再び裁断される。その後、かかるグリーンシートは、脱バインダー処理と、外部電極の設置と、焼成と、めっき処理とをすることにより、セラミックコンデンサーとして用いることができる。 The green sheet thus formed on the release film 1 is, for example, printed with a paste-like internal electrode on its surface, and is peeled from the release film 1 after being cut into a predetermined size. The peeled green sheets are laminated and then hydrostatically pressed and cut again into a predetermined shape and size. Thereafter, the green sheet can be used as a ceramic capacitor by performing a binder removal treatment, installation of external electrodes, firing, and plating treatment.
 剥離フィルム1を用いて製造されたグリーンシートでは、前述するように、ピンホールや部分的な厚みのばらつき等の発生が抑制または防止されている。したがって、このようなグリーンシートを積層してセラミックコンデンサーを形成すると、短絡や断線による不具合の発生が防止された信頼性の高いセラミックコンデンサーを得ることができる。 In the green sheet manufactured using the release film 1, the occurrence of pinholes and partial thickness variations is suppressed or prevented as described above. Therefore, when such a green sheet is laminated to form a ceramic capacitor, it is possible to obtain a highly reliable ceramic capacitor in which occurrence of problems due to short circuit or disconnection is prevented.
 以上、本発明を好適実施形態に基づいて詳細に説明したが、本発明はこれに限定されない。本発明のグリーンシート製造用剥離フィルムや本発明のグリーンシートを構成する各部は、同様の機能を発揮し得る任意の構成に置換することができる。また、本発明のグリーンシート製造用剥離フィルムの製造方法や本発明のグリーンシートの製造方法は、前述した方法に限定されるものではなく、必要に応じて、任意の工程が追加されてもよい。 As mentioned above, although this invention was demonstrated in detail based on preferred embodiment, this invention is not limited to this. Each part which comprises the peeling film for green sheet manufacture of this invention and the green sheet of this invention can be substituted by the arbitrary structures which can exhibit the same function. Moreover, the manufacturing method of the peeling film for manufacturing the green sheet of the present invention and the manufacturing method of the green sheet of the present invention are not limited to the above-described methods, and optional steps may be added as necessary. .
 例えば、前述した本実施形態では、基材は単層構造として説明したが、これに限定されない。例えば、基材は、同種または異種の2層以上の多層構造であってもよい。また、平滑化層、剥離剤層についても同様に、それぞれ単層構造として説明したが、これに限定されない。例えば、平滑化層、剥離剤層についても、それぞれ、同種または異種の2層以上の多層構造であってもよい。 For example, in the above-described embodiment, the base material has been described as a single layer structure, but is not limited thereto. For example, the substrate may have a multilayer structure of two or more layers of the same type or different types. Similarly, the smoothing layer and the release agent layer have been described as single-layer structures, but are not limited thereto. For example, each of the smoothing layer and the release agent layer may have a multilayer structure of two or more layers of the same type or different types.
 また、前述した実施形態では、グリーンシート製造用剥離フィルムは、基材と、平滑化層と、剥離剤層とがこの順に互いに接合して積層された三層構造として説明したが、これに限定されない。例えば、基材と、平滑化層との間に中間層を設けてもよい。また、平滑化層と、剥離剤層との間に中間層を設けてもよい。このような中間層は、各層の接着性を向上させる機能を有していてもよい。また、中間層は、グリーンシート形成前のグリーンシート製造用剥離フィルムを巻き取る際の帯電の発生をより抑制させる機能を有していてもよい。 In the embodiment described above, the release film for producing a green sheet has been described as a three-layer structure in which a base material, a smoothing layer, and a release agent layer are joined and laminated in this order. Not. For example, an intermediate layer may be provided between the base material and the smoothing layer. Further, an intermediate layer may be provided between the smoothing layer and the release agent layer. Such an intermediate layer may have a function of improving the adhesion of each layer. Further, the intermediate layer may have a function of further suppressing the generation of charging when the release film for producing a green sheet before forming the green sheet is wound up.
 次に、本発明のグリーンシート製造用剥離フィルムの具体的実施例について説明するが、本発明はこれら実施例のみに限定されるものではない。 Next, specific examples of the release film for producing a green sheet of the present invention will be described, but the present invention is not limited to only these examples.
 [1]グリーンシート製造用剥離フィルムの作製
 (実施例1)
 まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:31μm、第1の面の算術平均粗さRa:23nm、第1の面の最大突起高さRp:415nm、第2の面の算術平均粗さRa:23nm、第2の面の最大突起高さRp:415nm]を用意した。
[1] Production of release film for green sheet production (Example 1)
First, a biaxially stretched polyethylene terephthalate film as a substrate [thickness: 31 μm, arithmetic average roughness Ra 2 of the first surface: 23 nm, maximum protrusion height Rp 2 of the first surface: 415 nm, of the second surface Arithmetic average roughness Ra 3 : 23 nm, maximum protrusion height Rp 3 : 415 nm on the second surface] was prepared.
