WO2015020353A1

WO2015020353A1 - Probe apparatus for kelvin test

Info

Publication number: WO2015020353A1
Application number: PCT/KR2014/007062
Authority: WO
Inventors: 최종국; 서정윤
Original assignee: 퀄맥스시험기술 주식회사
Priority date: 2013-08-06
Filing date: 2014-07-31
Publication date: 2015-02-12
Also published as: KR101426031B1

Abstract

The present invention provides a probe apparatus for a Kelvin test which contacts terminals of a device. The probe apparatus comprises: a contact layer which has conductivity and is stacked at the lowermost end thereof; an interposer layer which has a plurality of openings formed therein and is stacked on the contact layer; first probes inserted into the openings formed in the interposer layer to contact the contact layer at one ends thereof; second probes, each having one end located on and in contact with the upper portion of the interposer layer; and a load board for contacting the other ends of the probes and fixing the probes. Therefore, the interposer layer can short-circuit the probes, thereby providing an effect of conducting a Kelvin test even with a degree of integration lower than widths of terminals of a device.

Description

Probe Device for Kelvin Test

The present invention relates to a probe device for Kelvin test, that is, a Kelvin test socket, and more particularly, to a probe device capable of performing a Kelvin test even in a device having a small terminal having a micro unit width.

The Kelvin test, a test method for measuring the performance and abnormality of manufactured semiconductor chips (hereinafter, referred to as 'devices') is for precisely measuring the resistance of semiconductor devices. The two probes are brought into contact with each other, and current and voltage are sensed to measure the resistance of the semiconductor device (see FIG. 4).

This Kelvin test has a structure in which two probes are in contact with one device terminal, and conventional techniques for such a structure and method include "a two-terminal Kelvin pattern and its measuring method (Application No. 10-2003-0098335). , "" Integrated printed circuit board and test contactor for high speed semiconductor testing (application no. 10-2004-0067037), "" Kelvin test probe (application no. 10-2007-0121258), "" Kelvin test socket (Application No. 10-2008-0050080), "" Electrical contact probe with compliant internal interconnects (Application No. 10-2008-7000738), "" Kelvin test socket (Application No. 10-2010-) 0012723) "or" electrically conductive Kelvin contacts for microcircuit testers (application number 10-2011-7027706) "and the like.

However, these conventional techniques have a structure that can be applied as a device having a general size until the terminal of the device has a width (Lw, see FIG. 1) of several mm units, but the width of the terminal is micrometer (μm). In the case of smaller unit), the width of a pair of probe pins and the separation distance between the pair of probe pins must be equal to or smaller than the width of a terminal having a micro size.

When the width of the device terminals is small in micro units, a pair of Kelvin test probe sockets, i.e., probe devices, of such a device is not only very difficult to manufacture, but also has a problem of manufacturing cost and a micro-distance after manufacturing. There has been a problem such as occurrence of a short of the probe pin.

Therefore, the above-mentioned conventional techniques have a structure of a probe socket that is difficult to apply when the width of the terminal of the device is reduced to several micrometers.

The probe device for the Kelvin test according to the present invention has been devised to solve the above-described problems, and to provide a probe device that can be applied to a device terminal having a micro unit width.

The problem of the present invention is not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.

The probe device for the Kelvin test according to the present invention has the following problem solving means for the above-mentioned problem.

A probe device for Kelvin test according to the present invention is a probe device for Kelvin test in contact with a terminal of a device, the probe device for forming a bottom, the contact layer having a conductivity; An interposer layer stacked on the contact layer and having a plurality of openings; A first probe inserted into an opening formed in the interposer layer, the first probe having one end in contact with the contact layer; A second probe having one end positioned in contact with an upper portion of the interposer layer; And a load board in contact with the other ends of the first probe and the second probe, the load board fixing the first probe and the second probe, wherein the interposer layer is formed of the first probe and the second probe. It is characterized by shorting the ends.

The probe apparatus of claim 1, wherein the first probe and the second probe comprise: a barrel portion forming a body of each of the first probe and the second probe; A probe part inserted into the barrel part to form one end (the probe part of the first probe is in contact with the contact layer, the probe part of the second probe is in contact with an upper portion of the interposer layer, and the interposer layer is Shorting the probe portion of the first probe and the probe portion of the second probe); And a contact part inserted into the barrel part to make the other ends of the first probe and the second probe, respectively, to contact the load board.

The barrel of the probe apparatus for a Kelvin test according to the present invention may be characterized in that it comprises an elastic member having a conductivity therein.

The elastic member of the probe device for the Kelvin test according to the invention may be characterized in that the spring.

In the contact layer of the probe device for the Kelvin test according to the present invention, one end of the first probe is made of a conductive rubber, one end of the first probe presses the contact layer and the terminal of the device In case of contact, the electrical connection may be maintained between one end of the first probe and a terminal of the device.

