TW200523706A - Micro flow rate generator, pump and pump system - Google Patents

Abstract

A micro flow rate generator comprising a porous thin film placed in a channel, a pair of electrodes arranged on the opposite sides of the porous thin film, a means for supplying solution to the channel, and a DC power supply for applying a DC voltage between the pair of electrodes, characterized in that the solution has been processed so as not to cause electrolysis and a flow of the solution passing through the porous thin film is generated by applying a DC voltage between the pair of electrodes.

Description

200523706 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to a method capable of controlling a small flow rate of a liquid, a pump using the method, and a pump system using the method, and particularly to a method suitable for It is used for the analysis of biological substances, pharmaceuticals, food, etc., and a small flow generating device, a pump, and a pump system.

[Prior art] Control of the flow rate of the liquid in the tube has been performed by using a mechanical valve to change the opening degree or adjust the pressure. For example, Patent Document 1 discloses a medicinal solution supply device including a medicinal solution supply pump, wherein the medicinal solution supply pump is a diaphragm pump that performs an operation of vibratingly delivering a medicinal solution from a medicinal solution storage tank. Further, Patent Document 2 discloses a washing water spraying device including a bubble mixing device for mixing bubbles into the washing water.

Means, a large amount of fine bubbles are dispersed in the bubble water jet of the washing water to be ejected. However, because these methods generate pulsating flow, they are not suitable for applications that require precise control of small flows. On the other hand, Patent Document 3 discloses a fluid supply device including a fluid storage section, a pressure transmission section, and a metal oxide to which an anion exchange resin and a conductive agent added as a medium for anion movement are used. Electrochemical cell department. Also, in order to obtain a pump with no pulsating flow or low pulsating flow and low flow, a method of generating a small flow based on the electric permeation flow of a slender capillary body or the use of electrical swimming (~ 4-200523706 (2) migration) was revealed. In Patent Document 4. For example, as shown in FIG. 1, an example is shown in which a sample solution is introduced into a quartz capillary tube from one end, a high voltage is applied to the capillary end, and electrophoresis is performed to move the electrophoretic separation component. In addition, the invention that does not apply a high voltage and allows a lower voltage of a battery or the like to control or generate a small flow of a solution through a porous film is the research result of the inventors according to the present invention, such as a non-patent File i is shown. According to the non-patent literature], it is described that a small flow rate can be appropriately controlled using an aqueous solution of sodium or potassium having a large degree of ionization. Patent Document 1: Japanese Patent Laid-Open No. 2 0 0 0-2 6 5 9 4 5 Patent Document 2: International Publication WO99 / 09265 Patent Document 3: Japanese Patent Laid-Open No. 9- 1 922 1 Patent Document 4: Japanese Patent Kaiping 9-2 8 1 0 7 7 Non-Patent Documents]: Sugiya, Hasegawa, Naruto: "Flow characteristics of fluid through porous flakes when voltage is applied"; The 39th General Assembly of the Hokuriku Shin-Etsu Branch, Japan Mechanical Engineering Association, Proceedings [No〇27_1;) P93 ~ 94 (March 8, 2002) [Summary of the Invention] As a controller that performs a small amount of flow, perform ... For example, a microchannel containing blood, DNA, or cells The solution flows, and the observation object is enlarged with a microscope. In this case, when there is a change in the pump flow rate -5-200523706 (3) Vibration or pulsation, the image of the enlarged object cannot be accurately observed. Therefore, a pump without pulsation and fluctuation is desired. In addition, it is also required to have a stable flow rate without clogging, and to have good handling properties or low cost. However, at this point in time, there is no pump that can adequately meet such requirements. In particular, in conventional pumps, it is not possible to simply change the flow direction. For example, the electric permeation flow using a capillary tube-like capillary tube as described in the aforementioned Patent Document 4 or a method using electrophoresis to generate a small flow is required On the other hand, for high voltages above 1 00 V, it is not easy to control a small flow because the flow obtained is small. On the one hand, the invention of the minute flow rate control using a porous film described in the aforementioned Patent Document 1 is an invention that has been researched in the development process. First, since an aqueous solution containing sodium or potassium is used as the working fluid, a voltage receiving side is also applied to generate hydrogen or air bubbles inside, thereby changing the flow characteristics. An object of the present invention is to solve the above-mentioned problems and provide a minute flow rate generating device, a pump, and a pumping system that have no pulse flow or low pulse flow without generating hydrogen or bubbles in the fluid. Another object of the present invention is to provide a minute flow rate generating device, a pump, and a pumping system that control a pulseless flow or a low pulse flow of the barley fluid at a low voltage, which is sufficient and k mile. In addition, another object of the present invention is to prevent clogging, to ensure that L 疋 & summer is good, and that the processability is low and the flow rate generation device is inexpensive. 6-200523706 (4) Installation and pumping and pumping system . [Means for solving the problem] The minute flow generating device of the present invention is characterized by including a porous film disposed in a flow path, a pair of electrodes provided on one of both sides of the porous film, and supplying a solution to The means for the flow path, and a DC power source for applying a DC voltage between the pair of electrodes. The solution is a solution that does not cause electrical decomposition, and the porous material is passed through applying a DC voltage between the pair of electrodes. The flow of the aforementioned solution of the film is generated. Another feature of the present invention is that an oxidizing agent is added to the solution as a solution processed so as not to cause the aforementioned electrolysis. Another feature of the present invention is that it is a solution that is processed so as not to cause the aforementioned electrical decomposition, and the solution is a liquid in which fine particles having a particle size of 0 (Πμηι ～ 〇5_ float in the medium. Another feature of the present invention is that the aforementioned is used The pump or pump system of the micro-flow generating device. In the micro-flow generating device, Kuriura or Kuriura system of the current sun and the moon, the women's porous membrane in the flow path is 'applying a DC voltage to a pair of electrodes' The electrode is configured such that the inflow side of the solution is an anode and the outflow side is a cathode by sandwiching a porous rhenium membrane. Among them, the electrode is based on the combination of the type of the solution, the electrode, and the membrane, or the degree of ionization of the solution. The conditions make the voltage-flow relationship different, so with this combination, you can control a small amount of W. By setting the above conditions, you can get -Ί-200523706 (5) ^ & A pump that applies a voltage proportional to the flow rate.