 次に、メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%]:100質量部と、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の平滑化層形成用組成物を得た。 Next, melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass]: 100 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 A composition for forming a smoothing layer having a solid content of 15% by mass was obtained by mixing part by mass and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1).
 次いで、得られた平滑化層形成用組成物をバーコーターで基材11の第1の面111上に塗布して、第1の塗布層を得た。次に、第1の塗布層を120℃で1分間加熱することにより第1の塗布層を硬化させることで、平滑化層(厚み:0.55μm)を形成した。 Next, the obtained composition for forming a smoothing layer was applied onto the first surface 111 of the substrate 11 with a bar coater to obtain a first coating layer. Next, the smoothing layer (thickness: 0.55 μm) was formed by curing the first coating layer by heating the first coating layer at 120 ° C. for 1 minute.
 次に、メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%] :95質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%] :5質量部と、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Next, melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 95 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Industry Co., Ltd., KF-9701, solid content 100% by weight]: 5 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio) 4/1) was mixed to obtain a release agent layer-forming composition having a solid content of 15% by mass.
 次いで、得られた剥離剤層形成用組成物をバーコーターで平滑化層の第3の面(基材とは反対の面)上に塗布して、第2の塗布層を得た。次に、第2の塗布層を120℃で1分間加熱することにより第2の塗布層を硬化させることで、剥離剤層(厚み:0.50μm)を形成した。 Next, the obtained release agent layer-forming composition was applied onto the third surface (the surface opposite to the substrate) of the smoothing layer with a bar coater to obtain a second coating layer. Next, the release agent layer (thickness: 0.50 μm) was formed by curing the second application layer by heating the second application layer at 120 ° C. for 1 minute.
 (実施例2)
 下記のようにして得られた平滑化層形成用組成物と剥離剤層形成用組成物とを用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Example 2)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
 メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%]:65質量部と、希釈剤としてのグリコール系化合物[2-メチル-1,3-プロパンジオール、東京化成工業社製、質量平均分子量90、固形分100%]:30質量部との混合物に、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の平滑化層形成用組成物を得た。 Melamine resin [Made by Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass]: 65 parts by mass and glycol compound [2-methyl-1, 3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., mass average molecular weight 90, solid content 100%]: 30 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, isopropyl alcohol and isobutyl alcohol And a mixed solvent (mass ratio 4/1) were mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
 また、メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%]:65質量部と、希釈剤としてのグリコール系化合物[2-メチル-1,3-プロパンジオール、東京化成工業社製、質量平均分子量90、固形分100%]:30質量部との混合物と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%]:5質量部と、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Further, melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass]: 65 parts by mass and glycol compound [2-methyl- 1,3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., mass average molecular weight 90, solid content 100%]: 30 parts by mass of silanol-terminated polydimethylsiloxane as a silicone compound [manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content 100% by mass]: 5 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1). By mixing, a composition for forming a release agent layer having a solid content of 15% by mass was obtained.
 (実施例3)
 基材として、二軸延伸ポリエチレンテレフタレートフィルム[厚み:31μm、第1の面の算術平均粗さRa:19nm、第1の面の最大突起高さRp:216nm、第2の面の算術平均粗さRa:19nm、第2の面の最大突起高さRp:216nm]を用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
Example 3
Biaxially stretched polyethylene terephthalate film as a substrate [thickness: 31 μm, arithmetic average roughness Ra 2 of first surface: 19 nm, maximum protrusion height Rp 2 of first surface: 216 nm, arithmetic average of second surface A release film for producing a green sheet was produced in the same manner as in Example 1 except that the roughness Ra 3 : 19 nm and the maximum projection height Rp 3 of the second surface Rp 3 : 216 nm were used.
 (実施例4~6)
 各層(平滑化層や剥離剤層)の厚みを表1に示すように変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Examples 4 to 6)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of each layer (smoothing layer and release agent layer) was changed as shown in Table 1.
 (比較例1)
 平滑化層を設けなかった以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 1)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer was not provided.
 (比較例2)
 平滑化層の厚みを0.20μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 2)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer was changed to 0.20 μm.
 (比較例3)
 下記のようにして得られた剥離剤層形成用組成物を用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 3)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the release agent layer forming composition obtained as described below was used.
 メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%] :99質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%] :1質量部と、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 99 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Manufactured by KF-9701, solid content: 100% by mass]: 1 part by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1) And a release agent layer forming composition having a solid content of 15% by mass.
 (比較例4)
 下記のようにして得られた剥離剤層形成用組成物を用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 4)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the release agent layer forming composition obtained as described below was used.
 メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%] :80質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%] :20質量部と、酸性触媒としてのp-トルエンスルホン酸:5質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Melamine resin [Mitsui Cytec Co., Ltd., trade name “Cymel 303”, hexamethoxymethylmelamine, mass average molecular weight 390, solid content 100% by mass]: 80 parts by mass, silanol-terminated polydimethylsiloxane as a silicone compound [Shin-Etsu Chemical Manufactured by KF-9701, solid content: 100% by mass]: 20 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 5 parts by mass, and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1) And a release agent layer forming composition having a solid content of 15% by mass.
 (比較例5)
 下記のようにして得られた平滑化層形成用組成物と剥離剤層形成用組成物とを用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 5)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
 ステアリル変性アルキド化合物とメチル化メラミン化合物との混合物[日立化成ポリマー株式会社製、商品名「テスファイン303」、質量平均分子量15000、固形分48質量%]:100質量部と、酸性触媒としてのp-トルエンスルホン酸:3質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の平滑化層形成用組成物を得た。 Mixture of stearyl modified alkyd compound and methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, mass average molecular weight 15000, solid content 48% by mass]: 100 parts by mass and p as an acidic catalyst -Toluenesulfonic acid: 3 parts by mass and a mixed solvent of isopropyl alcohol and isobutyl alcohol (mass ratio 4/1) were mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
 また、ステアリル変性アルキド化合物とメチル化メラミン化合物との混合物[日立化成ポリマー株式会社製、商品名「テスファイン303」、質量平均分子量15000、固形分48質量%]:100質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%]:2.53質量部と、酸性触媒としてのp-トルエンスルホン酸:3質量部と、イソプロピルアルコールとイソブチルアルコールとの混合溶媒(質量比率4/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Further, a mixture of a stearyl-modified alkyd compound and a methylated melamine compound [manufactured by Hitachi Chemical Polymer Co., Ltd., trade name “Tesfine 303”, mass average molecular weight 15000, solid content 48% by mass]: 100 parts by mass and a silicone compound Silanol-terminated polydimethylsiloxane (manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content: 100% by mass): 2.53 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 3 parts by mass, and isopropyl alcohol And a mixed solvent of isobutyl alcohol (mass ratio 4/1) were mixed to obtain a release agent layer forming composition having a solid content of 15% by mass.
 (比較例6)
 下記のようにして得られた平滑化層形成用組成物と剥離剤層形成用組成物とを用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
(Comparative Example 6)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
 ポリエステル化合物[東洋紡績(株)製、商品名「バイロン20SS」、固形分30質量%、質量平均分子量3000]:80質量部と、架橋剤としてのメチル化メラミン化合物[日立化成ポリマー株式会社製、商品名「テスファイン200」、固形分80質量%]:20質量部の混合物:100質量部と、酸性触媒としてのp-トルエンスルホン酸:3質量部と、トルエンとメチルエチルケトンとの混合溶媒(質量比率1/1)と、を混合して固形分15質量%の平滑化層形成用組成物を得た。 Polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, weight average molecular weight 3000]: 80 parts by mass, methylated melamine compound as a crosslinking agent [manufactured by Hitachi Chemical Co., Ltd., Product name “Tesfine 200”, solid content 80 mass%]: 20 mass parts mixture: 100 mass parts, p-toluenesulfonic acid as acidic catalyst: 3 mass parts, mixed solvent of toluene and methyl ethyl ketone (mass) Ratio 1/1) was mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
 また、ポリエステル化合物[東洋紡績(株)製、商品名「バイロン20SS」、固形分30質量%、質量平均分子量3000]:80質量部と、架橋剤としてのメチル化メラミン化合物[日立化成ポリマー株式会社製、商品名「テスファイン200」、固形分80質量%]:20質量部の混合物:95質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%]:2.1質量部と、酸性触媒としてのp-トルエンスルホン酸:3質量部と、トルエンとメチルエチルケトンとの混合溶媒(質量比率1/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 In addition, polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000]: 80 parts by mass, methylated melamine compound [Hitachi Chemical Polymer Co., Ltd.] Product name “Tesfine 200”, solid content 80 mass%]: 20 mass parts mixture: 95 mass parts and silanol-terminated polydimethylsiloxane as a silicone compound [manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, Solid content 100% by mass]: 2.1 parts by mass, p-toluenesulfonic acid as an acidic catalyst: 3 parts by mass, and a mixed solvent of toluene and methyl ethyl ketone (mass ratio 1/1) were mixed to form a solid A composition for forming a release agent layer having a content of 15% by mass was obtained.
