WO2015032198A1 - 一种阵列基板及其制造方法、柔性显示器件及电子设备 - Google Patents
一种阵列基板及其制造方法、柔性显示器件及电子设备 Download PDFInfo
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- WO2015032198A1 WO2015032198A1 PCT/CN2014/074890 CN2014074890W WO2015032198A1 WO 2015032198 A1 WO2015032198 A1 WO 2015032198A1 CN 2014074890 W CN2014074890 W CN 2014074890W WO 2015032198 A1 WO2015032198 A1 WO 2015032198A1
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/03—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes specially adapted for displays having non-planar surfaces, e.g. curved displays
- G09G3/035—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes specially adapted for displays having non-planar surfaces, e.g. curved displays for flexible display surfaces
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133305—Flexible substrates, e.g. plastics, organic film
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134336—Matrix
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/2092—Details of a display terminals using a flat panel, the details relating to the control arrangement of the display terminal and to the interfaces thereto
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/02—Improving the quality of display appearance
- G09G2320/0223—Compensation for problems related to R-C delay and attenuation in electrodes of matrix panels, e.g. in gate electrodes or on-substrate video signal electrodes
Definitions
- Embodiments of the present invention relate to flexible display technologies, and more particularly to an array substrate and a method of fabricating the same, a flexible display device, and an electronic device.
- Flexible dismays are a class of ffi flexible substrates that can be fabricated into ultra-thin, oversized, bendable display devices or display technologies.
- the main features of a flexible display can be described in three words: thin, light, and soft.
- Prior art flexible substrates are generally divided into two regions: one portion is a non-bent region and the other portion is a bendable region. As shown in FIG. 1, the array substrate 1 is in a non-bendable area at a position where the drive module 4 is disposed.
- the driving module 4 is connected to the data line 2 and the gate line 3, respectively, to drive the thin film transistor TFT 5 provided in the panel.
- the data line 2 and the squall line 3 are disposed perpendicular to one side of the flexible substrate.
- the gate line 3 therein is bent in the manner shown in Fig. 2.
- the metal forming the gate line has a certain tensile property, when the bending exceeds a certain level, the gate line is liable to be broken, resulting in equipment damage. If you start with materials, the high tensile properties of the metal are higher, which will increase the overall cost of the device.
- an embodiment of the present invention provides an array substrate including at least a flexible substrate and an array layer formed on the flexible substrate.
- the array layer includes: a signal transmission line, including multiple a stripe data line and a plurality of gate lines intersecting each other to form a plurality of sub-pixel regions on the flexible substrate; and thin film transistors disposed in each of the plurality of sub-pixel regions, respectively, and corresponding data lines and Grid connection.
- An angle of at least a portion of the signal transmission lines relative to any one of the sides of the flexible substrate is substantially not equal to 90 degrees.
- each of the plurality of data lines and each of the plurality of lines are perpendicular to each other, and each of the plurality of data lines and the flexible
- the angle of one side of the substrate is between about 30 degrees and about 60 degrees.
- the angle between each of the plurality of data lines and one side of the flexible substrate is about 45 degrees.
- the plurality of data lines include a first data line connected to the first number of thin film transistors and a second data line connected to the second number of thin film transistors.
- the column substrate further includes a driving module, the number of sub-signals in the data driving signal outputted by the driving module to the first data line is a first quantity, and the driving module is to the second data line The number of sub-signals in the output data drive signal is the second number.
- the array substrate wherein the plurality of data lines comprise a first data line and a second data line having a length greater than a length of the first data line; and the plurality of gate lines comprise a first gate line and a length greater than the first a second gate line of the length of the gate line.
- a cross-sectional area of the second data line is larger than a cross-sectional area of the first data line, such that a first transmission delay difference between the first data line and the second data line having different cross-sectional areas a second transmission delay difference between the first data line and the second data line having the same cross-sectional area; and a cross-sectional area of the second gate line is larger than a cross-sectional area of the first » line, such that the cross-sectional area is different
- the third transmission delay difference between the first gate line and the second gate line is smaller than the fourth transmission delay difference between the first gate line and the second » line having the same cross-sectional area.