For example, since the degree of ionization of an aqueous sodium or potassium solution is large, if these are used as a solution, it is possible to ideally control a slight flow rate ', but as described above, bubbles may be generated. As a result of careful investigation, the inventor has found that even if it is an electrolyte of a sodium or potassium aqueous solution, it is a method of adding an oxidizing agent such as hydrogen peroxide to an aqueous solution, or a colloidal solution in which fine particles are dispersed as a solution. The present invention was developed by not generating hydrogen or bubbles in the liquid and ideally controlling the flow rate with a small voltage. [Inventive effect]

According to the present invention, the following effects can be achieved: the minute flow generating device is provided with a porous film and a pair of electrodes arranged in a flow path of a solution, and a lower voltage, such as 丨 0v, is applied between the electrodes. The left and right DC voltage can generate a small flow of the pulsation-free solution. This flow rate is formed approximately in proportion to the applied voltage, which makes it easy to control the flow rate, has good handling properties, and is inexpensive. In addition, there is no clogging, and a stable flow rate can be ensured, that is, no hydrogen gas or bubbles are generated inside the solution, and the flow rate characteristics will not change even if the process is repeated. [Embodiment] Hereinafter, an embodiment of the present invention will be described. First, the basic structure of the minute flow generating device of the present invention will be described. _] A shows the principle of the minute flow generating device of the present invention. Winter 200523706 (6) Intent. Fig. 1B is a perspective view showing a part of the minute flow generating device of the present invention. In the middle of the pipe (flow path) 1 through which the solution 20 flows, a porous film 2 is mounted via a support 3 in a direction perpendicular to the axis direction of the pipe. Further, a pair of electrodes 4 and 5 are provided on the upstream side and the downstream side of the porous thin film 2 therebetween. The circular opening of the support 3 is the circular area where the porous film 2 faces the flow, and the circular opening provided on the pair of electrodes 4 and 5 has substantially the same radius, and each center is located in the pipeline. On the axis. The solution 20 is processed so as not to cause electrical decomposition. Therefore, an oxidant is added to the solution. A lead electrode can also be used at the cathode, or a combination of this solution and a lead electrode can also be used. As another method, the solution 20 may be a liquid in which fine particles having a particle diameter of 0.0 1 μΐΒ to 0.5 μm are floated in the medium. In this case, the microparticle system needs to be charged in the liquid. For example, a colloidal solution in which fine particles are separated in a solution can be used. A pair of electrodes arranged with the porous film 2 are arranged such that the inflow side of the solution is the anode 4 and the outflow side is the cathode 5, and a predetermined DC voltage of 00 V or less is applied from the DC power source 6 through the switch 7. In the example shown in the figure, when the anode 4 is on the left and the cathode 5 is on the right, the solution 20 flows in the direction of the arrow. In addition, when a voltage of 10V to 20V is applied between a pair of electrodes, the current flowing between the electrodes is a small current of about 30 0 / Α ~ 1 〇μμ, which consumes very little power. This is One of the features of the present invention. In addition, as will be described in detail later, the voltage is applied according to various conditions such as the type of the constituent elements, the type of the electrode, and the type of the porous film, the material, or the ion-9 of the solution (7). The relationship to traffic will be different. In this way, a combination of these components enables a pump capable of controlling a desired flow rate. Fig. 2 is a longitudinal sectional view showing the structure of an embodiment of a minute flow control pump according to the present invention. A porous film 2 is held in a first pipe 丨 via a support 3. The first pipe 1 and the support body 3 are made of an electrically insulating material. An example of the porous film 2 is a nickel made with a thickness of 11 μm. In a circular region with a diameter of 8 mm, 5 5 6 00 holes having a pore size of approximately 5 μm are regularly provided. An anode 4 and a cathode 5 are provided on both sides of the porous film 2. As shown in FIG. 1B, the support body 3 and the pair of electrodes holding the porous film 2 are in a flat plate shape, and the sealing material is fixed to the first pipe 1 therebetween. As described later, the range of the porous pore diameter is preferably 1 μm to 10 μm. The distance between each electrode and the porous film 2 is preferably in the range of about 1 m to 1 cm. These pair of electrodes are connected to a DC power source 6 via a change-over switch 7. The DC power supply 6 is a power supply for supplying DC power of about 1000 V or less to a pair of electrodes, and a battery can be used. Alternatively, the DC power source 6 may be a power source device that obtains a DC power source from an AC power source through a converter. Moreover, a person who has prepared a voltage adjusting means such as a variable resistor. The change-over switch 7 has a switching function for changing the polarity of the voltage to a pair of electrodes or turning it OFF. The inflow-side pipe 27 of the first pipe 1 is connected to a solution tank (not shown). The height of the solution tank and the first pipeline 1 is basically the same, that is, the drop is zero. As described in the following examples, by changing the difference in accordance with the use, it is possible to obtain a desired flow rate characteristic according to the period of use -10- 200523706 (8). The circular openings provided in the pair of electrodes 4 and 5 do not necessarily have to be the same size as the circular openings of the support 3. For example, it is also possible to provide a structure in which the openings provided in the pair of electrodes 4 and 5 have a larger radius than the openings of the support 3 and are structured as openings having a plurality of fine openings. The second pipe 10 of the side pipe 26 is divided into an inflow-side pipe portion 8 and an outflow-side pipe portion 9 and is connected by a thin pipe 22. The lower portion of the inflow-side pipe portion 8 is filled with a solution (driving liquid) 2 0. On the one hand, here the thin tube 22 and the upper part of the inflow-side pipe part 8 and the upper part of the outflow-side pipe part 9 are filled with the intermediate medium 2; [. Further, the outflow-side pipe portion 9 serving as the outflow side of the pump is filled with a discharge liquid 2 3 such as water or blood, and is connected to the outflow-side tube 28. FIG. 3 shows an example of a combination of a solution and a porous film. In the example of FIG. 3, as the solution (driving solution) 20, the medium used is water, and the electrolyte solution is sodium chloride or potassium chloride. The porous thin film 2 is a combination of nickel, the electrode system anode 4 is silver, and the cathode 5 is zinc. In addition, if a combination of silver and silver chloride (AgCl) is used, a reversible electrode capable of switching anodes and cathodes can be formed. To the solution, hydrogen peroxide or potassium dichromate was added as an oxidant. The combination shown in FIG. 3 is only an example, and it is a matter of course that other elements having the same characteristics may be combined. For example, a combination of a zinc plate (cathode) and a silver plate (anode) may be used for the electrode. Fig. 4 shows another example of a combination of a solution, a porous film, and the like. In the example of FIG. 4, as the solution (driving liquid) 20, a colloidal solution in which fine particles are dispersed is used. That is, the colloidal solution as a solution is made of water or ion-exchanged water from which ions have been