WO2015062457A1 - 针对工件表面的激光冲击强化装置及激光冲击强化处理方法 - Google Patents

针对工件表面的激光冲击强化装置及激光冲击强化处理方法 Download PDF

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Publication number
WO2015062457A1
WO2015062457A1 PCT/CN2014/089554 CN2014089554W WO2015062457A1 WO 2015062457 A1 WO2015062457 A1 WO 2015062457A1 CN 2014089554 W CN2014089554 W CN 2014089554W WO 2015062457 A1 WO2015062457 A1 WO 2015062457A1
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Prior art keywords
laser
workpiece
resonant cavity
protective layer
fluid
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PCT/CN2014/089554
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English (en)
French (fr)
Inventor
张文武
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中国科学院宁波材料技术与工程研究所
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Priority to ES14858568T priority Critical patent/ES2788662T3/es
Priority to EP14858568.0A priority patent/EP3064600B1/en
Priority to US15/033,289 priority patent/US10876185B2/en
Priority to JP2016526802A priority patent/JP6404343B2/ja
Publication of WO2015062457A1 publication Critical patent/WO2015062457A1/zh
Priority to US16/407,566 priority patent/US11203798B2/en

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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D10/00—Modifying the physical properties by methods other than heat treatment or deformation
    • C21D10/005—Modifying the physical properties by methods other than heat treatment or deformation by laser shock processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D7/00—Modifying the physical properties of iron or steel by deformation
    • C21D7/02—Modifying the physical properties of iron or steel by deformation by cold working
    • C21D7/04—Modifying the physical properties of iron or steel by deformation by cold working of the surface
    • C21D7/06—Modifying the physical properties of iron or steel by deformation by cold working of the surface by shot-peening or the like

Definitions

  • the invention relates to the technical field of laser shock strengthening for a workpiece surface, in particular to a laser impact strengthening device for a workpiece surface and a method for performing laser shock strengthening treatment on a workpiece surface by using the device.
  • the laser shock peening technology is a technique in which an ultra-high voltage shock wave generated by a strong laser is applied to a surface of a workpiece for laser shock peening.
  • laser shock peening technology has been widely used in aviation, shipbuilding, mechanical engineering and other fields, especially for anti-fatigue treatment of aircraft engine blades.
  • Existing laser shock reinforced devices for workpiece surfaces include a laser generating unit, an absorbing protective layer on the surface of the workpiece, and a constraining layer on the surface of the absorbing protective layer.
  • the function of the constraining layer is to allow the laser energy to pass through and act on the absorbing protective layer, while also providing as much as possible the reaction force during plasma expansion to improve the shock wave coupling efficiency.
  • a solid material such as optical glass is generally used as a constraining layer at home and abroad, or a flexible material such as a water film having a thickness of about 0.5 to 1 mm is used as a transparent constraining layer.
  • the function of absorbing the protective layer is to absorb the laser, generate plasma, and at the same time have the blocking ability to avoid damage of the workpiece by laser and plasma. Paint, flexible tape or metal foil of a certain thickness or the like is generally used as an absorbing protective layer.
  • the laser shock peening process is as shown in Figure 1: using a short pulse (generally within 50 nanoseconds), a high power density (GW/cm 2 ) laser through a transparent constraining layer, acting on the surface of a workpiece such as metal or
  • the absorption protection layer is attached to the absorption protection layer; the absorption protection layer absorbs the laser energy and rapidly vaporizes to form a dense high-temperature, high-pressure plasma.
  • the plasma continues to absorb the laser energy and then rapidly heats up to form a shock wave, and the shock wave intensity can reach several GPa.
  • shock wave (10 9 Pa) is much higher than the yield strength of many workpiece materials; the shock wave passes through the absorbing protective layer, acts on the surface of the workpiece and propagates to the inside of the workpiece, causing plastic deformation and residual compressive stress field on the surface of the workpiece, resulting in surface layer
  • the deformation of the material and the increase of the dislocation density result in grain refinement, compressive stress and hardness, which significantly improve the fatigue resistance, wear resistance and corrosion resistance of the material.
  • lasers in laser shock enhancement generally tend to use pulsed energy far exceeding a joule nanosecond pulse.
  • lasers are expensive and at the same time have low reliability due to the laser system operating at a limit state. Therefore, it is necessary to improve the energy utilization efficiency of laser shock enhancement to reduce the energy requirement of the laser system, thereby improving the processing effect under the premise of ensuring laser reliability.
  • the water film is widely used because of its low cost, good flexibility, recyclability, and strong applicability to complex curved surfaces; however, the water film as a constraining layer has the following problems: (1) The water film thickness of about 0.5-1 mm is difficult to control stably during actual operation. For example, a water film is generally applied from the side by a nozzle, but the thickness of the water film easily occurs as the shape and position of the workpiece change. In addition, the shock wave during processing is likely to cause cracking and sputtering of the water film, which affects the consistency of processing and the reliability of the optical path device. (2) The constraint stiffness of the water film is insufficient relative to the solid constraint, so the shock wave is The constrained effect is not good, and it is prone to unstable conditions such as instability, which eventually leads to weakening of the laser shock strengthening effect.
  • the solid constrained layer such as glass has a better restraining effect on the laser shock wave.
  • its processing adaptability is poor, and it is unable to satisfy the partial impact region with complicated shape.
  • the glass will be broken under the action of plasma and shock waves, so it is generally only suitable for a single impact and is difficult to reuse.
  • Patent No. ZL02138338.3 "A Flexible Film for Laser Shock Treatment” is an organic silica gel and an additive using two different components, which are blended and cured in a certain proportion to form a constraining layer, and then The energy absorbing protective layer of the 86-1 black lacquer is sprayed to form a flexible film integrating the energy absorbing protective layer and the constraining layer.
  • the flexible film can form a flexible film integrating the energy absorption protective layer and the constraining layer, the restraining stiffness does not reach the constraint strength of the glass, and there is a potential quality hazard such as bubbles, and the flexible film manufacturing process is complicated and cumbersome, and Conducive to its promotion in the field.
  • the technical object of the present invention is to provide a laser shock reinforced device for a workpiece surface by using the laser shock reinforced device for the surface of the workpiece, thereby improving the efficiency and reliability of laser shock peening. Sex.
  • a laser shock reinforced device for a workpiece surface comprising a laser generating unit, an absorbing protective layer on the surface of the workpiece, and a constraining layer on the surface of the absorbing protective layer, the laser generating unit The generated laser light acts on the absorbing protective layer after passing through the constraining layer, and the absorbing protective layer forms a plasma shock wave to act on the surface of the workpiece; and the feature is:
  • the resonant cavity is provided with a laser inlet for inputting laser light generated by the laser generating unit into the resonant cavity; the resonant cavity is further provided with a fluid inlet, and the constraining layer is through the fluid Fluid injected into the inlet;
  • the open end face of the resonant cavity is in contact with the absorbing protective layer, so that the constraining layer is confined within the resonant cavity.
