WO2015115365A1 - センサおよびその製造方法 - Google Patents
センサおよびその製造方法 Download PDFInfo
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- WO2015115365A1 WO2015115365A1 PCT/JP2015/052022 JP2015052022W WO2015115365A1 WO 2015115365 A1 WO2015115365 A1 WO 2015115365A1 JP 2015052022 W JP2015052022 W JP 2015052022W WO 2015115365 A1 WO2015115365 A1 WO 2015115365A1
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- lid
- detection unit
- weight body
- sensor
- weight
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- 238000004519 manufacturing process Methods 0.000 title description 9
- 230000001133 acceleration Effects 0.000 claims abstract description 59
- 238000005452 bending Methods 0.000 claims abstract description 8
- 238000001514 detection method Methods 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 28
- 238000009826 distribution Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Definitions
- the present invention relates to a sensor capable of detecting at least atmospheric pressure and acceleration and a method for manufacturing the same.
- sensors for detecting a wide variety of physical quantities have been incorporated into various electronic devices. And in order to incorporate a sensor in an electronic device, downsizing of the sensor itself is required, and a small sensor using a semiconductor chip is often used.
- Patent Document 1 Japanese Patent Laid-Open No. 3-2535
- Patent Document 2 Japanese Patent Laid-Open No. 4-81630
- Patent Document 3 Japanese Patent Application Laid-Open No. 11-142270
- the sensors using the techniques described in Patent Documents 1 to 3 each sense one physical quantity, and when it is necessary to sense a large number of physical quantities, a plurality of sensors are incorporated in an electronic device. There was a need. That is, in the case of sensing two types of physical quantities, a mounting area that is twice the size of each sensor is required, and it has not been possible to sufficiently meet the demand for downsizing electronic devices.
- acceleration and pressure are both basic physical quantities, and there are many electronic devices that function by detecting both.
- the present invention has been conceived under the above circumstances, and an object thereof is to provide a sensor capable of detecting acceleration and atmospheric pressure by a single structure and a method for manufacturing the same.
- a sensor includes a weight body, a frame body positioned so as to surround the weight body when viewed from above, and a flexible body that connects the upper surface side of the weight body and the frame body.
- a connected body having pressure characteristics, a pressure detector, and an acceleration detector.
- the weight body is connected to the main portion having a through hole penetrating from the upper surface to the lower surface, an attachment portion connected to surround the outer periphery of the through hole on the upper surface of the main portion, and the attachment portion so as to block the through hole.
- a first lid portion having flexibility, and a second lid portion disposed so as to close the through hole in the lower surface of the main portion, and having a small deformation amount with respect to an external force compared to the first lid portion, Is included.
- the pressure detection unit is disposed in the first lid part, and the first lid part is generated by a pressure difference between the sealed space formed by the main part, the first lid part, the second lid part, and the attachment part and the outside world. Deflection is detected as an electrical signal.
- the acceleration detection unit is arranged on the connection body and detects the bending of the connection body caused by the acceleration applied to the weight body as an electric signal.
- a sensor manufacturing method includes: a detection unit forming step of forming a pressure detection unit and an acceleration detection unit each formed of a piezoresistor on an upper surface of a substrate; A weight body, a frame surrounding the weight body in plan view, and an acceleration detection unit, and a processing step of forming a connection body having one end connected to the frame body and the other end connected to the weight body. is doing.
- the step of forming the weight body includes forming a concave portion on the surface of the substrate opposite to the side on which the pressure detection portion is formed, and forming a bottom surface of the concave portion overlapping the region on which the pressure detection portion is formed.
- a small sensor capable of detecting at least acceleration and atmospheric pressure can be obtained with a single structure.
- FIG. 4 is a cross-sectional view showing a step following FIG. 3.
- FIG. 1 is a plan view of a sensor 100 according to an embodiment of the present invention
- FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
- the sensor 100 includes a frame body 10, a weight body 20 located inside the frame body 10, a connection body 30 that connects the frame body 10 and the weight body 20, a pressure detection unit Rp that detects pressure, And an acceleration detection unit Ra for detecting acceleration.
- a frame body 10 a weight body 20 located inside the frame body 10
- connection body 30 that connects the frame body 10 and the weight body 20
- a pressure detection unit Rp that detects pressure
- an acceleration detection unit Ra for detecting acceleration.
