WO2015083528A1 - Light source device - Google Patents

Light source device Download PDF

Info

Publication number
WO2015083528A1
WO2015083528A1 PCT/JP2014/080345 JP2014080345W WO2015083528A1 WO 2015083528 A1 WO2015083528 A1 WO 2015083528A1 JP 2014080345 W JP2014080345 W JP 2014080345W WO 2015083528 A1 WO2015083528 A1 WO 2015083528A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
laser
light source
source device
turned
Prior art date
Application number
PCT/JP2014/080345
Other languages
French (fr)
Japanese (ja)
Inventor
昭典 浅井
福満　憲志
Original Assignee
浜松ホトニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013253264A external-priority patent/JP6209071B2/en
Priority claimed from JP2014081350A external-priority patent/JP5947329B2/en
Application filed by 浜松ホトニクス株式会社 filed Critical 浜松ホトニクス株式会社
Priority to US15/022,222 priority Critical patent/US9646816B2/en
Priority to DE112014005518.2T priority patent/DE112014005518T5/en
Publication of WO2015083528A1 publication Critical patent/WO2015083528A1/en
Priority to IL244786A priority patent/IL244786A0/en
Priority to US15/478,306 priority patent/US9824879B2/en
Priority to US15/712,284 priority patent/US10032622B2/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

