WO2015059766A1 - Pompe à flux électroosmotique - Google Patents

Pompe à flux électroosmotique Download PDF

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Publication number
WO2015059766A1
WO2015059766A1 PCT/JP2013/078574 JP2013078574W WO2015059766A1 WO 2015059766 A1 WO2015059766 A1 WO 2015059766A1 JP 2013078574 W JP2013078574 W JP 2013078574W WO 2015059766 A1 WO2015059766 A1 WO 2015059766A1
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WIPO (PCT)
Prior art keywords
dielectric porous
permeable electrode
porous film
dielectric
water permeable
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PCT/JP2013/078574
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English (en)
Japanese (ja)
Inventor
泰志 奥村
菊池　裕嗣
博紀 樋口
学 谷口
山本　一喜
Original Assignee
積水化学工業株式会社
国立大学法人九州大学
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Application filed by 積水化学工業株式会社, 国立大学法人九州大学 filed Critical 積水化学工業株式会社
Priority to JP2014536812A priority Critical patent/JP6166268B2/ja
Priority to US14/390,543 priority patent/US20160252082A1/en
Priority to PCT/JP2013/078574 priority patent/WO2015059766A1/fr
Publication of WO2015059766A1 publication Critical patent/WO2015059766A1/fr
Priority to US15/655,100 priority patent/US20170335836A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/04—Pumps for special use

