WO2014208215A1 - Esd保護装置 - Google Patents
Esd保護装置 Download PDFInfo
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- WO2014208215A1 WO2014208215A1 PCT/JP2014/063166 JP2014063166W WO2014208215A1 WO 2014208215 A1 WO2014208215 A1 WO 2014208215A1 JP 2014063166 W JP2014063166 W JP 2014063166W WO 2014208215 A1 WO2014208215 A1 WO 2014208215A1
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- WIPO (PCT)
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- insulating layer
- discharge
- esd protection
- protection device
- via conductor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T1/00—Details of spark gaps
- H01T1/20—Means for starting arc or facilitating ignition of spark gap
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
- H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0254—High voltage adaptations; Electrical insulation details; Overvoltage or electrostatic discharge protection ; Arrangements for regulating voltages or for using plural voltages
- H05K1/0257—Overvoltage protection
- H05K1/026—Spark gaps
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4069—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in organic insulating substrates
Definitions
- ESD Electro-Static Discharge.
- ESD is a phenomenon in which intense discharge occurs when a charged conductive object, such as a human body, comes into contact with or sufficiently approaches another conductive object.
- the “ESD protection device” is a device for releasing a charge to GND when electrostatic discharge occurs and protecting a circuit.
- ESD protection devices are widely used to protect electronic devices from ESD, that is, electrostatic discharge.
- FIG. A circuit to be protected (hereinafter referred to as “protected circuit”) 502 and a terminal 503 are electrically connected.
- the protected circuit 502 is, for example, an IC (Integrated Circuit).
- the terminal 503 means a portion where a conductor is exposed to the outside in a connector or the like.
- the ESD protection device 501 is connected to the end of the wiring that branches from the middle of the wiring that connects the protected circuit 502 and the terminal 503. Each of the ESD protection device 501 and the protected circuit 502 is grounded. As shown in FIG. 13, current does not flow between the discharge electrodes inside the ESD protection device 501 in the normal state.
- Patent Document 1 a so-called “overvoltage protection component”, a cavity as a discharge portion is formed inside a base made of an insulator, and the discharge electrodes are formed inside the cavity.
- the discharge electrode is formed by printing, plating, or the like.
- Patent Document 2 describes a structure in which internal electrodes are opposed to each other inside an insulating ceramic sintered body, referred to as a “chip surge absorbing element”. A discharge space is formed so as to be sandwiched between the internal electrodes. Patent Document 2 describes that the discharge space is filled with carbon paste by screen printing and burned off during sintering.
- JP 2009-238563 A Japanese Patent Laid-Open No. 2001-217057
- Patent Document 1 since the discharge electrode is formed by printing, plating, or the like, the discharge electrode is a thin conductive film attached to the surface of the insulator. At the time of discharge, electrons collide with the discharge electrode, but the discharge electrode may be peeled off by the impact of the collision of the electrons.
- an opening is provided in an insulating sheet, the opening is filled with an acrylic resin as a discharge part forming material, and the acrylic resin evaporates in a firing step, thereby obtaining a cavity. Since the cavities are formed in this way and the discharge electrodes facing each other across the cavities are formed by printing or the like, the gap between the discharge electrodes can be reduced, that is, the gap can be sufficiently narrowed. It wasn't.
- the chip-type surge absorbing element is manufactured by a printing method or a green sheet method, and the gap between the discharge electrodes cannot be sufficiently narrowed.
- an object of the present invention is to provide an ESD protection device that can further narrow the gap between the discharge electrodes and can reduce the problem of peeling of the discharge electrodes.
- an ESD protection device includes a first insulating layer, a second insulating layer overlaid on the first insulating layer, and a first penetrating through the first insulating layer in the thickness direction.
- a via gap, a discharge gap provided between the first insulating layer and the second insulating layer so as to be in contact with the first via conductor, and a side opposite to the discharge gap of the first insulating layer The first via disposed on the surface of the first insulating layer and disposed on any surface of the second insulating layer and at least sandwiching the discharge gap portion.
- a second wiring including a portion facing the conductor.
