WO2015083528A1 - Dispositif de source lumineuse - Google Patents

Dispositif de source lumineuse Download PDF

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Publication number
WO2015083528A1
WO2015083528A1 PCT/JP2014/080345 JP2014080345W WO2015083528A1 WO 2015083528 A1 WO2015083528 A1 WO 2015083528A1 JP 2014080345 W JP2014080345 W JP 2014080345W WO 2015083528 A1 WO2015083528 A1 WO 2015083528A1
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WO
WIPO (PCT)
Prior art keywords
light
laser
light source
source device
turned
Prior art date
Application number
PCT/JP2014/080345
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English (en)
Japanese (ja)
Inventor
昭典 浅井
福満　憲志
Original Assignee
浜松ホトニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013253264A external-priority patent/JP6209071B2/ja
Priority claimed from JP2014081350A external-priority patent/JP5947329B2/ja
Application filed by 浜松ホトニクス株式会社 filed Critical 浜松ホトニクス株式会社
Priority to US15/022,222 priority Critical patent/US9646816B2/en
Priority to DE112014005518.2T priority patent/DE112014005518T5/de
Publication of WO2015083528A1 publication Critical patent/WO2015083528A1/fr
Priority to IL244786A priority patent/IL244786A0/en
Priority to US15/478,306 priority patent/US9824879B2/en
Priority to US15/712,284 priority patent/US10032622B2/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

Definitions

  • the present invention relates to a light source device.
  • a light source device that uses a generated plasma by irradiating a laser beam in a housing of a light emitting envelope in which a light emitting gas is sealed (see, for example, Patent Documents 1 and 2).
  • plasma is generated by discharge between electrodes by supplying power between opposing electrodes arranged in a glass casing, and laser light is continuously irradiated to the plasma.
  • Laser support light which is plasma emission, is lit and maintained.
  • pulsed plasma emission is turned on by irradiating an electron-emitting metal disposed in a xenon lamp with pulsed laser light.
  • the plasma is continuously generated between the counter electrodes, the counter electrode is sputtered, and the life of the light emitting envelope may be shortened due to consumption of the counter electrode.
  • the sputtered material adheres to the inner wall of the housing, the incidence of laser light and the removal of the laser support light are hindered, so that the emission intensity of the laser support light gradually decreases, and as a light emitting envelope There was a risk of shortening the lifespan.
  • the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a light source device that suppresses sputtering in the housing and can achieve a sufficiently long life.
  • a light source device includes a laser unit that emits laser light, a light emitting envelope in which a luminescent gas is sealed in an internal space, and a light source having a lighting start area in the internal space, An optical system that guides laser light to the internal space and a control unit that controls the energy density of the laser light in the lighting start area, and the light source is turned on by irradiation of the laser light from the laser part in the internal space.
  • the laser support light which is plasma emission of the emission gas, is maintained by irradiating the laser light from the laser unit, and the control unit determines the energy density of the laser light in the lighting start area when the laser support light is maintained. Is set lower than the energy density of the laser beam in the lighting start region.
  • the control unit lowers the energy density of the laser light in the lighting start area when the laser supporting light is maintained relative to the energy density of the laser light in the lighting start area when the laser supporting light is turned on. Therefore, when maintaining the laser support light, the lighting start region is irradiated with the laser light at an energy density that does not cause sputtering. Therefore, in this light source device, since sputtering in the light emitting envelope can be suppressed, a sufficiently long life can be achieved.
  • the light source may further include an electron-emitting structure that includes an easy-electron emitting material that is disposed in the internal space and emits electrons when irradiated with laser light. In this case, sputtering of the electron emission structure can be suppressed.
  • the light source may further include counter electrodes facing each other so as to sandwich the lighting start area. In this case, generation of plasma between the counter electrodes can be suppressed to such an extent that sputtering does not occur.
  • the control unit includes a condensing position moving unit that moves the condensing position of the laser light when maintaining the laser supporting light in a direction away from the lighting start region with respect to the condensing position of the laser light when the laser supporting light is turned on. It is preferable. In this case, when the laser supporting light is maintained, the laser light condensing position is separated from the lighting start region, so that sputtering in the light emitting envelope can be reliably suppressed.
  • the condensing position moving unit moves the condensing position of the laser light in the optical axis direction of the laser light. In this case, when the laser support light is maintained, the condensing position of the laser light can be easily separated from the lighting start region.
  • the condensing position moving unit has an optical path length adjusting unit that adjusts an optical path length in the internal space of the laser light.
  • the optical path length adjustment unit can easily separate the laser beam condensing position from the lighting start area while maintaining the laser support light while maintaining the laser light condensing position at an appropriate position when the laser support light is turned on. it can.
  • the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. In this case, by moving the optical system, the condensing position of the laser light can be easily separated from the lighting start region.
  • the condensing position moving unit has a light emitting envelope moving unit that moves the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. In this case, by moving the light emitting envelope, the condensing position of the laser light can be easily separated from the lighting start region.
  • the optical system collects the laser beam at a position separated from the lighting start region, both when the laser supporting light is turned on and when it is maintained. In this case, since the condensing position of the laser beam having the highest energy density is always at a position other than the lighting start region, sputtering in the light emitting envelope can be suppressed. Therefore, the life of the light source device can be sufficiently extended.
  • control unit lowers the emission energy of the laser beam from the laser unit when maintaining the laser support light with respect to the emission energy of the laser beam from the laser unit when the laser support light is turned on. In this case, since it is not necessary to mechanically move the condensing position of the laser light, the condensing position of the laser light can be maintained at an appropriate position.
  • the control unit separates the laser beam condensing position when the laser supporting light is maintained from the electron emitting structure with respect to the laser light condensing position when the laser supporting light is turned on. It is preferable to have a condensing position moving part that moves in the direction. In this case, when the laser supporting light is maintained, since the condensing position of the laser light is separated from the electron emission structure, it is possible to reliably suppress the electron emission structure from being sputtered.
  • the focusing position moving unit moves the position of the electron emission structure when the laser support light is maintained with respect to the position of the electron emission structure when the laser support light is turned on. It is preferable to have a structure moving part. In this case, the focusing position of the laser light can be easily separated from the electron emission structure by moving the electron emission structure.
  • the converging position moving unit determines the optical path length in the internal space of the laser light when the laser support light is maintained to the optical path length in the internal space of the laser light when the laser support light is turned on. It is preferable to have an optical path length adjustment unit that shortens the length. In this case, the optical path length adjustment unit keeps the laser beam condensing position at an appropriate position when the laser support light is lit, and easily separates the laser light condensing position from the electron emission structure when maintaining the laser support light. Can do.
  • the condensing position moving unit moves the condensing position of the laser light in a direction crossing the optical axis direction of the laser light.
  • the laser beam condensing position can be easily separated from the electron emission structure when maintaining the laser support light.
  • the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. It is preferable. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the optical system.