  • the workpiece refers to a part used in the field of industrial technology, including any part that can produce plastic deformation and residual compressive stress field under the action of laser shock wave, such as metal parts.
  • the resonant cavity material is not limited, and materials having high shock wave tolerance and reflectivity are generally selected, including but not limited to metals, such as SS304 stainless steel, high-density tungsten alloy, and the like.
  • the specific shape of the inner surface of the resonant cavity is not limited, and is processed according to a shape capable of generating high-efficiency shock wave resonance, including an ellipsoidal shape and a parabolic shape.
  • the shape of the open end of the resonant cavity is not limited, and may be a circle, a square, a rectangle, or the like.
  • the fluid includes any gas and liquid suitable for the transmission of light energy.
  • Gases include, but are not limited to, air, nitrogen, and the like.
  • Fluids include, but are not limited to, water and its solutions.
  • the material of the absorbing protective layer is not limited, and includes a metal foil, a black lacquer, a tape, and the like.
  • the wavelength of the laser light generated by the laser generating unit is not limited as long as it can be used to generate a desired shock wave in the resonant cavity, including 10640/1064/800/532/517/355 nm.
  • the laser shock reinforced device for the surface of the workpiece includes a resonant cavity, the fluid is selected as the constraining layer, and the constraining layer is completely or partially confined within the resonant cavity.
  • the processing thereof is as shown in FIG. 2. That is, in the working state, the laser light from the laser generating unit passes through the fluid in the resonant cavity to act on the absorbing protective layer, and the absorbing protective layer absorbs the laser energy and then vaporizes to generate a plasma, which continues to absorb the laser energy and expand to form a high intensity.
  • the spherical shock wave, the specific propagation process of the spherical shock wave is as follows:
  • Propagation process A a part of the spherical shock wave acts on the workpiece and propagates to the inside, and another part of the spherical shock wave transmits to the inner surface of the resonant cavity;
  • the spherical shock wave transmitted to the inner surface of the resonant cavity is reflected by the inner surface of the resonant cavity to form a spherical shock wave again, repeating the above propagation process A;
  • FIG. 3 is a schematic view showing a comparison of a laser pulse induced waveform in a conventional laser shock absorbing apparatus and a laser pulse induced waveform in a laser shock reinforced apparatus with a resonator according to the present invention. That is, in the existing laser shock peening device, since there is no resonant cavity, one pulse only generates an effective impact peak, and then decays, and the duration of the shock wave is short, about 1-3 times the width of the laser pulse, and its waveform is as shown in the figure. 3A is shown.
  • the laser shock reinforced device of the present invention includes a resonant cavity, and the waveform is as shown in FIG. 3B.
  • the shock wave directly transmitted to the workpiece forms a first peak, and the shock wave away from the workpiece is reflected and concentrated by the resonant cavity to form a second peak. Repeated reflections form two or more effective shock waves, which greatly improve energy utilization and thus enhance laser shock enhancement.
  • a fluid is selected as the constraining layer, and the constraining layer is confined in the resonant cavity, so that the shape of the fluid constraining layer is fixed, which effectively solves the problem that the thickness of the fluid constrained layer is difficult to control in the prior art.
  • the present invention also proposes the following optimization measures.
  • air bubbles may be formed in the process of generating a shock wave by the shock wave in the cavity to form a shock wave again, thereby affecting the effect of the impact reinforcement again.
  • the resonant cavity is further provided with a fluid outlet, the fluid being injected through the fluid inlet and flowing out through the fluid outlet to form a flow state.
  • the fluid is actually flowed, and on the one hand, the flow of the fluid is used to reduce the formation of bubbles during the formation of the shock wave, and on the other hand, even if a small amount of bubbles are formed in the process, the flow of the fluid can quickly bring the bubble.
  • Out of the cavity, maintaining the stability of the laser light path, is beneficial to reduce the negative impact of the bubble on the impact strengthening effect;
  • a sealing gasket is provided at the junction of the resonant cavity and the absorbing protective layer.
  • the open end face of the resonant cavity is in contact with the absorbing protective layer, and the contact includes a hermetic contact and a non-hermetic contact.
  • the constraining layer is a fluid in the present invention, when the open end face of the resonant cavity is in close contact with the absorbing protective layer, the fluid is completely confined within the resonant cavity without overflow.
  • a small amount of fluid will overflow there. However, this overflow does not hinder the effectiveness of the present invention.
  • the spillage of a small amount of fluid helps to reduce the friction of the resonant cavity against the absorbing protective layer.
  • a light guiding unit is disposed between the laser generating unit and the laser inlet to enable the laser generated by the laser generating unit to efficiently enter the resonant cavity through the laser inlet.
  • the light guiding unit may be a flexible light pipe system composed of a reflective lens, or may be an optical fiber or the like.
  • a gasket A In order to avoid plasma shock waves and loss of fluid at the laser inlet during operation, it is preferred to provide a gasket A, a high pressure resistant transparent window and a gasket B at the laser inlet.
  • the high pressure transparent transparent window is located between the gasket A and the gasket B, and the materials thereof include, but are not limited to, quartz plates, lens sheets, and the like.
  • the processing method for strengthening the workpiece by the laser impact strengthening device of the present invention is as follows:
  • Step 1 After the workpiece is cleaned, an absorbing protective layer is applied on the surface;
  • Step 2 contacting the open end surface of the resonant cavity with the surface of the absorbing protective layer, and injecting a fluid into the resonant cavity through the fluid inlet;
  • Step 3 The laser light generated by the laser generating unit enters the resonant cavity through the laser inlet, and acts on the absorption protective layer through the fluid to form a shock wave.
  • the propagation process A of the shock wave is as follows:
  • Part of the shock wave acts directly on the workpiece to strengthen the workpiece, and another part of the shock wave is transmitted to the inner surface of the resonant cavity. After the inner surface of the resonant cavity is reflected, the shock wave is formed again after the wave is collected, and the propagation process A is repeated;
  • the laser generating unit is turned off
  • Step 4. Remove the workpiece and clean the surface residual absorption protective layer.
  • the method of applying an absorbing protective layer on the surface of the workpiece includes, but is not limited to, paint, tape, and metal foil.
  • step 4 In order to perform laser shock peening on different areas of the surface of the workpiece, it is preferable to adjust the contact position of the open end face of the cavity and the surface of the absorbing protective layer during the process, that is, the following steps are performed one or more times after the step 3; 3', then proceed to step 4:
  • Step 3' changing the contact position between the open end surface of the resonant cavity and the surface of the absorbing protective layer, repeating step 3;
  • the manner of changing the position at which the opening end face of the cavity is in contact with the surface of the absorbing protective layer is not limited.