- the gap between the discharge electrodes can be further narrowed, and the problem of peeling of the discharge electrodes can be reduced.
- a discharge portion is formed with one layer of the insulating sheet as a cavity.
- the thickness of the cavity is substantially determined by the thickness of the insulating sheet, and a sufficient gap cannot be achieved.
- the thickness of the film formed by printing can be controlled by the solid content of the paste and the discharge amount of the paste.
- Embodiment 1 With reference to FIG. 1, the ESD protection apparatus in Embodiment 1 based on this invention is demonstrated.
- the ESD protection apparatus 101 includes a first insulating layer 2a, a second insulating layer 2b overlaid on the first insulating layer 2a, and the first insulating layer 2a in the thickness direction.
- the first insulating layer 2a and the second insulating layer 2b are, for example, ceramic layers.
- the discharge gap portion 10 includes a discharge auxiliary electrode 4 and a cavity 5.
- the structure of a discharge gap part can be created by printing of a paste so that it may mention later.
- the thickness of the discharge gap can be controlled by the thickness of the layer to be printed.
- the first via conductor 6a and the second via conductor 6b correspond to discharge electrodes, respectively.
- the form of the discharge electrode is not limited to this, and it is sufficient that the discharge electrodes have a structure facing each other with the discharge gap portion 10 interposed therebetween.
- the ESD protection device 101 illustrated here has a structure in which a first via conductor 6a as one discharge electrode and a second via conductor 6b as the other discharge electrode face each other across the discharge gap portion 10. It has become. Details of the discharge gap 10 will be described later.
- the first via conductor 6a serving as the discharge electrode can be formed by a method of filling the hole with a conductive paste instead of printing, the first via conductor 6a has a sufficient thickness. Therefore, unlike the configuration in which a thin film printed as a discharge electrode is attached, the discharge electrode is not easily peeled off even if the discharge is repeated.
- the first via conductor 6a preferably has a tapered shape in which the side close to the discharge gap portion 10 is narrowed.
- the charge density can be increased on the side closer to the discharge gap portion 10 in the first via conductor 6a, and as a result, discharge between the discharge electrodes is likely to occur.
- peeling of the discharge electrode is further suppressed by the direction of the taper shape.
- the second insulating layer 2b penetrates in the thickness direction, one end in the thickness direction is electrically connected to the second wiring 7b, and the other end is in contact with the discharge gap portion 10.
- a second via conductor 6b is provided, the second via conductor 6b faces the first via conductor 6a via the discharge gap portion 10, and the second wiring 7b is opposite to the discharge gap portion 10 of the second insulating layer 2b. It is preferable to arrange on the side surface. By adopting this configuration, it is possible to obtain a structure in which the discharge gap portion 10 is sandwiched between two via conductors serving as discharge electrodes, so that discharge between the discharge electrodes is likely to occur.
- the second via conductor 6b preferably has a tapered shape in which the side close to the discharge gap portion 10 is narrowed.
- the charge density can be increased on the side closer to the discharge gap portion 10 in the second via conductor 6b, and as a result, discharge between the discharge electrodes is likely to occur.
- the discharge auxiliary electrode 4 is disposed in the discharge gap portion 10. This is because by adopting this configuration, discharge is easily generated by the action of the discharge auxiliary electrode 4. Further details of the discharge gap 10 will be described in the description of the manufacturing method that follows.
- the discharge gap portion 10 preferably includes a structure in which the discharge auxiliary electrode 4 surrounds the cavity 5 around the cavity 5 when viewed in plan. Moreover, it is preferable that the discharge auxiliary electrode 4 contains semiconductor ceramic particles. Furthermore, it is preferable that the discharge auxiliary electrode 4 includes conductive particles coated with an insulating material. This is because by adopting these configurations, discharge is likely to occur in the discharge gap portion 10.
- FIG. 2 shows a state before the ESD protection device 101 is stacked.
- the ESD protection device 101 is manufactured by stacking a plurality of insulator sheets.
- the insulator sheet is, for example, a ceramic sheet, but is not limited to a ceramic sheet, and may be other types of insulator sheets.