Definitions

  • the present invention relates to an electroosmotic pump.
  • micropump which are a type of microfluidic device
  • a micropump Conventionally, a mechanical micropump is known as a micropump.
  • the mechanical micro pump is composed of precision parts. For this reason, there is a limit to cost reduction and miniaturization in the mechanical micropump. From such a background, an electroosmotic pump is attracting attention as a micro pump that replaces a mechanical pump (see, for example, Patent Document 1).
  • the electroosmotic flow is a flow of liquid that is generated when a voltage is applied to the electric double layer where the liquid and the solid are in contact. Electroosmotic flow was discovered with electrophoresis by physicist Royce in the early 19th century. In contrast to electrophoresis in which solutes and charged particles move in a liquid, solids are fixed in electroosmotic flow. For this reason, the bulk liquid moves when electroosmotic flow occurs. The electroosmotic flow is observed in a liquid or ionic liquid composed of polarizable molecules including a protic solvent such as water or alcohol. A pump for feeding liquid using this electroosmotic flow is an electroosmotic flow pump.
  • Patent Document 1 describes an example of an electroosmotic flow pump.
  • a conventional electroosmotic pump such as the electroosmotic pump described in Patent Document 1
  • the main object of the present invention is to provide a novel electroosmotic pump capable of AC drive.
  • the first electroosmotic pump according to the present invention includes a dielectric porous membrane, a first water permeable electrode, and a second water permeable electrode.
  • the first water permeable electrode is disposed on one side of the dielectric porous film.
  • the second water permeable electrode is disposed on the other side of the dielectric porous film.
  • the hydrophilicity of the main surface on the first water permeable electrode side of the dielectric porous membrane is different from the hydrophilicity of the main surface on the second water permeable electrode side.
  • each of the first water permeable electrode and the second water permeable electrode includes a conductive porous film, a conductive mesh, a conductive fine particle sintered film formed on the surface of the dielectric porous film, Or it is preferable that it is a pattern electrode printed on the porous insulating film.
  • the dielectric porous film may have a hydrophilic layer on one main surface.
  • the second electroosmotic pump according to the present invention includes a dielectric porous membrane, a first water permeable electrode, and a second water permeable electrode.
  • the first water permeable electrode is disposed on one side of the dielectric porous film.
  • the second water permeable electrode is disposed on the other side of the dielectric porous film.
  • the zeta potential on one side of the dielectric porous film and the zeta potential on the other side are different from each other, or the streaming potential on one side of the dielectric porous film is different from the streaming potential on the other side.
  • a third electroosmotic pump includes a dielectric porous membrane, a first water permeable electrode, and a second water permeable electrode.
  • the first water permeable electrode is disposed on one side of the dielectric porous film.
  • the second water permeable electrode is disposed on the other side of the dielectric porous film.
  • the dielectric porous membrane is formed so that when an alternating voltage is applied between the first water permeable electrode and the second water permeable electrode, the liquid in the dielectric porous membrane is changed to the first water permeable electrode side. It is comprised so that the force to selectively move from one side of the 2nd water-permeable electrode side to the other may be provided.
  • the dielectric porous film includes the laminated first dielectric porous film and second dielectric porous film, and one principal surface is It may be configured by the first dielectric porous film, and the other main surface may be configured by the second dielectric porous film.
  • the first to third electroosmotic pumps according to the present invention may further include a power source that applies an AC voltage between the first permeable electrode and the second permeable electrode.
  • the power source preferably applies an AC voltage having a frequency of 1 MHz or less.
  • the thickness of the dielectric porous film is preferably in the range of 5 ⁇ m to 100 ⁇ m.
  • the ratio of the area of the first and second water permeable electrodes to the square of the thickness of the dielectric porous membrane is preferably larger than 100.
  • the average pore diameter in the dielectric porous membrane is preferably in the range of 10 nm to 50 ⁇ m.
  • each of the first and second water permeable electrodes preferably has a through hole penetrating in the thickness direction.
  • the dielectric porous film preferably has a through-hole penetrating in the thickness direction.
  • the hydrophilicity of the main surface on the first water permeable electrode side of the dielectric porous membrane is different from the hydrophilicity of the main surface on the second water permeable electrode side.
  • the first permeable electrode preferably has a hydrophilic layer on the surface layer opposite to the dielectric porous membrane.
  • FIG. 1 is a schematic cross-sectional view of a liquid delivery module including an electroosmotic flow pump according to the first embodiment.
  • FIG. 2 is a schematic cross-sectional view of a part of the liquid-feeding film in the first embodiment.
  • FIG. 3 is a schematic cross-sectional view of a part of the liquid feeding film in the second embodiment.
  • FIG. 4 is a schematic diagram of the hydrophilic layer of the liquid-feeding film in the second embodiment.
  • FIG. 5 is a schematic cross-sectional view of a part of the liquid feeding film in the third embodiment.
  • FIG. 6 is a fracture cross-sectional photograph of the track-etched film used in Example 1.
  • FIG. 7 is a graph showing the relationship between the applied voltage and the flow rate in Example 1.
  • FIG. 8 is a graph showing the relationship between applied voltage and flow rate in Examples 1 to 3.
  • FIG. 1 is a schematic cross-sectional view of an electroosmotic flow pump according to the present embodiment.