Definitions

  • the present invention relates to a light source device.
  • a light source device that uses a generated plasma by irradiating a laser beam in a housing of a light emitting envelope in which a light emitting gas is sealed (see, for example, Patent Documents 1 and 2).
  • plasma is generated by discharge between electrodes by supplying power between opposing electrodes arranged in a glass casing, and laser light is continuously irradiated to the plasma.
  • Laser support light which is plasma emission, is lit and maintained.
  • pulsed plasma emission is turned on by irradiating an electron-emitting metal disposed in a xenon lamp with pulsed laser light.
  • the plasma is continuously generated between the counter electrodes, the counter electrode is sputtered, and the life of the light emitting envelope may be shortened due to consumption of the counter electrode.
  • the sputtered material adheres to the inner wall of the housing, the incidence of laser light and the removal of the laser support light are hindered, so that the emission intensity of the laser support light gradually decreases, and as a light emitting envelope There was a risk of shortening the lifespan.
  • the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a light source device that suppresses sputtering in the housing and can achieve a sufficiently long life.
  • a light source device includes a laser unit that emits laser light, a light emitting envelope in which a luminescent gas is sealed in an internal space, and a light source having a lighting start area in the internal space, An optical system that guides laser light to the internal space and a control unit that controls the energy density of the laser light in the lighting start area, and the light source is turned on by irradiation of the laser light from the laser part in the internal space.
  • the laser support light which is plasma emission of the emission gas, is maintained by irradiating the laser light from the laser unit, and the control unit determines the energy density of the laser light in the lighting start area when the laser support light is maintained. Is set lower than the energy density of the laser beam in the lighting start region.
  • the control unit lowers the energy density of the laser light in the lighting start area when the laser supporting light is maintained relative to the energy density of the laser light in the lighting start area when the laser supporting light is turned on. Therefore, when maintaining the laser support light, the lighting start region is irradiated with the laser light at an energy density that does not cause sputtering. Therefore, in this light source device, since sputtering in the light emitting envelope can be suppressed, a sufficiently long life can be achieved.
  • the light source may further include an electron-emitting structure that includes an easy-electron emitting material that is disposed in the internal space and emits electrons when irradiated with laser light. In this case, sputtering of the electron emission structure can be suppressed.
  • the light source may further include counter electrodes facing each other so as to sandwich the lighting start area. In this case, generation of plasma between the counter electrodes can be suppressed to such an extent that sputtering does not occur.
  • the control unit includes a condensing position moving unit that moves the condensing position of the laser light when maintaining the laser supporting light in a direction away from the lighting start region with respect to the condensing position of the laser light when the laser supporting light is turned on. It is preferable. In this case, when the laser supporting light is maintained, the laser light condensing position is separated from the lighting start region, so that sputtering in the light emitting envelope can be reliably suppressed.
  • the condensing position moving unit moves the condensing position of the laser light in the optical axis direction of the laser light. In this case, when the laser support light is maintained, the condensing position of the laser light can be easily separated from the lighting start region.
  • the condensing position moving unit has an optical path length adjusting unit that adjusts an optical path length in the internal space of the laser light.
  • the optical path length adjustment unit can easily separate the laser beam condensing position from the lighting start area while maintaining the laser support light while maintaining the laser light condensing position at an appropriate position when the laser support light is turned on. it can.
  • the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. In this case, by moving the optical system, the condensing position of the laser light can be easily separated from the lighting start region.
  • the condensing position moving unit has a light emitting envelope moving unit that moves the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. In this case, by moving the light emitting envelope, the condensing position of the laser light can be easily separated from the lighting start region.
  • the optical system collects the laser beam at a position separated from the lighting start region, both when the laser supporting light is turned on and when it is maintained. In this case, since the condensing position of the laser beam having the highest energy density is always at a position other than the lighting start region, sputtering in the light emitting envelope can be suppressed. Therefore, the life of the light source device can be sufficiently extended.
  • control unit lowers the emission energy of the laser beam from the laser unit when maintaining the laser support light with respect to the emission energy of the laser beam from the laser unit when the laser support light is turned on. In this case, since it is not necessary to mechanically move the condensing position of the laser light, the condensing position of the laser light can be maintained at an appropriate position.
  • the control unit separates the laser beam condensing position when the laser supporting light is maintained from the electron emitting structure with respect to the laser light condensing position when the laser supporting light is turned on. It is preferable to have a condensing position moving part that moves in the direction. In this case, when the laser supporting light is maintained, since the condensing position of the laser light is separated from the electron emission structure, it is possible to reliably suppress the electron emission structure from being sputtered.
  • the focusing position moving unit moves the position of the electron emission structure when the laser support light is maintained with respect to the position of the electron emission structure when the laser support light is turned on. It is preferable to have a structure moving part. In this case, the focusing position of the laser light can be easily separated from the electron emission structure by moving the electron emission structure.
  • the converging position moving unit determines the optical path length in the internal space of the laser light when the laser support light is maintained to the optical path length in the internal space of the laser light when the laser support light is turned on. It is preferable to have an optical path length adjustment unit that shortens the length. In this case, the optical path length adjustment unit keeps the laser beam condensing position at an appropriate position when the laser support light is lit, and easily separates the laser light condensing position from the electron emission structure when maintaining the laser support light. Can do.
  • the condensing position moving unit moves the condensing position of the laser light in a direction crossing the optical axis direction of the laser light.
  • the laser beam condensing position can be easily separated from the electron emission structure when maintaining the laser support light.
  • the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. It is preferable. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the optical system.
  • the light collecting position moving unit moves the light emitting envelope to move the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. It is preferable to have a part. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the light emitting envelope.
  • the electron emission structure is formed with a surface on which the condensing position of the laser beam is located when the laser support light is turned on, inclined with respect to the optical axis of the laser beam. It is preferable. With this configuration, it is possible to position the condensing position of the laser light on the surface of the electron emission structure without strictly adjusting the optical system.
  • FIG. 1 It is a figure which shows the light source device which concerns on 1st Embodiment of this invention. It is a figure which shows an example of the optical member (optical path length adjustment part) with which the light source device shown in FIG. 1 is provided. It is a figure which shows the state before the laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. It is a figure which shows the state at the time of laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. It is a figure which shows the state after the laser support light lighting (at the time of maintenance) of the optical member (optical path length adjustment part) shown in FIG.
  • FIG. 1 is a schematic view showing a light source device according to the first embodiment of the present invention.
  • the light source device 1 includes a laser unit 2 that emits continuous laser light, an optical system 3 that guides the continuous laser light L from the laser unit 2, and irradiation with the continuous laser light L. It is configured to include a metal structure (electron emission structure) 13 containing a radiating electron-emitting substance and a light emitting envelope 11 (light source 7) containing a luminescent gas G.
  • a metal structure electron emission structure
  • light source 7 containing a luminescent gas G.
  • the metal structure 13 when the metal structure 13 is irradiated with the continuous laser light L, plasma due to the emission gas G is generated in the irradiation region of the continuous laser light L in the vicinity of the metal structure 13.
  • plasma is generated when electrons emitted from the metal structure 13 by irradiation of the continuous laser light L ionize the light emission gas G and the ionized light emission gas G is irradiated with the continuous laser light L. It is guessed. Then, by continuously irradiating the generated plasma with continuous laser light L (continuously supplying laser energy to the plasma), the continuous laser light L is collected in the light emitting envelope 11 as the light source 7. It is possible to turn on and maintain high-luminance laser support light that is plasma light emission having a predetermined light-emitting region (lighting start region RS) including the light position F.
  • the laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
  • the laser unit 2 is, for example, a laser diode.
  • the laser unit 2 emits a continuous laser beam L having a wavelength matching the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm. Note that a pulse laser beam may be emitted from the laser unit 2.
  • the output of the continuous laser beam L is, for example, about 60W.
  • the continuous laser light L emitted from the laser unit 2 is guided to the optical system 3 by the optical fiber 4.
  • the optical system 3 is an optical system that condenses the continuous laser light L from the laser unit 2 toward the light emitting envelope 11.
  • the optical system 3 is composed of, for example, two lenses 5 and 6.
  • the continuous laser light L emitted from the head 4 a of the optical fiber 4 is collimated by the lens 5 and then condensed toward the light emitting envelope 11 by the lens 6 with the optical axis LA.
  • the diameter of the condensed continuous laser beam L is, for example, about 120 ⁇ m in diameter.
  • the light emitting envelope 11 contains a bulb (housing) 12 in which a light emitting gas G is sealed in a high pressure in the internal space S, and an easy-electron emitting material that emits electrons when irradiated with continuous laser light L. And the metal structure 13 to be configured.
  • the bulb 12 is formed hollow, for example, by glass, and includes a spherical portion (main body portion) 12a having a spherical outer diameter and a spherical inner space S and a part of the spherical portion 12a. And a protruding portion (protruding portion) 12b protruding in a columnar shape.
  • xenon gas as a luminescent gas G is sealed at a high pressure.
  • the top portion 12c located on the opposite side of the protruding portion 12b in the spherical portion 12a is an incident portion (laser incident window portion LW) of the continuous laser light L.
  • the laser incident window portion LW only needs to face the incident portion of the continuous laser light L in the metal structure 13 to be described later, and may be located in a portion other than the top portion 12c of the spherical portion 12a.
  • the metal structure 13 is formed of a refractory metal such as tungsten, for example, and includes an electron emission portion 13a containing, for example, barium as an easily radiating substance, and a support portion 13b that supports the electron emission portion 13a.
  • the electron emitting portion 13a irradiated with the continuous laser light L is formed in, for example, a thin cylindrical shape, and the tip 13c serving as the incident portion of the continuous laser light L is the top portion 12c (laser) of the bulb 12. It is disposed inside the spherical portion 12a so as to face the incident window portion LW).
  • the incident part of continuous laser beam L is not restricted to the front-end
  • the support portion 13b has a rod-like member 15 formed in a columnar shape by a high melting point metal such as molybdenum.
  • the electron emission portion 13a (tip 13c) is supported on the distal end side of the support portion 13b so as to be disposed at a desired position in the internal space S in the spherical portion 12a, and the proximal end side of the support portion 13b is It arrange
  • the electron emitting portion 13a and the support portion 13b do not necessarily have to be made of different constituent materials, and the support portion 13b may be formed integrally with the material used for the electron emitting portion 13a.
  • the base may be integrally formed of the same metal, and the electron emissive substance may be contained only in the portion corresponding to the electron emitting portion 13a.
  • the electron emission part 13a and the whole metal structure 13 may be comprised with the easy electron emission substance itself.
  • the electron emission structure is not limited to a metal structure formed of a metal (conductive material) substrate such as tungsten or molybdenum, and may be formed of an insulating substrate such as ceramic.
  • the metal structure 13 containing the easily electron emissive substance is accommodated in the bulb 12 in which the light emitting gas G is enclosed.
  • plasma is generated by irradiating the metal structure 13 with the continuous laser light L, and the plasma is continuously irradiated with the continuous laser light L.
  • Luminance laser support light can be lit and maintained in the lighting start region RS.
  • the light source device 1 includes an optical path length adjusting unit 51 for adjusting the optical path length of the continuous laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 51 adjusts the optical path length LL that is the length of the optical axis LA of the continuous laser light L from the laser incident window LW to the condensing position F in the internal space S of the bulb 12. To do.
  • the optical path length adjustment unit 51 for example, an optical member 8 as shown in FIG. 2 is used.
  • the optical member 8 includes a plate-shaped transparent medium 9 and a rod-shaped rotary actuator 10 that supports the transparent medium 9.
  • the transparent medium 9 can be rotated with respect to the axial direction of the rotary actuator 10 by the rotary actuator 10.
  • the optical member 8 is disposed so that the transparent medium 9 can be interposed between the optical system 3 and the light emitting envelope 11.
  • the transparent medium 9 is formed of a material having a refractive index higher than that of air (laser light irradiation atmosphere outside the light emitting envelope 11) such as synthetic quartz glass. Further, as shown in FIG. 2, the transparent medium 9 has a 3/4 circular planar shape, and the thickness of the continuous laser beam L in the direction of the optical axis LA for each 1/4 circle (the continuous laser beam L is transmitted). Different length). Specifically, the transparent medium 9 is adjacent to the first region R1 having a quarter circular planar shape having a thickness of, for example, about 2 mm and the first region R1, and has a thickness of, for example, about 4 mm.
  • the second region R2 having a quarter circular planar shape and the third region R3 having a quarter circular planar shape adjacent to the second region R2 and having a thickness of, for example, about 2 mm. It is configured.
  • a region where the transparent medium 9 is not sandwiched between the first region R1 and the third region R3 is referred to as a fourth region R4.
  • 3 to 5 are cut end views showing the operation of the optical member 8 (optical path length adjusting unit 51).
  • the first region R ⁇ b> 1 of the transparent medium 9 is interposed between the optical system 3 and the light emitting envelope 11 before the laser supporting light is turned on.
  • the continuous laser light L is refracted by the transparent medium 9, and the condensing position F of the continuous laser light L is located in a spatial region between the electron emitting portion 13a (metal structure 13) and the laser incident window LW side.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, about 260 kW / cm 2 .
  • the transparent medium 9 is rotated between the optical system 3 and the light emitting envelope 11 by rotating the transparent medium 9 from the state of FIG.
  • the second region R2 is interposed.
  • the condensing position F of the continuous laser light L is the condensing position F of the continuous laser light L before the laser support light LS is turned on. On the other hand, it moves to the metal structure 13 side.
  • the continuous laser light L is condensed on the substantially surface of the electron emission portion 13a (metal structure 13), and the surface (lighting) of the electron emission portion 13a (metal structure 13).
  • the energy density of the continuous laser light L in the start region RS) is, for example, about 530 kW / cm 2 .
  • the transparent medium 9 is rotated by the rotary actuator 10 from the state of FIG.
  • a fourth region R4 is interposed between the sealing body 11 and the sealing body 11.
  • the condensing position F of the continuous laser light L is continuous before the laser support light LS is turned on (FIG. 3) and when the laser support light LS is turned on (FIG. 4).
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, 260 kW / cm 2 or less.
  • the optical path length LL of the continuous laser light L in the internal space S is adjusted by adjusting the thickness of the transparent medium 9 interposed between the optical system 3 and the light emitting envelope 11, and the continuous laser light L
  • the condensing position F is moved.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state. More specifically, before the laser supporting light LS is turned on, the electron emitting portion 13a (metal structure 13) is irradiated with the continuous laser light L at an energy density that does not cause sputtering.
  • the metal structure 13) can be heated. Therefore, it is possible to easily emit electrons from the electron emitting portion 13a (metal structure 13) during the subsequent laser support light LS lighting, and it is easy to light the laser support light LS. Further, when the laser support light LS is turned on, the continuous laser light L can be applied to an appropriate position of the electron emitting portion 13a (metal structure 13) with an energy density sufficient for turning on the laser support light LS. The LS can be reliably turned on in the lighting start area RS. Then, after the laser support light LS is turned on (when the laser support light LS is maintained), the laser support light LS can be maintained and the energy density can be set such that sputtering does not occur in the metal structure 13.
  • the laser supporting light LS that is plasma emission is also emitted from the electron emitting portion 13a (since it is separated from the metal structure 13 (lighting start region RS), sputtering of the metal structure 13 by the laser support light LS can also be suppressed. Therefore, since the deterioration of the metal structure 13 and the contamination of the inner wall of the bulb 12 due to sputtering can be suppressed and the life of the light emitting envelope 11 (light source 7) can be increased, the life of the light source device can be sufficiently increased.
  • the second region R2 and the fourth region R4 are changed in the middle of changing the region interposed between the optical system 3 and the light emitting envelope 11 from the second region R2 to the fourth region R4.
  • a third region R3 having an intermediate thickness with respect to the region R4 is interposed.
  • the configuration of the optical member 8 can take other modes.
  • the optical member 8 may be composed of a light modulation element such as a spatial light modulation element.
  • the optical member 8 is a plate-shaped transparent medium 29 having a substantially uniform thickness in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted).
  • an optical member 28 constituted by an actuator 30 that holds the transparent medium 29.
  • the transparent medium 29 held by the actuator 30 moves in a direction substantially orthogonal to the optical axis LA of the continuous laser light L according to the state when the laser support light LS is turned on and after being turned on (during maintenance).
  • the continuous laser light L is condensed on, for example, the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Yes.
  • the transparent medium 29 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11 as shown in FIG.
  • the condensing position F of the continuous laser light L is continuous with respect to the condensing position F of the continuous laser light L when the laser supporting light LS is turned on.
  • the laser beam L moves to a position away from the metal structure 13 (lighting start region RS) in the direction of the optical axis LA. Therefore, even in this case, the sputtering of the metal structure 13 can be suppressed as in the first embodiment.
  • a transparent medium 39 as shown in FIG. 8A can be used instead of the transparent medium 29, for example.
  • the transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface so that the thickness of the continuous laser light L in the direction of the optical axis LA (the length through which the continuous laser light L passes) continuously changes.
  • the transparent medium 29 it is used while being held by the actuator 30.
  • the transparent medium 39 when the laser support light LS is turned on, the optical system 3 emits light so that, for example, the continuous laser light L is condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13).
  • a transparent medium 39 is interposed between the sealing body 11 and the sealing body 11.
  • the transparent medium 39 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11.
  • the condensing position F of the continuous laser light L gradually moves with the movement of the transparent medium 39, and the metal structure 13 (lighting start region RS).
  • the emission region of the laser support light LS can also be gradually moved away from the metal structure 13 (lighting start region RS). Accordingly, since the plasma can be easily maintained by overlapping a part of the light emitting region before and after the converging position F of the continuous laser light L is moved, the laser supporting light LS can be easily maintained.
  • a transparent medium 49 as shown in FIG. 8B can be used instead of the transparent medium 29, for example.
  • the transparent medium 49 is formed by joining two members having different thicknesses in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted).
  • the first member has a thickness of about 4 mm, for example.
  • the transparent medium 49a and the second transparent medium 49b having a thickness of, for example, about 2 mm are joined at the end surfaces.
  • the transparent medium 49 when the laser support light LS is turned on, for example, the continuous laser light L is emitted from the optical system 3 so as to be condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). A first transparent medium 49 a is interposed between the sealing body 11 and the sealing body 11. Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 49 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11. At this time, since the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the condensing position F of the continuous laser light L is gradually increased with the movement of the transparent medium 49.
  • the emission region of the laser support light LS can also be moved stepwise away from the metal structure 13 (lighting start region RS). Therefore, since it becomes easy for some of the light emitting regions to overlap each other before and after the converging position F of the continuous laser light L is moved, it is easy to maintain the plasma, and thus it is easy to maintain the laser support light LS.
  • FIGS. 9 and 10 are diagrams showing a light source device according to the second embodiment of the present invention.
  • the description which overlaps with 1st Embodiment is abbreviate
  • the optical system 3 and the head 4 a of the optical fiber 4 are accommodated in the housing 17.
  • the casing 17 is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and the actuator 18 (optical) according to the state when the laser support light LS is turned on and after being turned on (maintained).
  • the system moving unit 52) moves the continuous laser light L in the direction of the optical axis LA.
  • the housing 17 condenses, for example, the continuous laser light L on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Is held in such a position.
  • the housing 17 has a condensing position F of the continuous laser light L with respect to a condensing position F when the laser supporting light LS is turned on.
  • the actuator 18 is moved along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
  • the metal structure 13 (lighting start) can be easily performed with the simple configuration in which the housing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). Can be separated from the region RS).
  • the housing 17 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position F of the continuous laser light L after the laser support light LS is turned on (during maintenance). Is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is turned on, the movement direction of the housing 17 is continuous laser light.
  • the direction may be different from the direction of the optical axis LA of L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
  • FIGS. 11 and 12 are diagrams showing a light source device according to the third embodiment of the present invention.
  • the light source device according to the third embodiment will be described, but the description overlapping with the first and second embodiments will be omitted.
  • the light emitting envelope 11 is held by the actuator 18 (light emitting envelope moving unit 53), and when the laser supporting light LS is turned on and after being turned on (maintained). Depending on the state, it is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18 (light emitting envelope moving part 53) as a condensing position moving part.
  • the light emitting envelope 11 when the laser support light LS is turned on, the light emitting envelope 11 has the continuous laser light L condensed, for example, on the substantially surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). Is held in such a position.
  • the light emitting envelope 11 after the laser supporting light LS is turned on (during maintenance), the light emitting envelope 11 has the condensing position F of the continuous laser light L at the condensing position F when the laser supporting light LS is turned on.
  • the actuator 18 is moved along, for example, the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
  • the light emitting envelope 11 is moved by the actuator 18 (light emitting envelope moving unit 53), and the condensing position F of the continuous laser beam L can be easily moved to the metal structure 13 (lighting start region RS). Can be separated from
  • the light emitting envelope 11 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position of the continuous laser light L after the laser supporting light LS is turned on (during maintenance). If F is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is lit, the moving direction of the light emitting envelope 11 is continuous.
  • the direction may be different from the direction of the optical axis LA of the laser light L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
  • FIG. 13 and 14 are views showing a light emitting envelope constituting a light source device according to a fourth embodiment of the present invention.
  • the light emitting envelope constituting the light source device according to the fourth embodiment will be described, but the description overlapping with the first to third embodiments will be omitted.
  • the light emitting envelope 61 has a small-diameter portion 16 that holds the rod-shaped member 15 that is the support portion 13 b.
  • the small-diameter portion 16 is provided by using a part of the inner wall of the protruding portion 12b, and the protruding portion 12b has a smaller inner diameter than other portions so as to contact the rod-shaped member 15.
  • the small diameter portion 16 is only in contact with the peripheral surface of the rod-shaped member 15 and is not fused to the rod-shaped member 15.
  • the small diameter portion 16 may be provided closer to the base end (lower side of the drawing) than the position illustrated in FIGS. 13 and 14, or may be provided closer to the distal end side (upper side of the drawing). Further, a plurality of small diameter portions 16 may be provided.
  • the metal structure 13 (electron emission structure) is provided with a large-diameter portion 13d provided so as to be able to come into contact with the small-diameter portion 16 at an end portion of the rod-like member 15 passed through the small-diameter portion 16. ing. Further, a coil 14 (electron emission structure moving portion 54) is provided as a condensing position moving portion on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d.
  • the coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15 so that the large-diameter portion 13d on the rod-shaped member 15 side abuts on the small-diameter portion 16 on the protruding portion 12b side.
  • the metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state of LS lighting and after lighting (during maintenance).
  • the metal structure 13 when the laser support light LS is turned on, the metal structure 13 is irradiated with, for example, a continuous laser beam L by the magnetic force applied from the coil 14 (electron emission structure moving unit 54).
  • the metal structure 13) is held at a position where light is condensed on the substantially surface (lighting start region RS).
  • the metal structure 13 after the laser support light LS is turned on (during maintenance), the metal structure 13 has the condensing position F of the continuous laser light L by stopping the application of the magnetic force from the coil 14.
  • the laser beam LS moves along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS) with respect to the condensing position F when the laser support beam LS is lit.
  • the metal structure 13 is moved by the coil 14 (electron emission structure moving portion 54), so that the condensing position F of the continuous laser light L can be easily changed. It can be separated from (lighting start area RS). Furthermore, in this case, since the movement of the condensing position F of the continuous laser light L does not require movement or adjustment of the optical system 3 and the valve 12, the optical conditions in the irradiation path of the continuous laser light L can be kept constant. And the condensing position of the continuous laser beam L can be maintained at an appropriate position.
  • the light emitting envelope 61 can take other forms.
  • the spacer member 19 fitted to the inner wall of the protruding portion 12b so that the rod-like member 15 is inserted, and the end of the rod-like member 15 passed through the spacer member 19 And a large-diameter portion 13 d provided so as to be able to contact the small-diameter portion 16.
  • the coil 14 is provided on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d, and the large diameter portion 13d on the rod-like member 15 side is the spacer. A magnetic force is applied to the rod-shaped member 15 so as to come into contact with the member 19.
  • the coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15, so that the laser support light LS is turned on (FIG. 15 (a)) and The metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state after lighting (during maintenance) (FIG. 15B).
  • FIG. 16 is a diagram showing a light source device according to the fifth embodiment of the present invention.
  • the light source device 41 includes a control unit 55 that adjusts the emission energy of the continuous laser light L emitted from the laser unit 2.
  • the optical system 3 condenses the continuous laser light L at a position separated from the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). In other words, the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is always irradiated with the continuous laser light L in the defocused state.
  • FIG. 17 is a diagram illustrating the operation of the control unit 55.
  • the control unit 55 determines the condensing position F of the continuous laser light L on the surface of the electron emission unit 13a (metal structure 13) (lighting start region RS).
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is set so that the laser supporting light LS can be turned on (for example, 530 kW / cm 2).
  • the emission energy of the continuous laser beam L emitted from the laser unit 2 is set so that Thereby, the continuous laser light L irradiated to the surface (lighting start area
  • the control unit 55 changes the condensing position F of the continuous laser light L to the position (FIG. 17 (a)), the emission energy of the continuous laser light L emitted from the laser unit 2 is set lower than the emission energy of the continuous laser light L when the laser support light LS is turned on.
  • the control unit 55 sets the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission unit 13a (metal structure 13), for example, 530 kW / cm 2 when the laser support light LS is turned on. About 260 kW / cm 2 is set.
  • the laser support light LS is sent from the metal structure 13 (lighting start area
  • the continuous laser light L emitted from the laser unit 2 is condensed at a position separated from the surface of the metal structure 13 (lighting start region RS), and the emission energy of the continuous laser light L is increased. Adjustment is performed by the control unit 55. That is, in the light source device 41, the surface of the metal structure 13 (lighting start region RS) is always irradiated with the continuous laser light L in the defocused state, and further, the electron emitting portion 13a (metal structure) when the laser support light LS is maintained.
  • the surface of the metal structure 13 is locally sputtered. Can be suppressed. Therefore, the life of the metal structure 13 can be extended. Further, in the light source device 41, it is not necessary to mechanically move the condensing position F of the continuous laser light L, so that the condensing position of the continuous laser light L can be maintained at an appropriate position, and the optical system 3 or Since a device for moving the light emitting envelope 11 is not required, the light source device can be downsized.
  • the continuous laser light L may be irradiated from a direction in which the optical axis LA of the continuous laser light L and the axis in the extending direction of the metal structure 13 are coaxial with each other as described above. Irradiation may be performed from a direction in which the optical axis LA of L and the axis in the extending direction of the metal structure 13 intersect each other.
  • FIGSixth Embodiment 18 to 20 are views showing a light source device according to the sixth embodiment of the present invention.
  • the light source device according to the sixth embodiment will be described, but the description overlapping with the first to fifth embodiments will be omitted.
  • the continuous laser light L is in the extending direction of the optical axis LA of the continuous laser light L and the metal structure 13 with respect to the light emitting envelope 91 (light source 7). Irradiation is from a direction where the axes intersect each other.
  • the continuous laser beam L is irradiated from a direction in which the optical axis LA of the continuous laser beam L and the axis in the extending direction of the metal structure 13 are substantially orthogonal to each other, and the bulb 12 (particularly Of the spherical portion 12a), the side portion 12d positioned laterally with respect to the axis of the extending direction of the metal structure 13 is the incident portion (laser incident window portion LW) of the continuous laser beam L.
  • the optical system 3 includes the continuous laser beam so that the position of the condensing position F of the continuous laser beam L in the direction of the optical axis LA is substantially the surface (lighting start region RS) of the electron emission unit 13a.
  • a holding part 13f for holding the electron emission part 13a is provided on the distal end side of the rod-like member 15 (supporting part 13b) of the metal structure 13, and a holding part 13f and a stick-like member are provided on the base end side of the holding part 13f.
  • 15 (a supporting portion 13b) is formed with a reduced diameter portion 13e that is reduced in diameter so as to be narrower than the proximal end side (base end portion 13g).
  • the reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side.
  • the housing 17 in which the optical system 3 and the head 4a of the optical fiber 4 are accommodated is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and is supported by the laser.
  • the housing 17 is held at a position where the continuous laser light L is irradiated to the holding portion 13f of the rod-like member 15 (support portion 13b), for example. Has been.
  • the holding portion 13f has a larger diameter than the electron emitting portion 13a, the surface of the holding portion 13f is positioned closer to the laser incident window LW than the surface of the electron emitting portion 13a.
  • the continuous laser beam L is apparently condensed at a virtual condensing position F ′ inside the holding portion 13f and defocused to an energy density that does not cause sputtering on the substantially surface of the holding portion 13f. Irradiated with.
  • the housing 17 At the time of turning on the laser support light LS, as shown in FIG. 19, the housing 17 is moved to a position where the continuous laser light L is applied to the electron emitting portion 13a. At this time, the condensing position F of the continuous laser beam L is located on the substantially surface (lighting start region RS) of the electron emitting portion 13a. After the laser support light LS is turned on (during maintenance), as shown in FIG. 20, the housing 17 has electrons at which the condensing position F of the continuous laser light L is compared with the condensing position F when the laser support light LS is turned on.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) when the laser supporting light LS is maintained is defined as the electron emitting portion 13a (metal) when the laser supporting light LS is turned on.
  • the energy density of the continuous laser beam L on the surface (lighting start region RS) of the structure 13) can be lowered.
  • the condensing position F of the continuous laser light L can be easily made into a metal structure with a simple configuration in which the casing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). It can be separated from the body 13 (lighting start region RS) in a direction (direction along the axis of the extending direction of the metal structure 13) intersecting the optical axis LA direction of the continuous laser light L.
  • the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state.
  • the continuous laser light L is irradiated to the holding portion 13f of the rod-shaped member 15 (support portion 13b) in a defocused state with an energy density that does not cause sputtering.
  • the holding portion 13f is heated without being sputtered, and accordingly, the temperature of the electron emitting portion 13a (metal structure 13) also rises.
  • the reduced diameter portion 13e is formed, the heat conduction path from the holding portion 13f to the base end portion 13g side is limited, so that the electron emitting portion 13a (metal structure body) by the continuous laser light L irradiation.
  • the heating of 13) can be performed more efficiently.
  • the rod-shaped member 15 (support portion 13b) is made of a high melting point metal such as molybdenum or tungsten that can withstand the heating.
  • the continuous laser light L can be applied to the surface of the electron emission portion 13a (lighting start region RS) with an energy density sufficient for turning on the laser support light LS. It can be lit reliably. Then, after the laser support light LS is turned on (during maintenance), the continuous laser light L is applied to the laser support light LS moved to the space region of the internal space S separated from the metal structure 13 (lighting start region RS). The laser support light LS is maintained by irradiation.
  • the life of the light source device can be sufficiently increased.
  • the reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side. However, the reduced diameter portion 13e enters the spherical portion 12a.
  • the reduced diameter portion 13e may be formed continuously to the base end side of the rod-shaped member 15 (support portion 13b).
  • the electron emission part 23a was formed in the cylindrical shape of a small diameter, as shown in FIG. 21, the electron emission part 23a is, for example, the rod-shaped member 15 (support part 13b).
  • You may have the thin cylindrical part 24 extended in the axial direction extended, and the inclination part 25 provided in the front end side of the cylindrical part 24.
  • the inclined portion 25 is formed with an inclined surface 25a inclined with respect to the axis in the extending direction of the cylindrical portion 24.
  • the inclined surface 25a is also inclined with respect to the optical axis LA of the continuous laser beam L. Yes.
  • FIG. 22 is an enlarged view of a main part showing the operation of the electron emitting portion 23a (metal structure 23).
  • the laser support light LS when the laser support light LS is turned on, it is preferable to focus the condensing position F of the continuous laser light L so that it is positioned on the substantially surface of the electron emitting portion 23a. May require precise adjustment. Even if the condensing position F of the continuous laser light L is not the substantially surface of the electron emission portion 23a, the laser support light LS is turned on if the energy density of the continuous laser light L on the approximate surface of the electron emission portion 23a is sufficiently high. Yes, but that requires a higher power laser.
  • the present embodiment it is possible to give a margin to the positional accuracy of the condensing position F of the continuous laser light L in the optical axis LA direction without changing the output of the laser.
  • a virtual collection point with a positional accuracy of a degree that the condensing position F of the continuous laser light L in the electron emission part 23a is surely contained in the cylindrical part 24 in the direction of the optical axis LA is obtained.
  • the virtual condensing position F ′ of the continuous laser beam L is moved from the rod-shaped member 15 (supporting portion 13b) side to the inclined portion 25 side in the direction along the axis of the extending direction of the cylindrical portion 24.
  • the housing 17 is moved by the actuator 18.
  • the condensing position F of the continuous laser beam L is reliably positioned at any position on the substantially surface of the inclined surface 25a in the inclined portion 25 of the electron emitting portion 23a. Therefore, the laser support light LS can be turned on.
  • the condensing position F of the continuous laser light L is placed at any position on the surface of the electron emitting portion 23a.
  • An inclined surface 25a for positioning is formed.
  • the condensing position F of the continuous laser light L is substantially the surface of the inclined surface 25 a. Since it can be surely positioned at any of the above positions, the laser support light LS can be turned on.
  • the continuous laser beam L on the surface of the cylindrical portion 24 when the continuous laser beam L is irradiated onto the cylindrical portion 24 (FIG.
  • the electron emitting portion 23a is heated by irradiating the cylindrical portion 24 with the continuous laser light L, and the laser support during the subsequent irradiation of the inclined surface 25a with the continuous laser light L is performed. There exists an effect which makes lighting of light LS easy.
  • the condensing position F of the continuous laser light L is moved by the actuator 18 (the optical system moving unit 52). However, the condensing position F of the continuous laser light L is moved by adjusting the optical system 3. You may let them. Further, by applying the light emitting envelope moving unit 53 described in the third embodiment, the condensing position F of the continuous laser light L may be moved, and the electron emission structure moving described in the fourth embodiment is performed. The condensing position F of the continuous laser light L may be moved by applying the unit 54.
  • the deterioration of the metal structure 13 due to sputtering and the contamination of the inner wall of the bulb 12 can be suppressed, and the life of the light emitting envelope 11 (light source 7) can be increased.
  • the lifetime can be extended sufficiently as an apparatus.
  • the laser support light LS is moved and maintained on the optical axis LA of the continuous laser light L or the movement direction axis of the continuous laser light L at the time of lighting. It may be moved to an arbitrary position in the space area. In this case, a position where the influence of the laser support light LS on the metal structure can be further reduced is selected, or a position suitable for taking out the laser support light LS from the light source 7 is selected in accordance with an external optical system or the like. can do. Further, even when the reduced diameter portion 13e is adopted in the embodiments other than the sixth embodiment, the heating efficiency of the electron emission portion 13a (metal structure 13) is improved, and the electron emission portion 13a (metal structure 13) is changed to an electron. Can be easily released.
  • FIG. 23 is a schematic view showing a light source device according to the seventh embodiment of the present invention.
  • the light source device 101 houses a laser unit 102 that emits laser light, an optical system 103 that guides laser light L from the laser unit 102, and counter electrodes 113 and 113 that face each other.
  • the light emitting envelope 111 (light source 107) is included.
  • a discharge is generated between the counter electrodes 113, 113, and the discharge region is irradiated with laser light, whereby the condensing position F of the laser light L in the light emitting envelope 111, which is the light source 107.
  • the laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
  • the laser unit 102 is, for example, a laser diode.
  • the laser unit 102 either a continuous laser or a pulsed laser may be used, but in this embodiment, a continuous laser is used.
  • the laser unit 102 emits a laser beam L having a wavelength matched to the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm.
  • the output of the laser beam L is, for example, about 30W.
  • Laser light L emitted from the laser unit 102 is guided to the optical system 103 by the optical fiber 104.
  • the optical system 103 is an optical system that guides the laser light L from the laser unit 102 between the counter electrodes 113 and 113.
  • the optical system 103 includes, for example, two lenses 105 and 106.
  • the laser light L emitted from the head 104 a of the optical fiber 104 is collimated by the lens 105 and then condensed toward the light emitting envelope 111 by the lens 106 with the optical axis LA.
  • the diameter of the condensed laser beam L is, for example, about 120 ⁇ m in diameter.
  • the light emitting envelope 111 includes a bulb (housing) 112 in which a light emitting gas G is sealed in a high pressure in the internal space S, and counter electrodes 113 and 113 facing each other in the internal space S. It is configured.
  • the bulb 112 is formed hollow by glass, for example. In the internal space S of the bulb 112, for example, xenon gas as a luminescent gas G is sealed at a high pressure.
  • the counter electrodes 113 and 113 are formed in a rod shape from a high melting point metal such as tungsten, for example, and are opposed to each other on the tip side.
  • the base end side of the counter electrode 113 passes through the wall portion of the bulb 112, is drawn out of the bulb 112, and is connected to a power supply member 114 connected to a power supply portion (not shown), thereby discharging between the electrodes. Is supplied to the counter electrodes 113, 113.
  • the counter electrodes 113 and 113 do not directly penetrate the wall portion of the valve 112, but a conductive member electrically connected to the counter electrodes 113 and 113 penetrates the wall portion of the valve 112 to the outside of the valve 112. It may be pulled out and connected to the power supply member 114.
  • a high voltage is applied between the counter electrodes 113 and 113 via the power supply member 114, whereby a discharge region is formed in the counter electrodes 113 and 113.
  • the luminescent gas G is ionized and converted into plasma.
  • the high-luminance laser support light is turned on in the lighting start region RS, and the laser support light is continuously irradiated to the laser support light, whereby the counter electrodes 113 and 113 are used. Even if the power supply to is stopped, the laser support light is maintained by receiving the energy supply by the laser light L.
  • the laser beam L may be condensed in the discharge region in advance, and then the discharge region may be formed between the counter electrodes 113 and 113. Further, after the laser supporting light is turned on, the power supply to the counter electrodes 113 and 113 may be stopped or the power supply may be continued.
  • the light source device 101 includes an optical path length adjusting unit 151 for adjusting the optical path length of the laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 151 adjusts the optical path length LL that is the length of the optical axis LA of the laser light L from the inner wall of the bulb 112 to the condensing position F in the internal space S of the bulb 112.
  • the optical path length adjustment unit 151 for example, an optical member 108 as shown in FIG. 23 is used.
  • the optical member 108 includes a plate-shaped transparent medium 109 having a substantially uniform thickness in the optical axis LA direction of the laser light L (a length through which the laser light L is transmitted) and an actuator 110 that holds the transparent medium 109. ing.
  • the transparent medium 109 is made of a material having a higher refractive index than air (laser light irradiation atmosphere outside the light emitting envelope 111) such as synthetic quartz glass.
  • the transparent medium 109 held by the actuator 110 is in a direction substantially orthogonal to the optical axis LA of the laser light L in accordance with each of the laser support light LS lighting (FIG. 24) and after lighting (maintenance) (FIG. 25). Moving.
  • the transparent medium 109 is interposed between the optical system 103 and the light emitting envelope 111, and is arranged so that the entire region in the cross-sectional direction of the laser light L passes through the transparent medium 109.
  • the laser beam L is focused on a discharge path that is most likely to be discharged, for example, on a line X connecting the tip portions of the counter electrodes 113 and 113, that is, in a discharge region between the counter electrodes 113 and 113. is doing.
  • the energy density of the laser light L at the condensing position F (lighting start region RS) on the line X is, for example, about 260 kW / cm 2 .
  • the laser beam L is irradiated to the plasma generated in the discharge region (lighting start region RS) between the counter electrodes 113 and 113, and the laser support light LS is turned on.
  • the transparent medium 109 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111 as shown in FIG.
  • the condensing position F of the laser light L moves to the near side (upper side in FIG. 25) in the optical axis LA direction with respect to the condensing position F of the laser light L when the laser support light LS is turned on. Therefore, the energy density of the laser beam L on the line X (lighting start region RS) is the energy density of the laser beam L on the line X (lighting start region RS) when the laser support light LS is lit (maintained) (FIG. 24). Decreasing with respect to energy density.
  • the laser support light LS that is plasma emission is also the counter electrodes 113 and 113 (lighting start region RS). Therefore, sputtering of the counter electrodes 113 and 113 by the laser support light LS can be suppressed.
  • the energy density of the laser light L at the condensing position F is made smaller than the time when the laser support light LS is turned on to the extent that the laser support light LS can be maintained, or power supply to the counter electrodes 113 and 113 is stopped.
  • sputtering of the counter electrodes 113 and 113 can be further suppressed. Therefore, the light emitting envelope 111 and the light source device 101 can have a sufficiently long life.
  • the configuration of the optical member 108 can take other modes.
  • the optical member 108 may be composed of a light modulation element such as a spatial light modulation element.
  • a transparent medium 39 instead of the transparent medium 109, for example, a transparent medium 39 as shown in FIG.
  • the transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface, so that the thickness of the laser beam L in the direction of the optical axis LA (the length through which the laser beam L passes) changes continuously. In the same manner as the transparent medium 109, it is used while being held by the actuator 110.
  • the transparent medium 39 When the transparent medium 39 is used, first, the transparent medium 39 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire area in the cross-sectional direction of the laser light L passes through the transparent medium 39.
  • the light is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
  • the transparent medium 39 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111.
  • the thickness of the transparent medium 39 in the region where the laser light L is incident gradually decreases as the transparent medium 39 moves. Therefore, the condensing position F of the laser light L gradually moves toward the front side (upper side in FIG. 24) in the direction of the optical axis LA as the transparent medium 39 moves.
  • a region having an energy density sufficient to maintain the laser support light LS gradually moves toward the front side in the direction of the optical axis LA.
  • the condensing position F of the laser light L is moved to the near side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is continuous. Since it moves, the laser support light LS is more reliably maintained.
  • a transparent medium 49 as shown in FIG. 8B can be used instead of the transparent medium 109.
  • the transparent medium 49 is a first transparent medium having, for example, a thickness of about 4 mm, in which two members having different thicknesses in the optical axis LA direction of the laser light L (length through which the laser light L passes) are joined.
  • 49a and the 2nd transparent medium 49b which has thickness of about 2 mm, for example, have the structure joined to mutual end surfaces.
  • the transparent medium 49 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire cross-sectional area in the laser light L passes through the first transparent medium 49a.
  • the light L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113.
  • the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
  • the transparent medium 49 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111.
  • the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the thickness of the transparent medium 49 in the region where the laser light L is incident gradually decreases as the transparent medium 49 moves.
  • the condensing position F of the laser light L is gradually moved to the near side (upper side in FIG. 24) in the optical axis LA direction as the transparent medium 49 is moved.
  • a region having an energy density sufficient to maintain the laser support light LS is moved stepwise toward the optical axis LA direction.
  • the condensing position F of the laser light L is moved to the front side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is stepwise. Since the movement is small, the laser support light LS is more reliably maintained.
  • the condensing position F of the laser beam L after the laser support light LS lighting is from the line X (lighting start area
  • region RS which connects between the cusps of the counter electrodes 113 and 113.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on is the tip of the counter electrodes 113, 113. It may be a position on the back side (lower side in FIG. 23) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the heads.
  • the laser beam L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113.
  • the entire region of the laser light L in the cross-sectional direction passes between the transparent medium 109 and the optical system 103 and the light emitting envelope 111.
  • a transparent medium 109 is interposed.
  • the condensing position F of the laser light L is the back side in the optical axis LA direction (the lower side in FIG. 26) with respect to the condensing position F (lighting start region RS) of the laser light L when the laser support light LS is turned on. Will be moved to. Therefore, even in this case, similarly to the seventh embodiment, sputtering of the counter electrode 113 can be suppressed.
  • FIGS. 28 and 29 are views showing a light source device according to the eighth embodiment of the present invention.
  • the light source device according to the eighth embodiment will be described, but the description overlapping with the seventh embodiment will be omitted.
  • the optical system 103 and the head 104 a of the optical fiber 104 are accommodated in a housing 117.
  • the casing 117 is held by the actuator 118 (optical system moving unit 152), and the laser support light LS is turned on in the direction of the optical axis LA according to lighting (FIG. 28) and after lighting (maintenance) (FIG. 29).
  • the actuator 118 optical system moving unit 152
  • the housing 117 is at a position where the laser light L is condensed on a line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113, for example. Is retained. Thereby, the laser support light LS is turned on in the discharge region between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 29, the casing 117 moves to the near side (upper side in FIG. 28) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (upper side in FIG.
  • the energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 after the support light LS is turned on (during maintenance) is equal to the counter electrode 113 when the laser support light LS is turned on. It decreases with respect to the energy density of the laser beam L on the line X (lighting start region RS) connecting the cusp 113.
  • the condensing position F of the laser beam L is moved (between the counter electrodes 113, 113) by a simple configuration in which the casing 117 including the optical system 103 is moved by the actuator 118 (optical system moving unit 152).
  • the energy density of the laser light L on the line X (lighting start area RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 121 can be sufficiently extended.
  • the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) is more optical than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) connects the pointed heads of the counter electrodes 113 and 113. It may be a position on the far side (downward side in FIG. 28) in the optical axis LA direction from the line X (lighting start region RS).
  • the holding position of the casing 117 after the laser supporting light LS is turned on (during maintenance) is the back side in the optical axis LA direction (the lower side in FIG. 28) with respect to the holding position of the casing 117 when the laser supporting light LS is turned on. ).
  • FIGS. 30 and 31 are views showing a light source device according to the ninth embodiment of the present invention.
  • the light source device according to the ninth embodiment will be described below, but the description overlapping with the seventh and eighth embodiments will be omitted.
  • the light emitting envelope 111 is held by the actuator 118 (light emitting envelope moving unit 153), and when the laser supporting light LS is turned on (FIG. 30) and after lighting ( (At the time of maintenance) (FIG. 31) It moves to optical axis LA direction according to each.
  • the light emitting envelope 111 is, for example, a position where the laser light L is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Is held by. Thereby, the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 31, the light emitting envelope 111 moves to the back side (right side in FIG. 30) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (left side in FIG.
  • the condensing position F of the laser light L is moved (between the counter electrodes 113 and 113 (lighting start region) with a simple configuration in which the light emitting envelope 111 is moved by the actuator 118 (light emitting envelope moving unit 153).
  • the energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 131 can be sufficiently extended.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is lighter than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is the peak of the counter electrodes 113 and 113. It may be a position on the back side (right side in FIG. 30) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the parts.
  • the holding position of the light emitting envelope 111 after the laser supporting light LS is turned on (during maintenance) is the front side in the optical axis LA direction (in FIG. 30) with respect to the holding position of the light emitting envelope 111 when the laser supporting light LS is turned on. (Left side)
  • FIG. 32 is a diagram showing a light source device according to the tenth embodiment of the present invention.
  • the light source device 141 includes a control unit 154 that adjusts the emission energy of the laser light L emitted from the laser unit 102.
  • the optical system 103 is, for example, a position on the near side (upper side in FIG. 32) in the optical axis LA direction with respect to the line X connecting the laser light L between the cusps of the counter electrodes 113 and 113. It is condensed with
  • FIG. 33 is a diagram illustrating the operation of the control unit 154.
  • the control unit 154 first sets the condensing position F of the laser light L at a position separated from the counter electrodes 113, 113 (lighting start region RS),
  • the laser beam 102 is emitted from the laser unit 102 so that the energy density of the laser light L in the line X (lighting start region RS) connecting the cusp 113 is such that the laser support light LS can be lit (for example, about 260 kW / cm 2 ).
  • the emission energy of the laser beam L to be set is set.
  • the laser beam L in the line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113 can be turned on while the laser beam L is in a defocused state.
  • the control unit 154 sets the condensing position F of the laser light L to the position at the time of laser support light LS lighting (FIG. 33 ( While maintaining the position a), the emission energy of the laser beam L emitted from the laser unit 102 is set lower than the emission energy of the laser beam L when the laser support light LS is turned on.
  • the laser support light LS is sent from the counter electrodes 113 and 113 (lighting start area
  • the light source device 141 controls the emission energy of the laser beam L emitted from the laser unit 102 while always condensing the laser beam L at a position separated from the space between the counter electrodes 113 and 113 (lighting start region RS).
  • region RS) which connects between the cusps of the counter electrodes 113 and 113 can be changed. Therefore, since the condensing position F of the laser beam L with the highest energy density is not always located between the counter electrodes 113 and 113 (lighting start region RS), sputtering of the counter electrode 113 can be suppressed, and the light source device 141 A sufficiently long life is achieved.
  • the light source device 141 it is not necessary to mechanically move the condensing position F of the laser light L, so that the condensing position of the laser light L can be maintained at an appropriate position, and the optical system 103 and the light-emitting envelope can be maintained. Since a device for moving the body 111 is not required, the light source device can be reduced in size.
  • the optical system 103 has the laser beam L on the near side in the optical axis LA direction (upward in FIG. 32) above the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the laser beam L is condensed in the optical axis LA direction (on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113.
  • the light may be condensed on the lower side in FIG. Even in this case, the sputtering of the counter electrode 113 can be suppressed by adjusting the emission energy of the laser light L emitted from the laser unit 102 by the control unit 154 as in the tenth embodiment.
  • the condensing position F (laser support light LS) has moved in the direction of the optical axis LA of the laser light L, but the laser light L after the laser support light LS is turned on (during maintenance). If the condensing position F of the laser beam L is a position away from the counter electrode 113 (lighting start region RS) with respect to the condensing position F of the laser light L when the laser support light LS is lit, the optical axis LA of the laser light L You may move to the direction (for example, the direction which crosses the optical axis LA of the laser beam L) different from a direction.