removed by an ion exchanger as a medium, and fine particles such as polyethylene particles or silicon particles are mixed therein. The colloidal solution may be a mixture of fine particles in oil. The porous film 2 is made of nickel or non-metallic polycarbonate. As the material of the porous film, a non-metallic acrylic resin can also be applied. The anode and cathode of the electrodes are stainless steel plates. As a specific configuration example of the porous film 2 made of polycarbonate, for example, a thickness of 11 μπα is provided, and 3 2 0 0 0 holes having a diameter of about 5 μm are provided in a circle with a diameter of 10 mm. The colloidal solution may be a suspension of fine particles in water, or a suspension of fine particles in oil or an organic solvent. The user that can be applied as a solution (driving fluid) 20 is not limited to a colloidal solution. For example, a suspension in which ion-exchanged water is used as a medium in which fine particles are dispersed. In this way, the solution (driving solution) 20 that can be used for the pump of the present invention can be a liquid in which fine particles having a particle size of 0.01 μm to 0.5 μm float in the medium. In this case, if the fine particles are charged in a liquid, they can be used regardless of metal or non-metal. For example, a powder of alumina may be used as the fine particles. Next, the operation of the embodiment of FIG. 2 will be described. In the solution tank, the inflow side pipe of the first pipe 1 and the first pipe is filled with an electrolyte aqueous solution (see FIG. 3) or a colloidal solution in which fine particles (see FIG. 4) are dispersed as the driving liquid. Department 8 inside. Then, in the lower part of the outflow-side pipe portion 9 which becomes the pump -12-200523706 (10) outflow side, the discharge liquid 23 such as sewage or blood is filled. By applying a DC voltage to the anode 4 and the cathode 5, an aqueous sodium solution flows to the inflow side of the second pipe, which presses the intermediate medium (silicone oil, transformer oil) 21, and directs the ejection liquid (water, sewage, etc.) 23 toward the outflow side. Tube 2 8 is pressed out. When the application of voltage to the anode 4 and the cathode 5 is stopped, the flow of the solution is also stopped. By doing so, a small flow of the solution can be generated. In addition, the solution, which is an aqueous electrolyte solution (such as an aqueous solution of sodium), is subjected to a voltage under pressure, and hydrogen or air bubbles are generated, thereby affecting the flow. However, if an oxidizing agent such as hydrogen peroxide or potassium dichromate is added, generation of hydrogen or bubbles can be prevented. When such a countermeasure is implemented, when a solution with a strong electrolyte is used, a lower voltage can be applied to generate a flow rate. In addition, by using a colloidal solution in which ions are removed by an ion exchanger, hydrogen is not generated. Fig. 5 is a graph showing one of the results of the flow characteristics of the pump obtained by performing an experiment based on the combination of the requirements shown in Fig. 3 using the minute flow control pump shown in Fig. 2. The test solution was 0.9% saline, the applied voltage was 5 V, and the porous film 2 used was a nickel foil with a pore diameter of 5.0 μm. The electrode systems are zinc plate (cathode) and silver plate (anode). The locality (water column) of the solution tank is 0 mm. Here, as the electrode, a zinc plate is used for the cathode and a silver plate is used for the anode. It can be seen from this figure that a flow occurs immediately after the voltage is applied. When the experiment started, a voltage of 5 V was applied at a time point of 300 seconds after the voltage was -13- 200523706 (11) zero. After the voltage was applied, the flow rate increased, and a flow rate of approximately 2.0 (Illm3 / S) was formed after a lapse of 350 seconds. After that, a substantially constant flow rate was continuously obtained. The fluid transfer device of the present invention is different from a pump using a diaphragm or a piston. In the data in Figure 5, the pulsation of Ruowu can be seen in the flow, but compared with the results of other tests performed later, it can be known that the pulsation in the data is mainly used in the electronic balance that measures the flow. Caused by instability and programming problems. This is because the interphase variation can be seen even in the state before the voltage is applied (the flow rate is zero). Therefore, it can be seen that the pulsation caused by the pump is smaller than the data shown in Figure $. In addition, the time between obtaining a constant constant flow rate has passed 50 seconds on the data, but there is a delay caused by the question on the measurement program. Actually, the voltage is A certain amount of flow can be obtained in about 10 seconds. The inventors repeated experiments several times to confirm that no hydrogen or bubbles were generated. When zinc is used in the cathode, hydrogen generation can be prevented. When a silver plate is used as the anode, corrosion of the film due to chlorine can be prevented. And, when the reversible electrode of Ag C1 is used in the cathode, it is more effective. When hydrogen peroxide water and potassium dichromate are added as oxidants, the effect can be further enhanced. For comparison, FIG. 6 is a graph showing the flow characteristics of the pump when the voltage is increased to 8V. At a voltage of 5 V, the flow is approximately 2.0 (mm3 / s), and at a voltage of 8 V, the flow is approximately 4.0 (mm3 / s) ~ 14- 200523706 (12), that is, when the voltage is increased, the flow becomes larger . Fig. 7 is a result of a case where a colloidal solution in which monodisperse polyethylene particles are placed in ion-exchanged water is used as an aqueous solution based on the combination of the requirements shown in Fig. 4. The test solution was a 0.01% monodisperse polyethylene colloid solution, the applied voltage was 5 V, and the porous film 2 used was a nickel foil with a pore diameter of about 5 μm. The electrode system cathode and anode are stainless steel plates. In the colloidal solution that has undergone ion exchange, since no hydrogen or chlorine is generated, stainless steel plates can be used as electrodes. When the experiment started, the voltage was applied at a time point of 300 seconds after the voltage was zero. It can be seen from the figure that immediately after the voltage is applied, a flow occurs, and a substantially constant flow rate of about 1.0 (mm3 / s) is obtained. The flow rate can be adjusted by changing the concentration or voltage. The advantage of using a colloidal solution is that it does not decompose electrically, so the same solution can be used numerous times without generating bubbles or hydrogen. This has been confirmed in repeated tests. Fig. 8 is a result of a case where a polycarbonate film is used for the porous film based on the combination of the requirements shown in Fig. 4. The test liquid was a monodisperse polyethylene colloid solution of 0.0 1%, the applied voltage was 5 V, and the porous film 2 was a polycarbonate film with a pore diameter of about 5 μm. The electrode system cathode and anode are stainless steel plates. When the experiment started, the voltage was applied at a time point of 300 seconds after the voltage was zero. It can be seen from this figure that immediately after the voltage is applied, a flow occurs, and a substantially constant flow rate of approximately (mm3 / s) is obtained. Repeated experiments confirmed the reproducibility of this experiment. Polycarbonate has the advantages of less corrosion of the film and long-term use-15- 200523706 (13) and low cost. Here, the minute flow control pump according to the present invention will be described. First, the relationship between the applied voltage and the pump flow rate will be described. When the voltage applied to the pump is set to V and the current is set to I, the pump input is V X I. When the pump discharge pressure is set to P and the flow rate is set to Q, the pump output is set to P X Q. According to this, the power is set to P_, as follows.