  • the light collecting position moving unit moves the light emitting envelope to move the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. It is preferable to have a part. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the light emitting envelope.
  • the electron emission structure is formed with a surface on which the condensing position of the laser beam is located when the laser support light is turned on, inclined with respect to the optical axis of the laser beam. It is preferable. With this configuration, it is possible to position the condensing position of the laser light on the surface of the electron emission structure without strictly adjusting the optical system.
  • FIG. 1 It is a figure which shows the light source device which concerns on 1st Embodiment of this invention. It is a figure which shows an example of the optical member (optical path length adjustment part) with which the light source device shown in FIG. 1 is provided. It is a figure which shows the state before the laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. It is a figure which shows the state at the time of laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. It is a figure which shows the state after the laser support light lighting (at the time of maintenance) of the optical member (optical path length adjustment part) shown in FIG.
  • FIG. 1 is a schematic view showing a light source device according to the first embodiment of the present invention.
  • the light source device 1 includes a laser unit 2 that emits continuous laser light, an optical system 3 that guides the continuous laser light L from the laser unit 2, and irradiation with the continuous laser light L. It is configured to include a metal structure (electron emission structure) 13 containing a radiating electron-emitting substance and a light emitting envelope 11 (light source 7) containing a luminescent gas G.
  • a metal structure electron emission structure
  • light source 7 containing a luminescent gas G.
  • the metal structure 13 when the metal structure 13 is irradiated with the continuous laser light L, plasma due to the emission gas G is generated in the irradiation region of the continuous laser light L in the vicinity of the metal structure 13.
  • plasma is generated when electrons emitted from the metal structure 13 by irradiation of the continuous laser light L ionize the light emission gas G and the ionized light emission gas G is irradiated with the continuous laser light L. It is guessed. Then, by continuously irradiating the generated plasma with continuous laser light L (continuously supplying laser energy to the plasma), the continuous laser light L is collected in the light emitting envelope 11 as the light source 7. It is possible to turn on and maintain high-luminance laser support light that is plasma light emission having a predetermined light-emitting region (lighting start region RS) including the light position F.
  • the laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
  • the laser unit 2 is, for example, a laser diode.
  • the laser unit 2 emits a continuous laser beam L having a wavelength matching the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm. Note that a pulse laser beam may be emitted from the laser unit 2.
  • the output of the continuous laser beam L is, for example, about 60W.
  • the continuous laser light L emitted from the laser unit 2 is guided to the optical system 3 by the optical fiber 4.
  • the optical system 3 is an optical system that condenses the continuous laser light L from the laser unit 2 toward the light emitting envelope 11.
  • the optical system 3 is composed of, for example, two lenses 5 and 6.
  • the continuous laser light L emitted from the head 4 a of the optical fiber 4 is collimated by the lens 5 and then condensed toward the light emitting envelope 11 by the lens 6 with the optical axis LA.
  • the diameter of the condensed continuous laser beam L is, for example, about 120 ⁇ m in diameter.
  • the light emitting envelope 11 contains a bulb (housing) 12 in which a light emitting gas G is sealed in a high pressure in the internal space S, and an easy-electron emitting material that emits electrons when irradiated with continuous laser light L. And the metal structure 13 to be configured.
  • the bulb 12 is formed hollow, for example, by glass, and includes a spherical portion (main body portion) 12a having a spherical outer diameter and a spherical inner space S and a part of the spherical portion 12a. And a protruding portion (protruding portion) 12b protruding in a columnar shape.
  • xenon gas as a luminescent gas G is sealed at a high pressure.
  • the top portion 12c located on the opposite side of the protruding portion 12b in the spherical portion 12a is an incident portion (laser incident window portion LW) of the continuous laser light L.
  • the laser incident window portion LW only needs to face the incident portion of the continuous laser light L in the metal structure 13 to be described later, and may be located in a portion other than the top portion 12c of the spherical portion 12a.
  • the metal structure 13 is formed of a refractory metal such as tungsten, for example, and includes an electron emission portion 13a containing, for example, barium as an easily radiating substance, and a support portion 13b that supports the electron emission portion 13a.
  • the electron emitting portion 13a irradiated with the continuous laser light L is formed in, for example, a thin cylindrical shape, and the tip 13c serving as the incident portion of the continuous laser light L is the top portion 12c (laser) of the bulb 12. It is disposed inside the spherical portion 12a so as to face the incident window portion LW).
  • the incident part of continuous laser beam L is not restricted to the front-end
  • the support portion 13b has a rod-like member 15 formed in a columnar shape by a high melting point metal such as molybdenum.
  • the electron emission portion 13a (tip 13c) is supported on the distal end side of the support portion 13b so as to be disposed at a desired position in the internal space S in the spherical portion 12a, and the proximal end side of the support portion 13b is It arrange
  • the electron emitting portion 13a and the support portion 13b do not necessarily have to be made of different constituent materials, and the support portion 13b may be formed integrally with the material used for the electron emitting portion 13a.
  • the base may be integrally formed of the same metal, and the electron emissive substance may be contained only in the portion corresponding to the electron emitting portion 13a.
  • the electron emission part 13a and the whole metal structure 13 may be comprised with the easy electron emission substance itself.
  • the electron emission structure is not limited to a metal structure formed of a metal (conductive material) substrate such as tungsten or molybdenum, and may be formed of an insulating substrate such as ceramic.
  • the metal structure 13 containing the easily electron emissive substance is accommodated in the bulb 12 in which the light emitting gas G is enclosed.
  • plasma is generated by irradiating the metal structure 13 with the continuous laser light L, and the plasma is continuously irradiated with the continuous laser light L.
  • Luminance laser support light can be lit and maintained in the lighting start region RS.
  • the light source device 1 includes an optical path length adjusting unit 51 for adjusting the optical path length of the continuous laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 51 adjusts the optical path length LL that is the length of the optical axis LA of the continuous laser light L from the laser incident window LW to the condensing position F in the internal space S of the bulb 12. To do.
  • the optical path length adjustment unit 51 for example, an optical member 8 as shown in FIG. 2 is used.
  • the optical member 8 includes a plate-shaped transparent medium 9 and a rod-shaped rotary actuator 10 that supports the transparent medium 9.
  • the transparent medium 9 can be rotated with respect to the axial direction of the rotary actuator 10 by the rotary actuator 10.
  • the optical member 8 is disposed so that the transparent medium 9 can be interposed between the optical system 3 and the light emitting envelope 11.
  • the transparent medium 9 is formed of a material having a refractive index higher than that of air (laser light irradiation atmosphere outside the light emitting envelope 11) such as synthetic quartz glass. Further, as shown in FIG. 2, the transparent medium 9 has a 3/4 circular planar shape, and the thickness of the continuous laser beam L in the direction of the optical axis LA for each 1/4 circle (the continuous laser beam L is transmitted). Different length). Specifically, the transparent medium 9 is adjacent to the first region R1 having a quarter circular planar shape having a thickness of, for example, about 2 mm and the first region R1, and has a thickness of, for example, about 4 mm.