Abstract

　In this light source device (1), a controller sets the energy density of laser light (L) in an illumination start region (RS) during laser support light maintenance so as to be lower than the energy density of laser light (L) in the illumination start region (RS) during laser support light illumination. Therefore, during laser support light maintenance, laser light (L) is beamed onto the illumination start region (RS) at an energy density at which sputtering does not occur. Therefore, in this light source device (1), sputtering in an emission sealed body (11) can be inhibited, making it possible to sufficiently extend the lifespan.

Description

光源装置Light source device
　本発明は、光源装置に関する。 The present invention relates to a light source device.
　従来、発光ガスを封入した発光封体の筐体内にレーザ光を照射し、発生したプラズマを利用する光源装置がある（例えば特許文献１，２を参照）。例えば特許文献１に記載の光源装置では、ガラス製の筐体内に配置した対向電極間に給電することで電極間の放電によるプラズマを発生させ、当該プラズマにレーザ光を継続して照射することでプラズマ発光であるレーザ支持光を点灯・維持している。また、例えば特許文献２に記載の光源装置では、キセノンランプ内に配置された電子放出金属にパルスレーザ光を照射することでパルス状のプラズマ発光を点灯させている。 Conventionally, there is a light source device that uses a generated plasma by irradiating a laser beam in a housing of a light emitting envelope in which a light emitting gas is sealed (see, for example, Patent Documents 1 and 2). For example, in the light source device described in Patent Document 1, plasma is generated by discharge between electrodes by supplying power between opposing electrodes arranged in a glass casing, and laser light is continuously irradiated to the plasma. Laser support light, which is plasma emission, is lit and maintained. In addition, for example, in the light source device described in Patent Document 2, pulsed plasma emission is turned on by irradiating an electron-emitting metal disposed in a xenon lamp with pulsed laser light.
特表２００９－５３２８２９号公報Special table 2009-532829 特開平４－１４４０５３号公報JP-A-4-144053
　しかしながら、例えば特許文献１に記載の光源装置では、対向電極間でプラズマが発生し続けることによって対向電極がスパッタリングされ、対向電極の消耗によって発光封体の寿命が短くなるおそれがあった。また、スパッタリングされた物質が筐体の内壁に付着することでレーザ光の入射やレーザ支持光の取出しが阻害されるため、レーザ支持光の発光強度が徐々に低下していき、発光封体としての寿命が短くなるおそれがあった。 However, in the light source device described in Patent Document 1, for example, the plasma is continuously generated between the counter electrodes, the counter electrode is sputtered, and the life of the light emitting envelope may be shortened due to consumption of the counter electrode. In addition, since the sputtered material adheres to the inner wall of the housing, the incidence of laser light and the removal of the laser support light are hindered, so that the emission intensity of the laser support light gradually decreases, and as a light emitting envelope There was a risk of shortening the lifespan.
　また、例えば特許文献２に記載の光源装置に対して、パルス状のプラズマ発光を連続光とするためには、パルスレーザ光に代えて連続レーザ光を用いることが考えられる。しかしながら、連続レーザ光を電子放出金属に照射し続けた場合、電子放出金属が連続レーザ光によってスパッタリングされ、電子放出金属の消耗によって発光封体の寿命が短くなるおそれがあった。また、スパッタリングされた物質が筐体の内壁に付着することでレーザ光の入射やレーザ支持光の取出しが阻害されるため、レーザ支持光の発光強度が徐々に低下していき、発光封体の寿命が短くなるおそれがあった。 Further, for example, in order to use pulsed plasma emission as continuous light for the light source device described in Patent Document 2, it is conceivable to use continuous laser light instead of pulsed laser light. However, when the electron-emitting metal is continuously irradiated with the continuous laser beam, the electron-emitting metal is sputtered by the continuous laser beam, and the life of the light emitting envelope may be shortened due to the consumption of the electron-emitting metal. Also, since the sputtered material adheres to the inner wall of the housing, the incidence of laser light and the removal of the laser support light are hindered, so the emission intensity of the laser support light gradually decreases, and the light emitting envelope There was a risk of shortening the service life.
　本発明は、上記課題の解決のためになされたものであり、筐体内でのスパッタリングを抑制し、十分な長寿命化が図られる光源装置を提供することを目的とする。 The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a light source device that suppresses sputtering in the housing and can achieve a sufficiently long life.
　上記課題の解決のため、本発明に係る光源装置は、レーザ光を出射するレーザ部と、内部空間に発光ガスが封入された発光封体、及び、内部空間に点灯開始領域を有する光源と、レーザ光を内部空間に導光する光学系と、点灯開始領域におけるレーザ光のエネルギー密度を制御する制御部と、を備え、光源は、内部空間において、レーザ部からのレーザ光の照射によって点灯する発光ガスのプラズマ発光であるレーザ支持光を、レーザ部からのレーザ光の照射によって維持し、制御部は、レーザ支持光維持時の点灯開始領域におけるレーザ光のエネルギー密度を、レーザ支持光点灯時の点灯開始領域におけるレーザ光のエネルギー密度に対して低くする。 In order to solve the above problems, a light source device according to the present invention includes a laser unit that emits laser light, a light emitting envelope in which a luminescent gas is sealed in an internal space, and a light source having a lighting start area in the internal space, An optical system that guides laser light to the internal space and a control unit that controls the energy density of the laser light in the lighting start area, and the light source is turned on by irradiation of the laser light from the laser part in the internal space. The laser support light, which is plasma emission of the emission gas, is maintained by irradiating the laser light from the laser unit, and the control unit determines the energy density of the laser light in the lighting start area when the laser support light is maintained. Is set lower than the energy density of the laser beam in the lighting start region.
　この光源装置では、制御部は、レーザ支持光維持時の点灯開始領域におけるレーザ光のエネルギー密度をレーザ支持光点灯時の点灯開始領域におけるレーザ光のエネルギー密度に対して低くしている。そのため、レーザ支持光維持時には、スパッタリングが生じない程度のエネルギー密度で点灯開始領域にレーザ光が照射される。したがって、この光源装置では、発光封体内でのスパッタリングを抑制できるため、十分な長寿命化が図られる。 In this light source device, the control unit lowers the energy density of the laser light in the lighting start area when the laser supporting light is maintained relative to the energy density of the laser light in the lighting start area when the laser supporting light is turned on. Therefore, when maintaining the laser support light, the lighting start region is irradiated with the laser light at an energy density that does not cause sputtering. Therefore, in this light source device, since sputtering in the light emitting envelope can be suppressed, a sufficiently long life can be achieved.
　光源は、内部空間に配置され、レーザ光の照射によって電子を放射する易電子放射物質を含有する電子放射構造体を更に有していてもよい。この場合、電子放射構造体のスパッタリングを抑制できる。 The light source may further include an electron-emitting structure that includes an easy-electron emitting material that is disposed in the internal space and emits electrons when irradiated with laser light. In this case, sputtering of the electron emission structure can be suppressed.
　光源は、点灯開始領域を挟むように互いに対向する対向電極を更に有していてもよい。この場合、対向電極間におけるプラズマの発生をスパッタリングが生じない程度に抑制できる。 The light source may further include counter electrodes facing each other so as to sandwich the lighting start area. In this case, generation of plasma between the counter electrodes can be suppressed to such an extent that sputtering does not occur.
　制御部は、レーザ支持光維持時のレーザ光の集光位置をレーザ支持光点灯時のレーザ光の集光位置に対して点灯開始領域から離間する方向に移動させる集光位置移動部を有していることが好ましい。この場合、レーザ支持光維持時には、レーザ光の集光位置が点灯開始領域から離間しているため、発光封体内でのスパッタリングを確実に抑制できる。 The control unit includes a condensing position moving unit that moves the condensing position of the laser light when maintaining the laser supporting light in a direction away from the lighting start region with respect to the condensing position of the laser light when the laser supporting light is turned on. It is preferable. In this case, when the laser supporting light is maintained, the laser light condensing position is separated from the lighting start region, so that sputtering in the light emitting envelope can be reliably suppressed.
　集光位置移動部は、レーザ光の集光位置をレーザ光の光軸方向に移動させることが好ましい。この場合、レーザ支持光維持時にレーザ光の集光位置を容易に点灯開始領域から離間させることができる。 It is preferable that the condensing position moving unit moves the condensing position of the laser light in the optical axis direction of the laser light. In this case, when the laser support light is maintained, the condensing position of the laser light can be easily separated from the lighting start region.
　集光位置移動部は、レーザ光の内部空間における光路長を調整する光路長調整部を有していることが好ましい。この場合、光路長調整部によって、レーザ支持光点灯時にはレーザ光の集光位置を適切な位置に保ちつつ、レーザ支持光維持時にはレーザ光の集光位置を容易に点灯開始領域から離間させることができる。 It is preferable that the condensing position moving unit has an optical path length adjusting unit that adjusts an optical path length in the internal space of the laser light. In this case, the optical path length adjustment unit can easily separate the laser beam condensing position from the lighting start area while maintaining the laser support light while maintaining the laser light condensing position at an appropriate position when the laser support light is turned on. it can.
　集光位置移動部は、レーザ支持光維持時の光学系の位置をレーザ支持光点灯時の光学系の位置に対して移動させる光学系移動部を有していることが好ましい。この場合、光学系を移動させることで、レーザ光の集光位置を容易に点灯開始領域から離間させることができる。 It is preferable that the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. In this case, by moving the optical system, the condensing position of the laser light can be easily separated from the lighting start region.
　集光位置移動部は、レーザ支持光維持時の発光封体の位置をレーザ支持光点灯時の発光封体の位置に対して移動させる発光封体移動部を有していることが好ましい。この場合、発光封体を移動させることで、レーザ光の集光位置を容易に点灯開始領域から離間させることができる。 It is preferable that the condensing position moving unit has a light emitting envelope moving unit that moves the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. In this case, by moving the light emitting envelope, the condensing position of the laser light can be easily separated from the lighting start region.
　光学系は、レーザ支持光点灯時及び維持時のいずれにおいても、レーザ光を点灯開始領域から離間した位置に集光させることが好ましい。この場合、最もエネルギー密度の高いレーザ光の集光位置が常に点灯開始領域以外の位置にあるため、発光封体内でのスパッタリングを抑制できる。したがって、光源装置の十分な長寿命化が図られる。 It is preferable that the optical system collects the laser beam at a position separated from the lighting start region, both when the laser supporting light is turned on and when it is maintained. In this case, since the condensing position of the laser beam having the highest energy density is always at a position other than the lighting start region, sputtering in the light emitting envelope can be suppressed. Therefore, the life of the light source device can be sufficiently extended.
　制御部は、レーザ支持光維持時のレーザ部からのレーザ光の出射エネルギーをレーザ支持光点灯時のレーザ部からのレーザ光の出射エネルギーに対して低くすることが好ましい。この場合、レーザ光の集光位置を機械的に移動させる必要がないため、レーザ光の集光位置を適切な位置に保つことができる。 It is preferable that the control unit lowers the emission energy of the laser beam from the laser unit when maintaining the laser support light with respect to the emission energy of the laser beam from the laser unit when the laser support light is turned on. In this case, since it is not necessary to mechanically move the condensing position of the laser light, the condensing position of the laser light can be maintained at an appropriate position.
　光源が電子放射構造体を更に有する場合、制御部は、レーザ支持光維持時のレーザ光の集光位置をレーザ支持光点灯時のレーザ光の集光位置に対して電子放射構造体から離間する方向に移動させる集光位置移動部を有していることが好ましい。この場合、レーザ支持光維持時には、レーザ光の集光位置が電子放射構造体から離間しているため、電子放射構造体がスパッタリングされることを確実に抑制できる。 When the light source further includes an electron emission structure, the control unit separates the laser beam condensing position when the laser supporting light is maintained from the electron emitting structure with respect to the laser light condensing position when the laser supporting light is turned on. It is preferable to have a condensing position moving part that moves in the direction. In this case, when the laser supporting light is maintained, since the condensing position of the laser light is separated from the electron emission structure, it is possible to reliably suppress the electron emission structure from being sputtered.
　光源が電子放射構造体を更に有する場合、集光位置移動部は、レーザ支持光維持時の電子放射構造体の位置をレーザ支持光点灯時の電子放射構造体の位置に対して移動させる電子放射構造体移動部を有していることが好ましい。この場合、電子放射構造体を移動させることで、レーザ光の集光位置を容易に電子放射構造体から離間させることができる。 When the light source further includes an electron emission structure, the focusing position moving unit moves the position of the electron emission structure when the laser support light is maintained with respect to the position of the electron emission structure when the laser support light is turned on. It is preferable to have a structure moving part. In this case, the focusing position of the laser light can be easily separated from the electron emission structure by moving the electron emission structure.
　光源が電子放射構造体を更に有する場合、集光位置移動部は、レーザ支持光維持時のレーザ光の内部空間における光路長をレーザ支持光点灯時のレーザ光の内部空間における光路長に対して短くする光路長調整部を有していることが好ましい。この場合、光路長調整部によって、レーザ支持光点灯時にはレーザ光の集光位置を適切な位置に保ちつつ、レーザ支持光維持時にはレーザ光の集光位置を容易に電子放射構造体から離間させることができる。 When the light source further includes an electron emission structure, the converging position moving unit determines the optical path length in the internal space of the laser light when the laser support light is maintained to the optical path length in the internal space of the laser light when the laser support light is turned on. It is preferable to have an optical path length adjustment unit that shortens the length. In this case, the optical path length adjustment unit keeps the laser beam condensing position at an appropriate position when the laser support light is lit, and easily separates the laser light condensing position from the electron emission structure when maintaining the laser support light. Can do.
　光源が電子放射構造体を更に有する場合、集光位置移動部は、レーザ光の集光位置をレーザ光の光軸方向と交わる方向に移動させることが好ましい。この場合、レーザ支持光維持時にレーザ光の集光位置を容易に電子放射構造体から離間させることができる。 When the light source further has an electron emission structure, it is preferable that the condensing position moving unit moves the condensing position of the laser light in a direction crossing the optical axis direction of the laser light. In this case, the laser beam condensing position can be easily separated from the electron emission structure when maintaining the laser support light.
　光源が電子放射構造体を更に有する場合、集光位置移動部は、レーザ支持光維持時の光学系の位置をレーザ支持光点灯時の光学系の位置に対して移動させる光学系移動部を有していることが好ましい。この場合、光学系を移動させることで、レーザ光の集光位置を容易に電子放射構造体から離間させることができる。 When the light source further includes an electron emission structure, the condensing position moving unit has an optical system moving unit that moves the position of the optical system when the laser supporting light is maintained with respect to the position of the optical system when the laser supporting light is turned on. It is preferable. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the optical system.
　光源が電子放射構造体を更に有する場合、集光位置移動部は、レーザ支持光維持時の発光封体の位置をレーザ支持光点灯時の発光封体の位置に対して移動させる発光封体移動部を有していることが好ましい。この場合、発光封体を移動させることで、レーザ光の集光位置を容易に電子放射構造体から離間させることができる。 When the light source further includes an electron emission structure, the light collecting position moving unit moves the light emitting envelope to move the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. It is preferable to have a part. In this case, the focusing position of the laser beam can be easily separated from the electron emission structure by moving the light emitting envelope.
　光源が電子放射構造体を更に有する場合、電子放射構造体には、レーザ支持光点灯時にレーザ光の集光位置が位置する面が、レーザ光の光軸に対して傾斜して形成されていることが好ましい。この構成により、光学系を厳密に調整しなくとも、レーザ光の集光位置を電子放射構造体の表面に位置させることができる。 When the light source further includes an electron emission structure, the electron emission structure is formed with a surface on which the condensing position of the laser beam is located when the laser support light is turned on, inclined with respect to the optical axis of the laser beam. It is preferable. With this configuration, it is possible to position the condensing position of the laser light on the surface of the electron emission structure without strictly adjusting the optical system.
　本発明によれば、筐体内でのスパッタリングを抑制し、十分な長寿命化が図られる。 According to the present invention, it is possible to suppress sputtering in the housing and to achieve a sufficiently long life.
本発明の第１実施形態に係る光源装置を示す図である。It is a figure which shows the light source device which concerns on 1st Embodiment of this invention. 図１に示した光源装置が備える光学部材（光路長調整部）の一例を示す図である。It is a figure which shows an example of the optical member (optical path length adjustment part) with which the light source device shown in FIG. 1 is provided. 図２に示した光学部材（光路長調整部）のレーザ支持光点灯前における状態を示す図である。It is a figure which shows the state before the laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 図２に示した光学部材（光路長調整部）のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 図２に示した光学部材（光路長調整部）のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after the laser support light lighting (at the time of maintenance) of the optical member (optical path length adjustment part) shown in FIG. 第１実施形態の変形例に係る光学部材（光路長調整部）のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the optical member (optical path length adjustment part) which concerns on the modification of 1st Embodiment. 図６に示した光学部材（光路長調整部）のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after laser support light lighting (at the time of maintenance) of the optical member (optical path length adjustment part) shown in FIG. 第１実施形態の他の変形例の係る光学部材（光路長調整部）を構成する透明媒体を示す図である。It is a figure which shows the transparent medium which comprises the optical member (optical path length adjustment part) which concerns on the other modification of 1st Embodiment. 本発明の第２実施形態に係る光源装置のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light source device which concerns on 2nd Embodiment of this invention. 図９に示した光源装置のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after the laser supporting light lighting of the light source device shown in FIG. 9 (at the time of maintenance). 本発明の第３実施形態に係る光源装置のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light source device which concerns on 3rd Embodiment of this invention. 図１１に示した光源装置のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after the laser support light lighting of the light source device shown in FIG. 11 (at the time of maintenance). 本発明の第４実施形態に係る光源装置を構成する発光封体のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light emitting envelope which comprises the light source device which concerns on 4th Embodiment of this invention. 図１３に示した発光封体のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after the laser supporting light lighting of the light emitting envelope shown in FIG. 13 (at the time of maintenance). 第４実施形態の変形例に係る光源装置を構成する発光封体を示す図であり、（ａ）はレーザ支持光点灯時、（ｂ）はレーザ支持光点灯後（維持時）を示す。It is a figure which shows the light emitting envelope which comprises the light source device which concerns on the modification of 4th Embodiment, (a) is at the time of laser support light lighting, (b) shows after laser support light lighting (at the time of maintenance). 本発明の第５実施形態に係る光源装置を示す図である。It is a figure which shows the light source device which concerns on 5th Embodiment of this invention. 図１６に示した光源装置の作用を示す図であり、（ａ）はレーザ支持光点灯時、（ｂ）はレーザ支持光点灯後（維持時）を示す。It is a figure which shows the effect | action of the light source device shown in FIG. 16, (a) is at the time of laser support light lighting, (b) shows after laser support light lighting (at the time of maintenance). 本発明の第６実施形態に係る光源装置のレーザ支持光点灯前における状態を示す図である。It is a figure which shows the state before the laser support light lighting of the light source device which concerns on 6th Embodiment of this invention. 図１８に示した光源装置のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light source device shown in FIG. 図１８に示した光源装置のレーザ支持光点灯後（維持時）における状態を示す図である。It is a figure which shows the state after the laser support light lighting of the light source device shown in FIG. 18 (at the time of maintenance). 第６実施形態の変形例に係る光源装置を構成する金属構造体（電子放射構造体）を示す要部拡大図である。It is a principal part enlarged view which shows the metal structure (electron emission structure) which comprises the light source device which concerns on the modification of 6th Embodiment. 図２１に示した金属構造体（電子放射構造体）の作用を示す要部拡大図である。It is a principal part enlarged view which shows the effect | action of the metal structure (electron emission structure) shown in FIG. 本発明の第７実施形態に係る光源装置を示す図である。It is a figure which shows the light source device which concerns on 7th Embodiment of this invention. 図２３に示した光学部材（光路長調整部）のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 図２３に示した光学部材（光路長調整部）のレーザ支持光点灯後における状態を示す図である。It is a figure which shows the state after laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 図２３に示した光学部材（光路長調整部）のレーザ支持光点灯時における他の態様を示す図である。It is a figure which shows the other aspect at the time of laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 図２３に示した光学部材（光路長調整部）のレーザ支持光点灯後における他の態様を示す図である。It is a figure which shows the other aspect after the laser support light lighting of the optical member (optical path length adjustment part) shown in FIG. 本発明の第８実施形態に係る光源装置のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light source device which concerns on 8th Embodiment of this invention. 図２８に示した光源装置のレーザ支持光点灯後における状態を示す図である。It is a figure which shows the state after the laser support light lighting of the light source device shown in FIG. 本発明の第９実施形態に係る光源装置のレーザ支持光点灯時における状態を示す図である。It is a figure which shows the state at the time of laser support light lighting of the light source device which concerns on 9th Embodiment of this invention. 図３０に示した光源装置のレーザ支持光点灯後における状態を示す図である。It is a figure which shows the state after the laser support light lighting of the light source device shown in FIG. 本発明の第１０実施形態に係る光源装置を示す図である。It is a figure which shows the light source device which concerns on 10th Embodiment of this invention. 図３２に示した光源装置の作用を示す図であり、（ａ）はレーザ支持光点灯時、（ｂ）はレーザ支持光点灯後を示す。It is a figure which shows the effect | action of the light source device shown in FIG. 32, (a) is at the time of laser support light lighting, (b) shows after laser support light lighting.
　以下、図面を参照しながら、本発明に係る光源装置の好適な実施形態について詳細に説明する。 Hereinafter, preferred embodiments of the light source device according to the present invention will be described in detail with reference to the drawings.
［第１実施形態］
　図１は、本発明の第１実施形態に係る光源装置を示す概略図である。同図に示すように、光源装置１は、連続レーザ光を出射するレーザ部２と、レーザ部２からの連続レーザ光Ｌを導光する光学系３と、連続レーザ光Ｌの照射によって電子を放射する易電子放射物質を含有する金属構造体（電子放射構造体）１３及び発光ガスＧを収容する発光封体１１（光源７）とを含んで構成されている。この光源装置１では、金属構造体１３に連続レーザ光Ｌを照射すると、金属構造体１３の近傍における連続レーザ光Ｌの照射領域に、発光ガスＧによるプラズマが発生する。なお、プラズマは、連続レーザ光Ｌの照射によって金属構造体１３から放射された電子が発光ガスＧをイオン化し、イオン化された発光ガスＧに連続レーザ光Ｌが照射されることで発生していると推測される。そして、発生したプラズマに連続レーザ光Ｌを継続的に照射する（プラズマに対して継続的にレーザエネルギーを供給する）ことで、光源７である発光封体１１内において、連続レーザ光Ｌの集光位置Ｆを含む所定の発光領域（点灯開始領域ＲＳ）を有するプラズマ発光である高輝度のレーザ支持光を点灯・維持させることができる。レーザ支持光は、例えば半導体検査用の光源や分光計測用の光として使用される。 [First Embodiment]
FIG. 1 is a schematic view showing a light source device according to the first embodiment of the present invention. As shown in FIG. 1, the light source device 1 includes a laser unit 2 that emits continuous laser light, an optical system 3 that guides the continuous laser light L from the laser unit 2, and irradiation with the continuous laser light L. It is configured to include a metal structure (electron emission structure) 13 containing a radiating electron-emitting substance and a light emitting envelope 11 (light source 7) containing a luminescent gas G. In the light source device 1, when the metal structure 13 is irradiated with the continuous laser light L, plasma due to the emission gas G is generated in the irradiation region of the continuous laser light L in the vicinity of the metal structure 13. Note that plasma is generated when electrons emitted from the metal structure 13 by irradiation of the continuous laser light L ionize the light emission gas G and the ionized light emission gas G is irradiated with the continuous laser light L. It is guessed. Then, by continuously irradiating the generated plasma with continuous laser light L (continuously supplying laser energy to the plasma), the continuous laser light L is collected in the light emitting envelope 11 as the light source 7. It is possible to turn on and maintain high-luminance laser support light that is plasma light emission having a predetermined light-emitting region (lighting start region RS) including the light position F. The laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
　レーザ部２は、例えばレーザダイオードである。レーザ部２からは、発光ガスＧの吸収スペクトルに合わせた波長、例えば波長９８０ｎｍの連続レーザ光Ｌが出射する。なお、レーザ部２からは、パルスレーザ光が出射していてもよい。連続レーザ光Ｌの出力は、例えば６０Ｗ程度となっている。レーザ部２から出射した連続レーザ光Ｌは、光ファイバ４によって光学系３に導光される。光学系３は、レーザ部２からの連続レーザ光Ｌを発光封体１１に向けて集光する光学系である。光学系３は、例えば２つのレンズ５，６によって構成されている。光ファイバ４のヘッド４ａから出射した連続レーザ光Ｌは、レンズ５によって平行光化した後、レンズ６によって光軸ＬＡをもって発光封体１１に向けて集光する。集光された連続レーザ光Ｌの直径は、例えば直径１２０μｍ程度である。 The laser unit 2 is, for example, a laser diode. The laser unit 2 emits a continuous laser beam L having a wavelength matching the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm. Note that a pulse laser beam may be emitted from the laser unit 2. The output of the continuous laser beam L is, for example, about 60W. The continuous laser light L emitted from the laser unit 2 is guided to the optical system 3 by the optical fiber 4. The optical system 3 is an optical system that condenses the continuous laser light L from the laser unit 2 toward the light emitting envelope 11. The optical system 3 is composed of, for example, two lenses 5 and 6. The continuous laser light L emitted from the head 4 a of the optical fiber 4 is collimated by the lens 5 and then condensed toward the light emitting envelope 11 by the lens 6 with the optical axis LA. The diameter of the condensed continuous laser beam L is, for example, about 120 μm in diameter.
　発光封体１１は、より具体的には、内部空間Ｓに発光ガスＧが高圧に封入されたバルブ（筐体）１２と、連続レーザ光Ｌの照射によって電子を放射する易電子放射物質を含有する金属構造体１３とによって構成されている。 More specifically, the light emitting envelope 11 contains a bulb (housing) 12 in which a light emitting gas G is sealed in a high pressure in the internal space S, and an easy-electron emitting material that emits electrons when irradiated with continuous laser light L. And the metal structure 13 to be configured.
　バルブ１２は、例えばガラスによって中空に形成されており、金属構造体１３が位置すると共に球状の外径及び球状の内部空間Ｓを有する球状部分（本体部）１２ａと、球状部分１２ａの一部から円柱状に突出する突出部分（突出部）１２ｂとを有している。バルブ１２の内部空間Ｓには、発光ガスＧとして例えばキセノンガスが高圧で封入されている。本実施形態では、球状部分１２ａのうち、突出部分１２ｂと反対側に位置する頂部１２ｃが連続レーザ光Ｌの入射部分（レーザ入射窓部ＬＷ）となっている。なお、レーザ入射窓部ＬＷは、後述する金属構造体１３における連続レーザ光Ｌの入射部に臨んでいればよく、球状部分１２ａの頂部１２ｃ以外の部分に位置していてもよい。 The bulb 12 is formed hollow, for example, by glass, and includes a spherical portion (main body portion) 12a having a spherical outer diameter and a spherical inner space S and a part of the spherical portion 12a. And a protruding portion (protruding portion) 12b protruding in a columnar shape. In the internal space S of the bulb 12, for example, xenon gas as a luminescent gas G is sealed at a high pressure. In the present embodiment, the top portion 12c located on the opposite side of the protruding portion 12b in the spherical portion 12a is an incident portion (laser incident window portion LW) of the continuous laser light L. The laser incident window portion LW only needs to face the incident portion of the continuous laser light L in the metal structure 13 to be described later, and may be located in a portion other than the top portion 12c of the spherical portion 12a.
　金属構造体１３は、例えばタングステンといった高融点金属によって形成され、易電子放射物質として例えばバリウムを含有する電子放射部１３ａと、電子放射部１３ａを支持する支持部１３ｂとを有している。連続レーザ光Ｌが照射される電子放射部１３ａは、図１に示すように、例えば細径の円柱状に形成され、連続レーザ光Ｌの入射部となる先端１３ｃがバルブ１２の頂部１２ｃ（レーザ入射窓部ＬＷ）を向くようにして球状部分１２ａの内部に配置されている。なお、連続レーザ光Ｌの入射部は、先端１３ｃに限られず、電子放射部１３ａの側面部であってもよい。 The metal structure 13 is formed of a refractory metal such as tungsten, for example, and includes an electron emission portion 13a containing, for example, barium as an easily radiating substance, and a support portion 13b that supports the electron emission portion 13a. As shown in FIG. 1, the electron emitting portion 13a irradiated with the continuous laser light L is formed in, for example, a thin cylindrical shape, and the tip 13c serving as the incident portion of the continuous laser light L is the top portion 12c (laser) of the bulb 12. It is disposed inside the spherical portion 12a so as to face the incident window portion LW). In addition, the incident part of continuous laser beam L is not restricted to the front-end | tip 13c, The side part of the electron emission part 13a may be sufficient.
　一方、支持部１３ｂは、例えばモリブデンといった高融点金属によって円柱状に形成された棒状部材１５を有している。支持部１３ｂの先端側には、電子放射部１３ａ（先端１３ｃ）が球状部分１２ａ内の内部空間Ｓの所望の位置に配置されるように支持されており、支持部１３ｂの基端側は、突出部分１２ｂ内の内部空間Ｓに配置されている。なお、電子放射部１３ａと支持部１３ｂとは、必ずしも構成材料を変える必要はなく、電子放射部１３ａに用いる材料で支持部１３ｂを一体に形成してもよい。また、同一の金属で基体を一体に形成し、電子放射部１３ａに相当する部分にのみ易電子放射物質を含有させてもよい。また、電子放射部１３ａや金属構造体１３の全体が易電子放射物質自体で構成されていてもよい。さらに、電子放射構造体は、タングステンやモリブデンといった金属（導電物）の基体から構成された金属構造体に限られず、セラミック等の絶縁物の基体から構成されていてもよい。 On the other hand, the support portion 13b has a rod-like member 15 formed in a columnar shape by a high melting point metal such as molybdenum. The electron emission portion 13a (tip 13c) is supported on the distal end side of the support portion 13b so as to be disposed at a desired position in the internal space S in the spherical portion 12a, and the proximal end side of the support portion 13b is It arrange | positions in the internal space S in the protrusion part 12b. Note that the electron emitting portion 13a and the support portion 13b do not necessarily have to be made of different constituent materials, and the support portion 13b may be formed integrally with the material used for the electron emitting portion 13a. Further, the base may be integrally formed of the same metal, and the electron emissive substance may be contained only in the portion corresponding to the electron emitting portion 13a. Moreover, the electron emission part 13a and the whole metal structure 13 may be comprised with the easy electron emission substance itself. Furthermore, the electron emission structure is not limited to a metal structure formed of a metal (conductive material) substrate such as tungsten or molybdenum, and may be formed of an insulating substrate such as ceramic.
　以上のように、発光封体１１では、発光ガスＧが封入されたバルブ１２内に易電子放射物質を含有する金属構造体１３が収容されている。金属構造体１３を用いることにより、この発光封体１１では、金属構造体１３への連続レーザ光Ｌの照射によってプラズマを発生させると共に、プラズマに連続レーザ光Ｌを継続して照射させることで高輝度のレーザ支持光を点灯開始領域ＲＳに点灯・維持することができる。なお、発光封体１１からプラズマ発光を取り出す際には、連続レーザ光Ｌの光軸ＬＡと交差する方向から取り出すことが好ましく、直交する方向から取り出すことがより好ましい。 As described above, in the light emitting envelope 11, the metal structure 13 containing the easily electron emissive substance is accommodated in the bulb 12 in which the light emitting gas G is enclosed. By using the metal structure 13, in the light emitting envelope 11, plasma is generated by irradiating the metal structure 13 with the continuous laser light L, and the plasma is continuously irradiated with the continuous laser light L. Luminance laser support light can be lit and maintained in the lighting start region RS. In addition, when extracting plasma light emission from the light emitting envelope 11, it is preferable to extract from the direction which cross | intersects the optical axis LA of the continuous laser beam L, and it is more preferable to extract from the orthogonal direction.