The probe device for the Kelvin test according to the present invention is stacked on the interposer layer, a plurality of openings are formed, and the first probe and the second probe are inserted to insert the first probe and the second probe. It may be characterized in that it further comprises a mask board for fixing the position.

The probe device for the Kelvin test according to the present invention having the above configuration has the following effects.

First, only the first probe of a pair of probes is in contact with the device terminal, thereby providing a probe device capable of performing the Calvin test even with an integration degree lower than the width of the device terminal.

Second, a sufficient separation space is provided for the pair of probes, thereby preventing a short circuit between the probes.

Third, the probe portion of the probe does not directly contact the terminal of the device, but contacts the terminal of the device through a contact layer, thereby minimizing wear of these contact points while maintaining electrical contact between the probe probe and the device terminal.

The effects of the present invention are not limited to those mentioned above, and other effects that are not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a side cross-sectional view of a probe device for Kelvin test, in accordance with a preferred embodiment of the present invention.

2 is a side cross-sectional view showing a probe device for Kelvin test in contact with a terminal of a device to perform a Kelvin test, according to a preferred embodiment of the present invention.

3 is an exploded view of a probe device for Kelvin test, in accordance with a preferred embodiment of the present invention.

Figure 4 shows an internal circuit diagram for performing a Kelvin test of the probe device for the Kelvin test, according to a preferred embodiment of the present invention.

The probe device for the Kelvin test according to the present invention may be modified in various ways and have various embodiments. Specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all changes, equivalents, and substitutes included in the technical spirit and scope of the present invention.

Hereinafter, a probe device for a Kelvin test according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a side cross-sectional view of a probe device for Kelvin test, in accordance with a preferred embodiment of the present invention. 2 is a side cross-sectional view showing a probe device for Kelvin test in contact with a terminal of a device to perform a Kelvin test, according to a preferred embodiment of the present invention. 3 is an exploded view of a probe device for Kelvin test, in accordance with a preferred embodiment of the present invention. Figure 4 shows an internal circuit diagram for performing a Kelvin test of the probe device for the Kelvin test, according to a preferred embodiment of the present invention.

According to the present invention, a probe device for a Kelvin test includes: a contact layer 20; Interposer layer 30; A first probe 10a; Second probe 10b; And a load board 50.

As shown in FIGS. 1 and 2, the contact layer 20 forms a lower end of the probe device and is an electrically conductive layer.

Thereafter, an interposer layer 30 is formed on the contact layer 20, and a plurality of openings 31 are formed in the interposer layer 30.

The first probe 10a is inserted into the opening 31 formed in the interposer layer 30 with one end facing downward and the other end facing upward, and the first probe 10a has an upper surface of the contact layer 20. Contact with

As shown in FIGS. 1 and 2, the second probe 10b has one end facing downward and the other end facing upward. One end of the second probe 10b is not inserted into the opening 31 of the interposer layer 30, and one end of the second probe 10b is in contact with the top surface of the interposer layer 30 so that the second probe 10b is positioned.

Thereafter, a load board 50 is formed on the uppermost layer, and the load board 50 includes a plurality of board terminals 51 so that each board terminal 51 has a first probe 10a and a second probe 10b. Contact the other end of the

Subsequently, the board terminals 51 form a circuit as shown in FIG. 4, and when the first probe 10a contacts the terminal 2 of the device 1, a Kelvin test is performed. The operation of the circuit shown in Figure 4 is disclosed in the existing prior art, the detailed operation principle is omitted.

The interposer layer 30 internally electrically connects, or shortens, one end of the first probe 10a and one end of the second probe 10b.

1 and 2, the first probe 10a and the second probe 10b even when the width Lw of the terminal 2 of the device 1 is several micro units (for example, 165 mu m). Is located inside the width Lw, and only the first probe 10a needs to be in contact with the terminal 2 without both the first and

second probes

10a and 10b contacting each other. Each of the

thicknesses

10a and 10b or the separation distance they form provides a feature that is not significantly affected by the width Lw of the terminal 2.

When one end of the first probe 10a is in electrical contact with the terminal 2 of the device 1, it is in electrical contact via the contact layer 20. In this case, one end of the first probe 10a presses one surface of the contact layer 20, and the other surface of the contact layer 20 is in electrical contact with the terminal 2 of the device 1.

The first probe 10a and the second probe 10b may include a barrel 13, as shown in FIGS. 1 and 2; Probe section 12; And a contact portion 11.

The barrel part 13 constitutes a body of the probe 10. 1 and 2, the barrel portion 13a of the first probe 10a and the barrel portion 13b of the second probe 10b are shown, and the reference numerals are designated as different, but basically the same function is performed. Configuration.