η = P Q / (VI) ... (1)

FIG. 9 shows the pump output P q $ obtained by using the pump of the present invention as the pressure P. It can be seen from this figure that even if the pressure is changed, the pump output is approximately constant. At this time, the voltage of the load is 5 V. According to the experiment, even if the pressure P is changed, the current I is 3 X 1 (Γ5 amperes, which is approximately constant. That is, it can be seen that when the pump input VI = 1 · 5 X 1 0 · At 4 watts, the pump output PQ is about 18 watts. Therefore, although P changes, Q also changes accordingly. But if a certain input is entered, there will be PQ = π VI =-fixed relationship. Power π system 7? = 0.6 7 X 1 0 · 5 is formed by the formula (1). On the one hand, when a hole with a radius R of a film having a thickness L and a thin tube with a length L and a radius R are approximated, the fluid of the flow rate Q passes through the hole The pressure loss P at this time is obtained by the following formula (flow is laminar): P (2)

8/7 L -16-200523706 (14) Here, // is fluid viscosity. Fig. 10 shows the comparison between formula (2) and experiment 値. The linear system of Poiseuille flow shown in the figure shows the formula (2), and the black dots show the experiment 値. It can be seen from the figure that the two are consistent, and the hole and the thin tube opening in the membrane can be aligned. When formula (2) 'is used to set the fixed number determined by the device to C, the formula is as follows. (3)

The relationship between Q-CP 7? And C varies depending on the actual combination of the pump and the fluid sheet. However, if it is determined experimentally at the time of delivery, the expected flow rate Q is determined by equation (1). (3) The obtained formula (4) 'is obtained by applying electric power VI (actually, because the current I is constant, it is essentially a voltage V). (4) When 々 and C are set to predetermined 値 at the time of delivery, and R is also a certain case, the relationship of V = RI is obtained. When rewriting equation (4), the following equation is obtained (where k is a fixed number) ) -17-200523706 (15) It can be known from the formula (5) that if 7 or C is set in advance, the flow rate Q is proportional to the applied voltage V. Fig. 11 shows an example of a result of measuring the pump discharge amount with respect to an applied voltage using the pump of the present invention. It can also be seen from this figure that the flow rate Q of the pump of the present invention is proportional to the applied voltage V except for the area where the flow rate Q is small. Generally speaking, it is not easy to directly measure the flow rate Q while using a small flow pump. Therefore, in order to ensure the correct set flow rate by pumping with a small flow rate, it is expected that the characteristic line diagram of the relationship between the applied voltage V and the flow rate Q shown in FIG. To get a predetermined flow. Next, the point of obtaining the flow rate Q proportional to the applied voltage v with the pump of the present invention will be described. In the pump of the present invention, the negative, that is, the drop, of the solution tank can be made zero. The phenomenon that the drop is set to zero and flow from + pole to-pole is caused mainly by electric percolation flow or electric swimming. Therefore, when investigating the effect of voltage only when the drop is set to zero, it can be seen that a flow rate is generated when a porous film is installed. This is because the flow rate does not occur when the membrane is not installed, and it is a phenomenon unique to the flow in a small area. Here, the principle of generating a flow rate by applying a voltage to the electrodes provided before and after the pores of the porous film will be examined. Electrical permeation flow refers to the formation of galvanic layer in the circulation of microtubes, etc.-18- 200523706 (16) (e 1 ectricdoub 1 e] ayer), which is caused by the coulomb force to move toward the negative electrode in one direction The phenomenon of flow. Fig. 12 is a schematic diagram of the electric percolation flow in the case of using the electrolyte solution (sodium chloride, potassium chloride) in the pump of the present invention. As shown in Fig. 12, the wall surface of the flow path of the microtube is negatively charged, whereby positive ions gather near the wall surface to form a galvanic layer. The galvanic layer is moved toward the negative electrode by Coulomb force. The surrounding positive ions are sequentially moved toward the wall surface ', often forming a galvanic layer. In addition, around the galvanic layer, positive ions of the galvanic layer are pulled, and negative ions also move. At this time, since a force such as an electrostatic force is also actuated, a flow occurs in the entire negative electrode. This is due to the pumping effect in the case of using the electrolytic aqueous solution shown in Fig. 3, particularly the effect of ejecting and inhaling a certain flow rate according to the present invention. Next, the reason why the pump of the present invention produces a pumping effect with a colloidal solution as shown in Fig. 4 is as follows. Generally speaking, an object immersed in a liquid is almost negatively charged, and positive ions in the solution are pulled (adsorbed) by it. Colloidal particles are also negatively charged, but the anion particles attracted to the liquid are attracted around the particles, and the particles are similar to particles with positive ions. Therefore, for simplicity, colloidal particles adsorbed with positive ions are depicted as shown in Figure 13. The situation of the colloidal solution is also substantially the same as that of FIG. 12. However, in the case of a colloidal solution, positive ions closely adhere to the surrounding negative ions, and all of them appear to form positive particles. The positive particles have a phenomenon that is particularly small in areas such as electrical permeation flow, electrophoresis, and adsorption, and flow. That is, in the gel-19-200523706 (17) body solution, there will be no negative ions, and flow will occur in the state shown in Figure 14. Second, Figure 15 shows the pump of the present invention, using 0.1 μηι : Diameter of colloidal particles. Flow rate characteristics in the case where the diameter (pore) of the fine pores of the porous film 2 is changed, and other conditions are the same. The applied voltage is 5 V. The diameters of the experimental micropores were 4 types of 2 μm, 5 μm, 12 μm, and 40 μm. It is determined that the pumping effect is about the same when the diameter is 2μm and 5μm. However, at a diameter of 12 μηι, the flow rate is slightly reduced, while a diameter of 40 μηι does not produce a pumping effect. In connection with this, when the pore diameter becomes extremely large, no film (hole) is formed. In this case, the inventors have experimentally determined that no pumping effect will occur. On the contrary, the pore diameter becomes extremely small and no pumping effect is