　また、光源装置１は、集光位置移動部として、連続レーザ光Ｌの光路長を調整するための光路長調整部５１を備えている。より詳細には、光路長調整部５１は、バルブ１２の内部空間Ｓにおける、レーザ入射窓部ＬＷから集光位置Ｆまでの連続レーザ光Ｌの光軸ＬＡの長さである光路長ＬＬを調整する。光路長調整部５１としては、例えば図２に示すような光学部材８を用いる。光学部材８は、板状の透明媒体９と、透明媒体９を支持する棒状の回転アクチュエータ１０とによって構成されている。透明媒体９は、回転アクチュエータ１０によって、回転アクチュエータ１０の軸方向に対して回転可能となっている。光源装置１では、光学部材８は、透明媒体９が光学系３と発光封体１１との間に介在可能なように配置されている。 Further, the light source device 1 includes an optical path length adjusting unit 51 for adjusting the optical path length of the continuous laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 51 adjusts the optical path length LL that is the length of the optical axis LA of the continuous laser light L from the laser incident window LW to the condensing position F in the internal space S of the bulb 12. To do. As the optical path length adjustment unit 51, for example, an optical member 8 as shown in FIG. 2 is used. The optical member 8 includes a plate-shaped transparent medium 9 and a rod-shaped rotary actuator 10 that supports the transparent medium 9. The transparent medium 9 can be rotated with respect to the axial direction of the rotary actuator 10 by the rotary actuator 10. In the light source device 1, the optical member 8 is disposed so that the transparent medium 9 can be interposed between the optical system 3 and the light emitting envelope 11.
　透明媒体９は、例えば合成石英ガラスといった空気（発光封体１１外部のレーザ光照射雰囲気）よりも高い屈折率を有する材料によって形成されている。また、透明媒体９は、図２に示すように３／４円形の平面形状をなしており、１／４円ごとに連続レーザ光Ｌの光軸ＬＡ方向の厚さ（連続レーザ光Ｌが透過する長さ）が異なる。具体的には、透明媒体９は、例えば２ｍｍ程度の厚さを有する１／４円形の平面形状をなす第１の領域Ｒ１と、第１の領域Ｒ１に隣接し、例えば４ｍｍ程度の厚さを有する１／４円形の平面形状をなす第２の領域Ｒ２と、第２の領域Ｒ２に隣接し、例えば２ｍｍ程度の厚さを有する１／４円形の平面形状をなす第３の領域Ｒ３とによって構成されている。なお、便宜的に、第１の領域Ｒ１と第３の領域Ｒ３とに挟まれた透明媒体９が存在しない領域を第４の領域Ｒ４とよぶ。 The transparent medium 9 is formed of a material having a refractive index higher than that of air (laser light irradiation atmosphere outside the light emitting envelope 11) such as synthetic quartz glass. Further, as shown in FIG. 2, the transparent medium 9 has a 3/4 circular planar shape, and the thickness of the continuous laser beam L in the direction of the optical axis LA for each 1/4 circle (the continuous laser beam L is transmitted). Different length). Specifically, the transparent medium 9 is adjacent to the first region R1 having a quarter circular planar shape having a thickness of, for example, about 2 mm and the first region R1, and has a thickness of, for example, about 4 mm. The second region R2 having a quarter circular planar shape and the third region R3 having a quarter circular planar shape adjacent to the second region R2 and having a thickness of, for example, about 2 mm. It is configured. For convenience, a region where the transparent medium 9 is not sandwiched between the first region R1 and the third region R3 is referred to as a fourth region R4.
　図３～５は、それぞれ光学部材８（光路長調整部５１）の作用を示す切断端面図である。まず、図３に示すように、レーザ支持光点灯前には、光学系３と発光封体１１との間に透明媒体９の第１の領域Ｒ１を介在させる。これにより、連続レーザ光Ｌは透明媒体９によって屈折し、連続レーザ光Ｌの集光位置Ｆは電子放射部１３ａ（金属構造体１３）とレーザ入射窓部ＬＷ側の間の空間領域に位置する。このときの電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度は、例えば２６０ｋＷ／ｃｍ２程度となっている。 3 to 5 are cut end views showing the operation of the optical member 8 (optical path length adjusting unit 51). First, as shown in FIG. 3, the first region R <b> 1 of the transparent medium 9 is interposed between the optical system 3 and the light emitting envelope 11 before the laser supporting light is turned on. Thereby, the continuous laser light L is refracted by the transparent medium 9, and the condensing position F of the continuous laser light L is located in a spatial region between the electron emitting portion 13a (metal structure 13) and the laser incident window LW side. . At this time, the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, about 260 kW / cm 2 .
　続いて、図４に示すように、レーザ支持光ＬＳ点灯時には、図３の状態から透明媒体９を回転アクチュエータ１０によって回転させることで、光学系３と発光封体１１との間に透明媒体９の第２の領域Ｒ２を介在させる。この場合、透明媒体９の第２の領域Ｒ２は第１の領域Ｒ１よりも厚いため、連続レーザ光Ｌの集光位置Ｆはレーザ支持光ＬＳ点灯前の連続レーザ光Ｌの集光位置Ｆに対して金属構造体１３側に移動することとなる。これにより、レーザ支持光ＬＳ点灯時には、例えば連続レーザ光Ｌは電子放射部１３ａ（金属構造体１３）の略表面で集光しており、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度は、例えば５３０ｋＷ／ｃｍ２程度となっている。 Subsequently, as shown in FIG. 4, when the laser support light LS is lit, the transparent medium 9 is rotated between the optical system 3 and the light emitting envelope 11 by rotating the transparent medium 9 from the state of FIG. The second region R2 is interposed. In this case, since the second region R2 of the transparent medium 9 is thicker than the first region R1, the condensing position F of the continuous laser light L is the condensing position F of the continuous laser light L before the laser support light LS is turned on. On the other hand, it moves to the metal structure 13 side. Thereby, when the laser support light LS is turned on, for example, the continuous laser light L is condensed on the substantially surface of the electron emission portion 13a (metal structure 13), and the surface (lighting) of the electron emission portion 13a (metal structure 13). The energy density of the continuous laser light L in the start region RS) is, for example, about 530 kW / cm 2 .
　続いて、レーザ支持光ＬＳ点灯後（レーザ支持光ＬＳ維持時）には、図４の状態から透明媒体９を回転アクチュエータ１０によって回転させることで、図５に示すように、光学系３と発光封体１１との間に第４の領域Ｒ４を介在させる。この場合、第４の領域Ｒ４には透明媒体が存在しないため、連続レーザ光Ｌの集光位置Ｆはレーザ支持光ＬＳ点灯前（図３）及びレーザ支持光ＬＳ点灯時（図４）の連続レーザ光Ｌの集光位置Ｆに対して、連続レーザ光Ｌの光軸ＬＡ方向において金属構造体１３（点灯開始領域ＲＳ）からより離間する位置（レーザ入射窓部ＬＷにより近い位置）の空間領域に移動している。このときの電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度は、例えば２６０ｋＷ／ｃｍ２以下となっている。 Subsequently, after the laser support light LS is turned on (when the laser support light LS is maintained), the transparent medium 9 is rotated by the rotary actuator 10 from the state of FIG. A fourth region R4 is interposed between the sealing body 11 and the sealing body 11. In this case, since there is no transparent medium in the fourth region R4, the condensing position F of the continuous laser light L is continuous before the laser support light LS is turned on (FIG. 3) and when the laser support light LS is turned on (FIG. 4). A spatial region at a position (position closer to the laser incident window LW) that is further away from the metal structure 13 (lighting start region RS) in the optical axis LA direction of the continuous laser light L with respect to the condensing position F of the laser light L. Has moved to. At this time, the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is, for example, 260 kW / cm 2 or less.
　このように、光学系３と発光封体１１との間に介在する透明媒体９の厚さを調整することによって内部空間Ｓにおける連続レーザ光Ｌの光路長ＬＬを調整し、連続レーザ光Ｌの集光位置Ｆを移動させる。これにより、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度を、レーザ支持光ＬＳ点灯前、点灯時、及び点灯後（維持時）の各状態に適したエネルギー密度とすることが可能となる。より具体的には、レーザ支持光ＬＳ点灯前には、スパッタリングが生じない程度のエネルギー密度で連続レーザ光Ｌを電子放射部１３ａ（金属構造体１３）に照射することで、電子放射部１３ａ（金属構造体１３）を加熱することが可能となる。そのため、後続のレーザ支持光ＬＳ点灯時において電子放射部１３ａ（金属構造体１３）から電子を放出させやすくすることができ、レーザ支持光ＬＳを点灯させることが容易となる。また、レーザ支持光ＬＳ点灯時には、レーザ支持光ＬＳの点灯に十分なエネルギー密度で連続レーザ光Ｌを電子放射部１３ａ（金属構造体１３）の適切な位置に対して照射できるため、レーザ支持光ＬＳを点灯開始領域ＲＳで確実に点灯させることができる。そして、レーザ支持光ＬＳ点灯後（レーザ支持光ＬＳ維持時）には、レーザ支持光ＬＳを維持すると共に、金属構造体１３においてスパッタリングが生じない程度のエネルギー密度とすることができる。また、連続レーザ光Ｌの集光位置Ｆが電子放射部１３ａ（金属構造体１３（点灯開始領域ＲＳ））から離間するのに伴って、プラズマ発光であるレーザ支持光ＬＳも電子放射部１３ａ（金属構造体１３（点灯開始領域ＲＳ））から離間するため、レーザ支持光ＬＳによる金属構造体１３のスパッタリングも抑制できる。よって、スパッタリングによる金属構造体１３の劣化及びバルブ１２の内壁の汚れを抑制して発光封体１１（光源７）の長寿命化を実現できるため、光源装置として十分な長寿命化が図られる。 In this way, the optical path length LL of the continuous laser light L in the internal space S is adjusted by adjusting the thickness of the transparent medium 9 interposed between the optical system 3 and the light emitting envelope 11, and the continuous laser light L The condensing position F is moved. As a result, the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state. More specifically, before the laser supporting light LS is turned on, the electron emitting portion 13a (metal structure 13) is irradiated with the continuous laser light L at an energy density that does not cause sputtering. The metal structure 13) can be heated. Therefore, it is possible to easily emit electrons from the electron emitting portion 13a (metal structure 13) during the subsequent laser support light LS lighting, and it is easy to light the laser support light LS. Further, when the laser support light LS is turned on, the continuous laser light L can be applied to an appropriate position of the electron emitting portion 13a (metal structure 13) with an energy density sufficient for turning on the laser support light LS. The LS can be reliably turned on in the lighting start area RS. Then, after the laser support light LS is turned on (when the laser support light LS is maintained), the laser support light LS can be maintained and the energy density can be set such that sputtering does not occur in the metal structure 13. Further, as the condensing position F of the continuous laser light L is separated from the electron emitting portion 13a (metal structure 13 (lighting start region RS)), the laser supporting light LS that is plasma emission is also emitted from the electron emitting portion 13a ( Since it is separated from the metal structure 13 (lighting start region RS), sputtering of the metal structure 13 by the laser support light LS can also be suppressed. Therefore, since the deterioration of the metal structure 13 and the contamination of the inner wall of the bulb 12 due to sputtering can be suppressed and the life of the light emitting envelope 11 (light source 7) can be increased, the life of the light source device can be sufficiently increased.
　なお、レーザ支持光ＬＳ点灯後に、光学系３と発光封体１１との間に介在させる領域を第２の領域Ｒ２から第４の領域Ｒ４に変える途中に、第２の領域Ｒ２と第４の領域Ｒ４との中間の厚さを有する第３の領域Ｒ３を介在させる。これにより、連続レーザ光Ｌの集光位置Ｆを段階的に金属構造体１３から離間するように移動させることができるため、レーザ支持光ＬＳの発光領域も段階的に金属構造体１３（点灯開始領域ＲＳ）から離間するように移動させることができる。したがって、連続レーザ光Ｌの集光位置Ｆの移動前後における発光領域の一部同士が重なりやすくなることによりプラズマの維持が容易となるため、レーザ支持光ＬＳを維持することが容易となる。一方、光学系３と発光封体１１との間に介在させる領域を第２の領域Ｒ２から第４の領域Ｒ４に一挙に変える場合、連続レーザ光Ｌの集光位置Ｆも一挙に移動することとなり、プラズマが集光位置Ｆの移動に追従できない場合がある。そのため、プラズマの維持が困難となり、レーザ支持光ＬＳが消灯してしまう可能性がある。 In addition, after the laser support light LS is turned on, the second region R2 and the fourth region R4 are changed in the middle of changing the region interposed between the optical system 3 and the light emitting envelope 11 from the second region R2 to the fourth region R4. A third region R3 having an intermediate thickness with respect to the region R4 is interposed. Thereby, the condensing position F of the continuous laser light L can be moved stepwise away from the metal structure 13, so that the emission region of the laser support light LS is also gradually increased in the metal structure 13 (lighting start). It can be moved away from the region RS). Therefore, since it becomes easy for some of the light emitting regions to overlap each other before and after the converging position F of the continuous laser light L is moved, it is easy to maintain the plasma, and thus it is easy to maintain the laser support light LS. On the other hand, when the region interposed between the optical system 3 and the light emitting envelope 11 is changed from the second region R2 to the fourth region R4 at a stroke, the condensing position F of the continuous laser beam L also moves at a stroke. Thus, there are cases where the plasma cannot follow the movement of the condensing position F. Therefore, it becomes difficult to maintain the plasma, and the laser support light LS may be extinguished.
　光学部材８（光路長調整部５１）の構成は、他の態様をとり得る。光学部材８は、例えば空間光変調素子といった光変調素子によって構成されていてもよい。また、光学部材８は、例えば図６，７に示すように、連続レーザ光Ｌの光軸ＬＡ方向の厚さ（連続レーザ光Ｌが透過する長さ）が略均一な板状の透明媒体２９と、透明媒体２９を保持するアクチュエータ３０とによって構成される光学部材２８であってもよい。アクチュエータ３０に保持された透明媒体２９は、レーザ支持光ＬＳ点灯時及び点灯後（維持時）の状態に応じて連続レーザ光Ｌの光軸ＬＡと略直交する方向に移動する。 The configuration of the optical member 8 (optical path length adjusting unit 51) can take other modes. The optical member 8 may be composed of a light modulation element such as a spatial light modulation element. Further, as shown in FIGS. 6 and 7, for example, the optical member 8 is a plate-shaped transparent medium 29 having a substantially uniform thickness in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted). And an optical member 28 constituted by an actuator 30 that holds the transparent medium 29. The transparent medium 29 held by the actuator 30 moves in a direction substantially orthogonal to the optical axis LA of the continuous laser light L according to the state when the laser support light LS is turned on and after being turned on (during maintenance).
　すなわち、レーザ支持光ＬＳ点灯時には、図６に示すように、光学系３と発光封体１１との間に透明媒体２９を介在させる。このとき、上記第１実施形態のレーザ支持光ＬＳ点灯時と同様に、連続レーザ光Ｌは、例えば電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光している。一方、レーザ支持光ＬＳ点灯後（維持時）には、図７に示すように、透明媒体２９はアクチュエータ３０によって光学系３と発光封体１１との間に介在しないように移動される。この場合、上記第１実施形態のレーザ支持光ＬＳ点灯後と同様に、連続レーザ光Ｌの集光位置Ｆは、レーザ支持光ＬＳ点灯時の連続レーザ光Ｌの集光位置Ｆに対して連続レーザ光Ｌの光軸ＬＡ方向の金属構造体１３（点灯開始領域ＲＳ）から離間する位置に移動することとなる。したがって、この場合でも、上記第１実施形態と同様に、金属構造体１３のスパッタリングを抑制できる。 That is, when the laser support light LS is lit, a transparent medium 29 is interposed between the optical system 3 and the light emitting envelope 11 as shown in FIG. At this time, as in the case of the laser support light LS lighting in the first embodiment, the continuous laser light L is condensed on, for example, the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Yes. On the other hand, after the laser support light LS is turned on (during maintenance), the transparent medium 29 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11 as shown in FIG. In this case, similarly to after the laser supporting light LS is turned on in the first embodiment, the condensing position F of the continuous laser light L is continuous with respect to the condensing position F of the continuous laser light L when the laser supporting light LS is turned on. The laser beam L moves to a position away from the metal structure 13 (lighting start region RS) in the direction of the optical axis LA. Therefore, even in this case, the sputtering of the metal structure 13 can be suppressed as in the first embodiment.
　また、透明媒体２９に代えて、例えば図８（ａ）に示すような透明媒体３９を用いることもできる。透明媒体３９は、一面が他面に対して傾斜していることで、連続レーザ光Ｌの光軸ＬＡ方向の厚さ（連続レーザ光Ｌが透過する長さ）が連続的に変化する板状をなしており、透明媒体２９と同様にアクチュエータ３０に保持された状態で用いられる。 Further, instead of the transparent medium 29, for example, a transparent medium 39 as shown in FIG. 8A can be used. The transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface so that the thickness of the continuous laser light L in the direction of the optical axis LA (the length through which the continuous laser light L passes) continuously changes. As in the case of the transparent medium 29, it is used while being held by the actuator 30.
　透明媒体３９を用いる場合、レーザ支持光ＬＳ点灯時には、例えば連続レーザ光Ｌが電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光するように光学系３と発光封体１１との間に透明媒体３９を介在させる。続いて、レーザ支持光ＬＳ点灯後（維持時）には、透明媒体３９は、アクチュエータ３０によって光学系３と発光封体１１との間に介在しないように移動される。このとき、透明媒体３９の一面が他面に対して傾斜しているため、透明媒体３９の移動に伴って徐々に連続レーザ光Ｌの集光位置Ｆも金属構造体１３（点灯開始領域ＲＳ）から離間するように連続的に移動していく。これにより、レーザ支持光ＬＳの発光領域も徐々に金属構造体１３（点灯開始領域ＲＳ）から離間するように移動させることができる。したがって、連続レーザ光Ｌの集光位置Ｆの移動前後における発光領域の一部同士が重なることによりプラズマの維持が容易となるため、レーザ支持光ＬＳを維持することが容易となる。 When the transparent medium 39 is used, when the laser support light LS is turned on, the optical system 3 emits light so that, for example, the continuous laser light L is condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). A transparent medium 39 is interposed between the sealing body 11 and the sealing body 11. Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 39 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11. At this time, since one surface of the transparent medium 39 is inclined with respect to the other surface, the condensing position F of the continuous laser light L gradually moves with the movement of the transparent medium 39, and the metal structure 13 (lighting start region RS). It moves continuously so that it is separated from. Thereby, the emission region of the laser support light LS can also be gradually moved away from the metal structure 13 (lighting start region RS). Accordingly, since the plasma can be easily maintained by overlapping a part of the light emitting region before and after the converging position F of the continuous laser light L is moved, the laser supporting light LS can be easily maintained.
　また、透明媒体２９に代えて、例えば図８（ｂ）に示すような透明媒体４９を用いることもできる。透明媒体４９は、連続レーザ光Ｌの光軸ＬＡ方向の厚さ（連続レーザ光Ｌが透過する長さ）が異なる２つの部材が接合されており、例えば４ｍｍ程度の厚さを有する第１の透明媒体４９ａと、例えば２ｍｍ程度の厚さを有する第２の透明媒体４９ｂとが互いの端面同士で接合した構成となっている。 Further, instead of the transparent medium 29, for example, a transparent medium 49 as shown in FIG. 8B can be used. The transparent medium 49 is formed by joining two members having different thicknesses in the direction of the optical axis LA of the continuous laser light L (length through which the continuous laser light L is transmitted). The first member has a thickness of about 4 mm, for example. The transparent medium 49a and the second transparent medium 49b having a thickness of, for example, about 2 mm are joined at the end surfaces.
　透明媒体４９を用いる場合、レーザ支持光ＬＳ点灯時には、例えば連続レーザ光Ｌが電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光するように光学系３と発光封体１１との間に第１の透明媒体４９ａを介在させる。続いて、レーザ支持光ＬＳ点灯後（維持時）には、透明媒体４９は、アクチュエータ３０によって光学系３と発光封体１１との間に介在しないように移動される。このとき、透明媒体４９が厚さの異なる透明媒体４９ａ，４９ｂから構成されているため、透明媒体４９の移動に伴って段階的に連続レーザ光Ｌの集光位置Ｆも金属構造体１３（点灯開始領域ＲＳ）から離間するように移動していく。これにより、レーザ支持光ＬＳの発光領域も段階的に金属構造体１３（点灯開始領域ＲＳ）から離間するように移動させることができる。したがって、連続レーザ光Ｌの集光位置Ｆの移動前後における発光領域の一部同士が重なりやすくなることによりプラズマの維持が容易となるため、レーザ支持光ＬＳを維持することが容易となる。 When the transparent medium 49 is used, when the laser support light LS is turned on, for example, the continuous laser light L is emitted from the optical system 3 so as to be condensed on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). A first transparent medium 49 a is interposed between the sealing body 11 and the sealing body 11. Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 49 is moved by the actuator 30 so as not to be interposed between the optical system 3 and the light emitting envelope 11. At this time, since the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the condensing position F of the continuous laser light L is gradually increased with the movement of the transparent medium 49. It moves away from the start area RS). Thereby, the emission region of the laser support light LS can also be moved stepwise away from the metal structure 13 (lighting start region RS). Therefore, since it becomes easy for some of the light emitting regions to overlap each other before and after the converging position F of the continuous laser light L is moved, it is easy to maintain the plasma, and thus it is easy to maintain the laser support light LS.
［第２実施形態］
　図９，１０は、それぞれ本発明の第２実施形態に係る光源装置を示す図である。以下では、第２実施形態に係る光源装置について説明するが、第１実施形態と重複する説明は省略する。図９，１０に示すように、光源装置２１では、例えば光学系３と光ファイバ４のヘッド４ａとが筐体１７に収容されている。筐体１７は、集光位置移動部としてのアクチュエータ１８（光学系移動部５２）に保持されており、レーザ支持光ＬＳ点灯時及び点灯後（維持時）の状態に応じて、アクチュエータ１８（光学系移動部５２）によって連続レーザ光Ｌの光軸ＬＡ方向に移動される。 [Second Embodiment]
9 and 10 are diagrams showing a light source device according to the second embodiment of the present invention. Below, although the light source device which concerns on 2nd Embodiment is demonstrated, the description which overlaps with 1st Embodiment is abbreviate | omitted. As shown in FIGS. 9 and 10, in the light source device 21, for example, the optical system 3 and the head 4 a of the optical fiber 4 are accommodated in the housing 17. The casing 17 is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and the actuator 18 (optical) according to the state when the laser support light LS is turned on and after being turned on (maintained). The system moving unit 52) moves the continuous laser light L in the direction of the optical axis LA.
　すなわち、図９に示すように、レーザ支持光ＬＳ点灯時には、筐体１７は、例えば連続レーザ光Ｌが電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光するような位置で保持されている。一方、図１０に示すように、レーザ支持光ＬＳ点灯後（維持時）には、筐体１７は、連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の集光位置Ｆに対して金属構造体１３（点灯開始領域ＲＳ）から離間するように、アクチュエータ１８によって例えば連続レーザ光Ｌの光軸ＬＡに沿って移動される。 That is, as illustrated in FIG. 9, when the laser support light LS is turned on, the housing 17 condenses, for example, the continuous laser light L on the substantially surface (lighting start region RS) of the electron emission portion 13a (metal structure 13). Is held in such a position. On the other hand, as shown in FIG. 10, after the laser supporting light LS is turned on (during maintenance), the housing 17 has a condensing position F of the continuous laser light L with respect to a condensing position F when the laser supporting light LS is turned on. For example, the actuator 18 is moved along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
　このように、光学系３を含む筐体１７をアクチュエータ１８（光学系移動部５２）によって移動させるという簡易な構成で、連続レーザ光Ｌの集光位置Ｆを容易に金属構造体１３（点灯開始領域ＲＳ）から離間させることができる。 In this way, the metal structure 13 (lighting start) can be easily performed with the simple configuration in which the housing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). Can be separated from the region RS).
　上記第２実施形態では、筐体１７はアクチュエータ１８によって連続レーザ光Ｌの光軸ＬＡ方向に移動していたが、レーザ支持光ＬＳ点灯後（維持時）の連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の連続レーザ光Ｌの集光位置Ｆに対して金属構造体１３（点灯開始領域ＲＳ）から離間する位置となるのであれば、筐体１７の移動方向は連続レーザ光Ｌの光軸ＬＡ方向とは異なる方向（例えば連続レーザ光Ｌの光軸ＬＡと交わる方向）であってもよい。 In the second embodiment, the housing 17 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position F of the continuous laser light L after the laser support light LS is turned on (during maintenance). Is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is turned on, the movement direction of the housing 17 is continuous laser light. The direction may be different from the direction of the optical axis LA of L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
［第３実施形態］
　図１１，１２は、それぞれ本発明の第３実施形態に係る光源装置を示す図である。以下では、第３実施形態に係る光源装置について説明するが、第１，２実施形態と重複する説明は省略する。図１１，１２に示すように、光源装置３１では、発光封体１１は、アクチュエータ１８（発光封体移動部５３）に保持されており、レーザ支持光ＬＳ点灯時及び点灯後（維持時）の状態に応じて、集光位置移動部としてのアクチュエータ１８（発光封体移動部５３）によって連続レーザ光Ｌの光軸ＬＡ方向に移動される。 [Third Embodiment]
11 and 12 are diagrams showing a light source device according to the third embodiment of the present invention. Hereinafter, the light source device according to the third embodiment will be described, but the description overlapping with the first and second embodiments will be omitted. As shown in FIGS. 11 and 12, in the light source device 31, the light emitting envelope 11 is held by the actuator 18 (light emitting envelope moving unit 53), and when the laser supporting light LS is turned on and after being turned on (maintained). Depending on the state, it is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18 (light emitting envelope moving part 53) as a condensing position moving part.
　すなわち、図１１に示すように、レーザ支持光ＬＳ点灯時には、発光封体１１は、例えば連続レーザ光Ｌが電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光するような位置で保持されている。一方、図１２に示すように、レーザ支持光ＬＳ点灯後（維持時）には、発光封体１１は、連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の集光位置Ｆに対して金属構造体１３（点灯開始領域ＲＳ）から離間するように、アクチュエータ１８によって例えば連続レーザ光Ｌの光軸ＬＡに沿って移動される。 That is, as shown in FIG. 11, when the laser support light LS is turned on, the light emitting envelope 11 has the continuous laser light L condensed, for example, on the substantially surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). Is held in such a position. On the other hand, as shown in FIG. 12, after the laser supporting light LS is turned on (during maintenance), the light emitting envelope 11 has the condensing position F of the continuous laser light L at the condensing position F when the laser supporting light LS is turned on. On the other hand, the actuator 18 is moved along, for example, the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS).
　このように、発光封体１１をアクチュエータ１８（発光封体移動部５３）によって移動させるという簡易な構成で、連続レーザ光Ｌの集光位置Ｆを容易に金属構造体１３（点灯開始領域ＲＳ）から離間させることができる。 In this way, the light emitting envelope 11 is moved by the actuator 18 (light emitting envelope moving unit 53), and the condensing position F of the continuous laser beam L can be easily moved to the metal structure 13 (lighting start region RS). Can be separated from
　上記第３実施形態では、発光封体１１はアクチュエータ１８によって連続レーザ光Ｌの光軸ＬＡ方向に移動していたが、レーザ支持光ＬＳ点灯後（維持時）の連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の連続レーザ光Ｌの集光位置Ｆに対して金属構造体１３（点灯開始領域ＲＳ）から離間する位置となるのであれば、発光封体１１の移動方向は連続レーザ光Ｌの光軸ＬＡ方向とは異なる方向（例えば連続レーザ光Ｌの光軸ＬＡと交わる方向）であってもよい。 In the third embodiment, the light emitting envelope 11 is moved in the direction of the optical axis LA of the continuous laser light L by the actuator 18, but the condensing position of the continuous laser light L after the laser supporting light LS is turned on (during maintenance). If F is a position away from the metal structure 13 (lighting start region RS) with respect to the condensing position F of the continuous laser light L when the laser support light LS is lit, the moving direction of the light emitting envelope 11 is continuous. The direction may be different from the direction of the optical axis LA of the laser light L (for example, the direction intersecting the optical axis LA of the continuous laser light L).
［第４実施形態］
　図１３，１４は、それぞれ本発明の第４実施形態に係る光源装置を構成する発光封体を示す図である。以下では、第４実施形態に係る光源装置を構成する発光封体について説明するが、第１～３実施形態と重複する説明は省略する。 [Fourth Embodiment]
13 and 14 are views showing a light emitting envelope constituting a light source device according to a fourth embodiment of the present invention. Hereinafter, the light emitting envelope constituting the light source device according to the fourth embodiment will be described, but the description overlapping with the first to third embodiments will be omitted.
　図１３，１４に示すように、発光封体６１（光源７）は、支持部１３ｂである棒状部材１５を把持する小径部１６を有している。小径部１６は、突出部分１２ｂの内壁の一部を用いて設けられ、棒状部材１５に当接するように突出部分１２ｂの内径が他の部分よりも縮径された状態となっている。なお、小径部１６は、棒状部材１５の周面に接触しているだけであり、棒状部材１５への融着はなされていない。また、小径部１６は、図１３，１４に例示した位置よりも基端寄り（図面下側）に設けてもよく、先端側（図面上側）寄りに設けてもよい。さらに、小径部１６を複数設けてもよい。 As shown in FIGS. 13 and 14, the light emitting envelope 61 (light source 7) has a small-diameter portion 16 that holds the rod-shaped member 15 that is the support portion 13 b. The small-diameter portion 16 is provided by using a part of the inner wall of the protruding portion 12b, and the protruding portion 12b has a smaller inner diameter than other portions so as to contact the rod-shaped member 15. The small diameter portion 16 is only in contact with the peripheral surface of the rod-shaped member 15 and is not fused to the rod-shaped member 15. Further, the small diameter portion 16 may be provided closer to the base end (lower side of the drawing) than the position illustrated in FIGS. 13 and 14, or may be provided closer to the distal end side (upper side of the drawing). Further, a plurality of small diameter portions 16 may be provided.
　また、金属構造体１３（電子放射構造体）には、小径部１６に通された棒状部材１５の端部において小径部１６に当接可能となるように設けられた大径部１３ｄが設けられている。さらに、大径部１３ｄの位置に対応するように突出部分１２ｂの外壁側に、集光位置移動部として、コイル１４（電子放射構造体移動部５４）が設けられている。コイル１４（電子放射構造体移動部５４）は、棒状部材１５側の大径部１３ｄが突出部分１２ｂ側の小径部１６に当接するように棒状部材１５に磁力を付与することによって、レーザ支持光ＬＳ点灯時及び点灯後（維持時）の状態に応じて金属構造体１３を連続レーザ光Ｌの光軸ＬＡ方向に移動させる。 Further, the metal structure 13 (electron emission structure) is provided with a large-diameter portion 13d provided so as to be able to come into contact with the small-diameter portion 16 at an end portion of the rod-like member 15 passed through the small-diameter portion 16. ing. Further, a coil 14 (electron emission structure moving portion 54) is provided as a condensing position moving portion on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d. The coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15 so that the large-diameter portion 13d on the rod-shaped member 15 side abuts on the small-diameter portion 16 on the protruding portion 12b side. The metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state of LS lighting and after lighting (during maintenance).
　すなわち、図１３に示すように、レーザ支持光ＬＳ点灯時には、金属構造体１３は、コイル１４（電子放射構造体移動部５４）から付与される磁力によって例えば連続レーザ光Ｌが電子放射部１３ａ（金属構造体１３）の略表面（点灯開始領域ＲＳ）で集光するような位置で保持されている。一方、図１４に示すように、レーザ支持光ＬＳ点灯後（維持時）には、コイル１４からの磁力付与を休止することで、金属構造体１３は、連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の集光位置Ｆに対して金属構造体１３（点灯開始領域ＲＳ）から離間するように、連続レーザ光Ｌの光軸ＬＡに沿って移動することとなる。 That is, as shown in FIG. 13, when the laser support light LS is turned on, the metal structure 13 is irradiated with, for example, a continuous laser beam L by the magnetic force applied from the coil 14 (electron emission structure moving unit 54). The metal structure 13) is held at a position where light is condensed on the substantially surface (lighting start region RS). On the other hand, as shown in FIG. 14, after the laser support light LS is turned on (during maintenance), the metal structure 13 has the condensing position F of the continuous laser light L by stopping the application of the magnetic force from the coil 14. The laser beam LS moves along the optical axis LA of the continuous laser beam L so as to be separated from the metal structure 13 (lighting start region RS) with respect to the condensing position F when the laser support beam LS is lit.
　このように、発光封体６１を用いると、金属構造体１３をコイル１４（電子放射構造体移動部５４）によって移動させることで、連続レーザ光Ｌの集光位置Ｆを容易に金属構造体１３（点灯開始領域ＲＳ）から離間させることができる。さらにこの場合、連続レーザ光Ｌの集光位置Ｆの移動は、光学系３及びバルブ１２の移動や調整を要さないため、連続レーザ光Ｌの照射経路における光学的条件を一定に保つことができ、連続レーザ光Ｌの集光位置を適切な位置に保つことができる。 In this way, when the light emitting envelope 61 is used, the metal structure 13 is moved by the coil 14 (electron emission structure moving portion 54), so that the condensing position F of the continuous laser light L can be easily changed. It can be separated from (lighting start area RS). Furthermore, in this case, since the movement of the condensing position F of the continuous laser light L does not require movement or adjustment of the optical system 3 and the valve 12, the optical conditions in the irradiation path of the continuous laser light L can be kept constant. And the condensing position of the continuous laser beam L can be maintained at an appropriate position.
　発光封体６１は、他の態様をとり得る。例えば図１５に示す発光封体７１（光源７）では、棒状部材１５が挿通するように突出部分１２ｂの内壁に嵌合するスペーサ部材１９と、スペーサ部材１９に通された棒状部材１５の端部において小径部１６に当接可能となるように設けられた大径部１３ｄとが設けられている。この場合においても、コイル１４（電子放射構造体移動部５４）は、大径部１３ｄの位置に対応するように突出部分１２ｂの外壁側に設けられ、棒状部材１５側の大径部１３ｄがスペーサ部材１９に当接するように棒状部材１５に磁力を付与する。 The light emitting envelope 61 can take other forms. For example, in the light emitting envelope 71 (light source 7) shown in FIG. 15, the spacer member 19 fitted to the inner wall of the protruding portion 12b so that the rod-like member 15 is inserted, and the end of the rod-like member 15 passed through the spacer member 19 And a large-diameter portion 13 d provided so as to be able to contact the small-diameter portion 16. Also in this case, the coil 14 (electron emission structure moving portion 54) is provided on the outer wall side of the protruding portion 12b so as to correspond to the position of the large diameter portion 13d, and the large diameter portion 13d on the rod-like member 15 side is the spacer. A magnetic force is applied to the rod-shaped member 15 so as to come into contact with the member 19.
　この場合も上記第４実施形態と同様に、コイル１４（電子放射構造体移動部５４）が、棒状部材１５に磁力を付与することによって、レーザ支持光ＬＳ点灯時（図１５（ａ））及び点灯後（維持時）（図１５（ｂ））の状態に応じて金属構造体１３を連続レーザ光Ｌの光軸ＬＡ方向に移動する。 Also in this case, as in the fourth embodiment, the coil 14 (electron emission structure moving portion 54) applies a magnetic force to the rod-shaped member 15, so that the laser support light LS is turned on (FIG. 15 (a)) and The metal structure 13 is moved in the direction of the optical axis LA of the continuous laser beam L in accordance with the state after lighting (during maintenance) (FIG. 15B).
［第５実施形態］
　図１６は、本発明の第５実施形態に係る光源装置を示す図である。以下では、第５実施形態に係る光源装置について説明するが、第１～４実施形態と重複する説明は省略する。図１６に示すように、光源装置４１は、レーザ部２からの出射する連続レーザ光Ｌの出射エネルギーを調整する制御部５５を備えている。また、光源装置４１では、光学系３は、連続レーザ光Ｌを電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）から離間した位置で集光させている。つまり、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）には、常にデフォーカス状態の連続レーザ光Ｌが照射される。 [Fifth Embodiment]