  • the second region R2 having a quarter circular planar shape and the third region R3 having a quarter circular planar shape adjacent to the second region R2 and having a thickness of, for example, about 2 mm. It is configured.
  • a region where the transparent medium 9 is not sandwiched between the first region R1 and the third region R3 is referred to as a fourth region R4.
  • 3 to 5 are cut end views showing the operation of the optical member 8 (optical path length adjusting unit 51).
  • the first region R ⁇ b> 1 of the transparent medium 9 is interposed between the optical system 3 and the light emitting envelope 11 before the laser supporting light is turned on.
  • the continuous laser light L is refracted by the transparent medium 9, and the condensing position F of the continuous laser light L is located in a spatial region between the electron emitting portion 13a (metal structure 13) and the laser incident window LW side.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, about 260 kW / cm 2 .
  • the transparent medium 9 is rotated between the optical system 3 and the light emitting envelope 11 by rotating the transparent medium 9 from the state of FIG.
  • the second region R2 is interposed.
  • the condensing position F of the continuous laser light L is the condensing position F of the continuous laser light L before the laser support light LS is turned on. On the other hand, it moves to the metal structure 13 side.
  • the continuous laser light L is condensed on the substantially surface of the electron emission portion 13a (metal structure 13), and the surface (lighting) of the electron emission portion 13a (metal structure 13).
  • the energy density of the continuous laser light L in the start region RS) is, for example, about 530 kW / cm 2 .
  • the transparent medium 9 is rotated by the rotary actuator 10 from the state of FIG.
  • a fourth region R4 is interposed between the sealing body 11 and the sealing body 11.
  • the condensing position F of the continuous laser light L is continuous before the laser support light LS is turned on (FIG. 3) and when the laser support light LS is turned on (FIG. 4).
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, 260 kW / cm 2 or less.
  • the optical path length LL of the continuous laser light L in the internal space S is adjusted by adjusting the thickness of the transparent medium 9 interposed between the optical system 3 and the light emitting envelope 11, and the continuous laser light L
  • the condensing position F is moved.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state. More specifically, before the laser supporting light LS is turned on, the electron emitting portion 13a (metal structure 13) is irradiated with the continuous laser light L at an energy density that does not cause sputtering.
  • the metal structure 13) can be heated. Therefore, it is possible to easily emit electrons from the electron emitting portion 13a (metal structure 13) during the subsequent laser support light LS lighting, and it is easy to light the laser support light LS. Further, when the laser support light LS is turned on, the continuous laser light L can be applied to an appropriate position of the electron emitting portion 13a (metal structure 13) with an energy density sufficient for turning on the laser support light LS. The LS can be reliably turned on in the lighting start area RS. Then, after the laser support light LS is turned on (when the laser support light LS is maintained), the laser support light LS can be maintained and the energy density can be set such that sputtering does not occur in the metal structure 13.
  • the laser supporting light LS that is plasma emission is also emitted from the electron emitting portion 13a (since it is separated from the metal structure 13 (lighting start region RS), sputtering of the metal structure 13 by the laser support light LS can also be suppressed. Therefore, since the deterioration of the metal structure 13 and the contamination of the inner wall of the bulb 12 due to sputtering can be suppressed and the life of the light emitting envelope 11 (light source 7) can be increased, the life of the light source device can be sufficiently increased.
  • the second region R2 and the fourth region R4 are changed in the middle of changing the region interposed between the optical system 3 and the light emitting envelope 11 from the second region R2 to the fourth region R4.
  • a third region R3 having an intermediate thickness with respect to the region R4 is interposed.
  • the configuration of the optical member 8 can take other modes.
  • the optical member 8 may be composed of a light modulation element such as a spatial light modulation element.
  • the optical member 8 is a plate-shaped transparent medium 29 having a substantially uniform thickness in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted).
  • an optical member 28 constituted by an actuator 30 that holds the transparent medium 29.
  • the transparent medium 29 held by the actuator 30 moves in a direction substantially orthogonal to the optical axis LA of the continuous laser light L according to the state when the laser support light LS is turned on and after being turned on (during maintenance).
  • the continuous laser light L is condensed on, for example, the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Yes.
  • the transparent medium 29 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11 as shown in FIG.
  • the condensing position F of the continuous laser light L is continuous with respect to the condensing position F of the continuous laser light L when the laser supporting light LS is turned on.
  • the laser beam L moves to a position away from the metal structure 13 (lighting start region RS) in the direction of the optical axis LA. Therefore, even in this case, the sputtering of the metal structure 13 can be suppressed as in the first embodiment.
  • a transparent medium 39 as shown in FIG. 8A can be used instead of the transparent medium 29, for example.
  • the transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface so that the thickness of the continuous laser light L in the direction of the optical axis LA (the length through which the continuous laser light L passes) continuously changes.
  • the transparent medium 29 it is used while being held by the actuator 30.
  • the transparent medium 39 when the laser support light LS is turned on, the optical system 3 emits light so that, for example, the continuous laser light L is condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13).
  • a transparent medium 39 is interposed between the sealing body 11 and the sealing body 11.
  • the transparent medium 39 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11.
  • the condensing position F of the continuous laser light L gradually moves with the movement of the transparent medium 39, and the metal structure 13 (lighting start region RS).
  • the emission region of the laser support light LS can also be gradually moved away from the metal structure 13 (lighting start region RS). Accordingly, since the plasma can be easily maintained by overlapping a part of the light emitting region before and after the converging position F of the continuous laser light L is moved, the laser supporting light LS can be easily maintained.
  • a transparent medium 49 as shown in FIG. 8B can be used instead of the transparent medium 29, for example.
  • the transparent medium 49 is formed by joining two members having different thicknesses in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted).
  • the first member has a thickness of about 4 mm, for example.
  • the transparent medium 49a and the second transparent medium 49b having a thickness of, for example, about 2 mm are joined at the end surfaces.
  • the transparent medium 49 when the laser support light LS is turned on, for example, the continuous laser light L is emitted from the optical system 3 so as to be condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). A first transparent medium 49 a is interposed between the sealing body 11 and the sealing body 11. Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 49 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11. At this time, since the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the condensing position F of the continuous laser light L is gradually increased with the movement of the transparent medium 49.
  • the emission region of the laser support light LS can also be moved stepwise away from the metal structure 13 (lighting start region RS). Therefore, since it becomes easy for some of the light emitting regions to overlap each other before and after the converging position F of the continuous laser light L is moved, it is easy to maintain the plasma, and thus it is easy to maintain the laser support light LS.
  • FIGS. 9 and 10 are diagrams showing a light source device according to the second embodiment of the present invention.