- a case where the insulating layer included in the ESD protection apparatus 101 is a ceramic layer will be described as an example.
- a hole is made in the ceramic sheet to be the first insulating layer 2a and filled with the conductive paste 16a.
- the conductive paste 16a is to be the first via conductor 6a later.
- a hole is made in the ceramic sheet to be the second insulating layer 2b and filled with the conductive paste 16b.
- the direction of the taper shape of the hole to be formed is determined depending on which surface the hole is made with respect to the ceramic sheet. Therefore, the taper shape of the via conductor to be finally formed depends on which surface the hole is formed. The direction can be appropriately selected.
- the conductive pastes 16a and 16b are, for example, metal pastes.
- the discharge auxiliary electrode material 14 is printed on the upper surface of the first insulating layer 2a.
- the cavity forming paste 15 is printed on the lower surface of the second insulating layer 2b.
- the 1st insulating layer 2a and the 2nd insulating layer 2b will be in the state shown by FIG.
- the discharge auxiliary electrode material 14 is printed in a ring shape, and the cavity forming paste 15 is printed in a position so as to enter the inside of the ring of the discharge auxiliary electrode material 14.
- the discharge auxiliary electrode material 14 is a material that can form the discharge auxiliary electrode by firing. This may be, for example, a mixture of insulating ceramic powder and semiconductor ceramic powder. Alternatively, the discharge auxiliary electrode material 14 may be conductive particles coated with an insulating material. In the case of “conductive particles coated with an insulating material”, the “coating” may be a complete coating or an incomplete coating. The coating may have a configuration in which very small insulating particles are attached to the surface of the conductive particles. Alternatively, particles having a so-called core-shell structure in which conductive particles are housed in an insulating film may be used. The “conductive particles” may be Cu particles, for example.
- particles of a conductive material such as Au, Al, Ag, and Ni can be used as appropriate.
- the “insulating material” for covering the conductive particles may be, for example, Al 2 O 3 .
- the “semiconductor ceramic powder” for example, a ceramic powder made of a semiconductor ceramic such as a carbide such as SiC or an oxide of a transition metal such as MnO, NiO, CoO, or CuO can be preferably used.
- the semiconductor ceramic powder may be, for example, SiC particles coated with SiO 2 .
- the discharge auxiliary electrode material 14 may be a mixture of semiconductor ceramic powder and conductive particles coated with an insulating material.
- the cavity forming paste 15 is a material that can disappear at the firing temperature. This may be a material containing, as a main material, resin beads that can disappear at the firing temperature, for example. Examples of the resin that satisfies such conditions include acrylic resin and polystyrene resin.
- the cavity forming paste 15 can be obtained by mixing these synthetic resin beads with a binder resin, a solvent or the like as required.
- the main material of the cavity forming paste 15 is not limited to resin. Any material other than a resin may be used as long as it is a solid material that can disappear at the firing temperature. For example, a wax having a certain degree of hardness may be used. Further, the main material of the cavity forming paste 15 is not limited to a bead-like material. For example, a columnar resin material can be used, and the shape is not limited.
- an insulating layer 2c is overlaid on the lower side of the first insulating layer 2a.
- An insulating layer 2d is overlaid on the second insulating layer 2b.
- the insulating layers 2c and 2d are also ceramic sheets like the first insulating layer 2a and the second insulating layer 2b.
- a conductive paste layer 17a to be the first wiring 7a later is formed on the upper surface of the insulating layer 2c.
- a conductive paste layer 17b to be the second wiring 7b later is formed on the lower surface of the insulating layer 2d.
- the conductive paste layers 17a and 17b can be formed by printing a conductive paste on the surface of the insulating layer.
- the ESD protection device is manufactured by laminating a total of four ceramic sheets, but the total number of layers is not limited to this.
- the insulating layer 2c, the first insulating layer 2a, the second insulating layer 2b, and the insulating layer 2d are laminated in order from the bottom, and these are integrally fired. As a result, the whole is integrated, and the ESD protection apparatus 101 as shown in FIG. 1 can be obtained.