FIG. 16 is a diagram showing a light source device according to the fifth embodiment of the present invention. Hereinafter, the light source device according to the fifth embodiment will be described, but the description overlapping with the first to fourth embodiments will be omitted. As shown in FIG. 16, the light source device 41 includes a control unit 55 that adjusts the emission energy of the continuous laser light L emitted from the laser unit 2. Moreover, in the light source device 41, the optical system 3 condenses the continuous laser light L at a position separated from the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13). In other words, the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is always irradiated with the continuous laser light L in the defocused state.
　図１７は、制御部５５の作用を示す図である。図１７（ａ）に示すように、レーザ支持光ＬＳ点灯時には、制御部５５は、連続レーザ光Ｌの集光位置Ｆを電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）から離間した位置に設定しつつ、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度がレーザ支持光ＬＳ点灯可能な程度（例えば５３０ｋＷ／ｃｍ２程度）となるように、レーザ部２から出射する連続レーザ光Ｌの出射エネルギーを設定する。これにより、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）に照射される連続レーザ光Ｌは、デフォーカス状態でありながら、レーザ支持光ＬＳを点灯することができる。 FIG. 17 is a diagram illustrating the operation of the control unit 55. As shown in FIG. 17A, when the laser support light LS is turned on, the control unit 55 determines the condensing position F of the continuous laser light L on the surface of the electron emission unit 13a (metal structure 13) (lighting start region RS). The energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission portion 13a (metal structure 13) is set so that the laser supporting light LS can be turned on (for example, 530 kW / cm 2). The emission energy of the continuous laser beam L emitted from the laser unit 2 is set so that Thereby, the continuous laser light L irradiated to the surface (lighting start area | region RS) of the electron emission part 13a (metal structure 13) can light the laser support light LS, being a defocused state.
　一方、図１７（ｂ）に示すように、レーザ支持光ＬＳ点灯後（維持時）には、制御部５５は、連続レーザ光Ｌの集光位置Ｆをレーザ支持光ＬＳ点灯時の位置（図１７（ａ）の位置）に保ったまま、レーザ部２から出射する連続レーザ光Ｌの出射エネルギーをレーザ支持光ＬＳ点灯時の連続レーザ光Ｌの出射エネルギーに対して低く設定する。具体的には、制御部５５は、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度を、例えばレーザ支持光ＬＳ点灯時の５３０ｋＷ／ｃｍ２程度から２６０ｋＷ／ｃｍ２程度とする。これにより、レーザ支持光ＬＳを維持可能なエネルギーを持つ領域を連続レーザ光Ｌの集光位置Ｆ近傍のみとすることができるため、レーザ支持光ＬＳを金属構造体１３（点灯開始領域ＲＳ）から離間した位置で維持することが可能となる。 On the other hand, as shown in FIG. 17B, after the laser support light LS is turned on (during maintenance), the control unit 55 changes the condensing position F of the continuous laser light L to the position (FIG. 17 (a)), the emission energy of the continuous laser light L emitted from the laser unit 2 is set lower than the emission energy of the continuous laser light L when the laser support light LS is turned on. Specifically, the control unit 55 sets the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emission unit 13a (metal structure 13), for example, 530 kW / cm 2 when the laser support light LS is turned on. About 260 kW / cm 2 is set. Thereby, since the area | region which has the energy which can maintain the laser support light LS can be made only into the condensing position F vicinity of the continuous laser light L, the laser support light LS is sent from the metal structure 13 (lighting start area | region RS). It is possible to maintain at a separated position.
　このように、光源装置４１では、レーザ部２から出射する連続レーザ光Ｌを金属構造体１３の表面（点灯開始領域ＲＳ）から離間した位置に集光させつつ、連続レーザ光Ｌの出射エネルギーを制御部５５によって調整する。つまり、光源装置４１では、金属構造体１３の表面（点灯開始領域ＲＳ）には常にデフォーカス状態の連続レーザ光Ｌを照射し、さらにはレーザ支持光ＬＳ維持時の電子放射部１３ａ（金属構造体１３）の表面における連続レーザ光Ｌのエネルギー密度をレーザ支持光ＬＳ点灯時の連続レーザ光Ｌのエネルギー密度に対して低くするため、金属構造体１３の表面が局所的にスパッタリングされることを抑制できる。したがって、金属構造体１３の長寿命化が図られる。また、光源装置４１では、連続レーザ光Ｌの集光位置Ｆを機械的に移動させる必要がないため、連続レーザ光Ｌの集光位置を適切な位置に保つことができると共に、光学系３や発光封体１１を移動させるための装置が不要となるため、光源装置の小型化が図られる。なお、連続レーザ光Ｌは、上述したように連続レーザ光Ｌの光軸ＬＡと金属構造体１３の延在方向の軸とが互いに同軸となるような方向から照射されてもよく、連続レーザ光Ｌの光軸ＬＡと金属構造体１３の延在方向の軸とが互いに交わるような方向から照射されてもよい。 As described above, in the light source device 41, the continuous laser light L emitted from the laser unit 2 is condensed at a position separated from the surface of the metal structure 13 (lighting start region RS), and the emission energy of the continuous laser light L is increased. Adjustment is performed by the control unit 55. That is, in the light source device 41, the surface of the metal structure 13 (lighting start region RS) is always irradiated with the continuous laser light L in the defocused state, and further, the electron emitting portion 13a (metal structure) when the laser support light LS is maintained. In order to reduce the energy density of the continuous laser light L on the surface of the body 13) relative to the energy density of the continuous laser light L when the laser support light LS is turned on, the surface of the metal structure 13 is locally sputtered. Can be suppressed. Therefore, the life of the metal structure 13 can be extended. Further, in the light source device 41, it is not necessary to mechanically move the condensing position F of the continuous laser light L, so that the condensing position of the continuous laser light L can be maintained at an appropriate position, and the optical system 3 or Since a device for moving the light emitting envelope 11 is not required, the light source device can be downsized. Note that the continuous laser light L may be irradiated from a direction in which the optical axis LA of the continuous laser light L and the axis in the extending direction of the metal structure 13 are coaxial with each other as described above. Irradiation may be performed from a direction in which the optical axis LA of L and the axis in the extending direction of the metal structure 13 intersect each other.
［第６実施形態］
　図１８～２０は、それぞれ本発明の第６実施形態に係る光源装置を示す図である。以下では、第６実施形態に係る光源装置について説明するが、第１～５実施形態と重複する説明は省略する。 [Sixth Embodiment]
18 to 20 are views showing a light source device according to the sixth embodiment of the present invention. Hereinafter, the light source device according to the sixth embodiment will be described, but the description overlapping with the first to fifth embodiments will be omitted.
　図１８～２０に示すように、光源装置８１では、連続レーザ光Ｌは、発光封体９１（光源７）に対して、連続レーザ光Ｌの光軸ＬＡと金属構造体１３の延在方向の軸とが互いに交わるような方向から照射されている。より具体的には、連続レーザ光Ｌは、連続レーザ光Ｌの光軸ＬＡと金属構造体１３の延在方向の軸とが互いに略直交するような方向から照射されており、バルブ１２（特に球状部分１２ａ）のうち、金属構造体１３の延在方向の軸に対して側方に位置する側方部１２ｄが連続レーザ光Ｌの入射部分（レーザ入射窓部ＬＷ）となっている。また、光源装置８１では、光学系３は、連続レーザ光Ｌの集光位置Ｆの光軸ＬＡ方向における位置が電子放射部１３ａの略表面（点灯開始領域ＲＳ）となるように、連続レーザ光Ｌを集光させている。また、金属構造体１３の棒状部材１５（支持部１３ｂ）の先端側には、電子放射部１３ａを保持する保持部１３ｆと、保持部１３ｆよりも基端側に、保持部１３ｆ、及び棒状部材１５（支持部１３ｂ）の基端側（基端部１３ｇ）に比してくびれるように縮径した縮径部１３ｅとが形成されている。縮径部１３ｅは、バルブ１２の突出部分１２ｂにおける球状部分１２ａ側の端部に対応する位置に設けられている。 As shown in FIGS. 18 to 20, in the light source device 81, the continuous laser light L is in the extending direction of the optical axis LA of the continuous laser light L and the metal structure 13 with respect to the light emitting envelope 91 (light source 7). Irradiation is from a direction where the axes intersect each other. More specifically, the continuous laser beam L is irradiated from a direction in which the optical axis LA of the continuous laser beam L and the axis in the extending direction of the metal structure 13 are substantially orthogonal to each other, and the bulb 12 (particularly Of the spherical portion 12a), the side portion 12d positioned laterally with respect to the axis of the extending direction of the metal structure 13 is the incident portion (laser incident window portion LW) of the continuous laser beam L. Further, in the light source device 81, the optical system 3 includes the continuous laser beam so that the position of the condensing position F of the continuous laser beam L in the direction of the optical axis LA is substantially the surface (lighting start region RS) of the electron emission unit 13a. L is condensed. Further, a holding part 13f for holding the electron emission part 13a is provided on the distal end side of the rod-like member 15 (supporting part 13b) of the metal structure 13, and a holding part 13f and a stick-like member are provided on the base end side of the holding part 13f. 15 (a supporting portion 13b) is formed with a reduced diameter portion 13e that is reduced in diameter so as to be narrower than the proximal end side (base end portion 13g). The reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side.
　本実施形態では、例えば光学系３と光ファイバ４のヘッド４ａとが収容された筐体１７は、集光位置移動部としてのアクチュエータ１８（光学系移動部５２）に保持されており、レーザ支持光ＬＳ点灯前、点灯時及び点灯後（維持時）の状態に応じて、アクチュエータ１８（光学系移動部５２）によって連続レーザ光Ｌの光軸ＬＡ方向と略直交する方向（金属構造体１３の延在方向の軸に沿った方向）に移動される。 In the present embodiment, for example, the housing 17 in which the optical system 3 and the head 4a of the optical fiber 4 are accommodated is held by an actuator 18 (optical system moving unit 52) as a condensing position moving unit, and is supported by the laser. A direction (of the metal structure 13) that is substantially orthogonal to the optical axis LA direction of the continuous laser light L by the actuator 18 (optical system moving unit 52) according to the state before the light LS is lit, when it is lit, and after being lit (maintained). In the direction along the axis of the extending direction).
　すなわち、レーザ支持光ＬＳ点灯前には、図１８に示すように、筐体１７は、例えば連続レーザ光Ｌが棒状部材１５（支持部１３ｂ）の保持部１３ｆに照射されるような位置で保持されている。このとき、保持部１３ｆは電子放射部１３ａよりも大径であるので、保持部１３ｆの表面が電子放射部１３ａの表面よりもレーザ入射窓部ＬＷ側に位置することから、保持部１３ｆに照射される連続レーザ光Ｌは、見かけ上、保持部１３ｆの内部の仮想の集光位置Ｆ’で集光され、保持部１３ｆの略表面においてはスパッタリングが生じない程度のエネルギー密度にデフォーカスした状態で照射される。レーザ支持光ＬＳ点灯時には、図１９に示すように、筐体１７は、連続レーザ光Ｌが電子放射部１３ａに照射されるような位置に移動される。このとき、連続レーザ光Ｌの集光位置Ｆは、電子放射部１３ａの略表面（点灯開始領域ＲＳ）に位置している。レーザ支持光ＬＳ点灯後（維持時）には、図２０に示すように、筐体１７は、連続レーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時の集光位置Ｆに対して電子放射部１３ａ（金属構造体１３（点灯開始領域ＲＳ））から離間し、内部空間Ｓの空間領域に位置するように移動され、保持される。その結果、レーザ支持光ＬＳ点灯後（維持時）には、電子放射部１３ａ（金属構造体１３（点灯開始領域ＲＳ））とレーザ支持光ＬＳとが互いに離間するとともに、連続レーザ光Ｌの電子放射部１３ａ（金属構造体１３（点灯開始領域ＲＳ））への照射を避けることができる。つまり、レーザ支持光ＬＳ維持時の電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度を、レーザ支持光ＬＳ点灯時の電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度に対して低くすることができる。 That is, before the laser support light LS is turned on, as shown in FIG. 18, the housing 17 is held at a position where the continuous laser light L is irradiated to the holding portion 13f of the rod-like member 15 (support portion 13b), for example. Has been. At this time, since the holding portion 13f has a larger diameter than the electron emitting portion 13a, the surface of the holding portion 13f is positioned closer to the laser incident window LW than the surface of the electron emitting portion 13a. The continuous laser beam L is apparently condensed at a virtual condensing position F ′ inside the holding portion 13f and defocused to an energy density that does not cause sputtering on the substantially surface of the holding portion 13f. Irradiated with. At the time of turning on the laser support light LS, as shown in FIG. 19, the housing 17 is moved to a position where the continuous laser light L is applied to the electron emitting portion 13a. At this time, the condensing position F of the continuous laser beam L is located on the substantially surface (lighting start region RS) of the electron emitting portion 13a. After the laser support light LS is turned on (during maintenance), as shown in FIG. 20, the housing 17 has electrons at which the condensing position F of the continuous laser light L is compared with the condensing position F when the laser support light LS is turned on. It is moved away from the radiating portion 13a (the metal structure 13 (lighting start region RS)), and is moved and held so as to be located in the space region of the internal space S. As a result, after the laser support light LS is turned on (during maintenance), the electron emitting portion 13a (metal structure 13 (lighting start region RS)) and the laser support light LS are separated from each other and the electrons of the continuous laser light L are separated. Irradiation to the radiation | emission part 13a (Metal structure 13 (lighting start area | region RS)) can be avoided. That is, the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) when the laser supporting light LS is maintained is defined as the electron emitting portion 13a (metal) when the laser supporting light LS is turned on. The energy density of the continuous laser beam L on the surface (lighting start region RS) of the structure 13) can be lowered.
　このように、光源装置８１では、光学系３を含む筐体１７をアクチュエータ１８（光学系移動部５２）によって移動させるという簡易な構成で、連続レーザ光Ｌの集光位置Ｆを容易に金属構造体１３（点灯開始領域ＲＳ）から連続レーザ光Ｌの光軸ＬＡ方向と交わる方向（金属構造体１３の延在方向の軸に沿った方向）に離間させることができる。これにより、電子放射部１３ａ（金属構造体１３）の表面（点灯開始領域ＲＳ）における連続レーザ光Ｌのエネルギー密度を、レーザ支持光ＬＳ点灯前、点灯時、及び点灯後（維持時）の各状態に適したエネルギー密度とすることが可能となる。 Thus, in the light source device 81, the condensing position F of the continuous laser light L can be easily made into a metal structure with a simple configuration in which the casing 17 including the optical system 3 is moved by the actuator 18 (optical system moving unit 52). It can be separated from the body 13 (lighting start region RS) in a direction (direction along the axis of the extending direction of the metal structure 13) intersecting the optical axis LA direction of the continuous laser light L. As a result, the energy density of the continuous laser light L on the surface (lighting start region RS) of the electron emitting portion 13a (metal structure 13) is changed to the laser support light LS before lighting, during lighting, and after lighting (maintenance). It becomes possible to make the energy density suitable for the state.
　本実施形態では、レーザ支持光ＬＳ点灯前に、連続レーザ光Ｌをスパッタリングが生じない程度のエネルギー密度でデフォーカスした状態で棒状部材１５（支持部１３ｂ）の保持部１３ｆに照射していることで、保持部１３ｆがスパッタリングされることなく加熱され、それに伴って電子放射部１３ａ（金属構造体１３）の温度も上昇する。さらに、縮径部１３ｅが形成されていることによって、保持部１３ｆから基端部１３ｇ側への熱伝導経路が制限されているので、連続レーザ光Ｌの照射による電子放射部１３ａ（金属構造体１３）の加熱をより効率良く行うことができる。また、棒状部材１５（支持部１３ｂ）の一部を縮径することで、縮径部１３ｅの表面がバルブ１２の内壁面から離間するため、縮径部１３ｅからバルブ１２への熱の逃げも抑制できる。そのため、後続のレーザ支持光ＬＳ点灯時において電子放射部１３ａ（金属構造体１３）から電子を放出させやすくすることができ、レーザ支持光ＬＳを点灯させることが容易となる。なお、本実施形態では、連続レーザ光Ｌの照射による加熱を行うために、棒状部材１５（支持部１３ｂ）は、加熱に耐え得るモリブデンやタングステンといった高融点金属からなるのが特に好ましい。 In this embodiment, before the laser support light LS is turned on, the continuous laser light L is irradiated to the holding portion 13f of the rod-shaped member 15 (support portion 13b) in a defocused state with an energy density that does not cause sputtering. Thus, the holding portion 13f is heated without being sputtered, and accordingly, the temperature of the electron emitting portion 13a (metal structure 13) also rises. Further, since the reduced diameter portion 13e is formed, the heat conduction path from the holding portion 13f to the base end portion 13g side is limited, so that the electron emitting portion 13a (metal structure body) by the continuous laser light L irradiation. The heating of 13) can be performed more efficiently. Further, by reducing the diameter of a part of the rod-shaped member 15 (support portion 13b), the surface of the reduced diameter portion 13e is separated from the inner wall surface of the valve 12, and therefore heat escape from the reduced diameter portion 13e to the valve 12 is also achieved. Can be suppressed. Therefore, it is possible to easily emit electrons from the electron emitting portion 13a (metal structure 13) during the subsequent laser support light LS lighting, and it is easy to light the laser support light LS. In this embodiment, in order to perform heating by irradiation with the continuous laser beam L, it is particularly preferable that the rod-shaped member 15 (support portion 13b) is made of a high melting point metal such as molybdenum or tungsten that can withstand the heating.
　また、レーザ支持光ＬＳ点灯時には、レーザ支持光ＬＳの点灯に十分なエネルギー密度で連続レーザ光Ｌを電子放射部１３ａの表面（点灯開始領域ＲＳ）に対して照射できるため、レーザ支持光ＬＳを確実に点灯させることができる。そして、レーザ支持光ＬＳ点灯後（維持時）には、金属構造体１３（点灯開始領域ＲＳ）から離間した内部空間Ｓの空間領域に移動させたレーザ支持光ＬＳに対して連続レーザ光Ｌを照射することでレーザ支持光ＬＳを維持する。そのため、レーザ支持光ＬＳによる金属構造体１３のスパッタリングを抑制できる一方で、金属構造体１３に対しては連続レーザ光Ｌも照射されないため、連続レーザ光Ｌによる金属構造体１３のスパッタリングをも抑制できる。よって、スパッタリングによる金属構造体１３の劣化及びバルブ１２の内壁の汚れを抑制して発光封体１１（光源７）の長寿命化を実現できるため、光源装置として十分な長寿命化が図られる。 In addition, when the laser support light LS is turned on, the continuous laser light L can be applied to the surface of the electron emission portion 13a (lighting start region RS) with an energy density sufficient for turning on the laser support light LS. It can be lit reliably. Then, after the laser support light LS is turned on (during maintenance), the continuous laser light L is applied to the laser support light LS moved to the space region of the internal space S separated from the metal structure 13 (lighting start region RS). The laser support light LS is maintained by irradiation. Therefore, while the sputtering of the metal structure 13 by the laser support light LS can be suppressed, the continuous laser light L is not irradiated to the metal structure 13, so that the sputtering of the metal structure 13 by the continuous laser light L is also suppressed. it can. Therefore, since the deterioration of the metal structure 13 and the contamination of the inner wall of the bulb 12 due to sputtering can be suppressed and the life of the light emitting envelope 11 (light source 7) can be increased, the life of the light source device can be sufficiently increased.
　上記第６実施形態では、縮径部１３ｅはバルブ１２の突出部分１２ｂにおける球状部分１２ａ側の端部に対応する位置に設けられていたが、縮径部１３ｅは、球状部分１２ａに入り込むように形成されていてもよく、また、縮径部１３ｅは、棒状部材１５（支持部１３ｂ）の基端側まで連続して延在していてもよい。また、上記第６実施形態では、電子放射部１３ａは例えば細径の円柱状に形成されていたが、図２１に示すように、電子放射部２３ａは、例えば棒状部材１５（支持部１３ｂ）の延在する軸方向に延びる細径の円柱部２４と、円柱部２４の先端側に設けられた傾斜部２５とを有していてもよい。傾斜部２５には、円柱部２４の延在方向の軸に対して傾斜した傾斜面２５ａが形成されており、この傾斜面２５ａは、連続レーザ光Ｌの光軸ＬＡに対しても傾斜している。 In the sixth embodiment, the reduced diameter portion 13e is provided at a position corresponding to the end of the protruding portion 12b of the bulb 12 on the spherical portion 12a side. However, the reduced diameter portion 13e enters the spherical portion 12a. The reduced diameter portion 13e may be formed continuously to the base end side of the rod-shaped member 15 (support portion 13b). Moreover, in the said 6th Embodiment, although the electron emission part 13a was formed in the cylindrical shape of a small diameter, as shown in FIG. 21, the electron emission part 23a is, for example, the rod-shaped member 15 (support part 13b). You may have the thin cylindrical part 24 extended in the axial direction extended, and the inclination part 25 provided in the front end side of the cylindrical part 24. FIG. The inclined portion 25 is formed with an inclined surface 25a inclined with respect to the axis in the extending direction of the cylindrical portion 24. The inclined surface 25a is also inclined with respect to the optical axis LA of the continuous laser beam L. Yes.
　図２２は、電子放射部２３ａ（金属構造体２３）の作用を示す要部拡大図である。通常、レーザ支持光ＬＳを点灯させる際には、連続レーザ光Ｌの集光位置Ｆを、電子放射部２３ａの略表面に位置するように集光させるのが好ましいが、そのためには光学系３の厳密な調整を要する場合がある。なお、連続レーザ光Ｌの集光位置Ｆが電子放射部２３ａの略表面でなくとも、電子放射部２３ａの略表面における連続レーザ光Ｌのエネルギー密度が十分に高ければレーザ支持光ＬＳの点灯は可能だが、そのためにはより大出力のレーザが必要になる。これに対して、本実施形態においては、レーザの出力を変更することなく、連続レーザ光Ｌの集光位置Ｆの光軸ＬＡ方向における位置精度に余裕を持たせることが可能となる。まず、図２２（ａ）に示すように、電子放射部２３ａにおける連続レーザ光Ｌの集光位置Ｆを、光軸ＬＡ方向における円柱部２４の内部に確実に収まる程度の位置精度で仮想の集光位置Ｆ’として位置決めする。次いで、円柱部２４の延在方向の軸に沿った方向に、連続レーザ光Ｌの仮想の集光位置Ｆ’が棒状部材１５（支持部１３ｂ）側から傾斜部２５側へ移動するように、アクチュエータ１８によって筐体１７を移動させる。その結果、図２２（ｂ）に示すように、連続レーザ光Ｌの集光位置Ｆを、電子放射部２３ａの傾斜部２５における傾斜面２５ａの略表面上のいずれかの位置に確実に位置させることができるので、レーザ支持光ＬＳを点灯することができる。 FIG. 22 is an enlarged view of a main part showing the operation of the electron emitting portion 23a (metal structure 23). Usually, when the laser support light LS is turned on, it is preferable to focus the condensing position F of the continuous laser light L so that it is positioned on the substantially surface of the electron emitting portion 23a. May require precise adjustment. Even if the condensing position F of the continuous laser light L is not the substantially surface of the electron emission portion 23a, the laser support light LS is turned on if the energy density of the continuous laser light L on the approximate surface of the electron emission portion 23a is sufficiently high. Yes, but that requires a higher power laser. On the other hand, in the present embodiment, it is possible to give a margin to the positional accuracy of the condensing position F of the continuous laser light L in the optical axis LA direction without changing the output of the laser. First, as shown in FIG. 22 (a), a virtual collection point with a positional accuracy of a degree that the condensing position F of the continuous laser light L in the electron emission part 23a is surely contained in the cylindrical part 24 in the direction of the optical axis LA is obtained. Positioning as the optical position F ′. Next, the virtual condensing position F ′ of the continuous laser beam L is moved from the rod-shaped member 15 (supporting portion 13b) side to the inclined portion 25 side in the direction along the axis of the extending direction of the cylindrical portion 24. The housing 17 is moved by the actuator 18. As a result, as shown in FIG. 22B, the condensing position F of the continuous laser beam L is reliably positioned at any position on the substantially surface of the inclined surface 25a in the inclined portion 25 of the electron emitting portion 23a. Therefore, the laser support light LS can be turned on.
　このように、電子放射部２３ａには、レーザ支持光ＬＳ点灯時に連続レーザ光Ｌを移動させることで、電子放射部２３ａの略表面のいずれかの位置に連続レーザ光Ｌの集光位置Ｆを位置させるための傾斜面２５ａが形成されている。このため、光学系３を厳密に調整しなくとも、仮想の集光位置Ｆ’が円柱部２４の内部に位置する限りにおいては、連続レーザ光Ｌの集光位置Ｆを傾斜面２５ａの略表面上のいずれかの位置に確実に位置させることができるので、レーザ支持光ＬＳを点灯できる。なお、本実施形態においては、連続レーザ光Ｌが円柱部２４に照射されているとき（図２２（ａ））の円柱部２４の表面における連続レーザ光Ｌは、スパッタリングが生じない程度のエネルギー密度でデフォーカスされた状態であるため、連続レーザ光Ｌの円柱部２４への照射によって、電子放射部２３ａを加熱することとなり、後続する連続レーザ光Ｌの傾斜面２５ａへの照射時におけるレーザ支持光ＬＳの点灯を容易にする効果を奏する。 As described above, by moving the continuous laser light L to the electron emitting portion 23a when the laser support light LS is turned on, the condensing position F of the continuous laser light L is placed at any position on the surface of the electron emitting portion 23a. An inclined surface 25a for positioning is formed. For this reason, as long as the virtual condensing position F ′ is located inside the cylindrical portion 24 without strictly adjusting the optical system 3, the condensing position F of the continuous laser light L is substantially the surface of the inclined surface 25 a. Since it can be surely positioned at any of the above positions, the laser support light LS can be turned on. In the present embodiment, the continuous laser beam L on the surface of the cylindrical portion 24 when the continuous laser beam L is irradiated onto the cylindrical portion 24 (FIG. 22A) has an energy density that does not cause sputtering. Therefore, the electron emitting portion 23a is heated by irradiating the cylindrical portion 24 with the continuous laser light L, and the laser support during the subsequent irradiation of the inclined surface 25a with the continuous laser light L is performed. There exists an effect which makes lighting of light LS easy.
　上記第６実施形態では、アクチュエータ１８（光学系移動部５２）によって連続レーザ光Ｌの集光位置Ｆを移動させていたが、光学系３の調整によって連続レーザ光Ｌの集光位置Ｆを移動させてもよい。また、上記第３実施形態で説明した発光封体移動部５３を適用することによって連続レーザ光Ｌの集光位置Ｆを移動させてもよく、上記第４実施形態で説明した電子放射構造体移動部５４を適用することによって連続レーザ光Ｌの集光位置Ｆを移動させてもよい。これらの場合でも上記第６実施形態と同様に、スパッタリングによる金属構造体１３の劣化及びバルブ１２の内壁の汚れを抑制して発光封体１１（光源７）の長寿命化を実現できるため、光源装置として十分な長寿命化が図られる。 In the sixth embodiment, the condensing position F of the continuous laser light L is moved by the actuator 18 (the optical system moving unit 52). However, the condensing position F of the continuous laser light L is moved by adjusting the optical system 3. You may let them. Further, by applying the light emitting envelope moving unit 53 described in the third embodiment, the condensing position F of the continuous laser light L may be moved, and the electron emission structure moving described in the fourth embodiment is performed. The condensing position F of the continuous laser light L may be moved by applying the unit 54. In these cases as well, as in the sixth embodiment, the deterioration of the metal structure 13 due to sputtering and the contamination of the inner wall of the bulb 12 can be suppressed, and the life of the light emitting envelope 11 (light source 7) can be increased. The lifetime can be extended sufficiently as an apparatus.
　上述した実施形態においては、いずれもレーザ支持光ＬＳを、点灯時における連続レーザ光Ｌの光軸ＬＡ上又は連続レーザ光Ｌの移動方向軸上に移動させて維持していたが、内部空間Ｓの空間領域における任意の位置に移動させて維持してもよい。この場合、金属構造体に対するレーザ支持光ＬＳの影響をさらに低減できるような位置を選択したり、外部の光学系等に合わせて、レーザ支持光ＬＳを光源７から取り出すのに適した位置を選択することができる。また、縮径部１３ｅを第６実施形態以外の実施形態に採用した場合でも、電子放射部１３ａ（金属構造体１３）の加熱効率を向上させ、電子放射部１３ａ（金属構造体１３）から電子を放出させやすくすることができる。 In the above-described embodiments, the laser support light LS is moved and maintained on the optical axis LA of the continuous laser light L or the movement direction axis of the continuous laser light L at the time of lighting. It may be moved to an arbitrary position in the space area. In this case, a position where the influence of the laser support light LS on the metal structure can be further reduced is selected, or a position suitable for taking out the laser support light LS from the light source 7 is selected in accordance with an external optical system or the like. can do. Further, even when the reduced diameter portion 13e is adopted in the embodiments other than the sixth embodiment, the heating efficiency of the electron emission portion 13a (metal structure 13) is improved, and the electron emission portion 13a (metal structure 13) is changed to an electron. Can be easily released.
［第７実施形態］
　図２３は、本発明の第７実施形態に係る光源装置を示す概略図である。同図に示すように、光源装置１０１は、レーザ光を出射するレーザ部１０２と、レーザ部１０２からのレーザ光Ｌを導光する光学系１０３と、互いに対向する対向電極１１３，１１３を収容する発光封体１１１（光源１０７）とを含んで構成されている。この光源装置１０１では、対向電極１１３，１１３の間に放電を発生させ、その放電領域にレーザ光を照射することで、光源１０７である発光封体１１１内において、レーザ光Ｌの集光位置Ｆを含む所定の発光領域（点灯開始領域ＲＳ）を有するプラズマ発光である高輝度のレーザ支持光を発生させることができる。レーザ支持光は、例えば半導体検査用の光源や分光計測用の光として使用される。 [Seventh Embodiment]
FIG. 23 is a schematic view showing a light source device according to the seventh embodiment of the present invention. As shown in the figure, the light source device 101 houses a laser unit 102 that emits laser light, an optical system 103 that guides laser light L from the laser unit 102, and counter electrodes 113 and 113 that face each other. The light emitting envelope 111 (light source 107) is included. In this light source device 101, a discharge is generated between the counter electrodes 113, 113, and the discharge region is irradiated with laser light, whereby the condensing position F of the laser light L in the light emitting envelope 111, which is the light source 107. It is possible to generate high-luminance laser support light that is plasma light emission having a predetermined light-emitting region (lighting start region RS). The laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
　レーザ部１０２は、例えばレーザダイオードである。また、レーザ部１０２としては、連続レーザ及びパルスレーザのいずれを用いてもよいが、本実施形態においては連続レーザを用いる。レーザ部１０２からは、発光ガスＧの吸収スペクトルに合わせた波長、例えば波長９８０ｎｍのレーザ光Ｌが出射する。レーザ光Ｌの出力は、例えば３０Ｗ程度となっている。レーザ部１０２から出射したレーザ光Ｌは、光ファイバ１０４によって光学系１０３に導光される。光学系１０３は、レーザ部１０２からのレーザ光Ｌを対向電極１１３，１１３間に導光する光学系である。光学系１０３は、例えば２つのレンズ１０５，１０６によって構成されている。光ファイバ１０４のヘッド１０４ａから出射したレーザ光Ｌは、レンズ１０５によって平行光化した後、レンズ１０６によって光軸ＬＡをもって発光封体１１１に向けて集光する。集光されたレーザ光Ｌの直径は、例えば直径１２０μｍ程度である。 The laser unit 102 is, for example, a laser diode. As the laser unit 102, either a continuous laser or a pulsed laser may be used, but in this embodiment, a continuous laser is used. The laser unit 102 emits a laser beam L having a wavelength matched to the absorption spectrum of the luminescent gas G, for example, a wavelength of 980 nm. The output of the laser beam L is, for example, about 30W. Laser light L emitted from the laser unit 102 is guided to the optical system 103 by the optical fiber 104. The optical system 103 is an optical system that guides the laser light L from the laser unit 102 between the counter electrodes 113 and 113. The optical system 103 includes, for example, two lenses 105 and 106. The laser light L emitted from the head 104 a of the optical fiber 104 is collimated by the lens 105 and then condensed toward the light emitting envelope 111 by the lens 106 with the optical axis LA. The diameter of the condensed laser beam L is, for example, about 120 μm in diameter.
　発光封体１１１は、より具体的には、内部空間Ｓに発光ガスＧが高圧に封入されたバルブ（筐体）１１２と、内部空間Ｓ内で互いに対向する対向電極１１３，１１３とを含んで構成されている。バルブ１１２は、例えばガラスによって中空に形成されている。バルブ１１２の内部空間Ｓには、発光ガスＧとして例えばキセノンガスが高圧で封入されている。 More specifically, the light emitting envelope 111 includes a bulb (housing) 112 in which a light emitting gas G is sealed in a high pressure in the internal space S, and counter electrodes 113 and 113 facing each other in the internal space S. It is configured. The bulb 112 is formed hollow by glass, for example. In the internal space S of the bulb 112, for example, xenon gas as a luminescent gas G is sealed at a high pressure.
　対向電極１１３，１１３は、例えばタングステン等の高融点金属によって棒状に形成されており、その先端側で互いに対向している。対向電極１１３の基端側は、バルブ１１２の壁部を貫通してバルブ１１２の外部に引き出され、図示しない電源部に接続された給電部材１１４にそれぞれ接続されることで、電極間放電のための電力が対向電極１１３，１１３に供給されている。なお、対向電極１１３，１１３が直接バルブ１１２の壁部を貫通するのではなく、対向電極１１３，１１３と電気的に接続された導電部材がバルブ１１２の壁部を貫通してバルブ１１２の外部に引き出され、給電部材１１４にそれぞれ接続されていてもよい。 The counter electrodes 113 and 113 are formed in a rod shape from a high melting point metal such as tungsten, for example, and are opposed to each other on the tip side. The base end side of the counter electrode 113 passes through the wall portion of the bulb 112, is drawn out of the bulb 112, and is connected to a power supply member 114 connected to a power supply portion (not shown), thereby discharging between the electrodes. Is supplied to the counter electrodes 113, 113. Note that the counter electrodes 113 and 113 do not directly penetrate the wall portion of the valve 112, but a conductive member electrically connected to the counter electrodes 113 and 113 penetrates the wall portion of the valve 112 to the outside of the valve 112. It may be pulled out and connected to the power supply member 114.
　以上のような光源装置１０１では、給電部材１１４を介して対向電極１１３，１１３の間に高電圧を付加することにより、対向電極１１３，１１３に放電領域が形成され、放電によって内部空間Ｓ内の発光ガスＧがイオン化及びプラズマ化される。この放電領域にレーザ光Ｌが照射されることで、高輝度のレーザ支持光が点灯開始領域ＲＳで点灯し、レーザ支持光へのレーザ光Ｌの照射を継続させることで、対向電極１１３，１１３への電力供給が停止されても、レーザ光Ｌによるエネルギー供給を受けてレーザ支持光が維持される。なお、予めレーザ光Ｌを放電領域に集光させておき、その後、対向電極１１３，１１３間で放電領域を形成してもよい。さらに、レーザ支持光の点灯後は、対向電極１１３，１１３への給電を停止してもよく、給電を継続してもよい。 In the light source device 101 as described above, a high voltage is applied between the counter electrodes 113 and 113 via the power supply member 114, whereby a discharge region is formed in the counter electrodes 113 and 113. The luminescent gas G is ionized and converted into plasma. By irradiating the discharge region with the laser light L, the high-luminance laser support light is turned on in the lighting start region RS, and the laser support light is continuously irradiated to the laser support light, whereby the counter electrodes 113 and 113 are used. Even if the power supply to is stopped, the laser support light is maintained by receiving the energy supply by the laser light L. Note that the laser beam L may be condensed in the discharge region in advance, and then the discharge region may be formed between the counter electrodes 113 and 113. Further, after the laser supporting light is turned on, the power supply to the counter electrodes 113 and 113 may be stopped or the power supply may be continued.