  • FIG. 2 is a schematic cross-sectional view of a part of the liquid feeding film in the present embodiment.
  • the liquid feeding module 1 includes a fixing jig 10 and 11 and an electroosmotic pump 2 attached to the fixing jig 10 and 11.
  • the electroosmotic pump 2 includes a liquid feeding film 20 sandwiched between a first water permeable electrode and a second water permeable electrode.
  • the electroosmotic pump 2 is supplied with AC power.
  • the liquid feeding film 20 partitions the first storage unit 12 and the second storage unit 13.
  • a liquid storage tank 30 is connected to the second storage unit 13. Liquid is supplied from the liquid reservoir 30 to the first reservoir 12.
  • the liquid supplied to the first storage unit 12 is supplied to the second storage unit 13 by the liquid transfer film 20 and is discharged from the discharge port 14 provided in the second storage unit 13.
  • the 1st storage part 12 and the 2nd storage part 13 are for guide
  • the first and second reservoirs 12 and 13 do not necessarily have a specific volume.
  • the first reservoir 12 and the second reservoir 13 may be part of any channel flow path of the microfluidic device.
  • the 1st storage part 12 and the 2nd storage part 13 may each be satisfy
  • the liquid feeding film 20 may have a flat plate shape, a bent structure, a structure having a plurality of irregularities, or a folded structure. In that case, the ratio of the actual surface area to the area of the liquid delivery film 20 in plan view ((actual area of the surface of the liquid delivery film 20) / (area of the liquid delivery film 20 in plan view)) may be increased. it can. Therefore, the liquid feeding capability of the electroosmotic flow pump 2 can be improved.
  • the liquid feeding film 20 has a dielectric porous film 21.
  • the dielectric porous film 21 is made of an appropriate dielectric.
  • the dielectric porous film 21 is, for example, a polymer film made of polycarbonate (PC), polyester (PET), polyimide (PI) or the like, ceramic, silicon, glass, aluminum oxide sintered body, aluminum nitride sintered body. Further, it may be composed of an inorganic film made of a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, a glass ceramic sintered body, or the like.
  • the dielectric porous film 21 may be, for example, a monolithic porous body.
  • the dielectric porous film 21 is preferably a track-etched film.
  • the track-etched film means a track-etched film.
  • Track etching is chemical etching that forms a linear track by irradiating a film with strong heavy ions.
  • the dielectric porous film 21 is a polymer film or an inorganic film, pores can be formed by laser light irradiation.
  • the dielectric porous film 21 is preferably a film having open cells, and is preferably a film having a plurality of through holes penetrating in the thickness direction.
  • the track-etched film has many through holes penetrating in the thickness direction.
  • the thickness of the dielectric porous film 21 is not particularly limited, but is preferably about 5 ⁇ m to 100 ⁇ m, and more preferably 10 ⁇ m to 60 ⁇ m. By setting the thickness of the dielectric porous film 21 to such a thickness, it is possible to antagonize the thickness of the dielectric porous film 21 and the thickness of the electric double layer to be formed. Therefore, the operation of the electroosmotic flow pump 2 is suitable.
  • the average pore diameter in the dielectric porous film 21 is preferably 10 nm to 50 ⁇ m, more preferably 20 nm to 10 ⁇ m, and further preferably 50 nm to 2 ⁇ m. If the average pore diameter in the dielectric porous film 21 is too small, the flow resistance may be large and the liquid feeding amount may be small. If the average pore size in the dielectric porous film 21 is too large, the water pressure of the liquid feeding is lowered, and the energy efficiency of the electroosmotic flow may be deteriorated.
  • the aperture ratio of the dielectric porous film 21 is preferably 1% to 50%, and more preferably 3% to 30%. If the aperture ratio of the dielectric porous film 21 is too high, adjacent holes are likely to be fused, and a problem may occur in the self-supporting property of the film. If the aperture ratio of the dielectric porous film 21 is too low, the liquid feeding amount may be small.
  • Pore density of the dielectric porous film 21, 4 E2 / c is preferably m is 2 ⁇ 5E 13 / c m 2 , 3E 4 / cm 2 ⁇ 7.5 E1 0 / cm 2 and it is further preferable. If the pore density of the dielectric porous film 21 is too high, the aperture ratio may be too high or the average pore size may be too small. If the pore density of the dielectric porous film 21 is too low, the energy efficiency of the electroosmotic flow may be deteriorated.
  • a first water permeable electrode 22 is provided on the second reservoir 13 side of the dielectric porous film 21.
  • a second water permeable electrode 23 is provided on the first reservoir 12 side of the dielectric porous film 21.
  • the first and second water permeable electrodes 22 and 23 may be provided so that an electric double layer is formed on the surface of the dielectric porous film 21 when the liquid is supplied.
  • Each of the first and second permeable electrodes 22 and 23 is not necessarily in contact with the dielectric porous film 21.
  • a conductive rubber having a high elastic modulus may be interposed between each of the first and second water permeable electrodes 22 and 23 and the dielectric porous film 21.
  • the first and second permeable electrodes 22 and 23 are provided so that liquid can pass in the thickness direction.
  • Each of the first and second water permeable electrodes 22 and 23 preferably has a through-hole penetrating in the thickness direction.
  • the through holes of the first and second permeable electrodes 22 and 23 and the through holes of the dielectric porous film 21 are preferably connected.
  • the first and second water permeable electrodes 22 and 23 are each made of, for example, a conductive material such as metal on the dielectric porous film 21 so that the pores of the dielectric porous film 21 are not completely closed. It can be formed by forming a film. Moreover, the 1st and 2nd water-permeable electrodes 22 and 23 may be comprised by patterned electrodes, such as a mesh electrode, a comb-shaped electrode, a staggered electrode, and a fractal pattern electrode, respectively.