 (比較例7)
 下記のようにして得られた平滑化層形成用組成物と剥離剤層形成用組成物とを用いた以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
直鎖オクチル化メラミン樹脂[三羽研究所製、商品名「RP-30」、固形分濃度30質量%、質量平均分子量2000]100質量部と、酸性触媒としてのp-トルエンスルホン酸5質量部と、トルエン/メチルエチルケトンとの混合溶媒(質量比率1/1)と、を混合して固形分15質量%の平滑化層形成用組成物を得た。
(Comparative Example 7)
A release film for producing a green sheet was produced in the same manner as in Example 1 except that the smoothing layer forming composition and the release agent layer forming composition obtained as described below were used.
100 parts by mass of linear octylated melamine resin [trade name “RP-30”, manufactured by Sanba Laboratory, solid content concentration 30% by mass, mass average molecular weight 2000], and 5 parts by mass of p-toluenesulfonic acid as an acidic catalyst And a mixed solvent of toluene / methyl ethyl ketone (mass ratio 1/1) were mixed to obtain a composition for forming a smoothing layer having a solid content of 15% by mass.
 また、直鎖オクチル化メラミンホルム樹脂[三羽研究所製、商品名「RP-30」、固形分濃度30質量%、質量平均分子量2000]100質量部と、シリコーン化合物としてのシラノール末端ポリジメチルシロキサン[信越化学工業(株)製、KF-9701、固形分100質量%] :1.58質量部と、酸性触媒としてのp-トルエンスルホン酸5質量部と、トルエン/メチルエチルケトンとの混合溶媒(質量比率1/1)と、を混合して固形分15質量%の剥離剤層形成用組成物を得た。 Also, 100 parts by mass of linear octylated melamine form resin (trade name “RP-30”, manufactured by Sanba Laboratory, solid content concentration 30% by mass, mass average molecular weight 2000) and silanol-terminated polydimethylsiloxane as a silicone compound [Manufactured by Shin-Etsu Chemical Co., Ltd., KF-9701, solid content: 100% by mass]: 1.58 parts by mass, 5 parts by mass of p-toluenesulfonic acid as an acidic catalyst, and a mixed solvent of toluene / methyl ethyl ketone (mass Ratio 1/1) was mixed to obtain a release agent layer-forming composition having a solid content of 15% by mass.
 各実施例および各比較例のグリーンシート製造用剥離フィルムの構成等を表1にまとめて示した。 Table 1 summarizes the configurations and the like of the release films for producing green sheets of each Example and each Comparative Example.
 なお、表1中、メラミン樹脂[三井サイテック社製 商品名「サイメル303」、ヘキサメトキシメチルメラミン、質量平均分子量390、固形分100質量%]を「A1」、グリコール系化合物[2-メチル-1,3-プロパンジオール、東京化成工業社製、質量平均分子量90、固形分100%]を「A2」、ステアリル変性アルキド化合物とメチル化メラミン化合物との混合物[日立化成ポリマー株式会社製、商品名「テスファイン303」、質量平均分子量15000、固形分48質量%]を「A3」、ポリエステル化合物[東洋紡績(株)製、商品名「バイロン20SS」、固形分30質量%、質量平均分子量3000]80質量部と、架橋剤としてのメチル化メラミン化合物[日立化成ポリマー株式会社製、商品名「テスファイン200」、固形分80質量%]:20質量部の混合物を「A4」、直鎖オクチル化メラミン樹脂[三羽研究所製、商品名「RP-30」、固形分濃度30質量%、質量平均分子量2000]を「A5」と示した。
 また、表1中、熱硬化性樹脂、反応性希釈剤およびポリオルガノシロキサンの各含有率は、平滑化層形成用組成物(固形分)全体における熱硬化性樹脂と反応性希釈剤との割合、および剥離剤層形成用組成物(固形分)全体における熱硬化性樹脂と反応性希釈剤とポリオルガノシロキサンとの割合である。
In Table 1, melamine resin [trade name “Cymel 303” manufactured by Mitsui Cytec Co., Ltd., hexamethoxymethyl melamine, mass average molecular weight 390, solid content 100% by mass] is “A1”, glycol compound [2-methyl-1 , 3-propanediol, manufactured by Tokyo Chemical Industry Co., Ltd., weight average molecular weight 90, solid content 100%] is “A2”, a mixture of stearyl-modified alkyd compound and methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “ "Tesfine 303", mass average molecular weight 15000, solid content 48% by mass] "A3", polyester compound [manufactured by Toyobo Co., Ltd., trade name "Byron 20SS", solid content 30% by mass, mass average molecular weight 3000] 80 Part by mass and methylated melamine compound as a crosslinking agent [manufactured by Hitachi Chemical Polymer Co., Ltd., trade name “Tesfine 2 0 ”, solid content 80% by mass”: 20 parts by mass of a mixture of “A4”, linear octylated melamine resin [trade name “RP-30” manufactured by Sanba Laboratory, solid content concentration 30% by mass, mass average Molecular weight 2000] was indicated as “A5”.