　また、光源装置１０１は、集光位置移動部として、レーザ光Ｌの光路長を調整するための光路長調整部１５１を備えている。より詳細には、光路長調整部１５１は、バルブ１１２の内部空間Ｓにおける、バルブ１１２の内壁から集光位置Ｆまでのレーザ光Ｌの光軸ＬＡの長さである光路長ＬＬを調整する。光路長調整部１５１としては、例えば図２３に示すような光学部材１０８を用いる。光学部材１０８は、レーザ光Ｌの光軸ＬＡ方向の厚さ（レーザ光Ｌが透過する長さ）が略均一な板状の透明媒体１０９と、透明媒体１０９を保持するアクチュエータ１１０とによって構成されている。透明媒体１０９は、例えば合成石英ガラスといった空気（発光封体１１１外部のレーザ光照射雰囲気）よりも高い屈折率を有する材料によって形成されている。アクチュエータ１１０に保持された透明媒体１０９は、レーザ支持光ＬＳ点灯時（図２４）及び点灯後（維持時）（図２５）のそれぞれに応じてレーザ光Ｌの光軸ＬＡと略直交する方向に移動する。 Further, the light source device 101 includes an optical path length adjusting unit 151 for adjusting the optical path length of the laser light L as a condensing position moving unit. More specifically, the optical path length adjustment unit 151 adjusts the optical path length LL that is the length of the optical axis LA of the laser light L from the inner wall of the bulb 112 to the condensing position F in the internal space S of the bulb 112. As the optical path length adjustment unit 151, for example, an optical member 108 as shown in FIG. 23 is used. The optical member 108 includes a plate-shaped transparent medium 109 having a substantially uniform thickness in the optical axis LA direction of the laser light L (a length through which the laser light L is transmitted) and an actuator 110 that holds the transparent medium 109. ing. The transparent medium 109 is made of a material having a higher refractive index than air (laser light irradiation atmosphere outside the light emitting envelope 111) such as synthetic quartz glass. The transparent medium 109 held by the actuator 110 is in a direction substantially orthogonal to the optical axis LA of the laser light L in accordance with each of the laser support light LS lighting (FIG. 24) and after lighting (maintenance) (FIG. 25). Moving.
　すなわち、まず、図２４に示すように、透明媒体１０９は、光学系１０３と発光封体１１１との間に介在し、レーザ光Ｌにおける断面方向の全領域が透明媒体１０９を通るように配置される。このとき、レーザ光Ｌは、例えば対向電極１１３，１１３の尖頭部間を結ぶラインＸ上、つまり対向電極１１３，１１３間の放電領域の中でも、最も放電する可能性が高い放電経路に集光している。このときのラインＸ上の集光位置Ｆ（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度は、例えば２６０ｋＷ／ｃｍ２程度となっている。これにより、対向電極１１３，１１３間の放電領域（点灯開始領域ＲＳ）において発生したプラズマにレーザ光Ｌを照射して、レーザ支持光ＬＳが点灯する。 That is, first, as shown in FIG. 24, the transparent medium 109 is interposed between the optical system 103 and the light emitting envelope 111, and is arranged so that the entire region in the cross-sectional direction of the laser light L passes through the transparent medium 109. The At this time, the laser beam L is focused on a discharge path that is most likely to be discharged, for example, on a line X connecting the tip portions of the counter electrodes 113 and 113, that is, in a discharge region between the counter electrodes 113 and 113. is doing. At this time, the energy density of the laser light L at the condensing position F (lighting start region RS) on the line X is, for example, about 260 kW / cm 2 . Thereby, the laser beam L is irradiated to the plasma generated in the discharge region (lighting start region RS) between the counter electrodes 113 and 113, and the laser support light LS is turned on.
　続いてレーザ支持光ＬＳ点灯後（維持時）には、図２５に示すように、透明媒体１０９は、アクチュエータ１１０によって光学系１０３と発光封体１１１との間に介在しないように移動される。このとき、レーザ光Ｌの集光位置Ｆは、レーザ支持光ＬＳ点灯時のレーザ光Ｌの集光位置Ｆに対して光軸ＬＡ方向の手前側（図２５の上方側）に移動することとなるため、ラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度は、レーザ支持光ＬＳ点灯時（維持時）（図２４）のラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度に対して低下している。 Subsequently, after the laser support light LS is turned on (during maintenance), the transparent medium 109 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111 as shown in FIG. At this time, the condensing position F of the laser light L moves to the near side (upper side in FIG. 25) in the optical axis LA direction with respect to the condensing position F of the laser light L when the laser support light LS is turned on. Therefore, the energy density of the laser beam L on the line X (lighting start region RS) is the energy density of the laser beam L on the line X (lighting start region RS) when the laser support light LS is lit (maintained) (FIG. 24). Decreasing with respect to energy density.
　また、レーザ光Ｌの集光位置Ｆが対向電極１１３，１１３（点灯開始領域ＲＳ）から離間するのに伴って、プラズマ発光であるレーザ支持光ＬＳも対向電極１１３，１１３（点灯開始領域ＲＳ）から離間するため、レーザ支持光ＬＳによる対向電極１１３，１１３のスパッタリングを抑制できる。以上より、スパッタリングによる対向電極１１３，１１３の劣化や、それに伴ってスパッタリングされた物質がバルブ１１２の内壁に堆積していくことによるレーザ光Ｌの入射及びレーザ支持光ＬＳの取出しの阻害を抑制できる。そのため、レーザ支持光ＬＳの発光強度の低下を抑制でき、発光封体１１１及び光源装置１０１の十分な長寿命化が図られる。 Further, as the condensing position F of the laser beam L is separated from the counter electrodes 113 and 113 (lighting start region RS), the laser support light LS that is plasma emission is also the counter electrodes 113 and 113 (lighting start region RS). Therefore, sputtering of the counter electrodes 113 and 113 by the laser support light LS can be suppressed. As described above, it is possible to suppress the deterioration of the counter electrodes 113 and 113 due to sputtering and the inhibition of the incidence of the laser beam L and the extraction of the laser support beam LS due to the deposition of the sputtered substance on the inner wall of the bulb 112. . Therefore, a decrease in the emission intensity of the laser support light LS can be suppressed, and the lifetime of the light emitting envelope 111 and the light source device 101 can be sufficiently extended.
　さらに、集光位置Ｆにおけるレーザ光Ｌのエネルギー密度を、レーザ支持光ＬＳ点灯時よりもレーザ支持光ＬＳを維持可能な程度に小さくしたり、対向電極１１３，１１３への電力供給を停止することで、対向電極１１３，１１３のスパッタリングを更に抑制できる。したがって、発光封体１１１および光源装置１０１の十分な長寿命化が図られる。 Further, the energy density of the laser light L at the condensing position F is made smaller than the time when the laser support light LS is turned on to the extent that the laser support light LS can be maintained, or power supply to the counter electrodes 113 and 113 is stopped. Thus, sputtering of the counter electrodes 113 and 113 can be further suppressed. Therefore, the light emitting envelope 111 and the light source device 101 can have a sufficiently long life.
　光学部材１０８（光路長調整部１５１）の構成は、他の態様をとり得る。光学部材１０８は、例えば空間光変調素子といった光変調素子によって構成されていてもよい。また、透明媒体１０９に代えて、例えば図８（ａ）に示すような透明媒体３９を用いることもできる。透明媒体３９は、一面が他面に対して傾斜していることで、レーザ光Ｌの光軸ＬＡ方向の厚さ（レーザ光Ｌが透過する長さ）が連続的に変化する板状をなしており、透明媒体１０９と同様にアクチュエータ１１０に保持された状態で用いられる。 The configuration of the optical member 108 (optical path length adjusting unit 151) can take other modes. The optical member 108 may be composed of a light modulation element such as a spatial light modulation element. Further, instead of the transparent medium 109, for example, a transparent medium 39 as shown in FIG. The transparent medium 39 has a plate shape in which one surface is inclined with respect to the other surface, so that the thickness of the laser beam L in the direction of the optical axis LA (the length through which the laser beam L passes) changes continuously. In the same manner as the transparent medium 109, it is used while being held by the actuator 110.
　透明媒体３９を用いる場合、まず、透明媒体３９をレーザ光Ｌにおける断面方向の全領域が透明媒体３９を通るように光学系１０３と発光封体１１１との間に介在させ、例えばレーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）で集光させる。これにより、対向電極１１３，１１３間の放電領域（点灯開始領域ＲＳ）においてレーザ支持光ＬＳが点灯する。 When the transparent medium 39 is used, first, the transparent medium 39 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire area in the cross-sectional direction of the laser light L passes through the transparent medium 39. The light is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Thereby, the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
　続いて、レーザ支持光ＬＳ点灯後（維持時）には、透明媒体３９は、アクチュエータ１１０によって光学系１０３と発光封体１１１との間に介在しないように移動される。このとき、透明媒体３９の一面が他面に対して傾斜しているため、透明媒体３９の移動に伴って透明媒体３９のレーザ光Ｌが入射する領域における厚さも徐々に小さくなっていく。そのため、レーザ光Ｌの集光位置Ｆは、透明媒体３９の移動に伴って徐々に光軸ＬＡ方向の手前側（図２４の上方側）に移動していく。これにより、レーザ支持光ＬＳの維持に十分なエネルギー密度を有する領域が徐々に光軸ＬＡ方向の手前側に移動することとなる。したがって、レーザ支持光ＬＳ点灯後（維持時）にレーザ光Ｌの集光位置Ｆを光軸ＬＡ方向の手前側に移動させたとしても、レーザ光Ｌの集光位置Ｆの移動は連続的な移動となるため、レーザ支持光ＬＳの維持がより確実になされる。 Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 39 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111. At this time, since one surface of the transparent medium 39 is inclined with respect to the other surface, the thickness of the transparent medium 39 in the region where the laser light L is incident gradually decreases as the transparent medium 39 moves. Therefore, the condensing position F of the laser light L gradually moves toward the front side (upper side in FIG. 24) in the direction of the optical axis LA as the transparent medium 39 moves. As a result, a region having an energy density sufficient to maintain the laser support light LS gradually moves toward the front side in the direction of the optical axis LA. Therefore, even if the condensing position F of the laser light L is moved to the near side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is continuous. Since it moves, the laser support light LS is more reliably maintained.
　また、透明媒体１０９に代えて、例えば図８（ｂ）に示すような透明媒体４９を用いることもできる。透明媒体４９は、レーザ光Ｌの光軸ＬＡ方向の厚さ（レーザ光Ｌが透過する長さ）が異なる２つの部材が接合されており、例えば４ｍｍ程度の厚さを有する第１の透明媒体４９ａと、例えば２ｍｍ程度の厚さを有する第２の透明媒体４９ｂとが互いの端面同士で接合した構成となっている。 Further, instead of the transparent medium 109, for example, a transparent medium 49 as shown in FIG. 8B can be used. The transparent medium 49 is a first transparent medium having, for example, a thickness of about 4 mm, in which two members having different thicknesses in the optical axis LA direction of the laser light L (length through which the laser light L passes) are joined. 49a and the 2nd transparent medium 49b which has thickness of about 2 mm, for example, have the structure joined to mutual end surfaces.
　透明媒体４９を用いる場合、まず、透明媒体４９をレーザ光Ｌにおける断面方向の全領域が第１の透明媒体４９ａを通るように光学系１０３と発光封体１１１との間に介在させ、例えばレーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）で集光させる。これにより、対向電極１１３，１１３間の放電領域（点灯開始領域ＲＳ）においてレーザ支持光ＬＳが点灯する。 In the case of using the transparent medium 49, first, the transparent medium 49 is interposed between the optical system 103 and the light emitting envelope 111 so that the entire cross-sectional area in the laser light L passes through the first transparent medium 49a. The light L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113. Thereby, the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113.
　続いて、レーザ支持光ＬＳ点灯後（維持時）には、透明媒体４９は、アクチュエータ１１０によって光学系１０３と発光封体１１１との間に介在しないように移動される。このとき、透明媒体４９が厚みの異なる透明媒体４９ａ，４９ｂから構成されているため、透明媒体４９の移動に伴って透明媒体４９のレーザ光Ｌが入射する領域における厚さが段階的に小さくなっていく。そのため、レーザ光Ｌの集光位置Ｆは、透明媒体４９の移動に伴って段階的に光軸ＬＡ方向の手前側（図２４の上方側）に移動していく。これにより、レーザ支持光ＬＳの維持に十分なエネルギー密度を有する領域が段階的に光軸ＬＡ方向の手前側に移動することとなる。したがって、レーザ支持光ＬＳ点灯後（維持時）にレーザ光Ｌの集光位置Ｆを光軸ＬＡ方向の手前側に移動させたとしても、レーザ光Ｌの集光位置Ｆの移動は段階的な（小刻みな）移動となるため、レーザ支持光ＬＳの維持がより確実になされる。 Subsequently, after the laser supporting light LS is turned on (during maintenance), the transparent medium 49 is moved by the actuator 110 so as not to be interposed between the optical system 103 and the light emitting envelope 111. At this time, since the transparent medium 49 is composed of transparent media 49a and 49b having different thicknesses, the thickness of the transparent medium 49 in the region where the laser light L is incident gradually decreases as the transparent medium 49 moves. To go. Therefore, the condensing position F of the laser light L is gradually moved to the near side (upper side in FIG. 24) in the optical axis LA direction as the transparent medium 49 is moved. As a result, a region having an energy density sufficient to maintain the laser support light LS is moved stepwise toward the optical axis LA direction. Therefore, even if the condensing position F of the laser light L is moved to the front side in the direction of the optical axis LA after the laser supporting light LS is turned on (during maintenance), the movement of the condensing position F of the laser light L is stepwise. Since the movement is small, the laser support light LS is more reliably maintained.
　また、上記第７実施形態では、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置Ｆは対向電極１１３，１１３の尖頭部間を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の手前側（図２３における上方側）の位置であったが、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置Ｆは、対向電極１１３，１１３の尖頭部を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の奥側（図２３における下方側）の位置であってもよい。 Moreover, in the said 7th Embodiment, the condensing position F of the laser beam L after the laser support light LS lighting (at the time of maintenance) is from the line X (lighting start area | region RS) which connects between the cusps of the counter electrodes 113 and 113. Is the position on the near side in the direction of the optical axis LA (upper side in FIG. 23), but the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is the tip of the counter electrodes 113, 113. It may be a position on the back side (lower side in FIG. 23) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the heads.
　この場合、図２６に示すように、レーザ光Ｌにおける断面方向の全領域が透明媒体１０９を通らないように光学系１０３と発光封体１１１との間から透明媒体１０９を退避させた状態で、例えばレーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）で集光させる。一方、レーザ支持光ＬＳ点灯後（維持時）では、図２７に示すように、レーザ光Ｌにおける断面方向の全領域が透明媒体１０９を通るように光学系１０３と発光封体１１１との間に透明媒体１０９を介在させる。このとき、レーザ光Ｌの集光位置Ｆはレーザ支持光ＬＳ点灯時のレーザ光Ｌの集光位置Ｆ（点灯開始領域ＲＳ）に対して光軸ＬＡ方向の奥側（図２６における下方側）に移動することとなる。したがって、この場合でも上記第７実施形態と同様に、対向電極１１３のスパッタリングを抑制できる。 In this case, as shown in FIG. 26, in a state where the transparent medium 109 is retracted from between the optical system 103 and the light emitting envelope 111 so that the entire region in the cross-sectional direction of the laser light L does not pass through the transparent medium 109, For example, the laser beam L is condensed on the line X (lighting start region RS) connecting the tip portions of the counter electrodes 113 and 113. On the other hand, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 27, the entire region of the laser light L in the cross-sectional direction passes between the transparent medium 109 and the optical system 103 and the light emitting envelope 111. A transparent medium 109 is interposed. At this time, the condensing position F of the laser light L is the back side in the optical axis LA direction (the lower side in FIG. 26) with respect to the condensing position F (lighting start region RS) of the laser light L when the laser support light LS is turned on. Will be moved to. Therefore, even in this case, similarly to the seventh embodiment, sputtering of the counter electrode 113 can be suppressed.
［第８実施形態］
　図２８，２９は、それぞれ本発明の第８実施形態に係る光源装置を示す図である。以下では、第８実施形態に係る光源装置について説明するが、第７実施形態と重複する説明は省略する。図２８，２９に示すように、光源装置１２１では、例えば光学系１０３と光ファイバ１０４のヘッド１０４ａとが筐体１１７に収容されている。筐体１１７は、アクチュエータ１１８（光学系移動部１５２）に保持されており、レーザ支持光ＬＳ点灯時（図２８）及び点灯後（維持時）（図２９）それぞれに応じて光軸ＬＡ方向に移動する。 [Eighth Embodiment]
28 and 29 are views showing a light source device according to the eighth embodiment of the present invention. Hereinafter, the light source device according to the eighth embodiment will be described, but the description overlapping with the seventh embodiment will be omitted. As shown in FIGS. 28 and 29, in the light source device 121, for example, the optical system 103 and the head 104 a of the optical fiber 104 are accommodated in a housing 117. The casing 117 is held by the actuator 118 (optical system moving unit 152), and the laser support light LS is turned on in the direction of the optical axis LA according to lighting (FIG. 28) and after lighting (maintenance) (FIG. 29). Moving.
　すなわち、まず、図２８に示すように、筐体１１７は、例えばレーザ光Ｌが対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）で集光するような位置で保持されている。これにより、対向電極１１３，１１３間の放電領域においてレーザ支持光ＬＳが点灯する。続いてレーザ支持光ＬＳ点灯後（維持時）には、図２９に示すように、筐体１１７は光軸ＬＡ方向の手前側（図２８における上方側）に移動する。これにより、レーザ光Ｌの集光位置Ｆはレーザ支持光ＬＳ点灯時のレーザ光Ｌの集光位置Ｆに対して光軸ＬＡ方向の手前側（図２８における上方側）に移動するため、レーザ支持光ＬＳ点灯後（維持時）の対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度がレーザ支持光ＬＳ点灯時の対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度に対して低下する。 That is, first, as shown in FIG. 28, the housing 117 is at a position where the laser light L is condensed on a line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113, for example. Is retained. Thereby, the laser support light LS is turned on in the discharge region between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 29, the casing 117 moves to the near side (upper side in FIG. 28) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (upper side in FIG. 28) in the optical axis LA direction with respect to the condensing position F of the laser light L when the laser support light LS is turned on. The energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 after the support light LS is turned on (during maintenance) is equal to the counter electrode 113 when the laser support light LS is turned on. It decreases with respect to the energy density of the laser beam L on the line X (lighting start region RS) connecting the cusp 113.
　このように、光学系１０３を含む筐体１１７をアクチュエータ１１８（光学系移動部１５２）によって移動させるという簡易な構成で、レーザ光Ｌの集光位置Ｆを移動させる（対向電極１１３，１１３間（点灯開始領域ＲＳ）から離間させる）ことで対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度を変化させることができる。そのため、対向電極１１３のスパッタリングを抑制でき、光源装置１２１の十分な長寿命化が図られる。 In this way, the condensing position F of the laser beam L is moved (between the counter electrodes 113, 113) by a simple configuration in which the casing 117 including the optical system 103 is moved by the actuator 118 (optical system moving unit 152). By separating from the lighting start area RS), the energy density of the laser light L on the line X (lighting start area RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 121 can be sufficiently extended.
　上記第８実施形態では、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置は対向電極１１３，１１３の尖頭部間を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の手前側（図２８における上方側）の位置であったが、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置は、対向電極１１３，１１３の尖頭部を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の奥側（図２８における下方側）の位置であってもよい。すなわち、レーザ支持光ＬＳ点灯後（維持時）の筐体１１７の保持位置は、レーザ支持光ＬＳ点灯時の筐体１１７の保持位置に対して光軸ＬＡ方向の奥側（図２８における下方側）であってもよい。 In the eighth embodiment, the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) is more optical than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Although it was the position on the near side in the LA direction (upper side in FIG. 28), the condensing position of the laser light L after the laser supporting light LS is turned on (during maintenance) connects the pointed heads of the counter electrodes 113 and 113. It may be a position on the far side (downward side in FIG. 28) in the optical axis LA direction from the line X (lighting start region RS). That is, the holding position of the casing 117 after the laser supporting light LS is turned on (during maintenance) is the back side in the optical axis LA direction (the lower side in FIG. 28) with respect to the holding position of the casing 117 when the laser supporting light LS is turned on. ).
［第９実施形態］
　図３０，３１は、それぞれ本発明の第９実施形態に係る光源装置を示す図である。以下では、第９実施形態に係る光源装置について説明するが、第７，８実施形態と重複する説明は省略する。図３０，３１に示すように、光源装置１３１では、発光封体１１１は、アクチュエータ１１８（発光封体移動部１５３）に保持されており、レーザ支持光ＬＳ点灯時（図３０）及び点灯後（維持時）（図３１）それぞれに応じて光軸ＬＡ方向に移動する。 [Ninth Embodiment]
30 and 31 are views showing a light source device according to the ninth embodiment of the present invention. The light source device according to the ninth embodiment will be described below, but the description overlapping with the seventh and eighth embodiments will be omitted. As shown in FIGS. 30 and 31, in the light source device 131, the light emitting envelope 111 is held by the actuator 118 (light emitting envelope moving unit 153), and when the laser supporting light LS is turned on (FIG. 30) and after lighting ( (At the time of maintenance) (FIG. 31) It moves to optical axis LA direction according to each.
　すなわち、まず、図３０に示すように、発光封体１１１は、例えばレーザ光Ｌが対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）で集光するような位置で保持されている。これにより、対向電極１１３，１１３間の放電領域（点灯開始領域ＲＳ）においてレーザ支持光ＬＳが点灯する。続いてレーザ支持光ＬＳ点灯後（維持時）には、図３１に示すように、発光封体１１１は光軸ＬＡ方向の奥側（図３０における右方側）に移動する。これにより、レーザ光Ｌの集光位置Ｆはレーザ支持光ＬＳ点灯時のレーザ光Ｌの集光位置Ｆに対して光軸ＬＡ方向の手前側（図３０における左方側）に移動するため、レーザ支持光ＬＳ点灯後（維持時）の対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度がレーザ支持光ＬＳ点灯時の対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度に対して低下する。 That is, first, as shown in FIG. 30, the light emitting envelope 111 is, for example, a position where the laser light L is condensed on a line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Is held by. Thereby, the laser support light LS is turned on in the discharge region (lighting start region RS) between the counter electrodes 113 and 113. Subsequently, after the laser supporting light LS is turned on (during maintenance), as shown in FIG. 31, the light emitting envelope 111 moves to the back side (right side in FIG. 30) in the optical axis LA direction. Thereby, the condensing position F of the laser light L moves to the near side (left side in FIG. 30) in the optical axis LA direction with respect to the condensing position F of the laser light L when the laser support light LS is turned on. The energy density of the laser light L on the line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113 after the laser support light LS is turned on (during maintenance) is the counter electrode 113 when the laser support light LS is turned on. , 113 is reduced with respect to the energy density of the laser beam L on the line X (lighting start region RS) connecting the cusps.
　このように、発光封体１１１をアクチュエータ１１８（発光封体移動部１５３）によって移動させるという簡易な構成で、レーザ光Ｌの集光位置Ｆを移動させる（対向電極１１３，１１３間（点灯開始領域ＲＳ）から離間させる）ことで対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度を変化させることができる。そのため、対向電極１１３のスパッタリングを抑制でき、光源装置１３１の十分な長寿命化が図られる。 In this way, the condensing position F of the laser light L is moved (between the counter electrodes 113 and 113 (lighting start region) with a simple configuration in which the light emitting envelope 111 is moved by the actuator 118 (light emitting envelope moving unit 153). By separating from RS), the energy density of the laser light L on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113 can be changed. Therefore, sputtering of the counter electrode 113 can be suppressed, and the life of the light source device 131 can be sufficiently extended.
　上記第９実施形態では、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置Ｆは対向電極１１３，１１３の尖頭部間を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の手前側（図３０における左方側）の位置であったが、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置Ｆは、対向電極１１３，１１３の尖頭部を結ぶラインＸ（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の奥側（図３０における右方側）の位置であってもよい。すなわち、レーザ支持光ＬＳ点灯後（維持時）の発光封体１１１の保持位置は、レーザ支持光ＬＳ点灯時の発光封体１１１の保持位置に対して光軸ＬＡ方向の手前側（図３０における左方側）であってもよい。 In the ninth embodiment, the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is lighter than the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. Although the position was on the near side in the direction of the axis LA (left side in FIG. 30), the condensing position F of the laser light L after the laser supporting light LS is turned on (during maintenance) is the peak of the counter electrodes 113 and 113. It may be a position on the back side (right side in FIG. 30) in the optical axis LA direction with respect to the line X (lighting start region RS) connecting the parts. That is, the holding position of the light emitting envelope 111 after the laser supporting light LS is turned on (during maintenance) is the front side in the optical axis LA direction (in FIG. 30) with respect to the holding position of the light emitting envelope 111 when the laser supporting light LS is turned on. (Left side)
［第１０実施形態］
　図３２は、本発明の第１０実施形態に係る光源装置を示す図である。以下では、第１０実施形態に係る光源装置について説明するが、第７～９実施形態と重複する説明は省略する。図３２に示すように、光源装置１４１は、レーザ部１０２から出射するレーザ光Ｌの出射エネルギーを調整する制御部１５４を備えている。また、光源装置１４１では、光学系１０３は、例えばレーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上よりも光軸ＬＡ方向の手前側（図３２における上方側）の位置で集光させている。 [Tenth embodiment]
FIG. 32 is a diagram showing a light source device according to the tenth embodiment of the present invention. Hereinafter, the light source device according to the tenth embodiment will be described, but the description overlapping with the seventh to ninth embodiments will be omitted. As illustrated in FIG. 32, the light source device 141 includes a control unit 154 that adjusts the emission energy of the laser light L emitted from the laser unit 102. In the light source device 141, the optical system 103 is, for example, a position on the near side (upper side in FIG. 32) in the optical axis LA direction with respect to the line X connecting the laser light L between the cusps of the counter electrodes 113 and 113. It is condensed with
　図３３は、制御部１５４の作用を示す図である。図３３（ａ）に示すように、制御部１５４は、まず、レーザ光Ｌの集光位置Ｆを対向電極１１３，１１３（点灯開始領域ＲＳ）から離間した位置に設定しつつ、対向電極１１３，１１３の尖頭部間を結ぶラインＸ（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度がレーザ支持光ＬＳ点灯可能な程度（例えば２６０ｋＷ／ｃｍ２程度）となるように、レーザ部１０２から出射するレーザ光Ｌの出射エネルギーを設定する。これにより、対向電極１１３，１１３の尖頭部間を結ぶラインＸ（点灯開始領域ＲＳ）におけるレーザ光Ｌは、デフォーカス状態でありながら、レーザ支持光ＬＳを点灯することができる。 FIG. 33 is a diagram illustrating the operation of the control unit 154. As shown in FIG. 33 (a), the control unit 154 first sets the condensing position F of the laser light L at a position separated from the counter electrodes 113, 113 (lighting start region RS), The laser beam 102 is emitted from the laser unit 102 so that the energy density of the laser light L in the line X (lighting start region RS) connecting the cusp 113 is such that the laser support light LS can be lit (for example, about 260 kW / cm 2 ). The emission energy of the laser beam L to be set is set. As a result, the laser beam L in the line X (lighting start region RS) connecting between the cusps of the counter electrodes 113 and 113 can be turned on while the laser beam L is in a defocused state.
　続いてレーザ支持光ＬＳ点灯後（維持時）では、図３３（ｂ）に示すように、制御部１５４は、レーザ光Ｌの集光位置Ｆをレーザ支持光ＬＳ点灯時の位置（図３３（ａ）の位置）に保ったまま、レーザ部１０２から出射するレーザ光Ｌの出射エネルギーをレーザ支持光ＬＳ点灯時のレーザ光Ｌの出射エネルギーに対して低く設定する。これにより、レーザ支持光ＬＳを維持可能なエネルギーを持つ領域をレーザ光Ｌの集光位置Ｆ近傍のみとすることができるため、レーザ支持光ＬＳを対向電極１１３，１１３（点灯開始領域ＲＳ）から離間した位置で維持することが可能となる。 Subsequently, after the laser support light LS is turned on (during maintenance), as shown in FIG. 33B, the control unit 154 sets the condensing position F of the laser light L to the position at the time of laser support light LS lighting (FIG. 33 ( While maintaining the position a), the emission energy of the laser beam L emitted from the laser unit 102 is set lower than the emission energy of the laser beam L when the laser support light LS is turned on. Thereby, since the area | region which has the energy which can maintain the laser support light LS can be made only into the condensing position F vicinity of the laser light L, the laser support light LS is sent from the counter electrodes 113 and 113 (lighting start area | region RS). It is possible to maintain at a separated position.
　このように、光源装置１４１では、レーザ光Ｌを常に対向電極１１３，１１３間（点灯開始領域ＲＳ）から離間した位置に集光させつつ、レーザ部１０２から出射するレーザ光Ｌの出射エネルギーを制御部１５４によって調整することで、対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）におけるレーザ光Ｌのエネルギー密度を変化させることができる。したがって、最もエネルギー密度の高いレーザ光Ｌの集光位置Ｆが常に対向電極１１３，１１３間（点灯開始領域ＲＳ）に位置することはないため、対向電極１１３のスパッタリングを抑制でき、光源装置１４１の十分な長寿命化が図られる。また、光源装置１４１では、レーザ光Ｌの集光位置Ｆを機械的に移動させる必要がないため、レーザ光Ｌの集光位置を適切な位置に保つことができると共に、光学系１０３や発光封体１１１を移動させるための装置が不要となるため、光源装置の小型化が図られる。 As described above, the light source device 141 controls the emission energy of the laser beam L emitted from the laser unit 102 while always condensing the laser beam L at a position separated from the space between the counter electrodes 113 and 113 (lighting start region RS). By adjusting with the part 154, the energy density of the laser beam L on the line X (lighting start area | region RS) which connects between the cusps of the counter electrodes 113 and 113 can be changed. Therefore, since the condensing position F of the laser beam L with the highest energy density is not always located between the counter electrodes 113 and 113 (lighting start region RS), sputtering of the counter electrode 113 can be suppressed, and the light source device 141 A sufficiently long life is achieved. Further, in the light source device 141, it is not necessary to mechanically move the condensing position F of the laser light L, so that the condensing position of the laser light L can be maintained at an appropriate position, and the optical system 103 and the light-emitting envelope can be maintained. Since a device for moving the body 111 is not required, the light source device can be reduced in size.
　上記第１０実施形態では、光学系１０３はレーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の手前側（図３２における上方側）で集光させていたが、光学系１０３は、レーザ光Ｌを対向電極１１３，１１３の尖頭部間を結ぶラインＸ上（点灯開始領域ＲＳ）よりも光軸ＬＡ方向の奥側（図３２における下方側）で集光させてもよい。この場合でも、上記第１０実施形態と同様に、制御部１５４がレーザ部１０２から出射するレーザ光Ｌの出射エネルギーを調整することによって、対向電極１１３のスパッタリングを抑制できる。 In the tenth embodiment, the optical system 103 has the laser beam L on the near side in the optical axis LA direction (upward in FIG. 32) above the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. In the optical system 103, the laser beam L is condensed in the optical axis LA direction (on the line X (lighting start region RS) connecting the cusps of the counter electrodes 113 and 113. The light may be condensed on the lower side in FIG. Even in this case, the sputtering of the counter electrode 113 can be suppressed by adjusting the emission energy of the laser light L emitted from the laser unit 102 by the control unit 154 as in the tenth embodiment.
　さらに、上記いずれの実施形態においても、集光位置Ｆ（レーザ支持光ＬＳ）はレーザ光Ｌの光軸ＬＡ方向に移動していたが、レーザ支持光ＬＳ点灯後（維持時）のレーザ光Ｌの集光位置Ｆがレーザ支持光ＬＳ点灯時のレーザ光Ｌの集光位置Ｆに対して対向電極１１３（点灯開始領域ＲＳ）から離間する位置となるのであれば、レーザ光Ｌの光軸ＬＡ方向とは異なる方向（例えばレーザ光Ｌの光軸ＬＡと交わる方向）に移動してもよい。 Furthermore, in any of the above embodiments, the condensing position F (laser support light LS) has moved in the direction of the optical axis LA of the laser light L, but the laser light L after the laser support light LS is turned on (during maintenance). If the condensing position F of the laser beam L is a position away from the counter electrode 113 (lighting start region RS) with respect to the condensing position F of the laser light L when the laser support light LS is lit, the optical axis LA of the laser light L You may move to the direction (for example, the direction which crosses the optical axis LA of the laser beam L) different from a direction.
　１，２１，３１，４１，８１，１０１，１２１，１３１，１４１…光源装置、２，１０２…レーザ部、３，１０３…光学系、７，１０７…光源、８，２８，１０８…光学部材、９，２９，３９，４９，１０９…透明媒体、１１，６１，７１，１１１…発光封体、１３，２３…金属構造体（電子放射構造体）、１４…コイル、１８，１１８…アクチュエータ、２５ａ…傾斜面、５１，１５１…光路長調整部、５２，１５２…光学系移動部、５３，１５３…発光封体移動部、５４…電子放射構造体移動部、５５…制御部、１１３…対向電極、Ｆ…集光位置、Ｇ…発光ガス、Ｌ…（連続）レーザ光、ＬＡ…光軸、ＬＳ…レーザ支持光、ＲＳ…点灯開始領域、Ｓ…内部空間。 1, 21, 31, 41, 81, 101, 121, 131, 141 ... light source device, 2, 102 ... laser unit, 3, 103 ... optical system, 7, 107 ... light source, 8, 28, 108 ... optical member, 9, 29, 39, 49, 109 ... transparent medium, 11, 61, 71, 111 ... luminous envelope, 13, 23 ... metal structure (electron emission structure), 14 ... coil, 18, 118 ... actuator, 25a ... Inclined surface, 51, 151 ... Optical path length adjusting part, 52, 152 ... Optical system moving part, 53, 153 ... Luminescent envelope moving part, 54 ... Electron emission structure moving part, 55 ... Control part, 113 ... Counter electrode , F ... condensing position, G ... luminescent gas, L ... (continuous) laser light, LA ... optical axis, LS ... laser support light, RS ... lighting start area, S ... internal space.