  • the description which overlaps with 1st Embodiment is abbreviate
  • the optical system 3 and the head 4 a of the optical fiber 4 are accommodated in the housing 17.
  • the casing 17 is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and the actuator 18 (optical) according to the state when the laser support light LS is turned on and after being turned on (maintained).
  • the system moving unit 52) moves the continuous laser light L in the direction of the optical axis LA.
  • the housing 17 condenses, for example, the continuous laser light L on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Is held in such a position.
  • the housing 17 has a condensing position F of the continuous laser light L with respect to a condensing position F when the laser supporting light LS is turned on.
  • the actuator 18 is moved along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
  • the metal structure 13 (lighting start) can be easily performed with the simple configuration in which the housing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). Can be separated from the region RS).
  • the housing 17 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position F of the continuous laser light L after the laser support light LS is turned on (during maintenance). Is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is turned on, the movement direction of the housing 17 is continuous laser light.
  • the direction may be different from the direction of the optical axis LA of L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
  • FIGS. 11 and 12 are diagrams showing a light source device according to the third embodiment of the present invention.
  • the light source device according to the third embodiment will be described, but the description overlapping with the first and second embodiments will be omitted.
  • the light emitting envelope 11 is held by the actuator 18 (light emitting envelope moving unit 53), and when the laser supporting light LS is turned on and after being turned on (maintained). Depending on the state, it is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18 (light emitting envelope moving part 53) as a condensing position moving part.
  • the light emitting envelope 11 when the laser support light LS is turned on, the light emitting envelope 11 has the continuous laser light L condensed, for example, on the substantially surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). Is held in such a position.
  • the light emitting envelope 11 after the laser supporting light LS is turned on (during maintenance), the light emitting envelope 11 has the condensing position F of the continuous laser light L at the condensing position F when the laser supporting light LS is turned on.
  • the actuator 18 is moved along, for example, the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
  • the light emitting envelope 11 is moved by the actuator 18 (light emitting envelope moving unit 53), and the condensing position F of the continuous laser beam L can be easily moved to the metal structure 13 (lighting start region RS). Can be separated from
  • the light emitting envelope 11 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position of the continuous laser light L after the laser supporting light LS is turned on (during maintenance). If F is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is lit, the moving direction of the light emitting envelope 11 is continuous.
  • the direction may be different from the direction of the optical axis LA of the laser light L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
  • FIG. 13 and 14 are views showing a light emitting envelope constituting a light source device according to a fourth embodiment of the present invention.
  • the light emitting envelope constituting the light source device according to the fourth embodiment will be described, but the description overlapping with the first to third embodiments will be omitted.
  • the light emitting envelope 61 has a small-diameter portion 16 that holds the rod-shaped member 15 that is the support portion 13 b.
  • the small-diameter portion 16 is provided by using a part of the inner wall of the protruding portion 12b, and the protruding portion 12b has a smaller inner diameter than other portions so as to contact the rod-shaped member 15.
  • the small diameter portion 16 is only in contact with the peripheral surface of the rod-shaped member 15 and is not fused to the rod-shaped member 15.
  • the small diameter portion 16 may be provided closer to the base end (lower side of the drawing) than the position illustrated in FIGS. 13 and 14, or may be provided closer to the distal end side (upper side of the drawing). Further, a plurality of small diameter portions 16 may be provided.
  • the metal structure 13 (electron emission structure) is provided with a large-diameter portion 13d provided so as to be able to come into contact with the small-diameter portion 16 at an end portion of the rod-like member 15 passed through the small-diameter portion 16. ing. Further, a coil 14 (electron emission structure moving portion 54) is provided as a condensing position moving portion on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d.
  • the coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15 so that the large-diameter portion 13d on the rod-shaped member 15 side abuts on the small-diameter portion 16 on the protruding portion 12b side.
  • the metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state of LS lighting and after lighting (during maintenance).
  • the metal structure 13 when the laser support light LS is turned on, the metal structure 13 is irradiated with, for example, a continuous laser beam L by the magnetic force applied from the coil 14 (electron emission structure moving unit 54).
  • the metal structure 13) is held at a position where light is condensed on the substantially surface (lighting start region RS).
  • the metal structure 13 after the laser support light LS is turned on (during maintenance), the metal structure 13 has the condensing position F of the continuous laser light L by stopping the application of the magnetic force from the coil 14.
  • the laser beam LS moves along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS) with respect to the condensing position F when the laser support beam LS is lit.
  • the metal structure 13 is moved by the coil 14 (electron emission structure moving portion 54), so that the condensing position F of the continuous laser light L can be easily changed. It can be separated from (lighting start area RS). Furthermore, in this case, since the movement of the condensing position F of the continuous laser light L does not require movement or adjustment of the optical system 3 and the valve 12, the optical conditions in the irradiation path of the continuous laser light L can be kept constant. And the condensing position of the continuous laser beam L can be maintained at an appropriate position.
  • the light emitting envelope 61 can take other forms.
  • the spacer member 19 fitted to the inner wall of the protruding portion 12b so that the rod-like member 15 is inserted, and the end of the rod-like member 15 passed through the spacer member 19 And a large-diameter portion 13 d provided so as to be able to contact the small-diameter portion 16.
  • the coil 14 is provided on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d, and the large diameter portion 13d on the rod-like member 15 side is the spacer. A magnetic force is applied to the rod-shaped member 15 so as to come into contact with the member 19.
  • the coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15, so that the laser support light LS is turned on (FIG. 15 (a)) and The metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state after lighting (during maintenance) (FIG. 15B).
  • FIG. 16 is a diagram showing a light source device according to the fifth embodiment of the present invention.
  • the light source device 41 includes a control unit 55 that adjusts the emission energy of the continuous laser light L emitted from the laser unit 2.
  • the optical system 3 condenses the continuous laser light L at a position separated from the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). In other words, the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is always irradiated with the continuous laser light L in the defocused state.
  • FIG. 17 is a diagram illustrating the operation of the control unit 55.
  • the control unit 55 determines the condensing position F of the continuous laser light L on the surface of the electron emission unit 13a (metal structure 13) (lighting start region RS).
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is set so that the laser supporting light LS can be turned on (for example, 530 kW / cm 2).
  • the emission energy of the continuous laser beam L emitted from the laser unit 2 is set so that Thereby, the continuous laser light L irradiated to the surface (lighting start area
  • the control unit 55 changes the condensing position F of the continuous laser light L to the position (FIG. 17 (a)), the emission energy of the continuous laser light L emitted from the laser unit 2 is set lower than the emission energy of the continuous laser light L when the laser support light LS is turned on.
  • the control unit 55 sets the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission unit 13a (metal structure 13), for example, 530 kW / cm 2 when the laser support light LS is turned on. About 260 kW / cm 2 is set.