Moreover, in Table 1, each content rate of a thermosetting resin, a reactive diluent, and polyorganosiloxane is the ratio of the thermosetting resin and the reactive diluent in the whole composition for smoothing layer formation (solid content). And the ratio of the thermosetting resin, the reactive diluent and the polyorganosiloxane in the entire composition (solid content) for forming the release agent layer.
 また、各実施例および各比較例において、基材、平滑化層および剥離剤層の平均膜厚は、それぞれ、反射式膜厚計「F20」[フィルメトリクス株式会社製]にて測定した。なお、前記平均膜厚は、前記反射式膜厚計を用いて、10mm×100mmに裁断した基材等中の任意の12箇所における膜厚を測定し、測定した12箇所の値のうち最大値および最小値を除いた10個所の値の平均値を算出することにより求めた値である。 In each example and each comparative example, the average film thicknesses of the substrate, the smoothing layer, and the release agent layer were measured with a reflective film thickness meter “F20” (manufactured by Filmetrics Co., Ltd.). In addition, the said average film thickness measured the film thickness in arbitrary 12 places in the base material etc. which were cut | judged to 10 mm x 100 mm using the said reflection-type film thickness meter, and is the maximum value among the measured 12 places values. And a value obtained by calculating an average value of 10 values excluding the minimum value.
 また、各実施例および各比較例において、基材の第1の面の算術平均粗さRaおよび最大突起高さRp、基材の第2の面の算術平均粗さRaおよび最大突起高さRp、平滑化層の第3の面の算術平均粗さRaおよび最大突起高さRp、ならびに、剥離剤層の外表面の算術平均粗さRaおよび最大突起高さRpは、それぞれ、次のようにして測定した。まず、ガラス板に両面テープを貼付した。次に、両面テープ上に、測定する側の面の反対面がガラス板側になるようにして、基材等を固定し、光干渉式表面形状観察装置(商品面「WYKO-1100」、株式会社Veeco社製)を用いて測定した。なお、上記測定条件は、PSIモード、50倍率にて、測定範囲:91.2×119.8μmとした。 In each example and each comparative example, the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface of the base material, the arithmetic average roughness Ra 3 and the maximum protrusion of the second surface of the base material Height Rp 3 , arithmetic average roughness Ra 4 and maximum protrusion height Rp 4 of the third surface of the smoothing layer, and arithmetic average roughness Ra 1 and maximum protrusion height Rp 1 of the outer surface of the release agent layer Each was measured as follows. First, a double-sided tape was affixed to a glass plate. Next, a substrate is fixed on the double-sided tape so that the surface opposite to the surface to be measured is the glass plate side, and an optical interference type surface shape observation device (product surface “WYKO-1100”, stock Measured using a company Veeco). The measurement conditions were PSI mode, 50 magnification, and measurement range: 91.2 × 119.8 μm.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 [2]評価
 以上のようにして得られたグリーンシート製造用剥離フィルムに関して、以下のような評価を行った。
[2] Evaluation Regarding the release film for producing a green sheet obtained as described above, the following evaluation was performed.
[2.1]スラリー塗工性評価
 チタン酸バリウム粉末[堺化学工業社製、商品名「BT-03」、BaTiO]:100質量部と、バインダーとしてのポリビニルブチラール[積水化学工業社製,商品名「エスレックB・K BM-2」]:8質量部と、可塑剤としてのフタル酸ジオクチル[関東化学社製、商品名「フタル酸ジオクチル 鹿1級」]:4質量部とを混合して混合物を得た。この混合物:12質量部と、トルエン/エタノール混合溶媒(質量比6/4):135質量部とをボールミルにて混合分散させて、セラミックスラリーを調製した。
[2.1] Evaluation of slurry coating property Barium titanate powder [manufactured by Sakai Chemical Industry Co., Ltd., trade name “BT-03”, BaTiO 3 ]: 100 parts by mass and polyvinyl butyral as a binder [manufactured by Sekisui Chemical Co., Ltd., Trade name “ESREC B / K BM-2”]: 8 parts by mass and dioctyl phthalate as a plasticizer [manufactured by Kanto Chemical Co., Ltd., trade name “dioctyl phthalate deer grade 1”]: 4 parts by mass To obtain a mixture. This mixture: 12 parts by mass and toluene / ethanol mixed solvent (mass ratio 6/4): 135 parts by mass were mixed and dispersed by a ball mill to prepare a ceramic slurry.