  • the motion of the workpiece and the laser shock reinforced device can be used to create relative motion, including only workpiece movement, laser shock reinforced device movement, or both, to accommodate workpiece processing requirements of various sizes.
  • two sets of devices are used to simultaneously strengthen the upper and lower surfaces of the workpiece, and the specific processing is as follows:
  • Step 1 After the workpiece is cleaned, an absorbing protective layer is applied on the upper and lower surfaces, respectively;
  • Step 2 respectively, the open end faces of the two resonant cavities of the two sets of laser shock absorbing devices are respectively in contact with the upper and lower surfaces of the absorbing protective layer, and then respectively injecting fluid into the resonant cavity through the fluid inlet;
  • Step 3 The laser light generated by the laser generating unit in the two sets of laser shock absorbing devices respectively enters the resonant cavity through the two laser inlets, acts on the absorbing protective layer through the fluid, and absorbs the protective layer to form a shock wave, and the propagation process of the shock wave is as follows: :
  • Part of the shock wave acts directly on the workpiece to strengthen the workpiece, and another part of the shock wave is transmitted to the inner surface of the resonant cavity. After the inner surface of the resonant cavity is reflected, the shock wave is formed again after the wave is collected, and the propagation process A is repeated;
  • the laser generating unit is turned off
  • Step 4. Remove the workpiece and clean the surface residual absorption protective layer.
  • the cavity is also provided with a fluid outlet, in the step 2 described.
  • the fluid is injected through the fluid inlet and flows out through the fluid outlet to form a flow state.
  • FIG. 1 is a schematic view of a conventional laser shock peening process
  • FIG. 2 is a schematic view showing a laser shock tensing process performed by the laser shock absorbing device of the present invention
  • FIG. 3 is a comparison diagram of a laser pulse induced shock waveform in a conventional laser shock absorbing device and a laser shock reinforced device of the present invention
  • FIG. 4 is a schematic view of a laser shock reinforced device using water as a constraint medium in Embodiment 1 of the present invention
  • Embodiment 5 is a light guiding unit constructed by using an optical device in Embodiment 1 of the present invention.
  • Embodiment 6 is a light guiding unit using a multi-joint light guiding arm in Embodiment 1 of the present invention
  • Embodiment 7 is a light guiding unit using a special optical fiber in Embodiment 1 of the present invention.
  • Figure 8 is a view showing three movement modes in impact machining in Embodiment 1 of the present invention.
  • FIG. 9 is a schematic view showing different shapes of an exit end surface of a resonant cavity in Embodiment 1 of the present invention.
  • Figure 10 is a superimposed trajectory of the impact region of the resonant cavity having the end face shape shown in Figure 9;
  • Figure 11 is a schematic diagram of a two-way impact strengthening system used in Embodiment 1 of the present invention.
  • Figure 12 is a schematic view of a laser shock reinforced device using air as a constraint medium in Embodiment 2 of the present invention.
  • the reference numerals in the drawings are: 1. flow regulating valve; 2. water tank; 3. micro water pump; 4. workpiece; 5. fluid outlet; 6. absorbing protective layer; 7. second connecting port; 8. pipe; Computer; 10. laser generating unit; 11. optical transmission unit; 12. optical transmission unit connector; 13. laser inlet; 14. flat convex collimating mirror; 15. flat convex focusing mirror; 16. spacer A; High pressure glass; 18. spacer B; 19. resonant cavity; 20. deionized water; 21. first connection port; 22. fluid inlet; 23. sealing gasket.
  • the laser shock absorbing device includes a laser generating unit 10 and a resonant cavity 19 that is open at one end.
  • the open end surface of the resonant cavity 19 is in close contact with the surface of the absorbing protective layer 6 to form a “backup”. "structure.
  • the resonant cavity 19 is also provided with a laser inlet 13, a fluid inlet 22 and a fluid outlet 5.
  • the surface of the workpiece 4 to be treated is an absorbing protective layer 6.
  • the workpiece 4 is a metal workpiece
  • the absorbing protective layer 6 is an aluminum foil.
  • the surface of the absorbing protective layer 6 is the constraining layer 20.
  • the constraining layer 20 is within the resonant cavity 19 and is deionized water that is injected through the fluid inlet 22.
  • the deionized water is a micro water pump 3 that pumps deionized water in the external water tank 2 through the conduit 8 into the resonant cavity 19 through the fluid inlet 22, and pumps out the resonant cavity 19 through the fluid outlet 5 to form a circulating flow state.
  • the connection port of the pipe 8 and the fluid inlet 22 is the first connection port 21, and the connection port of the pipe 8 and the fluid outlet 5 is the second connection port 7.
  • a flow regulating valve is also provided to detect fluid flow.
  • a light guiding unit is disposed between the laser generating unit 10 and the laser inlet 13 to efficiently pass the laser light generated by the laser generating unit into the resonant cavity through the laser inlet.
  • the light guiding unit is composed of a light transmitting unit 11, a light transmitting unit joint 12, a plano-convex collimating mirror 14, and a plano-convex focusing mirror.
  • the light guiding unit can also adopt other forms, as shown in FIG. 5, which is a light guiding unit constructed by using optical components, and FIG. 6 is a light guiding unit using a multi-joint light guiding arm; It is a light guiding unit using special optical fiber.
  • a first spacer 16, a high pressure resistant glass 17, and a second spacer 18 are disposed at the laser inlet 13.
  • the high pressure resistant glass 17 is located between the first spacer 16 and the second spacer 18, and the material thereof may be a quartz plate or a lens sheet.
  • a sealing gasket 23 is provided on the surface of the resonant cavity 19 in contact with the absorbing protective layer 6.
  • the computer 9 is used to control the laser generation 10 and the micro water pump 3.
  • the processing method for strengthening the workpiece by the laser impact strengthening device is as follows:
  • Step (1) cleaning and drying the workpiece with a liquid such as acetone or alcohol, and then coating the aluminum foil absorbing protective layer 6 on the surface of the metal workpiece 4;
  • Step (2) sealing the open end surface of the resonant cavity 19 and the surface of the absorbing protective layer 6 through the sealing gasket 23, and then starting the water pump 3 to fill the resonant cavity 19 with the deionized water 20 through the fluid inlet 22, and passing through the fluid outlet 5
  • the ionized water 20 is flowed, and the flow regulating valve 1 is adjusted so that the flow rate of the deionized water 20 is about 0.2 ml/s;
  • Step (3) the computer 9 controls the laser generating unit 10 to be turned on, the laser generating unit 10 is a Nd:YAG solid pulse laser generating unit of 532 nm wavelength, 25 nanosecond pulse width, 1-10 joule pulse energy, and the adjusting pulse laser device 10 parameters, so that the parameters meet the experimental requirements; the laser beam 13 is emitted from the laser generating unit 10, transmitted to the optical transmission unit joint 12 through the optical transmission unit 11, and the flat convex focusing mirror 15 in the adjusting joint 12 is adjusted to the upper and lower distances to pass the laser 13 through the deionization.