- the weight body 20 includes a first lid portion 21, a main portion 22, a second lid portion 23, and an attachment portion 24 that attaches the first lid portion 21 and the main portion, thereby forming a sealed space 25 therein. Yes.
- the acceleration can be detected by detecting an electrical signal corresponding to the amount of deflection of the connection body 30 by the acceleration detection unit Ra, and taking out and calculating the electrical signal by an electrical wiring (not shown).
- the first lid portion 21 bends according to a pressure difference between the atmosphere in the sealed space 25 inside the weight body 20 and the external atmosphere.
- an atmospheric pressure can be detected by detecting the electric signal according to the bending amount of the 1st cover part 21 by the pressure detection part Rp, taking out the electric signal with an electrical wiring not shown, and calculating.
- the weight body 20 has a substantially square planar shape for both the first lid portion 21 and the main portion 22 and is disposed so that the centers thereof overlap each other.
- the planar shape of the main part 22 located below is shown with the broken line.
- the size of the first lid 21 is set such that the length of one side of the substantially square is 0.25 mm to 0.5 mm, for example.
- the thickness of the first lid 21 is set to 5 ⁇ m to 20 ⁇ m, for example. By setting it as such a shape, the 1st cover part 21 has flexibility.
- the size of the main portion 22 is set such that the length of one side of a substantially square is 0.4 mm to 0.65 mm, for example.
- the thickness of the main portion 22 is set to 0.2 mm to 0.625 mm, for example.
- Such first lid portion 21 and main portion 22 are connected via attachment portion 24.
- the attachment portion 24 is provided with a gap between the first lid portion 21 and the main portion 22 so that the first lid portion 21 can be deformed and the main portion 22 can be displaced.
- the attachment portion 24 has a shape that forms a closed space surrounding the outer edge portion on the lower surface side of the first lid portion 21. In this example, a substantially square ring shape is formed in accordance with the shape of the first lid portion 21.
- the thickness is set to 1 ⁇ m, for example.
- the first lid portion 21, the main portion 22, and the attachment portion 24 are integrally formed by processing, for example, an SOI (Silicon-on-Insulator) substrate.
- SOI Silicon-on-Insulator
- the planar shape of the first lid portion 21 and the main portion 22 is not limited to a square, and can be any shape such as a circle, a rectangle, or a polygon.
- the main portion 22 is formed with a through hole 22c that penetrates the upper surface 22a and the lower surface 22b.
- the through hole 22c is formed so as to be located inside the attachment portion 24 in plan view.
- the planar shape of the through hole 22 c is substantially square according to the shape of the mounting portion 24.
- the planar shape of the through hole 22c is not limited to a square, and may be any shape such as a circle, a rectangle, or a polygon.
- the shape of the through hole 22c on the upper surface 22a side and the shape on the lower surface 22b side are substantially the same, and the shape is such that the upper surface 22a and the lower surface 22b are connected in a straight line.
- the through hole 22c is not limited to this shape, and may have a tapered shape or a reverse tapered shape.
- the second lid portion 23 is disposed so as to close the through hole 22c on the lower surface 22b side.
- the planar shape of the second lid portion 23 is not particularly limited as long as it can close the through hole 22c.
- it may be substantially the same shape as the first lid portion 1.
- the thickness of the second lid portion 23 is appropriately set in relation to the material to be configured so that the second lid portion 23 is less deformed when a force is applied than the first lid portion 21. , Or about 0.1 mm.
- the material which comprises the 2nd cover part 23 is the material which can ensure the airtightness so that the through-hole 22c can be sealed with the 1st cover part 21, the main part 22, and the attachment part 24, and the sealed space 25 can be formed. It is preferable to use it.
- the second lid portion 23 may be joined to the lower surface 22b of the main portion 22 via an adhesive member such as brazing material, solder, or organic resin.
- the atmosphere of the sealed space 25 can be appropriately set to vacuum, air, inert gas, or the like. Then, the atmosphere of the sealed space 25 is set to a reduced pressure environment lower than the atmospheric pressure. In this case, when the sensor 100 is located under atmospheric pressure, the first lid portion 21 is deformed so as to be recessed toward the sealed space 25 side. And the electric signal according to the bending is detected from the pressure detection part Rp formed in the upper surface of the 1st cover part 21.