- the cross-sectional width of the second data line is greater than the cross-sectional width of the first data line; or when the cross-sectional width is the same, the cross-sectional height of the second data line is greater than the cross-sectional height of the first data line; or When the width and height are different, the product of the cross-sectional width and height of the second data line is greater than the product of the cross-sectional width and height of the first data line.
- the cross-sectional width of the second gate line is greater than the cross-sectional width of the first gate line; or when the cross-sectional width is the same, the cross-sectional height of the second gate line is greater than the cross-section of the first gate line; Or when the cross-sectional width and height are different, the product of the cross-sectional width and height of the second » line is greater than the product of the cross-sectional width and height of the first » line.
- the flexible substrate is divided into a bendable display area and a non-bendable peripheral area, and the array substrate further includes a driving module disposed in the peripheral area.
- the driving module includes a first driving module and a second driving module corresponding to opposite sides of the flexible substrate, and the first driving module and the second driving module are adjacent to each other.
- the principle of connection is respectively connected to the plurality of data lines and the plurality of » lines.
- an embodiment of the present invention further provides a flexible display device, including the above.
- an embodiment of the present invention further provides an electronic device, including the above flexible display device.
- an embodiment of the present invention further provides a method for fabricating an array substrate, comprising the steps of: forming a magnetic field by a magnetic strip, in a direction in which the data lines/twist lines to be fabricated are arranged, the magnetic field The magnetic field strength first becomes smaller and then becomes smaller; the plasma-inert gas accelerated by the electric field strikes the target, and the impinging atom is deposited on the surface of the substrate to form a metal thin film layer under the action of the magnetic field;
- the oblique magnetic strip is arranged in the same direction as the data line/gate line to be fabricated, and a magnetic field is formed between the magnetic strips, and the plasma density is high at a position of a strong magnetic field, and the film thickness is high;
- a metal film layer having a regular wavy film thickness is formed, wherein a relatively thick film thickness is formed on a long trace, and a relatively thin film thickness is formed on a short trace, thereby achieving uniform signal delay.
- the degree of bending of the signal transmission line in the case where the substrate is bent is reduced, and the bending performance of the substrate is improved.
- FIG. 1 is a schematic structural view of a prior art flexible array substrate
- FIG. 2 is a schematic view showing a bending state of a signal transmission line when a flexible array substrate of the prior art is bent;
- FIGS. 4a-4b are schematic structural views of the two array substrates according to the embodiment of the present invention.
- FIG. 5 is a schematic diagram of comparison of effects of an array substrate according to an embodiment of the present invention.
- FIG. 6 is a schematic structural view of an array substrate provided with two driving modules according to an embodiment of the present invention
- FIG. 7 is a schematic diagram of a nearby connection when two driving modules are provided according to an embodiment of the present invention
- FIG. 8 is a view showing flexibility of an embodiment of the present invention
- a schematic diagram of different numbers of thin film transistors connected to different data lines in an array substrate
- FIG. 9 is a schematic view showing a data line of a flexible array substrate according to an embodiment of the present invention divided into two parts;
- FIG. 10 is a timing diagram of a data driving signal according to an embodiment of the present invention.
- Figure 11 is a schematic view showing the structure of a metal thin film layer having different thicknesses formed in the embodiment of the present invention
- Figure 12 is a schematic view showing the structure of a signal transmission line having different thicknesses formed by using the metal thin film layer shown in the embodiment of the present invention.
- the flexible display device, and the electronic device of the embodiment of the present invention since a part of the signal transmission line is disposed obliquely with respect to one side of the flexible substrate, it is perpendicular to the flexible array with respect to the prior art.
- the arrangement of the sides of the substrate, when the flexible array substrate is bent, the bending radius of these obliquely arranged signal transmission lines is larger. That is to say, in the case of the same bending, the degree of bending of the signal transmission line in the array substrate of the embodiment of the present invention is relatively small, so that the bending ability of the array substrate is improved.
- the angle between the line and the line involved is defined as in the specific embodiment of the present invention, and the range of the angle between the data line and one side of the flexible substrate is defined as [0, 90 degrees], taking the line of the display area and the side of the flexible substrate equivalent to a straight line (or line segment) as an example.
- the range of the angle between the data line and one side of the flexible substrate is defined as [0, 90 degrees], taking the line of the display area and the side of the flexible substrate equivalent to a straight line (or line segment) as an example.