- the discharge auxiliary electrode material 14 becomes the discharge auxiliary electrode 4, and the cavity forming paste 15 disappears and becomes the cavity 5.
- the conductive paste layer 17a becomes the first wiring 7a
- the conductive paste layer 17b becomes the second wiring 7b.
- Embodiment 2 With reference to FIG. 3, the ESD protection apparatus in Embodiment 2 based on this invention is demonstrated.
- the ESD protection apparatus 102 in the present embodiment has basically the same configuration as the ESD protection apparatus 101 described in the first embodiment.
- the cavity 5 has a shape that becomes narrower as it goes downward, but in this embodiment, the cavity 5 has a shape that becomes thinner as it goes upward. It has become.
- the shape of the discharge auxiliary electrode 4 is slightly different from that of the first embodiment.
- the discharge gap portion 10 has a structure in which the discharge auxiliary electrode 4 surrounds the cavity 5 around the cavity 5 when seen in a plan view.
- FIG. 4 shows a state before the ESD protection device 102 in this embodiment is stacked.
- the material to be the discharge gap 10 is not printed on separate surfaces, but printed on one surface. is doing. That is, both the discharge auxiliary electrode material 14 and the cavity forming paste 15 are printed on the upper surface of the first insulating layer 2a.
- the cavity forming paste 15 is first printed at the center of the upper surface of the first insulating layer 2a corresponding to the upper surface of the conductive paste 16a as viewed in plan, and then the annular shape surrounding the cavity forming paste 15 is obtained.
- a discharge auxiliary electrode material 14 is printed on the substrate.
- the ESD protection device 102 as shown in FIG. 3 can be obtained by preparing each insulating layer, laminating them, and firing them integrally.
- Embodiment 3 With reference to FIG. 5, the ESD protection apparatus in Embodiment 3 based on this invention is demonstrated.
- the ESD protection device 103 in the present embodiment has basically the same configuration as the ESD protection device 102 described in the second embodiment.
- the second via conductor 6b provided in the second insulating layer 2b has a tapered shape in which the second via conductor 6b becomes thinner as it goes upward. That is, the second via conductor 6b has a tapered shape in which the side close to the discharge gap portion 10 is thick.
- the charge concentration degree at the end of the second via conductor 6b on the discharge gap portion 10 side is inferior to that in the second embodiment, but in other points, the embodiment of the present invention. A certain effect can be obtained.
- the ESD protection device 103 in this embodiment can be manufactured by stacking a plurality of insulating layers as shown in FIG.
- the direction of the tapered shape can be made uniform between the first via conductor 6a of the first insulating layer 2a and the second via conductor 6b of the second insulating layer 2b. Accordingly, it is not necessary to invert one of the insulating layers at the time of stacking, so that the stacking operation is easy.
- Embodiment 4 With reference to FIG. 7, the ESD protection apparatus in Embodiment 4 based on this invention is demonstrated.
- the ESD protection device 104 in the present embodiment has basically the same configuration as the ESD protection device 101 described in the first embodiment. However, the entire discharge gap 10 is the discharge auxiliary electrode 4.
- the gap between the discharge electrodes can be further narrowed, and the problem of peeling of the discharge electrodes can be reduced.
- the configuration as in the present embodiment can be obtained by printing a sufficient amount of the discharge auxiliary electrode material 14 on the upper surface of the first insulating layer 2a before lamination and not printing the cavity forming paste.
- the discharge auxiliary electrode material 14 may be printed on the lower surface of the second insulating layer 2b instead of the upper surface of the first insulating layer 2a. Or it is good also as printing on both the upper surface of the 1st insulating layer 2a, and the lower surface of the 2nd insulating layer 2b.
- the discharge gap portion 10 has a discharge auxiliary portion in the discharge gap portion 10 as shown in the first embodiment, rather than the configuration in which the entire discharge gap portion 10 is the discharge auxiliary electrode 4.
- the configuration in which both the electrode 4 and the cavity 5 are provided is preferable because the load applied to the discharge auxiliary electrode 4 can be reduced.