- the pressure of the atmosphere in the sealed space 25 may be higher than the atmospheric pressure, but it is preferably lowered to reduce the influence of temperature change, and more preferably a vacuum.
- the second lid portion 23 since the deformation amount when the force is applied to the second lid portion 23 is smaller than that of the first lid portion 21, the second lid portion 23 is most deformed due to the pressure difference among the inner walls forming the sealed space 25.
- the part to be performed is the first lid 21.
- the stress detection part Rp is disposed on the first lid part 21, the pressure difference can be detected with high sensitivity.
- the sensitivity as the pressure sensor can be further increased by making the deformation amount when the force of the second lid portion 23 is applied extremely small so as to be the same as the deformation amount of the main portion 22.
- the pressure detection unit Rp includes a resistance element such as a piezoresistor.
- the pressure detection unit Rp includes Rp1 and Rp2 formed near the center of the first lid 21 and Rp3 and Rp4 formed on the outer periphery of the displaceable region of the first lid 21.
- the outer peripheral portion of the displaceable region in the first lid portion 21 refers to a region continuous from the inside of the attachment portion 24 in plan view.
- a frame-like frame body 10 is provided so as to surround such a weight body 20.
- the frame 10 has a substantially square planar shape, and has a substantially square opening that is slightly larger than the weight body 20 at the center.
- the length of one side of the frame body 10 is set to 1.4 mm to 3.0 mm, for example, and the width of the arm constituting the frame body 10 (width in the direction orthogonal to the longitudinal direction of the arm) is, for example, 0.3 mm to It is set to 1.8 mm.
- the thickness of the frame 10 is set to 0.2 mm to 0.625 mm, for example.
- connection body 30 is provided between the frame body 10 and the weight body 20.
- the connecting body 30 has one end connected to the central portion of the upper surface portion of each inner peripheral surface of the frame body 10 and the other end connected to the upper surface portion of each outer peripheral surface of the first lid portion 21 of the weight body 20. It is connected to the central part.
- four connection bodies 30 are provided, and two of the four connection bodies 30 extend in the X-axis direction and have the same straight line with the weight body 20 interposed therebetween. The other two are arranged in the same straight line extending in the Y-axis direction and sandwiching the weight body 20 therebetween.
- the planar view shape of the connection body 30 is not limited to a linear shape as illustrated in FIG. 1, and may be a bent shape or a curved shape.
- connection body 30 has flexibility, and when the acceleration is applied to the sensor 100, the weight body 20 moves, and the connection body 30 bends as the weight body 20 moves.
- the length of the connecting body 30 is set to 0.3 mm to 0.8 mm
- the width (the length in the direction perpendicular to the longitudinal direction) is set to 0.04 mm to 0.2 mm
- the thickness is 5 ⁇ m. It is set to ⁇ 20 ⁇ m.
- flexibility is expressed by forming the connection body 30 to be elongated and thin.
- acceleration detecting portions Rax1 to Rax4, Ray1 to Ray4 and Raz1 to Raz4 which are resistance elements are formed on the upper surface of the connection body 30 (hereinafter, these resistance elements are referred to as appropriate). , Represented by the symbol Ra).
- the acceleration detectors Rax1 to Rax4, Ray1 to Ray4, and Raz1 to Raz4 can detect accelerations in the three-axis directions (X-axis direction, Y-axis direction, and Z-axis direction in the three-dimensional orthogonal coordinate system shown in FIG. 1). After being formed at a predetermined position of the connection body 30, it is connected so as to constitute a bridge circuit.
- the resistance value changes in accordance with the deformation caused by the bending of the first lid 21 and the connection body 30, and the change in the resistance value
- wirings electrically connected from the acceleration detection unit Ra and the pressure detection unit Rp, pad electrodes for taking out to an external IC, and the like are provided on the upper surface of the frame body 10, the first lid portion 21, and the connection body 30. The electrical signal is taken out via these.
- These wirings are made of, for example, aluminum, an aluminum alloy, and the like. After these materials are formed by sputtering or the like, the upper surfaces of the frame body 10, the first lid portion 21, and the connection body 30 are patterned by a predetermined shape. Formed.
- the sensor 100 since the sealed space 25 can be formed inside the weight body 20 that functions as an acceleration sensor, the sensor 100 can be used as an atmospheric pressure sensor without increasing the size of the sensor 100. Can have a function.