 次に、各実施例、および各比較例で得られた剥離フィルムの外表面(剥離剤層の外表面)上に、上記セラミックスラリーをダイコーターにて、グリーンシートの厚さが1μmになるように、幅250mm、長さ10mに渡り塗布し、グリーンシート前駆体を形成した。グリーンシート前駆体を80℃で1分間乾燥させた。これにより、外表面上にグリーンシートが形成された剥離フィルムを得た。 Next, the ceramic slurry is placed on the outer surface of the release film (outer surface of the release agent layer) obtained in each example and each comparative example with a die coater so that the thickness of the green sheet becomes 1 μm. Then, coating was performed over a width of 250 mm and a length of 10 m to form a green sheet precursor. The green sheet precursor was dried at 80 ° C. for 1 minute. Thereby, the peeling film in which the green sheet was formed on the outer surface was obtained.
 その後、グリーンシートが形成された剥離フィルムについて、剥離フィルム側から蛍光灯にて光を照射して、グリーンシート面を目視で観察し、以下の判断基準でスラリーの塗工性を評価した。 Thereafter, the release film on which the green sheet was formed was irradiated with light from the release film side with a fluorescent lamp, the green sheet surface was visually observed, and the coating property of the slurry was evaluated according to the following criteria.
  A:グリーンシートにピンホールが無かった。
  B:グリーンシートに1~5個のピンホールが見つかった。
  C:グリーンシートに6個以上のピンホールが見つかった。
A: There was no pinhole in the green sheet.
B: 1 to 5 pinholes were found on the green sheet.
C: Six or more pinholes were found on the green sheet.
[2.2]グリーンシート剥離性評価
 前記[2.1]で形成したグリーンシートを、剥離フィルムから剥離し、以下の判断基準でグリーンシートの剥離性を評価した。
[2.2] Evaluation of green sheet peelability The green sheet formed in [2.1] was peeled from the release film, and the peelability of the green sheet was evaluated according to the following criteria.
  A:グリーンシートが破れることなく、スムーズに剥離できた。また、剥離剤層上にグリーンシートが残らなかった。 A: The green sheet was peeled off smoothly without tearing. Further, no green sheet remained on the release agent layer.
  B:グリーンシートが破れることなく、ややスムーズさに欠けるものの剥離でき、剥離剤層上にグリーンシートが残らなかった。 B: The green sheet was not torn, but it could be peeled off with a little smoothness, and no green sheet remained on the release agent layer.
  C:グリーンシートを剥離するときに、グリーンシートが破れるか、または剥離できなかった。 C: When the green sheet was peeled off, the green sheet was torn or could not be peeled off.
[2.3]剥離剤層の欠陥評価(剥離剤層の凹部数評価)
 ポリビニルブチラール樹脂をトルエン/エタノール混合溶媒(質量比6/4)にて溶解して塗工液を得た。この塗工液を、各実施例および比較例で得られた剥離フィルムの外表面(剥離剤層の外表面)上に、ポリビニルブチラール樹脂層の厚さが3μmとなるように塗布して、ポリビニルブチラール樹脂層前駆体を形成した。その後、ポリビニルブチラール樹脂層前駆体を80℃で1分間乾燥させて、剥離フィルム上にポリビニルブチラール樹脂層を形成した。
[2.3] Evaluation of defects in release agent layer (Evaluation of number of recesses in release agent layer)
A polyvinyl butyral resin was dissolved in a toluene / ethanol mixed solvent (mass ratio 6/4) to obtain a coating solution. This coating solution was applied on the outer surface of the release film (outer surface of the release agent layer) obtained in each Example and Comparative Example so that the polyvinyl butyral resin layer had a thickness of 3 μm. A butyral resin layer precursor was formed. Thereafter, the polyvinyl butyral resin layer precursor was dried at 80 ° C. for 1 minute to form a polyvinyl butyral resin layer on the release film.
 次いで、ポリビニルブチラール樹脂層の表面にポリエステル粘着テープ[日東電工(株)製、商品名:No.31B]を貼付した。 Next, a polyester adhesive tape [manufactured by Nitto Denko Corporation, product name: No. 31B] was pasted.
 次いで、剥離フィルムをポリビニルブチラール樹脂層から剥離することにより、ポリビニルブチラール樹脂層をポリエステルテープに転写させた。 Next, the polyvinyl butyral resin layer was transferred to a polyester tape by peeling the release film from the polyvinyl butyral resin layer.
 次いで、剥離フィルムの剥離剤層に接触していた側のポリビニルブチラール樹脂層の面(観察面)を、光干渉式表面形状観察装置「WYKO-1100」[株式会社Veeco社製]を用いて観察した。具体的には、PSIモード、50倍率にて、観察面の91.2×119.8μmの範囲内において、剥離剤層の形状が転写された深さ150nm以上の凹部を数えることにより、以下の判断基準で剥離剤層の凹部数を評価した。 Next, the surface (observation surface) of the polyvinyl butyral resin layer on the side of the release film that was in contact with the release agent layer was observed using a light interference type surface shape observation apparatus “WYKO-1100” [manufactured by Veeco Co., Ltd.]. did. Specifically, by counting recesses having a depth of 150 nm or more to which the shape of the release agent layer was transferred within a range of 91.2 × 119.8 μm on the observation surface in PSI mode and 50 magnifications, The number of recesses in the release agent layer was evaluated based on the judgment criteria.