- a is assumed to be a side of the flexible substrate, and the angle between the signal transmission lines b and a is defined as Theta i in Fig. 3a.
- the angle between the signal transmission lines b and a is defined as Theta 2 in Fig. 3b.
- a and b are perpendicular, the angle between a and b is positioned at 90 degrees, and a and b are parallel or coincident. , the angle between a and b is positioned at 0 degrees.
- An array substrate includes a flexible substrate 6 and an array layer formed on the flexible substrate 6.
- the array layer includes a display area and a non-display area.
- the column layer includes;
- a signal transmission line comprising a plurality of data lines 2 and a plurality of gate lines 3, the data lines 2 and the gate lines 3 intersecting each other to form a plurality of sub-pixel regions on the flexible substrate;
- the angle between at least a portion of the signal transmission lines with respect to any one of the sides of the flexible substrate 6 is substantially not equal to 90 degrees.
- the angle between all the gate lines 3 and any one of the sides of the flexible substrate 6 is not equal to 90 degrees. That is to say, the angle ⁇ between the gate line 3 and any one of the sides of the flexible substrate satisfies the following relationship: 0° ⁇ ⁇ ⁇ 90°.
- the gate of the thin film transistor 5 is connected to the gate line 3
- the source (or drain) of the thin film transistor is connected to the data line 2
- the drain (or source) of the thin film transistor 5 is connected to the pixel electrode (not shown). Out) Connect. Since the drain and source of the thin film transistor 5 are substantially the same in the fabrication process, they can be interchanged in name.
- the angle ⁇ between the gate line 3 and the side of the flexible substrate 6 is preferably between about 30° and 60°. In a specific embodiment of the invention, the angle ⁇ between the gate line 3 and the side of the flexible substrate is preferably about 45°.
- Fig. 4a only the gate lines 3 are arranged obliquely. However, it should be understood that the data line 2 can also be arranged in an oblique direction.
- the angle between all the gate lines 3 and any one of the sides of the flexible substrate 6 is not equal to 90 degrees. Ffi is to say that the angle ⁇ between the gate line 3 and any one of the sides of the flexible substrate 6 satisfies the following relationship: 0° ⁇ ⁇ ⁇ 90°.
- the angle ⁇ between the data line 2 and any one of the sides of the flexible substrate 6 satisfies the following relationship: 0° ⁇ ⁇ ⁇ 90°.
- the data line 2 and the » line 3 may be disposed perpendicular to each other, and the angle between the data line 2 and one side of the flexible substrate 6 is about 30. Degree to about 60 degrees.
- the angle of the data line to one side of the flexible substrate is preferably about 45 degrees.
- 51 denotes a first signal transmission line which is disposed perpendicular to one side of the flexible substrate
- 52 denotes one of the embodiments of the present invention with respect to the flexible substrate.
- a second signal transmission line disposed obliquely to the side.
- the second signal transmission line 52 has a ratio of the first signal transmission line 5]
- the radius of curvature R1 is larger than the radius of curvature R2. That is, the degree of bending of the second signal transmission line 52 is lower than that of the first signal transmission line 51.
- the radius of curvature of the second signal transmission line 52 is about 4. 4 times the radius of curvature of the second signal transmission line 51. .
- the embodiment of the present invention reduces the degree of bending of the signal transmission line in the case where the substrate is bent by providing the signal transmission line obliquely with respect to one side of the flexible substrate, thereby improving the bending performance of the substrate.
- the second signal transmission line is the same as the first signal transmission line of the prior art, and the same as ffi (for example, both are used as data lines), but is not limited thereto.
- the flexible substrate in order to protect the driving module, may be divided into a bendable display area and a non-bendable peripheral area, and the driving module is disposed in the peripheral area.
- the strength of the peripheral region is large, the possibility of bending with respect to the display region is small, and the provision of the driving module to the peripheral region can improve the protection of the driving module.
- the driving module may be one, but may be two or more.
- two drive modules are included, correspondingly disposed on opposite sides of the flexible substrate, and the two drive modules are respectively connected to the data line 2 and the gate line 3 on the principle of near connection.
- FIG. 6 An array substrate including two drive modules is shown in FIG. 6. It can be found that the two drive modules are respectively connected to the data line 2 and the gate line 3 in the principle of the nearest connection.