  • the laser generating unit 10 is a Nd:YAG solid pulse laser generating unit of 532 nm wavelength, 25 nanosecond pulse width, 1-10 joule pulse energy, and the adjusting pulse laser device 10 parameters, so that the parameters meet the experimental requirements
  • the laser beam 13 is emitted from the laser generating unit 10, transmitted to the optical transmission unit joint 12 through the optical transmission unit 11, and the flat convex focusing mirror 15 in the adjusting joint 12 is
  • the water acts on the absorption protection layer 6; the absorption protection layer 6 absorbs the laser energy and rapidly vaporizes and rapidly forms a dense high-temperature and high-pressure plasma, which continues to absorb the laser energy and expands to form a high-intensity spherical shock wave, which faces the workpiece 4
  • the spherical shock wave directly acts on the workpiece 4 to strengthen the workpiece 4.
  • the other spherical shock wave is reflected as an incident wave through the inner surface of the resonant cavity 19, and a focused reflected wave is formed near the focus of the laser light 13 to repeat the foregoing process as a shock wave, thereby forming a composite shock wave. , impacting the workpiece 4 twice or more times;
  • Step (4) After the laser shock is completed, the laser generating unit 10 and the water pump 3 are sequentially turned off under the control of the computer 9, the workpiece 4 is removed, and finally, the residual protective layer 6 on the surface of the workpiece 4 is removed.
  • the present embodiment employs a motion system to cause relative motion between the workpiece 4 and the laser shock reinforced device.
  • the moving table can be used to move the workpiece (as shown in FIG. 10A), or the industrial robot can be used to move the laser impact strengthening device (as shown in FIG. 10B), or both can be moved (as shown in FIG. 10C).
  • the moving table can be used to move the workpiece (as shown in FIG. 10A), or the industrial robot can be used to move the laser impact strengthening device (as shown in FIG. 10B), or both can be moved (as shown in FIG. 10C).
  • the specific processing method is: in the above process, adjusting the contact position of the open end surface of the resonant cavity 19 and the surface of the absorbing protective layer 6, that is, after the above step (3), performing the following steps (3') one or more times, and then Go to step (4):
  • the impact region of the surface of the workpiece forms a superimposed trajectory.
  • the exit end faces of the cavity 19 are of different shapes (circular, square or rectangular) as shown in Fig. 9, the superimposed trajectories of the formed impact regions are as shown in Fig. 10.
  • the two groups of laser impact strengthening devices in the present embodiment can also be used to simultaneously strengthen the upper and lower surfaces of the workpiece 4, as shown in FIG. 11, the specific processing procedure is as follows:
  • Step (1) cleaning and drying the workpiece 4 with a liquid such as acetone or alcohol, and then coating the aluminum foil absorbent layer on the surface of the metal workpiece 4;
  • Step (2) opening end faces and absorption protection of two resonant cavities in two sets of laser shock tensing devices
  • the surface of the layer is tightly contacted by a sealing gasket, and then the water pump is separately activated to fill each cavity with deionized water through respective fluid inlets, and the ion water is circulated through the fluid outlet, and the flow regulating valve is adjusted to adjust the flow rate of the deionized water.
  • Step 3 The computer controls the laser generating unit in the two sets of devices to be turned on, respectively adjusting the parameters of the laser unit to meet the experimental requirements; the laser is emitted from the laser generating unit through the light guiding unit into the resonant cavity, and acts on the absorption through the deionized water.
  • the protective layer absorbs the laser energy and rapidly vaporizes and rapidly forms a dense high-temperature and high-pressure plasma.
  • the plasma continues to absorb the laser energy and expands to form a high-intensity spherical shock wave.
  • the partial spherical shock wave facing the workpiece 4 directly acts on the workpiece.
  • the workpiece 4 is strengthened, and the other spherical shock waves are reflected by the inner surface of the cavity as the incident wave, and a focused reflected wave is formed near the focus of the laser, and the shock wave is repeated again to repeat the foregoing process, so that the composite shock wave is formed on the upper and lower surfaces of the workpiece twice. Impacting the workpiece 4 more or more times;
  • Step (4) After the laser shock is completed, the two laser generating units and the water pump are sequentially closed under the control of the computer, the workpiece 4 is removed, and finally, the residual protective layer on the upper and lower surfaces of the workpiece 4 is removed.
  • the laser shock absorbing device includes a laser generating unit and a resonant cavity with one end open, and the open end surface of the resonant cavity is in non-close contact with the surface of the absorbing protective layer to form a “back-down” structure.
  • the cavity is also provided with a laser inlet, a fluid inlet, and a fluid outlet.
  • the surface of the workpiece to be treated is an absorbing protective layer.
  • the workpiece is a metal workpiece, and the absorbing protective layer is an aluminum foil.
  • the surface of the absorbing protective layer is a constraining layer.
  • the constraining layer is in the cavity and is a gas injected through the fluid inlet, such as air, nitrogen, or the like.
  • the gas is a gas pump that pumps the gas in the external gas tank into the resonant cavity through the fluid inlet, and pumps out the resonant cavity through the fluid outlet to make the gas flow.
  • a light guiding unit is disposed between the laser generating unit and the laser inlet, so that the laser generated by the laser generating unit efficiently enters the resonant cavity through the laser inlet.
  • the light guiding unit is composed of a light transmission unit, a light transmission unit joint, a plano-convex collimating mirror and a plano-convex focusing mirror. In practical applications, the light guiding unit can also take other forms.
  • a first gasket, a high pressure resistant glass and a second gasket are disposed at the laser inlet.
  • the high pressure resistant glass is located between the first gasket and the second gasket, and the material thereof may be a quartz plate or a lens sheet.
  • the contact surface of the resonant cavity with the absorbing protective layer is non-hermetic, so a small amount of gas overflow will be generated there, but the overflow does not hinder the effectiveness of the embodiment. On the contrary, a small amount of overflow helps to reduce the absorption of the resonant cavity. The friction of the protective layer.
  • the processing method for strengthening the workpiece by the laser shock absorbing device is similar to the processing method in Embodiment 1, and will not be described herein.