- Embodiment 5 With reference to FIG. 8, the ESD protection apparatus in Embodiment 5 based on this invention is demonstrated.
- the ESD protection apparatus 105 in the present embodiment has basically the same configuration as the ESD protection apparatus 101 described in the first embodiment. However, the entire discharge gap 10 is a cavity 5. As shown in the present embodiment, the discharge gap portion 10 may be the cavity 5.
- the gap between the discharge electrodes can be further narrowed, and the problem of peeling of the discharge electrodes can be reduced. It is preferable to provide the auxiliary discharge electrode 4 as in the first embodiment because discharge is more likely to occur and the discharge start voltage can be lowered. However, the present embodiment also provides a temporary effect of the present invention. be able to.
- the configuration as in the present embodiment can be obtained by printing a sufficient amount of the cavity forming paste 15 on the upper surface of the first insulating layer 2a before lamination and leaving the discharge auxiliary electrode material unprinted.
- the cavity forming paste 15 may be printed on the lower surface of the second insulating layer 2b instead of the upper surface of the first insulating layer 2a. Or it is good also as printing on both the upper surface of the 1st insulating layer 2a, and the lower surface of the 2nd insulating layer 2b.
- the structure in which the first via conductor 6a and the second via conductor 6b face each other via the discharge gap portion 10 is the first insulating layer 2a and the second insulating layer. It is preferable that they are arranged so as to be aligned in the thickness direction within the thickness of two insulating layers including 2b. By adopting this configuration, it is possible to narrow the gap while suppressing the thickness of the entire apparatus. Furthermore, it is preferable that the discharge auxiliary electrode 4 is disposed in the discharge gap portion 10 in this case. According to the present invention, even if the discharge auxiliary electrode is included, it can be accommodated within the thickness of two insulating layers.
- Embodiment 6 With reference to FIG. 9, the ESD protection apparatus in Embodiment 6 based on this invention is demonstrated.
- the ESD protection apparatus 106 includes a first insulating layer 2a, a second insulating layer 2b overlaid on the first insulating layer 2a, and the first insulating layer 2a in the thickness direction.
- the second wiring 7b is “arranged on any surface of the second insulating layer 2b” as described in the first to fifth embodiments so as to penetrate the second insulating layer 2b.
- the second wiring 7b may be on the upper surface of the second insulating layer 2b, but the second via conductor 6b does not exist in the second insulating layer 2b as shown in the present embodiment.
- the second wiring 7b is on the lower surface of the second insulating layer 2b. That is, at least in the present embodiment, the second wiring 7b is disposed on the lower surface of the second insulating layer 2b.
- the first via conductor 6a and the second wiring 7b each correspond to a discharge electrode.
- the ESD protection device 106 illustrated here has a structure in which the first via conductor 6a as one discharge electrode and the second wiring 7b as the other discharge electrode face each other with the discharge gap portion 10 interposed therebetween. ing.
- the gap between the discharge electrodes can be further narrowed, and the problem of peeling of the discharge electrodes can be reduced.
- the second via conductor 6b is provided so as to penetrate the second insulating layer 2b, and this is used as a discharge electrode, and the via conductors are opposed to each other. Since the electric charges are easily concentrated at the tip using the shape protruding in the thickness direction, discharge is likely to occur. That is, it is preferable to do so because it is easy to lower the starting voltage. However, even if the via conductor exists only on one side of the discharge gap portion as shown in the present embodiment, a certain degree of effect as the present invention can be obtained.
- the ESD protection device 106 in this embodiment can be manufactured by stacking a plurality of insulating layers as shown in FIG. In this case, it is not necessary to make holes or fill the conductive paste with the second insulating layer 2b. Therefore, it is advantageous in that the number of steps can be reduced.
- Sample I is the ESD protection apparatus 101 shown in the first embodiment.
- Sample II is the ESD protection apparatus 102 shown in the second embodiment.
- Sample III is the ESD protection apparatus 102 shown in the third embodiment.
- Sample IV is the ESD protection device 106 shown in the sixth embodiment.