  • the material of the first and second water permeable electrodes 22 and 23 is not particularly limited as long as it is a conductive material, but the first and second water permeable electrodes 22 and 23 are made of a highly conductive material. Is preferred. Specifically, each of the first and second permeable electrodes 22 and 23 is composed of at least one metal of gold, silver and copper, a composite material mainly composed of carbon such as carbon nanotube, indium tin oxide (ITO). ) Or other transparent conductive oxide (Transparent Conductive Oxide) or the like.
  • ITO indium tin oxide
  • Transparent Conductive Oxide Transparent Conductive Oxide
  • the electroosmotic flow pump 2 includes an AC power source 40.
  • An AC voltage is applied between the first and second permeable electrodes 22 and 23 by the AC power source 40.
  • the AC power supply 40 preferably applies an AC voltage having a frequency of 1 MHz or less between the first and second permeable electrodes 22 and 23, and more preferably applies an AC voltage of 0.5 Hz to 20 kHz. More preferably, an alternating voltage of 1 Hz to 100 Hz is applied. If the frequency of the AC voltage applied between the first and second permeable electrodes 22 and 23 is too high, the electroosmotic pump 2 may not operate properly.
  • the dielectric porous membrane 21 has a hydrophilic layer 21a on the main surface on the first water permeable electrode 22 side.
  • a hydrophilic layer 21a on the main surface on the first water permeable electrode 22 side.
  • one surface layer of the dielectric porous film 21 is a hydrophilic layer 21a.
  • one surface of the dielectric porous film 21 has a hydrophilic treatment or a hydrophilic functional group typified by plasma treatment such as atmospheric pressure plasma chemical treatment.
  • the hydrophilic layer 21a can be formed by chemically modifying with molecules.
  • a polyurethaneurea containing a phosphorylcholine group is preferably used as the polymer containing a hydrophilic functional group.
  • polylysine, polyallylamine, etc. which have many amino groups in a molecular chain can also be used as a polymer containing a hydrophilic functional group.
  • the method of chemically modifying the surface of the dielectric porous film 21 with a molecule having a hydrophilic functional group is not limited to these, and a chemical modification hydrophilization technique known to those skilled in the art can be applied.
  • the hydrophilicity of the surface of the hydrophilic layer 21a is higher than the hydrophilicity of the main surface of the dielectric porous film 21 on the second water permeable electrode 23 side. Therefore, the zeta potential of the main surface of the dielectric porous membrane 21 on the first water permeable electrode 22 side and the zeta potential of the main surface on the second water permeable electrode 23 side are different from each other, or the dielectric
  • the streaming potential of the main surface of the body porous membrane 21 on the first permeable electrode 22 side is different from the streaming potential of the main surface on the second permeable electrode 23 side.
  • the magnitude of the zeta potential on the main surface of the dielectric porous film 21 on the first water permeable electrode 22 side is larger than the zeta potential on the main surface on the second water permeable electrode 23 side.
  • the flow potential on the main surface of the dielectric porous membrane 21 on the first water permeable electrode 22 side is larger than the flow potential on the main surface on the second water permeable electrode 23 side. Therefore, when an AC voltage is applied between the first water permeable electrode 22 and the second water permeable electrode 23, the liquid is transferred from the first reservoir 12 to the second reservoir 13. Thereby, the electroosmotic flow pump 2 operates.
  • the dielectric porous film 21 when the dielectric porous film 21 is applied with an alternating voltage between the first water permeable electrode 22 and the second water permeable electrode 23, the dielectric porous film 21.
  • a force for moving the liquid from the first water-permeable electrode 22 side to the second water-permeable electrode 23 side is applied to the liquid inside.
  • the electroosmotic flow pump 2 can be driven by an alternating voltage. Therefore, unlike the case where a DC voltage is applied to the electroosmotic pump, the liquid is electrolyzed when the electroosmotic pump 2 is driven, and the pH of the liquid is not easily changed and bubbles are not easily changed.
  • Ratio of the area of the first and second permeable electrodes 22, 23 to the square of the thickness of the dielectric porous film 21 ((area of the first and second permeable electrodes 22, 23) / (dielectric)
  • the thickness ( 2 ) of the porous membrane 21 is preferably greater than 100. If the ratio ((area of the first and second permeable electrodes 22 and 23) / (thickness of the dielectric porous film 21) 2 ) is too small, the efficiency of liquid feeding is deteriorated. There is no restriction for this large ratio.
  • the hydrophilicity can be measured with an automatic contact angle meter (Kyowa Interface Science Co., Ltd., DM-300).
  • Zeta potential A solid or liquid interface in contact with a protic solvent typified by an aqueous solution is charged except in special cases.
  • the electric field due to this electric charge attracts ions (counter ions) of opposite signs from the solution side to form an ion atmosphere (electric double layer) near the surface.
  • ions counter ions
  • a diffusion electric double layer is present.
  • the zeta potential is a potential at a “sliding surface” (also referred to as a shear surface) at the boundary between the Stern layer and the diffusion electric double layer.
  • the zeta potential on the surface of the membrane can be measured by, for example, a membrane zeta potential measurement device (Otsuka Electronics Co., Ltd. ELSZ-1).
  • the zeta potential in the pores can be measured by, for example, a solid zeta potential measuring device (Anton Paar Japan, SurPASS).
  • Streaming potential can be measured with a solid zeta potential measuring device (Anton Paar Japan, SurPASS).
  • the electroosmotic flow pump of this invention operate
  • the electroosmotic pump of the present invention operates not only when an AC voltage is applied but also when a DC voltage is applied.