  • the laser support light LS is sent from the metal structure 13 (lighting start area
  • the continuous laser light L emitted from the laser unit 2 is condensed at a position separated from the surface of the metal structure 13 (lighting start region RS), and the emission energy of the continuous laser light L is increased. Adjustment is performed by the control unit 55. That is, in the light source device 41, the surface of the metal structure 13 (lighting start region RS) is always irradiated with the continuous laser light L in the defocused state, and further, the electron emitting portion 13a (metal structure) when the laser support light LS is maintained.
  • the surface of the metal structure 13 is locally sputtered. Can be suppressed. Therefore, the life of the metal structure 13 can be extended. Further, in the light source device 41, it is not necessary to mechanically move the condensing position F of the continuous laser light L, so that the condensing position of the continuous laser light L can be maintained at an appropriate position, and the optical system 3 or Since a device for moving the light emitting envelope 11 is not required, the light source device can be downsized.
  • the continuous laser light L may be irradiated from a direction in which the optical axis LA of the continuous laser light L and the axis in the extending direction of the metal structure 13 are coaxial with each other as described above. Irradiation may be performed from a direction in which the optical axis LA of L and the axis in the extending direction of the metal structure 13 intersect each other.
  • FIGSixth Embodiment 18 to 20 are views showing a light source device according to the sixth embodiment of the present invention.
  • the light source device according to the sixth embodiment will be described, but the description overlapping with the first to fifth embodiments will be omitted.
  • the continuous laser light L is in the extending direction of the optical axis LA of the continuous laser light L and the metal structure 13 with respect to the light emitting envelope 91 (light source 7). Irradiation is from a direction where the axes intersect each other.
  • the continuous laser beam L is irradiated from a direction in which the optical axis LA of the continuous laser beam L and the axis in the extending direction of the metal structure 13 are substantially orthogonal to each other, and the bulb 12 (particularly Of the spherical portion 12a), the side portion 12d positioned laterally with respect to the axis of the extending direction of the metal structure 13 is the incident portion (laser incident window portion LW) of the continuous laser beam L.
  • the optical system 3 includes the continuous laser beam so that the position of the condensing position F of the continuous laser beam L in the direction of the optical axis LA is substantially the surface (lighting start region RS) of the electron emission unit 13a.
  • a holding part 13f for holding the electron emission part 13a is provided on the distal end side of the rod-like member 15 (supporting part 13b) of the metal structure 13, and a holding part 13f and a stick-like member are provided on the base end side of the holding part 13f.
  • 15 (a supporting portion 13b) is formed with a reduced diameter portion 13e that is reduced in diameter so as to be narrower than the proximal end side (base end portion 13g).
  • the reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side.
  • the housing 17 in which the optical system 3 and the head 4a of the optical fiber 4 are accommodated is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and is supported by the laser.
  • the housing 17 is held at a position where the continuous laser light L is irradiated to the holding portion 13f of the rod-like member 15 (support portion 13b), for example. Has been.
  • the holding portion 13f has a larger diameter than the electron emitting portion 13a, the surface of the holding portion 13f is positioned closer to the laser incident window LW than the surface of the electron emitting portion 13a.
  • the continuous laser beam L is apparently condensed at a virtual condensing position F ′ inside the holding portion 13f and defocused to an energy density that does not cause sputtering on the substantially surface of the holding portion 13f. Irradiated with.
  • the housing 17 At the time of turning on the laser support light LS, as shown in FIG. 19, the housing 17 is moved to a position where the continuous laser light L is applied to the electron emitting portion 13a. At this time, the condensing position F of the continuous laser beam L is located on the substantially surface (lighting start region RS) of the electron emitting portion 13a. After the laser support light LS is turned on (during maintenance), as shown in FIG. 20, the housing 17 has electrons at which the condensing position F of the continuous laser light L is compared with the condensing position F when the laser support light LS is turned on.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) when the laser supporting light LS is maintained is defined as the electron emitting portion 13a (metal) when the laser supporting light LS is turned on.
  • the energy density of the continuous laser beam L on the surface (lighting start region RS) of the structure 13) can be lowered.
  • the condensing position F of the continuous laser light L can be easily made into a metal structure with a simple configuration in which the casing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). It can be separated from the body 13 (lighting start region RS) in a direction (direction along the axis of the extending direction of the metal structure 13) intersecting the optical axis LA direction of the continuous laser light L.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state.
  • the continuous laser light L is irradiated to the holding portion 13f of the rod-shaped member 15 (support portion 13b) in a defocused state with an energy density that does not cause sputtering.
  • the holding portion 13f is heated without being sputtered, and accordingly, the temperature of the electron emitting portion 13a (metal structure 13) also rises.
  • the reduced diameter portion 13e is formed, the heat conduction path from the holding portion 13f to the base end portion 13g side is limited, so that the electron emitting portion 13a (metal structure body) by the continuous laser light L irradiation.
  • the heating of 13) can be performed more efficiently.
  • the rod-shaped member 15 (support portion 13b) is made of a high melting point metal such as molybdenum or tungsten that can withstand the heating.
  • the continuous laser light L can be applied to the surface of the electron emission portion 13a (lighting start region RS) with an energy density sufficient for turning on the laser support light LS. It can be lit reliably. Then, after the laser support light LS is turned on (during maintenance), the continuous laser light L is applied to the laser support light LS moved to the space region of the internal space S separated from the metal structure 13 (lighting start region RS). The laser support light LS is maintained by irradiation.
  • the life of the light source device can be sufficiently increased.
  • the reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side. However, the reduced diameter portion 13e enters the spherical portion 12a.
  • the reduced diameter portion 13e may be formed continuously to the base end side of the rod-shaped member 15 (support portion 13b).
  • the electron emission part 23a was formed in the cylindrical shape of a small diameter, as shown in FIG. 21, the electron emission part 23a is, for example, the rod-shaped member 15 (support part 13b).
  • You may have the thin cylindrical part 24 extended in the axial direction extended, and the inclination part 25 provided in the front end side of the cylindrical part 24.
  • the inclined portion 25 is formed with an inclined surface 25a inclined with respect to the axis in the extending direction of the cylindrical portion 24.
  • the inclined surface 25a is also inclined with respect to the optical axis LA of the continuous laser beam L. Yes.
  • FIG. 22 is an enlarged view of a main part showing the operation of the electron emitting portion 23a (metal structure 23).
  • the laser support light LS when the laser support light LS is turned on, it is preferable to focus the condensing position F of the continuous laser light L so that it is positioned on the substantially surface of the electron emitting portion 23a. May require precise adjustment. Even if the condensing position F of the continuous laser light L is not the substantially surface of the electron emission portion 23a, the laser support light LS is turned on if the energy density of the continuous laser light L on the approximate surface of the electron emission portion 23a is sufficiently high. Yes, but that requires a higher power laser.
  • the present embodiment it is possible to give a margin to the positional accuracy of the condensing position F of the continuous laser light L in the optical axis LA direction without changing the output of the laser.