- the sealed space 25 is provided so as to extend over almost the entire thickness of the weight body 20, the sealed space 25 can be made larger. As a result, the sensitivity to changes in atmospheric pressure is increased, and the device functions as a highly accurate atmospheric pressure sensor.
- the center of gravity of the weight body 20 overlaps the through hole 22c, and the weight distribution of the weight body 20 is larger than that of the inside of the attachment portion 24.
- the speed of the weight body 20 does not include many downward (Z-axis direction) components like a pendulum, but the outer circumferential direction (XY (Direction) component is included a lot, so that the sensitivity as an acceleration sensor can be increased.
- the weight component of the weight body 20 is present outside the region of the first lid portion 21 that functions as a pressure-sensitive film that can be bent. Thereby, the weight distribution of the weight body 20 can be more biased toward the outer circumferential direction. Further, such a weight distribution is established in almost the entire region (90% or more region) in the thickness direction of the weight body 20. For this reason, it functions as the sensor 100 with high detection sensitivity of acceleration.
- the senor 100 may be configured such that the frame body 10, the first lid portion 21, and the connection body 30 are integrally formed as in the present embodiment. In this case, a sensor having high strength and high reliability can be obtained. Furthermore, as shown in this example, all the components other than the second lid portion 23 may be integrally formed. In that case, the sensor 100 can be made more reliable.
- the acceleration detection unit Ra and the pressure detection unit Rp may be formed of piezoresistors.
- the acceleration detection unit Ra and the pressure detection unit Rp may be formed of piezoresistors.
- a sensor capable of detecting at least atmospheric pressure and acceleration can be realized with one component without increasing the size, and a highly sensitive sensor can be obtained. Can do. It is also possible to detect the angular velocity by rotating the weight body 20 in the XY plane.
- electrodes may be provided on the outer peripheral surface of the main portion 22 and the inner peripheral surface of the frame body 10 facing each other, and may be realized by electrostatic attraction. It may be realized by generating a magnetic force on the outside.
- the main portion 22 is formed by processing an SOI substrate, but may be formed by connecting separate bodies. In that case, by using a material having a higher density, it is possible to increase the force generated even at the same acceleration, and to increase the deflection amount of the connection body 30 accordingly. Thereby, a sensor with higher sensitivity can be provided.
- the member having the recess may be configured such that the opening side of the recess is connected to the first lid portion 21 via the attachment portion 24.
- the bottom surface of the recess functions as the second lid portion 23.
- the depth of the concave portion is 50% or more, more preferably 90% or more with respect to the thickness of the entire member. It is preferable that By adopting such a configuration for the shape of the recess, the weight distribution of the weight body 20 when the weight body 20 is viewed in plan can be shifted to the outside of the inside of the mounting portion 24, and a highly sensitive sensor. It can be.
- the atmospheric pressure detection unit Rp and the acceleration detection unit Ra are described using an example formed by piezoresistors.
- the present invention is not limited to this as long as the bending of the first lid 21 and the connection body 30 can be detected.
- the barometric pressure detection unit Rp and the acceleration detection unit Ra may be used as electrodes, and the magnitude of the deflection of the first lid 21 and the connection body 30 and the direction of the flexure may be detected as electrical signals based on changes in capacitance.
- a new fixing portion is provided that is spaced from the first lid portion 21 and the connecting body 30, and electrodes that are opposed to the atmospheric pressure detection portion Rp and the acceleration detection portion Ra are provided in the fixing portion.
- the capacitance on the fixed part side, the atmospheric pressure detection part Rp, and the acceleration detection part Ra may function as a pair of electrodes. In this case, it is necessary to provide a fixing portion so that the sensor is not shielded from the external atmosphere by the fixing portion.
- a plurality of through holes 22c may be provided.
- FIGS. 3 (a) and (b) are sectional views corresponding to the section taken along the line II-II in FIG. 1, and (c) is a top view. 4 is a cross-sectional view corresponding to a cross section taken along line II-II in FIG.
- the resistor film 51 is formed on the upper surface of the substrate 50.
- Substrate 50 is, for example, a SOI substrate having a first layer 50a made of Si, and the second layer 50b made of SiO 2, a layered structure in which a third layer 50c formed of Si are laminated in this order.
- the thickness of each layer is about 10 ⁇ m for the first layer 50a, about 1 ⁇ m for the second layer 50b, and about 500 ⁇ m for the third layer 50c.