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Abstract

一种针对工件表面的激光冲击强化装置，该装置包括谐振腔。利用该装置进行激光冲击强化处理时，由于谐振腔的存在，使原本向外散失的冲击波得到利用，通过谐振腔的反射和聚波作用形成复合冲击波，两次或更多次地作用于工件表面，大大提高了能量利用率；同时，流体约束层被限制在谐振腔内，形状固定，从而有效解决了流体约束层厚度难以控制，稳定性差的问题。

Description

针对工件表面的激光冲击强化装置及激光冲击强化处理方法 技术领域
本发明涉及针对工件表面的激光冲击强化技术领域，具体涉及一种针对工件表面的激光冲击强化装置及利用该装置对工件表面进行激光冲击强化处理的方法。
背景技术
激光冲击强化技术是一种将强激光产生的超高压冲击波用于工件表面进行激光冲击强化处理的技术。目前，激光冲击强化技术已经在航空、船舶、机械工程等领域得到了广泛应用，尤其是用于飞机发动机叶片的抗疲劳处理。
现有的针对工件表面的激光冲击强化装置包括激光发生单元，位于工件表面的吸收保护层，以及位于吸收保护层表面的约束层。约束层的功能是让激光能量穿过并作用于吸收保护层，同时还要尽可能多地提供等离子体膨胀时的反作用力，提高冲击波耦合效率。目前国内外普遍采用光学玻璃等固体材料作为约束层，或者采用厚度约为0.5-1mm的水膜等柔性材料作为透明约束层。吸收保护层的功能是吸收激光，产生等离子体，同时具有阻挡能力，避免激光及等离子体对工件的损伤。目前普遍使用油漆、柔性胶带或一定厚度的金属箔片等作为吸收保护层。
该激光冲击强化处理过程如图1所示：利用短脉冲(一般在50纳秒以内)、高功率密度(GW/cm2)的激光通过透明约束层，作用于金属等工件表面所涂覆或帖附的吸收保护层上；吸收保护层吸收激光能量后迅速气化，形成稠密的高温、高压等离子体，该等离子体继续吸收激光能量后急剧升温膨胀，形成冲击波，冲击波强度可达数个GPa(109Pa)量级，远高于许多工件材料的屈服强度；该冲击波穿过吸收保护层，作用于工件表面并向其内部传播，使工件表面产生塑性变形和残余压应力场，导致表层材料的塑形变形，位错密度增加，导致晶粒细化，压应力和硬度升高，从而显著提高材料的抗疲劳、抗磨损和抗腐蚀性能。
例如，美国专利US5744781“激光冲击处理的方法和装置”、中国专利CN102212655B“一种激光冲击方法”、CN1102962C“采用低能激光的激光冲击处理”和CN101831529B“曲轴圆角激光冲击处理强化方法”等都是采用该激光冲击强化过程。但是，从图1中可以明显地看出施加在工件表面的吸收保护层吸收激光能量后形成的等离子体冲击波只有大约一半作用于工件表面，而其余一半则向外散失。也就是说，现有的激光冲击强化过程中将近50％的能量损失了，其能量利用率很低。因此，为了实现预定的处理效果，只好提高激光能量，目前激光冲击强化中的激光普遍倾向于使用脉冲能量远远超过一焦耳的纳秒脉冲。但是，这样的激光器售价昂贵，同时，由于激光系统工作于极限状态而可靠性偏低。因此，有必要提高激光冲击强化的能量利用效率，以降低对激光系统的能量要求，从而在保证激光可靠性的前提下提高处理效果。
另外，对于约束层而言，水膜因其成本低、柔性好、可循环使用和对复杂曲面的适用性强等优点而被广泛使用；但是，水膜作为约束层却存在如下问题：(1)约为0.5-1mm的水膜厚度在实际的操作过程中很难稳定控制，例如，目前一般采用喷嘴从侧面施加水膜，但水膜的厚度却容易随着工件形状、位置的变化而发生变化，另外，加工过程中的冲击波容易造成水膜的破裂、溅射，从而影响加工的一致性和光路器件的可靠性；(2)相对于固体约束，水膜的约束刚性不足，因此对冲击波的约束效果不佳，容易出现不稳定约束等状况，最终导致激光冲击强化效果的削弱。
相对于水膜，玻璃等固体类约束层对激光冲击波的约束效果较好。但是，其加工适应性差，无法满足形状比较复杂的局部冲击区域；另外，玻璃在等离子体和冲击波的作用下会发生碎裂，因此一般仅适应于单次冲击，很难重复使用。
专利号为ZL02138338.3的发明专利“一种用于激光冲击处理的柔性贴膜”是利用两种不同组分的有机硅胶和添加剂，按一定的比例配比调和固化后形成约束层，再在其上喷涂86-1型黑漆的能量吸收保护层，形成集能量吸收保护层和约束层一体的柔性贴膜。该柔性贴膜虽然能形成集能量吸收保护层和约束层一体的柔性贴膜，但是其约束刚度达不到玻璃那样的约束强度，并且存在气泡等潜在质量隐患，同时柔性贴膜制作过程复杂、繁琐，不利于其在本领域的推广使用。
发明内容
本发明的技术目的是针对上述现有激光冲击强化技术中存在的不足，提供一种针对工件表面的激光冲击强化装置，利用该装置对工件表面进行激光冲击强化，提高激光冲击强化的效率及可靠性。
本发明实现上述技术目的所采用的技术方案为：一种针对工件表面的激光冲击强化装置，包括激光发生单元，位于工件表面的吸收保护层，以及位于吸收保护层表面的约束层，激光发生单元所产生的激光通过约束层后作用于吸收保护层，吸收保护层形成等离子体冲击波作用于工件表面；其特征是：
还包括一端开口的谐振腔，所述的谐振腔设置激光入口，用于将激光发生单元所产生的激光输入谐振腔；所述的谐振腔还设置流体入口，所述的约束层是通过该流体入口注入的流体；
所述的谐振腔的开口端面与吸收保护层相接触，使所述的约束层被限制在谐振腔内。
所述的工件指应用于工业技术领域的制件，包括任何可以在激光冲击波作用下产生塑性变形和残余压应力场的制件，如金属制件等。
所述的谐振腔体材料不限，一般选用具备较高冲击波耐受度和反射度的材料，包括但不限于金属，如SS304不锈钢，高密度的钨合金等，以及陶瓷材料等。
所述的谐振腔体内表面的具体形状不限，按照可以产生高效率冲击波谐振聚集的形状加工而成，包括椭球形和抛物面形等。
所述的谐振腔的开口端形状不限，可以是圆形、正方形、长方形等。
所述的流体包括任何适合于光能传输的气体和液体。气体包括但不限于空气、氮气等。流体包括但不限于水及其溶液。
所述的吸收保护层材料不限，包括金属箔片、黑漆和胶带等。