  • a virtual collection point with a positional accuracy of a degree that the condensing position F of the continuous laser light L in the electron emission part 23a is surely contained in the cylindrical part 24 in the direction of the optical axis LA is obtained.
  • the virtual condensing position F ′ of the continuous laser beam L is moved from the rod-shaped member 15 (supporting portion 13b) side to the inclined portion 25 side in the direction along the axis of the extending direction of the cylindrical portion 24.
  • the housing 17 is moved by the actuator 18.
  • the condensing position F of the continuous laser beam L is reliably positioned at any position on the substantially surface of the inclined surface 25a in the inclined portion 25 of the electron emitting portion 23a. Therefore, the laser support light LS can be turned on.
  • the condensing position F of the continuous laser light L is placed at any position on the surface of the electron emitting portion 23a.
  • An inclined surface 25a for positioning is formed.
  • the condensing position F of the continuous laser light L is substantially the surface of the inclined surface 25 a. Since it can be surely positioned at any of the above positions, the laser support light LS can be turned on.
  • the continuous laser beam L on the surface of the cylindrical portion 24 when the continuous laser beam L is irradiated onto the cylindrical portion 24 (FIG.
  • the electron emitting portion 23a is heated by irradiating the cylindrical portion 24 with the continuous laser light L, and the laser support during the subsequent irradiation of the inclined surface 25a with the continuous laser light L is performed. There exists an effect which makes lighting of light LS easy.
  • the condensing position F of the continuous laser light L is moved by the actuator 18 (the optical system moving unit 52). However, the condensing position F of the continuous laser light L is moved by adjusting the optical system 3. You may let them. Further, by applying the light emitting envelope moving unit 53 described in the third embodiment, the condensing position F of the continuous laser light L may be moved, and the electron emission structure moving described in the fourth embodiment is performed. The condensing position F of the continuous laser light L may be moved by applying the unit 54.
  • the deterioration of the metal structure 13 due to sputtering and the contamination of the inner wall of the bulb 12 can be suppressed, and the life of the light emitting envelope 11 (light source 7) can be increased.
  • the lifetime can be extended sufficiently as an apparatus.
  • the laser support light LS is moved and maintained on the optical axis LA of the continuous laser light L or the movement direction axis of the continuous laser light L at the time of lighting. It may be moved to an arbitrary position in the space area. In this case, a position where the influence of the laser support light LS on the metal structure can be further reduced is selected, or a position suitable for taking out the laser support light LS from the light source 7 is selected in accordance with an external optical system or the like. can do. Further, even when the reduced diameter portion 13e is adopted in the embodiments other than the sixth embodiment, the heating efficiency of the electron emission portion 13a (metal structure 13) is improved, and the electron emission portion 13a (metal structure 13) is changed to an electron. Can be easily released.
  • FIG. 23 is a schematic view showing a light source device according to the seventh embodiment of the present invention.
  • the light source device 101 houses a laser unit 102 that emits laser light, an optical system 103 that guides laser light L from the laser unit 102, and counter electrodes 113 and 113 that face each other.
  • the light emitting envelope 111 (light source 107) is included.
  • a discharge is generated between the counter electrodes 113, 113, and the discharge region is irradiated with laser light, whereby the condensing position F of the laser light L in the light emitting envelope 111, which is the light source 107.
  • the laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
  • the laser unit 102 is, for example, a laser diode.
  • the laser unit 102 either a continuous laser or a pulsed laser may be used, but in this embodiment, a continuous laser is used.
  • the laser unit 102 emits a laser beam L having a wavelength matched to the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm.
  • the output of the laser beam L is, for example, about 30W.
  • Laser light L emitted from the laser unit 102 is guided to the optical system 103 by the optical fiber 104.
  • the optical system 103 is an optical system that guides the laser light L from the laser unit 102 between the counter electrodes 113 and 113.
  • the optical system 103 includes, for example, two lenses 105 and 106.
  • the laser light L emitted from the head 104 a of the optical fiber 104 is collimated by the lens 105 and then condensed toward the light emitting envelope 111 by the lens 106 with the optical axis LA.
  • the diameter of the condensed laser beam L is, for example, about 120 ⁇ m in diameter.
  • the light emitting envelope 111 includes a bulb (housing) 112 in which a light emitting gas G is sealed in a high pressure in the internal space S, and counter electrodes 113 and 113 facing each other in the internal space S. It is configured.
  • the bulb 112 is formed hollow by glass, for example. In the internal space S of the bulb 112, for example, xenon gas as a luminescent gas G is sealed at a high pressure.
  • the counter electrodes 113 and 113 are formed in a rod shape from a high melting point metal such as tungsten, for example, and are opposed to each other on the tip side.
  • the base end side of the counter electrode 113 passes through the wall portion of the bulb 112, is drawn out of the bulb 112, and is connected to a power supply member 114 connected to a power supply portion (not shown), thereby discharging between the electrodes. Is supplied to the counter electrodes 113, 113.
  • the counter electrodes 113 and 113 do not directly penetrate the wall portion of the valve 112, but a conductive member electrically connected to the counter electrodes 113 and 113 penetrates the wall portion of the valve 112 to the outside of the valve 112. It may be pulled out and connected to the power supply member 114.
  • a high voltage is applied between the counter electrodes 113 and 113 via the power supply member 114, whereby a discharge region is formed in the counter electrodes 113 and 113.
  • the luminescent gas G is ionized and converted into plasma.
  • the high-luminance laser support light is turned on in the lighting start region RS, and the laser support light is continuously irradiated to the laser support light, whereby the counter electrodes 113 and 113 are used. Even if the power supply to is stopped, the laser support light is maintained by receiving the energy supply by the laser light L.
  • the laser beam L may be condensed in the discharge region in advance, and then the discharge region may be formed between the counter electrodes 113 and 113. Further, after the laser supporting light is turned on, the power supply to the counter electrodes 113 and 113 may be stopped or the power supply may be continued.
  • the light source device 101 includes an optical path length adjusting unit 151 for adjusting the optical path length of the laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 151 adjusts the optical path length LL that is the length of the optical axis LA of the laser light L from the inner wall of the bulb 112 to the condensing position F in the internal space S of the bulb 112.
  • the optical path length adjustment unit 151 for example, an optical member 108 as shown in FIG. 23 is used.
  • the optical member 108 includes a plate-shaped transparent medium 109 having a substantially uniform thickness in the optical axis LA direction of the laser light L (a length through which the laser light L is transmitted) and an actuator 110 that holds the transparent medium 109. ing.
  • the transparent medium 109 is made of a material having a higher refractive index than air (laser light irradiation atmosphere outside the light emitting envelope 111) such as synthetic quartz glass.
  • the transparent medium 109 held by the actuator 110 is in a direction substantially orthogonal to the optical axis LA of the laser light L in accordance with each of the laser support light LS lighting (FIG. 24) and after lighting (maintenance) (FIG. 25). Moving.