- Sample V is an ESD protection device based on the prior art, and is the ESD protection device 100 shown in FIG.
- the ESD protection device 100 is a laminate of ceramic layers as insulating layers, and the ESD protection device 100 includes a first wiring 7a and a second wiring 7b.
- the leading end of the first wiring 7 a and the leading end of the second wiring 7 b are opposed to each other through the internal space of the through hole 9.
- the structure shown in FIG. 11 was obtained by laminating insulating layers as shown in FIG. That is, the insulating layer 2f in which the through-hole 9 is formed is prepared, and is arranged so that the insulating layer 2f is sandwiched between the insulating layers 2c and 2d on which the conductive pastes 17a and 17b are printed, respectively. Furthermore, an insulating layer 2e on which nothing was formed was stacked on the upper side of the insulating layer 2d, and a total of these four layers were integrally fired. Thus, the ESD protection device 100 shown in FIG. 11
- a voltage of 8 kV was applied by contact discharge to examine whether or not discharge occurred between the discharge electrodes of the sample. Whether or not a discharge has occurred between the discharge electrodes of the sample can be determined by whether or not a voltage is applied to the protected circuit.
- the degree of the discharge start voltage between the discharge electrodes of the sample can be determined by the peak voltage detected by the protected circuit. The smaller the peak voltage detected by the protected circuit, the better the function of the sample.
- the evaluation results were displayed as follows. Those having a peak voltage of less than 350 V are ranked “A” as being particularly good.
- a peak voltage of 350V or more and less than 500V is ranked as “B” as good.
- Samples I to III had particularly good discharge response in the initial state. Samples I and II were also particularly good at repeated resistance. Therefore, the samples I and II were evaluated as “excellent”.
- Sample III had particularly good discharge responsiveness in the initial state, but repeated resistance was inferior to Samples I and II. Therefore, the overall judgment of Sample III was “good”. Sample III can be said to be superior to samples I and II.
- the sample IV is “good” in comprehensive judgment and is inferior to the samples I to III, but is superior to the sample V based on the prior art. In this case as well, the effect of the present invention is obtained to some extent. It can be said that.
- Sample V had a discharge responsiveness in an initial state of less than 600 V, but had a poor repeatability, and the overall judgment was “impossible”.
- the present invention can be used for an ESD protection device.
Abstract
Description
(実施の形態1)
図1を参照して、本発明に基づく実施の形態1におけるESD保護装置について説明する。
図3を参照して、本発明に基づく実施の形態2におけるESD保護装置について説明する。
図5を参照して、本発明に基づく実施の形態3におけるESD保護装置について説明する。