  • FIG. 3 is a schematic cross-sectional view of a part of the liquid feeding film in the second embodiment.
  • the electroosmotic pump according to the present embodiment is different from the electroosmotic flow pump according to the first embodiment in that the first water permeable electrode 22 has a hydrophilic layer 22a on the surface layer opposite to the dielectric porous membrane 21. Different from pump 2.
  • the liquid feeding performance can be improved by providing the hydrophilic layer 22a.
  • the hydrophilic layer 22a can be formed, for example, by performing a surface treatment with a self-assembling reagent capable of gold-thiol bonding when the first permeable electrode 22 contains gold.
  • the self-assembling reagent preferably used is a molecule having a main chain including one terminal constituted by a sulfur atom and another terminal constituted by a hydrophilic group.
  • a self-assembling reagent for example, HS- (CH 2 ) n —COOH (1) HOOC- (CH 2) n -S- S- (CH 2) n-COOH .
  • FIG. 4 shows a schematic diagram of the hydrophilic layer 22a formed using the above-described self-assembling reagent (specifically, 1,1-mercaptodecanoic acid).
  • degreasing treatment supercritical CO 2 cleaning, plasma treatment, corona discharge treatment, and the like may be additionally performed before the hydrophilic treatment with the self-assembling reagent.
  • FIG. 5 is a schematic cross-sectional view of a part of the liquid feeding film in the third embodiment.
  • the dielectric porous film 21 includes a first dielectric porous film 21A and a second dielectric porous film 21B.
  • the first dielectric porous film 21A and the second dielectric porous film 21B are laminated.
  • the first dielectric porous film 21A is located on the first water permeable electrode 22 side, and the second dielectric porous film 21B is located on the second water permeable electrode 23 side.
  • the first dielectric porous film 21A is made of a material having higher hydrophilicity than the second dielectric porous film 21B.
  • the hydrophilicity of the surface of the dielectric porous membrane 21 on the first water permeable electrode 22 side is higher than the hydrophilicity of the surface on the second water permeable electrode 23 side. Therefore, the electroosmotic pump of this embodiment also operates by applying an alternating voltage.
  • the ratio between the thickness of the first dielectric porous film 21A and the thickness of the second dielectric porous film 21B is preferably 1: 100 to 100: 1, and more preferably 1:10 to 10: 1.
  • Example 1 An electroosmotic pump having a configuration substantially similar to that of the electroosmotic pump 2 according to the first embodiment was produced in the following manner.
  • a 20 nm thick gold film using a magnetron sputtering apparatus (vacuum device, MSP-1S) on both sides of a track etched film (Millipore, isopore membrane filters HTTP04700) having a thickness of 20 ⁇ m and an average pore diameter of 400 nm was deposited to form a liquid delivery film.
  • MSP-1S magnetron sputtering apparatus
  • MSP-1S magnetron sputtering apparatus
  • a track etched film Millipore, isopore membrane filters HTTP04700
  • the first and second permeable electrodes made of gold were connected to an AC power source via a conductive rubber electrode.
  • the distance between the first water permeable electrode and the second water permeable electrode was 20 ⁇ m, which is equal to the thickness of the track etched film.
  • FIG. 6 shows a
  • the zeta potential of the surface of the track-etched film was measured using a film zeta potential measuring device (Otsuka Electronics ELSZ-1). Specifically, the velocity of electroosmotic flow induced by applying an electric field in parallel to the track-etched film was observed as the motion velocity of polystyrene latex (500 nm) that was not charged by modification of hydroxypropylcellulose. The zeta potential was measured from the movement speed. As the liquid, a 10 mM NaCl aqueous solution was used. The results are shown in Table 1 below.
  • the zeta potential in the pores of the track-etched membrane was measured by the streaming potential method using a solid zeta potential measuring device (Anton Paar Japan, SurPASS).
  • a solid zeta potential measuring device Anton Paar Japan, SurPASS.
  • the zeta potential calculated from the flow potential from the first permeable electrode side to the second permeable electrode side is ⁇ 36.01 mV
  • the zeta potential calculated from the flow potential from the second permeable electrode side to the first permeable electrode side was ⁇ 40.11 mV.
  • the zeta potential inside the pores was much lower than the zeta potential on the membrane surface.
  • bubbles were not substantially generated even when the AC voltage was continuously applied for 10 minutes.
  • Example 2 The electroosmotic flow was the same as in Example 1 except that the surface of the first water permeable electrode opposite to the dielectric porous membrane was treated with 1,1-mercaptodecanoic acid to form a hydrophilic layer. A pump was made.
  • Example 3 An electroosmotic pump was produced in the same manner as in Example 1 except that the surface of the first porous electrode on the dielectric porous membrane side was treated with 1,1-mercaptodecanoic acid to form a hydrophilic layer. did.
  • the liquid feeding ability can be improved by forming a hydrophilic layer on the surface of the first water permeable electrode opposite to the dielectric porous film.
  • Example 4 A liquid prepared by dissolving a pH indicator in deionized water was supplied to the apparatus prepared in Example 1, and an AC voltage of 9.34 Vrms at 25 Hz was applied between the first and second permeable electrodes for 15 minutes. Then, when the color tone of the 1st and 2nd storage part was observed, the color tone of the 1st and 2nd storage part was the same as that before voltage application, pH did not change, and the gas by electrolysis did not generate
  • Liquid feeding module 2 Electroosmotic flow pump 10: Fixing jig 11: Fixing jig 12: First reservoir 13: Second reservoir 14: Discharge port 20: Liquid feeding membrane 21: Dielectric porous Membrane 21A: first dielectric porous membrane 21B: second dielectric porous membrane 21a: hydrophilic layer 22: first water permeable electrode 22a: hydrophilic layer 23: second water permeable electrode 30: liquid reservoir 40: AC power supply