所述激光发生单元产生的激光的波长不限，只要能用于在谐振腔内产生所需的冲击波就可以使用，包括10640/1064/800/532/517/355纳米等。
综上所述，本发明提供的针对工件表面的激光冲击强化装置中包括谐振腔，选用流体作为约束层，并且该约束层被完全或者部分限制在谐振腔内。利用该装置进行激光冲击强化处理时，其处理过程如图2所示。即，工作状态时，来自激光发生单元的激光穿过谐振腔内的流体作用于吸收保护层，吸收保护层吸收激光能量后气化产生等离子体，该等离子体继续吸收激光能量后膨胀形成高强度的球面冲击波，该球面冲击波的具体传播过程A如下：
传播过程A：一部分球面冲击波作用于工件并向其内部传播，另一部分球面冲击波传向谐振腔内表面；
传向谐振腔内表面的球面冲击波经过该谐振腔内表面反射后再次形成球面冲击波，重复上述传播过程A；
如此重复多次传播过程A。即，由于谐振腔的存在，使原本向外散失的冲击波得到利用，在谐振腔的反射和聚波作用下，使一个激光脉冲诱发的冲击波可以形成复合冲击波，两次或更多次地作用于工件表面，实现一个脉冲多次冲击的效果，大大提高了能量利用率。
图3是现有的激光冲击强化装置中激光脉冲诱发的冲击波形与本发明的带谐振腔的激光冲击强化装置中激光脉冲诱发的波形对比示意图。即，现有的激光冲击强化装置中由于没有谐振腔，一个脉冲只产生一个有效的冲击峰，随后衰减，冲击波的持续时间较短，约为激光脉冲宽度的1-3倍，其波形如图3A所示。而本发明的激光冲击强化装置中包括谐振腔，波形如图3B所示，直接传向工件的冲击波形成第一个波峰，远离工件的冲击波经谐振腔反射、汇聚后形成第二个波峰，如此重复反射，形成两个或多于两个的有效冲击波，大大提高了能量利用率，从而提高了激光冲击强化效果。
另一方面，本发明的激光冲击强化装置中选用流体作为约束层，并且该约束层被限制在谐振腔内，从而使流体约束层形状固定，有效解决了现有技术中流体约束层厚度难以控制，稳定性差的问题。
为了进一步对上述激光冲击强化装置进行优化，本发明还提出了以下优化措施。
考虑到在冲击波经谐振腔内发射聚焦再次形成冲击波的过程中可能形成气泡而影响再次冲击强化的效果。作为优选，所述的谐振腔还设置流体出口，所述的流体通过流体入口注入，通过流体出口流出，形成流动状态。该优化的措施具 有如下优点：
(1)使所述的流体真正流动起来，一方面利用流体的流动减少再次形成冲击波的过程中形成气泡，另一方面即使该过程中形成少量的气泡，该流体的流动也能迅速将气泡带出谐振腔，保持激光光路的稳定性，有利于降低该气泡对冲击强化效果的负面影响；
(2)由于设置了流体出口，能够引导和调整谐振腔内压力，从而能够控制谐振腔体与工件之间的间距。
为了减少谐振腔内的流体在吸收保护层与谐振腔的连接处溢出，作为优选，谐振腔与吸收保护层的连接处设置密封垫圈。
本发明中，谐振腔的开口端面与吸收保护层相接触，所述的接触包括密闭接触与非密闭接触。由于本发明中约束层是流体，当谐振腔的开口端面与吸收保护层为密闭接触时，流体被完全限制在谐振腔内，无溢出。但是在实际应用中，控制谐振腔的开口端面与吸收保护层为密闭接触的难度较大。当谐振腔的开口端面与吸收保护层并非密闭接触时，将有少量流体会在该处溢出。但是，该溢出并不妨碍本发明的有效性，相反，少量流体的溢出有助于减少谐振腔体对吸收保护层的摩擦力。
为了便于激光通过激光入口高效进入谐振腔，作为优选，在激光产生单元与激光入口之间设置导光单元，以使激光产生单元所产生的激光高效通过激光入口进入谐振腔。该导光单元可以是由反射镜片组成的柔性光管系统，也可以是光纤等。
为了避免工作状态时等离子体冲击波以及流体在激光入口处的散失，作为优选，激光入口处设置垫片A、耐高压透明窗口片和垫片B。耐高压透明窗口片位于垫片A与垫片B之间，其材料包括但不限于石英片、透镜片等。
利用本发明激光冲击强化装置对工件进行强化处理的处理方法如下：
步骤1、工件进行清洗处理后在表面施加吸收保护层；
步骤2、将谐振腔的开口端面与吸收保护层表面相接触，通过流体入口向谐振腔内注入流体；
步骤3、激光发生单元所产生的激光经激光入口进入谐振腔，通过流体作用于吸收保护层，形成冲击波，该冲击波的传播过程A如下：
一部分冲击波直接作用于工件对工件进行强化，另一部分冲击波传向谐振腔内表面，经谐振腔内表面反射、聚波后再次形成冲击波，重复所述的传播过程A；
如此重复多次后，关闭激光发生单元；
步骤4、取下工件，清洗表面残余吸收保护层。
所述的步骤1中，在工件表面施加吸收保护层的方法包括但不限于油漆，胶带和金属箔片。
为了对工件表面不同区域进行激光冲击强化，作为优选，在处理过程中，对谐振腔开口端面与吸收保护层表面的接触位置进行调整，即，所述的步骤3之后进行一次或多次如下步骤3’，然后进行步骤4：
步骤3’：改变谐振腔的开口端面与吸收保护层表面的相接触位置，重复步骤3；
其中，步骤3’中，改变谐振腔的开口端面与吸收保护层表面的相接触位置的方式不限。例如，可以通过采用运动系统使工件和激光冲击强化装置产生相对运动，包括仅工件移动、仅激光冲击强化装置移动，或者两者均移动的形式，以适应各种尺寸的工件处理要求。
为了进一步加强工件的激光冲击强化效率，作为优选，采用两组装置对工件的上下两面同时进行强化处理的方法，具体处理过程如下：
步骤1、工件进行清洗处理后在上、下表面分别施加吸收保护层；
步骤2、将两组激光冲击强化装置中的两个谐振腔的开口端面分别与吸收保护层上、下表面相接触，然后分别通过流体入口向谐振腔内注入流体；
步骤3、将两组激光冲击强化装置中的激光发生单元所产生的激光分别经两个激光入口进入谐振腔，通过流体作用于吸收保护层，吸收保护层形成冲击波，该冲击波的传播过程A如下：
一部分冲击波直接作用于工件对工件进行强化，另一部分冲击波传向谐振腔内表面，经谐振腔内表面反射、聚波后再次形成冲击波，重复所述的传播过程A；
如此重复多次后，关闭激光发生单元；
步骤4、取下工件，清洗表面残余吸收保护层。
上述两种处理方法中，考虑到冲击波经谐振腔内发射聚焦再次形成冲击波的过程中可能形成气泡而影响再次冲击强化的效果，作为优选，谐振腔还设置流体出口，在所述的步骤2中，所述的流体通过流体入口注入，通过流体出口流出，形成流动状态。