図7を参照して、本発明に基づく実施の形態4におけるESD保護装置について説明する。
図8を参照して、本発明に基づく実施の形態5におけるESD保護装置について説明する。
図9を参照して、本発明に基づく実施の形態6におけるESD保護装置について説明する。
ESDに対する放電応答性を調べるために、本発明または従来技術に基づく複数通りのESD保護装置を試料I~Vとして用意し、IEC(International Electrotechnical Commission)の規格の一種であるIEC61000-4-2に定められている静電気放電イミュニティ試験を行なった。
試料IIは、実施の形態2で示したESD保護装置102である。
試料IVは、実施の形態6で示したESD保護装置106である。
ピーク電圧が350V未満のものを、特に良好であるとして「A」とランク付けする。
ピーク電圧が600Vを超えるものを、不良であるとして「D」とランク付けする。
Claims (11)
- 第1絶縁層と、
前記第1絶縁層に重ねられた第2絶縁層と、
前記第1絶縁層を厚み方向に貫通する第1ビア導体と、
前記第1絶縁層と前記第2絶縁層との間において前記第1ビア導体に接するように設けられた放電ギャップ部と、
前記第1絶縁層の前記放電ギャップ部とは反対側の面に配置され、前記第1ビア導体に電気的に接続されている第1配線と、
前記第2絶縁層のいずれかの面に配置され、少なくとも前記放電ギャップ部を挟んで前記第1ビア導体に対向する部分を含む第2配線とを備える、ESD保護装置。 - 前記第1ビア導体は、前記放電ギャップ部に近い側が細くなったテーパ形状を有する、請求項1に記載のESD保護装置。
- 前記第2絶縁層を厚み方向に貫通し、厚み方向の一方の端が前記第2配線に電気的に接続され、他方の端が前記放電ギャップ部に接する第2ビア導体を備え、前記第2ビア導体は、前記放電ギャップ部を介して第1ビア導体に対向し、前記第2配線は、前記第2絶縁層の前記放電ギャップ部とは反対側の面に配置される、請求項1または2に記載のESD保護装置。
- 前記第2ビア導体は、前記放電ギャップ部に近い側が細くなったテーパ形状を有する、請求項3に記載のESD保護装置。
- 前記放電ギャップ部が空洞である、請求項1から4のいずれかに記載のESD保護装置。
- 前記放電ギャップ部には、放電補助電極が配置されている、請求項1から4のいずれかに記載のESD保護装置。
- 前記放電ギャップ部は、平面的に見て空洞を中心としてその周囲を放電補助電極が取り囲んだ構造を含む、請求項1から4のいずれかに記載のESD保護装置。
- 前記放電補助電極は、半導体セラミック粒子を含む、請求項6または7に記載のESD保護装置。
- 前記放電補助電極は、絶縁性材料で被覆された導電性粒子を含む、請求項6または7に記載のESD保護装置。
- 前記第1ビア導体と前記第2ビア導体とが前記放電ギャップ部を介して互いに対向する構造は、前記第1絶縁層と前記第2絶縁層とを合わせた絶縁層2層分の厚みの中に、厚み方向に並ぶようにして収まっている、請求項3または4に記載のESD保護装置。
- 前記放電ギャップ部には、放電補助電極が配置されている、請求項10に記載のESD保護装置。
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CN201480035868.3A CN105324891B (zh) | 2013-06-24 | 2014-05-19 | Esd保护装置 |
US14/950,565 US9826611B2 (en) | 2013-06-24 | 2015-11-24 | ESD protection device |
US15/784,280 US10219362B2 (en) | 2013-06-24 | 2017-10-16 | ESD protection device |
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JP2015015090A (ja) * | 2013-07-03 | 2015-01-22 | 株式会社村田製作所 | Esd保護装置 |
WO2016129317A1 (ja) * | 2015-02-10 | 2016-08-18 | 株式会社村田製作所 | 静電気放電保護構造体およびその製造方法 |
WO2016208383A1 (ja) * | 2015-06-22 | 2016-12-29 | 株式会社村田製作所 | Esd保護装置およびesd保護装置の製造方法 |
JPWO2016203976A1 (ja) * | 2015-06-15 | 2017-12-21 | 株式会社村田製作所 | Esd保護装置 |
JPWO2017018085A1 (ja) * | 2015-07-28 | 2018-01-11 | 株式会社村田製作所 | Esd保護デバイス |
US10403584B2 (en) * | 2015-07-01 | 2019-09-03 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing the same |
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CN108695685A (zh) * | 2017-03-29 | 2018-10-23 | 卓英社有限公司 | 芯片型过电压吸收器 |
CN114243455B (zh) * | 2021-12-08 | 2023-07-04 | 北京纳米能源与系统研究所 | 一种应用于能量管理电路的薄膜放电开关 |
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US9826611B2 (en) | 2017-11-21 |
US10219362B2 (en) | 2019-02-26 |
CN107394587A (zh) | 2017-11-24 |
CN107394587B (zh) | 2019-05-10 |
CN105324891B (zh) | 2017-08-08 |
CN107257087B (zh) | 2020-01-03 |
JP5971416B2 (ja) | 2016-08-17 |
CN107257087A (zh) | 2017-10-17 |
CN105324891A (zh) | 2016-02-10 |
JPWO2014208215A1 (ja) | 2017-02-23 |
US20180049302A1 (en) | 2018-02-15 |
US20160081172A1 (en) | 2016-03-17 |
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