In the case of the probe part 11a, it is inserted in the barrel part 13, and it is the structure which comprises one end of the probe 10. FIG.

More specifically, referring to FIGS. 1 and 2, the first probe 10a has one end of the probe portion 11a and is inserted into the opening 31 of the interposer layer 30 to contact the contact layer 20. do.

In the case of the second probe 10b, the probe portion 11b forms one end, and the probe portion 11b is not inserted into the opening 31 of the interposer layer 30, and is disposed on the upper surface of the interposer layer 30. Contact.

The interposer layer 30 electrically shorts the probe part 11a of the first probe 10a and the probe part 11b of the second probe 10b.

The contact part 12 is inserted into the barrel part 13 and constitutes the other end of the probe 10.

Specifically, as shown in FIGS. 1 and 2, the contact portion 12a of the first probe 10a and the contact portion 12b of the second probe 10b are respectively connected to the board terminals 51 of the load board 50. Contact.

The barrel portion 13 includes an elastic member that exhibits conductivity therein, and preferably, the elastic member is a spring having a small internal resistance.

The elastic member pushes the contact part 12 and the probe part 11 to the outside. That is, the elastic member allows the first probe 10a to maintain electrical contact between one end and the other end between the terminal 51 of the load board 50 and the contact layer 20, and to the second probe 10b. To maintain the electrical contact between the terminal 51 of the load board 50 and the top surface of the interposer layer 30.

As shown in FIGS. 1 and 2, the portion of the contact layer 20 that is pressed between one end of the first probe 10a (preferably the probe portion 11a) and the terminal of the device 1 is conductive. It is preferable that it is made of rubber to maintain electrical contact between one end of these first probes 10a and the terminal 1 of the device 1.

As shown in FIGS. 1 and 2, the probe device for the Kelvin test according to the present invention may further include a mask board 40.

The mask board 40 is stacked on the interposer layer 30 and includes a plurality of

openings

41a and 41b.

The opening 41a is positioned on the opening 31 of the interposer layer 30 to insert and fix the first probe 10a (more specifically, the probe portion 11a of the first probe 10a). The opening 41b is located at a portion where the opening 31 of the interposer layer 30 is not formed, and thus the probe portion 11b of the second probe 10b (more specifically, the second probe 10b) is formed. )) To prevent the probe 10 from deviating in the transverse direction.

As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It is to be understood that the present invention means that there is a part or a combination thereof, and does not exclude the presence or addition possibility of one or more other features or numbers, step operation components, parts or combinations thereof.

The scope of the present invention is determined by the matters set forth in the claims, and the parentheses used in the claims are not for the purpose of selective limitation, but are used for the definite elements, and the description in the parentheses is also to be interpreted as an essential element. Should be.

[Description of the code]

1: device

2: device terminal

3a, 3b, 3c: current flow

6: fixing screw

10: probe

11: probe

12: contact

13: barrel

20: contact layer

21: elastic terminal portion

27: set screw

30: interposer layer

31: interposer opening

40: mask board

41: mask board opening

50: load board

51: board terminal

Lw: device terminal width

Claims

A probe device for Kelvin testing in contact with a terminal of a device,

A bottom contact layer, the contact layer having conductivity;

An interposer layer stacked on the contact layer and having a plurality of openings;

A first probe inserted into an opening formed in the interposer layer, the first probe having one end in contact with the contact layer;

A second probe having one end positioned in contact with an upper portion of the interposer layer; And

A load board in contact with the other ends of the first probe and the second probe and fixing the first probe and the second probe,

The interposer layer,

And short ends of the first probe and the second probe.
The method of claim 1, wherein the first probe and the second probe,

A barrel portion forming a body of each of the first probe and the second probe;

A probe part inserted into the barrel part to form one end (the probe part of the first probe is in contact with the contact layer, the probe part of the second probe is in contact with an upper portion of the interposer layer, and the interposer layer is Shorting the probe portion of the first probe and the probe portion of the second probe); And

And a contact part inserted into the barrel part to form a second end of the first probe and the second probe, respectively, and to contact the load board.
The method of claim 2, wherein the barrel portion,

Probe device comprising an elastic member having a conductivity therein.
The probe device of claim 3, wherein the elastic member is a spring.
The method of claim 1, wherein the contact layer,

The contact portion of the first probe is made of a conductive rubber,

When one end of the first probe presses the contact layer and contacts a terminal of the device,

And maintain an electrical connection between one end of the first probe and the terminal of the device.
The method of claim 1, wherein the probe device,

And a mask board stacked on the interposer layer and having a plurality of openings formed therein to insert the first probe and the second probe to fix positions of the first probe and the second probe. Probe device characterized in that.