produced. It can be seen that the diameter of the fine pores needs to have a moderate size for the (grain) diameter of the colloidal particles, but it is not good to be too large or too small. The inventors confirmed the following points based on experiments. As an example, as shown in Fig. 16, when the diameter of the colloidal particles R = 0 · 0 9 μ m, the locality of the porous film 2] =] 3 m ni, and the number of pores = 5 5 6 0 0, it is expected The film thickness was D = 10 μm, and the diameter of the fine pores of the porous film 2 was E = 5 μm. As a result of repeated experiments, it can be seen that the film thickness D system has an inversely proportional relationship with the flow rate, and the range of (1 0 to 2 0 0) R is effective, and the film thickness D system D = (1/5 to 2) The range of E is valid. Practically, it is desirable that the thickness of the porous film is 5 μm to 200 μm. The gap between the pair of electrodes and the porous film 2 also greatly affects the characteristics. When the gap is too narrow, the electrical impedance between a pair of electrodes becomes small, and-20-200523706 (18) causes excessive current to flow. Conversely, when the gap is too large, a sufficient electric field cannot be generated for the solution before and after the porous thin film 2, and the target flow rate cannot be secured. Therefore, the gap between the pair of electrodes and the porous film 2 is desirably in a range of 1 mm to 1 cm. In addition, the range of these film thicknesses D, the diameter of the pores, and the distance between the electrodes is similar to that obtained when a small amount of powder is mixed with a suspension solution or an electrolyte aqueous solution. Figs. 17A to 7C show how colloidal particles pass through the fine pores (hereinafter simply referred to as pores) opened in the porous film 2. Figs. The horizontal straight line in each figure shows the cross section of the pores opened in the porous film. The negative line is negatively charged at the interface with the liquid. At this interface, colloidal ions that adsorb positive ions as shown in Figure 13 are adsorbed. In this state, the negative and positive electrodes are placed on the left and right of the film. As shown in Figure 7a, in the relative relationship with colloidal particles, when the pore size is too small, the colloidal particles are intended to face the negative electrode, but cannot pass through the pores without generating the Kuriura effect. It is shown that when the pore size is appropriate, the colloidal particles pass through the pores and move toward the negative electrode side with the surrounding liquid. At this temple, the colloidal particles that have been adsorbed at the interface between the membrane, the pores and the liquid play a role in blocking the countercurrent of the colloidal particles that have passed through the pores (blocking effect). As shown in Figure 17C, when the pore size is too large, the colloidal particles near the center of the pores move toward the negative electrode. However, because the pores are large, the blocking effect of the colloidal particles located at the boundary interface becomes invalid. A countercurrent of colloidal particles is generated near the center of the hole and the boundary interface. As a result, -21-200523706 (19) does not produce a pumping effect. According to the reasons for the above pumping effect, if a colloidal particle having a large diameter is used, the pumping effect will be produced until the film having a large pore size, and the flow rate generated at this time is also large. In addition, by selecting a combination of particles and membranes with a high degree of adsorption, the pumping effect can be improved. Next, the colloidal solution in which the particles were placed was changed in various conditions to confirm its versatility. The results are shown below. Fig. 8 shows the flow characteristics when the colloidal solution using polyethylene particles is used as the driving fluid when the combination of electrodes is changed. Experiments were performed on stainless steel (anode) -stainless steel (cathode), silver (anode) -stainless steel (cathode), and silver (anode) -zinc (cathode). The flow characteristics were almost the same. Fig. 19 is the result of using a colloidal solution using polyethylene particles as the driving fluid and changing the filling rate of polyethylene particles in the range of 0.1% to 0.011%. At 0 · 0 0 0 1%, some flows are reduced, but above the charge rate, approximately the same flow can be obtained. Fig. 20 shows the results of the case where the particles were changed into silicon particles and the same experiment as in Fig. 19 was performed. Similar to FIG. 19, at 0.01%, some flow rates are reduced, but above the charge rate, approximately the same flow rate can be obtained. FIG. 2 is a structural diagram of another embodiment of a pumped second pipe 10, where an intermediate medium 2 1 is placed in the middle of a tube (such as a glass tube), and the ejection liquid 2 3 (in FIG. 2 3 ) Press from left to right to make them move. Here, a thin tube 2 6 need not be considered based on the impact of the drop. In this way, if the flow caused by the application of voltage is used as a power source, each of the -22-200523706 (20) types of pumps can be achieved. Figures 2 and 2 are structural diagrams of other embodiments of the pump of the present invention. In this example, in the minute flow generating device shown in Fig. 2, the anode and cathode to which a DC voltage is applied are switched to make the fluid reciprocate. In this case, 'the colloidal solution is used as the solution used in the driving part, and the fluid can be reciprocated. In Fig. 22, a colloidal flow is generated from the direction of the arrow, that is, the anode toward the cathode side, the intermediate medium 21 is pushed to the right, and the ejection liquid 23 is ejected from the tube 28. At this time, the ejection liquid 23 is prevented from flowing toward the supply tank 33 by the valve 34. On the other hand, in FIG. 23, a flow is generated in a direction completely opposite to that of FIG. 23, the intermediate medium 21 is pulled, and the ejection liquid 2 3 from the supply tank 3 3 is supplied into the connection pipe 3 丨. At this time, the ejection liquid 23 on the ejection side is prevented from being sucked in by the tube 28 by the valve 35. Thereby, it is possible to inhale and discharge, and it can be used continuously for a long time. Next, an application example of the small flow pump according to the present invention shown in Figs. 1A, 1B, or 2 will be described. First, Fig. 24 is a plan view of an embodiment of a pump system to which the present invention is applied, and Fig. 25 is a cross-sectional view taken along the line A-A thereof. The pump system 2000 is equipped with a pump 100 on the platform 201. The pump 100 has a flat structure. This is because when the flat pedestal 201 is mounted on a flat surface of a table, the pump is easy to assemble if the flat structure is used. Pump! 