Claims (17)

  1. 　レーザ光を出射するレーザ部と、
    　内部空間に発光ガスが封入された発光封体、及び、前記内部空間に点灯開始領域を有する光源と、
    　前記レーザ光を前記内部空間に導光する光学系と、
    　前記点灯開始領域における前記レーザ光のエネルギー密度を制御する制御部と、を備え、
    　前記光源は、前記内部空間において、前記レーザ部からの前記レーザ光の照射によって点灯する前記発光ガスのプラズマ発光であるレーザ支持光を、前記レーザ部からの前記レーザ光の照射によって維持し、
    　前記制御部は、前記レーザ支持光維持時の前記点灯開始領域における前記レーザ光のエネルギー密度を、前記レーザ支持光点灯時の前記点灯開始領域における前記レーザ光のエネルギー密度に対して低くする光源装置。     A laser unit that emits laser light;
    A light emitting envelope in which a luminescent gas is sealed in an internal space; and a light source having a lighting start area in the internal space;
    An optical system for guiding the laser light to the internal space;
    A control unit for controlling the energy density of the laser light in the lighting start region,
    In the internal space, the light source maintains laser support light that is plasma emission of the luminescent gas that is turned on by irradiation of the laser light from the laser unit, by irradiation of the laser light from the laser unit,
    The control unit lowers the energy density of the laser light in the lighting start area when the laser supporting light is maintained with respect to the energy density of the laser light in the lighting start area when the laser supporting light is turned on. .
  2. 　前記光源は、前記内部空間に配置され、前記レーザ光の照射によって電子を放射する易電子放射物質を含有する電子放射構造体を更に有している請求項１に記載の光源装置。 The light source device according to claim 1, wherein the light source further includes an electron emission structure that is disposed in the internal space and contains an electron-emitting material that emits electrons when irradiated with the laser light.
  3. 　前記光源は、前記点灯開始領域を挟むように互いに対向する対向電極を更に有している請求項１に記載の光源装置。 The light source device according to claim 1, wherein the light source further includes counter electrodes facing each other so as to sandwich the lighting start region.
  4. 　前記制御部は、前記レーザ支持光維持時の前記レーザ光の集光位置を前記レーザ支持光点灯時の前記レーザ光の集光位置に対して前記点灯開始領域から離間する方向に移動させる集光位置移動部を有している請求項１～３のいずれか一項に記載の光源装置。 The control unit moves the condensing position of the laser light when maintaining the laser supporting light in a direction away from the lighting start area with respect to the condensing position of the laser light when the laser supporting light is turned on. The light source device according to any one of claims 1 to 3, further comprising a position moving unit.
  5. 　前記集光位置移動部は、前記レーザ光の集光位置を前記レーザ光の光軸方向に移動させる請求項４に記載の光源装置。 The light source device according to claim 4, wherein the condensing position moving unit moves the condensing position of the laser light in an optical axis direction of the laser light.
  6. 　前記集光位置移動部は、前記レーザ光の前記内部空間における光路長を調整する光路長調整部を有している請求項４又は５に記載の光源装置。 The light source device according to claim 4 or 5, wherein the converging position moving unit includes an optical path length adjusting unit that adjusts an optical path length of the laser light in the internal space.
  7. 　前記集光位置移動部は、前記レーザ支持光維持時の前記光学系の位置を前記レーザ支持光点灯時の前記光学系の位置に対して移動させる光学系移動部を有している請求項４～６のいずれか一項に記載の光源装置。 The said condensing position moving part has an optical system moving part which moves the position of the said optical system at the time of the said laser support light maintenance with respect to the position of the said optical system at the time of the said laser support light lighting. 7. The light source device according to any one of items 1 to 6.
  8. 　前記集光位置移動部は、前記レーザ支持光維持時の前記発光封体の位置を前記レーザ支持光点灯時の前記発光封体の位置に対して移動させる発光封体移動部を有している請求項４～７のいずれか一項に記載の光源装置。 The condensing position moving unit includes a light emitting envelope moving unit that moves the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. The light source device according to any one of claims 4 to 7.
  9. 　前記光学系は、前記レーザ支持光点灯時及び維持時のいずれにおいても、前記レーザ光を前記点灯開始領域から離間した位置に集光させることを特徴とする請求項１～３のいずれか一項に記載の光源装置。 The optical system condenses the laser beam at a position separated from the lighting start area both when the laser supporting light is turned on and when it is maintained. The light source device according to 1.
  10. 　前記制御部は、前記レーザ支持光維持時の前記レーザ部からの前記レーザ光の出射エネルギーを前記レーザ支持光点灯時の前記光源からの前記レーザ光の出射エネルギーに対して低くすることを特徴とする請求項９に記載の光源装置。 The control unit lowers the emission energy of the laser light from the laser unit when the laser support light is maintained with respect to the emission energy of the laser light from the light source when the laser support light is turned on. The light source device according to claim 9.
  11. 　前記制御部は、前記レーザ支持光維持時の前記レーザ光の集光位置を前記レーザ支持光点灯時の前記レーザ光の集光位置に対して前記電子放射構造体から離間する方向に移動させる集光位置移動部を有している請求項２に記載の光源装置。 The control unit is configured to move the condensing position of the laser light when the laser supporting light is maintained in a direction away from the electron emitting structure with respect to the condensing position of the laser light when the laser supporting light is turned on. The light source device according to claim 2, further comprising an optical position moving unit.
  12. 　前記集光位置移動部は、前記レーザ支持光維持時の前記電子放射構造体の位置を前記レーザ支持光点灯時の前記電子放射構造体の位置に対して移動させる電子放射構造体移動部を有している請求項１１に記載の光源装置。 The condensing position moving unit includes an electron emitting structure moving unit that moves the position of the electron emitting structure when the laser supporting light is maintained with respect to the position of the electron emitting structure when the laser supporting light is turned on. The light source device according to claim 11.
  13. 　前記集光位置移動部は、前記レーザ支持光維持時の前記レーザ光の前記内部空間における光路長を前記レーザ支持光点灯時の前記レーザ光の前記内部空間における光路長に対して短くする光路長調整部を有している請求項１１又は１２に記載の光源装置。 The converging position moving unit shortens the optical path length of the laser light in the internal space when the laser support light is maintained with respect to the optical path length of the laser light in the internal space when the laser support light is turned on. The light source device according to claim 11, further comprising an adjustment unit.
  14. 　前記集光位置移動部は、前記レーザ光の集光位置を前記レーザ光の光軸方向と交わる方向に移動させる請求項１１又は１２に記載の光源装置。 The light source device according to claim 11 or 12, wherein the condensing position moving unit moves the condensing position of the laser light in a direction crossing an optical axis direction of the laser light.
  15. 　前記集光位置移動部は、前記レーザ支持光維持時の前記光学系の位置を前記レーザ支持光点灯時の前記光学系の位置に対して移動させる光学系移動部を有している請求項１１～１４のいずれか一項に記載の光源装置。 The said condensing position moving part has an optical system moving part which moves the position of the said optical system at the time of the said laser support light maintenance with respect to the position of the said optical system at the time of the said laser support light lighting. 15. The light source device according to any one of to 14.
  16. 　前記集光位置移動部は、前記レーザ支持光維持時の前記発光封体の位置を前記レーザ支持光点灯時の前記発光封体の位置に対して移動させる発光封体移動部を有している請求項１１～１５のいずれか一項に記載の光源装置。 The condensing position moving unit includes a light emitting envelope moving unit that moves the position of the light emitting envelope when the laser supporting light is maintained with respect to the position of the light emitting envelope when the laser supporting light is turned on. The light source device according to any one of claims 11 to 15.
  17. 　前記電子放射構造体には、前記レーザ支持光点灯時に前記レーザ光の集光位置が位置する面が、前記レーザ光の光軸に対して傾斜して形成されている請求項１１～１６のいずれか一項に記載の光源装置。 The surface on which the condensing position of the laser beam is located when the laser support light is lit is formed on the electron emission structure so as to be inclined with respect to the optical axis of the laser beam. The light source device according to claim 1.
PCT/JP2014/080345 2013-12-06 2014-11-17 Light source device WO2015083528A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US15/022,222 US9646816B2 (en) 2013-12-06 2014-11-17 Light source device
DE112014005518.2T DE112014005518T5 (en) 2013-12-06 2014-11-17 Light source device
IL244786A IL244786A0 (en) 2013-12-06 2016-03-28 Light source device
US15/478,306 US9824879B2 (en) 2013-12-06 2017-04-04 Light source device
US15/712,284 US10032622B2 (en) 2013-12-06 2017-09-22 Light source device