- the data line 2 may be connected to the left drive module through the first connection line 71, or may be connected to the right drive module through the second connection line 72.
- the length di of the first connecting line 71 is obviously smaller than the length d2 of the second connecting line 72. Therefore, according to the nearest connection principle, the data line 2 in Fig. 7 is driven by the drive module on the left.
- the gate line 3 is connected to the right drive module through the third connection line 73. It is also possible to connect to the left drive module via the fourth connection line 74. However, it is obvious that the length d3 of the third connecting line 73 is obviously smaller than the length of the fourth connecting line 74 (14. Therefore, according to the principle of the nearest connection, the gate line 3 in the drawing is driven by the driving module on the right side.
- connection distance to the currently connected drive module will be less than or equal to the minimum connection distance to the other drive module.
- this connection method greatly reduces the difference in length between the different signal transmission lines and the driving module, and also reduces the transmission of signals transmitted by the driving module to different signal transmission lines. Delay, improving system performance.
- the above-described driving module simultaneously drives the data line 2 and the gate line 3.
- the drive module in the embodiment of the present invention may also include a data drive module for driving the data line 2 alone and a gate drive module for driving the cabinet line 3 alone.
- the gate driving module can be a stand-alone chip or integrated into the array substrate by GOA (Gate on Array).
- At least two data lines 2 may have different lengths; and - at least two gate lines 3 Can also have different lengths;
- At least two data lines 2 are respectively connected to the different number of thin film transistors 5, and/or at least two turns 3 are respectively connected to the number of thin film transistors 5.
- the plurality of data lines include at least: a first data line connected to the first number of thin film transistors, and a second data line connected to the second number of thin film transistors.
- first and second indicate unequal when comparing numerical relationships, and relative positional relationship is relative, not specific.
- the first number is not equal to the second number.
- the data line 81 may be referred to as a first data line
- the data line 82 may be referred to as a second data line.
- data line 82 may be referred to as a first data line
- data line 83 may be referred to as a second data line.
- the first data line (or the first » line) may refer to one of the data lines (or gate lines), or may be connected to the same number of thin film transistors (or the same length), etc.
- the drive module outputs a data drive letter to the first data line within one frame time
- the number of sub-signals in the number is the first number.
- the number of sub-signals in the data driving signal output by the driving module to the second data line in one frame time is a second quantity.
- the sub signal refers to a signal that the drive module inputs to the pixel electrode through a TFT.
- the uppermost data line 81 is connected to seven TFTs, and the middle data line 82 is connected to eight TFTs, and the lowermost data line 83 is connected to nine TTTs.
- the number of sub-signals in the data driving signal outputted by the driving module to the uppermost data line 81 is seven, and the driving module is in the middle of the data line 82.
- the number of sub-signals in the output data drive signal is eight, and the number of sub-signals in the data drive signal output from the drive module to the lowermost data line 83 is nine.
- the uppermost data line 81 is connected to seven TFTs, and the middle data line 82 is connected to eight TFTs, and the lowermost data line 83 is connected to nine TFTs.
- the gate line 811 is connected to one TFT, the gate line 812 is connected to two TFTs, and the turns line 813 is connected to three TFTs.
- the array substrate according to the embodiment of the present invention is subjected to line-by-line scanning.
- the driving module inputs a gate driving signal to the gate line 811 to turn on a thin film transistor.
- the driving module inputs a data driving signal to the data line 83, and the number of sub-signals output by the driving module is one.
- the number of sub-signals that the driving module inputs the gate driving signal to the gate line 812 is two.
- the driving module inputs the data driving signal to the data lines 82 and 83, and the number of sub-signals output by the driving module. It is two. By analogy, it will not be repeated.
- the driving module determines the number of sub-signals in the data driving signal according to the number of thin film transistors connected by the data lines, and can meet the driving requirements of the array substrate with different numbers of thin film transistors connected by the data lines, as opposed to The prior art has better flexibility.
- a diagonal line 93 of the flexible substrate is used as a dividing line, and the data line is divided into a first portion 91 and a second portion 92.
- the data line located in the upper left half of the flexible substrate is the first portion
- the data line located in the lower right half of the flexible substrate is the second portion.