〇 〇 is composed of an upper frame i 〇 丨 and a lower frame 1 〇 2, and a housing 10 03 is mounted on the upper portion of the upper frame 101. Inside the casing] 03, there is a small flow generating device shown in Figure 1A,] B or Figure 2] 0 6 ° Here I know: the important point is the small flow generating device-23- 200523706 (21) The plane of the porous film 2 in the same direction as the plane of the upper frame 1 ο 1 is arranged in the same direction. This makes it easy to manufacture the device, and it is possible to reduce the occurrence of a bent portion in the flow path of the solution. In addition, on the inner surface of the upper frame 101, a passage 1 10 is provided so as to be connected to the communication port I 09 and the communication passage 1 1 1. When a DC voltage is applied to a pair of electrodes of the minute flow generation device 106, the solution passes through the input tube 104 and the enlarged path 107, and passes through the minute flow generation device 106 to the enlarged path 108 and the contact port. 1 0 9, passage 1 10, and contact passage Π 1 are discharged to the destination by the outlet pipe 105. The passage 1 10 is provided on the upper frame 101, but it may also be provided on the lower frame 102. The structure in which the upper frame 101 and the lower frame 102 are cut away is to facilitate the processing of the passage 110. Of course, the upper frame 101 and the lower frame 102 may be integrated. The pump 100 configured in this way is mounted on a flat-shaped pedestal 20], and a battery 1 1 is arranged on the pedestal 201, a voltage regulator (variable impedance)] 6, and an on / off switch 1 1 5 and battery storage section cover I 1 8. The voltage regulator 1 1 6 is connected to a controller (not shown). In the controller, as described above, according to the preset condition data and the relationship shown in equations (4) and (5), calculate the applied voltage to the required flow rate to form this voltage and adjust the voltage regulator. Instead, control is performed at a predetermined flow rate. Furthermore, the user can directly operate the voltage regulator 1 16 by referring to the characteristics of FIG. 11. This small flow generating device 106 is characterized by being capable of delivering a solution by a low-voltage power source such as a battery, so it can be driven by a dry battery ′ without the need for a large power supply. Therefore, the battery]] 7, -24- 200523706 (22) Impedance Π 6, switches 1 1 5 are all built into the pedestal 20], and can be easily transported. The voltage generated by the battery 1 1 7 can be applied to the electrodes (anode, cathode) of the small flow generating device using wires Π 2, 1 1 3, 1 1 4 and this voltage can be interposed on the wire 1 The impedance Π 6 of 1 4 can be adjusted, and it can be cut off by the power supply through the switch 1 1 5. Fig. 26 is a structural diagram of another embodiment of the pump system of the present invention. In this example, a method is shown in which the contact of the solution 20 as the driving liquid and the ejection liquid 23 is combined. A groove 202 is provided at an outlet portion of the outlet pipe 105 of the pump 100, and a partition wall 220 is provided inside the groove. With the partition wall 220 as the realm, the outlet end of the outlet pipe 105 is connected to the left space, and the right space of the partition wall 2 20 is connected to the telescopic via pipe 2 1 3, the valve 2 1 1, and the pipe 2 1 2 Tube 2 1 4 of the slot 2 0 3. The ejection liquid 2 3 enters this tank 230, and the telescopic tube 2 1 4 is pressed. The ejection liquid 2 3 is supplied to the tank 202 through the tube 2] 3, the valve 211, and the tube 2] 2 and then is passed through the tube 202. The valve 211 is closed to stop the supply operation. A pipe 207 is connected to the left side of the tank 202, and the ejection liquid 2 3 in the tank 202 is discharged through a valve 208 and a pipe 2 06 into a tank 205 provided separately. When a voltage is applied to a pair of electrodes of the minute flow generating device 106 provided in the casing 103 of the pump 100, the driving fluid 20 in the tank 204 is sucked through the tube 2 17 and passed The passage in the frame 101 is further passed through the pipe 105 and enters the left chamber in the groove 202. This solution (driving fluid) enters the small chamber on the right through the small hole in the partition wall 220, and pushes the ejection liquid 23 on the upper part. Thereby, the ejection liquid 2 3 is ejected into the tank 205 through the tube 206. When the specific gravity of the ejection liquid is smaller than the specific gravity of the solution -25- 200523706 (23), as shown in the figure, these may be brought into contact with the chamber on the right side of the tank 202. When the specific gravity of the solution 20 is smaller than that of the ejection liquid 23, contact these in the chamber on the left side of the tank 202, and when the solution 20 and the ejection solution 23 are mixed with each other, the medium (for example, Silicon oil) 2 1 can be installed at these interfaces. FIG. 7 is a structural diagram of another embodiment of the pump 100 of the present invention, which is in the path 1 1 0 of the embodiment of FIG. 25 and is placed in the intermediate medium 21, which is a realm. The driving liquid 20 is placed on the side, and the ejection liquid 23 is placed on the opposite side. As a method of inserting this ejection liquid, a thick Π9 with a valve 2 0 is provided on the upper part of the upper frame 1 0 1. After the ejection liquid 23 is introduced into the tube 119, the valve 12 is closed in real time. FIG. 28 is a structural diagram of another embodiment of the pump of the present invention. This is a groove 204 provided above the tube 104 connected to the housing 103. This groove 204 is filled with a driving fluid. At 20, the driving fluid is introduced into the passageway via the 104, minute flow generation device 丨 〇6 by gravity. Then, the ejection liquid 23 is discharged from the intermediate medium 21 through the outlet pipe 105 to the destination. This flow rate is changed according to the locality of the slot 20 04 provided above the minute flow generation device. However, as a method of adjusting the flow rate at this time, the application of electricity to the electrodes of the minute flow generation device 1 is adjusted. the way. When the flow rate is further increased, apply a positive direction of electricity and increase the amount. On the one hand, when the flow rate is to be reduced, a reverse pressure is applied so that it acts in the direction of stopping the flow rate. If the pressure is increased, the flow can be stopped safely. Among them, 23 is the pressure of the pipe in the management field. -26-(24) (24) 200523706 Fig. 29 is a structural diagram of another embodiment of the pump of the present invention. This is to install a blocking part 1 0 1 -a in the middle of the passage 1 1 0. Taking this as the realm, the tubes 1 2 2 and 1 2 3 are placed in the lower frame 10 02, and a long tube 1 2 1 is