  A:凹部の数が0個である。
  B:凹部の数が1~5個である。
  C:凹部の数が6個以上である。
A: The number of recesses is zero.
B: The number of recesses is 1 to 5.
C: The number of recesses is 6 or more.
 なお、上記基準Cと評価されたグリーンシート製造用剥離フィルムを用いてグリーンシートを作製し、そのグリーンシートを用いてコンデンサを作製した場合、耐電圧低下によるショートが発生し易い傾向があった。
 これらの結果を表2に示す。
In addition, when a green sheet was produced using the release film for producing a green sheet evaluated as the standard C and a capacitor was produced using the green sheet, there was a tendency that a short circuit due to a decrease in withstand voltage was likely to occur.
These results are shown in Table 2.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2から明らかなように、本発明のグリーンシート製造用剥離フィルムは、セラミックスラリーの塗工性や、成膜されたグリーンシートの剥離性に優れていた。また、本発明のグリーンシート製造用剥離フィルムは、剥離剤層の凹部数の評価から、グリーンシートにピンホールや部分的な厚みのばらつきが発生することを抑制させる効果があることが判った。これに対して、比較例では満足な結果が得られなかった。 As is apparent from Table 2, the release film for producing a green sheet of the present invention was excellent in the coating property of the ceramic slurry and the peelability of the formed green sheet. Moreover, from the evaluation of the number of recesses of the release agent layer, it was found that the release film for producing a green sheet of the present invention has an effect of suppressing the occurrence of pinholes and partial thickness variations in the green sheet. On the other hand, satisfactory results were not obtained in the comparative example.
 本発明のグリーンシート製造用剥離フィルムは、第1の面と第2の面とを有する基材と、前記基材の前記第1の面側に設けられた平滑化層と、前記平滑化層の前記基材と反対の面側に設けられた剥離剤層と、を有し、前記平滑化層は、質量平均分子量が950以下のメラミン樹脂を主成分として含む平滑化層形成用組成物を加熱して硬化させることにより形成されており、前記剥離剤層は、メラミン樹脂を主成分として含み、かつ、ポリオルガノシロキサンを含む剥離剤層形成用組成物を加熱して硬化させることにより形成されており、前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とする。これにより、信頼性の高いグリーンシートを製造することが可能なグリーンシート製造用剥離フィルムを提供することができる。したがって、本発明は、産業上の利用可能性を有する。 The release film for producing a green sheet of the present invention includes a base material having a first surface and a second surface, a smoothing layer provided on the first surface side of the base material, and the smoothing layer. A release agent layer provided on the surface opposite to the substrate, and the smoothing layer is a smoothing layer forming composition comprising a melamine resin having a mass average molecular weight of 950 or less as a main component. It is formed by heating and curing, and the release agent layer is formed by heating and curing a release agent layer forming composition containing melamine resin as a main component and containing polyorganosiloxane. The arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. . Thereby, the peeling film for green sheet manufacture which can manufacture a reliable green sheet can be provided. Therefore, the present invention has industrial applicability.
1・・・グリーンシート製造用剥離フィルム(剥離フィルム)
11・・・基材
111・・・第1の面
112・・・第2の面(剥離フィルムの裏面)
12・・・平滑化層
121・・・第3の面(平滑化層の基材と反対の面)
13・・・剥離剤層
131・・・剥離剤層の外表面
1 ... Release film for green sheet production (release film)
11 ... substrate 111 ... first surface 112 ... second surface (back surface of release film)
12 ... Smoothing layer 121 ... 3rd surface (surface opposite to the base material of a smoothing layer)
13 ... Release agent layer 131 ... Outer surface of release agent layer

Claims (9)

  1.  グリーンシートの製造に用いられる剥離フィルムであって、
     第1の面と第2の面とを有する基材と、
     前記基材の前記第1の面側に設けられた平滑化層と、
     前記平滑化層の前記基材と反対の面側に設けられた剥離剤層と、を有し、
     前記平滑化層は、質量平均分子量が950以下のメラミン樹脂を主成分として含む平滑化層形成用組成物を加熱して硬化させることにより形成されており、
     前記剥離剤層は、メラミン樹脂を主成分として含み、かつ、ポリオルガノシロキサンを含む剥離剤層形成用組成物を加熱して硬化させることにより形成されており、
     前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。
    A release film used in the manufacture of green sheets,
    A substrate having a first surface and a second surface;
    A smoothing layer provided on the first surface side of the substrate;
    A release agent layer provided on the surface side of the smoothing layer opposite to the base material,
    The smoothing layer is formed by heating and curing a composition for forming a smoothing layer containing a melamine resin having a mass average molecular weight of 950 or less as a main component,
    The release agent layer is formed by heating and curing a release agent layer forming composition containing a melamine resin as a main component and containing polyorganosiloxane,
    An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
  2.  前記平滑化層形成用組成物は、固形分を含み、前記平滑化層形成用組成物の前記固形分中における前記質量平均分子量が950以下のメラミン樹脂の含有量は、50質量%超である請求項1に記載のグリーンシート製造用剥離フィルム。 The smoothing layer forming composition contains a solid content, and the content of the melamine resin having a mass average molecular weight of 950 or less in the solid content of the smoothing layer forming composition is more than 50% by mass. A release film for producing a green sheet according to claim 1.