附图说明
图1是现有的激光冲击强化处理过程示意图；
图2是利用本发明的激光冲击强化装置进行的激光冲击强化处理过程示意图；
图3是现有的激光冲击强化装置与本发明的激光冲击强化装置中激光脉冲诱发的冲击波形对比图；
图4是本发明实施例1中以水为约束介质的激光冲击强化装置示意图；
图5是本发明实施例1中采用光学器件搭建的导光单元；
图6是本发明实施例1中采用多关节导光臂的导光单元；
图7是本发明实施例1中采用特种光纤的导光单元；
图8是本发明实施例1中冲击加工中的三种运动模式；
图9是本发明实施例1中谐振腔的出口端面的不同形状示意图；
图10是具有图9所示端面形状的谐振腔的冲击区域的叠加轨迹；
图11是本发明实施例1中采用的双向冲击强化系统示意图；
图12是本发明实施例2中以空气为约束介质的激光冲击强化装置示意图。
附图中的标号为：1.流量调节阀；2.水箱；3.微型水泵；4.工件；5.流体出口；6.吸收保护层；7.第二连接端口；8.管道；9.计算机；10.激光发生单元；11.光传输单元；12.光传输单元接头；13.激光入口；14.平凸准直镜；15.平凸聚焦镜；16.垫片A；17.耐高压玻璃；18.垫片B；19.谐振腔；20.去离子水；21.第一连接端口；22.流体入口；23.密封垫圈。
具体实施方式
下面结合附图实施例对本发明作进一步详细描述，需要指出的是，以下所述实施例旨在便于对本发明的理解，而对其不起任何限定作用。
实施例1：
本实施例中，激光冲击强化装置如图4所示，包括激光发生单元10，一端开口的谐振腔19，该谐振腔19的开口端面与吸收保护层6的表面相密闭接触，形成“倒扣”结构。该谐振腔19还设置激光入口13、流体入口22以及流体出口5。
待处理工件4表面为吸收保护层6，本实施例中，工件4为金属工件，吸收保护层6为铝箔。吸收保护层6表面为约束层20。该约束层20处于谐振腔19内，是通过流体入口22注入的去离子水。该去离子水是微型水泵3将外部水箱2中的去离子水通过管道8经流体入口22泵入谐振腔19内，经流体出口5泵出谐振腔19，形成循环流动状态。管道8与流体入口22的连接端口为第一连接端口21，管道8与流体出口5的连接端口为第二连接端口7。还设置流量调节阀检测流体流量。
为了便于激光通过激光入口13高效、稳定地进入谐振腔19，在激光发生单元10与激光入口13之间设置导光单元，以使激光产生单元所产生的激光高效通过激光入口进入谐振腔。该导光单元由光传输单元11、光传输单元接头12、平凸准直镜14与平凸聚焦镜组成。在实际应用中，该导光单元还可以采用其他形式，如图5所示是采用光学器件搭建的导光单元，图6所示是采用多关节导光臂的导光单元；如图7所示是采用特种光纤的导光单元。
为了避免工作状态时等离子体冲击波在激光入口13处的散失，在激光入口13处设置第一垫片16、耐高压玻璃17和第二垫片18。耐高压玻璃17位于第一垫片16与第二垫片18之间，其材料可以是石英片或者透镜片。
为了加强谐振腔19与吸收保护层6相接触面的密闭性，在谐振腔19与吸收保护层6相接触的面设置了密封垫圈23。
计算机9用于控制激光发生10与微型水泵3。
利用该激光冲击强化装置对工件进行强化处理的处理方法如下：
步骤(1)、用丙酮、酒精等液体对工件进行清洗、晾干，然后在将铝箔吸收保护层6涂覆在金属工件4表面；
步骤(2)、将谐振腔19的开口端面与吸收保护层6表面通过密封垫圈23相密闭接触，然后启动水泵3经流体入口22让谐振腔19内充满去离子水20，并通过流体出口5使离子水20流动起来，调节流量调节阀1使去离子水20的流速为0.2ml/s左右；
步骤(3)、计算机9控制激光发生单元10开启，该激光发生单元10为532纳米波长、25纳秒脉宽、1-10焦耳脉冲能量的Nd：YAG固体脉冲激光发生单元，调节脉冲激光装置10参数，使参数满足实验要求；激光束13从激光发生单元10发出，经过光传输单元11传送到光传输单元接头12，调节接头12里的平凸聚焦镜15上下距离使激光13通过去离子水作用在吸收保护层6上；吸收保护层6吸收激光能量迅速气化并迅速形成致密的高温高压等离子体，该等离子体继续吸收激光能量后膨胀形成高强度的球面冲击波，面向工件4的部分球面冲击波直接作用于工件4对工件4进行强化，其它部分球面冲击波作为入射波经谐振腔19内表面反射后在激光13的焦点附近形成聚焦反射波，再次成为冲击波重复前述过程，从而形成复合冲击波，两次或更多次地冲击强化工件4；
步骤(4)：待激光冲击完后，在计算机9的控制下依次关闭激光发生单元10与水泵3，取下工件4，最后，去除工件4表面残余的吸收保护层6。
为了使工件4表面不同区域进行激光冲击强化，本实施例采用运动系统使工件4和激光冲击强化装置产生相对运动。具体可以采用移动工作台使工件移动(如图10A所示)，或者采用工业机器人使激光冲击强化装置移动(如图10B所示)，或者两者均移动(如图10C所示)的形式，以适应各种尺寸的工件处理要求。
具体处理方法为：在上述处理过程中，对谐振腔19开口端面与吸收保护层6表面的接触位置进行调整，即，上述步骤(3)之后进行一次或多次如下步骤(3’)，然后进行步骤(4)：
步骤(3’)：在运动系统的作用下，改变谐振腔19的开口端面与吸收保护层6表面的相接触位置，重复步骤(3)。
在运动系统的作用下，工件表面的冲击区域形成叠加的轨迹。如图9与10所示，当谐振腔19的出口端面为图9所示不同形状(圆形、正方形或者矩形)时，所形成的冲击区域的叠加轨迹如图10所示。
为了进一步加强工件4的激光冲击强化效率，还可以采用本实施中的两组激光冲击强化装置对该工件4的上下表面同时进行强化处理的方法，如图11所示，具体处理过程如下：
步骤(1)、用丙酮、酒精等液体对工件4进行清洗、晾干，然后在将铝箔吸收层涂覆在金属工件4表面；
步骤(2)、将两组激光冲击强化装置中的两个谐振腔的开口端面与吸收保护 层表面通过密封垫圈相密闭接触，然后分别启动水泵经各自流体入口让每个谐振腔内充满去离子水，并通过流体出口使离子水循环流动起来，调节流量调节阀用于调节去离子水的流速；