placed between these. To form a closed ring structure. A part of the long tube 1 2 1 which is the closed ring is connected to the tube 1 2 4 in a branch manner, and the ejection liquid 2 3 is filled into the inside via a valve 1 2 5. An intermediate medium 2 1 is inserted in advance on the way of the tube 1 22. In this way, even if a long period of time elapses, there is no fear that the flow will stop and a desired flow rate can be obtained. In this embodiment, the same effect can be obtained even if the groove 202 with the partition wall 220 shown in Fig. 26 is provided instead of the long pipe 121. FIG. 30 is a structural diagram of another embodiment of the pump 100 of the present invention. As in FIG. 29, a blocking portion 101a is provided in the middle of the passage 110, and as a realm, the tubes 122 and 123 are installed in the lower frame 102 and connected in a U shape, and the intermediate medium 2 is filled in the inside] . A valve 1 2 6 is installed in a part of the tube 22, and a solution (driving liquid) 2 0 is inserted through the valve. A valve 1 2 7 is installed in a part of the tube 1 2 3, and the ejection liquid 2 is inserted through the valve. 3. In this figure, its structure is a valve] 2 2, 1 2 3 The upper ends are connected to the upper part of the upper frame 101, and the upper ends of these are connected to the float 1 2 6, 2 7 but can also be connected at the A branch pipe is provided at a part of the U-shaped valves [22,] 23 in the lower frame 102, and the valves 126, 127 are connected. As described above, the pump or pump system of the present invention is suitable for analysis of biological substances, pharmaceuticals, foods, and the like. Fig. 31 shows an example in which the pump system of the present invention is installed in an analysis system such as blood. The analysis system shown in FIG. 3 is in addition to the chestnut system of the present invention -27-200523706 (25). The analysis system includes a computer-equipped analysis device 300, a display device 300, and a microscope 300. The microchannel provided on the ejection side of the minute flow pump 100 and the visualization function section 3 10 are combined, and a solution containing blood, DNA, or cells to be analyzed is flowed into the microchannel. Such operations make the object visible. The observation was then enlarged by a microscope 3 0 4. In this case, 'when the pump flow rate fluctuates or pulsates', the image of the enlarged object is vibrated, and accurate observation cannot be performed. When the pump of the present invention is used, since the pump flow rate does not fluctuate or pulsate, the image of the enlarged object does not vibrate, and observation with high accuracy can be performed. Furthermore, in the conventional pump, it is not possible to simply change the flow direction. However, in the pump of the present invention, it is possible to simply reverse the flow by changing the polarity of the electrode. The present invention has the following features, in addition to the fact that there is no fluctuation or pulsation, or that the flow can be simply reversed, as described above. (1) Flow rate control can be performed easily and freely by changing the voltage. (2) Since it can operate at low voltage, it has high safety. (3) Cheap. (4) Small. (5) There will be no blockage, which can ensure stable flow. With this, the pump system of the present invention can be further extended to the scope of experiments and researches on biological relationships. It can be installed and used in various medical equipment. -28-200523706 (26) [Brief description of the drawings] ‘FIG. 1A is a schematic view showing the principle of the minute flow generating device of the present invention; FIG. 1B is a perspective view showing a part of the minute flow generating device of the present invention. Fig. 2 is a configuration diagram of an embodiment of the minute flow generating device of the present invention. Fig. 3 is a diagram showing an example of a combination of a solution, a porous film, and the like used in an embodiment of the present invention. ^ FIG. 4 is a diagram showing an example of another combination of a solution, a porous film, and the like used in an embodiment of the present invention. FIG. 5 is a diagram showing an example of a flow rate characteristic of the present invention. FIG. 6 is a diagram showing another example of the flow rate characteristics of the present invention. FIG. 7 is a diagram showing another example of the flow rate characteristics of the present invention. FIG. 8 is a diagram showing another example of the flow rate characteristics of the present invention. Fig. 9 is a graph showing a pump output p q obtained by using the pump of the present invention as a pressure P; FIG. 10 is a graph showing a comparison between the formula (2) and the experiment 値. Fig. 11 is a diagram showing an example of the results of measuring the ejection stars for a voltage applied using the pump of the present invention. Fig. 12 is a schematic diagram of an electroosmotic flow in the case where an electrolyte aqueous solution (sodium chloride, potassium chloride) is used in the pump of the present invention. Figure] .3 shows the colloidal particles with positive ions absorbed. Fig. 4 is a diagram showing a flow state in the case where a colloidal solution is used in the pump of the present invention. -29- 200523706 (27) Fig. 5 shows the flow characteristics of the pump of the present invention using colloidal particles with a diameter of 0.1 μm to change the pore diameter of the fine pores of the porous film. Other conditions are the same. Illustration. FIG. 16 is a diagram illustrating the relationship between the diameter R of the colloidal particles, the pore diameter E and the film thickness D of the micropores. Fig. 17 is an explanatory diagram of a state in which A-type colloidal particles pass through fine pores opened in a porous film; Fig. 1 7 is an explanatory diagram of a state in which colloidal particles pass through fine pores opened in a porous film; An explanatory view of a state in which colloidal particles pass through fine pores opened in a porous film. Fig. 18 is a diagram showing another example of the flow rate characteristic of the pump of the present invention. Fig. 19 is a diagram showing another example of the flow rate characteristic of the pump of the present invention. Fig. 20 is a diagram showing the flow rate of the pump of the present invention. Figures of other examples of characteristics. Figure 21 is a view showing a modified example of the pump of the present invention. Fig. 22 is a structural diagram showing another embodiment of the pump of the present invention. FIG. 23 is a diagram showing the operation of one of the pumps shown in FIG. 22. Fig. 24 is a plan view showing an embodiment of the pumping system of the present invention. Fig. 25 is a cross-sectional view taken along the line A-A of Fig. 24. Fig. 26 shows the structure of another embodiment of the pumping system of the present invention. Fig. 27 shows the structure of another embodiment of