- the resistor film 51 is formed by implanting boron, arsenic (As), or the like into the main surface of the first layer 50a of the substrate 50 made of such an SOI substrate by ion implantation.
- the resistor film 51 has an impurity concentration of 1 ⁇ 10 18 atoms / cm 3 on the surface of the first layer 50a and a depth of about 0.5 ⁇ m.
- a resist film matching the shape of the atmospheric pressure detection unit Rp and the acceleration detection unit Ra is formed on the resistor film 51, and then the resistor film 51 exposed from the resist film is removed by etching such as RIE etching. To do. Thereafter, the atmospheric pressure detector Rp and the acceleration detector Ra can be formed on the upper surface by removing the resist film.
- wiring (not shown) and element side electrode pads connected to the atmospheric pressure detection unit Rp and the acceleration detection unit Ra are formed.
- the wiring and the element-side electrode pad can be formed, for example, by depositing a metal material such as aluminum by sputtering and then patterning it into a predetermined shape by dry etching or the like.
- the first layer 50a is patterned into a desired shape from the first layer 50a side of the substrate 50 (first patterning step). That is, the frame-shaped first region A1, the second region A2 located inside the first region A1, the first region A1 and the second region A2 are connected to determine the beam-shaped third region A3. Regions excluding the first to third regions A1, A2, and A3 are removed from the first layer 50a.
- the pressure detection unit Rp is arranged in the second region
- the acceleration detection unit Ra is arranged in the third region.
- an annular groove 58 that forms a closed space in a plan view is formed inside the first region A ⁇ b> 1 from the third layer 30 c side of the substrate 50.
- the groove 58 is provided between the first region A1 and the second region A2, and is formed so as to expose the lower surface of the first layer 50a by removing the third layer 50c and the second layer 50b at the corresponding part. .
- the frame body 10 is formed which is formed of a stacked body of the first layer 50a, the second layer 50b, and the third layer 50c that exists continuously from the outer peripheral portion of the substrate 50. In other words, the frame 10 is separated from the other parts by the grooves 58.
- the second layer 50b is removed in a region reaching the second region A2 from the inside of the first region A1 in plan view from the third layer 50c side of the substrate 50, and the first layer 50a and the third layer 50c are removed.
- a gap 59 is formed between the two.
- the first layer 50a in the third region A3 is separated from other parts in the thickness direction, and the beam-like connection body 30 is obtained.
- One end of the connection body 30 is formed integrally with the first layer 50a of the first region A1 (frame body 10), so that a continuous integrated structure without a joint portion is obtained, and durability is improved.
- the other end of the connection body 30 is formed integrally with the first layer 50a of the second region A2 (the weight body 20), so that a continuous integrated structure without a joint portion is obtained, and durability is improved.
- the concave portion 60 is formed in the inner region excluding the outer peripheral portion of the second region A2 in plan view, and the substrate 50 is thinned.
- the bottom surface of the recess 60 can be made flexible by making it thinner.
- the recess 60 is formed by removing the third layer 50c and the second layer 50b to expose the first layer 50a.
- the region corresponding to the second region A2 in the first layer 50a thus formed becomes the first lid portion 21.
- a portion of the first lid 21 that does not have a layer that directly contacts the lower surface functions as a flexible pressure-sensitive film, and the pressure detection unit Rp is formed in the pressure-sensitive film.
- the attachment portion 24 has a shape that surrounds the outer periphery of the recess 60 in plan view.
- the attachment portion 24 is formed by removing the second layer 50b from two directions of the frame body 10 side and the pressure detection portion Rp side and processing it in an annular shape. Specifically, it is formed in two stages. The first stage is performed by removing the second layer 50b in a region reaching the second region A2 from the frame body 10 side (from the inside of the first region A1) when the connection body 30 is formed. The second stage is performed by removing the second layer 50b while leaving a part of the outer peripheral portion of the second region A2 when the recess 60 is formed. The attachment portion 24 is formed through these two steps.
- the third layer 50 c connected to the attachment portion 24, separated from the third layer 50 c of the frame body 10, and existing inside the frame body 10 serves as the main portion 22.
- a part of the third layer 50 c in the thickness direction may be removed so that the lower surface of the main portion 22 is positioned above the lower surface of the frame body 10.