步骤3、计算机控制该两组装置中的激光发生单元开启，分别调节激光单元参数，使其满足实验要求；激光从激光发生单元发出经过导光单元进入谐振腔，通过去离子水后作用在吸收保护层上；吸收保护层吸收激光能量迅速气化并迅速形成致密的高温高压等离子体，该等离子体继续吸收激光能量后膨胀形成高强度的球面冲击波，面向工件4的部分球面冲击波直接作用于工件4对工件4进行强化，其它部分球面冲击波作为入射波经谐振腔内表面反射后在激光的焦点附近形成聚焦反射波，再次成为冲击波重复前述过程，从而使工件上下表面均形成复合冲击波，两次或更多次地冲击强化工件4；
步骤(4)：待激光冲击完后，在计算机的控制下依次关闭两激光发生单元与水泵，取下工件4，最后，去除工件4上下表面残余的吸收保护层。
实施例2：
本实施例中，激光冲击强化装置如图12所示，包括激光发生单元，一端开口的谐振腔，该谐振腔的开口端面与吸收保护层的表面非密闭接触，形成“倒扣”结构。该谐振腔还设置激光入口、流体入口以及流体出口。
待处理工件表面为吸收保护层，本实施例中，工件为金属工件，吸收保护层为铝箔。吸收保护层表面为约束层。该约束层处于谐振腔内，是通过流体入口注入的气体，例如空气、氮气等。该气体是气体泵将外部气体罐中的气体经流体入口泵入谐振腔内，经流体出口泵出谐振腔，使气体形成流动状态。
为了提高激光通过激光入口高效进入谐振腔，在激光发生单元与激光入口之间设置导光单元，以使激光产生单元所产生的激光高效通过激光入口进入谐振腔。该导光单元由光传输单元、光传输单元接头、平凸准直镜与平凸聚焦镜组成。在实际应用中，该导光单元还可以采用其他形式。
为了避免工作状态时等离子体冲击波在激光入口处的散失，在激光入口处设置第一垫片、耐高压玻璃和第二垫片。耐高压玻璃位于第一垫片与第二垫片之间，其材料可以是石英片或者透镜片。
谐振腔与吸收保护层相接触面是非密闭的，因此在该处将产生少量气体溢出，但是，该溢出并不妨碍本实施例的有效性，相反，少量溢出有助于减少谐振腔体对吸收保护层的摩擦力。
利用该激光冲击强化装置对工件进行强化处理的处理方法类似实施例1中的处理方法，在此不再赘述。
以上所述的实施例对本发明的技术方案进行了详细说明，应理解的是以上所述仅为本发明的具体实施例，并不用于限制本发明，凡在本发明的原则范围内所做的任何修改、补充或类似方式替代等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种针对工件表面的激光冲击强化装置，包括激光发生单元，位于工件表面的吸收保护层，以及位于吸收保护层表面的约束层，激光发生单元所产生的激光通过约束层后作用于吸收保护层，吸收保护层形成等离子体冲击波作用于工件表面；其特征是：还包括一端开口的谐振腔，所述的谐振腔设置激光入口，用于将激光发生单元所产生的激光输入谐振腔；所述的谐振腔还设置流体入口，所述的约束层是通过该流体入口注入的流体；所述的谐振腔的开口端面与吸收保护层表面相接触，使所述的约束层被限制在谐振腔内。
  2. 如权利要求1所述的针对工件表面的激光冲击强化装置，其特征是：所述的流体为气体或者液体。
  3. 如权利要求1所述的针对工件表面的激光冲击强化装置，其特征是：所述的谐振腔的开口端是圆形、正方形或者长方形。
  4. 如权利要求1所述的针对工件表面的激光冲击强化装置，其特征是：所述的谐振腔还设置流体出口，所述的流体通过流体入口注入，通过流体出口流出，形成流动状态。
  5. 利用权利要求1、2或3所述的激光冲击强化装置对工件表面进行强化处理的方法，其特征是：包括如下步骤：
    步骤1、工件进行清洗处理后在表面施加吸收保护层；
    步骤2、将谐振腔的开口端面与吸收保护层表面相接触，通过流体入口向谐振腔内注入流体；
    步骤3、激光发生单元所产生的激光经激光入口进入谐振腔，通过流体作用于吸收保护层，吸收保护层形成冲击波，该冲击波的传播过程A如下：
    一部分冲击波直接作用于工件对工件进行强化，另一部分冲击波传向谐振腔内表面，经谐振腔内表面反射、聚波后再次形成冲击波，重复所述的传播过程A；
    如此重复多次后，关闭激光发生单元；
    步骤4、取下工件，清洗表面残余吸收保护层。
  6. 如权利要求5所述的对工件表面激光冲击强化处理方法，其特征是：在所述的步骤3之后进行一次或多次如下步骤3’，然后进行步骤4：
    步骤3’、改变谐振腔的开口端面与吸收保护层的相接触位置，重复步骤3；
  7. 如权利要求5所述的对工件表面激光冲击强化处理方法，其特征是：所述的谐振腔还设置流体出口，在所述的步骤2中，所述的流体通过流体入口注入，通过流体出口流出，形成流动状态。
  8. 利用权利要求1、2或3所述的激光冲击强化装置对工件表面进行强化处理的方法，其特征是：采用两组所述的激光冲击强化装置对工件的上下表面同时进行强化处理，具体处理过程如下：
    步骤1、工件进行清洗处理后在上、下表面分别制备吸收保护层；
    步骤2、将两组激光冲击强化装置中的两个谐振腔的开口端面分别与吸收保护层上、下表面相接触，然后分别通过流体入口向谐振腔内注入流体；
    步骤3、将两组激光冲击强化装置中的激光发生单元所产生的激光分别经两个激光入口进入谐振腔，通过流体作用于吸收保护层，形成冲击波，该冲击波的传播过程A如下：
    一部分冲击波直接作用于工件对工件进行强化，另一部分冲击波传向谐振腔内表面，经谐振腔内表面反射、聚波后再次形成冲击波，重复所述的传播过程A；
    如此重复多次后，关闭激光发生单元；
    步骤4、取下工件，清洗表面残余吸收保护层。
  9. 如权利要求8所述的对工件表面激光冲击强化处理方法，其特征是：在所述的步骤3之后进行一次或多次如下步骤3’，然后进行步骤4：
    步骤3’、分别改变每个谐振腔的开口端面与吸收保护层的上、下表面的相接触位置，重复步骤3。
  10. 如权利要求8所述的对工件表面激光冲击强化处理方法，其特征是：所述的每个谐振腔还设置流体出口，在所述的步骤2中，所述的流体通过流体入口注入，通过流体出口流出，形成流动状态。
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