the pumping section in the pumping system of the present invention. Fig. 28 is a block diagram showing another embodiment of a pumping section in the pumping system of the present invention. Fig. 29 is a block diagram showing another embodiment of a pump section in the pump system of the present invention. Fig. 30 is a block diagram showing another embodiment of the pumping section in the pumping system of the present invention. FIG. 3 is a diagram showing an application example of the pump system of the present invention. [Description of symbols of main components] 1 ... first pipeline 2 ... porous film 3 ... support 4 ... electrode (anode) 5 ... electrode (cathode) 6 ... DC power supply 7 ... switch 8 ... second Inflow pipe section 9 of the pipeline ... Outflow pipe section of the second pipeline] 〇 ... Second pipeline 20 ... Solution (driving liquid) 21 ... Intermediate medium 22 ... Slim tube 2 3 ... Ejection liquid 200523706 (29) 26 ·· · Outflow side pipe of the first pipeline 2 7… Inflow side pipe of the first pipeline] 00 ... Pump 1 0] ... Upper frame 1 0 1-a ... Clogging portion 1 0 2 ... Lower frame 103 ... Enclosure 1 0 4… input tube 1 05… outlet tube 1 06 ··· small flow generating device 1 07… enlarged path 1 08… enlarged path 1 09… contact port] 1 2… conductor 1 1 5… switch 1 1 6 ··· impedance 1 1 7… Battery 2 0 0 ··· Pump system

Claims (1)

200523706 (1) 10. Scope of patent application1. A small flow generating device, which is characterized by: having a porous film disposed on a flow path; one pair of electrodes provided on both sides of the porous film; and supplying a solution Means for reaching the aforementioned flow path; and a DC power source for applying a DC voltage between the pair of electrodes, the solution is a solution which is not to be electrically decomposed, and a DC voltage is applied between the pair of electrodes to pass through the porous material. The flow of the aforementioned solution of the film is generated. 2. The micro flow generating device according to item 1 of the patent application scope, wherein an oxidant is added to the aforementioned solution. 3. The micro flow generating device according to item 2 of the patent application, wherein the aforementioned electrode is a reversible electrode. 4. The micro-flow generating device according to item 1 of the scope of patent application, wherein the aforementioned solution is a liquid that causes particles with a particle size of 0. (Π ~ 0.5 μηι to float in the media. 5. Such as the tiny amount of item 4 of the scope of patent application A flow generating device, wherein the aforementioned solution is a colloidal solution that separates fine particles from a liquid. 6 · A small flow generating device, comprising: a porous film disposed in a flow path; and a porous film provided in the porous film A pair of electrodes on both sides of the electrode; a means for supplying the solution to the flow path; and a DC power source for applying a DC voltage between the pair of electrodes, the thickness of the porous film is 5 μm to 200 μm,- 33- 200523706 (2) The gap between the porous film and each electrode is 1 mm to 0 mm. 7. The device for generating a small flow rate according to item 6 of the patent application, wherein the solution is a colloidal solution, and the porous When the diameter of the pores of the thin film is set to E and the diameter of the colloidal particles is set to R, the aforementioned E = (1 0 to 200) R, and when the film thickness is set to D, D = (1/5 ~ 2 ) The range of E. 8.-A kind of micro The flow generating device is characterized by: a porous film disposed on a flow path; a pair of electrodes provided on both sides of the porous film; a means for supplying a solution to the flow path; and applying a DC voltage between the pair of electrodes A direct current power source; and a voltage adjusting means for adjusting the voltage of the direct current power source, the solution is a solution that is not processed to cause electrical decomposition, and can be adjusted by the aforementioned voltage adjusting means to apply a direct current voltage between the pair of electrodes, The flow rate of the solution passing through the porous film. 9. A pump, characterized in that an intermediate medium is interposed on the rear side of the minute flow rate generating device according to any one of the scope of the patent application] to 8. On this rear side, the discharge liquid is filled as the intended discharge liquid, and the discharge liquid can be transported. 0. The pump of item 9 of the patent application scope, wherein the polarity of the anode and the cathode is reversed by applying and stopping the aforementioned voltage. The purpose is to make the ejection liquid be ejected from the supply tank connected to the outlet pipe through the outlet pipe. Among them, the aforementioned Pump No. -34-200523706 (3) Structure is a member provided with a passage in a flat frame, and a casing is provided on the input side, and the horizontal plane of the porous film and the flat frame are provided inside. The horizontal plane is set in the same direction, the input pipe for the solution is set in this case, and the outlet pipe for the ejection liquid is set on the side opposite to the shell of the passage. The intermediate medium is installed in a part of the aforementioned channel ° 1 3. For example, the pump of item 11 of the scope of the patent application 'where a part of the aforementioned channel is also a part of the channel on the downstream side than the intermediate medium. Fill your mouth. 14. As described in item 1 of the scope of patent application, Kuriura 'wherein the electrodes provided on both sides of the porous film are connected with a DC power source for generating a voltage via a wire. 15. A control mechanism capable of adjusting the distance between the electrode and the aforementioned DC power source as described in "Kuriura's" in the scope of patent application No. 11. 16. · —Kuripu system is equipped with a drop groove on the input side of the small flow generation unit, and the person who discharges the ejection liquid through the outlet pipe through the passage of the pump is characterized by having: The electrode of the generating part applies a reverse voltage to control the voltage, which can control the flow of the pump applied for the item 9 of the patent scope. 1 7 · If the pump of item 9 of the scope of patent application is used, the aforementioned pump is mounted on a pedestal, and a control mechanism capable of controlling the aforementioned DC power supply and the voltage of the power supply is provided in the pedestal or pedestal. ] 8. An analysis device equipped with -35- 200523706 of the ninth scope of the patent application (4) An analysis device with a pump and a microscope, characterized in that: a combination of a pump provided for the aforementioned small flow rate of the pump The microchannel and the visualization function part on the side flow the solution of the analysis target in the microchannel, visualize the target, and observe with the microscope.