  3.  前記剥離剤層形成用組成物は、固形分を含み、前記剥離剤層形成用組成物の前記固形分中における前記メラミン樹脂の含有量は、60質量%以上である請求項1または2に記載のグリーンシート製造用剥離フィルム。 The said release agent layer forming composition contains solid content, and content of the said melamine resin in the said solid content of the said release agent layer forming composition is 60 mass% or more. Release film for manufacturing green sheets.
  4.  前記平滑化層形成用組成物は、さらに、グリコール系化合物を含んでいる請求項1ないし3のいずれか1項に記載のグリーンシート製造用剥離フィルム。 The release film for producing a green sheet according to any one of claims 1 to 3, wherein the composition for forming a smoothing layer further contains a glycol compound.
  5.  前記平滑化層の平均膜厚が、0.3~2μmである請求項1ないし4のいずれか1項に記載のグリーンシート製造用剥離フィルム。 The release film for producing a green sheet according to any one of claims 1 to 4, wherein an average film thickness of the smoothing layer is 0.3 to 2 µm.
  6.  前記剥離剤層の平均膜厚が、0.3~2μmである請求項1ないし5のいずれか1項に記載のグリーンシート製造用剥離フィルム。 6. The release film for producing a green sheet according to claim 1, wherein the release agent layer has an average film thickness of 0.3 to 2 μm.
  7.  請求項1ないし6のいずれか1項に記載のグリーンシート製造用剥離フィルムの製造方法であって、
     第1の面と第2の面とを有する前記基材を準備する基材準備工程と、
     前記基材の前記第1の面側に、前記平滑化層形成用組成物を塗布して第1の塗布層を形成した後、前記第1の塗布層を加熱して硬化させることにより前記平滑化層を形成する平滑化層形成工程と、
     前記平滑化層の前記基材と反対の面側に、前記剥離剤層形成用組成物を塗布して第2の塗布層を形成した後、前記第2の塗布層を加熱して硬化させることにより、前記剥離剤層を形成する剥離剤層形成工程と、を備え、
     前記剥離剤層の外表面の算術平均粗さRaが8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRpが50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
    It is a manufacturing method of the peeling film for green sheet manufacture of any one of Claim 1 thru | or 6, Comprising:
    A base material preparation step of preparing the base material having a first surface and a second surface;
    The smoothing layer forming composition is applied to the first surface side of the base material to form the first coating layer, and then the first coating layer is heated and cured to cure the smoothness. A smoothing layer forming step of forming a condensing layer;
    The second coating layer is formed by applying the release agent layer forming composition on the surface of the smoothing layer opposite to the base material, and then heating and curing the second coating layer. A release agent layer forming step of forming the release agent layer,
    An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Method for producing a release film.
  8.  請求項1ないし6のいずれか1項に記載のグリーンシート製造用剥離フィルム上に、セラミックス粉末と、バインダーを含むビヒクルとを含有するグリーンシート形成用材料を付与し、グリーンシート前駆体を形成するグリーンシート形成用材料付与工程と、
     前記グリーンシート前駆体を固化する固化工程と、を有することを特徴とするグリーンシートの製造方法。
    A green sheet precursor is formed by applying a green sheet forming material containing ceramic powder and a vehicle containing a binder onto the release film for producing a green sheet according to any one of claims 1 to 6. A green sheet forming material application step;
    And a solidifying step for solidifying the green sheet precursor.
  9.  請求項8に記載のグリーンシートの製造方法により製造されたことを特徴とするグリーンシート。 A green sheet produced by the method for producing a green sheet according to claim 8.
PCT/JP2015/055510 2014-02-28 2015-02-26 Release film for green sheet manufacturing, release film manufacturing method for green sheet manufacturing, green sheet manufacturing method, and green sheet WO2015129779A1 (en)

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