  • the transparent medium 109 is interposed between the optical system 103 and the light emitting envelope 111, and is arranged so that the entire region in the cross-sectional direction of the laser light L passes through the transparent medium 109.
  • the laser beam L is focused on a discharge path that is most likely to be discharged, for example, on a line X connecting the tip portions of the counter electrodes 113 and 113, that is, in a discharge region between the counter electrodes 113 and 113. is doing.
  • the energy density of the laser light L at the condensing position F (lighting start region RS) on the line X is, for example, about 260 kW / cm 2 .
  • the laser beam L is irradiated to the plasma generated in the discharge region (lighting start region RS) between the counter electrodes 113 and 113, and the laser support light LS is turned on.
  • the transparent medium 109 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111 as shown in FIG.
  • the condensing position F of the laser light L moves to the near side (upper side in FIG. 25) in the optical axis LA direction with respect to the condensing position F of the laser light L when the laser support light LS is turned on. Therefore, the energy density of the laser beam L on the line X (lighting start region RS) is the energy density of the laser beam L on the line X (lighting start region RS) when the laser support light LS is lit (maintained) (FIG. 24). Decreasing with respect to energy density.
  • the laser support light LS that is plasma emission is also the counter electrodes 113 and 113 (lighting start region RS). Therefore, sputtering of the counter electrodes 113 and 113 by the laser support light LS can be suppressed.
  • the energy density of the laser light L at the condensing position F is made smaller than the time when the laser support light LS is turned on to the extent that the laser support light LS can be maintained, or power supply to the counter electrodes 113 and 113 is stopped.
  • sputtering of the counter electrodes 113 and 113 can be further suppressed. Therefore, the light emitting envelope 111 and the light source device 101 can have a sufficiently long life.
  • the configuration of the optical member 108 can take other modes.
  • the optical member 108 may be composed of a light modulation element such as a spatial light modulation element.
  • a transparent medium 39 instead of the transparent medium 109, for example, a transparent medium 39 as shown in FIG.
  • the transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface, so that the thickness of the laser beam L in the direction of the optical axis LA (the length through which the laser beam L passes) changes continuously. In the same manner as the transparent medium 109, it is used while being held by the actuator 110.
  • the transparent medium 39 When the transparent medium 39 is used, first, the transparent medium 39 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire area in the cross-sectional direction of the laser light L passes through the transparent medium 39.
  • the light is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
  • the transparent medium 39 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111.
  • the thickness of the transparent medium 39 in the region where the laser light L is incident gradually decreases as the transparent medium 39 moves. Therefore, the condensing position F of the laser light L gradually moves toward the front side (upper side in FIG. 24) in the direction of the optical axis LA as the transparent medium 39 moves.
  • a region having an energy density sufficient to maintain the laser support light LS gradually moves toward the front side in the direction of the optical axis LA.
  • the condensing position F of the laser light L is moved to the near side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is continuous. Since it moves, the laser support light LS is more reliably maintained.
  • a transparent medium 49 as shown in FIG. 8B can be used instead of the transparent medium 109.
  • the transparent medium 49 is a first transparent medium having, for example, a thickness of about 4 mm, in which two members having different thicknesses in the optical axis LA direction of the laser light L (length through which the laser light L passes) are joined.
  • 49a and the 2nd transparent medium 49b which has thickness of about 2 mm, for example, have the structure joined to mutual end surfaces.
  • the transparent medium 49 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire cross-sectional area in the laser light L passes through the first transparent medium 49a.
  • the light L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113.
  • the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
  • the transparent medium 49 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111.
  • the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the thickness of the transparent medium 49 in the region where the laser light L is incident gradually decreases as the transparent medium 49 moves.
  • the condensing position F of the laser light L is gradually moved to the near side (upper side in FIG. 24) in the optical axis LA direction as the transparent medium 49 is moved.
  • a region having an energy density sufficient to maintain the laser support light LS is moved stepwise toward the optical axis LA direction.
  • the condensing position F of the laser light L is moved to the front side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is stepwise. Since the movement is small, the laser support light LS is more reliably maintained.
  • the condensing position F of the laser beam L after the laser support light LS lighting is from the line X (lighting start area
  • region RS which connects between the cusps of the counter electrodes 113 and 113.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on is the tip of the counter electrodes 113, 113. It may be a position on the back side (lower side in FIG. 23) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the heads.
  • the laser beam L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113.
  • the entire region of the laser light L in the cross-sectional direction passes between the transparent medium 109 and the optical system 103 and the light emitting envelope 111.
  • a transparent medium 109 is interposed.
  • the condensing position F of the laser light L is the back side in the optical axis LA direction (the lower side in FIG. 26) with respect to the condensing position F (lighting start region RS) of the laser light L when the laser support light LS is turned on. Will be moved to. Therefore, even in this case, similarly to the seventh embodiment, sputtering of the counter electrode 113 can be suppressed.
  • FIGS. 28 and 29 are views showing a light source device according to the eighth embodiment of the present invention.
  • the light source device according to the eighth embodiment will be described, but the description overlapping with the seventh embodiment will be omitted.
  • the optical system 103 and the head 104 a of the optical fiber 104 are accommodated in a housing 117.
  • the casing 117 is held by the actuator 118 (optical system moving unit 152), and the laser support light LS is turned on in the direction of the optical axis LA according to lighting (FIG. 28) and after lighting (maintenance) (FIG. 29).
  • the actuator 118 optical system moving unit 152
  • the housing 117 is at a position where the laser light L is condensed on a line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113, for example. Is retained. Thereby, the laser support light LS is turned on in the discharge region between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 29, the casing 117 moves to the near side (upper side in FIG. 28) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (upper side in FIG.
  • the energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 after the support light LS is turned on (during maintenance) is equal to the counter electrode 113 when the laser support light LS is turned on. It decreases with respect to the energy density of the laser beam L on the line X (lighting start region RS) connecting the cusp 113.
  • the condensing position F of the laser beam L is moved (between the counter electrodes 113, 113) by a simple configuration in which the casing 117 including the optical system 103 is moved by the actuator 118 (optical system moving unit 152).
  • the energy density of the laser light L on the line X (lighting start area RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 121 can be sufficiently extended.
  • the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) is more optical than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) connects the pointed heads of the counter electrodes 113 and 113. It may be a position on the far side (downward side in FIG. 28) in the optical axis LA direction from the line X (lighting start region RS).
  • the holding position of the casing 117 after the laser supporting light LS is turned on (during maintenance) is the back side in the optical axis LA direction (the lower side in FIG. 28) with respect to the holding position of the casing 117 when the laser supporting light LS is turned on. ).
  • FIGS. 30 and 31 are views showing a light source device according to the ninth embodiment of the present invention.
  • the light source device according to the ninth embodiment will be described below, but the description overlapping with the seventh and eighth embodiments will be omitted.