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Abstract

L'invention concerne une pompe à flux électroosmotique d'un nouveau type qui peut être entraînée par un courant alternatif. Une pompe à flux électroosmotique (2) comporte un film poreux diélectrique (21), une première électrode perméable à l'eau (22), et une seconde électrode perméable à l'eau (23). La première électrode perméable à l'eau (22) est disposée sur un côté du film poreux diélectrique (21). La seconde électrode perméable à l'eau (23) est disposée sur l'autre côté du film poreux diélectrique (21). L'hydrophilie d'une surface principale du film poreux diélectrique (21) sur le côté de la première électrode perméable à l'eau (22), et l'hydrophilie d'une surface principale du film poreux diélectrique sur le côté de la seconde électrode perméable à l'eau (23) sont différentes l'une de l'autre.
PCT/JP2013/078574 2013-10-22 2013-10-22 Pompe à flux électroosmotique WO2015059766A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014536812A JP6166268B2 (ja) 2013-10-22 2013-10-22 電気浸透流ポンプ
US14/390,543 US20160252082A1 (en) 2013-10-22 2013-10-22 Electroosmotic pump
PCT/JP2013/078574 WO2015059766A1 (fr) 2013-10-22 2013-10-22 Pompe à flux électroosmotique
US15/655,100 US20170335836A1 (en) 2013-10-22 2017-07-20 Electroosmotic pump

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Application Number Priority Date Filing Date Title
PCT/JP2013/078574 WO2015059766A1 (fr) 2013-10-22 2013-10-22 Pompe à flux électroosmotique

Related Child Applications (2)

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US14/390,543 A-371-Of-International US20160252082A1 (en) 2013-10-22 2013-10-22 Electroosmotic pump
US15/655,100 Division US20170335836A1 (en) 2013-10-22 2017-07-20 Electroosmotic pump

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WO2015059766A1 true WO2015059766A1 (fr) 2015-04-30

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JP2021519394A (ja) * 2018-03-21 2021-08-10 リンテック・オブ・アメリカ・インコーポレイテッド カーボンナノチューブ紡績糸電気浸透流ポンプ
WO2021199454A1 (fr) * 2020-04-01 2021-10-07 アットドウス株式会社 Unité d'administration de médicament liquide, module d'administration de médicament liquide, dispositif d'administration de médicament liquide et système de gestion d'administration de médicament

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US10695721B2 (en) * 2016-09-08 2020-06-30 Osmotex Ag Layered electroosmotic structure
GB201714645D0 (en) * 2017-09-12 2017-10-25 Osmotex Ag Method
JP6966007B2 (ja) 2018-10-03 2021-11-10 株式会社村田製作所 ポンプおよび冷却基板
KR20210116751A (ko) * 2020-03-13 2021-09-28 이오플로우(주) 전기 삼투 펌프, 이의 제조방법 및 이를 포함하는 유체 펌핑 시스템
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