- the number of thin film transistors connected to the preceding data lines is smaller than the number of thin film transistors connected to the subsequent data lines in the order from top to bottom.
- the previous data The number of line-connected thin film transistors is greater than the number of thin film transistors connected to the subsequent data lines. That is to say, in the direction in which the data lines are arranged, the number of transistors connected to the data lines first increases and then decreases.
- the number of transistors connected to the data lines is firstly equal.
- Pi increases, and then decreases according to the difference value P2 (P1 and P2 are positive integers greater than or equal to).
- the difference value is equal to P1 and P2, that is, the number of transistors connected to the data lines is symmetrically arranged with respect to the diagonal.
- the number of sub-signals included in the drive signal transmitted by the drive module is first increased and then decreased.
- a plurality of data lines/twist lines are present, and a first signal transmission line and a second signal transmission line having a length greater than a length of the first signal transmission line are present. That is:
- first gate line and a second gate line having a length greater than a length of the first » line; and/or a first data line, and a second data line having a length greater than a length of the first data line.
- the cross-sectional area of the second signal transmission line is larger than the cross-sectional area of the first signal transmission line, so that the first signal transmission line with different cross-sectional areas is
- the first transmission delay difference between the second signal transmission lines is smaller than the second transmission delay difference between the first signal transmission line and the second signal transmission line having the same cross-sectional area.
- the cross-sectional area of the second data line is larger than the cross-sectional area of the first data line, such that the first transmission delay difference between the first data line and the second data line having different cross-sectional areas is smaller than the first cross-sectional area The second transmission delay difference between the data line and the second data line.
- the cross-sectional area of the second gate line is larger than the cross-sectional area of the first gate line, such that the third transmission delay difference between the first gate line and the second gate line having different cross-sectional areas is smaller than the first cross-sectional area A fourth transmission delay difference between the gate line and the second line.
- the cross-sectional area of the signal transmission lines of different lengths is controlled during the manufacturing process according to the length of the two.
- Longer signal transmission lines have a larger cross-sectional area, so their impedance effects are correspondingly reduced. Therefore, it is possible to compensate for the delay due to its long length, reduce the delay difference between different signal transmission lines, and improve the display performance.
- any two data lines/cassettes of different lengths may be provided.
- the cross-sectional area of the longer data line/gate line is larger than the cross-sectional area of the shorter data line/gate line.
- the cross-sectional width of the second signal transmission line is greater than the cross-sectional width of the first signal transmission line
- the cross-sectional height of the second signal transmission line is greater than the cross-sectional height of the first signal transmission line
- the product of the cross-sectional width and height of the second signal transmission line is larger than the product of the cross-sectional width and height of the first signal transmission line.
- the signal transmission line as a data line as an example.
- the cross-sectional area of the data lines may first increase and then decrease in an equal or equal relationship.
- the cross-sectional area of the data line is symmetrically arranged with respect to the diagonal.
- the method for fabricating the array substrate having the above features includes: forming a metal thin film layer;
- the plurality of data lines/gate lines include a first signal transmission line and a second signal transmission line having a length greater than a length of the first signal transmission line, and a cross-sectional area of the second signal transmission line is greater than a cross section of the second signal transmission line area.
- any two data lines/gate lines having different lengths, and a longer length data line Z gate line have a cross-sectional area larger than a shorter length data line/ ⁇ line cross-sectional area.
- the length of the data line first increases and then decreases.
- the width of each data line is the same during the etching process, the thickness of the data line first increases and then decreases in the direction in which the data lines are arranged.
- the step of forming a metal thin film layer may be performed by a sputtering process.
- the step of forming a metal thin film layer specifically includes:
- a magnetic field is formed by the magnetic strip, and the magnetic field strength of the magnetic field first becomes larger and smaller in the direction in which the data lines/gate lines are to be formed.
- the plasma-inert gas accelerated by the electric field is struck against the target, and the impinging atoms are deposited on the surface of the substrate to form the metal thin film layer under the action of the magnetic field.
- an oblique magnetic strip is disposed behind the substrate in the same direction as the data line/gate line to be fabricated.
- a magnetic field is formed between the magnetic strips, and when the plasma density is high at a strong magnetic field, the film thickness is high.