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2013-253262 2013-12-06
JP2013253262 2013-12-06
JP2013-253264 2013-12-06
JP2013253264A JP6209071B2 (en) 2013-12-06 2013-12-06 Light source device
JP2014-081350 2014-04-10
JP2014081350A JP5947329B2 (en) 2013-12-06 2014-04-10 Light source device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US15/022,222 A-371-Of-International US9646816B2 (en) 2013-12-06 2014-11-17 Light source device
US15/478,306 Continuation US9824879B2 (en) 2013-12-06 2017-04-04 Light source device

Publications (1)

Publication Number Publication Date
WO2015083528A1 true WO2015083528A1 (en) 2015-06-11

Family

ID=53273295

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/080345 WO2015083528A1 (en) 2013-12-06 2014-11-17 Light source device

Country Status (1)

Country Link
WO (1) WO2015083528A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009532829A (en) * 2006-03-31 2009-09-10 エナジェティック・テクノロジー・インコーポレーテッド Laser-driven light source
JP2011035039A (en) * 2009-07-30 2011-02-17 Ushio Inc Light source device
JP2013045537A (en) * 2011-08-23 2013-03-04 Ushio Inc Light source device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009532829A (en) * 2006-03-31 2009-09-10 エナジェティック・テクノロジー・インコーポレーテッド Laser-driven light source
JP2011035039A (en) * 2009-07-30 2011-02-17 Ushio Inc Light source device
JP2013045537A (en) * 2011-08-23 2013-03-04 Ushio Inc Light source device

Similar Documents

Publication Publication Date Title
US10032622B2 (en) Light source device
JP6412229B2 (en) Light source device
TWI382789B (en) Method and apparatus for producing extreme ultraviolet radiation or soft x-ray radiation
US7382862B2 (en) X-ray tube cathode with reduced unintended electrical field emission
JP6887388B2 (en) Electrodeless single CW laser driven xenon lamp
US6661876B2 (en) Mobile miniature X-ray source
JP5322217B2 (en) Light source device
JP2010186694A (en) X-ray source, x-ray generation method, and method for manufacturing x-ray source
US4611143A (en) Composite light source
JP6209071B2 (en) Light source device
JP5947329B2 (en) Light source device
WO2015083528A1 (en) Light source device
JP6211912B2 (en) Light source device
JP6224445B2 (en) Light source device
JP5622081B2 (en) Plasma light source
JP2010205651A (en) Plasma generation method, and extreme ultraviolet light source device using the same
JP2014170921A (en) Ultraviolet irradiation device
JP2005093165A (en) Short arc lamp
JP7095236B2 (en) Plasma light source system
JP2017157299A (en) Laser-driven light source
JP2005203221A (en) Flash discharge lamp lighting device and radiation energy irradiation device
JP2017195143A (en) Plasma light source and method for generating plasma light

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14866886

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 15022222

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 244786

Country of ref document: IL

WWE Wipo information: entry into national phase

Ref document number: 112014005518

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14866886

Country of ref document: EP

Kind code of ref document: A1