- the opening portion of the main portion 22 opened by the recess 60 is closed by the second lid portion 23 (see FIG. 2).
- the second lid portion 23 is selected from a material and shape that is difficult to deform when force is applied. In this example, a metal cap is employed.
- the internal space formed by the recess 60 is sealed by the first lid portion 21, the main portion 22, the second lid portion 23, and the attachment portion 24, and the sealed space 25 is formed.
- the step of attaching the second lid 23 is performed in a vacuum atmosphere. That is, the sealed space 25 is in a state where the pressure is reduced compared to the atmospheric pressure.
- the sensor 100 having the weight body 20 can be provided through such a process.
- the processing of the substrate 50 can be realized by a conventionally well-known semiconductor microfabrication technique, for example, a photolithography method or deep dry etching.
- the weight body 20 is obtained by forming a shape excluding the second lid portion 23 by processing one substrate 50.
- the connection strength between the frame body 10 and the weight body 20 and the connection body 30 and the connection strength between the first lid portion 21 and the attachment portion 24 and the main portion 22 can be ensured, so that the reliability is improved.
- the first lid portion 21, the attachment portion 24, and the main portion 22 are securely connected without a gap, the airtightness of the sealed space 25 can be increased, and the reliability as the atmospheric pressure sensor can be increased. .
- the shape of the weight body 20 excluding the second lid portion 23 is formed by processing one substrate 50.
- the mass of the second lid portion 23 is very small compared to the mass of the main portion 22.
- the part which occupies most of the mass of the weight body 20 can be formed by patterning.
- the center of gravity position and weight distribution of the weight body 20 can be realized as a desired position and distribution with high accuracy, so that the sensor 100 with stable accuracy can be provided with high productivity. .
- the concave portion 60 is formed after the connection body 30 is formed, so that the concave portion 60 can correct the processing width such as the beam width of the connection body 30, the processing thickness, and the pattern deviation. it can.
- the sealed space 25 is formed by the second lid 23. Therefore, it is possible to provide the sensor 100 with less variation in sensing accuracy by adjusting the degree of vacuum (atmospheric pressure) of the atmosphere sealed in the sealed space 25 according to variations in processing accuracy or characteristics in the previous process. Can do.
- the resistor film 51 is formed and then processed using the example in which the resistor film 51 is processed to have the desired shape of the atmospheric pressure detection unit Rp and the acceleration detection unit Ra.
- the atmospheric pressure is detected by forming a resist film on the upper surface of 50a, removing the resist film in the region where the atmospheric pressure detection unit Rp and the acceleration detection unit Ra are formed, and diffusing impurities only at a desired position (resist film opening).