  • the light emitting envelope 111 is held by the actuator 118 (light emitting envelope moving unit 153), and when the laser supporting light LS is turned on (FIG. 30) and after lighting ( (At the time of maintenance) (FIG. 31) It moves to optical axis LA direction according to each.
  • the light emitting envelope 111 is, for example, a position where the laser light L is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Is held by. Thereby, the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 31, the light emitting envelope 111 moves to the back side (right side in FIG. 30) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (left side in FIG.
  • the condensing position F of the laser light L is moved (between the counter electrodes 113 and 113 (lighting start region) with a simple configuration in which the light emitting envelope 111 is moved by the actuator 118 (light emitting envelope moving unit 153).
  • the energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 131 can be sufficiently extended.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is lighter than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is the peak of the counter electrodes 113 and 113. It may be a position on the back side (right side in FIG. 30) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the parts.
  • the holding position of the light emitting envelope 111 after the laser supporting light LS is turned on (during maintenance) is the front side in the optical axis LA direction (in FIG. 30) with respect to the holding position of the light emitting envelope 111 when the laser supporting light LS is turned on. (Left side)
  • FIG. 32 is a diagram showing a light source device according to the tenth embodiment of the present invention.
  • the light source device 141 includes a control unit 154 that adjusts the emission energy of the laser light L emitted from the laser unit 102.
  • the optical system 103 is, for example, a position on the near side (upper side in FIG. 32) in the optical axis LA direction with respect to the line X connecting the laser light L between the cusps of the counter electrodes 113 and 113. It is condensed with
  • FIG. 33 is a diagram illustrating the operation of the control unit 154.
  • the control unit 154 first sets the condensing position F of the laser light L at a position separated from the counter electrodes 113, 113 (lighting start region RS),
  • the laser beam 102 is emitted from the laser unit 102 so that the energy density of the laser light L in the line X (lighting start region RS) connecting the cusp 113 is such that the laser support light LS can be lit (for example, about 260 kW / cm 2 ).
  • the emission energy of the laser beam L to be set is set.
  • the laser beam L in the line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113 can be turned on while the laser beam L is in a defocused state.
  • the control unit 154 sets the condensing position F of the laser light L to the position at the time of laser support light LS lighting (FIG. 33 ( While maintaining the position a), the emission energy of the laser beam L emitted from the laser unit 102 is set lower than the emission energy of the laser beam L when the laser support light LS is turned on.
  • the laser support light LS is sent from the counter electrodes 113 and 113 (lighting start area
  • the light source device 141 controls the emission energy of the laser beam L emitted from the laser unit 102 while always condensing the laser beam L at a position separated from the space between the counter electrodes 113 and 113 (lighting start region RS).
  • region RS) which connects between the cusps of the counter electrodes 113 and 113 can be changed. Therefore, since the condensing position F of the laser beam L with the highest energy density is not always located between the counter electrodes 113 and 113 (lighting start region RS), sputtering of the counter electrode 113 can be suppressed, and the light source device 141 A sufficiently long life is achieved.
  • the light source device 141 it is not necessary to mechanically move the condensing position F of the laser light L, so that the condensing position of the laser light L can be maintained at an appropriate position, and the optical system 103 and the light-emitting envelope can be maintained. Since a device for moving the body 111 is not required, the light source device can be reduced in size.
  • the optical system 103 has the laser beam L on the near side in the optical axis LA direction (upward in FIG. 32) above the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the laser beam L is condensed in the optical axis LA direction (on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the light may be condensed on the lower side in FIG. Even in this case, the sputtering of the counter electrode 113 can be suppressed by adjusting the emission energy of the laser light L emitted from the laser unit 102 by the control unit 154 as in the tenth embodiment.
  • the condensing position F (laser support light LS) has moved in the direction of the optical axis LA of the laser light L, but the laser light L after the laser support light LS is turned on (during maintenance). If the condensing position F of the laser beam L is a position away from the counter electrode 113 (lighting start region RS) with respect to the condensing position F of the laser light L when the laser support light LS is lit, the optical axis LA of the laser light L You may move to the direction (for example, the direction which crosses the optical axis LA of the laser beam L) different from a direction.

Abstract

　L'invention concerne un dispositif de source lumineuse (1), doté d'un dispositif de commande réglant la densité d'énergie de lumière laser (L) dans une région de début d'éclairage (RS) durant l'entretien courant de support laser de façon à être inférieure à la densité d'énergie de lumière laser (L) dans la région de début d'éclairage (RS) durant l'éclairage lumineux de support laser. Ainsi, durant l'entretien courant de support laser, la lumière laser (L) arrive sur la région de début d'éclairage (RS) à une densité d'énergie pour laquelle il ne se produit pas de pulvérisation. Ainsi, dans ce dispositif de source lumineuse (1), il est possible d'inhiber la pulvérisation dans un corps scellé d'émission (11), ce qui permet d'étendre suffisamment la durée de vie.
PCT/JP2014/080345 2013-12-06 2014-11-17 Dispositif de source lumineuse WO2015083528A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US15/022,222 US9646816B2 (en) 2013-12-06 2014-11-17 Light source device
DE112014005518.2T DE112014005518T5 (de) 2013-12-06 2014-11-17 Lichtquellenvorrichtung
IL244786A IL244786A0 (en) 2013-12-06 2016-03-28 light source device
US15/478,306 US9824879B2 (en) 2013-12-06 2017-04-04 Light source device
US15/712,284 US10032622B2 (en) 2013-12-06 2017-09-22 Light source device

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2013253262 2013-12-06
JP2013-253264 2013-12-06
JP2013253264A JP6209071B2 (ja) 2013-12-06 2013-12-06 光源装置
JP2013-253262 2013-12-06
JP2014-081350 2014-04-10
JP2014081350A JP5947329B2 (ja) 2013-12-06 2014-04-10 光源装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US15/022,222 A-371-Of-International US9646816B2 (en) 2013-12-06 2014-11-17 Light source device
US15/478,306 Continuation US9824879B2 (en) 2013-12-06 2017-04-04 Light source device

Publications (1)

Publication Number Publication Date
WO2015083528A1 true WO2015083528A1 (fr) 2015-06-11

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009532829A (ja) * 2006-03-31 2009-09-10 エナジェティック・テクノロジー・インコーポレーテッド レーザ駆動の光源
JP2011035039A (ja) * 2009-07-30 2011-02-17 Ushio Inc 光源装置
JP2013045537A (ja) * 2011-08-23 2013-03-04 Ushio Inc 光源装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009532829A (ja) * 2006-03-31 2009-09-10 エナジェティック・テクノロジー・インコーポレーテッド レーザ駆動の光源
JP2011035039A (ja) * 2009-07-30 2011-02-17 Ushio Inc 光源装置
JP2013045537A (ja) * 2011-08-23 2013-03-04 Ushio Inc 光源装置

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