- Fig. 11 is a schematic cross-sectional view of the metal thin film layer formed after the above process, in the direction in which the data lines are arranged, it can be found that the thickness of the formed metal thin film layer 111 first increases and then decreases, and is symmetrically arranged.
- the metal thin film layer formed by the deposition is divided into two parts according to the arrangement direction of the data line/gate line to be fabricated.
- the thickness of a portion of the metal thin film layer is gradually increased, and the thickness of the other portion of the metal thin film layer is gradually decreased.
- This regular wave-shaped film thickness can achieve the effect shown in Fig. 12 after the etching is completed. Among them, there is a relatively thick film thickness on the long trace, a relatively thin film thickness on the short trace, and a uniform signal delay.
- Embodiments of the present invention also provide a flexible display device including any of the above array substrates.
- the structure and working principle of the array substrate are the same as those in the foregoing embodiment, and details are not described herein again.
- the structure of other parts of the flexible display device can refer to the prior art, and will not be described in detail herein.
- the flexible display device can be: a product or a component having any display function such as a liquid crystal panel, an electronic paper, a liquid crystal television, a liquid crystal display, a digital photo frame, a mobile phone, a tablet computer, or the like.
- Embodiments of the present invention also provide an electronic device including the above flexible display device.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US14/402,971 US9472134B1 (en) | 2013-09-04 | 2014-04-08 | Array substrate and method for manufacturing the same, flexible display device and electronic product |
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CN201310397778.6 | 2013-09-04 | ||
CN201310397778.6A CN103454821B (zh) | 2013-09-04 | 2013-09-04 | 一种阵列基板、柔性显示器件及电子设备 |
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PCT/CN2014/074890 WO2015032198A1 (zh) | 2013-09-04 | 2014-04-08 | 一种阵列基板及其制造方法、柔性显示器件及电子设备 |
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CN103454822B (zh) * | 2013-09-04 | 2016-03-30 | 京东方科技集团股份有限公司 | 阵列基板及其驱动方法、柔性显示器件及电子设备 |
CN103454821B (zh) * | 2013-09-04 | 2016-06-15 | 京东方科技集团股份有限公司 | 一种阵列基板、柔性显示器件及电子设备 |
CN103730476A (zh) * | 2013-12-27 | 2014-04-16 | 京东方科技集团股份有限公司 | 阵列基板及显示装置 |
KR102220152B1 (ko) * | 2014-03-13 | 2021-02-26 | 삼성디스플레이 주식회사 | 표시 장치 및 그 구동 방법 |
CN103926774B (zh) * | 2014-04-02 | 2016-11-16 | 京东方科技集团股份有限公司 | 阵列基板、柔性显示器件及电子设备 |
CN104090439B (zh) * | 2014-06-27 | 2017-08-08 | 京东方科技集团股份有限公司 | 阵列基板及其驱动方法、柔性显示器件及电子设备 |
TWI574094B (zh) * | 2016-07-28 | 2017-03-11 | 友達光電股份有限公司 | 顯示面板 |
KR102645817B1 (ko) * | 2016-12-06 | 2024-03-08 | 한화로보틱스 주식회사 | 로봇의 비헤이비어 관리 방법 및 장치 |
CN106486500B (zh) * | 2016-12-28 | 2018-11-16 | 京东方科技集团股份有限公司 | 柔性阵列基板及其制造方法、柔性显示面板和显示装置 |
CN106783890A (zh) * | 2017-02-07 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示装置 |
CN106952607B (zh) * | 2017-05-25 | 2020-04-17 | 京东方科技集团股份有限公司 | 显示基板、显示面板和显示装置 |
CN108181769B (zh) * | 2018-01-29 | 2020-11-10 | 武汉华星光电技术有限公司 | 一种阵列基板、显示面板及电子设备 |
US10831074B2 (en) | 2018-01-29 | 2020-11-10 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Array substrate, display panel, and electronic apparatus |
KR102484880B1 (ko) * | 2018-06-08 | 2023-01-05 | 엘지디스플레이 주식회사 | 신축 가능한 표시장치, 패널 구동회로 및 구동방법 |
CN109345993A (zh) * | 2018-09-18 | 2019-02-15 | 深圳华信嘉源科技有限公司 | 一种矩阵显示屏及其显示控制方法 |
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