- the part Rp and the acceleration detection part Ra may be formed. In this case, since the atmospheric pressure detection unit Rp and the acceleration detection unit Ra are flush with the upper surface of the substrate 50 and there is no step, electrical connection of wirings connected to the atmospheric pressure detection unit Rp and the acceleration detection unit Ra is facilitated. .
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Abstract
Description
上述の例では主部22をSOI基板を加工して形成したが、別体を接続して形成してもよい。その場合には、より密度の高い材料を用いることにより、同じ加速度でも生じる力を大きくし、それに伴い接続体30の撓み量を大きくすることができる。これにより、さらに感度の高いセンサを提供することができる。
次に、上述のセンサ100の製造方法について、図3~図4を用いて説明する。
なお、図3において、(a)および(b)は図1のII-II線における断面に相当する断面図であり、(c)は上面図である。図4は、図1のII-II線における断面に相当する断面図である。
まず、図3(a)に示すように、基板50の上面に抵抗体膜51を形成する。
次に、気圧検出部Rp,加速度検出部Raが形成された基板50を加工することにより、圧力検出部Rpを有する重錘体20と、重錘体20を囲むような枠体10と、加速度検出部Raを有し、一方端が枠体10に他方端が重錘体20に連結される接続体30とを形成する。
上述の例では、抵抗体膜51を形成した後に、抵抗体膜51を所望の形状の気圧検出部Rpおよび加速度検出部Raとなるように加工した例を用いて説明したが、予め第1層50aの上面にレジスト膜を形成し、気圧検出部Rpおよび加速度検出部Raを形成する領域のレジスト膜を除去し、所望の位置(レジスト膜開口部)のみに不純物を拡散させることにより、気圧検出部Rpおよび加速度検出部Raを形成してもよい。この場合には、気圧検出部Rpおよび加速度検出部Raが基板50の上面と同一面となり、段差がなくなるので、気圧検出部Rpおよび加速度検出部Raに接続する配線の電気的接続が容易となる。
20 重錘体
21 第1蓋部
22 主部
22a 上面
22b 下面
22c 貫通孔
23 第2蓋部
24 取付部
25 密閉空間
30 接続体
50 基板
50a 第1層
50b 第2層
50c 第3層
100 センサ
Claims (5)
- 重錘体と、上面視して前記重錘体を囲むように位置する枠体と、前記重錘体と前記枠体との上面側をそれぞれ接続する可撓性を有する接続体と、圧力検出部と、加速度検出部とを有するセンサであって、
前記重錘体は、
上面から下面まで貫通する貫通孔を有する主部と、
前記主部の上面に前記貫通孔の外周を囲むように接続された取付部と、
前記取付部に前記貫通孔を塞ぐように接続された可撓性を有する第1蓋部と、
前記主部の下面に前記貫通孔を塞ぐように配置された、前記第1蓋部に比べて外部からの力に対して変形量が小さい第2蓋部とを含み、
前記圧力検出部は、前記第1蓋部に配置されて、前記主部、前記第1蓋部、前記第2蓋部および前記取付部で形成された密閉空間と外界との気圧差によって生じる前記第1蓋部の撓みを電気信号として検出し、
前記加速度検出部は、前記接続体に配置されて、前記重錘体に加えられた加速度によって生じる前記接続体の撓みを電気信号として検出する、センサ。 - 前記重錘体は、平面視で、その重心が前記貫通孔と重なり、前記取付部の内側に比べて前記取付部の外側が重くなるように偏った重量分布を有する、請求項1記載のセンサ。
- 前記第1蓋部は、前記接続体と一体的に形成されている、請求項1または2に記載のセンサ。
- 前記第2蓋部は、前記主部と一体的に形成されている、請求項1乃至3のいずれかに記載のセンサ。
- 基板の上面にそれぞれピエゾ抵抗からなる圧力検出部および加速度検出部を形成する検出部形成工程と、
前記基板を加工することにより、前記圧力検出部を有する重錘体、平面視で前記重錘体を囲む枠体、および前記加速度検出部を有し、一方端が前記枠体に他方端が前記重錘体に連結される接続体を形成する加工工程とを有し、
前記加工工程において、前記重錘体を形成する工程が、
前記基板の前記圧力検出部が形成された側と反対側の面に凹部を形成し、前記圧力検出部が形成された領域と重なる前記凹部の底面が可撓性を有するように前記基板の一部を薄層化して第1蓋部とする工程と、
前記第1蓋部から続く、前記凹部の側壁の一部を取付部とする工程と、
内部に密閉空間が形成されるように前記凹部を塞ぐ第2蓋部を配置する工程とを含む、センサの製造方法。
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EP3368922A1 (en) | 2015-10-30 | 2018-09-05 | ION Geophysical Corporation | Ocean bottom seismic systems |
US11262256B2 (en) * | 2017-06-22 | 2022-03-01 | Ezmems Ltd. | Sensor elements on thin foil/films |
US10725202B2 (en) * | 2017-07-21 | 2020-07-28 | Baker Hughes, A Ge Company, Llc | Downhole electronics package having integrated components formed by layer deposition |
WO2020056216A1 (en) * | 2018-09-13 | 2020-03-19 | Ion Geophysical Corporation | Multi-axis, single mass accelerometer |
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JP2004245760A (ja) * | 2003-02-17 | 2004-09-02 | Wacoh Corp | 圧力と加速度との双方を検出するセンサおよびその製造方法 |
US20120060605A1 (en) * | 2010-09-09 | 2012-03-15 | Ming-Ching Wu | Mems sensor capable of sensing acceleration and pressure |
JP2013195097A (ja) * | 2012-03-16 | 2013-09-30 | Lapis Semiconductor Co Ltd | 半導体圧力センサ及びその製造方法、並びに圧力検出装置 |
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KR20190064516A (ko) * | 2017-11-30 | 2019-06-10 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 센서 디바이스 및 그 제조 방법 |
KR102161035B1 (ko) | 2017-11-30 | 2020-10-05 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 센서 디바이스 및 그 제조 방법 |
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